WO2016103622A1 - Dispositif d'inspection d'apparence externe et système d'inspection - Google Patents

Dispositif d'inspection d'apparence externe et système d'inspection Download PDF

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Publication number
WO2016103622A1
WO2016103622A1 PCT/JP2015/006221 JP2015006221W WO2016103622A1 WO 2016103622 A1 WO2016103622 A1 WO 2016103622A1 JP 2015006221 W JP2015006221 W JP 2015006221W WO 2016103622 A1 WO2016103622 A1 WO 2016103622A1
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WIPO (PCT)
Prior art keywords
light
inspection
test object
light source
half mirror
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PCT/JP2015/006221
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English (en)
Japanese (ja)
Inventor
昭典 津田
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五洋商事株式会社
昭典 津田
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Application filed by 五洋商事株式会社, 昭典 津田 filed Critical 五洋商事株式会社
Publication of WO2016103622A1 publication Critical patent/WO2016103622A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens

Definitions

  • the present invention relates to an inspection apparatus for quality inspection including appearance inspection, and an inspection system including the inspection apparatus.
  • a lens is provided with various coatings (coating films) in order to impart performance according to the application.
  • a coat film is applied to give the lens a predetermined transmittance for light incident on the lens surface.
  • the quality inspection of the lens to secure the performance of the lens includes the inspection regarding the defect of the coating film. For example, the presence or absence of a defect in the coating film is determined based on a slight difference in reflectance due to the defect in the coating film. As a method of such quality inspection, there is one using reflection illumination (see Patent Document 1 and Patent Document 2).
  • JP 2012-163344 A JP, 2014-85220, A
  • the surface of the test object when the surface of the test object is a curved surface like a lens, light reflected by the surface may go out of the observation field of view.
  • the surface of the subject may not be illuminated with uniform brightness.
  • a light source may be reflected in a subject image to be observed, or a shadow may occur because a portion of an observation hole or groove provided in a reflector does not reflect light.
  • the entire object can not be observed at one time. That is, it is necessary to tilt or rotate the subject (or change the observation position) in order to inspect the entire area requiring observation. As a result, the time required for the inspection of each specimen inevitably increases. Moreover, since the subject image to be obtained always includes the above-mentioned obstacles to observation such as reflection and shadow, the inspector or the inspection apparatus judges the presence or absence of abnormality and specifies the range in which the abnormality exists. A high level of competence is required.
  • the present invention has been made in view of these problems, and it is an object of the present invention to provide an apparatus for inspecting the appearance of an object in a shorter time than in the case of using the conventional method and without degrading the accuracy. . Further, the present invention further provides an inspection system capable of performing a plurality of types of inspection including appearance inspection on a plurality of objects in parallel, and performing quality inspection of the object with higher efficiency than before. To aim.
  • an appearance inspection apparatus is an appearance inspection apparatus that inspects the appearance of the test object by a reflected light image formed by light reflected by the test object, A light source unit located on the opposite side of the observation surface of the test object and emitting light toward the test object, and a light source unit located on the observation surface side of the test object and emitted from the light source unit A half mirror for reflecting light toward the surface to be observed and transmitting the light reflected from the surface to be observed, and disposed between the light source unit and the test object, and emitted from the light source unit
  • the light source unit is a sole light source of the light forming the reflected light image, and the light source unit is a single light source of the light forming the reflected light image; Irradiating the surface of the half mirror facing the test object with substantially uniform illuminance, Serial half mirror has no holes and gaps the light emitted from the light source unit in the region for reflecting said the observed surface.
  • the illuminance of the light falling on the observation surface of the test object is highly uniform. Therefore, the object image obtained from the light reflected by the surface to be observed and transmitted through the half mirror has no bright part due to the reflection of the light source, etc., and the dark part or missing part of the light source or the hole or gap of the half mirror There is no dark part caused by etc. Thereby, it is not necessary to observe from multiple directions in order to inspect the whole to-be-observed surface of a to-be-tested object. For this reason, the inspection of the presence or absence of abnormality of the test object by the reflected light image can be carried out accurately in a short time on the entire observed surface without requiring a high level observation capability.
  • the test object when the test object is a transparent body, it is possible to prevent the light emitted from the light source unit from being directly incident on the test object.
  • the obtained object image is a light beam reflected by the half mirror and reflected (scattered) from the surface of the object.
  • the inspection of the presence or absence of abnormality on the surface of the test object by the reflected light image can be performed accurately in a short time without requiring a high level observation capability.
  • the light amount of incident light to the imaging unit can be adjusted to an appropriate amount.
  • the half mirror may have a concave surface facing the surface to be observed of the test object. Further, the half mirror may have a dome shape that covers the surface to be observed of the test object.
  • the half mirror can reflect and condense light from the light source unit onto the surface to be observed of the test object from more directions.
  • the half mirror may have a characteristic that the transmittance and the reflectance for light in a wavelength band of at least 450 nm to 700 nm substantially match.
  • the light reflected by the half mirror and further reflected by the surface to be observed and then transmitted through the half mirror is at a maximum ratio to the incident light. It can be taken out from the half mirror. That is, in the half mirror having the above characteristics, the ratio of the amount of light reflected by the surface to be observed and transmitted through the half mirror is the largest ratio to the incident light over a wide range in the visible light wavelength band. Light can be taken out. In addition, since this ratio is substantially constant for any wavelength in that range, the amount of light that can be extracted does not have unevenness depending on the wavelength. As a result, the influence on the visible light image of the test object due to the intervention of the half mirror in the observation of the test object can be suppressed.
  • a laminated film formed by alternately laminating a film containing titanium as a main component and a film containing silicon dioxide as a main component is formed on the concave surface. You may obtain it.
  • an inspection system is an inspection system that performs inspection of a plurality of specimens in parallel, and is rotatably connected to a pedestal and the pedestal , And a rotary transport unit including a plurality of turntables supported by the turntable and holding the plurality of test objects at predetermined intervals on the turntable, and arranged at a plurality of positions of the pedestal And a plurality of inspection devices each having an inspection area on the movement trajectory of the plurality of test objects when the turntable is rotated, and a control device that controls the operation of the rotational conveyance unit and the inspection device.
  • the control device alternately repeats pause and rotation of the turntable by a predetermined angle, and during the pause of the turntable, in the inspection area of the plurality of inspection devices.
  • the rotary transport unit is controlled such that any one of the test objects held by each of the plurality of holding units is positioned, and the inspection area is suspended while the plurality of inspection devices stop the turntable.
  • the first inspection apparatus which is one of the plurality of inspection apparatuses, controls the plurality of inspection apparatuses to execute the inspections different from each other, the inspection being the inspection of the test object in the first place, It is an inspection system which is one of inspection devices.
  • a plurality of test objects held by the holding unit provided in the rotational conveyance unit and rotationally moved are sequentially subjected to plural types of inspections on the locus of the rotational movement. receive.
  • the plurality of types of inspections are performed in parallel on a plurality of specimens. Therefore, the quality inspection can be performed efficiently in time.
  • the test object since the test object is transported along the circular movement locus, the test object is transferred without passing through a useless route, and the quality inspection can be performed efficiently also spatially. it can.
  • the use of any of the above-described appearance inspection apparatuses as the first inspection apparatus prevents the appearance inspection step from becoming a bottleneck and the throughput of the inspection system from being lowered.
  • each of the plurality of test objects is an optical element having a light collecting function
  • a second inspection apparatus which is another one of the plurality of inspection apparatuses, is an object to be observed of the test object in the inspection area.
  • a light source unit which is located on the opposite side of the surface and emits light toward the test object, the light source unit and the test object, and the test object is longer than the focal distance of the test object
  • a light shield having a shape substantially corresponding to the shape of the cross section of the obtained condensed light flux, and of the light emitted from the light source part, shielding the light emitted in the direction directly irradiated to the test object May be provided.
  • the quality inspection of an object which needs to be examined for the presence or absence of an abnormality in addition to the appearance can be performed only with the present inspection system.
  • the second inspection apparatus can perform dark field observation of the test object. If the object to be examined is a lens, foreign matter inside the lens, molding defects such as flow marks, striae, and dirt that blocks transmitted light on the surface of the lens for quality inspection of the lens by the inspection system according to the present invention A process can be included to easily detect an abnormality such as a flaw or a dent or flaw that changes the direction of the transmitted light.
  • the surface to be observed is the surface of the test object, and the visual inspection apparatus provided in the visual inspection apparatus according to an aspect of the present invention or the inspection system according to an aspect of the present invention instead of this, it is a term used for convenience to refer to the side facing the objective lens of the imaging unit for obtaining an image of a test object, and faces other than this face (sides and faces facing the objective lens And the inside of the specimen is not excluded from the observation target.
  • the appearance inspection apparatus can inspect the appearance of the object in a shorter time than in the case of using the conventional method and without degrading the accuracy.
  • the inspection system according to the present invention can perform various inspections in parallel on a plurality of specimens, and can perform quality inspection of the specimens with higher efficiency than in the past.
  • FIG. 1 is an external perspective view of an appearance inspection apparatus according to an aspect of the present invention.
  • FIG. 2 is a schematic cross-sectional view of an appearance inspection apparatus according to an aspect of the present invention.
  • FIG. 3 is a schematic cross-sectional view showing a structural example of a half mirror of an appearance inspection apparatus according to an aspect of the present invention.
  • FIG. 4 is a graph showing the light transmission characteristics of the half mirror of the appearance inspection apparatus according to one aspect of the present invention.
  • FIG. 5 is a schematic plan view of the holding unit of the appearance inspection apparatus according to one aspect of the present invention and a schematic cross-sectional view of the holding unit with the test object placed thereon.
  • FIG. 6 is an external view of an inspection system according to an aspect of the present invention.
  • FIG. 7 is a schematic view of a rotary conveyance unit provided in the inspection system according to one aspect of the present invention.
  • FIG. 8 is a schematic view showing the positional relationship between the rotation conveyance unit and the plurality of inspection devices provided in the inspection system according to an aspect of the present invention.
  • FIG. 9 is a functional block diagram of an inspection system according to an aspect of the present invention.
  • FIG. 10 illustrates parallel processing by the inspection system according to an aspect of the present invention.
  • FIG. 11 is a schematic cross-sectional view of a second inspection apparatus provided in the inspection system according to an aspect of the present invention.
  • FIG. 1 is an external appearance perspective view of an appearance inspection apparatus 10 according to an aspect of the present invention.
  • FIG. 2 is a schematic cross-sectional view of the appearance inspection apparatus 10.
  • the appearance inspection apparatus 10 is an appearance inspection apparatus that inspects the appearance of a test object, and includes an imaging unit 11, a light shielding box 12, and a light source unit 13.
  • the appearance inspection apparatus 10 further includes a half mirror 14, a light shielding body (mask) 15, and a holding unit 16, as shown in FIG.
  • FIG. 2 illustrates the case where the test object 200 is a condensing lens as an example
  • the test object of the present invention is not limited to the condensing lens.
  • a concave lens a diverging lens
  • an optical element other than a lens e.g. an optical filter
  • an object to which some optical characteristics are imparted to the surface by processing such as plating may be used for visual inspection by the visual inspection apparatus according to the present invention. It can be an analyte.
  • the imaging unit 11 acquires an image (a subject image) of the subject 200 from the side of the surface to be observed of the subject 200.
  • the imaging unit 11 is, for example, a digital camera provided with an objective lens 110, a lens barrel 111, and an imaging element 112.
  • the subject image acquired by the imaging unit 11 is recorded in, for example, a storage device (not shown) further included in the appearance inspection apparatus 10 or outside the appearance inspection apparatus 10. Alternatively, it may be subjected to processing such as analysis by an electronic computer communicably connected to the appearance inspection apparatus 10.
  • the light shielding box 12 includes an observation hole 120 and an observation hole cover 121.
  • the light shielding box 12 is a light shielding box that covers the entire half mirror 14 so that light from other than the light source unit 13 does not enter the optical system in the appearance inspection apparatus 10 according to the present invention.
  • a lens barrel 111 including the objective lens 110 of the imaging unit 11 is inserted into the observation hole 120 of the light shielding box 12.
  • the observation hole cover 121 fills the gap between the lens barrel of the imaging unit 11 in the observation hole 120 and the light shielding box 12 to ensure the light shielding property of the optical system of the visual inspection apparatus 10.
  • the light source unit 13 is located on the opposite side of the observation surface of the test object 200, and emits diffused light toward the test object 200.
  • the light source unit 13 has a plurality of white LEDs (not shown) as light sources, and emits diffused light by emitting light emitted by the plurality of white LEDs through a diffusion plate (not shown).
  • the light source is not limited to the white LED, and may be, for example, a fluorescent lamp.
  • Another example of the light source unit 13 is one having an organic EL (not shown) that surface emits uniform white light as a light source and does not have a diffusion plate. The emitted diffused light is irradiated to the surface of the half mirror 14 described later, which faces the test object 200, with a substantially uniform illuminance.
  • the half mirror 14 is located on the observation surface side of the test object 200, and is located between the imaging unit 11 and the test object 200, and the light emitted from the light source unit 13 is the observation surface of the test object 200 Reflect towards. In addition, the half mirror 14 further transmits the light reflected by the observation surface of the test object 200. Accordingly, the imaging unit 11 acquires the light reflected by the observation surface of the test object 200 and transmitted by the half mirror 14 as a test object image.
  • the half mirror 14 may have a flat plate shape, but may have a shape having a concave surface facing the surface to be observed of the test object 200. By having such a shape, it is possible to reflect and condense light from the light source unit on the surface to be observed of the test object from more directions than in the case of the flat plate shape. In the example shown in FIG. 2, it has a dome shape which covers the to-be-observed surface side of the to-be-tested object 200. As shown in FIG. In addition, regardless of the shape of the half mirror 14, the size of the light emitting surface of the light source unit 13 and the size of the light reflected by the half mirror 14 fall on the entire observation surface of the test object, and the light also falls.
  • the light needs to be appropriately adjusted so as to be reflected by the observed surface of the test object and to travel to the observation light path.
  • the half mirror 14 is not always preferable to have a large size, and a small size may be used as appropriate when limiting the direction in which the light falling on the object comes. For example, it may be considered to limit the direction in which the light falling on the object comes in order to prevent total internal reflection that may occur inside the object.
  • FIG. 3 is a schematic cross-sectional view showing a structural example of the half mirror 14.
  • the half mirror 14 is, for example, a transparent material made into the shape having the above-mentioned concave surface, and on the concave surface, a film containing titanium as a main component (broken line in the figure) and a film containing silicon dioxide as a main component A laminated film formed by alternately laminating the solid lines in the figure) is uniformly formed.
  • the half mirror 14 having this structure reflects a part of incident light and transmits a part.
  • a half of the light transmission (reflection) characteristic as shown in FIG. 4 is obtained by alternately laminating the above-mentioned two types of films on a transparent polycarbonate dome by six layers alternately over the entire concave surface.
  • a mirror was obtained.
  • this half mirror has a characteristic that the transmittance and the reflectance for light in the wavelength band of at least 450 nm to 700 nm substantially match (the difference is within 25%).
  • the inventor has prepared a half mirror having such characteristics by equalizing the transmittance and reflectance of the half mirror with respect to incident light, so that the light is reflected by the half mirror and further reflected by the surface to be observed. This is because the light transmitted through the half mirror can be extracted from the half mirror at the maximum ratio to the incident light. That is, in the half mirror having the above characteristics, the ratio of the amount of light reflected by the surface to be observed and transmitted through the half mirror is the largest ratio to the incident light over a wide range in the visible light wavelength band. Light can be taken out. In addition, since this ratio is substantially constant for any wavelength in that range, the amount of light that can be extracted does not have unevenness depending on the wavelength. Thereby, in observation of a to-be-tested object, the influence on the visible light image of a to-be-tested object by interposing a half mirror is suppressed.
  • the half mirror 14 provided in the appearance inspection apparatus 10 according to the present invention does not have a hole or a gap for introducing light or for passing an observation light path. Thus, highly uniform light reflection is realized toward the observation surface of the test object 200.
  • the object is observed through the half mirror 14, but the half mirror 14 has uniform light transmission (reflection) characteristics over the above-mentioned wavelength band. Therefore, the influence on the visible light image of the test object by interposing the half mirror in the observation of the test object is suppressed.
  • the above-mentioned material and structure of the half mirror 14 are an example, and any material and structure may be used as long as desired light transmission (reflection) characteristics can be obtained.
  • the light shielding body 15 is disposed between the light source unit 13 and the test object 200, and among the diffused light emitted from the light source unit 13, shields the light emitted in the direction directly irradiated to the test object 200. belongs to.
  • the size, shape, light shielding property, and position of the light shielding body 15 are not particularly limited as long as the purpose is achieved and the diffused light emitted from the light source unit 13 does not prevent the half mirror 14 from reaching.
  • it may be a black colored portion printed on a highly transparent resin sheet disposed under the test object 200.
  • the bottom surface of the support portion 160 described later may double as the light shield 15 (in this case, the support portion 160 does not have the exposure hole 1601).
  • the test object is a transparent body like a lens
  • the light shield 15 in this manner, it is possible to prevent the light emitted from the light source section from being directly incident on the test object.
  • the obtained object image is an image formed by light reflected (scattered) on the surface of the object from the light once reflected by the half mirror, and is affected by the light directly incident on the object from the light source unit There is no Thereby, even if the test object is a transparent body, the inspection of the presence or absence of abnormality on the surface of the test object by the reflected light image can be performed accurately in a short time without requiring a high level observation capability.
  • the light shield 15 may be omitted.
  • FIG. 5A is a schematic plan view of the holder 16.
  • the holding unit 16 includes a support unit 160, a plurality of arm units 161, a table 162, and a plurality of arm length adjustment units 163.
  • FIG. 5 is a schematic cross-sectional view showing a cross section A-A of the holding portion 16 shown in the schematic plan view.
  • this schematic cross-sectional view a state in which the test object 200 is placed on the support portion 160 is shown.
  • the support portion 160 has a support base 1600 for supporting the test object 200 and a circular exposure hole 1601 for exposing the optical surface of the test object 200 supported by the support base 1600.
  • the plurality of arm portions 161 separate and connect the support portion 160 and the table 162, and support the support portion 160 on the XY plane shown in FIG.
  • the arm length adjustment unit 163 connects the arm length adjustment unit 163 with the table 162 by fixing the arm unit 161 so that the projection length of the arm unit 161 with respect to the table 162 can be adjusted.
  • the arm portion 161 may be screwed into the arm length adjustment portion 163.
  • the support portion 160 (exposure hole 1601) can be moved on the XY plane shown in FIG.
  • a mechanism for adjusting the projection length of the arm portion 161, such as the arm length adjustment portion 163, may be optionally provided when such position adjustment is necessary.
  • each arm 161 may have a fixed length of projection with respect to the table, and the position of the support 160 with respect to the table 162 may be fixed.
  • the support unit 160 and the arm unit 161 advance the diffused light emitted from the light source unit 13 to the half mirror 14 and the light from the half mirror 14 to the test object 200 to the test object 200 to the test object. It is desirable that the size and shape do not interfere with the epi-illumination as much as possible. 2 and 5 show an example of the structure.
  • the support part 160 which FIG. 2 and FIG. 5 show has a cylindrical shape which has a mortar-shaped recessed part on the upper surface.
  • the exposure hole 1601 is a circular hole having a diameter necessary to expose the optical part of the condensing lens which is the test object 200, and penetrates to the bottom of the cylinder.
  • the periphery of the exposure hole 1601 there is a surface of a width necessary for the flange portion of the focusing lens to be placed.
  • the shape and number of the arm portions 161 have a small area in plan view so that the diffused light emitted from the light source portion 13 reaches the surface of the half mirror 14 facing the test object 200 as uniformly as possible. Is desirable, and a smaller number is desirable. Therefore, the shape and the number of the arm portions 161 can be adjusted such that rigidity can be obtained as a whole to maintain the stability of the support portion 160 and that the diffused light is not disturbed as much as possible.
  • at least three or more pairs of the arm portions 161 and the arm length adjustment portion 163 are provided (FIG. 5 shows four pairs as an example). In the case of
  • the operation of the appearance inspection apparatus 10 in the observation of the test object 200 by the appearance inspection apparatus 10 having the above configuration will be described. Also in this description, the case where the test object 200 is a condensing lens of a transparent body is taken as an example as described above. Further, it is assumed that the half mirror 14 has the characteristics shown in the above embodiment.
  • the test object 200 is placed in the recess of the support portion 160 and arranged in the inspection area of the appearance inspection apparatus 10. At this time, in the test object 200, the whole of the surface to be observed (the upper surface in FIG. 2) and the optical part of the surface of the exposure hole 1601 opposite to the surface to be observed are exposed. Further, the optical part of the test object 200 exposed in the exposure hole 1601 faces the light shielding member 15.
  • the light source unit 13 emits light.
  • the path of the emitted light is roughly divided into the following four patterns.
  • (Course 1) It is blocked by the light shield 15, the support portion 160, or the arm portion 161.
  • (Course 2) The light reaches and enters the half mirror 14 and is transmitted through the half mirror 14.
  • (Track 3) The light reaches the half mirror 14 and is reflected to fall on the test object 200.
  • the light of (Course 3) is further reflected by the test object 200, reaches and enters the half mirror 14, and passes through the half mirror 14.
  • the amounts of light traveling along the path 2 and light traveling along the path 3 substantially coincide in the wavelength band of 450 nm to 700 nm.
  • the reflectance is 50%, about half of the light that has passed through the half mirror 14 that is reflected by the test object 200 and reaches the half mirror 14 is transmitted to the half mirror 14 for the light that has taken the path 4 Amount of
  • the light taken along the path 2 and the light taken along the path 4 that is, the light transmitted through the half mirror 14 that is incident on the objective lens 110 of the imaging unit 11 is imaged
  • the image is formed on the element 112.
  • the light having taken the path 4 forms an image of the object of the test object 200 and is observed for inspection.
  • the illuminance of light falling on the observation surface of the test object 200 is highly uniform. Therefore, the test object image obtained from the light reflected by the surface to be observed and transmitted through the half mirror 14 has no bright part due to the reflection of the light source and the like, and the dark part or missing part of the light source or the hole of the half mirror 14 Or there is no dark part resulting from a gap etc. Thereby, in order to inspect the whole to-be-observed surface of the to-be-tested object 200, it is not necessary to observe from several directions.
  • the inspection of the presence or absence of abnormality of the external appearance of the whole to-be-observed object 200 surface can be accurately implemented in a short time with respect to the whole to-be-observed surface, without requiring high observation ability.
  • the test object 200 is a transparent body like the above-mentioned lens
  • visual inspection on one test object image including the surface on the opposite side of the test surface as long as it is sufficiently visible from the test surface side Is possible.
  • the appearance inspection apparatus according to one aspect of the present invention has been described by taking the appearance inspection apparatus 10 as an example, the present invention is not limited thereto.
  • the following description may be different from the above description.
  • the object image may be observed by visual observation by a person. Moreover, regardless of whether it is observation using the imaging part 11 or visual observation by a person, you may magnify a to-be-examined object image by magnifying inspection machines, such as a stereomicroscope.
  • a transparent plate or the like may be used to connect the support portion 160 and the table 162. It is sufficient that the support portion 160 be stable and that the diffused light emitted from the light source portion 13 reach the half mirror with sufficient illuminance and uniformity.
  • the shape of the surface to be observed of the test object is not limited to the above and illustrated convex surfaces. It may be flat, concave or free-form surface. When the test object is a transparent body, the same applies to the surfaces other than the observation surface.
  • test object is a lens, it is not restricted to the above-mentioned and illustration single lens.
  • the test object may be a combination lens.
  • the configuration of the light source unit and the half mirror described above is an example of a configuration that is useful in the case of inspection based on a general appearance (an appearance perceived by human vision).
  • a light source that emits only light of the specific wavelength band may be used as a light source.
  • a half mirror may be used that reflects or transmits only light in the specific wavelength band, and both the light source and the half mirror reflect or transmit only light in the specific wavelength band, It is also good.
  • the light used for inspection is not limited to visible light.
  • a light source unit, a half mirror, and an imaging unit corresponding to these infrared rays or ultraviolet rays are also used.
  • the “concave surface” may be not only the above-described and illustrated dome-shaped surface but also a surface having a higher or lower curvature. Further, the technical scope of the present invention is not limited to the curved surface, as long as the light emitted from the light source unit can be reflected toward the surface to be observed of the test object even if it is a pyramid, a polyhedron or the like. include.
  • the light source unit 13 emits light as diffused light through the diffusion plate. This is to more reliably improve the uniformity of light reflected by the half mirror 14 and falling on the test object 200. With such a configuration, it is possible to obtain an object image more suitable for inspection, in which unevenness due to unevenness of irradiation light is suppressed.
  • the light emitted from the light source unit 13 is not limited to diffused light. For example, it may be realized by arranging a plurality of LED light sources in different postures so that substantially uniform illuminance can be obtained over the entire surface of the half mirror facing the observation surface without using a diffusion plate. .
  • the imaging unit 11 and the light shielding box 12 may have a configuration that can ensure light shielding of the optical system as a whole, and this configuration is not limited to that including the observation hole cover 121.
  • an adapter for attaching the imaging unit 11 to the light shielding box 12 may be provided, or the lens barrel of the imaging unit 11 and the light shielding box 12 may be integrally assembled.
  • the half mirror 14 may also be assembled with the light shielding box.
  • the support 160 may be removable.
  • the support 160 may be replaced according to the size or shape of the test object 200.
  • test object 200 may be placed on the light source unit 13 or the light shield 15 without using the holding unit 16.
  • the position of the viewpoint at which the subject 200 is observed is not limited to the position directly above the subject such as the imaging unit 11 in FIG. 2.
  • the object 200 may be observed from the lateral or oblique direction, or may be simultaneously observed from a plurality of directions as necessary.
  • FIG. 6 is an external perspective view of an inspection system 100 according to an aspect of the present invention.
  • the inspection system 100 is an inspection system that carries out inspection of a plurality of test objects in parallel, and is supported by a pedestal 20, a circular turntable 31 rotatably connected to the pedestal 20, and the turntable 31. And a plurality of holding units 32 for holding a plurality of test objects at predetermined intervals along the outer periphery of the turntable 31 and a plurality of positions of the pedestal 20, and the turntable 31 And a plurality of inspection devices 50 each having an inspection area on the movement trajectory of the plurality of test objects when the object rotates, and a control device 60 that controls the operation of the rotation conveyance unit 30 and the inspection device 50.
  • the control device 60 repeats the pause and rotation of the turntable 31 alternately by a predetermined angle, and during the pause of the turntable 31, the plurality of holding units 16 are provided in the inspection areas of the plurality of inspection devices.
  • the rotary transport unit 30 is controlled so that any one of the held test objects is positioned.
  • the control device 60 further performs a plurality of inspections so that the plurality of inspection devices 50 inspect the test object in the inspection region during the temporary stop of the turntable 31 and perform mutually different inspections. Control the device 50;
  • the first inspection device 51 which is one of the plurality of inspection devices 50 is the appearance inspection device 10 described in the first embodiment.
  • the above components of the inspection system 100 are disposed on the pedestal 20.
  • the positional relationship of the components will be individually described below.
  • the turntable 31 provided in the rotary conveyance unit 30 is intermittently rotated at a predetermined angle under the control of the control device 60 described later.
  • the turntable 31 is realized by using, for example, an index table.
  • Each holder 32 has the same configuration as the holder 16 of the appearance inspection apparatus 10 described in the first embodiment. That is, each holding portion 32 includes the support portion 160 shown in FIG. 5, a plurality of arm portions 161, a table 162, and a plurality of arm length adjustment portions 163.
  • the table 162 is integrally formed with the turntable 31 and the holding portion 32 is thereby supported by the turntable 31.
  • the entire rotary transport unit 30 including the holding unit 32 rotates, and when the turntable 31 stops, the entire rotary transport unit 30 including the holding unit 32 stops.
  • the test object is placed on the support unit 160, and is conveyed so as to draw a circular movement locus as the rotary conveyance unit 30 (turn table 31) rotates.
  • the turntable with which the inspection system which concerns on this invention is equipped is not limited to a circular structure. . Any shape may be used as long as the rigidity required to stabilize the test object held by each holding unit 32 can be obtained at the time of operation of the rotation conveyance unit 30.
  • the shape may be a polygon or a combination of a polygon and a circle.
  • a structure consisting of a combination of a rod or a pipe extending radially from the rotation axis (not shown) to each holding portion 32 and connecting them.
  • the structure may further include a reinforcing member. In this case, a lightweight rotary transport unit can be obtained as compared to the case where a turntable on a plate is used.
  • the arrangement of the holding unit 32 in the rotary conveyance unit 30 will be described by way of an example in which the rotary conveyance unit 30 includes four holding units 32.
  • FIG. 7 is a schematic view of the rotary conveyance unit 30 in a plan view (in FIG. 6, a view when viewed in the XY plane from the Z-axis direction).
  • the four holders 32 are arranged at equal intervals inside the circular outer periphery of the turntable 31 in a plan view of the rotary conveyance unit 30.
  • the four supports 160 are equidistant from the center point 35 of the rotation of the rotary conveyance 30 in plan view of the rotary conveyance 30, and equally spaced from each other.
  • the first inspection device 51 is the appearance inspection device 10 described as the first embodiment. That is, the first inspection apparatus 51 is an appearance inspection apparatus that inspects the appearance of a test object, and includes an imaging unit 11, a light shielding box 12, a light source unit 13, a half mirror 14, a light shielding body 15, and a holding unit 16. However, in the second embodiment, the holding unit 32 provided in the rotary conveyance unit 30 corresponds to the holding unit 16. In the first inspection apparatus 51, the rotary conveyance unit 30 (holding unit 32) is located between the light shielding box 12 and the light source unit 13, and the rotation conveyance unit 30 rotates the plurality of holding units 32 sequentially. The first inspection apparatus 51 differs from the appearance inspection apparatus 10 according to the first embodiment in this point.
  • the light which injects into a test object directly from the clearance gap between the rotation conveyance part 30, the light shielding box 12, and the light source part 13 does not enter.
  • the positional relationship of these is adjusted.
  • the second inspection device 52 performs an inspection different from the inspection performed by the first inspection device 51.
  • the test object is a lens made of resin
  • inspection of the inside of the lens regarding the presence or absence of bubbles, foreign substances, flow marks, stria etc., and the direction of dirt or flaws on the surface of the lens that block transmitted light can be mentioned as an example of inspection of dents and flaws that change
  • Such a second inspection apparatus 52 will be described later using a specific example.
  • FIG. 8 is a schematic plan view showing the positional relationship between the two inspection devices 50 and the rotary conveyance unit 30 at the time of temporary stop.
  • a double-lined rectangle in the figure indicates the inspection device 50.
  • the inspection devices 50 each have an inspection area (an area where the test object to be inspected should fit at the time of inspection).
  • the dashed circle in the figure indicates the inspection area.
  • the inspection area 510 is an inspection area of the first inspection apparatus 51
  • the inspection area 520 is an inspection area of the second inspection apparatus 52.
  • the circle with the arrow in the figure shows the movement locus of the test object by the rotation of the rotary conveyance unit 30.
  • Each inspection device 50 is positioned such that the inspection region is on the movement trajectory of the above-mentioned test object. Furthermore, in these inspection devices 50, when the test object held by one of the holding units 32 is in the inspection area of the first inspection device 51, the test object held by the other one of the holding units 32 is It is positioned to be within the inspection area of the second inspection device 52.
  • the control device 60 controls the rotary conveyance unit 30 (turn table 31). This control is realized by the control device 60 communicably connected to a drive device (not shown) that rotationally drives the rotary conveyance unit 30 and controlling the drive device. Further, the control device 60 is further communicably connected to the respective inspection devices 50, and causes the respective inspection devices 50 to execute an operation for inspection while the rotary conveyance unit 30 is temporarily stopped under the control of the control device 60. .
  • the first inspection apparatus 51 causes the imaging unit 11 to perform imaging of the subject.
  • the control device 60 controls the rotary conveyance unit 30 (turn table 31) to alternately repeat temporary stop and rotation of a predetermined angle. In addition, while the turntable 31 is temporarily stopped, the rotational conveyance unit 30 is rotated so that one of the test objects held by the holding unit 32 is positioned in the inspection areas of the plurality of inspection devices 50. Control the angle (stop position).
  • FIG. 9 is a functional block diagram of the inspection system 100.
  • the control device 60 is a component to be controlled among the components of the inspection system 100, and in the example shown in the figure, the drive device 300, the first inspection device 51, and the second inspection device 52. And communicably connected to each other to transmit control instructions to each component, receive data from each component, and the like.
  • the position of the control device 60 may be any position as long as it is communicably connected to each component to be controlled.
  • each component to be controlled may be remotely controlled at any place.
  • Step 1 Placing the test object on the rotary conveyance unit 30 (step 2) Inspection of the object by the first inspection device 51 (step 3) Inspection of the object by the second inspection device 52 (step 4) Ejection of the test object from the rotary transport unit 30
  • test object is not placed on the rotary conveyance unit 30.
  • test object 200 is placed on the nearest support unit 160 at a position indicated by IN in FIG. 8 (test object 200, step 1).
  • the rotary conveyance unit 30 rotates 90 degrees counterclockwise and pauses.
  • the specimen 200 is conveyed into the inspection area 510 by this rotation.
  • the test object 200 is inspected by the first inspection device 51 in the inspection area 510 (the inspection object 200, step 2).
  • the test object 201 is placed on the nearest support 160 at the position of IN (test object 201, step 1).
  • the rotary conveyance unit 30 again rotates 90 degrees counterclockwise and pauses.
  • the test object 200 is transported into the inspection area 520, and the test object 201 is transported into the inspection area 510.
  • the object 200 is inspected by the second inspection device 52 in the inspection area 520 (the object 200, step 3), and the object 201 is the first inspection in the inspection area 510. It is examined by the device 51 (specimen 201, step 2). Further, during the temporary stop, the test object 202 is placed on the nearest support 160 at the position of IN (test object 202, step 1).
  • the rotary conveyance unit 30 again rotates 90 degrees counterclockwise and pauses.
  • the test object 200 is transported to the position indicated by OUT in FIG. 8, and the test object 201 is transported into the inspection area 520. Further, the test object 202 is transported into the inspection area 510 by this rotation.
  • the test object 200 is taken out of the support portion 160 (test object 200, step 4).
  • the test object 201 is inspected by the second inspection device 52 (the object 201, step 3), and the inspection object 202 is inspected by the first inspection device 51 in the inspection region 510.
  • the test object 202, step 2 Further, during the temporary stop, the test object 203 is placed on the nearest support 160 at the position of IN (test object 203, step 1).
  • the test object 201 is conveyed to the position of OUT and discharged (the test object 201, step 4).
  • the object 202 is inspected by the second inspection device 52 in the inspection area 520 (the object 202, step 3), conveyed to the position of OUT, and discharged (the object 202, step 4).
  • the object 203 is inspected by the first inspection device 51 in the inspection area 510 (the object 203, step 2), and is inspected by the second inspection device 52 in the inspection region 520 (the object 203, process 3)
  • the sheet is transported to the position of OUT and discharged (the test object 203, step 4). Each specimen completes only one step during one pause.
  • FIG. 10 illustrates a situation in which the above-described steps of the inspection system 100 are performed in parallel.
  • each of the plurality of test objects that are held by the holding unit 32 included in the rotary conveyance unit 30 and rotationally moved is on the locus of the rotation movement.
  • the plurality of types of inspections are performed in parallel on a plurality of specimens. Therefore, the quality inspection can be performed efficiently in time.
  • the test object is transported along the circular movement locus, the test object is transferred without passing through a useless route, and the quality inspection can be performed efficiently also spatially. it can.
  • an inspection regarding the internal condition may be necessary as part of the quality inspection.
  • the inspection of the inside of the object regarding the presence or absence of bubbles, foreign matter, flow marks, striae It is necessary to inspect dirt and scratches on the surface of the lens that block the transmitted light, as well as dents and scratches that change the direction of the transmitted light.
  • the above-described second inspection device 52 included in the inspection system 100 is a device for inspecting the inside of a subject will be described.
  • FIG. 11 is a schematic cross-sectional view of an example of the second inspection apparatus 52 that the inspection system 100 may include when the test object is an optical element having a light collecting function.
  • a second inspection device 51 which is another one of the plurality of inspection devices 50 included in the inspection system 100, is located on the opposite side of the observation surface of the object in the inspection area.
  • a light source unit 23 for emitting light toward an inspection and a light shielding body 25 for blocking the light emitted from the light source unit 23 in the direction in which the light is directly irradiated to the test object are provided.
  • the light shield 25 is disposed between the light source unit 23 and the test object and at a position closer to the test object than the focal length of the test object.
  • the light shield 25 is obtained when the collected light flux of parallel light incident on the test object from the side of the observation surface of the test object is cut at a position perpendicular to the central axis of the collected light flux. It has a shape that substantially matches the shape of the cross section of the collected light flux.
  • the light source unit 23 has the same configuration as the light source unit 13 of the first embodiment.
  • the light shield 25 may be realized by, for example, a black colored portion printed on a highly transparent resin sheet disposed under the test object 200.
  • the 2nd inspection apparatus 52 can implement dark field observation of a subject.
  • minute or bright (or relatively translucent) foreign matter inside a test object that is a lens, molding defects such as flow marks, and abnormalities with low contrast with normal parts such as striae It can be easily found. Therefore, it is possible to carry out the quality inspection of a test object such as a lens in which it is necessary to check the presence or absence of an abnormality in addition to the appearance as well as a plurality of test objects in parallel with the inspection system 100 alone. it can.
  • the to-be-tested object 200 is an optical element which has a condensing function
  • the to-be-tested object 200 is not restricted to what is called a convex lens.
  • the above-mentioned dark field of the concave lens is provided by providing a convex lens which cancels the diffusion of transmitted light by the concave lens and converges it on the side of the surface of the test object 200 facing the light shield 25. An examination by observation can be performed. The same applies to not only concave lenses but also combination lenses.
  • test object 200 is an optical element (for example, an optical filter) without a light collecting function, individual light shields of the above-described size and shape are detected for light passing through the test object 200 By placing the object 200 on the light source side as viewed from the object 200, inspection by dark field observation becomes possible.
  • optical element for example, an optical filter
  • the present invention is applicable to a visual inspection apparatus, and is an inspection system that includes this inspection apparatus, and is applicable to an inspection system that performs a plurality of types of inspections.

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

L'invention concerne un dispositif (10) d'inspection d'apparence externe, destiné à inspecter l'apparence externe d'un objet d'inspection à l'aide d'une image en lumière réfléchie formée par la lumière réfléchie par l'objet d'inspection. Le dispositif comprend : une unité (13) source de lumière, placée à l'opposé d'une surface à observer de l'objet d'inspection et émettant de la lumière vers l'objet d'inspection; un demi-miroir (14) placé sur le côté de la surface à observer de l'objet d'inspection, reflétant la lumière émise par l'unité (13) source de lumière vers la surface à observer et transmettant la lumière réfléchie par la surface à observer; et un corps (15) de blocage de la lumière disposé entre l'unité (13) source de lumière et l'objet d'inspection et qui bloque toute la lumière parmi la lumière émise par l'unité (13) source de lumière qui est émise dans une direction d'irradiation directe sur l'objet d'inspection. L'unité (13) source de lumière est la seule source de lumière pour la lumière qui forme l'image en lumière réfléchie et irradie la lumière émise sur la surface du demi-miroir (14) opposée à l'objet d'inspection avec une intensité de flux lumineux approximativement régulière. Le demi-miroir (14) n'a pas de trou ou d'espace à l'intérieur de la zone qui réfléchit la lumière émise à partir de l'unité (13) source de lumière vers la surface à observer.
PCT/JP2015/006221 2014-12-26 2015-12-14 Dispositif d'inspection d'apparence externe et système d'inspection WO2016103622A1 (fr)

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JP2014-265684 2014-12-26
JP2014265684A JP5784815B1 (ja) 2014-12-26 2014-12-26 外観検査装置および検査システム

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3053790A1 (fr) * 2016-07-07 2018-01-12 Rcp Design Global Dispositif destine a analyser la perception d'objets en fonction de son eclairage notamment

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6040387B1 (ja) * 2016-04-07 2016-12-07 アキム株式会社 レンズ検査装置
JP6512585B1 (ja) * 2017-12-01 2019-05-15 株式会社アセット・ウィッツ 部品外観自動検査装置
JP6482710B1 (ja) * 2018-09-06 2019-03-13 五洋商事株式会社 外観検査装置及び検査システム

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08201313A (ja) * 1995-01-31 1996-08-09 Asahi Glass Co Ltd 透明板状体の欠点検査方法及び装置
JPH11242005A (ja) * 1998-12-25 1999-09-07 Lion Engineerring Kk 物品外観検査装置
JP2004325071A (ja) * 2003-04-21 2004-11-18 M I L:Kk 容器内気泡判定方法及びその装置
JP2006214890A (ja) * 2005-02-04 2006-08-17 M I L:Kk 物品欠陥情報検出装置及び物品欠陥情報検出処理プログラム
JP2013246059A (ja) * 2012-05-25 2013-12-09 Sharp Corp 欠陥検査装置および欠陥検査方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08201313A (ja) * 1995-01-31 1996-08-09 Asahi Glass Co Ltd 透明板状体の欠点検査方法及び装置
JPH11242005A (ja) * 1998-12-25 1999-09-07 Lion Engineerring Kk 物品外観検査装置
JP2004325071A (ja) * 2003-04-21 2004-11-18 M I L:Kk 容器内気泡判定方法及びその装置
JP2006214890A (ja) * 2005-02-04 2006-08-17 M I L:Kk 物品欠陥情報検出装置及び物品欠陥情報検出処理プログラム
JP2013246059A (ja) * 2012-05-25 2013-12-09 Sharp Corp 欠陥検査装置および欠陥検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3053790A1 (fr) * 2016-07-07 2018-01-12 Rcp Design Global Dispositif destine a analyser la perception d'objets en fonction de son eclairage notamment

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