WO2018077615A1 - Élément capteur destiné à détecter des particules d'un gaz de mesure dans une chambre de mesure - Google Patents

Élément capteur destiné à détecter des particules d'un gaz de mesure dans une chambre de mesure Download PDF

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Publication number
WO2018077615A1
WO2018077615A1 PCT/EP2017/075907 EP2017075907W WO2018077615A1 WO 2018077615 A1 WO2018077615 A1 WO 2018077615A1 EP 2017075907 W EP2017075907 W EP 2017075907W WO 2018077615 A1 WO2018077615 A1 WO 2018077615A1
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WO
WIPO (PCT)
Prior art keywords
electrode
sensor element
carrier
electrode means
doping region
Prior art date
Application number
PCT/EP2017/075907
Other languages
German (de)
English (en)
Inventor
Andreas Schulze
Enno Baars
Andy Tiefenbach
Karola Herweg
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to KR1020197011708A priority Critical patent/KR20190071719A/ko
Priority to CN201780065827.2A priority patent/CN109891211B/zh
Publication of WO2018077615A1 publication Critical patent/WO2018077615A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke

Definitions

  • the measuring gas may be an exhaust gas of an internal combustion engine.
  • the particles may be soot or dust particles.
  • Two or more metallic electrodes may be mounted on an electrically insulating support. Which under the action of a
  • Voltage-accumulating particles in particular the soot particles, form in a collecting phase of the sensor element electrically conductive bridges between the electrodes, which are designed, for example, as comb-like interdigital electrodes, and thus short-circuit them.
  • the electrodes are usually baked by means of an integrated heating element. As a rule, they value
  • Particle sensors the changed due to the particle accumulation electrical properties of an electrode structure. For example, a decreasing resistance or current at constant applied voltage can be measured.
  • Embodiments such as from DE 103 19 664 AI, DE 10 2006 042 362 AI, DE 103 53 860 AI, DE 101 49 333 AI and WO 2003/006976 A2 known.
  • the configured as soot sensors sensor elements are usually for Monitoring of diesel particulate filters used. In the exhaust tract of a
  • the particle sensors of the type described are usually included in a protective tube, which allows, for example, the flow of the particle sensor with the exhaust gas at the same time.
  • any device which is suitable to detect the particles qualitatively and / or quantitatively and which, for example, with the help a suitable drive unit and suitably designed electrodes can generate an electrical measurement signal corresponding to the detected particles, such as a voltage or a current.
  • the detected particles may in particular be soot particles and / or dust particles.
  • DC signals and / or AC signals can be used.
  • a resistive component and / or a capacitive component can be used for signal evaluation from the impedance.
  • the sensor element can be set up in particular for use in a motor vehicle.
  • the measuring gas may be an exhaust gas of the motor vehicle.
  • the measurement gas space can be any, open or closed space in which the measurement gas is received and / or which is flowed through by the measurement gas.
  • the measuring gas space may be an exhaust gas tract of an internal combustion engine, for example an internal combustion engine.
  • the sensor element comprises a carrier, wherein a first electrode device and a second electrode device are applied to the carrier.
  • the first electrode device and the second electrode device each have a plurality of electrode fingers, each electrode finger of the first electrode device being connected to at least one electrode finger of the second electrode device by at least one terminating resistor.
  • electrode devices are understood in principle to be any electrical conductors which are suitable for current measurement and / or voltage measurement, and / or which can act on at least one element in contact with the electrode devices with a voltage and / or current.
  • electrode finger is used in the context of the present
  • Invention understood basically any shaping of the electrode device whose dimension in one dimension, the dimension in at least clearly exceeds a different dimension, for example at least by a factor of 2, preferably by at least a factor of 3, more preferably by at least a factor of 5.
  • a plurality is understood to mean any number of at least two.
  • a terminating resistance is basically understood as meaning any electrical resistance which electrically connects at least one electrode finger of the first electrode device to at least one electrode finger of the second electrode device such that particles deposited in the absence of deposited particles, in particular in the absence of deposited soot or dust particles
  • the measurable current when applying a voltage of 5 to 60 V during an operating temperature of the sensor element in a temperature interval of 50 ° C to 500 ° C assume a current value of 0.1 ⁇ to 10 ⁇ .
  • the at least one terminating resistor may comprise at least a portion of an electrode finger of the first electrode device and at least one
  • a section of an electrode finger is basically understood to mean any segment of an electrode finger.
  • the at least one terminating resistor can also be a section or several sections or all sections of all
  • the at least one terminating resistor may be, for example, discrete
  • Component be applied to the carrier.
  • termination resistance may also be even closer below
  • the at least one terminating resistor can be configured such that in the absence of deposited particles, in particular in the absence of deposited soot or dust particles, preferably in the Operating temperature of the sensor element, an electrode total resistance in a range of 1 ⁇ to 150 ⁇ , preferably in a range of 2 ⁇ to 75 ⁇ and more preferably in a range of 5 ⁇ to 50 ⁇ .
  • total electrode resistance in the context of the present invention is the electrical resistance of the first
  • Electrode device understood by the second electrode means by the at least one terminating resistor and optionally formed by other components circuit. Due to the low resistance of the two electrode devices, the
  • Electrode total resistance usually essentially the
  • Terminator or, in the case of multiple terminators, a sum of terminators.
  • Electrode fingers of the first electrode device with at least one
  • Electrode fingers of the second electrode means by means of a
  • the carrier may comprise as carrier material at least one ceramic material.
  • the support may comprise an oxidic ceramic, preferably aluminum oxide, in particular Al 2 O 3.
  • the carrier may comprise at least one electrically insulating material.
  • the wearer can have a
  • a carrier surface is understood basically to mean any layer which delimits the carrier from its surroundings, and to which the first and the second electrode device are applied.
  • the carrier may comprise at least one doping region, wherein the
  • Doping region touches at least a portion of an electrode finger of the first electrode means and at least a portion of an electrode finger of the second electrode means.
  • the doping region may also touch a portion or a plurality of portions or all portions of all the electrode fingers of the first electrode means and one or more portions or all portions of all the electrode fingers of the second electrode means.
  • the term touching is used in the Under the present invention basically understood that two objects are in direct contact. In particular, the two objects can be in electrical contact.
  • a doping region is understood as meaning in principle any region of the carrier which has impurities introduced into the carrier material, in particular metal atoms, the metallic impurities replacing a part of the metal atoms contained in the carrier material.
  • the doping region may comprise at least one doped carrier material, in particular an aluminum oxide doped with metal oxides. However, other oxides are possible, especially those which are also used as doping material.
  • the carrier can thus in the at least one doping region with a
  • Doping be doped wherein the doping material with the metallic
  • Dotier Scheme a value of 1 mol% to 100 mol%, preferably from 10 mol% to 90 mol% and particularly preferably from 20 mol% to 80 mol%. In a more conspicuous embodiment, therefore, in the doping region, the
  • Carrier material must be completely replaced by the doping material.
  • the doping material may preferably comprise a metal oxide, wherein the
  • Doping material is preferably selected from the group consisting of iron oxide, in particular Fe 2 O 3; ZrO 2; Cr203; MgO; MnO; Snri203; Tb 4 Ü7; Gd203;
  • the carrier Al 2 O 3 and the doping region 20 mol% to 100 mol% Fe 2 0 3 , preferably 40 to 80 mol% Fe 2 0 3 , especially since the so-prepared ceramic mixed oxide via a suitable electrical Lei impart features.
  • the oxides Snri203; Tb 4 Ü7; Gd2Ü3 and / or Y2O3 suitable for doping can prove to be advantageous, for example, the lowest possible temperature response of an electrical resistance of the doped carrier material within a selected To realize Tempertur machiness.
  • Doping materials may each have a value of 0 mol% to 100 mol% in the at least one doping region, for example, a
  • a width of the doping region may be in a range from 10 ⁇ m to 2 mm, preferably from 25 ⁇ m to 500 ⁇ m, and particularly preferably from 50 ⁇ m to 250 ⁇ m. Furthermore, a length of the doping region may be in a range of
  • a thickness of the doping region can furthermore be in a range from 0.1 ⁇ m to 100 ⁇ m, preferably from 1 ⁇ m to 50 ⁇ m, and particularly preferably from 2 to 20 ⁇ m.
  • a length of the doping region is basically understood to mean the extent of the doping region in that spatial dimension which is parallel to the carrier surface and parallel to the main direction of extent of the electrode finger which the doping region contacts.
  • a thickness of the doping region is basically the
  • Extension of the doping region understood in that space dimension, which extends perpendicular to the support surface.
  • the electrode fingers of the first and / or the second Elektrodeneinrichtu may have a meandering course.
  • a meander-shaped course is in the context of the present invention, in principle, an arbitrary course of the electrode device on the
  • Understood carrier surface having at least one S-shape and / or at least one snake shape and / or at least one turn. Furthermore, the electrode fingers of the first electrode device and the
  • Electrode fingers of the second electrode device comb-like mesh.
  • the electrode fingers of the first electrode device may be spaced apart from one another, wherein the distance of the electrode fingers of the first
  • Electrode device may be constant within the sensor element or at least over a portion of the sensor element may vary.
  • Electrode fingers of the second electrode device can likewise have a spacing from one another, wherein the distance of the electrode fingers of the second electrode device within the sensor element can be constant or at least vary over a part of the sensor element.
  • Electrode fingers of the first electrode device may have a spacing from the electrode fingers of the second electrode device, wherein the distance within the sensor element may be constant or at least vary over a part of the sensor element.
  • the sensor element may have at least two terminating resistors.
  • the terminating resistors can have different values.
  • Termination resistors can also all have the same value. At different values, if necessary, an error assignment can be realized, which area is affected and from which a correction function in the control unit can be realized, which enables an area-dependent compensation of this error with higher accuracy in the signal evaluation.
  • the terminators can all be in one area of the
  • the cold region of the sensor element may in this case comprise in particular a side with connection contacts to a cable harness and typically by means of a sealing pack from the hot exhaust gas
  • the terminating resistors may at least partially lie in a region of the sensor element, which is also referred to as "hotter
  • the area of the sensor element can be referred to and which is acted upon by the particles of the measuring gas.This can be the actual measuring range of the electrodes, the printed electrode leads can be mounted in a transition region
  • Terminating resistors are at least partially in a control unit. The at least partial accommodation of the terminating resistors in the
  • Control unit allows a higher temperature stability in comparison to outside the control unit accommodated termination resistors.
  • the terminating resistor can be accommodated in the control unit. This allows a higher compared to a mounted outside of the controller termination
  • the one terminating resistor can also be located in a region of the sensor element which is not acted on by the particles of the measuring gas. Furthermore, the one terminating resistor can also be located in a region of the sensor element which is acted on by the particles of the measuring gas.
  • the sensor element can be configured in particular as a soot particle sensor. Furthermore, the sensor element can be accommodated in at least one protective tube.
  • a method for producing a sensor element for detecting particles of a measurement gas in a measurement gas space comprises the following steps, preferably in the order given. Also a different order is possible. Furthermore, one or more or all of the method steps can also be carried out repeatedly. Furthermore, two or more of the method steps may also be performed wholly or partially overlapping in time or simultaneously. The method may, in addition to the method steps mentioned, also comprise further method steps.
  • the process steps are:
  • Electrode means and the second electrode means comprise a plurality of electrode fingers
  • Electrode device is connected to at least one electrode finger of the second electrode device by at least one terminator.
  • the method can be used, in particular, for producing a sensor element according to the present invention, that is to say according to one of the above-mentioned
  • step c) a thick-film technology for applying the
  • Terminating resistor can be used on the carrier or it can be a doping of the carrier to produce at least one doping region in the carrier.
  • the terminating resistor can be considered discrete
  • Component on the support in particular on the ceramic substrate to be printed.
  • the proposed device and method have numerous advantages over known devices and methods. Due to the inventive design of the electrode devices, in particular the electrode structure, it may be possible to use a
  • Measurement accuracy using the inventive sensor element over the prior art, especially in the case of one or more defective electrode fingers to increase.
  • Electrode fingers the defect of a single electrode finger or a few electrode fingers has little effect. In particular, it may be possible to compensate for the defect of one or fewer electrode fingers, especially with low loss of sensitivity.
  • the terminating resistors may be located in the region which is not exposed to the particles of the measuring gas, in particular in a cold region or colder region of the sensor element. Furthermore, it is also possible that the terminators are in the control unit, which can allow a high temperature stability.
  • FIG. 4 shows a dependency of a
  • Electrode fingers in a sensor element
  • FIG. 4 shows in the form of a diagram 130 a dependency of the
  • FIGS. 5 and 6 show various embodiments of a sensor element 110 according to the invention for detecting particles of a measurement gas in a measurement gas space in a cross-sectional view.
  • the sensor element 110 can be set up in particular for use in a motor vehicle.
  • the measuring gas may be an exhaust gas of the motor vehicle.
  • the sensor element 110 can in particular comprise one or more further functional elements not shown in the figures, such as electrodes, electrode leads and contacts, multiple layers, heating elements, electrochemical cells or others
  • the sensor element 110 may for example be accommodated in a protective tube, also not shown.
  • the sensor element 110 comprises a carrier 112, wherein a first electrode device 114 and a second electrode device 116 are applied to the carrier 112.
  • Electrode device 116 have a plurality of electrode fingers 118, wherein each electrode finger 118 of the first electrode device 114 is connected to at least one electrode finger 118 of the second electrode device 116 by at least one terminator 120.
  • the at least one terminating resistor 120 may, for example, be applied to the carrier 112 as a discrete component, as shown in FIG. However, the at least one terminating resistor 120 can also be designed as a doping region 122 described in greater detail below within the carrier 112, as shown in FIG.
  • the carrier 112 can be used as a carrier material in these preferred embodiment
  • Embodiments comprise at least one ceramic material.
  • the carrier 112 may comprise aluminum oxide, in particular Al 2 O 3. Furthermore, the carrier 112 may comprise at least one electrically insulating material.
  • the carrier 112 may include at least one doping region 122, wherein the doping region 122 comprises at least a portion of an electrode finger 118 of the first electrode device 114 and at least a portion of a
  • Electrode finger 118 of the second electrode means 116 contacts, as in
  • the doping region 122 may also include a portion or multiple portions of all of the electrode fingers 118 of the first
  • Electrode device 114 and a portion or multiple portions of all electrode fingers 118 of the second electrode device 116 touch.
  • the portion of the electron finger 118 of the first electrode device 114 and the portion of the electrode finger 118 of the second electrode device 116 contacting the doping region 122 may be in electrical contact with the doping region 122.
  • the carrier 112 may have in the at least one doping region 122 introduced into the ceramic material impurities, in particular metal atoms, wherein the metallic impurity atoms are part of the ceramic in the Replace the material of the carrier 112 contained metal atoms.
  • the doping region 122 may comprise at least one doped ceramic material, in particular an aluminum oxide doped with metal oxides. Other oxides are possible.
  • the carrier 112 may thus be in the at least one
  • Doping region 122 may be doped with a doping material, wherein the doping material refers to the provided with the metallic impurity oxidic ceramic.
  • the doping material may preferably comprise a metal oxide, wherein the
  • Doping material is preferably selected from the group consisting of iron oxide, in particular Fe2Ü3; ZrCH; 0203; MgO; MnO, Sm 2 O 3, Tb 4 07, Gd 2 O 3, Y 2 O 3 and any mixture of these materials.
  • the doping material in the at least one doping region 122 may have a concentration of from 1 mol% to 100 mol%, preferably from 10 mol% to 90 mol% and particularly preferably from 20 mol% to 80 mol%.
  • the carrier 112 may comprise Al 2 O 3 and the doping region 122 may have 40 to 80 mol% Fe 2 O 3.
  • a width b of the doping region 122 may be in a range from 10 .mu.m to 2 mm, preferably from 25 .mu.m to 500 .mu.m, and particularly preferably from 50 .mu.m to 250 .mu.m. Furthermore, a length of the doping region may be in a range of
  • a thickness d of the doping region can furthermore be in a range from 0.1 ⁇ m to 100 ⁇ m, preferably from 1 ⁇ m to 50 ⁇ m, and particularly preferably from 2 to 20 ⁇ m.
  • Doping region are shown in FIG. An electrical conductivity of the at least one doping region, in the absence of deposited particles in a temperature interval of 50 ° C to 500 ° C in a range of 1-10 "9
  • the electrode fingers 118 of the first electrode device 114 and / or the electrode fingers 118 of the second electrode device 116 may have a meandering course 124.
  • FIGS. 1 and 2 show two examples of a meander-shaped course 124.
  • Electrode device 116 may have a plurality of other meandering ones Have gradients. Furthermore, the electrode fingers 118 of the first electrode device 114 and the electrode fingers 118 of the second
  • Electrode means 116 mesh like a comb, as shown in Figures 1-3, 5 and 6.
  • the sensor element 110 may have at least two terminating resistors 120, as shown in FIGS. 1-3, 5 and 6.
  • the terminating resistors 120 may have different values.
  • the terminating resistors 120 may, however, also all have the same value.
  • the electrode fingers 118 of the first electrode device 114 may have a distance a from one another, wherein the distance a of the electrode fingers 118 of the first electrode device 114 may be constant within the sensor element 110, as shown in FIG. 3, or at least vary over a part of the sensor element 110.
  • Electrode device 116 may have a distance c from each other, wherein the distance c of the electrode fingers 118 of the second electrode device 116 may be constant within the sensor element 110, as shown in Figure 3, or at least over a portion of the sensor element 110 may vary.
  • the electrode fingers 118 of the first electrode device 114 may have a
  • Distance e from the electrode fingers 118 of the second electrode means 116 wherein the distance e may be constant within the sensor element 110, as shown in Figure 3, or at least over a part of the
  • Sensor element 110 may vary.
  • the termination resistors 120 may all be in a region of the
  • the terminating resistors 120 may at least partially lie in a region of the sensor element 110, which is acted on by the particles of the measuring gas. Furthermore, one or more of the existing terminating resistors 120 may be located in a control unit not shown in the figures.
  • total electrode resistance refers to the electrical resistance of the first electrode device, through the second electrode device, through the at least one electrode
  • the total electrode resistance may be in a range of 1 ⁇ to 150 ⁇ , preferably in a range of 2 ⁇ to 75 ⁇ , and more preferably in a range of 5 ⁇ to 50 ⁇ . Due to the low resistance of the two electrode devices, the total electrode resistance generally comprises essentially
  • Rges a sum of the terminating resistors
  • Terminating resistors 120 for the embodiment shown in Figure 3 of a sensor element 110 according to the invention with a total of n electrode fingers 118 calculate as follows: wherein the first electrode means 114 has a number of n / 2 electrode fingers 118, and wherein the second electrode means 116 also has a number of n / 2 electrode fingers 118, and wherein each electrode finger 118 of the first electrode means 114 has at least one electrode finger
  • Terminating resistor R, (120) is connected.
  • the terminating resistors R, 120 may all have the same value Ro.
  • the total resistance R ges for the illustrated in Figure 3 can be
  • Embodiment of a sensor element 110 according to the invention with a number of m defective electrode fingers 118 for a total of n electrode fingers 118 calculate as follows, where 1) 0, the first electrode device 114 has a number of n / 2 electrode fingers 118 which may be intact or at least partially defective, and wherein the second electrode device 116 also has a number of n / 2 electrode fingers 118 which are intact or at least partially defective and each electrode finger 118 of the first
  • Electrode device 114 is connected to at least one electrode finger 118 of the second electrode device by at least one terminating resistor R, 120:
  • the terminating resistors R, 120 may all have the same value Ro. For this case, the following calculation of the
  • the sensor element 110 can be configured in particular as a soot particle sensor. Furthermore, the sensor element 110 can be accommodated in at least one protective tube, not shown in the figures.
  • a measuring voltage can be applied between the first electrode device 114 and the second electrode device 116 and a self-diagnosis current 126 and / or a
  • Total electrode resistance 128 can be measured.
  • Self-diagnostic current 126 flows through the first electrode device 114, the second electrode device 116 and the at least one
  • Termination resistor 120 The self-diagnostic current 126 may be a measure of the functionality of the sensor element 110 and / or the quality of the
  • FIG. 4 shows, by way of example, a diagram 130, in which the self-diagnosis current 126 is determined as a function of the number of defective electrode fingers 132, as well as the number of defective electrode fingers 132
  • Total electrode resistance 128 as a function of the number of defective ones
  • Electrode finger 132 is shown.
  • the diagram 130 in FIG. 4 relates to the embodiment of a sensor element 110 shown in FIG. 3.
  • a current 134 is plotted over the number of defective electrode fingers 132, as well as a resistor 136 over the number of defective electrode fingers 132.

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  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

L'invention concerne un élément capteur (110) destiné à détecter un gaz de mesure dans une chambre de mesure. L'élément capteur (110) comprend un support (112), un premier dispositif électrode (114) et un second dispositif électrode (116) étant appliqués sur ledit support (112). Le premier dispositif électrode (114) et le second dispositif électrode (116) comportent chacun une pluralité de doigts-électrodes (118), chaque doigt-électrode (118) du premier dispositif électrode (114) étant relié à au moins un doigt-électrode (118) du second dispositif électrode (116) par l'intermédiaire d'au moins une résistance terminale (120).
PCT/EP2017/075907 2016-10-24 2017-10-11 Élément capteur destiné à détecter des particules d'un gaz de mesure dans une chambre de mesure WO2018077615A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020197011708A KR20190071719A (ko) 2016-10-24 2017-10-11 측정 가스 챔버 내 측정 가스의 미립자 검출용 센서 요소
CN201780065827.2A CN109891211B (zh) 2016-10-24 2017-10-11 用于感测测量气体室中的测量气体的颗粒的传感器元件

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016220832.2 2016-10-24
DE102016220832.2A DE102016220832A1 (de) 2016-10-24 2016-10-24 Sensorelement zur Erfassung von Partikeln eines Messgases in einem Messgasraum

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WO2018077615A1 true WO2018077615A1 (fr) 2018-05-03

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KR (1) KR20190071719A (fr)
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WO (1) WO2018077615A1 (fr)

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KR20190071719A (ko) 2019-06-24
DE102016220832A1 (de) 2018-04-26

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