KR101640742B1 - A flexible vacuum chuck - Google Patents

A flexible vacuum chuck Download PDF

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Publication number
KR101640742B1
KR101640742B1 KR1020140138146A KR20140138146A KR101640742B1 KR 101640742 B1 KR101640742 B1 KR 101640742B1 KR 1020140138146 A KR1020140138146 A KR 1020140138146A KR 20140138146 A KR20140138146 A KR 20140138146A KR 101640742 B1 KR101640742 B1 KR 101640742B1
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South Korea
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thin plate
adsorption
vacuum
flexible material
free
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KR1020140138146A
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Korean (ko)
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KR20160043687A (en
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안성룡
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안성룡
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B23Q3/08—Work-clamping means other than mechanically-actuated
    • B23Q3/088—Work-clamping means other than mechanically-actuated using vacuum means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B25J15/0625—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum provided with a valve
    • B25J15/0633—Air-flow-actuated valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/30—End effector
    • Y10S901/40—Vacuum or mangetic

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)

Abstract

본 발명은 플렉서블한 소재를 진공 흡착력으로 흡착한 상태에서 상기 플렉서블 소재와 함께 다양한 형상으로 자유변형 가능한 자유변형 흡착척에 관한 것으로서, 본 발명에 따른 자유변형 흡착척은, 다수개의 흡착용 홀(111)이 형성되어 플렉서블 소재(2)를 흡착하는 흡착 박판(110); 상기 흡착 박판(110)의 하면에 부착되어 설치되며, 상기 다수개의 흡착용 홀(111) 배열을 따라 진공 유로(121)가 형성되는 중간 박판(120); 상기 중간 박판(120) 하면에 부착되어 설치되며, 상기 진공 유로(121)의 일측과 연통되어 상기 흡착용 홀(111) 및 진공 유로(122)를 통하여 기체를 흡입하는 진공 포트(131)가 형성되는 하부 박판(130);을 포함한다. The present invention relates to a free-deformation adsorption chuck capable of freely deforming in various shapes together with the flexible material in a state where a flexible material is adsorbed by a vacuum adsorption force. The free-deformation adsorption chuck according to the present invention comprises a plurality of adsorption holes 111 (110) which absorbs the flexible material (2); An intermediate thin plate 120 attached to the lower surface of the adsorption thin plate 110 and having a vacuum flow path 121 formed along the plurality of adsorption holes 111; A vacuum port 131 is formed which is attached to a lower surface of the intermediate thin plate 120 and communicates with one side of the vacuum channel 121 to suck the gas through the adsorption hole 111 and the vacuum channel 122 And a lower plate (130).

Description

자유변형 흡착척{A FLEXIBLE VACUUM CHUCK}{A FLEXIBLE VACUUM CHUCK}

본 발명은 자유변형 흡착척에 관한 것으로서, 보다 상세하게는 플렉서블한 소재를 진공 흡착력으로 흡착한 상태에서 상기 플렉서블 소재와 함께 다양한 형상으로 자유변형 가능한 자유변형 흡착척에 관한 것이다. BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a free-deformation adsorption chuck, and more particularly, to a free-deformation adsorption chuck capable of freely deforming in various shapes together with the flexible material in a state in which a flexible material is adsorbed by a vacuum adsorption force.

필름과 같은 풍부한 신축성을 가져서 다양하게 변형될 수 있는 플렉서블(flexible)한 소재는 그 자체로 사용되는 경우보다 특정한 소재에 부착되어 일체로서 사용되는 경우가 많다. 따라서 플렉서블한 소재를 특정한 형상의 소재에 부착할 수 있는 기술의 개발이 많이 이루어지고 있다. A flexible material that has various elastic properties such as a film and can be variously deformed is attached to a specific material and used as an integral body in many cases. Therefore, many techniques for attaching a flexible material to a specific shape material have been developed.

특히, 최근에는 휴대폰을 비롯한 디스플레이 장치와 터치스크린 패널을 사용하는 디바이스를 중심으로, 도 1에 도시된 바와 같이, 곡면형 윈도우 글래스(1)에 플렉서블한 소재(2)를 합착한 구조를 사용하기 시작했다. 이러한 경우에는 플렉서블한 소재(2)의 변형이 심해서 모든 면에 대하여 균일한 압력을 가하기 어려운 문제가 있으며, 또한 플렉서블한 소재에 대하여 곡면형 윈도우 글래스의 곡면 형상에 맞게 가압해야 하는 더욱 어려운 문제점이 발생한다. In particular, in recent years, as shown in Fig. 1, using a display device including a mobile phone and a device using a touch screen panel, a structure in which a flexible material 2 is cemented to a curved window glass 1 is used it started. In this case, since the flexible material 2 is severely deformed, it is difficult to apply a uniform pressure to all the surfaces, and furthermore, there arises a further difficult problem in pressing the flexible material against the curved surface shape of the curved window glass do.

이때 플렉서블 소재(2)를 곡면형 윈도우 글래스의 형상에 부합하게 변형시키면서 흡착 상태를 유지할 수 있는 흡착척이 절실하게 요구되고 있다. At this time, an adsorption chuck capable of maintaining the adsorption state while deforming the flexible material 2 in accordance with the shape of the curved window glass is desperately required.

본 발명이 해결하고자 하는 기술적 과제는 플렉서블한 소재를 진공 흡착력으로 흡착한 상태에서 상기 플렉서블 소재와 함께 다양한 형상으로 자유변형 가능한 자유변형 흡착척을 제공하는 것이다. SUMMARY OF THE INVENTION It is an object of the present invention to provide a free-form deformation absorbing chuck capable of freely deforming in various shapes together with the flexible material while absorbing a flexible material with a vacuum suction force.

전술한 기술적 과제를 해결하기 위한 본 발명에 따른 자유변형 흡착척은, 다수개의 흡착용 홀(111)이 형성되어 플렉서블 소재(2)를 흡착하는 흡착 박판(110); 상기 흡착 박판(110)의 하면에 부착되어 설치되며, 상기 다수개의 흡착용 홀(111) 배열을 따라 진공 유로(121)가 형성되는 중간 박판(120); 상기 중간 박판(120) 하면에 부착되어 설치되며, 상기 진공 유로(121)의 일측과 연통되어 상기 흡착용 홀(111) 및 진공 유로(122)를 통하여 기체를 흡입하는 진공 포트(131)가 형성되는 하부 박판(130);을 포함한다. According to an aspect of the present invention, there is provided a free-form deformation absorption chuck comprising: a suction thin plate (110) having a plurality of suction holes (111) formed therein for adsorbing a flexible material (2); An intermediate thin plate 120 attached to the lower surface of the adsorption thin plate 110 and having a vacuum flow path 121 formed along the plurality of adsorption holes 111; A vacuum port 131 is formed which is attached to a lower surface of the intermediate thin plate 120 and communicates with one side of the vacuum channel 121 to suck the gas through the adsorption hole 111 and the vacuum channel 122 And a lower plate (130).

그리고 본 발명에서 상기 흡착 박판, 중간 박판 및 하부 박판은 일측 모서리들을 고정하는 고정부(140)가 더 구비되는 것이 바람직하다. In the present invention, it is preferable that the adsorbing thin plate, the intermediate thin plate, and the lower thin plate have a fixing part 140 for fixing one side edge.

또한 본 발명의 자유변형 흡착척에는, 상기 흡착 박판 상면에는 탄성막(112)이 코팅되고, 상기 중간 박판과 하부 박판 상면에는 윤활재가 코팅되는 것이 바람직하다. In the free-form adsorption chuck of the present invention, the elastic membrane 112 is coated on the upper surface of the adsorption thin plate, and the lubricant is coated on the upper surface of the intermediate thin plate.

또한 본 발명의 자유변형 흡착척에는, 상기 고정부(130)의 반대편에 설치되며, 상기 흡착 박판, 중간 박판 및 하부 박판의 타측 말단을 미끄러짐 가능하게 그리핑하는 그리핑 수단(150)이 더 구비되는 것이 바람직하다. The free-deformation adsorption chuck of the present invention further includes gripping means 150 provided on the opposite side of the fixing portion 130 for slidably gripping the other end of the adsorption thin plate, the intermediate thin plate and the lower thin plate .

본 발명의 자유변형 흡착척은, 신축성을 가지는 흡착박판, 중간 박판 및 하부 박판을 구비하여, 플렉서블 소재를 흡착한 상태에서 흡착력을 그대로 유지하면서도 다양한 형상으로 자유롭게 변형될 수 있으므로, 플렉서블 소재의 곡면 합착에 적합한 장점이 있다. The free-deformation adsorption chuck of the present invention comprises an adsorptive thin plate having elasticity, an intermediate thin plate and a lower thin plate, and can be freely deformed in various shapes while maintaining the adsorption force in a state of adsorbing the flexible material. .

도 1은 곡면형상 소재에 플렉서블 소재를 합착한 상태를 도시하는 도면이다.
도 2는 본 발명의 일 실시예에 따른 자유변형 흡착척의 구조를 도시하는 도면이다.
도 3은 본 발명의 일 실시예에 따른 자유변형 흡착척이 휘어진 상태를 도시하는 도면이다.
도 4는 본 발명의 일 실시예에 따른 흡착 박판의 구조를 도시하는 도면이다. 1 is a view showing a state in which a flexible material is attached to a curved material.
2 is a view showing a structure of a free-deformation adsorption chuck according to an embodiment of the present invention.
FIG. 3 is a view illustrating a state where the free-deformation adsorption chuck is bent according to an embodiment of the present invention.
4 is a view showing the structure of the adsorption thin plate according to one embodiment of the present invention.

이하에서는 첨부된 도면을 참조하여 본 발명의 구체적인 실시예를 상세하게 설명한다.
Hereinafter, a specific embodiment of the present invention will be described in detail with reference to the accompanying drawings.

본 실시예에 따른 자유변형 흡착척(100)은, 도 2에 도시된 바와 같이, 흡착 박판(110), 중간 박판(120) 및 하부 박판(130)을 포함하여 구성된다. The free-deformation adsorption chuck 100 according to the present embodiment is configured to include the adsorbing thin plate 110, the intermediate thin plate 120, and the lower thin plate 130 as shown in FIG.

먼저 상기 흡착 박판(110)은 도 2에 도시된 바와 같이, 휘어질 수 있는 소재로 이루어지며, 다수개의 흡착용 홀(111)이 형성되어 플렉서블 소재(2)를 흡착하는 구성요소이다. 상기 흡착용 홀(111)은 다수개가 형성될 수 있으며, 다수개의 흡착용 홀(111)의 형성 위치는 다양하게 변화될 수 있으며, 흡착력이 강하게 필요한 부분에는 조밀하게 형성되고, 흡착력이 약하게 형성되어도 되는 부분에는 넓은 간격으로 이격되어 형성된다. As shown in FIG. 2, the adsorption thin plate 110 is made of a flexible material, and a plurality of adsorption holes 111 are formed to adsorb the flexible material 2. A plurality of the adsorption holes 111 may be formed, and a plurality of adsorption holes 111 may be formed in various positions. The adsorption holes 111 may be formed densely in a portion where adsorption is strongly required, Are spaced at a wide interval.

그리고 상기 흡착 박판(110)에는 도 4에 도시된 바와 같이, 탄성막(112)가 더 형성되는 것이 바람직하다. 상기 탄성막(112)은 상기 플렉서블 소재(2)가 흡착된 상태에서 흡착력을 배가시키는 역할을 하며, 상기 플렉서블 소재(2)의 표면이 손상되는 것을 방지하는 역할도 한다. As shown in FIG. 4, the elastic thin film 110 may further include an elastic membrane 112. The elastic membrane 112 doubles the attraction force in a state where the flexible material 2 is adsorbed and also prevents the surface of the flexible material 2 from being damaged.

다음으로 상기 중간 박판(120)은 도 2에 도시된 바와 같이, 상기 흡착 박판(110)의 하면에 부착되어 설치되며, 상기 다수개의 흡착용 홀(111) 배열을 따라 진공 유로(121)가 형성되는 구성요소이다. 상기 중간 박판(120)도 용이하게 휘어지는 소재로 이루어지며, 상기 흡착용 홀(111)의 형성 위치를 모두 포괄할 수 있는 영역에 진공 유로(121)가 형성된다. 상기 진공 유로(121)는 상기 중간 박판(120)을 두께 방향으로 관통하여 형성되며, 상기 중간 박판(120)의 두께 만큼의 유로를 형성할 수 있는 것이다. 2, the intermediate thin plate 120 is attached to a lower surface of the adsorption thin plate 110, and a vacuum flow path 121 is formed along the plurality of adsorption holes 111 Lt; / RTI > The intermediate thin plate 120 is also made of a material that easily bends, and a vacuum flow path 121 is formed in a region that can cover all the formation positions of the adsorption holes 111. The vacuum passage 121 is formed to penetrate the intermediate thin plate 120 in the thickness direction thereof and can form a flow passage as much as the thickness of the intermediate thin plate 120.

다음으로 상기 하부 박판(130)은 도 2에 도시된 바와 같이, 상기 중간 박판(120) 하면에 부착되어 설치되며, 상기 진공 유로(121)의 일측과 연통되어 상기 흡착용 홀(111) 및 진공 유로(122)를 통하여 기체를 흡입하는 진공 포트(131)가 형성되는 구성요소이다. 본 실시예에서 상기 하부 박판(130)도 용이하게 휘어질 수 있는 소재로 이루어지며, 상기 진공 유로(122)와 연통되는 진공 포트(131)가 형성되는 구조를 가진다. 상기 진공 포트(131)는 다수개로 형성될 수도 있다. 2, the lower thin plate 130 is attached to the lower surface of the intermediate thin plate 120 and is connected to one side of the vacuum channel 121 to form the adsorption holes 111 and the vacuum And a vacuum port 131 for sucking the gas through the flow path 122 are formed. In this embodiment, the lower thin plate 130 is also formed of a material that can easily bend, and has a vacuum port 131 connected to the vacuum path 122. The plurality of vacuum ports 131 may be formed.

한편 상기 중간 박판(120)과 하부 박판(130) 상면에는 윤활재가 코팅되는 것이 바람직하다. 이렇게 윤활재가 코팅되면, 상기 중간 박판(120)과 흡착 박판(110) 사이 그리고 상기 중간 박판(120)과 하부 박판(130) 사이에서 용이하게 미끄럼 현상이 발생할 수 있어서, 상기 자유변형 흡착척(100)의 가요성이 향상된다.
On the other hand, the upper surface of the intermediate thin plate 120 and the lower thin plate 130 are coated with a lubricant. When the lubricant is coated as described above, slipping may easily occur between the intermediate thin plate 120 and the adsorbing thin plate 110 and between the intermediate thin plate 120 and the lower thin plate 130, Is improved.

다음으로 상기 자유변형 흡착척에는, 도 2에 도시된 바와 같이, 상기 흡착 박판, 중간 박판 및 하부 박판은 일측 모서리들을 고정하는 고정부(140)가 더 구비되는 것이 바람직하다. 상기 고정부(140)는 상기 흡착용 홀(111), 진공 유로(121) 및 진공 포트(131)의 위치가 얼라인된 상태에서 흡착 박판(110), 중간 박판(120) 및 하부 박판(130)의 위치가 틀어지지 않도록 고정하는 역할을 하며, 각 박판의 모서리 중 어느 일측 모서리들 또는 측면만을 고정하는 것으로 충분하다. Next, as shown in FIG. 2, the adsorbing thin plate, the intermediate thin plate, and the lower thin plate may be further provided with a fixing unit 140 for fixing one side edge. The fixing part 140 is fixed to the intermediate thin plate 120 and the lower thin plate 130 in a state in which the positions of the adsorption holes 111, the vacuum path 121 and the vacuum port 131 are aligned. ), And it is sufficient to fix only one side edge or side surface of each corner of each thin plate.

한편 본 실시예에 따른 자유변형 흡착척에는, 도 2에 도시된 바와 같이, 상기 고정부(130)의 반대편에 설치되며, 상기 흡착 박판(110), 중간 박판(120) 및 하부 박판(130)의 타측 말단을 미끄러짐 가능하게 그리핑하는 그리핑 수단(150)이 더 구비되는 것이 바람직하다. 상기 그리핑 수단(150)은 상기 흡착 박판(110), 중간 박판(120) 및 하부 박판(130)을 미끄러짐 가능하게 그리핑하므로, 도 3에 도시된 바와 같이, 상기 자유변형 흡착척(100)이 휘어진 상태에서, 상기 흡착 박판(110), 중간 박판(120) 및 하부 박판(130)의 말단이 움직일 수 있는 자유도를 준다. 따라서 상기 자유변형 흡착척(100)은 매우 용이하게 휘어질 수 있는 장점이 있다. 2, the free-deformation adsorption chuck according to the present embodiment is provided on the opposite side of the fixing part 130 and includes the adsorbing thin plate 110, the intermediate thin plate 120 and the lower thin plate 130, And gripping means 150 for slidably gripping the other end thereof. 3, the gripping means 150 grips the adsorbing thin plate 110, the intermediate thin plate 120, and the lower thin plate 130 in a slidable manner so that the free deformation absorbing chuck 100, The intermediate thin plate 120 and the lower thin plate 130 are allowed to move in the bent state. Therefore, the free-form straining chuck 100 can be easily bent.

1 : 곡면형 기판 2 : 플렉서블 소재
100 : 본 발명의 일 실시예에 따른 자유변형 흡착척
110 : 흡착 박판 120 : 중간 박판
130 : 하부 박판 140 : 고정부
150 : 그리핑 수단1: curved substrate 2: flexible material
100: According to one embodiment of the present invention,
110: Adsorption thin plate 120: Medium thin plate
130: lower thin plate 140:
150: gripping means

Claims (4)

다수개의 흡착용 홀(111)이 형성되어 플렉서블 소재(2)를 흡착하는 흡착 박판(110);
상기 흡착 박판(110)의 하면에 부착되어 설치되며, 상기 다수개의 흡착용 홀(111) 배열을 따라 진공 유로(121)가 형성되는 중간 박판(120);
상기 중간 박판(120) 하면에 부착되어 설치되며, 상기 진공 유로(121)의 일측과 연통되어 상기 흡착용 홀(111) 및 진공 유로(122)를 통하여 기체를 흡입하는 진공 포트(131)가 형성되는 하부 박판(130);을 포함하며,
상기 흡착 박판 상면에는 탄성막(112)이 코팅되고,
상기 중간 박판과 하부 박판 상면에는 윤활재가 코팅되는 것을 특징으로 하는 자유변형 흡착척.A thin adsorption plate 110 formed with a plurality of adsorption holes 111 to adsorb the flexible material 2;
An intermediate thin plate 120 attached to the lower surface of the adsorption thin plate 110 and having a vacuum flow path 121 formed along the plurality of adsorption holes 111;
A vacuum port 131 is formed which is attached to a lower surface of the intermediate thin plate 120 and communicates with one side of the vacuum channel 121 to suck the gas through the adsorption hole 111 and the vacuum channel 122 And a lower thin plate (130)
An elastic membrane 112 is coated on the upper surface of the adsorption thin plate,
And a lubricant is coated on the upper surface of the intermediate thin plate and the lower thin plate. 제1항에 있어서,
상기 흡착 박판, 중간 박판 및 하부 박판은 일측 모서리들을 고정하는 고정부(140)가 더 구비되는 것을 특징으로 하는 자유변형 흡착척. The method according to claim 1,
Wherein the adsorbing thin plate, the intermediate thin plate, and the lower thin plate are further provided with fixing portions (140) for fixing one side edge. 삭제delete 제2항에 있어서,
상기 고정부(140)의 반대편에 설치되며, 상기 흡착 박판, 중간 박판 및 하부 박판의 타측 말단을 미끄러짐 가능하게 그리핑하는 그리핑 수단(150)이 더 구비되는 것을 특징으로 하는 자유변형 흡착척.3. The method of claim 2,
Further comprising grilling means (150) provided on the opposite side of the fixing portion (140) for slidably gripping the other end of the adsorption thin plate, the intermediate thin plate and the lower thin plate.
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Publication number Priority date Publication date Assignee Title
KR20240074036A (en) 2022-11-18 2024-05-28 주식회사 지엔테크 Commonization jig with adjustable adsorption area

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* Cited by examiner, † Cited by third party
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KR102152269B1 (en) * 2018-10-16 2020-09-04 (주)에프피에이 A suction jig for roll lamination using psc
CN114291571B (en) * 2022-01-11 2023-09-22 业成科技（成都）有限公司 Adsorption device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004072108A (en) 2002-08-02 2004-03-04 Suss Microtec Lithography Gmbh Equipment securing thin and flexible substrate
JP2010062337A (en) * 2008-09-04 2010-03-18 Shin Etsu Polymer Co Ltd Suction device for substrate and handling method of substrate
KR101059434B1 (en) * 2011-05-26 2011-08-25 한국기계연구원 voccum chuck

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070115248A (en) * 2006-06-01 2007-12-05 삼성전자주식회사 Apparatus for supporting a wafer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004072108A (en) 2002-08-02 2004-03-04 Suss Microtec Lithography Gmbh Equipment securing thin and flexible substrate
JP2010062337A (en) * 2008-09-04 2010-03-18 Shin Etsu Polymer Co Ltd Suction device for substrate and handling method of substrate
KR101059434B1 (en) * 2011-05-26 2011-08-25 한국기계연구원 voccum chuck

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240074036A (en) 2022-11-18 2024-05-28 주식회사 지엔테크 Commonization jig with adjustable adsorption area

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