WO2018159418A1

WO2018159418A1 - Adhesive tape of use in processing of semiconductor substrate, and method for manufacturing semiconductor device

Info

Publication number: WO2018159418A1
Application number: PCT/JP2018/006282
Authority: WO
Inventors: 佳典長尾
Original assignee: 住友ベークライト株式会社
Priority date: 2017-02-28
Filing date: 2018-02-21
Publication date: 2018-09-07
Also published as: CN110352472B; TWI717587B; JPWO2018159418A1; PH12019501778B1; TW201842114A; CN110352472A; JP6443590B1; MY176699A; SG11201907801PA; PH12019501778A1

Abstract

According to the present invention, an adhesive tape for use in the processing of a semiconductor substrate is provided, which comprises a base member and an adhesive layer laminated on one surface of the base member, and which can be used in such a manner that a sealed semiconductor connected body comprising a substrate, multiple semiconductor elements arranged on the substrate and a sealing part for sealing the multiple semiconductor elements is temporarily fixed onto the base member with the adhesive layer interposed therebetween when the sealed semiconductor connected body is cut in the thickness direction to produce multiple semiconductor sealed bodies. The adhesive tape for use in the processing of a semiconductor substrate is characterized in that the adhesive layer contains a release agent for reducing the adhesion of the adhesive layer to the sealing part upon the removal of the semiconductor sealed bodies from the adhesive tape for use in the processing of a semiconductor substrate, the sealing part is made from a sealing material containing an epoxy-group-containing compound, the epoxy-group-containing compound has a double bond in the molecular structure thereof, and the release agent is a silicone-type oil or a fluorine-containing surfactant.

Description

Adhesive tape for processing semiconductor substrate and method for manufacturing semiconductor device

The present invention relates to an adhesive tape for processing a semiconductor substrate and a method for manufacturing a semiconductor device.

Demands for higher density and higher integration of semiconductor devices are increasing in response to the recent increase in functionality of electronic devices and expansion to mobile applications, and the increase in capacity and density of IC packages is progressing.

As this semiconductor device, a semiconductor device in which a semiconductor element is mounted on a substrate and modularized can be cited. As a method for manufacturing this semiconductor device, for example, the following method has been proposed.

That is, first, a plurality of semiconductor elements are placed on a substrate, and then sealed with a sealing portion made of a sealing material so as to cover the semiconductor elements placed on the substrate. A stop connector (semiconductor substrate) is obtained.

Next, an adhesive tape for processing a semiconductor substrate is attached to the sealing part side of the obtained semiconductor sealed connector, and the periphery of the semiconductor sealed connector is fixed with a wafer ring. While maintaining this state, the dicing blade is used to cut the semiconductor encapsulated connector in the thickness direction corresponding to each semiconductor element included in the semiconductor encapsulated connector (dicing). ). As a result, a plurality of semiconductor sealing bodies are formed on the semiconductor substrate processing adhesive tape. Thereby, a some semiconductor sealing body is manufactured collectively on the adhesive tape for semiconductor substrate processing.

Next, after the expanding step of expanding the adhesive tape for processing a semiconductor substrate in the surface direction, the semiconductor encapsulant obtained by dividing into pieces is picked up. Thereafter, the bump is formed on the lower surface side of the substrate so that the bump is electrically connected to the electrode provided in the semiconductor element via a conductor post previously formed on the substrate provided in the semiconductor sealing body. Thereby, a semiconductor device is obtained.

In recent years, various studies have been made on the adhesive tape for processing a semiconductor substrate used for manufacturing such a semiconductor device (see, for example, Patent Document 1).

This semiconductor substrate processing adhesive tape generally has a base material (film base material) and an adhesive layer formed on the base material. The semiconductor sealing connector is fixed to the semiconductor substrate processing adhesive tape so that the adhesive layer and the sealing portion are in contact with each other. In addition, the adhesive layer usually contains an adhesive base resin, a photocurable resin, and the like so that the semiconductor sealing body formed after the dicing process of the semiconductor sealing connector can be easily picked up. It is comprised with the resin composition. Therefore, if energy is provided to the adhesive layer after the dicing step, the resin composition is cured and the adhesiveness of the adhesive layer is lowered. Then, the semiconductor sealing body is picked up by peeling the semiconductor sealing body from the adhesive layer.

Here, as described above, in the method of manufacturing a semiconductor device, it is required that the semiconductor sealed connector is firmly fixed by the adhesive tape for processing a semiconductor substrate during the dicing process. Further, after energy is applied to the adhesive layer after the dicing step, the semiconductor sealing body obtained by cutting the semiconductor sealing connector can be easily peeled from the semiconductor substrate processing adhesive tape, that is, the semiconductor It is required that the sealing body can be easily picked up.

However, depending on the combination of the sealing material of the sealing portion provided in the semiconductor sealing connector and the resin composition constituting the adhesive layer provided in the adhesive tape for processing a semiconductor substrate, energy was imparted to the adhesive layer after the dicing process. Even so, the adhesiveness of the adhesive layer to the sealing portion cannot be sufficiently reduced. For this reason, there existed a problem that picking up of the semiconductor sealing body from the adhesive tape for semiconductor substrate processing could not be implemented easily.

JP 2009-245989 A

An object of the present invention is to obtain a plurality of semiconductor encapsulated bodies by cutting in a thickness direction in a dicing process in a state where the semiconductor encapsulated connector is firmly fixed, and after the dicing process, It is providing the adhesive tape for semiconductor substrate processing which can pick up a semiconductor sealing body easily by providing to an adhesion layer. Another object of the present invention is to provide a method for manufacturing a semiconductor device using such an adhesive tape for processing a semiconductor substrate.

Such an object is achieved by the present invention described in the following (1) to (11).
(1) A base material and an adhesive layer laminated on one surface of the base material,
A plurality of semiconductor encapsulated bodies by cutting a semiconductor encapsulated connector including a substrate, a plurality of semiconductor elements disposed on the substrate, and a sealing portion for encapsulating the plurality of semiconductor elements in a thickness direction. Is obtained by temporarily fixing the semiconductor encapsulated connector to the base material via the adhesive layer, and is an adhesive tape for processing a semiconductor substrate,
The pressure-sensitive adhesive layer contains a release agent for reducing the adhesion with the sealing portion when the semiconductor sealing body is peeled from the pressure-sensitive adhesive tape for processing a semiconductor substrate,
The sealing part is composed of a sealing material containing an epoxy group-containing compound,
The epoxy group-containing compound has a double bond in its molecular structure,
The pressure-sensitive adhesive tape for processing a semiconductor substrate, wherein the release agent is a silicone-based oil or a fluorine-based surfactant.

(2) The release agent is the silicone oil,
The adhesive tape for processing a semiconductor substrate according to (1), wherein the silicone-based oil is a modified silicone oil.

(3) The adhesive tape for processing a semiconductor substrate according to the above (1) or (2), wherein the adhesive layer further contains an adhesive base resin.

(4) The adhesive tape for processing a semiconductor substrate according to (3), wherein the glass transition point of the base resin is −30 ° C. or lower.

(5) The adhesive tape for processing a semiconductor substrate according to (3) or (4), wherein the base resin has a weight average molecular weight of 300,000 to 1.8 million.

(6) The adhesive tape for processing a semiconductor substrate according to any one of (3) to (5), wherein the adhesive layer further contains a curable resin that is cured by application of energy.

(7) The adhesive tape for processing a semiconductor substrate according to (6), wherein a contact angle of the surface of the adhesive layer with respect to hexadecane is 20 ° or more before the application of the energy.

(8) The adhesive tape for processing a semiconductor substrate according to (6) or (7), wherein a contact angle with respect to hexadecane on the surface of the adhesive layer is 10 ° or more after the application of the energy.

(9) The adhesive tape for processing a semiconductor substrate according to any one of (1) to (8), wherein the adhesive layer has a thickness of 1 μm to 30 μm.

(10) The adhesive force between the adhesive layer and the sealing portion before application of the energy is 70 cN / 25 mm or more and less than 1000 cN / 25 mm,
The adhesive tape for processing a semiconductor substrate according to any one of (6) to (9), wherein an adhesive force between the adhesive layer and the sealing portion after the application of energy is 60 cN / 25 mm or more and less than 90 cN / 25 mm. .

(11) A method of manufacturing a semiconductor device using the adhesive tape for processing a semiconductor substrate according to any one of (1) to (10),
A semiconductor sealing connector forming step for obtaining the semiconductor sealing connector by sealing with the sealing part so as to cover the plurality of semiconductor elements placed on the substrate;
An attaching step of attaching the adhesive tape for processing a semiconductor substrate to the semiconductor sealing connector so that the sealing portion and the adhesive layer are in contact with each other;
The semiconductor encapsulated connector is diced in a thickness direction corresponding to the semiconductor elements included in the semiconductor encapsulated connector, so that the semiconductor encapsulated connector is separated into pieces on the adhesive tape for processing a semiconductor substrate. A dicing process for forming a semiconductor encapsulant;
After applying energy to the adhesive layer, a peeling step of peeling the semiconductor encapsulant from the adhesive tape for processing a semiconductor substrate;
The bumps are connected to the electrodes of the semiconductor element of the substrate so that the bumps are electrically connected to the electrodes of the semiconductor element through conductor posts previously formed on the substrate of the semiconductor encapsulant. And a bump connection step formed on the opposite side.

According to the present invention, the sealing material constituting the sealing part contains an epoxy group-containing compound having a double bond in its molecular structure, and the low stress property of the sealing part is improved. Due to the low stress property of the sealing portion, the adhesion between the sealing portion and the adhesive layer is improved. As a result, in the dicing process, in a state where the semiconductor sealed connector is firmly fixed to the adhesive tape for processing a semiconductor substrate, the semiconductor sealed connector is cut (diced) in the thickness direction thereof to form a plurality of semiconductor sealed members Can be obtained. In addition, the adhesive layer contains a predetermined release agent, thereby containing an epoxy group-containing compound having a double bond in its molecular structure when energy is applied to the adhesive layer after the dicing step. The adhesiveness of the adhesive layer can be reliably reduced even for the sealing portion formed of the sealing material. Therefore, it is possible to easily pick up the semiconductor encapsulant from the adhesive tape for processing a semiconductor substrate.

Therefore, the semiconductor device manufactured by applying the semiconductor device manufacturing method using the semiconductor substrate processing adhesive tape has excellent reliability.

FIG. 1 is a longitudinal sectional view showing an example of a semiconductor device manufactured using the adhesive tape for processing a semiconductor substrate of the present invention. FIG. 2 is a longitudinal sectional view for explaining a method of manufacturing the semiconductor device shown in FIG. 1 using the adhesive tape for processing a semiconductor substrate of the present invention. FIG. 3 is a longitudinal sectional view for explaining a method of manufacturing the semiconductor device shown in FIG. 1 using the adhesive tape for processing a semiconductor substrate of the present invention. FIG. 4 is a longitudinal sectional view showing an embodiment of the adhesive tape for processing a semiconductor substrate of the present invention. FIG. 5 is a longitudinal sectional view for explaining a method of manufacturing the adhesive tape for processing a semiconductor substrate shown in FIG.

Hereinafter, the manufacturing method of the adhesive tape for processing a semiconductor substrate and the semiconductor device of the present invention will be described in detail.

First, prior to describing the adhesive tape for processing a semiconductor substrate of the present invention, a semiconductor device manufactured using the adhesive tape for processing a substrate of a semiconductor of the present invention, that is, a method for manufacturing the semiconductor device of the present invention is described. A semiconductor device manufactured by application will be described.

<Semiconductor device>
FIG. 1 is a longitudinal sectional view showing an example of a semiconductor device manufactured using the adhesive tape for processing a semiconductor substrate of the present invention. In the following description, the upper side in FIG. 1 is referred to as “upper” and the lower side is referred to as “lower”.

A semiconductor device 20 shown in FIG. 1 includes an interposer 25 (substrate) provided with a conductor post (not shown) disposed so as to penetrate in the thickness direction, a semiconductor element 26 disposed on the interposer 25, and a semiconductor. A sealing part 27 (mold part) composed of a sealing material for sealing the element 26, a wiring 23 electrically connected to the conductor post, a bump 21 electrically connected to the wiring 23, and a wiring 23 and a covering portion 22 provided so as to expose the bump 21.

The interposer 25 is a substrate that supports the semiconductor element 26, and its planar view shape is usually a square such as a square or a rectangle. The interposer 25 is formed with a plurality of through holes (not shown) penetrating in the thickness direction, and conductor posts are provided corresponding to the through holes.

The semiconductor element 26 has an electrode pad on its lower surface side. The semiconductor element 26 is disposed on the interposer 25 so that the electrode pad corresponds to the conductor post. The number of semiconductor elements 26 to be arranged is not particularly limited, but is one in the present embodiment.

In a state where the semiconductor element 26 is disposed at such a position, the sealing portion 27 made of a sealing material is formed so as to cover the upper surface side of the semiconductor element 26 and the interposer 25.

The conductor post formed corresponding to the through hole of the interposer 25 is electrically connected to the electrode pad provided in the semiconductor element 26 at the upper end thereof.

Further, a wiring 23 formed in a predetermined shape is provided on the lower surface of the interposer 25, and a part of the wiring 23 is electrically connected to the lower end of the conductor post.

Further, a spherical bump 21 is electrically connected to the lower surface of the wiring 23, whereby the semiconductor element 26 and the bump 21 are electrically connected via the electrode pad, the conductor post, and the wiring 23. Connected. Further, a covering portion 22 having an opening 221 for exposing the bump 21 from the lower side is provided on the lower surface side of the interposer 25 so as to cover the wiring 23.

In the present embodiment, the semiconductor device 20 includes one semiconductor element 26, but is not limited to such a configuration. For example, the semiconductor device may include two or more semiconductor elements 26, or may further include an electronic component different from the semiconductor elements 26.

The semiconductor device having such a configuration is manufactured by, for example, the following manufacturing method (the manufacturing method of the semiconductor device of the present invention) using the adhesive tape for processing a semiconductor substrate of the present invention.

<Method for Manufacturing Semiconductor Device>
2 and 3 are longitudinal sectional views for explaining a method of manufacturing the semiconductor device shown in FIG. 1 using the adhesive tape for processing a semiconductor substrate of the present invention. In the following description, the upper side in FIG. 2 is referred to as “upper” and the lower side is referred to as “lower”.

[1] First, a flat sheet material 25 ′ as shown in FIG. 2A is prepared, and a plurality of semiconductor elements 26 are arranged (placed) on the sheet material 25 ′ (FIG. 2). (B) Reference; arrangement step).

The sheet material 25 '(substrate) includes a plurality of through holes (not shown) formed in advance, and further includes conductor posts (not shown) embedded corresponding to the through holes. The conductor posts are formed at positions corresponding to electrode pads (terminals) included in the semiconductor element 26 when the semiconductor element 26 is disposed on the sheet material 25 ′. That is, the number of conductor posts provided corresponding to the through holes of the sheet material 25 ′ is the same as the total number of electrode pads provided in the plurality of semiconductor elements 26 disposed on the sheet material 25 ′.

Further, the sheet material 25 ′ is cut (diced) in the thickness direction to be separated into individual pieces, thereby forming an interposer 25 (substrate) included in the semiconductor device 20 and exhibiting a function of supporting the semiconductor element 26.

The sheet material 25 ′ is not particularly limited as long as the sheet material 25 ′ has a hardness that can support the semiconductor element 26. For example, a core substrate composed of a core material and a buildup material composed of a buildup material Either a rigid substrate (hard substrate) such as a substrate or a flexible substrate (flexible substrate) may be used. Among these, a buildup substrate is particularly preferable. The build-up substrate is preferably used because it is particularly excellent in workability.

Although the build-up substrate is not particularly limited, for example, a cured product such as a resin composition containing a thermosetting resin such as a phenol resin, a urea resin, a melamine resin, or an epoxy resin, a curing agent, and an inorganic filler. Is the main material.

The core substrate is not particularly limited, but is mainly composed of, for example, a thermosetting resin such as cyanate resin, epoxy resin, or bismaleimide-triazine resin.

Furthermore, the flexible substrate is, for example, polyimide, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), polytetrafluoroethylene (PTFE), polyimide benzoxazole (PIBO), liquid crystal polymer, etc. It is composed of a thermoplastic resin or the like.

Further, when the semiconductor element 26 is disposed on the sheet material 25 ′, the semiconductor element 26 is arranged such that the electrode pads of the semiconductor element 26 correspond to the positions of the conductor posts included in the sheet material 25 ′. 25 '. As a result, the semiconductor element 26 is arranged at a desired position (position where the semiconductor element 26 included in the semiconductor device 20 to be formed is arranged) on the sheet material 25 ′.

The semiconductor element 26 may or may not be fixed on the sheet material 25 ′, but is preferably fixed by an adhesive (underfill material) such as an epoxy adhesive. Thereby, when the semiconductor element 26 is sealed with the sealing portion 27 in the next step [2], it is possible to effectively prevent the semiconductor element 26 from being displaced.

[2] Next, a sealing portion 27 is formed so as to cover the sheet material 25 ′ and the semiconductor element 26 on the upper surface side of the sheet material 25 ′, that is, the surface on which the plurality of semiconductor elements 26 are arranged. (Refer FIG.2 (c); sealing part formation process).

Thereby, the semiconductor sealing connection in which the plurality of semiconductor elements 26 arranged on the sheet material 25 ′ (substrate) are sealed by the sealing portion 27 formed of the sealing material on the upper surface side of the sheet material 25 ′. A body 270 (semiconductor substrate) is obtained.

The method for forming the sealing portion 27 is not particularly limited. For example, a thermosetting resin composition such as a granular epoxy resin composition is prepared as a sealing material, and this thermosetting resin composition is prepared as a sealing material. There is a method of compressing and molding the thermosetting resin composition in a molten state after being supplied to the upper surface of the sheet material 25 ′ so as to cover the sheet material 25 ′ and the semiconductor element 26 in a melted state. According to this method, the semiconductor element 26 can be easily and densely sealed on the sheet material 25 ′ with the sealing portion 27.

In the step [1] and this step [2], a plurality of semiconductor elements are placed on the substrate, and then sealed with a sealing material so as to cover the semiconductor elements placed on the substrate. By sealing with a stop part, the semiconductor sealing coupling body formation process of obtaining a semiconductor sealing coupling body is comprised.

Here, the constituent materials of the sealing material will be specifically described. The sealing material is a thermosetting resin composition (for example, a granular epoxy resin composition), and contains an epoxy group-containing compound having a double bond in its molecular structure. Specifically, the granular epoxy resin composition contains, as its constituent material, an epoxy resin and an epoxy group-containing compound having a double bond in its molecular structure, unlike this epoxy resin. Thereby, the low stress property of the sealing part 27, high moisture resistance, and the improvement of quick hardening can be aimed at.

Examples of the epoxy resin include monomers, oligomers, and polymers in general having two or more epoxy groups in one molecule, and the molecular weight and molecular structure are not particularly limited. Specifically, crystalline epoxy resins such as biphenyl type epoxy resin, bisphenol A type epoxy resin, bisphenol F type epoxy resin, stilbene type epoxy resin, hydroquinone type epoxy resin; cresol novolac type epoxy resin, phenol novolac type epoxy resin, Novolac type epoxy resins such as naphthol novolak type epoxy resins; Phenol aralkyl type epoxy resins such as phenylene skeleton-containing phenol aralkyl type epoxy resins, biphenylene skeleton containing phenol aralkyl type epoxy resins, phenylene skeleton containing naphthol aralkyl type epoxy resins; Triphenolmethane type Trifunctional epoxy resins such as epoxy resins and alkyl-modified triphenolmethane epoxy resins; dicyclopentadiene-modified phenolic epoxy Modified phenol type epoxy resins such as cis-resin and terpene modified phenol type epoxy resins; heterocyclic ring-containing epoxy resins such as triazine nucleus-containing epoxy resins, and the like. Among these, one kind or two or more kinds can be used in combination. .

Moreover, the epoxy resin composition contains an epoxy group-containing compound different from the above-described epoxy resin as a constituent material.

This epoxy group-containing compound is a compound having a double bond in its molecular structure and having one or more epoxy groups in one molecule. Examples of such an epoxy group-containing compound include an epoxy group-containing polybutadiene (epoxidized polybutadiene), an epoxy group-containing styrene-butadiene block copolymer, an epoxy group-containing acrylic resin, and an epoxy group-containing silane coupling agent. 1 type or 2 types or more can be used in combination. Among these, an epoxy group-containing compound having an olefin double bond (ethylene bond) is preferable, and an epoxy group-containing polybutadiene is more preferable. Thereby, the low stress property of the sealing part 27, high moisture resistance, and quick-hardening can be improved reliably.

The epoxy group-containing polybutadiene is represented by the following general formula (1), for example.

[In General Formula (1), m and n each independently represents an integer of 2 or more. ]

In the general formula (1), m and n may each independently be an integer of 2 or more, but m is preferably 4 to 11, and m + n is preferably 16 to 43, and m is 8 More preferably, -11 and m + n are 35 to 43.

Furthermore, the epoxy resin composition preferably contains a curing agent as its constituent material.

The curing agent is not particularly limited as long as it can be cured by reacting with the epoxy resin. Examples of the curing agent include linear aliphatic diamines having 2 to 20 carbon atoms such as ethylenediamine, trimethylenediamine, tetramethylenediamine, hexamethylenediamine, metaphenylenediamine, paraphenylenediamine, paraxylenediamine, 4,4 ′. -Diaminodiphenylmethane, 4,4'-diaminodiphenylpropane, 4,4'-diaminodiphenyl ether, 4,4'-diaminodiphenylsulfone, 4,4'-diaminodicyclohexane, bis (4-aminophenyl) phenylmethane, , 5-diaminonaphthalene, meta-xylenediamine, para-xylenediamine, 1,1-bis (4-aminophenyl) cyclohexane, dicyanodiamide and other amino acids; aniline-modified resole resin and dimethyl ether resole resin Phenol resins; phenol novolac resins, cresol novolac resins, tert-butylphenol novolak resins, novolac type phenol resins such as nonylphenol novolak resins; phenol aralkyl resins such as phenylene skeleton-containing phenol aralkyl resins and biphenylene skeleton-containing phenol aralkyl resins; Phenol resin having a condensed polycyclic structure such as a skeleton; polyoxystyrene such as polyparaoxystyrene; alicyclic acid anhydride such as hexahydrophthalic anhydride (HHPA) and methyltetrahydrophthalic anhydride (MTHPA); trimellitic anhydride Acid anhydrides including aromatic acid anhydrides such as acid (TMA), pyromellitic anhydride (PMDA), benzophenone tetracarboxylic acid (BTDA), etc .; Polymer captan compounds such as amides, thioesters and thioethers; isocyanate compounds such as isocyanate prepolymers and blocked isocyanates; and organic acids such as carboxylic acid-containing polyester resins. Use one or a combination of two or more of these. Can do.

The epoxy resin composition may contain an inorganic filler as a constituent material.

The inorganic filler is not particularly limited. For example, silica such as fused crushed silica, fused spherical silica, crystalline silica, secondary agglomerated silica; alumina; titanium white; aluminum hydroxide; talc; clay; mica; glass fiber, etc. These can be used, and one or more of these can be used in combination. Among these, fused spherical silica is particularly preferable. Further, the particle shape is preferably infinitely spherical.

The epoxy resin composition preferably contains a curing accelerator as a constituent material.

The curing accelerator is not particularly limited, and examples thereof include diazabicycloalkenes such as 1,8-diazabicyclo (5,4,0) undecene-7 and derivatives thereof; amine compounds such as tributylamine and benzyldimethylamine; Imidazole compounds such as 2-methylimidazole; organic phosphines such as triphenylphosphine and methyldiphenylphosphine; tetraphenylphosphonium / tetraphenylborate, tetraphenylphosphonium / tetrabenzoic acid borate, tetraphenylphosphonium / tetranaphthoic acid borate, tetra Tetra-substituted phosphonium / tetra-substituted borates such as phenylphosphonium / tetranaphthoyloxyborate, tetraphenylphosphonium / tetranaphthyloxyborate; Triphenylphosphine or the like collected by the like, and these can be used singly or in combination of two or more of them.

Furthermore, in addition to the above-described constituent materials, the epoxy resin composition may include, if necessary, a coupling agent such as γ-glycidoxypropyltrimethoxysilane; a colorant such as carbon black; a natural wax, a synthetic wax, a high grade Release agents such as fatty acids or metal salts thereof, paraffin and oxidized polyethylene; low stress agents such as silicone oil and silicone rubber; ion scavengers such as hydrotalcite; flame retardants such as aluminum hydroxide; various types such as antioxidants An additive may be contained.

[3] Next, an adhesive tape 100 for processing a semiconductor substrate having a base material 4 and an adhesive layer 2 laminated on the base material 4 (hereinafter sometimes simply referred to as “adhesive tape 100”) is prepared. Then, as shown in FIG. 2 (d), the semiconductor sealing connector 270 is inverted, the sealing portion 27 side made of the sealing material of the semiconductor sealing connector 270, and the adhesive layer of the adhesive tape 100. The semiconductor sealing connector 270 (semiconductor substrate) is laminated (attached) to the adhesive tape 100 with the two sides facing each other (attaching step). That is, the semiconductor sealing connector 270 is affixed to the adhesive tape 100 so that the sealing portion 27 and the adhesive layer 2 are brought into contact with each other.

The sticking of the adhesive tape 100 to the semiconductor sealing connector 270 is performed, for example, by placing the adhesive tape 100 on a dicer table (not shown) and attaching the surface of the semiconductor sealing connector 270 on the sealing portion 27 side. This can be done by placing on layer 2 and pressing lightly. In addition, after sticking the semiconductor sealing coupling body 270 to the adhesive tape 100 beforehand, you may install in a dicer table.

Here, the adhesive tape 100 (dicing tape) to be affixed to the semiconductor sealing connector 270 imparts energy to the adhesive layer 2 with the function of supporting the semiconductor sealing connector 270 by the base material 4 via the adhesive layer 2. By doing so, it has a function that the adhesiveness of the adhesive layer 2 to the semiconductor encapsulated connector 270 decreases.

[4] Next, the semiconductor sealed connector 270 to which the adhesive tape 100 is attached is fixed using, for example, a wafer ring. Thereafter, using a dicing blade (dicing saw), the semiconductor sealing connector 270 is cut (diced) in the thickness direction so as to correspond to each semiconductor element 26 included in the semiconductor sealing connector 270, thereby forming the recess 62. Form (cutting step (dicing step); see FIG. 2E). That is, in the semiconductor sealed connector 270, a portion (position) corresponding to each semiconductor device 20 to be formed is diced, and a recess 62 is formed at that position.

Thereby, the semiconductor sealing connector 270 is divided into pieces corresponding to each semiconductor element 26, and as a result, a plurality of semiconductor sealing bodies 290 are formed on the adhesive tape 100.

Thus, since the several semiconductor sealing body 290 is formed in a lump on the adhesive tape 100, productivity improvement of the semiconductor device 20 obtained by passing through a post process from this semiconductor sealing body 290 is improved. Is planned.

At this time, it is possible to prevent the chips (dust) generated when the semiconductor sealing connector 270 is cut from being scattered, and the semiconductor sealing connector 270 (semiconductor element 26) is unnecessarily heated. In order to suppress this, the semiconductor sealing connector 270 is cut while supplying cutting water to the semiconductor sealing connector 270.

Further, at this time, the adhesive tape 100 has a buffering action, and exhibits a function of preventing cracks, chips and the like when the semiconductor sealing connector 270 is cut.

Further, in this embodiment, cutting of the semiconductor sealed connector 270 using a blade is performed until it reaches the middle of the base material 4 in the thickness direction of the base material 4 as shown in FIG. Is done. Thereby, the semiconductor sealing coupling body 270 can be separated into pieces, that is, the semiconductor sealing body 290 can be reliably formed.

[5] Next, by applying energy to the adhesive layer 2 included in the adhesive tape 100, the adhesiveness of the adhesive layer 2 to the semiconductor encapsulant 290 is reduced.

Thus, in the next step [6], the adhesive layer 2 and the semiconductor encapsulant 290 are separated.

The method for applying energy to the adhesive layer 2 is not particularly limited, and examples thereof include a method of irradiating the adhesive layer 2 with energy rays, a method of heating the adhesive layer 2 and the like. Among these, the method of irradiating the adhesive layer 2 with energy rays is preferable, and the method of irradiating the adhesive layer 2 with energy rays from the substrate 4 side of the adhesive tape 100 is particularly preferable.

Such a method does not require the semiconductor element 26 to go through an unnecessary heat history, and can apply energy to the adhesive layer 2 relatively easily and efficiently. It is done.

Further, examples of the energy rays include particle rays such as ultraviolet rays, electron beams, and ion beams, and two or more of these energy rays may be used in combination. Among these, it is particularly preferable to use ultraviolet rays. According to ultraviolet rays, the adhesiveness of the adhesive layer 2 to the semiconductor device 20 can be efficiently reduced.

[6] Next, the adhesive tape 100 is peeled from the semiconductor sealing body 290.
For the peeling of the adhesive tape 100, for example, the adhesive tape 100 is stretched radially by an expanding device (not shown), and the semiconductor encapsulant 290 obtained by singulation is opened at regular intervals (expanding process; FIG. 2 ( See f).). Thereafter, the semiconductor sealing body 290 is pushed up using a needle or the like, and in this state, the semiconductor sealing body 290 is picked up by suction or the like using a vacuum collet or air tweezers (pickup step; see FIG. 3A). Thereby, peeling arises between the adhesion layer 2 with which the adhesive tape 100 is provided, and the sealing part 27 comprised with the sealing material with which the semiconductor sealing body 290 is provided.

The following effects can be exhibited by using the semiconductor substrate processing adhesive tape of the present invention as the adhesive tape 100 when picking up the semiconductor encapsulant 290 in this step [6]. That is, as described above, the sealing material constituting the sealing portion 27 contains an epoxy group-containing compound having a double bond in its molecular structure, and the low stress property of the sealing portion 27 is improved. ing. Due to the low stress property of the sealing portion 27, the adhesion between the sealing portion 27 and the adhesive layer 2 is improved. On the other hand, the adhesive layer 2 contains a release agent (oil repellent) which is a silicone-based oil or a fluorine-based surfactant, as will be described later. Therefore, the adhesiveness with respect to the semiconductor sealing body 290 of the adhesive tape 100, ie, the sealing part 27 with which the semiconductor sealing body 290 is provided, and the adhesive tape 100 by the energy provision with respect to the adhesive layer 2 in the said process [5]. Adhesiveness with the adhesion layer 2 provided can be reduced reliably. As a result, in this step [6], the pressure-sensitive adhesive tape 100 can be easily peeled off from the semiconductor sealing body 290 without causing contamination and adhesive residue on the sealing portion 27, but a detailed description thereof will be given later. I will do it.

In addition, the peeling process which peels the adhesive tape for semiconductor substrate processing from a semiconductor sealing body, after providing energy to an adhesion layer by the said process [5] and this process [6] is comprised.

[7] Next, as shown in FIG. 3B, the wiring 23 is formed on the interposer 25 side of the semiconductor sealing body 290 (wiring forming step). That is, the wiring 23 patterned in a predetermined shape is formed on the surface side (lower surface side) opposite to the semiconductor element 26 of the interposer 25 so as to be electrically connected to the conductor post (wiring forming step).

A method for forming the wiring 23 is not particularly limited. For example, I: a method for forming the wiring 23 using a plating method such as an electrolytic plating method or an electroless plating method, and II: a conductive material is contained. Examples thereof include a method of forming the wiring 23 by supplying a liquid material to the surface of the semiconductor encapsulant 290 on the interposer 25 side and drying and solidifying it. Among these, the method I is preferable, and it is particularly preferable to form the wiring 23 using an electrolytic plating method. According to the electrolytic plating method, it is possible to easily and reliably form the wiring 23 exhibiting excellent adhesion to the conductor post.

The formation of the wiring 23 in this step [7] can be omitted depending on the configuration of the semiconductor device to be formed.

[8] Next, as shown in FIG. 3C, the wiring 23 is arranged on the interposer 25 side of the semiconductor sealing body 290, that is, on the surface side (lower surface side) opposite to the semiconductor element 26 of the interposer 25. The covering portion 22 including the opening 221 is formed so that a part is exposed (covering portion forming step).

The opening 221 is formed so as to correspond to the position where the bump 21 is formed in the next step [9].

Such a coating layer is usually composed of a laminate in which an upper layer mainly made of Au is laminated on a lower layer mainly made of Ni, and is formed by using, for example, an electroless plating method.

Further, the formation of the covering portion 22 in this step [8] can be omitted depending on the configuration of the semiconductor device to be formed.

[9] Next, as shown in FIG. 3D, bumps 21 are formed so as to be electrically connected to the wirings 23 exposed from the openings 221 (bump connection step).

Thereby, the bump 21 electrically connected to the electrode provided in the semiconductor element 26 through the conductor post and the wiring 23 is formed on the lower surface side of the interposer 25.

Here, the electrical connection between the electrode and the bump 21 via the conductor post and the wiring 23 is performed with the wiring 23 interposed as described above, whereby the bump 21 is connected to the interposer 25. In the surface direction, the conductor post can be disposed at a different position. In other words, these can be arranged so that the central portions of the bumps 21 and the conductor posts do not overlap. Therefore, the bump 21 can be formed at a desired position on the lower surface of the obtained semiconductor device 20.

The method of joining the bump 21 to the wiring 23 is not particularly limited, and for example, it is performed by interposing a viscous flux between the bump 21 and the wiring 23.

In addition, examples of the constituent material of the bump 21 include a solder material such as solder, silver solder, copper solder, and phosphor copper solder.
Through the steps as described above, the semiconductor device 20 is manufactured.

According to such a manufacturing method of the semiconductor device 20, a plurality of semiconductor encapsulations are obtained from the single semiconductor encapsulated connector 270 obtained in the step [2] through the steps [3] and [4]. The stop body 290 can be manufactured collectively on the adhesive tape 100, and a plurality of semiconductor devices 20 can be formed from one semiconductor sealed connector 270 by repeating the steps [5] to [9]. Since it can be manufactured, the productivity of the semiconductor device 20 obtained from the semiconductor sealed connector 270 can be improved.

Hereinafter, an adhesive tape 100 for processing a semiconductor substrate (adhesive tape for processing a semiconductor substrate of the present invention) used in the method for manufacturing the semiconductor device 20 will be described.

<Semiconductor substrate processing adhesive tape>
FIG. 4 is a longitudinal sectional view showing an embodiment of the adhesive tape for processing a semiconductor substrate of the present invention. In the following description, the upper side in FIG. 4 is referred to as “upper” and the lower side is referred to as “lower”.

As shown in FIG. 4, the adhesive tape 100 for processing a semiconductor substrate includes a base material 4 and an adhesive layer 2 laminated on the upper surface (one surface) of the base material 4, and is disposed on the interposer 25. A semiconductor encapsulated connector 270 sealed in a thickness direction by a sealing portion 27 composed of a sealing material containing an epoxy group-containing compound having a double bond in its molecular structure. When cutting and obtaining the several semiconductor sealing body 290, this semiconductor sealing coupling body 270 is temporarily fixed to the base material 4 through the adhesion layer 2, and is used. The pressure-sensitive adhesive layer 2 reduces the adhesion between the semiconductor sealing body 290 and the pressure-sensitive adhesive tape 100 (that is, the adhesion between the sealing portion 27 and the pressure-sensitive adhesive layer 2) when the semiconductor sealing body 290 is peeled from the pressure-sensitive adhesive tape 100. The release agent is a silicone oil or a fluorosurfactant.

Thus, the adhesive layer 2 provided in the adhesive tape 100 includes a predetermined release agent (oil repellent). Therefore, the adhesiveness with respect to the semiconductor sealing body 290 of the adhesive tape 100, ie, the sealing part 27 with which the semiconductor sealing body 290 is provided, and the adhesive tape 100 by the energy provision with respect to the adhesive layer 2 in the said process [5]. Adhesiveness with the adhesion layer 2 provided can be reduced reliably. As a result, when picking up the semiconductor sealing body 290 in the step [6], the adhesive tape 100 is easily peeled off from the semiconductor sealing body 290 without causing contamination and adhesive residue on the sealing portion 27. Can do.

Hereinafter, the base material 4 and the adhesive layer 2 which such an adhesive tape 100 (dicing tape) has will be described in detail.

In addition, the adhesive tape 100 has a function that the adhesiveness with respect to the semiconductor sealing coupling body 270 (sealing part 27) of the adhesion layer 2 falls by giving energy to the adhesion layer 2. FIG. Examples of a method for applying energy to the pressure-sensitive adhesive layer 2 include a method of irradiating the pressure-sensitive adhesive layer 2 with energy rays and a method of heating the pressure-sensitive adhesive layer 2. Among these, since it is not necessary for the semiconductor element 26 to go through an unnecessary heat history, a method of irradiating the adhesive layer 2 with energy rays is preferably used. Therefore, below, the case where the said adhesiveness falls by irradiation of an energy ray about the adhesion layer 2 is demonstrated as a representative.

<Substrate 4>
In the present embodiment, the base material 4 is constituted by a laminated body having a cut layer 41 positioned on the upper surface side and an extension layer 42 stacked on the lower surface of the cut layer 41, and on the base material 4. It has a function of supporting the provided adhesive layer 2.

Thus, when the base material 4 is a laminate including the cutting layer 41 and the expansion layer 42 (expanded layer), in the step [4], when the base material 4 is cut with a dicing blade, Generation | occurence | production of cutting waste can be reduced, and when expanding the adhesive tape 100 using an expanding apparatus in the said process [6], the base material 4 excellent in expandability can be provided. .

Therefore, in the following, the case where the base material 4 is formed of a laminate including the cut layer 41 and the extension layer 42 will be described as a representative.

<< Incision Layer 41 >>
The cut layer 41 is a layer cut in the thickness direction by a dicing blade in the step [4] in the laminate including the cut layer 41 and the expansion layer 42.

And it is calculated | required that this cut | notch layer 41 has reduced generation | occurrence | production of the cutting waste in the case of this cut.

That is, in the process (dicing process) [4], frictional heat is generated between the dicing blade and the adhesive tape 100 when the semiconductor sealing connector 270 is cut. Therefore, a contact part with a dicing blade is exposed to high temperature, and the base material 4 will be in a molten state. Accordingly, the melted resin clings to the surface of the dicing blade and causes clogging and normal dicing is hindered, or the melted and soft base material 4 is pulled by the rotation of the dicing blade and stretched, thereby the step [ 4] is considered to be a cause of the generation of the mustache of the base material. Therefore, the cutting layer 41 cut by the dicing blade has a high melt viscosity so that the resin does not cling to the dicing blade even when frictional heat is generated during dicing, and the generation of cutting waste is significantly reduced. It is required to be done.

Further, since the cut layer 41 is expanded radially using the expanding device in the step [6], it is required to have expandability (expandability) with respect to the surface direction of the substrate 4.

From the above, it is preferable that the cut layer 41 contains a resin material having a high melt viscosity and having expandability. Thereby, even if frictional heat is generated during dicing in the step [4], it is possible to accurately suppress or prevent the resin from clinging to the dicing blade. For this reason, generation | occurrence | production of cutting waste can be reduced remarkably and the cutting layer 41 becomes comparatively flexible at normal temperature. Accordingly, in the step [6], when the adhesive tape 100 is radially expanded by the expanding device, the expandability of the cut layer 41 can be improved.

Examples of resin materials having high melt viscosity and expandability include ionomer resins, EMMA (ethylene-methacrylic acid copolymer), EMA (ethylene-methyl acrylate copolymer), and EEA (ethylene- And ethylene- (meth) acrylic acid ester copolymers such as ethyl acrylic acid copolymer) and EVA (ethylene-vinyl acetate copolymer), etc., and one or more of these are used in combination. be able to. Among these, ionomer resins are preferable. Thereby, when cutting a dicing blade into the cutting layer 41, generation | occurrence | production of cutting waste and a base material mustache can be suppressed or prevented exactly. Moreover, when the adhesive tape 100 is expanded radially by the expanding device, the expandability of the cut layer 41 can be improved, and the visible light transmittance of the cut layer 41 can be further improved.

In this specification, the ionomer resin refers to a binary copolymer containing ethylene and (meth) acrylic acid as a constituent component of the polymer, ethylene, (meth) acrylic acid and (meth) acrylic acid ester. A ternary copolymer as a constituent component of a polymer is a resin crosslinked with a metal ion, and one or two of them can be used in combination.

Examples of the metal ion include potassium ion (K ⁺ ), sodium ion (Na ⁺ ), lithium ion (Li ⁺ ), magnesium ion (Mg ⁺⁺ ), and zinc ion (Zn ⁺⁺ ). Among these, as said metal ion, it is preferable that it is a zinc ion (Zn ⁺⁺ ). Thereby, since the crosslinked structure in the ionomer resin is stabilized, it is possible to make it difficult to produce dicing waste, and since the water resistance is high, the cutting layer 41 is expanded by cutting water during dicing. It can be accurately suppressed.

Further, a binary copolymer having ethylene and (meth) acrylic acid as constituent components of the polymer, or a ternary copolymer having ethylene, (meth) acrylic acid and (meth) acrylic acid ester as constituent components of the polymer. The degree of neutralization by the cation (metal ion) in the carboxyl group of the polymer is preferably 40 mol% or more and 75 mol% or less. In addition, although ionomer resin may be obtained by synthesize | combining, a commercial item can also be used.

The ionomer resin is a resin obtained by crosslinking a terpolymer having ethylene, (meth) acrylic acid, and (meth) acrylic acid alkyl ester as a constituent component of the polymer among the above-described resins with a metal ion. It is preferable. That is, it is preferable to contain (meth) acrylic acid alkyl ester as a constituent component of the polymer as the ionomer resin. Thereby, moderate softness | flexibility and the outstanding workability can be provided to the cutting layer 41. FIG. Furthermore, the visible light transmittance of the cut layer 41 can be further improved.

Furthermore, the melting point of the ionomer resin is preferably 80 ° C. or higher. Thereby, the heat resistance of the cutting layer 41 is improved. The upper limit of the melting point of the ionomer resin is not particularly limited, but is substantially about 100 ° C.

The ionomer resin has a melt flow rate (MFR) of 3 g / 10 min or less at a test temperature of 190 ° C. and a test load of 21.18 N in the test method shown in JIS K 7210 “Thermoplastic Plastic Flow Test Method”. Is preferred. Thereby, the melt viscosity of the cutting layer 41 can be made high, and as a result, generation | occurrence | production of the cutting waste in the cutting layer 41 of the adhesive tape 100 can be suppressed exactly. The lower limit value of the MFR of the ionomer resin is not particularly limited, but is substantially 0.8 g / 10 min.

Furthermore, when the cutting layer 41 includes an ionomer resin, it may include another resin material different from the ionomer resin.

The resin material is not particularly limited, and for example, polyethylene such as low density polyethylene, linear polyethylene, medium density polyethylene, high density polyethylene, and ultra low density polyethylene, random copolymer polypropylene, block copolymer polypropylene, homopolymer. Polyolefin resins such as polypropylene such as polypropylene, polyvinyl chloride, polybutene, polybutadiene, polymethylpentene, ethylene-vinyl acetate copolymer, ethylene- (meth) acrylic acid copolymer, ethylene- (meth) acrylic acid Olefin copolymers such as ester (random, alternating) copolymer, ethylene-propylene copolymer, ethylene-butene copolymer, ethylene-hexene copolymer, polyethylene terephthalate, polyethylene naphthalate, polybutylene Polyester resins such as phthalate and polybutylene naphthalate, polyether ketones such as polyurethane, polyimide, polyamide, polyether ether ketone, polyether sulfone, polystyrene, fluororesin, silicone resin, cellulose resin, styrene thermoplastic elastomer Olefin-based thermoplastic elastomers such as polypropylene-based thermoplastic elastomers, acrylic resins, polyester-based thermoplastic elastomers, polyvinyl isoprene, polycarbonate and other thermoplastic resins, and mixtures of these thermoplastic resins. One kind or a combination of two or more kinds can be used.

Furthermore, the cut layer 41 may contain an additive such as an antioxidant, a filler and the like in addition to the resin material.

The content of the ionomer resin in the cut layer 41 is preferably 60% by weight or more and 100% by weight or less, and more preferably 80% by weight or more and 100% by weight or less. By being more than the said lower limit, the function as the notch layer 41 mentioned above can be exhibited reliably.

Such a cut layer 41 preferably has a breaking elongation at 80 ° C. measured in accordance with JIS K 7127 of 50% or more and 350% or less, and more preferably 100% or more and 200% or less. . It can be said that the cut layer 41 having a breaking elongation at 80 ° C. within the above range is a layer having a high melt viscosity and reduced generation of cutting waste when cut by a dicing blade.

Further, the cut layer 41 preferably has a tensile elastic modulus of 70 MPa or more and 400 MPa or less, more preferably 100 MPa or more and 300 MPa or less, measured according to IPC TM-650 2.4.19. The cut layer 41 having a tensile elastic modulus within the above range is a layer that is excellent in expandability and has reduced occurrence of breakage in the cut layer 41 when the adhesive tape 100 is radially extended by an expanding device.

The thickness of the cut layer 41 is preferably thicker than the depth of cut into the cut layer 41 by a dicing blade (hereinafter also referred to as “cut amount”). Specifically, the thickness of the cut layer 41 is preferably 10 μm or more and 140 μm or less, and more preferably 20 μm or more and 120 μm or less. Thereby, in the said process [4], when cutting the semiconductor sealing coupling body 270, it cuts to the middle of the base material 4, but since the cutting layer 41 can be cut independently at this time, this Cutting chips generated by cutting can be reduced. In this case, the thickness of the cut layer 41 is set to preferably 60% or more and 90% or less, more preferably 60% or more and 80% or less with respect to the entire thickness of the adhesive tape 100.

In addition, it is preferable that the cutting layer 41 has a functional group such as a hydroxyl group or an amino group that is reactive with the constituent material included in the adhesive layer 2 exposed on the surface thereof.

Further, the cut layer 41 may be formed of a laminated body (multilayer body) in which a plurality of layers made of different resin materials are laminated. Furthermore, you may be comprised with the blend film which dry-blended the said resin material.

<< Expansion layer 42 >>
In the laminated body including the cutting layer 41 and the expansion layer 42, the expansion layer 42 is not cut by a dicing blade at the time of the step [4]. A layer that expands radially.

Therefore, since the expansion layer 42 is required to have excellent expandability (expandability) with respect to the surface direction of the substrate 4, a resin material having expandability is preferably used for the expansion layer 42.

Examples of the resin material having such expandability include polyethylene resins such as low density polyethylene and medium density polyethylene, EMMA (ethylene-methacrylic acid copolymer), and EMA (ethylene-methyl acrylate copolymer). , Ethylene- (meth) acrylic acid ester copolymers such as EEA (ethylene-ethylacrylic acid copolymer), EVA (ethylene-vinyl acetate copolymer), and various elastomers such as olefin elastomers and styrene elastomers, etc. These can be used, and one or more of these can be used in combination. Among these, a polyethylene resin is preferable. Thereby, when the adhesive tape 100 is radially expanded by the expanding device, the expandability of the expansion layer 42 can be further improved.

In the present specification, low density polyethylene means polyethylene having a density of 0.880 g / cm ³ or more and less than 0.940 g / cm ³ . Such low-density polyethylene may have a density within the above range, but it is particularly preferably 0.910 g / cm ³ or more and 0.930 g / cm ³ or less. The low density polyethylene having a density within the above range is a polyethylene having a long chain branch (the branch chain length is not particularly limited) obtained by polymerizing an ethylene monomer by a high pressure method, so-called “low density polyethylene” “Linear low density polyethylene” (short chain in this case) obtained by polymerizing polyethylene called “ultra low density polyethylene” and ethylene and an α-olefin monomer having 3 to 8 carbon atoms by the low pressure method The length of branching is defined as a generic term for polyethylene called 1 to 6 carbon atoms, and “ethylene-α-olefin copolymer elastomer” included in the above density range.
In addition, the density of low density polyethylene can be measured based on JISK7112.

The melting point of the low density polyethylene is preferably 90 ° C. or higher and 140 ° C. or lower, and more preferably 110 ° C. or higher and 130 ° C. or lower. Since the melting point of the low-density polyethylene is within such a range, the expansion layer 42 has excellent heat resistance, and the rigidity at room temperature can be lowered. A layer 42 can be provided.

Here, the ionomer resin preferably included in the cut layer 41 is a binary copolymer containing ethylene and (meth) acrylic acid as a constituent component of the polymer, ethylene, (meth) acrylic acid, and (meth) acrylic acid. A resin obtained by crosslinking a terpolymer having an ester as a constituent component of a polymer with a metal ion, and contains ethylene as a monomer component.

The low-density polyethylene preferably included in the expansion layer 42 has a monomer component of ethylene.

Thus, when the cut layer 41 includes an ionomer resin and the expansion layer 42 includes low-density polyethylene, the cut layer 41 and the expansion layer 42 both include ethylene as a monomer component. Therefore, in the adhesive tape 100, due to the effect of intermolecular interaction between the cut layer 41 and the extended layer 42, the adhesion between the cut layer 41 and the extended layer 42 is improved. In the meantime, the occurrence of delamination can be accurately suppressed or prevented.

Furthermore, when the expansion layer 42 contains low density polyethylene, it may contain other resin materials different from the low density polyethylene.

The resin material is not particularly limited, and examples thereof include linear polyethylene, medium density polyethylene, high density polyethylene, ultra low density polyethylene such as polyethylene, random copolymer polypropylene, block copolymer polypropylene, and homopolypropylene. Polyolefin resins such as polypropylene, polyvinyl chloride, polybutene, polybutadiene, polymethylpentene, etc., ionomers such as ethylene-vinyl acetate copolymer, zinc ion crosslinked body, sodium ion crosslinked body, ethylene- (meth) acrylic acid copolymer Polymer, ethylene- (meth) acrylic acid ester (random, alternating) copolymer, ethylene-propylene copolymer, ethylene-butene copolymer, olefin copolymer such as ethylene-hexene copolymer, polyethylene terephthalate Polyester resins such as polyethylene naphthalate, polybutylene terephthalate, polybutylene naphthalate, etc., polyether ketones such as polyurethane, polyimide, polyamide, polyether ether ketone, polyether sulfone, polystyrene, fluororesin, silicone resin, cellulose Resins, styrene thermoplastic elastomers, olefinic thermoplastic elastomers such as polypropylene thermoplastic elastomers, thermoplastic resins such as acrylic resins, polyester thermoplastic elastomers, polyvinyl isoprene and polycarbonate, and mixtures of these thermoplastic resins. 1 type or 2 types or more of these can be used in combination.

Further, the expansion layer 42 may contain additives such as antioxidants, fillers and the like in addition to the resin material.

Furthermore, the expansion layer 42 preferably contains an antistatic agent. Thereby, the static electricity in the semiconductor element 26 included in the semiconductor device 20 in the step (sticking (tape mounting) step) [3], the step (dicing step) [4], and the step (pickup step) [6]. Occurrence is accurately suppressed or prevented.

Although it does not specifically limit as this antistatic agent, For example, surfactant, permanent antistatic polymer (IDP), a metal material, a metal oxide material, a carbonaceous material etc. are mentioned, Among these, 1 type or 2 A combination of more than one species can be used.

Among these, examples of the surfactant include an anionic surfactant, a cationic surfactant, a nonionic surfactant, and an amphoteric surfactant.

As the permanent antistatic polymer (IDP), for example, all IDPs such as polyester amide series, polyester amide, polyether ester amide, polyurethane series and the like can be used.

Also, examples of the metal material include gold, silver, copper, silver-coated copper, nickel and the like, and these metal powders are preferably used.

Examples of the metal oxide material include indium tin oxide (ITO), indium oxide (IO), antimony tin oxide (ATO), indium zinc oxide (IZO), tin oxide (SnO ₂ ), and the like. Powder is preferably used.

Furthermore, examples of the carbon-based material include carbon nanotubes such as carbon black, single-walled carbon nanotubes, and multi-walled carbon nanotubes, carbon nanofibers, CN nanotubes, CN nanofibers, BCN nanotubes, BCN nanofibers, and graphene.

Among these, the antistatic agent is preferably at least one of a surfactant, a permanent antistatic polymer (IDP), a metal oxide material, and carbon black. Since these antistatic agents have a small temperature dependency of resistivity, even when the base material 4 is heated when dicing the semiconductor sealing connector 270, the amount of change in the surface resistance value of the expansion layer 42 is increased. Can be reduced.

When the expansion layer 42 contains an antistatic agent, the content of the antistatic agent in the expansion layer 42 is preferably 5% by weight or more and 40% by weight or less, and more preferably 15% by weight or more and 30% by weight or less. preferable. If the content of the antistatic agent is less than the lower limit, depending on the type of the antistatic agent, the expansion layer 42 may not be sufficiently provided with antistatic performance. Further, when the content of the antistatic agent exceeds the above upper limit value, it is difficult not only to provide a further antistatic function but also to increase the cost.

Furthermore, the content of the low density polyethylene in the expansion layer 42 is preferably 40% by weight or more and 100% by weight or less, and more preferably 60% by weight or more and 100% by weight or less. By being more than the said lower limit, the function as the expansion layer 42 mentioned above can be exhibited reliably. Moreover, the extended layer 42 excellent in adhesiveness with the cutting layer 41 can be provided.

Further, the expansion layer 42 preferably has a tensile elastic modulus of 30 MPa or more and 300 MPa or less, more preferably 100 MPa or more and 200 MPa or less, measured according to IPC TM-650 2.4.19. The expansion layer 42 having a tensile elastic modulus within the above range is a layer that is excellent in expandability and in which the occurrence of breakage in the expansion layer 42 is reduced when the adhesive tape 100 is radially extended by an expanding device.

Furthermore, the thickness of the expansion layer 42 is preferably 7 μm or more and 95 μm or less, and more preferably 15 μm or more and 80 μm or less. Thereby, in the step [6], when the adhesive tape 100 is stretched, it is possible to reliably give the expansion layer 42 strength sufficient to prevent the expansion layer 42 from being broken. In this case, the thickness of the expansion layer 42 is preferably set to 40% or more and 95% or less, more preferably 60% or more and 80% or less, with respect to the thickness of the entire adhesive tape 100.

In addition, the expansion layer 42 may be comprised by the laminated body (multilayer body) which laminated | stacked the layer comprised from a different said resin material.

The base material 4 configured as described above has a total light transmittance of 85% or more and 98% or less with a D65 standard light source measured according to the method defined in JIS K 7361-1. Is preferable, it is more preferably 90% or more and 98% or less, and further preferably 95% or more and 98% or less. Thereby, the adhesive tape 100 which has the outstanding translucency can be provided. Therefore, even if a defective product is generated in the semiconductor encapsulant 290 formed by dividing the semiconductor encapsulated connector 270 in the step [4], the defective product is treated as the step [6]. Subsequent migration can be accurately prevented.

The thickness of the base material 4 is preferably 20 μm or more and 220 μm or less, and more preferably 40 μm or more and 200 μm or less. When the thickness of the base material 4 is within this range, the impact on the semiconductor sealing connector 270 when dicing the semiconductor sealing connector 270 is protected (mitigated), and the dicing of the semiconductor sealing connector 270 is performed. Can be carried out with excellent workability.

In addition, the base material 4 is not limited to the case where it is a laminated body of the cutting layer 41 and the expansion layer 42 as described in the present embodiment. For example, any of the cutting layer 41 and the expansion layer 42 is used. A single-layer body in which one of them is omitted may be used.

<Adhesive layer>
The adhesive layer 2 has a function of adhering and supporting the semiconductor sealing connector 270 when dicing the semiconductor sealing connector 270 in the step [4]. Further, as described above, the adhesive layer 2 is reliably reduced in adhesiveness to the sealing portion 27 of the semiconductor sealed connector 270 due to the application of energy. Thereby, in the said process [6], the semiconductor sealing body 290 can be easily peeled from the adhesion layer 2, ie, the adhesive tape 100, and it can prevent that a contamination and adhesive residue arise in the sealing part 27. it can.

In particular, in the present invention, the adhesive layer 2 contains a release agent that is a silicone-based oil or a fluorine-based surfactant. As a result, the adhesive layer 2 allows the adhesiveness (sealing part 27) between the semiconductor sealing body 290 and the adhesive tape 100 when the semiconductor sealing body 290 is peeled from the adhesive tape 100 in the step [6]. And the adhesive layer 2 and adhesiveness) can be more remarkably exhibited.

The adhesive layer 2 having such a function includes (1) a base resin having adhesiveness, (2) a curable resin for curing the adhesive layer 2, and (5) the semiconductor encapsulant 290 in the step [6]. It is comprised with the resin composition which contains the release agent for reducing the adhesiveness between the adhesive tapes 100 as a main material.

Hereinafter, each component contained in the resin composition will be described in detail.
(1) Base resin The base resin has adhesiveness, and before the energy layer is irradiated with the energy rays, the adhesive to the semiconductor sealing connector 270 is imparted to the adhesive layer 2 so that the adhesive tape 100 has a semiconductor. In order to firmly fix the sealed connector 270, it is contained in the resin composition.

Such base resins include acrylic resins (adhesives), silicone resins (adhesives), polyester resins (adhesives), polyvinyl acetate resins (adhesives), and polyvinyl ether resins (adhesives). And known base resins used as adhesive layer components such as styrene elastomer resins (adhesives), polyisoprene resins (adhesives), polyisobutylene resins (adhesives) or urethane resins (adhesives). It is done. Among these, it is preferable to use an acrylic resin. Acrylic resins are preferably used as base resins because they are excellent in heat resistance and are relatively easy and inexpensive to obtain.

The base polymer of the acrylic resin is a polymer (homopolymer or copolymer) having (meth) acrylic acid ester as a main monomer component.

Although it does not specifically limit as (meth) acrylic acid ester, For example, (meth) acrylic acid methyl, (meth) acrylic acid ethyl, (meth) acrylic acid propyl, (meth) acrylic acid isopropyl, (meth) acrylic acid butyl , Isobutyl (meth) acrylate, s-butyl (meth) acrylate, t-butyl (meth) acrylate, pentyl (meth) acrylate, hexyl (meth) acrylate, heptyl (meth) acrylate, (meth) Octyl acrylate, isooctyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, nonyl (meth) acrylate, isononyl (meth) acrylate, decyl (meth) acrylate, isodecyl (meth) acrylate, (meth ) Undecyl acrylate, dodecyl (meth) acrylate, (meth) acrylic acid (Meth) acrylic acid alkyl esters such as decyl, tetradecyl (meth) acrylate, pentadecyl (meth) acrylate, hexadecyl (meth) acrylate, heptadecyl (meth) acrylate, octadecyl (meth) acrylate, (meth) Examples include (meth) acrylic acid cycloalkyl esters such as cyclohexyl acrylate, (meth) acrylic acid aryl esters such as phenyl (meth) acrylate, and one or more of these are used in combination. be able to. Among these, it is preferable to contain at least one of methyl (meth) acrylate, butyl (meth) acrylate, and 2-ethylhexyl (meth) acrylate as a (meth) acrylic acid alkyl ester. These (meth) acrylic acid alkyl esters are particularly excellent in heat resistance, and can be obtained relatively easily and inexpensively.

The acrylic resin contains a copolymerizable monomer in addition to the above-mentioned (meth) acrylic acid ester as a monomer component constituting the polymer, if necessary, for the purpose of modifying cohesive force, heat resistance and the like. be able to.

Such a copolymerizable monomer is not particularly limited. For example, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, (meth) Hydroxyl group-containing monomers such as 6-hydroxyhexyl acrylate, epoxy group-containing monomers such as glycidyl (meth) acrylate, (meth) acrylic acid, itaconic acid, maleic acid, fumaric acid, crotonic acid, and isocrotonic acid Carboxyl group-containing monomers, maleic anhydride, acid anhydride group-containing monomers such as itaconic anhydride, (meth) acrylamide, N, N-dimethyl (meth) acrylamide, N-butyl (meth) acrylamide, N-methylol ( (Meth) acrylamide, N-methylolpropane (meta) Amide monomers such as acrylamide, N-methoxymethyl (meth) acrylamide, N-butoxymethyl (meth) acrylamide, aminoethyl (meth) acrylate, N, N-dimethylaminoethyl (meth) acrylate, (meth) Amino group-containing monomers such as t-butylaminoethyl acrylate, cyano group-containing monomers such as (meth) acrylonitrile, olefinic monomers such as ethylene, propylene, isoprene, butadiene and isobutylene, styrene, α-methylstyrene, Styrenic monomers such as vinyl toluene, vinyl ester monomers such as vinyl acetate and vinyl propionate, vinyl ether monomers such as methyl vinyl ether and ethyl vinyl ether, halo such as vinyl chloride and vinylidene chloride Gene atom-containing monomer, alkoxy group-containing monomer such as methoxyethyl (meth) acrylate, ethoxyethyl (meth) acrylate, N-vinyl-2-pyrrolidone, N-methylvinylpyrrolidone, N-vinylpyridine, N-vinylpiperidone N-vinylpyrimidine, N-vinylpiperazine, N-vinylpyrazine, N-vinylpyrrole, N-vinylimidazole, N-vinyloxazole, N-vinylmorpholine, N-vinylcaprolactam, N- (meth) acryloylmorpholine, etc. Examples include monomers having a nitrogen atom-containing ring, and one or more of these can be used in combination.

The content of these copolymerizable monomers is preferably 40% by weight or less, and more preferably 10% by weight or less, based on all monomer components constituting the acrylic resin.

The copolymerizable monomer may be contained at the end of the main chain in the polymer constituting the acrylic resin, may be contained in the main chain, and further, the end of the main chain and the main chain. It may be contained both in the chain.

Further, the copolymerizable monomer may contain a polyfunctional monomer for the purpose of crosslinking between polymers.

Examples of the polyfunctional monomer include 1,6-hexanediol (meth) acrylate, (poly) ethylene glycol di (meth) acrylate, (poly) propylene glycol di (meth) acrylate, and neopentyl glycol di (meth) acrylate. , Pentaerythritol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, dipentaerythritol hexa (meth) acrylate, glycerin di (meth) acrylate, epoxy (meth) acrylate, polyester ( And (meth) acrylate, urethane (meth) acrylate, divinylbenzene, butyl di (meth) acrylate, hexyl di (meth) acrylate, etc., one or two of these It can be used in combination on.

Also, ethylene-vinyl acetate copolymer and vinyl acetate polymer can be used as copolymerizable monomer components.

Such an acrylic resin (polymer) can be produced by polymerizing a single monomer component or a mixture of two or more monomer components. In addition, the polymerization of these monomer components can be carried out using a polymerization method such as a solution polymerization method, an emulsion polymerization method, a bulk polymerization method, a suspension polymerization method, or the like.

As described above, the acrylic resin obtained by polymerizing the monomer components described above is an acrylic resin having a carbon-carbon double bond in the side chain, in the main chain, or at the end of the main chain (“double” It is sometimes referred to as “bond-introducing acrylic resin”. When the acrylic resin is a double bond-introducing acrylic resin, even if the addition of the curable resin described later is omitted, the obtained adhesive layer 2 is allowed to exhibit the function as the adhesive layer 2 described above. Can do.

Such a double bond-introducing acrylic resin has one carbon-carbon double bond in each of the side chains of 1/100 or more of the side chains in the polymer constituting the acrylic resin. It is preferably a double bond-introducing acrylic resin (sometimes referred to as “double-bond side chain-introducing acrylic resin”). Thus, introducing a carbon-carbon double bond into the side chain of an acrylic resin is advantageous from the viewpoint of molecular design. This double bond side chain introduction type acrylic resin may have a carbon-carbon double bond in the main chain or at the end of the main chain.

A method for synthesizing such a double bond-introducing acrylic resin (that is, a method for introducing a carbon-carbon double bond into an acrylic resin) is not particularly limited, and examples thereof include the following methods. . First, copolymerization is performed using a monomer having a functional group as a copolymerizable monomer to synthesize an acrylic resin containing a functional group (sometimes referred to as “functional group-containing acrylic resin”). Thereafter, a compound having a functional group capable of reacting with a functional group in the functional group-containing acrylic resin and a carbon-carbon double bond (sometimes referred to as a “carbon-carbon double bond-containing reactive compound”). Is subjected to a condensation reaction or an addition reaction in a functional group-containing acrylic resin while maintaining the energy ray curability (energy ray polymerizability) of the carbon-carbon double bond. Thereby, a double bond introduction type acrylic resin can be synthesized.

As a control means for introducing a carbon-carbon double bond into an acrylic resin into 1/100 or more of all side chains, for example, a condensation reaction or addition to a functional group-containing acrylic resin Examples thereof include a method performed by appropriately adjusting the content of a reactive compound containing a carbon-carbon double bond that is a compound to be reacted.

Also, when a carbon-carbon double bond-containing reactive compound is subjected to a condensation reaction or addition reaction with a functional group-containing acrylic resin, the reaction can be effectively advanced by using a catalyst. Such a catalyst is not particularly limited, but a tin-based catalyst such as dibutyltin dilaurate is preferably used. The content of the tin-based catalyst is not particularly limited, but for example, it is preferably 0.05 parts by weight or more and 1 part by weight or less with respect to 100 parts by weight of the functional group-containing acrylic resin.

Examples of the functional group A in the functional group-containing acrylic resin and the functional group B in the carbon-carbon double bond-containing reactive compound include a carboxyl group, an acid anhydride group, a hydroxyl group, an amino group, an epoxy group, and an isocyanate. Group, aziridine group and the like. Further, as a combination of the functional group A in the functional group-containing acrylic resin and the functional group B in the carbon-carbon double bond-containing reactive compound, for example, a combination of a carboxylic acid group (carboxyl group) and an epoxy group, Various combinations such as a combination of a carboxylic acid group and an aziridyl group, a combination of a hydroxyl group and an isocyanate group, a combination of a hydroxyl group and a carboxyl group, and the like. Among these, a combination of a hydroxyl group and an isocyanate group It is preferable. Thereby, the reaction tracking between these functional groups A and B can be easily performed.

Furthermore, in the combination of these functional groups A and B, any functional group may be the functional group A of the functional group-containing acrylic resin or the functional group B of the carbon-carbon double bond-containing reactive compound. For example, in the case of a combination of a hydroxyl group and an isocyanate group, the hydroxyl group is the functional group A in the functional group-containing acrylic resin, and the isocyanate group is a functional group in the reactive compound containing a carbon-carbon double bond. The group B is preferred.

In this case, examples of the monomer having the functional group A constituting the functional group-containing acrylic resin include acrylic acid, methacrylic acid, carboxyethyl acrylate, carboxypentyl acrylate, itaconic acid, maleic acid, fumaric acid, and crotonic acid. Having a carboxylic group, those having an acid anhydride group such as maleic anhydride, itaconic anhydride, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, (meth) acrylic acid 4-hydroxybutyl, 6-hydroxyhexyl (meth) acrylate, 8-hydroxyoctyl (meth) acrylate, 10-hydroxydecyl (meth) acrylate, 12-hydroxylauryl (meth) acrylate, (4-hydroxymethyl (Cyclohexyl) methyl (meth) ac Hydroxyl groups such as rate, vinyl alcohol, allyl alcohol, 2-hydroxyethyl vinyl ether, 2-hydroxypropyl vinyl ether, 4-hydroxybutyl vinyl ether, ethylene glycol monovinyl ether, diethylene glycol monovinyl ether, propylene glycol monovinyl ether, dipropylene glycol monovinyl ether And those having an epoxy group such as glycidyl (meth) acrylate and allyl glycidyl ether.

Examples of the reactive compound containing a carbon-carbon double bond having a functional group B include those having an isocyanate group, such as (meth) acryloyl isocyanate, (meth) acryloyloxymethyl isocyanate, and 2- (meth) acryloyloxy. Examples include ethyl isocyanate, 2- (meth) acryloyloxypropyl isocyanate, 3- (meth) acryloyloxypropyl isocyanate, 4- (meth) acryloyloxybutyl isocyanate, m-propenyl-α, α-dimethylbenzyl isocyanate, and epoxy. Examples of the group include glycidyl (meth) acrylate.

The acrylic resin has a functional group (reactive functional group) having reactivity with a crosslinking agent or photopolymerization initiator, such as a hydroxyl group or a carboxyl group (particularly, a hydroxyl group). Is preferred. Thereby, since a crosslinking agent and a photoinitiator connect with the acrylic resin which is a polymer component, it can suppress or prevent that these crosslinking agents and a photoinitiator leak from the adhesion layer 2 exactly. As a result, the adhesiveness of the adhesive layer 2 to the semiconductor encapsulated connector 270 is more reliably lowered during the energy ray irradiation in the step [5].

Further, such a base resin preferably has a glass transition point of −20 ° C. or lower, and more preferably lower than −50 ° C. Here, in this invention, after irradiating the energy layer to the adhesion layer 2, when peeling the semiconductor sealing body 290 from the adhesive tape 100 in the said process [6], the semiconductor sealing body 290, the adhesive tape 100, In order to reduce the adhesion between the adhesive layer 2, the adhesive layer 2 contains a predetermined release agent. Thus, even if the adhesive layer 2 contains a release agent, the glass transition point of the base resin has the upper limit value, so that the adhesive layer 2 is superior to the adhesive layer 2 before being irradiated with energy rays. Adhesiveness can be exhibited. Therefore, in the step [4], when the semiconductor sealing connector 270 is diced, the semiconductor sealing connector 270 can be reliably fixed by the adhesive tape 100.

Furthermore, the weight average molecular weight of the base resin is preferably set to 300,000 to 1.8 million, more preferably set to 400,000 to 1.6 million, and more preferably set to 500,000 to 1,200,000. By setting the weight average molecular weight of the base resin within the above range, the adhesive layer 2 is excellent in the adhesive layer 2 even if a release agent is contained in the adhesive layer 2 before irradiation of the energy ray to the adhesive layer 2. Adhesiveness can be exhibited. Furthermore, in the step [4], when the semiconductor sealing connector 270 is diced, it is possible to accurately suppress or prevent the semiconductor sealing connector 270 and the like from being contaminated.

(2) Curable resin A curable resin is equipped with the sclerosis | hardenability hardened | cured by irradiation of an energy ray, for example. As a result of the curing, the base resin is taken into the crosslinked structure of the curable resin, and as a result, the adhesive strength (adhesiveness) of the adhesive layer 2 is reduced.

Furthermore, in the present invention, the adhesive layer 2 contains a predetermined release agent, and the base resin is incorporated into the crosslinked structure of the curable resin by curing of the curable resin, so that the release agent is formed on the surface of the adhesive layer 2. Leaks. Also from this viewpoint, the adhesive force of the adhesive layer 2 is reduced.

As such a curable resin, for example, a low molecular weight having at least two polymerizable carbon-carbon double bonds that can be three-dimensionally cross-linked by irradiation with energy rays such as ultraviolet rays and electron beams as functional groups. A compound is used. Specifically, for example, trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, tetramethylolmethane tetra (meth) acrylate, tetraethylene glycol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, neopentyl glycol di (meth) acrylate, dipentaerythritol hexa (meth) acrylate, dipentaerythritol monohydroxypenta (meth) acrylate, 1,4-butylene glycol di (meth) ) Esterified products of (meth) acrylic acid and polyhydric alcohols such as acrylate, polyethylene glycol di (meth) acrylate, glycerin di (meth) acrylate, Cyanurate compounds having a carbon-carbon double bond-containing group, such as relate oligomers, 2-propenyl-di-3-butenyl cyanurate, tris (2-acryloxyethyl) isocyanurate, tris (2-methacrylic) Roxyethyl) isocyanurate, 2-hydroxyethylbis (2-acryloxyethyl) isocyanurate, bis (2-acryloxyethyl) 2-[(5-acryloxyhexyl) -oxy] ethyl isocyanurate, tris (1, 3-Diacryloxy-2-propyl-oxycarbonylamino-n-hexyl) isocyanurate, tris (1-acryloxyethyl-3-methacryloxy-2-propyl-oxycarbonylamino-n-hexyl) isocyanurate, tris (4- Acryloxy-n-butyl) isocyania And isocyanurate compounds having a carbon-carbon double bond-containing group such as a rate, commercially available oligoester acrylates, aromatic and aliphatic urethane acrylates, etc., one of these Alternatively, two or more kinds can be used in combination. Among these, it is preferable that an oligomer having 6 or more functional groups is included, and an oligomer having 15 or more functional groups is more preferable. Thereby, curable resin can be hardened more reliably by irradiation of an energy ray. Moreover, it is preferable that such curable resin is urethane acrylate. Thereby, since moderate softness | flexibility can be provided to the adhesion layer 2, the effect that the paste crack at the time of pick-up can be suppressed is acquired.

The urethane acrylate is not particularly limited. For example, a polyol compound such as a polyester type or a polyether type and a polyvalent isocyanate compound (for example, 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate) are used. A terminal isocyanate urethane prepolymer obtained by reacting naphthate, 1,3-xylylene diisocyanate, 1,4-xylylene diisocyanate, diphenylmethane 4,4-diisocyanate, etc.) ) Acrylate (for example, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, polyethylene glycol (meth) acrylate, etc.)).

The curable resin is not particularly limited, but it is preferable that two or more curable resins having different weight average molecular weights are mixed. By using such a curable resin, it is possible to easily control the degree of crosslinking of the resin by energy ray irradiation, and to improve the pick-up property of the semiconductor encapsulant 290 (semiconductor element 26) in the step [6]. An adhesive tape 100 can be provided. In addition, as such a curable resin, for example, a mixture of a first curable resin and a second curable resin having a weight average molecular weight larger than that of the first curable resin may be used.

When the curable resin is a mixture of the first curable resin and the second curable resin, the weight average molecular weight of the first curable resin is preferably about 100 to 1000, preferably 200 to More preferably, it is about 500. The weight average molecular weight of the second curable resin is preferably about 1000 to 30000, more preferably about 1000 to 10000, and still more preferably about 2000 to 5000. Further, the number of functional groups of the first curable resin is preferably 1 to 5 functional groups, and the number of functional groups of the second curable resin is preferably 6 functional groups or more. By satisfying such a relationship, the effect can be exhibited more remarkably.

The curable resin is preferably blended in an amount of 5 parts by weight or more and 500 parts by weight or less, more preferably 10 parts by weight or more and 300 parts by weight or less, and more preferably 20 parts by weight or more. More preferably, it is blended at 200 parts by weight or less. By adjusting the compounding quantity of curable resin as mentioned above, the adhesive tape 100 excellent in the pick-up property of the semiconductor sealing body 290 (semiconductor element 26) in the said process [6] can be provided.

The addition of the curable resin to the resin composition is performed when a double bond-introducing acrylic resin is used as the acrylic resin described above, that is, the carbon-carbon double bond is a side chain, a main chain. If an acrylic resin in the chain or at the end of the main chain is used, it may be omitted. This is because, when the acrylic resin is a double bond-introducing acrylic resin, the pressure-sensitive adhesive layer 2 is formed by the function of the carbon-carbon double bond of the double bond-introducing acrylic resin by irradiation with energy rays. This is because the adhesive force of the pressure-sensitive adhesive layer 2 is reduced.

(3) Photopolymerization initiator In addition, the adhesive layer 2 is one whose adhesiveness to the semiconductor encapsulated connector 270 is reduced by irradiation with energy rays. When ultraviolet rays or the like is used as energy rays, a curable resin is used. In order to facilitate the initiation of polymerization of the curable resin, it is preferable to contain a photopolymerization initiator.

Examples of the photopolymerization initiator include 2,2-dimethoxy-1,2-diphenylethane-1-one, 1- [4- (2-hydroxyethoxy) -phenyl] -2-hydroxy-2-methyl-1 -Propan-1-one, 2-hydroxy-1- {4- [4- (2-hydroxy-2-methyl-propionyl) -benzyl] phenyl} -2-methyl-propan-1-one, benzyldiphenyl sulfide, Tetramethylthiuram monosulfide, 4- (2-hydroxyethoxy) phenyl (2-hydroxy-2-propyl) ketone, α-hydroxy-α, α'-dimethylacetophenone, 2-methyl-2-hydroxypropiophenone, 1 -Hydroxycyclohexyl phenyl ketone, Michler's ketone, acetophenone, methoxyacetophenone, 2 2-dimethoxy-2-phenylacetophenone, 2,2-diethoxyacetophenone, 2-methyl-1- [4- (methylthio) -phenyl] -2-morpholinopropane-1, benzoin methyl ether, benzoin ethyl ether, benzoin propyl Ether, benzoin isopropyl ether, benzoin isobutyl ether, benzyl, benzoin, dibenzyl, α-hydroxycyclohexyl phenyl ketone, benzyldimethyl ketal, 2-hydroxymethylphenylpropane, 2-naphthalenesulfonyl chloride, 1-phenone-1,1-propanedione -2- (o-ethoxycarbonyl) oxime, benzophenone, benzoylbenzoic acid, 4,4'-dimethylaminobenzophenone, 4,4'-diethylaminobenzophenone 4,4'-dichlorobenzophenone, 3,3'-dimethyl-4-methoxybenzophenone, o-acryloxybenzophenone, p-acryloxybenzophenone, o-methacryloxybenzophenone, p-methacryloxybenzophenone, p- (meth) acrylic Benzophenone-4-carboxylic acid of acrylate such as oxyethoxybenzophenone, 1,4-butanediol mono (meth) acrylate, 1,2-ethanediol mono (meth) acrylate, 1,8-octanediol mono (meth) acrylate Ester, thioxanthone, 2-chlorothioxanthone, 2-methylthioxanthone, 2,4-dimethylthioxanthone, isopropylthioxanthone, 2,4-dichlorothioxanthone, 2,4-diethylthioxanthone 2,4-diisopropylthioxanthone, azobisisobutyronitrile, β-chloranthraquinone, camphorquinone, halogenated ketone, acylphosphinoxide, acylphosphonate, polyvinylbenzophenone, chlorothioxanthone, dodecylthioxanthone, Examples thereof include dimethylthioxanthone, diethylthioxanthone, 2-ethylanthraquinone, t-butylanthraquinone, 2,4,5-triarylimidazole dimer, and the like. One or more of these may be used in combination. it can.

Of these, benzophenone derivatives and alkylphenone derivatives are preferred. These compounds have a hydroxyl group as a reactive functional group in the molecule, and can be linked to a base resin or a curable resin via this reactive functional group, thereby ensuring a more reliable function as a photopolymerization initiator. It can be demonstrated.

The photopolymerization initiator is preferably blended in an amount of 0.1 to 50 parts by weight, more preferably 0.5 to 10 parts by weight, based on 100 parts by weight of the base resin. . By adjusting the blending amount of the photopolymerization initiator as described above, the pressure-sensitive adhesive tape 100 having suitable pickup properties can be provided.

(4) Crosslinking agent Furthermore, the curable resin may contain a crosslinking agent. Inclusion of the crosslinking agent can improve the curability of the curable resin.

The crosslinking agent is not particularly limited. For example, an isocyanate crosslinking agent, an epoxy crosslinking agent, a urea resin crosslinking agent, a methylol crosslinking agent, a chelate crosslinking agent, an aziridine crosslinking agent, a melamine crosslinking agent, and a polyvalent crosslinking agent. Examples include metal chelate-based crosslinking agents, acid anhydride-based crosslinking agents, polyamine-based crosslinking agents, and carboxyl group-containing polymer-based crosslinking agents. Among these, an isocyanate type crosslinking agent is preferable.

Although it does not specifically limit as an isocyanate type crosslinking agent, For example, the trimer of the terminal isocyanate compound obtained by making the polyisocyanate compound of polyvalent isocyanate and the trimer of a polyisocyanate compound, and making a polyisocyanate compound and a polyol compound react. Or the blocked polyisocyanate compound etc. which blocked the terminal isocyanate urethane prepolymer with phenol, oximes, etc. are mentioned.

Examples of the polyvalent isocyanate include 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, 1,3-xylylene diisocyanate, 1,4-xylene diisocyanate, diphenylmethane-4,4′-diisocyanate, diphenylmethane. -2,4'-diisocyanate, 3-methyldiphenylmethane diisocyanate, hexamethylene diisocyanate, isophorone diisocyanate, dicyclohexylmethane-4,4'-diisocyanate, dicyclohexylmethane-2,4'-diisocyanate, 4,4'-diphenyl ether diisocyanate, 4 , 4 '-[2,2-bis (4-phenoxyphenyl) propane] diisocyanate, 2,2,4-trimethyl-hexamethylene diisocyanate, etc. It is, can be used singly or in combination of two or more of them. Among these, at least one polyisocyanate selected from the group consisting of 2,4-tolylene diisocyanate, diphenylmethane-4,4'-diisocyanate and hexamethylene diisocyanate is preferable.

The crosslinking agent is preferably blended in an amount of 0.01 to 50 parts by weight, more preferably 5 to 50 parts by weight, based on 100 parts by weight of the base resin. By adjusting the blending amount of the crosslinking agent as described above, the pressure-sensitive adhesive tape 100 having suitable pickup properties can be provided.

(5) Release agent Furthermore, in the resin composition which comprises the adhesion layer 2, the release agent which is a silicone type oil or a fluorochemical surfactant is contained in this invention. Therefore, the adhesiveness between the semiconductor sealing body 290 and the pressure-sensitive adhesive tape 100 can be reduced by irradiating the pressure-sensitive adhesive layer 2 with energy rays.

Here, the effect of the release agent being included in the adhesive layer 2 will be described in detail. In the step [5], the release agent leaks to the surface of the pressure-sensitive adhesive layer 2 due to the curing of the curable resin resulting from applying energy to the pressure-sensitive adhesive layer 2. Such leakage of the release agent on the surface of the pressure-sensitive adhesive layer 2 reduces the interaction between these constituent materials at the interface between the sealing portion 27 and the pressure-sensitive adhesive layer 2. As a result, the adhesiveness between the semiconductor sealing body 290 and the adhesive tape 100 is reliably reduced. Therefore, in the step [6], the adhesive tape 100 can be easily peeled off from the semiconductor sealing body 290 without causing contamination and adhesive residue on the sealing portion 27.

As described above, the sealing material constituting the sealing portion 27 contains an epoxy group-containing compound having a double bond in its molecular structure as an epoxy group-containing compound different from the epoxy resin. For this reason, the interaction between the constituent material of the sealing portion 27 and the constituent material of the adhesive layer 2 at the interface between the sealing portion 27 and the adhesive layer 2 tends to increase. As described above, the adhesive layer 2 has a predetermined release agent as described above for the sealing portion 27 formed of the sealing material containing the epoxy group-containing compound having a double bond in the molecular structure. By being included, after application of energy to the adhesive layer 2 in the step [5], adhesion between the semiconductor sealing body 290 and the adhesive tape 100 (adhesive strength of the adhesive layer 2 to the sealing portion 27) is increased. It can be reliably lowered.
Such an effect is due to the adhesive force of the adhesive layer 2 before and after energy application to the sealing part 27 composed of the sealing material containing an epoxy group-containing compound having a double bond in its molecular structure. Can be confirmed. Specifically, the adhesive force between the adhesive layer 2 and the sealing portion 27 before application of energy is preferably 70 cN / 25 mm or more and less than 1000 cN / 25 mm, and preferably 200 cN / 25 mm or more and less than 1000 cN / 25 mm. More preferred. On the other hand, the adhesive strength between the adhesive layer 2 and the sealing portion 27 after the application of energy is preferably 60 cN / 25 mm or more and less than 90 cN / 25 mm, and more preferably 5 cN / 25 mm or more and less than 60 cN / 25 mm. The method for measuring these adhesive forces will be described in detail in Examples.
Moreover, it is preferable that the adhesive force of the adhesion layer 2 before and after energy provision satisfy | fills the following relationship. That is, when the adhesive force between the adhesive layer 2 and the sealing portion 27 before application of energy is A and the adhesive force between the adhesive layer 2 and the sealing portion 27 after application of energy is B, AB is 110 cN / 25 mm to 940 cN / 25 mm, and more preferably 140 cN / 25 mm to 920 cN / 25 mm.

The release agent (oil repellent material) has a function (that is, leaking to the surface of the adhesive layer 2) in addition to the silicone-based oil or the fluorine-based surfactant, so Other materials may be included as long as the interaction between these constituent materials can be reduced). For example, the release agent may include one or more of fluorine-based materials, coupling agents including fluorine atoms, and the like.

Among these, fluorine-based materials include, for example, fluorine-based organic materials such as polytetrafluoroethylene (PTFE), ethylene-tetrafluoroethylene copolymer (ETFE), and ethylene-chlorotrifluoroethylene copolymer (ECTFE). And fluorine-based inorganic materials such as potassium fluorotitanate, potassium silicofluoride, and zirconic fluoride.

Examples of the coupling agent having a fluorine atom include tridecafluoro-1, tridecafluoro-1,1,2,2 tetrahydrooctyltrimethoxysilane, trifluoropropyltrimethoxysilane, and γ-glycidoxypropyl. Examples include trimethoxysilane.

Further, the fluorosurfactant includes perfluoroalkyl sulfonic acid (CF ₃ (CF ₂ ) _n SO ₃ H; n is an integer of 1 or more), perfluoroalkyl carboxylic acid (CF ₃ (CF ₂ ) _n COOH; n is 1 or an integer) or fluorine telomer alcohol (F (CF ₂ ) nCH ₂ CH ₂ OH; n is an integer of 1 or more).

Silicone oils include linear silicone oils such as dimethyl silicone oil (polysiloxane), methylphenyl silicone oil, and methylhydrogen polysiloxane, epoxy-modified silicone oil, amino-modified silicone oil, carboxyl-modified silicone oil, and alcohol-modified. Preferred are silicone oils, fluorine-modified silicone oils, modified silicone oils such as epoxy / polyether-modified silicone oils and polyether-modified silicone oils.

Of these, the fluorosurfactant is preferably perfluoroalkylsulfonic acid. Further, the silicone oil is preferably a modified silicone oil.

By using silicone-based oil (particularly modified silicone oil) as a release agent, the curable resin is cured by irradiation with energy rays, and as a result, the base resin is incorporated into the crosslinked structure of the curable resin. When the adhesive strength of the silicone oil decreases, the silicone-based oil oozes out from the crosslinked structure. As a result, the release agent leaks to the surface of the pressure-sensitive adhesive layer 2, and as a result, the adhesion between the semiconductor sealing body 290 and the pressure-sensitive adhesive tape 100 is more reliably lowered.

In addition, by using a fluorosurfactant as a release agent, the adhesive strength by the adhesive layer 2 is maintained with excellent adhesive strength before irradiation with energy rays, and this adhesive strength is ensured after irradiation with energy rays. Can be lowered. Therefore, before the energy ray irradiation, the semiconductor sealing body 290 and the adhesive tape 100 are fixed with an excellent adhesive force. On the other hand, after the energy ray irradiation, the semiconductor sealing body 290 and the adhesive tape 100 are fixed. Can be reliably reduced.

Further, the content of the release agent in the pressure-sensitive adhesive layer 2, that is, in the resin composition, varies slightly depending on the type of the release agent, but is preferably 0.01% by weight or more and 1.0% by weight or less. More preferably, it is 0.05 wt% or more and 0.5 wt% or less. When the content of the release agent is less than the lower limit, depending on the type of the release agent, when the curable resin is cured, a sufficient amount of the release agent cannot be leaked to the surface of the adhesive layer 2, There is a possibility that it is difficult to reduce the adhesion between the semiconductor sealing body 290 and the adhesive tape 100. When the content of the release agent exceeds the upper limit, depending on the type of the release agent, the function of the adhesive layer 2 before and after application of energy (specifically, before the irradiation with the energy beam, the sealing portion 27 The function as the pressure-sensitive adhesive layer 2 that can be peeled off from the sealing portion 27 after the irradiation with the energy rays may be significantly reduced.

(6) Other components In addition to the components (1) to (5) described above, the resin composition constituting the pressure-sensitive adhesive layer 2 includes, as other components, a tackifier, an anti-aging agent, and a pressure-adjusting agent. , At least one of fillers, colorants, flame retardants, softeners, antioxidants, plasticizers, surfactants, and the like may be included.

Of these, the tackifier is not particularly limited. For example, rosin resin, terpene resin, coumarone resin, phenol resin, aliphatic petroleum resin, aromatic petroleum resin, aliphatic aromatic copolymer petroleum Resins and the like can be mentioned, and one or more of these can be used in combination.

Such a pressure-sensitive adhesive layer 2 has a contact angle A with respect to hexadecane on the surface of preferably 20 ° or more, more preferably 20 ° or more and 50 ° or less, and more preferably 25 ° or more and 40 ° before application of energy. More preferably, it is not more than 0 °. By setting the contact angle in the adhesive layer 2 within such a range, the semiconductor encapsulated connector 270 is attached to the adhesive tape at the time of the step [4], although it varies slightly depending on the type of base resin contained in the adhesive layer 2. 100 can be securely fixed.

Further, the pressure-sensitive adhesive layer 2 has a contact angle B with hexadecane on the surface of preferably 10 ° or more, more preferably 10 ° or more and 45 ° or less, and more preferably 20 ° or more and 30 ° after application of energy. More preferably, it is as follows. By setting the contact angle in the pressure-sensitive adhesive layer 2 within such a range, the pressure-sensitive adhesive force of the pressure-sensitive adhesive layer 2 to the semiconductor encapsulant 290 is suitably reduced, although it varies slightly depending on the type of base resin contained in the pressure-sensitive adhesive layer 2. Therefore, in the step [6], the semiconductor encapsulant 290 can be easily picked up.

Further, when the contact angles A and B are within the above ranges, (contact angle A−contact angle B) is preferably 1 ° or more and 10 ° or less, and preferably 3 ° or more and 7 ° or less. Is more preferable. Thereby, the said effect can be exhibited more notably.

Further, the adhesive layer 2 preferably has a tack force of 150 kPa or more and 400 kPa or less at 25 ° C., more preferably 250 kPa or more and 400 kPa or less before application of energy. Sealing that does not contain an epoxy group-containing compound having a double bond in the molecular structure at the time of the step [4] because the tack force at 25 ° C. before application of energy of the adhesive layer 2 is within the above range. It can be said that the pressure-sensitive adhesive layer 2 has an adhesive force that can reliably fix the semiconductor sealed connector including the sealing portion made of the material.

Further, the adhesive layer 2 preferably has a tack force of 0 kPa to 150 kPa at 25 ° C., more preferably 0 kPa to 100 kPa, after energy application. Since the tack force at 25 ° C. after application of energy of the adhesive layer 2 is within the above range, the sealing material does not contain an epoxy group-containing compound having a double bond in its molecular structure in the step [6]. It can be said that the pressure-sensitive adhesive layer 2 has such an adhesive force that it can be easily picked up a semiconductor sealing body including the sealing portion constituted by the above.

In addition, the tack force of the adhesive layer 2 is measured according to JIS Z 0237, for example, by pushing the probe to the set pressure value with the tacking tester TAC-II of Reska Co., Ltd., and the set time elapses. Using Constant Load, which continues to be controlled so as to maintain the pressure value until the pressure value is kept, the pressure-sensitive adhesive layer 2 of the pressure-sensitive adhesive tape 100 is turned up, and a probe made of SUS304 having a diameter of 5.0 mm is contacted from the upper side. At that time, the speed at which the probe is brought into contact with the measurement sample is 10 mm / sec, the contact load is 200 gf, and the contact time is 1 second. Thereafter, the probe is peeled upward at a peeling speed of 10 mm / sec, and the force required for peeling is measured as a tack force. The tack force at 25 ° C. is measured by setting the probe temperature to 25 ° C. and the plate temperature to 25 ° C.

Further, the thickness of the pressure-sensitive adhesive layer 2 is not particularly limited, but is preferably 1 μm or more and 30 μm or less, more preferably 5 μm or more and 30 μm or less, and further preferably 10 μm or more and 25 μm or less. By making the thickness of the pressure-sensitive adhesive layer 2 within such a range, the pressure-sensitive adhesive layer 2 exhibits a good adhesive force before applying energy to the pressure-sensitive adhesive layer 2, and after applying energy to the pressure-sensitive adhesive layer 2, Good peelability is exhibited between the adhesive layer 2 and the semiconductor encapsulated connector 270. Moreover, if the thickness of the adhesion layer 2 is within such a range, the total light transmittance of the D4 standard light source of the base material 4 is set to 85% or more and 98% or less, thereby reliably providing excellent translucency. A tape 100 can be provided.

In addition, the adhesion layer 2 may be comprised by the laminated body (multilayer body) which laminated | stacked the layer comprised by the said different resin composition.

Next, the semiconductor substrate processing adhesive tape 100 having such a configuration can be manufactured, for example, as follows.

<Method for producing adhesive tape for semiconductor substrate processing>
FIG. 5 is a longitudinal sectional view for explaining a method of manufacturing the adhesive tape for processing a semiconductor substrate shown in FIG. In the following description, the upper side in FIG. 5 is referred to as “upper” and the lower side is referred to as “lower”.

[1B] First, the base material 4 in which the cut layer 41 and the expansion layer 42 are laminated in this order is prepared (see FIG. 5A).

The base material 4 having such a configuration is not particularly limited, and examples thereof include an extrusion molding method such as an inflation coextrusion method and a T die coextrusion method, a calendering method, an inflation extrusion method, a T die extrusion method, and an annular die extrusion method. The film can be produced using a general molding method such as a lamination method of a film obtained by such an extrusion molding method or a wet casting method. Among these, the T-die coextrusion method is preferable. Thereby, each layer with which the adhesive tape 100 is provided can be formed with excellent thickness accuracy.

Hereinafter, the T-die coextrusion method (extrusion method using a T die) will be described.
First, the resin components constituting the cut layer 41 and the expansion layer 42 are individually dry blended or melt-kneaded, whereby a forming resin composition for forming the

layers

41 and 42 is obtained. Then, the resin composition for forming each of the

layers

41 and 42 was supplied to a screw-type extruder, extruded from a multilayer T die adjusted to 180 to 240 ° C. into a film, and then adjusted to 10 to 50 ° C. The substrate 4 is obtained by cooling and winding while passing through a cooling roll. Or after obtaining the resin composition for formation of each

layer

41 and 42 as a pellet once, you may make it obtain the base material 4 by extrusion-molding as mentioned above. The thickness of each

layer

41 and 42 to be formed can be adjusted by adjusting the screw rotation speed of the extruder.

In the step of cooling and winding the film while passing through the cooling roll described above, it is preferable to secure the strength to such an extent that the film does not break during expansion and to perform winding substantially unstretched. Thereby, the base material 4 which has the outstanding translucency can be provided. The term “substantially non-stretching” means that no positive stretching is performed, and includes non-stretching or slight stretching that does not affect the warp of the substrate 4 during dicing. Usually, the film may be pulled to such an extent that no sagging occurs when the film is wound.

Moreover, when manufacturing the cutting layer 41 using a lamination method, the cutting layer 41 can be used without extending | stretching, Furthermore, the uniaxial or biaxial extending | stretching process may be performed as needed. . Further, on the surface (lower surface) of the cut layer 41, for the purpose of improving the adhesion between the cut layer 41 and the expansion layer 42, corona treatment, chromic acid treatment, mat treatment, ozone exposure treatment, flame exposure. Surface treatment such as treatment, high-voltage impact exposure treatment, ionizing radiation treatment, primer treatment, and anchor coat treatment may be performed.

When the expansion layer 42 is manufactured using a lamination method, the expansion layer 42 is formed by cooling a material obtained by melting a resin composition, which is a constituent material of the expansion layer 42, on the cut layer 41 after heat lamination. It can be obtained by forming the expansion layer 42.

[2B] Next, the pressure-sensitive adhesive layer 2 is formed on the upper surface of the obtained substrate 4 (cut layer 41) (see FIG. 5B).

On the surface (upper surface) of the base material 4, for the purpose of improving the adhesion between the base material 4 and the adhesive layer 2, corona treatment, chromic acid treatment, mat treatment, ozone exposure treatment, flame exposure treatment, high piezoelectric impact Surface treatment such as exposure treatment, ionizing radiation treatment, primer treatment, and anchor coat treatment may be applied.

In addition, the adhesive layer 2 is applied by adhering or spreading a liquid material obtained by dissolving a resin composition, which is a constituent material of the adhesive layer 2, in a solvent to form a varnish on the base material 4, and then volatilizing the solvent to adhere. It can be obtained by forming the layer 2.

In addition, although it does not specifically limit as a solvent, For example, methyl ethyl ketone, acetone, toluene, ethyl acetate, dimethylformaldehyde, etc. are mentioned, Among these, it can use combining 1 type (s) or 2 or more types.

Further, the application or dispersion of the liquid material on the base material 4 can be performed using a method such as die coating, curtain die coating, gravure coating, comma coating, bar coating, and lip coating.

[3B] Next, the base material 4 is left in the thickness direction of the pressure-sensitive adhesive layer 2 so that the center side and the outer peripheral side are separated from the pressure-sensitive adhesive layer 2 formed on the base material 4. By removing a part of the pressure-sensitive adhesive layer 2 in a ring shape, the pressure-sensitive adhesive layer 2 is provided with a center portion 122 and an outer peripheral portion 121 (see FIG. 5C).

As a method for removing a part of the adhesive layer 2 in an annular shape, for example, after punching out so as to surround a region to be removed, a method of removing the adhesive layer 2 located in the punched region can be mentioned.

Further, the punching of the region to be removed can be performed using, for example, a method using a roll mold or a method using a press mold. Especially, the method of using the roll-shaped metal mold | die which can manufacture the adhesive tape 100 continuously is preferable.

In this step, a part of the adhesive layer 2 is punched into a ring shape (circular shape) to form the center part 122 and the outer peripheral part 121. However, the shape of the part of the adhesive layer 2 punched out is the semiconductor device described above. In the manufacturing method, any shape may be used as long as the center portion 122 of the adhesive layer 2 can be fixed by wafer ring. Specifically, examples of the shape to be punched include, in addition to the circular shape described above, an elliptical shape such as an elliptical shape and a saddle shape, and a polygonal shape such as a quadrangular shape and a pentagonal shape.

[4B] Next, by laminating the separator 1 on the adhesive layer 2 formed on the substrate 4, an adhesive tape 100 in which the adhesive layer 2 is coated with the separator 1 is obtained (FIG. 5D). reference.).

The method for laminating the separator 1 on the adhesive layer 2 is not particularly limited, and for example, a laminating method using a roll or a laminating method using a press can be used. Among these, a laminate method using a roll is preferable from the viewpoint of productivity that can be continuously produced.

The separator 1 is not particularly limited, and examples thereof include a polypropylene film, a polyethylene film, and a polyethylene terephthalate film.

Further, since the separator 1 is peeled off when the adhesive tape 100 is used, the surface of the separator 1 may be subjected to a mold release treatment. Examples of the release treatment include a treatment for coating a release agent on the surface of the separator 1 and a treatment for forming fine irregularities on the surface of the separator 1. As the release agent, silicone release agents, alkyd release agents, fluorine release agents, and the like can be used.

Through the steps as described above, the adhesive tape 100 covered with the separator 1 can be formed.

The pressure-sensitive adhesive tape 100 covered with the separator 1 manufactured in this embodiment is used after the pressure-sensitive adhesive tape 100 is peeled from the separator 1 in the semiconductor device manufacturing method using the pressure-sensitive adhesive tape 100 described above.

Further, when the separator 1 is peeled from the adhesive layer 2 covered by the separator 1, it is preferable to peel the separator 1 at an angle of 90 ° to 180 ° with respect to the surface of the adhesive layer 2. By making the angle which peels the separator 1 into the said range, peeling other than the interface of the adhesion layer 2 and the separator 1 can be prevented reliably.

In the present embodiment, the semiconductor device 20 is applied to a quad flat package (QFP), and the semiconductor device 20 having such a configuration is manufactured using the adhesive tape 100. However, the present invention is limited to this case. Instead, the adhesive tape 100 can be applied to manufacture various types of semiconductor packages. For example, Dual Inline Package (DIP), Chip Carrier with Plastic Lead (PLCC), Low Profile Quad Flat Package (LQFP), Small Outline Package (SOP), Small Outline J Lead・ Package (SOJ), Thin Small Outline Package (TSOP), Thin Quad Flat Package (TQFP), Tape Carrier Package (TCP), Ball Grid Array (BGA), Chip Size Package ( Adhesive tape 100 is applied to the manufacture of memory and logic elements such as CSP), matrix array package ball grid array (MAPBGA), chip stacked chip size package, etc. It is possible.

As mentioned above, although the manufacturing method of the adhesive tape for semiconductor substrate processing of this invention and a semiconductor device was demonstrated, this invention is not limited to these.

For example, each layer included in the adhesive tape for processing a semiconductor substrate of the present invention may be added with any component that can exhibit the same function, or the cut layer 41 and the expansion layer 42 in the base material. A plurality of layers may be laminated.

In addition, the configuration of each layer included in the adhesive tape for processing a semiconductor substrate of the present invention can be replaced with any configuration that can exhibit the same function, or a layer with any configuration, such as an antistatic layer, can be provided. It can also be added.

Moreover, in the said embodiment, the semiconductor as a target object obtained by fixing a semiconductor sealing coupling body (semiconductor substrate) with the adhesive tape for semiconductor substrate processing of this invention, and dicing this semiconductor sealing coupling body. Although the case where a sealing body is picked up from this adhesive tape for semiconductor substrate processing was demonstrated, it is not limited to this. For example, a semiconductor wafer (semiconductor substrate) on which a plurality of semiconductor elements are formed is fixed, and a semiconductor element as an object obtained by dicing the semiconductor wafer is picked up from this semiconductor substrate processing adhesive tape. You can also.

Next, specific examples of the present invention will be described.
In addition, this invention is not limited to description of these Examples at all.

1. Preparation of raw materials First, the raw materials used for preparation of the base film for dicing films of the examples are as follows.

<Raw material of base material 4>
Ionomer resin "Himiran 1855" (Mitsui DuPont Polychemical Co., Ltd .; metal atom Zn, MFR1.0 melting point 86 ° C)
Low density polyethylene LDPE “F222” (manufactured by Ube Maruzen Polyethylene; melting point 110 ° C.)
Antistatic agent “Pelestat 212” (manufactured by Sanyo Chemical Industries; polyether / polyolefin block polymer)

<Raw material for adhesive layer 2>
The following raw materials were used for the adhesive layer of each Example.

<Base resin>
Acrylic copolymers 1 to 5 are prepared by mixing at least two of butyl acrylate (BA), acrylic acid (AA), methyl methacrylate (MA) and 2-ethylhexyl acrylate (2EHA), respectively, Obtained by solution polymerization in a solvent.

Note that the mixing ratios of MA, BA, 2EHA and AA mixed with at least two of the acrylic copolymers 1 to 5 were as shown below.

Acrylic copolymer 1 (BA / AA = 90/10)
Acrylic copolymer 2 (BA / AA = 95/5)
Acrylic copolymer 3 (MA / BA / 2EHA / AA = 15/45/35/5)
Acrylic copolymer 4 (MA / 2EHA / AA = 10/85/5)
Acrylic copolymer 5 (MA / 2EHA / AA = 12/85/3)

Further, the glass transition points and the weight average molecular weights of the acrylic copolymers 1 to 5 were as shown below.

Acrylic copolymer 1 (glass transition point: -38 ° C., weight average molecular weight: 600,000)
Acrylic copolymer 2 (glass transition point: -45 ° C, weight average molecular weight: 800,000)
Acrylic copolymer 3 (glass transition point: −42 ° C., weight average molecular weight: 600,000)
Acrylic copolymer 4 (glass transition point: −50 ° C., weight average molecular weight: 800,000)
Acrylic copolymer 5 (glass transition point: −53 ° C., weight average molecular weight: 800,000)

<UV curable resin>
Urethane acrylate 1 (manufactured by Shin-Nakamura Chemical Co., Ltd., product name: UA-33H): 20 parts by weight

<Crosslinking agent>
Polyisocyanate compound (trade name “Coronate L”, manufactured by Nippon Polyurethane Industry Co., Ltd.)

<Photoinitiator>
Benzophenone photoinitiator (trade name “Irgacure 651”, manufactured by Ciba Specialty Chemicals)

<Release agent>
Silicone oil ("BYK-302", manufactured by Big Chemie Japan)
Fluorosurfactant (“RS-75”), manufactured by DIC

2. Production of adhesive tape for semiconductor substrate processing (Example 1)
<Creation of base material 4>
An ionomer resin “Himiran 1855” was used as the resin for forming the cut layer.

Also, 80.0% by mass of low density polyethylene LDPE “F222” and 20.0% by mass of the antistatic agent “Pelestat 212” were dry blended to obtain an expansion layer forming resin composition.

Then, the obtained notch layer-forming resin and expansion layer-forming resin composition were supplied to respective extruders adjusted to 200 ° C. so that the order of the notch layer / expansion layer was 200. The substrate 4 was extruded from a two-layer die at 0 ° C., cooled and solidified with a cooling roll set at 20 ° C., and wound up in a substantially unstretched state to obtain a substrate 4 having a two-layer structure.

In addition, in the obtained base material 4, the thickness of the notch layer 41 was 100 micrometers, the thickness of the extended layer 42 was 50 micrometers, and the thickness of the whole base material 4 was 150 micrometers.

<Creation of adhesive tape 100 (dicing film)>
The adhesive tape 100 was obtained by providing the adhesive layer 2 on the cutting layer 41 of the base material 4 produced as described above. Specifically, 50% by mass of base resin (acrylic copolymer 1) as a raw material for adhesive layer 2, 43% by mass of UV curable resin, 3% by mass of crosslinking agent, 3% by mass of photoinitiator, and 1% by mass of release agent Was used and dissolved and mixed in ethyl acetate to obtain a mixture. Thereafter, the mixture was bar-coated on the cut layer of the substrate 4 so that the thickness after drying was 20 μm, and then dried at 80 ° C. for 10 minutes, whereby the pressure-sensitive adhesive tape 100 of Example 1 was obtained. Obtained.

(Examples 2 to 6, Comparative Example 1)
Except having changed the kind of raw material as described in Table 1, it carried out similarly to Example 1, and produced the base material 4 and the adhesive tape 100 of Examples 2-5 and the comparative example 1. FIG.

3. Evaluation <Tacking force at 25 ° C. before energy application>
The tack force of the adhesive layer at 25 ° C. before energy application was evaluated as follows.

That is, first, with respect to the adhesive tapes 100 of Examples 1 to 6 and Comparative Example 1, respectively, in accordance with JIS Z 0237, using the tacking tester TAC-II of Reska Co., Ltd. A probe made of SUS304 having a diameter of 5.0 mm is brought into contact, the speed at which the probe is brought into contact with the adhesive layer is 10 mm / sec, the contact load is 200 gf, the contact time is 1 second, the probe temperature and the plate The temperature was 25 ° C. Thereafter, the probe was peeled upward at a peeling speed of 10 mm / sec, and the force required for peeling was measured as a tack force. And according to the obtained tack force, the tack force at 25 ° C. was evaluated based on the evaluation criteria shown below. The evaluation results are shown in Table 1.

[Evaluation criteria]
The tack force is 250 kPa or more and 400 kPa or less: A
The tack force is 150 kPa or more and less than 250 kPa: B
The tack force is less than 150 kPa or more than 400 kPa: C

<Tacking force at 25 ° C. after applying energy>
The tack force of the adhesive layer at 25 ° C. after energy application was evaluated as follows.

That is, first, with respect to the adhesive tapes 100 of Examples 1 to 5 and Comparative Examples 1 and 2, respectively, in accordance with JIS Z 0237, using the tacking tester TAC-II of Reska Co., Ltd. A probe made of SUS304 having a diameter of 5.0 mm is contacted from the upper side, the speed at which the probe is brought into contact with the adhesive layer is 10 mm / sec, the contact load is 200 gf, the contact time is 1 second, the probe temperature The plate temperature was 25 ° C. Then, after irradiating ultraviolet rays from the back side of the adhesive tape (irradiation time: 20 seconds, irradiation intensity: 500 mJ / cm ² ), the probe is peeled upward at a peeling speed of 10 mm / sec, and the force required for peeling off the probe Was measured as tack force. And according to the obtained tack force, the tack force at 25 ° C. was evaluated based on the evaluation criteria shown below. The evaluation results are shown in Table 1.

[Evaluation criteria]
The tack force is 0 kPa or more and less than 50 kPa: A
The tack force is 50 kPa or more and 150 kPa or less: B
Tack force is over 150 kPa: C

<Contact angle before energy application>
The contact angle of the adhesive layer with respect to hexadecane before energy application was measured as follows.

That is, first, for the adhesive tapes 100 of Examples 1 to 6 and Comparative Example 1, hexadecane was supplied to the adhesive layer 2, and the contact angle of the adhesive layer with respect to hexadecane before energy application was determined. The measurement results are shown in Table 1.

<Contact angle after energy application>
The contact angle of the pressure-sensitive adhesive layer with respect to hexadecane after energy application was measured as follows.

That is, first, each of the adhesive tapes 100 of Examples 1 to 6 and Comparative Example 1 was irradiated with ultraviolet rays from the back side of the adhesive tape (irradiation time: 20 seconds, irradiation intensity: 500 mJ / cm ² ). Hexadecane was supplied to layer 2, and the contact angle of the adhesive layer with respect to hexadecane before energy application was determined. The measurement results are shown in Table 1.

<Tape mount characteristics>
The tape mount characteristics were evaluated as follows.

That is, first, a glass epoxy dummy substrate 1 (60 mm × 15 mm × 1.2 mm thick), which will be described in detail in the adhesive strength before energy application described later, is attached to the adhesive tapes 100 of Examples 1 to 6 and Comparative Example 1. The presence or absence of generation of bubbles caught between the adhesive layer 2 and the dummy substrate included in the adhesive tape 100 is visually observed, and based on the evaluation criteria shown below according to the number of observed bubbles. The tape mount characteristics were evaluated. The evaluation results are shown in Table 1.

[Evaluation criteria]
No bubbles are observed between the adhesive layer and the dummy substrate: A
Some bubbles are observed between the adhesive layer and the dummy substrate: B
Due to the lack of tackiness, clear bubbles are observed between the adhesive layer and the dummy substrate: C

<Adhesive strength before applying energy>
The adhesive strength before energy application was measured as follows.

That is, first, the pressure-sensitive adhesive tapes 100 of Examples 1 to 6 and Comparative Example 1 were adjusted so that the width thereof was 25 mm, and these were made into a glass epoxy dummy substrate 1 (60 mm × 15 mm) containing epoxidized polybutadiene. × 1.2 mm thickness), and glass epoxy dummy substrate 2 containing no epoxidized polybutadiene (60 mm × 15 mm × 1.2 mm thickness), each with a 2 kg roller in one reciprocation. Thereafter, in accordance with JIS Z 0237, the peel strength measured when the adhesive tape 100 was held at one end and peeled at 25 ° C. in the direction of 180 ° at a speed of 300 mm / min was measured as the adhesive strength.

The glass-epoxy dummy substrate 1 and the glass-epoxy dummy substrate 2 were each manufactured as follows.

That is, the epoxy resin 1 is a biphenyl type epoxy resin (Mitsubishi Chemical Co., Ltd., YX4000K, melting point 105 ° C., epoxy equivalent 185) 4.13% by weight; , Softening point 65 ° C., hydroxyl group equivalent 203) 4.54% by weight; triphenylphosphine 0.13% by weight; fused spherical silica (average particle size 30 μm) 90.00% by weight; epoxidized polybutadiene compound 1 (Shin Nippon Petrochemical Co., Ltd.) E-1800-6.5, number average molecular weight 1800, viscosity (25 ° C.) 350 Pa · s) 0.50% by weight; γ-glycidylpropyltrimethoxysilane 0.20% by weight; carnauba wax 0.20% by weight %: After mixing carbon black 0.30% by weight with a mixer, The resulting mixture was kneaded using two rolls having a surface temperature of 90 ° C. and 45 ° C., cooled and pulverized to obtain an epoxy resin composition. Then, using a transfer molding machine, a sealing part was formed on a bismaleimide / triazine resin / glass cloth substrate having a mold temperature of 175 ° C., an injection pressure of 6.9 MPa, and a curing time of 2 minutes, and a thickness of 60 mm × 15 mm × 0.56 mm. A glass epoxy dummy substrate 1 was obtained by post-curing at 175 ° C. for 2 hours.

Further, biphenyl type epoxy resin (manufactured by Mitsubishi Chemical Corporation, YX4000K, melting point 105 ° C., epoxy equivalent 185) 4.37 wt% as epoxy resin 1; phenol aralkyl resin having biphenylene skeleton as phenol resin 1 (MEH7851SS, manufactured by Meiwa Kasei Co. Softening point 65 ° C., hydroxyl group equivalent 203) 4.80% by weight; triphenylphosphine 0.13% by weight; fused spherical silica (average particle size 30 μm) 90.00% by weight; γ-glycidylpropyltrimethoxysilane 0.20 Weight%; Carnauba wax 0.20% by weight; Carbon black 0.30% by weight was mixed with a mixer, kneaded using two rolls with surface temperatures of 90 ° C. and 45 ° C., cooled and crushed to obtain an epoxy resin. It was set as the composition. And the glass epoxy dummy board | substrate 2 was obtained by setting it as the conditions similar to the said glass epoxy dummy board | substrate 1 using the transfer molding machine.

And according to the obtained adhesive strength, the adhesive strength before energy application was evaluated based on the evaluation criteria shown below. The evaluation results are shown in Table 1.

[Evaluation criteria]
Adhesive strength before energy application is 200 cN / 25 mm or more and less than 1000 cN / 25 mm: A
Adhesive strength is 70 cN / 25 mm or more and less than 200 cN / 25 mm: B
Adhesive strength is less than 70 cN / 25 mm, or 1000 cN / 25 mm or more: C

<Adhesive strength after applying energy>
The adhesive strength after energy application was evaluated as follows.

That is, first, the glass epoxy dummy substrate 1 (60 mm × 15 mm × 1.2 mm thickness) containing epoxidized polybutadiene and the epoxidized polybutadiene are not contained in the adhesive tapes 100 of Examples 1 to 6 and Comparative Example 1. The glass epoxy dummy substrates 2 (60 mm × 15 mm × 1.2 mm thickness) were attached respectively. Thereafter, dicing was performed under the following conditions, and the subdivided dummy substrate was irradiated with ultraviolet rays from the back side of the adhesive tape (irradiation time: 20 seconds, irradiation intensity: 500 mJ / cm ² ). Then, the subdivided dummy substrate was picked up using a vacuum collet, and the force required for picking up was measured as an adhesive force.

And according to the obtained adhesive strength, the adhesive strength after energy application was evaluated based on the evaluation criteria shown below. The evaluation results are shown in Table 1.

[Evaluation criteria]
Adhesive strength after energy application is 5 cN / 25 mm or more and less than 60 cN / 25 mm: A
Adhesive strength is 60 cN / 25 mm or more and less than 90 cN / 25 mm: B
Adhesive strength is 90 cN / 25 mm or more: C

<Backside contamination and adhesive residue characteristics>
The backside contamination and adhesive residue characteristics were evaluated as follows.

That is, first, the glass epoxy dummy substrate 1 (60 mm × 15 mm × 1.2 mm thickness) containing epoxidized polybutadiene and the epoxidized polybutadiene are not contained in the adhesive tapes 100 of Examples 1 to 6 and Comparative Example 1. The glass epoxy dummy substrate 2 (60 mm × 15 mm × 1.2 mm thickness) was pasted, then dicing was performed under the following conditions, and the subdivided dummy substrate was irradiated with ultraviolet rays from the back side of the adhesive tape. (Irradiation time: 20 seconds, irradiation intensity: 500 mJ / cm ² ). Thereafter, 50 dummy substrates subdivided using a vacuum collet are picked up, and the back surface contamination and adhesive residue of the picked dummy substrate are visually observed, and the back surface contamination or adhesive residue is observed. Depending on the number of substrates, back surface contamination and adhesive residue characteristics were evaluated based on the evaluation criteria shown below. The evaluation results are shown in Table 1.

[Evaluation criteria]
The number of dummy substrates on which backside contamination or adhesive residue is observed is 0/50: A
The number of dummy substrates on which backside contamination or adhesive residue is observed is 1 to 3/50: B
The number of dummy substrates on which backside contamination or adhesive residue is observed is 4/50 or more: C

[Dicing condition]
Dicing machine: “DAD-3350” (trade name, manufactured by DISCO)
Dicing blade: “P08-SDC220” (trade name, manufactured by DISCO)
Blade rotation speed: 30000 rpm
Cutting speed: 100mm / sec
Cutting: 100 μm from the surface of the dicing film (the cutting depth for the cutting layer is 80 μm)
Cut size: 5mm x 5mm
Blade cooler: 2L / min

<Cutting properties>
The cutting waste characteristics were evaluated as follows.

That is, first, the glass epoxy dummy substrate 1 (60 mm × 15 mm × 1.2 mm thickness) was attached to the adhesive tape 100 of Examples 1 to 6 and Comparative Example 1, and dicing was performed under the following conditions to obtain a cut line. By observing and counting the number of cutting scraps having a length of 100 μm or more coming out from the cut line, the cutting scrap characteristics were evaluated based on the evaluation criteria shown below. The evaluation results are shown in Table 1.

[Evaluation criteria]
Number of cutting scraps 0-5: A
Number of cutting scraps 6-10: B
The number of cutting scraps is 11 or more: C

[Dicing condition]
Dicing machine: “DAD-3350” (trade name, manufactured by DISCO)
Dicing blade: “P08-SDC220” (trade name, manufactured by DISCO)
Blade rotation speed: 20000 rpm
Cutting speed: 125mm / sec
Cutting: 100 μm from the surface of the dicing film (the cutting depth for the cutting layer is 80 μm)
Cut size: 10mm x 10mm
Blade cooler: 2L / min

As shown in Table 1, in the pressure-sensitive adhesive tapes 100 of Examples 1 to 6, due to the fact that the pressure-sensitive adhesive layer 2 contains a release agent, the sealing portion composed of a sealing material containing epoxidized polybutadiene is used. It was also found that the adhesive strength of the adhesive tape 100 to the sealing material can be reduced by applying energy.

On the other hand, in the pressure-sensitive adhesive tape of Comparative Example 1, the pressure-sensitive adhesive layer 2 does not contain a release agent. Thus, for the sealing material containing epoxidized polybutadiene, the energy of the pressure-sensitive adhesive tape 100 is increased. The adhesive force with respect to the sealing material could not be reduced.

According to the present invention, a substrate, an adhesive layer laminated on one surface of the substrate, and a substrate, a plurality of semiconductor elements disposed on the substrate, and the plurality of semiconductor elements are sealed. When the semiconductor sealing connector including the sealing portion to be cut is cut in the thickness direction to obtain a plurality of semiconductor sealing members, the semiconductor sealing connector is attached to the substrate via the adhesive layer. A pressure-sensitive adhesive tape for processing a semiconductor substrate that is temporarily fixed, and the pressure-sensitive adhesive layer reduces adhesion with the sealing portion when the semiconductor sealing body is peeled from the pressure-sensitive adhesive tape for processing a semiconductor substrate. The sealing part is composed of a sealing material containing an epoxy group-containing compound, and the epoxy group-containing compound has a double bond in its molecular structure, The release agent is a silicone-based oil or a fluorine-based surfactant. It is possible to provide a semiconductor substrate processing adhesive tape according to claim Rukoto. A semiconductor device manufactured by applying such an adhesive tape has excellent reliability. Therefore, the present invention has industrial applicability.

DESCRIPTION OF SYMBOLS 1 Separator 2 Adhesive layer 4 Base material 20 Semiconductor device 21 Bump 22 Cover part 23 Wiring 25 Interposer 25 'Sheet material 26 Semiconductor element 27 Sealing part 41 Cut layer 42 Expansion layer 62 Recessed part 100 Adhesive tape for semiconductor substrate processing (adhesive tape)
121 outer peripheral part 122 center part 221 opening part 270 semiconductor sealing coupling body 290 semiconductor sealing body

Claims

A base material, and an adhesive layer laminated on one surface of the base material,
A plurality of semiconductor encapsulated bodies by cutting a semiconductor encapsulated connector including a substrate, a plurality of semiconductor elements disposed on the substrate, and a sealing portion for encapsulating the plurality of semiconductor elements in a thickness direction. Is obtained by temporarily fixing the semiconductor encapsulated connector to the base material via the adhesive layer, and is an adhesive tape for processing a semiconductor substrate,
The pressure-sensitive adhesive layer contains a release agent for reducing the adhesion with the sealing portion when the semiconductor sealing body is peeled from the pressure-sensitive adhesive tape for processing a semiconductor substrate,
The sealing part is composed of a sealing material containing an epoxy group-containing compound,
The epoxy group-containing compound has a double bond in its molecular structure,
The pressure-sensitive adhesive tape for processing a semiconductor substrate, wherein the release agent is a silicone-based oil or a fluorine-based surfactant.
The release agent is the silicone oil,
The adhesive tape for processing a semiconductor substrate according to claim 1, wherein the silicone-based oil is a modified silicone oil.
3. The adhesive tape for processing a semiconductor substrate according to claim 1, wherein the adhesive layer further contains an adhesive base resin.
4. The adhesive tape for processing a semiconductor substrate according to claim 3, wherein the glass transition point of the base resin is −30 ° C. or lower.
The adhesive tape for processing a semiconductor substrate according to claim 3 or 4, wherein the base resin has a weight average molecular weight of 300,000 to 1.8 million.
6. The adhesive tape for processing a semiconductor substrate according to any one of claims 3 to 5, wherein the adhesive layer further contains a curable resin that is cured by application of energy.
The adhesive tape for processing a semiconductor substrate according to claim 6, wherein a contact angle of the surface of the adhesive layer with respect to hexadecane is 20 ° or more before application of the energy.
The pressure-sensitive adhesive tape for processing a semiconductor substrate according to claim 6 or 7, wherein a contact angle of the surface of the pressure-sensitive adhesive layer with respect to hexadecane is 10 ° or more after the application of the energy.
The pressure-sensitive adhesive tape for processing a semiconductor substrate according to any one of claims 1 to 8, wherein the pressure-sensitive adhesive layer has a thickness of 1 µm to 30 µm.
The adhesive force between the adhesive layer and the sealing part before application of the energy is 70 cN / 25 mm or more and less than 1000 cN / 25 mm,
The adhesive tape for processing a semiconductor substrate according to any one of claims 6 to 9, wherein an adhesive force between the adhesive layer and the sealing portion after the application of energy is 60 cN / 25 mm or more and less than 90 cN / 25 mm.
A method for manufacturing a semiconductor device using the adhesive tape for processing a semiconductor substrate according to any one of claims 1 to 10,
A semiconductor sealing connector forming step for obtaining the semiconductor sealing connector by sealing with the sealing part so as to cover the plurality of semiconductor elements placed on the substrate;
An attaching step of attaching the adhesive tape for processing a semiconductor substrate to the semiconductor sealing connector so that the sealing portion and the adhesive layer are in contact with each other;
The semiconductor encapsulated connector is diced in a thickness direction corresponding to the semiconductor elements included in the semiconductor encapsulated connector, so that the semiconductor encapsulated connector is separated into pieces on the adhesive tape for processing a semiconductor substrate. A dicing process for forming a semiconductor encapsulant;
After applying energy to the adhesive layer, a peeling step of peeling the semiconductor encapsulant from the adhesive tape for processing a semiconductor substrate;
The bumps are connected to the electrodes of the semiconductor element of the substrate so that the bumps are electrically connected to the electrodes of the semiconductor element through conductor posts previously formed on the substrate of the semiconductor encapsulant. And a bump connection step formed on the opposite side.