WO2016067379A1 - 成膜装置へのガス噴射装置 - Google Patents
成膜装置へのガス噴射装置 Download PDFInfo
- Publication number
- WO2016067379A1 WO2016067379A1 PCT/JP2014/078722 JP2014078722W WO2016067379A1 WO 2016067379 A1 WO2016067379 A1 WO 2016067379A1 JP 2014078722 W JP2014078722 W JP 2014078722W WO 2016067379 A1 WO2016067379 A1 WO 2016067379A1
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- Prior art keywords
- gas
- gas injection
- injection device
- film forming
- forming apparatus
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
Definitions
- the present invention relates to a gas injection device for a film forming apparatus.
- a high-speed jet of various directional gases useful for processing is performed on an object to be processed installed in a processing chamber in a reduced-pressure atmosphere.
- the present invention can be applied to a gas injection device that can be used.
- a gas injection device to a film forming apparatus includes a gas supply unit that supplies a gas, a gas dispersion supply unit that supplies gas from the gas supply unit, A gas injection cell unit that flows in the gas dispersed in the gas dispersion supply unit, rectifies the gas, and injects the rectified gas into the film forming apparatus, and the gas injection cell unit includes: A gas gap is formed in the gap, and the gas in the gas dispersion supply section flows into the gap from the wide side of the fan shape, and the fan shape As a result, the gas is rectified and accelerated, and is output into the film forming apparatus from the narrow side of the fan shape.
- the conventional method of injecting from a short gas supply pipe with a predetermined diameter is suitable when the gas is uniformly filled in the apparatus.
- this type of gas ejection, rectification and gas acceleration in which the gas flow direction is arranged are not performed in the gas supply pipe, and the gas is supplied (jetted) to the film forming apparatus. Therefore, it is difficult to form a homogeneous film on the bottom and side surfaces of the groove 202A because the gas does not enter the groove 202A having a high aspect ratio.
- the supplied radical gas has a very short gas life, it is killed before reaching the bottom surface of the groove 202A, making it difficult to form a homogeneous film.
- the inside of the gas injection device 100 is depressurized to the pressure P1, but outside the gas injection device 100, the pressure is atmospheric pressure.
- the gas supply side of the gas injection device 100 is provided with a means for controlling the gas flow rate adjusting means and the gas pressure at a constant pressure range. It has a means to monitor that.
- the fan-shaped gas injection cell unit 23 is heated to about several tens of degrees Celsius to 100 ° C.
- the gas space in the gap do in the gas injection cell unit 23 is several tens of degrees Celsius to 100 ° C. Heat to ° C.
- the ozone gas passes through the gap do in the heating state, the ozone gas is thermally dissociated, oxygen radical gas is generated, and the gas containing oxygen radical gas in the object to be processed in a short time until the life of returning from oxygen radical gas to oxygen gas. G2 is injected.
- the heater 51 that performs heating is disposed outside the gas injection cell portion 23.
- the two electrode portions 61 are disposed on both main surfaces of the gas injection cell portion 23.
- the amount of nitrogen added to the oxygen gas is particularly preferably 1000 ppm or less.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrochemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Spectroscopy & Molecular Physics (AREA)
Abstract
Description
図2は、本実施の形態に係る非加熱、加熱および放電ガスの成膜装置へのガス噴射装置(以下、単にガス噴射装置と称する)100と処理チャンバー200とから構成されるリモートプラズマ型成膜処理システムの構成を、模式的に示した斜視図である。
本実施の形態では、ガス噴射セル部23において、ガスG1を加熱させることにより、ガスG1をラジカルガス化させる。そして、本実施の形態に係るガス噴射セル部23は、ラジカルガスG2を噴射する。図4は、加熱ガスを噴射する、本実施の形態に係るガス噴射装置100の構成を示す図である。
本実施の形態に係るガス噴射装置100では、ガス噴射セル部23のガス隙間doにおいて、誘電体バリア放電を発生させ、当該誘電体バリア放電を利用して、良質なラジカルガスを生成する。そして、本実施の形態に係るガス噴射セル部23は、指向性を有するビーム状の高速度のラジカルガスを噴出する。図5は、本実施の形態に係るガス噴射装置100の構成を示す図である。
本実施の形態では、実施の形態1で説明したガス噴射セル部23が、ガス噴射装置100において複数配設されている。
本実施の形態では、図9に示すように、ガス噴射装置100は、同軸状の錐体形状の二つの部材を、ガスの間隙d0が設けられるように配置した、錐体形状のガス噴射セル部23を有する。錐体形状のガス噴射セル部23の頂点部からガスG2を噴出するようにすれば、同等のビーム状のガスを噴出することが出来、良質な成膜を実現することができる。
5 噴出部
9 交流電源
51 ヒータ
61 第一の電極部
610 第一の電極部の給電部
620 第二の電極部の給電部
100 ガス噴射装置
101 ガス供給部
102 噴出孔
200 成膜装置(処理チャンバー)
d0 隙間
G1 (ガス噴射セル部23に供給される)ガス
G2 (ガス噴射セル部23から出力される)ガス
H1 ヒータ電源
P0 (成膜装置200内の)ガス圧力
P1 (ガス噴射装置100内の)ガス圧力
Claims (13)
- ガスの供給を行うガス供給部(101)と、
前記ガス供給部からのガスが供給されるガス分散供給部(99)と、
前記ガス分散供給部内において分散されたガスが流入され、当該ガスを整流化し、整流化されたガスを成膜装置内に噴射するガス噴射セル部(23)とを、備えており、
前記ガス噴射セル部は、
内部にガス通路となる隙間(d0)が形成された、扇型形状であり、
前記ガス分散供給部内のガスは、
前記扇型形状の幅の広い側から、前記隙間内に流入し、当該扇型形状に起因して、ガスは整流化および加速され、扇型形状の幅の狭い側から、前記成膜装置内に出力される、
ことを特徴とする成膜装置へのガス噴射装置。 - 前記ガス噴射セル部は、
サファイアまたは石英で構成されている、
ことを特徴とする請求項1に記載の成膜装置へのガス噴射装置。 - 前記隙間の幅は、
3mm以下であり、
前記ガス噴射装置部内のガス圧力(P1)は、
10kPa以上、50kPa以下である、
ことを特徴とする請求項1に記載の成膜装置へのガス噴射装置。 - 前記ガス噴射装置は、
ガス流量を調整するバルブ(102B)と前記ガス噴射装置内のガス圧力を一定に制御する圧力制御部(103)とが、接続されている、
ことを特徴とする請求項1に記載の成膜装置へのガス噴射装置。 - 複数の噴出孔(102)を、さらに備えており、
前記ガス噴射セル部から出力されるガスは、
前記複数の噴出孔を介して、前記成膜装置内に出力される、
ことを特徴する請求項1に記載の成膜装置へのガス噴射装置。 - 前記ガス噴射セル部に配設される加熱部(51)を、さらに備えている、
ことを特徴とする請求項1に記載の成膜装置へのガス噴射装置。 - 前記ガス噴射セル部は、
前記隙間を通るガスを、オゾンガス、窒素酸化物ガスもしくは水素化合物ガスとし、前記加熱部による加熱により酸素ラジカル化、窒素ラジカル化もしくは水素ラジカル化し、前記ラジカル化したガスを前記成膜装置へ出力する、
ことを特徴とする請求項6に記載の成膜装置へのガス噴射装置。 - 前記ガス噴射セル部は、
誘電体であり、
前記ガス噴射セル部内の前記隙間の間において、交流電圧を印加させることができる交流電源(9)を、さらに備えており、
前記ガス噴射セル部は、
前記交流電源による交流電圧の印加により、前記隙間において発生した誘電体バリア放電によって生成される、ラジカルガスを前記成膜装置へ出力する、
ことを特徴とする請求項1に記載の成膜装置へのガス噴射装置。 - 前記ガス供給部から供給されるガスは、
窒素ガスもしくは窒素酸化物ガスであり、
前記ガス噴射セル部の前記隙間において、前記誘電体バリア放電により生成される前記ラジカルガスは、
窒素ラジカルである、
ことを特徴とする請求項8に記載の成膜装置へのガス噴射装置。 - 前記ガス供給部から供給されるガスは、
酸素ガスに、数ppm~数万ppmである、窒素ガスもしくは窒素酸化物ガスを含んだ混合ガスであり、
前記ガス噴射セル部の前記隙間において、前記誘電体バリア放電により生成される前記ラジカルガスは、
酸素ラジカルである、
ことを特徴とする請求項8に記載の成膜装置へのガス噴射装置。 - 前記ガス噴射セル部は、
複数個である、
ことを特徴とする請求項1に記載の成膜装置へのガス噴射装置。 - 前記ガス供給部から供給されたガスは、
プリカーサガスである、
ことを特徴とする請求項1に記載の成膜装置へのガス噴射装置。 - 前記ガス供給部から供給されたガスは、
ラジカルガスの原料となる原料ガスである、
ことを特徴とする請求項1に記載の成膜装置へのガス噴射装置。
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EP14905132.8A EP3214205B1 (en) | 2014-10-29 | 2014-10-29 | Apparatus for injecting gas into film formation apparatus |
CN201480082990.6A CN107075676B (zh) | 2014-10-29 | 2014-10-29 | 针对成膜装置的气体喷射装置 |
US15/514,367 US10676825B2 (en) | 2014-10-29 | 2014-10-29 | Gas jetting apparatus for film formation apparatus |
JP2016556093A JP6339218B2 (ja) | 2014-10-29 | 2014-10-29 | 成膜装置へのガス噴射装置 |
PCT/JP2014/078722 WO2016067379A1 (ja) | 2014-10-29 | 2014-10-29 | 成膜装置へのガス噴射装置 |
KR1020177010043A KR101974289B1 (ko) | 2014-10-29 | 2014-10-29 | 성막 장치에의 가스 분사 장치 |
TW104133835A TWI619837B (zh) | 2014-10-29 | 2015-10-15 | 用於成膜裝置之氣體噴射裝置 |
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JP7245417B2 (ja) | 2019-06-25 | 2023-03-24 | 住友金属鉱山株式会社 | 成膜装置および成膜方法 |
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EP3214205A1 (en) | 2017-09-06 |
CN107075676A (zh) | 2017-08-18 |
KR20170054495A (ko) | 2017-05-17 |
EP3214205B1 (en) | 2020-08-19 |
TW201627526A (zh) | 2016-08-01 |
US10676825B2 (en) | 2020-06-09 |
TWI619837B (zh) | 2018-04-01 |
JPWO2016067379A1 (ja) | 2017-04-27 |
JP6339218B2 (ja) | 2018-06-06 |
EP3214205A4 (en) | 2018-05-30 |
CN107075676B (zh) | 2019-08-02 |
US20170275758A1 (en) | 2017-09-28 |
KR101974289B1 (ko) | 2019-04-30 |
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