JP2019046555A - Plasma reactor - Google Patents

Abstract

To provide a plasma reactor capable of generating plasma without fail even if water would flow thereinto.SOLUTION: A plasma reactor of the present invention comprises a plasma panel laminate 20, a case and a seal member 80. The plasma panel laminate 20 has a structure in which electrode panels are laminated, and it generates plasma when a voltage is put between adjacent electrode panels. The case contains the plasma panel laminate 20. The seal member 80 is interposed between the case and the plasma panel laminate 20. The seal member 80 includes an upstream-side seal part 81 and a downstream-side seal part 82, which are disposed along a passage direction F1 of a gas flowing from an upstream-side end face 21 toward a downstream-side end face 22 with a gap S1 arranged therebetween. The upstream-side seal part 81 and the downstream-side seal part 82 are different from each other in volume.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a plasma reactor, and more particularly to a plasma reactor suitable for an apparatus for purifying exhaust gas from an internal combustion engine (engine).

  Conventionally, exhaust gas from an engine or incinerator is passed through a plasma field, so that CO (carbon monoxide), HC (hydrocarbon), NOx (nitrogen oxide), and PM (particulate matter) contained in the exhaust gas are in particulate form. Plasma reactors for treating harmful substances such as substances have been proposed.

  For example, by laminating a plurality of electrode panels on which discharge electrodes are formed and applying a voltage between adjacent electrode panels to generate low temperature plasma (non-equilibrium plasma) due to dielectric barrier discharge, the electrodes flow between the electrode panels. Various plasma reactors that oxidize and remove PM in exhaust gas have been proposed (see, for example, Patent Documents 1 to 3). The plasma reactors described in Patent Documents 1 to 3 include a case for accommodating a plasma panel laminate formed by laminating electrode panels, and a mat-like seal member interposed between the case and the plasma panel laminate. Etc. Further, the plasma reactor is provided with an electrically conductive member that is electrically connected to the discharge electrode, and the electrically conductive member is in contact with the case via the seal member. For example, in Patent Document 1, a lead line member that is an electrically conductive member is provided, and the lead line member is in contact with a housing (case) via a seal member. Further, in Patent Document 2, a connector (insulated connector) which is an electrical conduction member is provided, and the connector is in contact with the case via a seal member (dielectric mat).

Japanese Patent No. 3832654 ([0065], [0066], [0077], FIG. 4 etc.) US Pat. No. 6,464,945 (FIG. 8 etc.) JP 2011-12559 A (FIG. 3 etc.)

  By the way, when the plasma reactor is mounted on a vehicle or the like and used, water may flow into the plasma reactor. Here, as the water flowing into the plasma reactor, for example, exhaust condensed water generated due to condensation in the exhaust pipe at the time of cold start of the vehicle, water flowing from the muffler as the vehicle enters the puddle, etc. There is.

  However, in the prior arts described in Patent Documents 1 to 3, since the sealing member having insulation in the dry state absorbs water and enters a water-containing state with the inflow of water into the plasma reactor, Insulation will be reduced. As a result, the electrical conducting member (and the discharge electrode) and the case are conducted through the sealing member in a water-containing state, and there is a possibility that a leak current is generated. In this case, since the amount of plasma generated with respect to the input power is reduced, there is a problem that the exhaust gas purification efficiency is low.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a plasma reactor capable of reliably generating plasma even when water flows in.

  As means (means 1) for solving the above-mentioned problem, it has a structure in which a plurality of electrode panels having discharge electrodes are stacked, having an upstream end face into which gas flows and a downstream end face from which gas flows out, A plasma panel laminate that generates plasma when a voltage is applied between the adjacent electrode panels, a cylindrical case in which the plasma panel laminate is accommodated, and between the case and the plasma panel laminate A plasma reactor comprising a mat-like seal member interposed and holding the plasma panel laminate in the case, wherein the seal member passes a gas flowing from the upstream end face side to the downstream end face side And includes an upstream seal portion and a downstream seal portion disposed with a gap therebetween. There are plasma reactor, characterized in that the volume of the downstream-side seal portion are different from each other.

  Therefore, in the invention described in the above means 1, the seal member interposed between the case and the plasma panel laminate is configured to include the upstream seal portion and the downstream seal portion disposed with a gap therebetween. ing. Therefore, when water flows into the plasma reactor from the upstream side, the water that has flowed in is first absorbed by the upstream seal portion, so that the arrival of water at the downstream seal portion is suppressed. Further, when water flows into the plasma reactor from the downstream side, the water that has flowed in is first absorbed by the downstream seal portion, so that the arrival of water at the upstream seal portion is suppressed. As a result, since water is prevented from spreading over the entire seal member, the contact area between the case and the region of the seal member that has become water-containing and easily conducted is reduced. Therefore, it is possible to reduce the amount of leakage current flowing from the plasma panel laminate to the case via the seal member, and to suppress a decrease in capacitance between the plasma panel laminate and the case. Therefore, since the amount of plasma generated with respect to the input power can be secured, PM can be efficiently removed when the PM in the exhaust gas flowing between the adjacent electrode panels is oxidized and removed using plasma.

  In addition, since the volume of the upstream side seal portion and the volume of the downstream side seal portion are different from each other, when the seal portion on the side with a small volume contains water, the region of the seal member that easily contains water and becomes conductive. The contact area can be further reduced. As a result, the amount of leakage current described above can be reduced more reliably. Therefore, it is possible to secure a sufficient amount of plasma generated with respect to the input power.

  When the upstream seal portion is disposed at the upstream end portion of the plasma panel laminate and the downstream seal portion is disposed at the downstream end portion of the plasma panel laminate, the volume of the upstream seal portion is downstream. The volume of the side seal portion may be smaller, or the volume of the downstream seal portion may be smaller than the volume of the upstream seal portion. When the volume of the upstream seal portion is smaller than the volume of the downstream seal portion, even if water flows into the plasma reactor from the upstream side and the upstream seal portion contains water, the seal member contains water and conducts. The contact area between the region (upstream side seal portion) and the case that becomes easier is reduced. On the other hand, if the volume of the downstream seal part is smaller than the volume of the upstream seal part, even if water flows into the plasma reactor from the downstream side and the downstream seal part contains water, The contact area between the case (downstream seal portion) and the case that are likely to be conductive is reduced. As a result, the amount of leakage current flowing from the plasma panel laminate to the case via the seal member can be reliably reduced.

  The structure in which the volume of the upstream seal portion is smaller than the volume of the downstream seal portion is not particularly limited. For example, the structure in which the upstream seal portion is formed thinner than the downstream seal portion, Examples include a structure in which the length of the upstream seal portion along the gas passage direction is shorter than the length of the downstream seal portion along the gas passage direction. By adopting these structures, it is possible to easily obtain a structure in which the volume of the upstream seal portion is smaller than the volume of the downstream seal portion.

The plasma panel laminate constituting the plasma reactor has a structure in which a plurality of electrode panels having discharge electrodes are laminated. Examples of the material for forming the discharge electrode include tungsten (W), molybdenum (Mo), ruthenium oxide (RuO ₂ ), silver (Ag), copper (Cu), platinum (Pt), and the like.

  The seal member constituting the plasma reactor is interposed between the case and the plasma panel laminate. Here, examples of the material for forming the seal member include insulating materials such as ceramic fiber, metal fiber, and foam metal. The seal member includes an upstream seal portion and a downstream seal portion that are disposed with a gap therebetween. Here, it is preferable that the upstream side seal portion and the downstream side seal portion are arranged to be separated from each other by, for example, 3 mm or more and 50 mm or less. Even if the water absorbed in the upstream seal portion has oozed out due to the upstream seal portion and the downstream seal portion being arranged at a distance of 3 mm or more, the leached water will be in the downstream seal portion. Reaching is prevented. In addition, if the upstream seal portion and the downstream seal portion are disposed apart from each other by more than 50 mm, an area where the seal portion can be disposed becomes small. As a result, the contact area between the case and the seal part and the contact area between the seal part and the plasma panel laminate are reduced, and thus there is a possibility that the plasma panel laminate cannot be securely fixed to the case via the seal part. .

  The seal member may include a connecting portion that connects at least a part of the upstream seal portion and the downstream seal portion. Also in this case, since water is prevented from spreading from one seal part to the other seal part, the contact area between the region of the seal member that has become easy to contain water and become conductive is reduced. Therefore, it is possible to reduce the amount of leakage current flowing from the plasma panel laminate to the case via the seal member. Furthermore, it is preferable that the connecting portion connects the upstream seal portion and the downstream seal portion at a portion covering the uppermost electrode panel constituting the plasma panel laminate. In this way, even if water flows into the plasma reactor, the connecting portion is not easily submerged, so that the water spreads from one seal portion to the other due to the submergence of the connecting portion. Can be prevented.

  In addition, an electrical conduction member that is electrically connected to the discharge electrode is provided, and a cutout portion that penetrates the seal portion in the thickness direction is disposed in the upstream seal portion or the downstream seal portion, and an inner region of the cutout portion is provided. An electrically conductive member may be located. In this case, the electrically conductive member is surrounded by the upstream seal portion or the downstream seal portion. As a result, the water flowing into the plasma reactor is absorbed by the upstream seal portion or the downstream seal portion, so that contact of water with the electrically conductive member is prevented. Therefore, it is possible to prevent the occurrence of leakage current due to the electrical conduction member and the case being conducted through the upstream side seal portion or the downstream side seal portion. When water flows into the plasma reactor from the upstream side, a cutout portion that penetrates the downstream seal portion in the thickness direction is disposed in the downstream seal portion, and an electrically conductive member is provided in the inner region of the cutout portion. Preferably it is located. In this way, water contact with the electrically conductive member can be prevented by both the upstream side seal portion and the downstream side seal portion, so that the generation of a leakage current due to the conduction between the electrically conductive member and the case is more reliably generated. Can be prevented.

  Furthermore, it is preferable that the electrical conduction member be disposed, for example, by being separated from the upstream seal portion and the downstream seal portion by 2 mm or more and 30 mm or less. If the electrical conduction member is disposed at a distance of less than 2 mm from the seal portion (upstream seal portion or downstream seal portion), creeping discharge is likely to occur. Therefore, the electrical conduction member and the case are interposed via the seal portion. There is a risk of continuity. On the other hand, when the electrically conductive member is disposed farther than 30 mm from the seal portion, an area where the seal portion can be disposed becomes small. As a result, the contact area between the case and the seal part and the contact area between the seal part and the plasma panel laminate are reduced, and therefore there is a possibility that the plasma panel laminate cannot be securely fixed to the case via the seal part. is there. Note that the distance between the seal portion and the electrically conductive member varies depending on the level of voltage required for plasma formation. In general, it is known that 1 mm per 1 kV may be separated to prevent the occurrence of creeping discharge. Therefore, the distance between the seal portion and the electrically conductive member is preferably a distance corresponding to the voltage applied between the electrode panels.

  As another means (means 2) for solving the above problem, there is a structure in which a plurality of electrode panels each having a discharge electrode are stacked, having an upstream end face into which gas flows and a downstream end face from which gas flows out. A plasma panel laminate that generates plasma when a voltage is applied between the adjacent electrode panels, a cylindrical case that accommodates the plasma panel laminate, and the case and the plasma panel laminate. A plasma reactor comprising a mat-like seal member interposed between and holding the plasma panel laminate in the case, wherein the seal member is configured to transmit gas flowing from the upstream end face side to the downstream end face side. It is arranged along the passing direction and includes an upstream seal portion and a downstream seal portion that are arranged with a gap between each other. There are plasma reactor, characterized in that the serial upstream seal portion porosity and the porosity of the downstream sealing portion are different from each other.

  Therefore, in the invention described in the above means 2, the seal member interposed between the case and the plasma panel laminate is configured to include an upstream seal portion and a downstream seal portion that are disposed with a gap therebetween. ing. Therefore, when water flows into the plasma reactor from the upstream side, the water that has flowed in is first absorbed by the upstream seal portion, so that the arrival of water at the downstream seal portion is suppressed. Further, when water flows into the plasma reactor from the downstream side, the water that has flowed in is first absorbed by the downstream seal portion, so that the arrival of water at the upstream seal portion is suppressed. As a result, since water is prevented from spreading over the entire seal member, the contact area between the case and the region of the seal member that has become water-containing and easily conducted is reduced. Therefore, it is possible to reduce the amount of leakage current flowing from the plasma panel laminate to the case via the seal member, and to suppress a decrease in capacitance between the plasma panel laminate and the case. Therefore, since the amount of plasma generated with respect to the input power can be secured, PM can be efficiently removed when the PM in the exhaust gas flowing between the adjacent electrode panels is oxidized and removed using plasma.

  Moreover, in the laminated body holding state, the porosity of the upstream seal portion and the porosity of the downstream seal portion are different from each other, so that a large amount of water can be absorbed by the seal portion having the higher porosity. Therefore, when the seal portion on the side having a large porosity contains water, it is possible to reduce the possibility that water will ooze out from the water-containing seal portion and reach the seal portion not containing water. As a result, since the water is reliably prevented from spreading over the entire seal member, the amount of leakage current described above can be more reliably reduced. Therefore, it is possible to secure a sufficient amount of plasma generated with respect to the input power.

  In addition, when the upstream seal portion is disposed at the upstream end portion of the plasma panel laminate and the downstream seal portion is disposed at the downstream end portion of the plasma panel laminate, The porosity of the seal portion may be greater than the porosity of the downstream seal portion, or the porosity of the downstream seal portion may be greater than the porosity of the upstream seal portion. When the porosity of the upstream seal portion is larger than the porosity of the downstream seal portion, a large amount of water can be absorbed by the upstream seal portion when water flows into the plasma reactor from the upstream side. The possibility that water oozes out from the portion and reaches the downstream seal portion can be reduced. On the other hand, when the porosity of the downstream seal portion is larger than the porosity of the upstream seal portion, a large amount of water can be absorbed by the downstream seal portion when water flows into the plasma reactor from the downstream side. The possibility of water seeping out from the side seal portion and reaching the upstream seal portion can be reduced. As a result, since it is reliably prevented that water spreads over the entire sealing member, it is possible to reliably reduce the amount of leakage current flowing from the plasma panel laminate to the case via the sealing member.

  As another means (means 3) for solving the above problem, there is a structure in which a plurality of electrode panels each having a discharge electrode are stacked, each having an upstream end face into which gas flows and a downstream end face from which gas flows out. A plasma panel laminate that generates plasma when a voltage is applied between the adjacent electrode panels, a cylindrical case that accommodates the plasma panel laminate, and the case and the plasma panel laminate. A plasma reactor comprising a mat-like seal member interposed between and holding the plasma panel laminate in the case, wherein the seal member is configured to transmit gas flowing from the upstream end face side to the downstream end face side. It is arranged along the passing direction and includes an upstream seal portion and a downstream seal portion that are arranged with a gap between each other. There are plasma reactor, characterized in that the serial upstream seal portion of the compression ratio and the compression ratio of the downstream sealing portion are different from each other.

  Therefore, in the invention described in the means 3, the seal member interposed between the case and the plasma panel laminate includes an upstream seal portion and a downstream seal portion disposed with a gap therebetween. Yes. Therefore, when water flows into the plasma reactor from the upstream side, the water that has flowed in is first absorbed by the upstream seal portion, so that the arrival of water at the downstream seal portion is suppressed. Further, when water flows into the plasma reactor from the downstream side, the water that has flowed in is first absorbed by the downstream seal portion, so that the arrival of water at the upstream seal portion is suppressed. As a result, since water is prevented from spreading over the entire seal member, the contact area between the case and the region of the seal member that has become water-containing and easily conducted is reduced. Therefore, it is possible to reduce the amount of leakage current flowing from the plasma panel laminate to the case via the seal member, and to suppress a decrease in capacitance between the plasma panel laminate and the case. Therefore, since the amount of plasma generated with respect to the input power can be secured, PM can be efficiently removed when the PM in the exhaust gas flowing between the adjacent electrode panels is oxidized and removed using plasma.

  Moreover, since the compression rate of the upstream seal portion and the compression rate of the downstream seal portion are different from each other in the laminated body holding state, a large amount of water can be absorbed by the seal portion on the side where the compression rate is small. Therefore, when the seal part on the side with a small compressibility contains water, the possibility that water oozes out from the water-containing seal part and reaches the seal part not containing water can be reduced. As a result, since the water is reliably prevented from spreading over the entire seal member, the amount of leakage current described above can be more reliably reduced. Therefore, it is possible to secure a sufficient amount of plasma generated with respect to the input power.

  In addition, when the upstream seal portion is disposed at the upstream end portion of the plasma panel laminate and the downstream seal portion is disposed at the downstream end portion of the plasma panel laminate, The compression rate of the seal portion may be smaller than the compression rate of the downstream seal portion, or the compression rate of the downstream seal portion may be smaller than the compression rate of the upstream seal portion. When the compression rate of the upstream seal portion is smaller than the compression rate of the downstream seal portion, a large amount of water can be absorbed by the upstream seal portion when water flows into the plasma reactor from the upstream side. The possibility that water oozes out from the portion and reaches the downstream seal portion can be reduced. On the other hand, when the compression rate of the downstream seal portion is smaller than the compression rate of the upstream seal portion, a large amount of water can be absorbed by the downstream seal portion when water flows into the plasma reactor from the downstream side. The possibility of water seeping out from the side seal portion and reaching the upstream seal portion can be reduced. As a result, since it is reliably prevented that water spreads over the entire sealing member, it is possible to reliably reduce the amount of leakage current flowing from the plasma panel laminate to the case via the sealing member.

  The structure in which the compression rate of the upstream seal portion is smaller than the compression rate of the downstream seal portion is not particularly limited. For example, the thickness of the upstream seal portion is downstream in the laminate non-holding state. The structure smaller than the thickness of the side seal part, or the distance between the inner surface of the case and the outer surface of the plasma panel laminate in the arrangement area of the upstream seal part, the inner surface of the case and the plasma panel in the arrangement area of the downstream seal part Examples include a structure that is larger than the distance from the outer surface of the laminate. By adopting these structures, it is possible to easily obtain a structure in which the compression rate of the upstream seal portion is smaller than the compression rate of the downstream seal portion.

1 is a schematic cross-sectional view showing a plasma reactor in the present embodiment. The top view which shows a plasma reactor. The perspective view which shows a plasma reactor. The perspective view which shows the state in which the plasma panel laminated body is accommodated in the case. The top view which shows a plasma panel laminated body, a clamp, a power supply terminal, and a sealing member. The perspective view which shows a plasma panel laminated body, a clamp, a power supply terminal, and a sealing member. The perspective view which shows a plasma panel laminated body, a clamp, and a power supply terminal. The perspective view which shows an electrode panel. In other embodiment, the perspective view which shows a plasma panel laminated body, a clamp, a power supply terminal, and a sealing member. In other embodiment, the fragmentary sectional view which shows the state in which the plasma panel laminated body is accommodated in the case. In other embodiment, the fragmentary sectional view which shows the state in which the plasma panel laminated body is accommodated in the case. The top view which shows a plasma panel laminated body, a clamp, a power supply terminal, and a sealing member in other embodiment. The top view which shows a plasma panel laminated body, a clamp, a power supply terminal, and a sealing member in other embodiment. The top view which shows a plasma panel laminated body, a clamp, a power supply terminal, and a sealing member in other embodiment. The top view which shows a plasma panel laminated body, a clamp, a power supply terminal, and a sealing member in other embodiment. The top view which shows a plasma panel laminated body, a clamp, a power supply terminal, and a sealing member in other embodiment. The top view which shows a plasma panel laminated body, a clamp, a power supply terminal, and a sealing member in other embodiment. The top view which shows a plasma panel laminated body, a clamp, a power supply terminal, and a sealing member in other embodiment. The top view which shows a plasma panel laminated body, a clamp, a power supply terminal, and a sealing member in other embodiment. The top view which shows a plasma panel laminated body, a clamp, a power supply terminal, and a sealing member in other embodiment.

  Hereinafter, an embodiment of the plasma reactor 1 of the present invention will be described in detail with reference to the drawings.

  As shown in FIGS. 1 to 4, the plasma reactor 1 of the present embodiment is a device that removes PM contained in exhaust gas of an automobile engine (not shown), and is attached to an exhaust pipe 2. . The plasma reactor 1 includes a power source 3, a case 10, and a plasma panel laminate 20.

  The case 10 is formed in a rectangular cylinder shape using, for example, stainless steel. A first cone portion 11 is connected to a first end portion (left end portion in FIG. 1) of the case 10, and a second cone portion 12 is connected to a second end portion (right end portion in FIG. 1) of the case 10. Yes. Further, the first cone portion 11 is connected to the upstream portion 4 (engine portion) of the exhaust pipe 2, and the second cone portion 12 is connected to the downstream portion 5 (opposite side of the engine side) of the exhaust pipe 2. Part). The exhaust gas from the engine flows into the case 10 from the upstream portion 4 of the exhaust pipe 2 through the first cone portion 11, passes through the case 10, and then passes through the second cone portion 12 to the exhaust pipe. 2 flows out to the downstream part 5.

  As shown in FIGS. 1, 3 to 7, the plasma panel laminate 20 is housed in the case 10, and includes an upstream end face 21 into which exhaust gas flows, a downstream end face 22 from which exhaust gas flows, It has a substantially rectangular parallelepiped shape having four gas non-passing surfaces 23, 24, 25 and 26. The upstream side end surface 21 and the downstream side end surface 22 are located on opposite sides of the plasma panel laminate 20. The gas non-passing surfaces 23 to 26 are located between the upstream end surface 21 and the downstream end surface 22.

  The plasma panel laminate 20 has a structure in which a plurality of electrode panels 30 and a pair of outer layer panels 50 positioned on the outer layer side of each electrode panel 30 are laminated. Each panel 30 and 50 is arrange | positioned in parallel with passage direction F1 (direction which goes to the 2nd cone part 12 from the 1st cone part 11) of the waste gas which flows into the downstream end face 22 side from the upstream end surface 21 side, and mutually It arrange | positions so that it may have a clearance gap (a 0.5 mm clearance gap in this embodiment). More specifically, the plasma panel laminate 20 has a gas flow path 27 through which exhaust gas passes between adjacent electrode panels 30.

  As shown in FIG. 1, the first wiring 6 and the second wiring 7 are alternately and electrically connected to each electrode panel 30 along the thickness direction of the plasma panel laminate 20. The first wiring 6 is electrically connected to the first terminal of the power supply 3, and the second wiring 7 is electrically connected to the second terminal of the power supply 3.

As shown in FIGS. 1 and 8, the electrode panel 30 of the present embodiment has a first main surface 31 and a second main surface 32, and has a substantially rectangular plate shape of length 100 mm × width 120 mm. . Further, the electrode panel 30 has a structure in which a discharge electrode 34 (thickness 10 μm) is built in a rectangular plate-like dielectric 33. In the present embodiment, the dielectric 33 is made of a ceramic such as alumina (Al ₂ O ₃ ), and the discharge electrode 34 is made of tungsten (W). The electrode panel 30 has a recess 35 that opens at the second main surface 32. The recess 35 extends in the lateral direction of the electrode panel 30 and opens at both end faces of the electrode panel 30. And in the plasma panel laminated body 20 of this embodiment, the above-mentioned gas flow path 27 is comprised between the inner surface of the recessed part 35, and the 1st main surface 31 of the electrode panel 30 adjacent to a lower layer side.

  As shown in FIG. 8, one conductive structure 40 that connects the first main surface 31 side and the second main surface 32 side is provided on each side portion of the recess 35 in the electrode panel 30. Each conduction structure 40 includes a through-hole conductor 41, a first pad 42, and a second pad 43. The through-hole conductor 41 penetrates the electrode panel 30 in the thickness direction. The through-hole conductor 41 provided in one conduction structure 40 passes through an extending portion 36 that extends from the discharge electrode 34 to the outer peripheral side. The first pad 42 is formed on the first main surface 31 and is electrically connected to the end portion of the through-hole conductor 41 on the first main surface 31 side. On the other hand, the second pad 43 is formed on the second main surface 32 and is electrically connected to the end of the through-hole conductor 41 on the second main surface 32 side. The first pad 42 and the second pad 43 each have a rectangular shape, and the surface thereof is plated with Ni or the like.

  As shown in FIGS. 1 and 4 to 7, the outer layer panel 50 of the present embodiment has a first main surface 51 and a second main surface 52, and has a substantially rectangular plate shape with a length of 100 mm × width of 120 mm. doing. Note that the outer layer panel 50 of the present embodiment is not formed with a recess similar to the recess 35.

  Further, the outer panel 50 is constituted by a rectangular plate-like dielectric 53. In the present embodiment, the dielectric 53 is made of a ceramic such as alumina. That is, the outer panel 50 of this embodiment is formed using the same material as the electrode panel 30. Note that the dielectric 53 of the present embodiment does not incorporate a discharge electrode similar to the discharge electrode 34.

  In addition, one conductive structure (not shown) that connects the first main surface 51 side and the second main surface 52 side is provided at each end portion of the outer panel 50. Each conduction structure includes a through-hole conductor (not shown), a first pad (not shown), and a second pad (not shown). The through-hole conductor penetrates the outer panel 50 in the thickness direction. The first pad is formed on the first main surface 51 and is electrically connected to the end portion of the through hole conductor on the first main surface 51 side. The first pads formed on the first main surface 51 of the lower-layer outer layer panel 50 are in contact with the second pads 43 formed on the lowermost electrode panel 30. On the other hand, the second pad is formed on the second main surface 52 and is electrically connected to the end portion of the through hole conductor on the second main surface 52 side. The second pad formed on the second main surface 52 of the upper outer panel 50 is in contact with the first pad 42 formed on the uppermost electrode panel 30. The first pad and the second pad each have a rectangular shape, and the surface thereof is plated with Ni or the like.

  As shown in FIG. 5 to FIG. 7, the plasma reactor 1 includes one first clamp 61 for fixing each panel 30, 50 (plasma panel laminate 20) from the gas non-passing surface 24 side, and each panel. 30 and 50 is provided with one second clamp 62 for fixing by sandwiching from the gas non-passing surface 26 side. The clamps 61 and 62 are formed by bending a metal plate (for example, a stainless plate made of a material such as SUS430). The clamps 61 and 62 have a function as an electrically conductive member that is electrically connected to the discharge electrode 34 in addition to the function of sandwiching the panels 30 and 50 in the stacking direction.

  Each clamp 61, 62 includes a plate member 63 and a pressing plate 64. The plate member 63 extends in the stacking direction of the panels 30 and 50. The holding plate 64 is formed integrally with the plate member 63 and is disposed at both ends of the plate member 63. Each pressing plate 64 is a leaf spring having elasticity and a folded structure. Each presser plate 64 is applied to the first pad formed on the first main surface 51 of the outer layer panel 50 on the upper layer side or the second pad formed on the second main surface 52 of the outer layer panel 50 on the lower layer side. It is in pressure contact.

  As shown in FIGS. 2 to 7, the plasma reactor 1 includes a pair of power supply terminals 71 and 72. The power supply terminals 71 and 72 of this embodiment have the same structure as a spark plug. Specifically, the power supply terminals 71 and 72 include an external connection portion, a conductive seal containing metal powder, an insulator, a metal shell, talc, packing, and the like. The external connection portion is connected to the central shaft 73 via a conductive seal. The center shaft 73 has one end disposed in the insulator. The power supply terminal is not limited to the one in the present embodiment, and may have another structure as long as the structure is such that the external connection portion and the case 10 are insulated by an insulator. .

  Further, the power supply terminal 71 has a proximal end portion (central shaft 73) electrically connected to the central portion of the plate member 63 of the first clamp 61 and a distal end portion exposed from the case 10. Similarly, the power supply terminal 72 has a proximal end portion (central shaft 73) electrically connected to the central portion of the plate member 63 of the second clamp 62 and a distal end portion exposed from the case 10. The power supply terminals 71 and 72 protrude in opposite directions. In the present embodiment, the tip of the power supply terminal 71 is connected to the first wiring 6 (see FIG. 1), and the tip of the power supply terminal 72 is connected to the second wiring 7 (see FIG. 1). Connected.

  As shown in FIGS. 4 to 6, a mat-like sealing member 80 having a rectangular ring shape when viewed from the side is interposed between the case 10 and the plasma panel laminate 20. The seal member 80 has a function of holding the plasma panel laminate 20 in the case 10.

  As shown in FIGS. 5 and 6, the seal member 80 includes an upstream seal portion 81 having a rectangular annular shape and a downstream seal portion 82 having a rectangular annular shape. The upstream seal portion 81 and the downstream seal portion 82 are disposed along the exhaust gas passage direction F1. The upstream seal portion 81 is disposed at the upstream end of the plasma panel laminate 20 (that is, the end on the upstream end face 21 side), and the downstream seal portion 82 is downstream of the plasma panel laminate 20. It arrange | positions at the edge part (namely, edge part of the downstream end surface 22 side). Further, the upstream side seal portion 81 and the downstream side seal portion 82 are disposed apart from each other via a gap S1 of 3 mm or more and 50 mm or less (45 mm in this embodiment). Furthermore, the upstream side seal part 81 and the downstream side seal part 82 are arranged so as to have a gap between the clamps 61 and 62. More specifically, the upstream end edge 65 of the clamps 61 and 62 is spaced apart from the downstream end edge 83 of the upstream seal portion 81 by 2 mm or more and 30 mm or less (20 mm in this embodiment). At the same time, the downstream end edge 66 of the clamps 61 and 62 is spaced from the upstream end edge 84 of the downstream seal portion 82 by 2 mm or more and 30 mm or less (5 mm in this embodiment). In addition, the upstream edge 85 of the upstream seal portion 81 is disposed 5 mm away from the upstream end surface 21 of the plasma panel laminate 20. Further, the downstream end edge 86 of the downstream seal portion 82 is disposed 5 mm away from the downstream end face 22 of the plasma panel laminate 20.

  5 and 6, the volume of the upstream seal portion 81 and the volume of the downstream seal portion 82 are different from each other. More specifically, the length L1 of the upstream-side seal portion 81 along the exhaust gas passage direction F1 in the laminate non-holding state (that is, the state in which the plasma panel laminate 20 is not held in the case 10) (see FIG. 5). ) Is 25 mm, and the thickness T1 (see FIGS. 5 and 6) of the upstream seal portion 81 is 22 mm. Similarly, in the laminated body holding state, the length L2 (see FIG. 5) of the downstream seal portion 82 along the passage direction F1 is 40 mm, and the thickness T2 of the downstream seal portion 82 (see FIGS. 5 and 6) is It is 22 mm. That is, although the thickness T1 of the upstream seal portion 81 is equal to the thickness T2 of the downstream seal portion 82, the length L1 of the upstream seal portion 81 is shorter than the length L2 of the downstream seal portion 82. . Therefore, in the present embodiment, the volume of the upstream seal portion 81 is smaller than the volume of the downstream seal portion 82.

  Moreover, the upstream side seal part 81 and the downstream side seal part 82 shown by FIG. 5, FIG. 6 are each formed using the same material (this embodiment insulating material which consists of ceramic fibers). Therefore, in the laminated body holding state (that is, the state in which the plasma panel laminated body 20 is held in the case 10), the porosity of the upstream seal portion 81 and the porosity of the downstream seal portion 82 are equal to each other. Furthermore, the distance between the inner surface of the case 10 and the outer surface of the plasma panel laminate 20 in the arrangement region of the upstream seal portion 81, and the inner surface of the case 10 and the plasma panel laminate 20 in the arrangement region of the downstream seal portion 82. The distance to the outer surface is equal to each other, and is 15 mm in this embodiment. Therefore, in the stacked body holding state, the compression rate of the upstream seal portion 81 and the compression rate of the downstream seal portion 82 are equal to each other. More specifically, the compression ratio of the seal portions 81 and 82 is 0% or more and 50% or less, specifically 10% or more and 40% or less (about 32% in this embodiment).

  5 and 6, the seal portions 81 and 82 that cover the plasma panel laminate 20 are shown as an integral unit. However, in order to optimize the manufacturing method, the seal portion is combined by combining a plurality of mats. It may be configured. For example, the upstream seal portion 81 may be configured by combining four mats that respectively cover the gas non-passing surfaces 23 to 26. Further, the upstream seal portion 81 may be configured by stacking two mats covering the gas non-passing surfaces 23 to 26 and combining a total of eight mats. Further, the compression rates of the mats may not be equal to each other. For example, the compression rate of the mat covering the gas non-passing surfaces 23 and 25 and the compression rate of the mat covering the gas non-passing surfaces 24 and 26 may not be equal to each other. That is, the plasma reactor 1 that is resistant to breakage can be obtained by setting the mat compression ratio in consideration of the pressure resistance of the plasma panel laminate 20.

  In addition, as FIG. 1 shows, the plasma reactor 1 of this embodiment is used in order to remove PM contained in exhaust gas, for example. In this case, when a pulse voltage (for example, peak voltage: 5 kV (5000 V), pulse repetition frequency: 100 Hz) is applied from the power source 3 to the adjacent electrode panel 30, dielectric barrier discharge occurs, and the discharge electrode 34 Plasma due to dielectric barrier discharge is generated. Then, the PM contained in the exhaust gas flowing through the gas flow path 27 is oxidized (combusted) and removed by the generation of plasma.

  Next, a method for manufacturing the plasma reactor 1 will be described.

  First, the 1st-3rd ceramic green sheet used as the dielectric material 33 is formed using the ceramic material which has an alumina powder as a main component. In addition, as a formation method of a ceramic green sheet, well-known shaping | molding methods, such as tape shaping | molding and extrusion molding, can be used. Then, laser processing is performed on each ceramic green sheet to form a through hole for the through-hole conductor 41. The through hole may be formed by punching, drilling, or the like.

  Next, using a conventionally known paste printing apparatus (not shown), the through hole for the through-hole conductor 41 is filled with a conductive paste (in this embodiment, a tungsten paste) to form the through-hole conductor 41. Through-hole conductors are formed.

  Next, the first ceramic green sheet is placed on a support base (not shown). Furthermore, a conductive paste is printed on the back surface of the first ceramic green sheet using a paste printing apparatus. As a result, an unsintered electrode having a thickness of 10 μm to be the discharge electrode 34 is formed on the back surface of the first ceramic green sheet. In addition, as a printing method of the unsintered electrode with respect to the 1st ceramic green sheet, well-known printing methods, such as screen printing, can be used.

  Then, after the conductive paste is dried, the second ceramic green sheet and the third ceramic green sheet are sequentially laminated on the back surface of the first ceramic green sheet on which the unfired electrodes are printed, in the sheet lamination direction. Apply pressing force. As a result, the ceramic green sheets are integrated to form a ceramic laminate. Further, using a paste printing device, a conductive paste is printed on the main surface of the first ceramic green sheet to form the unfired first pad 42 and conductive on the back surface of the third ceramic green sheet. The non-sintered second pad 43 is formed by printing the conductive paste. The third ceramic green sheet is laminated after being subjected to a punching process that matches the shape of the recess 35.

  Moreover, the 4th ceramic green sheet used as the outer layer panel 50 is formed using the method similar to the method of forming the 1st-3rd ceramic green sheet. Then, laser processing is performed on the fourth ceramic green sheet to form a through hole for a through hole conductor. Next, using a paste printing apparatus, the through-hole for the through-hole conductor is filled with a conductive paste to form an unfired through-hole conductor portion that becomes the through-hole conductor.

  Next, a fourth ceramic green sheet is placed on the support base. Further, using a paste printing apparatus, the conductive paste is printed on the main surface of the fourth ceramic green sheet to form the unfired first pad, and the conductive material is formed on the back surface of the fourth ceramic green sheet. The paste is printed to form an unfired second pad.

  Next, after performing a drying process or a degreasing process according to a known technique, the ceramic green sheet and the unfired electrode are heated to a predetermined temperature (for example, about 1400 ° C. to 1600 ° C.) at which alumina and tungsten can be sintered. Simultaneous firing is performed. As a result, alumina in the first to third ceramic green sheets and tungsten in the conductive paste are simultaneously sintered, and the dielectric 33, the discharge electrode 34, the through-hole conductor 41, the first pad 42, and the second The pad 43 is formed by simultaneous firing, and the first to third ceramic green sheets become the electrode panel 30. In addition, alumina in the fourth ceramic green sheet and tungsten in the conductive paste are simultaneously sintered, and the dielectric 53, the through-hole conductor, the first pad, and the second pad are formed by simultaneous firing. The ceramic green sheet becomes the outer panel 50.

  Thereafter, a lamination process is performed, and a plurality of the obtained panels 30 and 50 are laminated to form the plasma panel laminate 20. Next, the clamps 61 and 62 are used to sandwich and fix the plurality of electrode panels 30 and the pair of outer layer panels 50 in the stacking direction. At this time, the pair of pressing plates 64 constituting the clamps 61 and 62 are pressed against the first pad formed on the outer layer panel 50 on the upper layer side and the second pad formed on the outer layer panel 50 on the lower layer side. Further, by performing welding or the like, the central shaft 73 of the power supply terminal 71 is electrically connected to the central portion of the plate member 63 constituting the first clamp 61 and the plate member 63 constituting the second clamp 62 is electrically connected. The central shaft 73 of the power supply terminal 72 is electrically connected to the central portion. Next, the upstream seal portion 81 is attached so as to cover the upstream end portion of the plasma panel laminate 20, and the downstream seal portion 82 is attached so as to cover the downstream end portion of the plasma panel laminate 20. Furthermore, the case 10 is attached so as to cover the outer surface of the upstream seal portion 81 and the outer surface of the downstream seal portion 82. Thereafter, the first wiring 6 is connected to the distal end portion of the power supply terminal 71, and the second wiring 7 is connected to the distal end portion of the power supply terminal 72. The plasma reactor 1 is completed through the above processes.

  Therefore, according to the present embodiment, the following effects can be obtained.

  (1) Since the plasma reactor 1 of this embodiment is mounted and used in an automobile, water may flow in. However, since the sealing member 80 interposed between the case 10 and the plasma panel laminate 20 is made of ceramic fibers with excellent water absorption, the entire sealing member 80 becomes water-containing even with a small amount of water. . As a result, the plasma panel laminate 20 and the case 10 that should be insulated are electrically connected to each other through the seal member 80, and thus there is a possibility that a leak current is generated.

  Therefore, in the present embodiment, the seal member 80 is configured by an upstream seal portion 81 and a downstream seal portion 82 that are disposed with a gap S1 therebetween. Therefore, when water flows into the plasma reactor 1 from the upstream side, the water that has flowed in is first absorbed by the upstream seal portion 81, so that the arrival of water at the downstream seal portion 82 is suppressed. Further, when water flows into the plasma reactor 1 from the downstream side, the water that has flowed in is first absorbed by the downstream seal portion 82, so that the arrival of water at the upstream seal portion 81 is suppressed. As a result, since the water is prevented from spreading over the entire seal member 80, the contact area between the case 10 and the region of the seal member 80 that is water-containing and easily conducted is reduced. Accordingly, the amount of leakage current flowing from the plasma panel laminate 20 to the case 10 via the seal member 80 can be reduced, and the decrease in the capacitance between the plasma panel laminate 20 and the case 10 can be suppressed. it can. Therefore, since the amount of plasma generated with respect to the input power can be secured, PM can be efficiently removed when the PM in the exhaust gas flowing between the adjacent electrode panels 30 is oxidized and removed using plasma.

  (2) By the way, as water flowing into the plasma reactor 1, exhaust water condensed due to condensation in the exhaust pipe 2 at the time of cold start of the vehicle, or from the muffler as the vehicle enters the puddle There is water to do. The exhaust condensed water flows into the plasma reactor 1 from the upstream side, while the water flowing from the muffler flows into the plasma reactor 1 from the downstream side. The inflow of water from the downstream side can be prevented by devising the shape of the muffler. However, it is difficult to avoid the inflow of water (exhaust condensed water) from the upstream side.

  Therefore, in the present embodiment, the volume of the upstream seal portion 81 is made smaller than the volume of the downstream seal portion 82, and the contact area between the upstream seal portion 81 and the case 10 is reduced between the downstream seal portion 82 and the case 10. It is smaller than the contact area. In this case, the exhaust condensate flows into the plasma reactor 1 from the upstream side and is absorbed by the upstream seal portion 81 having a small contact area with the case 10, so that water is easily contained and conducted in the seal member 80. The contact area between the region and the case 10 is more reliably reduced. As a result, the amount of leakage current flowing from the plasma panel laminate 20 to the case 10 via the seal member 80 is further reduced. Therefore, it is possible to secure a sufficient amount of plasma generated with respect to the input power.

  (3) In the present embodiment, the pair of outer layer panels 50 constituting the plasma panel laminate 20 do not have a recess that becomes a flow path (gas flow path) of exhaust gas, and has a discharge electrode. There is no panel. As a result, since the distance between the holding plate 64 of the clamps 61 and 62 and the discharge electrode is increased, unnecessary plasma (in a place different from the gas flow path 27 (that is, the space where the discharge electrode 34 faces)) ( It is possible to suppress the occurrence of defects and plasma that causes deterioration of members.

  (4) The plasma reactor 1 of this embodiment is attached to the exhaust pipe 2 via the first cone portion 11 and the second cone portion 12. As a result, the resistance in the exhaust gas flow path in which the exhaust gas flows in the order of the upstream portion 4 of the exhaust pipe 2 → the first cone portion 11 → the plasma reactor 1 → the second cone portion 12 → the downstream portion 5 of the exhaust pipe 2 is reduced. Therefore, the pressure loss in the exhaust gas passage can be suppressed. As a result, it is possible to prevent the engine output from decreasing due to pressure loss.

  In addition, you may change the said embodiment as follows.

  In the sealing member 80 of the above embodiment, the volume of the upstream seal portion 81 is smaller than the volume of the downstream seal portion 82. However, when there is little generation of exhaust condensate and there is a high possibility that reverse flow of water from the muffler occurs, for example, when the plasma reactor is used in a tropical region, the volume of the downstream seal portion 82 is set to the upstream seal portion. The volume may be smaller than 81.

  In the above embodiment, the length of the upstream seal portion 81 is shorter than the length L2 of the downstream seal portion 82 so that the volume of the upstream seal portion 81 is smaller than the volume of the downstream seal portion 82. Was. However, as shown in FIG. 9, by forming the upstream seal portion 91 thinner than the downstream seal portion 92, the volume of the upstream seal portion 91 can be made smaller than the volume of the downstream seal portion 92. Good. Further, the length of the upstream seal portion along the exhaust gas passage direction is made shorter than the length of the downstream seal portion along the exhaust gas passage direction, and the upstream seal portion is formed thinner than the downstream seal portion. By doing so, you may make the volume of an upstream seal part smaller than the volume of a downstream seal part.

  In the seal member 80 of the above embodiment, the volume of the upstream seal portion 81 is smaller than the volume of the downstream seal portion 82. However, as shown in FIG. 10, the porosity of the upstream side seal portion 104 is set to the downstream side in the stack holding state where the plasma panel stack 101 is held in the case 102, that is, in the state where the seal member 103 is compressed. You may make it larger than the porosity of the side seal part 105. FIG. In this case, the volume of the upstream seal portion 104 and the volume of the downstream seal portion 105 are equal to each other. Further, in the stacked body holding state, the porosity of the downstream seal portion 105 may be larger than the porosity of the upstream seal portion 104. Note that if the porosity of the upstream seal portion 104 and the porosity of the downstream seal portion 105 are different, the amount of water that can be absorbed by the upstream seal portion 104 and the downstream seal portion 105 can be adjusted. However, if the porosity is increased too much, the water absorption amount of the seal member 103 increases, but the holding power of the plasma panel laminate 101 by the seal member 103 may be reduced.

  Furthermore, in the stacked body holding state, the compression rate of the upstream side seal portion 104 may be smaller than the compression rate of the downstream side seal portion 105. Even in this case, the volume of the upstream seal portion 104 and the volume of the downstream seal portion 105 are equal to each other (see FIG. 10). Here, as a method of making the compression rate of the upstream side seal portion 104 smaller than the compression rate of the downstream side seal portion 105, the upstream side in the laminate non-holding state where the plasma panel laminate 101 is not held by the case 102. For example, the plasma panel laminate 101 in which the thickness of the seal portion 104 is smaller than the thickness of the downstream seal portion 105 is accommodated in a case similar to the case 102 shown in FIG. Further, as another method for making the compression rate of the upstream seal portion 104 smaller than the compression rate of the downstream seal portion 105, the inner surface of the case 112 and the outside of the plasma panel laminate 113 in the arrangement region of the upstream seal portion 111 are used. For example, the distance D1 from the surface may be made larger than the distance D2 between the inner surface of the case 112 and the outer surface of the plasma panel laminate 113 in the arrangement region of the downstream side seal portion 114 (see FIG. 11). In this case, the thickness of the upstream seal portion 111 and the thickness of the downstream seal portion 114 are equal to each other in the stacked body non-holding state. Note that in the stacked body holding state, the compression rate of the downstream seal portion 114 may be smaller than the compression rate of the upstream seal portion 111.

  As shown in FIG. 12, the seal member 120 may be configured by a plurality (two in this case) of the upstream seal portion 121 and one downstream seal portion 122. In this way, it is possible to more reliably prevent water from being transmitted to the upstream end surface 123 side (or the downstream end surface 124 side). The seal member 120 may be composed of one upstream seal portion and a plurality of downstream seal portions, or may be composed of a plurality of upstream seal portions and a plurality of downstream seal portions. May be.

  In the above embodiment, the first clamp 61 (and the power supply terminal 71) is disposed on the gas non-passing surface 24 side of the plasma panel laminate 20, and the second clamp is provided on the gas non-passing surface 26 side of the plasma panel laminate 20. 62 (and power supply terminal 72) were arranged. However, as shown in FIG. 13, a pair of power supply terminals 133 may be arranged on one side (here, the gas non-passing surface 132 side) of the plasma panel laminate 131. In this way, the holding area of the seal member 134 (here, the downstream seal portion 135) can be increased.

  As shown in FIG. 14, the seal member 140 includes at least a part of the upstream seal portion 141 and the downstream seal portion 142 (here, the uppermost electrode panel, specifically, the upper outer panel 143). It may be configured to include a connecting portion 144 that connects a portion covering the same. The connecting portion 144 may connect the upstream side seal portion 141 and the downstream side seal portion 142 at a portion covering the lower layer outer layer panel 143, or the side surface (gas non-passing surface 146) of the plasma panel laminate 145. , 147), the upstream seal portion 141 and the downstream seal portion 142 may be connected.

  As shown in FIG. 15, the first cutout portion 154 that penetrates the downstream seal portion 151 in the thickness direction and exposes the gas non-passing surface 153 side of the plasma panel laminate 152 in the downstream seal portion 151. In addition, a second notch portion 156 that penetrates the downstream seal portion 151 in the thickness direction and exposes the gas non-passing surface 155 side of the plasma panel laminate 152 may be disposed. The first clamp 157 (electric conduction member) is positioned in the inner region of the first notch 154 and the second clamp 158 (electric conduction member) is positioned in the inner region of the second notch 156. Good. Note that the notches 154 and 156 may be disposed in the upstream seal portion 159.

  As shown in FIG. 16, the downstream seal portion 161 penetrates the downstream seal portion 161 in the thickness direction, and opens in a direction orthogonal to the exhaust gas passage direction F <b> 1. A notch 164 that exposes the gas non-passing surface 163 side may be disposed, and a pair of clamps 165 (electrically conductive members) may be positioned in an inner region of the notch 164. In this way, even if the water absorbed by the upstream seal portion 166 oozes out, the leached water does not reach the notch 164 directly, so that the water adheres to the clamp 165. Can be reliably prevented. Note that the notch 164 may be disposed in the upstream seal portion 166.

  In the above embodiment, the seal member may be a non-divided structure. For example, as shown in FIG. 17, the pores in the upstream portion 172 of the seal member 170 located at the upstream end of the plasma panel laminate 171 in the laminate holding state, that is, in the state where the seal member 170 is compressed. The rate may be larger than the porosity of the downstream portion 173 of the seal member 170 located at the downstream end of the plasma panel laminate 171. Further, in the stacked body holding state, the porosity of the downstream portion 173 may be larger than the porosity of the upstream portion 172. In addition, if the porosity of the upstream region 172 and the porosity of the downstream region 173 are different, the amount of water that can be absorbed by the upstream region 172 and the downstream region 173 can be adjusted.

  Furthermore, in the stacked body holding state, the compression rate of the upstream side portion 172 may be smaller than the compression rate of the downstream side portion 173. Here, as a method of making the compression rate of the upstream site 172 smaller than the compression rate of the downstream site 173, the thickness of the upstream site 172 is smaller than the thickness of the downstream site 173 in the stacked body non-holding state. For example, the plasma panel laminate 171 may be housed in a case similar to the case 174 shown in FIG. As another method for reducing the compression rate of the upstream portion 172 than the compression rate of the downstream portion 173, the inner surface of the case 182 and the outer surface of the plasma panel laminate 183 in the arrangement region of the upstream portion 181 are used. For example, the distance D3 may be larger than the distance D4 between the inner surface of the case 182 and the outer surface of the plasma panel laminate 183 in the arrangement region of the downstream portion 184 (see FIG. 18). In this case, the thickness of the upstream part 181 and the thickness of the downstream part 184 are equal to each other in the stacked body non-holding state. Note that in the stacked body holding state, the compression rate of the downstream portion 184 may be smaller than the compression rate of the upstream portion 181.

  As shown in FIG. 19, the seal member 190 may have a wall portion 193 extending in a direction intersecting with the exhaust gas passage direction F <b> 3 between the upstream side portion 191 and the downstream side portion 192. As shown in FIG. 20, the seal member 200 may have a slit 203 extending in a direction intersecting the exhaust gas passage direction F <b> 4 between the upstream portion 201 and the downstream portion 202.

  -The electrode panel 30 of the said embodiment was comprised by incorporating the discharge electrode 34 in the dielectric material 33. FIG. However, the electrode panel may be formed by forming the discharge electrode 34 on the surface of the dielectric 33.

  -Although the plasma reactor 1 of the said embodiment was used for exhaust gas purification of the engine of a motor vehicle, you may use it for exhaust gas purification of engines, such as a ship, for example. Moreover, the plasma reactor 1 should just perform a plasma process, and does not need to perform the process of waste gas, and does not need to be used for purification | cleaning.

  Next, in addition to the technical ideas described in the claims, the technical ideas grasped by the embodiment described above are listed below.

  (1) The plasma reactor according to any one of the means 1 to 3, wherein the plasma panel laminate has a substantially rectangular parallelepiped shape.

  (2) In any one of the above means 1 to 3, the electrode panel has a first main surface and a second main surface, and the electrode panel includes the first main surface side and the second main surface. A plasma reactor characterized in that a conduction structure is provided for conducting the main surface.

  (3) In the technical idea (2), the conductive structure is formed in the first main surface and the through hole conductor that penetrates the first main surface and the second main surface, and the through hole conductor includes the through hole conductor. A first pad electrically connected to the first main surface side end portion and a second pad formed on the second main surface and electrically connected to the second main surface side end portion of the through-hole conductor. A plasma reactor comprising a pad.

  (4) It has a structure in which a plurality of electrode panels each having a discharge electrode are stacked, and a voltage is applied between the adjacent electrode panels. A plasma panel laminate that sometimes generates plasma, a cylindrical case in which the plasma panel laminate is accommodated, and the plasma panel laminate that is interposed between the case and the plasma panel laminate, A plasma reactor comprising a mat-like sealing member to be held, and in a laminated body holding state, a porosity of an upstream portion of the sealing member located at an upstream end of the plasma panel laminated body, and the plasma panel A plasma reactor characterized in that the porosity of the downstream portion of the seal member located at the downstream end of the laminate is different from each other.

  (5) It has an upstream end face into which gas flows in and a downstream end face from which gas flows out, and has a structure in which a plurality of electrode panels having discharge electrodes are stacked, and a voltage is applied between the adjacent electrode panels. A plasma panel laminate that sometimes generates plasma, a cylindrical case in which the plasma panel laminate is accommodated, and the plasma panel laminate that is interposed between the case and the plasma panel laminate, A plasma reactor comprising a mat-like sealing member to be held, and in a laminated body holding state, a compressibility of an upstream portion of the sealing member located at an upstream end of the plasma panel laminated body, and the plasma panel A plasma reactor characterized in that the compressibility of the downstream portion of the seal member located at the downstream end of the laminate is different from each other.

  (6) The plasma reactor according to the technical idea (5), wherein the thickness of the upstream portion of the seal member and the thickness of the downstream portion of the seal member are different from each other in the non-holding state of the laminate.

  (7) In the technical idea (5), the distance between the inner surface of the case and the outer surface of the plasma panel laminate in the arrangement region of the upstream portion of the seal member, and the downstream portion of the seal member The plasma reactor characterized in that the distance between the inner surface of the case and the outer surface of the plasma panel laminate in the arrangement region is different.

  (8) It has a structure in which a plurality of electrode panels having discharge electrodes are stacked, and a voltage is applied between adjacent electrode panels, having an upstream end face into which gas flows and a downstream end face from which gas flows out. A plasma panel laminate that sometimes generates plasma, a cylindrical case in which the plasma panel laminate is accommodated, and the plasma panel laminate that is interposed between the case and the plasma panel laminate, A plasma reactor including a mat-shaped sealing member to be held, wherein the sealing member is provided at an upstream portion located at an upstream end of the plasma panel laminate and a downstream end of the plasma panel laminate. A wall portion extending in a direction intersecting with a passage direction of a gas flowing from the upstream end face side to the downstream end face side between the upstream end face side. Plasma reactor to be.

  (9) It has a structure in which a plurality of electrode panels each having a discharge electrode are stacked, and a voltage is applied between adjacent electrode panels, having an upstream end surface into which gas flows and a downstream end surface from which gas flows out. A plasma panel laminate that sometimes generates plasma, a cylindrical case in which the plasma panel laminate is accommodated, and the plasma panel laminate that is interposed between the case and the plasma panel laminate, A plasma reactor including a mat-shaped sealing member to be held, wherein the sealing member is provided at an upstream portion located at an upstream end of the plasma panel laminate and a downstream end of the plasma panel laminate. Between the downstream part located, it has a slit extended in the direction which cross | intersects the passage direction of the gas which flows from the said upstream end surface side to the said downstream end surface side. Plasma reactor which is characterized.

  (10) In any one of the technical ideas (4) to (9), an electrical conduction member electrically connected to the discharge electrode is provided, and the electrical conduction member is surrounded by the seal member. A plasma reactor characterized by.

  (11) The plasma reactor according to the technical idea (10), wherein the electrically conductive member is spaced apart from the seal member by 2 mm or more and 30 mm or less.

  (12) A sealing member used in the plasma reactor according to any one of technical ideas (4) to (11).

DESCRIPTION OF SYMBOLS 1 ... Plasma reactor 10,102,112 ... Case 20,101,113,131,145,152,162 ... Plasma panel laminated body 21,123 ... Upstream side end surface 22,124 ... Downstream side end surface 30 ... Electrode panel 34 ... Discharge Electrodes 61, 157... First clamps 62, 158 as electrical conducting members. Second clamps 165 as electrical conducting members. Clamps 80, 103, 120, 134, 140 as electrical conducting members. Seal members 81, 91, 104. , 111, 121, 141, 159, 166... Upstream seal portions 82, 92, 105, 114, 122, 135, 142, 151, 161... Downstream seal portion 144... Connection portion 154. Part 156: Second notch part 164 as notch part ... Notch part D1 ... Case in the arrangement region of the upstream seal part The distance D2 between the inner surface of the plasma panel and the outer surface of the plasma panel laminate. The distance F1 between the inner surface of the case and the outer surface of the plasma panel laminate in the arrangement region of the downstream seal portion. The length L2 of the upstream seal portion along the length L1 of the downstream seal portion along the gas passing direction S1 ... the gap T1 ... the thickness T2 of the upstream seal portion ... the thickness of the downstream seal portion

Claims (16)

It has a structure in which a plurality of electrode panels having discharge electrodes are stacked, and has an upstream end face into which gas flows and a downstream end face from which gas flows out, and plasma is applied when a voltage is applied between the adjacent electrode panels. A plasma panel laminate that generates
A cylindrical case in which the plasma panel laminate is accommodated;
A plasma reactor comprising a mat-shaped sealing member interposed between the case and the plasma panel laminate, and holding the plasma panel laminate in the case;
The seal member includes an upstream seal portion and a downstream seal portion that are arranged along a passage direction of a gas flowing from the upstream end face side to the downstream end face side and that are arranged with a gap therebetween. Consists of
The plasma reactor characterized in that a volume of the upstream seal portion and a volume of the downstream seal portion are different from each other. The upstream seal portion is disposed at the upstream end portion of the plasma panel laminate, and the downstream seal portion is disposed at the downstream end portion of the plasma panel laminate,
The plasma reactor according to claim 1, wherein the volume of the upstream seal portion is smaller than the volume of the downstream seal portion.   The plasma reactor according to claim 2, wherein the upstream seal portion is formed thinner than the downstream seal portion.   The length of the upstream seal portion along the gas passage direction is shorter than the length of the downstream seal portion along the gas passage direction. The described plasma reactor. It has a structure in which a plurality of electrode panels having discharge electrodes are stacked, and has an upstream end face into which gas flows and a downstream end face from which gas flows out, and plasma is applied when a voltage is applied between the adjacent electrode panels. A plasma panel laminate that generates
A cylindrical case in which the plasma panel laminate is accommodated;
A plasma reactor comprising a mat-shaped sealing member interposed between the case and the plasma panel laminate, and holding the plasma panel laminate in the case;
The seal member includes an upstream seal portion and a downstream seal portion that are arranged along a passage direction of a gas flowing from the upstream end face side to the downstream end face side and that are arranged with a gap therebetween. Consists of
The plasma reactor according to claim 1, wherein the porosity of the upstream seal portion and the porosity of the downstream seal portion are different from each other in the laminated body holding state. The upstream seal portion is disposed at the upstream end portion of the plasma panel laminate, and the downstream seal portion is disposed at the downstream end portion of the plasma panel laminate,
6. The plasma reactor according to claim 5, wherein a porosity of the upstream seal portion is larger than a porosity of the downstream seal portion in the stacked body holding state. It has a structure in which a plurality of electrode panels having discharge electrodes are stacked, and has an upstream end face into which gas flows and a downstream end face from which gas flows out, and plasma is applied when a voltage is applied between the adjacent electrode panels. A plasma panel laminate that generates
A cylindrical case in which the plasma panel laminate is accommodated;
A plasma reactor comprising a mat-shaped sealing member interposed between the case and the plasma panel laminate, and holding the plasma panel laminate in the case;
The seal member includes an upstream seal portion and a downstream seal portion that are arranged along a passage direction of a gas flowing from the upstream end face side to the downstream end face side and that are arranged with a gap therebetween. Consists of
A plasma reactor, wherein a compression rate of the upstream-side seal portion and a compression rate of the downstream-side seal portion are different from each other in the laminated body holding state. The upstream seal portion is disposed at the upstream end portion of the plasma panel laminate, and the downstream seal portion is disposed at the downstream end portion of the plasma panel laminate,
8. The plasma reactor according to claim 7, wherein in the stacked body holding state, the compression rate of the upstream seal portion is smaller than the compression rate of the downstream seal portion.   9. The plasma reactor according to claim 8, wherein the thickness of the upstream seal portion is smaller than the thickness of the downstream seal portion in a stacked body non-holding state.   The distance between the inner surface of the case and the outer surface of the plasma panel laminate in the arrangement region of the upstream seal portion is such that the inner surface of the case and the outer surface of the plasma panel laminate in the arrangement region of the downstream seal portion. The plasma reactor according to claim 8, wherein the plasma reactor is larger than the distance.   The said sealing member is comprised including the connection part which connects at least one part of the said upstream seal part and the said downstream seal part, The Claim 1 characterized by the above-mentioned. Plasma reactor.   The said connection part has connected the said upstream seal | sticker part and the said downstream seal | sticker part in the site | part which covers the said electrode panel of the uppermost layer which comprises the said plasma panel laminated body. Plasma reactor. Comprising an electrically conductive member electrically connected to the discharge electrode;
The upstream seal portion or the downstream seal portion is provided with a notch passing through the seal portion in the thickness direction, and the electrically conductive member is located in an inner region of the notch. The plasma reactor according to any one of claims 1 to 12.   The cutout portion that penetrates the downstream seal portion in the thickness direction is disposed in the downstream seal portion, and the electrically conductive member is located in an inner region of the cutout portion. The described plasma reactor.   The plasma reactor according to claim 13 or 14, wherein the electrical conduction member is disposed apart from the upstream seal portion and the downstream seal portion by 2 mm or more and 30 mm or less.   The plasma reactor according to any one of claims 1 to 15, wherein the upstream seal portion and the downstream seal portion are spaced apart from each other by 3 mm or more and 50 mm or less.

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