WO2018000516A1 - 一种单驱动刚柔耦合精密运动平台及其实现方法及应用 - Google Patents

一种单驱动刚柔耦合精密运动平台及其实现方法及应用 Download PDF

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WO2018000516A1
WO2018000516A1 PCT/CN2016/093259 CN2016093259W WO2018000516A1 WO 2018000516 A1 WO2018000516 A1 WO 2018000516A1 CN 2016093259 W CN2016093259 W CN 2016093259W WO 2018000516 A1 WO2018000516 A1 WO 2018000516A1
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Prior art keywords
rigid
motion platform
platform
flexible
drive
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PCT/CN2016/093259
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English (en)
French (fr)
Inventor
杨志军
白有盾
陈新
陈超然
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广东工业大学
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Application filed by 广东工业大学 filed Critical 广东工业大学
Priority to KR1020187009622A priority Critical patent/KR101910522B1/ko
Priority to GB1808926.8A priority patent/GB2561990B/en
Priority to DE112016003512.8T priority patent/DE112016003512T5/de
Priority to JP2018528289A priority patent/JP6476351B1/ja
Priority to US15/844,571 priority patent/US10661399B2/en
Publication of WO2018000516A1 publication Critical patent/WO2018000516A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00126—Static structures not provided for in groups B81C1/00031 - B81C1/00119
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/58—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2210/00—Machine tools incorporating a specific component
    • B23Q2210/002—Flexures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/28—Electric drives

Definitions

  • the invention relates to a motor driving technology, and more particularly to a single-drive rigid-flexible coupling precision motion platform, an implementation method thereof and an application thereof.
  • High-speed precision motion platforms are widely used in semiconductor packaging and other fields. Uncertain changes in surface roughness between moving pairs in high-speed precision motion platforms can lead to uncertain changes in the magnitude of frictional resistance.
  • the speed of the motion platform is relatively low, and the amplitude fluctuation of the above-mentioned frictional resistance is likely to cause a "crawling" phenomenon on the motion platform.
  • the driver Under the action of the closed-loop control system, the driver will overcome the frictional resistance by increasing the driving force and compensate the positioning error of the motion platform. During the above compensation process, the motion platform will experience frequent "stationary ⁇ motion" state switching.
  • the low-friction motion pair such as air bearing or magnetic suspension bearing has a high implementation cost, which limits its scope of use.
  • the flexible hinge As a kind of external frictionless motion pair, the flexible hinge relies on elastic deformation to achieve continuous high-precision motion. Due to the limitation of working principle, the flexible hinge motion pair is mainly suitable for the movement of a small stroke. In large-stroke sports, flexible hinges are often used in conjunction with frictional motion pairs to form a macro-micro-composite motion platform to achieve high-precision, high-precision motion, which in turn compensates for large-scale motion.
  • Patent 201410696217.0 proposes a one-dimensional platform for linear motor common stator double drive macro-micro integrated high-speed precision motion.
  • the macro-motion outer frame and the micro-motion platform of the proposed macro-micro motion platform are respectively connected with two sets of linear motor movers.
  • the macro-motion outer frame and the micro-motion platform are connected by a flexible hinge, and the macro-motion outer frame realizes macro-motion macro motion under the driving of the corresponding linear motor mover, and the micro-motion platform is in the corresponding linear motor mover
  • the drive is dynamically compensated for the motion deviation of the above macro motion.
  • the above-mentioned macro-micro composite motion principle is used to realize high-precision motion with large stroke.
  • the control system needs to consider the switching control of macro motion and micro motion, and the control system is more complicated; (3) the mass of the moving part in the platform is large, which is not conducive to use in the occasion of high inertia such as high acceleration; 4) The feedback control system of the macro-motion platform still needs to consider the influence of the friction state in the positioning stage to ensure that the displacement deviation of the macro-motion platform during the positioning process is smaller than the limit deformation range of the flexible hinge motion pair.
  • the object of the present invention is to realize simplified control and structural optimization of a motor drive platform.
  • the present invention provides a single-drive rigid-flexible coupled precision motion platform, and an implementation method and application thereof.
  • the invention provides a single-drive rigid-flexible coupled precision motion platform, which comprises a base, a linear guide, a rigid-flexible coupled motion platform, a linear drive and a displacement sensor, wherein the rigid-flexible coupling platform comprises a rigid frame, a flexible hinge and a core motion platform;
  • the core motion platform of the rigid-flexible coupling platform is coupled to the rigid frame by a flexible hinge;
  • the core motion platform of the rigid-flexible coupling platform is connected to a linear drive, and the rigid frame is connected to the linear guide fixed to the base through a rail slider, and the core motion platform is operated by the linear drive
  • the displacement sensor is coupled to the core motion platform for measuring displacement of the core motion platform in the direction of motion.
  • the linear actuator is a voice coil motor or a linear motor.
  • a limit device and a damper are disposed between the rigid frame of the rigid-flexible coupling platform and the core motion platform.
  • the flexible hinge between the core motion platform of the rigid-flexible coupling platform and the rigid frame is symmetrically arranged.
  • the rigid-flexible coupling motion platform is manufactured in one piece.
  • the flexible hinge is a straight beam type or a slit type flexible hinge.
  • the invention also provides a method for realizing a single-drive rigid-flexible coupled precision motion platform.
  • the method is implemented by using the single-drive rigid-flexible coupled precision motion platform described above, comprising the following steps:
  • the linear drive directly drives the core motion platform.
  • the core motion platform When the driving force fails to statically rub the rigid frame of the customer service, the core motion platform generates a slight displacement through the elastic deformation of the flexible hinge to realize precise micro-feeding;
  • the invention also provides an application of a single-drive rigid-flexible coupled precision motion platform, which is applied to a large-stroke precision machining device, and adopts the above-mentioned single-drive rigid-flexible coupled precision motion platform as Motor drive platform.
  • the present invention also provides an application implementation method of a single-drive rigid-flexible coupled precision motion platform.
  • the method is applied to a large-stroke precision machining device, and the motor drive is realized by the above-mentioned single-drive rigid-flexible coupled precision motion platform implementation method.
  • the frictionless flexible hinge motion pair is used to realize high-precision continuous change displacement, which avoids the displacement “jitter” caused by sudden change of acceleration caused by the switching of the motion pair friction state under low speed conditions.
  • the rigid-flexible motion platform design is adopted.
  • the flexible hinge can actively adapt to the frictional change of the guide rail pair by its own elastic deformation, avoiding the switching of the motion pair friction state.
  • the effect of “crawling” on continuous displacement positioning is conducive to achieving higher positioning accuracy.
  • the motion platform adopts a single-drive closed-loop control system.
  • the drivers and sensors used are connected to the core motion platform.
  • the control system has simple design and higher reliability.
  • the sports platform adopts a relatively compact design, which can achieve smaller motion quality than the macro-micro composite motion platform, and is more conducive to applications in high acceleration and other occasions.
  • FIG. 1 is a schematic view showing the working principle of the rigid-flexible coupling motion platform of the present invention
  • FIG. 2 is a schematic view of Embodiment A of the present invention.
  • Figure 3 is a partially cutaway enlarged plan view showing an embodiment A of the present invention.
  • Figure 4 is a front cross-sectional view and a partial enlarged view of Embodiment A of the present invention.
  • FIG. 5 is a schematic view of Embodiment B of the present invention.
  • Figure 6 is a partially cutaway enlarged plan view showing an embodiment B of the present invention.
  • Figure 7 is a front cross-sectional view and a partial enlarged view of Embodiment B of the present invention.
  • Figure 8 is a schematic view of Embodiment C of the present invention.
  • Figure 9 is a partially cutaway enlarged plan view showing an embodiment C of the present invention.
  • Figure 10 is a graph of the 1um precision micro-feed experimental data of the present invention.
  • Figure 11 is a graph showing the data of the rapid positioning experiment of 100 mm of the present invention.
  • Linear guide 1 rigid frame 201, core motion platform 202, flexible hinge 203, damper 3;
  • Cross roller linear guide C1 motion platform rigid frame C201, core motion platform C202, flexible hinge C203, mover connector C301, base C4, crash block C6, voice coil motor mover C501, voice coil motor stator C502, Grating displacement sensor C7, damping device C8.
  • the motion platform is mainly composed of a base A4, a linear guide A101, a guide rail slider A102, a rigid frame A201, a core motion platform A202, a flexible hinge A203, a grating displacement sensor A6, and a linear motor driver.
  • the rigid frame A201 and the core motion platform A202 are connected by a flexible hinge A203, and the rigid frame A201 is connected to the base A4 by a linear guide motion pair.
  • the linear motor driver is composed of a linear motor mover A501 and a linear motor stator A502.
  • the linear motor mover A501 is connected to the core motion platform A202, and the linear motor mover A501 can apply a driving force to the core motion platform A202 under the action of electromagnetic force.
  • the driving force can elastically deform the flexible hinge A203 and thereby cause the core motion platform A202 to generate a linear displacement along the length of the guide rail.
  • the elastic deformation reaction force of the flexible hinge A203 can be used to overcome the friction between the moving pairs of the linear guides connected to the rigid frame A201, when the elastic deformation of the flexible hinge A203 is greater than the movement between the linear guides When the frictional force is equal to the resistance, the rigid frame A201 will be changed from the stationary state to the moving state.
  • the displacement of the core motion platform A202 can be divided into two cases: a. when the elastic deformation force of the flexible hinge A203 is less than the static friction force of the motion pair, the displacement of the core motion platform A202 is the flexible hinge The elastic deformation amount of the A203 motion pair; b. When the elastic deformation force of the flexible hinge A203 is greater than the static friction force of the motion pair, the displacement of the core motion platform (A202) is the elasticity of the flexible hinge A203 The superposition of the amount of deformation and the rigid displacement of the rigid frame A201.
  • the difference between the static friction coefficient and the dynamic friction coefficient of the linear guide motion causes a sudden change in resistance, causing a rigid impact on the motion platform, and causes The friction of the sports pair "crawls."
  • the flexible hinge A203 can actively adapt to the sudden change of the frictional resistance caused by the switching of the friction state of the motion pair by the elastic deformation of the self, and alleviate the rigid impact of the sudden change of the frictional resistance on the core motion platform A202.
  • the core motion platform A202 can rely on the elastic deformation of the flexible hinge A203 to achieve continuous displacement change, and avoid the influence of the friction "crawling" condition on the motion positioning accuracy.
  • the grating displacement sensor A6 is connected to the core motion platform A202, and the displacement of the core motion platform A202 in any case can be measured in real time.
  • the displacement measurement of the grating displacement sensor A6 can be used as a feedback link to form a closed-loop control system with a linear motor driver or the like to realize high-precision motion positioning of the core motion platform A202.
  • the linear motor driver acts on the flexible hinge A203 by the core motion platform A202 to easily cause the deformation amount of the flexible hinge A203 to exceed the limit elastic deformation amount.
  • the core motion platform A202 will come into contact with the rigid frame A201 and constitute an integral rigid motion platform.
  • a damping device A3 is disposed between the core motion platform A202 and the rigid frame A201 for mitigating the contact impact force of the core motion platform A202 with the rigid frame A201.
  • a linear bearing unit is disposed between the rigid frame A201 and the core motion platform A202.
  • an optical axis A702 is disposed between the two supporting ends of the rigid frame A201, and a linear bearing bushing A701 is mounted on the core moving platform A202.
  • the degree of freedom of movement of the linear bearing bushing A701 is limited to the longitudinal direction of the optical axis A702.
  • the optical axis A702 mounted on the rigid frame A201 and the linear bearing bushing A701 mounted on the core moving platform A202 together form a stiffness enhancing unit for improving the load carrying capacity of the core moving platform A202.
  • the motion platform is mainly composed of a base B4, a linear guide B101, a guide rail slider B102, a rigid frame B201, a core motion platform B202, a flexible hinge B203, a grating displacement sensor B6, and a linear motor driver.
  • the rigid frame B201 and the core motion platform B202 are connected by a movable hinge B203, and the rigid frame B201 is connected to the base B4 through a linear guide motion pair.
  • the linear motor driver is composed of a linear motor mover B501 and a linear motor stator B502.
  • the linear motor mover B501 is connected to the core motion platform B202, and the linear motor mover B501 can apply a driving force to the core motion platform B202 under the action of electromagnetic force.
  • a damping device B3 is disposed between the core motion platform B202 and the rigid frame B201 for mitigating the The core motion platform B202 will have an impact force with the rigid frame B201.
  • the main change of Embodiment B is to further improve the stiffness enhancement unit design employed in Example A to improve the load carrying capacity of the core motion platform.
  • the rigid frame B201 is provided with a magnetic block II B702, and the core moving platform B202 is provided with a magnetic block I B701.
  • the magnetic block II B702 is always located in the middle of the magnetic block I B701 during the movement of the platform.
  • the magnetic block II B702 and the upper surface of the magnetic block I B701 have the same magnetic pole polarity, and the magnetic block II B702 and the lower surface of the magnetic block I B701 also have the same magnetic pole polarity.
  • the magnetic block II B702 constrains the magnetic repulsion caused by the magnetic block I B701 between the magnetic blocks II B702, and further improves the carrying capacity of the core moving platform B202.
  • the magnetic block II B702 and the magnetic block I B701 together form a non-contact stiffness enhancement unit.
  • the motion platform is mainly composed of a base C401, a cross roller linear guide C1, a rigid frame C201, a core motion platform C202, a flexible hinge C203, a grating displacement sensor C7, and a voice coil motor.
  • the rigid frame C201 and the core motion platform C202 are connected by a flexible hinge C203 motion pair, and the rigid frame C201 is connected to the base C401 through a linear guide motion pair.
  • the voice coil motor driver is composed of a voice coil motor mover C501 and a straight voice coil motor stator C502.
  • the voice coil motor mover C501 is connected to the core motion platform C202 via a mover connector C3.
  • the voice coil motor mover C501 can apply a driving force to the core motion platform C202 under the action of electromagnetic force.
  • the driving force can elastically deform the flexible hinge C203 and thereby cause the core motion platform C202 to generate a linear displacement along the longitudinal direction of the guide rail.
  • the elastic deformation reaction force of the flexible hinge C203 can be used to overcome the friction between the moving pair of the linear guides connected to the rigid frame A201, when the elastic deformation of the flexible hinge C203 is greater than the movement between the linear guides When the frictional force is equal to the resistance, the rigid frame C201 will be changed from the stationary state to the moving state.
  • the displacement of the core motion platform C202 can be divided into the same two cases as the embodiment A, and the method used to avoid the influence of friction "crawling" is also the same as that of the embodiment A.
  • the grating displacement sensor C7 is connected to the core motion platform C202, and the displacement of the core motion platform C202 in any case can be measured in real time.
  • the displacement measurement of the grating displacement sensor C7 can be used as a feedback link and a voice coil motor driver to form a closed loop control system, High-precision motion positioning of the core motion platform C202.
  • the driving force of the voice coil motor driver acting on the flexible hinge C203 through the core motion platform C202 easily causes the deformation amount of the flexible hinge C203 to exceed the limit elastic deformation amount.
  • the core motion platform C202 will come into contact with the rigid frame C201 and constitute an integral rigid motion platform.
  • a damping device C8 is disposed between the core motion platform C202 and the rigid frame C201 for relieving the contact impact force of the core motion platform C202 with the rigid frame C201.
  • Figure 11.a shows a quick positioning case with a stroke of 100mm. Due to friction, when the driving force is small, the slider is at rest until the driving force is greater than the static friction (Fig. 11.b). During the braking process, the driving force acts on the core platform first, reducing the moving speed of the platform, and then acting on the rigid frame through the flexible hinge, so the core platform is braked before the rigid frame. When the rigid frame speed approaches 0, it enters the frictional four-wheel drive. At this time, the core platform completes the error compensation by the micro-feeding deformation of the flexible hinge (Fig. 11.c).
  • the static position is 99.9968 mm, and the error is -0.0032%.
  • the positioning accuracy reaches 99.9992mm with an error of -0.0008%.
  • the elastic compensation is frictionless, the actual displacement is 99.9996, the relative error is -0.0004%, and the positioning accuracy is sub-micron.
  • the core platform is connected to the rigid frame through the flexible hinge, when the driving force is insufficient to overcome the friction, the core platform is deformed by the flexible hinge to generate displacement, thereby achieving quick start.
  • the speed is reduced, the driving force is also reduced, and the driving force is less than the static friction.
  • the core platform continues to be displaced by the flexible hinge deformation. The entire process does not require algorithm switching, and the control is simple.

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  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Combustion & Propulsion (AREA)
  • Linear Motors (AREA)
  • Bearings For Parts Moving Linearly (AREA)
  • Machine Tool Units (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Vibration Prevention Devices (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Sensing Apparatuses (AREA)

Abstract

一种单驱动刚柔耦合精密运动平台，包括直线导轨（A101）、刚柔耦合运动平台、直线驱动器及位移传感器（A6），其中刚柔耦合平台包括刚性框架（A201）、柔性铰链（A203）和核心运动平台（A202）；直线驱动器通过柔性铰链（A203）带动刚性框架（A201）在直线导轨（A101）上运动。该运动平台能够实现高精度连续变化位移，避免了加速度突变导致的位移"抖动"。

Description

一种单驱动刚柔耦合精密运动平台及其实现方法及应用 技术领域
本发明涉及电机驱动技术，更具体的涉及一种单驱动刚柔耦合精密运动平台及其实现方法及应用。
背景技术
高速精密运动平台在半导体封装等领域中被广泛使用。高速精密运动平台中运动副之间表面粗糙度的不确定变化会导致摩擦阻力的幅值不确定变化。而在运动平台的启动、停止和微进给过程中，运动平台的速度相对较低，上述摩擦阻力的幅值波动容易导致运动平台出现“爬行”现象。在闭环控制系统作用下，驱动器将会通过增大驱动力的方式来克服摩擦阻力，补偿运动平台定位误差。在上述补偿过程中，运动平台将经历频繁的“静止→运动”状态切换。在“静止→运动”过程中，运动副之间的摩擦阻力会经历“静摩擦力→动摩擦力”的状态切换，而静摩擦系数与动摩擦系数之间的差异会导致上述状态切换瞬间的加速度突变，造成运动平台在最终定位位置附近的“抖动”，影响定位精度。
如何降低在启动、停止和微进给过程中由于摩擦状态切换造成的定位误差影响是影响高速精密运动平台执行精度的重要问题。针对上述问题，目前存在如下解决方案：
1.建立精确的摩擦力模型，采用运动控制驱动力补偿的方式。
2.采用无摩擦或低摩擦的运动副设计，例如采用气浮轴承、磁悬浮轴承或微进给平台的柔性铰链等结构设计。
由于运动副之间的接触面微观特性差异与制造误差等因素，很难建立高度精确的摩擦力模型，导致运动控制系统中需要采用复杂的补偿控制方法。
气浮轴承或磁悬浮轴承等低摩擦运动副的实施成本较高，限制了其使用范围。
柔性铰链作为一种无外摩擦运动副，依靠弹性变形来实现连续高精度的运动。由于工作原理的限制，柔性铰链运动副主要适用于微小行程的运动。 在大行程运动场合中，柔性铰链往往会与摩擦运动副配合使用，组成宏微复合运动平台来实现大行程高精度的运动，进而对大范围运动进行补偿。
专利201410696217.0提出了一种直线电机共定子双驱动宏微一体化高速精密运动一维平台。所提出的宏微运动平台的宏动外框架和微动平台分别与两组直线电机动子连接。其中宏动外框架与微动平台之间通过柔性铰链连接，所述宏动外框架在对应直线电机动子的驱动下实现大行程的宏运动，所述微动平台在对应的直线电机动子的驱动下来动态补偿上述宏运动的运动偏差。利用上述宏微复合运动原理来实现大行程高精度的运动。由于所述运动平台中微动平台采用了无摩擦的柔性铰链运动副设计，实现了定位过程中的连续位移变化。专利201410696217.0所提出的运动平台存在的主要缺点有：(1)由于采用了宏微复合控制，运动平台的宏动平台和微动平台分别需要各自的驱动器及位移传感器来组成反馈系统，成本较高；(2)控制系统中需要考虑宏运动和微运动的切换控制，控制系统较为复杂；(3)平台中运动部分的质量较大，不利于在高加速等大惯性影响的场合中使用；(4)宏动平台的反馈控制系统仍要考虑定位阶段的摩擦状态影响，以确保定位过程中宏动平台的位移偏差小于柔性铰链运动副的极限变形范围。
发明内容
为了解决上述技术问题，本发明的目的是实现电机驱动平台的简化控制和结构优化，具体来说，本发明提供了一种单驱动刚柔耦合精密运动平台及其实现方法及应用。
本发明提供的单驱动刚柔耦合精密运动平台，包括机座、直线导轨、刚柔耦合运动平台、直线驱动器及位移传感器，其中刚柔耦合平台包括刚性框架、柔性铰链和核心运动平台；
所述刚柔耦合平台的核心运动平台通过柔性铰链与所述刚性框架连接；
所述刚柔耦合平台的核心运动平台与直线驱动器连接，所述刚性框架通过导轨滑块与固定在所述机座上的所述直线导轨连接，所述核心运动平台在所述直线驱动器作用下带动所述柔性铰链弹性变形，并通过柔性铰链带动所述刚性框架在所述直线导轨长度方向上自由运动；
所述位移传感器与所述核心运动平台连接，用于测量核心运动平台在运动方向上的位移。
优选地，所述直线驱动器为音圈电机或直线电机。
优选地，在所述刚柔耦合平台的刚性框架与核心运动平台间设置有限位装置和阻尼器。
优选地，刚柔耦合平台的所述核心运动平台与所述刚性框架之间的柔性铰链为对称布置。
优选地，所述刚柔耦合运动平台为一体式加工制造。
优选地，所述柔性铰链为直梁型或切口型柔性铰链。
本发明还提供了一种单驱动刚柔耦合精密运动平台实现方法，本方法利用上述单驱动刚柔耦合精密运动平台实现，包括下述步骤：
1)直线驱动器直接驱动核心运动平台，在驱动力未能客服刚性框架静摩擦时，核心运动平台通过柔性铰链的弹性变形产生微小位移，实现精密微进给；
2)当直线驱动器驱动力加大时，克服了摩擦力，带动刚性框架运动，而此时弹性变形增大，进入限位状态，所有的驱动力传递到刚性框架进行高速运动；
3)当平台减速时，核心运动平台先制动，通过柔性铰链带动刚性框架制动，之后切换至另一限位装置和阻尼，衰减振动能量。
本发明还提供了一种单驱动刚柔耦合精密运动平台的应用，所述单驱动刚柔耦合精密运动平台应用在大行程精密加工设备上，并采用了上述单驱动刚柔耦合精密运动平台作为电机驱动平台。
相应的，本发明还提供了一种单驱动刚柔耦合精密运动平台的应用实现方法，本方法用于大行程精密加工设备，并利用上述单驱动刚柔耦合精密运动平台实现方法实现电机驱动。
本发明的有益效果：
1)采用无摩擦柔性铰链运动副来实现高精度连续变化位移，避免了低速工况下运动副摩擦状态切换导致加速度突变导致的位移“抖动”。
2)采用了刚柔耦合的运动平台设计，所使用的柔性铰链可以依靠自身弹性变形主动适应导轨运动副的摩擦力变化，避免了运动副摩擦状态切换导致的 “爬行”对连续位移定位的影响，有利于实现更高的定位精度。
3)运动平台采用了单驱动闭环控制系统，所采用的驱动器和传感器都连接在所述核心运动平台上，控制系统设计简单，可靠性更高。
4)运动平台采用较为紧凑的设计，相对于宏微复合运动平台而言可以实现更小的运动质量，更有利于在高加速等场合中的应用。
附图说明
图1为本发明所述刚柔耦合运动平台的工作原理示意图；
图2为本发明的实施例A示意图；
图3为本发明的实施例A局部剖切放大示意图；
图4为本发明的实施例A前剖视图及局部放大图；
图5为本发明的实施例B示意图；
图6为本发明的实施例B局部剖切放大示意图；
图7为本发明的实施例B前剖视图及局部放大图；
图8为本发明的实施例C示意图；
图9为本发明的实施例C局部剖切放大示意图；
图10为本发明的1um精密微进给实验数据曲线图；
图11为本发明的100mm的快速定位实验数据曲线图；
序号说明：
直线导轨1、刚性框架201、核心运动平台202、柔性铰链203、阻尼器3；
直线导轨A101、直线导轨滑块A102、运动平台刚性框架A201、核心运动平台A202、柔性铰链A203、阻尼装置A3、机座A4、直线电机动子A501、直线电机定子A502、光栅位移传感器A6、直线轴承衬套A701、光轴A702；
直线导轨B101、直线导轨滑块B102、运动平台刚性框架B201、核心运动平台B202、柔性铰链B203、阻尼装置B3、机座B4、直线电机动子B501、直线电机定子B502、光栅位移传感器B6、磁性块I B701、磁性块II B702；
交叉滚子直线导轨C1、运动平台刚性框架C201、核心运动平台C202、柔性铰链C203、动子连接件C301、机座C4、防撞块C6、音圈电机动子C501、音圈电机定子C502、光栅位移传感器C7、阻尼装置C8。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
本发明所提出的运动平台的一个实施例A如下：
如图1至图3所示，运动平台主要由机座A4、直线导轨A101、导轨滑块A102、刚性框架A201、核心运动平台A202、柔性铰链A203、光栅位移传感器A6及直线电机驱动器等组成。其中，刚性框架A201与核心运动平台A202之间通过柔性铰链A203运动副连接，刚性框架A201通过直线导轨运动副与机座A4连接。
所述直线电机驱动器由直线电机动子A501及直线电机定子A502组成。其中，直线电机动子A501与所述核心运动平台A202连接，所述直线电机动子A501可以在电磁力作用下对核心运动平台A202施加驱动力。所述驱动力可以使柔性铰链A203发生弹性变形，并进而使所述核心运动平台A202产生沿导轨长度方向的直线位移。所述柔性铰链A203的弹性变形反作用力可以用于克服所述刚性框架A201所连接的直线导轨运动副间的摩擦力，当柔性铰链A203的弹性变形发作用力大于所述直线导轨运动副之间的静摩擦力等阻力时，所述刚性框架A201将由静止状态转为运动状态。
所述核心运动平台A202的位移可以分为两种情况：a.当柔性铰链A203的弹性变形力小于所述运动副的静摩擦力等阻力时，所述核心运动平台A202的位移为所述柔性铰链A203运动副的弹性变形量；b.当柔性铰链A203的弹性变形力大于所述运动副的静摩擦力等阻力时，所述核心运动平台(A202)的位移为所述柔性铰链A203运动副的弹性变形量与所述刚性框架A201的刚性位移的叠加。当所述直线导轨运动副的运动状态在上述情况a与b之间切换时，所述直线导轨运动副静摩擦系数与动摩擦系数之间的差异导致阻力突变，产生对运动平台的刚性冲击，并导致运动副的摩擦“爬行”。所述柔性铰链A203可以依靠自身的弹性变形主动适应上述由运动副摩擦状态切换导致的摩擦阻力突变，缓解摩擦阻力突变对所述核心运动平台A202的刚性冲击。在上述任 意情况下，所述核心运动平台A202都可以依靠柔性铰链A203的弹性变形来实现连续位移变化，规避摩擦“爬行”情况对运动定位精度的影响。
所述光栅位移传感器A6与所述核心运动平台A202连接，可以实时测量所述核心运动平台A202在任意情况下的位移。所述光栅位移传感器A6的位移测量可以作为反馈环节与直线电机驱动器等形成闭环控制系统，实现所述核心运动平台A202的高精度运动定位。
当所述运动平台处于高加速度等情况时，所述直线电机驱动器通过所述核心运动平台A202作用在所述柔性铰链A203驱动力容易导致所述柔性铰链A203的变形量超出极限弹性变形量。当所述柔性铰链A203的弹性变形量超出极限时，所述核心运动平台A202将与所述刚性框架A201发生接触，并构成整体刚性运动平台。在所述核心运动平台A202与所述刚性框架A201之间设置有阻尼装置A3，用于缓解所述核心运动平台A202将与所述刚性框架A201的接触冲击力。
如图3及图4所示，为提高所述核心运动平台A202的承载能力，在所述刚性框架A201与所述核心运动平台A202之间设置有直线轴承单元。其中，在刚性框架A201的两支撑端之间设置有光轴A702，所述核心运动平台A202上安装有直线轴承衬套A701。所述直线轴承衬套A701的运动自由度限制在所述光轴A702长度方向。安装在所述刚性框架A201上的光轴A702与安装在所述核心运动平台A202上的直线轴承衬套A701共同构成刚度增强单元，用于提高所述核心运动平台A202的承载能力。
本发明所提出的运动平台的一个实施例B如下：
如图5和图6所示，实施例B中的运动平台的结构设计与运动原理与实施例B相同。运动平台主要由机座B4、直线导轨B101、导轨滑块B102、刚性框架B201、核心运动平台B202、柔性铰链B203、光栅位移传感器B6及直线电机驱动器等组成。其中，刚性框架B201与核心运动平台B202之间通过柔性铰链B203运动副连接，刚性框架B201通过直线导轨运动副与机座B4连接。所述直线电机驱动器由直线电机动子B501及直线电机定子B502组成。其中，直线电机动子B501与所述核心运动平台B202连接，所述直线电机动子B501可以在电磁力作用下对核心运动平台B202施加驱动力。在所述核心运动平台B202与所述刚性框架B201之间设置有阻尼装置B3，用于缓解所述 核心运动平台B202将与所述刚性框架B201的接触冲击力。
相对于实施例A，实施例B的主要变化点在于进一步改进了实施例A中提高所述核心运动平台承载能力所采用的刚度增强单元设计。
如图6和图7所示，所述刚性框架B201上设置有磁性块II B702，所述核心运动平台B202上设置有磁性块I B701。所述磁性块II B702在平台运动过程中始终位于所述磁性块I B701中间。所述磁性块II B702与所述磁性块I B701的上部相对面上采用相同的磁极极性，所述磁性块II B702与所述磁性块I B701的下部相对面上也采用相同的磁极极性。利用上述磁极布置方式，所述磁性块II B702将被所述磁性块I B701导致的磁性斥力约束在所述磁性块II B702之间，并进而提高所述核心运动平台B202的承载能力。所述磁性块II B702与磁性块I B701共同构成非接触式的刚度增强单元。
本发明所提出的运动平台的一个实施例C如下：
如图8和图9所示，运动平台主要由机座C401、交叉滚子直线导轨C1、刚性框架C201、核心运动平台C202、柔性铰链C203、光栅位移传感器C7、音圈电机等组成。其中，刚性框架C201与核心运动平台C202之间通过柔性铰链C203运动副连接，刚性框架C201通过直线导轨运动副与机座C401连接。
所述音圈电机驱动器由音圈电机动子C501及直音圈电机定子C502组成。其中，音圈电机动子C501通过动子连接件C3与所述核心运动平台C202连接。所述音圈电机动子C501可以在电磁力作用下对核心运动平台C202施加驱动力。所述驱动力可以使柔性铰链C203发生弹性变形，并进而使所述核心运动平台C202产生沿导轨长度方向的直线位移。所述柔性铰链C203的弹性变形反作用力可以用于克服所述刚性框架A201所连接的直线导轨运动副间的摩擦力，当柔性铰链C203的弹性变形发作用力大于所述直线导轨运动副之间的静摩擦力等阻力时，所述刚性框架C201将由静止状态转为运动状态。
所述核心运动平台C202的位移情况可分为与实施例A相同的两种情况，所采用的规避摩擦“爬行”影响的方法也与实施例A相同。
所述光栅位移传感器C7与所述核心运动平台C202连接，可以实时测量所述核心运动平台C202在任意情况下的位移。所述光栅位移传感器C7的位移测量可以作为反馈环节与音圈电机驱动器等形成闭环控制系统，实现所述 核心运动平台C202的高精度运动定位。
当所述运动平台处于高加速度等情况时，所述音圈电机驱动器通过所述核心运动平台C202作用在所述柔性铰链C203驱动力容易导致所述柔性铰链C203的变形量超出极限弹性变形量。当所述柔性铰链C203的弹性变形量超出极限时，所述核心运动平台C202将与所述刚性框架C201发生接触，并构成整体刚性运动平台。在所述核心运动平台C202与所述刚性框架C201之间设置有阻尼装置C8，用于缓解所述核心运动平台C202将与所述刚性框架C201的接触冲击力。
为了说明本发明的实施效果，给出了1um微位移进给和100mm快速定位两个案例。比较了普通平台(静摩擦系数0.2,动摩擦系数0.15)，本实施案例的低摩擦(摩擦系数是普通平台的1/10)和无摩擦方案。
表1 精密微进给(1um)运动精度比较
Figure PCTCN2016093259-appb-000001
从表1可以看到，在精密微进给时，由于摩擦作用，普通平台的实际位移只有0.44484um，与目标偏差为-56.616％。采用本发明低摩擦刚弹耦合宏微复合平台，核心平台弹性变形位移为0.92547um，与目标的偏差为-7.453％，刚性框架的位移仅为0.05071um。采用本发明无摩擦刚弹耦合宏微复合平台，核心平台弹性变形位移为0.98611um，与目标的偏差为-1.389％，刚性框架的位移仅为0.010593um。
可以看到，在精密微进给时，由于摩擦作用，产生很大的定位误差。而通过本方案的刚弹运动耦合，低摩擦或无摩擦的弹性变形产生微小位移，实现精密微进给。
图11.a所示为行程100mm的快速定位案例。由于摩擦，当驱动力很小时，滑块处于静止状态，直到驱动力大于静摩擦，才开始运动(图11.b)。在制动过程中，驱动力先作用到核心平台上，降低平台的运动速度，再通过柔性铰链作用到刚性框架上，因此核心平台先于刚性框架制动。当刚性框架速度接近0时，进入摩擦四驱，这时候，核心平台通过柔性铰链变形的微进给完成误差补偿(图11.c)。
表2 100mm行程定位精度比较
Figure PCTCN2016093259-appb-000002
从表2可以看到，对于有摩擦普通平台，静态位置为99.9968mm，误差-0.0032％。通过低摩擦弹性变形复合后，定位精度达到99.9992mm，误差-0.0008％。当弹性补偿无摩擦时，实际位移99.9996，相对误差-0.0004％，定位精度亚微米级。
综上所述，由于核心平台通过柔性铰链与刚性框架连接，当驱动力不足于克服摩擦时，核心平台通过柔性铰链发生变形，产生位移，因而实现快速启动。当高速运行时至停止时，速度降低，驱动力也随之降低，又出现驱动力小于静摩擦的情况，此时，核心平台继续通过柔性铰链变形实现位移。整个过程不需要算法切换，控制简单。
以上对本发明所提供的一种单驱动刚柔耦合精密运动平台、实现方法及其应用进行了详细介绍，本文中应用了具体个例对本发明的原理及实施方式进行了阐述，以上实施例的说明只是用于帮助理解本发明的方法及其核心思想。应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以对本发明进行若干改进和修饰，这些改进和修饰也落入本发明权利要求的保护范围内。

Claims (10)

  1. 一种单驱动刚柔耦合精密运动平台，其特征在于，包括机座、直线导轨、刚柔耦合运动平台、直线驱动器及位移传感器，其中刚柔耦合平台包括刚性框架、柔性铰链和核心运动平台；
    所述刚柔耦合平台的核心运动平台通过柔性铰链与所述刚性框架连接；
    所述刚柔耦合平台的核心运动平台与直线驱动器连接，所述刚性框架通过导轨滑块与固定在所述机座上的所述直线导轨连接，所述核心运动平台在所述直线驱动器作用下带动所述柔性铰链弹性变形，并通过柔性铰链带动所述刚性框架在所述直线导轨长度方向上自由运动；
    所述位移传感器与所述核心运动平台连接，用于测量核心运动平台在运动方向上的位移。
  2. 如权利要求1所述的单驱动刚柔耦合精密运动平台，其特征在于，所述直线驱动器为音圈电机或直线电机。
  3. 如权利要求1所述的单驱动刚柔耦合精密运动平台，其特征在于，在所述刚柔耦合平台的刚性框架与核心运动平台间设置有限位装置和阻尼器。
  4. 如权利要求1所述的单驱动刚柔耦合精密运动平台，其特征在于，刚柔耦合平台的所述核心运动平台与所述刚性框架之间的柔性铰链为对称布置。
  5. 如权利要求1-4其中之一所述的单驱动刚柔耦合精密运动平台，其特征在于，所述刚柔耦合运动平台为一体式加工制造。
  6. 如权利要求1-4其中之一所述的单驱动刚柔耦合精密运动平台，其特征在于，所述柔性铰链为直梁型或切口型柔性铰链。
  7. 如权利要求1-4其中之一所述的单驱动刚柔耦合精密运动平台，其特征在于，所述刚柔耦合运动平台内的核心运动平台与刚性框架还存在直线轴承、磁力支撑刚度加强结构。
  8. 一种单驱动刚柔耦合精密运动平台实现方法，其特征在于，本方法利用上述权利要求1-4其中之一所述的单驱动刚柔耦合精密运动平台实现，包括下述步骤：
    1)直线驱动器直接驱动核心运动平台，在驱动力未能客服刚性框架静摩擦时，核心运动平台通过柔性铰链的弹性变形产生微小位移，实现精密微进 给；
    2)当直线驱动器驱动力加大时，克服了摩擦力，带动刚性框架运动，而此时弹性变形增大，进入限位状态，所有的驱动力传递到刚性框架进行高速运动；
    3)当平台减速时，核心运动平台先制动，通过柔性铰链带动刚性框架制动，之后切换至另一限位装置和阻尼，衰减振动能量。
  9. 一种单驱动刚柔耦合精密运动平台的应用，其特征在于，所述单驱动刚柔耦合精密运动平台应用在大行程精密加工设备上，并采用如权力要求1、2、3或4其中之一所述的单驱动刚柔耦合精密运动平台作为电机驱动平台。
  10. 一种单驱动刚柔耦合精密运动平台的应用实现方法，其特征在于，本方法用于大行程精密加工设备，并利用上述权利要求8所述的方法实现电机驱动。
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