WO2016190180A1 - Electroplating jig and electroplating method - Google Patents
Electroplating jig and electroplating method Download PDFInfo
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- WO2016190180A1 WO2016190180A1 PCT/JP2016/064692 JP2016064692W WO2016190180A1 WO 2016190180 A1 WO2016190180 A1 WO 2016190180A1 JP 2016064692 W JP2016064692 W JP 2016064692W WO 2016190180 A1 WO2016190180 A1 WO 2016190180A1
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/02—Electroplating of selected surface areas
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/06—Suspending or supporting devices for articles to be coated
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/06—Suspending or supporting devices for articles to be coated
- C25D17/08—Supporting racks, i.e. not for suspending
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Abstract
Provided are an electroplating jig and an electroplating method in which leaking of fluid does not readily occur. A workpiece (2) is disposed between a first insulation body (20) in which an opening (22) that passes through the principal surface thereof is formed, and a second insulation body (30), such that the workpiece (2) faces the opening (22) and the area surrounding same. The pressure inside a first space (70), which is enclosed by an annular first seal member (50) for sealing the gap between the first insulation body (20) and the workpiece (2), an annular second seal member (52) for sealing the gap between the second insulation body (30) and the first insulation body (20) surrounding the workpiece (2), an annular third seal member (54) for sealing the gap between the workpiece (2) and the second insulation body (30), the first insulation body (20), the second insulation body (30), and the workpiece (2) is brought higher than the pressure inside a second space (74), which is enclosed by the third seal member (54), the second insulation body (30), and the workpiece (2).
Description
本発明は、電気めっき用治具及び電気めっき方法に関し、詳しくは、ワークの片面にめっきを形成する技術に関する。
The present invention relates to an electroplating jig and an electroplating method, and more particularly to a technique for forming a plating on one surface of a workpiece.
電気めっきによりワークの一部分のみにめっきを形成する場合、ワークの他の部分がめっき液に触れないように、電気めっき用治具を用いてワークを保持する。
When forming a plating on only a part of the work by electroplating, the work is held using an electroplating jig so that other parts of the work do not touch the plating solution.
例えば図１２の分解斜視図に示す電気めっき用治具１０１は、開口部１１０Ｇが形成された第１の絶縁体１１０と第２の絶縁体１２０との間にワークＷを保持し、開口部１１０ＧにワークＷの一部分を露出させる。第１の絶縁体１１０とワークＷとの間に配置され開口部１１０Ｇを取り囲む環状の第１のシール部材１３０によって、第１の絶縁体１１０とワークＷとの間が密封される。第１の絶縁体１１０と第２の絶縁体１２０の間に配置されワークＷを取り囲む環状の第２のシール部材１４０によって、第１の絶縁体１１０と第２の絶縁体１２０の間が密封される。ワークＷの他の部分は、第１の絶縁体１１０と、ワークＷと、第２の絶縁体１２０と、第１のシール部材１３０と、第２のシール部材１４０に囲まれ密閉された第３の空間に配置され、めっき液に触れない。
For example, the electroplating jig 101 shown in the exploded perspective view of FIG. 12 holds the workpiece W between the first insulator 110 and the second insulator 120 in which the opening 110G is formed, and the opening 110G. A part of the work W is exposed. A space between the first insulator 110 and the workpiece W is sealed by an annular first seal member 130 disposed between the first insulator 110 and the workpiece W and surrounding the opening 110G. The space between the first insulator 110 and the second insulator 120 is sealed by an annular second seal member 140 disposed between the first insulator 110 and the second insulator 120 and surrounding the workpiece W. The The other part of the workpiece W is surrounded by the first insulator 110, the workpiece W, the second insulator 120, the first seal member 130, and the second seal member 140. It is placed in the space of and does not touch the plating solution.
第３の空間に連通するように第１の絶縁体１１０に形成された空気吸込み流路１５０を介しポンプで吸引し、第３の空間を負圧にし、ワークＷを第２の絶縁体１２０に沿わせる。ワークＷが均一に押圧されるように、ワークＷと第２の絶縁体１２０との間に弾性シート１９０が配置される。
The air is sucked by a pump through the air suction flow path 150 formed in the first insulator 110 so as to communicate with the third space, the third space is set to a negative pressure, and the work W is transferred to the second insulator 120. Keep along. The elastic sheet 190 is disposed between the workpiece W and the second insulator 120 so that the workpiece W is pressed uniformly.
ワークＷは、第３の空間に露出する部分に、不図示の給電用端子が形成されている。給電用端子は、ワークＷと第１の絶縁体１１０との間に配置される導電ゴム１６０及び金属板１８０と、第１の絶縁体１１０の内部を通り金属板１８０に電気的に接続される電気接続棒１７０と介して、電気めっき用電源に電気的に接続される（例えば特許文献１参照）。
The work W has a power supply terminal (not shown) formed in a portion exposed to the third space. The power feeding terminal is electrically connected to the metal plate 180 through the inside of the first insulator 110 and the conductive rubber 160 and the metal plate 180 disposed between the workpiece W and the first insulator 110. It is electrically connected to a power source for electroplating through the electric connecting rod 170 (see, for example, Patent Document 1).
第３の空間を負圧にすると、めっき液が第１のシール部材１３０や第２のシール部材１４０を越えて第３の空間に侵入する液漏れが発生する可能性がある。
When the third space is set to a negative pressure, there is a possibility that the plating solution may leak through the first seal member 130 or the second seal member 140 and enter the third space.
液漏れを防ぐために、第１の絶縁体１１０と第２の絶縁体１２０とを強く締め付けると、ワークＷが薄い場合には割れやすくなる。また、第１のシール部材１３０がワークＷに貼り付いてしまい、ワークＷから第１のシール部材１３０を剥がす際にワークＷが割れるリスクがある。電気めっき用治具１０１へのワークＷの着脱を自動化する場合、ワークＷの割れを防ぐために構造が複雑になる。
If the first insulator 110 and the second insulator 120 are strongly tightened to prevent liquid leakage, the workpiece W is easily cracked. In addition, there is a risk that the first seal member 130 may stick to the workpiece W, and the workpiece W may break when the first seal member 130 is peeled off from the workpiece W. When automating the attachment / detachment of the workpiece W to / from the electroplating jig 101, the structure becomes complicated in order to prevent the workpiece W from cracking.
本発明は、かかる実情に鑑み、液漏れが生じにくい電気めっき用治具及び電気めっき方法を提供しようとするものである。
In view of such circumstances, the present invention is intended to provide an electroplating jig and an electroplating method in which liquid leakage hardly occurs.
本発明は、上記課題を解決するために、以下のように構成した電気めっき用治具を提供する。
In order to solve the above problems, the present invention provides an electroplating jig configured as follows.
電気めっき用治具は、（ａ）主面間を貫通する開口部が形成された第１の絶縁体と、（ｂ）前記開口部及びそのまわりに対向するように前記第１の絶縁体に沿って配置し前記第１の絶縁体と組み合わせる第２の絶縁体と、（ｃ）前記第１の絶縁体と組み合わされている前記第２の絶縁体と前記第１の絶縁体との間に、前記開口部及びそのまわりに対向するように、ワークを配置した状態で、前記ワークと前記第１の絶縁体との間に配置され、前記開口部を取り囲み、前記ワークと前記第１の絶縁体との間を密封する環状の第１のシール部材と、（ｄ）前記第１の絶縁体と組み合わされている前記第２の絶縁体と前記第１の絶縁体との間に配置され、前記ワークを取り囲み、前記第１の絶縁体と前記第２の絶縁体との間を密封する環状の第２のシール部材と、（ｅ）前記第１の絶縁体と組み合わされている前記第２の絶縁体と前記ワークとの間に配置され、前記ワークと前記第２の絶縁体との間を密封する環状の第３のシール部材と、を備える。前記第１のシール部材と前記第２のシール部材と前記第３のシール部材と前記第１の絶縁体と前記第２の絶縁体と前記ワークとに囲まれる第１の空間の圧力を、前記第３のシール部材と前記第２の絶縁体と前記ワークとに囲まれる第２の空間の圧力より高くすることができる。
The electroplating jig includes (a) a first insulator in which an opening penetrating between main surfaces is formed, and (b) the first insulator so as to face the opening and the periphery thereof. A second insulator disposed along the first insulator and combined with the first insulator; and (c) between the second insulator and the first insulator combined with the first insulator. The workpiece is disposed between the workpiece and the first insulator in a state where the workpiece is disposed so as to face the opening and the periphery of the opening, and surrounds the opening and surrounds the workpiece and the first insulation. An annular first sealing member that seals between the body, and (d) disposed between the second insulator and the first insulator combined with the first insulator, An annular second surrounding the work and sealing between the first insulator and the second insulator A seal member; and (e) an annular member disposed between the second insulator combined with the first insulator and the workpiece, and sealing between the workpiece and the second insulator. A third seal member. The pressure of the first space surrounded by the first seal member, the second seal member, the third seal member, the first insulator, the second insulator, and the work is The pressure can be higher than the pressure in the second space surrounded by the third seal member, the second insulator, and the workpiece.
上記構成によれば、電気めっき用治具を用いてワークを保持し、めっき液に浸すと、めっき液は第１の空間と隣り合う。第２の空間の圧力を、第１の絶縁体と第２の絶縁体との間に配置されたワークのうち第１の絶縁体の開口部を介してめっき液に接するワークの露出部分に作用するめっき液の液圧（以下、単に「めっき液の液圧」ともいう。）よりも低い圧力にすることによって、ワークを第２の絶縁体に沿わせることができる。第２の空間とめっき液との間には第１の空間が介在しているため、第１の空間の圧力を第２の空間の圧力より高くすると、ワークを第２の絶縁体に沿わせるためにワークの露出部分に作用するめっき液の液圧よりも低い圧力にされる空間とめっき液とが隣り合う場合より、めっき液は第１の空間に侵入しにくくなる。したがって、液漏れが生じにくい。
According to the above configuration, when the workpiece is held using the electroplating jig and immersed in the plating solution, the plating solution is adjacent to the first space. The pressure in the second space acts on the exposed portion of the workpiece that is in contact with the plating solution through the opening of the first insulator among the workpieces disposed between the first insulator and the second insulator. By setting the pressure lower than the liquid pressure of the plating solution (hereinafter, also simply referred to as “the liquid pressure of the plating solution”), the workpiece can be placed along the second insulator. Since the first space is interposed between the second space and the plating solution, if the pressure in the first space is made higher than the pressure in the second space, the workpiece is caused to follow the second insulator. Therefore, the plating solution is less likely to enter the first space than when the plating solution is adjacent to the space where the pressure is lower than the hydraulic pressure of the plating solution acting on the exposed portion of the workpiece. Accordingly, liquid leakage is unlikely to occur.
なお、第１の空間の圧力は、めっき液の液圧より低くても、めっき液の液圧と等しくても、めっき液の液圧より高くても構わない。
Note that the pressure in the first space may be lower than the hydraulic pressure of the plating solution, equal to the hydraulic pressure of the plating solution, or higher than the hydraulic pressure of the plating solution.
好ましい一態様において、前記第１の絶縁体と前記第２の絶縁体のいずれか一方又は両方は、前記第１の絶縁体と前記第２の絶縁体との間に前記ワークが配置された状態で前記第１の絶縁体と前記第２の絶縁体と前記ワークとの全体を取り囲む外部と前記第１の空間とを連通する第１の連通孔が形成されている。
In a preferred aspect, one or both of the first insulator and the second insulator are in a state where the workpiece is disposed between the first insulator and the second insulator. Thus, a first communication hole is formed which communicates the first space with the outside surrounding the whole of the first insulator, the second insulator, and the workpiece.
この場合、第１の連通孔を介して第１の空間の圧力を容易に調整することができる。
In this case, the pressure in the first space can be easily adjusted through the first communication hole.
好ましい他の態様において、前記第２の絶縁体は、前記第１の絶縁体と前記第２の絶縁体との間に前記ワークが配置された状態で前記第１の絶縁体と前記第２の絶縁体と前記ワークとの全体を取り囲む外部と前記第２の空間とを連通する第２の連通孔が形成されている。
In another preferable aspect, the second insulator includes the first insulator and the second insulator in a state where the workpiece is disposed between the first insulator and the second insulator. A second communication hole is formed to communicate the outside surrounding the whole of the insulator and the workpiece with the second space.
この場合、第２の貫通流路を介して第２の空間の圧力を容易に調整することができる。
In this case, the pressure in the second space can be easily adjusted via the second through flow path.
好ましくは、前記第２の連通孔は、前記外部に存在する負圧源に接続される。前記第２の空間は、前記第２の連通孔を介して前記負圧源に連通され、負圧にされる。
Preferably, the second communication hole is connected to the external negative pressure source. The second space is communicated with the negative pressure source through the second communication hole to be negative pressure.
この場合、第２の空間の圧力をめっき液の液圧よりも低い圧力にすることが容易である。
In this case, it is easy to set the pressure in the second space to a pressure lower than the liquid pressure of the plating solution.
好ましくは、一端と他端との間が連通する開状態と、前記一端と前記他端との間の連通が阻止された閉状態とを切り替えることができ、前記一端が前記第２の連通孔に接続された開閉部材をさらに備える。
Preferably, it is possible to switch between an open state in which one end and the other end communicate with each other and a closed state in which communication between the one end and the other end is prevented, and the one end is the second communication hole. And an opening / closing member connected to.
この場合、開閉部材の他端に接続された配管等を外しても、第２の空間の圧力を保持したまま、ワーク及び電気めっき用治具を自由に搬送でき、作業がやりやすい。
In this case, even if the pipe connected to the other end of the opening / closing member is removed, the workpiece and the electroplating jig can be freely transported while maintaining the pressure in the second space, and the operation is easy.
上記各構成において、好ましくは、（ａ）前記第３のシール部材に取り囲まれ前記ワークに対向するように、前記第２の絶縁体に形成された凹部と、（ｂ）前記凹部に配置される導電部材と、（ｃ）前記第２の絶縁体に設けられ、前記導電部材に電気的に接続される一端と、電気めっき用電源に電気的に接続される他端とを有する配線と、をさらに備える。
In each of the above configurations, preferably, (a) a recess formed in the second insulator so as to be surrounded by the third seal member and facing the workpiece, and (b) disposed in the recess. A conductive member; and (c) a wiring provided on the second insulator and having one end electrically connected to the conductive member and the other end electrically connected to a power source for electroplating. Further prepare.
この場合、ワークにめっきを形成するとき、配線及び導電部材を介して、ワークのめっきが形成される表面とは反対側の裏面から給電することができる。分割されて個片（例えばチップ）になる部分を含むワークの場合、個片になる部分ごとにワークの裏面から給電することができるため、ワークに、個片になる部分同士を導通させる回路を作る必要はない。ワークに、個片になる部分同士を導通させる回路がないと、ワークから切断され分割された個片の切断面に導通部が露出しないようにすることが可能である。
In this case, when the plating is formed on the workpiece, power can be supplied from the back surface opposite to the surface on which the workpiece plating is formed via the wiring and the conductive member. In the case of a work including a part that is divided into individual pieces (for example, chips), since power can be supplied from the back of the work for each part that becomes an individual piece, a circuit that connects the parts that become individual pieces to the work is provided. There is no need to make it. If the work does not have a circuit for electrically connecting the parts to be separated, it is possible to prevent the conducting part from being exposed at the cut surfaces of the pieces cut and divided from the work.
また、本発明は、上記課題を解決するために、以下のように構成した電気めっき方法を提供する。
The present invention also provides an electroplating method configured as follows in order to solve the above-described problems.
電気めっき方法は、（ｉ）主面間を貫通する開口部が形成された第１の絶縁体に沿って、前記開口部及びそのまわりに対向するように、第２の絶縁体を配置するとともに、前記第１の絶縁体と前記第２の絶縁体との間に、前記開口部及びそのまわりに対向するようにワークを配置し、（ii）前記第１の絶縁体と前記ワークとの間に配置され前記開口部を取り囲む環状の第１のシール部材によって、前記ワークと前記第１の絶縁体との間を密封し、（iii）前記第１の絶縁体と前記第２の絶縁体との間に配置され前記ワークを取り囲む環状の第２のシール部材によって、前記第１の絶縁体と前記第２の絶縁体との間を密封し、（iv）前記ワークと前記第２の絶縁体との間に配置された環状の第３のシール部材によって、前記ワークと前記第２の絶縁体との間を密封し、（ｖ）前記第１のシール部材と前記第２のシール部材と前記第３のシール部材と前記第１の絶縁体と前記第２の絶縁体と前記ワークとに囲まれる第１の空間の圧力を、前記第３のシール部材と前記第２の絶縁体と前記ワークとに囲まれる第２の空間の圧力より高くし、かつ前記第２の空間をめっき液の液圧よりも低い圧力にした状態で、前記ワークにめっきを形成する。
In the electroplating method, (i) the second insulator is disposed so as to face the opening and the periphery thereof along the first insulator in which the opening penetrating between the main surfaces is formed. A workpiece is disposed between the first insulator and the second insulator so as to face the opening and the periphery thereof; and (ii) between the first insulator and the workpiece. And (iii) the first insulator and the second insulator, and a seal between the workpiece and the first insulator is sealed by an annular first seal member that surrounds the opening. And (iv) sealing the gap between the first insulator and the second insulator by an annular second seal member disposed between and surrounding the workpiece, and (iv) the workpiece and the second insulator. An annular third seal member disposed between the workpiece and the second insulation member. (V) the first seal member, the second seal member, the third seal member, the first insulator, the second insulator, and the workpiece; The pressure of the first space surrounded by the third seal member, the second insulator and the pressure of the second space surrounded by the work is set higher than the pressure of the second space. In a state where the pressure is lower than the hydraulic pressure, plating is formed on the workpiece.
上記方法によれば、ワークにめっきを形成するとき、めっき液は第１の空間と隣り合う。第２の空間を負圧にすることによって、ワークを第２の絶縁体に沿わせることができる。第２の空間とめっき液との間には第１の空間が介在しているため、第１の空間の圧力を第２の空間の圧力より高くすると、ワークを第２の絶縁体に沿わせるため負圧にする空間とめっき液とが隣り合う場合より、めっき液は第１の空間に侵入しにくくなる。したがって、液漏れが生じにくい。
According to the above method, when the plating is formed on the workpiece, the plating solution is adjacent to the first space. By setting the second space to a negative pressure, the workpiece can be placed along the second insulator. Since the first space is interposed between the second space and the plating solution, if the pressure in the first space is made higher than the pressure in the second space, the workpiece is caused to follow the second insulator. Therefore, the plating solution is less likely to enter the first space than when the negative pressure space and the plating solution are adjacent to each other. Accordingly, liquid leakage is unlikely to occur.
なお、第１の空間の圧力は、めっき液の液圧より低くても、めっき液の液圧と等しくても、めっき液の液圧より高くても構わない。
Note that the pressure in the first space may be lower than the hydraulic pressure of the plating solution, equal to the hydraulic pressure of the plating solution, or higher than the hydraulic pressure of the plating solution.
好ましい一態様において、前記第１の絶縁体と前記第２の絶縁体のいずれか一方又は両方は、前記第１の絶縁体と前記第２の絶縁体との間に前記ワークが配置された状態で前記第１の絶縁体と前記第２の絶縁体と前記ワークとの全体を取り囲む外部と前記第１の空間とを連通する第１の連通孔が形成されている。
In a preferred aspect, one or both of the first insulator and the second insulator are in a state where the workpiece is disposed between the first insulator and the second insulator. Thus, a first communication hole is formed which communicates the first space with the outside surrounding the whole of the first insulator, the second insulator, and the workpiece.
この場合、第１の貫通孔を介して第１の空間の圧力を容易に調整することができる。
In this case, the pressure in the first space can be easily adjusted through the first through hole.
好ましい他の態様において、前記第２の絶縁体は、前記第１の絶縁体と前記第２の絶縁体との間に前記ワークが配置された状態で前記第１の絶縁体と前記第２の絶縁体と前記ワークとの全体を取り囲む外部と前記第２の空間とを連通する第２の連通孔が形成されている。
In another preferable aspect, the second insulator includes the first insulator and the second insulator in a state where the workpiece is disposed between the first insulator and the second insulator. A second communication hole is formed to communicate the outside surrounding the whole of the insulator and the workpiece with the second space.
この場合、第２の貫通孔を介して第２の空間の圧力を容易に調整することができる。
In this case, the pressure in the second space can be easily adjusted through the second through hole.
好ましくは、一端と他端との間が連通する開状態と、前記一端と前記他端との間の連通が阻止された閉状態とを切り替えることができる開閉部材の前記一端が、前記第２の連通孔に接続されている。
Preferably, the one end of the opening / closing member capable of switching between an open state in which the one end and the other end communicate with each other and a closed state in which the communication between the one end and the other end is blocked is the second It is connected to the communication hole.
この場合、開閉部材の他端に接続されている配管等を外しても、第２の空間の圧力を保持したまま電気めっき用治具を自由に搬送でき、作業がやりやすい。
In this case, even if the pipe connected to the other end of the opening / closing member is removed, the electroplating jig can be freely transported while maintaining the pressure in the second space, and the operation is easy.
上記各方法において、好ましくは、前記第３のシール部材に取り囲まれ前記ワークに対向するように前記第２の絶縁体に形成された凹部に、導電部材を配置する。前記第２の絶縁体に設けられた配線の一端と前記導電部材とを電気的に接続し、かつ前記配線の他端を電気めっき用電源に電気的に接続した状態で、前記ワークにめっきを形成する。
In each of the above methods, preferably, a conductive member is disposed in a recess formed in the second insulator so as to be surrounded by the third seal member and to face the workpiece. In a state where one end of the wiring provided in the second insulator is electrically connected to the conductive member and the other end of the wiring is electrically connected to a power source for electroplating, the workpiece is plated. Form.
この場合、ワークにめっきを形成するとき、配線及び導電部材を介して、ワークのめっきが形成される表面とは反対側の裏面から給電することができる。裏面から給電すると、ワークを切断したときに、切断面に導電部が露出しないようにすることが可能である。
In this case, when the plating is formed on the workpiece, power can be supplied from the back surface opposite to the surface on which the workpiece plating is formed via the wiring and the conductive member. When power is supplied from the back surface, it is possible to prevent the conductive portion from being exposed to the cut surface when the workpiece is cut.
本発明によれば、液漏れが生じにくい。
According to the present invention, liquid leakage hardly occurs.
以下、本発明の実施の形態について、図面を参照しながら説明する。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
＜本発明の説明例＞ 図８は、本発明の電気めっき用治具１０ａの基本的な構成を模式的に示す要部断面図である。図８に示すように、第１の絶縁体２０と第２の絶縁体３０との間にワーク２を保持し、第１の絶縁体２０の主面間を貫通する開口部２２からワーク２を露出させた状態でめっき液に浸すことによって、ワーク２の表面２ａにめっきを形成する。電気めっき用治具１０ａは、第１の絶縁体２０とワーク２との間を密封する環状の第１のシール部材５０と、ワーク２を取り囲み第１の絶縁体２０と第２の絶縁体３０との間を密封する環状の第２のシール部材５２と、ワーク２と第２の絶縁体３０との間を密封する環状の第３のシール部材５４とを備えている。
<Description Example of the Present Invention> FIG. 8 is a cross-sectional view of an essential part schematically showing the basic configuration of the electroplating jig 10a of the present invention. As shown in FIG. 8, the workpiece 2 is held between the first insulator 20 and the second insulator 30, and the workpiece 2 is moved from the opening 22 that penetrates between the main surfaces of the first insulator 20. By immersing in a plating solution in an exposed state, plating is formed on the surface 2 a of the workpiece 2. The electroplating jig 10 a includes an annular first seal member 50 that seals between the first insulator 20 and the workpiece 2, and the first insulator 20 and the second insulator 30 that surround the workpiece 2. And an annular second seal member 52 that seals between the workpiece 2 and the second insulator 30, and an annular third seal member 54 that seals between the workpiece 2 and the second insulator 30.
電気めっき用治具１０ａを用いてワーク２を保持しているとき、第１のシール部材５０と、第２のシール部材５２と、第３のシール部材５４と、第１の絶縁体２０と、第２の絶縁体３０と、ワーク２とに囲まれた第１の空間７０が形成される。また、第３のシール部材５４と、第２の絶縁体３０と、ワーク２とに囲まれた第２の空間７４が形成される。
When holding the workpiece 2 using the electroplating jig 10a, the first sealing member 50, the second sealing member 52, the third sealing member 54, the first insulator 20, A first space 70 surrounded by the second insulator 30 and the workpiece 2 is formed. Further, a second space 74 surrounded by the third seal member 54, the second insulator 30, and the work 2 is formed.
第１の絶縁体２０と第２の絶縁体３０のいずれか一方又は両方に、第１の絶縁体２０と第２の絶縁体３０との間にワーク２が配置された状態で第１の絶縁体２０と第２の絶縁体３０とワーク２との全体を取り囲む外部と第１の空間７０とを連通する第１の連通孔７２が形成されている。第２の絶縁体３０には、第１の絶縁体２０と第２の絶縁体３０との間にワーク２が配置された状態で第１の絶縁体２０と第２の絶縁体３０とワーク２との全体を取り囲む外部（以下、単に「外部」ともいう。）と第２の空間７４とを連通する第２の連通孔７６が形成されている。
The first insulation in a state in which the work 2 is disposed between the first insulator 20 and the second insulator 30 on one or both of the first insulator 20 and the second insulator 30. A first communication hole 72 that communicates the outside surrounding the entire body 20, the second insulator 30, and the work 2 and the first space 70 is formed. The second insulator 30 includes the first insulator 20, the second insulator 30, and the workpiece 2 in a state where the workpiece 2 is disposed between the first insulator 20 and the second insulator 30. And a second communication hole 76 that communicates with the second space 74 (hereinafter also simply referred to as “external”).
ワーク２は、めっきが形成される表面２ａに導電性を有する不図示のめっき下地層が形成され、反対側の裏面２ｂに不図示の給電用端子が形成されている。めっき下地層と給電用端子は、ワーク２の絶縁部２ｋを貫通する導電部２ｔによって電気的に接続されている。
The workpiece 2 has a plating base layer (not shown) having conductivity on the surface 2a on which the plating is formed, and a power supply terminal (not shown) is formed on the back surface 2b on the opposite side. The plating base layer and the power feeding terminal are electrically connected by a conductive portion 2t that penetrates the insulating portion 2k of the workpiece 2.
ワーク２と第２の絶縁体３０との間には、金属板６４、金属薄板６２及び導電ゴム６０が配置されている。電気めっき用電源は、第２の絶縁体３０に設けられた配線７８、金属板６４、金属薄板６２、導電ゴム６０、給電用端子、導電部２ｔを介して、ワーク２のめっき下地層に電気的に接続される。
Between the workpiece 2 and the second insulator 30, a metal plate 64, a metal thin plate 62, and a conductive rubber 60 are disposed. The power supply for electroplating is applied to the plating base layer of the work 2 via the wiring 78 provided on the second insulator 30, the metal plate 64, the metal thin plate 62, the conductive rubber 60, the power feeding terminal, and the conductive portion 2t. Connected.
めっきを形成するとき、第２の空間７４の圧力は、第１の絶縁体２０と第２の絶縁体３０との間に配置されたワーク２のうち第１の絶縁体２の開口部２２を介してめっき液に接するワーク２の露出部分に作用するめっき液の液圧（以下、単に「めっき液の液圧」ともいう。）よりも低い圧力にする。例えば、第２の連通孔７６に負圧源を接続し、第２の空間７４を負圧にする。これによって、ワーク２を導電ゴム６０に押しつけて沿わせる。ワーク２を導電ゴム６０に押しつけて沿わせることにより、ワーク２の給電用端子と導電ゴム６０との確実な通電を得ることができる。一方、第１の空間７０の圧力は、第１の連通孔７２を介して、第２の空間の圧力より高くすることができる。
When the plating is formed, the pressure in the second space 74 causes the opening 22 of the first insulator 2 in the work 2 disposed between the first insulator 20 and the second insulator 30. The pressure is lower than the liquid pressure of the plating solution acting on the exposed portion of the workpiece 2 in contact with the plating solution (hereinafter also simply referred to as “the liquid pressure of the plating solution”). For example, a negative pressure source is connected to the second communication hole 76 to make the second space 74 have a negative pressure. As a result, the workpiece 2 is pressed against the conductive rubber 60 and is caused to follow. By pressing the work 2 against the conductive rubber 60 and keeping it along, reliable energization between the power feeding terminal of the work 2 and the conductive rubber 60 can be obtained. On the other hand, the pressure in the first space 70 can be made higher than the pressure in the second space through the first communication hole 72.
＜比較例＞ 図９は、比較例の電気めっき用治具１０ｘ，１０ｙの構成を模式的に示す要部断面図である。図９に示すように、比較例の電気めっき用治具１０ｘ，１０ｙは、本発明の電気めっき用治具１０ａと同じく、第１の絶縁体２０ｘ，２０ｙとワーク２ｘ，２ｙとの間を密封する環状の第１のシール部材５０と、ワーク２ｘ，２ｙを取り囲み第１の絶縁体２０ｘ，２０ｙと第２の絶縁体３０ｘ，３０ｙとの間を密封する環状の第２のシール部材５２とを備えている。しかし、比較例の電気めっき用治具１０ｘ，１０ｙは第３のシール部材を備えていない点で、本発明の電気めっき用治具１０ａとは相違する。
<Comparative Example> FIG. 9 is a cross-sectional view of an essential part schematically showing the configuration of the electroplating jigs 10x and 10y of the comparative example. As shown in FIG. 9, the electroplating jigs 10x and 10y of the comparative example are sealed between the first insulators 20x and 20y and the workpieces 2x and 2y, similarly to the electroplating jig 10a of the present invention. An annular first seal member 50, and an annular second seal member 52 surrounding the workpieces 2x and 2y and sealing between the first insulators 20x and 20y and the second insulators 30x and 30y. I have. However, the electroplating jigs 10x and 10y of the comparative example are different from the electroplating jig 10a of the present invention in that they do not include the third seal member.
比較例の電気めっき用治具１０ｘ，１０ｙは、第１のシール部材５０と、第２のシール部材５２と、第１の絶縁体２０ｘ，２０ｙと、第２の絶縁体３０ｘ，３０ｙと、ワーク２ｘ，２ｙとに囲まれる第３の空間８０が形成される。第１の絶縁体２０ｘ，２０ｙと第２の絶縁体３０ｘ，３０ｙのいずれか一方又は両方に、第３の空間８０に連通する第３の連通孔８２が形成されている。第３の連通孔８２を介して、第３の空間８０を真空吸引し、第３の空間８０を負圧にし、ワーク２ｘ，２ｙを第２の絶縁体３０ｘ，３０ｙに沿わせる。
The electroplating jigs 10x and 10y of the comparative example include a first seal member 50, a second seal member 52, first insulators 20x and 20y, second insulators 30x and 30y, and a workpiece. A third space 80 surrounded by 2x and 2y is formed. A third communication hole 82 communicating with the third space 80 is formed in one or both of the first insulators 20x and 20y and the second insulators 30x and 30y. The third space 80 is vacuum-sucked through the third communication hole 82, the third space 80 is set to a negative pressure, and the workpieces 2x and 2y are placed along the second insulators 30x and 30y.
ワーク２は、第３の空間８０に露出する部分に、不図示の給電用端子が形成されている。給電用端子は、導電ゴム８６ｘ，８６ｙと、第１の絶縁体２０ｘ又は第２の絶縁体３０ｙに設けられた配線８４ｘ，８４ｙとを介して、電気めっき用電源に電気的に接続される。
The work 2 has a power supply terminal (not shown) formed in a portion exposed to the third space 80. The power supply terminals are electrically connected to the electroplating power source via the conductive rubbers 86x and 86y and the wirings 84x and 84y provided on the first insulator 20x or the second insulator 30y.
＜本発明の優位性１＞ 比較例では、めっき液に隣り合う第３の空間８０の圧力は、ワーク２ｘ，２ｙを第２の絶縁体３０ｘ、３０ｙに沿わせる負圧になる。一方、本発明では、めっき液に隣り合う第１の空間７０の圧力は、ワーク２を第２の絶縁体３０に沿わせるようにする、めっき液の液圧より低い圧力、すなわち第２の空間７４の圧力より高くすることができる。そのため、本発明の電気めっき用治具１０ａは、第１の空間７０の圧力を第２の空間７４の圧力より高くすることによって、比較例の電気めっき用治具１０ｘ，１０ｙに比べ、液漏れが生じにくい。
<Advantage 1 of the Present Invention> In the comparative example, the pressure in the third space 80 adjacent to the plating solution is a negative pressure that moves the workpieces 2x and 2y along the second insulators 30x and 30y. On the other hand, in the present invention, the pressure in the first space 70 adjacent to the plating solution is lower than the plating solution hydraulic pressure, that is, the second space, which causes the workpiece 2 to follow the second insulator 30. The pressure can be higher than 74. Therefore, the electroplating jig 10a of the present invention has a liquid leakage as compared with the electroplating jigs 10x and 10y of the comparative example by making the pressure of the first space 70 higher than the pressure of the second space 74. Is unlikely to occur.
＜本発明の優位性２＞ 本発明は、ワークを切断したときに、切断面にワークの導電部が露出しないようにすることが可能である。
<Advantage 2 of the present invention> The present invention can prevent the conductive portion of the workpiece from being exposed to the cut surface when the workpiece is cut.
すなわち、比較例のように、ワーク２ｘ，２ｙの周辺部分に設けた給電用端子と、ワーク２ｘ，２ｙの中心部分に設けためっき下地層とを、導電部を介して電気的に接続する場合、ワーク２ｘ，２ｙの切断面に導電部が露出する。
In other words, as in the comparative example, the power feeding terminal provided in the peripheral portion of the workpieces 2x and 2y and the plating base layer provided in the central portion of the workpieces 2x and 2y are electrically connected via the conductive portion. The conductive parts are exposed at the cut surfaces of the workpieces 2x and 2y.
例えば、図１１（ａ）の断面図に示すように、ワーク２ｍの内部に、給電用端子４ｐと、めっき下地層４ｑとを接続する導電部６ｘを形成する。あるいは、図１１（ｂ）の断面図に示すように、ワーク２ｎの表面２ａに、連続的に導電部６ｙを形成し、レジスト７で覆い、レジスト７で覆われていない部分４ｒにめっきを形成する。いずれの場合も、導電部６ｘ，６ｙは、個片の境界８、すなわち切断部分を横断するため、ワーク２ｍ，２ｎを切断すると、切断面に導電部６ｘ，６ｙが露出する。
For example, as shown in the cross-sectional view of FIG. 11A, a conductive portion 6x that connects the power feeding terminal 4p and the plating base layer 4q is formed inside the workpiece 2m. Alternatively, as shown in the cross-sectional view of FIG. 11B, the conductive portion 6y is continuously formed on the surface 2a of the workpiece 2n, covered with the resist 7, and plated on the portion 4r not covered with the resist 7. To do. In either case, since the conductive portions 6x and 6y cross the boundary 8 of the piece, that is, the cut portion, when the workpieces 2m and 2n are cut, the conductive portions 6x and 6y are exposed on the cut surface.
これに対し、本発明では、例えば図１０の断面図に示すように、切断後に個片になる部分ごとに、表面２ａのめっき下地層４ａと裏面の給電用端子４ｂとを、ワーク２の表面２ａと裏面２ｂとの間を貫通する導電部６によって電気的に接続することによって、導電部６が個片の境界８、すなわち切断部分を横断しないように、ワーク２を構成することができる。これによって、ワーク２を切断した切断面に導電部６が露出しないようにすることが可能である。
On the other hand, in the present invention, for example, as shown in the cross-sectional view of FIG. 10, for each portion that becomes a piece after cutting, the plating base layer 4 a on the front surface 2 a and the power feeding terminal 4 b on the back surface are The work 2 can be configured so that the conductive portion 6 does not cross the boundary 8 of the piece, that is, the cut portion, by being electrically connected by the conductive portion 6 penetrating between the 2a and the back surface 2b. Thereby, it is possible to prevent the conductive portion 6 from being exposed at the cut surface obtained by cutting the workpiece 2.
＜実施例＞ 次に、本発明の実施例の電気めっき用治具１０及び電気めっき方法について、図１～図７を参照しながら説明する。
Example Next, an electroplating jig 10 and an electroplating method according to an example of the present invention will be described with reference to FIGS.
図１は、電気めっき用治具１０の組立斜視図である。図２は、電気めっき用治具１０の分解斜視図である。図１及び図２に示すように、電気めっき用治具１０は、第１の絶縁体２０と第２の絶縁体３０との間にワーク２を挟んだ状態を、不図示のボルトやクリップなどの適宜な手段によって、解除可能に保持することができる。
FIG. 1 is an assembly perspective view of the electroplating jig 10. FIG. 2 is an exploded perspective view of the electroplating jig 10. As shown in FIGS. 1 and 2, the electroplating jig 10 is configured such that a workpiece 2 is sandwiched between a first insulator 20 and a second insulator 30, such as bolts and clips (not shown). It can hold | maintain releasable by the appropriate means.
第１の絶縁体２０は、樹脂などの電気的な絶縁性を有する材料からなる板状の部材である。第１の絶縁体２０は、互いに対向する主面２０ａ，２０ｂ間を貫通する開口部２２が形成され、ワーク２を保持するとき、一方の主面２０ｂ（以下、「第１の主面２０ｂ」ともいう。）が、ワーク２及び第２の絶縁体３０に対向する。
The first insulator 20 is a plate-like member made of an electrically insulating material such as resin. The first insulator 20 is formed with an opening 22 penetrating between the principal surfaces 20a, 20b facing each other. When holding the workpiece 2, one principal surface 20b (hereinafter referred to as "first principal surface 20b"). Is also opposed to the workpiece 2 and the second insulator 30.
第２の絶縁体３０は、樹脂などの電気的な絶縁性を有する材料からなる板状の部材である本体３１を含む。第２の絶縁体３０の本体３１は、ワーク２を保持するとき、互いに対向する主面３０ａ，３０ｂのうち一方の主面３０ａ（以下、「第２の主面３０ａ」ともいう。）が、ワーク２及び第１の絶縁体２０の第１の主面２０ｂに対向する。第２の主面３０ａには、第１の絶縁体２０を位置決めするための位置決めピン３７が設けられている。
The second insulator 30 includes a main body 31 that is a plate-like member made of an electrically insulating material such as a resin. When the main body 31 of the second insulator 30 holds the workpiece 2, one main surface 30 a (hereinafter also referred to as “second main surface 30 a”) of the main surfaces 30 a and 30 b facing each other. The work 2 and the first main surface 20b of the first insulator 20 are opposed to each other. Positioning pins 37 for positioning the first insulator 20 are provided on the second main surface 30a.
第２の絶縁体３０の本体３１の上部には、電気めっき用治具１０を把持するための穴３８，３９と、電気めっき用電源に接続するための端子１２ａ，１２ｂが設けられている。
In the upper part of the main body 31 of the second insulator 30, holes 38 and 39 for holding the electroplating jig 10 and terminals 12a and 12b for connecting to a power source for electroplating are provided.
ワーク２は、第１の絶縁体２０の開口部２２及びそのまわりに対向するように、第１の主面２０ｂと第２の主面３０ａとの間に配置される。
The work 2 is disposed between the first main surface 20b and the second main surface 30a so as to face the opening 22 of the first insulator 20 and the periphery thereof.
図３は、第２の絶縁体３０の本体３１の一方の主面３０ａ、すなわち第２の主面３０ａの要部拡大図である。図２及び図３に示すように、第２の主面３０ａのうちワーク２が対向する内側対向領域２ｓ内には、矩形形状の凹部３２が形成されている。また、凹部３２を取り囲むように、環状の第３のシール部材５４が取り付けられている。第２の絶縁体３０の本体３１には、凹部３２の底面と第２の絶縁体３０の本体３１の他方の主面３０ｂとの間を貫通する第２の連通孔の第１部分３３が形成されている。
FIG. 3 is an enlarged view of a main part of one main surface 30a of the main body 31 of the second insulator 30, that is, the second main surface 30a. As shown in FIGS. 2 and 3, a rectangular recess 32 is formed in the inner facing region 2 s of the second main surface 30 a that the workpiece 2 faces. An annular third seal member 54 is attached so as to surround the recess 32. The main body 31 of the second insulator 30 is formed with a first portion 33 of a second communication hole penetrating between the bottom surface of the recess 32 and the other main surface 30b of the main body 31 of the second insulator 30. Has been.
第１の絶縁体２０が対向する外側対向領域２０ｓ内、かつ、内側対向領域２ｓの外側には、内側対向領域２ｓを取り囲むように溝３４が形成されている。また、溝３４を取り囲むように、環状の第２のシール部材５２が取り付けられている。第２の絶縁体３０の本体３１には、溝３４の底面と第２の絶縁体３０の本体３１の他方の主面３０ｂとの間を貫通する第１の連通孔の第１部分３５が形成されている。
A groove 34 is formed so as to surround the inner facing region 2s in the outer facing region 20s opposed to the first insulator 20 and outside the inner facing region 2s. An annular second seal member 52 is attached so as to surround the groove 34. The main body 31 of the second insulator 30 is formed with a first portion 35 of a first communication hole penetrating between the bottom surface of the groove 34 and the other main surface 30b of the main body 31 of the second insulator 30. Has been.
図４は、第２の絶縁体３０の本体３１の他方の主面３０ｂを見た斜視図である。図５（ａ）及び図６（ａ）は、電気めっき用治具１０の断面図であり、図５（ｂ）及び図６（ｂ）は、その拡大断面図である。図５は図３の線Ａ－Ａに沿って、図６は図３の線Ｂ－Ｂに沿って見ている。
FIG. 4 is a perspective view of the other main surface 30 b of the main body 31 of the second insulator 30. 5 (a) and 6 (a) are cross-sectional views of the electroplating jig 10, and FIGS. 5 (b) and 6 (b) are enlarged cross-sectional views thereof. 5 is viewed along line AA in FIG. 3, and FIG. 6 is viewed along line BB in FIG.
図４～図６に示すように、第２の絶縁体３０は、本体３１の他方の主面３０ｂに接着された柱状の第１の流路部材４０と第２の流路部材４２とを含む。
As shown in FIGS. 4 to 6, the second insulator 30 includes a columnar first flow path member 40 and a second flow path member 42 bonded to the other main surface 30 b of the main body 31. .
図４及び図６に示すように、第１の流路部材４０に第１の連通孔の第２部分４１が形成されている。第１の連通孔の第２部分４１の一端４１ａは第１の連通孔の第１部分３５に連通し、他端４１ｂは大気に開放されている。溝３４と、第１の連通孔の第１部分３５と、第１の連通孔の第２部分４１とによって、第１の連通孔が形成される。第１の連通孔の他端は、第１の連通孔の第２部分４１の他端４１ｂであり、第１の絶縁体２０と第２の絶縁体３０との間にワーク２が配置された状態で第１の絶縁体２０と第２の絶縁体３０とワーク２との全体を取り囲む外部に連通している。
As shown in FIGS. 4 and 6, a second portion 41 of the first communication hole is formed in the first flow path member 40. One end 41a of the second portion 41 of the first communication hole communicates with the first portion 35 of the first communication hole, and the other end 41b is open to the atmosphere. The groove 34, the first portion 35 of the first communication hole, and the second portion 41 of the first communication hole form a first communication hole. The other end of the first communication hole is the other end 41b of the second portion 41 of the first communication hole, and the workpiece 2 is disposed between the first insulator 20 and the second insulator 30. In this state, the first insulator 20, the second insulator 30, and the workpiece 2 are connected to the outside surrounding the whole.
図４及び図５に示すように、第２の流路部材４２に第２の連通孔の第２部分４３が形成されている。第２の連通孔の第２部分４３の一端４３ａは第２の連通孔の第１部分３３に連通し、他端４３ｂは負圧源に接続される。凹部３２と、第２の連通孔の第１部分３３と、第２の流路４３とによって、第２の連通孔が形成される。第２の連通孔の他端は、第２の連通孔の第２部分４３の他端４３ｂであり、第１の絶縁体２０と第２の絶縁体３０との間にワーク２が配置された状態で第１の絶縁体２０と第２の絶縁体３０とワーク２との全体を取り囲む外部に連通している。
As shown in FIGS. 4 and 5, a second portion 43 of the second communication hole is formed in the second flow path member 42. One end 43a of the second portion 43 of the second communication hole communicates with the first portion 33 of the second communication hole, and the other end 43b is connected to a negative pressure source. A second communication hole is formed by the recess 32, the first portion 33 of the second communication hole, and the second flow path 43. The other end of the second communication hole is the other end 43b of the second portion 43 of the second communication hole, and the workpiece 2 is disposed between the first insulator 20 and the second insulator 30. In this state, the first insulator 20, the second insulator 30, and the workpiece 2 are connected to the outside surrounding the whole.
図５及び図６に簡略化して図示されているように、第１の絶縁体２０の第１の主面２０ｂに、開口部２２を取り囲むように連続する第１の溝５１が形成されている。第１の溝５１には、環状の第１のシール部材５０が取り付けられている。第１のシール部材５０は、ワーク２と第１の絶縁体２０との間を密封する。
As illustrated in a simplified manner in FIGS. 5 and 6, a first groove 51 is formed on the first main surface 20 b of the first insulator 20 so as to surround the opening 22. . An annular first seal member 50 is attached to the first groove 51. The first seal member 50 seals between the workpiece 2 and the first insulator 20.
第２の絶縁体３０の本体３１の第２の主面３０ａには、第２の溝５３と第３の溝５５が形成されている。第２の溝５３には、第２のシール部材５２が取り付けられている。第２のシール部材５２は、第１の絶縁体２０と第２の絶縁体３０の間を密封する。第３の溝５５には、第３のシール部材５４が取り付けられている。第３のシール部材５４は、ワーク２と第２の絶縁体３０との間を密封する。
A second groove 53 and a third groove 55 are formed on the second main surface 30a of the main body 31 of the second insulator 30. A second seal member 52 is attached to the second groove 53. The second seal member 52 seals between the first insulator 20 and the second insulator 30. A third seal member 54 is attached to the third groove 55. The third seal member 54 seals between the workpiece 2 and the second insulator 30.
ワーク２は、溝３４の手前まで延在し、第１のシール部材５０と第３のシール部材５４との間に挟まれている。なお、第１のシール部材５０と第３のシール部材５４とは、互いに対向する位置からずれた位置に配置されても構わない。
The work 2 extends to the front of the groove 34 and is sandwiched between the first seal member 50 and the third seal member 54. Note that the first seal member 50 and the third seal member 54 may be arranged at positions shifted from positions facing each other.
第１のシール部材５０と、第２のシール部材５２と、第３のシール部材５４と、第１の絶縁体２０と、第２の絶縁体３０と、ワーク２とに囲まれ密閉される第１の空間７０（図８参照）は、溝３４、第１の連通孔の第１部分３５及び第１の連通孔の第２部分４１、すなわち第１の連通孔を介して、第１の絶縁体２０と第２の絶縁体３０との間にワーク２が配置された状態で第１の絶縁体２０と第２の絶縁体３０とワーク２との全体を取り囲む外部に連通している。第１の空間７０の圧力は、第１の連通孔を介して、容易に調整することができる。例えば、第１の連通孔の第２部分４１の他端４１ｂを大気に開放し、第１の空間７０の圧力を大気圧と同じにすることができる。第１の連通孔の第２部分４１の他端４１ｂから減圧又は加圧して、第１の空間７０の圧力を大気圧より低くしても高くしても構わない。
The first seal member 50, the second seal member 52, the third seal member 54, the first insulator 20, the second insulator 30, and the work 2 are surrounded and sealed. The first space 70 (see FIG. 8) has a first insulating hole through the groove 34, the first communication hole first portion 35, and the first communication hole second portion 41, that is, the first communication hole. In a state where the workpiece 2 is disposed between the body 20 and the second insulator 30, the first insulator 20, the second insulator 30, and the workpiece 2 are connected to the outside surrounding the whole. The pressure in the first space 70 can be easily adjusted via the first communication hole. For example, the other end 41b of the second portion 41 of the first communication hole can be opened to the atmosphere, and the pressure in the first space 70 can be made equal to the atmospheric pressure. The pressure in the first space 70 may be lower or higher than the atmospheric pressure by reducing or increasing the pressure from the other end 41b of the second portion 41 of the first communication hole.
第３のシール部材５４と、第２の絶縁体３０と、ワーク２とに囲まれ密閉された第２の空間７４（図８参照）の圧力は、凹部３２、第２の連通孔の第１部分３３及び第２の連通孔の第２部分４３、すなわち第２の連通孔を介して、容易に調整することができる。例えば、第２の連通孔の第２部分４３の他端４３ｂに、第１の絶縁体２０と第２の絶縁体３０との間にワーク２が配置された状態で第１の絶縁体２０と第２の絶縁体３０とワーク２との全体を取り囲む外部に存在する負圧源を接続し、第２の連通孔を介して第２の空間７４を負圧源に連通させ、第２の空間７４の圧力を負圧にする。この場合、第２の空間７４の圧力をめっき液の液圧よりも低い圧力にすることが容易である。第２の空間７４の圧力を負圧にすると、ワーク２を導電ゴム６０に沿わせることができる。
The pressure in the second space 74 (see FIG. 8) enclosed and sealed by the third seal member 54, the second insulator 30, and the work 2 is the first pressure of the recess 32 and the second communication hole. It can be easily adjusted via the portion 33 and the second portion 43 of the second communication hole, that is, the second communication hole. For example, the work piece 2 is disposed between the first insulator 20 and the second insulator 30 at the other end 43b of the second portion 43 of the second communication hole. A negative pressure source existing outside that surrounds the whole of the second insulator 30 and the workpiece 2 is connected, and the second space 74 is communicated with the negative pressure source through the second communication hole, thereby providing a second space. The pressure of 74 is made negative. In this case, it is easy to set the pressure in the second space 74 to a pressure lower than the liquid pressure of the plating solution. When the pressure in the second space 74 is negative, the workpiece 2 can be placed along the conductive rubber 60.
電気めっき用治具１０を用いてワーク２を保持し、めっき液に浸し、電流を流すことによって、ワーク２にめっきを形成する。このとき、第２の空間７４とめっき液との間に第１の空間７０が介在し、第１の空間７０がめっき液に隣り合う。そのため、第１の空間７０の圧力を第２の空間７４の圧力より高くすると、ワーク２を第２の絶縁体３０に沿わせるために負圧される空間とめっき液とが隣り合う場合より、めっき液は第１の空間７０に侵入しにくい。そのため、電気めっき用治具１０は、液漏れが生じにくい。
The workpiece 2 is held using the electroplating jig 10, immersed in a plating solution, and an electric current is passed to form a plating on the workpiece 2. At this time, the first space 70 is interposed between the second space 74 and the plating solution, and the first space 70 is adjacent to the plating solution. Therefore, when the pressure of the first space 70 is made higher than the pressure of the second space 74, the space negatively charged to bring the workpiece 2 along the second insulator 30 and the plating solution are adjacent to each other. The plating solution is unlikely to enter the first space 70. Therefore, the electroplating jig 10 is unlikely to leak.
図４に示すように、第２の連通孔の他端、すなわち第２の連通孔の第２部分４３の他端４３ｂに、開閉部材４４の一端を接続することが好ましい。開閉部材４４は、一端と他端との間が連通する開状態と、一端と他端との間の連通が阻止された閉状態とを切り替えることができるものである。開閉部材４４は、開閉弁や、一端から他端には気体が流れ他端から一端には気体が流れない逆止弁、結合を解除すると一端と他端の間の気体の流れが遮断されるカプラなどである。
As shown in FIG. 4, it is preferable to connect one end of the opening / closing member 44 to the other end of the second communication hole, that is, the other end 43b of the second portion 43 of the second communication hole. The opening / closing member 44 can be switched between an open state in which one end and the other end communicate with each other and a closed state in which communication between the one end and the other end is prevented. The open / close member 44 is an open / close valve, a check valve in which gas flows from one end to the other end, and no gas flows from the other end to the other end. When the coupling is released, the gas flow between the one end and the other end is shut off. For example, a coupler.
例えば、電気めっき用治具１０にワーク２が保持されている組立状態において、開閉部材４４を開状態にし、開閉部材４４の他端に負圧源を接続して吸引することによって、第２の空間７４を負圧にすることができる。開閉部材４４を閉状態にすると、開閉部材４４の他端に接続されている配管等を外しても、第２の空間７４の圧力を保持したまま、ワーク２及び電気めっき用治具１０を自由に搬送することができ、作業がやりやすくなる。
For example, in the assembled state in which the workpiece 2 is held by the electroplating jig 10, the opening / closing member 44 is opened, and a negative pressure source is connected to the other end of the opening / closing member 44 and suction is performed. The space 74 can be set to a negative pressure. When the opening / closing member 44 is closed, the workpiece 2 and the electroplating jig 10 can be freely held while maintaining the pressure in the second space 74 even if the piping connected to the other end of the opening / closing member 44 is removed. This makes it easier to work.
第２の絶縁体３０の凹部３２には、凹部３２の底から順に、金属板６４と、金属薄板６２と、導電ゴム６０とが配置されている。金属板６４、金属薄板６２及び導電ゴム６０は、導電部材であり、互いに接する。金属板６４と、金属薄板６２は、ステンレス等などある。導電ゴム６０は、導電性と弾性を有する。金属板６４は、凹部３２にねじ止めされ、ねじ穴によって、ワーク２に対向する表面に凹凸ができる。この凹凸によって導電ゴム６０が局所的に変形することを防ぐため、金属板６４と導電ゴム６０の間に、金属板６４より厚みが小さい金属薄板６２が配置されている。
In the recess 32 of the second insulator 30, a metal plate 64, a metal thin plate 62, and a conductive rubber 60 are arranged in this order from the bottom of the recess 32. The metal plate 64, the metal thin plate 62, and the conductive rubber 60 are conductive members and are in contact with each other. The metal plate 64 and the metal thin plate 62 are made of stainless steel or the like. The conductive rubber 60 has conductivity and elasticity. The metal plate 64 is screwed to the recess 32, and the surface facing the workpiece 2 is uneven by a screw hole. In order to prevent the conductive rubber 60 from being locally deformed by the unevenness, a metal thin plate 62 having a thickness smaller than that of the metal plate 64 is disposed between the metal plate 64 and the conductive rubber 60.
第１の絶縁体３０の内部には、図５及び図６では不図示の配線が設けられている。配線の一端は、凹部３２に配置された金属板６４に電気的に接続され、配線の他端は、端子１２ａ，１２ｂに電気的に接続されている。電気めっき用電源を端子１２ａ，１２ｂに接続すると、配線、金属板６４と、金属薄板６２と、導電ゴム６０を介して、ワーク２の裏面から給電することができる。前述したように、裏面から給電すると、ワーク２を切断したときに、切断面に導電部が露出しないようにすることが可能になる。
In the first insulator 30, wiring not shown in FIGS. 5 and 6 is provided. One end of the wiring is electrically connected to the metal plate 64 disposed in the recess 32, and the other end of the wiring is electrically connected to the terminals 12a and 12b. When the power source for electroplating is connected to the terminals 12 a and 12 b, power can be supplied from the back surface of the workpiece 2 through the wiring, the metal plate 64, the metal thin plate 62, and the conductive rubber 60. As described above, when power is supplied from the back surface, the conductive portion can be prevented from being exposed to the cut surface when the work 2 is cut.
なお、図９と同様にワークの周囲部分から給電するように構成することも、可能である。
In addition, it is also possible to configure so that power is supplied from the peripheral part of the workpiece as in FIG.
図７のグラフは、電気めっき用治具１０を用いてワーク２を保持し、第１の空間７０を大気圧とし、第２の空間７４をポンプで０．２３ＭＰａ程度まで減圧にした後、ポンプを停止し、ポンプ停止中にリークにより変化する第２の空間７４の圧力と、ワーク２のめっき下地層と端子１２ａ，１２ｂとの間の抵抗値を測定した結果を示している。ワーク２は、約１００ｍｍ角の基板である。
The graph of FIG. 7 shows that the work 2 is held using the electroplating jig 10, the first space 70 is set to atmospheric pressure, and the second space 74 is reduced to about 0.23 MPa by a pump, and then the pump is pumped. And the resistance value between the plating underlayer of the workpiece 2 and the terminals 12a and 12b is measured. The work 2 is a substrate of about 100 mm square.
図７から、第２の空間７４の圧力が０．０６ＭＰａ以下であれば、抵抗値は略一定の低い値を維持していることが分かる。また、０．１ＭＰａ（大気圧）付近で、急激に抵抗値が上昇している。このことから、第２の空間７４の圧力を負圧にすることによって、精度よくめっきを形成できることが分かる。
7 that the resistance value is maintained at a substantially constant low value when the pressure in the second space 74 is 0.06 MPa or less. In addition, the resistance value suddenly increases around 0.1 MPa (atmospheric pressure). From this, it can be seen that the plating can be formed with high accuracy by setting the pressure of the second space 74 to a negative pressure.
例えば、ワーク２が、分割後にそれぞれチップになる個片部分を含む薄板の集合基板の場合、単にワーク２の裏面（めっきが形成される表面とは反対側の面）から個片部分に給電電極を押し付けると、ワーク２は、個片部分の外側が第１及び第２の絶縁体２０，３０の間に挟まれ拘束されるため反ってしまい、給電電極に十分に接触しない部分ができる。そこで、第２の空間７４の圧力を負圧にすることによって、個片部分の全部を給電電極に押し付け、一様に給電することができる。
For example, in the case where the work 2 is a thin collective substrate including individual parts that become chips after division, the feeding electrode is simply applied from the back surface of the work 2 (the surface opposite to the surface on which the plating is formed) to the individual parts. When the workpiece 2 is pressed, the work 2 is warped because the outside of the individual piece portion is sandwiched and restrained between the first and second insulators 20 and 30, and a portion that does not sufficiently contact the power feeding electrode is formed. Therefore, by making the pressure in the second space 74 negative, the entire piece portion can be pressed against the power supply electrode to supply power uniformly.
＜変形例１＞ 第１の連通孔を設けない構成とすることも可能である。この場合、例えば大気中で、電気めっき用治具を用いてワークを保持した後、第２の空間に連通する第２の連通孔を介して真空吸引すると、第２の空間を負圧にするとともに、第１の空間の圧力を第２の空間の圧力より高い大気圧にすることができる。
<Modification 1> It is also possible to adopt a configuration in which the first communication hole is not provided. In this case, for example, when the workpiece is held in the atmosphere using an electroplating jig and then vacuum suction is performed through the second communication hole communicating with the second space, the second space is set to a negative pressure. At the same time, the pressure in the first space can be made higher than the pressure in the second space.
＜変形例２＞ 第２の空間に連通する第２の連通孔を設けない構成とすることも可能である。この場合、例えば真空中で、電気めっき用治具を用いてワークを保持した後、大気中に戻すことによって、第２の空間を負圧にするとともに、第１の空間に連通する第１の連通孔を介して、第１の空間の圧力を第２の空間の圧力より高い大気圧にすることができる。
<Modification 2> It is also possible to adopt a configuration in which the second communication hole communicating with the second space is not provided. In this case, for example, in vacuum, after holding the workpiece using the electroplating jig, the second space is set to a negative pressure by returning it to the atmosphere, and the first space communicated with the first space. The pressure in the first space can be made higher than the pressure in the second space through the communication hole.
＜変形例３＞ 第１の連通孔も第２の連通孔も設けない構成とすることも可能である。この場合、大気圧より低い第１の圧力の雰囲気で、第２の絶縁体にワークと第３のシール部材を組み付けて、第２の空間を第１の圧力にする。次いで、第１の圧力より高い第２の圧力の雰囲気とする。この状態ではワークは第２の圧力により第３のシールに押し付けられるため、ワークの脱落やリークは起こりにくい。次に、第１の絶縁体と、第１のシール部材と、第２のシール部材とをさらに組み付けて、第１の空間を第２の圧力にする。これによって、第２の空間を負圧にするとともに、第１の空間の圧力を第２の空間の圧力より高くすることができる。
<Modification 3> It is also possible to adopt a configuration in which neither the first communication hole nor the second communication hole is provided. In this case, the work and the third seal member are assembled to the second insulator in the atmosphere of the first pressure lower than the atmospheric pressure, and the second space is set to the first pressure. Next, an atmosphere having a second pressure higher than the first pressure is set. In this state, since the work is pressed against the third seal by the second pressure, the work is not easily dropped or leaked. Next, the first insulator, the first seal member, and the second seal member are further assembled to bring the first space to the second pressure. Thereby, while making 2nd space into a negative pressure, the pressure of 1st space can be made higher than the pressure of 2nd space.
＜変形例４＞ 第２の空間を大気圧として、第１の空間の圧力を加圧して大気圧を超える圧力とした状態で、治具に保持したワークを、大気圧又は大気圧より高い圧力に接しているめっき液に浸す。この場合には、第２の空間の圧力は、第１の絶縁体２０の開口部２２を介してめっき液に接するワークの露出部分に作用するめっき液の液圧よりも低い圧力になり、ワークを導電ゴムに押しつけて沿わせることができる。
<Modification 4> With the second space as the atmospheric pressure, the pressure held in the jig is increased to a pressure higher than the atmospheric pressure or higher than the atmospheric pressure while the pressure in the first space is increased to a pressure exceeding the atmospheric pressure. Immerse in the plating solution in contact with In this case, the pressure in the second space is lower than the liquid pressure of the plating solution acting on the exposed portion of the workpiece in contact with the plating solution through the opening 22 of the first insulator 20. Can be pushed along the conductive rubber.
＜まとめ＞ 以上に説明した本発明の電気めっき用治具１０，１０ａを用いると、液漏れが生じにくい。そのため、第１の絶縁体２０と第２の絶縁体３０の締め付けを強くする必要がないので、ワーク２が薄い場合でも割れにくい。また、第１のシール部材５０がワーク２に強く貼り付いてしまい、ワーク２から第１のシール部材５０を剥がす際にワーク２が割れるリスクをなくすことができる。電気めっき用治具１０へのワーク２の着脱を自動化する場合、構造が簡単になる。
<Summary> When the above-described electroplating jigs 10 and 10a of the present invention are used, liquid leakage hardly occurs. Therefore, since it is not necessary to tighten the first insulator 20 and the second insulator 30 strongly, even when the workpiece 2 is thin, it is difficult to break. Further, it is possible to eliminate the risk that the first seal member 50 is strongly adhered to the work 2 and the work 2 is cracked when the first seal member 50 is peeled off from the work 2. When automating the attachment / detachment of the workpiece 2 to / from the electroplating jig 10, the structure becomes simple.
なお、本発明は、上記実施の形態に限定されるものではなく、種々変更を加えて実施することが可能である。
It should be noted that the present invention is not limited to the above embodiment, and can be implemented with various modifications.
例えば、ワークが矩形形状以外であっても、ワークの形状に対応して電気めっき用治具を構成することができる。
For example, even if the workpiece has a shape other than the rectangular shape, the electroplating jig can be configured corresponding to the shape of the workpiece.
２，２ｘ，２ｙ ワーク
１０，１０ａ，１０ｘ，１０ｙ 治具
２０，２０ｘ，２０ｙ 第１の絶縁体
２２ 開口部
３０，３０ｘ，３０ｙ 第２の絶縁体
３２ 凹部（第２の連通孔）
３３ 第２の連通孔の第１部分
３４ 溝（第１の連通孔）
３５ 第１の連通孔の第１部分
４１ 第１の連通孔の第２部分
４３ 第２の連通孔の第２部分
４４ 開閉部材
５０ 第１のシール部材
５２ 第２のシール部材
５４ 第３のシール部材
６０ 導電ゴム（導電部材）
６２ 金属薄板（導電部材）
６４ 金属板（導電部材）
７０ 第１の空間
７２ 第１の連通孔
７４ 第２の空間
７６ 第２の連通孔
７８ 配線 2, 2x, 2y Work 10, 10a, 10x, 10y Jig 20, 20x, 20y First insulator 22 Opening portion 30, 30x, 30y Second insulator 32 Recessed portion (second communication hole)
33 First portion ofsecond communication hole 34 Groove (first communication hole)
35 First portion offirst communication hole 41 Second portion of first communication hole 43 Second portion of second communication hole 44 Opening and closing member 50 First seal member 52 Second seal member 54 Third seal Member 60 Conductive rubber (conductive member)
62 Thin metal plate (conductive member)
64 Metal plate (conductive member)
70First space 72 First communication hole 74 Second space 76 Second communication hole 78 Wiring
１０，１０ａ，１０ｘ，１０ｙ 治具
２０，２０ｘ，２０ｙ 第１の絶縁体
２２ 開口部
３０，３０ｘ，３０ｙ 第２の絶縁体
３２ 凹部（第２の連通孔）
３３ 第２の連通孔の第１部分
３４ 溝（第１の連通孔）
３５ 第１の連通孔の第１部分
４１ 第１の連通孔の第２部分
４３ 第２の連通孔の第２部分
４４ 開閉部材
５０ 第１のシール部材
５２ 第２のシール部材
５４ 第３のシール部材
６０ 導電ゴム（導電部材）
６２ 金属薄板（導電部材）
６４ 金属板（導電部材）
７０ 第１の空間
７２ 第１の連通孔
７４ 第２の空間
７６ 第２の連通孔
７８ 配線 2, 2x,
33 First portion of
35 First portion of
62 Thin metal plate (conductive member)
64 Metal plate (conductive member)
70
Claims (11)
- 主面間を貫通する開口部が形成された第１の絶縁体と、
前記開口部及びそのまわりに対向するように前記第１の絶縁体に沿って配置し前記第１の絶縁体と組み合わせる第２の絶縁体と、
前記第１の絶縁体と組み合わされている前記第２の絶縁体と前記第１の絶縁体との間に、前記開口部及びそのまわりに対向するように、ワークを配置した状態で、前記ワークと前記第１の絶縁体との間に配置され、前記開口部を取り囲み、前記ワークと前記第１の絶縁体との間を密封する環状の第１のシール部材と、
前記第１の絶縁体と組み合わされている前記第２の絶縁体と前記第１の絶縁体との間に配置され、前記ワークを取り囲み、前記第１の絶縁体と前記第２の絶縁体との間を密封する環状の第２のシール部材と、
前記第１の絶縁体と組み合わされている前記第２の絶縁体と前記ワークとの間に配置され、前記ワークと前記第２の絶縁体との間を密封する環状の第３のシール部材と、
を備え、
前記第１のシール部材と前記第２のシール部材と前記第３のシール部材と前記第１の絶縁体と前記第２の絶縁体と前記ワークとに囲まれる第１の空間の圧力を、前記第３のシール部材と前記第２の絶縁体と前記ワークとに囲まれる第２の空間の圧力より高くすることができることを特徴とする、電気めっき用治具。 A first insulator having an opening penetrating between main surfaces;
A second insulator disposed along the first insulator so as to face the opening and the periphery thereof and combined with the first insulator;
In a state in which the workpiece is disposed so as to face the opening and the periphery between the second insulator and the first insulator combined with the first insulator, the workpiece An annular first sealing member disposed between the workpiece and the first insulator, surrounding the opening, and sealing between the workpiece and the first insulator;
The first insulator and the second insulator are disposed between the second insulator and the first insulator combined with the first insulator, surround the workpiece, An annular second sealing member for sealing between
An annular third sealing member disposed between the second insulator combined with the first insulator and the workpiece, and sealing between the workpiece and the second insulator; ,
With
The pressure of the first space surrounded by the first seal member, the second seal member, the third seal member, the first insulator, the second insulator, and the work is An electroplating jig, wherein the pressure can be higher than a pressure in a second space surrounded by a third seal member, the second insulator, and the workpiece. - 前記第１の絶縁体と前記第２の絶縁体のいずれか一方又は両方は、前記第１の絶縁体と前記第２の絶縁体との間に前記ワークが配置された状態で前記第１の絶縁体と前記第２の絶縁体と前記ワークとの全体を取り囲む外部と前記第１の空間とを連通する第１の連通孔が形成されていることを特徴とする、請求項１に記載の電気めっき用治具。 Either or both of the first insulator and the second insulator may be the first insulator in a state where the workpiece is disposed between the first insulator and the second insulator. The 1st communicating hole which connects the exterior which surrounds the whole of an insulator, the 2nd insulator, and the above-mentioned work and the 1st space is formed, It is characterized by the above-mentioned. Electroplating jig.
- 前記第２の絶縁体は、前記第１の絶縁体と前記第２の絶縁体との間に前記ワークが配置された状態で前記第１の絶縁体と前記第２の絶縁体と前記ワークとの全体を取り囲む外部と前記第２の空間とを連通する第２の連通孔が形成されていることを特徴とする、請求項１又は２に記載の電気めっき用治具。 The second insulator includes the first insulator, the second insulator, and the workpiece in a state where the workpiece is disposed between the first insulator and the second insulator. 3. The electroplating jig according to claim 1, wherein a second communication hole is formed to communicate the outside surrounding the whole with the second space. 4.
- 前記第２の連通孔は、前記外部に存在する負圧源に接続され、
前記第２の空間は、前記第２の連通孔を介して前記負圧源に連通され、負圧にされることを特徴とする、請求項３に記載の電気めっき用治具。 The second communication hole is connected to the negative pressure source existing outside,
4. The electroplating jig according to claim 3, wherein the second space communicates with the negative pressure source through the second communication hole to be negative pressure. 5. - 一端と他端との間が連通する開状態と、前記一端と前記他端との間の連通が阻止された閉状態とを切り替えることができ、前記一端が前記第２の連通孔に接続された開閉部材をさらに備えたことを特徴とする、請求項３に記載の電気めっき用治具。 An open state in which one end and the other end communicate with each other can be switched between a closed state in which communication between the one end and the other end is prevented, and the one end is connected to the second communication hole. The electroplating jig according to claim 3, further comprising an openable / closable member.
- 前記第３のシール部材に取り囲まれ前記ワークに対向するように、前記第２の絶縁体に形成された凹部と、
前記凹部に配置される導電部材と、
前記第２の絶縁体に設けられ、前記導電部材に電気的に接続される一端と、電気めっき用電源に電気的に接続される他端とを有する配線と、
をさらに備えたことを特徴とする、請求項１乃至５のいずれか一つに記載の電気めっき用治具。 A recess formed in the second insulator so as to be surrounded by the third seal member and to face the workpiece;
A conductive member disposed in the recess;
A wiring provided on the second insulator and having one end electrically connected to the conductive member and the other end electrically connected to a power source for electroplating;
The electroplating jig according to any one of claims 1 to 5, further comprising: - 主面間を貫通する開口部が形成された第１の絶縁体に沿って、前記開口部及びそのまわりに対向するように、第２の絶縁体を配置するとともに、前記第１の絶縁体と前記第２の絶縁体との間に、前記開口部及びそのまわりに対向するようにワークを配置し、
前記第１の絶縁体と前記ワークとの間に配置され前記開口部を取り囲む環状の第１のシール部材によって、前記ワークと前記第１の絶縁体との間を密封し、
前記第１の絶縁体と前記第２の絶縁体との間に配置され前記ワークを取り囲む環状の第２のシール部材によって、前記第１の絶縁体と前記第２の絶縁体との間を密封し、
前記ワークと前記第２の絶縁体との間に配置された環状の第３のシール部材によって、前記ワークと前記第２の絶縁体との間を密封し、
前記第１のシール部材と前記第２のシール部材と前記第３のシール部材と前記第１の絶縁体と前記第２の絶縁体と前記ワークとに囲まれる第１の空間の圧力を、前記第３のシール部材と前記第２の絶縁体と前記ワークとに囲まれる第２の空間の圧力より高くし、かつ前記第２の空間をめっき液の液圧よりも低い圧力にした状態で、前記ワークにめっきを形成することを特徴とする、電気めっき方法。 A second insulator is disposed along the first insulator formed with an opening penetrating between the main surfaces so as to face the opening and the periphery thereof, and the first insulator and Between the second insulator, a work is disposed so as to face the opening and its surroundings,
Sealing between the workpiece and the first insulator by an annular first seal member disposed between the first insulator and the workpiece and surrounding the opening;
A space between the first insulator and the second insulator is sealed by an annular second seal member disposed between the first insulator and the second insulator and surrounding the workpiece. And
Sealing between the workpiece and the second insulator by an annular third sealing member disposed between the workpiece and the second insulator;
The pressure of the first space surrounded by the first seal member, the second seal member, the third seal member, the first insulator, the second insulator, and the work is In a state where the pressure of the second space surrounded by the third seal member, the second insulator, and the workpiece is higher than the pressure of the plating solution, An electroplating method, wherein plating is formed on the workpiece. - 前記第１の絶縁体と前記第２の絶縁体のいずれか一方又は両方は、前記第１の絶縁体と前記第２の絶縁体との間に前記ワークが配置された状態で前記第１の絶縁体と前記第２の絶縁体と前記ワークとの全体を取り囲む外部と前記第１の空間とを連通する第１の連通孔が形成されていることを特徴とする、請求項７に記載の電気めっき方法。 Either or both of the first insulator and the second insulator may be the first insulator in a state where the workpiece is disposed between the first insulator and the second insulator. The 1st communicating hole which connects the exterior which surrounds the whole of an insulator, the 2nd insulator, and the above-mentioned work and the 1st space is formed, It is characterized by the above-mentioned. Electroplating method.
- 前記第２の絶縁体は、前記第１の絶縁体と前記第２の絶縁体との間に前記ワークが配置された状態で前記第１の絶縁体と前記第２の絶縁体と前記ワークとの全体を取り囲む外部と前記第２の空間とを連通する第２の連通孔が形成されていることを特徴とする、請求項７又は８に記載の電気めっき方法。 The second insulator includes the first insulator, the second insulator, and the workpiece in a state where the workpiece is disposed between the first insulator and the second insulator. 9. The electroplating method according to claim 7, wherein a second communication hole is formed to communicate the outside surrounding the whole with the second space.
- 一端と他端との間が連通する開状態と、前記一端と前記他端との間の連通が阻止された閉状態とを切り替えることができる開閉部材の前記一端が、前記第２の連通孔に接続されていることを特徴とする、請求項９に記載の電気めっき方法。 The one end of the opening / closing member capable of switching between an open state in which the one end and the other end communicate with each other and a closed state in which the communication between the one end and the other end is blocked is the second communication hole. The electroplating method according to claim 9, wherein the electroplating method is connected to the electrode.
- 前記第３のシール部材に取り囲まれ前記ワークに対向するように前記第２の絶縁体に形成された凹部に、導電部材を配置し、
前記第２の絶縁体に設けられた配線の一端と前記導電部材とを電気的に接続し、かつ前記配線の他端を電気めっき用電源に電気的に接続した状態で、前記ワークにめっきを形成することを特徴とする、請求項７乃至１０のいずれか一つに記載の電気めっき方法。 A conductive member is disposed in a recess formed in the second insulator so as to be surrounded by the third seal member and to face the workpiece.
In a state where one end of the wiring provided in the second insulator is electrically connected to the conductive member and the other end of the wiring is electrically connected to a power source for electroplating, the workpiece is plated. The electroplating method according to claim 7, wherein the electroplating method is formed.
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| WO2019003891A1 (en) * | 2017-06-28 | 2019-01-03 | 株式会社荏原製作所 | Substrate holder and plating device |
| JP2019007075A (en) * | 2017-06-28 | 2019-01-17 | 株式会社荏原製作所 | Substrate holder and plating device |
| JP2021191902A (en) * | 2017-06-28 | 2021-12-16 | 株式会社荏原製作所 | Substrate holder and plating device |
| US11299817B2 (en) | 2017-06-28 | 2022-04-12 | Ebara Corporation | Holder for holding substrate and system for plating |
| JP7220758B2 (en) | 2017-06-28 | 2023-02-10 | 株式会社荏原製作所 | Substrate holder and plating equipment |
| US11718925B2 (en) | 2017-06-28 | 2023-08-08 | Ebara Corporation | Holder for holding substrate and system for plating |
| JP2021105221A (en) * | 2017-08-29 | 2021-07-26 | マクセルホールディングス株式会社 | Support device |
| JP7203888B2 (en) | 2017-08-29 | 2023-01-13 | マクセル株式会社 | Support device |
| TWI836217B (en) | 2020-08-25 | 2024-03-21 | 奧地利商勝思科技有限公司 | Plating frame unit for holding a substrate in a chemical and/or electrolytic surface treatment of the substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6481910B2 (en) | 2019-03-13 |
| JPWO2016190180A1 (en) | 2018-03-29 |
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