WO2018189850A1 - Microscope à électrons - Google Patents

Microscope à électrons Download PDF

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Publication number
WO2018189850A1
WO2018189850A1 PCT/JP2017/015072 JP2017015072W WO2018189850A1 WO 2018189850 A1 WO2018189850 A1 WO 2018189850A1 JP 2017015072 W JP2017015072 W JP 2017015072W WO 2018189850 A1 WO2018189850 A1 WO 2018189850A1
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WO
WIPO (PCT)
Prior art keywords
electron microscope
image
objective lens
sample
lens coil
Prior art date
Application number
PCT/JP2017/015072
Other languages
English (en)
Japanese (ja)
Inventor
長沖　功
圭司 田村
孝史 藤井
小林　隆幸
甲子男 影山
勉 和田
大海 三瀬
暁哉 広田
稲田　宏
拓 上ノ内
Original Assignee
株式会社 日立ハイテクノロジーズ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社 日立ハイテクノロジーズ filed Critical 株式会社 日立ハイテクノロジーズ
Priority to PCT/JP2017/015072 priority Critical patent/WO2018189850A1/fr
Publication of WO2018189850A1 publication Critical patent/WO2018189850A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Definitions

  • the present invention relates to an electron microscope.
  • CLEM light-electron correlation microscopy
  • Patent Document 1 describes an apparatus provided with an optical microscope in a transmission electron microscope.
  • the object of the present invention is to provide a constant energy by inverting the polarity of the coil on one side in an objective lens in which coils of the same number of turns are arranged on the upper and lower sides of the sample and pole piece and an auxiliary lens is incorporated in the magnetic path.
  • the objective is to provide an electron microscope that can reduce the sample drift by reducing the magnetic field in the vicinity of the sample and realizing an extremely low magnification of 50 times.
  • the degree of coincidence can be calculated by performing correlation calculation using an overlay technique for matching the optical microscope and the electron microscope image.
  • an embodiment of the present invention is an electron microscope including an electron source for irradiating a sample with an electron beam and a detector for detecting electrons generated from the sample by the electron beam irradiation.
  • an electron microscope comprising an upper objective lens coil and a lower objective lens coil, wherein the polarities of the upper objective lens coil and the lower objective lens coil are reversed.
  • observation efficiency is improved because image observation with less drift can be performed by switching between a 50 ⁇ ultra-low magnification image close to a light microscope image and high-definition observation.
  • FIG. 1 is a schematic configuration diagram of a scanning fluoroscopic electron microscope according to an embodiment of the present invention.
  • On-axis magnetic field and magnetic saturation diagram at objective current value at extremely low magnification according to an embodiment of the present invention The on-axis magnetic field and magnetic saturation diagram when the object polarity is switched at the time of extremely low magnification according to the embodiment of the present invention.
  • the flowchart figure of the seamless function which concerns on embodiment of this invention.
  • the flowchart figure of the seamless function and objective aperture control which concern on embodiment of this invention.
  • GUI image of seamless function according to an embodiment of the present invention The GUI image of the seamless function and objective aperture control which concern on embodiment of this invention.
  • TEM transmission electron microscope
  • SEM scanning electron microscope
  • STEM scanning transmission electron microscope
  • STEM scanning transmission electron microscope
  • FIG. 1 is a schematic configuration diagram of a transmission electron microscope according to an embodiment of the present invention.
  • the electron microscope apparatus shown in this figure includes an electron gun 1, first and second irradiation lens coils 2 and 3, first and second deflection coils (scanning coils) 4 and 5, and an objective lens coil 6.
  • a sample holder 53 for holding the sample 70 (see FIG. 3) is disposed on the optical axis.
  • the objective lens coils 6 and 7 shown in the figure are strong excitation lenses (see FIGS. 3 and 4), and lenses are formed on the upper and lower sides of the sample.
  • FIG. 2 is a diagram showing a GUI displaying an extremely low magnification image related to the present invention in the electron microscope apparatus according to the embodiment of the present invention.
  • a typical electron microscope sample is placed on a 3 mm mesh and placed on a sample holder for observation.
  • the maximum field of view is 2 mm because the surrounding 0.5 mm is pressed by the sample holder.
  • the electron microscope section according to the present embodiment is configured so that the electron gun 1, the converging electron lens formed by the irradiation lens coils 2 and 3, and the electron beam generated by the electron gun 1 are placed on the sample 70 (see FIG. 3).
  • a transmission electron microscope image is formed by the deflection coils 4 and 5 for adjusting the brightness, the sample holder 53 holding the sample 70, the objective lens for imaging the sample, and the objective auxiliary lens 8.
  • the formed transmission electron microscope image is magnified by the intermediate lenses 9 and 10 and the imaging lenses 11 and 12, and is displayed on the fluorescent screen 49 or the TV camera 56.
  • a part of the hardware shown in FIG. 1 such as the sensor 35, HDD 36, monitor controller 38, RAM 45, ROM 46, and image capture interface 48, a recording control device 95 for recording a microscopic image displayed on the monitor 39, etc. Is installed.
  • FIG. 3 is a detailed view of the objective lens, in which the objective lens coils 6 and 7 are arranged vertically symmetrically, and the auxiliary lens 8 is arranged in the magnetic path.
  • LOWMAG extremely low magnification image
  • the value of current that flows through the objective lens when forming a very low magnification image (LOWMAG) is about 1/10 or less of the value of current that flows through the objective lens when forming a high-definition image (ZOOM).
  • FIG. 4 shows an objective lens according to an embodiment of the present invention, in which objective lens coils 6 and 7 are vertically symmetrically arranged with an upper objective lens coil 6 and a lower objective lens coil 7, and an auxiliary lens 8 is provided in the magnetic path. It is arranged.
  • an on-axis magnetic field when the polarity of the objective lens coil 7 is reversed with respect to the objective lens coil 6 is shown. Since a magnetic field for forming a very low magnification image (LOWMAG) can be formed, an extremely low magnification image can be obtained with a small amount of current flowing through the objective lens coils 6 and 7 from which a high definition image (ZOOM) can be obtained. Since there is no difference, the temperature remains constant and sample drift does not occur. The polarity of the upper objective lens coil and the lower objective lens coil are reversed, and the field of view is searched with the magnetic field cancelled, so the field of view does not move even when moving from extremely low magnification observation to high definition observation. The sample can be easily observed.
  • LOWMAG very low
  • the temperature of the coil does not change because the magnetic field around the sample is reduced to such an extent that the electron beam applied to the sample by the auxiliary lens can be collimated and the current value of the lens coil is constant at extremely low magnification and high-definition observation. .
  • the polarity of the upper objective lens coil and the lower objective lens coil may be reversed and controlled by a control unit or the like so as to cancel the magnetic field.
  • FIG. 5 is a flowchart according to the embodiment of the present invention, and uses an extremely low magnification image (LOWMAG) in which the polarity of the objective lens coil in FIG. 4 is reversed.
  • LOWMAG extremely low magnification image
  • ZOOM high-definition image
  • LOWMAG very low-magnification image
  • the control unit or the like may perform control to automatically switch from the high-definition observation mode to the ultra-low magnification observation mode.
  • FIG. 6 is a flowchart according to the embodiment of the present invention, and uses an extremely low magnification image (LOWMAG) in a state where the polarity of the objective lens coil in FIG. 4 is reversed.
  • LOWMAG extremely low magnification image
  • the objective lens coil current is kept constant from ZOOM to LOWMAG, and the objective aperture is automatically output to enable observation of the entire field of view with a minimum magnification of 50.
  • seamless is turned off, it stops at the lowest magnification in ZOOM mode, and the entire field of view can be obtained in the same way as switching to LOW MAG. In this case, it is necessary to manually turn the objective aperture out of the optical axis.
  • control unit controls the objective aperture so that it can control IN / OUT from the optical axis, and the objective aperture is adjusted to automatically switch from the high-definition observation mode to the ultra-low magnification observation mode. It may be configured to perform IN / OUT control.
  • FIG. 7 is a control GUI example according to the embodiment of the present invention, and the operation of FIG. 5 can be performed by checking the Seamless Zoom check box.
  • FIG. 8 is an example of a control GUI according to the embodiment of the present invention, and the operation of FIG. 6 can be performed by checking the checkbox of Seamless ⁇ ⁇ ⁇ ⁇ Zoom and IN / OUT of OBJ.ap.
  • Fig. 9 shows an example of a pneumatic drive objective diaphragm mechanism. It is possible to in / out the objective diaphragm from the optical axis with air.
  • FIG. 10 shows an example in which an optical microscope image is displayed on the electron microscope control GUI in the control GUI example according to the embodiment of the present invention. Since an optical microscope usually has color information, it can be displayed in color on the GUI.
  • FIG. 11 is a flowchart according to the embodiment of the present invention, and obtains magnification data from an optical microscope and performs image composition processing.
  • image enlargement processing is performed, and then magnification data is acquired.
  • the image composition processing loop is executed to acquire the image data in the “TemMap” folder.
  • the size of the acquired image data is calculated and the image size is confirmed.
  • the image size is 10 pixels or more and less than 512 pixels
  • the image position is calculated and combined with the Stageimage area.
  • an image composition processing loop is performed, the Stageimage area is redrawn, and the enlargement process ends.
  • the overlay technique for matching the optical microscope image and the electron microscope image which will be described below, it is possible to automatically calculate the amount of movement of X and Y. You can also.
  • Discrete Fourier images F1 (m, n) and F2 (m, n) of f1 (m, n) and f2 (m, n) are defined by (Equation 1) and (Equation 2), respectively.
  • F2 (u, v) B (u, v) ej ⁇ (u, v)
  • u 0,1,2 ... M-1
  • V 0,1,2, ... N-1
  • a (u, v) and B (u, v) are amplitude spectra
  • ⁇ (u, v) and ⁇ (u, v) are phase spectra.
  • phase correlation if there is parallel movement of an image between two images, the position of the correlation peak is shifted by the amount of movement.
  • a peak occurs at a position of ⁇ G (pixel) from the center of the correlation strength image. For example, if there is a shift of 2 pixels in the X direction between two images, the composite image becomes a two-cycle wave. When this is subjected to inverse Fourier transform, a correlation intensity image is obtained, and a peak is generated at a position shifted by 2 pixels from the center.
  • This ⁇ G (pixel) corresponds to a movement amount on the light receiving surface of the detector, and ⁇ G is converted into a movement amount ⁇ x on the sample surface.
  • the composite image becomes a wave of 1.5 cycles.
  • a ⁇ peak appears at a position shifted by 1.5 pixels from the center of the correlation strength image, but since there is no 1.5 pixel, the value of the ⁇ peak is assigned to the first pixel and the second pixel.
  • the correlation intensity image is a ⁇ peak, the similarity between the two images is evaluated based on the peak height of the correlation intensity image.
  • the control unit of the present embodiment has an image processing function for measuring the movement amount of at least two images, and can measure the movement amount of the optical microscope image and the electron microscope image. .
  • FIG. 12 shows an example in which an optical microscope image is displayed on the electron microscope control GUI in a control GUI example that is an interface according to the embodiment of the present invention. Thereby, it is possible to superimpose the optical microscope image and the electron microscope image and to specify the area at the specified position.
  • FIG. 13 shows an example in which an optical microscope image is displayed on the electron microscope control GUI in the control GUI example according to the embodiment of the present invention. It is possible to superimpose an optical microscope and an electron microscope and to specify an area at a specified position.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

Conventionnellement, afin d'observer la totalité d'un échantillon, le courant de lentille d'objectif est abaissé à 1/6 de la valeur de courant utilisée normalement, réduisant le champ magnétique à proximité de l'échantillon et atteignant un grossissement de 50 fois. Du fait de cela, lorsqu'un grossissement d'observation normalement utilisé est défini, le courant montant est un facteur dans l'apparition d'une dérive d'échantillon. Afin de résoudre le problème, l'invention concerne un microscope électronique comprenant une source d'électrons rayonnant un faisceau d'électrons sur un échantillon, et un détecteur détectant des électrons provenant de l'échantillon en raison du rayonnement par faisceau d'électrons, caractérisé en ce que, dans le microscope électronique, une bobine de lentille d'objectif supérieure et une bobine de lentille d'objectif inférieure sont disposées au-dessus et au-dessous de l'échantillon, les polarités de la bobine de lentille d'objectif supérieure et de la bobine de lentille d'objectif inférieure étant inversées l'une par rapport à l'autre.
PCT/JP2017/015072 2017-04-13 2017-04-13 Microscope à électrons WO2018189850A1 (fr)

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WO2018189850A1 true WO2018189850A1 (fr) 2018-10-18

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Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5757460A (en) * 1980-09-22 1982-04-06 Internatl Precision Inc Electron microscope
JPS57151160A (en) * 1981-03-16 1982-09-18 Internatl Precision Inc Electron lens
JPS58119146A (ja) * 1982-01-11 1983-07-15 Jeol Ltd 電子顕微鏡
JPS59171442A (ja) * 1983-03-17 1984-09-27 Jeol Ltd 電子顕微鏡等の対物レンズ
JPS6063866A (ja) * 1983-09-19 1985-04-12 Hitachi Ltd 電子顕微鏡等の対物レンズ可動絞り装置
JPS6079653A (ja) * 1983-10-06 1985-05-07 Jeol Ltd 電子顕微鏡等の対物レンズ
JPH04324239A (ja) * 1991-04-23 1992-11-13 Jeol Ltd 透過電子顕微鏡における対物レンズ
JPH0992191A (ja) * 1995-09-26 1997-04-04 Hitachi Ltd 電子顕微鏡
JP2000311645A (ja) * 1999-04-28 2000-11-07 Hitachi Ltd 電子顕微鏡
JP2007052972A (ja) * 2005-08-17 2007-03-01 Institute Of Physical & Chemical Research 荷電粒子線装置システム
US20150262784A1 (en) * 2012-09-14 2015-09-17 Delmic B.V. Integrated optical and charged particle inspection apparatus

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5757460A (en) * 1980-09-22 1982-04-06 Internatl Precision Inc Electron microscope
JPS57151160A (en) * 1981-03-16 1982-09-18 Internatl Precision Inc Electron lens
JPS58119146A (ja) * 1982-01-11 1983-07-15 Jeol Ltd 電子顕微鏡
JPS59171442A (ja) * 1983-03-17 1984-09-27 Jeol Ltd 電子顕微鏡等の対物レンズ
JPS6063866A (ja) * 1983-09-19 1985-04-12 Hitachi Ltd 電子顕微鏡等の対物レンズ可動絞り装置
JPS6079653A (ja) * 1983-10-06 1985-05-07 Jeol Ltd 電子顕微鏡等の対物レンズ
JPH04324239A (ja) * 1991-04-23 1992-11-13 Jeol Ltd 透過電子顕微鏡における対物レンズ
JPH0992191A (ja) * 1995-09-26 1997-04-04 Hitachi Ltd 電子顕微鏡
JP2000311645A (ja) * 1999-04-28 2000-11-07 Hitachi Ltd 電子顕微鏡
JP2007052972A (ja) * 2005-08-17 2007-03-01 Institute Of Physical & Chemical Research 荷電粒子線装置システム
US20150262784A1 (en) * 2012-09-14 2015-09-17 Delmic B.V. Integrated optical and charged particle inspection apparatus

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