WO2016031364A1 - 部品の製造方法及びそれを用いた製造装置、容積測定方法 - Google Patents
部品の製造方法及びそれを用いた製造装置、容積測定方法 Download PDFInfo
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- WO2016031364A1 WO2016031364A1 PCT/JP2015/067879 JP2015067879W WO2016031364A1 WO 2016031364 A1 WO2016031364 A1 WO 2016031364A1 JP 2015067879 W JP2015067879 W JP 2015067879W WO 2016031364 A1 WO2016031364 A1 WO 2016031364A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
Definitions
- the present invention relates to a part manufacturing method, a manufacturing apparatus using the same, and a volume measuring method.
- the object to be measured is irradiated with a linear slit light, and a light cutting line of the object to be measured is imaged from a position separated by a predetermined distance in the longitudinal direction and the vertical direction of the slit light.
- a volume measuring device that calculates the cross-sectional area of the object to be measured, moves the slit light relatively in the direction perpendicular to the longitudinal direction, and accumulates the cross-sectional area obtained from the optical cutting line to measure the volume of the object to be measured.
- a master clock generator for generating a master clock after being supplied with a measurement start signal, causing the slit light to move relative to the master clock, and calculating the cross-sectional area based on the master clock
- a volume measuring device is described that is configured to capture a light cutting line for the purpose.
- a moving table that moves a measurement object measurement object in a predetermined direction by a predetermined distance, a slit light source that irradiates the measurement object with slit light, and slit light output from the slit light source strikes the object to be measured.
- a camera that captures a slit image of the time, and an image processing means having a function of performing image processing of three-dimensional data from the slit image obtained from the camera, calculating a volume for each slit image, and integrating these to obtain the entire volume
- a non-contact volume measuring device constituting a non-contact volume measuring device.
- an object of the present invention is to provide a method for manufacturing a highly accurate component.
- a manufacturing method of the present invention includes a processing step for processing a part, an inspection step for measuring and calculating the volume of the part discharged from the processing step by optical means, and a part obtained by the inspection step.
- An evaluation step that compares the volume value of the product with a preset reference value to determine the quality of the component, a branch step that selects and branches the component based on the evaluation result of the evaluation step, and a component that is branched by the branch step A transport step.
- Example 1 of this invention It is a schematic diagram showing the height reference
- Embodiment 1 of the present invention will be described with reference to FIGS.
- FIG. 1 shows a configuration diagram of the piston volume inspection device of the present embodiment.
- the shape of the measurement surface 101 on the upper surface of the sample 100 is measured by non-contact type distance sensors 110a to 110c using three lasers, and the distance sensor is rotated while the sample is rotated by the rotary stage 120.
- 110a to 110c are scanned in the x-axis direction by the x-axis stages 130a and 130b to measure the entire measurement surface 101 in a spiral shape.
- the x-axis stage is composed of an x-axis stage master axis 130a and an x-axis stage slave axis 130b, and these two axes are moved simultaneously in synchronization, so that the plate 131 on which the distance sensors 110a to 110c are mounted can be stabilized. Can be moved.
- the distance sensors 110a to 110c are appropriately arranged to measure an arbitrary shape of the measurement surface with high accuracy. The sensor arrangement optimization will be described later.
- FIG. 2 schematically shows a trajectory 105 of measurement points when the measurement positions of the distance sensors 110a to 110c are scanned from the center of the measurement surface 101 toward the outer periphery by moving the X axis.
- a cylinder mechanism 121 that holds and holds the sample 100 from the outer periphery
- a distance sensor 110a to 110c and a z-axis stage that adjusts the height of the sample 100
- a side distance sensor 140 that measures the center positional relationship between the sample 100 and the rotary stage 120. It is equipped with.
- the distance is continuously measured by the side distance sensor 140 while the rotation stage 120 is rotated, and the distance fluctuation is measured, whereby the rotation stage 120 is 1
- the distance fluctuates sinusoidally during rotation.
- the amount of deviation between the sample center and the rotation center of the rotary stage 120 can be calculated from the amplitude of this sine wave, and the direction of deviation can be calculated from the phase, and the positional relationship between the sample center and the rotation center of the rotary stage 120 can be grasped before measurement. Can do.
- the sample center and the rotation center are aligned in advance from the measurement result, so that the effect of reducing the vibration generated in the entire apparatus due to the rotation can be obtained.
- the z-axis stage is configured so that the two axes of the z-axis stage master axis 150a and the z-axis stage slave axis 150b move simultaneously in synchronization.
- a hole is made in the plate 131 so that the laser from the distance sensors 110a to 110c reaches the measurement surface 101.
- the rotary stage 120, the x-axis stages 130a and 130b, and the z-axis stages 150a and 150b are driven by a stage driver 160, and the control unit 170 is used to rotate the rotary stage 120, the x-axis stages 130a and 130b, the distance sensors 110a to 110c, The synchronization detection of the distance sensor 140 is performed.
- the signal processing unit 180 automatically determines the quality of the sample 100.
- the signal processing unit 180 includes a shape calculation unit 181, a volume calculation unit 182, and a volume pass / fail determination unit 183.
- the locus as shown in FIG. 2 is drawn by rotating and moving the stage in the X-axis direction.
- the present invention is not necessarily limited to the method of moving the stage.
- the distance sensor is rotated and moved in the X-axis direction. This can also be realized by moving to.
- the movement in the Y-axis direction is adopted instead of rotation, and the entire measurement surface is covered by the combination of movement in the X-axis direction and movement in the Y-axis direction. It is also possible to scan.
- FIG. 3 shows an inspection flow.
- the sample is placed on the rotary stage (S100), and the sample placed in S100 is held down and fixed by the cylinder mechanism 121 (S101).
- the height is adjusted by the z stage (S102). If the sample height information is known, an appropriate z-axis stage position can be automatically calculated.
- the measurement surface is measured by the distance sensor, the position data is measured from the stage coordinates, and the distance data is measured from the distance sensor (S103).
- the measurement point group distributed in the three-dimensional coordinate system is calculated, and the three distance sensors
- the shape of the measurement surface is calculated from the measurement point group (S104). From the shape calculated in S104, the volume of the measurement surface is calculated using a separately provided height reference value (S105), and S100-S105 using the calculated volume and the volume calculated from the design data or a non-defective sample.
- FIG. 4 is a schematic diagram showing the laser incident directions of the measurement surface and the distance sensor.
- the distance sensors 110a to 110c shown in FIG. 1 need to be appropriately arranged so that an arbitrary shape of the measurement surface 101 can be measured.
- the measurement accuracy of the distance sensor using a non-contact laser greatly depends on the inclination of the measurement surface. As shown in FIG.
- FIG. 5 shows an example of the dependence of the measurement error of the distance sensor on ⁇ , where ⁇ is the absolute value of the angle formed by the normal vector 102 of the measurement surface 101 and the incident laser direction vector 112 of the distance sensor.
- ⁇ is the absolute value of the angle formed by the normal vector 102 of the measurement surface 101 and the incident laser direction vector 112 of the distance sensor.
- the measurement error tends to increase as ⁇ increases. Therefore, the ⁇ dependence of the error shown in FIG. 5 is acquired as basic data in advance, and the maximum value of ⁇ that becomes a judgment material for determining the device configuration is set by setting the maximum value of the error necessary for measurement. I can decide.
- the orientations ⁇ s and ⁇ s of the measurement surface include all surface directions of 0 ⁇ s ⁇ 90 and 0 ⁇ s ⁇ 360.
- ⁇ ⁇ th is a measurable range.
- the setting position of the distance sensor at that time is set as the optimization condition.
- 120 ° or 240 ° Is done.
- a distance sensor using a laser irradiates a measurement sample with a laser oscillated from a distance sensor, receives reflection and scattered light from a measurement surface, and measures a distance from the phase and intensity information. Therefore, in the case of using a plurality of distance sensors, if the reflected or scattered light from the measurement surface generated by the incident lasers 113a to 113c of a certain distance sensor is received by another distance sensor, the distance measurement accuracy may decrease. . This decrease in measurement accuracy can be solved by devising the device configuration so that the laser beams of other distance sensors do not enter the light receiving surfaces of the distance sensors. An example is shown in FIG.
- the apparatus configuration of the three distance sensors described above is assumed, and the sample is irradiated with the laser from each distance sensor.
- the light receiving surface of each distance sensor is coaxial with the incident laser.
- Za is the lowest z-axis point at the measurement location on the measurement surface.
- the z-axis coordinate of the laser intersection from the three distance sensors is assumed to be Zb.
- ⁇ represents the inclination of the distance sensor from the z-axis, and in this example, all three distance sensors are 45 °.
- ⁇ represents the inclination of the distance sensor from the z-axis, and in this example, all three distance sensors are 45 °.
- the lasers intersect at a position where z is smaller than the measurement surface.
- the laser spot on the measurement surface can be separated in the same way.
- a plurality of distance sensors can be used at the same time without lowering the shape measurement accuracy by separating a certain distance or more so that the laser spot positions of the distance sensors do not overlap.
- the distance d between the spots is appropriately determined in consideration of the distance sensor to be used and the surface state of the measurement target. For example, when more scattered light is generated, d needs to be set larger.
- FIG. 17 shows an apparatus configuration in which polarizing plates 114a and 114b are arranged in front of the distance sensor as a measure for further reducing the influence of noise from other lasers.
- the polarizing plate 114a is set to an orientation that transmits the incident laser 113a of the distance sensor. Reflected and scattered light from the sample is transmitted through the polarizing plate 114a in order to maintain the same polarization state, and the distance is measured.
- the orientation of the polarizing plate 114b is set according to the incident laser 113b.
- the incident lasers 113a and 113b have different incident directions, the reflected and scattered light by the incident laser 113a is reduced by the polarizing plate 114b.
- the reflected and scattered light by the incident laser 113b is reduced by the polarizing plate 114a. Is done. As described above, it is possible to suppress a decrease in accuracy by reducing the laser light caused by another distance sensor with the polarizing plate. (Signal processing part) The distance measurement result by the distance sensor is subjected to various processes in the signal processing unit, and is finally automatically performed until the quality of the sample is finally determined.
- the signal processing unit is a shape calculation unit that calculates the shape from the stage position information, the material measured by the distance sensor, and the distance information between the distance sensors, the shape calculated by the shape calculation unit, and an arbitrarily set height
- a volume calculation unit that calculates the volume on the piston crown surface using a reference and a quality determination unit that determines the quality of the volume calculated by the volume calculation unit.
- FIG. 10 shows a flow of the shape calculation unit
- FIG. 11 shows a data flow diagram at the time of shape data calculation. As shown in FIG.
- each measurement point is converted into the xyz coordinate system from distance data 301 from each distance sensor, coordinate data 302 of the x-axis stage and ⁇ stage, and calibration data 303 representing the positional relationship between the distance sensor and the stage.
- shape data (point cloud) 310 is calculated (S201a to S201c).
- noise components such as outliers are removed by statistical processing (S202a to S202c).
- points that are assumed to be low in accuracy when the angle ⁇ between the laser incident direction of the distance sensor and the direction of the measurement surface is equal to or greater than the threshold are removed (S203a to S203c).
- FIG. 12 shows a conceptual diagram of processing in the shape calculation unit.
- the point cloud is represented in two dimensions.
- a measurement point is represented by a point with respect to the measurement surface 101 represented by a solid line.
- the normal direction of each measurement point is estimated.
- An area is set in the three-dimensional space with the measurement point of interest as the center, and the normal is estimated from the statistical distribution of a plurality of points included in the area.
- Principal component analysis (PRINCIPAL COMPONENT ANALYSIS, PCA) is used to estimate the hot spring.
- the centroid of the set of measurement points in the set area is calculated, and a variance-covariance matrix is generated from the difference between the centroid and each point.
- This variance-covariance matrix is a 3 ⁇ 3 matrix and has three eigenvalues.
- the measurement points form a plane, and one eigenvalue among the three eigenvalues is smaller than the other two eigenvalues.
- the direction of the small eigenvalue indicates the normal direction of the measurement point set in the region. This normal direction is taken as the normal vector 102 of the measurement point to which attention is paid.
- the area may be set so that the number of points is constant, or may be an area having a predetermined shape and volume. If the incident laser direction of the distance sensor is known, the shape data from which the unsuitable points are removed can be obtained by using the surface directions of the respective points obtained from the principal component analysis described above.
- the point cloud representing each shape data calculated in S203a to S203c is integrated by positioning using ICP or the like to obtain integrated shape data (S204), and the integrated shape data calculated in S204 has a density depending on the location. May vary greatly. In particular, since the flat portion has a measured value in any distance sensor, the density tends to be higher than that of the inclined portion. The point cloud density is higher than necessary, and the subsequent processing takes time. Therefore, the density reduction process is performed, the point cloud density at each location is leveled (S205), and the final high-precision shape data is obtained. obtain.
- the calibration data 303 representing the positional relationship between the distance sensor and the stage.
- Measurement is performed using a reference sample with a known reference plane (a constant inclination in the plane) 401 and a reference height 402 as shown in FIG. 13, and the positional relationship between the distance sensor and the stage is corrected.
- the distance sensor calibration data ⁇ l, ⁇ l, l such that the measured value becomes the design value of the reference sample is calculated for each distance sensor.
- the volume calculation unit will be described with reference to FIG.
- a volume 313 of an area composed of the high-accuracy shape data obtained by the shape calculation unit and an arbitrary height reference 312 is calculated and set as the volume of the upper surface of the sample.
- the height reference 312 is a fixed height from the center position of the piston pin hole, or a part on the crown surface is the height reference 312 b.
- a volume inspection with higher accuracy can be performed by creating the height reference 312b in advance at the time of manufacture.
- the pass / fail judgment unit judges pass / fail of the volume calculated by the volume calculation unit. For example, a threshold value is set for a design value or a volume obtained from a non-defective product, and a defective product is set above the threshold value and a non-defective product is set below the threshold value.
- the defect value continues from the tendency of the pass / fail judgment, feedback to the manufacturing process can be performed.
- the sample is a cast product, it leads to early detection of mold wear and defects.
- the high-accuracy shape data calculated by the shape calculation unit with the design shape or the non-defective shape, it becomes possible to accurately specify the wear of the mold, the amount of defects, and the part with higher accuracy.
- FIG. 16 shows a processing flow of the pass / fail judgment unit.
- S401 to S404 are the same processing as S101 to S104 shown in FIG.
- the shape data calculated in S404 is compared with a design shape (CAD: Computer Aided Design) and a non-defective shape, a threshold is set for the difference, and pass / fail judgment is performed.
- CAD Computer Aided Design
- a threshold is set for the difference, and pass / fail judgment is performed. For example, there are a standard deviation, a maximum deviation amount, an average deviation amount, and a deviation amount index calculated by weighting important points.
- Example 2 of the present invention will be described with reference to FIG. In FIG. 1 showing the first embodiment, three distance sensors are mounted, but in FIG. 18 showing the present embodiment, there are two distance sensors.
- the scanning distance of the x-axis stage 130 was from the sample center to the outer periphery.
- a combination of three distance sensors is necessary to measure an arbitrary shape of the measurement surface 101 with high accuracy.
- the arbitrary shape of the measurement surface 101 can be measured by the two distance sensors by scanning the scanning distance of the x-axis stage 130 by the sample diameter from the outer periphery passing through the sample center to the outer periphery.
- the apparatus configuration is simpler than the first embodiment, and the cost can be reduced.
- the measurement time is doubled, it is desirable to use the configuration of the first embodiment when performing high-speed inspection.
- positioning of the process sensor in the case of using two distance sensors is not limited to FIG. 18, It is also possible to arrange
- FIG. 19 shows a process of inspecting the piston processed by the volume inspection unit arranged in the piston manufacturing line.
- Piston processing unit 500 that processes the piston 1
- a transport unit 510 that transports the processed piston 1
- a volume inspection unit 520 that inspects the volume of the piston
- a display unit 530 that displays a quality determination result by the volume inspection unit, and a quality determination result
- the branching part 540 that branches the conveyance path of the non-defective piston 1a and the non-defective piston 1b
- the non-defective line 510a that conveys the non-defective piston 1b that passes the inspection
- the piston 1 is processed by the piston processing unit 500 including the casting process 501 and the machining process 502, and an identifiable number such as a piston type and a manufacturing number is given, and the information is marked on the piston 1 by engraving or the like (S500).
- the piston 1 processed in S500 is transported by the transport unit 510 to the volume inspection unit 520 (S501).
- the piston 1 conveyed in S501 is read by the information reading unit 521 to read the type, serial number, etc. of the piston 1 (S502), and then the three distance sensors 110a, 110b, 110c and the rotation / translation stage unit.
- the display unit 530 displays the type 531 of the piston 1, the serial number 532, the reference volume value 533, the measured volume value 534, the difference between the reference volume value and the measured volume value, and the quality determination result 535.
- the piston 1 determined to be good or bad by the signal processing unit 180 is branched and conveyed by the branching unit 540 to the non-defective piston 1a and the defective piston 1b.
- the defective piston 1b is conveyed to the defective product line 510b (S506), and it is determined whether or not the defective portion is to be additionally processed / corrected (S507). If it is not carried out, it is discarded as it is (S509). Judgment whether to perform additional machining / correction or to discard it as it is depends on the result of volume inspection. For example, when the volume is small, it is considered that the processing is insufficient. In addition, it is possible to estimate defects in the processing apparatus from the frequency and tendency of defective products.
- the piston 1 determined to be non-defective is conveyed to the non-defective product line 510a as the non-defective piston 1a (S510), and packed and shipped (S511).
- the history of the number and type of defects is stored, and when the number of specific defects exceeds a certain ratio, the processing conditions of the casting process 501 and the machining process 502 of the processing unit 500 are changed or processed. It is also possible to ensure the quality of the processed piston by stopping.
- the pass / fail judgment is also made by comparing the measured piston shape with a reference piston shape such as a result of measuring a piston that is known as design information or a non-defective product. It can be performed.
- a reference piston shape such as a result of measuring a piston that is known as design information or a non-defective product. It can be performed.
- the size to be managed, the measured shape and the reference shape are compared, and a threshold is set for the difference location and the magnitude of the deviation to make the pass / fail judgment.
- an integrated index obtained by weighting and adding them may be set, and threshold processing may be performed on the integrated index.
- the display unit 530 displays the dimensions 536 and 537, the shape comparison result 538 and the color bar 538a indicating the magnitude of the deviation, the standard deviation 539 of the comparison result, and the like.
- the problem process can be identified, the process condition can be automatically changed, or the production line can be stopped.
- the measured defects are classified according to dimensions, aspect ratio, depth, defect volume, occurrence location, and the like.
- the defect classification result where the problem occurs in the machining process is estimated from past machining data or physical process characteristics, and an improvement or stop command is issued accordingly.
- the past data is analyzed, the types of defects that occurred and the processes that actually caused problems are stored as a table, and the problem processes are specified according to the defects that have occurred.
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Abstract
Description
特許文献2には、測定装置測定物を所定方向に所定距離移動する移動台と、前記測定物にスリット光を照射するスリット光源と、このスリット光源から出力されたスリット光が被測定物に当たっている時のスリット画像を撮影するカメラと、前記カメラから得られるスリット画像から3次元データを画像処理し1スリット画像毎の容積を演算し、これらを積分して容積全体を求める機能を有する画像処理手段とから非接触容積測定装置を構成されている非接触容積測定装置について記載されている。
本発明の他の目的、特徴及び利点は添付図面に関する以下の本発明の実施例の記載から明らかになるであろう。
(距離センサ配置最適化)
図4に計測面と距離センサのレーザ入射方向を表す模式図を示す。図1に示す距離センサ110a~110cは、計測面101の任意形状が計測できるよう適切に配置する必要がある。ここで、非接触のレーザを利用した距離センサの計測精度は、計測面の傾きに大きく依存する。図4に示すように、計測面の法線ベクトル102の向きをθs、φs、距離センサの入射レーザ方向ベクトル112の向きをθl、φlと表すこととする。また、計測される距離をlとする。計測面101の法線ベクトル102と距離センサの入射レーザ方向ベクトル112のなす角の絶対値をαとし、距離センサの計測誤差のα依存性の一例を図5に示す。一般に計測誤差はαが大きくなるにつれて大きくなる傾向がある。したがって、事前に、図5に示す誤差のα依存性を基礎データとして取得しておき、計測に必要な誤差の最大値を設定することで、装置構成を決める判断材料となるαの最大値を決めることができる。
(信号処理部)
距離センサによる距離計測結果は、信号処理部にて各種処理が施され、最終的に試料の良否判定まで自動で行う。ここで、信号処理部は、ステージ位置情報と距離センサにて計測した資料と距離センサ間の距離情報より形状を算出する形状算出部、形状算出部にて算出した形状と任意に設定した高さ基準を用いてピストン冠面上の容積を算出する容積算出部、容積算出部にて算出した容積の良否判定を行う良否判定部からなる。以下、各部に関して詳細に説明する。
(形状算出部)
図10に形状算出部のフローを示し、図11に形状データ算出時のデータフロー図を示す。図11のように各距離センサからの距離データ301、x軸ステージとθステージの座標データ302、そして距離センサとステージの位置関係を表す較正データ303より、xyz座標系に各計測点を変換し、形状データ(点群)310を算出する(S201a~S201c)。S201a~S201cにて算出した各形状データに対し、はずれ値などのノイズ成分を統計的処理により除去する(S202a~S202c)。S202a~S202cにノイズ除去された形状データに対し、距離センサのレーザ入射方向と計測面の方向のなす角αが閾値以上となる精度が低いと想定される点は除去する(S203a~S203c)。
(容積算出部)
図14を参照しながら容積算出部を説明する。形状算出部で得た高精度形状データと任意の高さ基準312とで構成される領域の容積313を算出し、試料上面の容積とする。このとき高さ基準312は、試料100が図15に示すピストンの場合、ピストンピン穴の中心位置から一定の高さを高さ基準312aとする、もしくは冠面上の一部を高さ基準312bとする方法がある。冠面上に高さ基準312bを用いる場合は、あらかじめ高さ基準312bを製造時に作りこんでおくとより高精度な容積検査が可能となる。
(良否判定部)
良否判定部では、容積算出部で算出した容積の良否を判定する。例えば設計値、もしくは良品より求めた容積に対して、閾値を設定し、閾値以上は不良品、閾値以下は良品とする。また、良否判定の傾向から、不良値が続く場合には、製造プロセスへのフィードバックを行うこともできる。試料が鋳物製品の場合は金型の摩耗や、欠損の早期発見に繋がる。さらに、形状算出部にて算出した高精度形状データを設計形状もしくは良品形状と比較することで、より高精度に金型の摩耗、欠損の量、部位を正確に特定することが可能となる。
また、不良の個数、種類の履歴を保存しておき、特定の不良数が一定割合を超えた場合に、加工部500の鋳造工程501、機械加工工程502の加工条件を変更する、もしくは加工を停止することで加工されるピストンの品質確保を行うことも可能である。
上記記載は実施例についてなされたが、本発明はそれに限らず、本発明の精神と添付の請求の範囲の範囲内で種々の変更および修正をすることができることは当業者に明らかである。
1a 良品ピストン
1b 不良品ピストン
100 試料
101 計測面
102 法線ベクトル
105 軌跡
110a~110c 距離センサ
112 入射レーザ方向ベクトル
113a~113c 入射レーザ
114a、114b 偏光板
120 回転ステージ
121 シリンダ機構
130a x軸ステージマスター軸
130b x軸ステージスレーブ軸
131 プレート
140 側面用距離センサ
150a z軸ステージマスター軸
150b z軸ステージスレーブ軸
160 ステージドライバ
170 制御部
180 信号処理部
181 形状算出部
182 容積算出部
183 良否判定部
200 計測可能領域
301 距離データ
302 座標データ
303 較正データ
310 形状データ
311 高精度形状データ
312、312a、312b 高さ基準
313 容積
401 基準平面
402 基準高さ
500 ピストン加工部
501 鋳造工程
502 機械加工工程
510 搬送部
510a 良品ライン
510b 不良品ライン
520 容積検査部
521 情報読み取り部
530 表示部
531 種類
532 製造番号
533 基準容積値
534 計測容積値
535 基準容積値と計測容積値との差分
536,537 寸法
538 形状比較結果
538a 偏差の大きさを表すカラーバー
539 比較結果の標準偏差
540 分岐部
Claims (14)
- 所定の空間容積を有する部品の製造方法であって、
部品を加工する加工ステップと、
前記加工ステップから排出された部品の容積を光学的手段で測定し算出する検査ステップと、
前記検査ステップで得た部品の容積値とあらかじめ設定した基準値とを比較し部品の品質を判定する評価ステップと、
前記評価ステップの評価結果に基づき部品を選別し分岐させる分岐ステップと、
前記分岐ステップにより分岐された部品を搬送する搬送ステップと、
を備えることを特徴とする空間容積を有する部品の製造方法。 - 請求項1記載の製造方法であって、
前記検査ステップは、光学的手段による複数の距離センサにより前記部品との距離を計測するステップと、
少なくとも該計測した距離データ、前記走査部の位置情報、前記距離センサと前記走査部との相対位置データを含むデータ群から部品形状の3次元分布を算出するステップと、
前記距離センサの方向と前記データ群から算出された計測面の方向との成す角が所定値以上となる計測点を除いた測定点群から部品の形状を算出するステップと、
を備えた製造方法。 - 請求項2に記載の製造方法であって、
前記算出された形状データのうち、他の計測点の形状データとの差が所定値以上となる計測点の形状データを形状算出の基礎データから除外して形状を算出することを特徴とする製造方法。 - 請求項2又は3のいずれかに記載の製造方法であって、
各距離センサから得た形状データを統合し、該統合された形状データの計測点群の密度を平準化することを特徴とする製造方法。 - 所定の空間容積を有する部品の製造装置であって、
部品を加工する加工部と、
前記加工部から排出された部品の容積を光学的手段で測定し算出する検査部と、
前記検査部で得た部品の容積知とあらかじめ設定した基準値とを比較し部品の品質を判定する評価部と、
前記評価部の評価結果に基づき部品を選別し分岐させる分岐部と、
前記分岐部により分岐された部品を搬送する搬送部と、
を備えることを特徴とする空間容積を有する部品の製造装置。 - 請求項5記載の製造装置であって、
前記検査部は、光学的手段による複数の距離センサを備える距離計測部と、
前記部品と前記距離計測部との少なくとも一方を走査する走査部と、
少なくとも前記距離計測部にて取得した距離データ、前記走査部の位置情報データ、前記距離センサと前記走査部との相対位置データを含むデータ群から部品形状の3次元分布を算出し、前記距離センサの方向と前記データ群から算出された計測面の方向との成す角が所定値以上となる計測点を除いた測定点群から部品の形状を算出する形状算出部と、
を備えることを特徴とする製造装置。 - 請求項6記載の製造装置であって、
更に前記形状算出部は、前記算出された形状データのうち、他の計測点の形状データとの差が所定値以上となる計測点の形状データを形状算出の基礎データから除外して形状を算出することを特徴とする製造装置。 - 請求項6又は7いずれかに記載の製造装置であって、
更に、前記部品の中心と回転中心を算出するための距離計測センサを備えることを特徴とする製造装置。 - 請求項6乃至8のいずれかに記載の製造装置であって、
更に前記形状算出部は、各距離センサから得た形状データを統合し、該統合された形状データの計測点群の密度を平準化することを特徴とする製造装置。 - 請求項6乃至9のいずれかに記載の製造装置であって、
前記評価部は、前記形状算出部で算出した形状と所定の基準高さとで囲まれた領域の容積を算出し、該算出された容積と設計値との差が所定の値以上である場合には不良品であると判定することを特徴とする製造装置。 - 請求項10記載の製造装置であって、更に、
前記判定部による判定結果に基づき、不良品の割合が一定値以上となった場合に、製造工程の条件変更を自動で行うか、もしくは製造ラインを停止することを特徴とする製造装置。 - 請求項5乃至11のいずれか記載の製造装置であって、
前記部品は、ピストンであることを特徴とする製造装置。 - 請求項5乃至12のいずれか記載の製造装置であって、
前記加工部は、鋳造、又は機械加工を行うことを特徴とする製造装置。 - 光学的手段による複数の距離センサにより前記試料との距離を計測するステップと、
少なくとも該計測した距離データ、前記走査部の位置情報、前記距離センサと前記走査部との相対位置データを含むデータ群から試料形状の3次元分布を算出するステップと、
前記距離センサの方向と前記データ群から算出された計測面の方向との成す角が所定値以上となる計測点を除いた測定点群から試料の形状を算出するステップと、
を備えた容積測定方法。
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JP2018141759A (ja) * | 2017-02-28 | 2018-09-13 | 国立研究開発法人理化学研究所 | 点群データからの基準平面生成方法、及び装置 |
JP2020085643A (ja) * | 2018-11-26 | 2020-06-04 | 日立オートモティブシステムズ株式会社 | 表面測定装置、表面測定方法及び円形の被測定面を有する物体の表面測定方法 |
JP2020173218A (ja) * | 2019-04-12 | 2020-10-22 | 日立オートモティブシステムズ株式会社 | 表面検査装置および表面検査方法 |
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KR102149105B1 (ko) * | 2019-09-18 | 2020-08-27 | 세종대학교산학협력단 | 혼합현실 기반 3차원 스케치 장치 및 방법 |
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JP7415036B2 (ja) | 2020-03-19 | 2024-01-16 | 智美康民(珠海)健康科技有限公司 | ツールヘッドの位置姿勢の調整方法、装置及び可読記憶媒体 |
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