WO2016017847A1 - Appareil de génération de rayons x mous à plage antistatique améliorée et à fonction de dissipation de chaleur - Google Patents

Appareil de génération de rayons x mous à plage antistatique améliorée et à fonction de dissipation de chaleur Download PDF

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Publication number
WO2016017847A1
WO2016017847A1 PCT/KR2014/007434 KR2014007434W WO2016017847A1 WO 2016017847 A1 WO2016017847 A1 WO 2016017847A1 KR 2014007434 W KR2014007434 W KR 2014007434W WO 2016017847 A1 WO2016017847 A1 WO 2016017847A1
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WO
WIPO (PCT)
Prior art keywords
soft
beryllium window
ray
bulb
rays
Prior art date
Application number
PCT/KR2014/007434
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English (en)
Korean (ko)
Inventor
박래준
이상석
박태영
Original Assignee
주식회사엑스엘
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Application filed by 주식회사엑스엘 filed Critical 주식회사엑스엘
Publication of WO2016017847A1 publication Critical patent/WO2016017847A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices

Definitions

  • the present invention relates to a soft x-ray generator that removes electric charges present in an antistatic object, and more particularly, to a soft x-ray generator that has improved static elimination range and heat dissipation function.
  • the soft x-ray generator is a static eliminator used to prevent electrostatic discharge.
  • the positive x-rays generate positive and negative gas ions to neutralize the charged object by irradiation of the generated soft x-rays.
  • the area of the antistatic object such as the enlargement of the size of the LCD glass substrate is increasing, but the conventional x-ray antistatic device has a problem that the soft x-ray irradiation angle is small so that it does not eliminate a large area. In this case, it is necessary to make the soft X-ray density distribution uniform while increasing the irradiation angle of the soft X-rays.
  • the related art is Korean Patent No. 10-1361793 (Prior Art 1, Figure 1).
  • the related art 1 includes a filament 21 for emitting electrons, an electrode 23 for supplying power, a focusing lens 22 for focusing electrons, a coating part 12 for targeting electrons, and X-rays. It is comprised including the beryllium plate 11 which discharges.
  • Prior art 1 increases the strength of X-rays by improving the filament 21 of the X-ray tube, thereby increasing the static elimination efficiency.
  • the radiant heat due to the heating of the filament 21 and the radiant heat generated from the anode portion 10 cannot be effectively radiated.
  • the appearance of the X-ray tube is made of the glass tube tube 30, so it is weak to impact and poor in heat dissipation. Therefore, damage to the filament 21, the coating portion 12 and the beryllium plate 11 may occur during long time use.
  • the electrons emitted from the filament 21 is not uniformly irradiated on the coating unit 12 has a disadvantage that the density distribution of the soft X-rays is not uniform.
  • Korean Patent No. 10-0941037 (Prior Art 2, Fig. 2).
  • the target 3-4 and the beryllium window 3-8 to which the electrons emitted from the filament 3-3 are radiated are spaced apart so that the X-rays are emitted from the electron beam in a 90 degree direction. It is configured.
  • the prior art 2 improves the heat dissipation function by protruding the structure of the anode portion 3-1 to the outside to increase the surface area, and the beryllium window due to radiant heat is separated from the target 3-4 and the beryllium window 3-8. 3-8) There is an advantage that can prevent damage.
  • the structure as in the prior art 2 has a disadvantage that the irradiation angle (about 40 degrees) is small, which is not suitable for eliminating a large area, and there is a problem in that the elimination time is long.
  • the target 3-4 is inclined at a predetermined angle, electrons are not uniformly irradiated, and thus the density distribution of the soft X-rays passing through the beryllium window 3-8 is not uniform.
  • the present invention is to provide a soft X-ray generating apparatus with a large irradiation angle of the soft X-rays and improved heat radiation function.
  • the present invention is to provide a soft x-ray generating apparatus uniform density distribution of the soft x-rays to be irradiated.
  • the present invention is to provide a soft X-ray assembly system capable of static elimination of a large area of the object.
  • the present invention provides a soft X-ray generating apparatus with improved antistatic range and heat dissipation, Filament for emitting electrons; A focusing unit focusing electrons emitted from the filament; A beryllium window coated on one surface of a target material generating X-rays when focused electrons collide with each other and emitting X-rays; A support of metal material supporting the perimeter of the beryllium window; And a bulb of a metal material coupled to the front surface and radiating heat generated from the beryllium window and transmitted through the support.
  • the focusing unit may include a focusing tube formed with an inner surface in which the electrons are focused, and the filament may be exposed and fixed on the inner surface.
  • the inner surface of the focusing tube may have a concave curved shape so that electrons may be uniformly irradiated on one surface of the beryllium window.
  • the other surface of the beryllium window may have a spherical shape projecting outward so that X-rays can be irradiated widely, and a flat contact may be formed such that the perimeter of the beryllium window is joined to the lower side of the support.
  • the support may include a cylindrical heat dissipation member having an inner lower surface joined to a circumference of the beryllium window and extending in a rearward direction of the bulb, through which heat of the beryllium window is transferred; And a press ring bonded to the inner surface of the heat dissipation member and pressurizing the circumference of the beryllium window toward the heat dissipation member.
  • the present invention is to independently control each of the power supply to the one or more soft-X-ray generator, the housing unit for fixing the one or more soft-X-ray generator at regular intervals, and emits radiant and conductive heat transmitted to the bulb to the outside.
  • Another aspect of the invention includes a control unit capable of doing so.
  • the present invention since the target material is coated on the inner surface of the beryllium window and the beryllium window has a spherical shape protruding to the outside, the irradiation angle of the soft X-ray is large.
  • the present invention has the advantage that the heat dissipation function is improved by the heat dissipation member having a large contact area with the beryllium window and the bulb of the metal material.
  • the target damage due to the acceleration electron beam collision is delayed, thereby extending the life of the X-ray tube and having the uniform X-ray density in the irradiation area.
  • the soft x-ray generating assembly according to the present invention has an advantage in that one or more of the plurality of soft x-ray generating apparatuses can be used for static elimination of a large-area object.
  • 1 and 2 show a conventional soft x-ray generator.
  • Figure 3 (a) shows the appearance of the soft X-ray generating apparatus according to an embodiment of the present invention.
  • Figure 3 (b) shows a cross-sectional view of the soft x-ray generating apparatus according to an embodiment of the present invention.
  • Figure 4 shows an exploded view of the soft x-ray generating apparatus according to an embodiment of the present invention.
  • FIG. 5 (a) shows a focusing tube in which one filament is disposed.
  • 5B shows a focusing tube in which four filaments are disposed.
  • Figure 5 (c) shows a state in which four filaments are arranged in the concave curved focusing tube.
  • FIG. 7A shows the density distribution of the electron beam irradiated onto the beryllium window when the inner surface of the focusing tube is flat.
  • FIG. 7B shows the density distribution on the target plane of the accelerated electron beam incident on the target of the beryllium window when the inner surface of the focus tube has a concave curved shape.
  • FIG. 8 illustrates an assembly in which a plurality of soft x-ray generating apparatuses according to another embodiment of the present invention is mounted.
  • electrode stem 103 Pyrex tube
  • Metal bulb 3031 Non-diffusion getter
  • FIG. 3A shows the appearance of the soft X-ray generator 1
  • FIG. 3B shows a cross-sectional view of the soft X-ray generator 1.
  • the soft x-ray generator 1 includes a filament 701 for emitting electrons; A focusing unit (703, 705, 707) for focusing electrons; A beryllium window 50 through which the target material 501 which electrons collide to generate X-rays, and transmits X-rays applied to one surface of an inner surface thereof; An electrode part 10 connected to the focusing parts 703, 705, and 707 and applying power to the filament 701; Support portions 301 and 605 of a metal material supporting the circumference of the beryllium window 50; And the support parts 301 and 605 are coupled to the front surface, and may include a metal bulb 303 that radiates heat generated from the beryllium window 50 and transmitted through the support parts 301 and 605.
  • the direction in which the X-rays of the soft X-ray generator 1 are generated is referred to the direction in
  • the electrode unit 10 includes an exhaust pipe 105 for exhausting residual gas for vacuum, an electrode stem 101 for applying a negative high voltage to the focusing units 703, 705, and 707 and connected to a heating power source of the filament 701, It may include a Pyrex tube 103 that fixes the electrode stem 101 and forms the appearance of the electrode portion 10.
  • the Pyrex tube 103 refers to a material having a strong resistance to heat change and having electrical insulation.
  • the focusing parts 703, 705, and 707 have a filament support 707 having a filament 701 connected to one side and an electrode stem 101 connected to the other side thereof, and a ceramic insulator 705 having a filament support 707 penetrated therethrough. ), A condenser tube 703 having an inner surface 7031 formed therein so as to focus electrons emitted from the filament 701. The filament 701 is exposed to the inner surface 7031 and fixed.
  • the inner surface 7031 may have a concave curved shape so that electrons emitted from the heated filament 701 may be uniformly incident on the target material 501 applied to the beryllium window 50.
  • At least one filament 701 may be exposed on the inner surface 7031.
  • the filaments 701 are four, the four filaments 701 may be disposed on the inner surface 7031 so as to be perpendicular to each other (+ shape or shape).
  • the structure of the beryllium window 50 preferably has a spherical shape projecting outward so that X-rays generated by collision of electrons emitted from the heated filament 701 with the target material 501 coated on the inner surface thereof can be widely irradiated.
  • a flat contact surface 503 may be formed around the beryllium window 50.
  • the supporting part 301 is joined to the inner surface of the cylindrical heat dissipation member 301 and the heat dissipation member 301 which are joined to the contact surface 503 of the beryllium window 50 and extended in the rearward direction, and has a beryllium window.
  • the press ring 305 which presses the close contact surface 503 of the 50 to the heat radiating member 301 side can be provided.
  • the heat dissipation member 301 and the pressing ring 305 function to fix the beryllium window 50 and transmit heat generated from the filament 701 and the beryllium window 50 to the bulb 303.
  • the material of the heat dissipation member 301 and the pressing ring 305 may be made of nickel (Ni) or iron (Fe).
  • the heat dissipation member 301 and the pressing ring 305 are in contact with the upper and lower surfaces of the contact surface 503, heat generated in the beryllium window 50 is efficiently transferred.
  • the heat dissipation member 301 extends in the rearward direction, the contact area with the bulb 303 becomes wide, thereby facilitating heat transfer to the bulb 303.
  • the bulb 303 may have a structure that extends further in the rearward direction than the heat dissipation member 301, and this structure has a feature of improving the heat dissipation function by increasing the surface area at which the bulb 303 is exposed to the outside.
  • the bulb 303 may be formed of an oxygen-free copper tube that is easy to emit conduction heat and radiant heat.
  • the bulb 303 may be coated on the inner surface of the non-diffusion getter 3031 for adsorbing the residual gas.
  • the soft x-ray generator 1 may include a cob tube 307 that is bonded to the bulb 303 and the electrode unit 10 to maintain a vacuum tightness.
  • Cobar tube 307 may be made of a nickel-cobalt iron alloy material.
  • a target material 501 in the form of a thin film is coated on an inner surface of the beryllium window 50.
  • the target material refers to a material in which electrons collide to emit X-rays. More specifically, the target material 501 is applied to a thickness of 0.5um to 1um, the material may be gold (Au) or tungsten (W).
  • the existing soft x-ray generator has a problem that the bulb portion is made of a glass material (30, see FIG. 1) is inferior in heat dissipation.
  • a bulb 303 of a copper tube material (anoxic copper tube) is used, and a cobar for coupling the bulb 303 and the Pyrex tube 103 to maintain a vacuum
  • the tube 307 is used.
  • the Pyrex tube 103, the cobar tube 307, the bulb 303, and the heat dissipation member 301 may be vacuum brazed, so that the inside of the soft x-ray generator 1 may be kept vacuum tight.
  • FIG. 5A shows a focusing tube in which one filament 701 is arranged
  • FIG. 5B shows a focusing tube in which four filaments 701 are disposed
  • FIG. Four filaments 701 are arranged in the curved focusing tube 703.
  • FIG. 6 (a) shows the trajectory of the electron beam incident on the beryllium window 50 when there is one filament 701
  • FIG. 6 (b) shows the target of the beryllium window when there are four filaments 701. The trajectory of the electron beam incident on 501 is shown.
  • FIG. 7A shows the density distribution of the electron beam incident on the target 501 of the beryllium window when the inner surface 7031 of the focusing tube 703 is flat
  • FIG. 7B shows the inner surface of the focusing tube 703.
  • 7031 is a concave curved shape, it shows the density distribution of the electron beam incident on the target 501 of the beryllium window.
  • the soft x-ray generating system 2 fixes the plurality of soft x-ray generating apparatuses 1 and the plurality of soft x-ray generating apparatuses 1 at regular intervals, and the soft x-ray generating apparatus 1 It may include a control unit 205 that can independently control each of the power source of the housing unit 20 and the soft-X-ray generating device 1 for dissipating heat generated by the outside.
  • the housing 20 is in close contact with the outer surface of the bulb 303 to fix the soft X-ray generator 1 and to discharge heat transferred from the bulb 303 to the outside of the heating sink 201 and the heating sink 201.
  • One or more temperature sensors 203 for measuring the temperature may be provided.
  • the controller 205 may receive the data measured by the temperature sensor 203, and control the power applied to the soft x-ray generator 1 based on the received temperature data. According to the present embodiment, the controller 205 may control the soft x-ray generator 1 by wire or wirelessly.
  • the contact area with the beryllium window 50 is improved by the structure of the heat dissipation member 301 and the pressing ring 305.
  • the soft x-ray generator 1 has a structure in which the heat dissipation member 301 extends in the rear direction, and is bonded to the bulb 303, which is a metal material, to more efficiently heat heat generated from the beryllium window 50 and the filament 701. It can radiate heat.
  • the shape of the inner surface 7031 of the focusing tube 703 and the beryllium window 50 can be irradiated at a wide angle with X-rays having a more uniform density.
  • the soft x-ray generating device 1 since the soft x-ray generating device 1 is fixedly arranged and controlled at regular intervals, the antistatic object having a large area can be quickly discharged.

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  • X-Ray Techniques (AREA)
  • Elimination Of Static Electricity (AREA)

Abstract

La présente invention concerne un appareil de génération de rayons x mous possédant une plage antistatique améliorée et une fonction de dissipation de chaleur. L'appareil de génération de rayons x mous selon la présente invention comprend : un filament pour émettre des électrons ; une partie de collimation pour collimater les électrons émis par le filament ; une fenêtre en béryllium dont une surface est revêtue d'un matériau de génération de rayons x de manière que si les électrons collimatés sont incidents dessus, des rayons x soient émis par une autre surface ; une partie de support faite d'un matériau métallique pour offrir un support autour de la fenêtre en béryllium ; et une soupape faite d'un matériau métallique pour rayonner de la chaleur qui est générée dans la fenêtre en béryllium et transférée par la partie de support, la partie de support étant couplée à une surface avant de ladite soupape.
PCT/KR2014/007434 2014-07-28 2014-08-11 Appareil de génération de rayons x mous à plage antistatique améliorée et à fonction de dissipation de chaleur WO2016017847A1 (fr)

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KR10-2014-0096000 2014-07-28
KR1020140096000A KR101586342B1 (ko) 2014-07-28 2014-07-28 제전 범위 및 방열 기능이 향상된 연엑스선 발생 장치

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111554557A (zh) * 2020-04-30 2020-08-18 莱特泰克（昆山）光电科技有限公司 无氧铜外罩的软x射线管
CN111986969A (zh) * 2020-05-09 2020-11-24 莱特泰克(上海)光电科技有限公司 消除静电范围及防热性增强的软x射线发生装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101742642B1 (ko) 2016-10-07 2017-06-02 테크밸리 주식회사 열전소자를 구비하는 엑스선관의 방열구조
KR102106511B1 (ko) * 2018-02-01 2020-05-11 주식회사엑스엘 휴대용 엑스선 발생장치
KR102138020B1 (ko) 2018-09-17 2020-07-27 (주)선재하이테크 연엑스선 튜브

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06314548A (ja) * 1993-04-30 1994-11-08 Hamamatsu Photonics Kk Ｘ線イメージ管
JP2009164038A (ja) * 2008-01-09 2009-07-23 Toshiba Corp 固定陽極型ｘ線管および一体型ｘ線発生装置
KR20110028422A (ko) * 2010-03-26 2011-03-18 주식회사엑스엘 비확산 게터가 장착된 엑스선관
KR20110120204A (ko) * 2010-04-28 2011-11-03 하마마츠 포토닉스 가부시키가이샤 Ｘ선 발생 장치
JP2013142557A (ja) * 2012-01-06 2013-07-22 Toshiba Corp Ｘ線検出器収容ケース

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06314548A (ja) * 1993-04-30 1994-11-08 Hamamatsu Photonics Kk Ｘ線イメージ管
JP2009164038A (ja) * 2008-01-09 2009-07-23 Toshiba Corp 固定陽極型ｘ線管および一体型ｘ線発生装置
KR20110028422A (ko) * 2010-03-26 2011-03-18 주식회사엑스엘 비확산 게터가 장착된 엑스선관
KR20110120204A (ko) * 2010-04-28 2011-11-03 하마마츠 포토닉스 가부시키가이샤 Ｘ선 발생 장치
JP2013142557A (ja) * 2012-01-06 2013-07-22 Toshiba Corp Ｘ線検出器収容ケース

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111554557A (zh) * 2020-04-30 2020-08-18 莱特泰克（昆山）光电科技有限公司 无氧铜外罩的软x射线管
CN111986969A (zh) * 2020-05-09 2020-11-24 莱特泰克(上海)光电科技有限公司 消除静电范围及防热性增强的软x射线发生装置

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