US20140007731A1 - High capacity robot arm - Google Patents
High capacity robot arm Download PDFInfo
- Publication number
- US20140007731A1 US20140007731A1 US13/795,736 US201313795736A US2014007731A1 US 20140007731 A1 US20140007731 A1 US 20140007731A1 US 201313795736 A US201313795736 A US 201313795736A US 2014007731 A1 US2014007731 A1 US 2014007731A1
- Authority
- US
- United States
- Prior art keywords
- wrist
- robot arm
- end effector
- adjustable
- socket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J17/00—Joints
- B25J17/02—Wrist joints
- B25J17/0258—Two-dimensional joints
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J17/00—Joints
- B25J17/02—Wrist joints
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/27—Arm part
- Y10S901/28—Joint
- Y10S901/29—Wrist
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
- Y10T74/20305—Robotic arm
- Y10T74/20329—Joint between elements
- Y10T74/20335—Wrist
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
Description
- This application claims benefit of and priority to U.S. Provisional Application Ser. No. 61/668,661 filed Jul. 6, 2012 under 35 U.S.C. §§119, 120, 363, 365, and 37 C.F.R. §1.55 and §1.78 and is incorporated herein by this reference.
- The invention relates to a robot arm for transporting wafers, solar panels, liquid crystal display screens, and other substrates.
- Various substrate robot arms are known. Some include a shoulder driven by drive isolated from the vacuum environment. A forearm link articulates with respect to the shoulder and a wrist link articulates with respect to the forearm. A substrate holding/carrying end effector is fixed to the wrist.
- It is desirable to be able to adjust the end effector attachment to the wrist. An end effector adjustment in elevation is desirable. An end effector adjustment in roll and/or pitch is also desirable. Furthermore, improvements in the connection of the wrist to the forearm are desirable.
- In examples of the invention, the end effector is coupled to the wrist via an adjustable joint. In some examples, a stronger, higher capacity arm is realized by a unique connection between the wrist and the forearm.
- Featured is a robot arm comprising at least first and second joined links and a driven rotating drum at one end of the first link. Other drives or any suitable joint driven structure may be used. Spaced upper and lower flanges are both connected to the second link and to the rotating drum. Preferably, the top flange is connected to the second link and to the lower flange. In one example, the first link is a forearm the second link is a wrist. The end of the forearm is typically rounded and so the first flange may include a curved depending skirt spaced from the rounded forearm link end. A plate extends laterally from the depending curved skirt which is attached to the drum.
- There may be a wafer handling end effector connected to the wrist and adjustment means for the end effector for adjusting the pitch and roll of the end effector with respect to the wrist link independently. In one example, brackets are fastened to the wrist and to the end effector each with an adjustable set screw for setting the roll of the end effector.
- There can be a ball joint between the end effector and the wrist which, in one design, includes a pin extending rearwardly from the end effector through an ear of the wrist. In one version, the end effector has a tang extending rearwardly therefrom which is received in a concave receptacle in the wrist. The tang surrounds the pin. The tang is typically fastened to the wrist and an adjustable set screw in the wrist abuts the tang for adjusting the pitch of the end effector.
- Also featured is a robot arm comprising a wrist, an end effector coupled to the wrist via an adjustable joint, and a leveling adjustment at the adjustable joint.
- In one version, the adjustable joint includes a socket on the wrist and an end effector tang received in the socket. Further included may be brackets fastening the end effector to the wrist with adjustable set screws varying the orientation of the end effector with respect to the brackets. The socket may include an ear and the tang may include a pin received in the ear. A set screw in the wrist preferably abuts the tang for adjusting the pitch of the end effector.
- In another design, the adjustable joint includes a socket on the end effector receiving a ball of the wrist. Further included may be a sleeve between the ball and the socket. The sleeve may be in a plurality of sections and may have a shoulder seated on the socket periphery. A set screw in the wrist may abut the end effector for leveling the end effector. The socket can be split and tightenable about the ball.
- In another design, an extension extends between the end effector and the wrist. There may be two spaced end effectors secured to two spaced extensions. The end effectors may each include a stationary block secured to the extension and an adjustable block adjustably secured to the stationary block. The leveling adjustment may include a bore in the adjustable block receiving a fastener from the stationary block and a spring between the adjustable block and the stationary block. Further included may be pins of the stationary block received in bores in the adjustable block.
- In some embodiments, a forearm has a drive for the wrist. The drive may be a rotating drum. Preferably, there is an upper flange and a lower flange coupling the wrist to the rotating drum. In some versions, the top flange is secured to the lower flange.
- Also featured is a robot arm comprising a wrist, an end effector, and an adjustable joint coupling the end effector to the wrist. The adjustable joint includes a member received in a socket. In one embodiment, the member is a ball. In another embodiment, the member is a tang. In both designs, there may be an upper flange and a lower flange coupling the wrist to a forearm.
- The disclosed embodiment, however, in other embodiments, need not achieve all these objectives and the claims hereof should not be limited to structures or methods capable of achieving these objectives.
- Other objects, features and advantages will occur to those skilled in the art from the following description of a preferred embodiment and the accompanying drawings, in which:
-
FIG. 1 is a schematic three dimensional exploded view showing the primary components associated with one version of a robot arm in accordance with an example of the disclosed embodiment; -
FIG. 2 is a schematic three dimensional exploded bottom view of the components shown inFIG. 1 ; -
FIG. 3 is a schematic three dimensional bottom view of an assembled robot arm in accordance with an example of the invention; -
FIG. 4 is a schematic three dimensional partially cut away view showing an example of the leveling means or features in one version of the disclosed embodiment; -
FIG. 5 is a schematic three dimensional top view showing an example of a robot arm in accordance with an example of the disclosed embodiment; -
FIG. 6 is a highly schematic three dimensional side view of a robot arm joint in accordance with examples of the disclosed embodiment; -
FIG. 7 is a schematic three dimensional view of an assembled wrist link and end effector in accordance with an example of the invention; -
FIG. 8 is an exploded isometric view of the wrist link and end effector ofFIG. 7 having features in one version of the disclosed embodiment; -
FIG. 9 is a schematic three dimensional view of an assembled wrist link and end effector in accordance with an example of the invention; and -
FIG. 10 is an exploded isometric view of the wrist link and end effector ofFIG. 9 having features in one version of the disclosed embodiment. - Aside from the embodiment or embodiments disclosed below, the disclosed embodiment is capable of other embodiments and of being practiced or being carried out in various ways. Thus, it is to be understood that the disclosed embodiment is not limited in its application to the details of construction and the arrangements of components set forth in the following description or illustrated in the drawings. If only one embodiment is described herein, the claims hereof are not to be limited to that embodiment. Moreover, the claims hereof are not to be read restrictively unless there is clear and convincing evidence manifesting a certain exclusion, restriction, or disclaimer. As shown in
FIG. 1 , in one example, arobot arm 10 includes a shoulder orupper arm link 20 typically driven by a drive subsystem. Theshoulder link 20 drives theforearm link 22 which, in turn drives thewrist link 24 via driven rotatingdrum 26 shown. In alternate aspects, other drives are possible. Spaced upper 28 and lower 30 flanges are connected to both thewrist link 24 and torotating drum 26 at the end of the forearm link. The result is a stronger, higher capacity arm. In one version shown, theupper flange 28skirt 100 is rounded and fastened to thewrist link 24 via thelower flange 30. In one particular example, the bottom flange extends rearwardly from the bottom of the wrist link and is a component of the wrist link. - Referring also to
FIGS. 2 through 5 , anend effector 32 may be coupled to thewrist link 24 via an adjustable joint with a leveling adjustment.End effector 32 may be adjustable in pitch and roll independently. In the example shown, there arebrackets distal sides 42. 44 and fasteners or shoulder screws 46, 48 fastened to the end effectorproximate face bracket adjustable set screws pin 62 extending rearwardly from theend effector 32 through anear 64 having a socket receiving portion of thewrist 24. The member ortang 66 about the pin is received in aconcave socket 68,FIG. 2 at the distal end of thewrist 24 and fastened to the wrist via the screw orshoulder screw 70. Theset screw 72 adjacent to theshoulder screw 70 in thewrist 24 abuts thetang 66 for adjusting the pitch of theend effector 32. -
FIG. 6 depicts how, in other designs, link 24′ includes spacedflange portions 28′, 30′ coupled to a rotating or driven assembly such as adrum 26 which typically is a component of an adjacent robot arm link. Fasteners or the like can be used to fasten the flanges to the upper and lower surfaces of the drum. Such a joint could be at the wrist, and/or the elbow, and/or the shoulder. In another example, one link, for example a forearm, drives numerous other links, for example, end effectors. Such a joint can be used multiple times in such an embodiment. - Referring now to
FIGS. 7 and 8 , there are shown alternate embodiments ofwrist 110 andend effector 112.Wrist 110 includes upper andlower flanges forearm 22 as previously described.Wrist 110 hasball portion 118 fastened thereto withscrews 120.Ball 118 is received insocket 132. A splitspherical sleeve portions inner faces outer face 130 ofball portion 118.Wrist 112,socket 132 is adapted to receive thesplit sleeve sections sleeve sections ball portion 118 and then slid into or otherwise engaged insocket 132 such thatend effector 112 may be rotatable with respect toball portion 118. - Sleeve shoulders 134, 136 may seat on
upper face 138 ofsocket 132, for example, to locate the spherical joint in elevation. The fit ofsleeve sections ball portion 118 andsocket 132 may be loose, line to line or interference as needed. -
Screws fasten wrist link 110 to endeffector 112 at the upper facingface 144 ofend effector 110 where setscrews upper face 144 and used in combination withscrews end effector 112 relative towrist 110.Socket 132 may have split cut 150 and lockingscrew 152 that engages aclearance hole 154 inflange 154 of split cut 150 and a threaded portion offlange 156 of split cut 150. Upon completion of leveling and adjustment ofend effector 112 relative towrist 110, screw 152 may be tightened to lock the position of theend effector 112,sleeve sections ball portion 118 relative to each other. - Referring now to
FIGS. 9 and 10 , there are shown alternate embodiments ofwrist 210 andend effector 212.Wrist 210 may similarly include upper and lower flanges suitable for being fastened to drum 26 offorearm 22 as previously described.End effector 212 has first andsecond extensions wrist 210 withscrews rear support 222 supports a rear edge ofsubstrate 224 and is similarly coupled towrist 210. First andsecond extensions adjustable end effectors adjustable end effectors adjustable support 228.Adjustable effector 228,FIG. 10 hasstationary block 230 coupled toextension 216 withplate 232 andfasteners 234.Adjustable block 236 hasbores pins block 230. Counter bore 246 ofadjustable block 236 has a bore portion and seat portion configured to acceptspring 248 and a threaded portion configured to acceptadjustment screw 250. In this manner, rotation ofadjustment screw 250 adjusts the elevation of the edge ofsubstrate 224 supported. Similarly adjustment ofend effector 226 adjusts the elevation of the edge ofsubstrate 224 supported. - Although specific features are shown in some drawings and not in others, this is for convenience only as each feature may be combined with any or all of the other features. The words “including” “comprising”, “having”, and “with” as used herein are to be interpreted broadly and comprehensively and are not limited to any physical interconnection. Moreover, any embodiments disclosed in the subject application are not to be taken as the only possible embodiments.
- In addition, any amendment presented during the prosecution of the patent application for this patent is not a disclaimer of any claim element presented in the application as filed: those skilled in the art cannot reasonably be expected to draft a claim that would literally encompass all possible equivalents, many equivalents will be unforeseeable at the time of the amendment and are beyond a fair interpretation of what is to be surrendered (if anything), the rationale underlying the amendment may bear no more than a tangential relation to many equivalents, and/or there are many other reasons the applicant can not be expected to describe certain insubstantial substitutes for any claim element amended.
- Other embodiments will occur to those skilled in the art and are within the following claims.
Claims (20)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/795,736 US20140007731A1 (en) | 2012-07-06 | 2013-03-12 | High capacity robot arm |
US14/940,192 US10940594B2 (en) | 2012-07-06 | 2015-11-13 | Robot arm with high capacity adjustable joint |
US15/844,936 US10894326B2 (en) | 2012-07-06 | 2017-12-18 | High capacity robot arm with adjustable joint at an end effector |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261668661P | 2012-07-06 | 2012-07-06 | |
US13/795,736 US20140007731A1 (en) | 2012-07-06 | 2013-03-12 | High capacity robot arm |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/940,192 Continuation US10940594B2 (en) | 2012-07-06 | 2015-11-13 | Robot arm with high capacity adjustable joint |
Publications (1)
Publication Number | Publication Date |
---|---|
US20140007731A1 true US20140007731A1 (en) | 2014-01-09 |
Family
ID=49877521
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/795,736 Abandoned US20140007731A1 (en) | 2012-07-06 | 2013-03-12 | High capacity robot arm |
US14/940,192 Active US10940594B2 (en) | 2012-07-06 | 2015-11-13 | Robot arm with high capacity adjustable joint |
US15/844,936 Active US10894326B2 (en) | 2012-07-06 | 2017-12-18 | High capacity robot arm with adjustable joint at an end effector |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/940,192 Active US10940594B2 (en) | 2012-07-06 | 2015-11-13 | Robot arm with high capacity adjustable joint |
US15/844,936 Active US10894326B2 (en) | 2012-07-06 | 2017-12-18 | High capacity robot arm with adjustable joint at an end effector |
Country Status (1)
Country | Link |
---|---|
US (3) | US20140007731A1 (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140060236A1 (en) * | 2012-08-31 | 2014-03-06 | Fanuc Corporation | Multiple joints robot having cover on end effector attachment |
US20160207756A1 (en) * | 2015-01-16 | 2016-07-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | Substrate structure, semiconductor structure and method for fabricating the same |
WO2017192250A1 (en) * | 2016-05-05 | 2017-11-09 | Applied Materials, Inc | Robot subassemblies, end effector assemblies, and methods with reduced cracking |
US20180100825A1 (en) * | 2014-01-31 | 2018-04-12 | Stmicroelectronics S.R.L. | Sensor of volatile substances with integrated heater and process for manufacturing a sensor of volatile substances |
US10090188B2 (en) | 2016-05-05 | 2018-10-02 | Applied Materials, Inc. | Robot subassemblies, end effector assemblies, and methods with reduced cracking |
US11254015B2 (en) | 2019-09-24 | 2022-02-22 | Thermo Crs Ltd. | Multi-axis gripper for lab automation robot |
WO2022262907A1 (en) * | 2021-06-18 | 2022-12-22 | Uwe Beier | Robot for handling flat substrates and aligning device |
US20230034114A1 (en) * | 2020-03-11 | 2023-02-02 | Asm Ip Holding B.V. | Substrate handling device with adjustable joints |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140007731A1 (en) | 2012-07-06 | 2014-01-09 | Persimmon Technologies Corporation | High capacity robot arm |
JP7412208B2 (en) * | 2020-02-17 | 2024-01-12 | 東京エレクトロン株式会社 | Conveyance device, processing system and conveyance method |
US20230298926A1 (en) * | 2022-02-07 | 2023-09-21 | Kla Corporation | Cleanroom compatible robotic end effector exchange system |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4582191A (en) * | 1982-06-17 | 1986-04-15 | Weigand Robert E | Article handling apparatus and method |
US4660274A (en) * | 1985-11-29 | 1987-04-28 | Goumas Peter G | Robot tool changing apparatus |
US5044063A (en) * | 1990-11-02 | 1991-09-03 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Robotic tool change mechanism |
JPH07108483A (en) * | 1993-10-07 | 1995-04-25 | Koyo Seiko Co Ltd | Robot arm |
JPH09213768A (en) * | 1996-02-02 | 1997-08-15 | Yaskawa Electric Corp | Wafer conveyor |
US5858101A (en) * | 1995-11-07 | 1999-01-12 | Sputtered Films, Inc. | System providing a controlled deposition of wafers |
JP2008142880A (en) * | 2006-11-14 | 2008-06-26 | I-Pulse Co Ltd | Part transfer device and surface mounting machine |
US20080182738A1 (en) * | 2007-01-31 | 2008-07-31 | Terry Grunke | Robotic end-of-arm tool quick-change device |
US20080257095A1 (en) * | 2007-04-18 | 2008-10-23 | Fabworx Solutions, Inc. | Adjustable wrist design for robotic arm |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4068763A (en) * | 1976-07-26 | 1978-01-17 | Nasa | Wrist joint assembly |
US4500065A (en) * | 1982-03-01 | 1985-02-19 | Cincinnati Milacron Inc. | Releasable tool mount for manipulator |
US4596415A (en) | 1985-03-08 | 1986-06-24 | Blatt Leland F | Quick disconnect device for actuating unit and gripper head |
US6874834B2 (en) | 1996-10-07 | 2005-04-05 | Phd, Inc. | Linear slide gripper |
US20030116985A1 (en) | 1998-08-04 | 2003-06-26 | Moilanen Steven M. | Modular stamped parts transfer gripper |
US6640458B2 (en) * | 2002-03-25 | 2003-11-04 | Btm Corporation | End arm effector set-up |
US6988696B2 (en) * | 2003-06-03 | 2006-01-24 | Delaware Capital Formation, Inc. | Mounting member with snap in swivel member |
US7073834B2 (en) * | 2004-06-25 | 2006-07-11 | Applied Materials, Inc. | Multiple section end effector assembly |
JP4612513B2 (en) | 2005-09-16 | 2011-01-12 | 星野楽器株式会社 | Side drum support device |
US7609020B2 (en) * | 2006-07-11 | 2009-10-27 | Delaware Capital Formation, Inc. | Geometric end effector system |
US20140007731A1 (en) * | 2012-07-06 | 2014-01-09 | Persimmon Technologies Corporation | High capacity robot arm |
US10005190B2 (en) * | 2014-12-05 | 2018-06-26 | Persimmon Technologies Corporation | Robot with wrist and end effector different materials |
WO2016187075A1 (en) * | 2015-05-19 | 2016-11-24 | Verselus, Llc | Paddle assembly for holding an object |
US10090188B2 (en) * | 2016-05-05 | 2018-10-02 | Applied Materials, Inc. | Robot subassemblies, end effector assemblies, and methods with reduced cracking |
-
2013
- 2013-03-12 US US13/795,736 patent/US20140007731A1/en not_active Abandoned
-
2015
- 2015-11-13 US US14/940,192 patent/US10940594B2/en active Active
-
2017
- 2017-12-18 US US15/844,936 patent/US10894326B2/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4582191A (en) * | 1982-06-17 | 1986-04-15 | Weigand Robert E | Article handling apparatus and method |
US4660274A (en) * | 1985-11-29 | 1987-04-28 | Goumas Peter G | Robot tool changing apparatus |
US5044063A (en) * | 1990-11-02 | 1991-09-03 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Robotic tool change mechanism |
JPH07108483A (en) * | 1993-10-07 | 1995-04-25 | Koyo Seiko Co Ltd | Robot arm |
US5858101A (en) * | 1995-11-07 | 1999-01-12 | Sputtered Films, Inc. | System providing a controlled deposition of wafers |
JPH09213768A (en) * | 1996-02-02 | 1997-08-15 | Yaskawa Electric Corp | Wafer conveyor |
JP2008142880A (en) * | 2006-11-14 | 2008-06-26 | I-Pulse Co Ltd | Part transfer device and surface mounting machine |
US20080182738A1 (en) * | 2007-01-31 | 2008-07-31 | Terry Grunke | Robotic end-of-arm tool quick-change device |
US20080257095A1 (en) * | 2007-04-18 | 2008-10-23 | Fabworx Solutions, Inc. | Adjustable wrist design for robotic arm |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140060236A1 (en) * | 2012-08-31 | 2014-03-06 | Fanuc Corporation | Multiple joints robot having cover on end effector attachment |
US9073218B2 (en) * | 2012-08-31 | 2015-07-07 | Fanuc Corporation | Multiple joints robot having cover on end effector attachment |
US20180100825A1 (en) * | 2014-01-31 | 2018-04-12 | Stmicroelectronics S.R.L. | Sensor of volatile substances with integrated heater and process for manufacturing a sensor of volatile substances |
US20160207756A1 (en) * | 2015-01-16 | 2016-07-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | Substrate structure, semiconductor structure and method for fabricating the same |
WO2017192250A1 (en) * | 2016-05-05 | 2017-11-09 | Applied Materials, Inc | Robot subassemblies, end effector assemblies, and methods with reduced cracking |
US10090188B2 (en) | 2016-05-05 | 2018-10-02 | Applied Materials, Inc. | Robot subassemblies, end effector assemblies, and methods with reduced cracking |
US11254015B2 (en) | 2019-09-24 | 2022-02-22 | Thermo Crs Ltd. | Multi-axis gripper for lab automation robot |
US20230034114A1 (en) * | 2020-03-11 | 2023-02-02 | Asm Ip Holding B.V. | Substrate handling device with adjustable joints |
US11837494B2 (en) * | 2020-03-11 | 2023-12-05 | Asm Ip Holding B.V. | Substrate handling device with adjustable joints |
WO2022262907A1 (en) * | 2021-06-18 | 2022-12-22 | Uwe Beier | Robot for handling flat substrates and aligning device |
Also Published As
Publication number | Publication date |
---|---|
US20160067869A1 (en) | 2016-03-10 |
US10940594B2 (en) | 2021-03-09 |
US10894326B2 (en) | 2021-01-19 |
US20180104828A1 (en) | 2018-04-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10894326B2 (en) | High capacity robot arm with adjustable joint at an end effector | |
TWI765946B (en) | Clamped flange joint and associated modular robot | |
US6915996B2 (en) | Pivotal shaft assembly for plane displays | |
TWI770077B (en) | Systems, apparatus, and methods for an improved load port backplane | |
US11193527B2 (en) | Supporting device | |
US5863340A (en) | Deposition ring anti-rotation apparatus | |
US10989239B2 (en) | Two-piece fastener assembly | |
KR20080093878A (en) | Adjustable wrist design for robotic arm | |
CA2445264A1 (en) | Angle joint | |
RU2013129040A (en) | CONNECTIVE IMPLANT FOR FACE GRAIN JOINTS | |
KR20080082922A (en) | High temperature anti-droop end effector for substrate transfer | |
US20220362084A1 (en) | Strap clamp assembly | |
US11448287B2 (en) | Internally damped crossbar assembly having elastomeric isolator | |
KR102065790B1 (en) | Extended wrist assembly for robotic arm | |
US20090140110A1 (en) | Worksurface Leg Mount System | |
US8690214B2 (en) | Pick and place handler with a floating lock device | |
KR20160033029A (en) | Multi-component robotic hub mounting plate to facilitate hub removal | |
US11536352B2 (en) | Drive train linkage and method therefor | |
WO2017192250A1 (en) | Robot subassemblies, end effector assemblies, and methods with reduced cracking | |
US11942894B2 (en) | Photovoltaic tracker driveline joint | |
RU2338935C2 (en) | Structure installation method from tubular shape and facility for its implementation | |
US11683006B2 (en) | Photovoltaic tracker driveline joint | |
US20220141972A1 (en) | Apparatus for Aligning Visual Displays | |
US20230314760A1 (en) | Athermal Mirror Mount | |
US20090226285A1 (en) | Robotic assembly providing leveling and joint stress reduction |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: PERSIMMON TECHNOLOGIES CORPORATION, MASSACHUSETTS Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HOSEK, MARTIN;HA, TUAN THUC;REEL/FRAME:029972/0468 Effective date: 20130312 |
|
AS | Assignment |
Owner name: MASSACHUSETTS DEVELOPMENT FINANCE AGENCY, MASSACHUSETTS Free format text: NEGATIVE PLEDGE AGREEMENT;ASSIGNOR:PERSIMMON TECHNOLOGIES CORPORATION;REEL/FRAME:031422/0225 Effective date: 20131001 Owner name: MASSACHUSETTS DEVELOPMENT FINANCE AGENCY, MASSACHU Free format text: NEGATIVE PLEDGE AGREEMENT;ASSIGNOR:PERSIMMON TECHNOLOGIES CORPORATION;REEL/FRAME:031422/0225 Effective date: 20131001 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |
|
AS | Assignment |
Owner name: HERCULES TECHNOLOGY GROWTH CAPITAL, INC., CALIFORNIA Free format text: SECURITY INTEREST;ASSIGNOR:PERSIMMON TECHNOLOGIES CORPORATION;REEL/FRAME:037358/0063 Effective date: 20151218 Owner name: HERCULES TECHNOLOGY GROWTH CAPITAL, INC., CALIFORN Free format text: SECURITY INTEREST;ASSIGNOR:PERSIMMON TECHNOLOGIES CORPORATION;REEL/FRAME:037358/0063 Effective date: 20151218 |
|
AS | Assignment |
Owner name: PERSIMMON TECHNOLOGIES CORPORATION, MASSACHUSETTS Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:HERCULES CAPITAL, INC.;REEL/FRAME:042248/0893 Effective date: 20170331 |