CN202443210U - Substrate conveying robot and substrate test conveying system - Google Patents
Substrate conveying robot and substrate test conveying system Download PDFInfo
- Publication number
- CN202443210U CN202443210U CN2011202992747U CN201120299274U CN202443210U CN 202443210 U CN202443210 U CN 202443210U CN 2011202992747 U CN2011202992747 U CN 2011202992747U CN 201120299274 U CN201120299274 U CN 201120299274U CN 202443210 U CN202443210 U CN 202443210U
- Authority
- CN
- China
- Prior art keywords
- substrate
- microscope carrier
- arm
- tester
- tester substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a substrate test carrying table, a substrate conveying robot, and a substrate test conveying system, relating to the manufacturing field of liquid crystal panels. On the premise that the bottom surface of the carrying table is an integrated body, a substrate can be quickly taken and placed. a plurality of pores are arranged in the tabletop of the substrate test carrying table, the pores are connected to a carrying table blowing and inhalation device; a substrate moving part is arranged on the substrate test carrying table; at least one sensor is arranged at the inlet of the substrate test carrying table; and a carrying table control device is connected to the sensor, the carrying table blowing and inhalation device, and the substrate moving part. The substrate conveying robot includes a robot body and arms arranged on the robot body, and further includes adsorption modules arranged on the arms and moving along the length direction of the arms; a driving device connected to the adsorption modules; and an arm control device connected to the adsorption modules and the driving device. The substrate test carrying table, the substrate conveying robot, and the substrate test conveying system are applied to the tests in the substrate conveying and liquid crystal panel manufacturing fields.
Description
Technical field
The utility model relates to liquid crystal panel and makes the field, relates in particular to a kind of tester substrate microscope carrier, substrate transferring robot and tester substrate handling system.
Background technology
At present, when glass substrate is taken from the tester substrate microscope carrier by the substrate transferring robot, need to wait for that the pillar on the microscope carrier supports glass substrate, robot arm is inserted into below the glass substrate then, and glass substrate is taken away.When the tester substrate microscope carrier is placed glass substrate, need equally to wait for that pillar supports glass substrate.
Under this mode of taking, substrate transferring robot conveyance glass substrate will wait for all that at every turn the pillar on the microscope carrier is raised to certain altitude, and the stand-by period is longer, has wasted great amount of time.
The another kind mode of taking is, the tester substrate microscope carrier adopts bar palisade base plate, and robot arm can reach the centre of base plate bar like this, directly glass substrate is taken away.
But this moment bar palisade base plate the tester substrate microscope carrier on a lot of parts are arranged is unsettled, deformation takes place easily, place glass substrate on it and for example can't carry out tests such as electrical testing.
The utility model content
The embodiment of the utility model provides a kind of tester substrate microscope carrier, substrate transferring robot and tester substrate handling system, and the microscope carrier bottom surface is an integral body, and can the quick fetching substrate.
For achieving the above object, the embodiment of the utility model adopts following technical scheme:
On the one hand, a kind of substrate transferring robot is provided, comprises robot body, and be positioned at the arm on the said robot body, also comprise:
Said arm is provided with the adsorption module that can move along said arm length direction;
Drive unit is connected with said adsorption module;
The arm control device is connected with said drive unit with said adsorption module.
Said arm length direction is provided with track in said arm upper edge, and said adsorption module is arranged on the said track movably.
Also be provided with a plurality of pores of arranging along said arm length direction on the said arm, said pore is connected with arm air blowing getter device, and said arm air blowing getter device is connected with said arm control device.
Also be provided with at least one sensor on the said arm, said sensor is connected with said arm control device.
Drive unit comprises linear motor, or motor, screw mandrel transfer system.
On the one hand, a kind of tester substrate handling system is provided, comprises tester substrate microscope carrier and substrate transferring robot, the table top of said tester substrate microscope carrier is provided with a plurality of pores, and said pore is connected with microscope carrier air blowing getter device; Said tester substrate microscope carrier is provided with the substrate moving part; At least one sensor is arranged on the porch of said tester substrate microscope carrier; Stage control apparatus is connected with said sensor, microscope carrier air blowing getter device and said substrate moving part;
Said substrate transferring robot comprises robot body, and is positioned at the arm on the said robot body, also comprises: said arm is provided with the adsorption module that can move along said arm length direction; Drive unit is connected with said adsorption module; The arm control device is connected with said drive unit with said adsorption module.
Said substrate moving part comprises:
Be arranged on the porch of said tester substrate microscope carrier, from first anchor clamps that move to said tester substrate microscope carrier away from said tester substrate microscope carrier; With
Be arranged on the top of said tester substrate microscope carrier, second anchor clamps to said tester substrate microscope carrier medial movement from said tester substrate microscope carrier top.
Be provided with the substrate limiting section in the both sides of said tester substrate microscope carrier.
Said substrate limiting section comprises:
Be arranged on a side of said tester substrate microscope carrier, from the 3rd anchor clamps that move to said tester substrate microscope carrier away from said tester substrate microscope carrier; With
Be arranged on the opposite side of said tester substrate microscope carrier, from the 4th anchor clamps that move to said tester substrate microscope carrier away from said tester substrate microscope carrier;
Said the 3rd anchor clamps, the 4th anchor clamps are connected with said stage control apparatus.
The tester substrate microscope carrier that the utility model provides, substrate transferring robot and tester substrate handling system; A plurality of pores that the table top of tester substrate microscope carrier is provided with, this pore is connected with microscope carrier air blowing getter device, also is provided with the substrate moving part on the tester substrate microscope carrier; Has a sensor at least; Be arranged on the porch of tester substrate microscope carrier, stage control apparatus is connected with sensor, microscope carrier air blowing getter device and substrate moving part.The substrate transferring robot comprises robot body, and is positioned at the arm on the robot body; Also comprise: arm is provided with the adsorption module that can move along the arm length direction; Be provided with the drive unit that is connected with adsorption module, the arm control device is connected with drive unit with adsorption module.So, when transmitting glass substrate, because the tester substrate microscope carrier is provided with the pore that connects the air blowing getter device; Be provided with drive unit and adsorption module movably on the substrate transferring robot arm again, so glass substrate can suspend and move on the microscope carrier, it is auxiliary to need not pillar etc.; Practiced thrift the time, increased efficient, and the microscope carrier bottom surface is an integral body; Substrate is not easy to produce deformation, is convenient to carry out for example dependence test such as electrical testing.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiment of the utility model, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
The tester substrate microscope carrier structural representation that Fig. 1 provides for the utility model embodiment;
The tester substrate microscope carrier anchor clamps working position synoptic diagram that Fig. 2 provides for the utility model embodiment;
The substrate transferring robot architecture synoptic diagram that Fig. 3 provides for the utility model embodiment;
The substrate transferring robot architecture synoptic diagram that Fig. 4 provides for another embodiment of the utility model;
The structural representation of the tester substrate handling system that Fig. 5 provides for the utility model embodiment;
The substrate fetching process synoptic diagram one that Fig. 6 provides for the utility model embodiment;
The substrate fetching process synoptic diagram two that Fig. 7 provides for the utility model embodiment;
The substrate fetching process synoptic diagram three that Fig. 8 provides for the utility model embodiment;
The substrate fetching process synoptic diagram four that Fig. 9 provides for the utility model embodiment.
Embodiment
To combine the accompanying drawing among the utility model embodiment below, the technical scheme among the utility model embodiment is carried out clear, intactly description, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
Embodiment one
The tester substrate microscope carrier 100 that the utility model embodiment provides, as shown in Figure 1, the table top 10 of tester substrate microscope carrier 100 is provided with a plurality of pores 101, and this pore 101 is connected with microscope carrier air blowing getter device 102; Tester substrate microscope carrier 100 is provided with substrate moving part 11; At least one sensor device 12 is arranged on the porch of tester substrate microscope carrier 100; Stage control apparatus 13 is connected with said sensor 12, microscope carrier air blowing getter device 102 and said substrate moving part 11.
The tester substrate microscope carrier that the utility model embodiment provides, table top is provided with pore, therefore; Substrate can be at the air-flow effect low suspension on this table top; Under the assistance of substrate moving part, can substrate be pushed or release microscope carrier, compared to existing technologies, need not to wait for the rise of pillar; Practice thrift the time, improved efficient.
Further, substrate moving part 11 can comprise the porch that is arranged on tester substrate microscope carrier 100, from first anchor clamps 113,114 that move to tester substrate microscope carrier 100 away from tester substrate microscope carrier 100; With the top that is arranged on tester substrate microscope carrier 100, from tester substrate microscope carrier 100 tops to second anchor clamps 111,112 of tester substrate microscope carrier 100 medial movement.And first anchor clamps, 113,114, the second anchor clamps 111,112 are connected with stage control apparatus 13.
In addition; The both sides of tester substrate microscope carrier 100 also are provided with substrate limiting section 14; This substrate limiting section 14 in the present embodiment can be for being arranged on a side of tester substrate microscope carrier 100, from the 3rd anchor clamps 141,142 that move to the tester substrate microscope carrier away from tester substrate microscope carrier 100; With the opposite side that is arranged on tester substrate microscope carrier 100, from the 4th anchor clamps 143,144 that move to tester substrate microscope carrier 100 away from the tester substrate microscope carrier.And the 3rd anchor clamps 141,142, the four anchor clamps 143,144 are connected with stage control apparatus 13.Can prevent the substrate skew like this.
Substrate pushing, releasing and locating on microscope carrier can be realized through above-mentioned eight anchor clamps, the loading or unloading operation of substrate can be carried out rapidly and accurately.
In addition, sensor 12 is positioned at the porch of tester substrate microscope carrier 100, arrives inlet in case carry the substrate transferring robot of glass substrate, and sensor 12 just can perception, and indication stage control apparatus 13 substrate of being correlated with pushes and assists to operate.
The position of eight anchor clamps is as shown in Figure 2, and to first anchor clamps 113,114, its position away from tester substrate microscope carrier 100 is some G, H place, locates for a G ', H ' near the position of tester substrate microscope carrier 100.To second anchor clamps 111,112, its position that is positioned at tester substrate microscope carrier 100 tops is some A, B place, is positioned at tester substrate microscope carrier 100 inboard positions and locates for some A ', B '.To the 3rd anchor clamps 141,142, its position away from tester substrate microscope carrier 100 is some C, D place, locates for a C ', D ' near the position of tester substrate microscope carrier 100.To the 4th anchor clamps 143,144, its position away from tester substrate microscope carrier 100 is some E, F place, locates for an E ', F ' near the position of tester substrate microscope carrier 100.
Embodiment two
The substrate transferring robot 200 that the utility model embodiment provides; As shown in Figure 3; Comprise robot body 20, and be positioned at the arm 21 on the robot body 20, also comprise: what be provided with on the arm 21 can be along the mobile adsorption module 212 of arm 21 length directions (being directions X among Fig. 3); Drive unit 22 is connected with adsorption module 212; Arm control device 23 is connected with drive unit 22 with adsorption module 212, is used to control adsorption module and drive unit etc.
Like this, being placed on glass substrate on the arm 21, can be adsorbed module 212 adsorbed, and under the drive of drive unit 22, follow adsorption module 212 and move, thereby can realize picking and placeing of glass substrate.
Embodiment three
In the conveyance robot 200 that another embodiment of the utility model provides, as shown in Figure 4, arm 21 upper edge arms 21 length directions also are provided with track 213, and adsorption module 212 is arranged on the track 213 movably.In addition; Also be provided with a plurality of pores 215 of arranging along arm 21 length directions (directions X among Fig. 4) on the arm 21; This pore 215 is connected with arm air blowing getter device (not expression among Fig. 4), and arm air blowing getter device also is connected (not expression among Fig. 4) and connects with the arm control device.Arm air blowing getter device is in suction condition when the conveyance glass substrate, when pushing or taking glass substrate, be in the air blowing state.
Further, also be provided with at least one sensor on this arm, this sensor is connected with the arm control device.In the present embodiment, arm 21 is provided with three groups of sensors, limit sensors 211, first detecting sensor 214, second detecting sensor 2121; Wherein, Spacing sensor 211 is positioned on the arm near robot body 20 places; Be used to prevent that arm is too deep when in the chest of depositing glass substrate, getting glass substrate, spacing sensor 211 inductions are less than glass substrate, in the arm rotation when running well; If rotation has taken place in the position of glass substrate; Glass substrate will be pressed on the spacing sensor 211 so, and spacing sensor 211 sends induced signal to the arm control device, and arm control device control conveyance robot 200 stops at once and reports to the police.
First detecting sensor 214 is positioned at the arm front end; Second detecting sensor 2121 is positioned on the adsorption module 212, and when on the arm glass substrate being arranged, first detecting sensor 214, second detecting sensor 2121 all should be able to perceive glass substrate; When perception during less than glass substrate; Send induced signal to the arm control device, confirm to occur unusually, the robot of conveyance at this moment 200 stops at once and reports to the police.
Need to prove inductor can also judge whether substrate deflection etc. occurs, its effect is identical with setting and prior art, is not described in detail at this.
In the present embodiment, adsorption module 212 can be the vacuum suction module.Drive unit can be a linear motor, or motor, screw mandrel transfer system etc.
The conveyance robot that the utility model embodiment provides; Arm is provided with drive unit, and the drive device drives adsorption module moves along the arm length direction, and glass substrate is pushed to microscope carrier from arm; Or take from microscope carrier; Can the Rapid Realization substrate under the cooperation of the tester substrate microscope carrier that the foregoing description provides pick and place practiced thrift the time, increased efficient.
Embodiment four
The tester substrate handling system that the utility model embodiment provides, as shown in Figure 5.This tester substrate carrying system comprises tester substrate microscope carrier 100 and substrate transferring robot 200.Wherein, the table top of tester substrate microscope carrier 100 is provided with a plurality of pores 101, and pore 101 is connected with microscope carrier air blowing getter device (not expression among Fig. 5); Tester substrate microscope carrier 100 is provided with substrate moving part 11; At least one sensor 12 is arranged on the porch of tester substrate microscope carrier 100; Stage control apparatus (not expression among Fig. 5) is connected with sensor 12, microscope carrier air blowing getter device and substrate moving part.
The tester substrate handling system that the utility model embodiment provides is because tester substrate microscope carrier and substrate transferring robot are equipped with pore, therefore; In picking and placeing the substrate process, substrate is in suspended state, need not to wait for the rise of microscope carrier pillar; Practice thrift the time, improved efficient.
The process of through Fig. 6 to Fig. 9 the tester substrate handling system being fetched and delivered substrate below describes.
As shown in Figure 6; When substrate transferring robot 200 moves to tester substrate microscope carrier 100 porch; Sensor (not expression among Fig. 6) device that is positioned at the tester substrate microscope carrier 100 of porch perceives, and then notice stage control apparatus (not expression among Fig. 6) control microscope carrier air blowing getter device (not expression among Fig. 6) and substrate moving part (i.e. eight anchor clamps).At this moment, the position of eight anchor clamps is as shown in Figure 6, and second anchor clamps 111,112 lay respectively at the inboard position of tester substrate microscope carrier 100, promptly puts A ', B ' locates.G, H place are promptly put in the position that first anchor clamps 113,114 lay respectively at away from tester substrate microscope carrier 100.C, D place are promptly put in the position that the 3rd anchor clamps 141,142 lay respectively at away from tester substrate microscope carrier 100, and E, F place are promptly put in the position that the 4th anchor clamps 143,144 lay respectively at away from tester substrate microscope carrier 100.And first anchor clamps 113,114 are in the decline state, can not influence pushing of substrate.At this moment, the pore on the tester substrate microscope carrier 100 begins to blow.
As shown in Figure 7, substrate transferring robot 200 utilizes the adsorption module on the arm 21 under the drive of drive unit, to push substrate to tester substrate microscope carrier 100.At this moment, be that pore also begins to blow afloat on the arm 21, substrate is pushed the apical position place that second anchor clamps 111,112 on the tester substrate microscope carrier 100 move to tester substrate microscope carrier 100 to, promptly puts A, B place, so that do not hinder pushing of substrate.Simultaneously; The 3rd anchor clamps 141,142; The 4th anchor clamps 143,144 move to the position near tester substrate microscope carrier 100 from the position away from tester substrate microscope carrier 100, promptly put C ', D ', E ', F ' and locate, and squint on tester substrate microscope carrier 100 to prevent substrate.
After the substrate major part has got into tester substrate microscope carrier 100; As shown in Figure 8; First anchor clamps 113,114 rise; And the edge that promotes substrate is to moving near the position of tester substrate microscope carrier 100, and G ' is promptly put, H ' locates in the position that final first anchor clamps 113,114 arrive near tester substrate microscope carrier 100.At this moment, substrate is pushed on the tester substrate microscope carrier 100 fully, and the pore on the tester substrate microscope carrier 100 gets into suction condition.Get back to position after first anchor clamps 113,114 push, promptly put G, H place, and fall once more, so that the substrate after not hindering takes out operation away from tester substrate microscope carrier 100.
To after being positioned at substrate on the tester substrate microscope carrier 100 and carrying out dependence test, substrate transferring robot 200 moves to the porch of tester substrate microscope carrier 100 once more.As shown in Figure 9; Sensor (not expression among Fig. 9) device that is positioned at the tester substrate microscope carrier 100 of porch once more perceives, and then notice stage control apparatus (not expression among Fig. 9) control microscope carrier air blowing getter device (not expression among Fig. 9) and substrate moving part (i.e. eight anchor clamps).At this moment; Pore on the tester substrate microscope carrier 100 begins to blow once more; Second anchor clamps 111,112 move to the inner side of tester substrate microscope carrier 100 from the apical position promotion substrate of tester substrate microscope carrier 100, and final second anchor clamps 111,112 are positioned at an A ', B ' locates.Under the promotion of second anchor clamps 111,112, an end of substrate leans out tester substrate microscope carrier 100, moves on the arm 21 of substrate transferring robot 200; Adsorption module by on the arm 21 is adsorbed, and under the drive of drive unit, adsorption module is to the side shifting near robot body afterwards; Thereby with base plate carrying on arm 21; The pore that be positioned on the arm 21 this moment is in the state of blowing afloat, and in other conveyance processes of robot, pore can be in suction condition.
In addition, in the whole base plate fetching process, each sensor working is identical with prior art, can find, adjust substrate skew etc., repeats no more at this.
Need to prove; Substrate moving part in the above-mentioned present embodiment, sensor, adsorption module, drive unit; Just illustrate, present embodiment is not limited to this, and other forms of substrate moving part, sensor, adsorption module, drive unit also should be in the protection domains of present embodiment.
The above; Be merely the embodiment of the utility model; But the protection domain of the utility model is not limited thereto; Any technician who is familiar with the present technique field can expect changing or replacement in the technical scope that the utility model discloses easily, all should be encompassed within the protection domain of the utility model.Therefore, the protection domain of the utility model should be as the criterion with the protection domain of said claim.
Claims (9)
1. a substrate transferring robot comprises robot body, and is positioned at the arm on the said robot body, it is characterized in that, comprising:
Said arm is provided with the adsorption module that can move along said arm length direction;
Drive unit is connected with said adsorption module;
The arm control device is connected with said drive unit with said adsorption module.
2. substrate transferring according to claim 1 robot is characterized in that said arm length direction is provided with track in said arm upper edge, and said adsorption module is arranged on the said track movably.
3. substrate transferring according to claim 2 robot; It is characterized in that; Also be provided with a plurality of pores of arranging along said arm length direction on the said arm, said pore is connected with arm air blowing getter device, and said arm air blowing getter device is connected with said arm control device.
4. according to claim 2 or 3 described substrate transferring robots, it is characterized in that also be provided with at least one sensor on the said arm, said sensor is connected with said arm control device.
5. substrate transferring according to claim 4 robot is characterized in that said drive unit comprises linear motor, or motor, screw mandrel transfer system.
6. a tester substrate handling system comprises tester substrate microscope carrier and substrate transferring robot, it is characterized in that,
The table top of said tester substrate microscope carrier is provided with a plurality of pores, and said pore is connected with microscope carrier air blowing getter device; Said tester substrate microscope carrier is provided with the substrate moving part; At least one sensor is arranged on the porch of said tester substrate microscope carrier; Stage control apparatus is connected with said sensor, microscope carrier air blowing getter device and said substrate moving part;
Said substrate transferring robot comprises robot body, and is positioned at the arm on the said robot body, also comprises: said arm is provided with the adsorption module that can move along said arm length direction; Drive unit is connected with said adsorption module; The arm control device is connected with said drive unit with said adsorption module.
7. tester substrate handling system according to claim 6 is characterized in that, said substrate moving part comprises:
Be arranged on the porch of said tester substrate microscope carrier, from first anchor clamps that move to said tester substrate microscope carrier away from said tester substrate microscope carrier; With
Be arranged on the top of said tester substrate microscope carrier, second anchor clamps to said tester substrate microscope carrier medial movement from said tester substrate microscope carrier top.
8. according to claim 6 or 7 described tester substrate handling systems, it is characterized in that, be provided with the substrate limiting section in the both sides of said tester substrate microscope carrier.
9. tester substrate handling system according to claim 8 is characterized in that, said substrate limiting section comprises:
Be arranged on a side of said tester substrate microscope carrier, from the 3rd anchor clamps that move to said tester substrate microscope carrier away from said tester substrate microscope carrier; With
Be arranged on the opposite side of said tester substrate microscope carrier, from the 4th anchor clamps that move to said tester substrate microscope carrier away from said tester substrate microscope carrier;
Said the 3rd anchor clamps, the 4th anchor clamps are connected with said stage control apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202992747U CN202443210U (en) | 2011-08-16 | 2011-08-16 | Substrate conveying robot and substrate test conveying system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202992747U CN202443210U (en) | 2011-08-16 | 2011-08-16 | Substrate conveying robot and substrate test conveying system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202443210U true CN202443210U (en) | 2012-09-19 |
Family
ID=46824653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202992747U Expired - Lifetime CN202443210U (en) | 2011-08-16 | 2011-08-16 | Substrate conveying robot and substrate test conveying system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202443210U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016206162A1 (en) * | 2015-06-23 | 2016-12-29 | 武汉华星光电技术有限公司 | Method for placing and taking out glass |
| CN107755393A (en) * | 2017-09-30 | 2018-03-06 | 武汉华星光电半导体显示技术有限公司 | Protective cover |
| CN108820860A (en) * | 2018-07-24 | 2018-11-16 | 昆山平成电子科技有限公司 | A kind of automatic transporting test equipment based on manipulator |
| WO2019000295A1 (en) * | 2017-06-29 | 2019-01-03 | 深圳市汇顶科技股份有限公司 | Chip pickup device |
| CN110962083A (en) * | 2019-12-11 | 2020-04-07 | 东莞王氏港建机械有限公司 | Circuit substrate workbench |
-
2011
- 2011-08-16 CN CN2011202992747U patent/CN202443210U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016206162A1 (en) * | 2015-06-23 | 2016-12-29 | 武汉华星光电技术有限公司 | Method for placing and taking out glass |
| WO2019000295A1 (en) * | 2017-06-29 | 2019-01-03 | 深圳市汇顶科技股份有限公司 | Chip pickup device |
| CN107755393A (en) * | 2017-09-30 | 2018-03-06 | 武汉华星光电半导体显示技术有限公司 | Protective cover |
| CN108820860A (en) * | 2018-07-24 | 2018-11-16 | 昆山平成电子科技有限公司 | A kind of automatic transporting test equipment based on manipulator |
| CN110962083A (en) * | 2019-12-11 | 2020-04-07 | 东莞王氏港建机械有限公司 | Circuit substrate workbench |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202443210U (en) | Substrate conveying robot and substrate test conveying system | |
| CN101085522B (en) | Apparatus and method for receiving and transferring glass substrate plates | |
| CN105784724B (en) | Flat panel products detection device | |
| CN106144473A (en) | A kind of mechanical hand location grasping mechanism | |
| CN202985559U (en) | Mechanical arm device for automatic feeding and discharging | |
| CN107481958B (en) | Alignment bonding equipment and alignment bonding method | |
| CN107993970B (en) | Silicon wafer conveying system | |
| WO2019174201A1 (en) | Transfer device and transfer method | |
| CN201952000U (en) | Positioning device and conveying device on conveying line | |
| CN104822612A (en) | Method and apparatus for quickly transferring plates | |
| CN205634166U (en) | Automatic collecting and releasing plate machine in duplex position with robot | |
| CN110104429A (en) | A kind of intelligence mounting device and intelligent attaching method | |
| CN103675315A (en) | Sample-injection and transferring device for microporous plate | |
| CN203558557U (en) | Rotary type clamp mechanism for LVP (large volume parenteral) | |
| CN110103177A (en) | A kind of full-automatic mobile phone screen assembling device | |
| CN103395623A (en) | Automatic product fetching and placing machine cooperating with manipulator | |
| CN111421545B (en) | Liquid crystal display robot carrying system and carrying method thereof | |
| CN205634165U (en) | Automatic collecting and releasing plate machine in quadruplex position with robot | |
| TW200816887A (en) | Conveying device and method adapted for electronic element | |
| CN204660840U (en) | A kind of chip sorption device | |
| CN209559780U (en) | A kind of detection system | |
| CN208922000U (en) | A kind of contraposition module | |
| CN209190798U (en) | A kind of mechanical gripper of anti-dropout | |
| CN107792624A (en) | Laminating mechanism and the automatic pressing device with the laminating mechanism | |
| CN215509847U (en) | Automatic laminating and code spraying equipment for film group |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150625 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150625 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150625 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE Technology Group Co., Ltd. Patentee after: Beijing BOE Photoelectricity Science & Technology Co., Ltd. Address before: 100176 Beijing economic and Technological Development Zone, West Central Road, No. 8 Patentee before: Beijing BOE Photoelectricity Science & Technology Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120919 |