WO2017098987A1

WO2017098987A1 - Plasma reactor and clamp for laminated body

Info

Publication number: WO2017098987A1
Application number: PCT/JP2016/085707
Authority: WO
Inventors: 伸介伊藤; 灘浪　紀彦
Original assignee: 日本特殊陶業株式会社
Priority date: 2015-12-11
Filing date: 2016-12-01
Publication date: 2017-06-15
Also published as: JP2017107781A

Abstract

Provided is a plasma reactor capable of improving reliability by reliably fixing a plurality of electrode panels. The plasma reactor of the present invention is provided with: a plasma panel laminated body 20; and clamps 51 and 52. The plasma panel laminated body 20 has a structure formed by laminating electrode panels 30. The clamps 51 and 52 sandwich and fix a plurality of the electrode panels 30 in a laminated layer direction. The clamps 51 and 52 are each provided with: a clamp body 53 and a pressing member 54. The clamp body 53 extends in the laminated layer direction of the electrode panels 30. The pressing member 54 is configured separately from the clamp body 53, is mounted to at least one end portion of the clamp body 53, and presses surfaces 31 and 32 of the electrode panels 30. The clamp body 53 and the pressing member 54 are fixed.

Description

Plasma reactor and laminate clamp

The present invention relates to a plasma reactor suitable for an apparatus for purifying exhaust gas of an internal combustion engine (engine), and a clamp for a laminated body that sandwiches and fixes a ceramic panel in a laminating direction.

By passing engine exhaust gas and incinerator exhaust gas through the plasma field, CO (carbon monoxide), HC (hydrocarbon), NOx (nitrogen oxide) and PM (Particulate Matter: particulate form) contained in the exhaust gas A plasma reactor for treating harmful substances such as substances) is disclosed. *

For example, by laminating a plurality of electrode panels on which discharge electrodes are formed and applying a voltage between adjacent electrode panels to generate low temperature plasma (non-equilibrium plasma) due to dielectric barrier discharge, the electrodes flow between the electrode panels. Various plasma reactors that oxidize and remove PM in exhaust gas have been proposed (see, for example, Patent Documents 1 to 3). The plasma reactors described in Patent Documents 1 to 3 include a case for accommodating a plasma panel laminate formed by laminating electrode panels, a mat interposed between the case and the plasma panel laminate, and the like. Yes. In addition, another component is provided in the plasma reactor. For example, a lead line member is provided in the plasma reactor described in Patent Document 1, and the lead line member is in contact with a housing (case) via a mat. Patent Document 3 includes an electrode that is stacked while being held by a holding member, a pair of pressing members that sandwich and fix a plurality of electrodes in the stacking direction, and four frame bodies. There has been proposed a plasma reactor accommodated in a case body (case) through members and a frame. In Patent Document 3, a fixed mat (mat) is interposed between the frame body and the case body, and the frame body is in contact with the case body via the fixed mat.

Japanese Patent No. 3832654 (FIG. 4 etc.) US Pat. No. 6,464,945 (FIG. 8 etc.) Japanese Patent No. 4448097 ([0063], FIG. 9 etc.)

By the way, when the plasma reactor is mounted on a vehicle or the like and used, high-temperature exhaust gas flows through the plasma reactor, so that the inside of the plasma reactor is heated by the exhaust gas. On the other hand, the outside of the plasma reactor is cooled by the traveling wind. As a result, the plasma panel stack inside the plasma reactor expands as the temperature rises, but the case exposed to the outside of the plasma reactor expands like a plasma panel stack because the temperature does not increase much. There is nothing. Therefore, in this case, a large force acts on the plasma panel laminate from the case via the mat due to the stress caused by the difference in thermal expansion between the case and the plasma panel laminate (electrode panel). In addition, a large force may act on the plasma panel laminate due to external factors such as vibration and impact during attachment to a vehicle or the like. As a result, there is a problem that a plurality of electrode panels cannot be fixed securely, resulting in damage to the plasma panel laminate. *

Further, when the electrode panel is formed of a ceramic material, the variation in thickness per electrode panel increases. For this reason, when an electrode panel is laminated | stacked and a plasma panel laminated body is formed, the variation in the thickness of a plasma panel laminated body will become very large. Therefore, when fixing a plurality of electrode panels sandwiched in the stacking direction, it is necessary to consider the variation, but the conventional techniques described in Patent Documents 1 to 3 cannot absorb the variation. There is a problem that the electrode panel cannot be securely fixed. *

The present invention has been made in view of the above problems, and a first object is to provide a plasma reactor capable of improving reliability by securely fixing a plurality of electrode panels. . Moreover, the 2nd objective is to provide the clamp for laminated bodies which can fix a some ceramic panel reliably.

As means (means 1) for solving the above-mentioned problems, a plasma panel has a structure in which a plurality of electrode panels having discharge electrodes are laminated, and plasma is generated by applying a voltage between the adjacent electrode panels. A plasma reactor comprising a laminate and a clamp that sandwiches and fixes the plurality of electrode panels in the stacking direction, wherein the clamp is a separate body from the clamp body extending in the stacking direction of the electrode panels, and the clamp body And a pressing member that is attached to at least one end of the clamp body and presses the surface of the electrode panel that constitutes the plasma panel laminate, and the clamp body and the pressing member are fixed. There is a plasma reactor characterized by *

Therefore, in the invention described in the means 1, the clamp includes the clamp body and the pressing member that is configured separately from the clamp body. Therefore, the plurality of electrode panels can be stably provided by the elasticity of the pressing member. Can be held. Therefore, even if the stress caused by the thermal expansion difference between the case and the plasma panel laminate, or the external force caused by vibration or impact at the time of attachment to a vehicle or the like, acts on the plasma panel laminate from the case, The deformation of the plasma panel laminate is suppressed by the elastic deformation of the pressing member. In addition, by configuring the pressing member separately from the clamp body, the pressing member can be fixed to the clamp body in accordance with the thickness of the plasma panel laminate. As a result, variations in the thickness of the plasma panel laminate can be absorbed, and a plurality of electrode panels (plasma panel laminate) can be securely sandwiched and fixed by the clamp. Therefore, the reliability of the plasma reactor can be improved. *

The plasma panel laminate constituting the plasma reactor has a structure in which a plurality of electrode panels having discharge electrodes are laminated. Examples of the material for forming the discharge electrode include tungsten (W), molybdenum (Mo), ruthenium oxide (RuO ₂ ), silver (Ag), copper (Cu), platinum (Pt), and the like.

In the plasma reactor, it is preferable that a plurality of clamps are provided, and at least one of the plurality of clamps has a function as an electrically conductive member that is electrically connected to the discharge electrode. In this way, the clamp is firmly fixed to the plasma panel laminate when the pressing member constituting the clamp presses the surface of the electrode panel, so that the clamp and the discharge electrode function as an electrically conductive member. The electrical connection can be reliably performed. Moreover, since the number of parts can be reduced as compared with the case where the clamp and the electrical conducting member are provided separately, the weight and size of the plasma reactor can be reduced. *

The clamp includes a pressing member that is attached to at least one end of the clamp body and presses the surface of the electrode panel that constitutes the plasma panel laminate. Here, it is preferable that one pressing member presses the surface of the electrode panel at a plurality of locations. In this way, since a plurality of electrode panels (plasma panel laminate) can be held more stably, the reliability of the plasma reactor is further improved. Furthermore, the pressing member may be fixed to only one end of the clamp body, or may be fixed to both ends of the clamp body, but is particularly fixed to both ends of the clamp body. It is good. In this way, since the plurality of electrode panels can be pressed from both sides, the plurality of electrode panels (plasma panel laminate) can be held more stably, and the reliability of the plasma reactor is further improved. *

The pressing member may be a leaf spring having a bending back structure. If it does in this way, when pinching and fixing a plurality of electrode panels using a clamp, the elastic force of a pressing member will be given to the surface of an electrode panel. For this reason, the shift | offset | difference of the contact position of an electrode panel and a pressing member which arises when fixing a some electrode panel can be suppressed. Furthermore, the displacement of the contact position between the electrode panel and the pressing member, which is caused by the stress caused by the difference in thermal expansion between the electrode panel and the pressing member, can be suppressed. As a result, since the plurality of electrode panels can be stably fixed with a desired load, the reliability of the plasma reactor is further improved. *

Furthermore, the pressing member may be a leaf spring having a slit that penetrates the pressing member in the thickness direction. If it does in this way, the deformation | transformation of the pressing member by thermal expansion will be absorbed by the formation part of a slit. As a result, the displacement of the contact position between the electrode panel and the pressing member, which is caused by the stress caused by the difference in thermal expansion between the electrode panel and the pressing member, can be more reliably suppressed, and thus more stable multiple electrode panels Can be fixed. *

The material for forming the leaf spring is appropriately selected in accordance with the operating temperature in order to prevent heat sag and the like. Examples of the material for forming the leaf spring include SUS301-CSP (thermal expansion coefficient: about 18 ppm / ° C), SUS304-CSP (thermal expansion coefficient: about 18 ppm / ° C), and SUS631-CSP (thermal expansion coefficient: about 11-12 ppm). Inconel X-750 (thermal expansion coefficient: about 14 ppm / ° C.), Inconel 718 (thermal expansion coefficient: about 14 ppm / ° C.), and the like. The thermal expansion coefficient of the leaf spring is an average value of measured values between room temperature and 500 ° C. *

The clamp includes a clamp body that extends in the stacking direction of the electrode panels. Here, the clamp body is a rod-shaped shaft member, and the plasma panel laminate preferably has a hole portion that penetrates in the stacking direction of the electrode panel and into which the shaft member is inserted. In this way, it is possible to prevent the clamp from falling off the electrode panel. Moreover, positioning with a some electrode panel (plasma panel laminated body) and a clamp can be performed easily. When the clamp body is a rod-shaped shaft member, the plasma panel laminate has a groove portion that penetrates in the electrode panel lamination direction and into which the shaft member is inserted, so that the width of the groove portion becomes narrow at the opening portion. It may have a retaining mechanism for preventing the shaft member from coming off from the groove portion. Even in this case, it is possible to prevent the clamp from falling off the electrode panel, and it is possible to easily position the plurality of electrode panels and the clamp. *

Further, a gap may be provided between the outer peripheral surface of the shaft member and the inner peripheral surface of the hole, or between the outer peripheral surface of the shaft member and the inner side surface of the groove portion. In this way, even if the outer diameter of the shaft member increases due to thermal expansion, the outer peripheral surface of the shaft member is less likely to contact the inner peripheral surface of the hole or the inner surface of the groove. The crack of the plasma panel laminated body resulting from this can be prevented. *

Here, the clamp body may be formed of a material having a lower thermal expansion coefficient than the pressing member. In this way, even if the clamp body and the pressing member expand as the temperature rises, the clamp body is unlikely to extend in the electrode panel stacking direction, so that it is possible to prevent the load from falling in the direction of sandwiching the plurality of electrode panels. be able to. That is, the adverse effect on the clamp accompanying the temperature change is reduced. *

In addition, a threaded portion is provided at the end of the clamp body, and the retaining member is fixed to the clamp body by screwing a nut into the threaded portion with the clamping body inserted through the retaining member. May be. If it does in this way, the process of inserting a plurality of electrode panels in the lamination direction using a clamp can be simplified. *

In addition, the pressing member and the clamp body may be partially fixed to each other by a welded portion. In this case, it is possible to prevent a load from being applied to the plurality of electrode panels from the pressing member due to the positional relationship between the clamp body and the pressing member being shifted. *

Further, the pressing member is interposed between a pressing plate that contacts the surface of the electrode panel (ceramic panel) and a fixing plate provided at the end of the clamping plate and the pressing plate. And a compression coil spring that presses against. In this case, even if the clamp body expands in the stacking direction of the electrode panel as the temperature rises, the pressing plate is maintained in a state of being pressed to the surface side of the electrode panel by the compression coil spring. For this reason, it is possible to more reliably suppress the loss of load applied in the direction in which the plurality of electrode panels are sandwiched. That is, the adverse effect on the clamp accompanying the temperature change is further reduced.

Another means (means 2) for solving the above problem is a laminate clamp that sandwiches and fixes a ceramic panel laminate having a structure in which a plurality of ceramic panels are laminated in the lamination direction of the ceramic panels. The clamp body extending in the laminating direction of the ceramic panel and the clamp body are configured separately from each other, attached to at least one end of the clamp body, and the ceramic panel constituting the ceramic panel laminate There is a clamp for a laminate including a pressing member that presses the surface, and the clamp body and the pressing member are fixed. *

Therefore, in the invention described in the above means 2, since the laminate clamp includes the clamp body and the pressing member formed separately from the clamp body, the plurality of ceramic panels are formed by the elasticity of the pressing member. It can be held stably. Therefore, even if an external force or the like acts on the ceramic panel laminate, the deformation of the ceramic panel laminate is suppressed by the elastic deformation of the pressing member. In addition, by configuring the pressing member separately from the clamp body, the pressing member can be fixed to the clamp body in accordance with the thickness of the ceramic panel laminate. As a result, variations in the thickness of the ceramic panel laminate can be absorbed, and a plurality of ceramic panels (ceramic panel laminate) can be securely sandwiched and fixed by the laminate clamp. Therefore, the reliability of the ceramic panel laminate can be improved.

1 is a schematic cross-sectional view showing a plasma reactor in the present embodiment. The top view which shows a plasma reactor. The perspective view which shows a plasma reactor. The perspective view which shows the state in which the plasma panel laminated body is accommodated in the case. The perspective view which shows a plasma panel laminated body and a clamp. The cross-sectional view which shows a plasma panel laminated body. The longitudinal cross-sectional view which shows a plasma panel laminated body and a clamp. The principal part sectional drawing which shows a plasma panel laminated body and a clamp. The perspective view which shows an electrode panel. The perspective view which shows a plasma panel laminated body, a clamp, and an external terminal in other embodiment. In other embodiment, the longitudinal cross-sectional view which shows a plasma panel laminated body and a clamp. In other embodiment, principal part sectional drawing which shows a plasma panel laminated body and a clamp. In other embodiment, principal part sectional drawing which shows a plasma panel laminated body and a clamp. In other embodiment, principal part sectional drawing which shows a plasma panel laminated body and a clamp. In other embodiment, principal part sectional drawing which shows a plasma panel laminated body and a clamp. In other embodiment, the principal part perspective view which shows a plasma panel laminated body and a clamp. In other embodiment, principal part sectional drawing which shows a plasma panel laminated body and a clamp. In other embodiment, principal part sectional drawing which shows a plasma panel laminated body and a clamp. In other embodiment, principal part sectional drawing which shows a plasma panel laminated body and a clamp. In other embodiment, principal part sectional drawing which shows a plasma panel laminated body and a clamp. In other embodiment, principal part sectional drawing which shows a plasma panel laminated body and a clamp. In other embodiment, the plane sectional view which shows a plasma panel laminated body. In other embodiment, the plane sectional view which shows a plasma panel laminated body.

Hereinafter, an embodiment of the plasma reactor 1 of the present invention will be described in detail with reference to the drawings. *

As shown in FIGS. 1 to 4, the plasma reactor 1 of the present embodiment is a device that removes PM contained in exhaust gas from an automobile engine (not shown), and is attached to an exhaust pipe 2. . The plasma reactor 1 includes a pulse generation power source 3, a case 10, and a plasma panel laminate 20 (ceramic panel laminate). *

The case 10 is formed in a rectangular cylinder shape using, for example, stainless steel. The case 10 has a thermal expansion coefficient of about 10 to 18 ppm / ° C. The thermal expansion coefficient of the case 10 is an average value of measured values between room temperature and 300 ° C. A first cone portion 11 is connected to a first end portion (left end portion in FIG. 1) of the case 10, and a second cone portion 12 is connected to a second end portion (right end portion in FIG. 1) of the case 10. Yes. Further, the first cone portion 11 is connected to the upstream portion 4 (engine portion) of the exhaust pipe 2, and the second cone portion 12 is connected to the downstream portion 5 (opposite side of the engine side) of the exhaust pipe 2. Part). The exhaust gas from the engine flows into the case 10 from the upstream portion 4 of the exhaust pipe 2 through the first cone portion 11, passes through the case 10, and then passes through the second cone portion 12 to the exhaust pipe. 2 flows out to the downstream part 5. *

As shown in FIG. 4, the plasma panel laminate 20 is accommodated in the case 10, and a mat 8 is interposed between the case 10 and the plasma panel laminate 20. The mat 8 has a function of fixing the plasma panel laminate 20 to the case 10. Here, as a material which comprises the mat | matte 8, insulating materials, such as a ceramic fiber, a metal fiber, a foam metal, can be used, for example. *

As shown in FIGS. 1, 4, and 5, the plasma panel laminate 20 has a substantially rectangular parallelepiped shape having a pair of gas passage surfaces 21 and 22 and four gas non-passage surfaces 23, 24, 25, and 26. Is made. Both gas passage surfaces 21 and 22 are located on opposite sides of the plasma panel laminate 20. On the other hand, the gas non-passing surfaces 23 to 26 are located between the pair of

gas passing surfaces

21 and 22. *

The plasma panel laminate 20 has a structure in which a plurality of electrode panels 30 (ceramic panels) are laminated. Each electrode panel 30 is arranged in parallel with the passage direction of exhaust gas in the case 10 (the direction from the first cone portion 11 toward the second cone portion 12), and is spaced from each other (in this embodiment, 0.5 mm). It is arranged to have a gap). *

As shown in FIG. 1, the first wiring 6 and the second wiring 7 are alternately and electrically connected to each electrode panel 30 along the thickness direction of the plasma panel laminate 20. The first wiring 6 is electrically connected to the first terminal of the pulse generating power supply 3, and the second wiring 7 is electrically connected to the second terminal of the pulse generating power supply 3. *

As shown in FIGS. 1 and 9, the electrode panel 30 of the present embodiment has a first main surface 31 (surface) and a second main surface 32 (surface), and is a substantially rectangular plate having a length of 100 mm × width of 120 mm. It has a shape. The first main surface 31 and the second main surface 32 are located on opposite sides in the thickness direction of the electrode panel 30. Further, the electrode panel 30 has a structure in which a discharge electrode 34 (thickness 10 μm) is built in a rectangular plate-like dielectric 33. In the present embodiment, the dielectric 33 is made of ceramic such as alumina (Al ₂ O ₃ ), and the discharge electrode 34 is made of tungsten (W). The thermal expansion coefficient of the dielectric 33 is about 2 to 8 ppm / ° C., and in the present embodiment in which the dielectric 33 is made of alumina, it is about 7 ppm / ° C. The thermal expansion coefficient of the dielectric 33 is an average value of measured values between room temperature and 400 ° C. In addition, the dielectric 33 has a recess 35 that opens at the second main surface 32. The recess 35 extends in the lateral direction of the electrode panel 30 and opens at both end faces of the electrode panel 30. In the plasma panel laminate 20 of the present embodiment, the exhaust gas flow path is constituted by the recess 35 and the first main surface 31 of the electrode panel 30 adjacent to the lower layer side. The lowermost electrode panel 30 constituting the plasma panel laminate 20 is not formed with the recess 35 because the electrode panel 30 does not exist on the lower layer side.

As shown in FIG. 9, a pair of conducting structures 40 that conduct the first main surface 31 and the second main surface 32 are provided on one side of the recess 35 in the electrode panel 30. Each conduction structure 40 includes a through-hole conductor 41, a first pad 42, and a second pad 43, which are electrical conduction members. The through-hole conductor 41 passes through the first main surface 31 and the second main surface 32. And the through-hole conductor 41 provided in one conduction | electrical_connection structure 40 penetrates the extension part 36 extended in the outer peripheral side from the discharge electrode 34 in addition to the 1st main surface 31 and the 2nd main surface 32. Yes. The first pad 42 is formed on the first main surface 31 and is electrically connected to the end of the through-hole conductor 41 on the first main surface 31 side. On the other hand, the second pad 43 is formed on the second main surface 32 and is electrically connected to the end of the through-hole conductor 41 on the second main surface 32 side. The first pad 42 and the second pad 43 each have a rectangular shape, and the surface thereof is plated with Ni or the like. *

As shown in FIGS. 5 to 8, the plasma reactor 1 includes two first clamps 51 and two second clamps 52 that are laminate clamps. Each of the first clamps 51 and each of the second clamps 52 is configured to sandwich and fix each electrode panel 30 (plasma panel laminate 20) in the stacking direction. Each first clamp 51 is disposed near the gas non-passing surface 24 of the plasma panel laminate 20, and each second clamp 52 is disposed near the gas non-passing surface 26 of the plasma panel laminate 20. Each first clamp 51 has a function as an electrically conductive member that is electrically connected to the discharge electrode 34 in addition to the function of sandwiching each electrode panel 30 in the stacking direction. On the other hand, each second clamp 52 has only a function of sandwiching each electrode panel 30 in the stacking direction. *

Each

clamp

51, 52 includes a shaft member 53 (clamp body), a leaf spring 54 (pressing member), and a fixing ring 55. The shaft member 53 is formed in a substantially cylindrical shape using a material such as SUS430. The thermal expansion coefficient of the shaft member 53 is about 11 to 13 ppm / ° C. The thermal expansion coefficient of the shaft member 53 is an average value of measured values between room temperature and 500 ° C. In addition, the plasma panel laminate 20 has holes 27 having a circular cross section penetrating in the laminating direction of the electrode panel 30 (see FIGS. 6 to 8). The shaft members 53 of the

clamps

51 and 52 are inserted into the holes 27 and extend in the stacking direction of the electrode panel 30. A gap S1 (0.2 mm in the present embodiment) is provided between the outer peripheral surface of the shaft member 53 and the inner peripheral surface of the hole 27. In this embodiment, the material for forming the shaft member 53 is SUS430. However, it is known that SUS430 has a large heat sink in a temperature range of 500 ° C. or higher. For this reason, when particularly high heat resistance (for example, 500 ° C. or higher) is required, heat resistance such as Inconel 718 and Inconel X-750 is preferentially taken into consideration with respect to thermal deformation rather than thermal expansion coefficient. It is preferable to form the shaft member 53 using a material excellent in the above. *

As shown in FIGS. 5, 7, and 8, the leaf spring 54 is configured separately from the shaft member 53. The leaf springs 54 are respectively fixed to small diameter portions 56 formed at both ends of the shaft member 53. More specifically, the leaf spring 54 is formed by bending a rectangular metal plate, and a central portion 57 occupying the central portion of the metal plate and a pair of stretches positioned on both sides of the central portion 57 in the metal plate. It is comprised by the part 58 and a pair of contact part 59 located in the outer side of both the extending | stretching parts 58 in a metal plate (refer FIG. 8). The central portion 57 is a portion through which the small-diameter portion 56 of the shaft member 53 passes, and is disposed in parallel with the gas non-passing surfaces 23 and 25 of the plasma panel laminate 20. Further, the extending portions 58 are disposed on the opposite sides with respect to the small diameter portion 56 of the shaft member 53. Each extending portion 58 is bent to the back surface side (the gas non-passing surface 23 side or the gas non-passing surface 25 side) of the leaf spring 54, and the base end portion is connected to both end edges of the central portion 57, and the tip The part extends in a direction approaching the gas non-passing surfaces 23 and 25. Further, the contact portions 59 are arranged on opposite sides with respect to the small diameter portion 56 of the shaft member 53, and the distances from the central axis of the small diameter portion 56 to the proximal end of the contact portion 59 are equal to each other. Further, each contact portion 59 is located on a side of the gas non-passing surface 23 which is located at a connection portion with the gas non-passing surfaces 24 or 26 or on a portion where the gas non-passing surface 25 is connected to the gas non-passing surfaces 24 and 26. They are spaced apart from each other along the side where they are located. The base end portion of each contact portion 59 is connected to the distal end portion of the extending portion 58 and is formed on the surface of the plasma panel laminate 20 (specifically, on the first main surface 31 of the uppermost electrode panel 30). The first pad 42 or the second pad 43) formed on the second main surface 32 of the lowermost electrode panel 30 is in contact. That is, the leaf spring 54 presses the surface of the electrode panel 30 at two locations. And the front-end | tip part of each contact part 59 is bent to the surface side of the leaf | plate spring 54, and is extended in the direction spaced apart from the surface of the plasma panel laminated body 20. FIG. The fixing ring 55 is press-fitted into the tip of the small diameter portion 56 with the small diameter portion 56 penetrating through the central portion 57 of the leaf spring 54.

Each leaf spring 54 is formed using a material such as Inconel 718. The thermal expansion coefficient of the leaf spring 54 is about 14 ppm / ° C. Therefore, the shaft member 53 is formed of a material having a lower thermal expansion coefficient than that of the leaf spring 54 (in this embodiment, a material having a thermal expansion coefficient of about 11 to 13 ppm / ° C.). The thermal expansion coefficient of the leaf spring 54 is an average value of measured values between room temperature and 500 ° C. The plate spring 54 is formed by bending a metal plate (here, a metal plate made of Inconel 718) and has higher elasticity than the shaft member 53. *

As shown in FIG. 5 and FIG. 7 to FIG. 9, the two leaf springs 54 constituting the

clamps

51 and 52 are arranged on the first main surface 31 (gas gas) of the uppermost electrode panel 30 constituting the plasma panel laminate 20. The non-passing surface 23) and the second main surface 32 (gas non-passing surface 25) of the lowermost electrode panel 30 constituting the plasma panel laminate 20 are respectively pressed. One leaf spring 54 presses the surface (first main surface 31 or second main surface 32) of the electrode panel 30 at two locations (that is, two contact portions 59). The two leaf springs 54 constituting one first clamp 51 include a first pad 42 formed on the gas non-passing surface 23 (the first main surface 31 of the uppermost electrode panel 30), and a gas non-passing surface. 25 (second main surface 32 of the lowermost electrode panel 30) is in pressure contact with a second pad 43 formed on the lowermost electrode panel 30. *

As shown in FIGS. 2 to 4, the plasma reactor 1 includes a pair of

external terminals

60 and 61. The

external terminals

60 and 61 of this embodiment have the same structure as a spark plug. More specifically, the

external terminals

60 and 61 include an external connection portion, a conductive seal containing metal powder, an insulator, a metal shell, talc, packing, and the like. The external connection portion is connected to the

clamps

51 and 52 via a conductive seal. The external terminal is not limited to the one in the present embodiment, and may have another structure as long as the external connection portion and the case 10 are insulated by an insulator. *

Further, the external terminal 60 is electrically connected to the first clamp 51 at the base end portion, and the distal end portion is exposed from the case 10. Similarly, the external terminal 61 is electrically connected to a first clamp 51 different from the first clamp 51 to which the external terminal 60 is connected, and the distal end is exposed from the case 10. The

external terminals

60 and 61 protrude in the same direction. In the present embodiment, the tip of the external terminal 60 is connected to the first wiring 6 (see FIG. 1), and the tip of the external terminal 61 is connected to the second wiring 7 (see FIG. 1). It has become so. *

In addition, as FIG. 1 shows, the plasma reactor 1 of this embodiment is used in order to remove PM contained in exhaust gas, for example. In this case, when a pulse voltage (for example, peak voltage: 5 kV (5000 V), pulse repetition frequency: 100 Hz) is applied between the electrode panels 30 adjacent to each other from the pulse generating power supply 3, dielectric barrier discharge occurs, and the discharge electrode 34 generates plasma due to dielectric barrier discharge. Due to the generation of plasma, PM contained in the exhaust gas flowing between the discharge electrodes 34 is oxidized (burned) and removed. *

Next, a method for manufacturing the plasma reactor 1 will be described. *

First, first to third ceramic green sheets to be the dielectric 33 are formed using a ceramic material whose main component is alumina powder. In addition, as a formation method of a ceramic green sheet, well-known shaping | molding methods, such as tape shaping | molding and extrusion molding, can be used. Then, laser processing is performed on each ceramic green sheet to form a through hole for the through-hole conductor 41 and a through hole for the

clamps

51 and 52. The through hole may be formed by punching, drilling, or the like. *

Next, using a conventionally known paste printing apparatus (not shown), the through hole for the through-hole conductor 41 is filled with a conductive paste (in this embodiment, a tungsten paste) to form the through-hole conductor 41. Through-hole conductors are formed. *

Next, the first ceramic green sheet is placed on a support base (not shown). Furthermore, a conductive paste is printed on the back surface of the first ceramic green sheet using a paste printing apparatus. As a result, an unsintered electrode having a thickness of 10 μm to be the discharge electrode 34 is formed on the back surface of the first ceramic green sheet. In addition, as a printing method of the unsintered electrode with respect to the 1st ceramic green sheet, well-known printing methods, such as screen printing, can be used. *

Then, after drying the conductive paste, the second ceramic green sheet and the third ceramic green sheet are sequentially laminated on the back surface of the first ceramic green sheet on which the unfired electrodes are printed, and in the sheet lamination direction. Apply pressing force. As a result, the ceramic green sheets are integrated to form a ceramic laminate. At this time, the through holes for the

clamps

51 and 52 of the first to third ceramic green sheets communicate with each other to form the through hole portion 28 (see FIG. 9). Further, using a paste printing device, a conductive paste is printed on the main surface of the first ceramic green sheet to form the unfired first pad 42 and conductive on the back surface of the third ceramic green sheet. The conductive paste is printed, and the conductive paste is printed on the back surface of the third ceramic green sheet to form the unfired second pad 43. The third ceramic green sheet is laminated after being subjected to a punching process that matches the shape of the recess 35. *

Next, after performing a drying process or a degreasing process according to a known method, a predetermined temperature (for example, about 1400 ° C. to 1600 ° C.) at which the ceramic laminate (ceramic green sheet and unfired electrode) can be sintered by alumina and tungsten. ) Is simultaneously fired. As a result, alumina in the ceramic green sheet and tungsten in the conductive paste are simultaneously sintered, and the dielectric 33, the discharge electrode 34, the through-hole conductor 41, the first pad 42, and the second pad 43 are simultaneously fired. The formed ceramic laminate becomes the electrode panel 30. *

Thereafter, a lamination process is performed, and a plurality of obtained electrode panels 30 are laminated to form the plasma panel laminate 20. At this point, the through-hole portions 28 of each electrode panel 30 communicate with each other and become the hole portions 27 that penetrate the plasma panel laminate 20. Next, the

clamps

51 and 52 are used to sandwich and fix the plurality of electrode panels 30 in the stacking direction. More specifically, first, the shaft member setting step is performed, and the shaft member 53 is inserted into the hole 27. In the subsequent fixing step, the small diameter portion 56 of the shaft member 53 exposed from the opening portion of the hole portion 27 on the gas non-passing surface 23 side, and the shaft member 53 exposed from the opening portion of the hole portion 27 on the gas non-passing surface 25 side. A leaf spring 54 is attached to each of the small diameter portions 56. Specifically, first, the small-diameter portion 56 is inserted into the central portion 57 constituting the leaf spring 54. Next, the fixing ring 55 is fixed to the distal end portion of the small diameter portion 56. In the present embodiment, the fixing ring 55 is fixed to the small diameter portion 56 by press-fitting the small diameter portion 56 into the fixing ring 55. The fixing ring 55 may be fixed to the small diameter portion 56 by welding in a state of being temporarily assembled to the small diameter portion 56 via a jig or the like, or after the small diameter portion 56 is press-fitted. It may be fixed to the small diameter portion 56 by performing welding. Further, when the small diameter portion 56 is press-fitted into the fixing ring 55, the leaf spring 54 is pressed by the fixing ring 55. As a result, the leaf spring 54 is fixed in a state in which the distal end of the leaf spring 54 is deformed by at least 0.3 mm or more in the distal direction of the small diameter portion 56, so that the leaf spring 54 is fixed to the first pad 42 and the second pad 43. It comes in pressure contact with. *

Further, by performing welding or the like, the first end 51 of the external terminal 60 is electrically connected to the shaft member 53 constituting the first clamp 51, and the first clamp 51 is electrically connected to the external terminal 60. Is electrically connected to the base member of the external terminal 61 to a shaft member 53 constituting another first clamp 51. Next, after attaching the mat 8 so as to cover the outer surface of the plasma panel laminate 20, the case 10 is attached so as to cover the outer surface of the mat 8. Thereafter, the first wiring 6 is connected to the distal end portion of the external terminal 60, and the second wiring 7 is connected to the distal end portion of the external terminal 61. The plasma reactor 1 is completed through the above processes. *

Therefore, according to the present embodiment, the following effects can be obtained. *

(1) In the plasma reactor 1 of the present embodiment, the

clamps

51 and 52 are formed in a substantially cylindrical shape, and thus have elasticity by being formed by bending a relatively rigid shaft member 53 and a metal plate. A leaf spring 54 is provided. For this reason, if the plurality of electrode panels 30 are sandwiched in the stacking direction using the

clamps

51 and 52, the plurality of electrode panels 30 can be stably held. Therefore, the stress caused by the difference in thermal expansion between the case 10 and the plasma panel laminate 20 and the external force caused by the vibration or impact at the time of mounting on the vehicle or the like acts on the plasma panel laminate 20 from the case 10. Even so, the deformation of the plasma panel laminate 20 is suppressed by the elastic deformation of the leaf spring 54. Further, by configuring the plate spring 54 separately from the shaft member 53, the plate spring 54 can be fixed to the shaft member 53 in accordance with the thickness of the plasma panel laminate 20. As a result, variations in the thickness of the plasma panel laminate 20 can be absorbed, and the plurality of electrode panels 30 (plasma panel laminate 20) can be securely sandwiched and fixed by the

clamps

51 and 52. Therefore, the reliability of the plasma reactor 1 can be improved. *

(2) The leaf spring 54 of the present embodiment is fixed to the shaft member 53 in a state where the tip is deformed by at least 0.3 mm in the tip direction of the small diameter portion 56. As a result, even if the shaft member 53 expands in the stacking direction of the electrode panel 30 as the temperature rises, the leaf spring 54 is pressed against the surface (gas non-passing surfaces 23, 25) side of the electrode panel 30. Maintained. Therefore, since the loss of the load applied in the direction in which the plurality of electrode panels 30 are sandwiched is suppressed, the reliability of the plasma reactor 1 is further improved. If the amount of deformation at the tip of the leaf spring 54 is less than 0.3 mm, the surface of the electrode panel 30 cannot be pressed when the shaft member 53 expands, and the required clamping force may not be obtained. is there. *

(3) In the plasma reactor 1 of the present embodiment, the shaft member 53 that constitutes the

clamps

51 and 52 is disposed in the hole portion 27 that penetrates the plasma panel stacked body 20, that is, in the plasma panel stacked body 20. It is arranged in the vicinity. As a result, when the electrode panel 30 is heated by the exhaust gas, the shaft member 53 is also heated accordingly, so that the temperature difference between the electrode panel 30 and the shaft member 53 is reduced. Therefore, stress due to the difference in thermal expansion between the electrode panel 30 and the shaft member 53 is less likely to occur, so that the reliability of the plasma reactor 1 is further improved.

(4) For example, the cross-sectional shape of the hole that penetrates the plasma panel laminate 20 may be a shape having a corner (such as a square shape). However, if the hole has a corner, the electrode panel 30 may be deformed starting from the corner when the electrode panel 30 is fired. Further, since stress tends to concentrate on the corners, there is a possibility that cracks or the like starting from the corners may occur in the electrode panel 30. Therefore, in this embodiment, the plasma panel laminate 20 is provided with a hole 27 having a circular cross section, and a substantially cylindrical shaft member 53 is inserted into the hole 27. As a result, since the above problem is solved, the reliability of the plasma reactor 1 is further improved. *

(5) The plasma reactor 1 of the present embodiment is attached to the exhaust pipe 2 via the first cone portion 11 and the second cone portion 12. As a result, the resistance in the exhaust gas flow path in which the exhaust gas flows in the order of the upstream portion 4 of the exhaust pipe 2 → the first cone portion 11 → the plasma reactor 1 → the second cone portion 12 → the downstream portion 5 of the exhaust pipe 2 is reduced. Therefore, the pressure loss in the exhaust gas passage can be suppressed. As a result, it is possible to prevent the engine output from decreasing due to pressure loss. *

In addition, you may change the said embodiment as follows. *

-The

clamps

51 and 52 of the said embodiment were comprised by attaching the leaf | plate spring 54 with respect to the both ends of the shaft member 53, However, You may change the structure of a clamp. For example, as shown in FIG. 10, the clamp 71 may be configured by fitting a leaf spring 73 (pressing member) to one end (upper end) of the plate member 72 (clamp body). It may be configured by welding after the leaf spring 73 is fitted. In this case, since it is not necessary to form the hole 27 for inserting the shaft member 53, the plurality of electrode panels 30 can be easily fixed by the clamp 71. Moreover, the attachment position of the clamp 71 can also be changed easily. *

-The

clamps

51 and 52 of the said embodiment were comprised by attaching the leaf | plate spring 54 with respect to the both ends of the shaft member 53. As shown in FIG. However, as shown in FIG. 11, the clamp 81 may be configured by attaching a leaf spring 83 (pressing member) to only one end (upper end) of the shaft member 82 (clamp body). . A locking plate 84 is formed at the other end (lower end) of the shaft member 82, and the locking plate 84 is the lowest layer that constitutes the plasma panel laminate 85 (ceramic panel laminate). The electrode panel 86 (ceramic panel) is in contact with the surface (second main surface 87). *

-Although

clamp

51,52 of the said embodiment was comprised by attaching the leaf spring 54 of the same shape with respect to the both ends of the shaft member 53, the leaf | plate spring 54 does not necessarily need to be the same shape. For example, the spring constant of the leaf spring may be increased by changing one leaf spring to another shape. In this way, the attachment efficiency of the leaf spring to the assembly jig is improved, so that the assembly efficiency of the leaf spring is improved. *

In the

clamps

51 and 52 of the above embodiment, the leaf spring 54 and the shaft member 53 are fixed by press-fitting the fixing ring 55 into the tip of the small diameter portion 56 of the shaft member 53. The leaf spring 54 and the shaft member 53 may be fixed using another method. For example, as shown in FIG. 12, the plate spring 91 and the shaft member 94 (clamp main body) can be obtained by performing welding in a state where the distal end portion of the small diameter portion 93 is inserted into the central portion 92 of the plate spring 91 (pressing member). ) May be fixed to each other via the welded portion 95. Moreover, you may make it fix a leaf | plate spring and a shaft member by deform | transforming the front-end | tip part of a small diameter part by spin caulking. The method for caulking the tip of the small diameter portion is not limited to spin caulking, and for example, methods such as burring caulking, dowel caulking, and V caulking can be used. *

As shown in the clamp 101 of FIG. 13, the pressing member that presses the surface (the gas non-passing surfaces 23 and 25) of the electrode panel 30 may be a leaf spring 102 (pressing member) having a bent back structure. . In other words, the leaf spring 102 may extend in a direction away from the small diameter portion 56 of the shaft member 53, but may have a structure in which the tip portion is curved and returns to the reverse direction (the small diameter portion 56 side). *

Further, as shown in the clamp 111 of FIG. 14, when the leaf spring 112 (pressing member) has a bent back structure, the curvature radius R1 of the folded portion 113 and the curvature of the contact portion 115 between the electrode panel 114 (ceramic panel). The radius R2 may be set to have different sizes. Here, by making the curvature radius R2 of the contact portion 115 larger than the curvature radius R1 of the folded portion 113, the stress concentration on the electrode panel 114 can be alleviated. If the stress concentration on the electrode panel 114 is not a problem, the curvature radius R2 of the contact portion 115 may be smaller than the curvature radius R1 of the folded portion 113. *

Further, as shown in FIG. 14, the center of the curvature radius R2 of the contact portion 115 and the center of the curvature radius R1 of the folded portion 113 may be shifted from each other (see G1 in FIG. 14). Here, the center of the curvature radius R2 is shifted to the shaft member 116 (clamp main body) side from the center of the curvature radius R1. In this way, even if the electrode panel 114 expands as the temperature of the plasma reactor rises or the electrode panel 114 shrinks as the temperature of the plasma reactor decreases, the contact position between the electrode panel 114 and the leaf spring 112 can be reduced. Misalignment is less likely to occur. For this reason, the plurality of electrode panels 114 can be fixed more stably. *

15 and 16, when the leaf spring 122 (pressing member) has a bent back structure, the leaf spring 122 has a slit 123 that penetrates the leaf spring 122 in the thickness direction. You may have. In this way, deformation of the leaf spring 122 due to thermal expansion can be absorbed by the portion where the slit 123 is formed. *

In the

clamps

51 and 52 of the above embodiment, the leaf spring 54 is fixed to the shaft member 53 by press-fitting the fixing ring 55 to the tip of the small diameter portion 56 of the shaft member 53. The leaf spring 54 may be fixed to the shaft member 53 using the above method. For example, as shown in the clamp 131 of FIG. 17, a nut 135 is provided in a state in which a screw portion 133 is provided at the end of the shaft member 132 (clamp body) and the shaft member 132 is inserted through the leaf spring 134 (pressing member). The leaf spring 134 may be fixed to the shaft member 132 by screwing the screw spring 133 to the screw portion 133. *

-In

clamp

51,52 of the said embodiment, although the leaf | plate spring 54 was used as a pressing member, you may use another structure as a pressing member. For example, as shown in the clamp 141 of FIG. 18, the pressing member 142 may include a pressing plate 143 and a compression coil spring 144. The pressing plate 143 is in contact with the surface 146 of the electrode panel 145 (ceramic panel). Specifically, the pressing plate 143 is a first surface formed on the surface 146 (specifically, the first main surface 31 of the uppermost electrode panel 145). The contact portion 147 is in pressure contact with the first pad 42 or the second pad 43) formed on the second main surface 32 of the lowermost electrode panel 145. The compression coil spring 144 is interposed between the pressing plate 143 and a fixing ring 149 (fixing portion) provided at the end of the shaft member 148 (clamp body), and the pressing plate 143 is attached to the surface 146 of the electrode panel 145. It pushes to the side. *

As shown in the clamp 151 of FIG. 19, the pressing plate 152 may have a shape (that is, a flat plate shape) in which the contact portion 147 is omitted. Further, as shown in the clamp 161 of FIG. 20, the pressing plate 162 may have a positioning protrusion 164 for positioning the compression coil spring 163 instead of the contact portion 147 described above. Further, as shown in the clamp 171 of FIG. 21, the pressing member 172 does not include the

pressing plates

143, 152, 162, and the compression coil spring 173 directly presses the electrode panel 174 (ceramic panel). It may be. *

In the above embodiment, the hole 27 having a circular cross section is provided in the plasma panel laminate 20, and the substantially cylindrical shaft member 53 constituting the

clamps

51 and 52 is inserted into the hole 27. The structure of 53 and the hole part 27 may be changed suitably. For example, as shown in FIG. 22, a hole 182 having a rectangular cross section is provided in the plasma panel laminate 181 (ceramic panel laminate), and a shaft member 183 (clamp body) having a substantially quadrangular prism shape constituting the clamp is provided as a hole. You may insert in the part 182. *

As shown in FIG. 23, the plasma panel laminate 191 (ceramic panel laminate) may have a groove 192 and a retaining mechanism 193. Here, the groove 192 penetrates in the stacking direction of the electrode panel 194 (ceramic panel), and the shaft member 195 (clamp main body) is inserted therein. Further, the retaining mechanism 193 is formed so that the width of the groove portion 192 becomes narrow at the opening 196, thereby preventing the shaft member 195 from coming off from the groove portion 192. As shown in FIG. 23, a gap S <b> 2 may be provided between the outer peripheral surface of the shaft member 195 and the inner surface of the groove portion 192. *

In the manufacturing method of the plasma reactor 1 of the above embodiment, the small diameter portion 56 of the shaft member 53 exposed from the opening on the gas non-passing surface 23 side of the hole 27 after the shaft member 53 is inserted into the hole 27, And the leaf | plate spring 54 was attached with respect to the small diameter part 56 of the shaft member 53 exposed from the opening part by the side of the gas non-passing surface 25 of the hole 27, respectively. However, after the shaft member 53 having the leaf spring 54 attached to one end is inserted into the hole 27, the leaf spring 54 is attached to the other end of the shaft member 53 protruding from the hole 27. Also good. *

-The electrode panel 30 of the said embodiment was comprised by incorporating the discharge electrode 34 in the dielectric material 33. FIG. However, the electrode panel may be configured by forming the discharge electrode 34 on the surface of the dielectric 33. *

-Although the plasma reactor 1 of the said embodiment was used for exhaust gas purification of the engine of a motor vehicle, you may use it for exhaust gas purification of engines, such as a ship, for example. Moreover, the plasma reactor 1 should just perform a plasma process, and does not need to perform the process of waste gas, and does not need to be used for purification | cleaning. *

The

clamps

51 and 52 of the above embodiment are clamps that sandwich and fix the plasma panel laminate 20 (a plurality of electrode panels 30) constituting the plasma reactor 1 in the lamination direction. What is the plasma panel laminate 20? It may be a laminate clamp that sandwiches and fixes different predetermined ceramic panel laminates (a plurality of ceramic panels) in the lamination direction. *

Next, in addition to the technical ideas described in the claims, the technical ideas grasped by the embodiment described above are listed below. *

(1) The plasma reactor according to the above means 1, wherein the pressing member has higher elasticity than the clamp body. *

(2) In the above means 1, the electrode panel has a first main surface and a second main surface, and the first main surface side and the second main surface side are electrically connected to the electrode panel. A conduction structure is provided, and the conduction structure is formed in the first main surface and the through hole conductor penetrating the first main surface and the second main surface, and the first main surface side of the through hole conductor. A first pad that is electrically connected to the end, and a second pad that is formed on the second main surface and is electrically connected to the end of the through-hole conductor on the second main surface. A plasma reactor characterized by.

1 ... Plasma reactor

20, 85, 181, 191 ... Plasma panel laminate as a ceramic panel laminate

27, 182 ... hole

30, 86, 114, 145, 174, 194 ... Electrode panel as a ceramic panel

31 ... 1st main surface as a surface

32 ... Second main surface as a surface

34 ... Discharge electrode

41. Through-hole conductor as an electrically conductive member

42. First pad as an electrically conductive member

43 ... Second pad as an electrically conductive member

51... First clamp as a clamp, an electrically conductive member, and a laminate clamp

52. Second clamp as clamp and laminate clamp

53, 82, 94, 116, 132, 148, 183, 195 ... Shaft member as a clamp body

54, 73, 83, 91, 102, 112, 122, 134 ... leaf springs as pressing members

71, 81, 101, 111, 121, 131, 141, 151, 161, 171... Clamps as electrical conducting members and laminate clamps

72 ... Plate member as clamp body

95 ... Welded part

123 ... Slit

133 ... Screw part

135 ... Nut

142, 172 ... holding members

143, 152, 162 ... holding plate

144, 163 ... Compression coil spring

146 ... Surface

149: Fixing ring as a fixing part

192 ... Groove

193 ... Retaining mechanism

196 ... opening

S1, S2 ... Gap

Claims

A plasma panel laminate having a structure in which a plurality of electrode panels having discharge electrodes are laminated, and generating plasma by applying a voltage between the adjacent electrode panels;

A plasma reactor comprising a clamp that sandwiches and fixes the plurality of electrode panels in the stacking direction,

The clamp is

A clamp body extending in the stacking direction of the electrode panel;

The clamp body is configured separately from the clamp body, and is attached to at least one end of the clamp body, and includes a pressing member that presses the surface of the electrode panel constituting the plasma panel laminate,

The plasma reactor, wherein the clamp body and the pressing member are fixed.
A plurality of the clamps are provided,

2. The plasma reactor according to claim 1, wherein at least one of the plurality of clamps has a function as an electrically conductive member electrically connected to the discharge electrode.
The plasma reactor according to claim 1, wherein the pressing member has elasticity.
The plasma reactor according to any one of claims 1 to 3, wherein one pressing member presses the surface of the electrode panel at a plurality of locations.
The plasma reactor according to claim 1, wherein the pressing member is fixed to both ends of the clamp body.
The plasma reactor according to claim 1, wherein the pressing member is a leaf spring having a bent back structure.
The plasma reactor according to any one of claims 1 to 6, wherein the pressing member is a leaf spring having a slit penetrating the pressing member in the thickness direction.
The clamp body is a rod-shaped shaft member,

The plasma reactor according to any one of claims 1 to 7, wherein the plasma panel laminate includes a hole portion that penetrates in the stacking direction of the electrode panel and into which the shaft member is inserted.
The plasma reactor according to claim 8, wherein a gap is provided between an outer peripheral surface of the shaft member and an inner peripheral surface of the hole.
The clamp body is a rod-shaped shaft member,

The plasma panel laminate is

It has a groove part that penetrates in the stacking direction of the electrode panel and into which the shaft member is inserted,

8. The device according to claim 1, further comprising a retaining mechanism that prevents the shaft member from coming off from the groove by forming the groove so that the width of the groove becomes narrower at the opening. 9. A plasma reactor according to 1.
The plasma reactor according to claim 10, wherein a gap is provided between an outer peripheral surface of the shaft member and an inner surface of the groove portion.
The plasma reactor according to any one of claims 1 to 11, wherein the clamp body is made of a material having a lower thermal expansion coefficient than the pressing member.
A threaded portion is provided at the end of the clamp body,

13. The pressing member is fixed to the clamp body by screwing a nut into the threaded portion in a state where the clamp body is inserted through the pressing member. 2. The plasma reactor according to item 1.
The plasma reactor according to any one of claims 1 to 13, wherein a part of the pressing member and the clamp main body are fixed to each other by a welded portion.
The holding member is

A pressing plate in contact with the surface of the electrode panel;

2. A compression coil spring interposed between the pressing plate and a fixed portion provided at an end portion of the clamp body and pressing the pressing plate against the surface side of the electrode panel. The plasma reactor according to any one of 1 to 14.
A laminate clamp for sandwiching and fixing a ceramic panel laminate having a structure in which a plurality of ceramic panels are laminated, in the lamination direction of the ceramic panel,

A clamp body extending in the stacking direction of the ceramic panels;

The clamp body is configured separately from the clamp body, and is attached to at least one end of the clamp body, and includes a pressing member that presses the surface of the ceramic panel constituting the ceramic panel laminate,

The clamp for laminated bodies, wherein the clamp body and the pressing member are fixed.
The said clamp member has elasticity, The clamp for laminated bodies of Claim 16 characterized by the above-mentioned.
The laminate clamp according to claim 16 or 17, wherein the pressing member is fixed to both ends of the clamp body.
The clamp for a laminated body according to any one of claims 16 to 18, wherein the pressing member is a leaf spring having a bent back structure.
The laminate clamp according to any one of claims 16 to 19, wherein the pressing member is a leaf spring having a slit penetrating the pressing member in the thickness direction.
The laminate body clamp according to any one of claims 16 to 20, wherein the clamp body is formed of a material having a lower thermal expansion coefficient than the pressing member.
A threaded portion is provided at the end of the clamp body,

The clamp member is fixed to the clamp body by screwing a nut into the threaded portion in a state where the clamp body is inserted through the clamp member. 2. The laminate clamp according to item 1.
The clamp for a laminated body according to any one of claims 16 to 22, wherein a part of the pressing member and the clamp body are fixed to each other by a welded portion.
The holding member is

A pressing plate that contacts the surface of the ceramic panel;

17. A compression coil spring interposed between the pressing plate and a fixing portion provided at an end of the clamp body and pressing the pressing plate against the surface side of the ceramic panel. 24. The laminate clamp according to any one of items 23 to 23.