WO2016015978A1 - Microscope à zoom - Google Patents

Microscope à zoom Download PDF

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Publication number
WO2016015978A1
WO2016015978A1 PCT/EP2015/065921 EP2015065921W WO2016015978A1 WO 2016015978 A1 WO2016015978 A1 WO 2016015978A1 EP 2015065921 W EP2015065921 W EP 2015065921W WO 2016015978 A1 WO2016015978 A1 WO 2016015978A1
Authority
WO
WIPO (PCT)
Prior art keywords
zoom
assembly
image
lens
objective
Prior art date
Application number
PCT/EP2015/065921
Other languages
German (de)
English (en)
Inventor
Johannes Winterot
Original Assignee
Carl Zeiss Microscopy Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Microscopy Gmbh filed Critical Carl Zeiss Microscopy Gmbh
Priority to JP2017505206A priority Critical patent/JP6595576B2/ja
Priority to CN201580040959.0A priority patent/CN106575029B/zh
Publication of WO2016015978A1 publication Critical patent/WO2016015978A1/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B15/00—Optical objectives with means for varying the magnification
    • G02B15/14—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective
    • G02B15/146—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective having more than five groups
    • G02B15/1461—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective having more than five groups the first group being positive
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G02B21/025—Objectives with variable magnification

Definitions

  • the invention relates to a zoom microscope according to the preamble of claim 1.
  • optical metrology are particularly in the
  • Image scale also remains constant in the direction of the optical axis within a defined range. This means that objects of different heights, but of equal size, also appear the same size in the image, as long as the telecentricity is present in a given depth-of-focus range.
  • the picture area must be exploited as completely as possible, therefore, the magnification must be increased for very small objects. This is done with a zoom system that has to maintain the telecentricity. This is also a picture-side telecentricity useful.
  • a double-sided telecentric optics theoretically has no scale errors during defocusing.
  • Object-side telecentric zoom systems are still particularly advantageous then applicable when object-side filter or a coaxial Auflichteleuchtung be coupled into the beam path.
  • Aperture aperture in the image-side focal point of the interchangeable lens manufactures is that with lenses larger focal length more space is needed.
  • the zoom system includes four lens groups, of which the middle two lens groups are moved to adjust the magnification.
  • the zoom system has an entrance pupil on the object side of the first lens group that substantially coincides with an exit pupil of the objective. Therefore, a relatively large distance between the zoom system and the lens is always required.
  • the object of the invention is now to provide a compact microscope, which is a distortion-free
  • the modular zoom microscope comprises an object plane in which an object to be observed can be placed
  • interchangeable lens which is arranged at a constant distance to the stage, a zoom module, a Tubus lens assembly and an imaging unit for capturing an image of the object.
  • a specimen stage is provided in the microscope in most cases in a known manner.
  • the object plane is at a constant distance from the lens
  • Imaging units are starting from the object plane in this order in an optical path or a
  • the objective has such a focal length that an image-side focal point of the objective lies within the zooming unit.
  • the zoom assembly includes at least two movable ones
  • One of the movable lens groups according to the invention comprises a diaphragm.
  • the movable lens groups are in one
  • the zoom module is an afocal lens system.
  • the afocal is a lens system that is neither collecting nor dispersing. That means parallel arrivals
  • a scale factor can be achieved to about 25-fold.
  • the bezel in a preferred embodiment, has a fixed size but, in alternative embodiments, may also be variable in size. If the aperture is variable in size, the depth of field can be changed.
  • the zooming assembly comprises a fixed and exactly three movable ones
  • Lens groups which are arranged starting from the lens in the following order: fixed first lens group
  • the diaphragm is disposed on the third lens group.
  • the movements of the three movable lens groups are advantageously coordinated so that the (virtual) imaging of the aperture by the first lens group results in a constant location.
  • the overall movement is tuned to a constant image position. For observance of telecentricity is the image-side
  • Focal point at the location of the (virtual) image of the aperture.
  • the tube lens system preferably comprises in a known manner a plurality of lens groups for focusing the image in an image plane in which an image sensor is arranged.
  • the image-side telecentricity is particularly advantageous if, for example, a microlens array is arranged in front of the image sensor.
  • Such sensors with microlens array are particularly sensitive to a main beam inclination due to the upstream optics.
  • zoom movements can be motorized if necessary automated.
  • Positions of the lens groups can be detected in a variety of ways and in the imaging unit or a
  • Presentation unit used to determine scaling and / or perform measurements in the image.
  • an infinite beam space which, as is known, is particularly suitable for the coupling or decoupling of partial beam paths, filters or the like.
  • In the object-side infinite space can preferably be coupled coaxial incident light illumination.
  • 1 shows a schematic diagram of an optical system of a particularly preferred embodiment of a zoom microsocope with a first objective
  • 2 is a schematic diagram of the optical system of
  • Zoom microscope wherein the first lens is replaced by a second lens.
  • FIG. 1 shows, with five figures, a beam gene of an optical system of a particularly preferred embodiment of a .nodular zoom microscope according to the invention.
  • the optical system of the zoom microscope comprises an object field 01, which is located on an object table (not shown) or in an object plane. On the object field 01, an object 02 is arranged, whose observed part in the
  • Figures a) to e) varies in size.
  • Figure a) shows a very small object
  • the objective 03 is interchangeable.
  • Lens group LG2 is along an optical axis 06
  • a third lens group LG3 is also displaceable along the optical axis 06 and has a positive refractive power.
  • a fourth lens group LG4 is also displaceable along the optical axis 06 and has a negative refractive power.
  • An aperture 07 is provided on the third lens group LG3.
  • the aperture 07 is preferably fixed to the lens group LG3 connected and with this along the optical axis 06 displaceable.
  • the aperture in this embodiment has a fixed diameter of 12.7mm.
  • a tube assembly 08 has in the illustrated
  • a focal length fT 200mm and includes a lens group LG5 with a positive refractive power, a
  • Lens group LG6 with a negative refractive power and a lens group LG7 with a positive refractive power The
  • Lens groups LG5, LG6 and LG7 of the tube assembly 08 are fixedly arranged. Between the Zoombauaff 04 and the
  • Tubusbaud 08 is an infinite space.
  • An image sensor 09 is arranged downstream of the tube assembly 08 in an image plane.
  • the image sensor 09 may be any known image sensor having a format and resolving power suitable for the optical system. The person skilled in the art can select the suitable image sensor.
  • the image sensor is part of an imaging unit which serves to detect an image of the sample 02 in a manner known per se.
  • optical characteristics for the system shown are tabulated below.
  • the indication of a radius means the radius of a lens.
  • the distance defines the distance to the next one
  • the lens material of a lens group is defined by the refractive index n e and the Abbe number v e .
  • the two-sided focal length f 'of the respective lens group is defined by the refractive index n e and the Abbe number v e .
  • the object plane image plane distance in this embodiment is 352mm.
  • a radiation beam 11 is shown as the beam path, which emanates from an object point remote from the center, is deflected several times by the optical system of the zoom microscope and finally focused on the image sensor.
  • objects 02 of different sizes are in each case displaced axially by the lens groups LG2, LG3 and LG4 on the full image surface of the image sensor 09
  • variable telescope magnification ⁇ of the afocal zoom and the focal length of the tube lens result in a
  • Magnification stages created a location of the entrance pupil, which is a far-reaching telecentric object and
  • Control unit of the zoom microscope stored and are approached defined if necessary.
  • the same reference numerals here mean, of course, the same components, so that is dispensed with a further description here.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
  • Diaphragms For Cameras (AREA)

Abstract

L'invention concerne un microscope modulaire à zoom qui comprend un objectif interchangeable (03, 13), un ensemble de zoom (04) comportant au moins deux groupes de lentilles mobiles qui sont disposé en aval de l'objectif (03, 13) dans un trajet de faisceau d'observation, un ensemble de tubes (08) qui est disposé en aval de l'ensemble de zoom (04) et une unité de formation d'image qui comporte un capteur d'image (09) disposé en aval de l'ensemble de tubes (08) et positionné dans un plan image pour acquérir une image d'un échantillon disposé dans un plan objet. Selon l'invention, la lentille (03, 13) a une distance focale telle qu'un point focal côté image de l'objectif se trouve à l'intérieur de l'ensemble de zoom, et l'un des groupes de lentilles mobiles a une ouverture (07). Dans un mode de réalisation avantageux, les groupes de lentilles mobiles sont réglable dans au moins une première position de sorte qu'une pupille d'entrée de l'ensemble de zoom se trouve dans le point focal côté image de l'objectif.
PCT/EP2015/065921 2014-07-31 2015-07-13 Microscope à zoom WO2016015978A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2017505206A JP6595576B2 (ja) 2014-07-31 2015-07-13 ズーム顕微鏡
CN201580040959.0A CN106575029B (zh) 2014-07-31 2015-07-13 变焦显微镜

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014215100.7 2014-07-31
DE102014215100.7A DE102014215100A1 (de) 2014-07-31 2014-07-31 Zoommikroskop

Publications (1)

Publication Number Publication Date
WO2016015978A1 true WO2016015978A1 (fr) 2016-02-04

Family

ID=53673929

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2015/065921 WO2016015978A1 (fr) 2014-07-31 2015-07-13 Microscope à zoom

Country Status (4)

Country Link
JP (1) JP6595576B2 (fr)
CN (1) CN106575029B (fr)
DE (1) DE102014215100A1 (fr)
WO (1) WO2016015978A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3674771A1 (fr) * 2018-12-27 2020-07-01 Leica Instruments (Singapore) Pte. Ltd. Système optique et procédé d'imagerie d'un objet
CN111123494B (zh) * 2019-12-03 2021-07-27 宁波永新光学股份有限公司 一种高变倍比连续变焦体视显微镜的光学系统
KR102116667B1 (ko) * 2020-03-09 2020-05-29 (주)하이비젼시스템 현미경의 대물 렌즈에 적용이 가능한 텔레센트릭 조명 시스템

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040246592A1 (en) 2003-06-06 2004-12-09 Nikon Corporation Zoom lens system for microscope and microscope using the same
US20100014154A1 (en) 2004-11-29 2010-01-21 Nikon Corporation Zoom Microscope
WO2014037274A2 (fr) * 2012-09-04 2014-03-13 Werth Messtechnik Gmbh Procédé et dispositif permettant de déterminer la géométrie d'un objet au moyen d'une optique de zoom
DE102012223712A1 (de) * 2012-12-19 2014-06-26 Carl Zeiss Microscopy Gmbh Variables abbildungssystem mit objektiv fester brennweite
DE102013201632A1 (de) * 2013-01-31 2014-07-31 Leica Microsystems (Schweiz) Ag Mikroskop mit Zoom-Blenden-Kopplung

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4061152B2 (ja) * 2002-08-08 2008-03-12 オリンパス株式会社 ズーム撮影光学系
JP4189754B2 (ja) * 2004-04-20 2008-12-03 ソニー株式会社 ズームレンズ及び撮像装置
JP2006154230A (ja) * 2004-11-29 2006-06-15 Nikon Corp ズーム顕微鏡
TWI413800B (zh) * 2007-08-31 2013-11-01 Asia Optical Co Inc A microscopic optical system and a digital microscope with this optical system
DE102010002722B4 (de) * 2010-03-10 2019-06-27 Leica Microsystems (Schweiz) Ag Afokales Zoomsystem für ein Mikroskop, Mikroskop mit einem solchen Zoomsystem und Verfahren zum Betreiben eines solchen Zoomsystems

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040246592A1 (en) 2003-06-06 2004-12-09 Nikon Corporation Zoom lens system for microscope and microscope using the same
US20100014154A1 (en) 2004-11-29 2010-01-21 Nikon Corporation Zoom Microscope
WO2014037274A2 (fr) * 2012-09-04 2014-03-13 Werth Messtechnik Gmbh Procédé et dispositif permettant de déterminer la géométrie d'un objet au moyen d'une optique de zoom
DE102012223712A1 (de) * 2012-12-19 2014-06-26 Carl Zeiss Microscopy Gmbh Variables abbildungssystem mit objektiv fester brennweite
DE102013201632A1 (de) * 2013-01-31 2014-07-31 Leica Microsystems (Schweiz) Ag Mikroskop mit Zoom-Blenden-Kopplung

Also Published As

Publication number Publication date
CN106575029B (zh) 2018-12-21
JP2017521729A (ja) 2017-08-03
DE102014215100A1 (de) 2016-02-04
JP6595576B2 (ja) 2019-10-23
CN106575029A (zh) 2017-04-19

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