WO2018174011A1

WO2018174011A1 - Position detection device and position detection method

Info

Publication number: WO2018174011A1
Application number: PCT/JP2018/010826
Authority: WO
Inventors: 裕司岡本
Original assignee: 住友重機械工業株式会社
Priority date: 2017-03-22
Filing date: 2018-03-19
Publication date: 2018-09-27
Also published as: CN110446905A; TWI654500B; KR20190131475A; TW201835692A; JPWO2018174011A1; JP6862068B2

Abstract

In the present invention, a substrate having a corner part is supported by a support unit. An imaging device captures an image of a portion of the substrate in an angle of view. A processing unit causes the substrate or the imaging device to move so that the length of two sides on either side of a corner part of the substrate included in the angle of view of the imaging device is equal to or greater than a specified value. The position of the corner part of the substrate is detected on the basis of image data acquired by capturing of an image in the angle of view by the imaging device after the movement. Through this configuration, more position detection can be more stably performed on the basis of image data of the corner part of the substrate.

Description

Position detection apparatus and position detection method

The present invention relates to a position detection device and a position detection method.

A technique for positioning a substrate using an alignment mark formed on the substrate when drawing or processing the substrate is known. Patent Document 1 below discloses a screen printing technique for positioning a substrate based on image data obtained by imaging the vicinity of a corner of the substrate.

JP 2014-205286 A

An object of the present invention is to provide a position detection device capable of performing more stable position detection based on image data of corners of a substrate.

According to one aspect of the invention,
A support part for supporting a substrate having a corner part;
An imaging device for imaging a portion of the substrate within an angle of view;
A processing unit,
The processor is
Move the substrate or the imaging device so that the length of two sides sandwiching the corner portion of the substrate included in the angle of view of the imaging device is equal to or longer than the specified value,
A position detection device is provided that detects the position of the corner portion of the substrate based on image data acquired by imaging the angle of view of the imaging device after movement.

According to another aspect of the invention,
A support part for supporting a substrate having a corner part;
An imaging device for imaging a portion of the substrate;
A processing unit;
A display unit for displaying an image,
The processor is
Displaying an image of the corner of the substrate within the angle of view of the imaging device on the display;
Move the substrate or the imaging device so that the length of two sides sandwiching the corner portion of the substrate included in the angle of view of the imaging device is equal to or longer than the specified value, Display the image of the corner within the angle of view of the imaging device after movement on the display unit,
There is provided a position detection device that obtains coordinates of the position of the corner of the image of the substrate within the angle of view of the imaging device and displays information for specifying the obtained coordinates on the display unit.

According to yet another aspect of the invention,
Imaging a first corner of a substrate having corners to obtain first image data;
Of the two sides sandwiching the first corner, the length of the portion included in the first image data is compared with a specified value, and the first of the two sides sandwiching the first corner is the first. When the length of the portion included in the image data is not equal to or greater than the specified value, the region to be imaged is moved so as to be equal to or greater than the specified value, and the board is imaged to obtain second image data. Process,
And a step of determining the position of the first corner of the substrate based on the second image data.

Stable position detection can be performed by detecting the position of the corner so that the length of two sides sandwiching the corner of the substrate included in the angle of view of the imaging device is equal to or greater than a specified value. is there.

FIG. 1 is a schematic perspective view of a position detection apparatus according to an embodiment. FIG. 2 is a flowchart of the position detection process executed by the processing unit of the position detection apparatus according to the embodiment. FIG. 3A is a plan view of a substrate that is an object for position detection, FIG. 3B is a diagram showing a template used for pattern matching executed during the position detection process as an image, and FIG. 3C is a position detection. It is a figure which shows the image data which a process part handles during a process as an image. 4A and 4B are diagrams illustrating image data handled by the processing unit as an image during the position detection process. FIG. 5A is a diagram showing the image data of the corner when the shape and size of the cut-off portion of the corner of the substrate are in accordance with the standard, and FIG. 5B is the size of the cut-out portion of the corner of the substrate as the standard FIG. 5C is a diagram illustrating, as an image, image data of a corner when the shape of a cut-off portion of the corner of the substrate is out of the standard. FIG. 5D is a diagram illustrating, as an image, image data at corners when the posture in the in-plane rotation direction of the substrate is slightly inclined from the target posture. FIG. 6 is a flowchart of the position detection process executed by the processing unit of the position detection apparatus according to another embodiment. FIG. 7A is a plan view of a substrate whose position is to be detected in still another embodiment, and FIG. 7B is a diagram showing, as an image, a template used in pattern matching executed in steps S03 and S07 in FIG. is there. FIG. 8 is a flowchart of a position detection process executed by a position detection apparatus according to another embodiment. 9A is a plan view showing the positional relationship between the angle of view and the substrate when step S11 of FIG. 8 is executed, and FIG. 9B shows the positional relationship between the angle of view and the substrate after executing step S13. It is a top view. FIG. 10 is a flowchart of position detection processing executed by a position detection apparatus according to another embodiment. FIG. 11A is a plan view of a substrate whose position is to be detected using a position detection apparatus according to another embodiment, and FIG. 11B is a diagram showing a template used for pattern matching at the time of position detection as an image. is there. 12A and 12B are schematic perspective views of a position detecting device according to still another embodiment. FIG. 13 is a schematic front view of a film forming apparatus according to still another embodiment.

With reference to FIGS. 1 to 5D, a position detection apparatus according to an embodiment will be described.
FIG. 1 is a schematic perspective view of a position detection apparatus according to an embodiment. The position detection apparatus according to the present embodiment includes a support unit 10,

imaging devices

11A and 11B, a processing unit 12, a storage unit 13, and a display unit 14. The support unit 10 supports the substrate 50 to be processed on its upper surface (support surface). As the support unit 10, for example, a movable stage that can move the substrate 50 in a two-dimensional direction in the plane and rotate it in the plane is used. The substrate 50 has a planar shape having a plurality of corners such as a square and a rectangle.

The imaging device 11A captures an area in the angle of view (field of view) 15A on the support surface of the support unit 10 and acquires image data. The imaging device 11B captures an area in the angle of view (field of view) 15B on the support surface of the support unit 10 and acquires image data. When one corner 51 of the substrate 50 is disposed within the angle of view 15A, the other corner 51 adjacent to the corner 51 via one side is disposed within the angle of view 15B. The positions of the two

imaging devices

11A and 11B are adjusted.

The processing unit 12 executes the processing program stored in the storage unit 13, thereby realizing a position detection function. In the storage unit 13, in addition to the processing program, various data referred to when the position detection process is executed, image data acquired by the imaging devices 11 A and 11 B, coordinate data that is a processing result of the processing unit 12, and the like Is stored. The processing unit 12 outputs the processing result to the display unit 14. For example, a central processing unit (CPU) is used as the processing unit 12. As the storage unit 13, for example, a RAM, a ROM, an external storage device, or the like is used. As the display unit 14, for example, a liquid crystal display, an organic EL display, or the like is used.

FIG. 2 is a flowchart of the position detection process executed by the processing unit 12 (FIG. 1). In the position detection process described below, the position of one corner 51 of the substrate 50 is detected. The positions of the other corners 51 can also be detected by the same process.

FIG. 3A is a plan view of a substrate 50 that is a target for position detection. The substrate 50 has a substantially rectangular or square planar shape, and four corners 51 are cut off obliquely. For example, the planar shape of the part cut off obliquely is a right isosceles triangle having a base angle of 45 degrees.

FIG. 3B is a

view showing templates

20A, 20B, and 20C used as pattern matching executed during the position detection process as images. The template 20 A corresponds to an image of an oblique side of the corner 51. The template 20 B corresponds to an image of an intersecting portion between an oblique side of the corner 51 and a side extending in the horizontal direction. The template 20 C corresponds to an image of an intersecting portion between an oblique side of the corner 51 and a side extending in the vertical direction. The

templates

20A, 20B, and 20C are created based on the external shape standard of the substrate 50.

3C, 4A, and 4A are diagrams showing image data handled by the processing unit 12 as an image during the position detection process. 3C, FIG. 4A, and FIG. 4B, the area | region inside the board | substrate 50 is hatched.

As shown in FIG. 2, before detecting the position of the substrate 50, first, the substrate 50 is supported on the support surface of the support portion 10 (step S01). This process is performed, for example, when the processing unit 12 controls a transfer device such as a robot arm. When the substrate 50 is supported by the support portion 10, the two adjacent corner portions 51 (FIG. 1) of the substrate 50 or the vicinity thereof are rough so as to be within the two angles of

view

15A and 15B (FIG. 1), respectively. Positioning has been made.

The processing unit 12 draws the corner 51 of the substrate 50 into the angle of view 15A (step S02). Hereinafter, a process of drawing the corner 51 of the substrate 50 into the angle of view 15A will be described. First, in a state where the substrate 50 is roughly positioned, the estimated position of the corner 51 (within the angle of view 15A) is imaged to obtain image data 22 (FIG. 3C). The processing unit 12 displays an image corresponding to the acquired image data 22 on the display unit 14.

Thereafter, the processing unit 12 determines whether or not the image data 22 includes part of two sides sandwiching the corner portion 51 of the substrate 50. Hereinafter, “a part of two sides sandwiching the corner 51” is simply referred to as “the corner 51 is included”. When the corner 51 is not included in the image data 22, the processing unit 12 moves the support 10 so that the corner 51 is within the angle of view 15A. The processing unit 12 displays an image corresponding to the image data acquired during the movement of the substrate 50 on the display unit 14.

Hereinafter, with reference to FIG. 3C, a process for determining whether or not the corner 51 is included in the image data 22 will be described. First, the processing unit 12 performs pattern matching between the image data 22 and the template 20B (FIG. 3B). Next, pattern matching between the image data 22 and the template 20C (FIG. 3B) is performed.

In the example shown at the left end of FIG. 3C, both the part that matches the template 20B and the part that matches the template 20C are included in the image data 22. In this case, it is determined that the corner 51 is included in the image data 22.

In the second example from the left in FIG. 3C, a portion that matches the template 20B is included in the image data 22, but a portion that matches the template 20C is not included in the image data 22. In this case, it can be seen that if the substrate 50 is moved downward in FIG. 3C, the corner 51 falls within the angle of view 15A.

In the third example from the left in FIG. 3C, a portion that matches the template 20B is not included in the image data 22, but a portion that matches the template 20C is included in the image data 22. In this case, it can be seen that if the substrate 50 is moved in the left direction in FIG. 3C, the corner 51 falls within the angle of view 15A.

In the example shown at the right end of FIG. 3C, neither the part matching the template 20B nor the part matching the template 20C is included in the image data 22. In this case, the processing unit 12 performs pattern matching between the image data 22 and the template 20A. When a portion that matches the template 20A is included in the image data 22, the processing unit 12 estimates a moving direction and a moving distance to which the substrate 50 should be moved from the position of the matching portion. For example, when a portion matching the template 20A is found in the upper right region of the angle of view 15A, it can be seen that the substrate 50 may be moved obliquely in the lower left direction.

The processing unit 12 displays information indicating a portion matched with the

templates

20A, 20B, and 20C in the image displayed on the display unit 14 on the display unit 14 during pattern matching. For example, a frame surrounding the matched portion is displayed over the image.

After moving the substrate 50 by the direction and distance to which the substrate 50 should be moved, the image data 22 is acquired again. When the corner 51 is included in the re-acquired image data 22, the processing unit 12 completes the process of drawing the corner 51 into the angle of view 15A.

When the drawing of the corner 51 into the angle of view 15A is completed, the processing unit 12 determines the length of the portion in the angle of view 15A (the length of the side in the angle of view) of each of the two sides sandwiching the corner 51. And the specified value are compared (step S03). Here, the two sides sandwiching the corner portion 51 mean sides extending from each of both ends of the oblique side formed by cutting off the corner portion 51 to the next corner portion. This specified value is stored in the storage unit 13 in advance. The length of the side in the angle of view 15A can be obtained from the position of the portion that matches the

templates

20B and 20C, for example. The processing unit 12 displays information indicating a portion matching the

templates

20B and 20C on the display unit 14.

FIG. 4A is a diagram showing the image data 22 as an image when the length of the side in the angle of view 15A is shorter than a specified value. The image data 22 in FIG. 4A completely includes the entire pattern corresponding to the template 20C, but includes only a part of the pattern corresponding to the template 20B. Even in such a case, it is possible to detect a portion matching the template 20B by lowering the matching determination threshold. The length Lc of the side from the vertex of the portion matched with the template 20C to the adjacent corner is equal to or greater than the specified value, but the length Lb of the side from the vertex of the portion matched to the template 20B to the next corner is specified. Is less than the value.

If it is determined in step S03 that the length of at least one side in the angle of view 15A is shorter than the specified value, the length of the side in the angle of view 15A is equal to or longer than the specified value. The substrate 50 is moved so as to be (step S04). For example, in the example shown in FIG. 4A, it can be seen that the substrate 50 may be moved to the left. During the movement of the substrate 50, the processing unit 12 displays an image corresponding to the acquired image data on the display unit 14.

When it is determined in step S03 that the lengths of the two sides in the angle of view 15A are equal to or longer than the specified value, or after step S04, the processing unit 12 sets the specified angle in the angle of view 15A. The position of the corner 51 is detected based on the image data 22 acquired in a state including a side that is equal to the value or longer than the specified value (step S05). Hereinafter, the process of detecting the position of the corner 51 will be described with reference to FIG. 4B.

FIG. 4B is a diagram showing the image data 22 acquired as an image in a state in which a side having a length equal to or longer than a specified value is included in the field angle 15A. First, a side extending linearly in the horizontal direction and a side extending linearly in the vertical direction are detected in the image data 22. For the detection of this side, pattern matching using a template including one straight side can be used. In addition, it is possible to detect a side extending in the horizontal direction based on a pixel column including pixels of a portion where the brightness greatly changes in the vertical direction. Further, it is possible to detect a side extending in the vertical direction based on a pixel row composed of pixels in a portion where the brightness greatly changes in the horizontal direction.

The processing unit 12 employs the position of the detected intersection (reference point) 28 on the extension line of the two sides as the position of the corner 51. The processing unit 12 displays information indicating the detected extension lines of the two sides and the reference point 28 on the display unit 14. For example, the extension line of two sides is displayed as a solid line or a broken line, and the intersection of both is displayed as a plus sign. Further, information 29 indicating the coordinates of the reference point is displayed on the display unit 14 as a number.

Next, with reference to FIGS. 5A to 5D, the excellent effects of the above embodiment will be described. In the above embodiment, the position of the substrate 50 where the alignment mark is not formed can be detected. Further, the position of the substrate 50 can be detected even if the front and back sides of the substrate 50 are reversed.

FIG. 5A is a diagram showing the image data of the corner 51 when the shape and dimensions of the cut-off portion of the corner 51 of the substrate 50 are as specified. Thus, when the shape and dimensions of the substrate 50 are in accordance with the standard, the position of the reference point 28 of the corner 51 can be detected by the method according to the embodiment.

FIG. 5B is a diagram showing the image data of the corner 51 when the size of the cut-off portion of the corner 51 of the substrate 50 is smaller than the standard as an image. When one template including an oblique side and two sides on both sides thereof is used, it is difficult to accurately detect the position of the corner 51 by pattern matching. In this embodiment, since the vertices at both ends of the oblique side are detected by pattern matching separately, even if the lengths of the oblique sides vary, the two sides sandwiching the corner 51 are detected with high accuracy. be able to. As a result, the position of the reference point 28 can be detected with high accuracy.

FIG. 5C is a diagram illustrating the image data of the corner 51 when the shape of the cut-off portion of the corner 51 of the substrate 50 deviates from the standard. In the example shown in FIG. 5C, the angle formed between the oblique side and the two sides sandwiching the corner 51 is deviated from 45 degrees. Since the vertices at both ends of the oblique side are detected by pattern matching separately using

different templates

20B and 20C, the vertices at both ends of the oblique side are pattern-matched even if the oblique sides are deviated from 45 degrees. It is easy to detect by. Since the reference point 28 of the corner 51 is determined by extending two sides sandwiching the corner 51, the position detection accuracy of the reference point 28 does not decrease even if the direction of the oblique side is deviated from 45 degrees.

FIG. 5D is a diagram showing the image data of the corner 51 when the posture in the in-plane rotation direction of the substrate 50 is slightly tilted from the target posture as an image. For example, two sides sandwiching the corner 51 are inclined with respect to the vertical direction and the horizontal direction in the angle of view 15A (FIG. 1). Even in this case, the corners at both ends of the oblique side can be detected by inclining the

templates

20B and 20C and performing pattern matching. Since the reference point 28 of the corner 51 is determined by extending two sides sandwiching the corner 51, even if the two sides are inclined with respect to the vertical direction and the horizontal direction, the position detection accuracy of the reference point 28 is It does not decline.

Furthermore, in the embodiment, since the position of the corner 51 is detected by extending the two sides sandwiching the corner 51, the position detection result is not affected by the shape of the apex of the corner 51. For example, even when the apex portion has an irregular shape due to manufacturing variations, the position of the corner 51 can be detected with high accuracy.

In the above embodiment, as the basis for calculating the position of the corner 51, the image data 22 (FIG. 4B) including a side having a length equal to or longer than the specified value in the angle of view is used. For this reason, the extension line of these two sides can be determined with high accuracy. As a result, the calculation accuracy of the position of the reference point 28 (FIG. 4B) calculated based on this extension line can be increased.

Further, in the above embodiment, the display unit 14 displays the image of the substrate 50 imaged by the

imaging devices

11A and 11B (FIG. 1) and the template image when performing pattern matching according to the operation of the position detection device. Is displayed. For this reason, the operator can know the operation status of the position detection device from the information displayed on the display unit 14. Moreover, the normality of operation | movement of a position detection apparatus can be confirmed from these information.

Next, a position detection apparatus according to another embodiment will be described with reference to FIG. Hereinafter, the description of the configuration common to the embodiment shown in FIGS. 1 to 5D will be omitted.

FIG. 6 is a flowchart of the position detection process executed by the processing unit 12 of the position detection apparatus according to this embodiment. Steps S01 and S02 are the same as steps S01 and S02 in the embodiment shown in FIG.

In this embodiment, in step S03a, the lengths of the two sides in the angle of view 15A are compared with the specified value to determine whether the lengths of the two sides in the angle of view 15A are equal to the specified value. To do. Here, the difference between the length of the two sides in the angle of view 15A and the specified value is the range of the maximum error caused by the measurement accuracy when measuring the length based on the image data by the

imaging devices

11A and 11B. If it is within the range, the processing unit 12 determines that the lengths of the two sides in the angle of view 15A are equal to the specified value.

When the lengths of the two sides in the angle of view 15A are not equal to the specified value, the processing unit 12 moves the substrate 50 so that the lengths of the two sides in the angle of view 15A are equal to the specified value. (Step S04a).

If it is determined in step S03a that the lengths of the two sides in the angle of view 15A are equal to the specified value, or after step S04a, the processing unit 12 has a length of 2 equal to the specified value in the angle of view 15A. Based on the image data 22 acquired in a state including one side, the position of the corner 51 is detected. The process of step S05 is the same as the process of step S05 of the embodiment shown in FIG.

In this embodiment, the variation in the position of the reference point 28 (FIG. 4B) of the corner 51 within the angle of view 15A is reduced. Since the influence of the aberration of the lens of the imaging device 11A can be equalized for each position detection, it is possible to reduce variations in position detection accuracy.

Next, a position detection device according to still another embodiment will be described with reference to FIGS. 7A and 7B. Hereinafter, the description of the configuration common to the embodiment shown in FIGS. 1 to 5D will be omitted.

FIG. 7A is a plan view of the substrate 50 that is a position detection target in this embodiment. The substrate 50 that is a position detection target in the embodiment shown in FIGS. 1 to 5C has a shape in which the corner portion 51 is linearly cut off. In this embodiment, the substrate 50 is a position detection target. The board | substrate 50 has the shape by which the corner | angular part 51 was cut off roundly.

FIG. 7B is a

diagram illustrating templates

20A, 20B, and 20C used in the pattern matching executed in step S02 of FIG. 2 as images. The

templates

20A, 20B, and 20C in FIG. 7B correspond to the

templates

20A, 20B, and 20C in FIG. 3B, respectively. In the present embodiment, the patterns of the

templates

20A, 20B, and 20C are also rounded according to the round shape of the corner 51 of the substrate 50.

By using the

templates

20A, 20B, and 20C shown in FIG. 7B, it is possible to detect the position of the substrate 50 in which the corners 51 are rounded.

Next, a position detection apparatus according to another embodiment will be described with reference to FIGS. 8 to 9B. Hereinafter, the description of the configuration common to the embodiment shown in FIGS. 1 to 5D will be omitted.

FIG. 8 is a flowchart of the position detection process executed by the position detection apparatus according to this embodiment. The process of supporting the substrate 50 on the support unit 10 (step S11) and the process of drawing the first corner part into the angle of view (step S12) are the same as the processes of steps S01 and S02 shown in FIG.

In this embodiment, after the first corner is drawn into the angle of view, the processing unit 12 draws the second corner adjacent to the first corner via one side into the angle of view ( Step S13). For example, when the first corner is drawn into the angle of view 15A (FIG. 1), the second corner is drawn into the angle of view 15B. The same technique as the process of step S02 of FIG. 2 can be applied to the process of drawing the second corner into the angle of view 15B.

FIG. 9A is a plan view showing the positional relationship between the angle of

view

15A and 15B and the substrate 50 when step S13 is executed. A direction from the origin of the angle of view 15B to the origin of the angle of view 15A is defined as a reference direction (x direction). At this time, each side of the substrate 50 is inclined with respect to the reference direction.

The processing unit 12 calculates the relative positional relationship between the two corners from the state in which the first corner is drawn into the angle of view and the state in which the second corner is drawn into the angle of view. The posture in the in-plane rotation direction is detected (step S14). The processing unit 12 performs alignment with respect to the in-plane rotation direction of the substrate 50 by rotating the support unit 10 based on the detection result of the posture of the substrate 50 in the in-plane rotation direction (step S15).

FIG. 9B is a plan view showing the positional relationship between the angles of

view

15A and 15B after the execution of step S15 and the substrate 50. FIG. A pair of sides of the substrate 50 is parallel to the reference direction.

After the alignment in the in-plane rotation direction of the substrate 50, the processing unit 12 detects the position of the first corner again (step S16). The position of the first corner can be detected by the same procedure as the procedure from steps S02 to S05 in FIG. Similarly, the processing unit 12 detects the position of the second corner again (step S17).

In the embodiment shown in FIGS. 8 to 9B, as shown in FIG. 9B, alignment in the in-plane rotation direction of the substrate 50 can be performed, and the position of the substrate 50 in two in-plane directions can be detected. .

Next, with reference to FIG. 10, a position detection device according to another embodiment will be described. Hereinafter, the description of the configuration common to the embodiment shown in FIGS. 1 to 8 will be omitted.

FIG. 10 is a flowchart of the position detection process executed by the position detection apparatus according to this embodiment. First, the substrate 50 is supported on the support surface of the support portion 10 (FIG. 1) with the first surface facing upward (step S21). This process is the same as the process of step S01 shown in FIG.

The processing unit 12 detects the position of the substrate 50 (step S22). This position detection process is the same as the process from steps S02 to S05 shown in FIG. 2 or steps S12 to S16 shown in FIG.

Next, the processing unit 12 creates a template from the image data of the corner 51 when the lengths of the two sides in the angle of view are equal to or greater than the specified value (step S23). Hereinafter, the template creation process will be described. Pattern matching between the image data 22 (FIG. 4B) used for detecting the position of the corner 51 in step S05 (FIG. 2) and the

templates

20B and 20C (FIG. 3B) is performed. The image of the part corresponding to 20B and 20C is cut out. The cut-out image is mirror-image converted into a template and stored in the storage unit 13. A template created based on an image cut out from the image data 22 is referred to as a dynamic template in distinction from the

templates

20A, 20B, and 20C (FIG. 3B) created based on the standard shape of the substrate 50.

After creating the dynamic template, the processing unit 12 processes the first surface of the substrate 50 (step S24). For example, ink is ejected from the inkjet head toward the first surface to form an insulating resin film having a desired planar shape.

When the processing of the first surface is completed, the front and back of the substrate 50 are reversed (step S25), and the second surface opposite to the first surface is directed upward. Inversion of the front and back is performed, for example, by the processing unit 12 controlling the robot arm. In addition, you may make it reverse the front and back manually.

The processing unit 12 detects the position of the substrate 50 with the second surface facing upward (step S26). In this position detection process, the dynamic template created in step S23 is used instead of the

templates

20A, 20B, and 20C (FIG. 3B) when executing the processes from steps S02 to S05 shown in FIG. More specifically, when searching for a specific part from the image data of the substrate 50, a dynamic template cut out from a corresponding part of the image data obtained by imaging the first surface is used.

After detecting the position of the substrate 50, the processing unit 12 processes the second surface of the substrate 50 (step S27).

In the embodiment shown in FIG. 10, the position of the substrate 50 is detected using a dynamic template in step S26. For this reason, even if it is a case where the shape of the corner | angular part 51 has remove | deviated from the standard shape, the fall of the precision of pattern matching can be suppressed. As a result, it is possible to increase the relative alignment accuracy between the first surface and the second surface.

Next, a position detection device according to still another embodiment will be described with reference to FIGS. 11A and 11B. Hereinafter, the description of the configuration common to the embodiment shown in FIGS. 1 to 5D will be omitted.

FIG. 11A is a plan view of a substrate 50 that is a target whose position is detected by using the position detection device according to the present embodiment. The corner portion 51 of the substrate 50 is not cut off, and a substantially perpendicular vertex appears.

FIG. 11B is a diagram showing the template 20 used for pattern matching at the time of position detection as an image. In the embodiment shown in FIGS. 1 to 5D, two

templates

20B and 20C (FIG. 4B) are used in pattern matching when the corner 51 is detected (steps S02 and S05). In contrast, in the present embodiment, one template 20 (FIG. 11B) is used in pattern matching when detecting the corner 51.

Also in this embodiment, since the length of two sides in the angle of view is equal to or greater than the specified value in the image data that is the basis for detecting the position of the corner 51 (step S03), the reference of the corner 51 The detection accuracy of the position of the point 28 (FIG. 4B) can be increased.

Next, with reference to FIGS. 12A and 12B, a position detection apparatus according to still another embodiment will be described. Hereinafter, the description of the configuration common to the embodiments shown in FIGS. 1 to 5D and FIGS. 8 to 9B will be omitted.

12A and 12B are schematic perspective views of the position detection apparatus according to this embodiment. In the embodiment shown in FIG. 1, the two

imaging devices

11A and 11B are arranged corresponding to the two corners 51 of the substrate 50. However, in this embodiment, only one imaging device 11A is arranged. In the embodiment shown in FIG. 8, the first corner is drawn into the angle of view 15A of the imaging device 11A in step S12, and the second corner is drawn into the angle of view 15B of the imaging device 11B in step S13.

In this embodiment, in step S12, the first corner 51 is drawn into the angle of view 15A of the image pickup apparatus 11A as in the embodiment of FIG. 8 (FIG. 12A). In step S13, the substrate 50 is translated and the second corner 51 is drawn into the angle of view 15A of the imaging device 11A (FIG. 12B).

Thereafter, in step S16, the first corner 51 is drawn into the angle of view 15A of the image pickup apparatus 11A, and processing for detecting the position of the first corner 51 is executed. In step S 17, a process of detecting the position of the second corner portion 51 by drawing the second corner portion 51 into the angle of view 15 A of the imaging device 11 A is executed.

As shown in FIGS. 12A and 12B, it is possible to detect the positions of the two corners of the substrate 50 using only one imaging device 11A. In this embodiment, the moving direction of the substrate 50 from the state of FIG. 12A to the state of FIG. 12B may be defined as the reference direction (x direction) shown in FIGS. 9A and 9B.

Next, with reference to FIG. 13, a film forming apparatus equipped with the position detection apparatus according to the above-described embodiment will be described.

FIG. 13 is a schematic front view of the film forming apparatus according to the present embodiment. The support unit 10 is supported on the base 30 via the moving mechanism 31. The support portion 10 corresponds to the support portion 10 of the embodiment shown in FIG. The substrate 50 is supported on the upper surface (support surface) of the support unit 10. The moving mechanism 31 can move the support unit 10 in a two-dimensional direction parallel to the support surface and rotate it in an in-plane direction parallel to the support surface. Usually, the support surface of the support part 10 is kept horizontal.

A plurality of inkjet heads 33 and a plurality of

imaging devices

11A and 11B are arranged above the substrate 50 supported by the support unit 10. The inkjet head 33 and the imaging devices 11 A and 11 B are supported on the base 30 by the portal frame 32. The

imaging devices

11A and 11B can be moved up and down by the lifting

mechanisms

17A and 17B, respectively. Each of the inkjet heads 33 is provided with a plurality of nozzle holes. A droplet of the film material is discharged from the nozzle hole toward the substrate 50.

The imaging devices 11 A and 11 B capture a part of the substrate 50 supported by the support unit 10 and transmit the acquired two-dimensional image data to the processing unit 12. The

imaging devices

11A and 11B and the processing unit 12 correspond to the

imaging devices

11A and 11B and the processing unit 12 of the embodiment shown in FIG. Furthermore, the processing unit 12 can adjust the focus positions of the

imaging devices

11A and 11B by controlling the elevating

mechanisms

17A and 17B to raise and lower the

imaging devices

11A and 11B.

The processing unit 12 controls the moving mechanism 31 and the inkjet head 33 based on image data defining the shape of the film to be formed. A film can be formed by curing the adhering liquid film material. Thereby, a film having a desired shape can be formed on the substrate 50. As the film material, a photocurable resin, a thermosetting resin, or the like can be used. A light source or a heat source for curing the film material attached to the substrate 50 is disposed on the side of the inkjet head 33.

Various commands and data are input from the input unit 16 to the processing unit 12. For the input unit 16, for example, a keyboard, a pointing device, a USB port, a communication device, or the like is used. Various information regarding the operation of the film forming apparatus is output to the display unit 14. For example, a liquid crystal display or the like is used for the display unit 14. Note that a communication device that transmits image data to be displayed on an external display device may be used as the display unit 14.

In this embodiment, the position of the substrate 50 is detected by the method according to any one of the embodiments shown in FIGS. Thereby, a position can be detected with high accuracy.

Each example is an exemplification, and needless to say, partial replacement or combination of configurations shown in different examples is possible. About the same effect by the same composition of a plurality of examples, it does not refer to every example one by one. Furthermore, the present invention is not limited to the embodiments described above. It will be apparent to those skilled in the art that various modifications, improvements, combinations, and the like can be made.

DESCRIPTION OF SYMBOLS 10

Support part

11A, 11B Image pick-up device 12 Processing part 13 Storage part 14

Display part

15A, 15B Angle of view 16

Input part

17A,

17B Lifting mechanism

20, 20A, 20B, 20C Template 22 Image data 28 Reference point 29 of a corner part Reference point Information 30 showing coordinates 30 Base 31 Moving mechanism 32 Portal frame 33 Inkjet head 50 Substrate 51 Corner

Claims

A support part for supporting a substrate having a corner part;
An imaging device for imaging a portion of the substrate within an angle of view;
A processing unit,
The processor is
Move the substrate or the imaging device so that the length of two sides sandwiching the corner portion of the substrate included in the angle of view of the imaging device is equal to or longer than the specified value,
A position detection device that detects a position of the corner portion of the substrate based on image data acquired by imaging an angle of view of the imaging device after movement.
A support part for supporting a substrate having a corner part;
An imaging device for imaging a portion of the substrate;
A processing unit;
A display unit for displaying an image,
The processor is
Displaying an image of the corner of the substrate within the angle of view of the imaging device on the display;
Move the substrate or the imaging device so that the length of two sides sandwiching the corner portion of the substrate included in the angle of view of the imaging device is equal to or longer than the specified value, Display the image of the corner within the angle of view of the imaging device after movement on the display unit,
A position detection device that obtains coordinates of a position of the corner of the image of the substrate within an angle of view of the imaging device and displays information for specifying the obtained coordinates on the display unit.
Imaging a first corner of a substrate having corners to obtain first image data;
Of the two sides sandwiching the first corner, the length of the portion included in the first image data is compared with a specified value, and the first of the two sides sandwiching the first corner is the first. When the length of the portion included in the image data is not equal to or greater than the specified value, the region to be imaged is moved so as to be equal to or greater than the specified value, and the board is imaged to obtain second image data. Process,
Obtaining a position of the first corner of the substrate based on the second image data.
By performing pattern matching between the first image data and the template, whether or not the length of the portion included in the first image data out of the two sides sandwiching the first corner is equal to or greater than the specified value The position detection method according to claim 3, wherein:
The position detection method according to claim 4, wherein the template is created based on a standard of an outer shape of the substrate.
The position detection method according to claim 4, wherein the template is created based on an image obtained by imaging the first corner of the substrate from the opposite surface.
Imaging the estimated position of the first corner of the substrate and obtaining initial image data before obtaining the first image data;
When the initial image data does not include a part of each of the two sides sandwiching the first corner, the first corner is disposed within the angle of view, and then the first image data is acquired. The position detection method according to claim 3.
After detecting the position of the first corner portion, the second corner portion adjacent to the first corner portion is imaged to obtain third image data, and based on the first image data and the third image data. Obtaining the posture of the substrate in the in-plane rotation direction;
A step of rotating the substrate in an in-plane direction according to the posture in the in-plane rotation direction of the substrate, and performing alignment in the rotation direction,
The position detection method according to claim 3, wherein the position of the first corner portion is detected again after alignment in the in-plane rotation direction.
In the step of obtaining the second image data, if the length of the portion included in the first image data of the two sides sandwiching the first corner is not equal to the specified value, the specified value 9. The position detection method according to claim 3, wherein a region to be imaged is moved so as to be equal to a value, the substrate is imaged, and the second image data is acquired.