WO2017192250A1 - Sous-ensembles de robot, ensembles effecteurs terminaux, et procédés à fissuration réduite - Google Patents

Sous-ensembles de robot, ensembles effecteurs terminaux, et procédés à fissuration réduite Download PDF

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Publication number
WO2017192250A1
WO2017192250A1 PCT/US2017/027076 US2017027076W WO2017192250A1 WO 2017192250 A1 WO2017192250 A1 WO 2017192250A1 US 2017027076 W US2017027076 W US 2017027076W WO 2017192250 A1 WO2017192250 A1 WO 2017192250A1
Authority
WO
WIPO (PCT)
Prior art keywords
robot
mounting plate
end effector
ceramic
component
Prior art date
Application number
PCT/US2017/027076
Other languages
English (en)
Inventor
Raj kumar THANU
Damon K. Cox
Original Assignee
Applied Materials, Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US15/225,394 external-priority patent/US10090188B2/en
Application filed by Applied Materials, Inc filed Critical Applied Materials, Inc
Priority to JP2018557795A priority Critical patent/JP6908626B2/ja
Priority to KR1020187035002A priority patent/KR102195800B1/ko
Priority to CN201780027087.3A priority patent/CN109153131B/zh
Publication of WO2017192250A1 publication Critical patent/WO2017192250A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B25J9/0012—Constructional details, e.g. manipulator supports, bases making use of synthetic construction materials, e.g. plastics, composites

Definitions

  • the present disclosure relates to the manufacture of electronic devices, and more specifically to adjustable robotic end effector assemblies and methods for adjusting orientation of brittle ceramic or glass end effectors.
  • precursor articles to such semiconductor wafers may be transported within various chambers of the tools by one or more robot apparatus.
  • transport may be from one process chamber to another within a transfer chamber, from a load lock to a process chamber, or from a substrate carrier to a load port in a factory interface.
  • the substrates rest on a robotic end effector that is coupled to an arm component of the robot.
  • the end effector may couple to a moveable component of the robot, such as a robot wrist.
  • the end effector is made of an alumina material in order to accommodate high temperatures and corrosive environmental exposure that may be present in the operating environment .
  • existing alumina end effectors (otherwise referred to as "blades") may be prone to relatively high rates of breakage .
  • a robot subassembly includes a robot component, a mounting plate coupled to the robot component, wherein the mounting plate includes adjustable orientation relative to the robot component, and a ceramic or glass end effector coupled to the mounting plate.
  • an end effector assembly in another aspect, includes a mounting plate configured to adjustably couple to a robot component, an end effector coupled to the mounting plate, and
  • orientation-adjusting members providing orientation adjustment capability between the robot component and the mounting plate.
  • a method of adjusting an orientation of a ceramic or glass end effector includes providing a robot component, a mounting plate adjustably coupled to the robot component, and the ceramic or glass end effector coupled to the mounting plate, and adjusting one or more of roll, pitch, and vertical orientation of the ceramic or glass end effector relative to the robot component by adjusting one or more gaps between the robot component and the mounting plate.
  • FIG. 1A illustrates an isometric view of a ceramic or glass end effector coupled to a robotic wrist according to the prior art .
  • FIG. IB illustrates a partial cross-sectioned side view of a portion of a ceramic or glass end effector shown coupled to a robot wrist according to the prior art .
  • FIG. 1C illustrates a partial cross-sectioned view of a portion of a ceramic or glass end effector shown coupled to a robot wrist and orientation adjusted using shims according to the prior art .
  • FIG. 2A illustrates an isometric view of a robot subassembly according to one or more embodiments .
  • FIG. 2B illustrates a partial cross-sectioned side view of a robot subassembly taken along section line 2B-2B of FIG. 2A according to one or more embodiments.
  • FIG. 2C illustrates a partial cross-sectioned side view of an attachment assembly for attachment of an end effector according to one or more embodiments.
  • FIG. 2D illustrates a partial cross-sectioned side view of a robot subassembly including shims for orientation adjustment between the robot component and the mounting plate according to one or more embodiments .
  • FIG. 2E illustrates a partial cross-sectioned side view of a robot subassembly including shims for orientation adjustment and further including an inclined surface on the end effector attachment surface of the mounting plate according to one or more embodiments .
  • FIG. 2F illustrates a partial cross-sectioned side view of a robot subassembly including shims for orientation adjustment and further including an inclined surface on the robot component attachment surface of the mounting plate according to one or more embodiments .
  • FIG. 3A illustrates a partial cross-sectioned side view of a robot subassembly including a set and lock adjustment mechanism showing the setting elements according to one or more embodiments .
  • FIG. 3B illustrates a cross-sectioned side view of a robot subassembly including a set and lock adjustment mechanism showing the locking elements according to one or more embodiments .
  • FIG. 3C illustrates an isometric view of a robot subassembly showing possible locations for the set and lock elements of the set and lock adjustment mechanism according to one or more embodiments .
  • FIG. 4 illustrates an isometric view of a robot subassembly according to one or more embodiments .
  • FIG. 5 illustrates a flowchart of a method of adjusting an orientation of an end effector according to one or more embodiments.
  • the substrates may be carried by an end effector
  • the substrate rests on the end effector during transport. Because of manufacturing tolerances and tolerance buildups, as part of a calibration process, sometimes the end effector will have its
  • orientation adjustment may include a roll adjustment, a pitch adjustment, a vertical adjustment, or combinations thereof .
  • the orientation adjustment may be carried out, as shown in FIG. 1A-1C, by providing adjustment capability between the end effector 102 and the robot wrist 104 using one or more shims 101, such as washers, that are inserted between the end effector 102 and the robot wrist 104. If shims 101 are used to adjust one or more of roll, pitch, or vertical
  • Glass used for end effectors can be made from fused quartz or fused silica.
  • Embodiments of the present disclosure may reduce or eliminate such ceramic or glass end effector cracking, while still allowing for one or more of roll, pitch, or vertical orientation adjustments.
  • a robot subassembly including a robot component, such as a robot wrist, a mounting plate coupled to the robot component, wherein the mounting plate includes adjustable orientation relative to the robot component, and a ceramic or glass end effector securely coupled to the mounting plate.
  • the adjustable orientation may be provided between the mounting plate and the robot component (e.g., wrist) wherein both members may be metal having relatively high ductility and/or elasticity and thus exhibit an ability to accommodate bending stresses without cracking or breakage.
  • the ceramic or glass end effector is rigidly clamped between co-parallel surfaces of the mounting plate and an attachment assembly such that the ceramic or glass end effector is substantially subjected to primarily compressive stresses that are less prone to cause cracking of the ceramic or glass end effector.
  • FIGs. 2A-2B illustrate partial isometric and cross-sectioned views of the robot subassembly 200 and various components thereof according to one or more
  • the robot subassembly 200 includes a robot component 204, which may be an
  • the outboard-most robot component such as a robot wrist, and a mounting plate 208 coupled to the robot component 204, wherein the mounting plate 208 includes an adjustable orientation relative to the robot component 204.
  • the outboard-most robot component is the robot arm component that is the furthest away from the shoulder joint of the robot.
  • the mounting plate 208 is an intermediate member between the robot component 204 and the ceramic or glass end effector 202. Although the mounting plate 208 is shown as a plate-like structure, other configurations may be used.
  • the robot subassembly 200 further includes a ceramic or glass end effector 202 securely coupled to the mounting plate 208 (shown truncated in FIG. 2B) .
  • the adjustable orientation allows for one or more of roll, pitch, or vertical
  • the ceramic or glass end effector 202 is securely fastened and attached to the mounting plate 208 by an attachment assembly 210
  • the ceramic or glass end effector 202 may be made of a suitable ceramic material such as alumina, alumina-titania ceramic, or the like, or from a suitable glass such as fused silica, fused quartz, or the like, for example.
  • the portion of the ceramic or glass end effector 202 that is coupled to the mounting plate 208 may be thin and may have top and bottom surfaces that are substantially parallel to one another.
  • the thickness of the ceramic or glass end effector 202 may be about 1.5 mm to about 5 mm, for example. Other thicknesses may be used.
  • the thickness of the ceramic or glass end effector 202 may be the same throughout the clamped portion.
  • the ceramic or glass end effector 202 may include contact pads 202P, which may be of any suitable shape, such as round, oval, square, hexagonal, octagonal, or
  • two contact pads 202P may be spaced apart in a lateral
  • the contact pads 202P may provide at least three-point contact with a substrate (not shown) thus providing a gap between the substrate and the top surface of the ceramic or glass end effector 202.
  • the contact pads 202P may be machined integrally onto the ceramic body in some embodiments, or alternatively fastened to the ceramic body by any suitable means, such as press fitting, sintering, adhering, fastening with
  • the contact pads 202P may have a flat or a domed profile.
  • the attachment assembly 210 may be made up of an attachment plate 212, which may be coupled to an underside of the mounting plate 208 (as depicted) , and end effector fasteners 218.
  • the attachment plate 212 may include an upper surface 214, which may be provided in contact with the underside of the ceramic or glass end effector 202.
  • the attachment plate 212 may be metal (e.g., aluminum or stainless steel) .
  • the mounting plate 208 may include a lower surface 216 (as depicted) , which may be provided in contact with the upper side of the ceramic or glass end effector 202.
  • Each of the lower surface 216 and upper surface 214 may be planar surfaces which are co-parallel and may be drawn into secure clamping engagement with the ceramic or glass end effector 202 by tightening end effector fasteners 218.
  • End effector fasteners 218 may be suitable screws, such as chamfered-head screws shown. Other suitable fastening systems and/or fasteners may be used to clamp the ceramic or glass end effector 202 to the mounting plate 208.
  • the clamping may impart largely compressive stresses to the clamped portion of the ceramic or glass end effector 202 over a relatively large area (e.g., an area of about 5,000 mm 2 or more) thus minimizing bending stresses.
  • a relatively large area e.g., an area of about 5,000 mm 2 or more
  • the propensity for cracking of the ceramic or glass end effector may be reduced .
  • the attachment plate 212 may be made of sheet metal with PEM® brand fasteners available from Penn Engineering & Manufacturing Corp.
  • attachment plate 212 installed therein.
  • Other configurations of the attachment plate 212 are possible.
  • a polyimide tape may be applied to the top and/or bottom of the ceramic or glass end effector 202 to further improve clamping and to minimize local stress concentrations.
  • the robot component 204 e.g., robot wrist
  • the mounting plate 208 may include a second recess 224.
  • These recesses 222, 224 allow the alignment of the upper and lower surfaces of the robot component 204 and the mounting plate 208 so that the robot subassembly 200 may exhibit a relatively thin vertical profile, while the steps formed in each may also aid in assembly.
  • the adjustable orientation between the robot component 204 and the mounting plate 208 may be provided, in one or more embodiments, by inserting one or more shims 226
  • Shims 226 may be inserted over the component fasteners 228 in some embodiments. Shims 226 may be made of a
  • the shims 226 may vary in
  • the shims 226 may vary in thickness from between about 0.025 mm to about 0.305 mm, for example. Other thicknesses of shims 226 or shim materials may be used. One or several shims 226 may be used at each
  • the adjustment locations may include three or more locations, such as the four locations shown. Varying amounts of shims 226 (possibly of differing
  • thicknesses may be placed at one or more of the locations to aid in orientation adjustment by providing variable gaps .
  • Shims 226 may have any suitable shape, thickness, and location that provides for attaining variable gaps at various locations to provide orientation adjustment between the robot component 204 and the mounting plate 208 thus
  • the shims 226 may be clamped between the robot component 204 and the mounting plate 208 by tightening component fasteners 228.
  • Component fasteners 228 may be chamfered-head screws, for example. Other suitable fasteners may be used.
  • Each of the mounting plate 208 and the robot component 204 may be metal, such as aluminum, stainless steel or other suitable metal and may be subject to bending stresses and yet not plastically yield or crack as they are much more elastic and ductile than ceramic or glass materials.
  • a locating pin 209 may be provided to assist in roughly locating the mounting plate 208 to the robot component 204.
  • FIG. 2D illustrates a partial cross-sectioned side view of a robot subassembly 200 including shims 226 between the robot component 204 and the mounting plate 208 according to one or more embodiments.
  • the addition of shims 226 at various locations may provide for roll, pitch and/or vertical adjustments .
  • FIG. 2E illustrates a partial cross-sectioned side view of a robot subassembly 200A including an inclined surface 230 formed as an end effector attachment surface of the mounting plate 208.
  • the inclined surface 230 may include an angle to the horizontal of greater than about 0.2 degrees, or even of between about 0.2 degrees and 2 degrees. Other angles are possible.
  • the inclined surface 230 may be set to approximately offset for pitch changes due to droop of the ceramic or glass end effector 202 and other robot components when extended into the various chambers (e.g., process chambers and/or load lock chambers) . In some instances fewer shims 226 may be used to achieve a
  • FIG. 2F illustrates a cross-sectioned side view of a robot subassembly 200B including an inclined surface 230 formed as a robot component attachment surface of the mounting plate 208 according to one or more embodiments.
  • the inclined surface 230 may accommodate for and correct expected droop and bring the ceramic or glass end effector 202 to a more horizontal initial position before orientation adjustment. Combinations of inclined surfaces on the robot component attachment surface and the end effector attachment surface may be used. Alternatively, an inclined surface may be placed on the robot component to accommodate for droop.
  • orientation adjustment means may be used, such as a set and lock mechanism 332 of robot subassembly 300 shown in FIGs. 3A-3C.
  • the orientation between the robot component 304 and the mounting plate 308 may be accomplished by three or more adjustment screws 334 provided at different locations on the mounting plate 308 (four being shown in FIG. 3C) .
  • the adjustment screws 334 may be adjusted to allow relatively different gaps between the robot component 304 and the mounting plate 308 at the different locations .
  • the different gaps set are maintained under the force exerted by spring members 335 received between the mounting plate 308 and the robot component 304.
  • the spring members 335 may be wave springs or any other suitable spring type.
  • locking screws 336 may be set to fix the relative orientation in roll, pitch, and/or vertical between the robot component 304 and the mounting plate 308 by fixing the gaps at the various adjustment locations. Tightening the locking screws 336 against the surface of the robot component pushes the head of the adjustment screws 334 against the mounting plate 308 and fixes the gaps .
  • the locking screws 336 may be located proximate to the adjustment screws 334 or elsewhere at suitable locations .
  • the connection to the ceramic or glass end effector 202 is the same as previously described in FIGs. 2A-2C.
  • Orientation adjustment accomplished by the position adjustable attachment between the robot component 204 and the mounting plate 208, as shown in FIG. 2A, may include roll adjustment 231, pitch adjustment 232, vertical adjustment 235, or combinations thereof.
  • the orientation adjustment is provided for by orientation adjusting members (e.g., one or more shims 226 or adjustment screws 334) that cause variable-size gaps between the robot component 204, 304 and the mounting plate 208, 308 at different locations.
  • orientation adjusting members e.g., one or more shims 226 or adjustment screws 334 that cause variable-size gaps between the robot component 204, 304 and the mounting plate 208, 308 at different locations.
  • a roll adjustment 231 is where one side of the ceramic or glass end effector 202 is raised or lowered relative to the other side by adding or subtracting shims 226 side-to-side or by suitably adjusting one side of a set and lock mechanism 332.
  • a pitch adjustment 232 may be where one longitudinal end of the ceramic or glass end effector 202 (e.g., legs 202L, 202R) is raised or lowered relative to the other end, such as by adding or subtracting shims 226 along the length of the mounting plate 208, or by adjusting adjustment screws 334 of the set and lock mechanism 332. For example, adding shims 226 closer to the robot component 204 lowers the legs 202L, 202R, whereas adding shims 226 closer to the ceramic or glass end effector 202 raises the legs 202L, 202R.
  • Vertical adjustment 235 may be accomplished by adding or subtracting shims 226 or adjusting adjustment screws 334 of the set and lock mechanism 332. Vertical adjustment 235 may be by adding shims 226 equally at each location or by equally adjusting the adjustment screws 334, for example. Combinations of the foregoing may be adjusted by different thickness shims added at different locations or different adjustments to adjustment screws 334.
  • FIG. 4 illustrates a robot subassembly 400 adapted for transporting substrates between electronic device manufacturing system chambers.
  • the robot subassembly 400 includes a rigid beam 409 and coupled robot components 204, such as a robot wrists coupled at the opposite ends of the rigid beam 409.
  • the rigid beam 409 may attach to one or more additional robot components of a robot (not shown) , which may be provided in a transfer chamber of a mainframe housing (not shown) .
  • Robot assemblies 200 as previously described, couple to the rigid beam 409.
  • the robot subassembly 400 may be configured and adapted to transport substrates to and from various chambers of a tool, such as to and from process chambers, and to and from load lock chambers, for example.
  • a tool such as to and from process chambers, and to and from load lock chambers, for example.
  • the roll, pitch, and vertical adjustments may be made
  • the robot may be any form of robot, such as a three-link robot, four-link robot, a Selective Compliance Articulated Robot Arm (SCARA) robot, or independently-controllable-arm robot.
  • SCARA Selective Compliance Articulated Robot Arm
  • Other types of robots may be employed and benefit from embodiments of the disclosure.
  • the robot subassembly 200 may be adapted for use with the robots described in US Pat. Nos . 5,789,878; 5,879,127; 6,267,549; 6,379,095; 6,582,175; and 6,722,834; and US Pat. Pubs.
  • robot subassembly 300 of FIGs . 3A-3C may be adapted to any suitable robot .
  • FIG. 5 illustrates a method 500 of adjusting an orientation of a ceramic or glass end effector 202 relative to a robot component 204, 304.
  • the method 500 includes, in 502, providing a robot component (e.g., robot component 204, 304), a mounting plate (e.g., mounting plate 208, 308) adjustably coupled to the robot component, and a ceramic or glass end effector (e.g., ceramic or glass end effector 202) coupled to the mounting plate.
  • a robot component e.g., robot component 204, 304
  • a mounting plate e.g., mounting plate 208, 308
  • a ceramic or glass end effector e.g., ceramic or glass end effector 202
  • the method 500 includes, in 504, adjusting a roll orientation, a pitch orientation, and/or a vertical
  • the ceramic or glass end effector e.g., ceramic or glass end effector 202
  • the robot component e.g., robot component 204, 304
  • adjustment of the gap may be by any suitable gap adjustment means, such as adding or subtracting shims 226, adjusting a set and lock mechanism 332, or the like.

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

L'invention concerne un sous-ensemble de robot, qui comprend une capacité de réglage d'orientation de roulis, de tangage et/ou d'orientation verticale d'un effecteur terminal en céramique ou en verre. Le sous-ensemble de robot comprend un élément de robot, une plaque de montage couplée à l'élément de robot, la plaque de montage comprenant une orientation réglable par rapport à l'élément de robot, et un effecteur terminal en céramique ou en verre cassant couplé à la plaque de montage. L'invention concerne également des procédés de réglage d'orientation entre un élément de robot et l'effecteur terminal, ainsi que de nombreux autres aspects.
PCT/US2017/027076 2016-05-05 2017-04-11 Sous-ensembles de robot, ensembles effecteurs terminaux, et procédés à fissuration réduite WO2017192250A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018557795A JP6908626B2 (ja) 2016-05-05 2017-04-11 亀裂が低減されたロボットサブアセンブリ、エンドエフェクタアセンブリ、及び方法
KR1020187035002A KR102195800B1 (ko) 2016-05-05 2017-04-11 로봇 서브어셈블리들, 엔드 이펙터 어셈블리들, 및 감소된 균열을 갖는 방법들
CN201780027087.3A CN109153131B (zh) 2016-05-05 2017-04-11 具有减少的破裂的机械手子组件、终端受动器组件及方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
IN201641015705 2016-05-05
IN201641015705 2016-05-05
US15/225,394 2016-08-01
US15/225,394 US10090188B2 (en) 2016-05-05 2016-08-01 Robot subassemblies, end effector assemblies, and methods with reduced cracking

Publications (1)

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WO2017192250A1 true WO2017192250A1 (fr) 2017-11-09

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WO (1) WO2017192250A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190061173A1 (en) * 2016-05-13 2019-02-28 Boe Technology Group Co., Ltd. Manipulator arm, manipulator and carrying device
CN113543940A (zh) * 2019-02-27 2021-10-22 应用材料公司 可更换的终端受动器接触垫、终端受动器和维护方法

Citations (5)

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Publication number Priority date Publication date Assignee Title
JPH1031812A (ja) * 1996-07-16 1998-02-03 Mitsubishi Electric Corp 磁気ヘッド調整機構
US20030198376A1 (en) * 2002-04-19 2003-10-23 Iraj Sadighi Vision system
JP2004066414A (ja) * 2002-08-08 2004-03-04 Toshiba Mach Co Ltd 測定器用水平出し装置
US20080257095A1 (en) * 2007-04-18 2008-10-23 Fabworx Solutions, Inc. Adjustable wrist design for robotic arm
US20140007731A1 (en) * 2012-07-06 2014-01-09 Persimmon Technologies Corporation High capacity robot arm

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1031812A (ja) * 1996-07-16 1998-02-03 Mitsubishi Electric Corp 磁気ヘッド調整機構
US20030198376A1 (en) * 2002-04-19 2003-10-23 Iraj Sadighi Vision system
JP2004066414A (ja) * 2002-08-08 2004-03-04 Toshiba Mach Co Ltd 測定器用水平出し装置
US20080257095A1 (en) * 2007-04-18 2008-10-23 Fabworx Solutions, Inc. Adjustable wrist design for robotic arm
US20140007731A1 (en) * 2012-07-06 2014-01-09 Persimmon Technologies Corporation High capacity robot arm

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190061173A1 (en) * 2016-05-13 2019-02-28 Boe Technology Group Co., Ltd. Manipulator arm, manipulator and carrying device
US10882192B2 (en) * 2016-05-13 2021-01-05 Boe Technology Group Co., Ltd. Manipulator arm, manipulator and carrying device
CN113543940A (zh) * 2019-02-27 2021-10-22 应用材料公司 可更换的终端受动器接触垫、终端受动器和维护方法

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