CN110446905A - Position detecting device and method for detecting position - Google Patents
Position detecting device and method for detecting position Download PDFInfo
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- CN110446905A CN110446905A CN201880005782.4A CN201880005782A CN110446905A CN 110446905 A CN110446905 A CN 110446905A CN 201880005782 A CN201880005782 A CN 201880005782A CN 110446905 A CN110446905 A CN 110446905A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
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- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Image Analysis (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Image Processing (AREA)
Abstract
Substrate supporting with corner is on supporting part.Photographic device shoots a part of the substrate in field angle.Processing unit keeps substrate or photographic device mobile, so that the length on two sides in the angle portion for the substrate for being included in the field angle of photographic device becomes specified value or more.The position in the corner of substrate is detected based on the image data got in the field angle of the mobile photographic device of shooting later.By using the structure, more stable position detection can be carried out based on the image data in the corner of substrate.
Description
Technical field
The present invention relates to a kind of position detecting device and method for detecting position.
Background technique
It has been known that there is following technologies: when being drawn or being processed to substrate, using the alignment mark pair being formed on substrate
Substrate is positioned.The following patent document 1 discloses screen printing techniques, the screen printing technique is based on shooting substrate
Image data obtained from adjacent corner carries out the positioning of substrate.
Conventional art document
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2014-205286 bulletin
Summary of the invention
The invention technical task to be solved
The object of the present invention is to provide a kind of image datas based on substrate corners to be able to carry out more stable position
The position detecting device of detection.
For solving the means of technical task
A kind of viewpoint according to the present invention, provides a kind of position detecting device, includes
Supporting part supports the substrate with corner；
Photographic device shoots a part of the substrate in field angle；And
Processing unit,
The processing unit keeps the substrate or the photographic device mobile, so that institute in the field angle of the photographic device
The length on two sides in the folder corner for the substrate for including is equal to specified value or longer than the specified value,
And the image data got in the field angle of the photographic device is shot to detect later based on mobile
State the position in the corner of substrate.
Another viewpoint according to the present invention, provides a kind of position detecting device, includes
Supporting part supports the substrate with corner；
Photographic device shoots a part of the substrate；
Processing unit；And
Display unit shows image,
The image in the corner of the substrate in the field angle of the photographic device is shown in institute by the processing unit
Display unit is stated,
And keep the substrate or the photographic device mobile, so as to be included in the field angle of the photographic device
The length on two sides in the folder corner of the substrate is equal to specified value or longer than the specified value, and will be after movement
The image in the corner in the field angle of the photographic device is shown in the display unit,
And the coordinate of the position in the corner of the image of the substrate in the field angle of the photographic device is found out,
And the information for being used to determine calculated coordinate is shown in the display unit.
Another viewpoint according to the present invention, provides a kind of method for detecting position, with following process:
The process that 1st corner of the substrate with corner is shot and obtains the 1st image data；
Length and specified value to the part being contained in two sides for pressing from both sides the 1st corner in the 1st image data
It is compared, if the length for the part being contained in the 1st image data in two sides in folder the 1st corner is not described
More than specified value, then make shooting area mobile so that the length for the part being contained in the 1st image data becomes the rule
More than definite value, the substrate is shot later, thus the process for obtaining the 2nd image data；And
Based on the 2nd image data, the process for finding out the position in the 1st corner of the substrate.
Invention effect
The length on two sides in the angle portion for the substrate for being included in the field angle for making photographic device become specified value with
The position of diagonal section is detected after upper, it is thus possible to carry out stable position detection.
Detailed description of the invention
Fig. 1 is the approximate stereogram of the position detecting device based on embodiment.
Fig. 2 is the flow chart of the processing of position detection performed by the processing unit of the position detecting device based on embodiment.
Fig. 3 A is the plan view as the substrate of position detection object, and Fig. 3 B is performed in handling position detection
The figure that template used in pattern match is indicated as image, Fig. 3 C are in handling position detection used in processing unit
The figure that image data is indicated as image.
Fig. 4 A and Fig. 4 B be using position detection handle in the figure that is indicated as image of image data used in processing unit.
The image data in corner when Fig. 5 A is using the shape of the cut-out of substrate corners and size up to specification as
Image and the figure indicated, Fig. 5 B be the corner when size of the cut-out of substrate corners to be less than to specification image data as
Image and the figure indicated, Fig. 5 C be the corner when shape of the cut-out of substrate corners to be deviateed to specification image data as
Image and the figure indicated, Fig. 5 D are the corners when posture by substrate in face on direction of rotation is slightly tilted from target pose
The figure that image data is indicated as image.
Fig. 6 is the process of the processing of position detection performed by the processing unit of the position detecting device based on another embodiment
Figure.
Fig. 7 A is the plan view in another embodiment as the substrate of position detection object, and Fig. 7 B is by the step S03 of Fig. 2
And the figure that template used in performed pattern match is indicated as image in S07.
Fig. 8 is the flow chart of the processing of position detection performed by the position detecting device based on another embodiment.
Fig. 9 A be indicate execute Fig. 8 step S11 when field angle and substrate between positional relationship plan view, figure
9B is the plan view of the field angle after indicating execution step S13 and the positional relationship between substrate.
Figure 10 is the flow chart of the processing of position detection performed by the position detecting device based on another embodiment.
Figure 11 A is plane when detecting position using the position detecting device based on another embodiment as the substrate of object
Scheme, the figure that template used in pattern match when Figure 11 B is using position detection is indicated as image.
Figure 12 A and Figure 12 B are the approximate stereograms of the position detecting device based on another embodiment.
Figure 13 is the general principal view of the film formation device based on another embodiment.
Specific embodiment
In the following, being illustrated with reference to FIG. 1 to FIG. 5 D to the position detecting device based on embodiment.Fig. 1 is based on embodiment
Position detecting device approximate stereogram.Position detecting device based on the present embodiment includes supporting part 10, photographic device
11A, photographic device 11B, processing unit 12, storage unit 13 and display unit 14.Substrate 50 as process object is supported on supporting part
10 upper surface (bearing surface).As supporting part 10, movable stage can be used for example, which can make substrate
50 moving in two dimensional directions in face simultaneously rotate it in the in-plane direction.Substrate 50 is such as with tool square, rectangle
There is the flat shape in multiple corners.
Photographic device 11A shoots the region in field angle (visual field) 15A on the bearing surface of supporting part 10, to obtain figure
As data.The region in field angle (visual field) 15B on the bearing surface of photographic device 11B shooting supporting part 10 is shot, from
And obtain image data.The position of two photographic devices 11A, 11B are adjusted to be configured at view in substrate 50 a corner 51
It is configured in field angle 15B when in the 15A of rink corner via a side another corner 51 adjacent with the corner 51.
Processing unit 12 executes the processing routine being stored in storage unit 13, to realize the function of position detection.It is storing
In portion 13, other than being stored with processing routine, it is also stored with various data referenced when execution position detection processing, by taking the photograph
The processing result (that is, coordinate data) etc. of the image data, processing unit 12 that are got as device 11A, 11B.Processing unit 12 will be located
Reason result is exported to display unit 14.As processing unit 12, central processing unit (CPU) can be used for example.As storage unit 13,
RAM, ROM, external memory etc. can be used for example.As display unit 14, liquid crystal display, organic EL can be used for example
Display etc..
Fig. 2 is the flow chart of the processing of position detection performed by processing unit 12 (Fig. 1).At position detection described below
In reason, the position in a corner 51 of substrate 50 is detected.For the position in another corner 51, can also by same treatment into
Row detection.
Fig. 3 A is the plan view of the substrate 50 as position detection object.Substrate 50 has generally rectangular or square
The flat shape of shape, four corners 51 are chamfered.For example, the flat shape for the part being chamfered is the right angle that base angle is 45 degree
Isosceles triangle.
Fig. 3 B be using position detection handle in template 20A, 20B, 20C used in performed pattern match as scheming
As and indicate figure.Template 20A corresponds to the image of the bevel edge in corner 51.Template 20B corresponds to the bevel edge and transverse direction in corner 51
The image of the part of the side intersection of extension.The part that template 20C corresponds to the bevel edge in corner 51 and the side that longitudinally extends is intersected
Image.Template 20A, 20B, 20C are the specifications of the outer shape based on substrate 50 and produce.
Fig. 3 C, Fig. 4 A and Fig. 4 B be using position detection handle in image data used in processing unit 12 as image table
The figure shown.In Fig. 3 C, Fig. 4 A and Fig. 4 B, hacures are labelled in the inside region of substrate 50.
As shown in Fig. 2, substrate 50 to be supported on to the bearing of supporting part 10 first before the position detection for carrying out substrate 50
On face (step S01).The processing is for example carried out by controlling the conveying devices such as mechanical arm by processing unit 12.By substrate 50
At the time of being supported on supporting part 10, coarse localization is carried out so that adjacent two corner 51 (Fig. 1) of substrate 50 or its is attached
It closely respectively falls in two field angles 15A, 15B (Fig. 1).
Processing unit 12 enters the corner 51 of substrate 50 in field angle 15A (step S02).Hereinafter, to the angle for making substrate 50
The processing that portion 51 enters in field angle 15A is illustrated.Firstly, in the state of the coarse localization of completing substrate 50, diagonal section
51 estimated location (in field angle 15A) is shot and obtains image data 22 (Fig. 3 C).Processing unit 12 by with it is acquired
The corresponding image of image data 22 is shown in display unit 14.
Later, processing unit 12 determine in image data 22 whether one of two sides of the angle portion 51 comprising substrate 50
Point.Hereinafter, " a part on two sides comprising angle portion 51 " is referred to as " comprising corner 51 ".If in image data 22 simultaneously
It does not include corner 51, then processing unit 12 keeps supporting part 10 mobile so that corner 51 is fallen into field angle 15A.Processing unit 12 will be with base
The corresponding image of the image data got in the movement of plate 50 is shown in display unit 14.
Hereinafter, in judgement image data 22, whether the processing comprising corner 51 is illustrated with reference to Fig. 3 C.Firstly, place
The pattern match of the progress of reason portion 12 image data 22 and template 20B (Fig. 3 B).Then, image data 22 and template 20C (figure are carried out
Pattern match 3B).
In the example shown in the leftmost diagram of Fig. 3 C, match with the part to match template 20B and with template 20C
Part both of which is contained in image data 22.At this point, being determined as in image data 22 comprising corner 51.
In Fig. 3 C from example shown in left second figure, image data is partially contained in what template 20B matched
In 22, but it is not included in image data 22 with the part to match template 20C.At this time it is found that if making substrate 50 in Fig. 3 C
In move down, then corner 51 can be fallen into field angle 15A.
In Fig. 3 C from example shown in left third figure, picture number is not included in the part to match template 20B
In 22, but it is partially contained in image data 22 with what template 20C matched.At this time it is found that if making substrate 50 in Fig. 3 C
In be moved to the left, then corner 51 can be fallen into field angle 15A.
In the example shown in the rightmost side figure of Fig. 3 C, match with the part to match template 20B and with template 20C
Part is not included in image data 22.At this point, processing unit 12 carries out the pattern match of image data 22 and template 20A.If
Comprising the part to match with template 20A in image data 22, then processing unit 12 goes out to need from the dead reckoning of institute's compatible portion
Want the moving direction and moving distance of moving substrate 50.For example, region discovery and template 20A in the upper right side of field angle 15A
In the case where the part to match, it is known that making substrate 50, direction is mobile to left down.
When carrying out pattern match, processing unit 12 shows that expression is shown in the image of display unit 14 on display unit 14
With the information of the part to match template 20A, 20B, 20C.For example, the frame for surrounding institute's compatible portion is overlapped on image
On.
Make substrate 50 to the distance and then secondary acquisition image data 22 for needing mobile direction to move needs movement.
If comprising corner 51 in the image data 22 obtained again, processing unit 12 terminates the place for entering corner 51 in field angle 15A
Reason.
If entering corner 51 in field angle 15A, processing terminate, processing unit 12 to two sides in angle portion 51 respectively
Field angle 15A in the length (length on the side in field angle) of part (step S03) is compared with specified value.Here,
Two of angle portion 51 are referring to: from excision corner 51 and formed bevel edge both ends be respectively facing adjacent corner while.It should
Specified value is pre-stored in storage unit 13.About the length on the side in field angle 15A, for example, can according to template 20B,
The position for the part that 20C matches and find out.Processing unit 12 shows the information for indicating the part to match with template 20B, 20C
In display unit 14.
Fig. 4 A is to indicate the length on the side in field angle 15A as image than the image data 22 of specified value in short-term
Figure.The image data 22 of Fig. 4 A completely includes the whole region of pattern corresponding with template 20C, but only includes and template
A part of the corresponding pattern of 20B.At this point, being also capable of detecting when to match with template 20B by reducing matching decision threshold
Part.Length Lc from vertex towards the side in adjacent corner of the part to match with template 20C is specified value or more, but
It is then to be less than specified value from the length Lb on vertex towards the side in adjacent corner of the part to match with template 20B.
In step S03, if it is determined that the length at least one side in field angle 15A is shorter than specified value, then make substrate 50
Movement is so that the length on the side in field angle 15A is equal to or more than specified value (step S04).For example, it is found that shown in Fig. 4 A
Move substrate 50 to the left.In the movement of substrate 50, processing unit 12 by with the image data phase that gets
Corresponding image is shown in display unit 14.
In step S03 determine field angle 15A in two sides length be equal to or be greater than specified value in the case where or
After step S04, processing unit 12 obtains person according in the state of in field angle 15A including the side equal to or more than specified value
The image data 22 arrived detects the position (step S05) in corner 51.Hereinafter, with reference to Fig. 4 B to detection 51 position of corner processing into
Row explanation.
Fig. 4 B be by include in field angle 15A specified value or more length side in the state of the image data that gets
22 figures indicated as image.Firstly, it is linearly extended to detect the side extended transversely straight and longitudinal direction in image data 22
Side.In the detection on the side, it can use the template comprising straight line side and carry out pattern match.It in addition to this, can basis
The pixel column that the pixel of the part significantlyd change along longitudinal direction by brightness forms detects the side being laterally extended.And it is possible to according to by
The pixel column of the pixel composition for the part that brightness transversely significantlys change detects the side longitudinally extended.
The position of intersection point (datum mark) 28 on the extended line on two sides that processing unit 12 will test is used as corner 51
Position.Processing unit 12 will indicate that the extended line on two sides detected and the information of datum mark 28 are shown in display unit 14.For example,
The extended line that two sides are indicated with solid line or dotted line indicates the intersection point of the two with plus sige.Moreover, the coordinate that will indicate datum mark
Information 29 be shown in display unit 14 in digital form.
Then, with reference to Fig. 5 A~Fig. 5 D, the excellent effect of above-described embodiment is illustrated.In the above-described embodiments, energy
The position of the substrate 50 of alignment mark is not formed in enough detections.Moreover, being also able to carry out base even if 50 front and back sides of substrate are overturn
The position detection of plate 50.
The image in the corner 51 when Fig. 5 A is the shape and size up to specification by the cut-out in the corner 51 of substrate 50
The figure that data are indicated as image.In this way, in the shape and size up to specification of substrate 50, it can be by being based on embodiment
Method detection corner 51 datum mark 28 position.
Fig. 5 B is that the image data in the corner 51 when the size of the cut-out in the corner 51 of substrate 50 to be less than to specification is made
The figure indicated for image.Using a template on two sides comprising bevel edge and its two sides, it is difficult to pass through figure
Case matches the position for accurately detecting corner 51.In the present embodiment, for the vertex at bevel edge both ends, pattern is carried out respectively
Match to detect the vertex at bevel edge both ends, therefore, even if the length of bevel edge is uneven, also can with high accuracy detect angle portion 51
Two sides.As a result, it is possible to high accuracy detect the position of datum mark 28.
Fig. 5 C is that the image data in the corner 51 when the shape of the cut-out in the corner 51 of substrate 50 to be deviateed to specification is made
The figure indicated for image.In the example shown in Fig. 5 C, two side institute angle degree in bevel edge and angle portion 51 deviate from 45
Degree.For the vertex at bevel edge both ends, pattern match is carried out respectively using different templates 20B, 20C to detect the top at bevel edge both ends
Therefore point even if bevel edge deviates from 45 degree, also can easily detect the vertex at bevel edge both ends by pattern match.Corner
51 datum mark 28 is two side determinations by extending angle portion 51, therefore, even if the direction of bevel edge deviates from 45 degree,
The position detection accuracy of datum mark 28 will not decline.
Fig. 5 D is the figure in the corner 51 when the posture by substrate 50 in face on direction of rotation is slightly tilted from target pose
The figure indicated as data as image.For example, two sides in angle portion 51 relative in field angle 15A (Fig. 1) longitudinal direction and
Lateral inclination.At this point, by making template 20B, 20C tilt and carry out the angle that pattern match is also able to detect bevel edge both ends.Corner
51 datum mark 28 is two side determinations by extending angle portion 51, therefore, even if two sides are relative to longitudinal and horizontal
To inclination, the position detection accuracy of datum mark 28 will not decline.
Moreover, in embodiment, the position in corner 51 is detected due to extending two sides in angle portion 51, position
Testing result do not influenced by the shape of the apex portion in corner 51.For example, even if in the apex due to deviation in manufacture
It is divided into irregular shape, also can with high accuracy detect the position in corner 51.
In the above-described embodiments, the basis as the position for calculating corner 51 has used in field angle comprising rule
The image data 22 (Fig. 4 B) on the side of the above length of definite value.Therefore, the extended line on two sides can be with high accuracy determined.Its
As a result, it is possible to improve according to the extended line and the counting accuracy of the position calculated datum mark 28 (Fig. 4 B).
Also, it in the above-described embodiments, is shot according to the movement of position detecting device by photographic device 11A, 11B (Fig. 1)
To the image of substrate 50 and the image of template when carrying out pattern match be shown in display unit 14.Therefore, operator can root
The action state of position detecting device is recognized according to the information being shown in display unit 14.And it is possible to according to these information come
Confirm whether the movement of position detecting device is normal.
Then, with reference to Fig. 6, the position detecting device based on another embodiment is illustrated.Hereinafter, omit to Fig. 1
The explanation of the identical structure of embodiment shown in~Fig. 5 D.
Fig. 6 is the process of the processing of position detection performed by the processing unit 12 of the position detecting device based on the present embodiment
Figure.The processing of step S01 and S02 are identical as the processing of step S01 and S02 of embodiment shown in Fig. 2.
In the present embodiment, in step S03a, the length and specified value on two sides in field angle 15A are compared
Compared with therefore, it is determined that whether the length on two sides in field angle 15A is equal to specified value.Here, if two sides in field angle 15A
Length and specified value difference the image data according to acquired in photographic device 11A, 11B measure length when measuring accuracy
And within the scope of the worst error generated, then processing unit 12 determines that the length on two sides in field angle 15A is equal to specified value.
If the length on two sides in field angle 15A is not equal to specified value, processing unit 12 keeps substrate 50 mobile so that view
The length on two sides in the 15A of rink corner is equal to specified value (step S04a).
Determined in the case that the length on two sides in field angle 15A is equal to specified value or in step in step S03a
After S04a, processing unit 12 is got according in the state of in field angle 15A including two sides equal to the length of specified value
Image data 22 detect corner 51 position.The processing and the processing phase of the step S05 of embodiment shown in Fig. 2 of step S05
Together.
In the present embodiment, the position deviation of datum mark 28 (Fig. 4 B) in field angle 15A in corner 51 becomes smaller.Due to
It can make the influence homogenization of the aberration of the lens of photographic device 11A when detection position every time, therefore position detection can be reduced
Accuracy deviation.
Then, with reference to Fig. 7 A and Fig. 7 B, the position detecting device based on another embodiment is illustrated.Hereinafter, omitting
To the explanation of structure identical with embodiment shown in FIG. 1 to FIG. 5 D.
Fig. 7 A is the plan view in the present embodiment as the substrate 50 of position detection object.Implement shown in FIG. 1 to FIG. 5 C
Become the shape that there is the substrate 50 of position detection object corner 51 linearly to be cut off in example, but in the present embodiment, becomes
The shape that there is the substrate 50 of the object of position detection corner 51 to be cut off by round.
Fig. 7 B is template 20A, 20B, 20C used in pattern match performed in the step S02 using Fig. 2 as figure
As and indicate figure.Template 20A, 20B, 20C of Fig. 7 B is corresponding with template 20A, 20B, 20C of Fig. 3 B respectively.In this implementation
In example, the circle in the corner 51 corresponding to substrate 50, the pattern of template 20A, 20B, 20C are also with fillet.
It, being capable of the substrate 50 with rounded corners of diagonal section 51 progress position by using template 20A, 20B, 20C shown in Fig. 7 B
Detection.
Then, with reference to Fig. 8~Fig. 9 B, the position detecting device based on another embodiment is illustrated.Hereinafter, omission pair
The explanation of structure identical with embodiment shown in FIG. 1 to FIG. 5 D.
Fig. 8 is the flow chart of the processing of position detection performed by the position detecting device based on the present embodiment.By substrate 50
The processing (step S11) that is supported on supporting part 10 and make the 1st corner enter the processing (step S12) in field angle respectively with figure
The processing of step S01 and S02 shown in 2 is identical.
In the present embodiment, after entering the 1st corner in field angle, processing unit 12 make via a side and with the 1st jiao
The 2nd adjacent corner of portion enters in field angle (step S13).For example, entering the feelings in field angle 15A (Fig. 1) in the 1st corner
Under condition, enter the 2nd corner in field angle 15B.The processing for entering the 2nd corner in field angle 15B can be applicable in the step with Fig. 2
The identical method of processing of rapid S02.
Fig. 9 A is the plane of the positional relationship between field angle 15A, the 15B and substrate 50 indicated when executing step S13
Figure.It will be benchmark direction (× direction) from the origin of field angle 15B towards the direction definition of the origin of field angle 15A.At this point, base
Each side of plate 50 is tilted relative to reference direction.
The state and the 2nd corner that processing unit 12 enters in field angle according to the 1st corner enter the state in field angle
The relative positional relationship in two corners is calculated, posture (step S14) of the substrate 50 in face on direction of rotation is thus detected.Place
The testing result of posture of the reason portion 12 according to substrate 50 in face on direction of rotation come make supporting part 10 rotate, thus carry out substrate
50 contraposition (step S15) in face on direction of rotation.
Fig. 9 B is the plane of the positional relationship between field angle 15A, 15B and substrate 50 after indicating execution step S15
Figure.One group of side of substrate 50 becomes parallel relative to reference direction.
After having carried out contraposition of the substrate 50 in face on direction of rotation, processing unit 12 detects the position in the 1st corner again
Set (step S16).The position in the 1st corner can be examined by the same order of the step S02 to S05 with Fig. 2
It surveys.Similarly, processing unit 12 detects the position (step S17) in the 2nd corner again.
In the embodiment shown in Fig. 8~Fig. 9 B, as shown in Figure 9 B, substrate 50 is able to carry out in face on direction of rotation
Contraposition, and it is able to detect position of the substrate 50 in the both direction in face.
Then, with reference to Figure 10, the position detecting device based on another embodiment is illustrated.Hereinafter, omit to Fig. 1
The explanation of the identical structure of~embodiment shown in Fig. 8.
Figure 10 is the flow chart of the processing of position detection performed by the position detecting device based on the present embodiment.Firstly, will
Substrate 50 is supported on the bearing surface of supporting part 10 (Fig. 1) (step S21) in the 1st face-up mode.Shown in the processing and Fig. 2
Step S01 processing it is identical.
The position (step S22) of the detection substrate 50 of processing unit 12.Position detection processing and step S02 shown in Fig. 2 are extremely
The processing of S05 or step S12 to S16 shown in Fig. 8 are identical.
Then, processing unit 12 according to the length on two sides in field angle be specified value more than when corner 51 picture number
According to production template (step S23).Hereinafter, the production processing to template is illustrated.In step S05 (Fig. 2), carry out for examining
The pattern match of the image data 22 (Fig. 4 B) of 51 position of angle measurement portion and template 20B, 20C (Fig. 3 B), and from actual picture number
The image for cutting part corresponding with template 20B, 20C according to 22.To the image that is cut carry out mirror image conversion and as template,
And it is stored in storage unit 13.The template that the image making that basis is cut from image data 22 goes out area as dynamic template
Template 20A, 20B, the 20C (Fig. 3 B) not produced in the specification shape according to substrate 50.
After producing dynamic template, processing unit 12 carries out the processing (step S24) in the 1st face of substrate 50.For example, from
Ink gun is towards the 1st face discharge ink, to form the insulating resin film of desired flat shape.
If processing terminate in the 1st face, so that 50 front and back sides of substrate is overturn (step S25), make 2nd face opposite with the 1st face
Upward.It is overturn about front and back sides, such as is controlled mechanical arm by processing unit 12 and carried out.Alternatively, it is also possible to manually overturn
Front and back sides.
Processing unit 12 is detected (step S26) to the position of the substrate 50 of the 2nd face-up state.It detects in the position
In processing, when executing the processing of step S02 to S05 shown in Fig. 2, carry out generation using the dynamic template produced in step S23
For template 20A, 20B, 20C (Fig. 3 B).More specifically, from the image data of substrate 50 search for specific position when, using from
Shoot the dynamic template that the corresponding position of image data obtained from the 1st face is cut.
After the position of detection substrate 50, processing unit 12 carries out the processing (step S27) in the 2nd face of substrate 50.
In the embodiment shown in fig. 10, the position of substrate 50 is detected using dynamic template in step S26.
Therefore, even if in the case where the shape in corner 51 deviates specification shape, also it is able to suppress the accuracy decline of pattern match.Its
As a result, it is possible to improve the relative alignment accuracy between the 1st face and the 2nd face.
Then, with reference to Figure 11 A and Figure 11 B, the position detecting device based on another embodiment is illustrated.Hereinafter, saving
Slightly to the explanation of structure identical with embodiment shown in FIG. 1 to FIG. 5 D.
Figure 11 A is plane when detecting position using the position detecting device based on the present embodiment as the substrate 50 of object
Figure.The corner 51 of substrate 50 is not removed, shows the vertex of approximate right angle.
The figure that template 20 is indicated as image used in pattern match when Figure 11 B is by position detection.In Fig. 1
In embodiment shown in~Fig. 5 D, detect corner 51 when (step S02, S05) pattern match in used two template 20B,
20C (Fig. 4 B).In contrast, in the present embodiment, a template 20 (figure is used in pattern match when detecting corner 51
11B)。
In the present embodiment, due to two in the image data on basis for becoming detection 51 position of corner in field angle
The length on side becomes specified value or more (step S03), therefore can be improved the position detection of the datum mark 28 (Fig. 4 B) in corner 51
Accuracy.
Then, with reference to Figure 12 A and Figure 12 B, the position detecting device based on another embodiment is illustrated.Hereinafter, saving
Slightly to the explanation of structure identical with embodiment shown in FIG. 1 to FIG. 5 D and Fig. 8~Fig. 9 B.
Figure 12 A and Figure 12 B are the approximate stereograms of the position detecting device based on the present embodiment.Implementation shown in Fig. 1
In example, corresponding to substrate 50 two corners 51 and configure there are two photographic device 11A, 11B, but in the present embodiment, only
Configured with a photographic device 11A.In the embodiment shown in fig. 8, the 1st corner is made to enter photographic device in step s 12
In the field angle 15A of 11A, and enter the 2nd corner in the field angle 15B of photographic device 11B.
In the present embodiment, in step s 12, the 1st corner 51 is made to enter photographic device in the same manner as the embodiment of Fig. 8
In the field angle 15A of 11A (Figure 12 A).And in step s 13, it is moved in translation substrate 50, is taken the photograph so that the 2nd corner 51 be made to enter
As device 11A field angle 15A in (Figure 12 B).
Later, in step s 16, enter the 1st corner 51 in the field angle 15A of photographic device 11A, and execute detection the
The processing of the position in 1 corner 51.In step S17, enter the 2nd corner 51 in the field angle 15A of photographic device 11A, and hold
The processing of the position in the 2nd corner 51 of row detection.
As shown in Figure 12 A and Figure 12 B, only using a photographic device 11A also can be to the position in two corners of substrate 50
It sets and is detected.In the present embodiment, preferably the moving direction of the substrate 50 from the state of Figure 12 A to the state of Figure 12 B is determined
Justice is reference direction (× direction) shown in Fig. 9 A and Fig. 9 B.
Then, with reference to Figure 13, the film formation device equipped with position detecting device based on the above embodiment is illustrated.
Figure 13 is the general principal view of the film formation device based on the present embodiment.Pedestal 30 is supported via mobile mechanism 31
Portion 10.Supporting part 10 is equivalent to the supporting part 10 of embodiment shown in FIG. 1.Substrate 50 is supported on the upper surface (branch of supporting part 10
Bearing surface) on.Mobile mechanism 31 can make supporting part 10 to the moving in two dimensional directions for being parallel to bearing surface and can make supporting part
10 in the face for being parallel to bearing surface direction rotated.In general, the bearing surface of supporting part 10 keeps horizontal.
The top for the substrate 50 being supported on supporting part 10 configured with multiple ink guns 33 and multiple photographic device 11A,
11B.Ink gun 33 and photographic device 11A, 11B are supported on pedestal 30 by door shaped stent 32.Photographic device 11A, 11B points
Lifting is not able to carry out by elevating mechanism 17A, 17B.Multiple nozzle bores are provided on each ink gun 33.From nozzle bore
To the drop of 50 discharge membrane material of substrate.
Photographic device 11A, 11B shoot a part for the substrate 50 being supported on supporting part 10, and will acquire
The image data of two dimensional image be sent to processing unit 12.Photographic device 11A, 11B and processing unit 12 are respectively equivalent to shown in Fig. 1
Embodiment photographic device 11A, 11B and processing unit 12.Moreover, processing unit 12 can be by controlling elevating mechanism 17A, 17B
Go up and down photographic device 11A, 11B, so as to adjust the focusing position of photographic device 11A, 11B.
Processing unit 12 controls mobile mechanism 31 and ink gun 33 according to the image data for the shape for defining the film that should be formed.
Liquid film material by making attachment solidifies so as to form film.Thereby, it is possible to desired shape is formed on substrate 50
Film.As membrane material, light-cured resin, heat-curing resin etc. can be used.Being configured in the side of ink gun 33 makes
The cured light source of the membrane material being attached on substrate 50 or heat source.
Various orders and data are inputted from input unit 16 to processing unit 12.Keyboard, fixed point can be used for example in input unit 16
Equipment, USB port, communication device etc..Various information related with the movement of film formation device are exported to display unit 14.Display unit 14
Liquid crystal display etc. can be used for example.In addition, also can be used should show to external display device transmission as display unit 14
The communication device for the image data shown.
In the present embodiment, by based on the method for any embodiment shown in Fig. 1~Figure 12 B come the position to substrate 50
It is detected.Thereby, it is possible to high accuracy detect out position.
Each embodiment is only example, naturally, can carry out part to structure shown in different embodiments
Replacement or combination.About in multiple embodiments based on mutually isostructural identical function and effect not in each example
It refers to one by one.Moreover, the present invention is not only limited in above-described embodiment.For example, various modifications may be made, improves and combines, this
It is apparent to those skilled in the art.
Symbol description
10- supporting part, 11A, 11B- photographic device, 12- processing unit, 13- storage unit, 14- display unit, 15A, 15B- visual field
Angle, 16- input unit, 17A, 17B- elevating mechanism, 20,20A, 20B, 20C- template, 22- image data, the benchmark in the corner 28-
Point, 29- indicate the information of the coordinate of datum mark, 30- pedestal, 31- mobile mechanism, 32- door shaped stent, 33- ink gun, 50- base
Plate, the corner 51-.
Claims (9)
1. a kind of position detecting device comprising:
Supporting part supports the substrate with corner；
Photographic device shoots a part of the substrate in field angle；And
Processing unit,
The processing unit keeps the substrate or the photographic device mobile, so as to be included in the field angle of the photographic device
The length on two sides in the folder corner of the substrate be equal to specified value or longer than the specified value,
And the base is detected based on the image data got in the field angle of the photographic device is shot after movement
The position in the corner of plate.
2. a kind of position detecting device comprising:
Supporting part supports the substrate with corner；
Photographic device shoots a part of the substrate；
Processing unit；And
Display unit shows image,
The image in the corner of the substrate in the field angle of the photographic device is shown in described aobvious by the processing unit
Show portion,
And keep the substrate or the photographic device mobile, so that included in the field angle of the photographic device is described
The length on two sides in the folder corner of substrate is equal to specified value or longer than the specified value, and will be described in after movement
The image in the corner in the field angle of photographic device is shown in the display unit,
And the coordinate of the position in the corner of the image of the substrate in the field angle of the photographic device is found out, and will
For determining that the information of calculated coordinate is shown in the display unit.
3. a kind of method for detecting position, which is characterized in that have following process:
The process that 1st corner of the substrate with corner is shot and obtains the 1st image data；
The length and specified value of the part being contained in the 1st image data in two sides for pressing from both sides the 1st corner are carried out
Compare, if being contained in the length of the part in the 1st image data in two sides in folder the 1st corner is not the regulation
More than value, then make shooting area mobile so that the length for the part being contained in the 1st image data becomes the specified value
More than, the substrate is shot later, thus the process for obtaining the 2nd image data；And
Based on the 2nd image data, the process for finding out the position in the 1st corner of the substrate.
4. method for detecting position according to claim 3, which is characterized in that
By carrying out the pattern match of the 1st image data and template, determine to be contained in two sides in folder the 1st corner
Whether the length of the part in the 1st image data is the specified value or more.
5. method for detecting position according to claim 4, which is characterized in that
The template is the specification of the outer shape based on the substrate and makes.
6. method for detecting position according to claim 4, which is characterized in that
The template is made based on image obtained from the 1st corner of the substrate is shot from opposite sides.
7. method for detecting position according to any one of claim 3 to 6, which is characterized in that have following process:
Before obtaining the 1st image data, the estimated location in the 1st corner of the substrate is shot and is obtained
The process of original data；And
If two respective a part in side not comprising folder the 1st corner in the original data, by described 1st jiao
Portion is configured in field angle, obtains the process of the 1st image data later.
8. the method for detecting position according to any one of claim 3 to 7, which is characterized in that have following process:
After the position for detecting the 1st corner, 2nd corner adjacent with the 1st corner is shot and is obtained
Third image data, and substrate direction of rotation in face is found out based on the 1st image data and the third image data
On posture process；And
According to posture of the substrate in face on direction of rotation, rotate the substrate in the in-plane direction, to be revolved
Turn the process of the contraposition on direction,
The position of contraposition and then secondary detection the 1st corner in carry out face on direction of rotation.
9. the method for detecting position according to any one of claim 3 to 8, which is characterized in that
In the process for obtaining the 2nd image data, if being contained in the 1st image in two sides in folder the 1st corner
The length of part in data is not equal to the specified value, then makes shooting area movement so that in two sides in the 1st corner
The length for being contained in the part in the 1st image data is equal to the specified value, shoots later to the substrate, thus
Obtain the 2nd image data.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017055685 | 2017-03-22 | ||
| JP2017-055685 | 2017-03-22 | ||
| PCT/JP2018/010826 WO2018174011A1 (en) | 2017-03-22 | 2018-03-19 | Position detection device and position detection method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110446905A true CN110446905A (en) | 2019-11-12 |
Family
ID=63585488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201880005782.4A Pending CN110446905A (en) | 2017-03-22 | 2018-03-19 | Position detecting device and method for detecting position |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6862068B2 (en) |
| KR (1) | KR20190131475A (en) |
| CN (1) | CN110446905A (en) |
| TW (1) | TWI654500B (en) |
| WO (1) | WO2018174011A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112629444A (en) * | 2021-03-08 | 2021-04-09 | 南京航空航天大学 | Automatic correction method for radiation library cover plate dropping errors based on machine vision |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6984451B2 (en) * | 2018-01-31 | 2021-12-22 | 株式会社豊田自動織機 | Measuring device and measuring method |
| KR102616399B1 (en) | 2021-08-20 | 2023-12-20 | 지영배 | A Nano bubble dishwasher |
| KR102616395B1 (en) | 2021-08-20 | 2023-12-20 | 지영배 | A Nano bubble device for dishwasher |
| KR102632696B1 (en) | 2021-09-16 | 2024-02-01 | 지영배 | A Nano bubble device |
| KR102632695B1 (en) | 2021-09-16 | 2024-02-01 | 지영배 | A Nano bubble dishwasher |
| KR20240136783A (en) | 2023-03-07 | 2024-09-19 | 주식회사 일성 | A Nano bubble dishwasher |
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| JPH05149716A (en) * | 1991-11-29 | 1993-06-15 | Toshiba Corp | Corner detecting method |
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| CN101561248A (en) * | 2008-04-17 | 2009-10-21 | 鸿富锦精密工业（深圳）有限公司 | Position measurement device and measuring method |
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| JP3763229B2 (en) * | 1999-05-11 | 2006-04-05 | 松下電器産業株式会社 | Position detection method by image recognition |
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| JP5907110B2 (en) | 2013-04-12 | 2016-04-20 | 信越化学工業株式会社 | Screen printing method and screen printing apparatus |
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2018
- 2018-03-09 TW TW107108031A patent/TWI654500B/en not_active IP Right Cessation
- 2018-03-19 KR KR1020197019474A patent/KR20190131475A/en not_active Application Discontinuation
- 2018-03-19 CN CN201880005782.4A patent/CN110446905A/en active Pending
- 2018-03-19 JP JP2019507664A patent/JP6862068B2/en active Active
- 2018-03-19 WO PCT/JP2018/010826 patent/WO2018174011A1/en active Application Filing
Patent Citations (5)
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| JPH04238206A (en) * | 1991-01-22 | 1992-08-26 | Matsushita Electric Ind Co Ltd | Multi-visual field recognizing method for pattern |
| JPH05149716A (en) * | 1991-11-29 | 1993-06-15 | Toshiba Corp | Corner detecting method |
| JP2002288634A (en) * | 2001-03-28 | 2002-10-04 | Juki Corp | Part position detecting method and device |
| CN101331385A (en) * | 2005-12-16 | 2008-12-24 | 旭化成电子材料元件株式会社 | Position detector |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112629444A (en) * | 2021-03-08 | 2021-04-09 | 南京航空航天大学 | Automatic correction method for radiation library cover plate dropping errors based on machine vision |
| CN112629444B (en) * | 2021-03-08 | 2021-06-22 | 南京航空航天大学 | Automatic correction method for radiation library cover plate dropping errors based on machine vision |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20190131475A (en) | 2019-11-26 |
| TW201835692A (en) | 2018-10-01 |
| TWI654500B (en) | 2019-03-21 |
| JP6862068B2 (en) | 2021-04-21 |
| JPWO2018174011A1 (en) | 2020-01-23 |
| WO2018174011A1 (en) | 2018-09-27 |
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