WO2018079946A1 - Tube à rayons x d'amélioration de concentration d'électrons - Google Patents

Tube à rayons x d'amélioration de concentration d'électrons Download PDF

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Publication number
WO2018079946A1
WO2018079946A1 PCT/KR2017/002046 KR2017002046W WO2018079946A1 WO 2018079946 A1 WO2018079946 A1 WO 2018079946A1 KR 2017002046 W KR2017002046 W KR 2017002046W WO 2018079946 A1 WO2018079946 A1 WO 2018079946A1
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WO
WIPO (PCT)
Prior art keywords
tube
filament
focusing
ray
target
Prior art date
Application number
PCT/KR2017/002046
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English (en)
Korean (ko)
Inventor
이동훈
김상효
김은민
김수현
정동길
김정동
Original Assignee
(주)선재하이테크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by (주)선재하이테크 filed Critical (주)선재하이테크
Publication of WO2018079946A1 publication Critical patent/WO2018079946A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/064—Details of the emitter, e.g. material or structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H01J35/186—Windows used as targets or X-ray converters

Definitions

  • the present invention relates to an X-ray tube for improving electron focus, and more specifically, to guide hot electrons emitted from a filament to be efficiently moved to a target of an X-ray irradiation window, and to reduce the specific gravity of adsorbed impurities on the filament.
  • the present invention relates to an X-ray tube for improving electron focus.
  • the energy of lead X-rays is about tenths lower than that of light X-rays, and much less by direct irradiation.
  • Table 1 shows the characteristics of the soft X-ray and light X-ray separately.
  • the soft X-ray of the soft X-ray generator is generated when the accelerated electrons collide with the metal target Be, the soft X-ray generator is composed of a high voltage generator and a target that accelerate the electrons at high speed.
  • the energy E is expressed by the following equation in the motion of electrons when colliding.
  • the kinetic energy of the electron is mostly converted into heat when it collides with the target, and only about 1% of energy is emitted by the soft X-ray, and the soft x-ray generating efficiency is expressed as follows.
  • the soft X-ray irradiation formula generates ions and electrons necessary for neutralization of the charge by generating photons of gas molecules and atoms around the charged object, and the characteristics of the soft X-ray irradiation formula are characterized by high concentration of ions and electrons. Since it can be generated, it is possible to remove static electricity in a short time, maintain a constant constant voltage of about 0 V, and it is widely used as an electrostatic removal because it can remove static electricity in an inert gas atmosphere at atmospheric pressure.
  • the soft X-ray irradiated type static eliminator has an advantage of being able to discharge in an atmosphere without a wind condition.
  • the soft X-ray radiation type static eliminator has a high energy (wavelength is about 1.3 kW or less), oxygen molecules or atoms can be ionized quickly, and thus, there is an advantage that almost no ozone is generated.
  • FIG. 1 shows an example of an X-ray tube connected to a high voltage generator and irradiated with soft X-rays among soft x-ion ionizers produced and marketed by the present applicant.
  • FIG. 2 and 3 are further shown the front and rear views of the X-ray tube shown in FIG. 1 (for reference, there is a filament connected to the cobar wire in the cylindrical cathode serving as the focusing tube. Not shown).
  • the X-ray tube includes a glass tube 100 and a metal target such as an X-ray radiating unit 200 (Be and W applied thereto) coupled to one end of the glass tube; And a stem portion 300 having glass or glass bonded to the other end portion of the glass tube 100 or a material having a physical chemical property equivalent thereto (hereinafter referred to as a glass material).
  • a metal target such as an X-ray radiating unit 200 (Be and W applied thereto) coupled to one end of the glass tube
  • a stem portion 300 having glass or glass bonded to the other end portion of the glass tube 100 or a material having a physical chemical property equivalent thereto (hereinafter referred to as a glass material).
  • the X-ray tube shown in Figure 1 is a cylindrical cathode (also called a focusing tube 110), which serves to focus hot electrons emitted from the filament (not shown: installed inside the focusing tube), high voltage generator (shown And a conductive wire 120 (kovar wire) to which a voltage of about -1k to -60kV is applied, and a glass material interconnecting the conductive wire 120 inserted into the glass tube 100.
  • a cylindrical cathode also called a focusing tube 110
  • high voltage generator shown And a conductive wire 120 (kovar wire) to which a voltage of about -1k to -60kV is applied, and a glass material interconnecting the conductive wire 120 inserted into the glass tube 100.
  • Clip portion 130 one side is attached to the outside of the cylindrical cathode 110, the other side is in close contact with the inner wall of the glass tube 100, the guide spring 140 for supporting the cathode 110, the vacuum state inside the glass tube 100 It further comprises a component such as a getter (150) for maintaining the inside, the inside of the X-ray tube maintains a predetermined degree of vacuum controlled by a direct vacuum exhaust system.
  • a component such as a getter (150) for maintaining the inside, the inside of the X-ray tube maintains a predetermined degree of vacuum controlled by a direct vacuum exhaust system.
  • the X-ray tube generally uses a focusing tube 110 having a cylindrical structure as shown in FIGS. 1 to 3 so that hot electrons emitted from the filament can efficiently move to the X-ray radiator 200.
  • the conventional X-ray tube which has such a structure has the following problems.
  • the gas-like impurities are separated from the target and charged with cations while colliding with other hot electrons. These impurities charged by the cations adsorb to the filament (-voltage) located inside the focusing tube. Thereby lowering the life of the filament.
  • the present invention has been proposed in order to solve the conventional problems, "electrons that can guide the hot electrons emitted from the filament to move efficiently to the target of the X-ray irradiation window and reduce the specific gravity of the adsorbed impurities in the filament
  • An X-ray tube for focusing improvement is provided.
  • the X-ray tube for improving electron focus forms a body and a non-conductive tube tube with a hollow formed thereon, and an X-ray irradiation window for irradiating X-rays formed to shield the upper end of the tube tube and having a target coated thereon; And a plurality of metal wires formed to shield the lower end of the tube tube and extending from the outside of the stem portion to the inside of the tube tube to which a predetermined negative high voltage is applied, and the metal extending into the tube tube.
  • the shielding housing is equal to a predetermined negative high voltage applied to the metal wire. to be.
  • the tube is placed in the direction opposite to the first focusing tube, the lower portion located in the X-ray irradiation window is discharged from the first focusing pipe to the target of the X-ray irradiation window
  • a cylindrical second focusing tube for focusing the hot electrons again is further provided.
  • the first focusing tube has a cylindrical shape in which a hollow for embedding the filament is formed, and an outer circumferential surface of the first focusing tube may be spaced apart from the inner wall of the tube.
  • the first focusing pipe is formed with a hollow for embedding the filament and the shielding wing formed on the outer circumferential surface of the first focusing pipe extends radially to contact the inner wall of the tube pipe and the shielding wing
  • the inner space of the tube tube is separated into a first space that is an upper space of the shield wing and a second space that is a lower space of the shield wing.
  • the filament may extend in the horizontal direction.
  • the life of the X-ray tube can be improved by reducing the probability that the gas-like impurities are adsorbed to the filament (-voltage) located inside the focusing tube due to hot electrons hitting the target. Can be extended.
  • 1 to 3 are examples of conventional X-ray tubes.
  • 4 to 6 are first to third embodiments of the X-ray tube for improving electron focus proposed in the present invention.
  • X-ray irradiation window is a metal target, a flange of stainless steel, and a metal flange sequentially connected to each other on top of a tube tube generally implemented in the art. It is to be understood and understood to mean collectively common components.
  • the X-ray tube described in the present invention is connected between the stem portion of the glass material having a substantially flat annular structure, a plurality of metal wires penetrating the edge of the glass stem portion, and the metal wire to perform the role of emitting hot electrons It further includes a filament, a cylindrical focusing tube for focusing hot electrons emitted from the filament, a getter joined to the outside of the focusing tube, and a cylindrical tube tube integrally connected to the hollow of the glass stem part.
  • This configuration will be identified and described in advance that the configuration is known in the art for research and development of X-ray tube.
  • the metal material used as the filament of the present invention may include an alloy of W, W and Re (redium), an alloy of W and ThO 2 (thorium dioxide), and this is considered in consideration of thermal electron emission efficiency, filament durability, and the like. .
  • the stem portion of the glass material and the cylindrical tube tube material used in the present invention may include rod silicate glass, SiO 2 (quartz glass), UV Glass and the like.
  • FIG. 4 is a first embodiment of the X-ray tube for improving electron focus proposed in the present invention.
  • the electron focusing X-ray tube according to the first embodiment according to the present invention is formed to shield the upper end of the tube tube 100 and the non-conductive tube tube formed with a hollow and the tube formed, the target is applied
  • An X-ray irradiation window 200 for irradiating the X-rays and a stem portion 300 are formed to shield the lower end of the tube tube.
  • X-ray tube for improving electron focus which is a first embodiment of the present invention, includes a plurality of metal wires 400 extending from the outside of the stem portion 300 to the inside of the tube tube 100 and to which a predetermined negative high voltage is applied; A filament 500 is connected between the metal wires 400 extending inside the tube tube 100 to emit hot electrons, and a cylindrical shield housing 700 made of a conductive material surrounding the outside of the tube tube. .
  • the shielding housing 700 has a length capable of wrapping at least the stem portion 300 and the first focusing tube 600.
  • the first focusing pipe 600 is a cylindrical shape in which the hollow for embedding the filament is formed, the outer peripheral surface of the first focusing pipe 600 is the inner wall of the tube pipe And a predetermined distance apart.
  • the hot electrons emitted from the filament are accelerated into the X-ray window and collide with the target constituting the X-ray window.
  • the target is peeled off due to the collision with hot electrons, and gas-like impurities are generated inside the tube tube, and these impurities collide with other hot electrons emitted from the filament to carry cations.
  • Some of the cationic impurities are adsorbed into the filament having the negative voltage, but in the present invention, some of the impurities of the cation because the cylindrical shielding housing of the conductive material surrounding the outside of the tube tube is maintained at the negative high voltage (the same voltage as the metal wire). Is adsorbed to the inner wall of the tube tube in contact with the shielding housing.
  • 5 is a second embodiment of the X-ray tube for improving electron focus proposed in the present invention.
  • the electron focusing X-ray tube of the second embodiment according to the present invention is a non-conductive tube tube 100 and the hollow tube is formed as in the first embodiment and the tube tube 100 of the It is formed to shield the upper end and the X-ray irradiation window 200 for irradiating the X-ray to which the target is applied, and is formed to shield the lower end of the tube tube 100 is basically provided with a stem 300.
  • X-ray tube for improving electron focus extends from the outer side of the stem portion 300 to the inner side of the tube tube 100 and a plurality of metal wires 400 to which a predetermined high voltage is applied, and the tube A first focusing filament 500 connected between the metal wires 400 extending inside the tube 100 to emit hot electrons and surrounding the filaments to focus the hot electrons emitted from the filament 500
  • the tube 600 and the tube tube 100 in the direction opposite to the first focusing tube 600 is disposed in the lower portion of the X-ray irradiation window 200 in the first focusing tube 600
  • the shielding housing 700 has a length capable of wrapping at least the stem portion 300 and the first focusing tube 600.
  • the first focusing tube has a cylindrical shape in which a hollow for embedding the filament is formed, and an outer circumferential surface of the first focusing tube is spaced apart from the inner wall of the tube by a predetermined distance.
  • the length of the tube tube may be slightly longer than that of the first embodiment.
  • the hot electrons emitted from the filament located inside the first focusing tube pass through the first focusing tube and pass through the second focusing tube which is spaced a predetermined distance apart from the first focusing tube, and is located above the second focusing tube. It collides with the target constituting the line view window.
  • a part of the target is peeled off due to the collision with hot electrons, thereby generating gas-like impurities, and these impurities collide with other hot electrons emitted from the filament to form cations.
  • Some of the cationic impurities can be adsorbed into the filament having a negative voltage, but in the present invention, since the cylindrical shield housing made of a conductive material surrounding the outside of the tube tube is maintained at the negative voltage, some of the cationic impurities are in contact with the shield housing. Is adsorbed to the inner wall of the tube.
  • FIG. 6 is a third embodiment of the X-ray tube for improving electron focus proposed in the present invention.
  • the X-ray tube for improving electron focus forms a body and has a hollow non-conductive tube tube 100 and the tube tube ( It is formed to shield the upper end of the 100 and the X-ray irradiation window 200 for irradiating the X-ray to which the target is applied, and is formed to shield the lower end of the tube tube 100 is basically provided with a stem portion 300 do.
  • X-ray tube for improving electron focus which is a third embodiment of the present invention, extends from the outer side of the stem portion 300 to the inner side of the tube tube and includes a plurality of metal wires 400 to which a predetermined high voltage is applied, and the tube tube 100.
  • the tube is placed inside the tube in a direction opposite to the first focusing tube 600 but is positioned below the X-ray irradiation window 200 to be discharged from the first focusing tube 600 to the target of the X-ray irradiation window.
  • a second cylindrical focusing tube 800 for focusing the hot electrons directed to the second and the cylindrical shielding housing 700 of a conductive material surrounding the outer side of the tube tube is further provided.
  • the shielding housing 700 has a length capable of wrapping at least the stem portion 300 and the first focusing tube 600.
  • the filament has a shape extending in the horizontal direction to improve the straightness of the hot electrons.
  • the first focusing tube according to the third embodiment of the present invention has a hollow for embedding the filament and is formed on the outer circumferential surface of the first focusing tube.
  • the shield wing extends radially and contacts the inner wall of the tube tube.
  • the tube tube is formed by the shielding wing portion of the first focusing tube between the first space between the upper surface of the shielding wing portion of the first focusing tube and the lower portion of the first focusing tube shielding wing and the stem portion under the second focusing tube.
  • the hot electrons emitted from the filament located inside the first focusing tube pass through the first focusing tube and pass through the second focusing tube which is spaced a predetermined distance apart from the first focusing tube, and is located above the second focusing tube. It collides with the target constituting the line view window.
  • a part of the target is peeled off due to the collision with hot electrons, thereby generating gas-like impurities, and these impurities collide with other hot electrons emitted from the filament to form cations.
  • Some of the cationic impurities can be adsorbed into the filament having a negative voltage, but in the present invention, since the cylindrical shield housing made of a conductive material surrounding the outside of the tube tube is maintained at the negative voltage, some of the cationic impurities are in contact with the shield housing. Is adsorbed to the inner wall of the tube.
  • the shielding wing formed on the outer circumferential surface of the first focusing tube extends radially to be in contact with the inner wall of the tube.
  • the shielding wing upper space (first space) of the first focusing pipe is separated into the lower space (second space) of the shielding wing, and the thermal electrons emitted from the filament to the first space due to this space separation are transferred to the second space.
  • the filament 500 is formed in the horizontal direction.
  • the horizontal direction means a horizontal direction perpendicular to the longitudinal direction of the tube tube or the focusing tube.
  • the filaments were formed in an arc-like type, and hot electrons were accelerated radially.
  • the filaments are formed in a horizontal direction to improve the probability of hot electrons colliding directly with the target.
  • the X-ray tube for electron focusing improvement proposed by the present invention described so far has the following advantages.
  • the shielding wing was formed in the first focusing tube to double the space inside the tube to improve the probability that hot electrons emitted from the filament can move to the X-ray irradiation window.

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  • X-Ray Techniques (AREA)

Abstract

La présente invention concerne un « tube à rayons X d'amélioration de concentration d'électrons » permettant de guider des thermo-électrons déchargés d'un filament de sorte que les thermo-électrons puissent se déplacer efficacement vers une cible sur une fenêtre d'exposition à un rayonnement de rayons X, et de réduire une proportion d'impuretés ayant été adsorbées dans le filament. Le tube à rayons X d'amélioration de concentration d'électrons, selon la présente invention, comprend : une conduite tubulaire non conductrice formant un corps et comportant un creux ; la fenêtre d'exposition à un rayonnement de rayons X qui est formée de façon à protéger la partie d'extrémité supérieure de la conduite tubulaire, comportant une cible revêtue sur cette dernière, et qui permet à un rayon X de rayonner à travers cette dernière ; une partie de tige formée de façon à protéger la partie d'extrémité inférieure de la conduite tubulaire ; une pluralité de fils métalliques qui s'étendent vers l'intérieur de la conduite tubulaire à partir de l'extérieur de la partie de tige et auxquels est appliquée une haute tension négative prédéfinie ; le filament connecté entre les fils métalliques s'étendant vers l'intérieur de la conduite tubulaire, et déchargeant des thermo-électrons ; un premier tube de concentration englobant le filament afin de concentrer les thermo-électrons déchargés à partir du filament ; et un boîtier de protection cylindrique constitué d'un matériau conducteur et englobant l'extérieur de la conduite tubulaire, le boîtier de protection se voyant appliquer la même tension que la haute tension négative prédéfinie appliquée aux fils métalliques. Le tube à rayons X d'amélioration de concentration d'électrons, selon la présente invention, présente les avantages suivants. 1. Les thermo-électrons déchargés à partir du filament peuvent être efficacement déplacés vers la cible en disposant un tube de concentration supplémentaire au niveau de la partie inférieure de la fenêtre d'exposition à un rayonnement de rayons X. 2. La probabilité que des impuretés en phase gazeuse soient adsorbées sur le filament (tension négative) situé à l'intérieur d'un tube de concentration peut être réduite en provoquant un délamination (libération) des impuretés de la cible et leur adsorption sur la paroi interne de la conduite tubulaire par le boîtier de protection à l'extérieur de la conduite tubulaire, auquel est appliquée une tension négative, ce qui permet d'améliorer la durée de vie du filament. 3. La probabilité que les thermo-électrons déchargés à partir du filament puissent être déplacés vers la fenêtre d'exposition à un rayonnement de rayons X doit être améliorée par formation d'une partie d'aile de protection dans le premier tube de concentration et par division en deux d'un espace à l'intérieur de la conduite tubulaire.
PCT/KR2017/002046 2016-10-28 2017-02-24 Tube à rayons x d'amélioration de concentration d'électrons WO2018079946A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020160141867A KR101844537B1 (ko) 2016-10-28 2016-10-28 전자 집속 개선용 x선관
KR10-2016-0141867 2016-10-28

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WO2018079946A1 true WO2018079946A1 (fr) 2018-05-03

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KR101985417B1 (ko) * 2018-05-23 2019-06-03 (주)선재하이테크 반사형 엑스선관
KR102138020B1 (ko) * 2018-09-17 2020-07-27 (주)선재하이테크 연엑스선 튜브
KR102399718B1 (ko) * 2021-08-24 2022-05-19 주식회사 네프 X선을 이용한 구조물의 결함 검사 시스템의 x선 출력 제어 방법

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US20090268873A1 (en) * 2005-10-07 2009-10-29 Hamamatsu Photonics K.K. X-ray tube and x-ray source including same
KR101151859B1 (ko) * 2010-03-26 2012-05-31 주식회사엑스엘 비확산 게터가 장착된 엑스선관
KR20140043671A (ko) * 2012-10-02 2014-04-10 후타바 코포레이션 X선관
KR101439208B1 (ko) * 2013-04-30 2014-09-12 (주)선재하이테크 X선관 튜브 구조
KR20160058582A (ko) * 2014-11-17 2016-05-25 주식회사바텍 나노 전자 에미터를 사용한 엑스선 소스

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US20090268873A1 (en) * 2005-10-07 2009-10-29 Hamamatsu Photonics K.K. X-ray tube and x-ray source including same
KR101151859B1 (ko) * 2010-03-26 2012-05-31 주식회사엑스엘 비확산 게터가 장착된 엑스선관
KR20140043671A (ko) * 2012-10-02 2014-04-10 후타바 코포레이션 X선관
KR101439208B1 (ko) * 2013-04-30 2014-09-12 (주)선재하이테크 X선관 튜브 구조
KR20160058582A (ko) * 2014-11-17 2016-05-25 주식회사바텍 나노 전자 에미터를 사용한 엑스선 소스

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