WO2017215150A1 - 半导体设备的成膜方法以及半导体设备的氮化铝成膜方法 - Google Patents
半导体设备的成膜方法以及半导体设备的氮化铝成膜方法 Download PDFInfo
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- WO2017215150A1 WO2017215150A1 PCT/CN2016/100799 CN2016100799W WO2017215150A1 WO 2017215150 A1 WO2017215150 A1 WO 2017215150A1 CN 2016100799 W CN2016100799 W CN 2016100799W WO 2017215150 A1 WO2017215150 A1 WO 2017215150A1
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- 238000000034 method Methods 0.000 title claims abstract description 368
- 239000004065 semiconductor Substances 0.000 title claims abstract description 60
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 title abstract description 4
- 229910017083 AlN Inorganic materials 0.000 title abstract 3
- 230000008569 process Effects 0.000 claims abstract description 285
- 238000004544 sputter deposition Methods 0.000 claims abstract description 216
- 239000000758 substrate Substances 0.000 claims abstract description 169
- 239000010408 film Substances 0.000 claims abstract description 128
- 230000004048 modification Effects 0.000 claims abstract description 98
- 238000012986 modification Methods 0.000 claims abstract description 98
- 239000011261 inert gas Substances 0.000 claims abstract description 30
- 239000010409 thin film Substances 0.000 claims abstract description 10
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 54
- 239000007789 gas Substances 0.000 claims description 31
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 30
- 229910052782 aluminium Inorganic materials 0.000 claims description 29
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 29
- 229910052786 argon Inorganic materials 0.000 claims description 15
- 230000000873 masking effect Effects 0.000 claims description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 11
- 239000001301 oxygen Substances 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 8
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 8
- 230000007704 transition Effects 0.000 claims description 5
- 230000008859 change Effects 0.000 claims description 3
- 229910002601 GaN Inorganic materials 0.000 description 18
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 17
- 230000015572 biosynthetic process Effects 0.000 description 13
- 150000002500 ions Chemical class 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 239000013077 target material Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000007730 finishing process Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 229910017109 AlON Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02266—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by physical ablation of a target, e.g. sputtering, reactive sputtering, physical vapour deposition or pulsed laser deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/2855—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by physical means, e.g. sputtering, evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/1026—Compound semiconductors
- H01L2924/1032—III-V
- H01L2924/10323—Aluminium nitride [AlN]
Definitions
- the present invention relates to a film forming method of a semiconductor device, and more particularly to a method for forming an aluminum nitride film of a semiconductor device.
- PVD Physical vapor deposition
- LEDs light emitting diodes
- displays In the chamber of the PVD sputtering apparatus, a high-power DC power source is usually connected to the target, and the working gas in the chamber is excited into plasma by the loading power, and the ions in the plasma are attracted to the sputtering target. Therefore, the material of the target is sputtered and deposited on a substrate such as a wafer.
- process parameters such as sputtering power and sputtering rate, but basically the direction for improving film formation quality, film thickness uniformity and increasing equipment productivity is very clear.
- the present invention provides a film forming method of a semiconductor device which forms a thin film by a sputtering method and performs a surface modification process on the target before forming the thin film.
- the method of the invention adopts different process parameters in the surface modification process of different sputtering processes, so that the targets in different sputtering processes have different surface states, and thus for different times.
- the offset phenomenon of film formation uniformity of the main sputtering in the sputtering process produces a compensation effect to improve film formation quality and film thickness uniformity.
- Some embodiments of the present invention provide a film forming method of a semiconductor device, comprising sequentially performing a plurality of sputtering processes to form a film on a plurality of batches of substrates, respectively, wherein each sputtering process package
- the following steps are included: loading the substrate into the chamber and placing it on the carrying base; moving the shielding disc between the target and the substrate; introducing an inert gas into the chamber to surface modify the target; performing pre-sputtering, Pre-treating the surface of the target; removing the shielding disk from the target and the substrate, and performing main sputtering on the substrate by using the target to form a film on the substrate; moving the substrate out of the chamber; and,
- the surface modification process of the sputtering process performed on the Nth batch substrate has different process parameters from the surface modification process of the sputtering process performed on the N+1th batch substrate, and N is a positive integer.
- Some embodiments of the present invention provide a method for forming an aluminum nitride film of a semiconductor device, comprising sequentially performing a plurality of sputtering processes to form an aluminum nitride film on a plurality of batches of substrates, respectively, wherein each sputtering process includes the following Step: loading the substrate into the chamber and placing it on the bearing base; moving the shielding disk between the aluminum-containing target and the substrate; introducing an inert gas into the chamber to perform surface modification on the aluminum-containing target; performing pre-splashing Shooting, pre-treating the surface of the aluminum-containing target, changing the surface of the aluminum-containing target from an aluminum-rich state to a transition state; removing the shielding disk from the target and the substrate, and introducing inertness into the chamber Gas and nitrogen-containing gas and main sputtering of the substrate with an aluminum target to form an aluminum nitride film on the substrate; removing the substrate from the chamber; and surface modification process of the sputtering process of the N
- the plurality of sputtering processes sequentially performed are for forming a thin film on a plurality of batches of substrates, respectively.
- the surface modification process of each sputtering process can remove the residue on the surface of the target, and can be compensated for multiple times by using different process parameters in the surface modification process of different sputtering processes for multiple batches of substrates.
- the surface modification process of the sputtering process has a negative effect on the film thickness uniformity (for example, the problem that the film formation uniformity shifts toward a specific direction), so that the film formation quality can be improved and the film thickness uniformity can be improved.
- FIG. 1 is a schematic flow chart of a film forming method of a semiconductor device according to some embodiments of the present invention.
- FIG. 2A is a schematic view showing a film forming method of a semiconductor device according to some embodiments of the present invention.
- 2B is a schematic view showing a film forming method of a semiconductor device according to some embodiments of the present invention.
- 2C is a schematic view showing a film forming method of a semiconductor device according to some embodiments of the present invention.
- FIG. 3 is a schematic diagram of an electronic device according to some embodiments of the present invention.
- the reaction chamber 100 includes an upper electrode device and a lower electrode device.
- the lower electrode device is disposed in the reaction chamber 100 for carrying the workpiece to be processed by the workpiece.
- the lower electrode device includes a susceptor 104 and is grounded.
- each sputtering process corresponds to a batch of substrates.
- each batch of the substrate refers to all the substrates processed by each sputtering process, and may be one substrate or a plurality of substrates (for example, when a plurality of substrates are simultaneously carried on the tray).
- Each sputtering process includes a pre-treatment process of the target prior to the main sputtering, which includes performing a surface modification process to remove residues on the surface of the target (eg, a film formed on the surface of the target during the previous sputtering process)
- the layer is pre-sputtered to pre-treat the surface of the target to ensure that the target is in a stable state during the main sputtering of each sputtering process.
- surface modification of the aluminum-containing target by using an inert gas such as argon (Ar) may be performed.
- the surface of the aluminum-containing target is in an Al-rich state, and the pre-sputtering can change the surface of the aluminum-containing target from an aluminum-rich state to a transition state, thereby ensuring formation of nitrogen during subsequent main sputtering.
- the aluminum film has a good film forming quality. Further, in the actual production process of aluminum nitride, it is often observed that the film thickness distribution of the film layer formed in the multiple sputtering processes tends to shift toward a specific direction due to unpredictable factors, and further Affects film thickness uniformity.
- the surface modification process of the target is performed first in each sputtering process, and the surface modification process in different sputtering processes is provided by using different process parameters.
- the compensation effect further improves the film thickness distribution and continues to shift in the same direction, resulting in a serious decrease in film thickness uniformity.
- the aluminum nitride film formed by the method of the invention has better quality, and the epitaxial growth quality of the gallium nitride layer formed on the aluminum nitride film is also improved.
- the aluminum nitride film and the gallium nitride layer can be applied to an electronic device such as a light emitting diode device, and a gallium nitride layer with improved film quality can be used to enhance the electrical performance of the electronic device, and the aluminum nitride film with improved thickness uniformity is also used. It is positive for the stability of the mass production products of electronic devices.
- FIG. 1 is a schematic flow chart of a film forming method of a semiconductor device according to some embodiments of the present invention.
- some embodiments of the present invention provide a film forming method 100 for a semiconductor device, which includes repeating multiple times of sputtering.
- the process SR is sprayed to form a film on different batches of substrates, respectively.
- Each sputtering process SR includes the following steps 110, 112, 114, 115, 116, and 118. In this embodiment, a description will be given of a single substrate including only one substrate.
- a substrate is loaded into the chamber and placed on the carrier base.
- the masking disk is moved between the target and the substrate.
- step 114 an inert gas is introduced into the chamber to perform a surface modification process on the target.
- Pre-sputtering is performed to pretreat the surface of the target.
- step 116 the masking disk is removed and the substrate is primarily sputtered with the target to form a film on the substrate.
- step 118 the substrate is removed from the chamber.
- the next sputtering process SR is continued to form a thin film on another batch of substrates.
- the film forming method of the semiconductor device of the present embodiment includes sequentially performing a plurality of sputtering processes SR, each of which processes a batch of substrates to form a thin film on the surface of each substrate of the batch, wherein
- the so-called batch of substrates refers to all the substrates processed by each sputtering process SR, which may be one substrate or a plurality of substrates.
- the surface modification process of the sputtering process performed on the substrate of the Nth batch has different process parameters from the surface modification process of the sputtering process performed on the substrate of the N+1th batch, and N is a positive integer.
- the problem that the film thickness distribution of the surface of the target material is continuously shifted toward the same direction due to contamination or defects generated after the sputtering process is performed multiple times can be improved, thereby improving the film thickness uniformity.
- the sputtering process performed on the Nth batch substrate and the sputtering process performed on the N+1th substrate are two consecutive sputtering processes for forming a thin film on different substrates, and The surface modification process within this two successive sputtering processes has different process parameters.
- the process parameters of the surface modification process in the ongoing sputtering process are adjusted in an alternating manner, that is, the surface modification process corresponding to the odd number of sputtering processes may have the same process.
- the surface modification process corresponding to the parameters and the even number of sputtering processes may have the same process parameters, but the surface modification process corresponding to the odd number of sputtering processes is different from the surface modification process corresponding to the even number of sputtering processes.
- Process parameters may be used to adjust the process parameters of the surface modification process corresponding to different sputtering processes.
- the foregoing method 100 is merely an example, and the present invention is not limited to the content of the method 100. Other required additional steps may also be performed before, after, and/or in the method 100, and the steps described in the method 100 may also be performed. The order is replaced, deleted or changed in other embodiments. Moreover, the term "step” as used in this specification is not limited to a single action, and the term “step” may include a single action, operation, or technique, or may be composed of multiple actions, operations, and/or techniques. Collection.
- FIG. 2A-2C are schematic diagrams showing a film forming method of a semiconductor device according to some embodiments of the present invention.
- some embodiments of the present invention provide a film forming method 100 for a semiconductor device, including the following steps.
- a sputtering device 20 can be provided.
- the sputtering apparatus 20 includes a chamber 21, a carrier base 22, and a shielding disk 24.
- the sputtering apparatus 20 may further include a shielding disk magazine 25, a heat insulating ring 26, a cover ring 27, a lower end cover 28A, an upper end cover 28B, and a magnetron 29 that store the shielding disk 24, and the shielding disk library 25 is worn.
- the inner wall 21S of the chamber 21 communicates with the internal environment of the chamber 21, but is not limited thereto. In other embodiments of the invention, other desirable components may also be disposed within and/or outside of the sputtering apparatus 20 as desired. Then, a sputtering process SR is performed, and the sputtering process SR includes step 110, step 112, step 114, step 115, and step 116, and step 118.
- the substrate 31 is loaded into the chamber 21 and placed on the carrier base 22.
- a batch of substrates 31 (which may be one substrate or a plurality of substrates) may be placed on the tray 23, and then the tray 23 on which the substrate 31 is placed is loaded by, for example, a robot arm.
- the chamber 21 is placed on the carrier base 22. In other embodiments, a batch of substrates 31 may also be placed directly on the carrier base 22 without the tray 23.
- the substrate 31 may be a substrate formed of a sapphire substrate, silicon carbide (SiC), or other suitable material, such as a semiconductor substrate, a silicon-on-insulator (SOI) substrate, a glass substrate, or a ceramic substrate, and the tray 23 It can be made of, for example, silicon carbide (SiC) or molybdenum, but is not limited thereto.
- SiC silicon carbide
- SOI silicon-on-insulator
- the masking disk 24 is moved between the target T and the substrate 31, and at step 114, an inert gas is introduced into the chamber 21 to target the target.
- T performs a surface modification process.
- ions generated by the inert gas collide with the target T, thereby achieving the effect of modifying the surface of the target T. For example, remove because of before A film formed on the surface of the target T by a sputtering process.
- the flow rate of the inert gas such as argon may be between 100 standard cent centimeters per minute (sccm) to 300 sccm, and preferably may be between 180 sccm and Between 280sccm, but not limited to this.
- the sputtering power applied to the target T may be between 2,500 watts and 4,000 watts, and preferably between 2,800 watts and 3,500 watts, but not limited thereto. . In some embodiments, it may also include introducing only an inert gas such as argon into the chamber 21 without introducing other reactive gases.
- the masking disk 24 may first be placed in the masking tray library 25 when the surface modification process is not performed, and the masking tray 24 may be moved from the masking tray library 25 into the chamber 21 before the surface finishing process is performed.
- a surface modification process is performed between the target T and the substrate 31.
- the masking disk 24 is also positioned between the target T and the substrate 31 during the surface modification process, thereby preventing the material of the target T from being formed on the substrate 31 by a surface modification process.
- the masking disk 24 can be regarded as a baffle to block particles generated in the surface finishing process from falling onto the substrate 31 or the carrier base 22 to affect subsequent film formation quality.
- the surface modification process is performed after the substrate 31 is loaded into the chamber 21, and the masking disk 24 is located between the target T and the substrate 31 when the surface modification process is performed, but is not limited thereto.
- pre-sputtering is performed to pretreat the surface of the target T.
- the surface of the surface-modified target T can be further processed by pre-sputtering so that the surface of the target T is in a transition state.
- the pre-sputtering described above may include introducing an inert gas and a reactive gas into the chamber 21, wherein the inert gas may be, for example, argon (Ar), and the reactive gas may be selected depending on the material of the film layer to be formed.
- the gas that is introduced during the pre-sputtering may be the same as the gas that is introduced during the subsequent main sputtering, but is not limited thereto.
- the flow rate of the reaction gas may be between 30 sccm and 300 sccm, and preferably between 100 sccm and 220 sccm; the flow rate of the inert gas such as argon may be introduced. Between 15sccm and 100sccm, and It may preferably be between 20 sccm and 70 sccm.
- the sputtering power applied to the target T may include a pulsed DC power source having a power ranging from 2,500 watts to 4,000 watts, and the power range may preferably be between 2,800 watts and 3,500 watts, but Not limited to this.
- the masking disk 24 is removed from between the target T and the substrate 31, and the substrate 31 is subjected to main sputtering by the target T to form on the substrate 31.
- the above-described main sputtering may include introducing an inert gas and a reactive gas into the chamber 21, wherein the inert gas may be, for example, argon (Ar), and the reactive gas may be selected depending on the material of the film layer to be formed. Ions (for example, Ar ions) generated by an inert gas collide with the target T, and the target T reacts with the reaction gas to form a film layer on the substrate 31.
- Ions for example, Ar ions
- the flow rate of the reactive gas may be between 30 sccm and 300 sccm, and preferably may be between 100 sccm and 220 sccm; the flow rate of the inert gas such as argon may be introduced. It is between 15 sccm and 100 sccm, and preferably between 20 sccm and 70 sccm.
- the sputtering power applied to the target T may include a pulsed DC power source having a power ranging from 2,500 watts to 4,000 watts, and the power range may preferably be between 2,800 watts and 3,500 watts, but Not limited to this.
- the substrate 31 on which the thin film is formed is removed from the chamber 21.
- the sputtering power applied to the target T by the pre-sputtering is equal to the sputtering power applied to the target T during the main sputtering, but is not limited thereto.
- step 110, step 112, step 114, step 115, step 116 and step 118 may be repeated to complete the next sputtering process SR, the next sputtering process SR corresponding to another batch Substrate 31.
- the primary sputtering process SR refers to a process of surface modification after loading a tray on which a batch of substrates 31 are placed into the chamber 21, and performing main sputtering on the batch of substrates 31 on the tray 23 to form a film, and then the tray is formed. 23 and the flow of the batch of substrate 31 of the batch out of the chamber 21.
- the film forming method of the semiconductor device of the present embodiment includes sequentially performing a plurality of sputtering processes SR, each of which processes a batch of substrates for each substrate of the batch.
- the surface is formed into a film, wherein the so-called batch of substrates refers to all the substrates processed by each sputtering process SR, which may be one substrate or a plurality of substrates.
- the surface modification process of the sputtering process performed on the substrate of the Nth batch has different process parameters from the surface modification process of the sputtering process performed on the substrate of the N+1th batch, and N is a positive integer.
- the problem that the surface thickness distribution of the target material is shifted in the same direction due to contamination or defects caused by surface modification after performing corresponding sputtering processes on the plurality of batches of substrates, respectively, can be improved. Improve film thickness uniformity.
- the surface modification process of the sputtering process performed on the substrate of the Nth batch has different process parameters from the surface modification process of the sputtering process performed on the substrate of the N+1th batch by selecting different processes. Time to achieve.
- the surface modification process of the sputtering process performed on the substrate of the Nth batch has a first process time
- the surface modification process of the sputtering process performed on the substrate of the (N+1)th batch has a different process time than the first process time.
- the second process time, and the second process time is about 2 to 8 times of the first process time, for example, the first process time is about 1-3 seconds, and the second process time is about 6-8 seconds, but not Limited.
- the Nth batch is The surface modification process of the sputtering process performed by the substrate may have the same sputtering power as the surface modification process of the sputtering process performed on the N+1th batch substrate.
- the surface modification process of the sputtering process performed on the substrate of the Nth batch and the surface modification process of the sputtering process performed on the substrate of the N+1th batch may have different process times and different splashes. Shooting power.
- the surface modification process of the sputtering process performed on the Nth batch substrate may have different sputtering power and the same as the surface modification process of the sputtering process performed on the N+1th substrate. Process time.
- the surface modification process of the sputtering process performed on the substrate of the Nth batch and the surface modification process of the sputtering process performed on the substrate of the N+1th batch may have other different process parameters.
- the method 100 can further include performing a pasting process before and/or after successively repeating the plurality of sputtering processes (the multiple sputtering processes performed continuously may constitute a batch sputtering process). . It is worth noting that the existing film forming method does not have a surface modification process on the target, so the target material must be coated after several sputtering processes, wherein the process time of the existing coating process is required.
- the film forming method of the present invention because the surface modification process of the target T is performed by using different process parameters in different sputtering processes, wherein the process time of the surface modification process can improve the condition of the target T in only a few seconds. Therefore, in the case where the condition of the target T is good, the method of the present invention can not only reduce the number and frequency of performing the coating process, but also shorten the overall process time, and the coating of the present invention, compared to the conventional film forming method.
- the treatment only needs to load the target T with a low power of between about 2500 watts and 4,000 watts to extend the lifetime of the target T to 1 to 2 years.
- the film forming method 100 of a semiconductor device can be used to form a non-metal film, a metal film, or a metal compound film.
- the target T may be an aluminum-containing target, such as a pure aluminum target or an aluminum nitride target, and the above method 100 It can be regarded as a method of forming an aluminum nitride film of a semiconductor device.
- the above-described pre-sputtering may include introducing a nitrogen-containing gas and an inert gas such as argon gas into the chamber 21, and impinging on the aluminum-containing target by ions generated by the inert gas ( That is, the target T) causes the surface of the target T to change from an Al-rich state to a transition state.
- the flow rate of the nitrogen-containing gas for example, nitrogen
- the nitrogen-containing gas may be between 30 sccm and 300 sccm, and preferably between 100 sccm and 220 sccm; and an inert gas such as argon is introduced.
- the flow rate of the gas may range from 15 sccm to 100 sccm, and preferably may range from 20 sccm to Between 70sccm, but not limited to this.
- the sputtering power applied to the target T may include a pulsed DC power source having a power ranging from 2,500 watts to 4,000 watts, and the power range may preferably be between 2,800 watts and 3,500 watts, but Not limited to this.
- an oxygen-containing gas may be additionally introduced into the chamber 21 such that the surface of the target T has a state of oxygen dopant (which may also be regarded as aluminum oxynitride, AlON).
- the flow rate of the oxygen-containing gas such as oxygen may be between 0.5 sccm and 10 sccm, and preferably may be between 0.5 sccm and 5 sccm, but not limited thereto.
- the above-described main sputtering may include introducing a nitrogen-containing gas and an inert gas such as argon (Ar) into the chamber 21, and causing ions (for example, Ar ions) generated by the inert gas.
- the aluminum-containing target that is, the target T
- an oxygen-containing gas may be introduced into the chamber 21 during the main sputtering, and the aluminum nitride film formed may include an oxygen-doped aluminum nitride film.
- a flow rate of a nitrogen-containing gas such as nitrogen may be between 30 sccm and 300 sccm, and preferably may be between 100 sccm and 220 sccm; a flow rate of an inert gas such as argon is introduced.
- the range may be between 15 sccm and 100 sccm, and preferably may be between 20 sccm and 70 sccm; the flow rate of the oxygen-containing gas, such as oxygen, may range from 0.5 sccm to 10 sccm, and preferably may be between 0.5 sccm. Up to 5sccm, but not limited to this.
- the sputtering power applied to the target T may include a pulsed DC power source having a power ranging from 2,500 watts to 4,000 watts, and the power range may preferably be between 2,800 watts and 3,500 watts, but Not limited to this.
- the sputtering power applied to the target T by the pre-sputtering is equal to the sputtering power applied to the target T during the main sputtering, but is not limited thereto.
- the surface modification process may also include introducing only an inert gas such as argon into the chamber 21 without introducing a reactive gas such as a nitrogen-containing gas and an oxygen-containing gas, and causing ions generated by the inert gas to impinge on the aluminum.
- the target (that is, the target T) is formed to achieve the effect of modifying the surface of the target T.
- the flow rate of the inert gas such as argon may be between 100 sccm and 300 sccm, and preferably may be between 180 sccm and 280 sccm, but not limited thereto.
- the sputtering power applied to the target T may be between 2,500 watts and 4,000 watts, and preferably may be between 2,800 watts and 3,500 watts, but not limited thereto.
- the sputtering power can be continuously applied to the target T during the pre-sputtering and main sputtering processes, that is, the pre-sputtering is performed in a continuous glow (ie, the chamber 21 does not glow). Main sputtering.
- the method of the present invention performs a surface modification process on the target T during each sputtering process, and adopts different process parameters in the surface modification process of the sputtering process corresponding to each of the different batches of substrates.
- the condition in the chamber 21 and the condition of the target T can be stabilized, thereby compensating for the surface modification process of the target T in the multiple sputtering processes or only using the surface modification process having the same process parameters.
- the negative influence on the film thickness uniformity can be achieved, so that the film forming quality can be improved and the film thickness uniformity can be improved.
- Table 1 and Table 2 below.
- Table 1 shows the thickness of the aluminum nitride film formed by the method of a comparative example (the surface modification process is not performed in each sputtering process), and each sputtering process is a five-piece substrate placed on the tray (ie, each One batch of the substrate contains five substrates) for main sputtering; and Table 2 shows the thickness of the aluminum nitride film formed by the above method 100, and each sputtering process is also a five-piece substrate placed on the tray ( That is, each batch of the substrate contains five substrates) for main sputtering.
- the thickness uniformity of the aluminum nitride film formed by the method of the present invention is remarkably superior to the thickness uniformity of the aluminum nitride film formed by the method of the comparative example.
- the above-described sputtering process of the present invention was continuously performed 20 times, and the results showed that each substrate had a good film thickness uniformity and a film thickness between different substrates for each batch of substrates. Uniformity is also good; and, for different batches of substrates, film thickness uniformity between batches is also improved.
- the surface modification process performed on the target by the method of forming a film of the present invention can effectively improve film thickness uniformity.
- FIG. 1 , FIG. 2C and FIG. 3 are schematic diagrams of an electronic device according to some embodiments of the present invention.
- the aluminum nitride film forming method 100 of a semiconductor device can be used to form an electronic device 30 such as a gallium nitride based substrate.
- the electronic device 30 can include a substrate 31, an aluminum nitride buffer layer 32, and a gallium nitride layer 33.
- the aluminum nitride buffer layer 32 is on the substrate 31, and the gallium nitride layer 33 is on the aluminum nitride buffer layer 32.
- the aluminum nitride buffer layer 32 may be formed on the substrate 31 by the method 100 described above, and the gallium nitride layer 33 may be formed on the aluminum nitride buffer layer 32. Since the lattice mismatch and the thermal mismatch between the aluminum nitride buffer layer 32 and the substrate 31 (for example, the sapphire substrate) are relatively small, the aluminum nitride buffer layer 32 can be used to improve the subsequent The quality of the gallium nitride layer 33 formed by epitaxial growth on the aluminum nitride buffer layer 32 further enhances the performance of the electronic device 30.
- the electronic device 30 may include a light emitting diode device or other suitable semiconductor electronic device, and when the electronic device 30 is a gallium nitride based light emitting diode device, the electronic device 30 may further include a quantum well layer 34 formed on the gallium nitride layer.
- the layer 33 at this time, the gallium nitride layer 33 can be processed to form an N-type doped gallium nitride layer 33N, and the P-type doped gallium nitride layer 33P can be further formed on the quantum well layer 34, but This is limited.
- the introduction of oxygen during the main sputtering of the aluminum nitride buffer layer 32 improves the film formation quality of the gallium nitride layer 33 formed on the aluminum nitride buffer layer 32, and the electronic device 30 (for example, a light emitting diode device) The various electrical performance can be improved.
- the film forming method of the semiconductor device of the present invention can stabilize the condition of the chamber by using different process parameters in the surface modification process of different sputtering processes performed on the multi-batch substrate.
- the condition of the target can compensate for the negative influence on the film thickness uniformity without the surface modification process of the target in the sputtering process, so that the film formation quality can be improved and the film thickness uniformity can be improved. effect.
- the film formation method of the semiconductor device of the present invention is used to form an aluminum nitride film, since the film formation quality and thickness uniformity of the aluminum nitride film are improved, nitridation for subsequent formation on the aluminum nitride film is performed.
- the epitaxial growth quality of the gallium layer has also improved.
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Abstract
Description
Claims (26)
- 一种半导体设备的成膜方法,其特征在于,包括:依序进行多次溅射流程,以分别在多批次基板上形成薄膜,其中,各所述溅射流程包括:将基板载入腔室内并放置于承载底座上;将遮蔽盘移至靶材与所述基板之间;在所述腔室内通入惰性气体以对所述靶材进行表面修饰工艺;进行预溅射,以对所述靶材的表面进行预处理;将所述遮蔽盘从所述靶材与所述基板之间移开,并利用所述靶材对所述基板进行主溅射以在所述基板上形成薄膜;以及将所述基板移出所述腔室;其中,对第N批次基板进行的所述溅射流程的所述表面修饰工艺与对第N+1批次基板进行的所述溅射流程的所述表面修饰工艺具有不同的工艺参数,且N为正整数。
- 如权利要求1所述的半导体设备的成膜方法,其特征在于,所述表面修饰工艺中通入的所述惰性气体包括氩气。
- 如权利要求1所述的半导体设备的成膜方法,其特征在于,对第N批次基板进行的所述溅射流程的所述表面修饰工艺具有第一工艺时间,且对第N+1批次基板进行的所述溅射流程的所述表面修饰工艺具有不同于所述第一工艺时间的第二工艺时间。
- 如权利要求3所述的半导体设备的成膜方法,其特征在于,所述第二工艺时间为所述第一工艺时间的2至8倍。
- 如权利要求3所述的半导体设备的成膜方法,其特征在于,所述第一工艺时间为1~3秒,且所述第二工艺时间为6~8秒。
- 如权利要求3所述的半导体设备的成膜方法,其特征在于,对第N批次基板进行的所述溅射流程的所述表面修饰工艺与对第N+1批次基板进行的所述溅射流程的所述表面修饰工艺具有相同的溅射功率。
- 如权利要求1所述的半导体设备的成膜方法,其特征在于,对第N批次基板进行的所述溅射流程的所述表面修饰工艺与对第N+1批次基板进行的所述溅射流程的所述表面修饰工艺具有不同的溅射功率。
- 如权利要求7所述的半导体设备的成膜方法,其特征在于,对第N批次基板进行的所述溅射流程的所述表面修饰工艺与对第N+1批次基板进行的所述溅射流程的所述表面修饰工艺具有相同的工艺时间。
- 如权利要求1所述的半导体设备的成膜方法,其特征在于,对第N批次基板进行的所述溅射流程的所述表面修饰工艺与对第N+1批次基板进行的所述溅射流程的所述表面修饰工艺具有不同的工艺时间与溅射功率。
- 如权利要求1所述的半导体设备的成膜方法,其特征在于,在所述预溅射时通入的气体与在所述主溅射时通入的气体相同。
- 如权利要求1所述的半导体设备的成膜方法,其特征在于,还包括在所述预溅射以及所述主溅射的过程中持续对所述靶材加载溅射功率。
- 如权利要求1所述的方法,其特征在于,还包括:连续重复进行多次所述溅射流程,其中,连续进行的所述多次溅射流程 构成一批次溅射流程;以及在所述一批次溅射流程之前和/或之后,进行涂布处理,其中,所述涂布处理对所述靶材加载的功率介于2500瓦至4000瓦之间。
- 一种半导体设备的氮化铝成膜方法,其特征在于,包括:依序进行多次溅射流程,以分别在多批次基板上形成氮化铝薄膜,其中,各所述溅射流程包括:将基板载入腔室内并放置于承载底座上;将遮蔽盘移至含铝靶材与所述基板之间;在所述腔室内通入惰性气体以对所述含铝靶材进行表面修饰工艺;进行预溅射,以对所述含铝靶材的表面进行预处理,使所述含铝靶材的表面由富铝状态转变为过渡状态;将所述遮蔽盘从所述含铝靶材与所述基板之间移开,并在所述腔室内通入惰性气体及含氮气体且以所述含铝靶材对所述基板进行主溅射以在所述基板上形成氮化铝薄膜,以及将所述基板移出所述腔室;其中,对第N批次基板进行的所述溅射流程的所述表面修饰工艺与对第N+1批次基板进行的所述溅射流程的所述表面修饰工艺具有不同的工艺参数,且N为正整数。
- 如权利要求13所述的半导体设备的氮化铝成膜方法,其特征在于,所述表面修饰工艺中通入的所述惰性气体包括氩气。
- 如权利要求13所述的半导体设备的氮化铝成膜方法,其特征在于,对第N批次基板进行的所述溅射流程的所述表面修饰工艺具有第一工艺时间,且对第N+1批次基板进行的所述溅射流程的所述表面修饰工艺具有不同于所述第一工艺时间的第二工艺时间。
- 如权利要求15所述的半导体设备的氮化铝成膜方法,其特征在于,所述第二工艺时间为所述第一工艺时间的2至8倍。
- 如权利要求16所述的半导体设备的氮化铝成膜方法,其特征在于,所述第一工艺时间为1~3秒,且所述第二工艺时间为6~8秒。
- 如权利要求16所述的半导体设备的氮化铝成膜方法,其特征在于,对第N批次基板进行的所述溅射流程的所述表面修饰工艺与对第N+1批次基板进行的所述溅射流程的所述表面修饰工艺具有相同的溅射功率。
- 如权利要求13所述的半导体设备的成膜方法,其特征在于,对第N批次基板进行的所述溅射流程的所述表面修饰工艺与对第N+1批次基板进行的所述溅射流程的所述表面修饰工艺具有不同的溅射功率。
- 如权利要求19所述的半导体设备的氮化铝成膜方法,其特征在于,对第N批次基板进行的所述溅射流程的所述表面修饰工艺与对第N+1批次基板进行的所述溅射流程的所述表面修饰工艺具有相同的工艺时间。
- 如权利要求13所述的半导体设备的成膜方法,其特征在于,对第N批次基板进行的所述溅射流程的所述表面修饰工艺与对第N+1批次基板进行的所述溅射流程的所述表面修饰工艺具有不同的工艺时间与溅射功率。
- 如权利要求13所述的半导体设备的氮化铝成膜方法,其特征在于,所述主溅射还包括在所述腔室内通入含氧气体,以使所述氮化铝薄膜包括氧掺质。
- 如权利要求13所述的半导体设备的氮化铝成膜方法,其特征在于,在所述预溅射时通入的气体与在所述主溅射时通入的气体相同。
- 如权利要求13所述的半导体设备的氮化铝成膜方法,其特征在于,还包括在所述预溅射以及所述主溅射的过程中持续对所述含铝靶材加载溅射功率。
- 如权利要求13所述的半导体设备的氮化铝成膜方法,其特征在于,进行所述预溅射时对所述含铝靶材加载的溅射功率等于进行所述主溅射时对所述含铝靶材加载的溅射功率。
- 如权利要求13所述的方法,其特征在于,还包括:连续重复进行多次所述溅射流程,连续进行的所述多次溅射流程构成一批次溅射流程;以及在所述一批次溅射流程之前和/或之后,进行涂布处理,其中,所述涂布处理对所述含铝靶材加载的功率介于2500瓦至4000瓦之间。
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CN104246980A (zh) * | 2012-04-26 | 2014-12-24 | 应用材料公司 | 用于led制造的pvd缓冲层 |
CN102820418A (zh) * | 2012-08-28 | 2012-12-12 | 广州有色金属研究院 | 一种半导体照明用绝缘导热膜层材料及其制备方法 |
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KR20180116130A (ko) | 2018-10-24 |
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TW201742938A (zh) | 2017-12-16 |
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