WO2016147284A1 - Formation method and formation device - Google Patents

Formation method and formation device Download PDF

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Publication number
WO2016147284A1
WO2016147284A1 PCT/JP2015/057632 JP2015057632W WO2016147284A1 WO 2016147284 A1 WO2016147284 A1 WO 2016147284A1 JP 2015057632 W JP2015057632 W JP 2015057632W WO 2016147284 A1 WO2016147284 A1 WO 2016147284A1
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WO
WIPO (PCT)
Prior art keywords
curable resin
ultraviolet curable
discharged
electronic component
protrusion
Prior art date
Application number
PCT/JP2015/057632
Other languages
French (fr)
Japanese (ja)
Inventor
明宏 川尻
政利 藤田
良崇 橋本
謙磁 塚田
雅登 鈴木
Original Assignee
富士機械製造株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 富士機械製造株式会社 filed Critical 富士機械製造株式会社
Priority to JP2017505895A priority Critical patent/JP6479957B2/en
Priority to PCT/JP2015/057632 priority patent/WO2016147284A1/en
Publication of WO2016147284A1 publication Critical patent/WO2016147284A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C67/00Shaping techniques not covered by groups B29C39/00 - B29C65/00, B29C70/00 or B29C73/00
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00Processes of additive manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00Apparatus for additive manufacturing; Details thereof or accessories therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1515Shape
    • H01L2924/15153Shape the die mounting substrate comprising a recess for hosting the device

Definitions

  • the present invention relates to a forming method and a forming apparatus for forming a structure using a discharge device for discharging a curable resin.
  • a structure is formed using a discharge device that discharges a curable resin
  • a discharge device that discharges a curable resin
  • the curable resin is discharged in a thin film shape and the thin film curable resin is cured
  • the curable resin is discharged again in a thin film shape.
  • a structure is formed by laminating those thin film-like curable resins.
  • thin film-like curable resin is laminated
  • the surface of the curable resin is flattened by a flattening device such as a roller or a squeegee, and thereafter The curable resin is cured. Then, the curable resin is discharged again on the flat curable resin.
  • the forming apparatus described in the above-mentioned patent document it is possible to flatten the surface of the curable resin discharged from the discharging apparatus to some extent and form an appropriate structure.
  • a protrusion or the like is disposed on the base material from which the curable resin is discharged.
  • the projections may hinder the operation of the flattening device, and the curable resin may not be flattened.
  • a component is placed around the protruding portion and the curable resin is discharged onto the component.
  • a forming method of the present invention is a forming method for forming a structure using a curable resin by using a discharge device that discharges a curable resin, wherein the forming method includes a protrusion portion.
  • a flattening step of flattening the upper end of the conductive resin at the upper end position of the protrusion.
  • a forming apparatus of the present invention includes a discharge device that discharges a curable resin, a flattening device that flattens the curable resin discharged by the discharge device, and the discharge device. And a control device for controlling the operation of the flattening device, and forming a structure made of a curable resin, wherein the control device is provided with a protrusion and is higher than the protrusion.
  • a discharge device operation control unit that discharges a curable resin with the discharge device so as to cover the component on a substrate on which a component with a small size is placed, and the curable property discharged with the discharge device
  • the flattening device operates to flatten the upper end of the curable resin discharged by the discharge device by the flattening device at the upper end position of the protrusion.
  • the forming method and the forming apparatus of the present invention when a component is placed around the protrusion and the curable resin is discharged so as to cover the component, the discharged curable resin When the height exceeds the upper end position of the protrusion, the upper end of the curable resin is flattened at the upper end position of the protrusion by the flattening device. Thereby, even if it is a case where components are mounted in the circumference
  • FIG. 1 shows an electronic device manufacturing apparatus 10.
  • the electronic device manufacturing apparatus (hereinafter sometimes abbreviated as “manufacturing apparatus”) 10 includes a transport apparatus 20, a modeling unit 22, a component mounting unit 24, and a control apparatus (see FIG. 5) 26.
  • the conveying device 20, the modeling unit 22, and the component mounting unit 24 are disposed on the base 28 of the manufacturing apparatus 10.
  • the base 28 has a generally rectangular shape.
  • the longitudinal direction of the base 28 is orthogonal to the X-axis direction
  • the short direction of the base 28 is orthogonal to both the Y-axis direction, the X-axis direction, and the Y-axis direction.
  • the direction will be described as the Z-axis direction.
  • the transport device 20 includes an X-axis slide mechanism 30 and a Y-axis slide mechanism 32.
  • the X-axis slide mechanism 30 has an X-axis slide rail 34 and an X-axis slider 36.
  • the X-axis slide rail 34 is disposed on the base 28 so as to extend in the X-axis direction.
  • the X-axis slider 36 is held by an X-axis slide rail 34 so as to be slidable in the X-axis direction.
  • the X-axis slide mechanism 30 has an electromagnetic motor (see FIG. 5) 38, and the X-axis slider 36 moves to an arbitrary position in the X-axis direction by driving the electromagnetic motor 38.
  • the Y axis slide mechanism 32 includes a Y axis slide rail 50 and a stage 52.
  • the Y-axis slide rail 50 is disposed on the base 28 so as to extend in the Y-axis direction, and is movable in the X-axis direction.
  • One end of the Y-axis slide rail 50 is connected to the X-axis slider 36.
  • a stage 52 is held on the Y-axis slide rail 50 so as to be slidable in the Y-axis direction.
  • the Y-axis slide mechanism 32 has an electromagnetic motor (see FIG. 5) 56, and the stage 52 moves to an arbitrary position in the Y-axis direction by driving the electromagnetic motor 56.
  • the stage 52 moves to an arbitrary position on the base 28 by driving the X-axis slide mechanism 30 and the Y-axis slide mechanism 32.
  • the stage 52 has a base 60, a holding device 62, and a lifting device 64.
  • the base 60 is formed in a flat plate shape, and a circuit board or the like is placed on the upper surface.
  • the holding device 62 is provided on both sides of the base 60 in the X-axis direction. Then, both edge portions in the X-axis direction of the circuit board or the like placed on the base 60 are sandwiched by the holding device 62, whereby the circuit board or the like is fixedly held.
  • the lifting device 64 is disposed below the base 60 and lifts the base 60.
  • the modeling unit 22 is, for example, a unit that models a three-dimensional structure with an ultraviolet curable resin on a circuit board (see FIG. 2) 70 placed on the base 60 of the stage 52, and includes a printing unit 72 and a curing unit. Part 74.
  • the printing unit 72 includes an inkjet head 76, and discharges an ultraviolet curable resin onto the circuit board 70 placed on the base 60.
  • the inkjet head 76 may be, for example, a piezo method using a piezoelectric element, or a thermal method in which a resin is heated to generate bubbles to be discharged from a nozzle port.
  • the curing unit 74 includes a flattening device 78 and an irradiation device 80 as shown in FIG.
  • the flattening device 78 flattens the upper surface of the ultraviolet curable resin discharged onto the circuit board 70 by the ink jet head 76.
  • the surface of the ultraviolet curable resin is smoothed while the surface of the ultraviolet curable resin is leveled.
  • the thickness of the ultraviolet curable resin is made uniform by scraping with a blade.
  • the irradiation device 80 includes a mercury lamp or LED as a light source, and irradiates the ultraviolet curable resin discharged on the circuit board 70 with ultraviolet rays. Thereby, the ultraviolet curable resin discharged on the circuit board 70 is cured, and a three-dimensional structure is formed.
  • the component mounting unit 24 is, for example, a unit for mounting an electronic component (see FIG. 4) 82 on a circuit board 70 placed on the base 60 of the stage 52. As shown in FIG. And a mounting portion 88.
  • the supply unit 86 includes a plurality of tape feeders 90 (see FIG. 5) for feeding out the taped electronic components 82 one by one, and supplies the electronic components 82 at the supply position.
  • the supply unit 86 is not limited to the tape feeder 90, and may be a tray-type supply device that picks up and supplies the electronic component 82 from the tray. Further, the supply unit 86 may be configured to include both a tape type and a tray type, or other supply devices.
  • the mounting unit 88 includes a mounting head (see FIG. 5) 96 and a moving device (see FIG. 5) 98.
  • the mounting head 96 has a suction nozzle 100 for holding the electronic component 82.
  • the moving device 98 moves the mounting head 96 between the supply position of the electronic component 82 by the tape feeder 90 and the circuit board 70 placed on the base 60.
  • the mounting portion 88 the electronic component 82 supplied from the tape feeder 90 is held by the suction nozzle 100, and the electronic component 82 held by the suction nozzle 100 is mounted on the circuit board 70.
  • the mounting head 96 includes a nozzle lifting device (not shown) that lifts and lowers the suction nozzle 100 and a nozzle rotation device (not shown) that rotates the suction nozzle 100 about its axis. Thereby, the position of the electronic component 82 held by the suction nozzle 100 in the Z-axis direction and the holding posture of the electronic component 82 can be changed.
  • the mounting head 96 also has an imaging device (not shown) for imaging the circuit board 70 and the tape feeder 90. Accordingly, it is possible to confirm the mounting position of the electronic component 82 on the circuit board 70, the supply position of the electronic component 82 by the tape feeder 90, and the like based on the imaging data.
  • the control device 26 includes a controller 102 and a plurality of drive circuits 104 as shown in FIG.
  • the plurality of drive circuits 104 are connected to the electromagnetic motors 38 and 56, the holding device 62, the lifting device 64, the inkjet head 76, the flattening device 78, the irradiation device 80, the tape feeder 90, the mounting head 96, and the moving device 98.
  • the controller 102 includes a CPU, a ROM, a RAM, and the like, mainly a computer, and is connected to a plurality of drive circuits 104. Thereby, the operation of the transport device 20, the modeling unit 22, and the component mounting unit 24 is controlled by the controller 102.
  • the electronic component 82 is mounted on the circuit board 70 with the above-described configuration, and the electronic component 82 is sealed with an ultraviolet curable resin.
  • the circuit board 70 is set on the base 60 of the stage 52, and the stage 52 is moved below the modeling unit 22.
  • the ultraviolet curable resin is discharged onto the circuit board 70 by the inkjet head 76.
  • the ultraviolet curable resin 110 a is discharged in a thin film shape onto the circuit board 70 by the inkjet head 76.
  • the ultraviolet curable resin 110 a is discharged on the circuit board 70 in a generally “B” shape.
  • the thin-film ultraviolet curable resin 110 a is flattened at the upper end by the flattening device 78, and the flattened ultraviolet curable resin 110 a is irradiated with ultraviolet rays by the irradiation device 80. As a result, the thin film ultraviolet curable resin 110a is cured.
  • the ultraviolet curable resin 110a When the ultraviolet curable resin 110a is cured, the ultraviolet curable resin 110b is discharged onto the ultraviolet curable resin 110a by the inkjet head 76 in a thin film shape. Then, the flattening of the ultraviolet curable resin 110b by the flattening device 78 and the curing of the ultraviolet curable resin 110b by the irradiation device 80 are performed. Further, the ultraviolet curable resin 110c is ejected in a thin film shape onto the ultraviolet curable resin 110b by the inkjet head 76, the flattening of the ultraviolet curable resin 110c by the flattening device 78, and the curing of the ultraviolet curable resin 110c by the irradiation device 80. And done.
  • the ultraviolet curable resin is laminated, so that a three-dimensional structure 112 (hereinafter sometimes referred to as “cavity compartment”) that divides a cavity by four wall surfaces is formed on the circuit board 70. It is formed.
  • the height dimension of this cavity division 112 is made higher than the height dimension of the electronic component 82 mentioned later.
  • the stage 52 is moved below the component mounting unit 24.
  • the electronic component 82 is supplied by the tape feeder 90, and the electronic component 82 is held by the suction nozzle 100 of the mounting head 96. Then, the electronic component 82 held by the suction nozzle 100 is mounted inside the cavity partition 112 of the circuit board 70 as shown in FIG.
  • the stage 52 is moved below the modeling unit 22.
  • the ultraviolet curable resin is discharged into the cavity partition 112 by the inkjet head 76.
  • the ultraviolet curable resin 114 is discharged into a thin film shape at a location where the electronic component 82 inside the cavity partition 112 is not mounted.
  • the ultraviolet curable resin 114 is discharged into the cavity partition 112 by the irradiation device 80 without being flattened.
  • the ultraviolet curable resin of the location in which the electronic component 82 inside the cavity partition 112 is not mounted is hardened.
  • the ultraviolet curable resin is discharged in a thin film shape by the inkjet head 76 onto the electronic component 82 inside the cavity partition 112 and the cured ultraviolet curable resin 114.
  • the upper end portion of the ultraviolet curable resin 114 is flattened by the flattening device 78. It becomes.
  • the upper end portion of the ultraviolet curable resin 114 is flattened by the flattening device 78 at the upper end position of the cavity partition 112. Accordingly, the upper end surface of the ultraviolet curable resin 114 and the upper end surface of the cavity partition 112 are flush with each other.
  • the ultraviolet curable resin 114 is irradiated with ultraviolet rays by the irradiation device 80, and the ultraviolet curable resin 114 is cured.
  • the electronic component 82 is sealed inside the three-dimensional structure formed of the ultraviolet curable resin.
  • the electronic component 82 is mounted on the circuit board 70, and the electronic component 82 is sealed with the three-dimensional structure made of ultraviolet curable resin.
  • the electronic component 82 is mounted at an appropriate position inside the cavity partition 112 of the circuit board 70 .
  • the electronic component 82 may be mounted at a position shifted from an appropriate position (dotted line in the figure).
  • the ultraviolet curable resin 114 is discharged into the cavity partition 112
  • FIG. There are places where there are too many and too few places. Thereby, a part of the upper end portion of the ultraviolet curable resin 114 discharged into the cavity compartment 112 becomes considerably higher than the upper end surface of the cavity compartment 112, and the other part of the ultraviolet curable resin 114 becomes the cavity compartment.
  • the interior of the cavity object 112 is made of the ultraviolet curable resin 114 by being flattened by the flattening device 78 at the upper end position of the cavity object 112. Filled and the electronic component 82 is properly sealed. Specifically, the flattening device 78 scrapes the excess UV curable resin 114 at a location higher than the upper end surface of the cavity partition 112 to the planarization device 78 at the upper end position of the cavity partition 112.
  • the excess UV curable resin 114 is filled in a portion lower than the upper end surface of the cavity partition 112.
  • the upper end portion of the ultraviolet curable resin 114 is made uniform with the upper end surface of the cavity partition 112, and the upper end surface of the ultraviolet curable resin 114 and the upper end surface of the cavity partition 112 are surfaces. Become one.
  • the electronic component 82 can be appropriately sealed inside the three-dimensional structure formed of the ultraviolet curable resin. It becomes.
  • the electronic component 82 is mounted on the circuit board 70, and the electronic component 82 is sealed with a three-dimensional structure made of an ultraviolet curable resin. It is also possible to seal predetermined parts with a three-dimensional structure formed of an ultraviolet curable resin.
  • the existing molded product 120 is placed on the base 60 of the stage 52.
  • the molded product 120 is generally in the shape of a rectangular parallelepiped, and is formed with a recess 122 that opens to the upper end surface. That is, the molded product 120 has a bottomed quadrangular cylindrical shape, in other words, a bowl shape.
  • a component 124 is placed in the recess 122 of the molded product 120.
  • the stage 52 is moved below the modeling unit 22.
  • the ultraviolet curable resin 114 is discharged in a thin film shape by the inkjet head 76 onto a portion where the component 124 in the concave portion 122 of the molded product 120 is not placed.
  • the ultraviolet curable resin 114 is not flattened and the ultraviolet curable resin 114 discharged into the concave portion 122 of the molded product 120 by the irradiation device 80.
  • the ultraviolet curable resin of the location in which the component 124 in the recessed part 122 of the molded object 120 is not mounted is hardened
  • the ultraviolet curable resin is discharged in a thin film shape by the inkjet head 76 onto the component 124 in the recess 122 of the molded product 120 and the cured ultraviolet curable resin 114.
  • the upper end portion of the ultraviolet curable resin 114 is flattened by the flattening device 78. It becomes.
  • the upper end portion of the ultraviolet curable resin 114 is flattened by the flattening device 78 at the upper end position of the molded product 120. Thereby, the upper end surface of the ultraviolet curable resin 114 and the upper end surface of the molded product 120 are flush with each other.
  • the ultraviolet curable resin 114 is irradiated with ultraviolet rays by the irradiation device 80, and the ultraviolet curable resin 114 is cured. Thereby, inside the existing molded object 120, the component 124 is sealed by the three-dimensional structure molded by the ultraviolet curable resin.
  • the controller 102 of the control device 26 includes an inkjet operation control unit 130 and a flattening device operation control unit 132, as shown in FIG.
  • the ink jet operation control unit 130 is a functional unit for controlling the operation of the ink jet head 76 and discharging the ultraviolet curable resin into the cavity partition 112 or the molded product 120.
  • the flattening device operation control unit 132 is a functional unit for controlling the operation of the flattening device 78 to flatten the upper end portion of the ultraviolet curable resin at the upper end position of the cavity partition 112 or the molded product 120.
  • the manufacturing apparatus 10 is an example of a forming apparatus.
  • the control device 26 is an example of a control device.
  • the circuit board 70 is an example of a base material.
  • the ink jet head 76 is an example of an ejection device.
  • the flattening device 78 is an example of a flattening device.
  • the electronic component 82 is an example of a component.
  • the cavity partition 112 is an example of a protrusion.
  • the molded product 120 is an example of a protrusion.
  • the part 124 is an example of a part.
  • the ink jet operation control unit 130 is an example of a discharge device operation control unit.
  • the flattening device operation control unit 132 is an example of a flattening device operation control unit.
  • this invention is not limited to the said Example, It is possible to implement in the various aspect which gave various change and improvement based on the knowledge of those skilled in the art.
  • the components in the cavity such as the inside of the cavity partition 112 and the inside of the concave portion 122 of the molded product 120 are sealed with a three-dimensional structure made of an ultraviolet curable resin.
  • a component such as the electronic component 82 on the side of the non-membered member and seal the component with a three-dimensional structure made of an ultraviolet curable resin.
  • an ultraviolet curable resin that is cured by irradiation with ultraviolet rays is employed, but various curable resins such as a thermosetting resin that is cured by heat can be employed.

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Abstract

In this formation device, cavity partitions 112 are formed on a circuit board 70, and an electronic component 82 is mounted inside the cavity partitions 112. An ultraviolet curing resin 114 is discharged so as to cover the electronic component 82. If the height of the discharged ultraviolet curing resin 114 surpasses a top end position of the cavity partitions 112, the top end of the ultraviolet curing resin 114 is flattened to the top end position of the cavity partitions 112 by a flattening device 78. Due to this configuration, the ultraviolet curing resin 114 can be appropriately flattened even when the electronic component 82 is mounted inside the cavity partitions 112.

Description

形成方法及び形成装置Forming method and forming apparatus
 本発明は、硬化性樹脂を吐出する吐出装置を用いて、構造物を形成する形成方法及び形成装置に関する。 The present invention relates to a forming method and a forming apparatus for forming a structure using a discharge device for discharging a curable resin.
 硬化性樹脂を吐出する吐出装置を用いて、構造物が形成される際には、一般的に、硬化性樹脂が薄膜状に吐出され、その薄膜状の硬化性樹脂が硬化された後に、その硬化した硬化性樹脂の上に、再度、薄膜状に硬化性樹脂が吐出される。そして、それら薄膜状の硬化性樹脂が積層されることで、構造物が形成される。このように、薄膜状の硬化性樹脂が積層される際には、硬化性樹脂が吐出される箇所は、平坦面であることが好ましい。このため、下記特許文献に記載の形成装置では、吐出された硬化性樹脂が硬化される前に、その硬化性樹脂の表面が、ローラ、スキージ等の平坦化装置により、平坦化され、その後に、硬化性樹脂が硬化される。そして、その平坦な硬化性樹脂の上に、再度、硬化性樹脂が吐出される。 When a structure is formed using a discharge device that discharges a curable resin, generally, after the curable resin is discharged in a thin film shape and the thin film curable resin is cured, On the cured curable resin, the curable resin is discharged again in a thin film shape. And a structure is formed by laminating those thin film-like curable resins. Thus, when thin film-like curable resin is laminated | stacked, it is preferable that the location where curable resin is discharged is a flat surface. For this reason, in the forming apparatus described in the following patent document, before the discharged curable resin is cured, the surface of the curable resin is flattened by a flattening device such as a roller or a squeegee, and thereafter The curable resin is cured. Then, the curable resin is discharged again on the flat curable resin.
特表2007-531641号公報Special table 2007-551641 gazette
 上記特許文献に記載の形成装置によれば、ある程度、吐出装置から吐出された硬化性樹脂の表面を平坦化し、適切な構造部を形成することが可能となる。しかしながら、硬化性樹脂が吐出される基材の上に、突起物等が配設されている場合がある。このような場合には、その突起物が、平坦化装置の作動の妨げとなり、硬化性樹脂を平坦化することができない虞がある。また、例えば、その突起部の周囲等に、部品が載置されており、その部品の上に硬化性樹脂が吐出される場合もある。このような場合には、部品の上に吐出された硬化性樹脂の上端部と、部品以外の箇所に吐出された硬化性樹脂の上端部とでは凹凸となりやすいが、突起部により、適切に硬化性樹脂を平坦化することができない虞がある。本発明は、そのような実情に鑑みてなされたものであり、突起部の周囲等に部品が載置されている場合であっても、適切に硬化性樹脂を平坦化することを課題とする。 According to the forming apparatus described in the above-mentioned patent document, it is possible to flatten the surface of the curable resin discharged from the discharging apparatus to some extent and form an appropriate structure. However, there may be a case where a protrusion or the like is disposed on the base material from which the curable resin is discharged. In such a case, the projections may hinder the operation of the flattening device, and the curable resin may not be flattened. Further, for example, there is a case where a component is placed around the protruding portion and the curable resin is discharged onto the component. In such a case, the upper end portion of the curable resin discharged onto the part and the upper end portion of the curable resin discharged to a place other than the component are likely to be uneven, but the protrusions are appropriately cured. There is a possibility that the functional resin cannot be flattened. This invention is made | formed in view of such a situation, and makes it a subject to planarize curable resin appropriately even when it is a case where components are mounted in the circumference | surroundings etc. of a projection part. .
 上記課題を解決するために、本発明の形成方法は、硬化性樹脂を吐出する吐出装置を用いて、硬化性樹脂による構造物を形成する形成方法であって、前記形成方法が、突起部が配設された基材の上に、その突起部より高さ方向の寸法が小さい部品を載置する載置工程と、前記載置工程において載置された部品を覆うように前記基材の上に、前記吐出装置により硬化性樹脂を吐出する吐出工程と、前記吐出工程において吐出された硬化性樹脂の高さが前記突起部の上端位置を超えた際に、前記吐出工程において吐出された硬化性樹脂の上端を、前記突起部の上端位置において平坦化させる平坦化工程とを含むことを特徴とする。 In order to solve the above problems, a forming method of the present invention is a forming method for forming a structure using a curable resin by using a discharge device that discharges a curable resin, wherein the forming method includes a protrusion portion. A placement step of placing a component having a dimension in the height direction smaller than the protruding portion on the disposed base material, and a top of the base material so as to cover the component placed in the placement step. A discharge step of discharging a curable resin by the discharge device, and a hardening discharged in the discharge step when the height of the curable resin discharged in the discharge step exceeds the upper end position of the protrusion. A flattening step of flattening the upper end of the conductive resin at the upper end position of the protrusion.
 また、上記課題を解決するために、本発明の形成装置は、硬化性樹脂を吐出する吐出装置と、前記吐出装置により吐出された硬化性樹脂を平坦化させる平坦化装置と、前記吐出装置と平坦化装置との作動を制御する制御装置とを備え、硬化性樹脂による構造物を形成する形成装置であって、前記制御装置が、突起部が配設されるとともに、その突起部より高さ方向の寸法が小さい部品が載置された基材の上に、その部品を覆うように、前記吐出装置により硬化性樹脂を吐出する吐出装置作動制御部と、前記吐出装置により吐出された硬化性樹脂の高さが前記突起部の上端位置を超えた際に、前記吐出装置により吐出された硬化性樹脂の上端を、前記突起部の上端位置において前記平坦化装置により平坦化させる平坦化装置作動制御部とを有することを特徴とする。 In order to solve the above problems, a forming apparatus of the present invention includes a discharge device that discharges a curable resin, a flattening device that flattens the curable resin discharged by the discharge device, and the discharge device. And a control device for controlling the operation of the flattening device, and forming a structure made of a curable resin, wherein the control device is provided with a protrusion and is higher than the protrusion. A discharge device operation control unit that discharges a curable resin with the discharge device so as to cover the component on a substrate on which a component with a small size is placed, and the curable property discharged with the discharge device When the height of the resin exceeds the upper end position of the protrusion, the flattening device operates to flatten the upper end of the curable resin discharged by the discharge device by the flattening device at the upper end position of the protrusion. With control unit And wherein the Rukoto.
 本発明の形成方法および、形成装置では、突起部の周囲等に部品が載置されており、その部品を覆うように、硬化性樹脂が吐出された場合に、その吐出された硬化性樹脂の高さが突起部の上端位置を超えた際に、その硬化性樹脂の上端が、平坦化装置によって、突起部の上端位置において平坦化される。これにより、突起部の周囲等に部品が載置されている場合であっても、硬化樹脂を適切に平坦化させることが可能となる。 In the forming method and the forming apparatus of the present invention, when a component is placed around the protrusion and the curable resin is discharged so as to cover the component, the discharged curable resin When the height exceeds the upper end position of the protrusion, the upper end of the curable resin is flattened at the upper end position of the protrusion by the flattening device. Thereby, even if it is a case where components are mounted in the circumference | surroundings etc. of a projection part, it becomes possible to planarize hardening resin appropriately.
電子デバイス製造装置を示す図である。It is a figure which shows an electronic device manufacturing apparatus. 造形ユニットの印刷部を示す概略図である。It is the schematic which shows the printing part of a modeling unit. 造形ユニットの硬化部を示す概略図である。It is the schematic which shows the hardening part of a modeling unit. 部品実装ユニットの実装部を示す概略図である。It is the schematic which shows the mounting part of a component mounting unit. 制御装置を示すブロック図である。It is a block diagram which shows a control apparatus. 構造物の形成工程を説明するための模式図である。It is a schematic diagram for demonstrating the formation process of a structure. 構造物の形成工程を説明するための模式図である。It is a schematic diagram for demonstrating the formation process of a structure. 構造物の形成工程を説明するための模式図である。It is a schematic diagram for demonstrating the formation process of a structure. 構造物の形成工程を説明するための模式図である。It is a schematic diagram for demonstrating the formation process of a structure. 構造物の形成工程を説明するための模式図である。It is a schematic diagram for demonstrating the formation process of a structure. 構造物の形成工程を説明するための模式図である。It is a schematic diagram for demonstrating the formation process of a structure. 構造物の形成工程を説明するための模式図である。It is a schematic diagram for demonstrating the formation process of a structure. 構造物の形成工程を説明するための模式図である。It is a schematic diagram for demonstrating the formation process of a structure. 構造物の形成工程を説明するための模式図である。It is a schematic diagram for demonstrating the formation process of a structure. 構造物の形成工程を説明するための模式図である。It is a schematic diagram for demonstrating the formation process of a structure.
 図1に電子デバイス製造装置10を示す。電子デバイス製造装置(以下、「製造装置」と略す場合がある)10は、搬送装置20と、造形ユニット22と、部品実装ユニット24と、制御装置(図5参照)26を備える。それら搬送装置20と造形ユニット22と部品実装ユニット24とは、製造装置10のベース28の上に配置されている。ベース28は、概して長方形状をなしており、以下の説明では、ベース28の長手方向をX軸方向、ベース28の短手方向をY軸方向、X軸方向及びY軸方向の両方に直交する方向をZ軸方向と称して説明する。 FIG. 1 shows an electronic device manufacturing apparatus 10. The electronic device manufacturing apparatus (hereinafter sometimes abbreviated as “manufacturing apparatus”) 10 includes a transport apparatus 20, a modeling unit 22, a component mounting unit 24, and a control apparatus (see FIG. 5) 26. The conveying device 20, the modeling unit 22, and the component mounting unit 24 are disposed on the base 28 of the manufacturing apparatus 10. The base 28 has a generally rectangular shape. In the following description, the longitudinal direction of the base 28 is orthogonal to the X-axis direction, and the short direction of the base 28 is orthogonal to both the Y-axis direction, the X-axis direction, and the Y-axis direction. The direction will be described as the Z-axis direction.
 搬送装置20は、X軸スライド機構30と、Y軸スライド機構32とを備えている。そのX軸スライド機構30は、X軸スライドレール34とX軸スライダ36とを有している。X軸スライドレール34は、X軸方向に延びるように、ベース28の上に配設されている。X軸スライダ36は、X軸スライドレール34によって、X軸方向にスライド可能に保持されている。さらに、X軸スライド機構30は、電磁モータ(図5参照)38を有しており、電磁モータ38の駆動により、X軸スライダ36がX軸方向の任意の位置に移動する。また、Y軸スライド機構32は、Y軸スライドレール50とステージ52とを有している。Y軸スライドレール50は、Y軸方向に延びるように、ベース28の上に配設されており、X軸方向に移動可能とされている。そして、Y軸スライドレール50の一端部が、X軸スライダ36に連結されている。そのY軸スライドレール50には、ステージ52が、Y軸方向にスライド可能に保持されている。さらに、Y軸スライド機構32は、電磁モータ(図5参照)56を有しており、電磁モータ56の駆動により、ステージ52がY軸方向の任意の位置に移動する。これにより、ステージ52は、X軸スライド機構30及びY軸スライド機構32の駆動により、ベース28上の任意の位置に移動する。 The transport device 20 includes an X-axis slide mechanism 30 and a Y-axis slide mechanism 32. The X-axis slide mechanism 30 has an X-axis slide rail 34 and an X-axis slider 36. The X-axis slide rail 34 is disposed on the base 28 so as to extend in the X-axis direction. The X-axis slider 36 is held by an X-axis slide rail 34 so as to be slidable in the X-axis direction. Further, the X-axis slide mechanism 30 has an electromagnetic motor (see FIG. 5) 38, and the X-axis slider 36 moves to an arbitrary position in the X-axis direction by driving the electromagnetic motor 38. The Y axis slide mechanism 32 includes a Y axis slide rail 50 and a stage 52. The Y-axis slide rail 50 is disposed on the base 28 so as to extend in the Y-axis direction, and is movable in the X-axis direction. One end of the Y-axis slide rail 50 is connected to the X-axis slider 36. A stage 52 is held on the Y-axis slide rail 50 so as to be slidable in the Y-axis direction. Furthermore, the Y-axis slide mechanism 32 has an electromagnetic motor (see FIG. 5) 56, and the stage 52 moves to an arbitrary position in the Y-axis direction by driving the electromagnetic motor 56. As a result, the stage 52 moves to an arbitrary position on the base 28 by driving the X-axis slide mechanism 30 and the Y-axis slide mechanism 32.
 ステージ52は、基台60と、保持装置62と、昇降装置64とを有している。基台60は、平板状に形成され、上面に回路基板等が載置される。保持装置62は、基台60のX軸方向の両側部に設けられている。そして、基台60に載置された回路基板等のX軸方向の両縁部が、保持装置62によって挟まれることで、回路基板等が固定的に保持される。また、昇降装置64は、基台60の下方に配設されており、基台60を昇降させる。 The stage 52 has a base 60, a holding device 62, and a lifting device 64. The base 60 is formed in a flat plate shape, and a circuit board or the like is placed on the upper surface. The holding device 62 is provided on both sides of the base 60 in the X-axis direction. Then, both edge portions in the X-axis direction of the circuit board or the like placed on the base 60 are sandwiched by the holding device 62, whereby the circuit board or the like is fixedly held. The lifting device 64 is disposed below the base 60 and lifts the base 60.
 造形ユニット22は、例えば、ステージ52の基台60に載置された回路基板(図2参照)70の上に紫外線硬化樹脂により3次元構造物を造形するユニットであり、印刷部72と、硬化部74とを有している。印刷部72は、図2に示すように、インクジェットヘッド76を有しており、基台60に載置された回路基板70の上に紫外線硬化樹脂を吐出する。なお、インクジェットヘッド76は、例えば、圧電素子を用いたピエゾ方式でもよく、樹脂を加熱して気泡を発生させノズル口から吐出するサーマル方式でもよい。 The modeling unit 22 is, for example, a unit that models a three-dimensional structure with an ultraviolet curable resin on a circuit board (see FIG. 2) 70 placed on the base 60 of the stage 52, and includes a printing unit 72 and a curing unit. Part 74. As shown in FIG. 2, the printing unit 72 includes an inkjet head 76, and discharges an ultraviolet curable resin onto the circuit board 70 placed on the base 60. Note that the inkjet head 76 may be, for example, a piezo method using a piezoelectric element, or a thermal method in which a resin is heated to generate bubbles to be discharged from a nozzle port.
 硬化部74は、図3に示すように、平坦化装置78と照射装置80とを有している。平坦化装置78は、インクジェットヘッド76によって回路基板70の上に吐出された紫外線硬化樹脂の上面を平坦化するものであり、例えば、紫外線硬化樹脂の表面を均しながら余剰分の樹脂を、ローラもしくはブレードによって掻き取ることで、紫外線硬化樹脂の厚みを均一させる。また、照射装置80は、光源として水銀ランプもしくはLEDを備えており、回路基板70の上に吐出された紫外線硬化樹脂に紫外線を照射する。これにより、回路基板70の上に吐出された紫外線硬化樹脂が硬化し、3次元構造物が造形される。 The curing unit 74 includes a flattening device 78 and an irradiation device 80 as shown in FIG. The flattening device 78 flattens the upper surface of the ultraviolet curable resin discharged onto the circuit board 70 by the ink jet head 76. For example, the surface of the ultraviolet curable resin is smoothed while the surface of the ultraviolet curable resin is leveled. Alternatively, the thickness of the ultraviolet curable resin is made uniform by scraping with a blade. Further, the irradiation device 80 includes a mercury lamp or LED as a light source, and irradiates the ultraviolet curable resin discharged on the circuit board 70 with ultraviolet rays. Thereby, the ultraviolet curable resin discharged on the circuit board 70 is cured, and a three-dimensional structure is formed.
 部品実装ユニット24は、例えば、ステージ52の基台60に載置された回路基板70の上に電子部品(図4参照)82を実装するユニットであり、図1に示すように、供給部86と、実装部88とを有している。供給部86は、テーピング化された電子部品82を1つずつ送り出すテープフィーダ(図5参照)90を複数有しており、供給位置において、電子部品82を供給する。なお、供給部86は、テープフィーダ90に限らず、トレイから電子部品82をピックアップして供給するトレイ型の供給装置でもよい。また、供給部86は、テープ型とトレイ型との両方、あるいはそれ以外の供給装置を備えた構成でもよい。 The component mounting unit 24 is, for example, a unit for mounting an electronic component (see FIG. 4) 82 on a circuit board 70 placed on the base 60 of the stage 52. As shown in FIG. And a mounting portion 88. The supply unit 86 includes a plurality of tape feeders 90 (see FIG. 5) for feeding out the taped electronic components 82 one by one, and supplies the electronic components 82 at the supply position. The supply unit 86 is not limited to the tape feeder 90, and may be a tray-type supply device that picks up and supplies the electronic component 82 from the tray. Further, the supply unit 86 may be configured to include both a tape type and a tray type, or other supply devices.
 実装部88は、実装ヘッド(図5参照)96と、移動装置(図5参照)98とを有している。実装ヘッド96は、図4に示すように、電子部品82を保持するための吸着ノズル100を有する。移動装置98は、テープフィーダ90による電子部品82の供給位置と、基台60に載置された回路基板70との間で、実装ヘッド96を移動させる。これにより、実装部88では、テープフィーダ90から供給された電子部品82が、吸着ノズル100により保持され、その吸着ノズル100によって保持された電子部品82が、回路基板70に実装される。なお、実装ヘッド96は、吸着ノズル100を昇降させるノズル昇降装置(図示省略)、吸着ノズル100を軸心回りに自転させるノズル自転装置(図示省略)を有している。これにより、吸着ノズル100が保持する電子部品82のZ軸方向の位置及び電子部品82の保持姿勢を変更することが可能となる。また、実装ヘッド96は、回路基板70やテープフィーダ90を撮像するための撮像装置(図示省略)も有している。これにより、撮像データに基づいて、回路基板70への電子部品82の実装位置、テープフィーダ90による電子部品82の供給位置等を確認することが可能となる。 The mounting unit 88 includes a mounting head (see FIG. 5) 96 and a moving device (see FIG. 5) 98. As shown in FIG. 4, the mounting head 96 has a suction nozzle 100 for holding the electronic component 82. The moving device 98 moves the mounting head 96 between the supply position of the electronic component 82 by the tape feeder 90 and the circuit board 70 placed on the base 60. As a result, in the mounting portion 88, the electronic component 82 supplied from the tape feeder 90 is held by the suction nozzle 100, and the electronic component 82 held by the suction nozzle 100 is mounted on the circuit board 70. The mounting head 96 includes a nozzle lifting device (not shown) that lifts and lowers the suction nozzle 100 and a nozzle rotation device (not shown) that rotates the suction nozzle 100 about its axis. Thereby, the position of the electronic component 82 held by the suction nozzle 100 in the Z-axis direction and the holding posture of the electronic component 82 can be changed. The mounting head 96 also has an imaging device (not shown) for imaging the circuit board 70 and the tape feeder 90. Accordingly, it is possible to confirm the mounting position of the electronic component 82 on the circuit board 70, the supply position of the electronic component 82 by the tape feeder 90, and the like based on the imaging data.
 制御装置26は、図5に示すように、コントローラ102と、複数の駆動回路104とを備えている。複数の駆動回路104は、上記電磁モータ38,56、保持装置62、昇降装置64、インクジェットヘッド76、平坦化装置78、照射装置80、テープフィーダ90、実装ヘッド96、移動装置98に接続されている。コントローラ102は、CPU,ROM,RAM等を備え、コンピュータを主体とするものであり、複数の駆動回路104に接続されている。これにより、搬送装置20、造形ユニット22、部品実装ユニット24の作動が、コントローラ102によって制御される。 The control device 26 includes a controller 102 and a plurality of drive circuits 104 as shown in FIG. The plurality of drive circuits 104 are connected to the electromagnetic motors 38 and 56, the holding device 62, the lifting device 64, the inkjet head 76, the flattening device 78, the irradiation device 80, the tape feeder 90, the mounting head 96, and the moving device 98. Yes. The controller 102 includes a CPU, a ROM, a RAM, and the like, mainly a computer, and is connected to a plurality of drive circuits 104. Thereby, the operation of the transport device 20, the modeling unit 22, and the component mounting unit 24 is controlled by the controller 102.
 <製造装置の作動>
 製造装置10では、上述した構成によって、回路基板70に電子部品82が実装され、その電子部品82が紫外線硬化樹脂によって封止される。具体的には、ステージ52の基台60に回路基板70がセットされ、そのステージ52が、造形ユニット22の下方に移動される。そして、造形ユニット22において、インクジェットヘッド76によって回路基板70の上に紫外線硬化樹脂が吐出される。この際、まず、インクジェットヘッド76によって、図6に示すように、回路基板70の上に、紫外線硬化樹脂110aが薄膜状に吐出される。なお、紫外線硬化樹脂110aは、回路基板70の上に、概して「ロ」の字型に吐出される。そして、その薄膜状の紫外線硬化樹脂110aが、平坦化装置78によって上端部が平坦化され、平坦化された紫外線硬化樹脂110aに、照射装置80によって紫外線が照射される。これにより、薄膜状の紫外線硬化樹脂110aが硬化する。
<Operation of manufacturing equipment>
In the manufacturing apparatus 10, the electronic component 82 is mounted on the circuit board 70 with the above-described configuration, and the electronic component 82 is sealed with an ultraviolet curable resin. Specifically, the circuit board 70 is set on the base 60 of the stage 52, and the stage 52 is moved below the modeling unit 22. In the modeling unit 22, the ultraviolet curable resin is discharged onto the circuit board 70 by the inkjet head 76. At this time, first, as shown in FIG. 6, the ultraviolet curable resin 110 a is discharged in a thin film shape onto the circuit board 70 by the inkjet head 76. In addition, the ultraviolet curable resin 110 a is discharged on the circuit board 70 in a generally “B” shape. The thin-film ultraviolet curable resin 110 a is flattened at the upper end by the flattening device 78, and the flattened ultraviolet curable resin 110 a is irradiated with ultraviolet rays by the irradiation device 80. As a result, the thin film ultraviolet curable resin 110a is cured.
 紫外線硬化樹脂110aが硬化すると、その紫外線硬化樹脂110aの上に、インクジェットヘッド76によって、紫外線硬化樹脂110bが薄膜状に吐出される。そして、平坦化装置78による紫外線硬化樹脂110bの平坦化と、照射装置80による紫外線硬化樹脂110bの硬化とが行われる。さらに、紫外線硬化樹脂110bの上に、インクジェットヘッド76によって、紫外線硬化樹脂110cが薄膜状に吐出され、平坦化装置78による紫外線硬化樹脂110cの平坦化と、照射装置80による紫外線硬化樹脂110cの硬化とが行われる。このように、紫外線硬化樹脂が積層されることで、回路基板70の上に、4つの壁面によってキャビティを区画する3次元構造物(以下、「キャビティ区画物」と記載する場合がある)112が形成される。なお、このキャビティ区画物112の高さ寸法は、後述する電子部品82の高さ寸法より高くされている。 When the ultraviolet curable resin 110a is cured, the ultraviolet curable resin 110b is discharged onto the ultraviolet curable resin 110a by the inkjet head 76 in a thin film shape. Then, the flattening of the ultraviolet curable resin 110b by the flattening device 78 and the curing of the ultraviolet curable resin 110b by the irradiation device 80 are performed. Further, the ultraviolet curable resin 110c is ejected in a thin film shape onto the ultraviolet curable resin 110b by the inkjet head 76, the flattening of the ultraviolet curable resin 110c by the flattening device 78, and the curing of the ultraviolet curable resin 110c by the irradiation device 80. And done. As described above, the ultraviolet curable resin is laminated, so that a three-dimensional structure 112 (hereinafter sometimes referred to as “cavity compartment”) that divides a cavity by four wall surfaces is formed on the circuit board 70. It is formed. In addition, the height dimension of this cavity division 112 is made higher than the height dimension of the electronic component 82 mentioned later.
 回路基板70の上にキャビティ区画物112が形成されると、ステージ52が部品実装ユニット24の下方に移動される。部品実装ユニット24では、テープフィーダ90により電子部品82が供給され、その電子部品82が実装ヘッド96の吸着ノズル100によって、保持される。そして、吸着ノズル100により保持された電子部品82が、図7に示すように、回路基板70のキャビティ区画物112の内部に実装される。 When the cavity partition 112 is formed on the circuit board 70, the stage 52 is moved below the component mounting unit 24. In the component mounting unit 24, the electronic component 82 is supplied by the tape feeder 90, and the electronic component 82 is held by the suction nozzle 100 of the mounting head 96. Then, the electronic component 82 held by the suction nozzle 100 is mounted inside the cavity partition 112 of the circuit board 70 as shown in FIG.
 回路基板70に電子部品82が実装されると、ステージ52が造形ユニット22の下方に移動される。造形ユニット22では、キャビティ区画物112の内部に、インクジェットヘッド76によって紫外線硬化樹脂が吐出される。詳しくは、まず、図8に示すように、キャビティ区画物112の内部の電子部品82が実装されていない箇所に、紫外線硬化樹脂114が薄膜状に吐出される。そして、キャビティ区画物112が平坦化装置78の作動の妨げとなるため、紫外線硬化樹脂114の平坦化は行われずに、照射装置80により、キャビティ区画物112の内部に吐出された紫外線硬化樹脂114に紫外線が照射される。これにより、キャビティ区画物112の内部の電子部品82が実装されていない箇所の紫外線硬化樹脂が硬化する。 When the electronic component 82 is mounted on the circuit board 70, the stage 52 is moved below the modeling unit 22. In the modeling unit 22, the ultraviolet curable resin is discharged into the cavity partition 112 by the inkjet head 76. Specifically, first, as shown in FIG. 8, the ultraviolet curable resin 114 is discharged into a thin film shape at a location where the electronic component 82 inside the cavity partition 112 is not mounted. Then, since the cavity partition 112 hinders the operation of the flattening device 78, the ultraviolet curable resin 114 is discharged into the cavity partition 112 by the irradiation device 80 without being flattened. Are irradiated with ultraviolet rays. Thereby, the ultraviolet curable resin of the location in which the electronic component 82 inside the cavity partition 112 is not mounted is hardened.
 次に、図9に示すように、キャビティ区画物112の内部の電子部品82および、硬化した紫外線硬化樹脂114の上に、インクジェットヘッド76によって、紫外線硬化樹脂が薄膜状に吐出される。そして、キャビティ区画物112の内部に吐出された紫外線硬化樹脂114の高さが、キャビティ区画物112の上端位置を超えた場合に、その紫外線硬化樹脂114の上端部が、平坦化装置78によって平坦化される。この際、図10に示すように、紫外線硬化樹脂114の上端部は、キャビティ区画物112の上端位置において、平坦化装置78によって平坦化される。これにより、紫外線硬化樹脂114の上端面とキャビティ区画物112の上端面とは、面一となる。 Next, as shown in FIG. 9, the ultraviolet curable resin is discharged in a thin film shape by the inkjet head 76 onto the electronic component 82 inside the cavity partition 112 and the cured ultraviolet curable resin 114. When the height of the ultraviolet curable resin 114 discharged into the cavity compartment 112 exceeds the upper end position of the cavity compartment 112, the upper end portion of the ultraviolet curable resin 114 is flattened by the flattening device 78. It becomes. At this time, as shown in FIG. 10, the upper end portion of the ultraviolet curable resin 114 is flattened by the flattening device 78 at the upper end position of the cavity partition 112. Accordingly, the upper end surface of the ultraviolet curable resin 114 and the upper end surface of the cavity partition 112 are flush with each other.
 そして、紫外線硬化樹脂114の上端部の平坦化が完了すると、その紫外線硬化樹脂114に、照射装置80によって紫外線が照射され、紫外線硬化樹脂114が硬化する。これにより、電子部品82が、紫外線硬化樹脂により形成される3次元構造物の内部に封止される。このように、製造装置10では、回路基板70に電子部品82が実装され、その電子部品82が紫外線硬化樹脂製の3次元構造物によって封止される。 Then, when the flattening of the upper end portion of the ultraviolet curable resin 114 is completed, the ultraviolet curable resin 114 is irradiated with ultraviolet rays by the irradiation device 80, and the ultraviolet curable resin 114 is cured. Thereby, the electronic component 82 is sealed inside the three-dimensional structure formed of the ultraviolet curable resin. Thus, in the manufacturing apparatus 10, the electronic component 82 is mounted on the circuit board 70, and the electronic component 82 is sealed with the three-dimensional structure made of ultraviolet curable resin.
 また、上記説明では、電子部品82が、回路基板70のキャビティ区画物112の内部において、適切な位置に実装された場合について説明した。しかしながら、図11に示すように、電子部品82が、適切な位置(図中点線)からズレた位置に実装される場合がある。このような場合に、電子部品82が適切な位置に実装されている状況と同様に、紫外線硬化樹脂114が、キャビティ区画物112の内部に吐出されると、図12に示すように、塗布量が多すぎる箇所と少なすぎる箇所とが発生する。これにより、キャビティ区画物112の内部に吐出された紫外線硬化樹脂114の上端部の一部が、キャビティ区画物112の上端面より相当高くなり、紫外線硬化樹脂114の他の部分が、キャビティ区画物112の上端面より相当低くなる。これは、適切な位置(図中点線)に電子部品82が実装されている場合には、その適切な位置に実装された電子部品82の上に、少量の紫外線硬化樹脂114が塗布され、適切な位置に実装された電子部品82とキャビティ区画物112との間に、多くの量の紫外線硬化樹脂114が塗布されるためである。 In the above description, the case where the electronic component 82 is mounted at an appropriate position inside the cavity partition 112 of the circuit board 70 has been described. However, as shown in FIG. 11, the electronic component 82 may be mounted at a position shifted from an appropriate position (dotted line in the figure). In such a case, as in the situation where the electronic component 82 is mounted at an appropriate position, when the ultraviolet curable resin 114 is discharged into the cavity partition 112, as shown in FIG. There are places where there are too many and too few places. Thereby, a part of the upper end portion of the ultraviolet curable resin 114 discharged into the cavity compartment 112 becomes considerably higher than the upper end surface of the cavity compartment 112, and the other part of the ultraviolet curable resin 114 becomes the cavity compartment. It becomes considerably lower than the upper end surface of 112. If the electronic component 82 is mounted at an appropriate position (dotted line in the figure), a small amount of ultraviolet curable resin 114 is applied on the electronic component 82 mounted at the appropriate position. This is because a large amount of the ultraviolet curable resin 114 is applied between the electronic component 82 and the cavity partition 112 mounted at various positions.
 このように、キャビティ区画物112の内部に吐出された紫外線硬化樹脂114の上端部の一部が、キャビティ区画物112の上端面より相当高くなり、紫外線硬化樹脂114の他の部分が、キャビティ区画物112の上端面より相当低くなった場合であっても、キャビティ区画物112の上端位置において、平坦化装置78によって平坦化されることで、キャビティ区画物112の内部が、紫外線硬化樹脂114により充填され、電子部品82が適切に封止される。詳しくは、キャビティ区画物112の上端位置において、平坦化装置78によって平坦化されることで、キャビティ区画物112の上端面より高い箇所の余剰分の紫外線硬化樹脂114が、平坦化装置78に掻き取られ、その余剰分の紫外線硬化樹脂114が、キャビティ区画物112の上端面より低い箇所に充填される。これにより、図10に示すように、紫外線硬化樹脂114の上端部が、キャビティ区画物112の上端面と均一とされ、紫外線硬化樹脂114の上端面とキャビティ区画物112の上端面とは、面一となる。このように、電子部品82の実装位置が適切な位置からズレた場合であっても、電子部品82を、紫外線硬化樹脂により形成される3次元構造物の内部に適切に封止することが可能となる。 As described above, a part of the upper end portion of the ultraviolet curable resin 114 discharged into the cavity compartment 112 is considerably higher than the upper end surface of the cavity compartment 112, and the other part of the ultraviolet curable resin 114 becomes the cavity compartment. Even when it is considerably lower than the upper end surface of the object 112, the interior of the cavity object 112 is made of the ultraviolet curable resin 114 by being flattened by the flattening device 78 at the upper end position of the cavity object 112. Filled and the electronic component 82 is properly sealed. Specifically, the flattening device 78 scrapes the excess UV curable resin 114 at a location higher than the upper end surface of the cavity partition 112 to the planarization device 78 at the upper end position of the cavity partition 112. The excess UV curable resin 114 is filled in a portion lower than the upper end surface of the cavity partition 112. Thus, as shown in FIG. 10, the upper end portion of the ultraviolet curable resin 114 is made uniform with the upper end surface of the cavity partition 112, and the upper end surface of the ultraviolet curable resin 114 and the upper end surface of the cavity partition 112 are surfaces. Become one. As described above, even when the mounting position of the electronic component 82 is shifted from an appropriate position, the electronic component 82 can be appropriately sealed inside the three-dimensional structure formed of the ultraviolet curable resin. It becomes.
 また、上記説明では、回路基板70に電子部品82が実装され、その電子部品82が紫外線硬化樹脂製の3次元構造物によって封止されているが、製造装置10では、既存の成形物の内部に所定の部品を、紫外線硬化樹脂により成形される3次元構造物によって封止することも可能である。具体的には、例えば、図13に示すように、ステージ52の基台60の上に既存の成形物120が載置される。成形物120は、概して直方体状をなし、上端面に開口する凹部122が形成されている。つまり、成形物120は、有底4角筒形状、言い換えれば、枡形状をなしている。なお、成形物120の凹部122には、部品124が載置されている。 In the above description, the electronic component 82 is mounted on the circuit board 70, and the electronic component 82 is sealed with a three-dimensional structure made of an ultraviolet curable resin. It is also possible to seal predetermined parts with a three-dimensional structure formed of an ultraviolet curable resin. Specifically, for example, as shown in FIG. 13, the existing molded product 120 is placed on the base 60 of the stage 52. The molded product 120 is generally in the shape of a rectangular parallelepiped, and is formed with a recess 122 that opens to the upper end surface. That is, the molded product 120 has a bottomed quadrangular cylindrical shape, in other words, a bowl shape. A component 124 is placed in the recess 122 of the molded product 120.
 基台60に、部品124入りの成形物120が載置されると、ステージ52は、造形ユニット22の下方に移動される。そして、造形ユニット22において、まず、成形物120の凹部122内の部品124が載置されていない箇所に、紫外線硬化樹脂114が、インクジェットヘッド76によって薄膜状に吐出される。そして、成形物120が平坦化装置78の作動の妨げとなるため、紫外線硬化樹脂114の平坦化は行われずに、照射装置80により、成形物120の凹部122内に吐出された紫外線硬化樹脂114に紫外線が照射される。これにより、成形物120の凹部122内の部品124が載置されていない箇所の紫外線硬化樹脂が硬化する。 When the molded product 120 containing the component 124 is placed on the base 60, the stage 52 is moved below the modeling unit 22. In the modeling unit 22, first, the ultraviolet curable resin 114 is discharged in a thin film shape by the inkjet head 76 onto a portion where the component 124 in the concave portion 122 of the molded product 120 is not placed. Then, since the molded product 120 hinders the operation of the flattening device 78, the ultraviolet curable resin 114 is not flattened and the ultraviolet curable resin 114 discharged into the concave portion 122 of the molded product 120 by the irradiation device 80. Are irradiated with ultraviolet rays. Thereby, the ultraviolet curable resin of the location in which the component 124 in the recessed part 122 of the molded object 120 is not mounted is hardened | cured.
 次に、図14に示すように、成形物120の凹部122内の部品124および、硬化した紫外線硬化樹脂114の上に、インクジェットヘッド76によって、紫外線硬化樹脂が薄膜状に吐出される。そして、成形物120の凹部122内に吐出された紫外線硬化樹脂114の高さが、成形物120の上端位置を超えた場合に、その紫外線硬化樹脂114の上端部が、平坦化装置78によって平坦化される。この際、図15に示すように、紫外線硬化樹脂114の上端部は、成形物120の上端位置において、平坦化装置78によって平坦化される。これにより、紫外線硬化樹脂114の上端面と成形物120の上端面とは、面一となる。 Next, as shown in FIG. 14, the ultraviolet curable resin is discharged in a thin film shape by the inkjet head 76 onto the component 124 in the recess 122 of the molded product 120 and the cured ultraviolet curable resin 114. When the height of the ultraviolet curable resin 114 discharged into the concave portion 122 of the molded product 120 exceeds the upper end position of the molded product 120, the upper end portion of the ultraviolet curable resin 114 is flattened by the flattening device 78. It becomes. At this time, as shown in FIG. 15, the upper end portion of the ultraviolet curable resin 114 is flattened by the flattening device 78 at the upper end position of the molded product 120. Thereby, the upper end surface of the ultraviolet curable resin 114 and the upper end surface of the molded product 120 are flush with each other.
 そして、紫外線硬化樹脂114の上端部の平坦化が完了すると、その紫外線硬化樹脂114に、照射装置80によって紫外線が照射され、紫外線硬化樹脂114が硬化する。これにより、既存の成形物120の内部において、部品124が、紫外線硬化樹脂により成形される3次元構造物によって封止される。 Then, when the flattening of the upper end portion of the ultraviolet curable resin 114 is completed, the ultraviolet curable resin 114 is irradiated with ultraviolet rays by the irradiation device 80, and the ultraviolet curable resin 114 is cured. Thereby, inside the existing molded object 120, the component 124 is sealed by the three-dimensional structure molded by the ultraviolet curable resin.
 なお、制御装置26のコントローラ102は、図5に示すように、インクジェット作動制御部130と平坦化装置作動制御部132とを有している。インクジェット作動制御部130は、インクジェットヘッド76の作動を制御し、キャビティ区画物112若しくは、成形物120の内部に紫外線硬化樹脂を吐出するための機能部である。平坦化装置作動制御部132は、平坦化装置78の作動を制御し、紫外線硬化樹脂の上端部を、キャビティ区画物112若しくは、成形物120の上端位置において平坦化させるための機能部である。 The controller 102 of the control device 26 includes an inkjet operation control unit 130 and a flattening device operation control unit 132, as shown in FIG. The ink jet operation control unit 130 is a functional unit for controlling the operation of the ink jet head 76 and discharging the ultraviolet curable resin into the cavity partition 112 or the molded product 120. The flattening device operation control unit 132 is a functional unit for controlling the operation of the flattening device 78 to flatten the upper end portion of the ultraviolet curable resin at the upper end position of the cavity partition 112 or the molded product 120.
 ちなみに、上記実施例において、製造装置10は、形成装置の一例である。制御装置26は、制御装置の一例である。回路基板70は、基材の一例である。インクジェットヘッド76は、吐出装置の一例である。平坦化装置78は、平坦化装置の一例である。電子部品82は、部品の一例である。キャビティ区画物112は、突起部の一例である。成形物120は、突起部の一例である。部品124は、部品の一例である。インクジェット作動制御部130は、吐出装置作動制御部の一例である。平坦化装置作動制御部132は、平坦化装置作動制御部の一例である。 Incidentally, in the above-described embodiment, the manufacturing apparatus 10 is an example of a forming apparatus. The control device 26 is an example of a control device. The circuit board 70 is an example of a base material. The ink jet head 76 is an example of an ejection device. The flattening device 78 is an example of a flattening device. The electronic component 82 is an example of a component. The cavity partition 112 is an example of a protrusion. The molded product 120 is an example of a protrusion. The part 124 is an example of a part. The ink jet operation control unit 130 is an example of a discharge device operation control unit. The flattening device operation control unit 132 is an example of a flattening device operation control unit.
 なお、本発明は、上記実施例に限定されるものではなく、当業者の知識に基づいて種々の変更、改良を施した種々の態様で実施することが可能である。例えば、上記実施例では、キャビティ区画物112の内部、成形物120の凹部122の内部等のキャビティ内の部品が、紫外線硬化樹脂製の3次元構造物により封止されているが、キャビティを有していない部材の側に電子部品82等の部品を載置し、その部品を紫外線硬化樹脂製の3次元構造物により封止することが可能である。 In addition, this invention is not limited to the said Example, It is possible to implement in the various aspect which gave various change and improvement based on the knowledge of those skilled in the art. For example, in the above embodiment, the components in the cavity such as the inside of the cavity partition 112 and the inside of the concave portion 122 of the molded product 120 are sealed with a three-dimensional structure made of an ultraviolet curable resin. It is possible to place a component such as the electronic component 82 on the side of the non-membered member and seal the component with a three-dimensional structure made of an ultraviolet curable resin.
 また、上記実施例では、紫外線の照射により硬化する紫外線硬化樹脂が採用されているが、熱により硬化する熱硬化樹脂等の種々の硬化性樹脂を採用することが可能である。 Further, in the above embodiment, an ultraviolet curable resin that is cured by irradiation with ultraviolet rays is employed, but various curable resins such as a thermosetting resin that is cured by heat can be employed.
 10:製造装置(形成装置)  26:制御装置  70:回路基板(基材)  76:インクジェットヘッド(吐出装置)  78:平坦化装置  82:電子部品(部品)  112:キャビティ区画物(突起部)  120:成形物(突起部)  124:部品  130:インクジェット作動制御部(吐出装置作動制御部)  132:平坦化装置作動制御部 10: Manufacturing device (forming device) 26: Control device 70: Circuit board (base material) 76: Inkjet head (ejection device) 78: Flattening device 82: Electronic component (component) 112: Cavity partition (projection) 120 : Molded product (projection) 124: Parts 130: Inkjet operation control unit (discharge device operation control unit) 132: Flattening device operation control unit

Claims (4)

  1.  硬化性樹脂を吐出する吐出装置を用いて、硬化性樹脂による構造物を形成する形成方法において、
     前記形成方法が、
     突起部が配設された基材の上に、その突起部より高さ方向の寸法が小さい部品を載置する載置工程と、
     前記載置工程において載置された部品を覆うように前記基材の上に、前記吐出装置により硬化性樹脂を吐出する吐出工程と、
     前記吐出工程において吐出された硬化性樹脂の高さが前記突起部の上端位置を超えた際に、前記吐出工程において吐出された硬化性樹脂の上端を、前記突起部の上端位置において平坦化させる平坦化工程と
     を含むことを特徴とする形成方法。
    In a forming method of forming a structure with a curable resin using a discharge device that discharges the curable resin,
    The forming method is
    On the base material on which the protruding portion is disposed, a mounting step of mounting a component having a smaller dimension in the height direction than the protruding portion;
    A discharge step of discharging a curable resin by the discharge device on the base material so as to cover the components placed in the placement step;
    When the height of the curable resin discharged in the discharge step exceeds the upper end position of the protrusion, the upper end of the curable resin discharged in the discharge step is flattened at the upper end position of the protrusion. And a planarization step.
  2.  前記突起部が、
     前記吐出装置により前記基材の上に吐出された硬化性樹脂が硬化したものであることを特徴とする請求項1に記載の形成方法。
    The protrusion is
    The forming method according to claim 1, wherein the curable resin discharged onto the substrate by the discharge device is cured.
  3.  前記突起部が、
     予め成形され、前記基材の上に載置されたものであることを特徴とする請求項1に記載の形成方法。
    The protrusion is
    The forming method according to claim 1, wherein the forming method is preformed and placed on the base material.
  4.  硬化性樹脂を吐出する吐出装置と、
     前記吐出装置により吐出された硬化性樹脂を平坦化させる平坦化装置と
     前記吐出装置と平坦化装置との作動を制御する制御装置と
     を備え、硬化性樹脂による構造物を形成する形成装置において、
     前記制御装置が、
     突起部が配設されるとともに、その突起部より高さ方向の寸法が小さい部品が載置された基材の上に、その部品を覆うように、前記吐出装置により硬化性樹脂を吐出する吐出装置作動制御部と、
     前記吐出装置により吐出された硬化性樹脂の高さが前記突起部の上端位置を超えた際に、前記吐出装置により吐出された硬化性樹脂の上端を、前記突起部の上端位置において前記平坦化装置により平坦化させる平坦化装置作動制御部と
     を有することを特徴とする形成装置。
    A discharge device for discharging a curable resin;
    In a forming apparatus comprising a flattening device for flattening the curable resin discharged by the discharge device, and a control device for controlling the operation of the discharge device and the flattening device, and forming a structure made of the curable resin,
    The control device is
    Discharge that discharges the curable resin by the discharge device so as to cover the component on the base material on which the component having a protrusion with a smaller dimension in the height direction is placed. A device operation control unit;
    When the height of the curable resin discharged by the discharge device exceeds the upper end position of the protrusion, the upper end of the curable resin discharged by the discharge device is flattened at the upper end position of the protrusion. A forming apparatus, comprising: a flattening device operation control unit configured to flatten by the apparatus.
PCT/JP2015/057632 2015-03-16 2015-03-16 Formation method and formation device WO2016147284A1 (en)

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