WO2017056293A1 - 実装ヘッド、及び表面実装機 - Google Patents
実装ヘッド、及び表面実装機 Download PDFInfo
- Publication number
- WO2017056293A1 WO2017056293A1 PCT/JP2015/077948 JP2015077948W WO2017056293A1 WO 2017056293 A1 WO2017056293 A1 WO 2017056293A1 JP 2015077948 W JP2015077948 W JP 2015077948W WO 2017056293 A1 WO2017056293 A1 WO 2017056293A1
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- WIPO (PCT)
- Prior art keywords
- axis
- shaft
- negative pressure
- positive pressure
- pressure supply
- Prior art date
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
- H05K13/0413—Pick-and-place heads or apparatus, e.g. with jaws with orientation of the component while holding it; Drive mechanisms for gripping tools, e.g. lifting, lowering or turning of gripping tools
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
- H05K13/0408—Incorporating a pick-up tool
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
- H05K13/0408—Incorporating a pick-up tool
- H05K13/0409—Sucking devices
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/046—Surface mounting
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/02—Feeding of components
Definitions
- the technology disclosed in this specification relates to a mounting head and a surface mounting machine.
- a surface mounting machine for mounting electronic components on a printed circuit board has a plurality of suction nozzles that suck and hold the components at the tip by negative pressure and release the components held at the tip by positive pressure.
- Mounting heads are known.
- a mechanical valve structure for switching the pressure supplied to the suction nozzle between a negative pressure and a positive pressure may be provided in the vicinity of the suction nozzle.
- a mounting head as a mounting head having such a mechanical valve structure is disclosed in, for example, Patent Document 1 below.
- the mounting head disclosed in the following Patent Document 1 includes, as a mechanical valve structure, an axial valve spool, and a switching member driving device for moving a valve spool at a specific position in the vertical direction along the axial direction. ,have.
- the pressure supplied to the suction nozzle corresponding to the valve spool is switched between a negative pressure and a positive pressure by moving the valve spool vertically along the axial direction.
- the rising end position of the valve spool is a negative pressure supply position where negative pressure is supplied to the suction nozzle
- the lower end position of the valve spool is a positive pressure supply position where negative pressure is supplied to the suction nozzle.
- the switching member driving device is driven by a rotary motor drive, and the switching member extending from the output shaft comes into contact with a part of the valve spool at a specific position and moves in an arc shape, so that the switching member moves the valve spool.
- the valve spool is moved up and down by being pushed up or down.
- the mounting head is of a rotary type, and when rotated around its axis, the plurality of valve spools and the plurality of suction nozzles are turned, and the valve spool moved in the vertical direction by the switching member driving device is replaced.
- the switching member driving device when the switching member driving device is turned off and the switching member falls, the switching member driving device may move the valve spool from the negative pressure supply position to the positive pressure supply position. For this reason, when a component is adsorbed to the suction nozzle corresponding to the valve spool, positive pressure is supplied to the suction nozzle and the component falls from the suction nozzle, which may impair the reliability of the apparatus.
- the technology disclosed in the present specification has been created in view of the above-described problems, and aims to improve maintenance performance and device reliability.
- the technology disclosed in this specification includes a suction nozzle that sucks and holds a component at its tip by negative pressure and releases the component held at the tip by positive pressure, and has a shaft shape.
- a shaft-like member that switches between a negative pressure and a positive pressure by moving along a direction between a negative pressure and a positive pressure, and a moving end on one side in the axial direction has a negative pressure on the suction nozzle.
- a shaft-shaped member that is a negative pressure supply position that supplies a positive pressure and a moving end on the other side in the axial direction supplies a positive pressure to the suction nozzle, a drive source, and a power from the drive source And a movable portion that moves in the axial direction, and a part of the movable portion abuts on the shaft-shaped member as the shaft moves, so that the shaft-shaped member is moved to the negative pressure.
- the position holding unit holds the movable unit so that it does not interfere with the shaft-like member at the negative pressure supply position or the positive pressure supply position even when the drive source is stopped, such as when the power is stopped. . Therefore, when the mounting head is rotated during maintenance, the movable portion can be prevented from interfering with the shaft-like member at the negative pressure supply position or the positive pressure supply position. As a result, the maintainability of the mounting head can be improved.
- the position holding portion holds the movable portion so as not to interfere with the shaft-like member at the negative pressure supply position or the positive pressure supply position. For this reason, when the mounting head is brought to an emergency stop, such as when the power supply is stopped while the component is sucked to the suction nozzle, the movable member comes into contact with the shaft member, and the position of the shaft member is negative. Switching from the pressure supply position to the positive pressure supply position can be suppressed. Therefore, it can suppress that components fall from an adsorption nozzle. As a result, the reliability of the apparatus can be improved. As described above, with the mounting head described above, it is possible to improve the maintainability and the reliability of the apparatus.
- the movable portion has a pin that comes into contact with the contact portion of the shaft-shaped member, and the position holding portion contacts the shaft-shaped member at the negative pressure supply position.
- the movable portion is held in a position so that the pin is positioned at a position between the portion and the contact portion of the shaft-like member at the positive pressure supply position.
- the pin is held at a position between the contact portion of the shaft-shaped member at the negative pressure supply position and the contact portion of the shaft-shaped member at the positive pressure supply position. Interference can be avoided. In addition, it is preferable to hold
- the position holding unit may be configured by a magnetic spring having a magnetic body and a magnet.
- the position holding portion is constituted by a coil spring or the like
- the magnetic spring can adjust the holding position of the movable part by adjusting the position of a magnetic material such as an iron piece. Therefore, the position of the movable part can be held with high position accuracy, and the deterioration is less than that of the wound spring and the durability is good.
- the driving source has a stator
- the movable part has a movable element
- the movable part is driven by linear motor driving by the stator and the movable element
- the movable element is A plurality of magnets arranged in parallel at equal intervals, and the interval between the magnet of the position holding unit and the magnet of the mover is made larger than the interval of the plurality of magnets of the mover. It may be.
- Another technique disclosed in the present specification includes a component mounting apparatus that includes the mounting head and mounts the component on a substrate, a component supply device that supplies the component to the component mounting apparatus, and the substrate. And a substrate transfer device that transfers the component to the component mounting range of the component mounting device.
- FIG. 4 is a cross-sectional view showing a part of the tip (lower end) of the mounting head, in a state where the valve spool is in a positive pressure supply position.
- Block diagram showing the electrical configuration of the surface mounter Front view showing how the valve spool moves Front view of V-axis drive unit Side view showing the inside of the V-axis drive device
- the surface mounter 1 shown in FIG. 1 includes a base 10, a transport conveyor (an example of a board transport device) 20 for transporting a printed circuit board (an example of a board) B1, and an electronic component (an example of a part) E1 on the printed circuit board B1.
- a component mounting apparatus 30 for mounting and a component supply apparatus 40 for supplying the electronic component E1 to the component mounting apparatus 30 are provided.
- the base 10 has a rectangular shape in plan view and a flat upper surface.
- a backup plate (not shown) for backing up the printed circuit board B1 when the electronic component E1 is mounted on the printed circuit board B1 is provided below the transport conveyor 20 in the base 10.
- the long side direction of the base 10 left-right direction in FIG. 1 and the transport direction of the transport conveyor 20 are defined as the X-axis direction
- the short side direction of the base 10 (vertical direction in FIG. 1) is the Y-axis direction.
- the vertical direction of the base 10 (the vertical direction in FIG. 2) is taken as the Z-axis direction.
- the transport conveyor 20 is disposed at a substantially central position of the base 10 in the Y-axis direction, and transports the printed circuit board B1 along the transport direction (X-axis direction).
- the conveyor 20 includes a pair of conveyor belts 22 that circulate in the conveying direction.
- the printed circuit board B ⁇ b> 1 is set so as to be installed on both conveyor belts 22.
- the printed circuit board B1 is carried from one side (the right side shown in FIG. 1) in the transport direction along the conveyor belt 22 to a work position on the base 10 (a position surrounded by a two-dot chain line in FIG. 1). After stopping and mounting the electronic component E1, it is carried out along the conveyor belt 22 to the other side (left side shown in FIG. 1).
- the parts supply device 40 is a feeder type, and is arranged at four places, two places in the X-axis direction on both sides of the conveyor 20 (upper and lower sides in FIG. 1).
- a plurality of feeders 42 are attached to these component supply devices 40 in a side-by-side arrangement.
- Each feeder 42 includes a reel (not shown) around which a component supply tape (not shown) in which a plurality of electronic components E1 are accommodated, an electric delivery device (not shown) that draws the component supply tape from the reel, and the like.
- the electronic components E1 are supplied one by one from the component supply position provided at the end located on the conveyor side.
- the component mounting apparatus 30 includes a pair of support frames 32 provided above the base 10 and a component supply apparatus 40 described later, a rotary type mounting head 50, and a mounting head driving mechanism that drives the mounting head 50. Is done.
- Each support frame 32 is located on both sides of the base 10 in the X-axis direction, and extends in the Y-axis direction.
- the support frame 32 is provided with an X-axis servo mechanism and a Y-axis servo mechanism that constitute a mounting head drive mechanism.
- the mounting head 50 is movable in the X-axis direction and the Y-axis direction within a certain movable region by the X-axis servo mechanism and the Y-axis servo mechanism.
- the Y-axis servo mechanism has a Y-axis guide rail 33Y, a Y-axis ball screw 34Y into which a ball nut (not shown) is screwed, and a Y-axis servo motor 35Y.
- a head support 36 fixed to a ball nut is attached to each Y-axis guide rail 33Y.
- the Y-axis servomotor 35Y is energized and controlled, the ball nut advances and retreats along the Y-axis ball screw 34Y.
- the head support 36 fixed to the ball nut and a mounting head 50 to be described later are mounted on the Y-axis guide. It moves in the Y-axis direction along the rail 33Y.
- the X-axis servo mechanism has an X-axis guide rail (not shown), an X-axis ball screw 34X in which a ball nut (not shown) is screwed, and an X-axis servo motor 35X.
- a mounting head 50 is movably attached to the X-axis guide rail along the axial direction.
- the X-axis servomotor 35X When the X-axis servomotor 35X is energized, the ball nut advances and retreats along the X-axis ball screw 34X. As a result, the mounting head 50 fixed to the ball nut moves along the X-axis guide rail 33X in the X-axis direction. Move to.
- the mounting head 50 has an arm shape in which a head main body 52 that is a main body is covered with covers 53 and 54, and sucks an electronic component E ⁇ b> 1 supplied by the component supply device 40. Mounted on the printed circuit board B1.
- the mounting head 50 of this embodiment is a rotary type, and a total of 18 nozzle shafts 55 are held by a rotating body 60 so as to be movable in the Z-axis direction (vertical direction) (see FIG. 4).
- the rotating body 60 is provided around the shaft portion 62 at the lower end portion of the mounting head 50 and has a larger diameter than the shaft portion 62. And a shaft holding portion 64 having a substantially cylindrical shape.
- the shaft portion 62 of the rotating body 60 is supported by the head body portion 52 so as to be rotatable around the axis of the shaft portion 62.
- the shaft portion 62 has a double structure, and an N-axis driven gear 62N is provided around the axis of the shaft portion 62 at the upper portion of the inner shaft portion 62, and the shaft is disposed at the upper portion of the outer shaft portion 62.
- An R-axis driven gear 62R is provided around the axis of the portion 62 (see FIG. 4).
- An N-axis drive device for rotationally driving the rotating body 60 is disposed at a substantially central portion in the Z-axis direction of the mounting head 50.
- the N-axis drive device has an N-axis servomotor 35N (see FIG. 7) and an N-axis drive gear (not shown) provided around the output shaft of the N-axis servomotor 35N.
- the N-axis drive gear is meshed with the N-axis driven gear 62N.
- the shaft holding portion 64 of the rotating body 60 has 18 through holes formed at equal intervals in the circumferential direction.
- an axial nozzle shaft 55 is held via a cylindrical shaft holder 57 so as to extend along the Z-axis direction while penetrating the shaft holding portion 64.
- suction nozzles 56 for sucking the electronic component E ⁇ b> 1 are provided at the lower end portion protruding downward from the shaft holding portion 64 as shown in FIGS. 4 and 5.
- each suction nozzle 56 A negative pressure or a positive pressure is supplied to each suction nozzle 56.
- Each suction nozzle 56 sucks and holds the electronic component E1 at its tip by negative pressure, and releases the electronic component E1 held at its tip by positive pressure.
- each suction nozzle 56 provided on each nozzle shaft 55 together with each nozzle shaft 55 is turned around the axis of the rotating body 60.
- an R-axis drive device 70 for rotationally driving each nozzle shaft 55 around its axis is disposed at a substantially central portion of the mounting head 50 in the Z-axis direction.
- the R-axis drive device 70 includes an R-axis servomotor 35R and an R-axis drive gear 72R (see FIG. 3) provided around the output shaft of the R-axis servomotor 35R and meshed with the R-axis driven gear 62R.
- a common gear (not shown) is provided below the R-axis driven gear 62R.
- nozzle gears 57 ⁇ / b> R are provided on the outer periphery of each shaft holder 57.
- a nozzle gear 57R provided on each shaft holder 57 is meshed with the common gear.
- the common gear rotates through the rotational drive of the R-axis drive gear 72R and the R-axis driven gear 62R.
- each shaft holder 57 rotates by meshing with the nozzle gear 57R. Since each shaft holder 57 and each nozzle shaft 55 are ball spline-coupled, 18 nozzle shafts 55 rotate in the same direction and at the same angle around the axis along with the rotation of the common gear. To do.
- a spring retaining bolt 58 is screwed to the upper end portion of each nozzle shaft 55.
- a winding spring 59 is arranged on the outer surface side of each nozzle shaft 55. The winding spring 59 is disposed in a compressed state between the spring retaining bolt 58 and the shaft holder 57, and each nozzle shaft 55 is biased upward by the elastic force of the winding spring 59.
- the mounting head 50 moves the nozzle shaft 55 at a specific position among the 18 nozzle shafts 55 to the shaft portion 62 of the rotating body 60 with respect to the rotating body 60.
- Two Z-axis driving devices 80 for moving up and down in the direction along the Z-axis direction (up and down direction) are provided. Both Z-axis drive devices 80 are arranged symmetrically on the left and right sides of the mounting head 50 with the shaft portion 62 of the rotating body 60 interposed therebetween above the nozzle shafts 55 (see FIG. 5).
- the Z-axis driving device 80 includes a box-shaped Z-axis driving source 82 and a Z-axis that moves in the Z-axis direction (vertical direction) by obtaining power from the Z-axis driving source 82. And a movable portion 84. Inside the Z-axis drive source 82 is provided a Z-axis linear motor 35Z (see FIG. 7) for driving the Z-axis movable portion 84 to a linear motor.
- a cam follower 86 (hereinafter referred to as “Z-axis cam follower 86”) around the axis along the X-axis direction is provided at the lower end portion of the Z-axis movable portion 84 in the Z-axis drive device 80. It is attached to be rotatable.
- the Z-axis movable portion 84 is disposed so that the Z-axis cam follower 86 is close to the upper end portion (spring retaining bolt 58) of the nozzle shaft 55 at a specific position at the rising end position, and the position is held by the Z-axis drive source 82. (See FIG. 5). For this reason, in the state where the Z-axis movable part 84 is at the rising end position, the rotation around the shaft part 62 of each nozzle shaft 55 is allowed.
- the Z-axis cam follower 86 comes into contact with the upper end portion of the nozzle shaft 55 at a specific position, and the nozzle shaft 55 It is lowered against the elastic force.
- the nozzle shaft 55 is lowered, the suction nozzle 56 provided on the nozzle shaft 55 is lowered, and the tip of the suction nozzle 56 comes close to the printed circuit board B1 at the component supply position or work position of the component supply device 40. .
- the Z-axis movable portion 84 is raised from this state, the nozzle shaft 55 and the suction nozzle 56 are raised by the elastic force restoring force of the winding spring 59.
- the mounting head 50 includes a switching device 90 for switching the pressure supplied to each suction nozzle 56 between a negative pressure and a positive pressure.
- a total of 18 switching devices 90 are provided corresponding to each suction nozzle 56 (each nozzle shaft 55).
- Each switching device 90 is positioned between two adjacent nozzle shafts 55 on the outer side of each nozzle shaft 55 arranged in a circle, and similarly to each nozzle shaft 55, the outer periphery of the shaft holding portion 64. Are provided at equal intervals along the circumference (see FIG. 4).
- each switching device 90 includes a shaft-shaped valve spool (an example of a shaft-shaped member) 92 and a cylindrical sleeve (accommodating member) in which a lower portion of the valve spool 92 is accommodated. For example) 94.
- Each sleeve 94 is attached to each attachment hole provided in the shaft holding portion 64. Specifically, the entire sleeve 94 excluding the large diameter portion 98 provided at the upper end is attached so as to be inserted into the attachment hole.
- the sleeve 94 accommodates the lower part of the valve spool 92 (most part excluding the contact part 93 of the valve spool 92) from the opening at the upper end exposed from the shaft holding part 64 so as to be movable along the axial direction thereof.
- Each valve spool 92 is arranged such that its axial direction is along the Z-axis direction (vertical direction). By moving along the axial direction, the pressure supplied to each suction nozzle 56 is negative. Switch between and positive pressure.
- each valve spool 92 has a contact portion 93 having a substantially U-shape in the lateral direction on the upper portion thereof.
- the contact portion 93 extends in a direction orthogonal to the axial direction (Z-axis direction) of the valve spool 92 and is opposed to each other, and is spaced apart in the axial direction (Z-axis direction) 93A. It has the connection part 93B which connects a pair of opposing part 93A (refer FIG. 6).
- the contact portion 93 is exposed from the sleeve 94 and protrudes upward.
- Each of the valve spools 92 is arranged such that the abutting portion 93 having a substantially U shape faces the open side to the outside (the side opposite to the shaft portion 62 side) (see FIG. 4).
- each switching device 90 the valve spool 92 accommodated in the sleeve 94 moves to the rising end position (hereinafter referred to as “negative pressure supply position”) indicated by a two-dot chain line in FIG. Is supplied with negative pressure. Further, the valve spool 92 moves to a descending end position (hereinafter referred to as “positive pressure supply position”) indicated by a solid line in FIG. 8, whereby positive pressure is supplied into the sleeve 94.
- the negative pressure or the positive pressure supplied into each sleeve 94 is supplied to the suction nozzle 56 corresponding to the sleeve 94 through a supply path (not shown).
- each sleeve 94 has a negative pressure input port 94A to which negative pressure is input, a positive pressure input port 94B to which positive pressure is input, and a negative pressure input port 94A or a positive pressure input port 94B.
- an output port (not shown) from which a negative pressure or a positive pressure input from is output. The output port communicates with the corresponding suction nozzle 56.
- a first negative pressure supply path 62A for supplying a negative pressure is provided inside the inner shaft portion 62, and a first positive pressure supply for supplying a positive pressure is provided outside the rotating body 60.
- a path 62B is provided (see FIG. 2).
- the shaft holding portion 64 a plurality of second negative pressure supply paths 64A to which negative pressure is supplied corresponding to the sleeves 94 are provided.
- the outer ring member 65 provided on the outer peripheral side of the shaft holding portion 64 is provided with two second positive pressure supply paths 65A that are connected to the first positive pressure supply path 62B and are supplied with positive pressure. ing.
- the first negative pressure supply path 62 ⁇ / b> A is configured to always communicate with all the second negative pressure supply paths 64 ⁇ / b> A at the lower end thereof regardless of whether the shaft part 62 is rotated.
- Each second negative pressure supply path 64A communicates with the negative pressure input port 94A of the sleeve 92 in which the valve spool 92 is accommodated in a state where the valve spool 92 is in the negative pressure supply position. Therefore, in a state where the valve spool 92 is in the negative pressure supply position, it corresponds to the valve spool 92 (switching device 90) regardless of whether each suction nozzle 56 is turning around the axis of the rotating body 60. A negative pressure is always supplied to the suction nozzle 56.
- the two second positive pressure supply paths 65A are the specific positions where the nozzle shaft 55 is moved up and down in the Z-axis direction by each Z-axis drive device 80 among the outer ring members 65 provided on the outer peripheral side of the shaft holding portion 64. Are provided at corresponding positions. Both the second positive pressure supply paths 65A are connected to the positive pressure of the sleeve 94 in which the valve spool 92 is accommodated in a state where the valve spool 92 corresponding to the suction nozzle 56 at the specific position is in the positive pressure supply position. It communicates with the input port 94B. Accordingly, when the valve spool 92 is in the positive pressure supply position, positive pressure is supplied from the output port to the suction nozzle 56 only when the suction nozzle 56 corresponding to the valve spool 92 is in the specific position. .
- the electronic component E1 sucked by the plurality of suction nozzles 56 is mounted by constantly supplying negative pressure to the suction nozzle 56 corresponding to the valve spool 92 in the negative pressure supply position. It is suppressed that the head 50 is dropped when the head 50 is moved. Further, as described above, the positive pressure is supplied only to the suction nozzle 56 corresponding to the valve spool 92 at the positive pressure supply position in a predetermined case, so that only the electronic component E1 to be mounted is printed with the positive pressure. It can be mounted on the substrate B1.
- a plurality of outer seal members 96 are arranged on the outer peripheral surface side of each sleeve 94 with an interval in the Z-axis direction.
- the outer seal member 96 is an annular ring made of an elastic body such as rubber and functions to seal between the mounting hole of the shaft holding portion 64.
- inner seal members 97 are arranged at a plurality of locations (only one portion at the bottom is shown in the drawing) along the axial direction.
- the inner seal member 97 is an annular ring made of an elastic body such as rubber, and is attached to the outer surface of the valve spool 92 as shown in FIG.
- the inner seal member 97 functions to seal between the inner peripheral surface of the sleeve 94 and the valve spool 92. As a result, leakage of negative pressure and positive pressure between the negative pressure input port 94A, the positive pressure input port 94B, and the output port is suppressed. Further, the inner seal member 97 is configured so that the valve spool 92 moved to the negative pressure supply position or the positive pressure supply position by the friction force is held at that position.
- the mounting head 50 moves the valve spool 92 of each switching device 90 between the negative pressure supply position and the positive pressure supply position along the Z-axis direction (vertical direction).
- Two V-axis drive devices (an example of a drive device) 100 are provided.
- the two V-axis drive devices 100 are respectively provided at positions corresponding to the two Z-axis drive devices 80 in the Z-axis direction (see FIG. 5), and the switching device corresponding to the suction nozzle 56 at the specific position. 90 valve spools 92 are moved.
- the two V-axis drive devices 100 are also symmetrically disposed on the left and right sides of the mounting head 50 with the shaft portion 62 of the rotating body 60 interposed therebetween, similarly to the two Z-axis drive devices 80.
- the V-axis drive device 100 obtains power from a box-shaped V-axis drive source (an example of a drive source) 102 and the V-axis drive source 102. And a V-axis movable part (an example of a movable part) 104 that moves in the Z-axis direction (vertical direction). Inside the V-axis drive source 102, a V-axis linear motor 35V (see FIG. 7) for driving the V-axis movable unit 104 by linear motor drive is provided inside the V-axis drive source 102.
- V-axis cam follower 106 (hereinafter referred to as “V-axis cam follower 106”) is provided along the X-axis direction via a cam follower support 139, as shown in FIGS. It is attached so that it can rotate around.
- a V-axis cam follower (an example of a pin) 106 is provided on the valve spool 92 with respect to the valve spool 92 corresponding to the nozzle shaft 55 at the specific position when the V-axis drive device 100 is energized. The position is held by the V-axis movable portion 104 so as to be positioned between the pair of opposed portions 93A (see FIG. 5).
- V-axis cam follower 106 contacts the upper facing portion 93A of the pair of facing portions 93A located on both sides thereof, and the valve spool 92 is pushed up, and the valve spool 92 moves to the negative pressure supply position.
- V-axis cam follower 106 comes into contact with the lower facing portion 93A of the pair of facing portions 93A located on both sides of the V-axis cam follower 106.
- the spool 92 is pushed down, and the valve spool 92 moves to the positive pressure supply position.
- the linear motor drive mechanism in the V-axis drive device 100 will be described in detail later.
- the rotation direction of the V-axis cam follower 106 is tangent to the trajectory that forms the circumference of each nozzle shaft 55 swung by the rotating body 60. It almost coincides with the direction. Therefore, when the rotating body 60 is rotated during the raising / lowering operation of the valve spool 92 by the V-axis cam follower 106, the V-axis cam follower 106 is maintained in a state where the V-axis cam follower 106 is in contact with the pair of opposed portions 93A. Since it rotates by the frictional force between a pair of opposing part 93A, the raising / lowering operation
- the V-axis cam follower 106 is not in contact with both opposing portions 93A of the valve spool 92. .
- the V-axis cam follower 106 holds the position of the V-axis movable body 104 so that the valve spool 92 is at an intermediate height between the position at which the valve spool 92 is at the negative pressure supply position and the position at which the valve spool 92 is at the positive pressure supply position,
- the shaft cam follower 106 does not interfere with the valve spool 92 and can rotate the rotating body 60.
- the mounting head 50 is provided with a substrate recognition camera C1 (see FIG. 7).
- the board recognition camera C1 moves together with the mounting head 50 to capture an image at an arbitrary position on the printed board B1 stopped at the work position.
- a component recognition camera C2 (see FIG. 1) is fixed near the work position on the base 10.
- the component recognition camera C ⁇ b> 2 captures an image of the electronic component E ⁇ b> 1 sucked from the component supply position of the component supply device 40 by the suction nozzle 56.
- the control unit 110 includes an arithmetic control unit 111 configured by a CPU or the like. Connected to the arithmetic control unit 111 are a motor control unit 112, a storage unit 113, an image processing unit 114, an external input / output unit 115, a feeder communication unit 116, a display unit 117, and an input unit 118, respectively. Has been.
- the motor control unit 112 drives the X-axis servo motor 35X and the Y-axis servo motor 35Y of the component mounting apparatus 30 in accordance with a mounting program 113A described later, and the N-axis servo motor 35N, R-axis servo motor 35R, Z of the mounting head 50.
- the shaft linear motor 35Z and the V-axis linear motor 35V are each driven.
- the motor control unit 112 drives the conveyor 20 according to the mounting program 113A.
- the storage unit 113 includes a ROM (Read Only Memory) that stores a program for controlling the CPU, a RAM (Random Access Memory) that temporarily stores various data during operation of the apparatus, and the like.
- the storage unit 113 stores a mounting program 113A and various data 113B described below.
- the mounting program 113A stored in the storage unit 113 includes components including board information regarding the number of printed circuit boards B1 to be mounted and the number and types of electronic components E1 mounted on the printed circuit boards B1. Information, mounting information on the mounting position of the electronic component E1 on the printed circuit board B1, and the like.
- the various data 113B stored in the storage unit 113 includes data regarding the number and types of electronic components E1 held in the feeders 42 of the component supply device 40.
- the image processing unit 114 is configured to capture image signals output from the board recognition camera C1 and the component recognition camera C2. In the image processing unit 114, analysis of the component image and analysis of the board image are performed based on the captured image signals from the cameras C1 and C2, respectively.
- the external input / output unit 115 is a so-called interface, and is configured to receive detection signals output from various sensors 115A provided in the main body of the surface mounter 1.
- the external input / output unit 115 is configured to perform operation control on the various actuators 115 ⁇ / b> B based on a control signal output from the arithmetic processing unit 111.
- the feeder communication unit 116 is connected to the control unit of each feeder 42 attached to the component supply device 40, and controls each feeder 42 in an integrated manner.
- the control unit of each feeder 42 controls the driving of a motor for feeding the component supply tape.
- the display unit 117 includes a liquid crystal display device having a display screen and displays the state of the surface mounter 1 on the display screen.
- the input unit 118 is composed of a keyboard or the like, and accepts external input by manual operation.
- the transport state in which the transport substrate 20 transports the printed circuit board B1 and the printed circuit board B1 carried into the work position on the base 10 are performed.
- a box-shaped V-axis drive source 102 includes a plate-like V-axis main body 112 provided with a drive mechanism driven by a linear motor, and the drive mechanism attached to the V-axis main body 112. And a V-axis cover 114 that protects from the outside.
- the V-axis cover 114 does not completely cover the V-axis main body 112, and a cooling opening 114 ⁇ / b> A is provided in front of the V-axis cover 114 to prevent heat from entering the inside of the V-axis drive source 102. Is provided.
- a linear motor stator 120 is provided in the V-axis drive source 102, and a linear motor mover 130 is provided in the V-axis movable unit 104.
- the V-axis drive source 102 as shown in FIG. 10, on the plate surface of the V-axis main body 112, the three arranged in parallel along the moving direction (Z-axis direction, vertical direction) of the V-axis movable unit 104.
- a stator 120 composed of an armature coil 122, a rail 124 extending along the moving direction of the V-axis movable unit 104, and an iron piece (an example of a magnetic body) 126 are provided.
- the stator 120 is provided on the front side (left side in FIG. 10) of the V-axis drive source 102.
- the rail 124 is provided on the rear side (right side in FIG. 10) of the V-axis movable unit 104 in such a manner that the V-axis movable unit 104 is disposed between the rail 124.
- the rail 124 is provided with a rail groove (not shown) extending along the direction in which the rail 124 extends.
- the iron piece 126 is provided below the stator 120 with a predetermined space between the iron piece 126 and the stator 120.
- the iron piece 126 is bolted to the V-axis main body 112, and the position in the Z-axis direction or the Y-axis direction can be adjusted by loosening the bolt.
- the V-axis movable unit 104 has a thick plate-like yoke 132 extending in the moving direction of the V-axis movable unit 104 with both plate surfaces directed in the front-rear direction, and a front surface of the yoke 132.
- a movable element 130 including a plurality of permanent magnets 134, a position holding magnet 136 including one permanent magnet provided on the front surface of the yoke 132, a rail guide 138 provided on the rear surface of the yoke 132, and the yoke 132.
- the cam follower support part 139 attached to the upper end part of the.
- the iron piece 126 and the position holding magnet 136 are an example of a position holding unit.
- the lower end portion of the yoke 132 is bent rearward, and the tip end portion extends to the rear of the lower end portion of the rail 124.
- the plurality of permanent magnets 134 constituting the mover 130 are linearly arranged at equal intervals so that different magnetic poles are alternately arranged.
- the position holding magnet 136 is provided in front of the lower end portion of the yoke 132 and below the plurality of permanent magnets 134 constituting the mover 130.
- the surfaces of the plurality of permanent magnets 134 and the surface of the position holding magnet 136 are located on the same plane.
- the rail guide 138 is provided in a groove shape along the extending direction of the yoke 132, and moves along the extending direction of the yoke 132 (the moving direction of the V-axis movable unit 104, the Z-axis direction, and the vertical direction) with respect to the rail 124. It can be fitted.
- the cam follower support portion 139 is provided at the upper end portion of the yoke 132, and the V-axis cam follower 106 is rotatably supported. When the yoke 132 moves, the cam follower support part 139 and the V-axis cam follower 106 move together with the yoke 132.
- the rail 124 of the V-axis movable unit 104 is fitted to the rail guide 138 in a state where the plurality of permanent magnets 134 and the stator 120, the position holding magnet 136 and the iron piece 126 are all close to each other.
- the distance between the plurality of permanent magnets 134 and the stator 120 and the distance between the position holding magnet 136 and the iron piece 126 are substantially equal.
- the distance D1 between the position holding magnet 136 and the plurality of permanent magnets 134 constituting the mover 130 is larger than the distance D2 between the plurality of permanent magnets 134 included in the mover 130.
- the interval D1 is an interval between the permanent magnet 134 that is closest to the position holding magnet 136 (the permanent magnet 134 that is positioned at the lowest end in FIG. 10) and the position holding magnet 136.
- the V-axis drive source 102 and the V-axis movable unit 104 are configured as described above, so that when the armature coil 122 of the stator 120 is energized, the stator 120 is movable.
- a propulsive force driven by a linear motor that moves the V-axis movable unit 104 in the Z-axis direction (vertical direction) works with the child 130.
- the stator 120 and the mover 130 that give such a propulsive force are V-axis linear motors 35V and are controlled by the control unit 110.
- the position holding magnet 136 and the iron piece 126 constitute a magnetic spring, and when the energization to the armature coil 122 is cut off (when the V-axis drive source 102 is stopped), The position holding magnet 136 is attracted to the position in front of the iron piece 126 by the magnetic attractive force of the magnetic spring.
- the magnetic spring regardless of whether the valve spool 92 is in the negative pressure supply position or the positive pressure supply position, the magnetic spring (position holding) is in the non-interference position where the V-axis movable portion 104 does not interfere with the valve spool 92.
- the magnet 136 and the iron piece 126) are configured to hold the position of the V-axis movable unit 104.
- the V-axis cam follower 106 of the V-axis movable portion 104 is in the negative pressure supply position with the facing portion 93A1 on the upper side of the valve spool 92 in the F range shown in FIG. 8, that is, the positive pressure supply position.
- a magnetic spring (position holding magnet 136, iron piece 126) holds the V-axis movable portion 104 in a position so as to be positioned between the opposing portions 93A2 on the lower side of the valve spool 92. Further, in FIG.
- the upper facing portion is marked with 93 ⁇ / b> A ⁇ b> 1
- the lower facing portion is marked with 93 ⁇ / b> A ⁇ b> 2.
- the magnetic force of the plurality of permanent magnets 134 constituting the mover 130 is made larger than the magnetic force of the position holding magnet 136, and the movement of the V-axis drive source 102 by the linear motor drive affects the position holding magnet 136. It is not to receive.
- the magnetic spring composed of the position holding magnet 136 and the iron piece 126 is non-interfering so that the V-axis movable unit 104 does not interfere with the valve spool 92 at the negative pressure supply position and the positive pressure supply position.
- the position of the V-axis movable unit 104 is held at the position. Specifically, the V-axis movable portion 104 is held at a position where the V-axis cam follower 106 does not interfere with the opposing portion 93A of the valve spool 92 located at the negative pressure supply position or the positive pressure supply position.
- the valve located at the negative pressure supply position or the positive pressure supply position. It is possible to avoid the V-axis cam follower 106 from interfering with the facing portion 93A of the spool 92. Therefore, the maintainability of the mounting head 50 can be improved.
- the V-axis movable unit 104 is located at a position where the magnetic spring composed of the position holding magnet 136 and the iron piece 126 does not interfere with the negative pressure supply position and the valve spool 92 at the positive pressure supply position. Hold the position. Therefore, when the mounting head 50 is in an emergency stop due to the power supply being stopped with the suction nozzle 56 sucking a component, the V-axis cam follower 106 is in the lower contact portion 93A2 at the negative pressure supply position. Can be suppressed by switching the valve spool 92 from the negative pressure supply position to the positive pressure supply position. Therefore, it is possible to suppress the parts from dropping from the suction nozzle 56. As a result, the reliability of the apparatus can be improved.
- the V-axis cam follower 106 is preferably held at an intermediate position between the upper facing portion 93A2 of the valve spool 92 at the positive pressure supply position and the facing portion 93A1 of the valve spool 92 at the negative pressure supply position. By doing so, the V-axis cam follower 106 is less likely to interfere with the facing portion 93A of the valve spool 92 located on either the negative pressure supply position side or the positive pressure supply position side.
- the position holding unit that holds the position of the V-axis movable unit 104 is configured by a magnetic spring.
- the position holding unit is configured by a coil spring or other winding spring
- the magnetic spring can adjust the holding position (holding position in the Z-axis direction) of the V-axis movable unit 140 by adjusting the position of the iron piece 126. Therefore, the V-axis movable unit 140 can be held with high positional accuracy, and there is little deterioration and durability is good.
- the distance D1 between the position holding magnet 136 and the plurality of permanent magnets 134 constituting the mover 130 is the plurality of permanent magnets 134 included in the mover 130. Is larger than the interval D2.
- the influence of the iron piece 126 is greater than that in the case where the distance D1 is smaller than the distance D2 or the distance D1 is equal to the distance D2.
- the drive function of the V-axis movable part 104 by linear motor drive can be suitably maintained while having the function of holding the position of the V-axis movable part 104 by the magnetic spring.
- the magnetic spring including the position holding magnet 136 and the iron piece 126 is illustrated as an example of the position holding unit that holds the position of the V-axis movable unit 104.
- a configuration in which the position of the V-axis movable unit 104 is held by a winding spring attached on the surface may be employed.
- the magnetic spring is configured by the iron piece 126 and the position holding magnet 136 .
- the magnetic spring is not limited to the iron piece 126 and may be another magnetic body.
- the iron piece 126 and the position holding magnet 136 constituting the position holding unit are exemplified on the lower side of the stator 120 and the lower side of the mover 130.
- the holding magnet 136 may be provided in a place where the position of the V-axis movable unit 104 is held in a state where the V-axis drive source 102 is stopped, and the place where the iron piece 126 and the position holding magnet 136 are arranged. Is not limited.
- the rotary type mounting head 50 is exemplified, but an inline type mounting head in which a plurality of nozzle shafts 50 are linearly arranged may be used.
- the valve spool 92 corresponding to each nozzle shaft 50 may be provided, and the valve spool 92 at a specific position may be moved in the axial direction.
- valve spool 92 is moved in the axial direction when the V-axis cam follower 106 abuts against each facing portion 93A of the valve spool 92 is exemplified.
- the member is not limited to the cam follower 106, and may be a non-rotating fixed pin, for example.
- the above embodiment exemplifies a configuration in which the V-axis cam follower 106 is held at a height position intermediate between the position at which the valve spool 92 is at the negative pressure supply position and the position at which it is the positive pressure supply position. However, it may be held at a height position near the middle, and may be held at a position slightly deviated from the middle.
- the surface mounting machine 1 including the mounting head 50 is exemplified.
- the mounting head 50 exemplified in the above embodiment can be applied to apparatuses other than the surface mounting machine.
- Outer seal member 97 Inner seal member 100 ... V-axis drive device (drive device) 102 ... V-axis drive source (drive source) 104 ... V-axis movable part (movable part) 106 ... V-axis cam follower (pin) 124 ... rail 120 ... stator 122 ... armature coil 126 ... iron piece (position holding part) DESCRIPTION OF SYMBOLS 130 ... Movable element 132 ... Yoke 134 ... Permanent magnet 136 ... Position holding magnet (position holding part) 138 ... Rail guide 139 ... Cam follower support B1 ... Printed circuit board (board) C1 ... Board recognition camera C2 ... Part recognition camera D1 ... Space between the position holding magnet and the plurality of permanent magnets constituting the mover D2 ... Space between the plurality of permanent magnets E1 ... Electronic components (components)
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Abstract
Description
図面を参照して実施形態を説明する。本実施形態では、図1に示す表面実装機1について例示する。表面実装機1は、基台10と、プリント基板(基板の一例)B1を搬送するための搬送コンベア(基板搬送装置の一例)20と、プリント基板B1上に電子部品(部品の一例)E1を実装するための部品実装装置30と、部品実装装置30に電子部品E1を供給するための部品供給装置40等とを備えている。
続いて実装ヘッド50の構成について詳しく説明する。実装ヘッド50は、図2に示すように、本体であるヘッド本体部52がカバー53、54によって覆われたアーム状をなしており、部品供給装置40によって供給される電子部品E1を吸着してプリント基板B1上に実装する。本実施形態の実装ヘッド50は、ロータリー型であり、計18本のノズルシャフト55が回転体60によってZ軸方向(上下方向)に移動可能に保持されている(図4参照)。
次に、表面実装機1の電気的構成について、図7を参照して説明する。表面実装機1の本体は、制御部110によってその全体が制御統括されている。制御部110は、CPU等により構成される演算制御部111を備えている。演算制御部111には、モータ制御部112と、記憶部113と、画像処理部114と、外部入出力部115と、フィーダ通信部116と、表示部117と、入力部118と、がそれぞれ接続されている。
次に、V軸駆動装置100におけるリニアモータ駆動の駆動機構について、図9及び図10を参照して説明する。図9に示すように、箱状のV軸駆動源102は、リニアモータ駆動による駆動機構が設けられた板状のV軸本体部112と、V軸本体部112に取り付けられて上記駆動機構を外部から保護するV軸カバー114と、を備えている。V軸カバー114はV軸本体部112を完全には覆っておらず、V軸カバー114の前方には、V軸駆動源102の内部に熱が籠らないようにするための冷却開口114Aが設けられている。
本実施形態に係る実装ヘッド50は、位置保持磁石136と鉄片126からなる磁気ばねが、負圧供給位置及び正圧供給位置にあるバルブスプール92に対してV軸可動部104が干渉しない非干渉位置にV軸可動部104を位置保持する。具体的には、負圧供給位置や正圧供給位置に位置するバルブスプール92の対向部93Aに対して、V軸カムフォロア106が干渉しない位置に、V軸可動部104を位置保持する。
本明細書で開示される技術は上記既述及び図面によって説明した実施形態に限定されるものではなく、例えば次のような実施形態も技術的範囲に含まれる。
(1)上記の実施形態では、V軸可動部104を位置保持する位置保持部の一例として、位置保持磁石136と鉄片126からなる磁気ばねを例示したが、例えば、V軸本体部112の板面上に取り付けられた巻ばねによってV軸可動部104の位置が保持される構成であってもよい。
10...基台
20...搬送コンベア(搬送装置)
30...部品実装装置
40...部品供給装置
42...フィーダ
50...実装ヘッド
55...ノズルシャフト
56...吸着ノズル
60...回転体
62...軸部
64...シャフト保持部
70...R軸駆動装置
80...Z軸駆動装置
82...Z軸駆動源
84...Z軸可動部
86...Z軸カムフォロア
90...切替装置
92...バルブスプール(軸状部材)
93...当接部
93A...対向部
94...スリーブ
96...外側シール部材
97...内側シール部材
100...V軸駆動装置(駆動装置)
102...V軸駆動源(駆動源)
104...V軸可動部(可動部)
106...V軸カムフォロア(ピン)
124...レール
120...固定子
122...電機子コイル
126...鉄片(位置保持部)
130...可動子
132...ヨーク
134...永久磁石
136...位置保持磁石(位置保持部)
138...レールガイド
139...カムフォロア支持部
B1...プリント基板(基板)
C1...基板認識カメラ
C2...部品認識カメラ
D1...位置保持磁石と可動子を構成する複数の永久磁石との間の間隔
D2...複数の永久磁石の間隔
E1...電子部品(部品)
Claims (5)
- 負圧によってその先端部に部品を吸着して保持するとともに、正圧によって前記先端部に保持した部品を解放する吸着ノズルと、
軸状をなし、その軸方向に沿って移動することで前記吸着ノズルに供給される圧力を負圧と正圧との間で切り替える軸状部材であって、前記軸方向の一方側の移動端が前記吸着ノズルに負圧を供給する負圧供給位置とされ、前記軸方向の他方側の移動端が前記吸着ノズルに正圧を供給する正圧供給位置とされた軸状部材と、
駆動源と、前記駆動源から動力を得て前記軸方向に移動する可動部とを有し、前記軸方向への移動に伴って前記可動部の一部が前記軸状部材に当接することにより、前記軸状部材を前記負圧供給位置と前記正圧供給位置との間で変位させる駆動装置と、
前記駆動源が停止した状態で、前記軸状部材が前記負圧供給位置又は前記正圧供給位置のどちらの位置にあっても、前記可動部が前記軸状部材に対して非干渉となるように、前記可動部を位置保持する位置保持部と、を備える実装ヘッド。 - 前記可動部は、前記軸状部材の当接部に対して当接するピンを有し、
前記位置保持部は、前記負圧供給位置に位置する前記軸状部材の前記当接部と、前記正圧供給位置に位置する前記軸状部材の前記当接部との間に、前記ピンが位置するように前記可動部を位置保持する、請求項1に記載の実装ヘッド。 - 前記位置保持部は、磁性体と磁石とを有する磁気ばねにより構成される、請求項1または請求項2に記載の実装ヘッド。
- 前記駆動源は固定子を有し、前記可動部が可動子を有し、前記可動部が前記固定子と前記可動子とによるリニアモータ駆動によって駆動され、
前記可動子は、等間隔で直線状に配置された複数の磁石を有し、
前記位置保持部が有する磁石と前記可動子が有する磁石との間の間隔が、前記可動子が有する複数の磁石の間隔よりも大きくされている、請求項3に記載の実装ヘッド。 - 請求項1から請求項4のいずれか1項に記載の実装ヘッドを有し、基板上に前記部品を実装する部品実装装置と、
前記部品実装装置に前記部品を供給する部品供給装置と、
前記基板を前記部品実装装置による前記部品の実装範囲内まで搬送する基板搬送装置と、
を備える表面実装機。
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CN201580083221.2A CN108029238B (zh) | 2015-10-01 | 2015-10-01 | 旋转型的安装头及表面安装机 |
JP2017542640A JP6572317B2 (ja) | 2015-10-01 | 2015-10-01 | ロータリー型の実装ヘッド、及び表面実装機 |
US15/762,412 US10849259B2 (en) | 2015-10-01 | 2015-10-01 | Mounting head and surface mounter |
DE112015006997.6T DE112015006997T5 (de) | 2015-10-01 | 2015-10-01 | Montagekopf und Oberflächen-Montagevorrichtung |
PCT/JP2015/077948 WO2017056293A1 (ja) | 2015-10-01 | 2015-10-01 | 実装ヘッド、及び表面実装機 |
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US10849259B2 (en) * | 2015-10-01 | 2020-11-24 | Yamaha Hatsudoki Kabushiki Kaisha | Mounting head and surface mounter |
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JP2013179117A (ja) * | 2012-02-28 | 2013-09-09 | Sony Corp | 実装ヘッドユニット、部品実装装置及び基板の製造方法 |
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JPWO2021171445A1 (ja) * | 2020-02-26 | 2021-09-02 | ||
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JP7271782B2 (ja) | 2020-02-26 | 2023-05-11 | ヤマハ発動機株式会社 | シャフト駆動装置及び部品実装装置 |
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CN108029238B (zh) | 2020-01-07 |
US10849259B2 (en) | 2020-11-24 |
DE112015006997T5 (de) | 2018-06-14 |
CN108029238A (zh) | 2018-05-11 |
JPWO2017056293A1 (ja) | 2018-03-08 |
US20180263149A1 (en) | 2018-09-13 |
JP6572317B2 (ja) | 2019-09-04 |
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