WO2018059166A1 - Positioning assembly - Google Patents

Positioning assembly Download PDF

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Publication number
WO2018059166A1
WO2018059166A1 PCT/CN2017/098863 CN2017098863W WO2018059166A1 WO 2018059166 A1 WO2018059166 A1 WO 2018059166A1 CN 2017098863 W CN2017098863 W CN 2017098863W WO 2018059166 A1 WO2018059166 A1 WO 2018059166A1
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WO
WIPO (PCT)
Prior art keywords
positioning
plate
bracket
curved
workpiece
Prior art date
Application number
PCT/CN2017/098863
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French (fr)
Chinese (zh)
Inventor
路新春
赵德文
许振杰
靳富
王同庆
李昆
Original Assignee
清华大学
天津华海清科机电科技有限公司
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Application filed by 清华大学, 天津华海清科机电科技有限公司 filed Critical 清华大学
Publication of WO2018059166A1 publication Critical patent/WO2018059166A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions

Definitions

  • the invention relates to the field of industrial automation transmission, and in particular to a positioning assembly.
  • the transfer of the robot to the wafer between different stations needs to be done by means of locating pins and brackets.
  • the position of the wafer cannot be adjusted.
  • the present invention aims to solve at least one of the above technical problems to some extent.
  • the present invention provides a positioning assembly that can adjust the position of a workpiece supported on a positioning plate to meet the needs of production processing.
  • a positioning assembly includes: a bracket; a plurality of positioning pins, a plurality of the positioning pins are spaced apart in a circumferential direction of the bracket and rotatably disposed on the bracket, each of the positioning pins
  • the utility model comprises: a positioning plate for supporting a workpiece, wherein an upper surface of the positioning plate is provided with a positioning protrusion, a lower surface of the positioning plate is attached to an upper surface of the bracket and a rotating shaft is provided, and a central axis of the rotating shaft Not coincident with the central axis of the positioning protrusion, the horizontal distance between the positioning protrusions can be changed by rotating the positioning pin, thereby effectively adjusting the position of the workpiece.
  • the positioning assembly of the embodiment of the present invention since the central axis of the rotating shaft does not coincide with the central axis of the positioning protrusion, the horizontal distance between the positioning protrusions can be changed by rotating the positioning pin, thereby changing the area of the positioning plate for supporting the workpiece. Therefore, the adjustment of the position of the workpiece is realized, the normal and stable production is ensured, and the production cost is reduced.
  • the positioning component according to the embodiment of the present invention may further have the following additional technical features:
  • the outer surface of the positioning projection is a curved surface.
  • the positioning protrusion is disposed coaxially with the positioning plate.
  • the rotating shaft is integrally formed on a lower surface of the positioning plate.
  • the bracket includes: a positioning post; a plurality of support strips, wherein the plurality of support strips are radially distributed on an outer circumference of the positioning post, one end of each of the support strips and the The positioning posts are connected and the other end extends outward.
  • a plurality of the support strips are equally spaced around the outer circumference of the positioning post.
  • the support strip is integrally formed with the positioning post.
  • the bracket is an annular plate
  • the annular plate includes: two first curved plates; a plurality of mounting platforms, wherein the plurality of mounting platforms are respectively disposed on the first curved plate Both ends extend upwardly, the positioning pin is disposed at an upper end of the mounting table; two second curved plates, the first curved plate and the second curved plate are concentrically disposed, the second A curved plate is connected between the two adjacent mounting stations.
  • the positioning pin is provided inside the mounting table.
  • the positioning assembly further includes: a fastening screw, a lower surface of the rotating shaft is provided with a positioning hole, and the fastening screw extends through the lower surface of the bracket into the positioning hole .
  • FIG. 1 is a perspective view of a positioning assembly in accordance with one embodiment of the present invention.
  • FIG. 2 is a perspective view of a positioning assembly in accordance with another embodiment of the present invention.
  • Figure 3 is a perspective view of a locating pin in accordance with one embodiment of the present invention.
  • Figure 4 is a cross-sectional view of a locating pin in accordance with one embodiment of the present invention.
  • Figure 5 is a cross-sectional view of a positioning assembly in accordance with one embodiment of the present invention.
  • Bracket 10 positioning post 11; support bar 111; first curved plate 121; mounting table 122; second curved plate 123;
  • the transfer of the robot to the wafer between different stations needs to be done by means of locating pins and brackets. But because of the positioning pin and bracket plus There are errors in production and installation, so the position of the wafer cannot be adjusted.
  • the present invention addresses the above technical problems.
  • a positioning assembly 100 in accordance with an embodiment of the present invention which may generally include a bracket 10 and a plurality of positioning pins 20, is described below with reference to FIGS.
  • the positioning assembly 100 can be used in a wafer transfer apparatus to meet the wafer's accurate adjustment of wafer position during transport.
  • a plurality of positioning pins 20 are spaced apart in the circumferential direction of the bracket 10 and rotatably provided on the bracket 10.
  • more than one positioning pin 20 is provided in the circumferential direction of the bracket 10, and the positioning pin 20 is rotatable relative to the bracket 10.
  • each of the positioning pins 20 may include: a positioning plate 21 for supporting the workpiece 40.
  • the upper surface of the positioning plate 21 is provided with a positioning protrusion 22, and the lower surface of the positioning plate 21 is attached to the bracket.
  • the upper surface of 10 is provided with a rotating shaft 23.
  • the central axis of the rotating shaft 23 does not coincide with the central axis of the positioning protrusion 22, and the horizontal distance between the plurality of positioning protrusions 22 of the bracket 10 can be changed by rotating the positioning pin 20. Thereby the position of the workpiece 40 is effectively adjusted. That is, the plurality of positioning projections 22 can define the degree of freedom of the workpiece 40 in the horizontal direction. Since the central axis of the rotating shaft 23 is not in the same vertical direction as the central axis of the positioning projection 22, the positioning projection 22 is horizontal. The position changes as the rotation of the rotary shaft 23, that is, the area of the positioning plate 21 for supporting the workpiece 40 changes with the rotation of the rotary shaft 23. For example, as shown in FIG.
  • the position of the workpiece 40 can be adjusted by rotating any one of the positioning pins 20 to meet the needs of production, thereby effectively solving the problem that the position of the workpiece 40 cannot be adjusted, and ensuring normal and stable production. And unnecessary trimming of the positioning assembly 100 is avoided.
  • the positioning assembly 100 of the embodiment of the present invention since the central axis of the rotating shaft 23 does not coincide with the central axis of the positioning protrusion 22, the horizontal distance between the positioning protrusions 22 can be changed by rotating the positioning pin 20, thereby The positioning plate 21 is used to support the area of the workpiece 40, thereby realizing the adjustment of the position of the workpiece 40, ensuring normal and stable production, and reducing production costs.
  • the bracket 10 may include a positioning post 11 and a plurality of support bars 111.
  • a plurality of support bars 111 are radially distributed on the outer circumference of the positioning post 11, and one end of each support bar 111 (such as the inner end of the support bar in FIG. 1) is connected to the positioning post 11 and the other end (see FIG. 1).
  • the outer end of the support strip in the middle extends outward.
  • Each of the positioning pins 20 includes a positioning plate 21, a positioning projection 22 on the upper surface of the positioning plate 21, and a rotating shaft 23 on the lower surface of the positioning plate 21.
  • the lower surface of the positioning plate 21 is attached to the upper surface of the bracket 10.
  • the lower surface of the workpiece 40 is attached to the upper surface of the positioning plate 21, and the end surface of the workpiece 40 is in contact with the outer surface of the positioning projection 22.
  • the outer surface of the locating projection 22 is a curved surface.
  • the friction between the workpiece 40 placed on the positioning plate 21 and the surface of the positioning projection 22 is small. Thereby, it is possible to avoid damage to the workpiece 40 when the position of the station is changed.
  • the positioning protrusion 22 is disposed coaxially with the positioning plate 21.
  • the mold for manufacturing the positioning assembly 100 can be simplified, and the production process of the assembly 100 can be easily positioned.
  • the rotating shaft 23 is integrally formed on the lower surface of the positioning plate 21.
  • the connection strength between the rotating shaft 23 and the positioning plate 21 can be improved, and the production process of the positioning assembly 100 can be facilitated.
  • the bracket 10 may be an annular plate including: two first curved plates 121, a mounting table 122, and two second curved plates 123.
  • a plurality of mounting stages 122 are respectively disposed at two ends of the first curved plate 121 and extend upward, and the positioning pin 20 is disposed at an upper end of the mounting base 122.
  • the first curved plate 121 and the second curved plate 123 are concentrically arranged, and the second curved plate 123 is connected between the adjacent two mounting stages 122.
  • the first curved plate 121 and the second curved plate 123 are at different heights in the vertical direction, and the mounting table 122 is coupled between the first curved plate 121 and the second curved plate 123.
  • the positioning pin 20 is disposed inside the mounting table 122, and since the first curved plate 121 and the second curved plate 123 have a height difference, the workpiece 40 may be placed from above the first curved plate 121 or Leaving the positioning plate 21. Thereby, the structural design of the positioning assembly 100 is made more reasonable.
  • the positioning assembly 100 may further include: a fastening screw 30.
  • the lower surface of the rotating shaft 23 is provided with a positioning hole, and the fastening screw 30 extends through the lower surface of the bracket 10 into the positioning hole. It can be understood that when the horizontal position of the positioning protrusion 22 is adjusted to an appropriate position, the positioning assembly 100 can be fixed on the bracket 10 by the fastening screw 30, thereby improving the stability of the positioning assembly 100 and preventing the positioning assembly 100 from being subjected to an external force factor. Changes have occurred to ensure that the entire production is stable and stable.
  • the terms “installation”, “connected”, “connected”, “fixed” and the like shall be understood broadly, and may be either a fixed connection or a detachable connection, unless explicitly stated and defined otherwise. , or connected integrally; may be mechanical connection or electrical connection; may be directly connected, or may be indirectly connected through an intermediate medium, and may be internal communication between the two elements.
  • installation shall be understood broadly, and may be either a fixed connection or a detachable connection, unless explicitly stated and defined otherwise.
  • , or connected integrally may be mechanical connection or electrical connection; may be directly connected, or may be indirectly connected through an intermediate medium, and may be internal communication between the two elements.
  • the specific meanings of the above terms in the present invention can be understood on a case-by-case basis.
  • the first feature "on” or “under” the second feature may include direct contact of the first and second features, and may also include first and second features, unless otherwise specifically defined and defined. It is not in direct contact but through additional features between them.
  • the first feature “above”, “above” and “above” the second feature includes the first feature directly above and above the second feature, or merely indicating that the first feature level is higher than the second feature.
  • the first feature “below”, “below” and “below” the second feature includes the first feature directly above and above the second feature, or merely the first feature level being less than the second feature.

Abstract

Disclosed is a positioning assembly (100) comprising: a support (10); and a plurality of positioning pins (20), the plurality of positioning pins (20) being arranged at intervals in the circumferential direction of the support (10), and being rotatably arranged on the support (10). Each positioning pin (20) comprises a positioning plate (21) for supporting a workpiece (40), with an upper surface of the positioning plate (21) being provided with a positioning boss (22), a lower surface of the positioning plate (21) being attached to an upper surface of the support (10) and being provided with a rotary shaft (23), and the central axis of the rotary shaft (23) not being coincident with the central axis of the positioning boss (22). The horizontal distance between the positioning bosses (22) can be changed by rotating the positioning pins (20), so as to effectively adjust the position of the workpiece (40).

Description

定位组件Positioning component 技术领域Technical field
本发明涉及工业自动化传输领域，尤其涉及一种定位组件。The invention relates to the field of industrial automation transmission, and in particular to a positioning assembly.
背景技术Background technique
在工业自动化的工件自动传输过程，例如，对于半导体行业晶片加工输送过程，机械手对晶片在不同工位之间的传送需要借助于定位销和支架来完成。但由于定位销和支架加工生产及安装均存在误差，因此，对于晶片的位置无法进行调节。In the automated automated workpiece transfer process, for example, for the semiconductor industry wafer processing transport process, the transfer of the robot to the wafer between different stations needs to be done by means of locating pins and brackets. However, due to errors in the production and installation of the locating pin and the bracket, the position of the wafer cannot be adjusted.
发明内容Summary of the invention
本发明旨在至少在一定程度上解决上述技术问题之一。The present invention aims to solve at least one of the above technical problems to some extent.
为此，本发明提出一种定位组件，该定位组件可以对支承于定位板上的工件位置进行调节，以满足生产加工的需要。To this end, the present invention provides a positioning assembly that can adjust the position of a workpiece supported on a positioning plate to meet the needs of production processing.
根据本发明实施例的定位组件包括：支架；多个定位销，多个所述定位销沿所述支架的周向方向间隔设置且可旋转地设在所述支架上，每个所述定位销包括：用于支承工件的定位板，所述定位板的上表面设有定位凸起，所述定位板的下表面贴合于所述支架的上表面且设有转轴，所述转轴的中心轴线与所述定位凸起的中心轴线不重合，通过旋转所述定位销可改变所述定位凸起之间的水平距离，从而对工件位置进行有效调节。A positioning assembly according to an embodiment of the present invention includes: a bracket; a plurality of positioning pins, a plurality of the positioning pins are spaced apart in a circumferential direction of the bracket and rotatably disposed on the bracket, each of the positioning pins The utility model comprises: a positioning plate for supporting a workpiece, wherein an upper surface of the positioning plate is provided with a positioning protrusion, a lower surface of the positioning plate is attached to an upper surface of the bracket and a rotating shaft is provided, and a central axis of the rotating shaft Not coincident with the central axis of the positioning protrusion, the horizontal distance between the positioning protrusions can be changed by rotating the positioning pin, thereby effectively adjusting the position of the workpiece.
根据本发明实施例的定位组件，由于转轴的中心轴线与定位凸起的中心轴线不重合，可以通过旋转定位销来改变定位凸起之间的水平距离，进而改变定位板用于支承工件的面积，从而实现对工件位置的调节，保证了生产的正常稳定进行，降低了生产成本。According to the positioning assembly of the embodiment of the present invention, since the central axis of the rotating shaft does not coincide with the central axis of the positioning protrusion, the horizontal distance between the positioning protrusions can be changed by rotating the positioning pin, thereby changing the area of the positioning plate for supporting the workpiece. Therefore, the adjustment of the position of the workpiece is realized, the normal and stable production is ensured, and the production cost is reduced.
另外，根据本发明实施例的定位组件，还可以具有如下附加的技术特征：In addition, the positioning component according to the embodiment of the present invention may further have the following additional technical features:
根据本发明的一个实施例，所述定位凸起的外表面为曲面。According to an embodiment of the invention, the outer surface of the positioning projection is a curved surface.
根据本发明的一个实施例，所述定位凸起与所述定位板同轴设置。According to an embodiment of the invention, the positioning protrusion is disposed coaxially with the positioning plate.
根据本发明的一个实施例，所述转轴一体形成在所述定位板的下表面。According to an embodiment of the invention, the rotating shaft is integrally formed on a lower surface of the positioning plate.
根据本发明的一个实施例，所述支架包括：定位柱；多个支撑条，多个所述支撑条呈射线状分布在所述定位柱的外周，每个所述支撑条的一端与所述定位柱相连，另一端向外延伸。According to an embodiment of the present invention, the bracket includes: a positioning post; a plurality of support strips, wherein the plurality of support strips are radially distributed on an outer circumference of the positioning post, one end of each of the support strips and the The positioning posts are connected and the other end extends outward.
根据本发明的一个实施例，多个所述支撑条等间距地分布在所述定位柱的外周。According to an embodiment of the invention, a plurality of the support strips are equally spaced around the outer circumference of the positioning post.
根据本发明的一个实施例，所述支撑条与所述定位柱一体成型。 According to an embodiment of the invention, the support strip is integrally formed with the positioning post.
根据本发明的一个实施例，所述支架为环形板，所述环形板包括：两个第一弧形板；多个安装台，多个所述安装台分别设在所述第一弧形板的两端且向上延伸，所述定位销设在所述安装台的上端；两个第二弧形板，所述第一弧形板和所述第二弧形板同心设置，所述第二弧形板连接在相邻的两个所述安装台之间。According to an embodiment of the present invention, the bracket is an annular plate, and the annular plate includes: two first curved plates; a plurality of mounting platforms, wherein the plurality of mounting platforms are respectively disposed on the first curved plate Both ends extend upwardly, the positioning pin is disposed at an upper end of the mounting table; two second curved plates, the first curved plate and the second curved plate are concentrically disposed, the second A curved plate is connected between the two adjacent mounting stations.
根据本发明的一个实施例，所述定位销设在所述安装台的内侧。According to an embodiment of the invention, the positioning pin is provided inside the mounting table.
根据本发明的一个实施例，所述定位组件还包括：紧固螺钉，所述转轴的下表面设有定位孔，所述紧固螺钉穿设所述支架的下表面伸入所述定位孔内。According to an embodiment of the present invention, the positioning assembly further includes: a fastening screw, a lower surface of the rotating shaft is provided with a positioning hole, and the fastening screw extends through the lower surface of the bracket into the positioning hole .
本发明的附加方面和优点将在下面的描述中部分给出，部分将从下面的描述中变得明显，或通过本发明的实践了解到。The additional aspects and advantages of the invention will be set forth in part in the description which follows.
附图说明DRAWINGS
本发明的上述和/或附加的方面和优点从结合下面附图对实施例的描述中将变得明显和容易理解，其中：The above and/or additional aspects and advantages of the present invention will become apparent and readily understood from
图1是根据本发明一个实施例的定位组件的立体图；1 is a perspective view of a positioning assembly in accordance with one embodiment of the present invention;
图2是根据本发明另一个实施例的定位组件的立体图；2 is a perspective view of a positioning assembly in accordance with another embodiment of the present invention;
图3是根据本发明一个实施例的定位销的立体图；Figure 3 is a perspective view of a locating pin in accordance with one embodiment of the present invention;
图4是根据本发明一个实施例的定位销的剖视图；Figure 4 is a cross-sectional view of a locating pin in accordance with one embodiment of the present invention;
图5是根据本发明一个实施例的定位组件的剖视图。Figure 5 is a cross-sectional view of a positioning assembly in accordance with one embodiment of the present invention.
附图标记：Reference mark:
定位组件100； Positioning component 100;
支架10；定位柱11；支撑条111；第一弧形板121；安装台122；第二弧形板123； Bracket 10; positioning post 11; support bar 111; first curved plate 121; mounting table 122; second curved plate 123;
定位销20；定位板21；定位凸起22；转轴23；Locating pin 20; positioning plate 21; positioning protrusion 22; rotating shaft 23;
紧固螺钉30；Fastening screw 30;
工件40。 Workpiece 40.
具体实施方式detailed description
下面详细描述本发明的实施例，所述实施例的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的，旨在用于解释本发明，而不能理解为对本发明的限制。The embodiments of the present invention are described in detail below, and the examples of the embodiments are illustrated in the drawings, wherein the same or similar reference numerals are used to refer to the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the drawings are intended to be illustrative of the invention and are not to be construed as limiting.
在工业自动化的工件自动传输过程，例如，对于半导体行业晶片加工输送过程，机械手对晶片在不同工位之间的传送需要借助于定位销和支架来完成。但由于定位销和支架加 工生产及安装均存在误差，因此，对于晶片的位置无法进行调节。本发明着力解决上述技术问题。In the automated automated workpiece transfer process, for example, for the semiconductor industry wafer processing transport process, the transfer of the robot to the wafer between different stations needs to be done by means of locating pins and brackets. But because of the positioning pin and bracket plus There are errors in production and installation, so the position of the wafer cannot be adjusted. The present invention addresses the above technical problems.
下面参照图1-图5描述根据本发明实施例的定位组件100，该定位组件100大体可以包括：支架10和多个定位销20。该定位组件100可以用于晶片传送装置中，以满足晶片在传输过程中对晶片位置进行准确调节。A positioning assembly 100 in accordance with an embodiment of the present invention, which may generally include a bracket 10 and a plurality of positioning pins 20, is described below with reference to FIGS. The positioning assembly 100 can be used in a wafer transfer apparatus to meet the wafer's accurate adjustment of wafer position during transport.
具体地，如图1和图2所示，多个定位销20沿支架10的周向方向间隔设置且可旋转地设在支架10上。换言之，支架10的周向方向上设有一个以上的定位销20，且定位销20相对支架10可旋转。Specifically, as shown in FIGS. 1 and 2, a plurality of positioning pins 20 are spaced apart in the circumferential direction of the bracket 10 and rotatably provided on the bracket 10. In other words, more than one positioning pin 20 is provided in the circumferential direction of the bracket 10, and the positioning pin 20 is rotatable relative to the bracket 10.
如图3-图5所示，每个定位销20可以包括：用于支承工件40的定位板21、定位板21的上表面设有定位凸起22，定位板21的下表面贴合于支架10的上表面且设有转轴23。As shown in FIG. 3 to FIG. 5, each of the positioning pins 20 may include: a positioning plate 21 for supporting the workpiece 40. The upper surface of the positioning plate 21 is provided with a positioning protrusion 22, and the lower surface of the positioning plate 21 is attached to the bracket. The upper surface of 10 is provided with a rotating shaft 23.
其中，如图4和图5所示，转轴23的中心轴线与定位凸起22的中心轴线不重合，通过旋转定位销20可改变位于支架10的多个定位凸起22之间的水平距离，从而对工件40位置进行有效调节。也就是说，多个定位凸起22可以限定工件40在水平方向的自由度，由于转轴23的中心轴线与定位凸起22的中心轴线不在同一竖直方向上，定位凸起22在水平方向的位置随着转轴23的旋转而发生改变，即定位板21用于支承工件40的面积会随着转轴23的旋转而发生改变。例如，图5所示，当转轴23顺时针方向旋转时，定位凸起22水平方向的位置向右移动，定位板21用于支承工件40的面积随之减小，工件40也随之向右移动，从而实现对工件40位置进行调节，其中，图5中虚线示出了工件40与定位凸起22随着转轴23的旋转对应的位置关系变化。Wherein, as shown in FIG. 4 and FIG. 5, the central axis of the rotating shaft 23 does not coincide with the central axis of the positioning protrusion 22, and the horizontal distance between the plurality of positioning protrusions 22 of the bracket 10 can be changed by rotating the positioning pin 20. Thereby the position of the workpiece 40 is effectively adjusted. That is, the plurality of positioning projections 22 can define the degree of freedom of the workpiece 40 in the horizontal direction. Since the central axis of the rotating shaft 23 is not in the same vertical direction as the central axis of the positioning projection 22, the positioning projection 22 is horizontal. The position changes as the rotation of the rotary shaft 23, that is, the area of the positioning plate 21 for supporting the workpiece 40 changes with the rotation of the rotary shaft 23. For example, as shown in FIG. 5, when the rotating shaft 23 rotates clockwise, the position of the positioning projection 22 in the horizontal direction moves to the right, and the area of the positioning plate 21 for supporting the workpiece 40 is reduced, and the workpiece 40 is also turned to the right. The movement is performed to thereby adjust the position of the workpiece 40, wherein the broken line in FIG. 5 shows the positional relationship of the workpiece 40 and the positioning projection 22 corresponding to the rotation of the rotating shaft 23.
因此，在生产过程中，通过旋转任意一个定位销20均可以对工件40的位置进行调节，以满足生产的需要，从而有效解决工件40位置无法进行调节的的问题，保证了生产的正常稳定进行，且避免了对定位组件100进行修整而产生不必要的费用。Therefore, in the production process, the position of the workpiece 40 can be adjusted by rotating any one of the positioning pins 20 to meet the needs of production, thereby effectively solving the problem that the position of the workpiece 40 cannot be adjusted, and ensuring normal and stable production. And unnecessary trimming of the positioning assembly 100 is avoided.
简言之，根据本发明实施例的定位组件100，由于转轴23的中心轴线与定位凸起22的中心轴线不重合，可以通过旋转定位销20来改变定位凸起22之间的水平距离，进而改变定位板21用于支承工件40的面积，从而实现对工件40位置的调节，保证了生产的正常稳定进行，降低了生产成本。In short, according to the positioning assembly 100 of the embodiment of the present invention, since the central axis of the rotating shaft 23 does not coincide with the central axis of the positioning protrusion 22, the horizontal distance between the positioning protrusions 22 can be changed by rotating the positioning pin 20, thereby The positioning plate 21 is used to support the area of the workpiece 40, thereby realizing the adjustment of the position of the workpiece 40, ensuring normal and stable production, and reducing production costs.
在本发明的一些实施例中，参考图1结合图3-图5，支架10可以包括：定位柱11和多个支撑条111。In some embodiments of the present invention, referring to FIG. 1 in conjunction with FIGS. 3-5, the bracket 10 may include a positioning post 11 and a plurality of support bars 111.
具体地，多个支撑条111呈射线状分布在定位柱11的外周，每个支撑条111的一端(如图1中的支撑条的内端)与定位柱11相连，另一端(如图1中的支撑条的外端)向外延伸。Specifically, a plurality of support bars 111 are radially distributed on the outer circumference of the positioning post 11, and one end of each support bar 111 (such as the inner end of the support bar in FIG. 1) is connected to the positioning post 11 and the other end (see FIG. 1). The outer end of the support strip in the middle extends outward.
每个定位销20均包括定位板21、位于定位板21上表面的定位凸起22和位于定位板21下表面的转轴23。其中，定位板21的下表面贴合于支架10的上表面。 Each of the positioning pins 20 includes a positioning plate 21, a positioning projection 22 on the upper surface of the positioning plate 21, and a rotating shaft 23 on the lower surface of the positioning plate 21. The lower surface of the positioning plate 21 is attached to the upper surface of the bracket 10.
如图5所示，工件40的下表面贴合于定位板21的上表面，且工件40的端面与定位凸起22的外表面接触。As shown in FIG. 5, the lower surface of the workpiece 40 is attached to the upper surface of the positioning plate 21, and the end surface of the workpiece 40 is in contact with the outer surface of the positioning projection 22.
有利地，定位凸起22的外表面为曲面。这样，定位销20在旋转过程中，放置在定位板21上的工件40与定位凸起22表面之间的摩擦力较小。由此，可以避免在改变工位位置时对工件40带来损伤。Advantageously, the outer surface of the locating projection 22 is a curved surface. Thus, during the rotation of the positioning pin 20, the friction between the workpiece 40 placed on the positioning plate 21 and the surface of the positioning projection 22 is small. Thereby, it is possible to avoid damage to the workpiece 40 when the position of the station is changed.
可选地，定位凸起22与定位板21同轴设置。由此，可以简化用于制造定位组件100的模具，易于定位组件100的生产加工。Optionally, the positioning protrusion 22 is disposed coaxially with the positioning plate 21. Thereby, the mold for manufacturing the positioning assembly 100 can be simplified, and the production process of the assembly 100 can be easily positioned.
有利地，转轴23一体形成在定位板21的下表面。由此，可以提高转轴23与定位板21之间的连接强度，且便于定位组件100的生产加工。Advantageously, the rotating shaft 23 is integrally formed on the lower surface of the positioning plate 21. Thereby, the connection strength between the rotating shaft 23 and the positioning plate 21 can be improved, and the production process of the positioning assembly 100 can be facilitated.
在本发明另一些实施例中，如图2所示，支架10可以为环形板，环形板包括：两个第一弧形板121、安装台122和两个第二弧形板123。In other embodiments of the present invention, as shown in FIG. 2, the bracket 10 may be an annular plate including: two first curved plates 121, a mounting table 122, and two second curved plates 123.
具体地，多个安装台122分别设在第一弧形板121的两端且向上延伸，定位销20设在安装台122的上端。第一弧形板121和第二弧形板123同心设置，第二弧形板123连接在相邻的两个安装台122之间。换言之，第一弧形板121和第二弧形板123在竖直方向处于不同高度，安装台122连接在第一弧形板121和第二弧形板123之间。Specifically, a plurality of mounting stages 122 are respectively disposed at two ends of the first curved plate 121 and extend upward, and the positioning pin 20 is disposed at an upper end of the mounting base 122. The first curved plate 121 and the second curved plate 123 are concentrically arranged, and the second curved plate 123 is connected between the adjacent two mounting stages 122. In other words, the first curved plate 121 and the second curved plate 123 are at different heights in the vertical direction, and the mounting table 122 is coupled between the first curved plate 121 and the second curved plate 123.
如图2所示，定位销20设在安装台122的内侧，且由于第一弧形板121和第二弧形板123具有高度差，工件40可以从第一弧形板121的上方放置或离开定位板21。从而使得定位组件100的结构设计更加合理。As shown in FIG. 2, the positioning pin 20 is disposed inside the mounting table 122, and since the first curved plate 121 and the second curved plate 123 have a height difference, the workpiece 40 may be placed from above the first curved plate 121 or Leaving the positioning plate 21. Thereby, the structural design of the positioning assembly 100 is made more reasonable.
可选地，在本发明的再一些实施例中，定位组件100还可以包括：紧固螺钉30。转轴23的下表面设有定位孔，紧固螺钉30穿设支架10的下表面伸入定位孔内。可以理解的是，当定位凸起22的水平位置调节到适当位置时，可以通过紧固螺钉30将定位组件100固定在支架10上，提高定位组件100的稳定性，防止定位组件100受到外力因素发生变动，从而保证整个生产正常稳定进行。Optionally, in still other embodiments of the present invention, the positioning assembly 100 may further include: a fastening screw 30. The lower surface of the rotating shaft 23 is provided with a positioning hole, and the fastening screw 30 extends through the lower surface of the bracket 10 into the positioning hole. It can be understood that when the horizontal position of the positioning protrusion 22 is adjusted to an appropriate position, the positioning assembly 100 can be fixed on the bracket 10 by the fastening screw 30, thereby improving the stability of the positioning assembly 100 and preventing the positioning assembly 100 from being subjected to an external force factor. Changes have occurred to ensure that the entire production is stable and stable.
在本发明的描述中，需要理解的是，术语“上”、“下”“、底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。In the description of the present invention, it is to be understood that the orientation or positional relationship of the terms "upper", "lower", "bottom", "inside", "outside", etc. is based on the orientation or positional relationship shown in the drawings. It is to be understood that the invention is not to be construed as a limitation of the invention.
在本发明中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本发明中的具体含义。 In the present invention, the terms "installation", "connected", "connected", "fixed" and the like shall be understood broadly, and may be either a fixed connection or a detachable connection, unless explicitly stated and defined otherwise. , or connected integrally; may be mechanical connection or electrical connection; may be directly connected, or may be indirectly connected through an intermediate medium, and may be internal communication between the two elements. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood on a case-by-case basis.
在本发明中，除非另有明确的规定和限定，第一特征在第二特征之“上”或之“下”可以包括第一和第二特征直接接触，也可以包括第一和第二特征不是直接接触而是通过它们之间的另外的特征接触。而且，第一特征在第二特征“之上”、“上方”和“上面”包括第一特征在第二特征正上方和斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”包括第一特征在第二特征正上方和斜上方，或仅仅表示第一特征水平高度小于第二特征。In the present invention, the first feature "on" or "under" the second feature may include direct contact of the first and second features, and may also include first and second features, unless otherwise specifically defined and defined. It is not in direct contact but through additional features between them. Moreover, the first feature "above", "above" and "above" the second feature includes the first feature directly above and above the second feature, or merely indicating that the first feature level is higher than the second feature. The first feature "below", "below" and "below" the second feature includes the first feature directly above and above the second feature, or merely the first feature level being less than the second feature.
在本说明书的描述中，参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施例或示例中。在本说明书中，对上述术语的示意性表述不一定指的是相同的实施例或示例。而且，描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of the present specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" and the like means a specific feature described in connection with the embodiment or example. A structure, material or feature is included in at least one embodiment or example of the invention. In the present specification, the schematic representation of the above terms does not necessarily mean the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples.
尽管上面已经示出和描述了本发明的实施例，可以理解的是，上述实施例是示例性的，不能理解为对本发明的限制，本领域的普通技术人员在不脱离本发明的原理和宗旨的情况下在本发明的范围内可以对上述实施例进行变化、修改、替换和变型。 Although the embodiments of the present invention have been shown and described, it is understood that the foregoing embodiments are illustrative and not restrictive Variations, modifications, alterations and variations of the above-described embodiments are possible within the scope of the invention.

Claims (10)

  1. 一种定位组件，其特征在于，包括：A positioning component, comprising:
    支架；support;
    多个定位销，多个所述定位销沿所述支架的周向方向间隔设置且可旋转地设在所述支架上，每个所述定位销包括：用于支承工件的定位板，所述定位板的上表面设有定位凸起，所述定位板的下表面贴合于所述支架的上表面且设有转轴，所述转轴的中心轴线与所述定位凸起的中心轴线不重合，通过旋转所述定位销可改变所述定位凸起之间的水平距离，从而对工件位置进行有效调节。a plurality of positioning pins, a plurality of the positioning pins are spaced apart in a circumferential direction of the bracket and rotatably disposed on the bracket, each of the positioning pins comprising: a positioning plate for supporting a workpiece, The upper surface of the positioning plate is provided with a positioning protrusion, the lower surface of the positioning plate is attached to the upper surface of the bracket and is provided with a rotating shaft, and the central axis of the rotating shaft does not coincide with the central axis of the positioning protrusion. The horizontal distance between the positioning projections can be changed by rotating the positioning pins to effectively adjust the position of the workpiece.
  2. 根据权利要求1所述的定位组件，其特征在于，所述定位凸起的外表面为曲面。The positioning assembly of claim 1 wherein the outer surface of the locating projection is a curved surface.
  3. 根据权利要求1所述的定位组件，其特征在于，所述定位凸起与所述定位板同轴设置。The positioning assembly according to claim 1, wherein the positioning protrusion is disposed coaxially with the positioning plate.
  4. 根据权利要求1所述的定位组件，其特征在于，所述转轴一体形成在所述定位板的下表面。The positioning assembly according to claim 1, wherein the rotating shaft is integrally formed on a lower surface of the positioning plate.
  5. 根据权利要求1所述的定位组件，其特征在于，所述支架包括：The positioning assembly of claim 1 wherein said bracket comprises:
    定位柱；Positioning column
    多个支撑条，多个所述支撑条呈射线状分布在所述定位柱的外周，每个所述支撑条的一端与所述定位柱相连，另一端向外延伸。a plurality of support strips, wherein the plurality of support strips are radially distributed on the outer circumference of the positioning post, one end of each of the support strips is connected to the positioning post, and the other end extends outward.
  6. 根据权利要求5所述的定位组件，其特征在于，多个所述支撑条等间距地分布在所述定位柱的外周。The positioning assembly according to claim 5, wherein a plurality of said support bars are equally spaced around an outer circumference of said positioning post.
  7. 根据权利要求6所述的定位组件，其特征在于，所述支撑条与所述定位柱一体成型。The positioning assembly of claim 6 wherein said support strip is integrally formed with said positioning post.
  8. 根据权利要求1所述的定位组件，其特征在于，所述支架为环形板，所述环形板包括：The positioning assembly of claim 1 wherein the bracket is an annular plate, the annular plate comprising:
    两个第一弧形板；Two first curved plates;
    多个安装台，多个所述安装台分别设在所述第一弧形板的两端且向上延伸，所述定位销设在所述安装台的上端；a plurality of mounting stations, wherein the plurality of mounting stations are respectively disposed at two ends of the first curved plate and extend upward, and the positioning pin is disposed at an upper end of the mounting platform;
    两个第二弧形板，所述第一弧形板和所述第二弧形板同心设置，所述第二弧形板连接在相邻的两个所述安装台之间。Two second curved plates, the first curved plate and the second curved plate are concentrically arranged, and the second curved plate is connected between two adjacent mounting stations.
  9. 根据权利要求8所述的定位组件，其特征在于，所述定位销设在所述安装台的内侧。The positioning assembly of claim 8 wherein said locating pin is disposed on an inner side of said mounting station.
  10. 根据权利要求1所述的定位组件，其特征在于，还包括：紧固螺钉，所述转轴的下表面设有定位孔，所述紧固螺钉穿设所述支架的下表面伸入所述定位孔内。 The positioning assembly according to claim 1, further comprising: a fastening screw, wherein a lower surface of the rotating shaft is provided with a positioning hole, and the fastening screw penetrates the lower surface of the bracket to extend into the positioning Inside the hole.
PCT/CN2017/098863 2016-09-27 2017-08-24 Positioning assembly WO2018059166A1 (en)

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CN112440220A (en) * 2019-08-27 2021-03-05 北京宝沃汽车有限公司 Locating pin mounting seat
CN112820689B (en) * 2021-01-06 2022-10-18 长鑫存储技术有限公司 Floating pin, wafer bearing device and deposition equipment
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