WO2018005155A1 - Wet processing system and method of operating - Google Patents
Wet processing system and method of operating Download PDFInfo
- Publication number
- WO2018005155A1 WO2018005155A1 PCT/US2017/038192 US2017038192W WO2018005155A1 WO 2018005155 A1 WO2018005155 A1 WO 2018005155A1 US 2017038192 W US2017038192 W US 2017038192W WO 2018005155 A1 WO2018005155 A1 WO 2018005155A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- workpiece
- electrochemical deposition
- flexible
- module
- deposition system
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/16—Apparatus for electrolytic coating of small objects in bulk
- C25D17/28—Apparatus for electrolytic coating of small objects in bulk with means for moving the objects individually through the apparatus during treatment
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/002—Cell separation, e.g. membranes, diaphragms
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/06—Suspending or supporting devices for articles to be coated
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/10—Agitating of electrolytes; Moving of racks
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/12—Process control or regulation
- C25D21/14—Controlled addition of electrolyte components
Definitions
- This invention relates to methods and systems for electro-chemical deposition including electroplating of various workpieces, such as semiconductor substrates.
- Electrochemical deposition systems or workpiece surface wet process conditioning systems, are well known for both wafer type geometries (e.g.,
- Electrochemical deposition is used as a manufacturing technique for the application of films to various structures and surfaces, such as to semiconductor wafers and silicon work pieces, or substrates.
- Such films can include metal and metal alloys, such as tin, silver, nickel, copper, or other metal layers, or alloys thereof.
- Electrochemical deposition involves positioning a substrate within a solution that includes metal ions, and then applying an electrical current to cause metal ions from the solution to be deposited on the substrate.
- a plating solution can include one or more metal ion types, acids, chelating agents, complexing agents, and any of several other types of additives that assist with plating a particular metal. Such additives can help enable adhesion and uniform plating, and reduce film stress, among other benefits. As plating occurs, metal from the plating solution is consumed and thus needs to be replaced to continue electrochemical deposition operations,
- panel processing In panel processing, conventional systems use a continuous or serial process conveyor type of handling system with panel orientation either horizontal or vertical. As indicated above, panel processing systems, in part as a result of their conveyor systems, suffer from poor process uniformity and particle generation. More generally, these systems suffer from poor environment control. Thus, the inventors have recognized there is a need for improved panel handling and deposition uniformity.
- Embodiments relate to methods and systems for electrochemical deposition including electroplating of various workpieces, such as semiconductor substrates and panels.
- An important feature of systems used for electrochemical deposition is their ability to produce films with uniform and repeatabie characteristics such as film thickness, composition, and profile relative to an underlying workpiece profile.
- Electrochemical deposition systems can use a primary electrolyte (process electrolyte) that requires replenishment upon depletion.
- process electrolyte process electrolyte
- replenishment of a metal cation solution may be required upon depletion.
- replenishment cannot be performed in-situ, the
- replenishment procedure may be expensive as a function of the application, and may require significant down time of the electrochemical deposition tool or sub module for service and process re-qualification, which adversely affects the cost of ownership of the deposition tool.
- electrochemical deposition apparatus that provides robust workpiece handling, improved environment control, a simplified electrolyte circulation system, including improved chemical management for more reliable and uniform plating, as well as short maintenance times for greater tool availability.
- an electrochemical deposition system having two or more electrochemical deposition modules arranged on a common platform and configured for depositing one or more metals on a substrate.
- Each electrochemical deposition module includes an anode compartment configured to contain a volume of ano!yte fluid, a cathode compartment configured to contain a volume of cathoiyte fluid, and a membrane separating the anode
- Each electrochemical deposition module further includes a loading port configured to receive a set of flexible vvorkpieces, each flexible workpiece defining through holes to be filled with metal, and a loader module configured to receive a flexible workpiece from the loading port and position the flexible workpiece in a workpiece holder while holding the flexible workpiece using an air cushion on each opposing planar surface of the flexible workpiece.
- each electrochemical deposition module includes a transportation mechanism configured to transport flexible vvorkpieces, via workpiece holders, from the loader module to a given electrochemical deposition module and lower a given workpiece into the given electrochemical deposition module.
- An electrical system is configured to apply an electrical current to each opposing planar surface of the flexible workpiece when held within the given electrochemical deposition module such that each opposing planar surface is plated with metal and the through holes are filled with metal.
- An unloader module is configured to remove the flexible workpiece from the workpiece holder and convey the flexible workpiece to an unloading port configured to receive the set of flexible workpieces.
- FIG. 1 illustrates a schematic representation of an electrochemical deposition system according to an embodiment.
- FIGS. 2A and 2B provide views of an electrochemical deposition module according to another embodiment.
- FIG. 3 provides a cross-sectional view of an electrochemical deposition module according to another embodiment.
- FIG. 4 provides a perspective view of an electrochemical deposition system according to yet another embodiment.
- Techniques disclosed herein include an electrochemical deposition apparatus that provides a robust workpiece handling system, a simplified circulation system, an improved chemical management system for more reliable and uniform plating, as well as short maintenance times for greater too! availability
- FIG. 1 illustrates a schematic representation of an electrochemical deposition system 100 according to an embodiment.
- the electrochemical deposition system 100 includes two or more processing modules, to be described below, such as electrochemical deposition modules, arranged on a common platform and configured for depositing one or more metals on a workpiece.
- Each processing module e.g., each
- electrochemical deposition module includes an anode compartment configured to contain a volume of anolyte fluid, a cathode compartment configured to contain a volume of catholyte fluid, and a membrane separating the anode compartment from the cathode compartment.
- the electrochemical deposition system 100 has a loading port to receive a set of workpieces, including a loader module 1 10 for receiving the workpieces that enter electrochemical deposition system 100 through load/input stage 1 12 and loading each received workpiece into a workpiece holder 125, such as a flexible panel holder (PH).
- a workpiece holder 125 such as a flexible panel holder (PH).
- Each workpiece may include a flexible panel, e.g., a flexible, rectangular panel of various dimensions.
- the workpiece may include one or more blind holes, or one or more through-holes to be filled with material, such as metal.
- the filling of the one or more holes can include one-side deposition, i.e., deposition from one side of the workpiece, or two-sided deposition, i.e., deposition from both sides of the workpiece (e.g., in the case where the hole is a through-hole).
- the loader may use an apparatus to execute substantially contact-free handling of the workpiece by applying an air cushion against each opposing planar surface of the flexible workpiece during workpiece movement and loading.
- the workpiece holder 125 can include a gripable header member separating first and second leg members, wherein the workpiece holder is configured to hold opposing edges of the flexible workpiece between the first and second leg members via a clamping mechanism that optionally applies electrical contacts to the opposing planar surfaces of the flexible workpiece with the electrical contacts surrounded by an elastomeric seal.
- the header member can also provide tension to the flexible workpiece when held by the workpiece holder 125.
- the electrochemical deposition system 100 includes a transportation mechanism configured to transport flexible workpieces, via workpiece holder 125, from the loader module 1 10 to a given processing module, e.g., electrochemical deposition module, and lower a given workpiece into the given processing module.
- a given processing module e.g., electrochemical deposition module
- the workpiece holder 125 designated for processing, it can proceed along a process path 1 15 (see PH process path in FIG. 1 ) to be pre-processed, as needed, in one or more pre- processing modules 120; processed in one or more processing modules 130, 132, 134, 136, 138; and post-processed, as needed, in one or more post-processing modules 140.
- Pre-processing may include, but not be limited to, cleaning and/or wetting the workpiece to be processed. Processing may include, but not be limited to, depositing material, such as metal, onto the workpiece. And, post-processing may include, but not be limited to, rinsing and/or drying the workpiece,
- the electrochemical deposition system 100 further includes an unloader module configured to remove the flexible workpiece from the workpiece holder and convey the flexible workpiece to an unloading port configured to receive the set of flexible workpieces.
- an unloader module configured to remove the flexible workpiece from the workpiece holder and convey the flexible workpiece to an unloading port configured to receive the set of flexible workpieces.
- the workpiece holder 125 carrying a processed workpiece, can proceed to an unloader module 150, wherein each workpiece is unloaded and transferred to an unload/output stage 152 for exiting electrochemical deposition system 100.
- the workpiece holder 125 can return to the loader module 1 10 along return path 155 (see PH return path in FIG. 1 ) to receive another workpiece.
- return path 155 see PH return path in FIG. 1
- multiple workpiece holders can be used, with some workpiece holders held in a storage buffer.
- the electrochemical deposition system 100 further includes a chemical management system 160 for managing processing fluid in the one or more
- the electrochemical deposition system 100 includes an electrical management system 170 for controlling the operability of electrochemical deposition system 100.
- Electrical management may include, but not be limited to, scheduling, coordinating, monitoring, adjusting, communicating, etc.
- the electrical management system 170 can transmit and receive signals in accordance with computer encoded instructions to control workpiece movement through
- the electrochemical deposition system 100 or control chemical properties, such as chemical composition, temperature, flow rate(s), etc., of the plural modules 120, 130, 132, 134, 136, 138, 140.
- the electrical management system 170 can be configured to apply an electrical current to one or both opposing planar surfaces of the flexible workpiece when held within the given electrochemical deposition module, !n doing so, one or both opposing surfaces can be plated with metal and blind holes and/or through-holes are filled with metal.
- FIG. 2A a view of an electrochemical deposition module having plural ECD cells is provided according to another embodiment.
- FIG. 2A provides a top view of an anolyte reservoir 230 configured to contain a volume of anolyte fluid 232, plural cathode compartments configured to contain a volume of cathoiyte fluid, and a membrane separating the anolyte fluid 232 from the plural cathode compartments 200.
- the anolyte reservoir 230 includes an anolyte reservoir, containing the anolyte fluid 232, within which the plural cathode
- the anolyte reservoir 230 may include an anolyte supply and storage reservoir 262, wherein anolyte can be recirculated, replenished, and/or reconditioned, and then exchanged with the anolyte reservoir 230 using anolyte pumping system 264. Furthermore, the anolyte reservoir 230 may include a cathoiyte supply and storage reservoir 266, wherein cathoiyte can be recirculated, replenished, and/or reconditioned, and then exchanged with the plural cathode compartments 200 using cathoiyte pumping system 268.
- Chemical management system 280 can interface with the anolyte and catholyte supply and storage reservoirs 262, 266, and among other things, manage fluid levels, chemical composition, chemical quality, chemical temperature, chemical dosing, etc.
- the chemical management system 260 may rejuvenate the anolyte and/or catholyte solution, including adding or replacing water, acid, anion solution, cation solution, chelating agents, complexing agents, leveling agents, accelerating or decelerating agents, etc.
- workpiece W can include a flexible, rectangular substrate having dimensions ranging from approximately 50 cm by 50 cm to 100 cm by 100 cm in size. Consequently, the fluid depth in the anolyte reservoir 230 may range from 90 cm to 150 cm deep, and the width of the anolyte reservoir 230 may range from 90 cm to 150 cm.
- Each ECD module may be designed comparatively narrow, for example, the width may be designed to be less than 20 cm anode-to-anode, or anode-to-cathode. Consequently, plural cathode comparts 200 (ECD modules) can be arranged within an anolyte reservoir ranging up to 120 cm in length. Immersion or partial immersion of plural cathode
- compartments 200 within the anolyte reservoir 230 provides an efficient utilization of space. And thus, one advantage, among others, of this embodiment is a single container of anolyte fluid 232 with a simplified chemical and fluid management system serving plural ECD modules in an economical arrangement, conserving expenditure for equipment, chemistry, and factory footprint.
- F!G. 2B provides a top view of cathode compartment 200 positioned between opposing anode assemblies 240, 241.
- a workpiece holder 215 containing a workpiece W is positioned within a frame 210 which advantageously and repeatably positions the workpiece holder 215 precisely within plus or minus 0.1 to 1 .0 mm, preferably within plus or minus 0.5 mm, with respect to other important elements of the ECD module which influence the uniformity of the electric field and fluid flow field at the surface of the workpiece W.
- the cathode compartment 200 can include electric field shaping elements 201 , 204 positioned between approximately 3 and 10 mm of the surfaces of the workpiece W, preferably 4 mm from the surfaces of the workpiece W.
- the cathode compartment 200 can further include fluid agitating elements 202, 205 positioned proximate the surfaces of the workpiece W, preferably within 10 mm of the surfaces of the workpiece W.
- Ion-exchange membranes 203, 206 define the boundaries between the cathode compartment 200 and the anode compartment containing the opposing anode assemblies 240, 241 , and provide separation between the anolyte fluid 232 within the anode compartment and catholyte 220 in the cathode compartment 200.
- One benefit is the compact geometry provided by defining the boundaries between the anolyte fluid 232 and the catholyte 220, wherein during operation the fluid pressure of anolyte fluid 232 and catholyte 220 are balanced across the flexible, ion-exchange membrane so that it is not necessary to incorporate an extensive wall structure to contain the hydrostatic pressure of the catholyte for each workpiece W.
- Each opposing anode assembly 240, 241 can include a multi-zone anode 242, e.g., anodes arranged as rings in a radial direction, or anodes arranged on a grid in orthogonal directions, for example.
- a multi-zone anode 242 e.g., anodes arranged as rings in a radial direction, or anodes arranged on a grid in orthogonal directions, for example.
- two opposing anode assemblies 240, 241 are shown opposing the cathode compartment.
- a single anode assembly may face the cathode compartment.
- F!G. 3 provides a detailed, cross-sectional view of an ECD module according to an embodiment.
- Workpiece holder 315 positions workpiece W between electric field shaping elements 330, fluid agitating elements 310, ion-exchange membranes 325 held by support structure 320, and anode assemblies 340 holding anodes 342.
- the electric field shaping elements 330 extend proximate the exposed surfaces of the workpiece W, and are arranged to improve uniformity of the deposition process.
- the fluid agitating elements 310 extend proximate the exposed surfaces of the workpiece W, and are arranged to increase fluid shear and enhance mass, momentum, and thermal transport near the exposed surfaces of the workpiece W.
- FIG. 4 provides a perspective view of an electrochemical deposition system according to yet another embodiment.
- the electrochemical deposition system 500 includes loader module 510 and unloader module 550 with plural processing modules 520, 530, 540 disposed there between.
- Processing modules 520 may include pre-processing modules such as pre-rinse modules.
- Processing modules 530 may include electrochemical deposition modules.
- processing modules 540 may include post-processing modules such as rinse or drying modules. While the loader module 510 and the unloader module 550 are shown to be at distal ends of the electrochemical deposition system 500, these loading and unloading modules may be arranged proximate the same end of the overall system.
- Workpiece W can be loaded into workpiece holder 525, translated via workpiece transfer system 560, and oriented for positioning within the plural processing modules 520, 530, 540.
- an electrochemical deposition system can be created that uses plating solution efficiently, and has a relatively small foot print compared to conventional deposition systems.
- each electrochemical deposition module can be configured to hold less than about thirty liters of plating solution.
- the common platform can includes less than about 16 electrochemical deposition modules, and can be configured to plate 100 flexible workpieces per hour.
- the common platform can cover a floor space of less than about 250 square feet.
- the substrate may include any material portion or structure of a device, particularly a semiconductor or other electronics device, and may, for example, be a base substrate structure, such as a semiconductor wafer, reticle, or a layer on or overlying a base substrate structure such as a thin film.
- a base substrate structure such as a semiconductor wafer, reticle, or a layer on or overlying a base substrate structure such as a thin film.
- substrate is not limited to any particular base structure, underlying layer or overlying layer, patterned or un-patterned, but rather, is contemplated to include any such layer or base structure, and any combination of layers and/or base structures.
- the description may reference particular types of substrates, but this is for illustrative purposes only.
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- Chemical & Material Sciences (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Automation & Control Theory (AREA)
- Electroplating Methods And Accessories (AREA)
- Electrodes Of Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE112017003189.3T DE112017003189B4 (en) | 2016-06-27 | 2017-06-19 | Electrochemical deposition system |
CN201780040080.5A CN109715866A (en) | 2016-06-27 | 2017-06-19 | Wet treatment system and its operating method |
KR1020197002549A KR20190018530A (en) | 2016-06-27 | 2017-06-19 | Wet processing system and method of operation |
JP2018569093A JP2019520484A (en) | 2016-06-27 | 2017-06-19 | Wet processing system and operating method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/194,086 US20170370017A1 (en) | 2016-06-27 | 2016-06-27 | Wet processing system and method of operating |
US15/194,086 | 2016-06-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2018005155A1 true WO2018005155A1 (en) | 2018-01-04 |
Family
ID=60675354
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2017/038192 WO2018005155A1 (en) | 2016-06-27 | 2017-06-19 | Wet processing system and method of operating |
Country Status (7)
Country | Link |
---|---|
US (1) | US20170370017A1 (en) |
JP (1) | JP2019520484A (en) |
KR (1) | KR20190018530A (en) |
CN (1) | CN109715866A (en) |
DE (1) | DE112017003189B4 (en) |
TW (1) | TWI649460B (en) |
WO (1) | WO2018005155A1 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10074554B2 (en) | 2016-06-27 | 2018-09-11 | Tel Nexx, Inc. | Workpiece loader for a wet processing system |
US10283396B2 (en) | 2016-06-27 | 2019-05-07 | Asm Nexx, Inc. | Workpiece holder for a wet processing system |
US11608563B2 (en) * | 2019-07-19 | 2023-03-21 | Asmpt Nexx, Inc. | Electrochemical deposition systems |
CN110499528B (en) * | 2019-09-26 | 2021-04-23 | 浙江君悦标准件有限公司 | Fastener electroplating production line |
EP3825445A1 (en) * | 2019-11-22 | 2021-05-26 | Semsysco GmbH | Distribution body for a process fluid for chemical and/or electrolytic surface treatment of a substrate |
US11542626B2 (en) * | 2020-10-08 | 2023-01-03 | Honeywell International Inc. | Systems and methods for enclosed electroplating chambers |
JP7093478B1 (en) | 2021-06-18 | 2022-06-29 | 株式会社荏原製作所 | Plating equipment and plating method |
CN113882004B (en) * | 2021-10-28 | 2023-04-21 | 京东方科技集团股份有限公司 | Substrate carrier and electrochemical deposition apparatus |
US11942341B2 (en) | 2022-01-26 | 2024-03-26 | Asmpt Nexx, Inc. | Adaptive focusing and transport system for electroplating |
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US20080245669A1 (en) * | 2000-03-17 | 2008-10-09 | Junichiro Yoshioka | Plating apparatus and method |
US20120298502A1 (en) * | 2011-04-14 | 2012-11-29 | Demetrius Papapanayiotou | Electro chemical deposition and replenishment apparatus |
US20130011222A1 (en) * | 2011-07-06 | 2013-01-10 | Nexx Systems, Inc. | Substrate loader and unloader |
WO2015002942A1 (en) * | 2013-07-03 | 2015-01-08 | Tel Nexx, Inc. | Electrochemical deposition apparatus and methods for controlling the chemistry therein |
US20150129418A1 (en) * | 2013-11-11 | 2015-05-14 | Tel Nexx, Inc. | Electrochemical deposition apparatus with remote catholyte fluid management |
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US3847761A (en) * | 1972-04-06 | 1974-11-12 | Aluminum Co Of America | Bath control |
TW405158B (en) * | 1997-09-17 | 2000-09-11 | Ebara Corp | Plating apparatus for semiconductor wafer processing |
EP0989402A1 (en) * | 1998-09-28 | 2000-03-29 | Texaco Development Corporation | Field test apparatus and method for analysis of coolants and heat-exchange fluids |
US6557237B1 (en) * | 1999-04-08 | 2003-05-06 | Applied Materials, Inc. | Removable modular cell for electro-chemical plating and method |
US6478874B1 (en) * | 1999-08-06 | 2002-11-12 | Engelhard Corporation | System for catalytic coating of a substrate |
US20040007508A1 (en) * | 1999-12-04 | 2004-01-15 | Schulte David L. | Screen assembly for vibratory separator |
JP3918942B2 (en) * | 2001-10-10 | 2007-05-23 | 日産化学工業株式会社 | Antireflection film forming composition for lithography |
JP2007321242A (en) * | 2006-06-05 | 2007-12-13 | Marunaka Kogyo Kk | Clip type workpiece hanger in electroplating device |
JP4333752B2 (en) * | 2007-02-19 | 2009-09-16 | トヨタ自動車株式会社 | Electrode active material and method for producing the same |
JP5237924B2 (en) * | 2008-12-10 | 2013-07-17 | ノベルス・システムズ・インコーポレーテッド | Base plate and electroplating apparatus |
US20130001122A1 (en) * | 2010-11-29 | 2013-01-03 | Nader Nowzari | Combination consumer package with secondary item compartment |
EP2746433B1 (en) * | 2012-12-20 | 2016-07-20 | ATOTECH Deutschland GmbH | Device for vertical galvanic metal, preferably copper, deposition on a substrate and a container suitable for receiving such a device |
-
2016
- 2016-06-27 US US15/194,086 patent/US20170370017A1/en not_active Abandoned
-
2017
- 2017-06-19 WO PCT/US2017/038192 patent/WO2018005155A1/en active Application Filing
- 2017-06-19 JP JP2018569093A patent/JP2019520484A/en active Pending
- 2017-06-19 CN CN201780040080.5A patent/CN109715866A/en not_active Withdrawn
- 2017-06-19 KR KR1020197002549A patent/KR20190018530A/en not_active Application Discontinuation
- 2017-06-19 DE DE112017003189.3T patent/DE112017003189B4/en active Active
- 2017-06-22 TW TW106120818A patent/TWI649460B/en not_active IP Right Cessation
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US20080245669A1 (en) * | 2000-03-17 | 2008-10-09 | Junichiro Yoshioka | Plating apparatus and method |
US20120298502A1 (en) * | 2011-04-14 | 2012-11-29 | Demetrius Papapanayiotou | Electro chemical deposition and replenishment apparatus |
US20130011222A1 (en) * | 2011-07-06 | 2013-01-10 | Nexx Systems, Inc. | Substrate loader and unloader |
WO2015002942A1 (en) * | 2013-07-03 | 2015-01-08 | Tel Nexx, Inc. | Electrochemical deposition apparatus and methods for controlling the chemistry therein |
US20150129418A1 (en) * | 2013-11-11 | 2015-05-14 | Tel Nexx, Inc. | Electrochemical deposition apparatus with remote catholyte fluid management |
Also Published As
Publication number | Publication date |
---|---|
TWI649460B (en) | 2019-02-01 |
DE112017003189T5 (en) | 2019-04-25 |
KR20190018530A (en) | 2019-02-22 |
CN109715866A (en) | 2019-05-03 |
US20170370017A1 (en) | 2017-12-28 |
JP2019520484A (en) | 2019-07-18 |
TW201812116A (en) | 2018-04-01 |
DE112017003189B4 (en) | 2020-12-03 |
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