WO2016065788A1 - 阵列基板的制作方法、阵列基板及显示装置 - Google Patents
阵列基板的制作方法、阵列基板及显示装置 Download PDFInfo
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- WO2016065788A1 WO2016065788A1 PCT/CN2015/074109 CN2015074109W WO2016065788A1 WO 2016065788 A1 WO2016065788 A1 WO 2016065788A1 CN 2015074109 W CN2015074109 W CN 2015074109W WO 2016065788 A1 WO2016065788 A1 WO 2016065788A1
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 33
- 239000010409 thin film Substances 0.000 claims abstract description 27
- 238000000059 patterning Methods 0.000 claims abstract description 22
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- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
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- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
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- 229910001092 metal group alloy Inorganic materials 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
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- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
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- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
- H01L27/1274—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
- H01L27/1274—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor
- H01L27/1285—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/82—Cathodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/621—Providing a shape to conductive layers, e.g. patterning or selective deposition
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/351—Thickness
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
Definitions
- Embodiments of the present invention relate to a method of fabricating an array substrate, an array substrate, and a display device.
- Organic electroluminescent display panels are considered to have great application prospects in flat panel display due to their self-illumination, solid state, wide viewing angle, fast response, etc., after liquid crystal (LCD) and plasma (PDP) display devices.
- LCD liquid crystal
- PDP plasma
- a conventional organic electroluminescent display panel mainly includes an organic light emitting diode (EL portion) and a driving thin film transistor.
- the driving thin film transistor mainly includes an active layer 2' and a gate electrode formed on the base substrate 1'.
- the EL portion mainly includes an anode layer 8' on the flat layer 7', and a pixel defining layer (PDL) 9 ', cathode layer 11' and organic light-emitting layer 10' between anode layer 8' and cathode layer 11'.
- PDL pixel defining layer
- the above two parts need different fabrication processes, and the organic light emitting diode process for fabricating the EL portion needs to be performed after the process of driving the thin film transistor is completed, and the fabrication processes of both are also performed.
- the invention is complicated, which causes the organic electroluminescent display panel to have many manufacturing steps, long time and high cost.
- a method for fabricating an array substrate including:
- an array substrate includes a plurality of pixel units arranged in a matrix on a base substrate, each pixel unit including a thin film transistor structure, a cathode, an anode, and the cathode and the anode
- a thin film transistor structure including a thin film transistor structure, a cathode, an anode, and the cathode and the anode
- An organic light-emitting layer wherein the cathode is formed over a first region of the base substrate, and a gate of the thin film transistor structure is formed over a second region of the base substrate, the cathode
- the gate of the thin film transistor structure is the same material and is in a single structure Formed in the drawing process.
- a display device comprising the array substrate as described above.
- FIG. 1 is a schematic structural view of an organic electroluminescent panel in the prior art
- FIG. 2 is a flowchart of a method for fabricating an array substrate according to an embodiment of the present invention
- FIG. 3 is a flow chart of another method for fabricating an array substrate according to an embodiment of the present invention.
- 4-12 are schematic diagrams of fabricating an array substrate according to an embodiment of the invention.
- the method for fabricating the array substrate includes:
- S12 patterning the first conductive film, forming a pattern of a cathode over a first region of the substrate, and forming a pattern of a gate over a second region of the substrate.
- the first region of the above substrate substrate is used to fabricate a light emitting diode (EL portion) in the organic electroluminescent panel, and the second region is used to fabricate a thin film transistor portion in the organic electroluminescent panel.
- EL portion light emitting diode
- the method for fabricating the array substrate provided by the embodiment of the present invention can simultaneously form the cathode layer of the light emitting diode and the gate layer of the thin film transistor in different regions of the base substrate by one patterning process, thereby reducing the complexity and process of the fabrication process of the array substrate. Time, simplifying the manufacturing process of the organic electroluminescent panel and reducing the manufacturing cost.
- FIG. 3 is a flow chart of a method for fabricating an array substrate in an organic electroluminescent panel according to an embodiment of the present invention, the method comprising:
- the base substrate 1 may be a transparent substrate such as pre-cleaned glass, formed in
- the active layer 2 of the second region 12 may be a polysilicon layer in which an amorphous silicon layer is transformed by an amorphous silicon layer by excimer laser crystallization, metal induced crystallization, solid phase crystallization, or the like. It should be noted that the specific process and the structure of the thin film transistor will be different by different crystallization methods. In the preparation process, heat treatment dehydrogenation, deposition induction metal, heat treatment crystallization, excimer laser need to be added according to the situation.
- the thickness of the active layer 2 is in one example, the thickness is
- the active layer 2 may be formed by a PECVD, LPCVD or sputtering method at a deposition temperature of 600 ° C or lower.
- the gate insulating layer 3 may be a single layer of silicon oxide, silicon nitride or a combination of the two, and may be used by PECVD (plasma enhanced chemical vapor deposition), LPCVD (low pressure chemical vapor deposition), APCVD (atmospheric pressure chemical vapor deposition). ) or ECR-CVD (electron cyclotron resonance chemical vapor deposition) deposition, etc., thickness
- PECVD plasma enhanced chemical vapor deposition
- LPCVD low pressure chemical vapor deposition
- APCVD atmospheric pressure chemical vapor deposition
- ECR-CVD electrochemical cyclotron resonance chemical vapor deposition
- the first conductive film 100 may be a single layer, two layers or more, and is composed of a transparent conductive material such as indium tin oxide, indium zinc oxide, or the like. Or a metal, a metal alloy such as silver or a silver alloy and a transparent conductive material formed on the upper layer of the metal, the thickness can be Within the range, for example, the thickness is a cathode layer for forming an organic light emitting diode and a gate layer of the thin film transistor;
- the insulating layer film 200 may be an organic material, and an organic photoresist material such as polyimide or acrylic may be selected, and the thickness may be
- S25 patterning the insulating layer film and the gate insulating layer, forming a pattern of a pixel defining layer over the first region of the base substrate, forming over the source and drain regions of the active layer hole.
- the insulating layer film 200 is etched in the first region 11
- a via hole 210 is formed above the cathode layer 11, and a pixel defining layer 9 is formed.
- a source/drain via 220 is formed over the source/drain region of the active layer, so that the patterned insulating film can be used as a pixel defining layer.
- the second conductive film 300 may also be a single layer, two layers or two or more layers, and the active layer 2 is contacted through the via 220, and the second conductive film may be a transparent conductive material such as indium tin oxide, indium zinc oxide, or the like, or a metal, a metal alloy such as silver or a silver alloy, and a transparent conductive material formed on the upper layer of the metal, the thickness can be In the range, in one example, the thickness is An anode layer for forming an organic light emitting material and a source and a drain of the thin film transistor;
- a pattern of the anode 8 is formed over the first region 11 of the base substrate, and a source and drain are formed above the second region 12 of the substrate substrate.
- the pattern of the pole 6 includes the pattern of the source and the pattern of the drain connected to the anode 8.
- at least one of the first conductive film and the second conductive film is made of a transparent material so that light emitted from the EL portion can be irradiated.
- the first conductive film can have a reflective property.
- a metal material, the second conductive film may be a transparent metal material.
- the cathode layer of the organic light emitting diode and the gate layer of the thin film transistor are simultaneously formed by the first patterning process, and the insulating layer film is patterned by the second patterning process.
- the patterned insulating layer film can be used as a pixel defining layer, and can also be used as a flat layer and an intermediate insulating layer, and the anode layer of the organic light emitting diode and the source and drain of the thin film transistor are simultaneously formed by the third patterning process.
- the manufacturing method of the organic electroluminescent panel in the technology can greatly reduce the complexity and process time of the fabrication process of the array substrate, simplify the manufacturing process of the organic electroluminescent panel, and reduce the manufacturing cost.
- an embodiment of the present invention further provides an array substrate including a plurality of pixel units arranged in a matrix on a base substrate, each pixel unit including a thin film transistor structure, a cathode, an anode, and the cathode and the anode Between the organic light-emitting layers.
- the cathode is formed over a first region of the base substrate, and a gate of the thin film transistor structure is formed over a second region of the base substrate, the cathode being the same as a gate of the thin film transistor structure
- the material is formed in a patterning process.
- each pixel unit further includes a pixel defining layer formed over the cathode and formed on a flat layer above the gate, the pixel defining layer being the same material as the planar layer and formed in a single patterning process.
- the pixel definition layer and the flat layer are located in the same layer.
- the organic light emitting layer is formed over the cathode
- the anode is formed over the organic light emitting layer
- a source and a drain of the thin film transistor structure are formed on the flat
- the anode, the source and the drain are of the same material and are formed in a single patterning process.
- the anode, the source, and the drain are in the same layer.
- the first conductive film and the second conductive film may be a metal film formed of a metal material, or may be formed of a transparent conductive material such as a transparent metal oxide, or a metal material and a transparent metal oxide material.
- the laminate is formed.
- at least one of the first conductive film and the second conductive film is a transparent material for light emission of the EL portion; in one example, the material of the first conductive film is a material having a reflective property
- the material of the second conductive film is a transparent conductive material.
- an embodiment of the present invention further provides a display device including the above array substrate.
- the display device provided by the embodiment of the present invention may be any product or component having a display function, such as a notebook computer display screen, a liquid crystal display, a liquid crystal television, a digital photo frame, a mobile phone, a tablet computer, and the like.
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Abstract
Description
Claims (15)
- 一种阵列基板的制作方法,包括:在衬底基板上方形成第一导电薄膜;以及对所述第一导电薄膜进行图案化处理,在所述衬底基板的第一区域上方形成阴极的图形,在所述衬底基板的第二区域上方形成栅极的图形。
- 根据权利要求1所述的阵列基板的制作方法,还包括:在所述在衬底基板上方形成第一导电薄膜之前,在所述衬底基板的第二区域上方形成有源层的图形、栅极绝缘层的图形。
- 根据权利要求2所述的阵列基板的制作方法,还包括:在对所述第一导电薄膜进行图案化处理,在所述衬底基板的第一区域上方形成阴极的图形,在所述衬底基板的第二区域上方形成栅极的图形之后,形成绝缘层薄膜;以及对所述绝缘层薄膜以及所述栅极绝缘层图案化处理,在所述衬底基板的第一区域上方形成像素定义层的图形,在所述有源层的源漏区域上方形成过孔。
- 根据权利要求3所述的阵列基板的制作方法,还包括:在所述对所述绝缘层薄膜以及所述栅极绝缘层图案化处理,在所述衬底基板的第一区域上方形成像素定义层的图形,在所述有源层的源漏区域上方形成过孔之后,在所述衬底基板的第一区域上方形成有机发光层的图形;形成第二导电薄膜,所述第二导电薄膜通过所述过孔与所述有源层相接触;以及对所述第二导电薄膜进行图案化处理,在所述衬底基板的第一区域上方形成阳极的图形,在所述衬底基板的第二区域上方形成源极的图形以及与所述阳极相连的漏极的图形。
- 根据权利要求5所述的阵列基板的制作方法,其中,所述第一导电薄 膜和所述第二导电薄膜的至少之一为透明导电材料。
- 根据权利要求7所述的阵列基板的制作方法,其中,所述第一导电薄膜的材料为具有反光特性的材料,所述第二导电薄膜的材料为透明导电材料。
- 一种阵列基板,包括在衬底基板上呈矩阵排布的多个像素单元,每个像素单元包括薄膜晶体管结构、阴极、阳极以及所述阴极与所述阳极之间的有机发光层,其中,所述阴极形成在所述衬底基板的第一区域上方,所述薄膜晶体管结构的栅极形成在所述衬底基板的第二区域上方,所述阴极与所述薄膜晶体管结构的栅极为相同材料且在一次构图工艺中形成。
- 根据权利要求10所述的阵列基板,其中,所述阴极与所述薄膜晶体管结构的栅极位于同一层。
- 根据权利要求10或11所述的阵列基板,其中,所述薄膜晶体管结构的有源层、栅极绝缘层形成在所述栅极的下方,每个像素单元还包括形成在所述阴极上方的像素定义层以及形成在所述栅极上方的平坦层,所述像素定义层与所述平坦层为相同材料且在一次构图工艺中形成。
- 根据权利要求12所述的阵列基板,其中,所述像素定义层与所述平坦层位于同一层。
- 根据权利要求10-13任一所述的阵列基板,其特征在于,所述有机发光层形成在所述阴极的上方,所述阳极形成在所述有机发光层的上方,所述薄膜晶体管结构的源极和漏极形成在所述平坦层的上方,所述阳极、所述源极和所述漏极为相同材料且在一次构图工艺中形成。
- 一种显示装置,包括如权利要求10-14任一所述的阵列基板。
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US14/785,777 US10096663B2 (en) | 2014-10-31 | 2015-03-12 | Manufacturing method of array substrate, array substrate and display device |
Applications Claiming Priority (2)
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CN104393017B (zh) * | 2014-10-31 | 2017-12-15 | 京东方科技集团股份有限公司 | 阵列基板的制作方法、阵列基板及显示装置 |
CN105094491B (zh) * | 2015-08-24 | 2018-04-20 | 京东方科技集团股份有限公司 | 触控显示面板及其制作方法、驱动方法和触控显示装置 |
EP3488471A4 (en) * | 2016-07-25 | 2020-04-08 | Boe Technology Group Co. Ltd. | POLYCRYSTALLINE SILICON THIN-LAYER TRANSISTOR AND METHOD FOR THE PRODUCTION THEREOF AND THE DISPLAY DEVICE |
CN107170762B (zh) * | 2017-06-16 | 2019-04-30 | 武汉华星光电半导体显示技术有限公司 | Oled显示面板及其制作方法 |
US10121830B1 (en) | 2017-06-16 | 2018-11-06 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | OLED display panel and manufacturing method thereof |
CN107556476A (zh) * | 2017-09-18 | 2018-01-09 | 京东方科技集团股份有限公司 | 聚酰胺酸、聚酰亚胺、其制备及应用 |
CN107689345B (zh) * | 2017-10-09 | 2020-04-28 | 深圳市华星光电半导体显示技术有限公司 | Tft基板及其制作方法与oled面板及其制作方法 |
CN107768412B (zh) * | 2017-10-26 | 2023-10-27 | 京东方科技集团股份有限公司 | 显示基板及其制备方法和显示面板 |
CN109166864A (zh) * | 2018-08-08 | 2019-01-08 | 深圳市华星光电技术有限公司 | 阵列基板及其制造方法、显示面板 |
CN109166865B (zh) * | 2018-08-08 | 2020-11-10 | 深圳市华星光电技术有限公司 | 阵列基板及其制造方法、显示面板 |
CN110828520B (zh) * | 2019-11-15 | 2022-09-09 | 京东方科技集团股份有限公司 | 一种阵列基板及其制备方法、显示面板和显示装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1681365A (zh) * | 2004-02-26 | 2005-10-12 | 三星Sdi株式会社 | 有机电致发光显示器件及其制造方法 |
CN103107181A (zh) * | 2011-11-14 | 2013-05-15 | 三星显示有限公司 | 有机发光显示装置及其制造方法 |
US8796768B2 (en) * | 2011-07-15 | 2014-08-05 | Samsung Display Co., Ltd. | Organic light emitting display device including nano silver particles and method of manufacturing the same |
CN104393017A (zh) * | 2014-10-31 | 2015-03-04 | 京东方科技集团股份有限公司 | 阵列基板的制作方法、阵列基板及显示装置 |
Family Cites Families (3)
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TWI255432B (en) * | 2002-06-03 | 2006-05-21 | Lg Philips Lcd Co Ltd | Active matrix organic electroluminescent display device and fabricating method thereof |
KR101117642B1 (ko) * | 2009-11-16 | 2012-03-05 | 삼성모바일디스플레이주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
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---|---|---|---|---|
CN1681365A (zh) * | 2004-02-26 | 2005-10-12 | 三星Sdi株式会社 | 有机电致发光显示器件及其制造方法 |
US8796768B2 (en) * | 2011-07-15 | 2014-08-05 | Samsung Display Co., Ltd. | Organic light emitting display device including nano silver particles and method of manufacturing the same |
CN103107181A (zh) * | 2011-11-14 | 2013-05-15 | 三星显示有限公司 | 有机发光显示装置及其制造方法 |
CN104393017A (zh) * | 2014-10-31 | 2015-03-04 | 京东方科技集团股份有限公司 | 阵列基板的制作方法、阵列基板及显示装置 |
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