WO2016129166A1 - Dispositif de détection de nuage d'huile - Google Patents

Dispositif de détection de nuage d'huile Download PDF

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Publication number
WO2016129166A1
WO2016129166A1 PCT/JP2015/083348 JP2015083348W WO2016129166A1 WO 2016129166 A1 WO2016129166 A1 WO 2016129166A1 JP 2015083348 W JP2015083348 W JP 2015083348W WO 2016129166 A1 WO2016129166 A1 WO 2016129166A1
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WIPO (PCT)
Prior art keywords
light
oil mist
detection
unit
transparent member
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PCT/JP2015/083348
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English (en)
Japanese (ja)
Inventor
知多佳 真鍋
英二 高橋
要 荒木
秀剛 高木
雄也 中本
Original Assignee
株式会社神戸製鋼所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority claimed from JP2015143340A external-priority patent/JP6466795B2/ja
Application filed by 株式会社神戸製鋼所 filed Critical 株式会社神戸製鋼所
Publication of WO2016129166A1 publication Critical patent/WO2016129166A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence

Definitions

  • the present invention relates to an oil mist detection device applicable to, for example, an oil-cooled (oil supply) compressor.
  • Oil mist is unavoidably included in the compressed gas generated by the oil-cooled (oil supply) compressor.
  • the oil mist is processed to be removed from the compressed gas by a filtration filter.
  • the oil mist cannot be completely removed from the compressed gas, and the amount of oil mist that can be removed from the compressed gas is reduced when the filter is deteriorated.
  • oil mist is an impurity when viewed from the compressed gas, the amount of oil mist contained in the compressed gas needs to be controlled.
  • the amount of oil mist may be strictly controlled, such as compressed air for medical use.
  • This apparatus detects the concentration of oil mist by irradiating a predetermined detection region with basic light and measuring the intensity of reflected / scattered light generated when the basic light strikes oil mist present in the detection region (for example, see Patent Document 1).
  • the performance of the filter for removing oil mist is improved, the amount of oil mist contained in the compressed gas after the treatment for removing oil mist is extremely small, and the particle size of oil mist is extremely small. For this reason, in the case of the type in which the oil mist floating in the gas is measured by irradiating light like the oil mist detection device described in Patent Document 1, the oil mist may not be detected.
  • An object of the present invention is to provide an oil mist detection device capable of detecting oil mist even when the amount of oil mist floating in the gas is extremely small and the particle size of the oil mist is extremely small.
  • the oil mist detection device includes a transparent member having a transparent detection surface disposed in a gas in which oil mist is floating, and the transparent member having the detection surface as a front surface of the transparent member.
  • a light source unit that emits light toward the back surface at an angle at which light incident on the transparent member from the back surface is reflected by the detection surface, and light that is emitted from the light source unit toward the back surface,
  • a detector that detects scattered light from the light emitted from the back surface in a state of being reflected by the detection surface.
  • the oil mist can be detected even when the amount of the oil mist floating in the gas is extremely small and the particle size of the oil mist is very small.
  • FIG. 1 It is a mimetic diagram showing an oil mist detection device concerning a 1st embodiment of the present invention.
  • the oil mist detection apparatus shown in FIG. 1 it is a schematic diagram which shows the state which the oil mist has adhered to the detection surface. It is a schematic diagram which shows the oil mist detection apparatus which concerns on the 1st modification of 1st Embodiment. It is a schematic diagram which shows the oil mist detection apparatus which concerns on the 2nd modification of 1st Embodiment. It is a schematic diagram which shows the oil mist detection apparatus which concerns on the 3rd modification of 1st Embodiment.
  • FIG. 16 is a schematic diagram illustrating a state where the blocking member is slid from the state illustrated in FIG. 15 and the detection surface is exposed. It is a block diagram which shows the structure of the oil mist detection apparatus which concerns on 3rd Embodiment. It is a schematic diagram which shows the oil mist detection apparatus which concerns on 4th Embodiment. It is a schematic diagram which shows the structure of the sensor with which the oil mist detection apparatus which concerns on 4th Embodiment is equipped. It is a block diagram which shows the structure of the oil mist detection apparatus which concerns on 4th Embodiment.
  • FIG. 26 is a schematic diagram which shows the state which the oil mist has adhered to the detection surface. It is a schematic diagram which shows the oil mist detection apparatus which concerns on the 1st modification of 6th Embodiment. It is a schematic diagram which shows the oil mist detection apparatus which concerns on the 2nd modification of 6th Embodiment.
  • FIG. 30 is a schematic diagram illustrating an example of a state where the oil mist detection device illustrated in FIG. 29 is attached to a pipe. In the oil mist detection apparatus shown in FIG. 21, it is a schematic diagram which shows the state which has arrange
  • FIG. 1 is a schematic diagram showing an oil mist detection device 1a according to the first embodiment.
  • the oil mist detection device 1a includes a transparent member 3, a light source unit 5, and a detection unit 7.
  • the transparent member 3 is a right-angle prism having a detection surface 30, a first inclined surface 31, and a second inclined surface 32.
  • the transparent member 3 is made of a transparent material such as glass or plastic. From the viewpoint of increasing the strength of the transparent member 3, optical glass is preferable. From the viewpoint of strength and heat resistance of the transparent member 3, quartz glass is preferable. From the viewpoint of the strength, heat resistance, and corrosion resistance of the transparent member 3, sapphire (Al 2 O 3 ) is preferable.
  • the detection surface 30 constitutes the front surface 11 of the transparent member 3.
  • the detection surface 30 is a transparent surface disposed in a gas in which oil mist is floating.
  • the first inclined surface 31 constitutes the back surface 12 of the transparent member 3, and has an inclination (for example, 45 degrees) with respect to the detection surface 30.
  • the first inclined surface 31 is a transparent surface into which the light L ⁇ b> 1 emitted from the light source unit 5 toward the back surface 12 of the transparent member 3 enters the transparent member 3.
  • the second inclined surface 32 constitutes the back surface 12 of the transparent member 3 and has an inclination (for example, 45 degrees) with respect to the detection surface 30.
  • the angle between the first inclined surface 31 and the second inclined surface 32 is 90 degrees.
  • the second inclined surface 32 is a transparent surface from which the light L1 from the light source unit 5 enters the transparent member 3 from the first inclined surface 31, is totally reflected by the detection surface 30, and exits from the transparent member 3. .
  • the side surface of the transparent member 3 defined by the detection surface 30, the first inclined surface 31, and the second inclined surface 32 has a right-angled isosceles triangle shape.
  • the light source unit 5 When the light source unit 5 has the detection surface 30 as the front surface 11 of the transparent member 3, the light L 1 incident on the transparent member 3 from the back surface 12 of the transparent member 3 is reflected at the detection surface 30 toward the back surface 12. To emit light L1. The case where the light L1 incident on the transparent member 3 from the back surface 12 of the transparent member 3 is totally reflected by the detection surface 30 will be described.
  • the light source unit 5 includes, for example, an LED that emits ultraviolet light as a light emitting unit.
  • the light L ⁇ b> 1 is expressed as being emitted from the light source unit 5, the light beam is actually emitted from the light source unit 5.
  • the detection unit 7 emits light L1 emitted from the light source unit 5 toward the back surface 12 of the transparent member 3 from the back surface 12 (second inclined surface 32) in a state where the light L1 is totally reflected by the detection surface 30.
  • Scattered light L2 (FIG. 2) is detected from the incoming light.
  • the light L1 from the light source unit 5 and the scattered light L2 have the same wavelength.
  • the light L1 from the light source unit 5 is applied to the oil mist M (FIG. 2) to generate fluorescent scattered light L2
  • the light L1 from the light source unit 5 and the scattered light L2 have different wavelengths.
  • the oil mist M is irradiated with ultraviolet rays, it often emits fluorescence depending on the type of oil. In the first embodiment, description will be made assuming that the scattered light L2 is fluorescence.
  • the detection unit 7 includes a filter 70 and a light receiving unit 71 that receives the scattered light L2 that has passed through the filter 70.
  • the scattered light L2 is allowed to pass through, but has a wavelength selection characteristic that blocks the light L1 from the light source unit 5 totally reflected by the detection surface 30.
  • a filter 70 is used.
  • the location where the oil mist detection device 1a is installed is not a dark place, the wavelength that allows the scattered light L2 to pass but blocks the other light including the light L1 from the light source unit 5 totally reflected by the detection surface 30
  • a filter 70 having a selection characteristic is used.
  • the light receiving unit 71 includes, for example, a photodiode.
  • FIG. 2 is a schematic diagram showing a state where the oil mist M is attached to the detection surface 30 in the oil mist detection device 1a shown in FIG.
  • the light L1 emitted from the light source unit 5 is totally reflected by the detection surface 30 and travels toward the light receiving unit 71. However, since the light L1 is blocked by the filter 70, it does not reach the light receiving unit 71. As shown in FIG. 2, when the oil mist M adheres to the detection surface 30, the light L ⁇ b> 1 emitted from the light source unit 5 (in other words, a part of the light beam) is applied to the oil mist M. Scattered light L2 is generated by this irradiation. A part of the scattered light L2 passes through the filter 70 and is received by the light receiving unit 71.
  • Light L1 is incident on the transparent member 3 from the back surface 12 of the transparent member 3 with the oil mist M adhering to the detection surface 30, and the light is scattered by the oil mist M when reflected by the detection surface 30.
  • L2 occurs. Accordingly, if the light L1 emitted from the light source unit 5 toward the back surface 12 of the transparent member 3 is reflected by the detection surface 30, the scattered light L2 can be detected from the light emitted from the back surface 12.
  • the oil mist M is attached to the detection surface 30.
  • the oil mist detection device 1a does not detect the oil mist M floating in the gas, but detects the oil mist M adhering to the detection surface 30.
  • the oil mist M is floating in the gas, the amount of the oil mist M adhering to the detection surface 30 increases as time passes. Therefore, the oil mist M can be detected even if the amount of the oil mist M floating in the gas is extremely small and the particle size of the oil mist M is very small.
  • the filter 70 is provided. Therefore, only the scattered light L2 can be selectively received. Therefore, the degree of freedom of the place where the light receiving unit 71 is disposed can be increased.
  • FIG. 3 is a schematic diagram showing an oil mist detection device 1b according to a first modification of the first embodiment.
  • the oil mist detection device 1b is different from the oil mist detection device 1a shown in FIGS. 1 and 2 as follows.
  • the back surface 12 of the transparent member 3 has a facing surface 33 that connects the first inclined surface 31 and the second inclined surface 32 and faces the detection surface 30.
  • the side surface of the transparent member 3 defined by the detection surface 30, the first inclined surface 31, the opposing surface 33, and the second inclined surface 32 has a trapezoidal shape.
  • the detection unit 7 is disposed to face the facing surface 33.
  • the light receiving unit 71 receives light emitted from the facing surface 33 to the outside of the transparent member 3. This light is not the light L1 totally reflected by the detection surface 30, but a part of the scattered light L2.
  • the first modification is based on the assumption that the location where the oil mist detection device 1b is installed is not a dark place.
  • the filter 70 has a wavelength selection characteristic that allows the scattered light L2 to pass therethrough but blocks light other than the scattered light L2.
  • the light totally reflected by the detection surface 30 goes out of the transparent member 3 from the second inclined surface 32, so that the detection unit 7 has the light L ⁇ b> 1 totally reflected by the detection surface 30.
  • the scattered light L2 can be detected without being affected by the above.
  • FIG. 4 is a schematic diagram showing an oil mist detection device 1c according to a second modification of the first embodiment.
  • the difference between the oil mist detection device 1c and the oil mist detection device 1b shown in FIG. 3 is that the detection unit 7 does not include the filter 70.
  • the filter 70 is unnecessary.
  • FIG. 5 is a schematic diagram showing an oil mist detection device 1d according to a third modification of the first embodiment.
  • the oil mist detection device 1d is different from the oil mist detection device 1c shown in FIG. 4 as follows.
  • the light L1 that has entered the transparent member 3 from the first inclined surface 31 is repeatedly reflected a plurality of times by the detection surface 30 and the opposing surface 33, and exits the transparent member 3 from the second inclined surface 32.
  • the area of the detection surface 30, the area of the opposing surface 33, the distance between the detection surface 30 and the opposing surface 33, and the like are determined.
  • a concave portion whose bottom surface is the opposing surface 33 is formed on the back surface 12.
  • the transparent member 3 has a surface 34 to a surface 39 in addition to the detection surface 30, the first inclined surface 31, the second inclined surface 32, and the opposing surface 33.
  • the surface 34 has an inclination of 90 degrees with respect to the detection surface 30, and connects the detection surface 30 and the first inclined surface 31.
  • the surface 35 faces the detection surface 30 and is connected to the first inclined surface 31.
  • the surface 36 has an inclination of 90 degrees with respect to the opposing surface 33, and connects the opposing surface 33 and the surface 35.
  • the surface 37 has an inclination of 90 degrees with respect to the detection surface 30, and connects the detection surface 30 and the second inclined surface 32.
  • the surface 38 faces the detection surface 30 and is connected to the second inclined surface 32.
  • the surface 39 has an inclination of 90 degrees with respect to the facing surface 33, and connects the facing surface 33 and the surface 38.
  • the oil mist detection device 1d According to the oil mist detection device 1d according to the third modification, the light L1 that has entered the transparent member 3 is repeatedly reflected a plurality of times by the detection surface 30 and the opposed surface 33, so that the amount of generated scattered light L2 is increased. can do. For this reason, even when the amount of oil mist M adhering to the detection surface 30 is very small, the oil mist M can be detected. Therefore, according to the third modification, the sensitivity of the oil mist detection device 1d can be improved.
  • FIG. 6 is a schematic diagram illustrating a first example in a state where the oil mist detection device 1 d is attached to the pipe 100.
  • FIG. 7 is a schematic diagram showing the second example.
  • the oil mist detection device 1d includes a casing 9 that houses the transparent member 3, the light source unit 5, and the detection unit 7 with the detection surface 30 exposed to the outside.
  • a hole 101 passing through the pipe 100 is formed in a part of the pipe 100, and the oil mist detection device 1 d is attached to the hole 101 in a state where the detection surface 30 can come into contact with the gas G passing through the pipe 100.
  • the detection surface 30 is arranged in parallel with the direction in which the gas G flows through the pipe 100.
  • the detection surface 30 is arranged in the direction in which the gas G flows through the pipe 100.
  • the detection unit 7 detects oil scattered on the detection surface 30 by detecting the scattered light L2 generated by irradiating the oil mist M attached to the detection surface 30 with the light L1 from the light source unit 5. A signal indicating the mist M is generated.
  • the concentration of oil mist M is measured in this embodiment.
  • the oil mist M adhering to the detection surface 30 is detected.
  • the amount of oil mist M detected by the detection unit 7 becomes an integrated value of the oil mist M attached to the detection surface 30 until the time when the concentration of the oil mist M is measured.
  • the increase amount per unit time of the oil mist M adhering to the detection surface 30 (time change rate of the amount of the oil mist M adhering to the detection surface 30) is the oil mist M contained in the gas G in the unit time. It is proportional to the number of particles.
  • FIG. 8 is a graph created based on them.
  • the horizontal axis indicates the time (elapsed time) that has elapsed since the detection surface 30 started to contact the gas G flowing through the pipe 100.
  • the vertical axis indicates the amount of oil mist M (detected amount) adhering to the detection surface 30.
  • the detected amount of oil mist M is 0 (almost 0) even if time elapses. This indicates that the gas G does not contain the oil mist M over the entire elapsed time.
  • the detected amount of oil mist M increases linearly as time elapses. This indicates that the oil G contains a certain concentration of oil mist M over the entire period of the elapsed time.
  • the detected amount of oil mist M increases during the entire elapsed time.
  • the graph of the third example has three slopes. Of all the elapsed time periods, the slope of the graph is larger than the slope of the graph of the second example in the initial period. This indicates that the concentration of oil mist M in the initial period is higher than the concentration of oil mist M in the second example. In the middle period, the slope of the graph is smaller than the slope of the graph of the second example. This indicates that the concentration of oil mist M in the middle period is lower than the concentration of oil mist M in the second example. In the last period, the slope of the graph is greater than the slope of the initial period. This indicates that the concentration of oil mist M in the last period is higher than the concentration of oil mist M in the initial period.
  • the amount of oil mist M adhering to the detection surface 30 is measured at regular time intervals.
  • the amount of oil mist M detected in the current measurement is V1
  • the amount of oil mist M detected in the previous measurement is V2
  • a certain time is T.
  • the value obtained by the equation (V1-V2) / T represents the slope of the graph shown in FIG. 8, that is, the time change rate of the amount of oil mist M adhering to the detection surface 30.
  • FIG. 9 is a block diagram showing a configuration of the oil mist detection device 1d shown in FIG.
  • the block diagram which shows the structure of oil mist detection apparatus 1a, 1b, 1c is the same as FIG.
  • the oil mist detection device 1d includes the transparent member 3, the light source unit 5, and the detection unit 7, and further includes a control unit 13, an input unit 14, and an output unit 15.
  • the control unit 13 includes a CPU, a RAM, a ROM, and the like, and includes a data storage unit 130 and a first calculation unit 131 as functional blocks.
  • the data storage unit 130 stores first data and second data in advance. The first data and the second data will be described.
  • FIG. 10 is an explanatory diagram for explaining the first data. It shows that the amount of oil mist M adhering to the detection surface 30 increases as the intensity of the scattered light L2 increases.
  • the numbers in FIG. 10 are values for convenience and are not values collected by experiments.
  • the time change rate of the amount of the oil mist M adhering to the detection surface 30 is proportional to the concentration of the oil mist M floating in the gas G.
  • the concentration of the oil mist M increases.
  • FIG. 11 is an explanatory diagram for explaining the second data. It is shown that the concentration of oil mist M increases as the time change rate increases.
  • the numbers in FIG. 11 are values for convenience and are not values collected by experiments.
  • the first calculation unit 131 is detected by the detection unit 7 at the first timing and at the second timing when a predetermined period has elapsed from the first timing and the intensity of the scattered light L2 detected by the detection unit 7. Based on the intensity of the scattered light L2, the first data, and the second data, the concentration of the oil mist M floating in the gas G during a predetermined period is calculated.
  • the amount V2 of mist M is known.
  • the amount V1 of the oil mist M adhering to the detection surface 30 at the second timing is known.
  • T is the predetermined period
  • the time change rate of the amount of the oil mist M adhering to the detection surface 30 can be obtained from the equation represented by (V1-V2) / T. From this time change rate and the second data shown in FIG. 11, the concentration of the oil mist M floating in the gas G during a predetermined period is known.
  • the input unit 14 is a device for inputting commands (commands), data, and the like from the outside to the oil mist detection device 1d, and is, for example, a touch panel or a keyboard.
  • the output unit 15 is a device for outputting the command and data input from the input unit 14 and the concentration of the oil mist M calculated by the control unit 13, for example, a display device of an LCD (liquid crystal display), For example, a printing apparatus such as a printer.
  • a display device of an LCD liquid crystal display
  • the concentration of the oil mist M can be measured.
  • FIG. 12 is a schematic diagram showing an oil mist detection device 1e according to the second embodiment.
  • the oil mist detection device 1e differs from the oil mist detection device 1d shown in FIG. 5 in the following points.
  • the detection unit 7 includes a two-dimensional image sensor that images the detection surface 30 and the scattered light L ⁇ b> 2 (FIG. 5) via the facing surface 33.
  • FIG. 13 is a block diagram showing a configuration of an oil mist detection device 1e according to the second embodiment.
  • the oil mist detection device 1e according to the second embodiment includes the configuration illustrated in FIG. 9 and further includes a second calculation unit 132.
  • the second calculation unit 132 is one of functional blocks included in the control unit 13.
  • the second calculation unit 132 is based on the detection surface 30 captured by the detection unit 7 including the two-dimensional image sensor and the two-dimensional image of the scattered light L2, and the number of oil mists M attached to the detection surface 30. And the size of each oil mist M is calculated.
  • FIG. 14 is an explanatory diagram for explaining an image of the detection surface 30 and the scattered light L2 captured by the detection unit 7.
  • a white region included in the image Im of the detection surface 30 indicates a portion where the scattered light L2 is generated, that is, a portion where the oil mist M is attached.
  • a region other than the white region is a black region. This is because the place where the oil mist detection device 1e is installed is a dark place.
  • the second calculation unit 132 calculates the number of oil mists M adhering to the detection surface 30 by performing a process of detecting a white area in the image Im and counting the detected number. Further, the second calculation unit 132 calculates the size of each oil mist M attached to the detection surface 30 by performing a process of calculating the area of each detected white region.
  • the intensity of the scattered light L2 detected by the light receiving unit 71 (FIGS. 1 to 5) of the first embodiment is the same, a relatively large number of oil mists M are attached to the detection surface 30 and are relatively large. A small number of oil mists M may adhere to the detection surface 30.
  • the oil mist M adhering to the detection surface 30 is large, there may be a problem (deterioration or failure) in the filtration filter (not shown) for removing the oil mist M.
  • the measurer can remove the oil mist M based on this. It can be determined whether there is a problem with the filter.
  • FIG. 15 is a schematic diagram illustrating an oil mist detection device 1f according to the third embodiment.
  • the oil mist detection device 1f will be described with respect to differences from the oil mist detection device 1d shown in FIG.
  • the oil mist detection device 1 f includes a blocking member 16 (shutter) that blocks the detection surface 30 from the gas G by covering the detection surface 30.
  • the blocking member 16 is a metal plate, a glass plate, or a plastic plate.
  • the blocking member 16 is slidably mounted along the inner wall of the pipe 100 so as to expose the detection surface 30. This sliding is realized by the moving mechanism 19 (FIG. 17).
  • FIG. 16 is a schematic diagram showing a state where the blocking member 16 is slid and the detection surface 30 is exposed.
  • FIG. 17 is a block diagram showing a configuration of an oil mist detection device 1f according to the third embodiment.
  • the oil mist detection device 1f according to the third embodiment includes the configuration illustrated in FIG. 9 and further includes a blocking member 16, a moving mechanism 19, and a blocking control unit 133.
  • the moving mechanism 19 moves the blocking member 16 along the inner wall of the pipe 100 (FIGS. 15 and 16). As a result, the detection surface 30 is covered by the blocking member 16, and the detection surface 30 is blocked from the gas G flowing through the pipe 100, and the detection surface 30 is not covered by the blocking member 16. Can be switched between the exposed state exposed in the gas G flowing through the pipe 100.
  • the moving mechanism 19 includes a linear motion mechanism that slides the rail and the blocking member 16 on the rail.
  • the moving mechanism 19 is not limited to the above configuration.
  • the moving mechanism 19 may include a shaft, a blocking member 16 fixed to the shaft, and a rotating mechanism that rotates the shaft.
  • the rotating mechanism rotates the shaft to move the blocking member 16 along the circumferential direction of the inner wall of the pipe 100, thereby switching between the blocking state and the exposed state.
  • the blocking member 16 can be rotated by a hinge attached to the end of the blocking member 16, and the blocking member 16 is in the exposed state in the upright state, and the blocking member 16 is in the tilted state. Put it in a state.
  • the blocking control unit 133 is one of functional blocks included in the control unit 13.
  • the blocking control unit 133 switches between the blocking state and the exposure state by controlling the moving mechanism 19. That is, when the detection unit 7 detects the scattered light L2 in order to measure the concentration of the oil mist M, the cutoff control unit 133 performs control so that the cutoff member 16 does not cover the detection surface 30, and the concentration of the oil mist M Therefore, when the detection unit 7 does not detect the scattered light L2, the blocking member 16 performs control to cover the detection surface 30.
  • the detection unit 7 detects it.
  • the intensity of the scattered light L2 is not increased. For this reason, the difference between the intensity of the scattered light L2 detected by the detection unit 7 at the first timing and the intensity of the scattered light L2 detected by the detection unit 7 at the second timing does not occur.
  • the concentration of the oil mist M cannot be measured using the data storage unit 130 and the first calculation unit 131. In order to be able to measure the concentration of the oil mist M, maintenance for removing the oil mist M adhering to the detection surface 30 is required.
  • the detection surface 30 when the concentration of the oil mist M is not measured, the detection surface 30 is covered with the blocking member 16. Therefore, according to the third embodiment, since the intensity of the scattered light L2 can be delayed, the number of maintenance can be reduced.
  • a plurality of oil mist detectors 1f may be attached to the pipe 100. According to this, among the plurality of oil mist detection devices 1f, first, the concentration of the oil mist M is measured using the first oil mist detection device 1f.
  • the shut-off control unit 133 performs control to cover the detection surface 30 with the shut-off member 16 in each of the plurality of oil mist detection devices 1f, and detects the concentration of the oil mist M using the first oil mist detection device 1f. At this time, control is performed so that the detection surface 30 of the first oil mist detection device 1 f is not covered with the blocking member 16.
  • the cutoff controller 133 When the intensity and the thickness of the oil mist M adhering to the detection surface 30 of the first oil mist detection device 1f are increased and the intensity of the scattered light L2 is saturated, the cutoff controller 133 next The concentration of oil mist M is measured using the oil mist detection device 1f. Similarly, when the intensity of the scattered light L2 is saturated by increasing the area and thickness of the oil mist M adhering to the detection surface 30 of the n-th oil mist detection device 1f, the cutoff controller 133 next In addition, the concentration of the oil mist M is measured using the (n + 1) th oil mist detection device 1f.
  • the oil mist M adhering to the detection surface 30 is removed until all of the plurality of oil mist detection devices 1f become unusable. Since maintenance is not required, maintenance intervals can be extended.
  • FIG. 18 is a schematic diagram showing an oil mist detection device 1g according to the fourth embodiment.
  • the oil mist detection device 1g will be described with respect to differences from the oil mist detection device 1f shown in FIG.
  • the oil mist detection device 1g includes a sensor 17 that measures the concentration of the oil mist M floating in the gas G flowing through the pipe 100.
  • the sensor 17 is held at the center of the vertical cross section of the pipe 100 by a holding member 18 attached to the inner wall of the pipe 100.
  • the sensor 17 is, for example, a dust sensor capable of measuring PM2.5 class dust.
  • the dust sensor is a sensor that can measure the concentration of dust and smoke particles (for example, cigarette smoke) in the air, and the concentration of oil mist M in the gas G is measured by the dust sensor.
  • FIG. 19 is a schematic diagram showing the configuration of the sensor 17.
  • the sensor 17 includes a light source unit 170 and a light receiving unit 171.
  • the light source unit 170 includes, for example, a diode that emits infrared light.
  • the light receiving unit 171 is, for example, a phototransistor.
  • the light receiving unit 171 is disposed at a position where the infrared light emitted from the light source unit 170 is not directly received, and receives light reflected by the infrared light emitted from the light source unit 170.
  • FIG. 20 is a block diagram showing a configuration of an oil mist detection device 1g according to the fourth embodiment.
  • the oil mist detection device 1g according to the fourth embodiment includes the configuration illustrated in FIG. 17, and further includes the sensor 17 and the switching control unit 134.
  • the switching control unit 134 changes the means for measuring the concentration of the oil mist M from the sensor 17 to the detection unit 7, Switching to the combination of the data storage unit 130 and the first calculation unit 131, the concentration of the oil mist M calculated using the combination of the detection unit 7, the data storage unit 130 and the first calculation unit 131 is equal to or higher than the first value. Is greater than the predetermined second value, the means for measuring the concentration of the oil mist M is switched from the combination of the detection unit 7, the data storage unit 130, and the first calculation unit 131 to the sensor 17.
  • the measurement of the concentration of the oil mist M using the combination of the detection unit 7, the data storage unit 130, and the first calculation unit 131 uses the oil mist M attached to the detection surface 30. For this reason, as described in the third embodiment, when the area and thickness of the oil mist M adhering to the detection surface 30 increases, the concentration of the oil mist M cannot be measured, and the oil adhering to the detection surface 30 Maintenance to remove mist M is required.
  • the concentration of the oil mist M is high, the time required for the area and thickness of the oil mist M adhering to the detection surface 30 to increase is short. Accordingly, when the concentration of the oil mist M is not measured, even if the detection surface 30 is covered with the blocking member 16, if the concentration of the oil mist M is high, the area and thickness of the oil mist M adhering to the detection surface 30 is increased. It takes a short time to grow.
  • the concentration of the oil mist M is measured using the sensor 17. To do.
  • the concentration of the oil mist M is relatively low and cannot be measured using the sensor 17 (in other words, when the concentration of the oil mist M is smaller than the first value)
  • the detection unit 7 The concentration of the oil mist M is measured using a combination of the data storage unit 130 and the first calculation unit 131.
  • the oil mist detection device 1g uses the sensor 17 to measure the concentration of the oil mist M.
  • the oil mist detection device 1g uses the detection unit 7, the data storage unit 130, and the first calculation unit 131 to determine the concentration of the oil mist M. taking measurement.
  • the concentration of the oil mist M measured using the detection unit 7, the data storage unit 130, and the first calculation unit 131 is high during the operation of the compressor, the oil mist detection device 1 g Switch to Mist M concentration measurement.
  • FIG. 21 is a schematic diagram showing an oil mist detection device 1h according to the fifth embodiment.
  • FIG. 22 is a schematic diagram showing a state where the oil mist M is attached to the detection surface 30 in the oil mist detection device 1h shown in FIG.
  • the oil mist detection device 1h differs from the oil mist detection device 1a shown in FIG. 1 in the following points.
  • the light source unit 5 receives light from the light emitting element 50 and light from the light emitting element 50, and generates polarized light that is linearly polarized in the parallel direction D1 (an example of a predetermined direction) with respect to the paper surface of FIGS. Plate 51 (an example of a first polarizing member).
  • the light source unit 5 emits the linearly polarized light generated by the polarizing plate 51 as light L ⁇ b> 1 directed to the back surface 12.
  • the light emitting element 50 is, for example, an LED that emits ultraviolet light.
  • the polarizing plate 51 is a transmissive polarizing plate that transmits linearly polarized light in the parallel direction D1 with respect to the paper surfaces of FIGS. 21 and 22 among the light from the light emitting element 50.
  • the detection unit 7 includes a polarizing plate 72 (an example of a second polarizing member) that blocks the linearly polarized light from the light emitted from the back surface 12, and a light receiving unit that receives the scattered light L ⁇ b> 2 that has passed through the polarizing plate 72. 71.
  • a polarizing plate 72 an example of a second polarizing member
  • the polarizing plate 72 is a transmissive polarizing plate that transmits linearly polarized light in the vertical direction D2 with respect to the paper surface of FIGS. Therefore, the polarizing plate 72 prevents the linearly polarized light in the parallel direction D1 from being transmitted.
  • the polarizing plate 51 is a polarizing plate that transmits linearly polarized light in the vertical direction D2
  • the polarizing plate 72 is a polarizing plate that transmits linearly polarized light in the parallel direction D1.
  • the linearly polarized light is changed to elliptically polarized light.
  • the elliptically polarized light is transmitted through the polarizing plate 72.
  • the polarizing plate 72 is a polarizing plate that transmits s-polarized light
  • the polarizing plate 51 is a polarizing plate that transmits s-polarized light
  • the polarizing plate 72 is a polarizing plate that transmits p-polarized light.
  • the detection surface 30 is defined as a boundary surface, and a plane including the normal of the detection surface 30 and the light L1 (incident light) emitted from the light source unit 5 is defined as an incident surface (not shown).
  • the p-polarized light is linearly polarized light that vibrates in parallel with the incident surface on the incident surface.
  • the s-polarized light is linearly polarized light that vibrates in a direction perpendicular to the incident surface.
  • the linearly polarized light in a predetermined direction is reflected as it is when reflected at a portion of the detection surface 30 where the oil mist M is not attached (that is, reflected in a state in which the predetermined direction is maintained). ) Therefore, this linearly polarized light cannot pass through the polarizing plate 72.
  • the linearly polarized light in a predetermined direction is reflected at a portion of the detection surface 30 where the oil mist M adheres, the linearly polarized light is not maintained and becomes scattered light L2. Since the scattered light L ⁇ b> 2 includes polarized light having various vibration directions, a part of the scattered light L ⁇ b> 2 incident on the polarizing plate 72 can pass through the polarizing plate 72.
  • the light receiving unit 71 does not receive the linearly polarized light (linearly polarized light in a predetermined direction) reflected by the detection surface 30, and does not receive the scattered light L2. Only light can be selectively received.
  • the light receiving unit 71 can selectively receive the scattered light L2, so that the linearly polarized light reflected by the detection surface 30 is reflected. It will not be affected.
  • the fifth embodiment includes a first modification and a second modification.
  • FIG. 23 is a schematic diagram illustrating an oil mist detection device 1 i according to a first modification of the fifth embodiment.
  • the oil mist detection device 1i is different from the oil mist detection device 1h shown in FIGS. 21 and 22 as follows.
  • the back surface 12 of the transparent member 3 has a facing surface 33 that connects the first inclined surface 31 and the second inclined surface 32 and faces the detection surface 30.
  • the side surface of the transparent member 3 defined by the detection surface 30, the first inclined surface 31, the opposing surface 33, and the second inclined surface 32 has a trapezoidal shape.
  • the facing surface 33 is formed by cutting a part of the back surface 12 of the transparent member 3 in parallel with the detection surface 30. Therefore, according to the oil mist detection device 1i, the transparent member 3 can be reduced in size and weight.
  • FIG. 24 is a schematic diagram showing an oil mist detection device 1j according to a second modification of the fifth embodiment.
  • the oil mist detection device 1j uses the transparent member 3 shown in FIG. For this reason, according to the oil mist detection device 1j, the light L1 that has entered the transparent member 3 is repeatedly reflected by the detection surface 30 and the facing surface 33 a plurality of times, as in the oil mist detection device 1d shown in FIG. Therefore, the amount of scattered light L2 generated can be increased.
  • Oil mist detection devices 1h to 1j are arranged in a pipe serving as a gas flow path in which oil mist M is floating. This will be described using the oil mist detection device 1j shown in FIG. 24 as an example.
  • FIG. 25 is a schematic diagram illustrating an example of a state in which the oil mist detection device 1 j is attached to the pipe 100.
  • FIG. 25 is the same as FIG. 6 except that the oil mist detection device 1d shown in FIG. 6 is replaced with the oil mist detection device 1j, and a description thereof will be omitted.
  • FIG. 26 is a schematic diagram showing an oil mist detection device 1k according to the sixth embodiment.
  • FIG. 27 is a schematic diagram showing a state where the oil mist M is attached to the detection surface 30 in the oil mist detection device 1k shown in FIG.
  • the oil mist detection device 1k is different from the oil mist detection device 1a shown in FIG. 1 in the following points.
  • the light source unit 5 includes a light emitting element 50 and a diaphragm unit 52.
  • the light emitting element 50 is, for example, an LED that emits ultraviolet light.
  • the diaphragm unit 52 has a function of narrowing light from the light emitting element 50.
  • the oil mist detection device 1k includes an optical system 8 including a lens 80 and a lens 81.
  • the lens 80 is disposed between the diaphragm unit 52 and the first inclined surface 31, and converts the light L1 that has passed through the diaphragm unit 52 into parallel light. This parallel light is reflected by the detection surface 30.
  • the lens 81 is disposed between the second inclined surface 32 and the detection unit 7 and condenses the parallel light reflected by the detection surface 30.
  • the optical system 8 has a function of collecting the light emitted from the light source unit 5 toward the back surface 12 and reflected by the detection surface 30.
  • the detection unit 7 includes a light receiving unit 71 and a light shielding plate 73.
  • the light shielding plate 73 (an example of a light shielding member) is disposed on the optical axis of the lens 81 and between the lens 81 and the light receiving unit 71. Of the surfaces of the light shielding plate 73, the surface facing the lens 81 side is the light shielding surface 73a.
  • the focal point of the optical system 8 is located on the light shielding surface 73a. Therefore, the optical system 8 forms the light source image of the light source unit 5 on the light shielding surface 73a.
  • the light receiving unit 71 includes a light receiving surface 71 a disposed on the optical axis of the lens 81.
  • the light receiving unit 71 is positioned behind the light shielding surface 73a when viewed from the traveling direction of the light emitted from the light source unit 5 toward the back surface 12, reflected by the detection surface 30, and collected by the optical system 8.
  • the area of the light receiving surface 71a is larger than the area of the light shielding surface 73a.
  • the light receiving surface 71 a has an area capable of receiving light transmitted through the lens 81. Therefore, the light receiving surface 71a can receive the scattered light L2 that is not shielded by the light shielding surface 73a out of the scattered light L2 that has passed through the lens 81.
  • the light shielding surface 73a Since the light shielding surface 73a has a role of preventing the light source image from reaching the light receiving surface 71a, the area of the light shielding surface 73a is larger than the area of the light source image. As described above, the light shielding surface 73 a has a role of shielding light emitted from the light source unit 5 toward the back surface 12, reflected by the detection surface 30, and collected by the optical system 8. The light source image may be formed in front of or behind the light blocking surface 73a. The light shielding surface 73a needs to have a size that shields all the light L1 reflected by the detection surface 30 in a state where the oil mist M is not attached to the detection surface 30.
  • the light emitted from the light source unit 5 toward the back surface 12, reflected by the detection surface 30, and condensed by the optical system 8 is The light is blocked by the light blocking surface 73a and is not received by the light receiving surface 71a. Since the light receiving surface 71a has a larger area than the light shielding surface 73a and the scattered light L2 is generated in various directions, a part of the scattered light L2 passes through the optical system 8 and is received by the light receiving surface 71a. Can do. Therefore, the light receiving surface 71a selectively receives only the scattered light L2 without receiving the light emitted from the light source unit 5 toward the back surface 12, reflected by the detection surface 30, and collected by the optical system 8. it can.
  • FIG. 28 is a schematic diagram illustrating an oil mist detection device 1m according to a first modification of the sixth embodiment.
  • FIG. 28 is the same as FIG. 27 except that the transparent member 3 shown in FIG. 27 is replaced with the transparent member 3 shown in FIG.
  • the effect of the transparent member 3 shown in FIG. 23 has already been described in the description of FIG.
  • FIG. 29 is a schematic diagram showing an oil mist detection device 1n according to a second modification of the sixth embodiment.
  • the oil mist detection device 1n uses the transparent member 3 shown in FIG. Therefore, according to the oil mist detection device 1n, the light L1 that has entered the transparent member 3 is repeatedly reflected by the detection surface 30 and the opposing surface 33 a plurality of times, as in the oil mist detection device 1d shown in FIG. Therefore, the amount of scattered light L2 generated can be increased.
  • FIG. 30 is a schematic diagram illustrating an example of a state in which the oil mist detection device 1n is attached to the pipe 100.
  • FIG. 30 is the same as FIG. 6 except that the oil mist detection device 1d shown in FIG. 6 is replaced with the oil mist detection device 1n, and a description thereof will be omitted.
  • the oil mist detection devices 1h, 1i, 1j, 1k, 1m, and 1n according to the fifth and sixth embodiments also measure the oil mist concentration described in the first embodiment (FIGS. 8 to 11), Control for covering and non-covering the detection surface 30 by the blocking member 16 described in the third embodiment (FIGS. 15 to 17) and switching control described in the fourth embodiment (FIGS. 18 to 20) can be applied. That is, the transparent member 3, the light source unit 5, and the detection unit 7 shown in FIGS. 9, 17, and 20 are replaced with the transparent member 3, the light source unit 5, and the detection unit of the oil mist detection devices 1 h, 1 i, 1 j, 1 k, 1 m, 1 n. It can be replaced with part 7.
  • the imaging by the two-dimensional image sensor described in the second embodiment can also be applied to the oil mist detection devices 1h, 1i, 1k, and 1m according to the fifth and sixth embodiments. That is, the transparent member 3, the light source unit 5, and the detection unit 7 shown in FIG. 13 can be replaced with the transparent member 3, the light source unit 5, and the detection unit 7 of the oil mist detection devices 1h, 1i, 1k, and 1m.
  • positioned the two-dimensional image sensor 74 instead of the light-receiving part 71 is shown in FIG.
  • the second inclined surface 32 is a surface from which the light L1 reflected once by the detection surface 30 goes out of the transparent member 3.
  • the two-dimensional image sensor 74 images the detection surface 30 and the scattered light L2 through the second inclined surface 32.
  • the second inclined surface 32 is a surface from which the light L1 reflected a plurality of times by the detection surface 30 exits from the transparent member 3.
  • FIG. 12 shows a case where the light L1 emitted from the light source unit 5 is reflected by the detection surface 30 a plurality of times, similarly to FIGS. 24 and 29.
  • two oil mists M exist in the optical path of light L1.
  • the oil mist M when the oil mist M is irradiated with ultraviolet rays, it often emits fluorescence, depending on the type of oil.
  • the oil mist detection devices 1h, 1i, 1j, 1k, 1m, and 1n when the light L1 emitted from the light source unit 5 is ultraviolet light, there is a possibility that scattered fluorescent light L2 is generated. Is expensive.
  • the oil mist detection device includes a transparent member having a transparent detection surface arranged in a gas in which oil mist is floating, and the transparent member when the detection surface is a front surface of the transparent member.
  • the light incident on the transparent member from the back surface of the light source unit emits light toward the back surface at an angle reflected by the detection surface, and the light emitted from the light source unit toward the back surface, And a detector that detects scattered light from the light emitted from the back surface while being reflected by the detection surface.
  • the oil mist detection device does not detect oil mist floating in the gas, but detects oil mist adhering to the detection surface.
  • oil mist is floating in the gas
  • the amount of oil mist adhering to the detection surface increases as time passes. For this reason, even if the amount of oil mist floating in the gas is extremely small and the particle size of the oil mist is extremely small, the oil mist can be detected.
  • a data storage unit that preliminarily stores second data indicating the relationship between the time change rate of the amount of mist and the concentration of oil mist floating in the gas, and is detected by the detection unit at a first timing.
  • a first calculating unit that calculates the concentration of oil mist floating in the gas during the predetermined period.
  • the concentration of oil mist floating in the gas can be calculated.
  • the blocking member when the scattered light is detected by the blocking member that blocks the detection surface from the gas by covering the detection surface, the blocking member is controlled not to cover the detection surface.
  • a blocking control unit that controls the blocking member to cover the detection surface when the detection unit does not detect the scattered light.
  • the amount of oil mist adhering to the detection surface increases with time. As the area and thickness of the oil mist adhering to the detection surface increases, the intensity of the scattered light saturates. Therefore, even if the oil mist adheres to the detection surface, the intensity of the scattered light detected by the detection unit Does not grow. For this reason, the difference between the intensity of the scattered light detected by the detection unit at the first timing and the intensity of the scattered light detected by the detection unit at the second timing does not occur, so the detection unit, the data storage unit, and The concentration of oil mist cannot be measured using the first calculation unit. In order to be able to measure the concentration of oil mist, maintenance is required to remove the oil mist adhering to the detection surface.
  • the detection surface can be covered with the blocking member. Therefore, according to this configuration, since the scattered light intensity can be delayed, the number of maintenance operations can be reduced.
  • a sensor for measuring the concentration of oil mist floating in the gas and means for measuring the concentration when the concentration measured using the sensor is smaller than a first predetermined value.
  • the sensor is switched to the combination of the detection unit, the data storage unit, and the first calculation unit, and the concentration calculated using the combination is a predetermined second value that is equal to or greater than the first value.
  • a switching control unit for switching the means for measuring the concentration from the combination to the sensor when larger.
  • the concentration of oil mist is measured using a sensor.
  • the concentration of oil mist is relatively high (in other words, when the oil mist concentration is higher than the second value)
  • the concentration of oil mist is measured using a sensor.
  • the detection unit, the data storage unit, and The concentration of oil mist is measured using a combination of the first calculation units.
  • the light emitted from the light source unit is ultraviolet light, and the light emitted from the light source unit is applied to the oil mist adhering to the detection surface, whereby the scattered light of the fluorescence is emitted.
  • the back surface of the transparent member is a surface on which light emitted from the light source unit toward the back surface enters the transparent member, and the first inclined surface has an inclination with respect to the detection surface.
  • An opposing surface that is parallel to the detection surface, and a surface on which light reflected by the detection surface exits from the transparent member, and a second inclined surface that is inclined with respect to the detection surface; The detection unit detects the scattered light that has emerged from the facing surface.
  • the light reflected by the detection surface goes out of the transparent member from the second inclined surface, so that the detection unit does not receive the influence of the light reflected by the detection surface and emits scattered light. Can be detected.
  • the light that has entered the transparent member from the first inclined surface is repeatedly reflected a plurality of times on the detection surface and the opposing surface, and is then out of the transparent member from the second inclined surface. Get out.
  • the light entering the transparent member is repeatedly reflected a plurality of times on the detection surface and the opposing surface, so that the amount of scattered light generated can be increased. For this reason, even when the amount of oil mist adhering to the detection surface is very small, the oil mist can be detected. Therefore, according to this configuration, the sensitivity of the oil mist detection device can be improved.
  • the transparent member has a recess formed on the back surface, the bottom surface of which is the opposite surface.
  • the distance between the detection surface and the opposing surface can be shortened, so that the number of reflections repeated between the detection surface and the opposing surface can be increased, and the amount of scattered light generated can be increased.
  • the detection unit includes a two-dimensional image sensor that images the detection surface and the scattered light through the facing surface, and the oil mist detection device is further imaged by the two-dimensional image sensor. And a second calculation unit that calculates the number of oil mists attached to the detection surface and the size of each oil mist based on the detection surface and the two-dimensional image of the scattered light.
  • the light source unit includes a light emitting element, and a first polarizing member that receives light from the light emitting element and generates linearly polarized light in a predetermined direction, and the first polarizing member
  • the linearly polarized light generated in step (2) is emitted as light directed toward the back surface
  • the detection unit includes a second polarizing member that blocks the linearly polarized light out of the light emitted from the back surface, and the first And a light receiving unit that receives the scattered light transmitted through the two polarizing members.
  • the linearly polarized light in a predetermined direction is reflected as it is when reflected at a portion of the detection surface where oil mist is not attached (that is, reflected in a state in which the predetermined direction is maintained). . Therefore, this linearly polarized light cannot pass through the second polarizing member.
  • the linearly polarized light in a predetermined direction is reflected at a portion of the detection surface where the oil mist is attached, the linearly polarized light is not maintained and becomes scattered light. Since the scattered light includes polarized light having various vibration directions, a part of the scattered light incident on the second polarizing member can pass through the second polarizing member.
  • the light receiving unit can selectively receive only the scattered light without receiving the linearly polarized light (linearly polarized light in a predetermined direction) reflected by the detection surface.
  • the optical system further includes an optical system that collects light emitted from the light source unit toward the back surface and reflected by the detection surface, and the detection unit transmits the light collected by the optical system.
  • a light-shielding member having a light-shielding surface for shielding light, and a light-receiving surface having an area larger than the area of the light-shielding surface, and is located behind the light-shielding surface when viewed from the traveling direction of the light condensed by the optical system.
  • a light receiving unit that receives the scattered light that has passed through the optical system by the light receiving surface.
  • the light emitted from the light source part toward the back, reflected by the detection surface, and collected by the optical system is shielded by the light shielding surface, and thus is not received by the light receiving surface. Since the light receiving surface has a larger area than the light blocking surface and scattered light is generated in various directions, a part of the scattered light can pass through the optical system and be received by the light receiving surface. Therefore, according to this configuration, the light receiving unit can selectively receive only the scattered light without receiving the light emitted from the light source unit toward the back surface and reflected by the detection surface.
  • the optical system forms a light source image of the light source unit on the light shielding surface.
  • This configuration is when the focal point of the optical system is located on the light shielding surface.
  • the area of the light shielding surface can be reduced as compared with the case where the light source image is not formed on the light shielding surface. Therefore, according to this configuration, the amount of scattered light that can be received by the light receiving unit can be increased.
  • the light emitted from the light source unit is ultraviolet light, and the light emitted from the light source unit is applied to the oil mist adhering to the detection surface, whereby the scattered light of the fluorescence is emitted. appear.
  • This configuration is when the scattered light becomes fluorescent.
  • the back surface of the transparent member is a surface on which light emitted from the light source unit toward the back surface enters the transparent member, and the first inclined surface has an inclination with respect to the detection surface.
  • An opposing surface that is parallel to the detection surface, and a surface on which light reflected by the detection surface exits from the transparent member, and a second inclined surface that is inclined with respect to the detection surface; The detection unit detects the scattered light that has come out of the second inclined surface.
  • the light reflected from the detection surface comes out from the second inclined surface, but the light receiving unit can selectively receive the scattered light, so that it is not affected by the light reflected from the detection surface.
  • the light that has entered the transparent member from the first inclined surface is repeatedly reflected a plurality of times on the detection surface and the opposing surface, and is then out of the transparent member from the second inclined surface. Get out.
  • the light entering the transparent member is repeatedly reflected a plurality of times on the detection surface and the opposing surface, so that the amount of scattered light generated can be increased. For this reason, even when the amount of oil mist adhering to the detection surface is very small, the oil mist can be detected. Therefore, according to this configuration, the sensitivity of the oil mist detection device can be improved.
  • the transparent member has a recess formed on the back surface, the bottom surface of which is the opposite surface.
  • the distance between the detection surface and the opposing surface can be shortened, so that the number of reflections repeated between the detection surface and the opposing surface can be increased, and the amount of scattered light generated can be increased.
  • the back surface of the transparent member is a surface on which light emitted from the light source unit toward the back surface enters the transparent member, and the first inclined surface has an inclination with respect to the detection surface.
  • a light that is reflected once by the detection surface is a surface that goes out of the transparent member, and has a second inclined surface that is inclined with respect to the detection surface.
  • the oil mist detection apparatus further includes a two-dimensional image sensor that images the detection surface and the scattered light via an inclined surface, and the oil mist detection device further includes two detection surfaces and two scattered light images captured by the two-dimensional image sensor.
  • a second calculation unit is provided that calculates the number of oil mists adhering to the detection surface and the size of each oil mist based on the three-dimensional image.
  • the light source unit emits light toward the back surface at an angle at which light incident on the transparent member from the back surface is totally reflected by the detection surface.
  • the detection unit detects scattered light generated by irradiating the oil mist attached to the detection surface with the light from the light source unit, and generates a signal indicating the oil mist attached to the detection surface.

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  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
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Abstract

La présente invention concerne un dispositif de détection de nuage d'huile (1a) pourvu : d'un élément transparent (3) ayant une surface de détection transparente (30) disposée dans un gaz (G) ayant un nuage d'huile (M) flottant à l'intérieur ; d'une partie formant source de lumière (5) qui produit, vers une surface arrière (12) de l'élément transparent (3), de la lumière (L1) sous un angle auquel la lumière (L1), qui a pénétré depuis l'élément transparent (3) dans la surface arrière (12), est reflétée par la surface de détection (30) lorsque celle-ci (30) est définie en tant que surface avant (11) de l'élément transparent (3) ; d'une partie de détection (7) qui détecte la lumière diffusée (L2) dans la lumière émise par la surface arrière (12) dans un état dans lequel la lumière (L1) émise vers la surface arrière (12) depuis la partie formant source de lumière (5) est reflétée par la surface de détection (30).
PCT/JP2015/083348 2015-02-12 2015-11-27 Dispositif de détection de nuage d'huile WO2016129166A1 (fr)

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JP2015025514 2015-02-12
JP2015-143340 2015-07-17
JP2015143340A JP6466795B2 (ja) 2015-02-12 2015-07-17 オイルミスト検出装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112818886A (zh) * 2021-02-09 2021-05-18 广州富港万嘉智能科技有限公司 飘尘检测方法、可读存储介质、飘尘检测机及智能食品机

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0249889A (ja) * 1988-08-11 1990-02-20 Sekiyu Kodan 水中油・ガス漏洩検知装置
JPH08327528A (ja) * 1995-05-30 1996-12-13 Fujitsu Ltd 塵埃測定装置、塵埃測定方法、および成膜方法
JP2000241344A (ja) * 1999-02-22 2000-09-08 Hamamatsu Photonics Kk 透明基板上の表面検査装置
JP2007163511A (ja) * 2007-02-07 2007-06-28 Denso Corp 雨滴検知装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0249889A (ja) * 1988-08-11 1990-02-20 Sekiyu Kodan 水中油・ガス漏洩検知装置
JPH08327528A (ja) * 1995-05-30 1996-12-13 Fujitsu Ltd 塵埃測定装置、塵埃測定方法、および成膜方法
JP2000241344A (ja) * 1999-02-22 2000-09-08 Hamamatsu Photonics Kk 透明基板上の表面検査装置
JP2007163511A (ja) * 2007-02-07 2007-06-28 Denso Corp 雨滴検知装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112818886A (zh) * 2021-02-09 2021-05-18 广州富港万嘉智能科技有限公司 飘尘检测方法、可读存储介质、飘尘检测机及智能食品机

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