WO2017056739A1 - レーザ加工方法 - Google Patents
レーザ加工方法 Download PDFInfo
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- WO2017056739A1 WO2017056739A1 PCT/JP2016/073355 JP2016073355W WO2017056739A1 WO 2017056739 A1 WO2017056739 A1 WO 2017056739A1 JP 2016073355 W JP2016073355 W JP 2016073355W WO 2017056739 A1 WO2017056739 A1 WO 2017056739A1
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- modified region
- silicon substrate
- cutting line
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- 238000003672 processing method Methods 0.000 title claims description 34
- 239000000758 substrate Substances 0.000 claims abstract description 203
- 238000005520 cutting process Methods 0.000 claims abstract description 152
- 239000004065 semiconductor Substances 0.000 claims abstract description 55
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 151
- 229910052710 silicon Inorganic materials 0.000 claims description 151
- 239000010703 silicon Substances 0.000 claims description 151
- 230000015572 biosynthetic process Effects 0.000 description 22
- 238000000034 method Methods 0.000 description 20
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 9
- 238000005498 polishing Methods 0.000 description 9
- 239000013078 crystal Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012795 verification Methods 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000009499 grossing Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- -1 LiTaO 3 Chemical compound 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000010128 melt processing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/562—Protection against mechanical damage
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
- H01L2221/68336—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding involving stretching of the auxiliary support post dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
- H01L2221/68386—Separation by peeling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
- H01L2223/5446—Located in scribe lines
Definitions
- the semiconductor substrate may be a silicon substrate, and the laser beam may have a wavelength greater than 1064 nm.
- the thickness of the silicon substrate from the first modified region and the second modified region is increased with the formation of the first modified region and the second modified region, as compared with the case where laser light having a wavelength of 1064 nm or less is used.
- the crack can be greatly extended in the direction.
- FIG. 17B is a view showing a photograph of the surface side of the silicon substrate after cutting when the offset amount is 4 ⁇ m.
- FIG. 17C is a view showing a photograph of the surface side of the silicon substrate after cutting when the offset amount is 6 ⁇ m.
- FIG. 18A is a diagram showing a surface perpendicular to the planned cutting line of the silicon substrate when the offset amount is small.
- FIG. 18B is a diagram showing a surface perpendicular to the planned cutting line of the silicon substrate when the offset amount is large.
- FIG. 19 is a cross-sectional view for explaining a method of manufacturing a semiconductor chip using the laser processing method of the embodiment.
- FIG. 20 is a cross-sectional view for explaining a semiconductor chip manufacturing method using the laser processing method of the embodiment.
- a plate-like member for example, a substrate, a wafer, or the like
- a scheduled cutting line 5 for cutting the workpiece 1 is set in the workpiece 1.
- the planned cutting line 5 is a virtual line extending linearly.
- the laser beam L is cut in a state where the condensing point (condensing position) P is aligned with the inside of the workpiece 1 as shown in FIG. 3. It moves relatively along the planned line 5 (that is, in the direction of arrow A in FIG. 2).
- the modified region 7 is formed on the workpiece 1 along the planned cutting line 5, and the modified region formed along the planned cutting line 5. 7 becomes the cutting start region 8.
- the condensing point P is a portion where the laser light L is condensed.
- the planned cutting line 5 is not limited to a straight line, but may be a curved line, a three-dimensional shape in which these lines are combined, or a coordinate designated.
- the planned cutting line 5 is not limited to a virtual line but may be a line actually drawn on the surface 3 of the workpiece 1.
- the modified region 7 may be formed continuously or intermittently.
- the modified region 7 may be in the form of a line or a dot. In short, the modified region 7 only needs to be formed at least inside the workpiece 1.
- a crack may be formed starting from the modified region 7, and the crack and the modified region 7 may be exposed on the outer surface (front surface 3, back surface, or outer peripheral surface) of the workpiece 1. .
- the laser light incident surface when forming the modified region 7 is not limited to the front surface 3 of the workpiece 1 and may be the back surface of the workpiece 1.
- FIG. 12 is a view showing a photograph of the silicon substrate 10 when the condensing point P of the laser beam L1 is not offset when forming the second modified region 7b.
- FIG. 12A is a diagram showing a photograph of a plane parallel to the planned cutting line of the silicon substrate 10 after the first modified region 7a and the second modified region 7b are formed.
- FIG. 12B is a view showing a photograph of a plane perpendicular to the planned cutting line of the silicon substrate 10 after the first modified region 7a and the second modified region 7b are formed. Referring to (b) of FIG.
- the number of the splashes S generated in the regions separated by 20 ⁇ m or more on both sides from the scheduled cutting line 5 is counted particularly because the characteristics of the functional elements formed on the surface 10 a of the silicon substrate 10 are such splashes S. This is because it causes a problem of deterioration. Dicing streets (regions between adjacent functional elements) are often provided in regions within 20 ⁇ m on both sides of the planned cutting line 5, so that the splash S generated in the region causes a problem of deteriorating the characteristics of the functional devices. Unlikely.
- the movement of the first condensing point P1 and the second condensing point P2 of the laser light L with respect to the scheduled cutting line 5 may be realized by the operation on the condensing lens 105 side, It may be realized by both operations on the optical lens 105 side.
- the first modified region 7a and the second modified region 7b are accompanied by the formation of the first modified region 7a and the second modified region 7b.
- the crack F can be further extended in the thickness direction of the silicon substrate 10.
- the laser beam L1 having a wavelength of 1342 ⁇ m can extend the crack F more greatly.
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- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
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Abstract
Description
Claims (7)
- 表面に複数の機能素子が形成された半導体基板を含む加工対象物に、前記半導体基板の裏面をレーザ光入射面としてレーザ光を集光させて、前記半導体基板の前記表面と前記レーザ光の第1集光点との距離を第1距離に維持しつつ、隣り合う前記機能素子の間を通るように設定された切断予定ラインに沿って前記レーザ光の前記第1集光点を移動させることで、前記切断予定ラインに沿って第1改質領域を形成する第1工程と、
前記第1工程の後に、前記加工対象物に、前記半導体基板の前記裏面をレーザ光入射面として前記レーザ光を集光させて、前記半導体基板の前記表面と前記レーザ光の第2集光点との距離を前記第1距離よりも大きい第2距離に維持しつつ、且つ、前記レーザ光の前記第1集光点を合わせた位置に対して、前記半導体基板の厚さ方向及び前記切断予定ラインの延在方向の両方向に垂直な方向に前記レーザ光の前記第2集光点をオフセットさせつつ、前記切断予定ラインに沿って前記レーザ光の前記第2集光点を移動させることで、前記切断予定ラインに沿って第2改質領域を形成する第2工程と、
前記第2工程の後に、前記半導体基板において前記裏面及び少なくとも前記第2改質領域を含む所定部分を除去する第3工程と、を備える、レーザ加工方法。 - 前記第3工程では、前記半導体基板において前記第1改質領域をさらに含む前記所定部分を除去する、請求項1に記載のレーザ加工方法。
- 前記半導体基板は、シリコン基板であり、
前記レーザ光は、1064nmよりも大きい波長を有する、請求項1又は2に記載のレーザ加工方法。 - 前記レーザ光は、1099μm以上1342μm以下の波長を有する、請求項3に記載のレーザ加工方法。
- 前記レーザ光の前記第1集光点を合わせた位置に対して、前記シリコン基板の前記厚さ方向及び前記切断予定ラインの前記延在方向の両方向に垂直な前記方向に前記レーザ光の前記第2集光点をオフセットさせる距離は、24μm以下である、請求項3又は4に記載のレーザ加工方法。
- 前記レーザ光の前記第1集光点を合わせた位置に対して、前記シリコン基板の前記厚さ方向及び前記切断予定ラインの前記延在方向の両方向に垂直な前記方向に前記レーザ光の前記第2集光点をオフセットさせる前記距離は、4μm以上18μm以下である、請求項5に記載のレーザ加工方法。
- 前記第2工程では、前記第2改質領域を形成することにより、前記第1改質領域及び前記第2改質領域から前記半導体基板の厚さ方向に伸展した亀裂を前記半導体基板の表面に到達させ、
前記第3工程では、前記所定部分を除去することにより、前記所定部分が除去された前記半導体基板の前記裏面に、前記第2工程において前記第1改質領域及び前記第2改質領域から前記半導体基板の厚さ方向に伸展した亀裂を到達させる、請求項1~6の何れか一項に記載のレーザ加工方法。
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Application Number | Priority Date | Filing Date | Title |
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US15/763,605 US10290545B2 (en) | 2015-09-29 | 2016-08-08 | Laser processing method |
DE112016004419.4T DE112016004419T5 (de) | 2015-09-29 | 2016-08-08 | Laserbearbeitungsverfahren |
CN201680056475.XA CN108028189B (zh) | 2015-09-29 | 2016-08-08 | 激光加工方法 |
KR1020187011383A KR102566316B1 (ko) | 2015-09-29 | 2016-08-08 | 레이저 가공 방법 |
US16/388,209 US10755980B2 (en) | 2015-09-29 | 2019-04-18 | Laser processing method |
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JP2015191095A JP6605278B2 (ja) | 2015-09-29 | 2015-09-29 | レーザ加工方法 |
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US15/763,605 A-371-Of-International US10290545B2 (en) | 2015-09-29 | 2016-08-08 | Laser processing method |
US16/388,209 Continuation US10755980B2 (en) | 2015-09-29 | 2019-04-18 | Laser processing method |
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JP6605278B2 (ja) * | 2015-09-29 | 2019-11-13 | 浜松ホトニクス株式会社 | レーザ加工方法 |
JP7190631B2 (ja) * | 2016-07-25 | 2022-12-16 | アンプリテュード システム | マルチビームフェムト秒レーザによって材料を切断する方法及び器具 |
JP6925902B2 (ja) * | 2017-07-28 | 2021-08-25 | 浜松ホトニクス株式会社 | 積層型素子の製造方法 |
JP6896344B2 (ja) * | 2017-09-22 | 2021-06-30 | 株式会社ディスコ | チップの製造方法 |
CN111565881B (zh) * | 2018-03-23 | 2022-06-14 | 普锐特冶金技术日本有限公司 | 激光加工头、激光加工装置以及激光加工头的调整方法 |
CN112955279B (zh) * | 2018-10-30 | 2022-09-30 | 浜松光子学株式会社 | 激光加工装置 |
JP7176695B2 (ja) * | 2019-03-07 | 2022-11-22 | 株式会社Nsc | ガラス基板製造方法 |
EP3913660B1 (en) * | 2020-05-22 | 2024-06-19 | Nichia Corporation | Method of cutting semiconductor element and semiconductor element |
JP2022018505A (ja) * | 2020-07-15 | 2022-01-27 | 浜松ホトニクス株式会社 | レーザ加工方法、及び、半導体部材の製造方法 |
JP2022018506A (ja) * | 2020-07-15 | 2022-01-27 | 浜松ホトニクス株式会社 | 半導体部材の製造方法 |
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US10755980B2 (en) | 2020-08-25 |
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US20190304839A1 (en) | 2019-10-03 |
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CN108028189A (zh) | 2018-05-11 |
JP6605278B2 (ja) | 2019-11-13 |
DE112016004419T5 (de) | 2018-06-07 |
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