WO2016125917A8 - レーザ光源装置及びレーザパルス光生成方法 - Google Patents
レーザ光源装置及びレーザパルス光生成方法 Download PDFInfo
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- WO2016125917A8 WO2016125917A8 PCT/JP2016/060369 JP2016060369W WO2016125917A8 WO 2016125917 A8 WO2016125917 A8 WO 2016125917A8 JP 2016060369 W JP2016060369 W JP 2016060369W WO 2016125917 A8 WO2016125917 A8 WO 2016125917A8
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- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
- H01S3/1601—Solid materials characterised by an active (lasing) ion
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
- H01S3/163—Solid materials characterised by a crystal matrix
- H01S3/164—Solid materials characterised by a crystal matrix garnet
- H01S3/1643—YAG
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
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- H01S3/1671—Solid materials characterised by a crystal matrix vanadate, niobate, tantalate
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2308—Amplifier arrangements, e.g. MOPA
- H01S3/2325—Multi-pass amplifiers, e.g. regenerative amplifiers
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- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/065—Mode locking; Mode suppression; Mode selection ; Self pulsating
- H01S5/0658—Self-pulsating
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- Physics & Mathematics (AREA)
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- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
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Abstract
第1光源である種光源10から出力されるパルス光を増幅するファイバ増幅器20,30及び固体増幅器50と、固体増幅器から出力されるパルス光を波長変換する非線形光学素子60,70と、ファイバ増幅器から固体増幅器へのパルス光の伝播を許容または阻止する光スイッチ素子40と、固体増幅器の上流側に配置され種光源から出力されるパルス光と合波可能な第2光源11と、少なくとも種光源10からのパルス光の出力期間に光の伝播を阻止するように光スイッチ素子40を制御するとともに、第2光源11を発振制御する制御部100と、を備えて構成され、励起用光源を停止しなくても一時的にパルス光の出力を停止でき、出力再開直後のビーム伝播特性の劣化が回避できるレーザ光源装置。
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US15/549,360 US10256599B2 (en) | 2015-02-06 | 2016-03-30 | Laser light-source apparatus and laser pulse light generating method |
EP16746745.5A EP3309912B1 (en) | 2015-02-06 | 2016-03-30 | Laser light-source apparatus and laser pulse light generating method |
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JP3353243B2 (ja) * | 1995-03-08 | 2002-12-03 | 日本電信電話株式会社 | 雑音指数測定方法 |
US6339604B1 (en) * | 1998-06-12 | 2002-01-15 | General Scanning, Inc. | Pulse control in laser systems |
US6414980B1 (en) * | 1999-10-12 | 2002-07-02 | Coherent, Inc. | Laser rod thermalization |
US8248688B2 (en) * | 2006-07-27 | 2012-08-21 | Electro Scientific Industries, Inc. | Tandem photonic amplifier |
US7885298B2 (en) * | 2008-01-16 | 2011-02-08 | Deep Photonics Corporation | Method and apparatus for producing arbitrary pulsetrains from a harmonic fiber laser |
WO2009093425A1 (ja) * | 2008-01-21 | 2009-07-30 | Nikon Corporation | 広帯域光増幅器、光パルス発生装置及び光学機器 |
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JP5240526B2 (ja) | 2010-03-15 | 2013-07-17 | オムロン株式会社 | レーザ加工装置、レーザ光源装置、および、レーザ光源装置の制御方法 |
JP2013065804A (ja) * | 2010-12-20 | 2013-04-11 | Gigaphoton Inc | レーザ装置およびそれを備える極端紫外光生成システム |
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US8774236B2 (en) * | 2011-08-17 | 2014-07-08 | Veralas, Inc. | Ultraviolet fiber laser system |
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