WO2018115846A1 - Improvements relating to surface modification - Google Patents

Improvements relating to surface modification Download PDF

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Publication number
WO2018115846A1
WO2018115846A1 PCT/GB2017/053808 GB2017053808W WO2018115846A1 WO 2018115846 A1 WO2018115846 A1 WO 2018115846A1 GB 2017053808 W GB2017053808 W GB 2017053808W WO 2018115846 A1 WO2018115846 A1 WO 2018115846A1
Authority
WO
WIPO (PCT)
Prior art keywords
inserts
items
clamping
clamp
abutment
Prior art date
Application number
PCT/GB2017/053808
Other languages
French (fr)
Inventor
Stephen James DYMOND
Ze Feng ZHOU
Hai Ming LV
Christopher SNOWDON
Original Assignee
P2I Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB1621641.8A external-priority patent/GB201621641D0/en
Application filed by P2I Ltd filed Critical P2I Ltd
Priority to CN201790001526.9U priority Critical patent/CN211150516U/en
Publication of WO2018115846A1 publication Critical patent/WO2018115846A1/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/6715Apparatus for applying a liquid, a resin, an ink or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67271Sorting devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67333Trays for chips
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682Mask-wafer alignment

Definitions

  • This invention relates to the securing of items during surface modification processes.
  • this invention relates to a device for securing and/or partially masking one or more items.
  • Other aspects of the invention relate to a clamping frame for clamping one or more inserts to one or more items, an insert or mask for abutting one or more items during a surface modification process, and methods of surface modifying items.
  • a technical field in which there are specific concerns around masking is that of coating electronic devices, for example touchscreen devices, using a vapour deposition process. Whilst applying coatings to such devices can bring great benefits, such as liquid repellence (see for example WO 2007/083122), parts of the device may benefit from remaining uncoated. Such parts may include, without limitation, electrical contacts, exterior surfaces and screens. The functionality or aesthetic of such parts may be affected if they are not effectively masked during coating.
  • Vapour deposition brings with it particular challenges in the context of both clamping and masking items.
  • plasma assisted vapour deposition e.g. plasma polymerisation
  • offers exceptional penetration such that even relatively inaccessible surfaces are exposed and coated. While this represents an advantage in many situations, it means that highly effective clamping or masking may be required to seal off part of an item that is to be protected from damage or coated.
  • Many conventional clamping or masking solutions provide inadequate performance in such conditions.
  • prior art solutions also lack compactness, resulting in undesirably low chamber loadings.
  • the invention provides a device for securing one or more items during a surface modification process, the device comprising : first and second clamp members; one or more inserts for abutting one or more items during the surface modification process when pressed against the one or more items;
  • Such a device can advantageously provide for effective and compact securing of items during a surface modification process and may optionally be configured to provide desirable masking and/or clamping of items.
  • Examples of surface modification processes in the context of this invention include, without limitation, deposition processes, in particular particle or vapour deposition processes.
  • the surface modification process may suitably be sub- atmospheric, i.e. involve exposure of the one or more masked items to sub- atmospheric pressures.
  • the sub-atmospheric pressure may be in the range of from 0.01 to 999.99 mbar, such as in the range of from 0.1 to 999.99 mbar, e.g. in the range of from 0.5 to 999.99 mbar.
  • the surface modification process is a sub-atmospheric vapour deposition process, in particular a plasma polymerisation process.
  • the first and second clamp members may be arranged to be clamped together along a longitudinal direction of the device and the locating means may be arranged to locate the one or more inserts by counteracting lateral
  • movement i.e. movement having a component that is orthogonal to the longitudinal direction in the sandwiched position.
  • the locating means may comprise a rail that is affixed in position relative to at least the first clamp member.
  • the locating means may comprise a plurality of rails.
  • the rails may extend substantially in parallel and may be affixed in position relative to at least the first clamp member.
  • Such a plurality of rails may form a binder.
  • a binder may comprise a plurality of rails provided at or towards the same end of the device. In this manner, the locating means may locate inserts at one end.
  • the or each rail may comprise a straight portion for locating the one or more inserts in the sandwiched position, and optionally an arcuate guide portion.
  • the or each rail may comprise a straight portion capped with a removable end member.
  • the or each rail may comprise first and second straight portions joined by an arcuate guide portion, i.e. may be generally U-shaped.
  • the or each rail may optionally have (or be movable between) an open position in which an insert can be threaded onto the or each rail, and a closed position in which an insert threaded onto the or each rail cannot slide off.
  • the or each rail may be removably screwed to a stand or the like.
  • the one or more inserts may take a variety of forms depending on the
  • Inserts may, for example assist with clamping of items or masking of items, or both.
  • the device may comprise a plurality of inserts, for example at least three inserts, or at least five inserts, or at least ten inserts.
  • a plurality of inserts may be used for abutting the same item and/or for abutting a plurality of items.
  • the device may comprise one or more pairs of inserts for abutting opposed faces of an item .
  • the inserts may have different structures and/or there may be a plurality of inserts that are substantially identical in structure.
  • a plurality of inserts may be stacked in the device in the sandwiched position.
  • a plurality of inserts may be interleaved with items in the sandwiched position to form a stack of inserts and items.
  • an insert may thus be pressed against an item on opposed sides of the insert in the sandwiched position.
  • an insert may comprise opposed abutment surfaces for engaging items. Elastomeric abutment surfaces may
  • the device may be layered as follows, e.g. along a longitudinal direction of the device, to bring inserts and items into the sandwiched position : first clamp member, [insert, item] n , insert, second clamp member, wherein n represents the number of items.
  • the one or more inserts may comprise a locating formation co-operable with the locating means.
  • the inserts may comprise one or more holes or indentations for engaging with one or more rails of the locating means.
  • a hole or formation may be lined with a friction-reducing sleeve, e.g. comprising a polymeric material, to facilitate sliding movement.
  • the one or more inserts may advantageously be slidable on the locating means, e.g. one or more rails thereof, between an engaged position in which the inserts are in the sandwiched position and a released position in which the inserts are positioned to allow access to the items.
  • the one or more inserts may be threaded onto the straight portion of the or each rail in the engaged position and the arcuate guide portion of the or each rail may be arranged to guide sliding movement of the one or more threaded inserts into the released position.
  • a straight portion of the or each rail may thus locate the inserts in an overlying, stacked configuration in the sandwiched position.
  • the inserts may advantageously assist with clamping items secured by the device.
  • the one or more inserts comprise a clamp element for clamping down on one or more regions of an item in the sandwiched position, for example to mitigate delamination or damage in the one or more regions during a surface modification process.
  • the clamp element may be arranged to clamp down on a screen region of an electronic device in the sandwiched position, to mitigate delamination or damage of the screen during a surface modification process.
  • Screens that are particularly prone to delamination include LCD screens, in particular TFT screens.
  • the inserts may advantageously assist with masking items secured by the device.
  • the one or more inserts comprise one or more masks for masking an item from a surface modification process in the sandwiched position.
  • one or more masks may be arranged to mask a screen region of an electronic device in the sandwiched position, to avoid surface modification of the screen during a surface modification process.
  • the invention provides a masking device for partially masking one or more items during a surface modification process, the device comprising : first and second clamp members; one or more masks for partially masking one or more items from the surface modification process when pressed against the one or more items; locating means for locating the one or more masks in a sandwiched position between the first and second clamp members; and a clamping mechanism for clamping together the first and second clamp members to press the one or more masks against one or more items in the sandwiched position.
  • the one or more masks may correspond in profile to an item to be masked to provide for a snug fit against the item .
  • the device advantageously functions effectively without using adherent masks bearing adhesive. Accordingly, the masks may advantageously be free from adhesive.
  • the one or more masks may comprise a peripheral region of relatively greater thickness and a central region of relatively lesser thickness. This reduces material costs and also the potential for outgassing.
  • a mask may comprise a formation for engaging the locating means, or a support portion of the insert, to locate the one or more masks in a sandwiched position between the first and second clamp members.
  • a mask may advantageously comprise a material having total mass loss (TML) as measured by European Space Agency standard ECSS-Q-ST-70-02C of at most 40 %, preferably at most 30 % or at most 20% or even at most 10% or indeed at most 5%.
  • the one or more masks may comprise an elastomer, for example a fluoroelastomer, optionally FKM.
  • FKM (by ASTM D1418 standard) (equivalent to FPM by ISO/DIN 1629 standard) is the designation for about 80% of fluoroelastomers as defined in ASTM D1418.
  • the one or more inserts may comprise an abutment portion for abutting one or more items in the sandwiched position.
  • An abutment portion may comprise an elastomeric abutment surface.
  • An elastomeric abutment surface may advantageously facilitate pressing of the inserts against the one or more items without damage occurring.
  • an abutment portion may comprise a clamp element or a mask as described herein.
  • An abutment portion may comprise a plurality of distinct abutment elements, such as clamp elements, masks or other elements for abutting an item in use.
  • the one or more inserts each comprise an abutment portion comprising a plurality of spaced abutment elements, e.g. clamp elements. This can reduce material costs compared to a single abutment element.
  • the abutment elements may be individually removable or replaceable.
  • an abutment element may comprise a material having total mass loss (TML) as measured by European Space Agency standard ECSS-Q-ST- 70-02C of at most 40 %, preferably at most 30 % or at most 20% or even at most 10% or indeed at most 5%.
  • TML total mass loss
  • the abutment element may advantageously comprise an elastomer.
  • the abutment element may comprise a fluoroelastomer, optionally FKM .
  • an abutment element may be substantially free from adhesive.
  • the one or more inserts may comprise a support portion defining a locating formation co-operable with the locating means.
  • a support portion may comprise one or more holes or indentations for engaging with one or more rails of the locating means.
  • the support portion may be substantially rigid and/or non-elastomeric.
  • a support portion may advantageously comprise a material having a total mass loss (TML) as measured by European Space Agency standard ECSS-Q-ST-70-02C of at most 40 %, preferably at most 30 % or at most 20% or even at most 10% or indeed at most 5%.
  • TML total mass loss
  • a support portion may comprise a polymeric material, a metallic material or a combination thereof.
  • a support portion comprises polypropylene, aluminium, or a combination thereof.
  • a support portion may, for example, comprise one or more support plates optionally comprising one or more cut-outs.
  • the one or more inserts may be unitary or may comprise separable portions.
  • the one or more inserts may comprise unitary support and abutment portions, which portions may suitably be as described above.
  • the one or more inserts may comprise a rigid support portion
  • the abutment portion may comprise a rigid core.
  • the rigid core may be unitary with the support portion and may, for example, comprise an overcoat of an elastomeric material providing an abutment surface. Additionally, or as an alternative to the overcoat, the abutment portion may comprise one or more abutment elements selected from clamp elements and masks.
  • the abutment portion is flexible.
  • the abutment portion may consist of a flexible mask that is free from rigid material and extends from a rigid support portion.
  • the one or more inserts may comprise separable support and abutment portions.
  • the one or more inserts may comprise a support portion having a first formation for locating an associated mask or other abutment portion of the insert with respect to the support portion, and a second formation for locating the support portion with respect to the clamp members.
  • Each of the masks or other abutment portions associated with a support portion may comprise a projection or indentation for engaging the first formation of its associated support portion.
  • Each mask or other abutment portion may be associated with a support portion such that the masks, the support portions and the items to be masked are interleaved in the sandwiched position.
  • the device may be layered as follows, e.g. along a longitudinal direction of the device, to bring the masks into the sandwiched position : first clamp member, [support portion, mask, item, mask] n , support portion, second clamp member, wherein n represents the number of items.
  • first clamp member [support portion, mask, item, mask] n
  • support portion e.g., support portion, second clamp member, wherein n represents the number of items.
  • Alternative abutment portions may be used instead of masks.
  • the first and second clamp members may suitably comprise rigid structures. They may, for example, comprise aluminium or a rigid polymeric material .
  • the first clamp member may comprise a base for resting on a work surface.
  • the clamping mechanism may be pivotably attached to the first clamp member.
  • the second clamp member is releasably attached to the clamping mechanism .
  • the second clamp member may comprise a plurality of interlocking portions.
  • the second clamp member may comprise first and second interlocking portions each having a complementary interlocking formation.
  • the interlocking portions are releasable from an interlocked configuration by forcing one only of the first and second portions in a direction away from the first clamp member but remain interlocked if both portions are forced in a direction away from the first clamp member.
  • the clamp mechanism may be arranged to pivot about the first clamp member to move the interlocking portions of the second clamp member between an open position in which the portions are separated and a closed position in which the portions are interlocked.
  • the clamping mechanism may comprise biasing means to provide for resilient clamping of the clamp members.
  • the clamping mechanism comprises a plurality of clamping pins extending between the first and second clamp members, each clamping pin being pivotably attached to the first clamp member.
  • the clamp members may be oblong in plan and there may suitably be at least four, optionally at least six clamping pins attached to the clamp members.
  • Each clamping pin may advantageously comprise first and second rigid end portions for engaging the first and second clamp members respectively, the rigid end portions of each clamping pin being resiliently connected, e.g. by a resilient central portion.
  • the invention provides a clamping frame for clamping one or more inserts (e.g. masks) to one or more items during a surface modification process, the frame comprising : first and second clamp members; locating means for locating one or more inserts (e.g. masks) for abutting (e.g. partially masking) one or more items during a surface modification process when pressed against one or more items in a sandwiched position between the first and second clamp members; and a clamping mechanism for clamping together the first and second clamp members to press one or more inserts (e.g. masks) located by the locating means in the sandwiched position against one or more items in use.
  • inserts e.g. masks
  • the first and second clamp members, the locating means, the inserts, and/or the clamping mechanism may be as described in respect of the aforementioned device aspect of the invention.
  • the invention provides a mask or other abutment element for abutting and/or partially masking an item during a surface
  • the mask or element comprising : a projection or indentation for engaging a locating means or an insert support portion of a masking device, e.g. a masking device according to any aspect or embodiment of the invention.
  • the projection or indentation of the mask or other abutment element may comprise one or more holes for engaging a rail of a device or clamping frame as described herein.
  • the mask or other abutment element may comprise a material having total mass loss (TML) as measured by European Space Agency standard ECSS-Q-ST-70-02C of at most 40 %, preferably at most 30 % or at most 20% or even at most 10% or indeed at most 5%.
  • TML total mass loss
  • the mask or other abutment element may advantageously comprise an elastomer.
  • the mask or other abutment element may comprise a fluoroelastomer, optionally FKM.
  • the mask or other abutment element may be substantially free from adhesive.
  • the mask or other abutment element corresponds in profile to an item to be masked or secured to provide for a snug fit against the item .
  • the mask or other abutment element may comprise a peripheral region of relatively greater thickness and a central region of relatively lesser thickness.
  • the mask or other abutment element comprises a central cut-out.
  • the invention provides an insert for abutting an item, the insert comprising a support portion comprising a locating formation for engaging a locating means and an abutment portion for abutting an item .
  • the support portion and abutment portion may be as described elsewhere herein.
  • a further aspect of the invention provides a method of surface modifying one or more items, the method comprising : securing the one or more items with a device according to any aspect or embodiment of the invention and exposing the one or more secured items to surface modification conditions.
  • Still a further aspect of the invention provides a method of surface modifying part of one or more items, the method comprising : masking the one or more items with a device according to any aspect or embodiment of the invention and exposing the one or more masked items to surface modification conditions.
  • Still a further aspect of the invention provides a method of surface modifying part of one or more items, the method comprising : clamping the one or more items with a device according to any aspect or embodiment of the invention to mitigate damage and exposing the one or more clamped items to surface modification conditions.
  • Yet a further aspect of the invention provides a method of surface modifying part of one or more items, the method comprising : abutting one or more inserts against the one or more items; placing the one or more inserts and the one or more items into a sandwiched position between first and second clamp
  • the method may comprise threading one or more inserts onto a rail or other locating means affixed to at least one of the clamp members and abutting the one or more items with the one or more inserts in the sandwiched position before clamping together the first and second clamp members.
  • the method comprises releasing the first and second clamp members and sliding a threaded insert along the rail or other locating means from an engaged position, in which the insert portion is positioned to abut an associated item, to a released position, in which the insert is positioned to allow removal of an associated item .
  • the one or more inserts may be as described in connection with any aspect or embodiment herein.
  • the one or more inserts may comprise an
  • elastomeric material and the first and second clamp members may be clamped together with a force sufficient for the elastomeric material to mitigate
  • Another aspect of the invention provides a method of surface modifying part of one or more items, the method comprising : applying one or more masks to the one or more items to partially mask them; placing the one or more masks and the one or more items into a sandwiched position between first and second clamp members; clamping together the first and second clamp members to press the one or more masks against the one or more items in the sandwiched position to mask the one or more items; and exposing the partially masked one or more items to surface modification conditions.
  • the one or more masks may be as described in connection with any aspect or embodiment herein.
  • the one or more masks may comprise an
  • elastomeric material and the first and second clamp members may be clamped together with a force sufficient for the elastomeric material to form a seal against the item.
  • the method may conveniently comprise locating one or more masks and the one or more items in the sandwiched position by engaging each mask with a support portion located with respect to the clamp members.
  • the method may comprise threading one or more support portions onto a rail affixed to at least one of the clamp members and locating the one or more masks and the one or more items in the sandwiched position by engaging each mask with one of said threaded supports.
  • the method comprises sliding a threaded support portion along the rail, optionally via an arcuate guide portion thereof, from an engaged position, in which the support portion is positioned to locate an associated mask in the sandwiched position, to a released position, in which the support portion is positioned to allow removal of its associated mask; and separating mask, item and support portion in the released position.
  • Surface modification conditions may, for example, be vapour deposition conditions.
  • the surface modification conditions may comprise sub-atmospheric pressure.
  • the vapour deposition conditions are plasma polymerisation conditions.
  • Surface modification conditions may optionally comprise: an excitation maxim and a monomer that is at least partly activated by the excitation medium to form a liquid repellent coating on the item .
  • the excitation medium may in particular comprise a plasma, optionally a pulsed plasma.
  • the monomer may be a compound of formula (I) :
  • R 1 , R 2 and R 3 are independently selected from hydrogen, alkyl, haloalkyl or aryl optionally substituted by halo; and R 4 is a group X-R 5 where R 5 is an alkyl or haloalkyl group and X is a bond; X is a group of formula -C(0)0(CH 2 ) n Y, where n is an integer of from 1 to 10 and Y is a bond or a sulphonamide group; or X is a group
  • R 6 is aryl optionally substituted by halo
  • p is 0 or 1
  • q is 0 or 1
  • t is 0 or an integer of from 1 to 10, provided that where q is 1, t is other than 0.
  • the partially masked one or more items may be exposed to a plasma comprising a monomer compound for a period of time sufficient to allow a protective polymeric coating to form on a surface of the electronic or electrical device or component thereof; wherein the monomer compound has the following formula (II) :
  • Ri, R 2 and R 4 are each independently selected from hydrogen, optionally substituted branched or straight chain Ci-C 6 alkyl or halo alkyl or aryl optionally substituted by halo, and R 3 is selected from :
  • each X is independently selected from hydrogen, optionally substituted branched or straight chain d-C 6 alkyl, halo alkyl or aryl optionally substituted by halo; and ni is an integer from 1 to 27.
  • the monomer may be as identified in the claims of WO 2007/083122.
  • the monomer may be selected from lH,l H,2H,2H-perfluorohexyl acrylate (PFAC4), lH,lH,2H,2H-perfluorooctyl acrylate (PFAC6), 1H,1H,2H,2H- perfluorodecyl acrylate (PFAC8) and lH,lH,2H,2H-perfluorododecyl acrylate (PFAC10).
  • PFAC4 lH,l H,2H,2H-perfluorohexyl acrylate
  • PFAC6 lH,lH,2H,2H-perfluorooctyl acrylate
  • PFAC8 1H,1H,2H,2H- perfluorodecyl acrylate
  • PFAC10 lH,lH,2H,2H-perfluorododecyl acrylate
  • the masked item may be exposed to the monomer compound in combination with a crosslinking agent comprising two or more unsaturated bonds attached by means of one or more linker moieties and has a boiling point at standard pressure of less than 500 °C.
  • the crosslinking reagent may be selected, for example from 1,4-butanediol divinyl ether (BDVE), 1,4- cyclohexanedimethanol divinyl ether (CDDE), 1,7-octadiene (170D), 1,2,4 - trivinylcyclohexane (TVCH), divinyl adipate (DVA), 1,3- divinyltetramethyldisiloxane (DVTMDS), diallyl 1,4-cyclohexanedicarboxylate (DCHD), 1,6-divinylperfluorohexane (DVPFH), lH,lH,6H,6H-perfluorohexanediol diacrylate (PFHDA) and glyoxal bis(diallyl acetal) (GBDA).
  • BDVE 1,4-butanediol divinyl ether
  • CDDE 1,4- cyclohexanedimethanol divinyl
  • the coating may advantageously be liquid repelling, e.g. water and/or oil repelling.
  • the one or more items may be of any desired type.
  • the one or more items comprise one or more electronic devices or electronic
  • the one or more items may comprise one or more touchscreen devices, in particular smart phones.
  • the touchscreen of such devices may be masked.
  • the one or more items may in particular comprise a layered screen, for example an LCD screen, e.g. a TFT screen.
  • Figure 1A is a perspective view of a masking device in accordance with an embodiment of the invention in a closed configuration
  • Figure IB is a perspective view of the device of Figure 1A in an open configuration
  • Figure 2A is a perspective view of a clamping frame of the device of Figure 1A;
  • Figure 2B is an illustration of a clamping pin of the frame of Figure 2A;
  • Figure 3A is a perspective view of a right clamp member portion of a clamp member of the frame of Figure 2A;
  • Figure 3B is a perspective view of a left clamp member portion of a clamp member of the frame of Figure 2A;
  • Figure 4A is a perspective view of the frame of Figure 2A in an open position
  • Figure 4B is a distal end view of the frame of Figure 2A in an open position
  • Figure 5 is a perspective view of the frame of Figure 2A with first and second rails thereof detached
  • Figure 6 shows supports of the device of Figure 1A
  • Figure 7A is a plan view of an outer side of a mask of the device of Figure 1A;
  • Figure 7B is a perspective view of an inner side of a mask of the device of Figure 1A;
  • Figures 8A to 8C are perspective views of a set of alternative masking inserts for a masking device in accordance with a further embodiment of the invention.
  • Figures 9A and 9B are perspective views of a further alternative masking insert for a masking device in accordance with yet a further embodiment of the invention.
  • Figures 10A to 10D are perspective views of a set of clamping inserts for a masking device in accordance with another embodiment of the invention.
  • Figures 11A is a perspective view of a set of alternative clamping inserts for a masking device in accordance with yet another embodiment of the invention.
  • Figure 11B is a perspective view of a clamp element of the clamping inserts of Figure 11A.
  • Figure 12 is an exploded perspective view of an alternative clamping frame for a masking device in accordance with yet another embodiment of the invention.
  • a masking device 2 for partially masking items 4 comprises: a clamping frame 6 having first and second clamp members 8, 10 clamped together by a clamping mechanism 12; and a plurality inserts 13 in the form of supports 14 and masks 16 for clamping with items 4 in a sandwiched position between the clamp members 8, 10 to mask the items 4.
  • the device 2 has a closed configuration for masking items 4, shown in Figure 1A, and an open configuration, illustrated in Figure IB, for loading supports 14, masks 16 and items 4.
  • the clamping frame 6 is formed predominantly of aluminium and is designed for clamping together masks and items along a longitudinal direction, between the first and second clamp members 8, 10 of the frame.
  • the first clamp member 8 acts as a generally planar base for the device 2, comprising a clamping portion 18 and a rail stand 20 integral with the clamping portion.
  • the clamping portion 18 comprises four cut-outs 22 to reduce weight and facilitate circulation if the masking device 2 is deployed in a vapour deposition process.
  • the rail stand 20 also comprises a cut-out 22.
  • the rails 24 each comprise two straight portions 26 extending orthogonally from the first clamp member 8 and an arcuate guide portion 28 joining the two straight portions 26 at their ends.
  • the U-shaped rails 24 assist in locating supports 14, masks 16 and items 4 in the sandwiched position between the clamp members 8, 10.
  • each of the clamping mechanism 12 is pivotably fastened to each of the clevises 30.
  • An opposed end of each of the clamping pins 32 is affixed to the second clamp member 10.
  • Each clamping pin 32 comprises lower and upper rigid portions 34, 36 attached to the first and second clamp members 8, 10 respectively and a spring 38 that resiliently biases the rigid portions 34, 36 together.
  • the upper rigid portion 36 of each clamping pin 32 is hollow and slides onto the lower rigid portion 34.
  • An axial boss 40 of the lower portion 34 engages a cross member 42 within the hollow upper portion 36 to delimit sliding movement of the upper portion 36 onto the lower portion 34.
  • the second clamp member 10 acts as a pivotable, generally planar counterpart to the first clamp member 8, comprising right and left interlocking clamp portions 44, 46.
  • Each of the clamp portions 44, 46 is screwed to three of the clamping pins 32 at a peripheral side and comprises an opposed inner side having a pair of interlocking formations 48, 50.
  • the clamp portions 44, 46 each comprise five cut-outs 22.
  • the right clamp portion 44 comprises two U-shaped female interlocking formations 48 whilst the left clamp portion 46 comprises two T-shaped male interlocking formations 50.
  • the female interlocking formations 48 of the right clamp portion 44 mate with the male interlocking formations 50 of the left clamp portion 46 the right and left clamp portions 44, 46 are interlocked and form a generally planar counterpart to the first clamp member 8.
  • the supports 14, masks 16 and items 4 can be clamped in the sandwiched position between the clamp members 8, 10 by the clamping pins 32.
  • the device 2 can also be brought into an open configuration to facilitate loading of supports 14, masks 16 and items 4 into the sandwiched position.
  • the interlocking formations 48, 50 of the right and left clamp portions 44, 46 can be disengaged by lifting the left clamp portion 46 relative to the right clamp portion 44, away from the first clamp member 8. With the interlocking formations 48, 50 disengaged, the right and left clamp portions 44, 46 can part by pivoting laterally together with their associated clamping pins 32 about the clevises 30. This brings the device 2 into the open configuration.
  • the U-shaped rails 24 may be unscrewed from the rail stand 20. This allows catch formations to be threaded onto the rails 24.
  • the supports 14 each comprise first and second apertures 52 for threading onto the rails 24.
  • the supports 14 are formed of polypropylene and comprise three types.
  • a lowermost support type 14L comprises a panel having, in addition to the first and second apertures 52, five screw holes 54 for being screwed to the clamping portion 18 of the first clamp member 8. Furthermore, the lowermost support comprises a plurality of indentations 56 for receiving projections of a mask 16 placed above the support in use and a peripheral lip 58 extending upwards.
  • a middle support type 14M comprises a panel having, in addition to the first and second apertures 52, a central cut-out 60, a plurality of indentations 56 for receiving projections of two masks 16 (one above and one below the support 14M) in use, and peripheral lips 58 on upper and lower opposed faces.
  • One or more middle supports may threaded onto the rails 24 to locate a plurality of masks 16 and mask a desired number of items.
  • An uppermost support type 14U comprises a panel having, in addition to the first and second apertures 52, a plurality of indentations 56 for receiving projections of a mask 16, and peripheral lips 58 on opposed faces and a peripheral lip 58 extending towards the first clamp member 10 when the support 14U rests against the second clamp member 8.
  • the masks 16 are formed of a
  • the masks 16 are able to form a substantially vapour tight seal when pressed against an item in the sandwiched position, even under vapour deposition conditions, e.g. those encountered in plasma polymerisation.
  • a support-facing side 60 of each mask 16 comprises a plurality of projections 62 for engaging the indentations 56 of the supports 14.
  • An opposed, item-facing side 64 of the mask corresponds in profile to an item 4 to be masked to provide for a snug fit.
  • Each mask comprises a peripheral region 66 of relatively greater thickness and a central region of relatively lesser thickness 68. This reduces material costs and also the potential for outgassing. Effective masking is still provided because the peripheral region forms a sealing periphery around the central region.
  • the supports 14 constitute support portions of the inserts and the masks 16 abutment portions.
  • the inserts 13 assist with securing and masking the items 4 in a sandwiched position when the first and second clamp members 8, 10 are engaged.
  • supports 14 and masks 16 are interleaved with items in a stack atop the first clamping member 8.
  • the rails 24 are first unscrewed from the rail stand 20 of the first clamp member 8 as described with reference to Figure 5. Then, and referring now to Figure 7, the lowermost support 14L is screwed to the first clamp member 8, and a desired number of middle supports 14M, and the uppermost support 14U, are threaded onto the rails 24 before the rails are re-attached to the rail stand 20.
  • the supports 14 are now laterally located with respect to the clamp members 8, 10 by the rails 24. Save for the lowermost support 14L, the supports 14 can slide along the rails 24 to permit masks 16 and items 4 to be interleaved between them .
  • slidable supports 14M, 14L may be slid away from the first clamp member 8 via the arcuate guide portions 28 of the rails to be stacked adjacent to the first clamp member 8 in a released position.
  • a first mask 16 can be located with respect to the lowermost support 14L by engaging the projections 62 of the first mask with the indentations 56 of the lowermost support (which engagement is not visible in Figure 7).
  • the peripheral lip 58 of the lowermost support also assists in location.
  • a first item 4 may then be placed on the first mask 16. This is the state in which the device 2 is shown in Figure 7.
  • a second mask 16 may now be placed onto the item 4.
  • the support-facing side 64 of the second mask 16 faces upwards and engages a first middle support 14M, which is slid along the rails 24 to be placed atop the second mask 16.
  • a third mask 14 is then engaged with the upper face of the first middle support, and a second item 4 placed atop the third mask 14, followed by another mask and a third support 14 and so on, until the uppermost support 14U is placed, such that all the supports 14, masks 16 and items 4 are interleaved and stacked on top of the first clamp member 8.
  • the second clamp member 10 is then pivoted to bring the device 2 into the closed configuration of Figure 1. To do so, it may be necessary to compress the stacked and interleaved supports 14, masks 16 and items 4 down onto the first clamp member 8 when interlocking the first and second clamping portions 44, 46.
  • the springs 38 of the clamping pins 32 provide resilience to facilitate bringing the device 2 into the closed position, without however compromising the desired clamping force.
  • the loaded masking device 2 may be exposed to surface modification conditions, e.g. vapour deposition conditions by placing it in a plasma polymerisation deposition chamber.
  • a vapour deposition process in accordance with an embodiment of the invention comprises exposing the loaded device 2 to vapour deposition conditions substantially as described in WO 2007/083122, which is incorporated herein by reference.
  • vapour deposition conditions further comprise a cross-linker selected from 1,4-butanediol divinyl ether (BDVE), 1,4- cyclohexanedimethanol divinyl ether (CDDE), 1,7-octadiene (170D), 1,2,4 - trivinylcyclohexane (TVCH), divinyl adipate (DVA), 1,3- divinyltetramethyldisiloxane (DVTMDS), diallyl 1,4-cyclohexanedicarboxylate (DCHD), 1,6-divinylperfluorohexane (DVPFH), lH,lH,6H,6H-perfluorohexanediol diacrylate (PFHDA) and glyoxal bis(diallyl acetal) (GBDA).
  • BDVE 1,4-butanediol divinyl ether
  • CDDE 1,4- cyclohexanedimethanol divinyl
  • vapour deposition conditions only those parts of the items 4 which are not masked are coated with a vapour deposition coating.
  • the second clamp member 10 can be returned to the open configuration.
  • the supports 14 can then, once again and one by one be brought into the released position such that partially coated items 4 and, if desired, masks 16 can be removed.
  • the device 2 may advantageously be re-used for further depositions, either with the same masks 16 or with different masks (e.g. adapted to different items).
  • a masking device comprises the same features as the masking device of Figures 1 to 7 (in respect of which reference is simply made to the foregoing), save that more compact masking inserts 113 are provided instead of the inserts 13 constituted by the separable supports 14 and masks 16.
  • the compact masking inserts 113 comprise a support portion 114 and an abutment portion 116, which are integrally formed from an aluminium core 115.
  • the support portion 114 comprises first and second apertures 152 for threading onto the rails 24 of the device.
  • the apertures 152 comprise polymeric internal sleeves 153 to facilitate sliding over the rails 24.
  • the abutment portion 116 is shaped to conform to an item and, as a result, the insert is able to mask an item 4 when pressed against it in the sandwiched position (in the general manner described in respect of Figures 1 to 7).
  • the compact inserts 113 comprise three types.
  • a lowermost insert type 113L is adapted on one side to be affixed to the clamping portion 18 of the first clamp member 8.
  • the abutment portion 116 of the lowermost insert 113L comprises an elastomeric mask surface 117 adapted to fit a lower side of an item.
  • a middle insert type 114M comprises mask surfaces 117 that are differently formed on opposed sides of the abutment portion 116 to conform to upper and lower surfaces of items to be masked.
  • an uppermost insert type 114U comprises a mask surface 117 adapted to fit and mask an upper side of an item, and a reverse suitable to engage the clamping portion of the second clamp member 10.
  • Loading and clamping of the masking device with the compacted inserts 113 proceeds substantially as described in respect of Figures 1 to 7, except that the inserts 113 are unitary. It has been found that the more compact inserts 113 offer space savings, enabling a higher loading of the device with items. In particular the stacking thickness of the inserts 113 is greatly reduced, since they are formed from aluminium panels with an elastomeric overcoat.
  • FIG. 9A and 9B the design of Figures 8A to 8C can be further modified by shortening the aluminium core 115 so that the core does not extend into the abutment portion.
  • a shortened aluminium core 215 may thus constitute only a support portion 214 of a more light-weight, flexible insert 213.
  • Such an advantageously light-weight and less material intensive insert 213M can be used as an alternative middle insert type in any of the embodiments previously described.
  • the invention also envisages devices that are not primarily concerned with masking.
  • a device comprises the same features as the device of Figures 1 to 7 (in respect of which reference is simply made to the foregoing), save that clamping inserts 313 are provided instead of the masking inserts 13 constituted by the separable supports 14 and masks 16.
  • the clamping inserts 313 comprise a support portion 314 and an abutment portion 316, which portions are integrally formed from an aluminium core 315.
  • the support portion 314 comprises first and second sleeved apertures 352 for threading onto the rails 24 of the device.
  • the abutment portion 316 comprises an elastomeric FKM over-layer 317 for abutting one or more items when pressed against the one or more items in the sandwiched position (in the general manner described in respect of Figures 1 to 7).
  • the clamping inserts 313 comprise lowermost, middle and uppermost types, 313L, 313M, 313U, with the lowermost and uppermost types, 313L, 313 U adapted to engage the clamp members 8, 10 of the device. Cut-outs are provided in each of the clamping inserts 313, with the middle type clamping insert 313M comprising a large central cut-out 360 to save material . It has been found that LCD screens, for example on a mobile phone or other electronic device, can be effectively clamped to mitigate delamination and damage by the insert 313 comprising an abutment portion 316 that engages a periphery of the screen only.
  • the clamping inserts 313 are not primarily concerned with masking but with mitigating delamination or damage in items such as LCD screens of electronic devices. To this end, the clamping inserts 313 comprise a plurality of channels 319 to improve degassing.
  • an alternative set of clamping inserts 413 has been further modified to comprise removable, modular clamping elements 417E formed of FKM .
  • Each clamping insert 413 comprises a support portion 414 and abutment portion 416 integrally formed from an aluminium core 415.
  • the abutment portion 414 comprises slots 421 into which the clamping elements 417E can be inserted with a snap fit. This provides a spaced array of modular clamping elements 417E together defining an abutment surface.
  • the distinct clamping elements 417E require less material than the FKM over- layer 317 of the embodiment of Figures 10A to 10B, yet offer substantially the same performance. Additionally, the clamping elements 417E may be
  • Each clamping element comprises a snap-fit formation 425 and an opposed abutment side 427.
  • the abutment side 429 comprises a projection 429 to assist location of items on the array of clamping elements of the insert.
  • clamping inserts described herein may be readily modified for use as masking inserts.
  • the clamping frame 6 may of course also be modified.
  • the inverted U-shaped rails of the clamping frame 6 may be replaced by rods 524 joined or capped by an end member 525.
  • the end member may, for example, be fastened to the rods with screws. This may be a more cost-effective solution of providing locating means.

Abstract

A device for securing one or more items during a surface modification process, the device comprising: first and second clamp members; one or more inserts for abutting one or more items during the surface modification process when pressed against the one or more items; locating means for locating the one or more inserts in a sandwiched position between the first and second clamp members; and a clamping mechanism for clamping together the first and second clamp members to press the one or more inserts against one or more items in the sandwiched position.

Description

IMPROVEMENTS RELATING TO SURFACE MODIFICATION
TECHNICAL FIELD
This invention relates to the securing of items during surface modification processes. In particular, though not exclusively, this invention relates to a device for securing and/or partially masking one or more items. Other aspects of the invention relate to a clamping frame for clamping one or more inserts to one or more items, an insert or mask for abutting one or more items during a surface modification process, and methods of surface modifying items.
BACKGROUN D
There is a need when surface modifying items, e.g. by applying a vapour deposited coating, to secure such items in position. For example, items may need to be held in a surface modification chamber in which surface modification conditions are provided.
For reasons of economy, it is desirable to secure items in a relatively compact configuration, for example to achieve high chamber loadings.
There is also a need to clamp some items to help them retain their structural integrity. This may be of particular importance where a sub-atmospheric surface modification process is employed. It has been found that, peeling, delamination or other damage may occur in some undamped items, such as for example layered screens of electronic devices, under sub-atmospheric conditions.
There can also be a need to mask items during a surface modification process such that part of their surface is not modified. Masking may be of importance, for example, where part of the item would lose its desired functionality or aesthetic were a coating to be applied to it.
A technical field in which there are specific concerns around masking is that of coating electronic devices, for example touchscreen devices, using a vapour deposition process. Whilst applying coatings to such devices can bring great benefits, such as liquid repellence (see for example WO 2007/083122), parts of the device may benefit from remaining uncoated. Such parts may include, without limitation, electrical contacts, exterior surfaces and screens. The functionality or aesthetic of such parts may be affected if they are not effectively masked during coating.
It is known to apply flexible, adhesive masks to items during coating processes. However, such flexible adhesive masks can be inconvenient to apply. They are also generally not reusable, which means they represent additional waste and cost in a coating process.
Vapour deposition brings with it particular challenges in the context of both clamping and masking items. For example, plasma assisted vapour deposition, e.g. plasma polymerisation, offers exceptional penetration, such that even relatively inaccessible surfaces are exposed and coated. While this represents an advantage in many situations, it means that highly effective clamping or masking may be required to seal off part of an item that is to be protected from damage or coated. Many conventional clamping or masking solutions provide inadequate performance in such conditions. Often, prior art solutions also lack compactness, resulting in undesirably low chamber loadings.
It is an aim of the invention to address at least one of the above-described problems, or another problem associated with the prior art.
SUMMARY OF THE INVENTION
From one aspect, the invention provides a device for securing one or more items during a surface modification process, the device comprising : first and second clamp members; one or more inserts for abutting one or more items during the surface modification process when pressed against the one or more items;
locating means for locating the one or more inserts in a sandwiched position between the first and second clamp members; and a clamping mechanism for clamping together the first and second clamp members to press the one or more inserts against one or more items in the sandwiched position. Such a device can advantageously provide for effective and compact securing of items during a surface modification process and may optionally be configured to provide desirable masking and/or clamping of items.
Examples of surface modification processes in the context of this invention include, without limitation, deposition processes, in particular particle or vapour deposition processes. The surface modification process may suitably be sub- atmospheric, i.e. involve exposure of the one or more masked items to sub- atmospheric pressures. Suitably, the sub-atmospheric pressure may be in the range of from 0.01 to 999.99 mbar, such as in the range of from 0.1 to 999.99 mbar, e.g. in the range of from 0.5 to 999.99 mbar. In some embodiments of the surface modification process is a sub-atmospheric vapour deposition process, in particular a plasma polymerisation process.
Suitably, the first and second clamp members may be arranged to be clamped together along a longitudinal direction of the device and the locating means may be arranged to locate the one or more inserts by counteracting lateral
movement, i.e. movement having a component that is orthogonal to the longitudinal direction in the sandwiched position.
Advantageously, the locating means may comprise a rail that is affixed in position relative to at least the first clamp member. Indeed, the locating means may comprise a plurality of rails. The rails may extend substantially in parallel and may be affixed in position relative to at least the first clamp member. Such a plurality of rails may form a binder.
A binder may comprise a plurality of rails provided at or towards the same end of the device. In this manner, the locating means may locate inserts at one end.
Suitably, the or each rail may comprise a straight portion for locating the one or more inserts in the sandwiched position, and optionally an arcuate guide portion. Alternatively, the or each rail may comprise a straight portion capped with a removable end member. Suitably, the or each rail may comprise first and second straight portions joined by an arcuate guide portion, i.e. may be generally U-shaped.
The or each rail may optionally have (or be movable between) an open position in which an insert can be threaded onto the or each rail, and a closed position in which an insert threaded onto the or each rail cannot slide off.
For example, the or each rail may be removably screwed to a stand or the like.
The one or more inserts may take a variety of forms depending on the
functionality desired from the device. Inserts may, for example assist with clamping of items or masking of items, or both.
The device may comprise a plurality of inserts, for example at least three inserts, or at least five inserts, or at least ten inserts. A plurality of inserts may be used for abutting the same item and/or for abutting a plurality of items.
Conveniently, the device may comprise one or more pairs of inserts for abutting opposed faces of an item .
The inserts may have different structures and/or there may be a plurality of inserts that are substantially identical in structure.
Advantageously, a plurality of inserts may be stacked in the device in the sandwiched position. In particular, a plurality of inserts may be interleaved with items in the sandwiched position to form a stack of inserts and items.
An insert may thus be pressed against an item on opposed sides of the insert in the sandwiched position. To this end, an insert may comprise opposed abutment surfaces for engaging items. Elastomeric abutment surfaces may
advantageously facilitate pressing of an insert against one or more items whilst mitigating risk of damage.
Conveniently, the device may be layered as follows, e.g. along a longitudinal direction of the device, to bring inserts and items into the sandwiched position : first clamp member, [insert, item]n, insert, second clamp member, wherein n represents the number of items.
To help locate the inserts in the sandwiched position, the one or more inserts may comprise a locating formation co-operable with the locating means. For example, the inserts may comprise one or more holes or indentations for engaging with one or more rails of the locating means. A hole or formation may be lined with a friction-reducing sleeve, e.g. comprising a polymeric material, to facilitate sliding movement.
In various embodiments, the one or more inserts may advantageously be slidable on the locating means, e.g. one or more rails thereof, between an engaged position in which the inserts are in the sandwiched position and a released position in which the inserts are positioned to allow access to the items.
Where the or each rail comprises a straight portion for locating the one or more inserts in the sandwiched position, and an arcuate guide portion, the one or more inserts may be threaded onto the straight portion of the or each rail in the engaged position and the arcuate guide portion of the or each rail may be arranged to guide sliding movement of the one or more threaded inserts into the released position. A straight portion of the or each rail may thus locate the inserts in an overlying, stacked configuration in the sandwiched position.
The inserts may advantageously assist with clamping items secured by the device. In various embodiments, the one or more inserts comprise a clamp element for clamping down on one or more regions of an item in the sandwiched position, for example to mitigate delamination or damage in the one or more regions during a surface modification process. For example, the clamp element may be arranged to clamp down on a screen region of an electronic device in the sandwiched position, to mitigate delamination or damage of the screen during a surface modification process. Screens that are particularly prone to delamination include LCD screens, in particular TFT screens.
The inserts may advantageously assist with masking items secured by the device. In various embodiments, the one or more inserts comprise one or more masks for masking an item from a surface modification process in the sandwiched position. For example, one or more masks may be arranged to mask a screen region of an electronic device in the sandwiched position, to avoid surface modification of the screen during a surface modification process.
Indeed, in various embodiments, the invention provides a masking device for partially masking one or more items during a surface modification process, the device comprising : first and second clamp members; one or more masks for partially masking one or more items from the surface modification process when pressed against the one or more items; locating means for locating the one or more masks in a sandwiched position between the first and second clamp members; and a clamping mechanism for clamping together the first and second clamp members to press the one or more masks against one or more items in the sandwiched position.
To provide for particularly effective masking, the one or more masks may correspond in profile to an item to be masked to provide for a snug fit against the item .
On account of its clamping action, the device advantageously functions effectively without using adherent masks bearing adhesive. Accordingly, the masks may advantageously be free from adhesive.
Suitably, the one or more masks may comprise a peripheral region of relatively greater thickness and a central region of relatively lesser thickness. This reduces material costs and also the potential for outgassing.
A mask may comprise a formation for engaging the locating means, or a support portion of the insert, to locate the one or more masks in a sandwiched position between the first and second clamp members.
To counteract the negative effects of outgassing, a mask may advantageously comprise a material having total mass loss (TML) as measured by European Space Agency standard ECSS-Q-ST-70-02C of at most 40 %, preferably at most 30 % or at most 20% or even at most 10% or indeed at most 5%. Suitably, the one or more masks may comprise an elastomer, for example a fluoroelastomer, optionally FKM.
FKM (by ASTM D1418 standard) (equivalent to FPM by ISO/DIN 1629 standard) is the designation for about 80% of fluoroelastomers as defined in ASTM D1418.
Advantageously, the one or more inserts may comprise an abutment portion for abutting one or more items in the sandwiched position. An abutment portion may comprise an elastomeric abutment surface. An elastomeric abutment surface may advantageously facilitate pressing of the inserts against the one or more items without damage occurring. Suitably, an abutment portion may comprise a clamp element or a mask as described herein.
An abutment portion may comprise a plurality of distinct abutment elements, such as clamp elements, masks or other elements for abutting an item in use. In various embodiments, the one or more inserts each comprise an abutment portion comprising a plurality of spaced abutment elements, e.g. clamp elements. This can reduce material costs compared to a single abutment element. Advantageously, the abutment elements may be individually removable or replaceable.
Advantageously, an abutment element may comprise a material having total mass loss (TML) as measured by European Space Agency standard ECSS-Q-ST- 70-02C of at most 40 %, preferably at most 30 % or at most 20% or even at most 10% or indeed at most 5%. The abutment element may advantageously comprise an elastomer. Suitably, the abutment element may comprise a fluoroelastomer, optionally FKM .
Advantageously, an abutment element may be substantially free from adhesive.
Optionally, the one or more inserts may comprise a support portion defining a locating formation co-operable with the locating means. A support portion may comprise one or more holes or indentations for engaging with one or more rails of the locating means. Conveniently, the support portion may be substantially rigid and/or non-elastomeric. To counteract the negative effects of outgassing, a support portion may advantageously comprise a material having a total mass loss (TML) as measured by European Space Agency standard ECSS-Q-ST-70-02C of at most 40 %, preferably at most 30 % or at most 20% or even at most 10% or indeed at most 5%. Optionally, a support portion may comprise a polymeric material, a metallic material or a combination thereof. In various embodiments, a support portion comprises polypropylene, aluminium, or a combination thereof. A support portion may, for example, comprise one or more support plates optionally comprising one or more cut-outs.
The one or more inserts may be unitary or may comprise separable portions.
Conveniently, the one or more inserts may comprise unitary support and abutment portions, which portions may suitably be as described above. For example, the one or more inserts may comprise a rigid support portion
comprising one or more holes or indentations for engaging with one or more rails of the locating means, and an abutment portion for abutting one or more items. The abutment portion may comprise a rigid core. The rigid core may be unitary with the support portion and may, for example, comprise an overcoat of an elastomeric material providing an abutment surface. Additionally, or as an alternative to the overcoat, the abutment portion may comprise one or more abutment elements selected from clamp elements and masks. In other
embodiments, the abutment portion is flexible. For example the abutment portion may consist of a flexible mask that is free from rigid material and extends from a rigid support portion.
Alternatively, the one or more inserts may comprise separable support and abutment portions. For example, the one or more inserts may comprise a support portion having a first formation for locating an associated mask or other abutment portion of the insert with respect to the support portion, and a second formation for locating the support portion with respect to the clamp members.
Each of the masks or other abutment portions associated with a support portion may comprise a projection or indentation for engaging the first formation of its associated support portion. Each mask or other abutment portion may be associated with a support portion such that the masks, the support portions and the items to be masked are interleaved in the sandwiched position.
Conveniently, the device may be layered as follows, e.g. along a longitudinal direction of the device, to bring the masks into the sandwiched position : first clamp member, [support portion, mask, item, mask]n, support portion, second clamp member, wherein n represents the number of items. Alternative abutment portions may be used instead of masks.
The first and second clamp members may suitably comprise rigid structures. They may, for example, comprise aluminium or a rigid polymeric material .
The first clamp member may comprise a base for resting on a work surface.
Advantageously, the clamping mechanism may be pivotably attached to the first clamp member. In an embodiment, the second clamp member is releasably attached to the clamping mechanism .
Advantageously, the second clamp member may comprise a plurality of interlocking portions. Suitably, the second clamp member may comprise first and second interlocking portions each having a complementary interlocking formation. In an embodiment, the interlocking portions are releasable from an interlocked configuration by forcing one only of the first and second portions in a direction away from the first clamp member but remain interlocked if both portions are forced in a direction away from the first clamp member.
The clamp mechanism may be arranged to pivot about the first clamp member to move the interlocking portions of the second clamp member between an open position in which the portions are separated and a closed position in which the portions are interlocked.
To facilitate loading of the device and suitable clamping, the clamping
mechanism may comprise biasing means to provide for resilient clamping of the clamp members. In an embodiment, the clamping mechanism comprises a plurality of clamping pins extending between the first and second clamp members, each clamping pin being pivotably attached to the first clamp member. The clamp members may be oblong in plan and there may suitably be at least four, optionally at least six clamping pins attached to the clamp members.
Each clamping pin may advantageously comprise first and second rigid end portions for engaging the first and second clamp members respectively, the rigid end portions of each clamping pin being resiliently connected, e.g. by a resilient central portion.
From another aspect, the invention provides a clamping frame for clamping one or more inserts (e.g. masks) to one or more items during a surface modification process, the frame comprising : first and second clamp members; locating means for locating one or more inserts (e.g. masks) for abutting (e.g. partially masking) one or more items during a surface modification process when pressed against one or more items in a sandwiched position between the first and second clamp members; and a clamping mechanism for clamping together the first and second clamp members to press one or more inserts (e.g. masks) located by the locating means in the sandwiched position against one or more items in use.
The first and second clamp members, the locating means, the inserts, and/or the clamping mechanism may be as described in respect of the aforementioned device aspect of the invention.
From yet another aspect, the invention provides a mask or other abutment element for abutting and/or partially masking an item during a surface
modification process when pressed against the item, the mask or element comprising : a projection or indentation for engaging a locating means or an insert support portion of a masking device, e.g. a masking device according to any aspect or embodiment of the invention. Suitably, the projection or indentation of the mask or other abutment element may comprise one or more holes for engaging a rail of a device or clamping frame as described herein.
Advantageously, the mask or other abutment element may comprise a material having total mass loss (TML) as measured by European Space Agency standard ECSS-Q-ST-70-02C of at most 40 %, preferably at most 30 % or at most 20% or even at most 10% or indeed at most 5%. The mask or other abutment element may advantageously comprise an elastomer. Suitably, the mask or other abutment element may comprise a fluoroelastomer, optionally FKM.
Advantageously, the mask or other abutment element may be substantially free from adhesive.
In an embodiment, the mask or other abutment element corresponds in profile to an item to be masked or secured to provide for a snug fit against the item .
To reduce outgassing in a vacuum assisted process, the mask or other abutment element may comprise a peripheral region of relatively greater thickness and a central region of relatively lesser thickness. In an embodiment, the mask or other abutment element comprises a central cut-out.
From still another aspect, the invention provides an insert for abutting an item, the insert comprising a support portion comprising a locating formation for engaging a locating means and an abutment portion for abutting an item . The support portion and abutment portion may be as described elsewhere herein.
A further aspect of the invention provides a method of surface modifying one or more items, the method comprising : securing the one or more items with a device according to any aspect or embodiment of the invention and exposing the one or more secured items to surface modification conditions.
Still a further aspect of the invention provides a method of surface modifying part of one or more items, the method comprising : masking the one or more items with a device according to any aspect or embodiment of the invention and exposing the one or more masked items to surface modification conditions.
Still a further aspect of the invention provides a method of surface modifying part of one or more items, the method comprising : clamping the one or more items with a device according to any aspect or embodiment of the invention to mitigate damage and exposing the one or more clamped items to surface modification conditions.
Yet a further aspect of the invention provides a method of surface modifying part of one or more items, the method comprising : abutting one or more inserts against the one or more items; placing the one or more inserts and the one or more items into a sandwiched position between first and second clamp
members; clamping together the first and second clamp members to press the one or more inserts against the one or more items in the sandwiched position to secure the one or more items; and exposing the secured one or more items to surface modification conditions.
Advantageously, the method may comprise threading one or more inserts onto a rail or other locating means affixed to at least one of the clamp members and abutting the one or more items with the one or more inserts in the sandwiched position before clamping together the first and second clamp members.
In an embodiment, the method comprises releasing the first and second clamp members and sliding a threaded insert along the rail or other locating means from an engaged position, in which the insert portion is positioned to abut an associated item, to a released position, in which the insert is positioned to allow removal of an associated item .
The one or more inserts may be as described in connection with any aspect or embodiment herein. Suitably the one or more inserts may comprise an
elastomeric material and the first and second clamp members may be clamped together with a force sufficient for the elastomeric material to mitigate
delamination or damage in a region of the item. Another aspect of the invention provides a method of surface modifying part of one or more items, the method comprising : applying one or more masks to the one or more items to partially mask them; placing the one or more masks and the one or more items into a sandwiched position between first and second clamp members; clamping together the first and second clamp members to press the one or more masks against the one or more items in the sandwiched position to mask the one or more items; and exposing the partially masked one or more items to surface modification conditions.
The one or more masks may be as described in connection with any aspect or embodiment herein. Suitably the one or more masks may comprise an
elastomeric material and the first and second clamp members may be clamped together with a force sufficient for the elastomeric material to form a seal against the item.
The method may conveniently comprise locating one or more masks and the one or more items in the sandwiched position by engaging each mask with a support portion located with respect to the clamp members.
Advantageously, the method may comprise threading one or more support portions onto a rail affixed to at least one of the clamp members and locating the one or more masks and the one or more items in the sandwiched position by engaging each mask with one of said threaded supports.
In an embodiment, the method comprises sliding a threaded support portion along the rail, optionally via an arcuate guide portion thereof, from an engaged position, in which the support portion is positioned to locate an associated mask in the sandwiched position, to a released position, in which the support portion is positioned to allow removal of its associated mask; and separating mask, item and support portion in the released position.
Surface modification conditions may, for example, be vapour deposition conditions. The surface modification conditions may comprise sub-atmospheric pressure. In an embodiment, the vapour deposition conditions are plasma polymerisation conditions. Surface modification conditions may optionally comprise: an excitation mediu and a monomer that is at least partly activated by the excitation medium to form a liquid repellent coating on the item . The excitation medium may in particular comprise a plasma, optionally a pulsed plasma.
The monomer may be a compound of formula (I) :
Figure imgf000016_0001
where R1, R2 and R3 are independently selected from hydrogen, alkyl, haloalkyl or aryl optionally substituted by halo; and R4 is a group X-R5 where R5 is an alkyl or haloalkyl group and X is a bond; X is a group of formula -C(0)0(CH2)nY, where n is an integer of from 1 to 10 and Y is a bond or a sulphonamide group; or X is a group
-(0)pR6(0)q(CH2)t, where R6 is aryl optionally substituted by halo, p is 0 or 1, q is 0 or 1 and t is 0 or an integer of from 1 to 10, provided that where q is 1, t is other than 0.
Suitably, the partially masked one or more items may be exposed to a plasma comprising a monomer compound for a period of time sufficient to allow a protective polymeric coating to form on a surface of the electronic or electrical device or component thereof; wherein the monomer compound has the following formula (II) :
Figure imgf000016_0002
where Ri, R2 and R4 are each independently selected from hydrogen, optionally substituted branched or straight chain Ci-C6 alkyl or halo alkyl or aryl optionally substituted by halo, and R3 is selected from :
Figure imgf000017_0001
where each X is independently selected from hydrogen, optionally substituted branched or straight chain d-C6 alkyl, halo alkyl or aryl optionally substituted by halo; and ni is an integer from 1 to 27.
In some embodiments, the monomer may be as identified in the claims of WO 2007/083122.
Suitably, the monomer may be selected from lH,l H,2H,2H-perfluorohexyl acrylate (PFAC4), lH,lH,2H,2H-perfluorooctyl acrylate (PFAC6), 1H,1H,2H,2H- perfluorodecyl acrylate (PFAC8) and lH,lH,2H,2H-perfluorododecyl acrylate (PFAC10).
Suitably, the masked item may be exposed to the monomer compound in combination with a crosslinking agent comprising two or more unsaturated bonds attached by means of one or more linker moieties and has a boiling point at standard pressure of less than 500 °C. The crosslinking reagent may be selected, for example from 1,4-butanediol divinyl ether (BDVE), 1,4- cyclohexanedimethanol divinyl ether (CDDE), 1,7-octadiene (170D), 1,2,4 - trivinylcyclohexane (TVCH), divinyl adipate (DVA), 1,3- divinyltetramethyldisiloxane (DVTMDS), diallyl 1,4-cyclohexanedicarboxylate (DCHD), 1,6-divinylperfluorohexane (DVPFH), lH,lH,6H,6H-perfluorohexanediol diacrylate (PFHDA) and glyoxal bis(diallyl acetal) (GBDA).
The coating may advantageously be liquid repelling, e.g. water and/or oil repelling.
The one or more items may be of any desired type. In an embodiment, the one or more items comprise one or more electronic devices or electronic
components. Suitably, the one or more items may comprise one or more touchscreen devices, in particular smart phones. Optionally, at least the touchscreen of such devices may be masked. The one or more items may in particular comprise a layered screen, for example an LCD screen, e.g. a TFT screen.
Throughout the description and claims of this specification, the words "comprise" and "contain" and variations of the words, for example "comprising" and
"comprises", mean "including but not limited to", and do not exclude other components, integers or steps. Moreover the singular encompasses the plural unless the context otherwise requires: in particular, where the indefinite article is used, the specification is to be understood as contemplating plurality as well as singularity, unless the context requires otherwise.
Preferred features of each aspect of the invention may be as described in connection with any of the other aspects. Within the scope of this application it is expressly intended that the various aspects, embodiments, examples and alternatives set out in the preceding paragraphs, in the claims and/or in the following description and drawings, and in particular the individual features thereof, may be taken independently or in any combination. That is, all embodiments and/or features of any embodiment can be combined in any way and/or combination, unless such features are incompatible.
BRIEF DESCRIPTION OF THE DRAWINGS
One or more embodiments of the invention will now be described, by way of example only, with reference to the accompanying drawings, in which :
Figure 1A is a perspective view of a masking device in accordance with an embodiment of the invention in a closed configuration;
Figure IB is a perspective view of the device of Figure 1A in an open configuration
Figure 2A is a perspective view of a clamping frame of the device of Figure 1A;
Figure 2B is an illustration of a clamping pin of the frame of Figure 2A; Figure 3A is a perspective view of a right clamp member portion of a clamp member of the frame of Figure 2A; Figure 3B is a perspective view of a left clamp member portion of a clamp member of the frame of Figure 2A;
Figure 4A is a perspective view of the frame of Figure 2A in an open position;
Figure 4B is a distal end view of the frame of Figure 2A in an open position; Figure 5 is a perspective view of the frame of Figure 2A with first and second rails thereof detached;
Figure 6 shows supports of the device of Figure 1A;
Figure 7A is a plan view of an outer side of a mask of the device of Figure 1A;
Figure 7B is a perspective view of an inner side of a mask of the device of Figure 1A;
Figures 8A to 8C are perspective views of a set of alternative masking inserts for a masking device in accordance with a further embodiment of the invention;
Figures 9A and 9B are perspective views of a further alternative masking insert for a masking device in accordance with yet a further embodiment of the invention;
Figures 10A to 10D are perspective views of a set of clamping inserts for a masking device in accordance with another embodiment of the invention; and
Figures 11A is a perspective view of a set of alternative clamping inserts for a masking device in accordance with yet another embodiment of the invention;
Figure 11B is a perspective view of a clamp element of the clamping inserts of Figure 11A; and
Figure 12 is an exploded perspective view of an alternative clamping frame for a masking device in accordance with yet another embodiment of the invention.
DETAILED DESCRIPTION
Referring to Figures 1A and IB, in one embodiment of the invention, a masking device 2 for partially masking items 4 comprises: a clamping frame 6 having first and second clamp members 8, 10 clamped together by a clamping mechanism 12; and a plurality inserts 13 in the form of supports 14 and masks 16 for clamping with items 4 in a sandwiched position between the clamp members 8, 10 to mask the items 4.
The device 2 has a closed configuration for masking items 4, shown in Figure 1A, and an open configuration, illustrated in Figure IB, for loading supports 14, masks 16 and items 4.
With reference to Figure 2A, the clamping frame 6 is formed predominantly of aluminium and is designed for clamping together masks and items along a longitudinal direction, between the first and second clamp members 8, 10 of the frame.
The first clamp member 8 acts as a generally planar base for the device 2, comprising a clamping portion 18 and a rail stand 20 integral with the clamping portion. The clamping portion 18 comprises four cut-outs 22 to reduce weight and facilitate circulation if the masking device 2 is deployed in a vapour deposition process. The rail stand 20 also comprises a cut-out 22.
Two inverted U-shaped rails 24 of the clamping frame 6 are screwed to the rail stand 20 of the first clamp member 8. The rails 24 each comprise two straight portions 26 extending orthogonally from the first clamp member 8 and an arcuate guide portion 28 joining the two straight portions 26 at their ends. The U-shaped rails 24 assist in locating supports 14, masks 16 and items 4 in the sandwiched position between the clamp members 8, 10.
At the periphery of an inner face of the clamping portion 18 of the first clamp member 8 are riveted six clevises 30 of the clamping mechanism 12. Three of the clevises 30 are located on a left side L and three on a right side R of the first clamp member 8. A clamping pin 32 of the clamping mechanism 12 is pivotably fastened to each of the clevises 30. There are thus six clamping pins 32 in total, three on the left and three on the right, each pivotably fastened to a clevis 30 so as to be able to pivot out laterally. An opposed end of each of the clamping pins 32 is affixed to the second clamp member 10. Each clamping pin 32 comprises lower and upper rigid portions 34, 36 attached to the first and second clamp members 8, 10 respectively and a spring 38 that resiliently biases the rigid portions 34, 36 together. With reference to Figure 2B (in which the spring 38 is not shown for clarity) the upper rigid portion 36 of each clamping pin 32 is hollow and slides onto the lower rigid portion 34. An axial boss 40 of the lower portion 34 engages a cross member 42 within the hollow upper portion 36 to delimit sliding movement of the upper portion 36 onto the lower portion 34.
Referring again to Figure 2A, the second clamp member 10 acts as a pivotable, generally planar counterpart to the first clamp member 8, comprising right and left interlocking clamp portions 44, 46. Each of the clamp portions 44, 46 is screwed to three of the clamping pins 32 at a peripheral side and comprises an opposed inner side having a pair of interlocking formations 48, 50. The clamp portions 44, 46 each comprise five cut-outs 22.
Referring now additionally to Figures 3A and 3B, the right clamp portion 44 comprises two U-shaped female interlocking formations 48 whilst the left clamp portion 46 comprises two T-shaped male interlocking formations 50. When the female interlocking formations 48 of the right clamp portion 44 mate with the male interlocking formations 50 of the left clamp portion 46 the right and left clamp portions 44, 46 are interlocked and form a generally planar counterpart to the first clamp member 8. In this closed configuration of the device 2, shown in Figures 1A, IB and 2, the supports 14, masks 16 and items 4 can be clamped in the sandwiched position between the clamp members 8, 10 by the clamping pins 32.
With reference to Figures 4A and 4B, the device 2 can also be brought into an open configuration to facilitate loading of supports 14, masks 16 and items 4 into the sandwiched position. The interlocking formations 48, 50 of the right and left clamp portions 44, 46 can be disengaged by lifting the left clamp portion 46 relative to the right clamp portion 44, away from the first clamp member 8. With the interlocking formations 48, 50 disengaged, the right and left clamp portions 44, 46 can part by pivoting laterally together with their associated clamping pins 32 about the clevises 30. This brings the device 2 into the open configuration. Referring to Figure 5, the U-shaped rails 24 may be unscrewed from the rail stand 20. This allows catch formations to be threaded onto the rails 24. In particular, with reference to Figure 6, the supports 14 each comprise first and second apertures 52 for threading onto the rails 24.
The supports 14 are formed of polypropylene and comprise three types.
A lowermost support type 14L comprises a panel having, in addition to the first and second apertures 52, five screw holes 54 for being screwed to the clamping portion 18 of the first clamp member 8. Furthermore, the lowermost support comprises a plurality of indentations 56 for receiving projections of a mask 16 placed above the support in use and a peripheral lip 58 extending upwards.
A middle support type 14M comprises a panel having, in addition to the first and second apertures 52, a central cut-out 60, a plurality of indentations 56 for receiving projections of two masks 16 (one above and one below the support 14M) in use, and peripheral lips 58 on upper and lower opposed faces. One or more middle supports may threaded onto the rails 24 to locate a plurality of masks 16 and mask a desired number of items.
An uppermost support type 14U comprises a panel having, in addition to the first and second apertures 52, a plurality of indentations 56 for receiving projections of a mask 16, and peripheral lips 58 on opposed faces and a peripheral lip 58 extending towards the first clamp member 10 when the support 14U rests against the second clamp member 8.
Referring now to Figures 7A and 7B, the masks 16 are formed of a
fluoroelastomer, specifically FKM . Due to their flexibility and resilience the masks 16 are able to form a substantially vapour tight seal when pressed against an item in the sandwiched position, even under vapour deposition conditions, e.g. those encountered in plasma polymerisation.
A support-facing side 60 of each mask 16 comprises a plurality of projections 62 for engaging the indentations 56 of the supports 14. An opposed, item-facing side 64 of the mask corresponds in profile to an item 4 to be masked to provide for a snug fit.
Each mask comprises a peripheral region 66 of relatively greater thickness and a central region of relatively lesser thickness 68. This reduces material costs and also the potential for outgassing. Effective masking is still provided because the peripheral region forms a sealing periphery around the central region.
The supports 14 and masks 16 together constitute inserts 13 of the device 2 that are located by the rails 24 and abut the items 4 during a surface
modification process. The supports 14 constitute support portions of the inserts and the masks 16 abutment portions. The inserts 13 assist with securing and masking the items 4 in a sandwiched position when the first and second clamp members 8, 10 are engaged.
To ready items 4 for masking, supports 14 and masks 16 are interleaved with items in a stack atop the first clamping member 8.
Starting from the open configuration of Figure 4A, the rails 24 are first unscrewed from the rail stand 20 of the first clamp member 8 as described with reference to Figure 5. Then, and referring now to Figure 7, the lowermost support 14L is screwed to the first clamp member 8, and a desired number of middle supports 14M, and the uppermost support 14U, are threaded onto the rails 24 before the rails are re-attached to the rail stand 20.
The supports 14 are now laterally located with respect to the clamp members 8, 10 by the rails 24. Save for the lowermost support 14L, the supports 14 can slide along the rails 24 to permit masks 16 and items 4 to be interleaved between them . In particular, slidable supports 14M, 14L may be slid away from the first clamp member 8 via the arcuate guide portions 28 of the rails to be stacked adjacent to the first clamp member 8 in a released position.
With all the slidable supports 14M, 14L in the released position, a first mask 16 can be located with respect to the lowermost support 14L by engaging the projections 62 of the first mask with the indentations 56 of the lowermost support (which engagement is not visible in Figure 7). The peripheral lip 58 of the lowermost support also assists in location.
A first item 4 may then be placed on the first mask 16. This is the state in which the device 2 is shown in Figure 7.
To continue with loading the device 2, a second mask 16 may now be placed onto the item 4. The support-facing side 64 of the second mask 16 faces upwards and engages a first middle support 14M, which is slid along the rails 24 to be placed atop the second mask 16.
A third mask 14 is then engaged with the upper face of the first middle support, and a second item 4 placed atop the third mask 14, followed by another mask and a third support 14 and so on, until the uppermost support 14U is placed, such that all the supports 14, masks 16 and items 4 are interleaved and stacked on top of the first clamp member 8.
To clamp the stacked and interleaved supports 14, masks 16 and items 4 together, the second clamp member 10 is then pivoted to bring the device 2 into the closed configuration of Figure 1. To do so, it may be necessary to compress the stacked and interleaved supports 14, masks 16 and items 4 down onto the first clamp member 8 when interlocking the first and second clamping portions 44, 46. The springs 38 of the clamping pins 32 provide resilience to facilitate bringing the device 2 into the closed position, without however compromising the desired clamping force.
Once the second clamp member 10 is brought into the closed configuration of Figure 1 the masks 14 and items 4 are pressed together such that the masks 4 form a vapour tight seal against the items, thereby masking those parts of the items 4 covered by the masks.
The loaded masking device 2 may be exposed to surface modification conditions, e.g. vapour deposition conditions by placing it in a plasma polymerisation deposition chamber. By way of example, a vapour deposition process in accordance with an embodiment of the invention comprises exposing the loaded device 2 to vapour deposition conditions substantially as described in WO 2007/083122, which is incorporated herein by reference.
In another embodiment the vapour deposition conditions further comprise a cross-linker selected from 1,4-butanediol divinyl ether (BDVE), 1,4- cyclohexanedimethanol divinyl ether (CDDE), 1,7-octadiene (170D), 1,2,4 - trivinylcyclohexane (TVCH), divinyl adipate (DVA), 1,3- divinyltetramethyldisiloxane (DVTMDS), diallyl 1,4-cyclohexanedicarboxylate (DCHD), 1,6-divinylperfluorohexane (DVPFH), lH,lH,6H,6H-perfluorohexanediol diacrylate (PFHDA) and glyoxal bis(diallyl acetal) (GBDA).
It has been found that in vapour deposition conditions only those parts of the items 4 which are not masked are coated with a vapour deposition coating.
On completion of the vapour deposition process, the second clamp member 10 can be returned to the open configuration. The supports 14 can then, once again and one by one be brought into the released position such that partially coated items 4 and, if desired, masks 16 can be removed. Thereafter, the device 2 may advantageously be re-used for further depositions, either with the same masks 16 or with different masks (e.g. adapted to different items).
It will be appreciated by those skilled in the art that a number of modifications can be readily made to the described embodiments without departing from the scope of the appended claims.
For example, with reference to Figures 8A to 8C, in a further embodiment of the invention, a masking device comprises the same features as the masking device of Figures 1 to 7 (in respect of which reference is simply made to the foregoing), save that more compact masking inserts 113 are provided instead of the inserts 13 constituted by the separable supports 14 and masks 16.
The compact masking inserts 113 comprise a support portion 114 and an abutment portion 116, which are integrally formed from an aluminium core 115. The support portion 114 comprises first and second apertures 152 for threading onto the rails 24 of the device. The apertures 152 comprise polymeric internal sleeves 153 to facilitate sliding over the rails 24. The abutment portion
comprises an overcoat of FKM, which provides an elastomeric mask surface 117. The abutment portion 116 is shaped to conform to an item and, as a result, the insert is able to mask an item 4 when pressed against it in the sandwiched position (in the general manner described in respect of Figures 1 to 7).
The compact inserts 113 comprise three types. A lowermost insert type 113L is adapted on one side to be affixed to the clamping portion 18 of the first clamp member 8. On an opposed side, the abutment portion 116 of the lowermost insert 113L comprises an elastomeric mask surface 117 adapted to fit a lower side of an item. A middle insert type 114M comprises mask surfaces 117 that are differently formed on opposed sides of the abutment portion 116 to conform to upper and lower surfaces of items to be masked. Referring now specifically to Figure 8C, an uppermost insert type 114U comprises a mask surface 117 adapted to fit and mask an upper side of an item, and a reverse suitable to engage the clamping portion of the second clamp member 10.
Loading and clamping of the masking device with the compacted inserts 113 proceeds substantially as described in respect of Figures 1 to 7, except that the inserts 113 are unitary. It has been found that the more compact inserts 113 offer space savings, enabling a higher loading of the device with items. In particular the stacking thickness of the inserts 113 is greatly reduced, since they are formed from aluminium panels with an elastomeric overcoat.
Referring now to Figures 9A and 9B, the design of Figures 8A to 8C can be further modified by shortening the aluminium core 115 so that the core does not extend into the abutment portion. A shortened aluminium core 215 may thus constitute only a support portion 214 of a more light-weight, flexible insert 213. Such an advantageously light-weight and less material intensive insert 213M can be used as an alternative middle insert type in any of the embodiments previously described. The invention also envisages devices that are not primarily concerned with masking. Referring now to Figures 10A to 10D, in another embodiment of the invention, a device comprises the same features as the device of Figures 1 to 7 (in respect of which reference is simply made to the foregoing), save that clamping inserts 313 are provided instead of the masking inserts 13 constituted by the separable supports 14 and masks 16.
The clamping inserts 313 comprise a support portion 314 and an abutment portion 316, which portions are integrally formed from an aluminium core 315. The support portion 314 comprises first and second sleeved apertures 352 for threading onto the rails 24 of the device. The abutment portion 316 comprises an elastomeric FKM over-layer 317 for abutting one or more items when pressed against the one or more items in the sandwiched position (in the general manner described in respect of Figures 1 to 7).
The clamping inserts 313 comprise lowermost, middle and uppermost types, 313L, 313M, 313U, with the lowermost and uppermost types, 313L, 313 U adapted to engage the clamp members 8, 10 of the device. Cut-outs are provided in each of the clamping inserts 313, with the middle type clamping insert 313M comprising a large central cut-out 360 to save material . It has been found that LCD screens, for example on a mobile phone or other electronic device, can be effectively clamped to mitigate delamination and damage by the insert 313 comprising an abutment portion 316 that engages a periphery of the screen only.
Though they will inevitably provide for a degree of masking, unlike the mask inserts of other embodiments, the clamping inserts 313 are not primarily concerned with masking but with mitigating delamination or damage in items such as LCD screens of electronic devices. To this end, the clamping inserts 313 comprise a plurality of channels 319 to improve degassing.
The masking effect of the clamping inserts 313 may be augmented by a separate masking means, such as an adherent film (not shown), if desired. Referring finally to Figures 11A and 11B, in yet another embodiment of the invention, to save material costs, an alternative set of clamping inserts 413 has been further modified to comprise removable, modular clamping elements 417E formed of FKM . Each clamping insert 413 comprises a support portion 414 and abutment portion 416 integrally formed from an aluminium core 415. The abutment portion 414 comprises slots 421 into which the clamping elements 417E can be inserted with a snap fit. This provides a spaced array of modular clamping elements 417E together defining an abutment surface.
The distinct clamping elements 417E require less material than the FKM over- layer 317 of the embodiment of Figures 10A to 10B, yet offer substantially the same performance. Additionally, the clamping elements 417E may be
individually replaced where they are damaged or worn out. Each clamping element comprises a snap-fit formation 425 and an opposed abutment side 427. The abutment side 429 comprises a projection 429 to assist location of items on the array of clamping elements of the insert.
Of course it is also possible to combine a low-material approach with a masking application. Thus, the clamping inserts described herein may be readily modified for use as masking inserts.
The clamping frame 6 may of course also be modified. For example, with reference to Figure 12, the inverted U-shaped rails of the clamping frame 6 may be replaced by rods 524 joined or capped by an end member 525. The end member may, for example, be fastened to the rods with screws. This may be a more cost-effective solution of providing locating means.

Claims

1. A device for securing one or more items during a surface modification process, the device comprising : first and second clamp members; one or more inserts for abutting one or more items during the surface modification process when pressed against the one or more items; locating means for locating the one or more inserts in a sandwiched position between the first and second clamp members; and a clamping mechanism for clamping together the first and second clamp members to press the one or more inserts against one or more items in the sandwiched position.
2. The device of claim 1, wherein the first and second clamp members are arranged to be clamped together along a longitudinal direction of the device and the locating means are arranged to locate the one or more inserts by counteracting lateral movement.
3. The device of claim 1 or claim 2, wherein the locating means comprise a rail that is affixed in position relative to at least the first clamp member.
4. The device of any preceding claim, wherein the locating means comprise a plurality of rails, the rails optionally extending substantially in parallel and being affixed in position relative to at least the first clamp member.
5. The device of claim 3 or claim 4, wherein the or each rail comprises a straight portion for locating the one or more inserts in the sandwiched position, and optionally an arcuate guide portion.
6. The device of any one of claims 3 to 5 wherein the or each rail has an open position in which an insert can be threaded onto the or each rail, and a closed position in which an insert threaded onto the or each rail cannot slide off.
7. The device of any preceding claim, comprising a plurality of inserts.
8. The device of claim 7 wherein a plurality of inserts are arranged to abut the same item in use.
9. The device of claim 7 or claim 8 wherein a plurality of inserts are arranged to abut a plurality of items in use.
10. The device of any one of claims 7 to 9 comprising one or more pairs of inserts for abutting opposed faces of an item .
11. The device of any one of claims 7 to 10 comprising a plurality of inserts that are substantially identical in structure.
12. The device of any one of claims 7 to 11 wherein a plurality of inserts are stacked atop one another in the device in the sandwiched position.
13. The device of claim 12, wherein a plurality of inserts is interleaved with items in the sandwiched position to form a stack of inserts and items.
14. The device of any preceding claim, wherein the one or more inserts
comprise a locating formation co-operable with the locating means.
15. The device of claim 14, wherein the inserts comprise one or more holes or indentations for engaging one or more rails of the locating means.
16. The device of any preceding claim, wherein the one or more inserts are slidable on the locating means, between an engaged position in which the inserts are in the sandwiched position and a released position in which the inserts are positioned to allow access to the items.
17. The device of claim 16, wherein the one or more inserts are slidable on one or more rails of the locating means, the or each rail comprising a straight portion for locating the one or more inserts in the sandwiched position, and an arcuate guide portion, the one or more inserts being threaded onto the straight portion of the or each rail in the engaged position, and the arcuate guide portion of the or each rail being arranged to guide sliding movement of the one or more threaded inserts into the released position.
18. The device of any preceding claim, wherein the one or more inserts
comprise a clamp element for clamping down on one or more regions of an item in the sandwiched position to mitigate delamination or damage in the one or more regions during a surface modification process.
19. The device of claim 18, wherein the clamp element is arranged to clamp down on a screen region of an electronic device in the sandwiched position to mitigate delamination or damage of the screen during a surface modification process.
20. The device of any preceding claim, wherein the one or more inserts
comprise one or more masks for masking an item from a surface modification process in the sandwiched position.
21. The device of claim 20 wherein the one or more masks are arranged to mask a screen region of an electronic device in the sandwiched position, to avoid surface modification of the screen during a surface modification process.
22. The device of claims 21 wherein the one or more masks comprise a
formation for engaging the locating means, or a support portion of the insert, to locate the one or more masks in a sandwiched position between the first and second clamp members.
23. The device of any one of claims 20 to 22 wherein the one or more masks comprise a material having total mass loss (TML) as measured by
European Space Agency standard ECSS-Q-ST-70-02C of at most 20%.
24. The device of any one of claims 20 to 23 wherein the one or more masks comprise an elastomer.
25. The device of claim 24 wherein the elastomer is a fluoroelastomer,
optionally FKM.
26. The device of any preceding claim, wherein the one or more inserts
comprise an abutment portion for abutting one or more items in the sandwiched position.
27. The device of claim 26 wherein the abutment portion comprises an
elastomeric abutment surface.
28. The device of claim 26 or claim 27, wherein the abutment portion
comprises a clamp element as defined in claim 18 or claim 19 or a mask as defined in any of claims 20 to 25.
29. The device of any one of claims 26 to 28 wherein the abutment portion comprises a plurality of distinct abutment elements.
30. The device of claim 29 wherein the abutment elements are individually removable or replaceable.
31. The device of claim 29 or claim 30, wherein the abutment elements
comprise a fluoroelastomer, optionally FKM .
32. The device of any preceding claim, wherein the one or more inserts
comprise a support portion defining a locating formation co-operable with the locating means.
33. The device of claim 32 wherein the support portion comprises one or more holes or indentations for engaging with one or more rails of the locating means.
34. The device of claim 32 or claim 33 wherein the support portion is rigid and comprises a material selected from polymers, metallic materials, and combinations thereof.
35. The device of any preceding claim, wherein the one or more inserts
comprise unitary support and abutment portions, the portions optionally being as defined in any one of claims 32 to 34 and any one of claims 26 to 31 respectively.
36. The device of any preceding claim, wherein the one or more inserts
comprise a rigid support portion comprising one or more holes or indentations for engaging with one or more rails of the locating means, and an abutment portion for abutting one or more items.
37. The device of claim 36 wherein the abutment portion comprises a rigid core comprising an overcoat of an elastomeric material providing an abutment surface.
38. The device of claim 36, wherein the abutment portion is flexible and
consists of a flexible mask that is free from rigid material and extends from the support portion.
39. The device of any preceding claim wherein the one or more inserts
comprise separable support and abutment portions.
40. The device of claim 39, wherein the one or more inserts comprise a
support portion having a first formation for locating an associated mask or other abutment portion of the insert with respect to the support portion, and a second formation for locating the support portion with respect to the clamp members.
41. The device of claim 40, wherein each of the masks or other abutment portions associated with a support portion comprises a projection or indentation for engaging the first formation of its associated support portion.
42. The device of any preceding claim, wherein the first clamp member
comprises a base for resting on a work surface.
43. The device of any preceding claim, wherein the clamping mechanism is pivotably attached to the first clamp member.
44. The device of any preceding claim, wherein the second clamp member is releasably attached to the clamping mechanism .
45. The device of any preceding claim, wherein the second clamp member comprises a plurality of interlocking portions.
46. The device of claim 45 wherein the second clamp member comprises first and second interlocking portions each having a complementary
interlocking formation.
47. The device of claim 46 wherein the interlocking portions are releasable from an interlocked configuration by forcing one only of the first and second portions in a direction away from the first clamp member but remain interlocked if both portions are forced in a direction away from the first clamp member.
48. The device of any one of claims 45 to 47, wherein the clamp mechanism is arranged to pivot about the first clamp member to move the interlocking portions between an access position in which the portions are separated and a closed position in which the portions are interlocked.
49. The device of any preceding claim wherein the clamping mechanism
comprises biasing means to provide for resilient clamping of the clamp members.
50. The device of any preceding claim, wherein the clamping mechanism comprises a plurality of clamping pins extending between the first and second clamp members, each clamping pin being pivotably attached to the first clamp member.
51. A clamping frame for clamping one or more inserts to one or more items during a surface modification process, the frame comprising : first and second clamp members; locating means for locating one or more inserts for abutting one or more items during a surface modification process when pressed against one or more items in a sandwiched position between the first and second clamp members; and a clamping mechanism for clamping together the first and second clamp members to press one or more inserts located by the locating means in the sandwiched position against one or more items in use.
52. The clamping frame of claim 51 wherein the first and second clamp
members, the locating means, the inserts, and/or the clamping
mechanism are as described in any one of claims 1 to 50.
53. A mask or other abutment element for abutting and/or partially masking an item during a surface modification process when pressed against the item, the mask or element comprising : a projection or indentation for engaging a locating means or an insert support portion of a masking device.
54. The mask or element of claim 53 comprising a material having a total mass loss (TML) as measured by European Space Agency standard ECSS- Q-ST-70-02C of at most 20%.
55. The mask or element of claim 53 or claim 54 comprising FKM (by ASTM F1418).
56. The mask or element of any one of claims 53 to 55 being substantially free from adhesive.
57. A method of surface modifying one or more items, the method
comprising : securing the one or more items with a device according to any one of claims 1 to 50 and exposing the one or more secured items to surface modification conditions.
58. A method of surface modifying part of one or more items, optionally
according to claim 57, the method comprising : abutting one or more inserts against the one or more items; placing the one or more inserts and the one or more items into a sandwiched position between first and second clamp members; clamping together the first and second clamp members to press the one or more inserts against the one or more items in the sandwiched position to secure the one or more items; and exposing the secured one or more items to surface modification conditions.
59. The method of claim 58, wherein the method comprises threading one or more inserts onto a rail or other locating means affixed to at least one of the clamp members and abutting the one or more items with the one or more inserts in the sandwiched position before clamping together the first and second clamp members.
60. The method of claim 59 comprising releasing the first and second clamp members and sliding a threaded insert along the rail or other locating means, optionally via an arcuate guide portion thereof, from an engaged position, in which the insert portion is positioned to abut an associated item, to a released position, in which the insert is positioned to allow removal of an associated item .
61. The method of any one of claims 57 to 60 wherein the surface
modification conditions are vapour deposition conditions and/or comprise sub-atmospheric pressure.
62. The method of any one of claims 57 to 62 wherein the surface
modification conditions comprise: an excitation medium; and a monomer that is at least partly activated by the excitation medium to form a liquid repellent coating on the one or more items.
63. The method of claim 62 wherein the excitation medium comprises a
plasma, optionally a pulsed plasma.
64. The method of any one of claims 57 to 63 wherein the one or more items comprise one or more electronic devices or electronic components.
65. The method of claim 64 wherein the one or more items comprise one or more touchscreen devices, in particular smart phones.
66. The method of claim 65 wherein at least the touchscreen of the one or more devices is masked.
67. The method of any one of claims 57 to 66 wherein the one or more items comprise a layered screen which is clamped by the one or more inserts.
PCT/GB2017/053808 2016-12-19 2017-12-19 Improvements relating to surface modification WO2018115846A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201790001526.9U CN211150516U (en) 2016-12-19 2017-12-19 Device and clamping frame for fastening one or more objects in a surface modification process

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB1621641.8 2016-12-19
GBGB1621641.8A GB201621641D0 (en) 2016-12-19 2016-12-19 Improvements relating to masking
CN2017097504 2017-08-15
CNPCT/CN2017/097504 2017-08-15

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Publication number Priority date Publication date Assignee Title
CN109064887B (en) * 2018-08-31 2021-03-05 Oppo(重庆)智能科技有限公司 Activation jig for screen of electronic device
CN109623703B (en) * 2019-01-29 2020-09-01 Oppo(重庆)智能科技有限公司 Flexible screen assembling tool and assembling method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014110175A2 (en) * 2013-01-08 2014-07-17 Hzo, Inc. Apparatuses and systems for selectively applying a protective coating to electronic components and methods related thereto
US20140245954A1 (en) * 2013-03-04 2014-09-04 Ebara Corporation Plating apparatus
US20150059987A1 (en) * 2013-08-30 2015-03-05 Semiconductor Energy Laboratory Co., Ltd. Processing apparatus and processing method of stack
WO2015127191A1 (en) * 2014-02-20 2015-08-27 Intevac, Inc. System and method for bi-facial processing of substrates

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6806943B2 (en) * 2002-08-09 2004-10-19 International Business Machines Corporation Mask clamping device
JP5877328B2 (en) * 2012-10-25 2016-03-08 パナソニックIpマネジメント株式会社 SCREEN PRINTING APPARATUS AND METHOD FOR SETTING BOARD CLAMP POSITION IN SCREEN PRINTING APPARATUS
CN103811770B (en) * 2014-01-20 2016-08-17 南京大学昆山创新研究院 Fuel cell membrane electrode prepares fixture and processing technique thereof
KR101638344B1 (en) * 2015-12-04 2016-07-11 주식회사 유아이디 negative panel fixing device and method for sputtering

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014110175A2 (en) * 2013-01-08 2014-07-17 Hzo, Inc. Apparatuses and systems for selectively applying a protective coating to electronic components and methods related thereto
US20140245954A1 (en) * 2013-03-04 2014-09-04 Ebara Corporation Plating apparatus
US20150059987A1 (en) * 2013-08-30 2015-03-05 Semiconductor Energy Laboratory Co., Ltd. Processing apparatus and processing method of stack
WO2015127191A1 (en) * 2014-02-20 2015-08-27 Intevac, Inc. System and method for bi-facial processing of substrates

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CN211805637U (en) 2020-10-30
TW201836720A (en) 2018-10-16
WO2018113671A9 (en) 2019-01-10
CN211150516U (en) 2020-07-31

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