WO2017014373A1 - 파면 제어기를 활용한 초고속 고정밀 3차원 굴절률 측정 방법 및 장치 - Google Patents

파면 제어기를 활용한 초고속 고정밀 3차원 굴절률 측정 방법 및 장치 Download PDF

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Publication number
WO2017014373A1
WO2017014373A1 PCT/KR2015/013567 KR2015013567W WO2017014373A1 WO 2017014373 A1 WO2017014373 A1 WO 2017014373A1 KR 2015013567 W KR2015013567 W KR 2015013567W WO 2017014373 A1 WO2017014373 A1 WO 2017014373A1
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Prior art keywords
incident light
refractive index
sample
digital micromirror
dimensional
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PCT/KR2015/013567
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English (en)
French (fr)
Korean (ko)
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박용근
김규현
신승우
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한국과학기술원
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G01N21/453—Holographic interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/068—Optics, miscellaneous

Definitions

  • the following embodiments are related to an ultrafast high precision three-dimensional refractive index measurement method and apparatus using a wavefront controller. More particularly, the present invention relates to an ultrafast high precision three-dimensional refractive index measuring method and apparatus for controlling incident light for optical tomography using a wavefront shaper.
  • 3D Refractive Index Tomography is an optical technique proposed by E. Wolf and implemented by V. Lauer et al., And it is a 3D refractive index distribution of micro specimens (samples) such as cells or semiconductor process products. Through measurement, it can be used for measuring the shape and optical properties of the specimen (sample) [Non-Patent Documents 1 to 3].
  • RIT Three-dimensional refractive index measurement technology
  • CT X-ray computed tomography
  • Non-Patent Document 1 E. Wolf, “Three-dimensional structure determination of semi-transparent objects from holographic data,” Optics Communications 1, 153-156 (1969).
  • Non-Patent Document 2 V. Lauer, "New approach to optical diffraction tomography yielding a vector equation of diffraction tomography and a novel tomographic microscope," Journal of Microscopy 205, 165-176 (2002).
  • Non-Patent Document 3 K. Kim, H.-O. Yoon, M. Diez-Silva, M. Dao, R. Dasari, and Y.-K. Park, "High-resolution three-dimensional imaging of red blood cells parasitized by Plasmodium falciparum and in situ hemozoin crystals using optical diffraction tomography," J. Biomed. Opt. 19, 011005-011012 (2014).
  • Non-Patent Document 4 W.-H. Lee, "Binary computer-generated holograms,” Applied Optics 18, 3661-3669 (1979).
  • Non-Patent Document 5 F. Charriere, A. Marian, F. Montfort, J. Kuehn, T. Colomb, E. Cuche, P. Marquet, and C. Depeursinge, "Cell refractive index tomography by digital holographic microscopy,” Optics letters 31, 178-180 (2006).
  • Non-Patent Document 6 K. Lee, K. Kim, J. Jung, J. Heo, S. Cho, S. Lee, G. Chang, Y. Jo, H. Park, and Y. Park, "Quantitative phase imaging techniques for the study of cell pathophysiology: from principles to applications, "Sensors 13, 4170-4191 (2013).
  • Embodiments describe a method and apparatus for measuring ultrafast high precision 3D refractive index using a wavefront shaper. More specifically, a method for measuring ultrafast high precision 3D refractive index by controlling incident light for optical tomography using a wavefront controller And a description of the device.
  • Embodiments are designed to control incident light to have different angles or different patterns for ultra-fast optical tomography, and to control the incident light stably and quickly, thereby using a wavefront controller capable of measuring a three-dimensional refractive index with high speed and precision. To provide a measuring method and apparatus.
  • a method of measuring high-speed high-precision three-dimensional refractive index using a wavefront controller may include changing a radiation angle and wavefront pattern of incident light to a sample using a wavefront shaper; Measuring a two-dimensional optical field passing through the sample according to at least one of the incident light using an interferometer; And acquiring a 3D refractive index image through the measured 2D optical field information.
  • the step of controlling the incident light to enter the sample using a deformable mirror (DM) as the wavefront controller, and controlling the inclination angle of the variable mirror (DM) to determine the plane wave propagation angle of the incident light Controlling; And enlarging the controlled plane wave propagation angle with a plurality of lenses to enter the sample.
  • DM deformable mirror
  • the plane wave propagation angle may be controlled by an inclination of twice the inclination of the variable mirror.
  • the incident light is controlled to be incident on a sample by using a digital micromirror device (DMD) having an array including a plurality of micromirrors as the wavefront controller, and the digital micromirror device (DMD).
  • DMD digital micromirror device
  • Controlling the incident light and entering the sample includes using a digital micromirror device (DMD) having an array including a plurality of micromirrors as the wavefront controller, and reflecting the reflected light from the digital micromirror device (DMD). Aligning a center of at least one of the first lens and the second lens that transmits the two-dimensional optical field so as to deviate by a predetermined distance from the optical axis; A spatial filter may be disposed between the first lens and the second lens and reduced to a diffraction limit to distinguish pixels constituting the superpixel formed by grouping pixels of the digital micromirror element (DMD).
  • DMD digital micromirror device
  • Controlling the incident light and entering the sample includes using a digital micromirror device (DMD) having an array including a plurality of micromirrors as the wavefront controller and using the digital micromirror device (DMD) in optical alignment. Positioning on a Fourier plane to form a laser array capable of controlling the position of the plurality of micromirrors with individual light sources; Controlling a plane wave propagation angle of the incident light by changing positions of the plurality of micromirrors that reflect light using the laser array; And enlarging the controlled plane wave propagation angle with a plurality of lenses to enter the sample.
  • DMD digital micromirror device
  • the obtaining of the 3D refractive index image may be input to a 3D optical diffraction tomography algorithm to obtain the 3D scattering potential or the 3D refractive index image.
  • an ultrafast high precision three-dimensional refractive index measuring method using a wavefront shaper may include: injecting at least one incident light pattern into a plane of a sample using a digital micromirror device (DMD); Changing the incident light pattern to measure the two-dimensional optical field for at least one of the incident light patterns using an interferometer; And numerically analyzing the response of the sample to plane waves of different angles included in the incident light pattern from the measured information of the two-dimensional optical field to obtain a three-dimensional refractive index image.
  • DMD digital micromirror device
  • an ultrafast high precision 3D refractive index measuring apparatus using a wavefront controller may include: a modulator configured to change at least one of an irradiation angle and a wavefront pattern of incident light to a sample by using a wavefront controller; An interferometer for measuring a two-dimensional optical field passing through the sample according to at least one incident light; And an image unit obtaining a 3D refractive index image through the measured 2D optical field information.
  • the modulator may include: a deformable mirror (DM) that is a wavefront controller that controls an inclination angle to control a plane wave propagation angle of the incident light; And a plurality of lenses in which the plane wave propagation angle is enlarged and incident on the sample.
  • DM deformable mirror
  • the modulator may include: a digital micromirror device (DMD) having an arrangement including a plurality of micromirrors to the wavefront controller; A first lens and a second lens for transmitting the two-dimensional optical field reflected from the digital micromirror element (DMD); A spatial filter disposed between the first lens and the second lens and configured to control a plane wave propagation angle of the incident light having a linear slope by adjusting a phase to the first diffracted light; And a plurality of lenses in which the plane wave propagation angle is enlarged and incident on the sample.
  • DMD digital micromirror device
  • the modulator comprises: a digital micromirror element (DMD) having an arrangement comprising a plurality of micromirrors to the wavefront controller; A first lens and a second lens which transmit the two-dimensional optical field reflected by the digital micromirror element (DMD), and wherein the centers of at least one or more lenses are aligned so as to deviate by a predetermined distance from an optical axis; A spatial filter disposed between the first lens and the second lens; And a plurality of lenses configured to enlarge the plane wave propagation angle to be incident on the sample, wherein the modulator reduces pixels to a diffraction limit to group pixels forming a superpixel formed by grouping pixels of the digital micromirror element (DMD).
  • DMD digital micromirror element
  • the modulator comprises: a digital micromirror element (DMD) having an arrangement comprising a plurality of micromirrors to the wavefront controller; A first lens transferring the two-dimensional optical field reflected from the digital micromirror element; And a plurality of lenses for enlarging the plane wave propagation angle to be incident on the sample, wherein the modulator is configured to position the digital micromirror element on a Fourier plane of optical alignment to provide the plurality of lenses as individual light sources.
  • a laser array that can control the position of the micromirror, and by using the laser array to change the position of the plurality of micromirrors reflecting light can control the plane wave propagation angle of the incident light.
  • the imaging unit may be input to a 3D optical diffraction tomography algorithm to obtain the 3D scattering potential or 3D refractive index image.
  • an ultrafast high precision 3D refractive index measuring apparatus using a wavefront controller may include: a digital micromirror device (DMD) for injecting at least one incident light pattern into a plane of a sample; A first lens and a second lens configured to enlarge the plane wave propagation angle of the incident light to enter the sample; An interferometer for changing the incident light pattern to measure the two-dimensional optical field for at least one of the incident light patterns; And an image unit for numerically analyzing a response of the sample to plane waves of different angles included in the incident light pattern from the measured information of the two-dimensional optical field, to obtain a three-dimensional refractive index image.
  • DMD digital micromirror device
  • ultrafast high precision 3 using a wavefront controller capable of measuring 3D refractive index with high speed and precision by controlling incident light to have different angles or patterns for ultrafast optical tomography and controlling incident light stably and quickly A method and apparatus for measuring dimensional refractive index can be provided.
  • ultrafast incident light control using wavefront controllers such as variable mirrors (DMs) or digital micromirror elements (DMDs) is much more stable than conventional galvanometer mirrors, mechanical specimens or light source movements. It operates quickly and precisely, and the 3D refractive index measurement is possible with high speed and precision.
  • DMs variable mirrors
  • DMDs digital micromirror elements
  • FIG. 1 is a view for schematically explaining an ultrafast high precision three-dimensional refractive index measuring apparatus using a wavefront controller according to an embodiment.
  • FIG. 2 is a diagram illustrating an ultrafast high precision three-dimensional refractive index measuring apparatus using a variable mirror according to an embodiment.
  • FIG. 3 is a view for explaining an ultrafast high precision three-dimensional refractive index measuring apparatus using a digital micromirror device according to another embodiment.
  • FIG. 4 is a diagram illustrating an ultrafast high precision three-dimensional refractive index measuring apparatus using a digital micromirror device according to another embodiment.
  • FIG. 5 is a diagram illustrating an ultrafast high precision three-dimensional refractive index measuring apparatus using a digital micromirror device according to another embodiment.
  • FIG. 6 is a diagram for describing an ultrafast high precision three-dimensional refractive index measuring apparatus using a digital micromirror device according to another embodiment.
  • the present invention relates to a technology for controlling incident light for optical tomography using a wavefront shaper, and to control incident light to have different angles or patterns for optical tomography, and to stably and quickly control incident light. It's about technology.
  • Devices capable of controlling the wavefront at high speed may include a deformable mirror (DM) and a digital micromirror device (DMD).
  • DM deformable mirror
  • DMD digital micromirror device
  • FIG. 1 is a view for schematically explaining an ultrafast high precision three-dimensional refractive index measuring apparatus using a wavefront controller according to an embodiment.
  • the ultra-high precision 3D refractive index measuring apparatus 100 using the wavefront controller may include a modulator 110, an interferometer 120, and an image unit 130. .
  • the modulator 110 may change the at least one of the incident angle and the wavefront pattern of the incident light into the sample (sample) using the wavefront controller.
  • the wavefront controller a device capable of controlling the phase of light or a fixed type film capable of controlling the phase may be used.
  • the wavefront controller may include a variable mirror DM and a digital micromirror element DMD capable of controlling the wavefront at ultrafast speeds.
  • the interferometer 120 extracts an interference signal from at least one incident light, and measures the two-dimensional optical field passing through the sample according to the at least one incident light.
  • the imaging unit 130 may provide a high speed and high precision 3D refractive index measuring method and apparatus using a wavefront controller capable of measuring 3D refractive index with high speed and precision by acquiring a 3D refractive index image through the measured 2D optical field information.
  • FIG. 2 is a diagram illustrating an ultrafast high precision three-dimensional refractive index measuring apparatus using a variable mirror according to an embodiment.
  • the propagation angle of the plane wave may be controlled by directly controlling the inclination angle of the variable mirror using the variable mirror DM.
  • the ultra-high precision 3D refractive index measuring apparatus 200 using the variable mirror DM may include a modulator, an interferometer, and an image unit.
  • the modulator may change the at least one of the irradiation angle and the wavefront pattern of the incident light into the sample by using the wavefront controller.
  • the modulator may include a variable mirror DM and a plurality of lenses 221 and 222.
  • the deformable mirror (DM) 210 is one of the wavefront controllers and may control the inclination angle of the incident light by controlling the inclination angle.
  • the plurality of lenses 221 and 222 may enlarge the plane wave propagation angle and enter the sample.
  • the angle of inclination of the variable mirror 210 may be directly controlled using the variable mirror 210 to control the traveling angle of the plane wave.
  • the propagation angle of the plane wave can be controlled by the inclination of twice the slope expressed by the variable mirror 210.
  • the angle of the plane wave controlled in this way may be magnified by the plurality of lenses 221 and 222 to be incident on the sample, and the corresponding two-dimensional optical field may be measured.
  • the plurality of lenses 221 and 222 may use the tube lens 221 and the condenser lens 222 as an example.
  • the interferometer extracts an interference signal from at least one incident light, and may measure the two-dimensional optical field passing through the sample according to the at least one incident light.
  • the imaging unit may acquire a 3D refractive index image through the measured 2D optical field information.
  • the angle of inclination of the variable mirror 210 may be directly controlled using the variable mirror 210 to control the traveling angle of the plane wave.
  • the phase of the light emitted from the light source may be controlled by the wavefront controller.
  • the light source may include a light source in the visible light band.
  • a wavefront shaper may be used to change at least one of the irradiation angle and the wavefront pattern of incident light to enter the sample.
  • the variable mirror 210 can be used as the wavefront controller.
  • the plane wave propagation angle of the incident light is controlled, and the controlled plane wave propagation angle is enlarged by the plurality of lenses 221 and 222 to be incident on the sample. Since the light reflected from the variable mirror 210 is incident, the plane wave propagation angle may be controlled by the inclination twice that of the variable mirror 210.
  • variable mirror 210 for ultra-fast optical tomography, controlling the plane wave propagation angle of incident light to have different angles, and stably and quickly controlling the incident light, it is possible to measure 3D refractive index with high speed and precision. Do.
  • FIG. 3 is a view for explaining an ultrafast high precision three-dimensional refractive index measuring apparatus using a digital micromirror device according to another embodiment.
  • the digital micromirror device may be utilized as a period controllable reflective amplitude grating.
  • An ultrafast high precision 3D refractive index measuring apparatus using a digital micromirror device may include a modulator, an interferometer, and an image unit.
  • the digital micromirror element (DMD) can be used as a period controllable reflective amplitude diffraction grating.
  • the modulator may be incident on the sample by changing the irradiation angle of the incident light using the wavefront controller.
  • the modulator may include a digital micromirror element, a first lens and a second lens 341 and 342, a spatial filter 320, and a plurality of lenses 341 and 342.
  • the plurality of lenses 341 and 342 may use a tube lens and a condenser lens as an example.
  • the digital micromirror device may be an wavefront controller and may have an arrangement including a plurality of micromirrors.
  • the first lens and the second lens 341 and 342 may transmit the two-dimensional optical field reflected by the digital micromirror device DMD.
  • a spatial filter 320 is disposed between the first lens and the second lenses 341 and 342, and the phase is adjusted to the first diffracted light to control the plane wave propagation angle of the incident light having a linear slope. .
  • the plurality of lenses 341 and 342 may enlarge the plane wave propagation angle and enter the sample.
  • the interferometer may measure the two-dimensional optical field passing through the sample according to at least one incident light.
  • the imaging unit may acquire a 3D refractive index image through the measured 2D optical field information.
  • the Lee hologram [Non-Patent Document 4] can be used to select the desired phase information for the spatially filtered (spatial filter, 320) first-order diffracted light and to represent the phase of the plane wave having a linear slope, the desired angle
  • the traveling plane wave can be expressed.
  • a spatially increasing phase must be represented.
  • the digital micromirror device can only control the intensity of light immediately after reflection, but since the Lee hologram containing the phase to be expressed can be represented by the intensity of light, the phase corresponding to the plane wave can be expressed by using the DMD. Do.
  • Equation 1 corresponding wavefront phase information ⁇ (x, y) is Can be expressed as in Equation 1 below.
  • a Lee hologram pattern shown in Equation 2 may be input into the DMD.
  • the light irradiated onto the sample can directly control f (x, y) on the DMD to form a plane wave in a desired direction. It is possible. At this time, unwanted diffracted light generated while using the Lee hologram can be removed using a spatial filter or the like.
  • the phase of each pixel can be controlled from 0 to 2 ⁇ , the slope of the phase that can be controlled by the digital micromirror element (DMD) is limited by the size of the pixel.
  • the maximum controllable angle is about 1 to 2 degrees. After adding two lenses to enlarge this angle and incident the sample, two-dimensional optical field information is photographed for each angle of the incident light to obtain a three-dimensional scattering potential.
  • the phase of the light emitted from the light source may be controlled by the wavefront controller.
  • the light source may include a light source in the visible light band.
  • a wavefront shaper may be used to change at least one of the irradiation angle and the wavefront pattern of incident light to enter the sample.
  • a digital micromirror device having an array including a plurality of micromirrors may be used as the wavefront controller.
  • a spatial filter 320 may be disposed between the first lens and the second lenses 341 and 342 that transmit the two-dimensional optical field reflected by the digital micromirror device (DMD), and a spatial filter The phase is adjusted to the first-order diffracted light passing through 320 to control the plane wave propagation angle of the incident light having a linear slope. Thereafter, the controlled plane wave propagation angle may be extended to the plurality of lenses 341 and 342 to be incident on the sample.
  • the two-dimensional optical field passing through the sample may be measured according to at least one incident light using an interferometer.
  • the 3D refractive index image may be obtained through the measured 2D optical field information.
  • the digital micromirror element is used as a cycle-controllable reflective amplitude diffraction grating for ultra-fast optical tomography.
  • the dimensional refractive index can be measured.
  • FIG. 4 is a diagram illustrating an ultrafast high precision three-dimensional refractive index measuring apparatus using a digital micromirror device according to another embodiment.
  • a digital micromirror device (DMD) 410 using a superpixel method may be utilized.
  • the ultra-high precision 3D refractive index measuring apparatus 400 using the digital micromirror device (DMD) may include a modulator, an interferometer, and an image unit.
  • the digital micromirror device (DMD) 410 may use a superpixel method.
  • the modulator may change the at least one of the irradiation angle and the wavefront pattern of the incident light into the sample by using the wavefront controller.
  • the modulator may be incident on the sample by modulating the irradiation angle using the digital micromirror element 410.
  • the modulator may include a digital micromirror element 410, first and second lenses 431 and 432, a spatial filter 420, and a plurality of lenses 441 and 442.
  • the lenses 441 and 442 may use a tube lens and a condenser lens as an example.
  • the digital micromirror device may be an wavefront controller and may have an arrangement including a plurality of micromirrors.
  • the first and second lenses 431 and 432 may transmit the two-dimensional optical field reflected by the digital micromirror element 410.
  • the first and second lenses 431 and 432 may be aligned such that the centers of the at least one or more lenses deviate a predetermined distance from the optical axis.
  • a spatial filter 420 is disposed between the first lens and the second lenses 431 and 432, and the phase is adjusted to the first diffracted light to control the plane wave propagation angle of the incident light having a linear slope. .
  • the plurality of lenses 441 and 442 may enlarge the plane wave propagation angle and enter the sample.
  • Such a modulator reduces the diffraction limit so that the pixels constituting the superpixel formed by grouping a plurality of pixels of the digital micromirror element 410 cannot be distinguished, thereby forming a superpixel array whose phase can be adjusted from 0 to 2p.
  • the plane wave propagation angle of the incident light having the linear phase slope may be controlled by adjusting the phase of the superpixel array.
  • Non-Patent Document 5 a method of phase modulation of light using a superpixel by binding pixels of the digital micromirror element 410 by A.
  • Mosk has been known (Non-Patent Document 5).
  • the lenses that transmit the optical field reflected by the digital micromirror element 410 are arranged to deviate slightly from the optical axis so that the phase of light is expressed differently according to the position of the micromirror. Therefore, by placing a spatial filter 420 between the lenses and reducing the diffraction limit to make the pixels constituting the superpixel indistinguishable, a superpixel array with a phase adjustable from 0 to 2 ⁇ can be created.
  • the slope of the linear phase using this method, it is possible to express the plane wave traveling at a desired angle.
  • the angle represented by the addition of two lenses can be enlarged and then incident on the sample to be utilized for three-dimensional optical tomography.
  • the interferometer may measure the two-dimensional optical field passing through the sample according to at least one incident light.
  • the imaging unit may acquire a 3D refractive index image through the measured 2D optical field information.
  • the phase of the light emitted from the light source may be controlled by the wavefront controller.
  • the light source may include a light source in the visible light band.
  • a wavefront shaper may be used to change at least one of the irradiation angle and the wavefront pattern of incident light to enter the sample.
  • the first lens and the second using a digital micromirror element 410 having an arrangement including a plurality of micromirrors as a wavefront controller, and transmitting a two-dimensional optical field reflected by the digital micromirror element 410.
  • At least one of the lenses 431 and 432 may be aligned such that a center of the lens deviates by a predetermined distance from the optical axis.
  • a superpixel formed by grouping pixels of the digital micromirror element 410 by disposing a spatial filter 420 between the first lens and the second lens 431 and 432 and reducing the diffraction limit.
  • a superpixel array whose phase can be adjusted from 0 to 2p by making the pixels constituting the indistinguishable.
  • a 4- f imaging system is constructed using a first lens and a second lens, and a focal length of the first lens and the second lens is appropriately selected as a reduction factor of the image, and a superpixel formed of a digital micromirror element. This can be configured by reducing the diffraction limit of the light, typically half the wavelength.
  • the phase of the superpixel array may be adjusted to control the plane wave propagation angle of the incident light having the linear phase inclination, and the controlled plane wave propagation angle may be extended to the plurality of lenses 441 and 442 to be incident on the sample.
  • the two-dimensional optical field passing through the sample may be measured according to at least one incident light using an interferometer, and a three-dimensional refractive index image may be obtained through the measured two-dimensional optical field information.
  • the incident light is controlled to have different angles, and the incident light is stably and rapidly controlled to measure three-dimensional refractive index with high speed and precision. It is possible.
  • FIG. 5 is a diagram illustrating an ultrafast high precision three-dimensional refractive index measuring apparatus using a digital micromirror device according to another embodiment.
  • the digital micromirror device (DMD) 510 may be used as an individual source controllable laser array.
  • the ultra-high speed 3D refractive index measuring apparatus 500 using the digital micromirror device (DMD) may include a modulator, an interferometer, and an image unit.
  • the digital micromirror device (DMD) 510 may be used as an individual source controllable laser array.
  • the modulator may change the at least one of the irradiation angle and the wavefront pattern of the incident light into the sample by using the wavefront controller.
  • the modulator may be incident on the sample by modulating the irradiation angle using the digital micromirror element 510.
  • the modulator may include a digital micromirror element 510, a first lens 520, and a plurality of lenses 531 and 532.
  • the digital micromirror element may have an arrangement comprising a plurality of micromirrors as a wavefront controller.
  • the first lens 520 may transmit the two-dimensional optical field reflected by the digital micromirror element 510.
  • the plurality of lenses 531 and 532 may enlarge the plane wave propagation angle and enter the sample.
  • the lenses 531 and 532 may use a tube lens and a condenser lens as an example.
  • Such a modulator places the digital micromirror element 510 on a Fourier plane of optical alignment to form a laser array that can control the position of multiple micromirrors with individual light sources, and reflects light using the laser array.
  • By changing the positions of the plurality of micromirrors to control the plane wave propagation angle of the incident light can be controlled.
  • a flat polarized wave is irradiated to a digital micromirror element located on a Fourier plane, and only a specific digital micromirror element is operated to reflect only light corresponding to the element, so that the light incident on the sample has light having a specific spatial frequency. Planar waves incident only at a certain angle may be generated.
  • the interferometer may measure the two-dimensional optical field passing through the sample according to at least one incident light.
  • the imaging unit may acquire a 3D refractive index image through the measured 2D optical field information.
  • the angle of light incident on the sample can be controlled.
  • the magnification of the lenses may be appropriately adjusted so that the size of the digital micromirror element 510 corresponds to the size of the numerical aperture of the condenser lens.
  • the phase of the light emitted from the light source may be controlled by the wavefront controller.
  • the light source may include a light source in the visible light band.
  • a wavefront shaper may be used to change at least one of the irradiation angle and the wavefront pattern of incident light to enter the sample.
  • a digital micromirror element 510 having an arrangement including a plurality of micromirrors is used, and the digital micromirror element 510 is placed on a Fourier plane of optical alignment to separate individual light sources.
  • a laser array capable of controlling the positions of the plurality of micromirrors can be formed.
  • the plane wave propagation angle of the incident light may be controlled by changing the positions of the plurality of micromirrors that reflect light using the laser array.
  • the controlled plane wave propagation angle may be enlarged by the plurality of lenses 531 and 532 and incident on the sample.
  • the two-dimensional optical field passing through the sample may be measured according to at least one incident light using an interferometer, and a three-dimensional refractive index image may be obtained through the measured two-dimensional optical field information.
  • the digital micromirror element 510 as an individual light source controllable laser array for ultra-fast optical tomography, the incident light is controlled to have different angles, and the incident light is stably and rapidly controlled to achieve high speed and precise three-dimensional refractive index. It can be measured.
  • FIG. 6 is a diagram for describing an ultrafast high precision three-dimensional refractive index measuring apparatus using a digital micromirror device according to another embodiment.
  • the digital micromirror device (DMD) 610 may be used as an illumination pattern controller.
  • the ultra-high precision 3D refractive index measuring apparatus 600 using the digital micromirror device (DMD) includes a digital micromirror device (DMD) 610, first and second lenses 621 and 622, an interferometer, and an imaging unit. It can be done by.
  • the digital micromirror element 610 may be used as an incident light pattern controller.
  • the ultra-high speed 3D refractive index measuring apparatus 600 using the wavefront controller may enter at least one incident light pattern into a plane of a sample.
  • the first and second lenses 621 and 622 may enlarge the plane wave propagation angle of the incident light and enter the sample.
  • the interferometer may change the incident light pattern to measure a two-dimensional optical field for at least one incident light pattern.
  • the image unit may obtain a 3D refractive index image by numerically analyzing a response of the sample to plane waves having different angles included in the incident light pattern from the measured 2D optical field information.
  • the ultra-fast high-precision three-dimensional refractive index measuring apparatus 600 using the digital micromirror element (DMD) images the incident light pattern of the digital micromirror element 610 on the plane of the sample, changes the incident light pattern, and
  • a response of a sample to plane waves of different angles included in the pattern may be obtained from the measured optical field information. That is, as the incident light pattern is changed, the phase of the plane wave is included in the pattern, thereby changing the phase of the plane wave.
  • This is possible by inserting information of a known pattern, including structured illumination, and numerically analyzing the response of the sample to the pattern that changes as the phase of each plane wave included in the pattern changes.
  • a three-dimensional refractive index distribution can be extracted by using an optical diffraction tomography algorithm.
  • the phase of the light emitted from the light source may be controlled by the wavefront controller.
  • the light source may include a light source in the visible light band.
  • At least one incident light pattern may be incident on the plane of the sample using the digital micromirror element 610.
  • the incident light pattern may be changed to measure a two-dimensional optical field of at least one incident light pattern using an interferometer.
  • the 3D refractive index image may be obtained by numerically analyzing the response of the sample to plane waves having different angles included in the incident light pattern from the measured 2D optical field information.
  • the digital micromirror element 610 as an illumination pattern controller for ultra-fast optical tomography, the incident light is controlled to have a different pattern, and the incident light is stably and quickly controlled to provide high speed and precision. Three-dimensional refractive index can be measured.
  • the incident light may be controlled by using the variable mirror DM or the digital micromirror device DMD and then incident on the sample. After measuring the two-dimensional optical field passing through the sample according to various incident light, input it to the 3D optical diffraction tomography algorithm to obtain a three-dimensional scattering potential or three-dimensional refractive index image can do.
  • a general interferometer can be used for the two-dimensional optical field measuring method.
  • Temporal and spatial intensity modulation including, for example, Mach-Zehnder interferometry, phase shifting interferometry, quantitative phase imaging units, etc.
  • a two-dimensional optical field measuring method using intensity modulation or a transport of intensity equation can be used (Non-Patent Document 6).
  • the ultra-fast ultra-precision imaging without mechanically moving elements in the conventional three-dimensional refractive index measurement technology imaging method to minimize the noise by increasing the control speed of the incident light for ultra-fast optical tomography and eliminating the movement of the device, It can increase the stability of the system.
  • the ultra-fast incident light control method using a wavefront shaper such as a variable mirror (DM) or a digital micromirror element (DMD) is a conventional galvanometer mirror or mechanical specimen or light source movement.
  • DM variable mirror
  • DMD digital micromirror element

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Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102005632B1 (ko) * 2017-10-11 2019-07-31 한국과학기술원 파면 제어기를 이용한 고속 3차원 광조형 방법 및 장치
KR102051188B1 (ko) * 2017-11-02 2020-01-08 한국과학기술원 능동 홀로그래픽 광학 집게 및 그의 파면 제어 방법
WO2019211910A1 (ja) * 2018-05-02 2019-11-07 オリンパス株式会社 データ取得装置
PL237684B1 (pl) * 2019-05-21 2021-05-17 Politechnika Warszawska Wzorzec rozkładu współczynnika załamania
KR102051262B1 (ko) * 2019-06-20 2019-12-02 한국과학기술원 능동 홀로그래픽 광학 집게를 이용한 3차원 정밀 광 조형 방법 및 장치
KR102355140B1 (ko) * 2020-07-28 2022-02-07 주식회사 토모큐브 저간섭성 광원과 다중 패턴 조명을 이용한 3차원 광회절 단층촬영 방법 및 장치
KR20240067743A (ko) * 2022-11-09 2024-05-17 울산과학기술원 광학 현미경 및 이의 광 입사각 조절방법

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110129343A (ko) * 2010-05-25 2011-12-01 캐논 가부시끼가이샤 굴절률 분포 계측방법 및 굴절률 분포 계측장치
KR20110130532A (ko) * 2004-03-11 2011-12-05 이코스비젼 시스팀스 엔.브이. 파면 조정 및 향상된 3―ｄ 측정을 위한 방법 및 장치
KR101352803B1 (ko) * 2012-12-03 2014-01-23 광주과학기술원 편광 민감 광 간섭 단층 촬영장치를 위한 파장 가변 레이저
JP2014089195A (ja) * 2006-01-20 2014-05-15 General Hospital Corp 波面変調を使用してスペックル低減を提供する光学的干渉断層撮影法のシステム、構成、及びプロセス
JP2014228870A (ja) * 2013-05-23 2014-12-08 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． コヒーレンス光生成装置、コヒーレンス光生成方法及びディスプレイ装置

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5777719A (en) * 1996-12-23 1998-07-07 University Of Rochester Method and apparatus for improving vision and the resolution of retinal images
JPH1123372A (ja) * 1997-07-02 1999-01-29 Res Dev Corp Of Japan 光波コヒーレンス映像方法及びその装置
US7567596B2 (en) * 2001-01-30 2009-07-28 Board Of Trustees Of Michigan State University Control system and apparatus for use with ultra-fast laser
JP4199000B2 (ja) * 2001-03-15 2008-12-17 エイエムオー・ウェーブフロント・サイエンシーズ・リミテッド・ライアビリティ・カンパニー 光学システムをマッピングするための断層撮影波面分析システム及び方法
US6809307B2 (en) * 2001-09-28 2004-10-26 Raytheon Company System and method for effecting high-power beam control with adaptive optics in low power beam path
AU2003245458A1 (en) * 2002-06-12 2003-12-31 Advanced Research And Technology Institute, Inc. Method and apparatus for improving both lateral and axial resolution in ophthalmoscopy
JP4725967B2 (ja) 2006-02-09 2011-07-13 株式会社ブイ・テクノロジー 微小高さ測定装置及び変位計ユニット
US7460248B2 (en) * 2006-05-15 2008-12-02 Carestream Health, Inc. Tissue imaging system
US7800746B2 (en) 2006-08-11 2010-09-21 Northwestern University Method for identifying refractive-index fluctuations of a target
GB0812712D0 (en) * 2008-07-10 2008-08-20 Imp Innovations Ltd Improved endoscope
WO2010083381A1 (en) * 2009-01-15 2010-07-22 Physical Sciences, Inc. Adaptive optics line scanning ophthalmoscope
DE102009060793A1 (de) 2009-12-22 2011-07-28 Carl Zeiss Microlmaging GmbH, 07745 Hochauflösendes Mikroskop und Verfahren zur zwei- oder dreidimensionalen Positionsbestimmung von Objekten
US8954130B2 (en) * 2010-12-17 2015-02-10 Canon Kabushiki Kaisha Apparatus and method for irradiating a medium
EP2596745B1 (en) * 2011-10-07 2019-06-19 Popovic, Zoran Reference calibration for an adaptive optics system
CN103874917B (zh) * 2011-10-12 2017-05-24 文塔纳医疗系统公司 多焦点干涉图像获取
DE102012009836A1 (de) 2012-05-16 2013-11-21 Carl Zeiss Microscopy Gmbh Lichtmikroskop und Verfahren zur Bildaufnahme mit einem Lichtmikroskop
US9163929B2 (en) * 2012-08-23 2015-10-20 Samsung Electronics Co., Ltd. Tomographic image generation apparatus having modulation and correction device and method of operating the same
KR102082299B1 (ko) * 2012-11-26 2020-02-27 삼성전자주식회사 단층 영상 생성 장치 및 단층 영상 생성 방법
JP6163685B2 (ja) * 2013-05-23 2017-07-19 国立研究開発法人物質・材料研究機構 ３次元干渉計
KR102070433B1 (ko) * 2013-11-08 2020-01-28 삼성전자주식회사 단층 영상 생성 방법 및 단층 영상 생성 장치
US10799111B2 (en) * 2014-06-10 2020-10-13 Carl Zeiss Meditec, Inc. Frequency-domain interferometric based imaging systems and methods
KR101919957B1 (ko) * 2014-08-12 2018-11-19 웨이브라이트 게엠베하 순간적 시간 영역 광 간섭 단층 촬영

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110130532A (ko) * 2004-03-11 2011-12-05 이코스비젼 시스팀스 엔.브이. 파면 조정 및 향상된 3―ｄ 측정을 위한 방법 및 장치
JP2014089195A (ja) * 2006-01-20 2014-05-15 General Hospital Corp 波面変調を使用してスペックル低減を提供する光学的干渉断層撮影法のシステム、構成、及びプロセス
KR20110129343A (ko) * 2010-05-25 2011-12-01 캐논 가부시끼가이샤 굴절률 분포 계측방법 및 굴절률 분포 계측장치
KR101352803B1 (ko) * 2012-12-03 2014-01-23 광주과학기술원 편광 민감 광 간섭 단층 촬영장치를 위한 파장 가변 레이저
JP2014228870A (ja) * 2013-05-23 2014-12-08 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． コヒーレンス光生成装置、コヒーレンス光生成方法及びディスプレイ装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SHIN, SEUNG WOO ET AL.: "Active Illumination Using a Digital Miccromirror Device for Quantitative Phase Imaging.", OPTICS LETTERS, 20 June 2015 (2015-06-20), XP055347105 *

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