WO2016110935A1 - Atr測定用対物光学系 - Google Patents
Atr測定用対物光学系 Download PDFInfo
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- WO2016110935A1 WO2016110935A1 PCT/JP2015/050051 JP2015050051W WO2016110935A1 WO 2016110935 A1 WO2016110935 A1 WO 2016110935A1 JP 2015050051 W JP2015050051 W JP 2015050051W WO 2016110935 A1 WO2016110935 A1 WO 2016110935A1
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- light
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- measurement
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- prism
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- 238000005259 measurement Methods 0.000 title claims abstract description 104
- 230000003287 optical effect Effects 0.000 title claims abstract description 97
- 238000000034 method Methods 0.000 claims abstract description 12
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- 238000000862 absorption spectrum Methods 0.000 abstract description 10
- 230000002547 anomalous effect Effects 0.000 abstract description 10
- 230000035515 penetration Effects 0.000 abstract description 9
- 230000000116 mitigating effect Effects 0.000 abstract description 2
- 238000005211 surface analysis Methods 0.000 abstract description 2
- 238000005102 attenuated total reflection Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 11
- 230000000007 visual effect Effects 0.000 description 7
- 238000003384 imaging method Methods 0.000 description 6
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
- G02B21/04—Objectives involving mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3577—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing liquids, e.g. polluted water
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/26—Stages; Adjusting means therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/063—Illuminating optical parts
- G01N2201/0636—Reflectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/063—Illuminating optical parts
- G01N2201/0638—Refractive parts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/064—Stray light conditioning
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/1805—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for prisms
Definitions
- the present invention relates to an objective optical system used in analyzing a sample by a total reflection absorption method using an infrared microscope.
- ATR measurement One of the surface analysis methods performed with an infrared microscope is the total reflection absorption (ATR) method (hereinafter referred to as “ATR measurement”).
- ATR measurement as shown in FIG. 13A, the sample S is pressure-bonded to a prism (ATR prism) 438 having a higher refractive index than that of the sample S, and the infrared light is directed toward the surface of the sample S so that the total reflection criticality is achieved. Irradiate at an incident angle greater than the angle. Then, the infrared light is incident on the ATR prism 438 and then totally reflected at the boundary surface B between the ATR prism 438 and the sample S.
- the infrared light enters the sample S side slightly beyond the boundary surface B (a fraction of the wavelength of the measured infrared light) as shown in FIG. Part receives inherent absorption.
- the sample surface can be analyzed by analyzing the absorption spectrum of infrared light reflected from the sample after being slightly immersed in the sample surface.
- FIG. 14 is a diagram showing a configuration of a general objective optical system used in an infrared microscope in recent years.
- the objective optical system shown in the figure includes a Cassegrain mirror (also called a Schwarzschild-type reflective objective mirror), a substantially hemispherical ATR prism 538, and a prism holder 537 for holding the ATR prism 538.
- the Cassegrain mirror includes a concave primary mirror 511 having an opening 513 in the center, and a convex secondary mirror 512 arranged immediately below the opening 513.
- the primary mirror 511 faces the concave surface downward, and the secondary mirror 512 is fixed with the convex surface facing upward.
- the diameter of the ATR prism 538 is about several mm.
- the bottom surface of the ATR prism 538 is a complete flat surface or a spherical surface slightly bulging downward, and the region where the ATR prism 538 and the sample S are in contact is a small region having a diameter of about several tens to several hundreds of ⁇ m. It becomes. Hereinafter, this small area is referred to as “contact P” between the prism and the sample.
- contact P this small area is referred to as “contact P” between the prism and the sample.
- an infrared light source, a visible light source, a detection optical system for detecting infrared light, a visual optical system for visually observing a sample using visible light, and a sample S are mounted.
- a sample stage 580 or the like is included as a component of the infrared microscope.
- the light (measurement light) from the infrared light source enters the secondary mirror 512 from above the objective optical system via the opening 513, is reflected by the convex surface of the secondary mirror 512, and enters the primary mirror 511.
- the measurement light reflected and collected by the concave surface of the main mirror 511 is incident on the ATR prism 538 disposed at the focal point of the main mirror 511 and irradiated on the contact P. Then, the reflected infrared light from the sample S enters the detection optical system of the infrared microscope through the primary mirror 511 and the secondary mirror 512 and is detected.
- the ATR method measures the absorption spectrum of the sample surface layer by measuring the total reflection light absorbed and attenuated in the process in which the measurement light slightly immersed in the sample surface passes through the sample surface layer. It is an analysis method to obtain The penetration depth of the measurement light at this time depends on the refractive index n of the ATR prism and the incident angle ⁇ of the light to the sample. Among these, in order to change the refractive index n, it is necessary to prepare a plurality of ATR prisms made of different materials. However, since the ATR prism is relatively expensive, there is a problem in that the cost for ATR measurement is increased. There is.
- the solid angle of the aperture of the reflecting objective mirror is reduced by reducing the minimum incident angle.
- the minimum incident angle approaches the critical angle, and due to the effect of anomalous dispersion of the refractive index n, the shape change of the absorption peak (differential shaping, low wavenumber peak intensity becomes relatively large, low wavenumber Shift to the side, etc.).
- the shape change of the absorption peak (differential shaping, low wavenumber peak intensity becomes relatively large, low wavenumber Shift to the side, etc.).
- Patent Document 1 discloses that an absorption spectrum having different penetration depths can be obtained using one ATR prism by changing the incident angle range of light to the sample.
- An objective optical system is described.
- a light-shielding mask M having an arc-shaped opening is disposed above the secondary mirror 612, so that the measurement light incident on the secondary mirror 612 from the infrared light source can be obtained. Part of it can be shielded.
- a plurality of masks having different shapes and sizes of the openings are prepared as the light shielding mask M.
- the light-shielding mask M and the slide mechanism are provided at predetermined positions of the objective optical system, specifically, an attachment portion 616 for attaching the objective optical system to the revolver of the infrared microscope. It is arranged at any position below the area where the Cassegrain mirror composed of the primary mirror 611 and the secondary mirror 612 is accommodated.
- the distance from this mounting portion (716 in FIG. 15 (b)) to the Cassegrain mirror (711 and 712 in FIG. 15 (b)). Is shorter than before. This is due to the difference in imaging magnification between the conventional objective optical system and the recent objective optical system.
- the imaging magnification increases, and conversely, when the distance is long, the imaging magnification decreases.
- the sample surface is observed with the naked eye using a visual optical system including an objective lens L made of glass or the like when positioning the sample S.
- a relatively high magnification (about 30 times) was required.
- the imaging magnification is increased, there is a problem that an observable region (field of view) is narrowed and it is difficult to search for a measurement target region on the sample surface.
- an objective optical system having a relatively low imaging magnification of about 15 times and a visual optical system including a digital camera such as a CCD camera or a CMOS camera have been used in combination.
- a visual optical system including a digital camera such as a CCD camera or a CMOS camera
- an image of the sample surface photographed by the digital camera of the visual optical system can be displayed on a monitor of a personal computer or the like, and can be observed while being magnified by a digital zoom or the like as necessary.
- the distance from the boundary surface B to the Cassegrain mirrors 711 and 712 is designed to be longer in order to lower the imaging magnification compared to the conventional art.
- the distance from the Cassegrain mirrors 711 and 712 to the mounting portion 716 is shortened.
- a baffle 715 for reducing stray light is provided on the inner periphery of the opening provided in the main mirror 711.
- the light beam of the measurement light above the secondary mirror is relatively thin, in order to achieve the target incident angle ⁇ , it is necessary to process the opening provided on the light shielding mask M with high accuracy, and to shield the light.
- the mask M must be configured so that it can be positioned precisely on the optical path of the measurement light, resulting in an increase in manufacturing cost.
- the present invention has been made in view of the above points, and the object of the present invention is measurement that places importance on optical throughput in one objective optical system, and measurement that places emphasis on mitigating the effects of abnormal refractive index dispersion. And an objective optical system for ATR measurement that can easily adjust the penetration depth of measurement light into a sample and can be manufactured at a relatively low cost.
- the objective optical system according to the present invention made to solve the above problems is an objective optical system that is attached to an infrared microscope and used for analyzing a sample surface by a total reflection absorption method.
- the incident angle range of the measurement light to the sample can be adjusted. Therefore, even in an objective optical system designed to obtain a large optical throughput by increasing the solid angle of the aperture of the Cassegrain mirror, incident light near the critical angle can be obtained by changing the minimum incident angle using the light shielding means. Can alleviate the effect of anomalous dispersion. Further, by using the light shielding means, it is possible to easily adjust the penetration depth of the measurement light into the sample.
- the objective optical system according to the present invention has an advantage that it can be manufactured at a relatively low cost because high accuracy is not required for manufacturing and positioning of the light shielding means.
- the objective optical system according to the present invention further includes: e) a housing containing the primary mirror and the secondary mirror; f) a prism holder that holds the prism and can be attached to and detached from a lower portion of the housing; Have It is desirable that the light shielding means is a light shielding mask mounted on the prism holder above the prism.
- the amount of light blocked by the light shielding means can be easily achieved by attaching the light shielding mask to the prism holder or removing the light shielding mask from the prism holder. Can be changed.
- the incident angle range of the measurement light to the sample can be easily adjusted, and a single objective optical system can easily switch between measurement that emphasizes optical throughput and measurement that emphasizes relaxation of the abnormal dispersion. Can be done. It is also possible to easily obtain a plurality of absorption spectra measured at different penetration depths by adjusting the incident angle range.
- a prism holder with a light shielding mask and a prism holder without a light shielding mask are prepared in advance, and the light shielding amount can be changed by appropriately replacing the prism holder attached to the housing. Also good.
- a plurality of light shielding masks having different shapes and sizes are prepared in advance, and the light shielding masks attached to the prism holder are appropriately replaced, or the plurality of light shielding masks are fixed to different prism holders, The light shielding amount can be changed by appropriately replacing the prism holder attached to the housing.
- the objective optical system according to the present invention is
- the primary mirror has an opening for introducing measurement light and is arranged with the concave surface facing down,
- the secondary mirror is disposed below the primary mirror with the convex surface facing upward;
- the measurement light beam incident from above the primary mirror through the opening is reflected by the convex surface of the secondary mirror, and the reflected light is re-reflected by the concave surface of the primary mirror and collected at a point below the secondary mirror.
- the light-shielding means may be a light-shielding mask that is mounted below the secondary mirror so as to be movable horizontally and vertically.
- the light shielding amount of the measurement light by the light shielding mask can be easily changed, and the incident angle range of the measurement light to the sample can be adjusted. Therefore, in the same way as described above, with one objective optical system, measurement that emphasizes optical throughput and measurement that emphasizes relaxation of anomalous dispersion can be easily switched, or measured at different penetration depths. It is possible to easily acquire a plurality of absorption spectra.
- the primary mirror has an opening for introducing measurement light and is arranged with the concave surface facing down
- the secondary mirror is disposed below the primary mirror with the convex surface facing upward;
- the measurement light beam incident from above the primary mirror through the opening is reflected by the convex surface of the secondary mirror, and the reflected light is re-reflected by the concave surface of the primary mirror and collected at a point below the secondary mirror.
- the light-shielding means is a light-shielding mask attached below the secondary mirror;
- the light shielding mask may be configured to be rotatable around an axis extending parallel to the light shielding mask and in the horizontal direction.
- the light shielding amount of the measurement light by the light shielding mask is easily changed, and the incident angle range of the measurement light to the sample is adjusted. be able to. Therefore, in the same way as described above, with one objective optical system, measurement that emphasizes optical throughput and measurement that emphasizes relaxation of anomalous dispersion can be easily switched, or measured at different penetration depths. It is possible to easily acquire a plurality of absorption spectra.
- a single objective optical system can be easily switched between measurement focusing on optical throughput and measurement focusing on relaxation of the anomalous dispersion, or with different penetration depths. It is possible to provide an ATR measurement objective optical system that can easily acquire a plurality of absorption spectra measured in step 1 and that can be manufactured at a relatively low cost.
- FIG. 1 is a longitudinal sectional view of an objective optical system according to a first embodiment of the present invention.
- the schematic diagram which shows the optical path of the measurement light when not mounting
- the schematic diagram which shows the optical path of the measurement light at the time of mounting
- the graph which shows an example of the absorption spectrum obtained in the state which does not mount
- FIG. 2A is a plan view of a light shielding mask in the embodiment
- FIG. 3A shows a light shielding mask provided with a light shielding portion with a small diameter
- FIG. 2B shows a light shielding mask provided with a light shielding portion with a large diameter.
- the front view, (e) is a plan view showing a state where a light shielding mask is placed on the support, and (f) is the front view.
- the schematic diagram which shows the state which retracted the light-shielding mask from the optical path of measurement light in the objective optical system which concerns on 2nd Embodiment of this invention.
- the schematic diagram which shows the state which inserted the light shielding mask on the optical path of measurement light in the embodiment.
- the schematic diagram which shows the state which retracted the light-shielding mask from the optical path of measurement light in 3rd Embodiment of this invention.
- the schematic diagram which shows the state which inserted the light shielding mask on the optical path of measurement light in the embodiment.
- FIG. 1 is a longitudinal sectional view of an objective optical system according to the first embodiment of the present invention.
- This objective optical system is used by being attached to a revolver of an infrared microscope, and includes a Cassegrain mirror housing portion 110 housing a Cassegrain mirror and a prism housing portion 120 housing a substantially hemispherical ATR prism 138. ing.
- the Cassegrain mirror housing part 110 has an attachment part 116 for attaching to a revolver of an infrared microscope at the upper end, and a concave main mirror 111 and a convex secondary mirror 112 constituting the Cassegrain mirror are housed inside.
- a concave main mirror 111 and a convex secondary mirror 112 constituting the Cassegrain mirror are housed inside.
- both the concave surface of the primary mirror 111 and the convex surface of the secondary mirror 112 have a circular outer shape when viewed from above.
- the primary mirror 111 has an opening for introducing light at the center, and is held in the Cassegrain mirror housing 110 with the concave surface facing downward.
- the secondary mirror 112 is disposed below the primary mirror 111 with the convex surface facing upward.
- an upper opening 113 and a lower opening 114 for allowing light to pass therethrough are respectively provided in the upper and lower portions of the Cassegrain mirror housing 110, and a light shielding member for reducing stray light is provided on the inner periphery of the upper opening 113.
- a baffle 115 is arranged.
- the prism accommodating portion 120 is a cylindrical member that is used by being attached to the lower portion of the Cassegrain mirror accommodating portion 110, and includes a plate accommodating portion 121 for accommodating the slide plate 130 holding the ATR prism 138.
- FIG. 2 shows the configuration of the slide plate 130.
- the slide plate 130 has a main body 131 that is a rectangular plate-like member, and a grip 132 that is attached to the short side of the main body 131.
- Protrusions 133 are formed on the side surfaces of the main body 131 along the longitudinal direction. By fitting these convex parts 133 with groove-shaped recesses 122 provided on the inner side surface of the plate accommodating part 121, The slide plate 130 can be slidably held in the prism accommodating portion 120.
- a mask accommodating portion 134 formed of a circular recess is formed on the upper surface of the main body 131 of the slide plate 130.
- a circular through hole having a smaller diameter than the mask accommodating portion 134 is formed at the center of the mask accommodating portion 134.
- a certain prism opening 135 is provided.
- a viewing opening 136 that is a through hole having substantially the same diameter as the prism opening 135 is provided next to the mask housing portion 134 and the prism opening 135.
- the prism opening 135 houses a prism holder 137 having a mortar shape.
- the prism holder 137 has an ATR prism 138 fitted in an opening provided at the center thereof.
- the light shielding mask 140 which is a characteristic element of the present invention is accommodated in the mask accommodating portion 134.
- the light shielding mask 140 is made of a thin circular plate having light shielding properties, and includes an annular frame portion 141, a circular light shielding portion 142 disposed at the center of the frame portion 141, and the frame portion 141 and the light shielding portion 142. And a connecting portion 143 for connecting.
- the outer diameter of the light shielding part 142 is smaller than the inner diameter of the frame part 141, whereby an arc-shaped slit 144 is formed between the outer periphery of the light shielding part 142 and the inner periphery of the frame part 141.
- the light shielding mask 140 may be fixed to the mask accommodating portion 134 of the slide plate 130 with an adhesive or the like, or only placed on the mask accommodating portion 134.
- the light shielding mask 140 is not fixed to the slide plate 130, there is an advantage that the user can easily attach and remove the light shielding mask 140 to and from the slide plate 130 as necessary.
- the light shielding mask 140 is fixed to the slide plate 130, there is an advantage that the light shielding mask 140, which is a small component, can be prevented from being lost. In this case, apart from the slide plate 130 to which the light-shielding mask 140 is fixed, a slide plate that does not have the light-shielding mask 140 is prepared, and these slide plates are used properly as necessary. desirable.
- the user places a sample on the sample stage of the infrared microscope with the objective optical system attached to the infrared microscope. S is arranged. Then, the slide plate 130 is slid in the horizontal direction so that the visual opening 136 is positioned directly below the lower opening 114 of the Cassegrain mirror housing 110. In this state, when light (visible light) from a visible light source provided in the infrared microscope is irradiated to the Cassegrain mirror from the upper opening 113, the visible light is reflected by the secondary mirror 112 and the primary mirror 111 and irradiated to the sample S.
- the light reflected from the surface of the sample S enters the infrared microscope from the upper opening 113 of the Cassegrain mirror housing 110 again through the primary mirror 111 and the secondary mirror 112.
- An image obtained by this incident light is taken by a CCD camera or the like provided in the visual optical system of the infrared microscope and displayed on a PC monitor or the like.
- the user adjusts the position of the sample S by moving the sample stage while visually observing the image displayed on the monitor or the like, and positions the region (measurement point) to be measured on the surface of the sample S at the focal point of the main mirror 111.
- the user again slides the slide plate 130 in the horizontal direction, and this time the prism opening 135 is positioned directly below the lower opening 114 of the Cassegrain mirror housing 110.
- the ATR prism 138 is placed above the measurement point of the sample S, so that the sample stage is further raised and the sample S is pressure-bonded to the bottom surface of the ATR prism 138.
- the infrared light is sub-mirror 112 and primary mirror 111.
- the light enters the prism opening 135.
- the light shielding mask 140 is not attached to the mask accommodating portion 134 provided at the upper end of the prism opening 135, most of the measurement light reflected and condensed by the primary mirror 111 is an ATR prism.
- the contact P between 138 and the sample S is irradiated.
- the light shielding mask 140 is attached to the mask housing portion 134, only the light that has passed through the slit 144 on the light shielding mask 140 out of the measurement light is irradiated to the contact P. . *
- the incident angle of the measurement light with respect to the boundary surface B between the sample S and the ATR prism 138 is, for example, 22 ° to 45 °.
- the light-shielding mask 140 is attached to the slide plate 130, light having an incident angle in the range of 22 ° to 30 ° out of the light flux of the measurement light is shielded by the light-shielding mask 140 as shown in FIG. It is blocked by the portion 142 and is no longer incident on the contact point P. That is, the incident angle of the measurement light with respect to the boundary surface B is limited to 30 ° to 45 °.
- the measurement light incident on the contact P is reflected after being slightly immersed in the surface of the sample S.
- the reflected infrared light enters the infrared microscope through the primary mirror 111 and the secondary mirror 112 and is detected by a detection optical system provided in the infrared microscope.
- An example of the measurement result obtained at this time is shown in FIGS.
- NBR nitrile rubber
- FIGS. 5 show the measurement result when the light shielding mask 140 is not attached to the slide plate 130 (that is, the incident angle is 22 ° to 45 °), and FIG.
- the configuration in which the incident angle range of the measurement light can be switched between two types depending on the presence or absence of the light shielding mask 140 has been described as an example.
- the present invention is not limited to this. It is good also as a structure.
- two types of light shielding masks 140 and 150 having different sizes of the light shielding portions 142 and 152 are prepared. Depending on which one is used or which one of the light-shielding masks 140 and 150 is not used, it is possible to achieve a configuration capable of measurement in three types of incident angle ranges.
- the light shielding mask may not be fixed to the slide plate, and only the light shielding mask may be replaced according to a required incident angle.
- the mask may be fixed to the slide plate, and the entire slide plate may be exchanged according to the required incident angle.
- a mask 160 of the slide plate 130 is used as a support body 160 including an annular frame portion 161, a circular center portion 162, and a connecting portion 163 that connects the two. It is fixed to the upper surface of the support 160 with an adhesive or the like, which is smaller than the inner diameter of the frame portion 161 and larger than the outer diameter of the center portion 162 as shown in FIGS.
- a light shielding mask 170 made of a circular light shielding plate having a diameter may be placed.
- FIGS. 8E and 8F show a state where the light shielding mask 170 is placed on the support 160.
- the incident angle of the measurement light on the boundary surface B can be changed between the state where the light shielding mask 170 is placed on the support 160 and the state where it is not placed. Further, the incident angle may be changed in multiple stages by preparing a plurality of light shielding masks 170 having different diameters and replacing the light shielding masks 170 placed on the support 160 as necessary.
- FIGS. 1 to 4 are longitudinal sectional views of an objective optical system according to the second embodiment of the present invention. Components that are the same as or correspond to those shown in FIGS. 1 to 4 described above are given the same reference numerals in the last two digits, and description thereof will be omitted as appropriate.
- the components other than the primary mirror 211, the secondary mirror 212, the light shielding mask 240, and the actuator 217 (described later) are not shown.
- the omitted constituent elements conventionally known constituent elements of the objective optical system for ATR measurement can be adopted.
- a light shielding mask 240 is arranged below the secondary mirror 212, and the light shielding mask 240 is moved up and down to change the incident angle of the measurement light to the boundary surface B.
- an actuator 217 for driving the light shielding mask 240 is attached so as to pass through the center of the secondary mirror 212, and a circular light shielding plate is provided at the lower end of a drive shaft 217a provided at the lower portion of the actuator 217.
- a shading mask 240 is attached. Note that a region surrounded by a square frame at the lower left of FIG. 9 shows a state where the light shielding mask 240 is viewed from below.
- the actuator 217 is controlled by a control unit (not shown), and when the user inputs a desired minimum incident angle to the control unit, the drive shaft 217a is driven up and down to a position corresponding to the minimum incident angle.
- a light shielding mask 240 is disposed.
- the incident angle of the measurement light becomes 22 ° to 45 ° by moving the light shielding mask 240 upward and retracting from the optical path of the measurement light.
- the incident angle of the measurement light is limited to 30 ° to 45 ° by being moved downward and inserted into the optical path of the measurement light.
- the minimum incident angle of the measurement light can be arbitrarily adjusted within a predetermined range by continuously changing the vertical position of the light shielding mask 240.
- FIGS. 1 to 4 are longitudinal sectional views of an objective optical system according to the third embodiment of the present invention.
- Components that are the same as or correspond to those shown in FIGS. 1 to 4 described above are given the same reference numerals in the last two digits, and description thereof will be omitted as appropriate.
- the components other than the primary mirror 311, the secondary mirror 312, the light shielding mask 340, and the actuator 317 are not shown, and the omitted components are the objective optical for ATR measurement.
- Conventionally known components can be adopted as each component of the system.
- a light shielding mask 340 is disposed below the secondary mirror 312, and the light shielding mask 340 is rotated around an axis parallel to the light shielding mask 340 and extending in the horizontal direction, thereby measuring light on the boundary surface B.
- the incident angle can be changed.
- a light shielding mask 340 made of a circular light shielding plate is disposed immediately below the secondary mirror 312, and an actuator 317 for driving the light shielding mask 340 has its rotating shaft 317a directed forward in the paper direction of FIG. In this state, it is arranged behind the light shielding mask 340.
- the rotating shaft 317a is fixed to the light shielding mask 340 in a state of passing through the diameter direction of the light shielding mask 340.
- a region surrounded by a square frame at the lower left of FIG. 11 shows a state where the light shielding mask 340 and the actuator 317 are viewed from the side.
- the actuator 317 is controlled by a control unit (not shown).
- the control unit When the user inputs a desired minimum incident angle to the control unit, the rotary shaft 317a is rotationally driven, and light is shielded at an angle corresponding to the minimum incident angle.
- the mask 340 stops.
- the light shielding mask 340 is retracted from the optical path of the measurement light by setting the light shielding mask 340 perpendicular to the boundary surface B, whereby the incident angle of the measurement light is 22 ° to 45 °. It has become.
- the light shielding mask 340 is inserted in the optical path of the measurement light by setting the light shielding mask 340 in a state parallel to the boundary surface B, whereby the incident angle of the measurement light is 30 ° to 45 °. Is limited to. In this configuration, the minimum incident angle of the measurement light can be arbitrarily adjusted within a predetermined range by continuously changing the angle of the light shielding mask 340.
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Abstract
Description
a)前記赤外顕微鏡から照射された測定光を反射する凸面状の副鏡と、
b)前記副鏡で反射された前記測定光を反射する凹面状の主鏡と、
c)前記主鏡で反射された前記測定光が照射されるプリズムと、
d)前記主鏡と前記プリズムとの間の前記測定光の光路上において該測定光の光束の一部を遮断する遮光手段と、
を有することを特徴としている。
また、前記主鏡とプリズムとの間の光路上では(副鏡の手前側に比べて)測定光の光束が比較的太く、前記近年の対物光学系のように遮光マスクの形状、寸法、及び位置の僅かな差によって前記入射角が大きく変動してしまうことがない。その結果、本発明に係る対物光学系は、遮光手段の製造や位置決めに際して高い精度が要求されないため、比較的安価に製造できるという利点も有している。
e)前記主鏡及び前記副鏡を収容した筐体と、
f)前記プリズムを保持し、前記筐体の下部に着脱可能なプリズムホルダと、
を有し、
前記遮光手段が、前記プリズムホルダ上で前記プリズムの上方に取り付けられた遮光マスクであるものとすることが望ましい。
また、遮光マスクが取り付けられたプリズムホルダと、遮光マスクが取り付けられていないプリズムホルダとを予め用意しておき、前記筐体に取り付けるプリズムホルダを適宜交換することにより前記遮光量を変更できる構成としてもよい。
あるいは、形状や大きさの異なる複数の遮光マスクを予め用意しておき、前記プリズムホルダに取り付ける遮光マスクを適宜交換したり、前記複数の遮光マスクをそれぞれ別のプリズムホルダに固定しておき、前記筐体に取り付けるプリズムホルダを適宜交換したりすることによって、前記遮光量を変更できる構成とすることもできる。
前記主鏡が測定光導入用の開口を有すると共に前記凹面を下に向けて配置され、
前記副鏡が前記凸面を上に向けた状態で前記主鏡の下方に配置されており、
前記開口を通じて前記主鏡の上方から入射した前記測定光の光束を前記副鏡の凸面で反射させ、この反射光を前記主鏡の凹面で再反射させて、前記副鏡の下方の一点に集光させるように構成されたものであって、
前記遮光手段が、前記副鏡の下方に水平且つ上下動可能に取り付けられた遮光マスクであることを特徴とするものとしてもよい。
前記主鏡が測定光導入用の開口を有すると共に前記凹面を下に向けて配置され、
前記副鏡が前記凸面を上に向けた状態で前記主鏡の下方に配置されており、
前記開口を通じて前記主鏡の上方から入射した前記測定光の光束を前記副鏡の凸面で反射させ、この反射光を前記主鏡の凹面で再反射させて、前記副鏡の下方の一点に集光させるように構成されたものであって、
前記遮光手段が、前記副鏡の下方に取り付けられた遮光マスクであって、
該遮光マスクが、該遮光マスクと平行且つ水平方向に延伸する軸の周りに回転可能に構成されていることを特徴とするものとしてもよい。
図1は、本発明の第1実施形態に係る対物光学系の縦断面図である。この対物光学系は、赤外顕微鏡のレボルバに取り付けて使用されるものであり、カセグレン鏡を収容したカセグレン鏡収容部110と、略半球状のATRプリズム138を収容したプリズム収容部120とを備えている。
図9及び図10は、本発明の第2実施形態に係る対物光学系の縦断面図である。なお、上述の図1~4で示したものと同一又は対応する構成要素については下二桁が共通する符号を付し、適宜説明を省略する。また、これらの図では、主鏡211、副鏡212、遮光マスク240、及びアクチュエータ217(後述する)以外の構成要素については図示を省略している。省略された構成要素については、ATR測定用の対物光学系の各構成要素として従来既知のものを採用することができる。
図11及び図12は、本発明の第3実施形態に係る対物光学系の縦断面図である。なお、上述の図1~4で示したものと同一又は対応する構成要素については下二桁が共通する符号を付し、適宜説明を省略する。また、これらの図においても、主鏡311、副鏡312、遮光マスク340、及びアクチュエータ317以外の構成要素については図示を省略しており、省略された構成要素については、ATR測定用の対物光学系の各構成要素として従来既知のものを採用することができる。
111、211、311、511、611、711…主鏡
112、212、312、512、612、712…副鏡
113、513、613、713…上部開口
114…下部開口
115、715…バッフル
116、616、716…取付部
120…プリズム収容部
121…プレート収容部
130…スライドプレート
131…本体部
134…マスク収容部
135…プリズム用開口
136…目視用開口
137、537…プリズムホルダ
138、438、538、638、738…ATRプリズム
140、150、170、240、340…遮光マスク
141…枠部
142、152…遮光部
143…連結部
144…スリット
217、317…アクチュエータ
580…試料ステージ
B…境界面
P…接点
S…試料
Claims (4)
- 赤外顕微鏡に取り付けて全反射吸収法による試料表面の分析に用いられる対物光学系であって、
a)前記赤外顕微鏡から照射された測定光を反射する凸面状の副鏡と、
b)前記副鏡で反射された前記測定光を反射する凹面状の主鏡と、
c)前記主鏡で反射された前記測定光が照射されるプリズムと、
d)前記主鏡と前記プリズムとの間の前記測定光の光路上において該測定光の光束の一部を遮断する遮光手段と、
を有することを特徴とする対物光学系。 - e)前記主鏡及び前記副鏡を収容した筐体と、
f)前記プリズムを保持し、前記筐体の下部に着脱可能なプリズムホルダと、
を更に有し、
前記遮光手段が、前記プリズムホルダ上で前記プリズムの上方に取り付けられた遮光マスクであることを特徴とする請求項1に記載の対物光学系。 - 前記主鏡が測定光導入用の開口を有すると共に前記凹面を下に向けて配置され、
前記副鏡が前記凸面を上に向けた状態で前記主鏡の下方に配置されており、
前記開口を通じて前記主鏡の上方から入射した前記測定光の光束を前記副鏡の凸面で反射させ、この反射光を前記主鏡の凹面で再反射させて、前記副鏡の下方の一点に集光させるように構成されたものであって、
前記遮光手段が、前記副鏡の下方に水平且つ上下動可能に取り付けられた遮光マスクであることを特徴とする請求項1に記載の対物光学系。 - 前記主鏡が測定光導入用の開口を有すると共に前記凹面を下に向けて配置され、
前記副鏡が前記凸面を上に向けた状態で前記主鏡の下方に配置されており、
前記開口を通じて前記主鏡の上方から入射した前記測定光の光束を前記副鏡の凸面で反射させ、この反射光を前記主鏡の凹面で再反射させて、前記副鏡の下方の一点に集光させるように構成されたものであって、
前記遮光手段が、前記副鏡の下方に取り付けられた遮光マスクであって、
該遮光マスクが、該遮光マスクと平行且つ水平方向に延伸する軸の周りに回転可能に構成されていることを特徴とする請求項1に記載の対物光学系。
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