WO2018196752A1 - 一种带有冷却装置的真空镀膜腔体 - Google Patents

一种带有冷却装置的真空镀膜腔体 Download PDF

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Publication number
WO2018196752A1
WO2018196752A1 PCT/CN2018/084287 CN2018084287W WO2018196752A1 WO 2018196752 A1 WO2018196752 A1 WO 2018196752A1 CN 2018084287 W CN2018084287 W CN 2018084287W WO 2018196752 A1 WO2018196752 A1 WO 2018196752A1
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Prior art keywords
water
cooling
cooling device
water pipe
vacuum
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PCT/CN2018/084287
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English (en)
French (fr)
Inventor
杨娜
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君泰创新（北京）科技有限公司
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Publication of WO2018196752A1 publication Critical patent/WO2018196752A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Definitions

  • the invention relates to the field of vacuum coating technology, in particular to a vacuum coating chamber with a cooling device.
  • Vacuum coating refers to the deposition of a certain metal or metal compound into the surface of a material (usually a non-metallic material) in a vacuum environment, which belongs to the physical vapor deposition process. Vacuum coating technology is widely used in electronics, aerospace, packaging, photovoltaic and other technical fields. When vacuum coating is applied to a certain material on a substrate by a vacuum chamber, the substrate needs to be heated at a high temperature due to a deposition reaction or a process requirement. The heating process causes the internal temperature of the vacuum chamber to be too high, and the long-term heating causes the vacuum. The mechanical structure inside the cavity is deformed, thereby invalidating the function of the vacuum chamber.
  • the object of the present invention is to provide a vacuum coating chamber with a cooling device, so that the temperature inside the vacuum chamber is not too high, and the vacuum chamber is prevented from being deformed by heat, thereby prolonging the service life of the vacuum chamber.
  • the present invention provides the following solutions:
  • a vacuum coating chamber with a cooling device comprising a vacuum chamber and a cooling device; the cooling device is installed inside the vacuum chamber; the cooling device comprises an upper water cooling device, a middle water cooling device and a lower water cooling device; The upper water cooling device is in close contact with the upper wall of the vacuum chamber; the middle water cooling device is erected between the left cavity wall and the right cavity wall of the vacuum cavity; the lower water cooling device is closely attached to the The lower portion of the side wall of the vacuum chamber is horizontally distributed along the side wall.
  • the upper water cooling device includes a first cooling water pipe, a first water pipe pressing block and a first heat conducting plate; the first cooling water pipe is in close contact with an upper wall of the vacuum cavity, and the first cooling water pipe a serpentine distribution; the first water tube pressure block is plural, and the plurality of first water tube pressure blocks press the first cooling water pipe from bottom to top; each of the first water tube pressure blocks passes through a screw And being fixedly connected to the upper wall of the vacuum chamber; the first heat conducting plate is fixedly connected to the lower surface of each of the first water tube pressing blocks by screws.
  • the upper wall of the vacuum chamber is provided with a first water inlet through hole and a first water outlet hole; the two ends of the first cooling water pipe are respectively a first water inlet end and a first water outlet end; The first water inlet end is connected to the external cooling water source through the first water inlet through hole; the first water outlet end is connected to the external water outlet pipe through the first water outlet hole.
  • the first water inlet end is sealingly connected to the first water inlet through hole through a sealing device
  • the first water outlet end is sealingly connected to the first water outlet through hole through a sealing device
  • a cavity is disposed in the vacuum chamber, the bracket supports the middle water cooling device in a space of the vacuum cavity;
  • the middle water cooling device includes a second cooling water pipe, a second water pipe pressure block, and a second heat conducting plate;
  • the second cooling water pipe is a plurality of, the plurality of the second cooling water pipes are horizontally arranged on the same horizontal plane, and are disposed between the left side cavity wall and the right side cavity wall of the vacuum cavity body;
  • the second water pipe pressing block presses the second cooling water pipe from top to bottom; the second water pipe pressing block on each of the second cooling water pipes is plural; each of the second water pipe pressures
  • the blocks are fixedly connected to the bracket by screws;
  • the second heat conducting plate is fixedly connected to the upper surface of each of the second water tube clamps by screws.
  • the two ends of the second cooling water pipe are respectively a second water inlet end and a second water outlet end; the second water inlet end is connected to the external cooling water source through the second water inlet hole; The second water outlet end is connected to the external water outlet pipe through the second water outlet through hole; the second water inlet through hole and the second water outlet through hole are both disposed on the sidewall of the vacuum chamber.
  • the second water inlet end is sealingly connected to the second water inlet through hole through a sealing device
  • the second water outlet end is sealingly connected to the second water outlet through hole through a sealing device
  • the lower water cooling device includes a third cooling water pipe, a third water pipe pressing block, and a third heat conducting plate; the third cooling water pipe, the third water pipe pressing block and the third heat conducting plate are sequentially from the outward direction Provided therein; the third cooling water pipe is in close contact with the lower portion of the side wall of the vacuum chamber, and is horizontally distributed along the side wall; the third water pipe pressing block is plural, and the plurality of the third water pipe pressing blocks are The third cooling water pipe is pressed against the side wall by a screw fixedly connected to the side wall of the vacuum chamber; the third heat conducting plate is fixedly connected to each of the third water pipe pressing blocks by screws.
  • the two ends of the third cooling water pipe are respectively a third water inlet end and a third water outlet end; the third water inlet end is connected to the external cooling water source through the third water inlet hole; The three outlet ends are connected to the external outlet pipe through the third outlet passage; the third inlet passage and the third outlet passage are both disposed on the side wall of the vacuum chamber.
  • the third water inlet end is sealingly connected to the third water inlet through hole through a sealing device
  • the third water outlet end is sealingly connected to the third water outlet through hole through a sealing device
  • the present invention discloses the following technical effects: the present invention provides a cooling device in a vacuum coating chamber, and in the vacuum coating process, the temperature of the chamber wall and the internal space of the chamber is reduced by water cooling in real time. It ensures that the temperature inside the vacuum chamber is not too high, avoiding the deformation of the vacuum chamber due to heat, and prolonging the service life of the vacuum chamber.
  • FIG. 1 is a structural view of a device of an embodiment of a vacuum coating chamber with a cooling device according to the present invention
  • Figure 2 is a front elevational view of the upper water cooling device of the embodiment of the vacuum coating chamber with a cooling device of the present invention
  • FIG. 3 is a top plan view of an upper water cooling device of an embodiment of a vacuum coating chamber with a cooling device of the present invention
  • FIG. 4 is an enlarged structural view of the upper water-cooling device of the embodiment of the vacuum coating chamber with a cooling device in close proximity to the upper wall of the vacuum chamber;
  • Figure 5 is a structural view showing the first water inlet end of the embodiment of the vacuum coating chamber with a cooling device in sealing connection with the first water inlet hole;
  • Figure 6 is a front elevational view of the central water cooling device of the vacuum coating chamber embodiment of the present invention with a cooling device;
  • Figure 7 is an enlarged structural view showing a side wall of the vacuum chamber of the embodiment of the vacuum coating chamber with a cooling device in close proximity to the vacuum chamber;
  • Figure 8 is a front elevational view of the lower water cooling device of the embodiment of the vacuum coating chamber with a cooling device of the present invention
  • Figure 9 is an enlarged structural view of the lower water-cooling device of the embodiment of the vacuum coating chamber with a cooling device in close proximity to the side wall of the vacuum chamber.
  • Figure 1 is a block diagram showing the structure of an embodiment of a vacuum coating chamber with a cooling device of the present invention.
  • the vacuum coating chamber includes a vacuum chamber 1 and a cooling device 2; the cooling device 2 is installed inside the vacuum chamber 1; the cooling device 2 includes an upper water cooling device 201 and a middle water cooling device 202. And the lower water cooling device 203; the upper water cooling device 201 is in close contact with the upper wall of the vacuum chamber 1; the vacuum chamber 1 is provided with a bracket 3, and the bracket 3 supports the central water cooling device 202 In the space of the vacuum chamber 1, the middle water cooling device 202 is erected between the left side wall and the right side wall of the vacuum chamber 1; the lower water cooling device 203 is in close contact with the vacuum chamber The lower portion of the side wall of 1 is horizontally distributed along the side wall.
  • the vacuum chamber 1 is in two parts, which are respectively a cavity upper structure and a cavity lower portion, and the cavity upper structure is located above the cavity lower structure, and the cavity upper structure and The cross-sectional area of the lower structure of the cavity is square, and the cross-sectional area of the upper structure of the cavity is larger than the cross-sectional area of the lower structure of the cavity.
  • the upper water cooling device 201 and the middle water cooling device 202 are both located in the upper structure of the cavity, and the lower water cooling device 203 is located in the lower structure of the cavity.
  • the invention provides a cooling device in the vacuum chamber, and in the vacuum coating process, the temperature of the chamber wall and the inner space of the cavity is reduced by water cooling in real time, so that the temperature in the vacuum chamber is not too high, and the vacuum chamber is avoided. Deformed by heat, prolonging the service life of the vacuum chamber.
  • the invention provides a three-layer water-cooling device which is closely distributed to the wall of the vacuum chamber and distributed in the space of the vacuum chamber, thereby not only cooling the cavity wall of the vacuum chamber but also the whole in the vacuum chamber space. The temperature is cooled to achieve a uniform uniform cooling of the temperature of the vacuum chamber.
  • FIG 2 is a front elevational view of the upper water cooling apparatus of the embodiment of the vacuum coating chamber with a cooling device of the present invention.
  • FIG 3 is a top plan view of an upper water cooling device of an embodiment of a vacuum coating chamber with a cooling device of the present invention.
  • FIG 4 is an enlarged structural view of the upper water-cooling device of the embodiment of the vacuum coating chamber with a cooling device in close proximity to the upper wall of the vacuum chamber.
  • the upper water cooling device 201 includes a first cooling water pipe 2011, a first water pipe block 2012 and a first heat conducting plate 2013; the first cooling water pipe 2011 is in close contact with the vacuum chamber
  • the upper wall of the first water pipe block 2012 is plural, and the plurality of first water pipe pressing blocks 2012 press the first cooling water pipe 2011 from bottom to top; the first water pipe pressing block 2012
  • One side of the cavity wall of the vacuum chamber 1 is disposed with a polygonal groove, and the first cooling water pipe 2011 is embedded in the polygonal groove; each of the first water pipe blocks 2012 is screwed with the The upper wall of the vacuum chamber 1 is fixedly connected; the first heat conducting plate 2013 is fixedly connected to the lower surface of each of the first water tube blocks 2012 by screws 4;
  • the first cooling water pipe 2011 has a serpentine distribution; the first cooling water pipe 2011 includes a straight portion and a corner portion; each straight portion is connected end to end with two corner portions, and each corner portion and two The straight portions are connected end to end to form a serpentine shape; the straight portion is pressed by the first water tube block 2012, and is cooled by the first water tube block 2012 and the first heat conducting plate 2013, the corner portion is located at the The edge of the upper wall of the vacuum chamber 1 is directly exposed in the vacuum chamber 1; the area of the first heat conducting plate 2013 is larger than the area covered by the first water tube block 2012, which is smaller than the vacuum chamber The area of the upper wall of the body 1 is such that each of the first water tube blocks 2012 can transfer heat with the first heat conducting plate 2013.
  • the first heat conducting plate 2013 is a metal thin plate
  • the first water pipe pressing block 2012 is a block body made of a heat conductive material.
  • the first cooling water pipe is in close contact with the cavity wall of the vacuum chamber, so that the cavity wall can be directly cooled, and the cooling effect can also be transmitted to the space of the entire vacuum cavity through the first water pipe pressing block and the first heat conducting plate. Internally, cooling of the chamber wall and the cavity space is achieved at the same time.
  • the first water inlet hole 1011 and the first water outlet hole 1012 are disposed on the upper wall of the vacuum chamber 1; the two ends of the first cooling water pipe 2011 are a first water inlet end 2014 and a first water outlet end, respectively. 2015; the first water inlet end 2014 is connected to the external cooling water source through the first water inlet through hole 1011; the first water outlet end 2015 is connected to the external water outlet pipe through the first water outlet through hole 1012;
  • the first water inlet through hole 1011 is disposed on the left side of the upper wall of the vacuum chamber 1, and the first water outlet through hole 1012 is disposed on the right side of the upper wall of the vacuum chamber 1.
  • the structure in which the first water inlet end 2014 is connected to the first water inlet hole 1011 and the structure in which the first water outlet end 2015 is connected to the first water outlet hole 1012 are the same by the sealing device 5, and the first is below.
  • the structure in which the inlet end is sealingly connected to the first inlet through hole will be described as an example.
  • FIG. 5 is a structural view showing the first water inlet end of the embodiment of the vacuum coating chamber with a cooling device in a sealed connection with the first water inlet hole.
  • a sealing water seat 501 is sleeved on the first water inlet end 2014.
  • the sealing water seat 501 is annular, and the interior is seamlessly fitted with the first cooling water pipe 2011, and the exterior and the first A water inlet through hole 1011 is seamlessly connected.
  • One end of the sealing water seat 501 is provided with a fastening baffle 502, and the other end is threaded; the diameter of the fastening baffle 502 is larger than the first water inlet through hole 1011; the fastening baffle 502 is located Inside the vacuum chamber 1, the thread is located outside the vacuum chamber 1; the sealing water seat 501 is connected to a fastener 503 by the thread, and is rotated along the thread by the fastener 503 The fastening baffle 502 is fastened to the inner wall of the vacuum chamber 1 to fix the sealing water seat 501, so as to achieve a sealed connection between the first water inlet end 2014 and the first water inlet hole 1011.
  • Figure 6 is a front elevational view of the central water cooling apparatus of the embodiment of the vacuum coating chamber with a cooling device of the present invention.
  • Fig. 7 is an enlarged structural view showing the side wall of the vacuum chamber of the embodiment of the vacuum coating chamber with a cooling device in close proximity to the side wall of the vacuum chamber.
  • the middle water cooling device 202 includes a second cooling water pipe 2021, a second water pipe block 2022, and a second heat conducting plate 2023.
  • the second cooling water pipe is more than 2021, and the plurality of second pipes
  • the cooling water pipes 2021 are horizontally arranged on the same horizontal plane, and are disposed between the left side wall and the right side wall of the vacuum chamber 1; the second water tube block 2022 presses the second cooling from the top to the bottom a water pipe 2021; a plurality of the second water pipe pressing blocks 2022 on each of the second cooling water pipes 2021; each of the second water pipe pressing blocks 2022 is fixedly connected to the bracket 3 by screws 4; a side of the second water tube block 2022 that is in close contact with the bracket 3 is provided with a polygonal groove, and the second cooling water pipe 2022 is embedded in the polygonal groove; the second heat conducting plate 2023 passes through the screw 4 and each The upper surface of the second water pipe block 2022 is fixedly connected.
  • the second heat conducting plate 2023 is a metal thin plate, and the second water pipe pressing block 2022 is a block body made of a heat conductive material.
  • the cooling effect of the second cooling water pipe is conducted to the space of the entire vacuum chamber through the second water pipe block and the second heat conducting plate, thereby achieving cooling of the cavity space.
  • the two ends of the second cooling water pipe 2021 are respectively a second water inlet end 2024 and a second water outlet end 2025; the second water inlet end 2024 is connected to the external cooling water source through the second water inlet hole 1021; The second water outlet end 2025 is connected to the external water outlet pipe through the second water outlet through hole 1022; the second water inlet through hole 1021 and the second water outlet through hole 1022 are both disposed on the side wall of the vacuum chamber 1 .
  • the second water inlet through hole 1021 and the second water outlet through hole 1022 are both disposed on the left side wall of the vacuum chamber 1 and disposed in the cavity.
  • each of the second cooling water pipes 2021 has a U shape in a horizontal direction.
  • the second water inlet end 2024 is sealingly connected to the second water inlet through hole 1021 through the sealing device 5, and the sealing manner of the second water inlet end 2024 and the second water inlet through hole 1021 is sealed and sealed in FIG.
  • a water inlet end 2014 is sealed in the same manner as the first water inlet through hole 1011.
  • the second water outlet end 2025 is sealingly connected to the second water outlet through hole 1022 through the sealing device 5, and the sealing manner of the second water outlet end 2025 and the second water outlet through hole 1022 is sealed and the first water inlet end in FIG. The seal is sealed in the same manner as the first inlet through hole 1011 in 2014.
  • Figure 8 is a front elevational view of the lower water cooling device of the embodiment of the vacuum coating chamber with a cooling device of the present invention.
  • Figure 9 is an enlarged structural view of the lower water-cooling device of the embodiment of the vacuum coating chamber with a cooling device in close proximity to the side wall of the vacuum chamber.
  • the lower water cooling device 203 includes a third cooling water pipe 2031, a third water pipe block 2032, and a third heat conducting plate 2033; the third cooling water pipe 2031, the third water pipe pressing block 2032, and The third heat conducting plate 2033 is sequentially disposed from the outside to the inside; the third cooling water pipe 2031 is in close contact with the lower portion of the side wall of the vacuum chamber 1 and horizontally distributed along the side wall; the third water pipe pressing block 2032
  • the plurality of third water tube pressing blocks 2032 are fixedly connected to the side wall of the vacuum chamber 1 by screws 4, and the third cooling water tube 2031 is pressed against the side wall;
  • a side of the water tube block 2032 that is in close contact with the cavity wall of the vacuum chamber 1 is provided with a polygonal groove, and the third cooling water pipe 2031 is embedded in the polygonal groove; the third heat conducting plate 2033 is passed through the screw 4 and each The third water tube block 2032 is fixedly connected.
  • the third heat conducting plate 2033 is a metal thin plate, and the third water pipe pressing block 2032 is a block body made of a heat conductive material.
  • the third cooling water pipe is in close contact with the cavity wall of the vacuum chamber, so that the cavity wall can be directly cooled, and the cooling effect can also be transmitted to the entire vacuum cavity through the third water pipe block and the third heat conduction plate. Internally, cooling of the chamber wall and the cavity space is achieved at the same time.
  • the two ends of the third cooling water pipe 2031 are respectively a third water inlet end 2034 and a third water outlet end 2035; the third water inlet end 2034 is connected to the external cooling water source through the third water inlet hole 1031; The third water outlet end 2035 is connected to the external water outlet pipe through the third water outlet through hole 1032; the third water inlet through hole 1031 and the third water outlet through hole 1032 are both disposed on the side wall of the vacuum chamber 1 .
  • the third water inlet through hole 1031 and the third water outlet through hole 1032 are both disposed on the left side wall of the cavity lower structure, and the third cooling water pipe 2031 is horizontally distributed along the side wall.
  • the third water inlet end 2034 is sealingly connected to the third water inlet through hole 1031 through the sealing device 5, and the sealing manner of the third water inlet end 2034 and the third water inlet hole 1031 is sealed and sealed in FIG.
  • a water inlet end 2014 is sealed in the same manner as the first water inlet through hole 1011.
  • the third water outlet end 2035 is sealingly connected to the third water outlet through hole 1032 through the sealing device 5, and the sealing manner of the third water outlet end 2035 and the third water outlet through hole 1032 is sealed and the first water inlet end in FIG. The seal is sealed in the same manner as the first inlet through hole 1011 in 2014.
  • the sealing structure of the present invention allows the cooling water pipe to not affect the vacuum environment of the vacuum chamber when entering and exiting the vacuum chamber.
  • the sealed water seat, fastening baffle and fasteners are used for sealing, so that the sealing device can be seamlessly connected with the vacuum chamber and the cooling water pipe to ensure the sealing effect.
  • the upper water cooling device, the middle water cooling device and the lower water cooling device are both water-cooled by means of independent water supply, so that the cooling rate of the vacuum chamber can be accelerated.
  • the water cooling method is used for cooling, so that the temperature of the vacuum chamber is not too low, and the temperature of the vacuum chamber is maintained at about room temperature, so that the high temperature environment of the coating process is not affected.

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Abstract

一种带有冷却装置的真空镀膜腔体，冷却装置（2）安装于真空腔体（1）内部，冷却装置（2）包括上部水冷装置（201）、中部水冷装置（202）和下部水冷装置（203），上部水冷装置（201）紧贴真空腔体（1）的上壁，中部水冷装置（202）借助支架（3）凌空架设在真空腔体（1）左侧腔壁和右侧腔壁之间，下部水冷装置（203）紧贴真空腔体（1）的侧壁的下部，沿侧壁水平分布。冷却装置（2）避免了真空腔体（1）因受热发生变形，延长真空腔体（1）的使用寿命。

Description

一种带有冷却装置的真空镀膜腔体
本申请基于申请号为CN201710271183.4、申请日为2017年4月24日的中国专利申请提出，并要求该中国专利申请的优先权，该中国专利申请的全部内容在此通过援引纳入本申请。
技术领域
本发明涉及真空镀膜技术领域，特别是涉及一种带有冷却装置的真空镀膜腔体。
背景技术
真空镀膜是指在真空环境下，将某种金属或金属化合物以气相的形式沉积到材料表面(通常是非金属材料)，属于物理气相沉积工艺。真空镀膜技术广泛应用到电子、宇航、包装、光伏等技术领域。当利用真空腔体在基片上对某种材料进行真空镀膜时，往往由于沉积反应或工艺要求，需要对基片进行高温加热，加热过程导致真空腔体内部温度过高，长期受热则会使真空腔体内部的机械结构发生形变，从而使真空腔体的功能失效。
发明内容
本发明的目的是提供一种带有冷却装置的真空镀膜腔体，使得真空腔体内的温度不至于过高，避免真空腔体因受热发生形变，延长真空腔体的使用寿命。
为实现上述目的，本发明提供了如下方案：
一种带有冷却装置的真空镀膜腔体，包括真空腔体和冷却装置；所述冷却装置安装于所述真空腔体内部；所述冷却装置包括上部水冷装置、中部水冷装置和下部水冷装置；所述上部水冷装置紧贴所述真空腔体的上壁；所述中部水冷装置凌空架设在所述真空腔体左侧腔壁和右侧腔壁之间；所述下部水冷装置紧贴所述真空腔体的侧壁的下部，沿所述侧壁水平分布。
可选的，所述上部水冷装置包括第一冷却水管、第一水管压块和第一导热板；所述第一冷却水管紧贴所述真空腔体的上壁，且所述第一冷却水管呈蛇形分布；所述第一水管压块为多个，多个所述第一水管压块从下往上压住所述第一冷却水管；每个所述第一水管压块均通过螺钉与所述真空腔体的上壁固定连接；所述第一导热板通过螺钉与每个所述第一水管压块的下表面固定连接。
可选的，所述真空腔体的上壁上设置有第一进水通孔和第一出水通孔；所述第一冷却水管的两端分别为第一进水端与第一出水端；所述第一进水端穿过所述第一进水通孔与外界冷却水源相连；所述第一出水端穿过所述第一出水通孔与外界出水管相连。
可选的，所述第一进水端通过密封装置与所述第一进水通孔密封连接，所述第一出水 端通过密封装置与所述第一出水通孔密封连接。
可选的，所述真空腔体内设置有一支架，所述支架将所述中部水冷装置支撑在所述真空腔体的空间内；所述中部水冷装置包括第二冷却水管、第二水管压块和第二导热板；所述第二冷却水管为多个，多个所述第二冷却水管水平排列在同一水平面上，架设在所述真空腔体的左侧腔壁和右侧腔壁之间；所述第二水管压块从上向下压住所述第二冷却水管；每个所述第二冷却水管上的所述第二水管压块均为多个；每个所述第二水管压块均通过螺钉与所述支架固定连接；所述第二导热板通过螺钉与每个所述第二水管压块的上表面固定连接。
可选的，所述第二冷却水管的两端分别为第二进水端和第二出水端；所述第二进水端穿过第二进水通孔与外界冷却水源相连；所述第二出水端穿过第二出水通孔与外界出水管相连；所述第二进水通孔和所述第二出水通孔均设置在所述真空腔体的侧壁上。
可选的，所述第二进水端通过密封装置与所述第二进水通孔密封连接，所述第二出水端通过密封装置与所述第二出水通孔密封连接。
可选的，所述下部水冷装置包括第三冷却水管、第三水管压块和第三导热板；所述第三冷却水管、所述第三水管压块和所述第三导热板依次从外向里设置；所述第三冷却水管紧贴所述真空腔体的侧壁的下部，沿所述侧壁水平分布；所述第三水管压块为多个，多个所述第三水管压块通过螺钉与所述真空腔体的侧壁固定连接，将所述第三冷却水管压在所述侧壁上；所述第三导热板通过螺钉与每个所述第三水管压块固定连接。
可选的，所述第三冷却水管的两端分别为第三进水端和第三出水端；所述第三进水端穿过第三进水通孔与外界冷却水源相连；所述第三出水端穿过第三出水通孔与外界出水管相连；所述第三进水通孔和所述第三出水通孔均设置在所述真空腔体的侧壁上。
可选的，所述第三进水端通过密封装置与所述第三进水通孔密封连接，所述第三出水端通过密封装置与所述第三出水通孔密封连接。
根据本发明提供的具体实施例，本发明公开了以下技术效果：本发明在真空镀膜腔体内设置一个冷却装置，在真空镀膜过程中实时通过水冷的方式降低腔室壁和腔体内部空间的温度，保证了真空腔体内的温度不至于过高，避免真空腔体因受热发生形变，延长真空腔体的使用寿命。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动性的前提下，还可以根据这些附图获得其他的附图。
图1为本发明带有冷却装置的真空镀膜腔体实施例的装置结构图；
图2为本发明带有冷却装置的真空镀膜腔体实施例的上部水冷装置的正视图；
图3为本发明带有冷却装置的真空镀膜腔体实施例的上部水冷装置的俯视图；
图4为本发明带有冷却装置的真空镀膜腔体实施例的上部水冷装置紧贴真空腔体的上壁的放大结构图；
图5为本发明带有冷却装置的真空镀膜腔体实施例的第一进水端与第一进水通孔密封连接的结构图；
图6为本发明带有冷却装置的真空镀膜腔体实施例的中部水冷装置的正视图；
图7为本发明带有冷却装置的真空镀膜腔体实施例的中部水冷装置紧贴真空腔体的侧壁的放大结构图；
图8为本发明带有冷却装置的真空镀膜腔体实施例的下部水冷装置的正视图；
图9为本发明带有冷却装置的真空镀膜腔体实施例的下部水冷装置紧贴真空腔体的侧壁的放大结构图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
为使本发明的上述目的、特征和优点能够更加明显易懂，下面结合附图和具体实施方式对本发明作进一步详细的说明。
图1为本发明带有冷却装置的真空镀膜腔体实施例的装置结构图。
参见图1，该真空镀膜腔体，包括真空腔体1和冷却装置2；所述冷却装置2安装于所述真空腔体1内部；所述冷却装置2包括上部水冷装置201、中部水冷装置202和下部水冷装置203；所述上部水冷装置201紧贴所述真空腔体1的上壁；所述真空腔体1内设置有一支架3，所述支架3将所述中部水冷装置202支撑在所述真空腔体1的空间内，使所述中部水冷装置202凌空架设在所述真空腔体1左侧腔壁和右侧腔壁之间；所述下部水冷装置203紧贴所述真空腔体1的侧壁的下部，沿所述侧壁水平分布。
在该实施例中，所述真空腔体1为两部分，分别为腔体上部结构和腔体下部，所述腔体上部结构位于所述腔体下部结构的上方，所述腔体上部结构与所述腔体下部结构的截面均为方形，且所述腔体上部结构的截面积大于所述腔体下部结构的截面积。所述上部水冷装置201和所述中部水冷装置202均位于所述腔体上部结构中，所述下部水冷装置203位于所述腔体下部结构中。
本发明在真空腔体内设置一个冷却装置，在真空镀膜过程中实时通过水冷的方式降低腔室壁和腔体内部空间的温度，保证了真空腔体内的温度不至于过高，避免真空腔体因受热发生形变，延长真空腔体的使用寿命。本发明设置三层水冷装置，既紧贴真空腔体的腔壁分布，又在真空腔体的空间内分布，从而不仅对真空腔体的腔壁进行冷却，还对真空腔 体空间内的整体温度进行冷却，实现了对真空腔体的温度的全面均匀冷却。
图2为本发明带有冷却装置的真空镀膜腔体实施例的上部水冷装置的正视图。
图3为本发明带有冷却装置的真空镀膜腔体实施例的上部水冷装置的俯视图。
图4为本发明带有冷却装置的真空镀膜腔体实施例的上部水冷装置紧贴真空腔体的上壁的放大结构图。
参见图2、图3和图4，所述上部水冷装置201包括第一冷却水管2011、第一水管压块2012和第一导热板2013；所述第一冷却水管2011紧贴所述真空腔体1的上壁，所述第一水管压块2012为多个，多个所述第一水管压块2012从下往上压住所述第一冷却水管2011；所述第一水管压块2012的紧贴所述真空腔体1的腔壁的一面设置有多边形槽，所述第一冷却水管2011嵌在所述多边形槽内；每个所述第一水管压块2012均通过螺钉4与所述真空腔体1的上壁固定连接；所述第一导热板2013通过螺钉4与每个所述第一水管压块2012的下表面固定连接；
所述第一冷却水管2011呈蛇形(蜿蜒)分布；所述第一冷却水管2011包括直线部分和拐角部分；每个直线部分与两个拐角部分首尾相连，且每个拐角部分与两个直线部分首尾相连构成蛇形；所述直线部分被所述第一水管压块2012压住，通过所述第一水管压块2012和所述第一导热板2013进行冷却，所述拐角部分位于所述真空腔体1上壁的边缘且直接暴露在所述真空腔体1中；所述第一导热板2013的面积大于所述第一水管压块2012所覆盖区域的面积，小于所述真空腔体1的上壁的面积，从而能使每个所述第一水管压块2012均能与所述第一导热板2013传递热量。
所述第一导热板2013为金属薄板，所述第一水管压块2012为导热材质制成的块状体。
本发明中第一冷却水管与真空腔体的腔壁紧密接触，从而能够直接对腔壁进行冷却，并且冷却效果还可以通过第一水管压块和第一导热板传导到整个真空腔体的空间内，实现了同时对腔壁和腔体空间的冷却。
所述真空腔体1的上壁上设置有第一进水通孔1011和第一出水通孔1012；所述第一冷却水管2011的两端分别为第一进水端2014与第一出水端2015；所述第一进水端2014穿过所述第一进水通孔1011与外界冷却水源相连；所述第一出水端2015穿过所述第一出水通孔1012与外界出水管相连；所述第一进水通孔1011设置在所述真空腔体1的上壁的左侧，所述第一出水通孔1012设置在所述真空腔体1的上壁的右侧。
第一进水端2014与第一进水通孔1011进行连接的结构和第一出水端2015与第一出水通孔1012进行连接的结构相同，均是通过密封装置5进行连接，下面以第一进水端与第一进水通孔密封连接的结构为例进行说明。
图5为本发明带有冷却装置的真空镀膜腔体实施例的第一进水端与第一进水通孔密封连接的结构图。
参见图5，在所述第一进水端2014上套设一个密封水座501，所述密封水座501为环形，内部与所述第一冷却水管2011无缝贴合，外部与所述第一进水通孔1011无缝连接。 所述密封水座501的一端设置有紧固挡板502，另一端加工有螺纹；所述紧固挡板502的直径大于所述第一进水通孔1011；所述紧固挡板502位于所述真空腔体1内部，所述螺纹位于所述真空腔体1外部；所述密封水座501通过所述螺纹与一紧固件503连接，利用所述紧固件503沿所述螺纹旋转，使所述紧固挡板502紧贴在所述真空腔体1的内壁上，从而固定住所述密封水座501，实现第一进水端2014与第一进水通孔1011的密封连接。
图6为本发明带有冷却装置的真空镀膜腔体实施例的中部水冷装置的正视图。
图7为本发明带有冷却装置的真空镀膜腔体实施例的中部水冷装置紧贴真空腔体的侧壁的放大结构图。
参见图6和图7，所述中部水冷装置202包括第二冷却水管2021、第二水管压块2022和第二导热板2023；所述第二冷却水管为2021多个，多个所述第二冷却水管2021水平排列在同一水平面上，架设在所述真空腔体1的左侧腔壁和右侧腔壁之间；所述第二水管压块2022从上向下压住所述第二冷却水管2021；每个所述第二冷却水管2021上的所述第二水管压块2022均为多个；每个所述第二水管压块2022均通过螺钉4与所述支架3固定连接；所述第二水管压块2022的紧贴所述支架3的一面设置有多边形槽，所述第二冷却水管2022嵌在所述多边形槽内；所述第二导热板2023通过螺钉4与每个所述第二水管压块2022的上表面固定连接。
所述第二导热板2023为金属薄板，所述第二水管压块2022为导热材质制成的块状体。
本发明中第二冷却水管的冷却效果通过第二水管压块和第二导热板传导到整个真空腔体的空间内，实现了对腔体空间的冷却。
所述第二冷却水管2021的两端分别为第二进水端2024和第二出水端2025；所述第二进水端2024穿过第二进水通孔1021与外界冷却水源相连；所述第二出水端2025穿过第二出水通孔1022与外界出水管相连；所述第二进水通孔1021和所述第二出水通孔1022均设置在所述真空腔体1的侧壁上。在本发明的该实施例中，所述第二进水通孔1021和所述第二出水通孔1022均设置在所述真空腔体1的左侧侧壁上，且设置在所述腔体上部结构的下壁上，所述第二进水端2024向下穿过所述第二进水通孔1021，所述第二出水端2025向下穿过所述第二出水通孔1022。且每个所述第二冷却水管2021在水平方向上的形状为U形。
所述第二进水端2024通过密封装置5与所述第二进水通孔1021密封连接，且第二进水端2024与第二进水通孔1021密封连接的密封方式与图5中第一进水端2014与第一进水通孔1011密封连接的密封方式相同。所述第二出水端2025通过密封装置5与所述第二出水通孔1022密封连接，且第二出水端2025与第二出水通孔1022密封连接的密封方式与图5中第一进水端2014与第一进水通孔1011密封连接的密封方式相同。
图8为本发明带有冷却装置的真空镀膜腔体实施例的下部水冷装置的正视图。
图9为本发明带有冷却装置的真空镀膜腔体实施例的下部水冷装置紧贴真空腔体的侧壁的放大结构图。
参见图8和图9，所述下部水冷装置203包括第三冷却水管2031、第三水管压块2032和第三导热板2033；所述第三冷却水管2031、所述第三水管压块2032和所述第三导热板2033依次从外向里设置；所述第三冷却水管2031紧贴所述真空腔体1的侧壁的下部，沿所述侧壁水平分布；所述第三水管压块2032为多个，多个所述第三水管压块2032通过螺钉4与所述真空腔体1的侧壁固定连接，将所述第三冷却水管2031压在所述侧壁上；所述第三水管压块2032的紧贴所述真空腔体1的腔壁的一面设置有多边形槽，所述第三冷却水管2031嵌在所述多边形槽内；所述第三导热板2033通过螺钉4与每个所述第三水管压块2032固定连接。
所述第三导热板2033为金属薄板，所述第三水管压块2032为导热材质制成的块状体。
本发明中第三冷却水管与真空腔体的腔壁紧密接触，从而能够直接对腔壁进行冷却，并且冷却效果还可以通过第三水管压块和第三导热板传导到整个真空腔体的空间内，实现了同时对腔壁和腔体空间的冷却。
所述第三冷却水管2031的两端分别为第三进水端2034和第三出水端2035；所述第三进水端2034穿过第三进水通孔1031与外界冷却水源相连；所述第三出水端2035穿过第三出水通孔1032与外界出水管相连；所述第三进水通孔1031和所述第三出水通孔1032均设置在所述真空腔体1的侧壁上。在本发明的该实施例中，所述第三进水通孔1031和所述第三出水通孔1032均设置在所述腔体下部结构的左侧侧壁上，且所述第三冷却水管2031沿所述侧壁水平分布一圈。在设置时，若所述第三冷却水管2031遇到所述真空腔体1中的结构的阻挡时，通过向上或向下延伸躲避障碍物，然后再继续沿所述真空腔体1的侧壁水平分布。
所述第三进水端2034通过密封装置5与所述第三进水通孔1031密封连接，且第三进水端2034与第三进水通孔1031密封连接的密封方式与图5中第一进水端2014与第一进水通孔1011密封连接的密封方式相同。所述第三出水端2035通过密封装置5与所述第三出水通孔1032密封连接，且第三出水端2035与第三出水通孔1032密封连接的密封方式与图5中第一进水端2014与第一进水通孔1011密封连接的密封方式相同。
本发明的该密封结构使得冷却水管在进出真空腔体时不影响真空腔体的真空环境。采用密封水座、紧固挡板和紧固件进行密封，使得密封装置能够真正与真空腔体和冷却水管无缝连接，保证了密封效果。
本发明的该实施例中，所述上部水冷装置、所述中部水冷装置和所述下部水冷装置均采用独立供水的方式进行水冷，从而能够加快真空腔体的冷却速度。同时本发明中采用水冷的方式进行冷却，不至于使真空腔体的温度过低，保证真空腔体的温度维持在室温左右，从而不会对镀膜工艺的高温环境产生影响。
本说明书中各个实施例采用递进的方式描述，每个实施例重点说明的都是与其他实施例的不同之处，各个实施例之间相同相似部分互相参见即可。
本文中应用了具体个例对本发明的原理及实施方式进行了阐述，以上实施例的说明只 是用于帮助理解本发明的方法及其核心思想；同时，对于本领域的一般技术人员，依据本发明的思想，在具体实施方式及应用范围上均会有改变之处。综上所述，本说明书内容不应理解为对本发明的限制。

Claims (10)

  1. 一种带有冷却装置的真空镀膜腔体，包括真空腔体，其特征在于，还包括：冷却装置；所述冷却装置安装于所述真空腔体内部；所述冷却装置包括上部水冷装置、中部水冷装置和下部水冷装置；所述上部水冷装置紧贴所述真空腔体的上壁；所述中部水冷装置凌空架设在所述真空腔体左侧腔壁和右侧腔壁之间；所述下部水冷装置紧贴所述真空腔体的侧壁的下部，沿所述侧壁水平分布。
  2. 根据权利要求1所述的一种带有冷却装置的真空镀膜腔体，其特征在于，所述上部水冷装置包括第一冷却水管、第一水管压块和第一导热板；所述第一冷却水管紧贴所述真空腔体的上壁，且所述第一冷却水管呈蛇形分布；所述第一水管压块为多个，多个所述第一水管压块从下往上压住所述第一冷却水管；每个所述第一水管压块均通过螺钉与所述真空腔体的上壁固定连接；所述第一导热板通过螺钉与每个所述第一水管压块的下表面固定连接。
  3. 根据权利要求2所述的一种带有冷却装置的真空镀膜腔体，其特征在于，所述真空腔体的上壁上设置有第一进水通孔和第一出水通孔；所述第一冷却水管的两端分别为第一进水端与第一出水端；所述第一进水端穿过所述第一进水通孔与外界冷却水源相连；所述第一出水端穿过所述第一出水通孔与外界出水管相连。
  4. 根据权利要求3所述的一种带有冷却装置的真空镀膜腔体，其特征在于，所述第一进水端通过密封装置与所述第一进水通孔密封连接，所述第一出水端通过密封装置与所述第一出水通孔密封连接。
  5. 根据权利要求1所述的一种带有冷却装置的真空镀膜腔体，其特征在于，所述真空腔体内设置有一支架，所述支架将所述中部水冷装置支撑在所述真空腔体的空间内；所述中部水冷装置包括第二冷却水管、第二水管压块和第二导热板；所述第二冷却水管为多个，多个所述第二冷却水管水平排列在同一水平面上，架设在所述真空腔体的左侧腔壁和右侧腔壁之间；所述第二水管压块从上向下压住所述第二冷却水管；每个所述第二冷却水管上的所述第二水管压块均为多个；每个所述第二水管压块均通过螺钉与所述支架固定连接；所述第二导热板通过螺钉与每个所述第二水管压块的上表面固定连接。
  6. 根据权利要求5所述的一种带有冷却装置的真空镀膜腔体，其特征在于，所述第二冷却水管的两端分别为第二进水端和第二出水端；所述第二进水端穿过第二进水通孔与外界冷却水源相连；所述第二出水端穿过第二出水通孔与外界出水管相连；所述第二进水通孔和所述第二出水通孔均设置在所述真空腔体的侧壁上。
  7. 根据权利要求6所述的一种带有冷却装置的真空镀膜腔体，其特征在于，所述第二进水端通过密封装置与所述第二进水通孔密封连接，所述第二出水端通过密封装置与所述第二出水通孔密封连接。
  8. 根据权利要求1所述的一种带有冷却装置的真空镀膜腔体，其特征在于，所述下 部水冷装置包括第三冷却水管、第三水管压块和第三导热板；所述第三冷却水管、所述第三水管压块和所述第三导热板依次从外向里设置；所述第三冷却水管紧贴所述真空腔体的侧壁的下部，沿所述侧壁水平分布；所述第三水管压块为多个，多个所述第三水管压块通过螺钉与所述真空腔体的侧壁固定连接，将所述第三冷却水管压在所述侧壁上；所述第三导热板通过螺钉与每个所述第三水管压块固定连接。
  9. 根据权利要求8所述的一种带有冷却装置的真空镀膜腔体，其特征在于，所述第三冷却水管的两端分别为第三进水端和第三出水端；所述第三进水端穿过第三进水通孔与外界冷却水源相连；所述第三出水端穿过第三出水通孔与外界出水管相连；所述第三进水通孔和所述第三出水通孔均设置在所述真空腔体的侧壁上。
  10. 根据权利要求9所述的一种带有冷却装置的真空镀膜腔体，其特征在于，所述第三进水端通过密封装置与所述第三进水通孔密封连接，所述第三出水端通过密封装置与所述第三出水通孔密封连接。
PCT/CN2018/084287 2017-04-24 2018-04-24 一种带有冷却装置的真空镀膜腔体 WO2018196752A1 (zh)

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CN109234697B (zh) * 2018-09-30 2020-11-03 佛山科学技术学院 一种真空镀膜用高效冷却装置
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