WO2016206162A1

WO2016206162A1 - Method for placing and taking out glass

Info

Publication number: WO2016206162A1
Application number: PCT/CN2015/085258
Authority: WO
Inventors: 李子健
Original assignee: 武汉华星光电技术有限公司
Priority date: 2015-06-23
Filing date: 2015-07-28
Publication date: 2016-12-29
Also published as: CN105084000A; CN105084000B

Abstract

Provided is a method for placing and taking out glass, implemented by means of a new glass bearing device. A placement process comprises: a mechanical arm places a glass substrate (105) onto an air flotation mechanism (102), the air flotation mechanism (102)then blows air to the glass substrate (105) so as to enable the glass substrate to be in a state of suspension, and then moves a glass bearing platform (103) upwards to enable the glass bearing platform to be in contact with the glass substrate (105), thereby placing the glass substrate (105); and therefore, the method can improve the defect-free rate of products and reduce cost.

Description

Glass placing and removing method

Technical field

The present invention relates to the field of liquid crystal display technologies, and in particular, to a method for placing and removing glass.

Background technique

TFT-LCD (Thin film transistor liquid crystal display) In the production process of the panel, the glass substrate needs to adopt the pick-and-place motion when it is transferred to the process chamber. Traditionally, the support rod moves up and down, so that the glass and the carrier stand apart. In this way, since the support rod is in contact with the glass, acceleration occurs when the support rod moves up and down together with the glass, and the glass is subjected to a force larger than its own gravity, resulting in deterioration or even damage of the glass material at the force point, and then subsequent thinning. Badness can occur during the process, such as dimple.

technical problem

It is an object of the present invention to provide a method for placing and removing glass to solve the technical problem that the glass material may deteriorate during the prior art glass pick-and-place process.

Technical solution

Embodiments of the present invention provide a glass placement method that is implemented using a glass carrier device, the glass carrier device comprising:

a base, the base is provided with a plurality of movable limiting rods around the base;

An air floating mechanism, the air floating mechanism is fixed on the base;

a glass carrying platform movable up and down, the glass carrying platform being located above the air floating mechanism;

The air floatation mechanism includes:

An airfoil body that is hollowed out internally;

a user generates a gas flow production module of the air flow, and the air flow production module is disposed in the air float mechanism body;

a blowing pipe disposed on an upper surface of the air floating mechanism body and communicating with the air floating mechanism body;

The glass carrier includes:

a glass carrier body having a placement surface for placing a glass substrate, the glass carrier body being provided with a blow hole corresponding to the blow pipe, and the blow pipe passes the corresponding blow Stomata;

a driving module for controlling movement of the glass carrier body up and down;

The glass placement method includes the following steps:

The robot arm grabs the glass substrate and sends the glass substrate to the top of the blow pipe by moving;

The airflow generating module in the air floating mechanism starts to generate an airflow, and the glass is blown through the air blowing pipe;

The mechanical arm releases the glass substrate such that the glass substrate is in a suspended state;

The limiting rod is moved inwardly adjacent to the glass substrate to define a position of the glass substrate;

The driving module controls the glass carrier body to move upward along the air blowing pipe until the placement surface is in contact with the glass substrate in a suspended state;

After the glass carrier contacts the glass, the airflow generating module in the air flotation mechanism stops generating airflow such that the glass substrate is placed on the placement surface of the glass carrier.

In the glass placing method of the present invention, the interior of the glass carrier body is hollowed out, and an air extraction module is disposed inside the glass carrier body;

The placement surface is provided with an adsorption hole;

After the airflow generating module stops generating the airflow, the glass placing method further includes:

The air suction module suctions the adsorption hole to form a negative pressure on the adsorption hole, so that the glass substrate is in close contact with the placement surface.

Pedestal

An air floating mechanism, the air floating mechanism is fixed on the base;

a glass carrying platform movable up and down, the glass bearing platform being located above the air floating mechanism, the glass bearing platform having a placing surface for placing the glass substrate;

The air floatation mechanism includes:

An airfoil body that is hollowed out internally;

An airflow generating module for generating an airflow, the airflow generating module being disposed in the airfoil body;

a blowing pipe, the blowing pipe is disposed on an upper surface of the air floating mechanism body and communicates with the air floating mechanism body;

The glass bearing platform is provided with a blowing hole corresponding to the blowing pipe, and the blowing pipe passes through the corresponding blowing hole;

The glass placement method includes the following steps:

The glass carrier moves upward along the blowing pipe until it contacts the glass substrate in a suspended state;

In the glass placing method of the present invention, a plurality of movable limiting rods are disposed around the base;

The glass placing method further includes: the limiting rod is moved inwardly adjacent to the glass substrate to define the same before or after the mechanical arm releases the glass substrate. The position of the glass substrate.

In the glass placing method of the present invention, the glass carrier includes: a glass carrier body having a placement surface for placing the glass substrate;

The step of moving the glass carrier along the blowing pipe until it contacts the glass substrate in a suspended state includes:

The driving module controls the glass carrier body to move upward along the air blowing pipe until the placement surface is in contact with the glass substrate in a suspended state.

In the glass placing method of the present invention, the interior of the glass carrier body is hollowed out, and an air extraction module is disposed inside the glass carrier body; the placement surface is provided with an adsorption hole;

In the glass placing method of the present invention, the driving module includes: an electric motor and a rotating shaft having a first thread on the surface; one end of the electric motor is fixed to a lower surface of the glass carrier body, and the electric motor is further One end is connected to the rotating shaft to drive the rotating shaft to rotate; the air floating mechanism body is provided with a rotating hole that cooperates with the rotating shaft, and the inner side of the rotating hole is matched with the first thread. Second thread.

In the glass placing method of the present invention, a position corresponding to the rotating hole on the base is provided with a threaded hole that cooperates with the rotating shaft, and the inside of the threaded hole is provided with a first thread that matches the first thread. Two threads.

In the glass placing method of the present invention, the electric motor is fixed at a center position of a lower surface of the glass carrier body, the rotating hole is located at a center position of the air floating mechanism body, and the threaded hole is located at the base The central location of the seat. In the glass placing method of the present invention, the lower surface of the glass carrier is provided with a telescopic rod, and the air floating mechanism body is provided with a telescopic hole connected to the telescopic rod.

In the glass placing method of the present invention, the top end of the blowing pipe is provided with a protective layer so that the glass substrate is not scratched by the tip.

In the glass placing method of the present invention, four movable limit bars are provided around the base. Embodiments of the present invention also provide a glass take-out method, which is implemented by a glass carrying device, the glass carrying device comprising:

Pedestal

An air floating mechanism, the air floating mechanism is fixed on the base;

The air floatation mechanism includes:

An airfoil body that is hollowed out internally;

a blowing pipe, the blowing gas is disposed on an upper surface of the air floating mechanism body and communicates with the air floating mechanism body;

The glass removal method includes the following steps:

After the glass substrate completes the process, the airflow generating module starts to generate a gas flow, and blows the glass substrate on the placement surface through the air blowing pipe, so that the glass substrate is in a suspended state;

The glass carrier moves downward to separate the glass substrate from the placement surface;

Moving the robot arm above the blow pipe and grasping the glass substrate;

After the mechanical arm grasps the glass substrate, the airflow generating module stops generating an airflow, and the robot arm removes the glass substrate by movement.

In the method for removing glass according to the present invention, a plurality of movable limiting rods are disposed around the base;

After the mechanical arm grabs the glass substrate, before the airflow generating module stops generating airflow, the glass removing method further includes: the limiting rod moves from the inside to the outside.

In the glass take-out method of the present invention, the glass carrier includes:

a glass carrier body having a placement surface for placing a glass substrate; the interior of the glass carrier body is hollowed out, and an air extraction module is disposed inside the glass carrier body; Providing an adsorption hole;

The step of moving the glass carrier downward comprises:

The driving module controls the glass carrier body to move downward.

In the glass take-out method of the present invention, the drive module includes: an electric motor and a rotating shaft having a first thread on the surface; one end of the electric motor is fixed to a lower surface of the glass carrier body, and the electric motor is further One end is connected to the rotating shaft to drive the rotating shaft to rotate; the air floating mechanism body is provided with a rotating hole that cooperates with the rotating shaft, and the inner side of the rotating hole is matched with the first thread. Second thread.

In the glass take-out method of the present invention, a position corresponding to the rotating hole on the base is provided with a threaded hole that cooperates with the rotating shaft, and the inside of the threaded hole is provided with a first thread that matches the first thread. Two threads.

In the glass take-out method of the present invention, the lower surface of the glass carrier is provided with a telescopic rod, and the air floating mechanism body is provided with a telescopic hole connected to the telescopic rod.

In the glass take-out method of the present invention, the top end of the blow pipe is provided with a protective layer so that the glass substrate is not scratched by the tip.

In the glass take-out method of the present invention, four movable limit bars are provided around the base.

Beneficial effect

The invention provides a glass placing and removing method; the glass placing and removing method of the invention is implemented by using a new glass carrying device; the process of placing the glass substrate by using the glass carrying device is: the glass is placed in the mechanical arm After the substrate is placed on the air floating mechanism, the air floating mechanism blows the glass substrate to be in a suspended state, and then moves the glass loading table upward to make contact with the glass substrate; it can be seen that when the glass substrate is placed by the glass bearing device, the glass substrate is blown. The gas pipe is not in contact with the glass substrate, and the glass carrier is moved upward to place the glass substrate; the problem that the glass substrate is deteriorated due to the contact of the glass substrate with the blowing pipe (or the support rod) and moving upward together can be avoided, and at the same time, due to the glass bearing The placement surface of the table is actively moved upwards to contact with the glass substrate, so that the entire glass substrate surface is simultaneously in contact with the placement surface, that is, the surface and the surface are simultaneously contacted, thereby avoiding the problem that the glass surface is damaged by the contact of the dots on the glass surface with the placement surface. In addition, since it is necessary to blow the glass substrate before placing it, Suspension, so that the robot arm can easily operate on a glass substrate; glass was placed method of the present invention compared to the prior art, to avoid deterioration of the glass substrate material, thus avoiding the subsequent thinning process will produce undesirable.

The glass removal method of the present invention is also implemented by using the above-mentioned glass bearing device; the process of taking out the glass substrate by using the glass bearing device is: blowing the glass substrate placed on the glass bearing platform after the end of the glass substrate process The glass bearing platform is moved downward to separate from the glass substrate, and finally the mechanical arm takes out the glass substrate; it can be seen that when the glass substrate is taken by the glass bearing device, the blowing tube is not in contact with the glass substrate, and the glass is loaded. The downward movement of the table is separated from the glass substrate actively; the problem of deterioration of the material of the glass substrate caused by the glass substrate contacting the blow pipe (or the support rod) and moving downward together is avoided; in addition, the glass carrier is actively moved downward to the robot arm. A sufficient operation space is provided, so that the robot arm can conveniently grasp and take out the glass substrate; the glass removal method of the present invention can avoid deterioration of the material of the glass substrate compared with the prior art, thereby avoiding the subsequent thinning process. There will be bad in the middle.

DRAWINGS

1 is a schematic structural view of a glass carrying device according to an embodiment of the present invention;

Figure 2 is a side view of the glass carrying device shown in Figure 1;

3 is a schematic structural diagram of an air floating mechanism according to an embodiment of the present invention;

4 is a schematic structural diagram of a glass carrying platform according to an embodiment of the present invention;

FIG. 5 is a schematic structural diagram of a base and a limiting rod according to an embodiment of the present invention; FIG.

Figure 6 is a partial enlarged view of a portion A of Figure 5;

FIG. 7 is a schematic side view of a glass carrier according to an embodiment of the present invention; FIG.

FIG. 8 is a schematic diagram of placing a glass substrate by using a glass carrier according to an embodiment of the present invention; FIG.

FIG. 9 is a schematic diagram of another glass substrate placed on a glass carrier according to an embodiment of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION

The following description of the various embodiments is provided to illustrate the specific embodiments of the invention. The directional terms mentioned in the present invention, such as "upper", "lower", "before", "after", "left", "right", "inside", "outside", "side", etc., are merely references. Attach the direction of the drawing. Therefore, the directional terminology used is for the purpose of illustration and understanding of the invention. In the figures, structurally similar elements are denoted by the same reference numerals.

Referring to FIG. 1-7, the embodiment provides a glass bearing device, comprising: a base 101, an air floating mechanism 102, and a glass loading platform 103 movable up and down. The glass bearing frame has a glass substrate for placing the glass substrate. Placement surface 1031;

The air floating mechanism 102 is fixed on the base 101. The air floating mechanism 102 includes: an air floating mechanism body 1021 that is internally hollowed out, and an airflow generated in the air floating mechanism body 1021 for generating airflow. a module (not shown), and an air blowing tube 1022 disposed on an upper surface of the air floating mechanism body 1021 and in communication with the air floating mechanism body, with reference to FIGS. 2 and 3;

The glass bearing platform 103 is located above the air floating mechanism 102, and is provided with a blowing hole 1032 corresponding to the blowing pipe 1022, the blowing pipe 1022 passes through the corresponding blowing hole 1032, refer to FIG. 4;

In order to control the offset or slip of the glass substrate in the floating state, that is, to limit the position of the suspension of the glass substrate; in the embodiment, the plurality of movable limiting rods 104 are disposed around the base 101 (this embodiment The four limiting rods are taken as an example; when the limiting position, the limiting rod 104 slides inwardly close to the glass substrate, and the limiting rod 104 moves from the inside to the outside away from the glass substrate when the position is not limited, referring to FIGS. 1 and 2; specifically, FIG. As shown, four limit rods 104 are respectively disposed on the four sides of the base 101. The base 101 is provided with a sliding slot 1011, and one end of the limiting rod 104 is inserted into the sliding slot 1011, and Moves within the sliding groove 1011.

In this embodiment, the number of the limit bars can be set according to actual needs, and the more the limit bar is, the better the limit effect is.

In this embodiment, the glass loading platform 103 can be moved up and down by setting a driving module to control the glass loading table 103 to move up and down. Preferably, the driving module in this embodiment may be composed of an electric motor and a rotating shaft. It should be understood that the driving module in this embodiment is not limited to being composed of an electric motor and a rotating shaft, but may also be an assembly that can move up and down by other driveable glass carriers.

As shown in FIG. 1, 2, 3, and 7, the glass carrier table 103 in this embodiment may include: a glass carrier body 1033, an electric motor 1034, and a rotating shaft 1035 having a first thread on the surface; the glass carrier body 1033 has a placement surface 1031 for placing a glass substrate; the glass carrier body 1033 is provided with a blow hole 1032 corresponding to the blow pipe 1022. One end of the electric motor 1034 is fixed to a lower surface of the glass carrier body 1033. The other end of the electric motor 1034 is coupled to the rotating shaft 1035 to drive the rotating shaft 1035 to rotate;

In the embodiment, the air floating mechanism body 1021 is provided with a rotating hole 1023 that cooperates with the rotating shaft 1035. Referring to FIG. 3, the rotating hole 1023 has a second thread that is matched with the first thread. When the glass carrier body 1033 needs to move upward, the electric motor 1034 drives the rotating shaft 1035 to rotate, and the first thread on the rotating shaft 1035 cooperates with the second thread in the rotating hole 1023 to move the rotating shaft 1035 upward or downward, thereby rotating the shaft 1035. The glass carrier body 1033 is driven to move up or down. In order to make the glass carrier table move up or down by a sufficient distance, in the embodiment, the base 101 may be provided with a threaded hole 1011 in the middle thereof, the threaded hole 1011 is matched with the rotating shaft 1035; the rotating shaft 1035 passes through the rotating hole. After 1023, the downward movement with the threaded hole 1011 continues.

In order to enable the glass substrate to be in close contact with the placement surface 1031, in this embodiment, the glass substrate can be brought into close contact with the placement surface 1031 by means of a negative pressure formed by evacuating the holes. Referring to FIG. 4, the interior of the glass carrier body 1033 is hollowed out, and the interior of the glass carrier body 1033 is provided with an air extraction module (not shown); the placement surface 1032 is provided with an adsorption hole 1036. After the glass carrier body 1033 is in contact with the glass substrate, the air suction module can pump the adsorption hole 1036, and the adsorption hole 1036 forms a negative pressure so that the glass substrate is in close contact with the placement surface 1032.

In order to be able to resist the rotational moment caused by the rotation of the electric motor 1034, referring to FIGS. 1-4 and 7, the lower surface of the glass carrier body 1033 of the present embodiment is provided with a telescopic rod 1037, and the air floating mechanism body 1021 is provided with The telescopic hole 1024 is connected to the telescopic rod 1037; when the motor 1034 rotates, the glass carrier body 133 is driven to move up and down. The telescopic rod 1037 on the corner is used to resist the rotational moment caused by the rotation of the motor 1034, with reference to Figures 1, 2, 3 and 4.

In order to prevent the blow pipe 1022 from accidentally scratching the glass substrate, the present embodiment may provide a protective layer on the top end of the blow pipe 1022, for example, providing plastic protection.

The process of placing a glass substrate by using the glass carrying device of the embodiment is specifically described below with reference to the accompanying drawings, including the following steps:

S101, the robot arm grabs the glass substrate 105, and sends the glass substrate 105 to the upper portion of the air blowing tube 1022 by moving.

Specifically, the robot arm can grasp the glass substrate 105 by the adsorption force, and then the robot arm moves the glass substrate 105 over the air blowing tube 1022 by moving.

S102, the airflow production module in the air-floating mechanism 102 starts to generate airflow, blows the glass substrate 105 through the air-blowing tube 1022, and the mechanical arm releases the glass substrate 105, so that the glass substrate 105 is in a suspended state, refer to FIG.

In this embodiment, the air floating mechanism 102 can blow the glass substrate 105 through the air blowing tube 1022 to be in a suspended state. In order to ensure that the glass substrate does not float, the air flow and pressure of the air blowing pipe need to be adjusted by a valve, and the buoyancy is equal to the gravity of the glass substrate. optimal.

S103, the limiting rod 104 moves inwardly close to the glass substrate 105 to limit the floating position of the glass substrate 105.

In the process of placing the glass substrate in this embodiment, the movement of the limiting rod and the release of the glass substrate by the mechanical arm can be performed simultaneously. For example, while the mechanical arm releases the adsorption force, the limiting rod moves inwardly to the glass substrate 105.

S104, the mechanical arm is withdrawn, and the electric motor 1034 drives the rotating shaft 1035 to rotate. When the rotating shaft rotates, the glass carrier body 1033 is driven to move up along the blowing pipe 1022 until the placing surface 1031 is in contact with the glass substrate 105. Referring to FIG.

S105, after the placement surface 1031 is in contact with the glass substrate 105, the airflow generation module in the air-floating mechanism 102 stops generating airflow, so that the glass substrate 105 is placed on the placement surface 1031 of the glass carrier.

S106, the air suction module in the glass carrying platform 103 sucks the adsorption hole to form a negative pressure on the adsorption hole 1036, so that the glass substrate 105 is in close contact with the placement surface 1031.

After the glass substrate 105 is placed on the glass carrying platform 103, the glass carrier can be freely moved within the processing chamber to complete the scanning or plating.

It can be seen that when the glass substrate is placed by the glass bearing device of the embodiment, the blowing pipe is not in contact with the glass substrate, and the glass carrier is moved upward to place the glass substrate; the glass substrate can be prevented from contacting the blowing pipe (or the supporting rod) and moving upward together. The problem of deterioration of the material of the glass substrate caused by the movement;

At the same time, since the placement surface of the glass carrier is actively moved upward to contact with the glass substrate, the entire surface of the glass substrate can be simultaneously contacted with the placement surface, that is, the surface and the surface are simultaneously contacted, thereby avoiding the contact of the dots on the surface of the glass substrate with the placement surface. Glass substrate damage problem;

In addition, since the glass substrate needs to be blown to be in a suspended state before being placed, the robot can conveniently operate the glass substrate; the glass placing method of the present invention can avoid deterioration of the material of the glass substrate compared with the prior art. In addition, it avoids the occurrence of defects in the subsequent thinning process, such as generating dimple, improving yield, reducing cost, and improving competitiveness.

The process of taking out the glass substrate by using the glass carrying device of the embodiment is specifically described below, and includes the following steps:

S201, after the glass substrate 105 completes the process, the airflow production module in the air-floating mechanism 102 starts to generate airflow, and blows the glass substrate 105 on the placement surface 1031 through the air-blowing tube 1022, destroying the negative pressure of the adsorption hole 1036, and causing the The glass substrate is in a suspended state.

S202, the electric motor 1034 drives the rotating shaft 1035 to rotate, and the rotating shaft 1035 rotates to drive the glass carrier body 1033 to move downward along the blowing pipe 1022 to separate the glass carrier body 1033 from the glass substrate 105.

S203, the robot arm protrudes above the blowing pipe 1022 and grasps the glass substrate 105. Specifically, the glass substrate 105 can be grasped by adsorption.

S204, the limiting rod 104 moves outward, while the air floating mechanism 102 stops blowing, and the mechanical arm moves the glass substrate 105 out by movement.

It can be seen that when the glass substrate is taken by the glass bearing device of the embodiment, the blowing pipe is not in contact with the glass substrate, and the glass carrier is moved downward to actively separate from the glass substrate; the glass substrate is prevented from contacting the blowing pipe (or the supporting rod). The problem of deterioration of the material of the glass substrate caused by moving down together;

In addition, in the embodiment, the glass carrying platform actively moves downward to reserve sufficient operating space for the robot arm, so that the robot arm can conveniently grasp and take out the glass substrate; the glass substrate removing method of the present invention is related to the prior art. In comparison, the deterioration of the material of the glass substrate can be avoided, thereby avoiding the occurrence of defects in the subsequent thinning process.

It should be understood that the glass carrying device of the embodiment can place and take out the glass substrate without providing a limiting rod. Of course, setting the limiting rod makes it easier to place the glass substrate.

It should be understood that although the embodiment only describes the manner in which the threaded rotating shaft cooperates with the threaded rotating hole to realize the up and down movement of the glass substrate carrying platform, the implementation manner of the glass substrate carrying table moving up and down in this embodiment Other ways can also be included.

In the above, the present invention has been disclosed in the above preferred embodiments, but the preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various modifications without departing from the spirit and scope of the invention. The invention is modified and retouched, and the scope of the invention is defined by the scope defined by the claims.

Claims

A glass placement method is implemented by using a glass carrying device, the glass carrying device comprising:

a base, the base is provided with a plurality of movable limiting rods around the base;

An air floating mechanism, the air floating mechanism is fixed on the base;

a glass carrying platform movable up and down, the glass carrying platform being located above the air floating mechanism;

The air floatation mechanism includes:

An airfoil body that is hollowed out internally;

a user generates a gas flow production module of the air flow, and the air flow production module is disposed in the air float mechanism body;

a blowing pipe disposed on an upper surface of the air floating mechanism body and communicating with the air floating mechanism body;

The glass carrier includes:

a glass carrier body having a placement surface for placing a glass substrate, the glass carrier body being provided with a blow hole corresponding to the blow pipe, and the blow pipe passes the corresponding blow Stomata;

a driving module for controlling movement of the glass carrier body up and down;

The glass placement method includes the following steps:

The robot arm grabs the glass substrate and sends the glass substrate to the top of the blow pipe by moving;

The airflow generating module in the air floating mechanism starts to generate an airflow, and the glass is blown through the air blowing pipe;

The mechanical arm releases the glass substrate such that the glass substrate is in a suspended state;

The limiting rod is moved inwardly adjacent to the glass substrate to define a position of the glass substrate;

The driving module controls the glass carrier body to move upward along the air blowing pipe until the placement surface is in contact with the glass substrate in a suspended state;

After the glass carrier contacts the glass, the airflow generating module in the air flotation mechanism stops generating airflow such that the glass substrate is placed on the placement surface of the glass carrier.
The glass placing method according to claim 1, wherein

The inside of the glass carrier body is hollowed out, and a pumping module is disposed inside the glass carrier body;

The placement surface is provided with an adsorption hole;

After the airflow generating module stops generating the airflow, the glass placing method further includes:

The air suction module suctions the adsorption hole to form a negative pressure on the adsorption hole, so that the glass substrate is in close contact with the placement surface.
A glass placement method is implemented by using a glass carrying device, the glass carrying device comprising:

Pedestal

An air floating mechanism, the air floating mechanism is fixed on the base;

a glass carrying platform movable up and down, the glass bearing platform being located above the air floating mechanism, the glass bearing platform having a placing surface for placing the glass substrate;

The air floatation mechanism includes:

An airfoil body that is hollowed out internally;

An airflow generating module for generating an airflow, the airflow generating module being disposed in the airfoil body;

a blowing pipe, the blowing pipe is disposed on an upper surface of the air floating mechanism body and communicates with the air floating mechanism body;

The glass bearing platform is provided with a blowing hole corresponding to the blowing pipe, and the blowing pipe passes through the corresponding blowing hole;

The glass placement method includes the following steps:

The robot arm grabs the glass substrate and sends the glass substrate to the top of the blow pipe by moving;

The airflow generating module in the air floating mechanism starts to generate an airflow, and the glass is blown through the air blowing pipe;

The mechanical arm releases the glass substrate such that the glass substrate is in a suspended state;

The glass carrier moves upward along the blowing pipe until it contacts the glass substrate in a suspended state;

After the glass carrier contacts the glass, the airflow generating module in the air flotation mechanism stops generating airflow such that the glass substrate is placed on the placement surface of the glass carrier.
The glass placing method according to claim 3, wherein the base is provided with a plurality of movable limiting rods around the base;

The glass placing method further includes: the limiting rod is moved inwardly adjacent to the glass substrate to define the same before or after the mechanical arm releases the glass substrate. The position of the glass substrate.
The glass placing method according to claim 3, wherein said glass carrier comprises:

a glass carrier body having a placement surface for placing a glass substrate;

a driving module for controlling the up-and-down movement of the glass carrier body; the step of moving the glass carrier table along the blowing pipe until the glass substrate is in a suspended state comprises:

The driving module controls the glass carrier body to move upward along the air blowing pipe until the placement surface is in contact with the glass substrate in a suspended state.
The method of placing a glass according to claim 5, wherein the interior of the glass carrier body is hollowed out, and an air extraction module is disposed inside the glass carrier body; and the placement surface is provided with an adsorption hole;

After the airflow generating module stops generating the airflow, the glass placing method further includes:

The air suction module suctions the adsorption hole to form a negative pressure on the adsorption hole, so that the glass substrate is in close contact with the placement surface.
The glass placing method according to claim 5, wherein the driving module comprises: an electric motor and a rotating shaft having a first thread on the surface; and one end of the electric motor is fixed to a lower surface of the glass carrier body, the electric The other end of the motor is connected to the rotating shaft to drive the rotating shaft to rotate; the air floating mechanism body is provided with a rotating hole that cooperates with the rotating shaft, and the inside of the rotating hole is provided with the first The second thread of the thread is anastomosed.
The glass placing method according to claim 7, wherein a position corresponding to the rotating hole on the base is provided with a threaded hole that cooperates with the rotating shaft, and the inside of the threaded hole is provided with the first thread The second thread that fits.
The glass placing method according to claim 8, wherein said electric motor is fixed at a center position of a lower surface of said glass carrier body, said rotating hole being located at a center position of said air floating mechanism body, said threaded hole being located The center position of the base.
The glass placing method according to claim 7, wherein a lower surface of the glass carrier is provided with a telescopic rod, and the air floating mechanism body is provided with a telescopic hole connected to the telescopic rod.
The glass placing method according to claim 3, wherein a top end of the blowing pipe is provided with a protective layer so that the glass substrate is not scratched by the top end.
The glass placing method according to claim 4, wherein said base is provided with four movable stoppers around the base.
A glass removal method is implemented by using a glass carrying device, the glass carrying device comprising:

Pedestal

An air floating mechanism, the air floating mechanism is fixed on the base;

a glass carrying platform movable up and down, the glass bearing platform being located above the air floating mechanism, the glass bearing platform having a placing surface for placing the glass substrate;

The air floatation mechanism includes:

An airfoil body that is hollowed out internally;

An airflow generating module for generating an airflow, the airflow generating module being disposed in the airfoil body;

a blowing pipe, the blowing gas is disposed on an upper surface of the air floating mechanism body and communicates with the air floating mechanism body;

The glass bearing platform is provided with a blowing hole corresponding to the blowing pipe, and the blowing pipe passes through the corresponding blowing hole;

The glass removal method includes the following steps:

After the glass substrate completes the process, the airflow generating module starts to generate a gas flow, and blows the glass substrate on the placement surface through the air blowing pipe, so that the glass substrate is in a suspended state;

The glass carrier moves downward to separate the glass substrate from the placement surface;

Moving the robot arm above the blow pipe and grasping the glass substrate;

After the mechanical arm grasps the glass substrate, the airflow generating module stops generating an airflow, and the robot arm removes the glass substrate by movement.
The method for removing glass according to claim 13, wherein a plurality of movable limiting bars are disposed around the base;

After the mechanical arm grabs the glass substrate, before the airflow generating module stops generating airflow, the glass removing method further includes: the limiting rod moves from the inside to the outside.
The glass take-out method according to claim 13, wherein said glass carrier comprises:

a glass carrier body having a placement surface for placing a glass substrate; the interior of the glass carrier body is hollowed out, and an air extraction module is disposed inside the glass carrier body; Providing an adsorption hole;

a driving module for controlling movement of the glass carrier body up and down; the step of moving the glass carrier downward:

The driving module controls the glass carrier body to move downward.
The glass take-out method according to claim 15, wherein the driving module comprises: an electric motor and a rotating shaft having a first thread on the surface; and one end of the electric motor is fixed to a lower surface of the glass carrier body, the electric The other end of the motor is connected to the rotating shaft to drive the rotating shaft to rotate; the air floating mechanism body is provided with a rotating hole that cooperates with the rotating shaft, and the inside of the rotating hole is provided with the first The second thread of the thread is anastomosed.
The glass take-out method according to claim 16, wherein a position corresponding to the rotating hole on the base is provided with a threaded hole that cooperates with the rotating shaft, and the inside of the threaded hole is provided with the first thread The second thread that fits.
The glass take-out method according to claim 16, wherein a lower surface of the glass carrier is provided with a telescopic rod, and the air floating mechanism body is provided with a telescopic hole connected to the telescopic rod.
The glass take-out method according to claim 13, wherein a top end of the blow pipe is provided with a protective layer so that the glass substrate is not scratched by the top end.
The glass take-out method according to claim 14, wherein four movable rods are provided around the base.