WO2017209084A1 - Touch sensor - Google Patents

Abstract

[Problem] To provide a touch sensor in which total light transmittance and haze are improved, the touch sensor is made thinner by reduction of members, and costs are lower in comparison with conventional configurations. [Solution] A touch sensor 10 is provided with a piezoelectric sensor 11 and an electrostatic capacitance sensor 12. The piezoelectric sensor 11 is provided with: a piezoelectric film 16, which is a first laminate comprising a first base material film 14 and a piezoelectric coating layer 15; a first transparent electrode 17 formed on one surface of the piezoelectric film 16; and a second transparent electrode 18 formed on the other surface of the piezoelectric film 16. The electrostatic capacitance sensor 12 is provided with: a second laminate 21 in which a third transparent electrode 20 is formed on one surface of a second base material film 19; a third laminate 24 in which a fourth transparent electrode 23 is formed on one surface of a third base material film 22; and a transparent fill layer 25 that bonds the second laminate 21 and the third laminate 24.

Description

Touch sensor

The present invention relates to a touch sensor having a press detection function.

In recent years, touch sensors have been introduced into electronic devices such as smartphones and tablets, and are used as intuitive human-machine interfaces. The touch sensor detects a two-dimensional position touched with a finger or a pen. The electronic device is operated by detecting the touched position according to the display.

Also, touch sensors that detect pressing force are developed and disclosed for the purpose of increasing input information and improving operability. For example, there are a method of detecting a pressing force based on a change in capacitance when the casing is distorted, a change in resistance value using pressure-sensitive rubber, and the like, and a method of detecting a change in charge of the piezoelectric material. Various materials such as those using inorganic lead zirconate titanate (PZT), organic polyvinylidene fluoride, and polylactic acid are used in the technology that uses piezoelectric materials.

For example, Patent Document 1 (Japanese Patent Application Laid-Open No. 2010-26938) discloses a piezoelectric film for a touch panel that can detect pressure (Z coordinate) touched by a finger. In the touch panel of Patent Document 1, a laminate in which transparent electrodes are laminated on both sides of a piezoelectric layer containing a polyvinylidene fluoride-tetrafluoroethylene copolymer is used. A piezoelectric layer containing a polyvinylidene fluoride-tetrafluoroethylene copolymer is described as being produced by a casting method or an extrusion method, and is a single film. The thickness of the piezoelectric layer is 20 μm to 300 μm. In an example in which the thickness of the piezoelectric layer containing the polyvinylidene fluoride-tetrafluoroethylene copolymer is 20 μm to 100 μm, the total light transmittance is 95%, and the haze value (cloudiness value) is 5% to 7%. is there.

In order not to impair the visibility of the display image on the back of the touch panel, the haze value is desirably less than 5%, and it is necessary to further reduce the haze value. In addition, organic piezoelectric films generally have high material costs and processing costs, and further cost reduction is required for use as touch sensors.

A touch sensor with high detection accuracy has been proposed by using a capacitive method with high detection sensitivity for touch position detection and using a transparent organic piezoelectric film for indentation pressure detection (see Patent Document 2). However, since it is formed by bonding a capacitance sensor substrate and a piezoelectric film, there are problems such as an increase in cost due to an increase in members and an increase in the thickness of the touch sensor.

JP 2010-26938 A Patent 5722951

An object of the present invention is to provide a touch sensor that achieves an improvement in total light transmittance and haze, a reduction in thickness by reducing the number of members, and a reduction in cost, as compared with the prior art.

The touch sensor of the present invention includes a piezoelectric sensor and a capacitance sensor. The piezoelectric sensor includes a piezoelectric film in which a base film is laminated with a piezoelectric coating layer.

Transparent electrodes are arranged on one side and the other side of the piezoelectric film. The transparent electrode includes a transparent electrode used only for a piezoelectric sensor, a transparent electrode used only for a capacitance sensor, and a transparent electrode used for both a piezoelectric sensor and a capacitance sensor. A transparent electrode to be laminated at the time of manufacture is selected according to the type of touch sensor.

The thickness of the coating layer having piezoelectricity is 0.5 μm or more and 20 μm or less. The piezoelectric coating layer includes a fluororesin. Furthermore, the fluororesin is a copolymer of two or more of vinylidene fluoride, trifluoroethylene, and chlorotrifluoroethylene, or a polymer of vinylidene fluoride.

At least one layer of an undercoat layer, a refractive index adjustment layer, an optical adjustment layer, and an anti-blocking layer is provided between the base film and the coating layer having piezoelectricity. Alternatively, a piezoelectric coating layer may be directly formed on the base film.

The thickness of the coating layer is 0.5 to 10 μm, the thickness of the refractive index adjustment layer is 80 to 160 nm, and the thickness of the transparent electrode is 20 nm or more. The coating layer has a refractive index of 1.40 to 1.50, the refractive index adjustment layer has a refractive index of 1.50 to 1.70, and the transparent electrode has a refractive index of 1.90 to 2.10.

At least one layer of an undercoat layer, a refractive index adjustment layer, an optical adjustment layer, and an anti-blocking layer is provided between the piezoelectric film and the transparent electrode. Or the transparent electrode may be directly formed in the piezoelectric film.

A transparent filling layer is laminated on the piezoelectric film and the transparent electrode. When the transparent electrode is not directly laminated on the piezoelectric film, a laminate in which the transparent electrode is formed on the base film may be prepared, and the laminate and the piezoelectric film may be laminated via a transparent filling layer.

The base film is selected from at least one of polyethylene terephthalate, cycloolefin copolymer, polycycloolefin, polyethylene naphthalate, and polycarbonate.

The transparent electrode is a transparent electrode mainly composed of indium oxide.

In the touch sensor of the present invention, a coating layer having piezoelectricity is formed on the base film, and the coating layer can be thinned. Since the coating layer is thin, it is difficult to deteriorate the total light transmittance and haze.

It is a figure which shows typically the structure of the touch sensor of this invention. It is the perspective view which decomposed | disassembled the touch sensor of FIG. 1 for every component. It is a figure which shows typically the other structure of an electrostatic capacitance sensor. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 2 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 3 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 4 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 5 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 6 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 7 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 8 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 9 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 10 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 11 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 12 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 13 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 14 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 15 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 16 of this invention. It is a figure which shows typically the other structure of the touch sensor which concerns on Embodiment 16 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 17 of this invention. It is a figure which shows typically the structure of the touch sensor which concerns on Embodiment 18 of this invention. It is a figure which shows typically the structure of the touch sensor of a comparative example. It is a figure which shows typically the structure which performed Example 4-10.

The touch sensor of the present invention will be described with reference to the drawings. If the configuration described in one embodiment has the same configuration in other embodiments, the description of the configuration may be omitted, and the same reference numerals may be attached to the drawings.

[Embodiment 1]
The touch sensor 10 of the present invention shown in FIGS. 1 and 2 is disposed on the display surface of a display. The touch sensor 10 of the present invention includes a piezoelectric sensor 11 and a capacitance sensor 12. The piezoelectric sensor 11 detects the pressing force by a piezoelectric method. The capacitance sensor 12 detects the pressed position (X coordinate and Y coordinate) by a capacitance method. The piezoelectric sensor 11 and the capacitance sensor 12 are bonded by a transparent filling layer 13.

[Piezoelectric sensor]
The piezoelectric sensor 11 includes a piezoelectric film 16 that is a first laminate including a first base film 14 and a coating layer 15 having piezoelectricity, a first transparent electrode 17 formed on one surface of the piezoelectric film 16, and a piezoelectric film 13. A second transparent electrode 18 formed on the other surface is provided. When the touch sensor 10 is pressed, the piezoelectric coating layer 15 is polarized, and the change in potential at that time is detected by the transparent electrodes 17 and 18 so that the pressing force can be detected.

[Capacitance sensor]
The capacitance sensor 12 is arranged on one side of the piezoelectric sensor 13. The capacitance sensor 12 includes a second laminated body 21 in which the third transparent electrode 20 is formed on one surface of the second base film 19, and a third laminated body in which the fourth transparent electrode 23 is formed on one surface of the third base film 22. The transparent filling layer 25 which adhere | attaches the body 24, the 2nd laminated body 21, and the 3rd laminated body 24 is provided. The transparent electrodes 20 and 24 are insulated from each other. The capacitance sensor 12 changes its capacitance when a finger or pen touches or approaches the touch sensor 10, changes the potential of the transparent electrodes 20 and 24 at that location, and changes the potential. The touch position can be detected by.

[Base film]
The first, second and third substrate films 14, 19, 22 are, for example, polyethylene terephthalate, cycloolefin polymer, polyethylene naphthalate, polyolefin, polycycloolefin, polycarbonate, polyether sulfone, polyarylate, polyimide, polyamide, polystyrene. And polymer films such as polynorbornene. Each of the base films 14, 19, and 22 is preferably a polyethylene terephthalate film (PET film) excellent in transparency, heat resistance, and mechanical properties, but is not limited thereto. Moreover, you may laminate | stack the film of a different material to make one base film.

The thickness of each base film 14, 19, and 22 is preferably 10 μm or more and 150 μm or less, but is not limited thereto. However, if the thickness of the base films 14, 19, and 22 is less than 10 μm, handling may be difficult. Moreover, when the thickness of the base films 14, 19, and 22 exceeds 150 μm, it may be difficult to wind up the piezoelectric film 16, the second laminated body 21, and the third laminated body 24 into a roll.

[Coating layer with piezoelectricity]
The coating layer 15 having piezoelectricity is a thin film coated on any surface of the first base film 14. The coating layer 15 having piezoelectricity is not particularly limited as long as the coated film has piezoelectricity. The coating layer 15 having piezoelectricity desirably exhibits piezoelectricity without performing poling (polarization treatment), but may exhibit piezoelectricity after poling.

There are two known types of poling, a non-contact type using corona discharge treatment polarization and a contact type in which a film is sandwiched between two metal plates and polarized by applying a voltage.

The coating layer 15 having piezoelectricity is formed into a solution by dissolving the material of the coating layer 15 in a solvent, and is thinly and uniformly formed on the first base film 14 by a known coating apparatus such as a bar coater or a gravure coater. It is obtained by coating and then drying.

[Material of coating layer having piezoelectricity]
As the material of the coating layer 15 having piezoelectricity, for example, a material containing a fluororesin is preferably used. Specific examples of a material containing a fluororesin include polyvinylidene fluoride, a vinylidene fluoride component-containing polymer, a vinylidene fluoride-trifluoroethylene copolymer, and a vinylidene fluoride-trifluoroethylene-chlorotrifluoroethylene copolymer. Polymer, hexafluoropropylene-vinylidene fluoride copolymer, perfluorovinyl ether-vinylidene fluoride copolymer, tetrafluoroethylene-vinylidene fluoride copolymer, hexafluoropropylene oxide-vinylidene fluoride copolymer A polymer, a copolymer of hexafluoropropylene oxide-tetrafluoroethylene-vinylidene fluoride, and a copolymer of hexafluoropropylene-tetrafluoroethylene-vinylidene fluoride can be selected. These polymers can be used alone or as a mixture. More preferred are a vinylidene fluoride-trifluoroethylene-chlorotrifluoroethylene copolymer, a vinylidene fluoride-trifluoroethylene copolymer, and a vinylidene fluoride polymer.

When a copolymer of vinylidene fluoride-trifluoroethylene is used as the material of the coating layer 15, the molar ratio of vinylidene fluoride and trifluoroethylene is 100 as a whole, and (50 to 85): (50 to 15) is appropriate. It is. When a vinylidene fluoride-trifluoroethylene-chlorotrifluoroethylene copolymer is used as the material for the coating layer 15, the molar ratio of vinylidene fluoride, trifluoroethylene, and chlorotrifluoroethylene is 100 as a whole. 63 to 65): (27 to 29): (10 to 6) is appropriate.

[Thickness of coating layer having piezoelectricity]
The thickness of the coating layer 15 having piezoelectricity after drying is not limited. However, in consideration of optical characteristics described later, 0.5 μm or more and 20 μm or less are appropriate, but 0.5 to 10 μm is more preferable. 0.5 to 5 μm is more preferable. If the thickness of the coating layer 15 having piezoelectricity after drying is less than 0.5 μm, the formed film may be incomplete. If the thickness of the coating layer 15 having piezoelectricity after drying exceeds 20 μm, the optical properties (haze and total light transmittance) may become inappropriate.

[Optical characteristics of piezoelectric film]
Since the image on the display must be clearly seen, the haze value of the piezoelectric film 16 is preferably less than 5%, and the total light transmittance is preferably 90% or more. If the haze value of the piezoelectric film 16 is 5% or more, or if the total light transmittance is less than 85%, the image on the display may not be clearly visible.

[Transparent electrode]
The first and second transparent electrodes 17 and 18 are electrodes for detecting a pressing force, and the third and fourth transparent electrodes 20 and 23 are electrodes for detecting a pressing position.

The first transparent electrode 17 covers the entire surface of the piezoelectric film 16, and the second transparent electrode 18 covers the entire other surface of the piezoelectric film 16. When the touch sensor 10 is pressed, the coating layer 15 having piezoelectricity is polarized. At that time, the first and second transparent electrodes 17 and 18 detect a change in potential of the coating layer 15 having piezoelectricity. For example, the second transparent electrode 18 is set to a reference potential (ground potential), and the first transparent electrode 17 detects a change in potential.

As shown in FIGS. 1 and 2, the third transparent electrode 20 and the fourth transparent electrode 23 are arranged on one surface side of the piezoelectric sensor 11. These transparent electrodes 20 and 23 are part of the capacitance sensor 12. As shown in FIG. 1, the 3rd transparent electrode 20 and the 4th transparent electrode 23 are insulated by having the 2nd base film 19 and the transparent filling layer 25 in between. Further, as shown in FIG. 2, the third and fourth transparent electrodes 20, 23 have a band shape, and face the direction in which the electrodes 20, 23 are orthogonal to each other. For example, the third transparent electrode 20 detects the X coordinate of the pressed position, and the fourth transparent electrode 23 detects the Y coordinate. By pressing or approaching the surface of the touch sensor 10 with a finger or a pen, the potential of the third and fourth transparent electrodes 20 and 23 at that position changes, and the X and Y coordinates are detected using the change in potential. To do.

1 has a third transparent electrode 20 on one surface of the second base film 19 and a fourth transparent electrode 23 on one surface of the third base film 22. It is not limited to. For example, like the electrostatic capacitance sensors 27, 28, and 29 in FIGS. 3A, 3B, and 3C, the transparent electrodes 20 and 23 are laminated on one surface or the other surface of the base films 19 and 22, The laminates 21 and 24 may be bonded by the transparent filling layer 25. Moreover, although the 2nd laminated body 21 is arrange | positioned above the 3rd laminated body 24, you may arrange | position conversely.

Each of the transparent electrodes 17, 18, 20, and 23 includes an indium-based composite oxide, typically indium tin composite oxide (ITO: Indium Tin Oxide), indium zinc composite oxide. Examples thereof include indium oxide (In203) doped with divalent metal ions. Indium-based composite oxides are characterized by high transmittance of 80% or more in the visible light region (380 to 780 nm) and low surface resistance per unit area (30 to 1000Ω / □ (ohms per square)). is doing.

The thickness of the indium composite oxide is preferably 35 nm or less. This is because if the thickness is too thick, the transmittance in the visible light region is deteriorated. In addition, the surface resistance value of the indium composite oxide is preferably 300Ω / □ or less, and more preferably 150Ω / □ or less. This is because if the surface resistance value becomes high, it will not function as an electrode.

A transparent electrode having a low surface resistance is formed by, for example, forming an amorphous layer of an indium-based composite oxide on a substrate film by sputtering or vacuum deposition, and then heat-treating it at 80 to 200 ° C. It is obtained by changing the crystalline layer to a crystalline layer.

Each of the transparent electrodes 17, 18, 20, 23 is not limited to the above materials, and a transparent conductive oxide such as tin zinc oxide, zinc oxide, fluorine-doped tin oxide, a conductive polymer such as polyethylenedioxythiophene, Can be used.

When poling the coating layer 15 having piezoelectricity, the poling may be performed after the first and second transparent electrodes 17 and 18 are formed, or the coating may be performed before the first and second transparent electrodes 17 and 18 are formed. You may poll the layer. When the first and second transparent electrodes 17 and 18 are formed by sputtering, either poling or sputtering may be performed first.

[Interlayer]
Between the first base film 14 and the coating layer 15 having piezoelectricity, the first, second and third base films 14, 19, 22 and the first, third and fourth transparent electrodes 17, 20, 23 A thin layer of about several nm to several tens of nm such as an undercoat layer and an index matching layer (optical adjustment layer) may be provided. The undercoat layer improves the adhesion between the layers, and the refractive index adjustment layer adjusts the reflectance. Furthermore, an anti-blocking layer may be provided between each base film 14, 19, 22 and the transparent electrodes 17, 20, 23. The anti-blocking layer has an effect of preventing the stacked films from being pressed (blocked).

[Transparent packing layer]
The transparent filling layers 13 and 25 fill the layers without forming an air layer. The surfaces of the first and fourth transparent electrodes 17 and 23 are covered with transparent filling layers 13 and 25. This is to prevent the total light transmittance and haze from being lowered by the reflection caused by the surfaces of the first and fourth transparent electrodes 17 and 23 and the scattering caused by the fine unevenness.

The transparent filling layers 13 and 25 use an adhesive or resin made of an optical transparent adhesive material or an optical transparent adhesive material. The transparent filling layers 13 and 25 may be formed by laminating a sheet-like optical transparent adhesive material or optical transparent adhesive material, or a liquid optical transparent adhesive material or optical transparent adhesive material is applied and irradiated with ultraviolet rays. Then, the transparent filling layers 13 and 25 may be formed by curing.

[display]
A touch sensor 10 is disposed on the front surface of the display. As the display, a flat display such as a liquid crystal display or an organic EL display can be used. The capacitance sensor 12 for detecting the pressed position is arranged above (touching) the piezoelectric sensor 11. The first and second transparent electrodes 17 and 18 are formed so as to cover the piezoelectric film 16, and when the piezoelectric sensor 11 is disposed above the capacitance sensor 12, the third and fourth transparent electrodes 20, This is because the change in capacitance 23 cannot be detected. The touch sensor 10 and the display are bonded with a transparent filling layer. As the transparent filling layer, the above optical transparent adhesive material or optical transparent adhesive material can be used.

As described above, in the present invention, the coating layer 15 having piezoelectricity is formed on the first base film 14, and the thickness of the piezoelectric material can be made thinner than before. Since the coating layer 15 having piezoelectricity is thin, it is difficult to deteriorate the total light transmittance and haze. Therefore, the touch sensor 10 with good optical characteristics can be realized.

[Embodiment 2]
In the touch sensor 10 of FIG. 1, the direction of the piezoelectric film 16 is arbitrary. As in the touch sensor 30 of FIG. 4, the piezoelectric coating layer 15 may be disposed on the upper side of the first base film 14.

4 has changed the direction of the piezoelectric film 16 with respect to the touch sensor 10 of FIG. 1, but the direction of the piezoelectric sensor 11 may be changed. The second transparent electrode 18 is adhered to the transparent filling layer 13, and the second transparent electrode 18, the piezoelectric sensor 11, and the first transparent electrode 17 are arranged in this order from the top.

[Embodiment 3]
Like the piezoelectric sensor 41 of the touch sensor 40 in FIG. 5A, the second transparent electrode 18 may not be directly formed on the piezoelectric film 16. A fourth laminated body 43 in which the second transparent electrode 18 is laminated on the fourth base film 42 is prepared, and the piezoelectric film 16 and the fourth laminated body are bonded by the transparent filling layer 44. The fourth base film 42 can be made of the same material as the first base film 14 or the like. The transparent filling layer 44 can be made of the same material as the other transparent filling layers 13 and the like.

The direction of the fourth stacked body 43 is not limited. In the piezoelectric sensor 41 of the touch sensor 40 in FIG. 5A, the second transparent electrode 18 is bonded to the transparent filling layer 44. Like the piezoelectric sensor 46 of the touch sensor 45 in FIG. 5B, the fourth base film 42 may be bonded to the transparent filling layer 44.

Furthermore, this embodiment can be applied to the touch sensor 30 of FIG. In the touch sensor 30, the second transparent electrode 18 is not directly formed on the first base film 14, the fourth laminate 43 is prepared, and the first base film and the fourth laminate 43 are bonded by the transparent filling layer 44. To do. The direction of the 4th laminated body 43 is not limited, Any of the 2nd transparent electrode 18 and the 4th base film 42 may be adhere | attached on the transparent filling layer 44. FIG.

[Embodiment 4]
Like the piezoelectric sensor 51 of the touch sensor 50 in FIG. 6A, the first transparent electrode 17 may not be directly formed on the piezoelectric film 16. A fifth laminated body 53 in which the first transparent electrode 17 is laminated on the fifth base film 52 is prepared, and the piezoelectric film 16 and the fifth laminated body 53 are bonded by the transparent filling layer 54. The fifth base film 52 can be made of the same material as the first base film 14 or the like. Moreover, the transparent filling layer 54 can be comprised with the same material as the other transparent filling layer 13 grade | etc.,.

The direction of the fifth stacked body 53 is not limited. In the piezoelectric sensor 51 of the touch sensor 50 in FIG. 6A, the fifth base film 52 is bonded to the transparent filling layer 54. Like the piezoelectric sensor 56 of the touch sensor 55 in FIG. 6B, the first transparent electrode 17 may be bonded to the transparent filling layer 54.

Furthermore, this embodiment can be applied to the touch sensor 30 of FIG. In the touch sensor 30, the first transparent electrode 17 is not directly formed on the coating layer 15 having piezoelectricity, the fifth stacked body 53 is prepared, and the coating layer 15 having piezoelectricity and the fifth stacked body 53 are transparently filled. Adhere by 54. The direction of the fifth laminated body 53 is not limited, and any of the first transparent electrode 17 and the fifth base film 52 may be bonded to the transparent filling layer 54.

[Embodiment 5]
The piezoelectric sensor 61 of the touch sensor 60 of FIG. 7 has a configuration in which the piezoelectric film 16, the fourth laminated body 43, and the fifth laminated body 53 are bonded by transparent filling layers 44 and 54. The piezoelectric sensor 61 is configured by combining the piezoelectric sensor 41 of FIG. 5 and the piezoelectric sensor 51 of FIG.

In the piezoelectric sensor 61, the directions of the piezoelectric film 16, the fourth laminated body 43, and the fifth laminated body 53 are arbitrary. The positions of the first base film 14 and the piezoelectric coating layer 15, the positions of the second transparent electrode 18 and the fourth base film 42, and the positions of the first transparent electrode 17 and the fifth base film 52 are interchanged. Also good. Accordingly, the piezoelectric sensor 61 has eight configurations.

[Embodiment 6]
In the capacitance sensor 71 of the touch sensor 70 of FIG. 8, the third transparent electrode 20 is formed on one surface of the sixth substrate film 72, and the fourth transparent electrode 23 is formed on the other surface of the sixth substrate film 72. ing. The sixth base film 72 can be the same as the first base film 14 or the like. In FIG. 8, the fourth transparent electrode 23 is bonded to the transparent filling layer 13, but the third transparent electrode 20 may be bonded to the transparent filling layer 13.

8 has a reduced number of base films and transparent filling layers as compared with the capacitive sensor 12 of FIG. Therefore, the touch sensor 70 can be thinned.

It is possible to change the electrostatic capacity sensor 12 used for the touch sensors 10, 30, 40, 45, 50, 55, and 60 described in the first to sixth embodiments to the electrostatic capacity sensor 71.

[Embodiment 7]
In the capacitance sensor 81 of the touch sensor 80 in FIG. 9A, a third ′ transparent electrode 82 and a fourth ′ transparent electrode 83 are formed on one surface side of the sixth base film 72. The third ′ transparent electrode 82 and the fourth ′ transparent electrode 83 are made of the same material as the third transparent electrode 20 and the fourth transparent electrode 23.

As shown in FIG. 9B, each of the third 'transparent electrode 82 and the fourth' transparent electrode 83 has a plurality of rectangular portions 85 and 86 arranged in the X direction. Alternatively, they are connected by linear portions 87 and 88 in the Y direction. Accordingly, the third ′ transparent electrode 82 and the fourth ′ transparent electrode 83 are oriented in directions orthogonal to each other. The rectangular portions 85 and 86 have shapes such as rhombus, square, hexagon. The third ′ transparent electrode 82 and the fourth ′ transparent electrode 83 intersect with each other through an insulator 84 so as not to be short-circuited.

In FIG. 9, the third ′ transparent electrode 82 intersects the fourth ′ transparent electrode 83. However, the fourth ′ transparent electrode 83 intersects the third ′ transparent electrode 82. good. The direction of the capacitance sensor 81 is not limited, and the transparent electrodes 82 and 83 may be bonded to the transparent filling layer 13.

It is possible to change the capacitance sensor 12 used in the touch sensors 10, 30, 40, 45, 50, 55, 60 described in the first to sixth embodiments to the capacitance sensor 81.

[Embodiment 8]
The capacitance sensor is not limited to a configuration in which a change in capacitance is detected by the two transparent electrodes 20 and 23. The capacitive sensor 91 of the touch sensor 90 of FIG. 10 includes a rectangular transparent electrode 92 arranged vertically and horizontally on one surface of the sixth substrate film 72. A lead wiring 93 is connected to the rectangular transparent electrode 92. The rectangular transparent electrode 92 and the lead-out wiring 93 are made of the same material as the third transparent electrode 20 and the fourth transparent electrode 23.

It is possible to change the capacitance sensor 12 used for the touch sensors 10, 30, 40, 45, 50, 55, and 60 described in the first to sixth embodiments to the capacitance sensor 91.

[Embodiment 9]
The present application is not limited to a form in which the capacitance sensor and the piezoelectric sensor are completely separated. For example, the touch sensor 100 of FIG. 11A omits the first transparent electrode 17 as compared with the touch sensor 10 of FIG. The fourth transparent electrode 23 arranged on the one surface side of the piezoelectric film 16 is an electrode that detects the coordinates of the touch position by a capacitance method, and detects the potential when the coating layer 15 having piezoelectricity is polarized. Electrode. The fourth transparent electrode 23 also has the function of the first transparent electrode 17 of the above embodiment.

The touch sensor 100 can drive the piezoelectric sensor 101 and the capacitance sensor 12. When the piezoelectric sensor 101 operates, the fourth transparent electrode 23 and the second transparent electrode 18 are used. When the capacitance sensor 12 operates, the third transparent electrode 20 and the fourth transparent electrode 23 are used. The method of detecting the potential at each of the electrodes 18, 20, and 23 when the piezoelectric sensor 101 and the capacitance sensor 12 are driven is the same as the method of the above embodiment. As long as the fourth transparent electrode 23 is used in the piezoelectric sensor 101 and the capacitance sensor 12, the driving method of the piezoelectric sensor 101 and the capacitance sensor 12 is not limited.

11 may be a piezoelectric sensor 103 in which the positions of the coating layer 15 having piezoelectricity and the first base film 14 are interchanged as in the touch sensor 102 of FIG. 11B.

In the touch sensors 100 and 102, the first transparent electrode 17 is omitted as compared with the touch sensor 10 of FIG. 1, and the touch sensors 100 and 102 can be thinned.

[Embodiment 10]
Moreover, the structure which does not form the 2nd transparent electrode 18 directly in the piezoelectric film 16 like the piezoelectric sensor 111 of the touch sensor 110 of Fig.12 (a) may be sufficient. Similar to the piezoelectric sensors 41 and 46 of FIG. 5, the piezoelectric sensor 111 prepares a fourth laminated body 43 in which the second transparent electrode 18 is laminated on any surface of the fourth base film 42, and the transparent filling layer 44 The fourth laminate 43 and the piezoelectric film 16 are bonded.

11, the fourth transparent electrode 23 is used for the capacitance sensor 12 and the piezoelectric sensor 111 in the touch sensor 110, similarly to the touch sensors 100 and 102 in FIG. 11. As long as the fourth transparent electrode 24 is used in the capacitance sensor 12 and the piezoelectric sensor 111, the driving method of the capacitance sensor 12 and the piezoelectric sensor 111 is not limited. When the capacitance sensor 12 is driven, the third transparent electrode 20 and the fourth transparent electrode 23 are used. When the piezoelectric sensor 111 is driven, the second transparent electrode 18 and the fourth transparent electrode 23 are used.

As in the piezoelectric sensor 113 of the touch sensor 112 in FIG. 12B, the direction of the fourth stacked body 43 may be changed with respect to the piezoelectric sensor 111. The fourth base film 43 is adhered to the transparent filling layer 44.

Furthermore, the piezoelectric sensors 111 and 113 shown in FIGS. 12A and 12B can change the direction of the piezoelectric film 16. In FIG. 12, the coating layer 15 having piezoelectricity is on the first base film 14, but the first base film 14 may be on the coating layer 15 having piezoelectricity.

[Embodiment 11]
The fourth transparent electrode 23 may be directly formed on the piezoelectric film 16 as in the touch sensor 120 in FIG. A fourth transparent electrode 23 is laminated on one surface of the piezoelectric film 16, and a second transparent electrode 18 is laminated on the other surface of the piezoelectric film 16. The third transparent electrode 20 to the fourth transparent electrode 23 are 121, and the fourth transparent electrode 23 to the second transparent electrode 18 are the piezoelectric sensors 122.

In the touch sensor 120, the fourth transparent electrode 23 is used as the capacitance sensor 121 and the piezoelectric sensor 122 in the same manner as the touch sensors 100, 102, 110, and 112 in FIGS. 11 and 12.

The direction of the piezoelectric film 16 may be changed as compared with the piezoelectric sensor 122, like the piezoelectric sensor 124 of the touch sensor 123 in FIG. In the piezoelectric sensor 124, the fourth transparent electrode 23 is laminated on the coating layer 15 having piezoelectricity, and the second transparent electrode 18 is laminated on the first base film 14.

[Embodiment 12]
As in the piezoelectric sensor 131 of the touch sensor 130 in FIG. 14A, the second transparent electrode 18 may not be directly formed on the piezoelectric film 16. Similar to the piezoelectric sensors 41 and 46 of FIG. 5, the piezoelectric sensor 131 prepares a fourth laminated body 43 in which the second transparent electrode 18 is laminated on any surface of the fourth base film 42, and the transparent filling layer 44. Thus, the fourth laminate 43 and the piezoelectric film 16 are bonded together.

Further, the direction of the piezoelectric film 16 may be changed like the piezoelectric sensor 133 of the touch sensor 132 in FIG. The fourth transparent electrode 23 is laminated on the coating layer 15 having piezoelectricity.

Furthermore, in the piezoelectric sensors 131 and 133 shown in FIG. 14, the direction of the fourth stacked body 43 may be changed. The fourth base film 42 of the fourth laminate 43 is adhered to the transparent adhesive layer 44.

[Embodiment 13]
In the eleventh and twelfth embodiments, the capacitance sensor 71 shown in FIG. 8 may be used. Like the touch sensor 140 in FIG. 15A, a capacitance sensor 71 in which the third transparent electrode 20 is laminated on one surface of the sixth base film 72 and the fourth transparent electrode 23 is laminated on the other surface is used. In the piezoelectric sensor 141, the second transparent electrode 18 is laminated on the other surface of the piezoelectric film 16, and one surface is bonded to the transparent filling layer 25. The transparent filling layer 25 is bonded to the fourth transparent electrode 23, and the piezoelectric sensor 141 is from the fourth transparent electrode 23 to the second transparent electrode 18.

Also in this embodiment, if the fourth transparent electrode 23 is used for the capacitance sensor 71 and the piezoelectric sensor 141, the driving method of the capacitance sensor 71 and the piezoelectric sensor 141 is not limited.

Further, like the piezoelectric sensor 143 of the touch sensor 142 in FIG. 15B, the second transparent electrode 18 is laminated on the first base film 14, and the coating layer 15 having piezoelectricity is adhered to the transparent filling layer 25. May be.

Further, the second transparent electrode 18 is not directly formed on the piezoelectric film 16, and the fourth laminated body 43 in which the second transparent electrode 18 is laminated on the fourth base film 42 as in the touch sensors 130 and 132 of FIG. 14. The piezoelectric film 16 and the fourth laminated body 43 may be bonded by the transparent filling layer 44. The surface bonded to the transparent filling layer 44 of the fourth laminate 43 is not limited.

[Embodiment 14]
Like the touch sensor 150 of FIG. 16A, the capacitance sensor 81 of FIG. 9 may be used. The second transparent electrode 18 is laminated on the piezoelectric coating layer 15 of the piezoelectric film 16, and the first base film 14 and the sixth base film 72 are bonded by the transparent filling layer 13. The piezoelectric sensor 151 extends from the second transparent electrode 18 to the fourth ′ transparent electrode 83 of the capacitance sensor 81.

If the 4 ′ transparent electrode 83 is used for the capacitance sensor 81 and the piezoelectric sensor 151, the driving method of the capacitance sensor 81 and the piezoelectric sensor 151 is not limited.

Further, like the piezoelectric sensor 153 of the touch sensor 152 in FIG. 16B, the second transparent electrode 18 is laminated on the first base film 14, and the coating layer 15 having piezoelectricity is adhered to the transparent filling layer 13. May be.

Further, the second transparent electrode 18 is not directly formed on the piezoelectric film 16, and the fourth laminated body 43 in which the second transparent electrode 18 is laminated on the fourth base film 42 as in the touch sensors 130 and 132 of FIG. 14. The piezoelectric film 16 and the fourth laminated body 43 may be bonded by the transparent filling layer 44. The surface bonded to the transparent filling layer 44 of the fourth laminate 43 is not limited.

[Embodiment 15]
You may use the electrostatic capacitance sensor 161 like the touch sensor 160 of Fig.17 (a). The capacitance sensor 161 is formed with transparent electrodes 82 and 83 in two directions of the capacitance sensor 81 of FIG. 9 on one surface side of the piezoelectric film 16. For convenience of explanation, the capacitance sensor 161 is above the film 161 by pressure, but the capacitance sensor 161 may be above the fourth ′ transparent electrode 83.

The piezoelectric sensor 162 of the touch sensor 160 is formed by forming the fourth 'transparent electrode 83 on one surface of the piezoelectric film 16 and the second transparent electrode 18 on the other surface.

As in the case of the touch sensors 150 and 152 in FIG. 16, if the fourth 'transparent electrode 83 is used for the capacitance sensor 81 and the piezoelectric sensor 151, the driving method of the capacitance sensor 81 and the piezoelectric sensor 151 is not limited.

Further, like the piezoelectric sensor 165 of the touch sensor 164 in FIG. 17B, the second transparent electrode 18 is laminated on the first base film 14, and the piezoelectric coating layer 15 is adhered to the transparent filling layer 13. May be.

Further, the second transparent electrode 18 is not directly formed on the piezoelectric film 16, and the fourth laminated body 43 in which the second transparent electrode 18 is laminated on the fourth base film 42 is prepared and transparently filled as in the above embodiment. The piezoelectric film 16 and the fourth laminated body 43 may be bonded by the layer 44. The surface bonded to the transparent filling layer 44 of the fourth laminate 43 is not limited.

[Embodiment 16]
The transparent electrodes on the one surface side and the other surface side of the piezoelectric film 16 may be used in both the capacitance sensor and the piezoelectric sensor. For example, like the touch sensor 170 in FIG. 18, the third transparent electrode 20 may be laminated on one surface of the piezoelectric film 16 and the fourth transparent electrode 23 may be laminated on the other surface of the piezoelectric film 16.

The third transparent electrode 20 and the fourth transparent electrode 23 are electrodes for detecting the coordinates of the touch position by a capacitance method, and are electrodes for detecting a potential when the coating layer 15 having piezoelectricity is polarized. is there. If the 3rd transparent electrode 20 and the 4th transparent electrode 23 are used for the electrostatic capacitance sensor 171 and the piezoelectric sensor 172, the drive method of the electrostatic capacitance sensor 170 and the piezoelectric sensor 172 will not be limited. When the capacitance sensor 171 is driven, a change in capacitance is detected by the transparent electrodes 20 and 23. When the piezoelectric sensor 172 is driven, one of the transparent electrodes 20 and 23 becomes the ground potential, and the other electrode 23 and 20 detects a change in potential due to polarization of the coating layer 15.

The vertical direction of the piezoelectric sensor 16 is arbitrary. The 4th transparent electrode 23 may be laminated | stacked on the 1st base film 14, and the 3rd transparent electrode 20 may be laminated | stacked on the coating layer 15 which has piezoelectricity.

It is not limited to forming the transparent electrodes 20 and 23 directly on the piezoelectric film 16. For example, like the touch sensor 190 of FIG. 19A, a third laminate 24 in which the fourth transparent electrode 23 is laminated on the third base film 22 is prepared, and the third laminate 24 is formed by the transparent filling layer 44. You may adhere to the piezoelectric film 16. Similarly to the above, the capacitance sensor 191 and the piezoelectric sensor 192 use the same transparent electrodes 20 and 23 alternately.

Further, the touch sensor 193 of FIG. 19B prepares a second laminate 21 in which the third transparent electrode 20 is laminated on the second base film 19, and adheres the second laminate 21 to the piezoelectric film 16. Yes. Similarly to the above, the capacitance sensor 194 and the piezoelectric sensor 195 use the same transparent electrodes 20 and 23 alternately.

Furthermore, the touch sensor 196 in FIG. 19C prepares the second laminated body 21 and the third laminated body 24 and adheres them to the piezoelectric film 16. Similar to the above, the capacitance sensor 197 and the piezoelectric sensor 198 use the same transparent electrodes 20 and 23 alternately.

In FIG. 19, the direction of the piezoelectric film 16 is not limited, and the positions of the first base film 14 and the coating layer 15 having piezoelectricity are interchanged, and the first base film 14 may be adhered to the transparent filling layer 44. . The direction of the second stacked body 21 is not limited, and the third transparent electrode 20 may be bonded to the transparent filling layer 25. Further, the direction of the third stacked body 24 is not limited, and the third stacked body 22 may be bonded to the transparent filling layer 44.

At least one of the undercoat layer (ancher２０coat 少 な く と も layer), the refractive index adjustment layer (index matching layer) (optical adjustment layer), and the anti-blocking layer described in the first embodiment is the piezoelectric film 16 and the third and fourth transparent electrodes 20. , 23 may be formed.

[Embodiment 17]
In each embodiment, a transparent electrode may be disposed between the touch sensor and the display. For example, as in the touch sensor 200 of FIG. 20, a laminated body in which the seventh transparent electrode 201 is laminated on the entire surface of the seventh base film 202 is prepared and bonded with the transparent filling layer 203. The seventh transparent electrode 201 serves as a shield.

[Embodiment 18]
Although the refractive index adjustment layer has been described in the above embodiment, the refractive index adjustment layer 210 may be disposed between the piezoelectric film 16 and the second transparent electrode 18 as in the touch sensor 210 of FIG. The touch sensor 210 in FIG. 21 has the same configuration except that the refractive index adjustment layer 210 is added to the touch sensor 10 in FIG. The refractive index adjustment layer 210 may be disposed between the piezoelectric film 16 and the first transparent electrode 17.

For example, the thickness of the coating layer 15 having piezoelectricity is 0.5 to 10 μm, the thickness of the refractive index adjustment layer 210 is 80 to 160 nm, and the thickness of the second transparent electrode 18 is 20 nm or more. Further, the refractive index of the coating layer 15 having piezoelectricity is 1.40 to 1.50, the refractive index of the refractive index adjusting layer 210 is 1.50 to 1.70, and the refractive index of the second transparent electrode 18 is 1.90. One example is ~ 2.10. Further, the thickness of the first base film 14 is set to 2 to 100 μm, and the refractive index is set to 1.50 to 1.70. By using the above thickness and refractive index, the difference in reflectance between the second transparent electrode 18 and the refractive index adjustment layer 210 becomes 2.0% or less, and the appearance is improved.

[Examples 1 to 3]
In FIG. 12, the total light transmittance and haze of the touch sensor 10 when the thickness of the coating layer 15 is 1 μm, 5 μm, and 10 μm were measured, and the results are shown in Table 1. The coating layer 15 used P (VDF-TrFE), and the molar ratio was 72:25. The base film 14 was made of PET and had a thickness of 23 μm. The total light transmittance and haze were measured using a Direct reading haze computer (HGM-ZDP manufactured by Suga Test Instruments).

[Comparative Example 1]
As a comparative example, the total light transmittance and haze were measured when the piezoelectric film 222 was attached to the first base film 14 with the transparent filling layer 221 as in the touch sensor 220 shown in FIG. The piezoelectric film 222 was a single film manufactured by extrusion using PVDF and had a thickness of 80 μm. The transparent filling layer 221 used an optical transparent adhesive, and its thickness was 22 μm. Other configurations are the same as those in the embodiment.

From Table 1, all examples have better total light transmittance and haze than the comparative examples. In the comparative example, it is considered that the thickness of the piezoelectric film 222 is too thick, and the haze is particularly deteriorated due to the thickness.

[Examples 4 to 9]
Further, in order to confirm the change in appearance due to the refractive index adjustment layer 211 in FIG. 21, a coating layer 15 having piezoelectricity, a refractive index adjustment layer on the first base film 14 having a thickness of 23 μm as shown in FIG. 211, the 2nd transparent electrode 18 was created, and thickness and refractive index were measured. The results are shown in Table 2. The “first layer” is the piezoelectric coating layer 15, the “second layer” is the refractive index adjustment layer 211, and the “third layer” is the second transparent electrode 18.

The piezoelectric film 16 was prepared by coating a polyethylene terephthalate base film with a copolymer of vinylidene fluoride, trifluoroethylene, and chlorotrifluoroethylene. The copolymer of vinylidene fluoride, trifluoroethylene, and chlorotrifluoroethylene was Piezotech RT ^™ TS manufactured by Arkema Co., Ltd., and a solution was prepared in MIBK (methyl isobutyl ketone) by ultrasonic waves. Next, a solution of a copolymer of vinylidene fluoride, trifluoroethylene, and chlorotrifluoroethylene was coated on a polyethylene terephthalate base film by a bar coater. Next, the polyethylene terephthalate base film and the undried coating layer were dried at 110 ° C. for 5 minutes to prepare a coating layer. The thickness of the coating layer 15 shown in Table 2 is the thickness after drying.

As shown in Table 2 below, the refractive index adjustment layer 211 may have a refractive index of 1.54, 1.62, 1.7. Since the manufacturing method differs depending on the refractive index, each refractive index will be described. When the refractive index is 1.54, a thermosetting resin (refractive index of light) having a weight ratio of 2: 2: 1 of melamine resin: alkyd resin: organosilane condensate is formed on one surface of the coating layer 15 having piezoelectricity. n = 1.54), the refractive index adjustment layer 211 having a thickness of 120 nm was formed.

When the refractive index is 1.62, an optical adjustment composition containing 47 parts by mass of UV curable resin, 57 parts by mass of zirconia oxide particles (median diameter 40 nm) and PGME on one surface of the coating layer 15 having piezoelectricity (Manufactured by JSR, “OPSTAR Z7412”, solid content: 12% by mass) was applied using a gravure coater, and immediately heated and dried at 60 ° C. for 1 minute in a windless state (less than 0.1 m / s). Then, the curing process was performed by irradiating ultraviolet rays with an integrated light amount of 250 mJ / cm ² with a high-pressure mercury lamp. By this method, a refractive index adjustment layer 211 having a thickness of 90, 120, or 150 nm and a refractive index of 1.62 was formed on the coating layer 15 having piezoelectricity.

When the refractive index is 1.7, a thermosetting resin composed of a melamine resin, an alkyd resin, and an organic silane condensate (by weight ratio, melamine resin: alkyd resin: organosilane condensate = 2: 2: 1) and TiO ₂ A resin composition in which fine particles (refractive index = 2.35) were mixed was prepared. At this time, the mixing amount of the TiO ₂ fine particles was adjusted so that the refractive index of the resin composition was 1.70. And the said resin composition was apply | coated on the coating layer 15 which has piezoelectricity, this was hardened, and the 150-nm-thick refractive index adjustment layer 211 (refractive index 1.70) was formed.

Note that a hard coat layer 231 having an anti-blocking function is formed on the opposite surface of the first base film 14 to the coating layer 15.

In each example, the thickness of the coating layer 15 having piezoelectricity is 0.5 to 10 μm, the thickness of the refractive index adjustment layer 211 is 80 to 160 nm, and the thickness of the second transparent electrode 18 is 20 nm or more as described above. It has become. The refractive index of the coating layer 15 having piezoelectricity is 1.40 to 1.50, the refractive index of the refractive index adjusting layer 211 is 1.50 to 1.70, and the refractive index of the second transparent electrode 18 is 1.90. It is ~ 2.10. The difference in reflectance between the second transparent electrode 18 and the refractive index adjustment layer 211 was 2% or less, and the appearance was good.

The second transparent electrode 18 is etched to become a desired electrode or the like as necessary. When obtaining the refractive index, the refractive index of the refractive index adjusting layer 211 was the portion where the second transparent electrode 18 was removed by etching. Therefore, the reflectance difference was calculated | required by calculating | requiring the reflectance of air and the 2nd transparent electrode 18, air, and the refractive index adjustment layer 211 from each refractive index.

[Comparative Examples 2-3]
As comparative examples for Examples 4 to 9, a case where the refractive index adjustment layer 211 was not provided (Comparative Example 3) and a case where the refractive index of the refractive index adjustment layer 211 was smaller than 1.5 (Comparative Example 4) were performed. When the refractive index adjustment layer 211 is not provided, the reflectance difference is a difference between the second transparent electrode 18 and the coating layer 15 having piezoelectricity. The difference in reflectance was greater than 2% and the appearance was poor.

In the case where the refractive index is 1.46 (Comparative Example 4), the refractive index adjusting layer 211 is prepared by diluting silica sol (Colcoat P, Colcoat P) with ethanol so that the solid content concentration is 2%. On one side of the coating layer 15 having piezoelectricity, it is applied by a silica coating method, then dried and cured at 150 ° C. for 2 minutes, and a layer having a thickness of 120 nm (SiO ₂ film, refractive index of light 1.. 46) to form a refractive index adjusting layer 211. In the comparative example, the manufacturing method of the other configuration is the same as that of the example.

As described above, by providing the second transparent electrode 18 on the coating layer 15 having piezoelectricity, the second transparent electrode 18 may be colored yellow or brown to impair the appearance. The refractive index adjustment layer 211 is provided as in the present invention, and the thickness and the refractive index of the second transparent electrode 18, the refractive index adjustment layer 211, and the coating layer 15 having piezoelectricity are adjusted to be in the above-described range. Thus, it was found that the difference in reflectance can be reduced as shown in Table 2, and the appearance is not impaired. It has been found that even if a configuration in which the refractive index adjusting layer 211 and the second transparent electrode 18 are laminated on the piezoelectric film 16 is disposed on the front surface of the display, the appearance of the display is hardly impaired.

In addition, the present invention can be carried out in a mode in which various improvements, modifications, and changes are added based on the knowledge of those skilled in the art without departing from the spirit of the present invention.

The touch sensor of the present invention is disposed on the front surface of the display and can be used as an integral part of the display.

10, 30, 40, 45, 50, 55, 60, 70, 80, 90, 100, 102, 110, 112, 120, 123, 130, 132, 140, 142, 150, 152, 160, 164, 170, 190, 193, 196, 200, 210: Touch sensors 11, 41, 46, 56, 61, 101, 103, 111, 113, 122, 124, 131, 133, 141, 143, 151, 153, 162, 165, 172, 192, 195, 198: Piezoelectric sensors 12, 27, 28, 29, 71, 81, 91, 121, 161, 171, 191, 194, 197: Capacitance sensors 13, 25, 44, 183: Transparent filling Layers 14, 19, 22, 42, 52, 72, 182: base film 15: coating layers 16, 21, 24, 4 having piezoelectricity , 53,62,71,81: laminate 17,18,20,23,82,83,92,181: Transparent electrode 84: insulator 211: refractive index adjusting layer 231: a hard coat layer having anti-blocking function

Claims (15)

1. A capacitance sensor that detects the coordinates of the touch position by a capacitance method;
   A piezoelectric sensor that is provided on the back surface of the capacitance sensor and that performs pressure detection using a piezoelectric film in which a coating layer having piezoelectricity is laminated on a base film;
   Touch sensor equipped with.
2. A piezoelectric sensor that performs pressure detection using a piezoelectric film in which a piezoelectric coating layer is laminated on the back surface of the base film; and
   Laminated on the surface of the base film, a transparent electrode for detecting the coordinates of the touch position by the capacitance method;
   Touch sensor equipped with.
3. A piezoelectric film in which a coating layer having piezoelectricity is laminated on a base film, and a change in potential when the piezoelectric coating layer is polarized on one side and the other side of the piezoelectric film. A piezoelectric sensor having a transparent electrode of
   A transparent electrode disposed on one side of the piezoelectric sensor for detecting coordinates of a touch position by a capacitance method;
   Touch sensor equipped with.
4. A piezoelectric film in which a coating layer having piezoelectricity is laminated on a base film, and a piezoelectric sensor provided with a transparent electrode disposed on one side and the other side of the piezoelectric film;
   A capacitance sensor that is disposed on one surface side of the piezoelectric sensor and detects the coordinates of the touch position by a capacitance method;
   With
   A transparent electrode disposed on one surface side of the piezoelectric film is used to detect a coordinate of a touch position by a transparent electrode for detecting a change in potential when a piezoelectric coating layer is polarized and a capacitance method. A touch sensor that is a transparent electrode.
5. A piezoelectric film in which a coating layer having piezoelectricity is laminated on a base film;
   Transparent electrodes disposed on one side and the other side of the piezoelectric film;
   With
   The transparent electrodes arranged on one side and the other side of the piezoelectric film are transparent electrodes for detecting a change in potential when the piezoelectric coating layer is polarized, and at least one side of the piezoelectric film The touch sensor is a transparent electrode for detecting the coordinates of the touch position by a capacitive method.
6. The touch sensor according to claim 1, wherein the thickness of the piezoelectric coating layer is more than 0.5 μm and less than 20 μm.
7. The touch sensor according to claim 1, wherein the piezoelectric coating layer contains a fluororesin.
8. The touch sensor according to claim 7, wherein the fluororesin is a copolymer of two or more of vinylidene fluoride, tetrafluoroethylene, and chlorotrifluoroethylene, or a polymer of vinylidene fluoride.
9. The touch sensor according to claim 1, further comprising at least one of an undercoat layer, a refractive index adjusting layer, and an anti-blocking layer between the base film and the coating layer having piezoelectricity.
10. Between the piezoelectric film and the transparent electrode for detecting the coordinates of the touch position, between the piezoelectric film and the transparent electrode for detecting a change in potential when the piezoelectric coating layer is polarized, or the The touch sensor according to claim 1, further comprising at least one of an undercoat layer, a refractive index adjustment layer, and an anti-blocking layer between both.
11. 11. The touch sensor according to claim 10, wherein the coating layer has a thickness of 0.5 to 10 μm, the refractive index adjustment layer has a thickness of 80 to 160 nm, and the transparent electrode has a thickness of 20 nm or more.
12. The refractive index of the coating layer is 1.40 to 1.50, the refractive index of the refractive index adjusting layer is 1.50 to 1.70, and the refractive index of the transparent electrode is 1.90 to 2.10. 11 touch sensors.
13. The transparent electrode for detecting the coordinates of the touch position, the transparent electrode for detecting a change in potential when the piezoelectric coating layer is polarized, or both are directly formed on the piezoelectric film. The touch sensor according to any one of 1 to 12.
14. The base film is selected from at least one of polyethylene terephthalate, polyethylene naphthalate, polyolefin, polycycloolefin, cycloolefin copolymer, polycarbonate, polyether sulfone, polyarylate, polyimide, polyamide, polystyrene, and polynorbornene. The touch sensor according to any one of 1 to 13.
15. The touch sensor according to claim 1, wherein the transparent electrode is a transparent electrode mainly composed of indium oxide.

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