WO2018177945A1 - Transducteur acoustique comprenant un élément transducteur piézocéramique intégré dans une membrane oscillante - Google Patents

Transducteur acoustique comprenant un élément transducteur piézocéramique intégré dans une membrane oscillante Download PDF

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Publication number
WO2018177945A1
WO2018177945A1 PCT/EP2018/057486 EP2018057486W WO2018177945A1 WO 2018177945 A1 WO2018177945 A1 WO 2018177945A1 EP 2018057486 W EP2018057486 W EP 2018057486W WO 2018177945 A1 WO2018177945 A1 WO 2018177945A1
Authority
WO
WIPO (PCT)
Prior art keywords
transducer
transducer element
membrane
sound
sound transducer
Prior art date
Application number
PCT/EP2018/057486
Other languages
German (de)
English (en)
Inventor
Johannes HENNEBERG
Andre Gerlach
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to EP18713224.6A priority Critical patent/EP3600698A1/fr
Priority to JP2019552621A priority patent/JP6891293B2/ja
Priority to CN201880023317.3A priority patent/CN110475621B/zh
Priority to US16/497,933 priority patent/US11583896B2/en
Publication of WO2018177945A1 publication Critical patent/WO2018177945A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/0666—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface used as a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0651—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element of circular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0655—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element of cylindrical shape
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/004—Mounting transducers, e.g. provided with mechanical moving or orienting device
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/02—Forming enclosures or casings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Definitions

  • Membrane bottom is usually carried out by an adhesive process. This is prone to failure both in the manufacturing process and in operation.
  • a sound transducer which has a resonator with at least one piezoelectric element.
  • the resonator is integrally formed as a diaphragm pot with a membrane and a circumferential surface of the same material.
  • the diaphragm pot is for example made of a polymer material such as polyvinylidene fluoride (PVDF) or a
  • a surge transducer in particular for
  • the sound transducer has a functional group, wherein the functional group has a diaphragm pot and at least one electroacoustic
  • Transducer element comprises.
  • the sound transducer has a housing (5).
  • the diaphragm pot comprises a vibratable membrane and a circumferential wall and at least one electroacoustic transducer element, wherein the transducer element is designed to excite the membrane to oscillate and / or to convert vibrations of the membrane into electrical signals.
  • the diaphragm cup is formed of a plastic material, wherein according to the invention the at least one transducer element, in particular without additional adhesive layer, is integrated into the oscillatable diaphragm, wherein the transducer element is designed as a piezoceramic element.
  • the transducer element has on one or more surfaces electrodes for contacting and control. These can be considered electrically conductive
  • a transducer element integrated into the oscillatable membrane should be understood to mean that the transducer element initially exists as a separate component which is connected to the oscillating diaphragm during formation of the oscillatory diaphragm, for example by an injection molding method or a resin transfer molding method in that the plastic material of the membrane at least partially surrounds the transducer element.
  • the thus formed sensor can be both for receiving and for transmitting sound, in particular
  • An inventively designed transducer can be used for electrical
  • Transducer element is disc-shaped and has a first surface and a first surface opposite the second surface.
  • the transducer element is integrated into the membrane in such a way that the second surface is exposed in the direction of the interior of the diaphragm pot.
  • At least one transducer element is disk-shaped and has a first surface and a second surface opposite the first surface.
  • the transducer element is preferably integrated into the membrane in such a way that the first surface is exposed in the emission direction of the diaphragm pot.
  • the method comprises, in particular, the following steps: a) at least one element designed as a piezoceramic element
  • Transducer element is introduced into a cavity of a plastic processing tool, b) a plastic material is injected into the cavity, wherein the transducer element is at least partially enclosed by the plastic material, whereby a diaphragm pot is formed with a vibratable membrane and a wall, wherein the at least one traveling element in the oscillatory membrane is integrated.
  • Plastic processing tool is introduced.
  • the piezoceramic element is first introduced into the cavity and then the plastic material is injected.
  • the electrical contacting of the piezoceramic element can in particular prior to introduction into the cavity of the
  • Plastic processing tool done, for example by means of soldering, bonding or thermo-compression welding of pins, wires or other electrical conductors.
  • the electrical contacts are doing by suitable Sealing measures protected from wetting with plastic to allow subsequent electrical connections.
  • the manufacturing method according to the invention enables the simple and economical production of a swirl converter, e.g. for one
  • piezoceramic elements as transducer elements.
  • an error-prone adhesive connection for coupling an electro-acoustic or electro-mechanical transducer element can be dispensed with during manufacture, resulting in a simplified build-up process. Since that
  • Transducer element of the transducer thus produced represents. This reliable adhesion leads to a high reproducibility of the
  • FIG. 1 a shows schematically a sound transducer according to a first embodiment of the invention.
  • FIG. 1 b) shows an enlarged view of the functional group of the sound transducer according to FIG. 1 a).
  • FIG. 3 b shows an enlarged view of the functional group of the sound transducer according to FIG. 3 a).
  • Figures 5 a) -c) show enlarged views of a possible embodiment of a transducer element for a sound transducer according to one of the embodiments of the invention shown in Figures 1-4.
  • FIG. 6 shows schematically a flow diagram of a possible embodiment of a method according to the invention
  • the Membrane 8 may be formed, for example, circular or elliptical.
  • the membrane has areas 4 with a reduced wall thickness. Due to the geometric design of these areas, the vibration behavior and the resonant frequency of the transducer are determined.
  • the diaphragm pot 6 is made in one piece in this example. Continues the circulating
  • the sound transducer 1 furthermore has a transducer element 3, which according to the invention is designed as a piezoceramic element and is integrated into the oscillatory membrane 8.
  • the functional group 2 of the transducer 1 according to the first embodiment is shown enlarged.
  • the transducer element 3 is formed in this example as a disc having a first surface 15, a first surface opposite the second surface 13 and a circumferential side surface 14.
  • the transducer element 3 is integrated into the membrane such that the second surface 13 in the direction of the interior 16 of the diaphragm pot 6 is exposed.
  • the transducer element is integrated into the membrane 8 such that both the first surface 15 and the side surface 14 of the
  • Transducer element 3 are completely enclosed by the plastic material of the membrane 8, such that the second surface 13 flush with the
  • Transducer element 3 is formed in this embodiment such that both electrodes are from the same side, i. the same surface, can be contacted electrically.
  • FIG. 5 a) shows the transducer element 3 in plan view of the first surface 15.
  • FIG. 5 b) shows a section through the transducer element 3.
  • FIG. 5 c) shows the transducer element 3 formed as a piezoceramic element in plan view onto the second surface 13.
  • the first surface 15 of the transducer element 3 is covered with an electrode layer 25 which extends over the whole area in this example.
  • the transducer element 3 has a UmWallet réelle 25 'on the side surface 14 by means of which the first electrode 25 via the edge of the piezoceramic element on the second surface 13 is guided, where it forms a contact surface 25 ".
  • the transducer element 3 is integrated into the membrane in such a way that the first surface 15 is exposed in the emission direction 17 of the sound transducer 1.
  • the electrodes for contacting the transducer element can in this case be formed in the same or an equivalent manner as illustrated in connection with FIG.
  • the electrical conductors, e.g. Wires or pins may for example be passed through the plastic material of the membrane 8.
  • Schwallwandler comprises a functional group 2, which is integral with the
  • According to the invention is designed as a piezoceramic element and is integrated into the oscillatory membrane 8.
  • a plastic processing tool is provided with a cavity whose shape is adapted to the desired shape of the sound transducer.
  • Sound transducer is formed and whereby the piezoceramic element is at least partially enclosed by the plastic material. If the cavity is designed accordingly not only the functional group of the Schallwandlers, but also the housing are formed in a component.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Manufacturing & Machinery (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)

Abstract

L'invention concerne un transducteur acoustique, en particulier pour un capteur à ultrasons. Ce transducteur acoustique (1) comporte un groupe fonctionnel (2) comprenant une membrane en forme de godet (6) et au moins un élément transducteur électroacoustique (3). En outre, le transducteur acoustique (1) présente un boîtier (5). La membrane en forme de godet (6) comprend une membrane oscillante (8) et une paroi périphérique (7) ainsi qu'au moins un élément transducteur électroacoustique (3), l'élément transducteur (3) étant conçu pour exciter la membrane (8) de façon à la faire osciller et/ou pour convertir les oscillations de la membrane (8) en signaux électriques. La membrane en forme de godet (6) est réalisée en matière plastique. Selon l'invention, ledit au moins un élément transducteur (3) est intégré dans la membrane oscillante (8), notamment sans couche d'adhésif supplémentaire, et se présente sous la forme d'un élément piézocéramique.
PCT/EP2018/057486 2017-03-30 2018-03-23 Transducteur acoustique comprenant un élément transducteur piézocéramique intégré dans une membrane oscillante WO2018177945A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP18713224.6A EP3600698A1 (fr) 2017-03-30 2018-03-23 Transducteur acoustique comprenant un élément transducteur piézocéramique intégré dans une membrane oscillante
JP2019552621A JP6891293B2 (ja) 2017-03-30 2018-03-23 振動性ダイヤフラムに組み込まれた圧電セラミック変換素子を有する音響変換器
CN201880023317.3A CN110475621B (zh) 2017-03-30 2018-03-23 具有集成在可振动膜片中的压电陶瓷换能器元件的声换能器
US16/497,933 US11583896B2 (en) 2017-03-30 2018-03-23 Sound transducer including a piezoceramic transducer element integrated in a vibratory diaphragm

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102017205375.5 2017-03-30
DE102017205375.5A DE102017205375A1 (de) 2017-03-30 2017-03-30 Schallwandler

Publications (1)

Publication Number Publication Date
WO2018177945A1 true WO2018177945A1 (fr) 2018-10-04

Family

ID=61768323

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2018/057486 WO2018177945A1 (fr) 2017-03-30 2018-03-23 Transducteur acoustique comprenant un élément transducteur piézocéramique intégré dans une membrane oscillante

Country Status (6)

Country Link
US (1) US11583896B2 (fr)
EP (1) EP3600698A1 (fr)
JP (1) JP6891293B2 (fr)
CN (1) CN110475621B (fr)
DE (1) DE102017205375A1 (fr)
WO (1) WO2018177945A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021197848A1 (fr) * 2020-04-01 2021-10-07 Robert Bosch Gmbh Corps de diaphragme
WO2021239400A1 (fr) * 2020-05-25 2021-12-02 Robert Bosch Gmbh Coupelle de diaphragme

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019116080A1 (de) * 2019-06-13 2020-12-17 USound GmbH MEMS-Schallwandler mit einer aus Polymer ausgebildeten Membran

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CA2052034A1 (fr) 1990-09-25 1992-03-26 Valentin Magori Transducteur de mesure du debit d'air et de gaz, et methode de fabrication
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US4725994A (en) * 1984-06-14 1988-02-16 Kabushiki Kaisha Toshiba Ultrasonic transducer with a multiple-folded piezoelectric polymer film
DE3732412A1 (de) * 1987-09-25 1989-04-13 Siemens Ag Ultraschallwandler mit astigmatischer sende-/empfangscharakteristik
CA2052034A1 (fr) 1990-09-25 1992-03-26 Valentin Magori Transducteur de mesure du debit d'air et de gaz, et methode de fabrication
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DE102012208059A1 (de) * 2012-05-14 2013-11-14 Robert Bosch Gmbh Trägerelement mit integrierter Sensoreinheit
DE102013211533A1 (de) * 2013-06-19 2014-12-24 Robert Bosch Gmbh Ultraschallwandler und Verfahren zum Betrieb eines Ultraschallwandlers
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WO2016143469A1 (fr) * 2015-03-12 2016-09-15 富士フイルム株式会社 Corps piézoélectrique composite polymère, film de conversion électroacoustique et convertisseur électroacoustique
DE102015110939A1 (de) * 2015-07-07 2017-01-12 Valeo Schalter Und Sensoren Gmbh Ultraschallsensor für ein Kraftfahrzeug, Kraftfahrzeug sowie Verfahren zum Herstellen eines Ultraschallsensors

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021197848A1 (fr) * 2020-04-01 2021-10-07 Robert Bosch Gmbh Corps de diaphragme
WO2021239400A1 (fr) * 2020-05-25 2021-12-02 Robert Bosch Gmbh Coupelle de diaphragme

Also Published As

Publication number Publication date
US11583896B2 (en) 2023-02-21
DE102017205375A1 (de) 2018-10-04
JP2020511906A (ja) 2020-04-16
CN110475621B (zh) 2022-02-11
CN110475621A (zh) 2019-11-19
US20210101179A1 (en) 2021-04-08
EP3600698A1 (fr) 2020-02-05
JP6891293B2 (ja) 2021-06-18

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