WO2016043100A1 - 含フッ素エラストマー組成物および成形品 - Google Patents
含フッ素エラストマー組成物および成形品 Download PDFInfo
- Publication number
- WO2016043100A1 WO2016043100A1 PCT/JP2015/075566 JP2015075566W WO2016043100A1 WO 2016043100 A1 WO2016043100 A1 WO 2016043100A1 JP 2015075566 W JP2015075566 W JP 2015075566W WO 2016043100 A1 WO2016043100 A1 WO 2016043100A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- fluorine
- containing elastomer
- group
- compound
- crosslinking
- Prior art date
Links
- KSLLMGLKCVSKFF-UHFFFAOYSA-N O=C1C(C(C(Nc2ccccc2C2=O)=C2C2=O)=O)=C2Nc2ccccc12 Chemical compound O=C1C(C(C(Nc2ccccc2C2=O)=C2C2=O)=O)=C2Nc2ccccc12 KSLLMGLKCVSKFF-UHFFFAOYSA-N 0.000 description 2
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/34—Heterocyclic compounds having nitrogen in the ring
- C08K5/3442—Heterocyclic compounds having nitrogen in the ring having two nitrogen atoms in the ring
- C08K5/3445—Five-membered rings
- C08K5/3447—Five-membered rings condensed with carbocyclic rings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/01—Hydrocarbons
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/34—Heterocyclic compounds having nitrogen in the ring
- C08K5/3412—Heterocyclic compounds having nitrogen in the ring having one nitrogen atom in the ring
- C08K5/3432—Six-membered rings
- C08K5/3437—Six-membered rings condensed with carbocyclic rings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
- C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/34—Heterocyclic compounds having nitrogen in the ring
- C08K5/3412—Heterocyclic compounds having nitrogen in the ring having one nitrogen atom in the ring
- C08K5/3432—Six-membered rings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
- F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
Definitions
- the present invention relates to a fluorine-containing elastomer composition and a molded article.
- Fluorine-containing elastomers especially perfluoroelastomers containing tetrafluoroethylene (TFE) units, exhibit excellent chemical resistance, solvent resistance, and heat resistance, and are therefore used in aerospace, semiconductor manufacturing equipment, chemical plant fields, etc. Widely used as a sealing material in harsh environments.
- TFE tetrafluoroethylene
- Patent Document 1 in order to provide a seal for a semiconductor manufacturing apparatus that has heat resistance, low gas permeability, and stability even when irradiated with plasma in an atmosphere of oxygen or CF 4 and does not generate dust, It has been proposed to add 1 to 50 parts by weight of silica and 1 to 10 parts by weight of organic peroxide with respect to 100 parts by weight of elastomer.
- Patent Document 2 in order to improve plasma resistance and reduce generation of particles after plasma irradiation, aluminum oxide fine particles having an average particle diameter of 0.5 ⁇ m or less may be added to the crosslinkable fluorine-based elastomer component. Proposed.
- Patent Document 3 discloses that a white compounded composition of a fluorine-containing elastomer that can be peroxide vulcanized and that does not deteriorate the compression set, is added to the fluorine-containing elastomer in an amount of 4 to 5% by weight. It has been proposed to add ultrafine white carbon having an aqueous solution pH of 9-12.
- Patent Document 4 heat resistance and workability are maintained in an environment where direct exposure to plasma is performed, as in a dry etching apparatus, and both fluorine-based plasma and oxygen plasma that are exposed in a semiconductor manufacturing process.
- an isoindolinone pigment, a quinacridone pigment, a diketopyrrolopyrrole pigment is used as the fluorine-containing elastomer. It has been proposed to add at least one selected from the group consisting of pigments, anthraquinone pigments, amine antioxidants, phenolic antioxidants, sulfur antioxidants, and phosphorus antioxidants.
- Patent Document 5 discloses a filler composed of a synthetic polymer compound having an amide bond or a synthetic polymer compound having an imide bond in the main chain as a filler having a small weight change in both oxygen plasma irradiation and CF 4 plasma irradiation. Are listed. It is also described that this filler is blended with a crosslinkable elastomer.
- the present invention provides a fluorine-containing elastomer composition having excellent heat resistance.
- the present invention includes a fluorine-containing elastomer, Formula (1):
- a fluorine-containing elastomer composition comprising at least one compound (a) selected from the group consisting of:
- the fluorine-containing elastomer is preferably a perfluoroelastomer.
- the compound (a) is preferably contained in an amount of 0.5 to 100 parts by mass with respect to 100 parts by mass of the fluorine-containing elastomer.
- the fluorine-containing elastomer composition of the present invention is preferably a molding material.
- the present invention is also a molded article obtained from the above-mentioned fluorine-containing elastomer composition.
- the fluorine-containing elastomer composition of the present invention has excellent heat resistance due to the above configuration.
- the present invention is a fluorine-containing elastomer composition
- a fluorine-containing elastomer composition comprising a fluorine-containing elastomer and a compound (a).
- a fluorine-containing elastomer is used because it has chemical resistance and heat resistance.
- the fluorine-containing elastomer may be a partially fluorinated elastomer or a perfluoroelastomer, but it is preferable to use a perfluoroelastomer from the viewpoint of further excellent chemical resistance and heat resistance.
- VdF vinylidene fluoride
- TFE tetrafluoroethylene
- Pr tetrafluoroethylene
- TFE propylene
- VdF vinylidene fluoride
- the vinylidene fluoride-based fluororubber is preferably a copolymer composed of 45 to 85 mol% of vinylidene fluoride and 55 to 15 mol% of at least one other monomer copolymerizable with vinylidene fluoride.
- the copolymer is composed of 50 to 80 mol% of vinylidene fluoride and 50 to 20 mol% of at least one other monomer copolymerizable with vinylidene fluoride.
- each monomer constituting the fluorine-containing elastomer can be calculated by appropriately combining NMR, FT-IR, elemental analysis, and fluorescent X-ray analysis depending on the type of monomer.
- TFE tetrafluoroethylene
- HFP he
- Monomers monomers ethylene, propylene, and a non-fluorinated monomer such as an alkyl vinyl ether. These can be used alone or in any combination. Among these, it is preferable to use at least one selected from the group consisting of TFE, HFP, fluoroalkyl vinyl ether and CTFE.
- CF 2 CFO (CF 2 CF (Y 11) O) m (CF 2) n F (Wherein Y 11 represents a fluorine atom or a trifluoromethyl group, m is an integer of 1 to 4, and n is an integer of 1 to 4).
- Y 11 represents a fluorine atom or a trifluoromethyl group
- m is an integer of 1 to 4
- n is an integer of 1 to 4
- at least one of The fluoromonomer represented by the general formula (8) is more preferable.
- vinylidene fluoride-based fluorororubber examples include VdF / HFP rubber, VdF / HFP / TFE rubber, VdF / CTFE rubber, VdF / CTFE / TFE rubber, VDF / general formula (6).
- the tetrafluoroethylene / propylene-based fluororubber is preferably a copolymer composed of 45 to 70 mol% of tetrafluoroethylene, 55 to 30 mol% of propylene, and 0 to 5 mol% of a fluoromonomer providing a crosslinking site. .
- the fluorine-containing elastomer may be a perfluoroelastomer.
- the perfluoroelastomer include perfluoroelastomers containing TFE, for example, a fluoromonomer copolymer represented by TFE / general formula (8), (10) or (11), and TFE / general formula (8), (10 ) Or (11) is preferably at least one selected from the group consisting of a fluoromonomer / monomer copolymer that provides a crosslinking site.
- TFE / PMVE copolymer the composition is preferably 45 to 90/10 to 55 (mol%), more preferably 55 to 80/20 to 45, and still more preferably 55 to 70/30 to 45.
- a monomer copolymer that provides a TFE / PMVE / cross-linking site it is preferably 45 to 89.9 / 10 to 54.9 / 0.01 to 4 (mol%), and more preferably 55 to 77. It is 9/20 to 49.9 / 0.1 to 3.5, and more preferably 55 to 69.8 / 30 to 44.8 / 0.2 to 3.
- a fluoromonomer copolymer represented by the general formula (8), (10) or (11) having 4 to 12 carbon atoms preferably 50 to 90/10 to 50 (mol%). More preferably, it is 60 to 88/12 to 40, and still more preferably 65 to 85/15 to 35.
- the composition is out of the range, the properties as a rubber elastic body are lost, and the properties tend to be similar to those of a resin.
- perfluoroelastomer examples include TFE / fluoromonomer represented by the general formula (11) / fluoromonomer copolymer that gives a crosslinking site, TFE / perfluorovinyl ether copolymer represented by the general formula (11), and TFE. / At least one selected from the group consisting of a fluoromonomer copolymer represented by the general formula (8) and a fluoromonomer represented by TFE / the general formula (8) / a monomer copolymer giving a crosslinking site It is preferable that
- perfluoroelastomer examples include perfluoroelastomers described in International Publication No. 97/24381, Japanese Examined Patent Publication No. 61-57324, Japanese Examined Patent Publication No. 4-81608, Japanese Patent Publication No. 5-13961, and the like. Can do.
- the monomer that gives a crosslinking site is a monomer having a crosslinkable group that gives the fluoropolymer a crosslinking site for forming a crosslink with a curing agent (cure site monomer).
- CX 3 2 CX 3 -R f 121 CHR 121 X 4
- X 3 is a hydrogen atom, a fluorine atom or CH 3
- R f 121 is a fluoroalkylene group, a perfluoroalkylene group, a fluoro (poly) oxyalkylene group or a perfluoro (poly) oxyalkylene group
- R 121 Is a hydrogen atom or CH 3
- X 4 is an iodine atom or a bromine atom
- CX 3 2 CX 3 -R f 131 X 4 (Wherein X 3 is a hydrogen atom, fluorine atom or CH 3 , R f 131 is a fluoroalkylene group, perfluoroalkylene group, fluoropolyoxyalkylene group or perfluoropolyoxyalkylene
- Formula (14) CF 2 ⁇ CFO (CF 2 CF (CF 3 ) O) m (CF 2 ) n —X 5 (Wherein m is an integer of 0 to 5, n is an integer of 1 to 3, and X 5 is a cyano group, a carboxyl group, an alkoxycarbonyl group, an iodine atom, a bromine atom, or —CH 2 I).
- m is an integer of 0 to 5
- n is an integer of 1 to 3
- X 6 is a cyano group, a carboxyl group, an alkoxycarbonyl group, an iodine atom, a bromine atom, or —CH 2 OH.
- X 3 is preferably a fluorine atom.
- Rf 121 and Rf 131 are preferably perfluoroalkylene groups having 1 to 5 carbon atoms.
- R 121 is preferably a hydrogen atom.
- X 5 is preferably a cyano group, an alkoxycarbonyl group, an iodine atom, a bromine atom, or —CH 2 I.
- X 6 is preferably a cyano group, an alkoxycarbonyl group, an iodine atom, a bromine atom, or —CH 2 OH.
- CF 2 CFOCF 2 CF ( CF 3) OCF 2 CF 2 CN
- CF 2 CFOCF 2 CF (CF 3) OCF 2 CF 2 COOH
- CF 2 CFOCF 2 CF (CF 3) OCF 2 CF 2 CH 2 I
- CF 2 CFOCF 2 CF 2 CH 2 I
- CH 2 CFCF 2 OCF (CF 3) CF 2 OCF (CF 3) CN
- CH 2 CFCF 2 OCF (CF 3) CF 2 OCF (CF 3 ) COOH
- CH 2 CFCF 2 OCF (CF 3 ) CF 2 OCF (CF 3 ) CH 2 OH
- CH 2 CHCF 2 CF 2 I
- the fluorine-containing elastomer preferably has a glass transition temperature of ⁇ 70 ° C. or higher, more preferably ⁇ 60 ° C. or higher, and preferably ⁇ 50 ° C. or higher from the viewpoint of excellent compression set at high temperatures. Further preferred. Further, from the viewpoint of good cold resistance, it is preferably 5 ° C. or lower, more preferably 0 ° C. or lower, and further preferably ⁇ 3 ° C. or lower.
- the glass transition temperature is obtained by using a differential scanning calorimeter (Mettler Toledo, DSC822e) to obtain a DSC curve by raising the temperature of 10 mg of the sample at 10 ° C./min. It can be determined as the temperature indicating the midpoint of the two intersections of the extension of the line and the tangent at the inflection point of the DSC curve.
- the fluorine-containing elastomer preferably has a Mooney viscosity ML (1 + 20) at 170 ° C. of 30 or more, more preferably 40 or more, and still more preferably 50 or more from the viewpoint of good heat resistance. Further, in terms of good workability, it is preferably 150 or less, more preferably 120 or less, and even more preferably 110 or less.
- the fluorine-containing elastomer preferably has a Mooney viscosity ML (1 + 20) at 140 ° C. of 30 or more, more preferably 40 or more, and still more preferably 50 or more from the viewpoint of good heat resistance. Moreover, it is preferable that it is 180 or less at a point with favorable workability, It is more preferable that it is 150 or less, It is still more preferable that it is 110 or less.
- the fluorine-containing elastomer preferably has a Mooney viscosity ML (1 + 10) at 100 ° C. of 10 or more, more preferably 20 or more, and still more preferably 30 or more from the viewpoint of good heat resistance. Further, in terms of good workability, it is preferably 120 or less, more preferably 100 or less, and still more preferably 80 or less.
- the Mooney viscosity can be measured according to JIS K6300 at 170 ° C. or 140 ° C. and 100 ° C. using a Mooney viscometer MV2000E type manufactured by ALPHA TECHNOLOGIES.
- the fluorine-containing elastomer composition of the present invention further contains a compound (a) as an organic filler.
- a compound (a) as an organic filler.
- the fluorine-containing elastomer composition of this invention is excellent in heat resistance.
- the compression set characteristic and heat resistance of the molded article obtained from the fluorine-containing elastomer composition of the present invention are improved.
- the inclusion of the compound (a) also increases the hardness of the resulting molded product, thereby improving the choke resistance.
- the compound (a) has the formula (1):
- a compound (a) is at least 1 sort (s) of compounds selected from the group which consists of a compound (1) and a compound (2) from the point which the compression set property and heat resistance of the molded article obtained are more excellent. It is preferable.
- These compounds (a) may be used alone or in a mixture of two or more.
- the shape of the compound (a) is not particularly limited, and not only a spherical shape but also a flake shape can be used. If it is spherical, a molded product with little anisotropy can be obtained, and if it is flake shaped, a molded product having reinforcement in a specific direction can be obtained.
- the specific surface area of the compound (a) is preferably 0.5 m 2 / g or more, more preferably 2 m 2 / g or more. When the specific surface area is less than 0.5 m 2 / g, the reinforcing property becomes poor.
- the specific surface area is a value that can be measured using a surface analyzer according to the BET method.
- the amount of the compound (a) added is preferably 0.5 to 100 parts by mass, more preferably 5 to 50 parts by mass, and still more preferably 5 to 25 parts by mass with respect to 100 parts by mass of the fluorine-containing elastomer.
- the addition amount of the compound (a) is less than 0.5 parts by mass, the reinforcing property is poor, and when the addition amount of the compound (a) exceeds 100 parts by mass, it is hard and the sealing performance is lowered.
- the said compound (a) does not contain a metal atom from the point of the cleanliness (nonmetal) calculated
- the fluorine-containing elastomer composition of the present invention may contain a general filler.
- Examples of the general filler include imide fillers having an imide structure such as polyimide, polyamideimide, and polyetherimide; polyarylate, polysulfone, polyethersulfone, polyphenylene sulfide, polyetheretherketone, polyetherketone, polyoxy Organic fillers made of engineering plastics such as benzoate (excluding compound (a)), metal oxide fillers such as aluminum oxide, silicon oxide and yttrium oxide, metal carbides such as silicon carbide and aluminum carbide, silicon nitride and aluminum nitride Examples thereof include inorganic fillers such as metal nitride filler, aluminum fluoride, and carbon fluoride.
- imide fillers having an imide structure such as polyimide, polyamideimide, and polyetherimide
- polyarylate polysulfone, polyethersulfone, polyphenylene sulfide, polyetheretherketone, polyetherketone, polyoxy Organic fillers made of engineering plastics such as benzoate (excluding compound (a
- aluminum oxide, yttrium oxide, silicon oxide, polyimide, and carbon fluoride are preferable from the viewpoint of the shielding effect of various plasmas.
- the amount of the above general filler is preferably 0.5 to 100 parts by mass, more preferably 5 to 50 parts by mass with respect to 100 parts by mass of the fluorine-containing elastomer.
- the fluorine-containing elastomer composition of the present invention may contain a crosslinking agent.
- the cross-linking agent is not particularly limited as long as it is usually used as a cross-linking agent for fluorine-containing elastomers. From the viewpoint of heat resistance of the obtained molded product, a triazine cross-linking cross-linking agent, oxazole A crosslinking type crosslinking agent, an imidazole crosslinking type crosslinking agent, and a thiazole crosslinking type crosslinking agent are preferable.
- triazine crosslinking crosslinking agents include inorganic compounds such as organotin compounds such as tetraphenyltin and triphenyltin, silicon nitride (Si 3 N 4 ), lithium nitride, titanium nitride, aluminum nitride, boron nitride, vanadium nitride, and zirconium nitride. Examples thereof include nitrides.
- oxazole crosslinking agent imidazole crosslinking agent, and thiazole crosslinking agent
- R 4 is —SO 2 —, —O—, —CO—, an alkylene group having 1 to 6 carbon atoms, a perfluoroalkylene group having 1 to 10 carbon atoms, a single bond, or
- R 5 and R 6 are one of —NH 2 and the other is —NHR 7 , —NH 2 , —OH or —SH, and R 7 is a hydrogen atom, a fluorine atom or a monovalent group
- An organic group preferably R 5 is —NH 2 and R 6 is —NHR 7 .
- Preferable specific examples of the alkylene group having 1 to 6 carbon atoms include methylene group, ethylene group, propylene group, butylene group, pentylene group, hexylene group and the like.
- the perfluoroalkylene group having 1 to 10 carbon atoms Is
- R f 3 is a perfluoroalkylene group having 1 to 10 carbon atoms
- n is an integer of 1 to 10
- bisaminophenol-based crosslinking agents bisaminothiophenol-based crosslinking agents, bisdiaminophenyl-based crosslinking agents, etc. are those conventionally used for crosslinking systems having a cyano group as a crosslinking point. It reacts with the group to form an oxazole ring, a thiazole ring and an imidazole ring to give a cross-linked product.
- crosslinking agents include compounds having a plurality of 3-amino-4-hydroxyphenyl groups or 3-amino-4-mercaptophenyl groups, or a compound represented by the general formula (24):
- R 4 , R 5 and R 6 are as defined above
- specific examples include 2,2-bis (3-amino-4-hydroxyphenyl) hexa Fluoropropane (generic name: bis (aminophenol) AF), 2,2-bis (3-amino-4-mercaptophenyl) hexafluoropropane, tetraaminobenzene, bis-3,4-diaminophenylmethane, bis-3 , 4-diaminophenyl ether, 2,2-bis (3,4-diaminophenyl) hexafluoropropane, 2,2-bis [3-amino-4- (N-phenylamino) phenyl] hexafluoropropane, 2, 2-bis [3-amino-4- (N-methylamino) phenyl] hexafluoropropane, 2,2-bis [3-amino-4- (N-ethylamino) )
- 2,2-bis [3-amino-4- (N-phenylamino) phenyl] hexafluoropropane is used as a crosslinking agent from the viewpoint of heat resistance, steam resistance, amine resistance, and good crosslinkability. Is preferred.
- a crosslinking agent other than the above can be used in combination with the above crosslinking agent.
- crosslinking agents examples include peroxide crosslinking agents, polyol crosslinking agents, polyamine crosslinking agents, and the like.
- the crosslinking agent used in peroxide crosslinking may be an organic peroxide that can easily generate a peroxy radical in the presence of heat or a redox system.
- organic peroxide that can easily generate a peroxy radical in the presence of heat or a redox system.
- the crosslinking aid that can be used in this case may be a compound having a reaction activity with respect to a peroxy radical and a polymer radical.
- a peroxy radical and a polymer radical For example, CH 2 ⁇ CH—, CH 2 ⁇ CHCH 2 —, CF 2 And polyfunctional compounds having a functional group such as ⁇ CF—.
- triallyl cyanurate triallyl isocyanurate (TAIC)
- triacryl formal triallyl trimellitate, N, N′-n-phenylenebismaleimide, dipropargyl terephthalate, diallyl phthalate, tetraallyl Terephthalate amide, triallyl phosphate, bismaleimide, fluorinated triallyl isocyanurate (1,3,5-tris (2,3,3-trifluoro-2-propenyl) -1,3,5-triazine 2,4 6-trione), tris (diallylamine) -S-triazine, triallyl phosphite, N, N-diallylacrylamide, 1,6-divinyldodecafluorohexane and the like.
- crosslinking agent used for polyol crosslinking examples include polyhydric alcohol compounds such as bisphenol A and bisphenol AF.
- crosslinking agent used for polyamine crosslinking examples include polyvalent amine compounds such as hexamethylenediamine carbamate, N, N′-dicinnamylidene-1,6-hexanediamine, and 4,4′-bis (aminocyclohexyl) methanecarbamate.
- the cross-linking agent is preferably 0.05 to 10 parts by mass, more preferably 0.5 to 5 parts by mass with respect to 100 parts by mass of the fluorine-containing elastomer.
- amount of the crosslinking agent is less than 0.05 parts by mass, the fluorine-containing elastomer tends not to be sufficiently crosslinked, and when it exceeds 10 parts by mass, the physical properties of the crosslinked product tend to be deteriorated.
- the fluorine-containing elastomer composition of the present invention can be prepared by mixing the above-described components using a normal elastomer processing machine, for example, an open roll, a Banbury mixer, a kneader or the like. In addition, it can be prepared by a method using a closed mixer.
- the fluorine-containing elastomer composition of the present invention can be suitably used as a molding material for obtaining a molded product by cross-linking molding.
- a method for obtaining a preform using the fluorine-containing elastomer composition of the present invention as a molding material may be a normal method, a method of heat-compressing with a mold, a method of press-fitting into a heated mold, and a method of extruding with an extruder. It can carry out by a well-known method.
- a molded product can be obtained by performing heat crosslinking with steam after extrusion.
- Kneading method Roll kneading press cross-linking: oven cross-linking at 180 ° C. for 20 minutes: 290 ° C. for 18 hours.
- the present invention is also a molded article obtained from the fluorine-containing elastomer composition.
- the molded article of the present invention can be suitably used as a sealing material for a semiconductor manufacturing apparatus that requires a particularly high level of cleanliness, particularly a semiconductor manufacturing apparatus that performs high-density plasma irradiation.
- the sealing material include O-ring, square ring, gasket, packing, oil seal, bearing seal, lip seal and the like.
- it can also be used as various elastomer products used in semiconductor manufacturing equipment, such as diaphragms, tubes, hoses, various rubber rolls, and belts. It can also be used as a coating material and a lining material.
- the semiconductor manufacturing apparatus referred to in the present invention is not particularly limited to an apparatus for manufacturing a semiconductor, and is widely used for a semiconductor that requires a high degree of cleanliness, such as an apparatus for manufacturing a liquid crystal panel or a plasma panel. This includes all manufacturing equipment used in the field, and examples include the following.
- etching apparatus dry etching apparatus plasma etching apparatus reactive ion etching apparatus reactive ion beam etching apparatus sputter etching apparatus ion beam etching apparatus wet etching apparatus ashing apparatus
- cleaning apparatus dry etching cleaning apparatus UV / O 3 cleaning apparatus ion Beam cleaning device
- Laser beam cleaning device Plasma cleaning device Gas etching cleaning device
- Extraction cleaning device Soxhlet extraction cleaning device
- High temperature high pressure extraction cleaning device Microwave extraction cleaning device Supercritical extraction cleaning device
- Exposure device Stepper coater / developer (4) Polishing device CMP apparatus (5) film forming apparatus CVD apparatus sputtering apparatus (6) diffusion / ion implantation apparatus oxidation diffusion apparatus ion implantation apparatus
- the molded article of the present invention exhibits excellent performance as a sealing material for, for example, a CVD apparatus, a plasma etching apparatus, a reactive ion etching apparatus, an ashing apparatus, or an excimer laser exposure machine.
- the molded product of the present invention can be expected to have excellent performance such that the amount of organic outgas and the metal content are small.
- Example 1 After 100 parts by mass of fluorine-containing elastomer, 1 part by mass of crosslinking agent 1 and 15 parts by mass of compound 1 are premixed in 900 parts by mass of a fluorine-containing solvent, and then the fluorine-containing solvent is volatilized at 60 ° C. to open rolls. Were kneaded to obtain a crosslinkable fluorine-containing elastomer composition.
- TFE tetrafluoroethylene
- PMVE perfluoromethyl vinyl ether
- the obtained fluorine-containing elastomer composition was subjected to press crosslinking at 180 ° C. for 20 minutes and then oven-crosslinked in an air oven at 290 ° C. for 18 hours to obtain an O-ring crosslinked molded product. It was.
- the obtained O-ring cross-linked molded product was measured for compression set. The results are shown in Table 1.
- Example 2 and Comparative Example 1 An O-ring crosslinked molded product and a comparative O-ring crosslinked molded product were obtained in the same manner as in Example 1 except that the components of the fluorine-containing elastomer composition were changed as shown in Table 1.
- Table 1 shows the measurement results of the compression set.
- Compound 2 is pentacene
- Compound 6 is polyimide powder (UIP-S, Ube Industries, Ltd.).
- Examples 3-7, Comparative Examples 2 and 3 A fluorine-containing elastomer composition was obtained in the same manner as in Example 1 except that the components of the fluorine-containing elastomer composition were changed as shown in Table 2. About the obtained fluorine-containing elastomer composition, the 50% mass reduction
- Example 8 Comparative Example 4 A fluorine-containing elastomer composition was obtained in the same manner as in Example 1 except that the components of the fluorine-containing elastomer composition were changed as shown in Table 3.
- Example 1 An O-ring crosslinked molded product and a comparative O-ring crosslinked molded product were obtained from the obtained fluorine-containing elastomer composition.
- the obtained O-ring cross-linked molded article was measured for compression set and 50% mass reduction temperature.
- Table 3 shows the measurement result of compression set and the measurement result of 50% mass reduction temperature.
- the crosslinking agent 2 is Si 3 N 4 .
- the fluorine-containing elastomer, Compound 1 and Compound 6 are the same as in Table 1.
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
Description
式(1):
式(2):
式(3):
式(4):
式(5):
からなる群より選択される少なくとも1種の化合物(a)とを含む含フッ素エラストマー組成物である。
フルオロアルキルビニルエーテルとしては、
一般式(8):CF2=CF-ORf81
(式中、Rf81は、炭素数1~8のパーフルオロアルキル基を表す。)で表されるフルオロモノマー、
一般式(10):CF2=CFOCF2ORf101
(式中、Rf101は炭素数1~6の直鎖又は分岐状パーフルオロアルキル基、炭素数5~6の環式パーフルオロアルキル基、1~3個の酸素原子を含む炭素数2~6の直鎖又は分岐状パーフルオロオキシアルキル基である)で表されるフルオロモノマー、及び、
一般式(11):CF2=CFO(CF2CF(Y11)O)m(CF2)nF
(式中、Y11はフッ素原子又はトリフルオロメチル基を表す。mは1~4の整数である。nは1~4の整数である。)で表されるフルオロモノマー
からなる群より選択される少なくとも1種であることが好ましく、
一般式(8)で表されるフルオロモノマーがより好ましい。
その組成は、TFE/PMVE共重合体の場合、好ましくは、45~90/10~55(モル%)であり、より好ましくは、55~80/20~45であり、更に好ましくは、55~70/30~45である。
TFE/PMVE/架橋部位を与えるモノマー共重合体の場合、好ましくは、45~89.9/10~54.9/0.01~4(モル%)であり、より好ましくは、55~77.9/20~49.9/0.1~3.5であり、更に好ましくは、55~69.8/30~44.8/0.2~3である。
TFE/炭素数が4~12の一般式(8)、(10)又は(11)で表されるフルオロモノマー共重合体の場合、好ましくは、50~90/10~50(モル%)であり、より好ましくは、60~88/12~40であり、更に好ましくは、65~85/15~35である。
TFE/炭素数が4~12の一般式(8)、(10)又は(11)で表されるフルオロモノマー/架橋部位を与えるモノマー共重合体の場合、好ましくは、50~89.9/ 10~49.9/0.01~4(モル%)であり、より好ましくは、60~87.9/12~39.9/0.1~3.5であり、更に好ましくは、65~84.8/15~34.8/0.2~3である。
これらの組成の範囲を外れると、ゴム弾性体としての性質が失われ、樹脂に近い性質となる傾向がある。
一般式(12):CX3 2=CX3-Rf 121CHR121X4
(式中、X3は、水素原子、フッ素原子又はCH3、Rf 121は、フルオロアルキレン基、パーフルオロアルキレン基、フルオロ(ポリ)オキシアルキレン基又はパーフルオロ(ポリ)オキシアルキレン基、R121は、水素原子又はCH3、X4は、ヨウ素原子又は臭素原子である)で表されるフルオロモノマー、
一般式(13):CX3 2=CX3-Rf 131X4
(式中、X3は、水素原子、フッ素原子又はCH3、Rf 131は、フルオロアルキレン基、パーフルオロアルキレン基、フルオロポリオキシアルキレン基又はパーフルオロポリオキシアルキレン基、X4は、ヨウ素原子又は臭素原子である)で表されるフルオロモノマー、
一般式(14):CF2=CFO(CF2CF(CF3)O)m(CF2)n-X5
(式中、mは0~5の整数、nは1~3の整数、X5は、シアノ基、カルボキシル基、アルコキシカルボニル基、ヨウ素原子、臭素原子、又は、-CH2Iである)で表されるフルオロモノマー、及び、
一般式(15):CH2=CFCF2O(CF(CF3)CF2O)m(CF(CF3))n-X6
(式中、mは0~5の整数、nは1~3の整数、X6は、シアノ基、カルボキシル基、アルコキシカルボニル基、ヨウ素原子、臭素原子、又は-CH2OHである)で表されるフルオロモノマー、及び、
一般式(16):CR162R163=CR164-Z-CR165=CR166R167
(式中、R162、R163、R164、R165、R166及びR167、は、同一又は異なって、水素原子又は炭素数1~5のアルキル基である。Zは、直鎖又は分岐状で酸素原子を有していてもよい、炭素数1~18のアルキレン基、炭素数3~18のシクロアルキレン基、少なくとも部分的にフッ素化している炭素数1~10のアルキレン基若しくはオキシアルキレン基、又は、
-(Q)p-CF2O-(CF2CF2O)m(CF2O)n-CF2-(Q)p-
(式中、Qはアルキレン基またはオキシアルキレン基である。pは0または1である。m/nが0.2~5である。)で表され、分子量が500~10000である(パー)フルオロポリオキシアルキレン基である。)で表されるモノマー
からなる群より選択される少なくとも1種であることが好ましい。
上記比表面積は、BET法に従い、表面分析計を用いて測定し得られる値である。
上記架橋剤は、特に限定されるものではなく、通常含フッ素エラストマーの架橋剤として使用されているものであればよいが、得られる成形品の耐熱性の点から、トリアジン架橋系架橋剤、オキサゾール架橋系架橋剤、イミダゾール架橋系架橋剤、チアゾール架橋系架橋剤が好ましい。
または一般式(23):
含フッ素エラストマー 100質量部
架橋剤 2,2-ビス[3-アミノ-4-(N-フェニルアミノ)フェニル]ヘキサフルオロプロパン 1質量部
化合物 15質量部
混練方法 :ロール練り
プレス架橋 :180℃で20分間
オーブン架橋:290℃で18時間
であり、特にことわらない限りは、この条件で架橋する。
本発明の成形品は、特に高度なクリーンさが要求される半導体製造装置、特に高密度プラズマ照射が行なわれる半導体製造装置のシール材として好適に使用できる。上記シール材としては、O-リング、角-リング、ガスケット、パッキン、オイルシール、ベアリングシール、リップシールなどがあげられる。
そのほか、半導体製造装置に使用される各種のエラストマー製品、たとえばダイヤフラム、チューブ、ホース、各種ゴムロール、ベルトなどとしても使用できる。また、コーティング用材料、ライニング用材料としても使用できる。
ドライエッチング装置
プラズマエッチング装置
反応性イオンエッチング装置
反応性イオンビームエッチング装置
スパッタエッチング装置
イオンビームエッチング装置
ウェットエッチング装置
アッシング装置
(2)洗浄装置
乾式エッチング洗浄装置
UV/O3洗浄装置
イオンビーム洗浄装置
レーザービーム洗浄装置
プラズマ洗浄装置
ガスエッチング洗浄装置
抽出洗浄装置
ソックスレー抽出洗浄装置
高温高圧抽出洗浄装置
マイクロウェーブ抽出洗浄装置
超臨界抽出洗浄装置
(3)露光装置
ステッパー
コータ・デベロッパー
(4)研磨装置
CMP装置
(5)成膜装置
CVD装置
スパッタリング装置
(6)拡散・イオン注入装置
酸化拡散装置
イオン注入装置
実施例および比較例で行った圧縮永久歪の測定は、実施例および比較例で得られた2次オーブン架橋後のO-リングを、JIS-K6262に準じて測定した。具体的には、実施例および比較例で得られた2次オーブン架橋後のO-リングを、25%加圧圧縮下に300℃で70時間保持したのち、25℃の恒温室内に30分間放置した試料を測定した。
熱質量計(セイコーインスツルメンツ社製 TG-DTA6200)を用い、空気200ml/min、昇温速度10℃/min、温度範囲20~600℃の条件で質量変化を測定し、50%質量減少時の温度を測定した。
含フッ素エラストマー100質量部に対して、架橋剤1 1質量部、化合物1 15質量部を900質量部の含フッ素溶剤中で予備混合してから、60℃で含フッ素溶剤を揮発させ、オープンロールにて混練して架橋可能な含フッ素エラストマー組成物を得た。なお、表1中、含フッ素エラストマーは、CNVE(CF2=CFOCF2CF(CF3)OCF2CF2CN)を架橋基として含有するテトラフルオロエチレン(TFE)/パーフルオロメチルビニルエーテル(PMVE)からなる含フッ素エラストマー(TFE/PMVE/CNVE=59.5/39.5/1.0(モル%))、架橋剤1は2,2-ビス-[3-アミノ-4-(N-フェニルアミノ)フェニル]ヘキサフルオロプロパン、化合物1は、2,6-ビス(2-ベンゾイミダゾリル)ピリジンである。また含フッ素溶剤はR-318(ダイキン工業(株)製、主成分:C4F8Cl2)を用いた。
含フッ素エラストマー組成物の成分を表1のように変更したこと以外は実施例1と同様にして、O-リング架橋成形品、及び、比較O-リング架橋成形品を得た。圧縮永久歪の測定結果を表1に示す。なお、表1中、化合物2はペンタセン、化合物6はポリイミド粉末(UIP-S、宇部興産(株)製)である。
含フッ素エラストマー組成物の成分を表2のように変更したこと以外は実施例1と同様にして、含フッ素エラストマー組成物を得た。得られた含フッ素エラストマー組成物について、50%質量減少温度の測定を行った。結果を表2に示す。なお、表2中、化合物3は3,4,9,10-ぺリレンテトラカルボン酸ジイミド、化合物4はN,N’-ジメチルキナクリドン、化合物5はキナクリドンキノンである。表2中、含フッ素エラストマー、化合物1、化合物2及び化合物6は、表1と同様である。
含フッ素エラストマー組成物の成分を表3のように変更したこと以外は実施例1と同様にして、含フッ素エラストマー組成物を得た。実施例1と同様にして、得られた含フッ素エラストマー組成物から、O-リング架橋成形品、及び、比較O-リング架橋成形品を得た。得られたO-リング架橋成形品について、圧縮永久歪及び50%質量減少温度の測定を行った。圧縮永久歪の測定結果、50%質量減少温度の測定結果を表3に示す。なお、表3中、架橋剤2は、Si3N4である。表3中、含フッ素エラストマー、化合物1及び化合物6は、表1と同様である。
実施例3~7の含フッ素エラストマー組成物は、比較例2及び3の含フッ素エラストマー組成物と比較して、50%質量減少温度が高く、耐熱性に優れることが分かった。
実施例8のO-リング架橋成形品は、比較例4の比較O-リング架橋成形品と比較して、シール性能の指標となる圧縮永久歪特性に優れ、50%質量減少温度が高く、耐熱性に優れることが分かった。
したがって、含フッ素エラストマー組成物を本発明の構成とすることに技術的意義が存在することが確認された。
Claims (5)
- 含フッ素エラストマーは、パーフルオロエラストマーである請求項1記載の含フッ素エラストマー組成物。
- 化合物(a)は、含フッ素エラストマー100質量部に対して、0.5~100質量部含まれる請求項1又は2記載の含フッ素エラストマー組成物。
- 成形材料である請求項1、2又は3記載の含フッ素エラストマー組成物。
- 請求項1、2、3又は4記載の含フッ素エラストマー組成物から得られる成形品。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201580049095.9A CN107075219A (zh) | 2014-09-16 | 2015-09-09 | 含氟弹性体组合物和成型品 |
EP15842406.9A EP3156448B1 (en) | 2014-09-16 | 2015-09-09 | Fluoroelastomer composition and molded article |
US15/505,271 US10138352B2 (en) | 2014-09-16 | 2015-09-09 | Fluoroelastomer composition and molded article |
KR1020177009026A KR101912549B1 (ko) | 2014-09-16 | 2015-09-09 | 불소 함유 엘라스토머 조성물 및 성형품 |
JP2016548849A JP6341290B2 (ja) | 2014-09-16 | 2015-09-09 | 含フッ素エラストマー組成物および成形品 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014-187906 | 2014-09-16 | ||
JP2014187906 | 2014-09-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2016043100A1 true WO2016043100A1 (ja) | 2016-03-24 |
Family
ID=55533139
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2015/075566 WO2016043100A1 (ja) | 2014-09-16 | 2015-09-09 | 含フッ素エラストマー組成物および成形品 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10138352B2 (ja) |
EP (1) | EP3156448B1 (ja) |
JP (1) | JP6341290B2 (ja) |
KR (1) | KR101912549B1 (ja) |
CN (1) | CN107075219A (ja) |
TW (1) | TWI601777B (ja) |
WO (1) | WO2016043100A1 (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017214555A (ja) * | 2016-05-30 | 2017-12-07 | 日本バルカー工業株式会社 | パーフルオロエラストマー組成物及びシール材 |
KR20190013839A (ko) * | 2016-05-30 | 2019-02-11 | 주식회사 발카 | 퍼플루오로 엘라스토머 조성물 및 시일재 |
WO2019078238A1 (ja) * | 2017-10-18 | 2019-04-25 | ダイキン工業株式会社 | 架橋性エラストマー組成物及びフッ素ゴム成形品 |
WO2022065054A1 (ja) | 2020-09-28 | 2022-03-31 | 株式会社バルカー | エラストマー組成物、シール材およびシール材の製造方法 |
WO2022065055A1 (ja) | 2020-09-28 | 2022-03-31 | 株式会社バルカー | シール材およびシール材の製造方法 |
WO2022065056A1 (ja) | 2020-09-28 | 2022-03-31 | 株式会社バルカー | エラストマー組成物、シール材およびシール材の製造方法 |
WO2022065057A1 (ja) | 2020-09-28 | 2022-03-31 | 株式会社バルカー | エラストマー組成物、シール材およびシール材の製造方法 |
WO2022065053A1 (ja) | 2020-09-28 | 2022-03-31 | 株式会社バルカー | エラストマー組成物、シール材およびシール材の製造方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111225950A (zh) * | 2017-10-12 | 2020-06-02 | Agc株式会社 | 含氟弹性共聚物组合物、涂料、及涂装物品 |
WO2024158733A1 (en) * | 2023-01-27 | 2024-08-02 | Dupont Specialty Products Usa, Llc | Fluoropolymer compositions and articles made therefrom |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56166251A (en) * | 1980-04-23 | 1981-12-21 | Du Pont | Fluoroelastomer composition |
WO2004094527A1 (ja) * | 2003-04-22 | 2004-11-04 | Daikin Industries Ltd. | プラズマ老化防止効果に優れた含フッ素エラストマー組成物およびその成形品 |
JP2013216771A (ja) * | 2012-04-09 | 2013-10-24 | Unimatec Co Ltd | パーフルオロエラストマー組成物 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61254A (ja) * | 1984-06-13 | 1986-01-06 | Hitachi Cable Ltd | 含ふつ素エラストマ組成物 |
US5187222A (en) | 1989-02-22 | 1993-02-16 | Nippon Moktron Limited | Peroxide-vulcanizable, fluorine-containing elastomer composition |
JP2783576B2 (ja) | 1989-02-22 | 1998-08-06 | 日本メクトロン株式会社 | パーオキサイド加硫可能な含フッ素エラストマー組成物 |
JP2858198B2 (ja) | 1993-04-19 | 1999-02-17 | 三菱電線工業株式会社 | 半導体製造装置用シール |
US5451655A (en) * | 1994-05-27 | 1995-09-19 | International Business Machines Corporation | Process for making thermostable coating materials |
JP2000309704A (ja) | 1999-04-23 | 2000-11-07 | Daikin Ind Ltd | 架橋性エラストマー用フィラーおよびそれを含有する架橋性エラストマー組成物 |
JP3303915B2 (ja) | 1999-11-04 | 2002-07-22 | ダイキン工業株式会社 | 半導体製造装置用エラストマー成形品および架橋性フッ素系エラストマー組成物 |
-
2015
- 2015-09-09 WO PCT/JP2015/075566 patent/WO2016043100A1/ja active Application Filing
- 2015-09-09 JP JP2016548849A patent/JP6341290B2/ja active Active
- 2015-09-09 KR KR1020177009026A patent/KR101912549B1/ko active IP Right Grant
- 2015-09-09 EP EP15842406.9A patent/EP3156448B1/en active Active
- 2015-09-09 US US15/505,271 patent/US10138352B2/en active Active
- 2015-09-09 CN CN201580049095.9A patent/CN107075219A/zh active Pending
- 2015-09-14 TW TW104130304A patent/TWI601777B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56166251A (en) * | 1980-04-23 | 1981-12-21 | Du Pont | Fluoroelastomer composition |
WO2004094527A1 (ja) * | 2003-04-22 | 2004-11-04 | Daikin Industries Ltd. | プラズマ老化防止効果に優れた含フッ素エラストマー組成物およびその成形品 |
JP2013216771A (ja) * | 2012-04-09 | 2013-10-24 | Unimatec Co Ltd | パーフルオロエラストマー組成物 |
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11118045B2 (en) | 2016-05-30 | 2021-09-14 | Valqua, Ltd. | Perfluoroelastomer composition and sealing material |
WO2017208927A1 (ja) * | 2016-05-30 | 2017-12-07 | 日本バルカー工業株式会社 | パーフルオロエラストマー組成物及びシール材 |
CN109153835A (zh) * | 2016-05-30 | 2019-01-04 | 日本华尔卡工业株式会社 | 全氟弹性体组合物及密封材料 |
KR20190013839A (ko) * | 2016-05-30 | 2019-02-11 | 주식회사 발카 | 퍼플루오로 엘라스토머 조성물 및 시일재 |
KR20190013809A (ko) * | 2016-05-30 | 2019-02-11 | 주식회사 발카 | 퍼플루오로 엘라스토머 조성물 및 시일재 |
JP2017214555A (ja) * | 2016-05-30 | 2017-12-07 | 日本バルカー工業株式会社 | パーフルオロエラストマー組成物及びシール材 |
EP3467025A4 (en) * | 2016-05-30 | 2020-02-19 | Valqua, Ltd. | PERFLUORELASTOMER COMPOSITION AND SEALING MATERIAL |
KR102354539B1 (ko) * | 2016-05-30 | 2022-01-21 | 주식회사 발카 | 퍼플루오로 엘라스토머 조성물 및 시일재 |
KR102342909B1 (ko) * | 2016-05-30 | 2021-12-23 | 주식회사 발카 | 퍼플루오로 엘라스토머 조성물 및 시일재 |
CN109153835B (zh) * | 2016-05-30 | 2021-04-06 | 株式会社华尔卡 | 全氟弹性体组合物及密封材料 |
TWI731977B (zh) * | 2016-05-30 | 2021-07-01 | 日商華爾卡股份有限公司 | 全氟彈性體組合物及密封材 |
WO2019078238A1 (ja) * | 2017-10-18 | 2019-04-25 | ダイキン工業株式会社 | 架橋性エラストマー組成物及びフッ素ゴム成形品 |
JPWO2019078238A1 (ja) * | 2017-10-18 | 2020-07-02 | ダイキン工業株式会社 | 架橋性エラストマー組成物及びフッ素ゴム成形品 |
CN111212874A (zh) * | 2017-10-18 | 2020-05-29 | 大金工业株式会社 | 交联性弹性体组合物和氟橡胶成型品 |
CN111212874B (zh) * | 2017-10-18 | 2022-03-04 | 大金工业株式会社 | 交联性弹性体组合物和氟橡胶成型品 |
US11753523B2 (en) | 2017-10-18 | 2023-09-12 | Daikin Industries, Ltd. | Crosslinkable elastomer composition and fluororubber molded article |
WO2022065054A1 (ja) | 2020-09-28 | 2022-03-31 | 株式会社バルカー | エラストマー組成物、シール材およびシール材の製造方法 |
WO2022065055A1 (ja) | 2020-09-28 | 2022-03-31 | 株式会社バルカー | シール材およびシール材の製造方法 |
WO2022065056A1 (ja) | 2020-09-28 | 2022-03-31 | 株式会社バルカー | エラストマー組成物、シール材およびシール材の製造方法 |
WO2022065057A1 (ja) | 2020-09-28 | 2022-03-31 | 株式会社バルカー | エラストマー組成物、シール材およびシール材の製造方法 |
WO2022065053A1 (ja) | 2020-09-28 | 2022-03-31 | 株式会社バルカー | エラストマー組成物、シール材およびシール材の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN107075219A (zh) | 2017-08-18 |
TWI601777B (zh) | 2017-10-11 |
EP3156448B1 (en) | 2020-11-11 |
TW201623411A (zh) | 2016-07-01 |
US10138352B2 (en) | 2018-11-27 |
JPWO2016043100A1 (ja) | 2017-04-27 |
EP3156448A4 (en) | 2018-02-07 |
KR101912549B1 (ko) | 2018-10-26 |
KR20170049561A (ko) | 2017-05-10 |
JP6341290B2 (ja) | 2018-06-13 |
US20170283585A1 (en) | 2017-10-05 |
EP3156448A1 (en) | 2017-04-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6341290B2 (ja) | 含フッ素エラストマー組成物および成形品 | |
JP5487584B2 (ja) | 架橋性エラストマー組成物および該組成物からなる成形品 | |
JP5553320B2 (ja) | 架橋性含フッ素エラストマー組成物および該組成物から作製された成形品 | |
JP6713600B2 (ja) | 組成物および成形品 | |
WO2016204272A1 (ja) | 含フッ素ポリマーからなる組成物及び成形品 | |
JP7206519B2 (ja) | 含フッ素ポリマーを含有する組成物および成形品 | |
JP6547233B2 (ja) | 組成物および成形品 | |
JP7486125B2 (ja) | フルオロエラストマー組成物及びその成形品 | |
US20220227909A1 (en) | Composition containing fluorine-containing polymer and crosslinked article | |
JP6789521B2 (ja) | デンドリマー、組成物及び成型品 | |
US12091537B2 (en) | Composition and molded article containing fluorine-containing polymer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 15842406 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2016548849 Country of ref document: JP Kind code of ref document: A |
|
REEP | Request for entry into the european phase |
Ref document number: 2015842406 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2015842406 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 15505271 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
ENP | Entry into the national phase |
Ref document number: 20177009026 Country of ref document: KR Kind code of ref document: A |