WO2015198386A1 - Débitmètre ultrasonore et son procédé de fabrication - Google Patents

Débitmètre ultrasonore et son procédé de fabrication Download PDF

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Publication number
WO2015198386A1
WO2015198386A1 PCT/JP2014/066628 JP2014066628W WO2015198386A1 WO 2015198386 A1 WO2015198386 A1 WO 2015198386A1 JP 2014066628 W JP2014066628 W JP 2014066628W WO 2015198386 A1 WO2015198386 A1 WO 2015198386A1
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WO
WIPO (PCT)
Prior art keywords
ultrasonic
thin film
bottom member
tube wall
metal thin
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Application number
PCT/JP2014/066628
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English (en)
Japanese (ja)
Inventor
宮本年昭
村井勇気
Original Assignee
本多電子株式会社
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Publication date
Application filed by 本多電子株式会社 filed Critical 本多電子株式会社
Priority to PCT/JP2014/066628 priority Critical patent/WO2015198386A1/fr
Priority to JP2016528778A priority patent/JP6326610B2/ja
Publication of WO2015198386A1 publication Critical patent/WO2015198386A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters

Definitions

  • the present invention relates to an ultrasonic flowmeter that measures the flow rate of a fluid using ultrasonic waves, and a method for manufacturing the ultrasonic flowmeter.
  • an ultrasonic flowmeter is used to manage the flow rate of a chemical solution (fluid) such as hydrofluoric acid or sulfuric acid.
  • a chemical solution such as hydrofluoric acid or sulfuric acid.
  • the ultrasonic flowmeter it has piping which flows the chemical
  • the flow rate of industrial fluid is obtained.
  • a fluororesin excellent in chemical resistance is used as a pipe for flowing a chemical solution.
  • a chemical solution at a high temperature (100 ° C. to 200 ° C.) is used to increase the efficiency of the polishing process.
  • a special chemical solution such as hydrofluoric acid or sulfuric acid is used at a high temperature
  • the gasified chemical solution permeates the fluororesin in the pipe and permeates the ultrasonic transducer side. The penetration of the chemical solution corrodes the electrode and the like, thereby shortening the life of the ultrasonic flowmeter.
  • a resin holder is formed into a bottomed cylinder using tetrafluoroethylene / perfluoroalkoxyethylene (PFA) which is a fluororesin, and an ultrasonic wave is formed at the bottom of the resin holder.
  • PFA perfluoroalkoxyethylene
  • a vibrator is arranged.
  • a non-gas-permeable metal thin film is formed on the surface (inner surface or outer surface) of the resin holder, and the metal thin film prevents liquid vaporized gas from penetrating into the inside through the bottom of the resin holder. It comes to stop.
  • a fluororesin (PFA) having excellent chemical resistance is used as a resin holder forming material. Has the property of being difficult to adhere. For this reason, it is difficult to form a metal thin film having sufficient adhesion strength on the surface of the resin holder.
  • PFA fluororesin
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide an ultrasonic flowmeter that can reliably prevent corrosion of electrodes and wiring of an ultrasonic transducer and improve product life. There is. Another object is to provide an ultrasonic flowmeter manufacturing method capable of efficiently and reliably manufacturing an ultrasonic flowmeter having a long product life.
  • the invention according to claim 1 is characterized in that a resin-made flowmeter body having a tube forming a flow path through which a fluid flows, and an upstream position and a downstream position in the flow path, respectively.
  • a pair of ultrasonic transducers that are positioned opposite to each other across a tube wall and that transmit and receive ultrasonic waves through the tube wall, and a bottomed cylindrical member made of a rigid body, the ultrasonic vibration
  • a pair of transducer holders mounted on the outside of the tube wall in a state in which each of the children is housed, and based on a difference in propagation time of ultrasonic waves transmitted and received between the pair of ultrasonic transducers,
  • An ultrasonic flow meter for measuring the flow rate of the transducer holder, wherein the transducer holder has a side surface, an inner bottom surface to which the ultrasonic transducer is fixed, and an outer bottom surface located on the opposite side of the inner bottom surface.
  • the non-gas permeable metal thin film is formed so as to cover at least a region extending from the outer bottom surface of the bottom member through the side surface of the bottom member to the joint portion of the bottom member and the cylindrical member.
  • the pair of transducer holders each accommodating the ultrasonic transducer are mounted on the outside of the tube wall.
  • the pair of ultrasonic transducers housed in each transducer holder is in a positional relationship in which the ultrasonic transducers are opposed to each other across the tube wall at the upstream position and the downstream position in the flow path.
  • the velocity of the fluid can be obtained based on the difference in propagation time, and the flow rate of the fluid can be measured based on the velocity of the fluid.
  • a fluid that causes corrosion for example, a chemical solution such as sulfuric acid or hydrofluoric acid
  • a resin having excellent chemical resistance for example, Even if the flowmeter body is formed using a fluororesin
  • the liquid vaporized gas may permeate the tube wall (resin portion) of the flow path when the concentration or temperature of the fluid increases.
  • a metal thin film is formed on the outer surface of the vibrator holder so as to cover at least a region extending from the outer bottom surface of the bottom member through the side surface of the bottom member to the joint portion between the bottom member and the cylindrical member. .
  • the metal thin film blocks gas penetration into the vibrator holder.
  • the metal thin film is formed not on the resin flowmeter main body side but on the surface of a rigid vibrator holder (bottom member and cylindrical member).
  • the outer surface of the vibrator holder is unlikely to undergo thermal expansion like the resin surface, so it is ensured that the metal thin film is in close contact with the outer face of the vibrator holder. Retained. As a result, even when the ultrasonic flowmeter is used for a long period of time, corrosion of the ultrasonic vibrator or the like can be avoided by the metal thin film. Further, in the vibrator holder, the ultrasonic vibrator is fixed to the inner bottom surface of the bottom member, and the outer bottom surface of the bottom member is pressed against the tube wall side by the cylindrical member joined to the outer edge portion of the inner bottom surface. .
  • this bottom member is interposed between the ultrasonic transducer and the tube wall and functions as an acoustic matching layer, the ultrasonic wave output from the ultrasonic transducer can be efficiently propagated to the fluid through the tube wall. And the fluid flow rate can be measured accurately.
  • the gist of the invention described in claim 2 is that, in claim 1, the metal thin film is formed on the entire outer surface of the vibrator holder.
  • the metal thin film is formed on the entire outer surface of the vibrator holder, thereby reliably preventing corrosion of the electrodes and wiring of the ultrasonic vibrator in the vibrator holder. can do.
  • the metal thin film can function as a shield layer, and electrical noise can be prevented from being superimposed on the output signal of the ultrasonic transducer.
  • the gist of the invention described in claim 3 is that, in claim 1, the metal thin film is formed on the entire outer surface and the entire inner surface of the vibrator holder.
  • the metal thin film is formed twice on the entire outer surface and the entire inner surface of the vibrator holder, the electrodes and wiring of the ultrasonic vibrator in the vibrator holder, etc. Corrosion can be prevented more reliably. Further, in this case, since the ultrasonic vibrator, the wiring and the like are protected by the double shield structure, the shielding effect against electric noise can be enhanced.
  • the gist of the invention of claim 4 is that, in any one of claims 1 to 3, the metal thin film is made of gold or platinum.
  • a fluid that causes corrosion for example, a chemical solution such as hydrofluoric acid or sulfuric acid
  • a chemical solution such as hydrofluoric acid or sulfuric acid
  • the bottom member is a ceramic having an acoustic impedance smaller than that of the ultrasonic transducer and larger than that of the tube wall. The gist.
  • the difference in acoustic impedance at the interface between each member can be reduced by interposing the bottom member between the ultrasonic transducer and the tube wall. For this reason, an ultrasonic wave can be efficiently and reliably propagated to the liquid flowing through the flow path.
  • a sixth aspect of the present invention is the flowmeter of the flowmeter main body according to any one of the first to fifth aspects, wherein the flowmeter body has a straight pipe portion extending straight and both ends of the straight pipe portion are The gist is that the pipe is bent at a right angle, and the pair of ultrasonic transducers is provided at each of the upstream and downstream ends of the straight pipe portion.
  • ultrasonic waves are transmitted and received through the fluid flowing through the straight pipe portion, and in the forward and reverse directions with respect to the liquid flow.
  • the propagation time when the ultrasonic wave propagates is measured.
  • the flow rate of the liquid can be obtained from the difference between the propagation times, and the flow rate of the liquid can be measured by converting the flow rate into a flow rate.
  • the gist of the invention according to claim 7 is that, in any one of claims 1 to 6, the surface of the bottom member has a surface roughness value larger than that of the outer surface of the tube wall.
  • a metal thin film having high adhesion strength (peel strength) and difficult to peel can be reliably formed on the surface (side surface and outer bottom surface) of the bottom member.
  • the gist of the invention according to claim 8 is that, in any one of claims 1 to 7, the bottom member has a thickness of ⁇ / 4 corresponding to the wavelength ⁇ of the ultrasonic wave.
  • the bottom member can function as an acoustic matching layer, and ultrasonic waves can be efficiently propagated to the liquid through the tube wall.
  • the gist of a ninth aspect of the present invention is that, in any one of the first to eighth aspects, the metal thin film is formed to be thinner than 1 / of the wavelength ⁇ of the ultrasonic wave. .
  • the ultrasonic wave is not reflected on the surface of the metal thin film, and the propagation of the ultrasonic wave is not affected. Furthermore, the material cost of the metal thin film can be kept low.
  • a tenth aspect of the present invention is the rubber sheet according to any one of the first to ninth aspects, wherein the outer bottom surface on which the metal thin film is formed in the vibrator holder has a heat resistance and a chemical resistance.
  • the gist is to be in close contact with the tube wall through the buffer member.
  • the outer bottom surface of the bottom member is brought into close contact with the tube wall via the sheet-like buffer member, the ultrasonic wave can be reliably propagated.
  • the grease cannot maintain its shape when used at a high temperature for a long time. May decrease.
  • the sheet-like buffer member having heat resistance and chemical resistance is used, the outer bottom surface of the bottom member is not affected by deterioration of the buffer member even when used for a long period of time. Can be securely adhered to each other.
  • the invention described in claim 11 is a method of manufacturing the ultrasonic flowmeter according to any one of claims 1 to 10, wherein the cylindrical member and the bottom member are joined using an adhesive.
  • the gist of the manufacturing method of the ultrasonic flowmeter is as follows.
  • the thin film forming step is performed after the tubular member and the bottom member are joined to form the bottomed tubular vibrator holder.
  • the metal thin film can be reliably formed so as to block the joint portion between the tubular member and the bottom member.
  • liquid vaporized gas can be prevented from entering the vibrator holder by the metal thin film, and corrosion of electrodes and wiring of the ultrasonic vibrator housed in the vibrator holder can be avoided. Therefore, according to the present invention, an ultrasonic flowmeter having a long product life can be manufactured efficiently and reliably.
  • An ultrasonic flow meter 10 shown in FIG. 1 is provided in the middle of a chemical solution supply line of a CMP (Chemical Mechanical Polishing) device, and measures the flow rate of the chemical solution W1 (fluid) supplied to the CMP device.
  • the chemical liquid W1 supplied to the CMP apparatus is hydrofluoric acid or sulfuric acid
  • the liquid temperature of the chemical liquid W1 is a temperature of 100 ° C. or higher and 200 ° C. or lower.
  • the ultrasonic flowmeter 10 has a resin-made flowmeter body 13 having a pipe 12 forming a flow path 11 through which a chemical solution W1 flows, and a pipe wall 14 at an upstream position and a downstream position in the flow path 11. And a pair of ultrasonic transducers 16 in a positional relationship facing each other.
  • the flow path 11 of the flow meter body 13 is a liquid pressure-feeding pipe connected to the chemical liquid circulation line, and is formed in a U shape along the flow direction. That is, the flow channel of the flowmeter body 13 has a straight pipe portion 18 extending straight and both ends of the straight pipe portion 18 are bent at right angles in the same direction (upper side in FIG. 1). It is.
  • a pair of ultrasonic transducers 16 are provided at the upstream and downstream ends of the straight pipe portion 18 of the flow path 11.
  • the flow meter body 13 is formed using a fluororesin (specifically, PFA) having excellent heat resistance and chemical resistance, and the length of the straight pipe portion 18 is about 10 cm.
  • PFA fluororesin
  • the cross-sectional shape of the flow path 11 formed in the pipe 12 of the flow meter main body 13 is circular, and the aperture is about 6 mm.
  • the ultrasonic flowmeter 10 of the present embodiment is a bottomed cylindrical member made of a rigid body, and the flowmeter main body 13 in a state in which the ultrasonic transducer 16 is housed. And a pair of vibrator holders 20 to be mounted on. More specifically, the vibrator holder 20 of the present embodiment is formed into a bottomed cylindrical shape by a cylindrical tube member 21 and a disk-shaped bottom member 22 (see FIG. 5). Further, in the flow meter main body 13, receiving recesses 23 are formed on the outer sides of the tube walls 14 positioned at both ends of the straight pipe portion 18.
  • the bottom member 22 of the vibrator holder 20 is directed to the straight pipe portion 18 (tube wall 14) side, and the bottom member 22 is passed through the buffer member 24 to the tube wall 14 of the flow path 11.
  • the vibrator holder 20 is housed in a state where the vibrator holder 20 is in contact therewith.
  • the buffer member 24 is a rubber sheet-like member formed using a material having excellent heat resistance and chemical resistance (such as silicone rubber or fluoro rubber).
  • the buffer member 24 has a thickness that does not affect the propagation of ultrasonic waves (for example, a thickness of about 200 ⁇ m), and is formed thinner than the bottom member 22.
  • grease for example, silicone grease
  • the cylindrical member 21 constituting the vibrator holder 20 is made of a copper pipe functioning as a shield member, and has an outer diameter of about 12.5 mm and a length of about 15 mm. Further, the inner diameter of the cylindrical member 21 is slightly larger than the diameter of the ultrasonic transducer 16. In a state where the ultrasonic transducer 16 is accommodated inside the cylindrical member 21, a gap is formed between the inner surface of the cylindrical member 21 and the side surface of the ultrasonic transducer 16.
  • the bottom member 22 constituting the vibrator holder 20 is a silica-based ceramics containing silica (SiO 2 ), and includes a side face 26, an inner bottom face 27 to which the ultrasonic vibrator 16 is fixed, and an inner bottom face. 27 is formed in a disk shape having an outer bottom surface 28 located on the opposite side of 27 (see FIG. 5 and the like).
  • the bottom member 22 has a larger diameter than the ultrasonic transducer 16 (a diameter of about 12.5 mm, which is equal to the cylindrical member 21). And in the inner bottom face 27 of the bottom member 22, the edge part 29 of the cylinder member 21 is joined to the outer edge part outside the fixing part of the ultrasonic transducer
  • the ultrasonic transducer 16 of the present embodiment is made of, for example, lead zirconate titanate (PZT), and is formed in a disk shape having a diameter of about 10 mm and a thickness of about 1.0 mm. As shown in FIGS. 3 and 4, the ultrasonic transducer 16 has a first main surface 31 and a second main surface 32 provided on the back side thereof. A pair of electrodes 33 and 34 each having a folded electrode 33 a is provided on each of the main surfaces 31 and 32 of the ultrasonic transducer 16.
  • PZT lead zirconate titanate
  • a first electrode 33 (ground electrode) is provided on the first main surface 31 side, and the surface of the first electrode 33 is the bottom member 22 of the transducer holder 20. It is bonded and fixed to the inner bottom surface 27 (see FIG. 5).
  • a part 33 a of the first electrode 33 and a second electrode 34 (working electrode) folded from the first main surface 31 side are provided on the second main surface 32 side. Yes.
  • Each electrode 33, 34 is formed using silver.
  • the ground line 36 is connected to the electrode 33 a on the second main surface 32 side of the ultrasonic transducer 16 and the signal line 37 is connected to the second electrode 34.
  • the electrode 33a and the electrode 34 are provided at predetermined intervals, and these electrodes are insulated (refer FIG.3 and FIG.4).
  • the entire first main surface 31 is bonded to the bottom member 22 of the transducer holder 20, and the first main surface 31 emits ultrasonic waves. It functions as an acoustic radiation surface.
  • the bottom member 22 interposed between the tube wall 14 of the flow path 11 and the ultrasonic transducer 16 and bonded to the acoustic radiation surface (first main surface 31) of the ultrasonic transducer 16 serves as an acoustic matching layer. Function. That is, the bottom member 22 is a member having an acoustic impedance smaller than that of the ultrasonic transducer 16 and larger than that of the tube wall 14 and efficiently propagates ultrasonic waves.
  • the acoustic impedance of the ultrasonic transducer 16 is 30.0 ⁇ 10 6 N ⁇ s / m 3
  • the acoustic impedance of the bottom member 22 is 12.5 ⁇ .
  • 10 6 N ⁇ s / m 3 and the acoustic impedance of the tube wall 14 (PFA) is 2.6 ⁇ 10 6 N ⁇ s / m 3 .
  • the resonance frequency f of the ultrasonic transducer 16 is 2 MHz
  • the sound velocity v in the bottom member 22 is about 5000 m / s.
  • the adhesive layer (not shown) interposed between the ultrasonic transducer 16 and the bottom member 22 has a thickness (thickness of about several tens of ⁇ m) that does not affect the propagation of the ultrasonic waves. It is formed thinner than.
  • the bottom member 22 is joined to the other side (lower side in the drawing) and the other side (upward side in the drawing) located on the opposite side.
  • a U-shaped cutout portion 40 is formed on the end portion 30 side so as to extend from the end portion 30 to the one end portion 29 side.
  • two elongated slit grooves 41 are formed at positions facing the U-shaped notch 40 in the cylindrical member 21.
  • a ground wire 36 is soldered to a portion sandwiched between the two slit grooves 41 on the inner surface of the cylindrical member 21.
  • the conductor portion 36a is exposed by removing a part of the coating in the middle of the ground wire 36 connected to the electrode 33a of the ultrasonic transducer 16, and the exposure is performed.
  • the conducting wire portion 36a is solder-connected to the cylindrical member 21.
  • a disk-shaped lid member 43 made of copper closes the opening of the end 30 at the end 30 where the notch 40 and the slit groove 41 are formed.
  • the cylindrical member 21, the bottom member 22, and the lid member 43 are disposed so as to surround the ultrasonic transducer 16.
  • a coaxial cable receptacle 45 is disposed in the notch 40 of the cylindrical member 21.
  • the receptacle 45 according to the present embodiment is an SMB specification receptacle, and is fixed to the flow meter main body 13 using a receptacle fixing nut 46, a receptacle washer 47, and the like.
  • a coaxial plug 49 attached to the tip of the coaxial cable 48 is coupled to the receptacle 45.
  • the coaxial plug 49 is a plug-type SMB coaxial connector that can be coupled to the receptacle 45. Further, in the flow meter main body 13, a bottomed two-stage cylindrical cover member 51 is mounted so as to cover the coupling portion between the receptacle 45 and the coaxial plug 49.
  • the cover member 51 is formed using a fluororesin (for example, PFA) that is excellent in heat resistance and chemical resistance, similarly to the flow meter main body 13.
  • the central conductor 53 of the receptacle 45 and the second electrode 34 of the ultrasonic transducer 16 are connected via a signal line 37.
  • the ground conductor 54 of the receptacle 45 is connected to the cylindrical member 21 and a part 33 a of the first electrode 33 of the ultrasonic transducer 16 via the ground line 36.
  • the first electrode 33 (ground electrode), the cylindrical member 21, and the lid member 43 of the ultrasonic transducer 16 are set to the same potential (ground potential).
  • the signal line 37 is disposed in a space surrounded by the grounded conductor 54 of the first electrode 33, the cylindrical member 21, the lid member 43, and the receptacle 45, all of which are grounded. Yes. Therefore, it is possible to effectively prevent noise from being superimposed on the signal of the signal line 37, that is, the output signal of the ultrasonic transducer 16.
  • a pressing lid 57 is disposed on the outside (right side in FIG. 2) of the lid member 43 of the vibrator holder 20 via a wave washer 56.
  • the presser lid 57 is screwed into the housing recess 23 of the flow meter main body 13 and presses the vibrator holder 20 via the wave washer 56.
  • the outer bottom surface 28 of the bottom member 22 is pressed against the tube wall 14 side of the flow path 11 through the cylindrical member 21.
  • the bottom member 22 (acoustic matching layer) of the vibrator holder 20 is brought into close contact with the tube wall 14 of the flow path 11 via the buffer member 24.
  • a non-gas permeable metal thin film 61 is formed on the outer surface 58 of the vibrator holder 20, at least a region extending from the outer bottom surface 28 of the bottom member 22 through the side surface 26 of the bottom member 22 to the joint portion 60 between the bottom member 22 and the cylindrical member 21 is covered.
  • a non-gas permeable metal thin film 61 is formed on the outer surface 58 of the vibrator holder 20, at least a region extending from the outer bottom surface 28 of the bottom member 22 through the side surface 26 of the bottom member 22 to the joint portion 60 between the bottom member 22 and the cylindrical member 21 is covered.
  • a non-gas permeable metal thin film 61 is formed.
  • the metal thin film 61 covers the entire outer bottom surface 28 of the bottom member 22 and the entire side surface 26 of the bottom member 22, and the cylindrical member with reference to the joint portion 60 between the bottom member 22 and the cylindrical member 21.
  • the outer surface 62 of the cylindrical member 21 is covered to a position of about several mm on the 21 side.
  • the metal thin film 61 in the present embodiment is a thin film made of a metal material (specifically, gold or platinum) having excellent corrosion resistance, and has a thickness of about several ⁇ m.
  • the metal thin film 61 is a vapor-deposited film formed by gold or platinum vacuum vapor deposition, and has a property of not allowing the vaporized corrosive gas 3 to pass through at all or almost.
  • the bottom member 22 is made of silica-based ceramics, and the surface thereof has a surface roughness Ra that is greater than the outer surface of the resin-made tube wall 14 (PFA). Specifically, the surface roughness Ra of the bottom member 22 is 1 ⁇ m or more, and the surface roughness Ra of the tube wall 14 (PFA) is 0.1 ⁇ m or less. Therefore, the metal thin film 61 formed on the side surface 26 and the outer bottom surface 28 of the bottom member 22 has sufficient adhesion strength (peel strength).
  • the ultrasonic flowmeter 10 shown in FIG. 1 is connected to a control device (not shown) via a coaxial cable 48.
  • the control device is configured around a known microcomputer including a CPU, ROM, RAM, input / output circuit, and the like, and performs arithmetic processing of signals input / output via the coaxial cable 48.
  • ultrasonic waves are transmitted and received through the chemical liquid W1 flowing through the straight pipe portion 18 of the flow path 11 using a pair of ultrasonic transducers 16 attached to the flow meter main body 13.
  • the control device measures the propagation times when the ultrasonic waves propagate in the forward direction and the reverse direction with respect to the flow of the chemical liquid W1, based on the ultrasonic transmission signal and the ultrasonic reception signal.
  • medical solution W1 is calculated
  • the flow rate of the chemical liquid W1 is measured by converting the flow rate into a flow rate.
  • a control apparatus manages the flow volume of the chemical
  • the cylindrical member 21 and the bottom member 22 are prepared. Specifically, a pipe member made of copper is cut into a cylindrical member 21 having a predetermined length (15 mm in this embodiment). Thereafter, by performing a cutting process or the like, the U-shaped cutout portion 40 is formed at the end portion 30 of the cylindrical member 21 and two elongated slit grooves 41 are formed. In addition, after forming the notch part 40 and the elongate slit groove
  • the first electrode 33 of the ultrasonic transducer 16 is bonded and fixed to one surface which becomes the inner bottom surface 27 in the bottom member 22.
  • the ground wire 36 is solder-connected to the electrode 33a of the folded portion of the first electrode 33 on the second main surface 32 of the ultrasonic transducer 16, and the signal line 37 is connected to the second electrode 34 by soldering.
  • An ultrasonic transducer 16 is prepared in advance. Then, after applying an adhesive to either the inner bottom surface 27 of the bottom member 22 or the surface of the first electrode 33 of the ultrasonic transducer 16, the ultrasonic transducer 16 is adhered to the inner bottom surface 27 of the bottom member 22. Fix it.
  • the joining process between the tubular member 21 and the bottom member 22 is performed.
  • an adhesive is applied to one of the end surface of the tubular member 21 where the notch 40 and the slit groove 41 are not formed and the outer edge portion of the inner bottom surface 27 of the bottom member 22.
  • the member 21 and the bottom member 22 are bonded and fixed. As a result, a bottomed cylindrical vibrator holder 20 is formed.
  • the metal thin film 61 is formed on the outer surface 58 of the vibrator holder 20 by vacuum deposition of gold or platinum.
  • a gold or platinum thin film is vapor-deposited on the outer bottom surface 28 and the side surface 26 of the bottom member 22, and a region (cylinder) including the joint portion 60 between the bottom member 22 and the cylindrical member 21.
  • a thin film of gold or platinum is also deposited on a region including a part of the outer surface 62 of the member 21.
  • the metal thin film 61 is provided so that the outer surface 58 is covered to a position of about several mm on the cylindrical member 21 side with reference to the joint portion 60 between the bottom member 22 and the cylindrical member 21.
  • the conductive wire portion 36a exposed by the ground wire 36 extending from the electrode 33a of the ultrasonic transducer 16 is solder-connected to a portion sandwiched between the two slit grooves 41 on the inner surface 64 of the cylindrical member 21.
  • the ground wire 36 is solder-connected to the ground conductor 54 of the receptacle 45, and the signal line 37 extending from the second electrode 34 of the ultrasonic transducer 16 is solder-connected to the center conductor 53 of the receptacle 45.
  • the vibrator holder 20 is inserted into the housing recess 23 of the flow meter main body 13 in a state where the sheet-like buffer member 24 is disposed in close contact with the outer bottom surface 28 of the bottom member 22.
  • the vibrator holder 20 is arranged so that the U-shaped notch 40 in the cylindrical member 21 opens upward. Then, the receptacle 45 is disposed in the notch 40 and the receptacle 45 is fixed to the flowmeter main body 13 using the receptacle fixing nut 46 and the receptacle washer 47. Further, in the housing recess 23, the lid member 43 is covered from the rear of the vibrator holder 20 and the pressing lid 57 is screwed through the wave washer 56.
  • the vibrator holder 20 is pressed by the holding lid 57, and the vibrator holder 20 is pressed with the outer bottom surface 28 of the bottom member 22 pressed against the tube wall 14 side of the flow path 11 through the lid member 43 and the cylindrical member 21. 20 is mounted in the receiving recess 23.
  • the bottom member 22 and the tubular member 21 are joined to each other on the outer surface 58 of the transducer holder 20 from the outer bottom surface 28 of the bottom member 22 through the side surface 26 of the bottom member 22.
  • the metal thin film 61 is formed so as to cover a part of the outer surface 58 including the region extending over the portion 60.
  • the metal thin film 61 blocks the penetration of the gas (the vaporized gas of the chemical liquid W1) into the vibrator holder 20.
  • the electrodes 33 and 34 of the ultrasonic transducer 16 accommodated in the transducer holder 20 and the wiring (the ground wire 36 and the signal wire 37).
  • the metal thin film 61 is formed on the surface of the vibrator holder 20 (the cylindrical member 21 and the bottom member 22) made of a rigid body, not on the resin flow meter main body 13 side. Has been. Accordingly, even when the flow rate of the high-temperature chemical solution W1 is measured, the outer surface 58 of the vibrator holder 20 hardly undergoes thermal expansion like the resin surface, so that the metal thin film 61 is in close contact with the outer surface 58 of the vibrator holder 20. It is securely held in the state. As a result, even when the ultrasonic flowmeter 10 is used for a long time, the corrosion of the ultrasonic transducer 16 and the like can be avoided by the metal thin film 61.
  • the ultrasonic vibrator 16 in the vibrator holder 20, the ultrasonic vibrator 16 is fixed to the inner bottom surface 27 of the bottom member 22 and is joined to the outer edge portion of the inner bottom surface 27.
  • the outer bottom surface 28 of the bottom member 22 is pressed against the tube wall 14 by the cylindrical member 21.
  • the bottom member 22 is interposed between the ultrasonic transducer 16 and the tube wall 14 and functions as an acoustic matching layer. Specifically, the acoustic impedance of the bottom member 22 is smaller than the ultrasonic transducer 16 and larger than the tube wall 14.
  • the bottom member 22 interposing the bottom member 22 between the ultrasonic transducer 16 and the tube wall 14, the difference in acoustic impedance at the interface between the members can be reduced. Furthermore, the bottom member 22 has a thickness of ⁇ / 4 corresponding to the wavelength ⁇ of the ultrasonic wave. If it does in this way, the ultrasonic wave output from the ultrasonic transducer
  • the metal thin film 61 is made of gold or platinum, and therefore, the chemical solution W1 (chemical solution such as hydrofluoric acid or sulfuric acid) that causes corrosion flows through the flow path 11. However, sufficient corrosion resistance can be ensured for the chemical liquid W1.
  • the chemical solution W1 chemical solution such as hydrofluoric acid or sulfuric acid
  • the bottom member 22 is made of ceramics, and the surface has a surface roughness Ra larger than that of the outer surface of the resin tube wall 14. In this way, the metal thin film 61 having high adhesion strength (peel strength) and difficult to peel can be reliably formed on the side surface 26 and the outer bottom surface 28 of the bottom member 22.
  • the thickness of the metal thin film 61 is several ⁇ m, and is thinner than 1/8 (200 ⁇ m) of the wavelength ⁇ of the ultrasonic wave propagating through the metal thin film 61. Is formed.
  • the ultrasonic wave is not reflected on the surface of the metal thin film 61 and does not affect the propagation of the ultrasonic wave.
  • the material cost of the metal thin film 61 can be kept low.
  • the outer bottom surface 28 of the bottom member 22 is in close contact with the tube wall 14 via the rubber sheet-like buffer member 24, so that the ultrasonic wave is reliably transmitted. Can be propagated. Further, since the buffer member 24 has heat resistance and chemical resistance, the sheet shape is maintained without deterioration of the buffer member 24 even when used for a long period of time, so that the outer bottom surface 28 of the bottom member 22 is connected to the tube wall 14. Can be securely adhered to each other.
  • the thin film forming step is performed after the cylindrical member 21 and the bottom member 22 are bonded to form the bottomed cylindrical vibrator holder 20 in the bonding step. Accordingly, the metal thin film 61 can be formed on the outer surface 58 of the vibrator holder 20 so as to close the joint portion 60 between the tubular member 21 and the bottom member 22. Further, the vaporized gas of the chemical solution W1 can be prevented from entering the vibrator holder 20 by the metal thin film 61, and the electrodes 33 and 34 of the ultrasonic vibrator 16 accommodated in the vibrator holder 20 and the wiring 36, Corrosion of 37 etc. is avoided. Therefore, according to the present embodiment, the ultrasonic flowmeter 10 having a long product life can be manufactured efficiently and reliably.
  • two slit grooves 41 are formed on the end 30 side of the cylindrical member 21 constituting the transducer holder 20, and are sandwiched between the slit grooves 41.
  • a ground wire 36 is connected to the portion using solder.
  • the chemical solution W1 in an amount necessary for the semiconductor polishing process can be reliably supplied to the CMP apparatus. Moreover, since the chemical
  • the metal thin film 61 is formed on the outer surface 58 of the vibrator holder 20 by vacuum deposition of gold or platinum, but is not limited to this.
  • the metal thin film 61 may be formed by other methods such as CVD or electroless plating.
  • electroless plating first, electroless copper plating is performed to form a copper plating layer as a base layer, and then electroless plating of gold or platinum is performed. Even in this case, a thin film of gold or platinum having excellent corrosion resistance can be formed on the outer surface 58 of the vibrator holder 20.
  • the metal thin film 61 is formed on a part of the outer surface 58 including the joint portion 60 between the bottom member 22 and the cylindrical member 21 in the vibrator holder 20. It is not limited to. As shown in FIG. 7, a metal thin film 61 may be formed on the entire outer surface 62 of the vibrator holder 20A. Further, as shown in FIG. 8, the metal thin film 61 may be formed on the entire inner surface 65 in addition to the entire outer surface 58 of the vibrator holder 20B.
  • the metal thin film 61 When the metal thin film 61 is formed in this way, corrosion of the electrodes 33 and 34 of the ultrasonic transducer 16 and the wirings (the signal line 37 and the ground line 36) in the transducer holders 20A and 20B can be more reliably prevented. it can.
  • the cylindrical member 21 constituting the transducer holder 20 is a metal member made of copper, but is not limited to this.
  • the metal thin film 61 is formed on the entire outer surface 58 or the entire inner surface 65 as in the vibrator holders 20A and 20B shown in FIGS. 7 and 8, the metal thin film 61 ensures a shielding function against electric noise.
  • the cylindrical member 21 may be formed of ceramics (rigid body) similarly to the bottom member 22.
  • the thin film forming step is performed after the ultrasonic transducer 16 is bonded and fixed to the inner bottom surface 27 of the bottom member 22.
  • the present invention is not limited to this.
  • the ultrasonic transducer 16 may be bonded and fixed to the inner bottom surface 27 of the bottom member 22 after performing the thin film forming step.
  • the ultrasonic vibrator 16 made of lead zirconate titanate (PZT) is used, but the material for forming the ultrasonic vibrator 16 is not particularly limited. Specifically, for example, an ultrasonic vibrator made of a potassium sodium niobate-based (alkali niobate-based) piezoelectric ceramic may be used.
  • the fluororesin specifically, PFA
  • the material for forming the flow meter body 13 other resin materials may be used as long as they have excellent heat resistance and chemical resistance.
  • the material for forming the bottom member 22 that functions as an acoustic matching layer may be changed as appropriate according to the acoustic impedance of the ultrasonic transducer 16 and the acoustic impedance of the flowmeter body 13.
  • the flow meter main body 13 having the tube 12 in which the U-shaped flow path 11 is formed is used, but the present invention is not limited to this. Specifically, a flow rate having a Z-shaped flow path in which both ends of the straight pipe portion 18 are bent at right angles in opposite directions (for example, the upper side and the lower side) and a pipe formed with a flow path of other shapes.
  • a meter body may be used.
  • the ultrasonic flowmeter 10 of the said embodiment was used for the chemical
  • the ultrasonic flow meter 10 may be used in other processing apparatuses that perform processing such as cleaning of parts and generation of medicines using the chemical liquid W1.
  • the cylindrical member is a cylindrical copper pipe, and has a slightly larger inner diameter than the disk-shaped ultrasonic transducer. Ultrasonic flow meter.
  • the fluid is hydrofluoric acid or sulfuric acid as a chemical solution flowing through a chemical solution circulation line of a semiconductor manufacturing apparatus, and the liquid temperature of the chemical solution is 100 ° C or higher and 200 ° C or lower.
  • Ultrasonic flowmeter characterized by being.

Abstract

La présente invention vise à fournir un débitmètre ultrasonore pouvant empêcher de façon fiable la corrosion des électrodes et du câblage de transducteurs à ultrasons, et allonger la durée de vie d'un produit. Un débitmètre ultrasonore (10) comprend un corps de débitmètre en résine (13) ayant un tube (12) formant un trajet d'écoulement (11), une paire de transducteurs à ultrasons (16) pour transmettre et recevoir des ultrasons par l'intermédiaire d'une paroi de tube (14), et une paire de supports de transducteur (20) fixés à l'extérieur de la paroi de tube (14) dans un état de réception de transducteurs à ultrasons respectifs (16). Les supports de transducteur (20) comprennent un élément inférieur (22) ayant une forme de disque, et un élément tube (21) relié à la partie de bord externe de la surface inférieure interne (27) de l'élément inférieur (22). Un film mince métallique imperméable aux gaz (61) est formé sur la surface externe (58) de chaque support de transducteur (20) de façon à recouvrir au moins une zone s'étendant sur la surface inférieure externe (28) de l'élément inférieur (22), les surfaces latérales (26) de l'élément inférieur (22), et la partie de liaison (60) de l'élément inférieur (22) et l'élément tube (21).
PCT/JP2014/066628 2014-06-24 2014-06-24 Débitmètre ultrasonore et son procédé de fabrication WO2015198386A1 (fr)

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PCT/JP2014/066628 WO2015198386A1 (fr) 2014-06-24 2014-06-24 Débitmètre ultrasonore et son procédé de fabrication
JP2016528778A JP6326610B2 (ja) 2014-06-24 2014-06-24 超音波流量計及びその製造方法

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3196601A1 (fr) * 2016-01-22 2017-07-26 Krohne AG Convertisseur d'ultrasons
EP3382351A1 (fr) * 2017-03-31 2018-10-03 Ryusok Co., Ltd Débitmètre ultrasonique
KR102573268B1 (ko) * 2023-02-10 2023-08-31 주식회사 커미조아 정밀 유량계

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Publication number Priority date Publication date Assignee Title
JPH0477620A (ja) * 1990-07-20 1992-03-11 Tokico Ltd 流量計
JP2000111371A (ja) * 1998-09-30 2000-04-18 Tokico Ltd 超音波検出器
JP2002135894A (ja) * 2000-10-26 2002-05-10 Murata Mfg Co Ltd 超音波センサ及びそれを用いた電子装置
JP2002152889A (ja) * 2000-11-09 2002-05-24 Murata Mfg Co Ltd 超音波センサ及びそれを用いた電子装置
JP2007221707A (ja) * 2006-02-20 2007-08-30 Honda Electronic Co Ltd 超音波センサ、超音波流量計用検出器及び超音波流量計
JP2012037247A (ja) * 2010-08-03 2012-02-23 Honda Electronic Co Ltd 超音波流量計

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0477620A (ja) * 1990-07-20 1992-03-11 Tokico Ltd 流量計
JP2000111371A (ja) * 1998-09-30 2000-04-18 Tokico Ltd 超音波検出器
JP2002135894A (ja) * 2000-10-26 2002-05-10 Murata Mfg Co Ltd 超音波センサ及びそれを用いた電子装置
JP2002152889A (ja) * 2000-11-09 2002-05-24 Murata Mfg Co Ltd 超音波センサ及びそれを用いた電子装置
JP2007221707A (ja) * 2006-02-20 2007-08-30 Honda Electronic Co Ltd 超音波センサ、超音波流量計用検出器及び超音波流量計
JP2012037247A (ja) * 2010-08-03 2012-02-23 Honda Electronic Co Ltd 超音波流量計

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3196601A1 (fr) * 2016-01-22 2017-07-26 Krohne AG Convertisseur d'ultrasons
US9989389B2 (en) 2016-01-22 2018-06-05 Krohne Ag Ultrasonic transducer
EP3382351A1 (fr) * 2017-03-31 2018-10-03 Ryusok Co., Ltd Débitmètre ultrasonique
CN108692776A (zh) * 2017-03-31 2018-10-23 株式会社琉Ｓｏｋ 超声波式流量计
KR102573268B1 (ko) * 2023-02-10 2023-08-31 주식회사 커미조아 정밀 유량계

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