WO2015186740A1 - Structure mems - Google Patents

Structure mems Download PDF

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Publication number
WO2015186740A1
WO2015186740A1 PCT/JP2015/066041 JP2015066041W WO2015186740A1 WO 2015186740 A1 WO2015186740 A1 WO 2015186740A1 JP 2015066041 W JP2015066041 W JP 2015066041W WO 2015186740 A1 WO2015186740 A1 WO 2015186740A1
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WO
WIPO (PCT)
Prior art keywords
frame
torsion bar
mems structure
weight
weight portion
Prior art date
Application number
PCT/JP2015/066041
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English (en)
Japanese (ja)
Inventor
潤弥 松岡
辻　信昭
夕輝 植屋
威 岡見
崇 溝田
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Publication of WO2015186740A1 publication Critical patent/WO2015186740A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure

Definitions

  • the present invention relates to a MEMS structure manufactured using MEMS (Micro Electro Mechanical Systems) technology.
  • MEMS structures manufactured using MEMS technology have been used in various sensors (for example, acceleration sensors and gyro sensors) for detecting physical quantities.
  • a MEMS structure used for such a sensor has a movable part including a weight part that can be displaced by an external cause, and converts the deformation and displacement of the movable part into an electrical signal and outputs the physical quantity, thereby obtaining a physical quantity. Configured to detect.
  • Patent Document 1 As an invention related to such a MEMS structure, for example, an invention described in JP 2011-083844 A (Patent Document 1) is known.
  • the MEMS device described in Patent Document 1 includes a lower electrode fixed on a substrate surface, and a first drive arm and a second drive arm that function as the movable part (weight part).
  • the first drive arm and the second drive arm in Patent Document 1 are cantilever beams extending horizontally from the first anchor base and the second anchor base formed on the substrate surface with a space between the lower electrode and the lower electrode.
  • the tip of each drive arm moves in the direction approaching / separating from the lower electrode (Z direction in Patent Document 1). ing.
  • the first drive arm and the second drive arm that function as weight portions have a degree of freedom only in a predetermined direction (Z direction).
  • Z direction a predetermined direction
  • a MEMS structure having a degree of freedom of the weight portion in two directions any two of the X direction, the Y direction, and the Z direction is desired.
  • a case will be considered in which a sensor is configured using a MEMS structure that supports one end of the weight portion and has the other end as a free end.
  • the free end of the weight portion is located closer to the lower electrode side than the fixed end side (that is, one end portion side).
  • the electrostatic attractive force generated by the lower electrode increases with the square of the distance between the weight portion and the lower electrode, a larger electrostatic attractive force acts on the free end of the weight portion.
  • the portion including the weight portion when the portion including the weight portion is vibrated in a direction parallel to the lower electrode surface, the free end side of the weight portion is located on the lower electrode side.
  • the gap between the part and the lower electrode changes with horizontal vibration. That is, when this configuration is adopted, the capacitance between the weight portion and the lower electrode changes with the change in the gap, and therefore, an interference signal (Quadrature that may be confused with the Coriolis force). (Error) may occur.
  • the present invention has been made in view of the above-described problems, and relates to a MEMS structure manufactured by using MEMS technology.
  • the present invention provides a degree of freedom in one direction with respect to one weight portion, and has high sensitivity and interference signal.
  • a MEMS structure capable of forming a sensor with a small amount of sensor.
  • a MEMS structure includes a support portion, and a movable portion that is supported by the support portion and moves relative to the support portion, and the movable portion has a rectangular plate shape.
  • a weight part formed on the frame part, a frame-like part surrounding an outer edge of the weight part, and one end side of the frame-like part, the frame-like part is supported swingably with respect to the support part and elastically deformable
  • the first torsion bar configured as described above and the other end side of the frame-like part opposite to the first torsion bar are supported so that the end of the weight part can swing relative to the frame-like part.
  • a second torsion bar configured to be elastically deformable.
  • the MEMS structure includes a support part and a movable part supported by the support part and moving relative to the support part.
  • the movable part includes a weight part, It has a frame-shaped portion, a first torsion bar, and a second torsion bar.
  • the weight part is supported by the 2nd torsion bar located in the other end side of a frame-shaped part so that rocking is possible with respect to a frame-shaped part. That is, the inclination of the weight part with respect to the frame-like part (that is, the magnitude of the swing) can be adjusted by the spring constant relating to the twist of the second torsion bar. Therefore, according to the MEMS structure, the weight of the rectangular plate shape can be moved in the vertical direction while maintaining the substantially horizontal state by the restoring force related to the twist of the first torsion bar and the second torsion bar. .
  • both the first torsion bar and the second torsion bar are configured to be elastically deformable
  • the weight portion when the weight portion moves in the horizontal direction, the first torsion bar and the second torsion bar Due to the displacement accompanying the elastic deformation of the bar, the weight portion can be moved while maintaining a substantially horizontal state. That is, according to the MEMS structure, since the weight portion is supported so as to be movable in two directions, the vertical direction and the horizontal direction, a degree of freedom in two directions can be given to one weight portion.
  • the weight part of the MEMS structure when the weight part of the MEMS structure is arranged on the substrate having the fixed electrode on the surface and the sensor is configured, the weight part moves in the vertical direction, and the weight part is also moved toward the fixed electrode. Move while keeping almost horizontal. Therefore, when the MEMS structure is used for a sensor, the average displacement amount of the weight portion can be increased by about 25% as compared with a configuration in which one end side of the weight portion is supported as in Patent Document 1 or the like.
  • the MEMS structure since the sensor detects a change in physical quantity based on a change amount of capacitance, and the change amount of capacitance is proportional to the average displacement amount, the MEMS structure can increase the sensitivity of the sensor.
  • the electrostatic attractive force is proportional to the square of the distance between the electrode plates, it acts strongly on the free end in a configuration that supports one end side of the weight portion as in Patent Document 1 and the like.
  • the weight portion in the MEMS structure moves in the vertical direction while maintaining a substantially horizontal state, the electrostatic attraction acting on the weight portion in the MEMS structure is applied to one end side of the weight portion described above. It is smaller than the electrostatic attractive force acting on the free end in the supporting configuration.
  • the electrostatic attraction acting on the weight portion can be reduced as compared with the configuration in which one end side of the weight portion is supported as in Patent Document 1 and the like, and the pull-in Occurrence of the phenomenon can be suppressed.
  • the weight portion is almost horizontal in any case. While maintaining this, it moves above the fixed electrode with vibration. That is, since the gap between the weight portion and the fixed electrode is less likely to change due to the vibration of the movable portion, generation of an interference signal (Quadrature Error) can be reduced by using the MEMES structure.
  • a MEMS structure according to another aspect of the present invention is the MEMS structure according to claim 1, wherein the frame-like portion connects between the first torsion bar and the second torsion bar. It has a pair of connecting parts configured to be elastically deformable.
  • the frame-shaped portion has a pair of connecting portions, and the pair of connecting portions connects the first torsion bar and the second torsion bar and is elastically deformable. It is configured.
  • the pair of connecting portions are elastically deformed both when the weight portion of the MEMS structure moves in the vertical direction and when it moves in the horizontal direction. Therefore, according to the MEMS structure, by adjusting the spring constants of the pair of connecting portions, it is possible to easily adjust the state of the weight portion during vertical movement and horizontal movement to a desired state.
  • the MEMS structure of the present invention it is possible to give a single weight part a degree of freedom in the biaxial direction, and it is possible to move the rectangular plate-shaped weight part while maintaining a substantially horizontal state.
  • the MEMS structure 1 according to the first embodiment is manufactured using a well-known MEMS (Micro Electro Mechanical Systems) technique, and constitutes a part of a capacitive angular velocity sensor. .
  • MEMS Micro Electro Mechanical Systems
  • the MEMS structure 1 includes a support portion 10 and a movable portion 20 that has a rectangular shape in plan view.
  • the sensor is disposed at a predetermined interval with respect to the substrate surface constituting the base portion of the sensor.
  • the direction along the longitudinal direction of the movable portion 20 is the X direction
  • the direction perpendicular to the X direction is along the short direction of the movable portion 20.
  • the Y direction and the direction perpendicular to both the X direction and the Y direction are defined as the Z direction.
  • the support portion 10 and the movable portion 20 can be vibrated in the X-axis direction.
  • an anchor or the like is formed by etching an electrically conductive low-resistance silicon material or the like.
  • the support portion 10 is arranged in parallel with a predetermined interval with respect to the substrate surface.
  • the support portion 10 has a vibration movable electrode (not shown), and can vibrate in the X direction by cooperating with a vibration fixed electrode (not shown) disposed on the substrate surface. Is formed.
  • the support 10 is electrically connected to an external circuit through a through hole (not shown) and a substrate electrode.
  • the movable portion 20 is a frame-like shape formed in a rectangular plate-like weight portion 21 and a rectangular frame shape surrounding the outer edge of the weight portion 21. It has a section 22, a first torsion bar 23, and a second torsion bar 24, and constitutes a detection part in a capacitive angular velocity sensor.
  • the movable portion 20 is formed to be movable relative to the support portion 10 and is disposed so as to face the fixed electrode disposed on the substrate surface with a predetermined interval. Therefore, the movable part 20 can change the electrostatic capacity between the movable part 20 and the fixed electrode by moving relative to the support part 10, and a change in angular velocity is detected by the change in the electrostatic capacity. can do.
  • the movable portion 20 is usually formed so as to be positioned substantially on the same plane as the support portion 10 (that is, when no external factors are acting)
  • the upper surface of the weight portion 21 and the upper surface of the frame-shaped portion 22 are at the same position in the Z direction as the upper surface of the support portion 10.
  • the weight portion 21 is formed in a substantially rectangular plate shape in plan view, and is disposed at a position facing the fixed electrode on the substrate surface. As will be described later, the weight portion 21 is disposed so as to be relatively displaceable with respect to the support portion 10, and by changing the distance between the fixed electrode and the facing area, The capacitance between the fixed electrodes can also be changed.
  • the frame-like part 22 is formed in a rectangular frame shape in plan view, and the inner wall of the frame-like part 22 is separated from the outer edge of the weight part 21 provided inside.
  • the frame-shaped portion 22 On one end side in the long side direction of the frame-shaped portion 22 (that is, the end portion on the ⁇ X direction side), the frame-shaped portion 22 is connected to the support portion 10 by a pair of first torsion bars. Therefore, the frame-like portion 22 is supported so as to be swingable with respect to the support portion 10 about the first torsion bar 23 as an axis, and the other end side of the frame-like portion 22 can be displaced in the Z direction.
  • a pair of second torsion is formed on the other end side in the long side direction of the frame-shaped portion 22 (that is, the end portion on the + X direction side), and the weights arranged inside the frame-shaped portion 22 The end of the part 21 and the frame-like part 22 are connected.
  • a pair of connecting portions 22A is formed on the long side portion of the frame-shaped portion 22 formed in a rectangular frame shape. 22 A of said connection parts are formed so that the rigidity lower than the short side part of the frame-shaped part 22 may be shown, and it is comprised so that bending deformation is possible to a Y direction and a Z direction.
  • the first torsion bar 23 is formed on one end side of the frame-shaped portion 22 in the long side direction (that is, the end portion on the ⁇ X direction side), and along the short side direction (Y direction) of the frame-shaped portion 22. It has a growing rod shape. One end portion of the first torsion bar 23 is connected to the support portion 10, and the other end portion is connected to one end side of the frame-like portion 22 in the X direction. Therefore, the first torsion bar 23 supports one end side of the frame-shaped portion 22 in the X direction so as to be swingable with respect to the support portion 10, and twists and deforms as the frame-shaped portion 22 swings. .
  • the second torsion bar 24 is formed on the other end side of the frame-shaped portion 22 in the long side direction (that is, the end portion on the + X direction side), and along the short side direction (Y direction) of the frame-shaped portion 22. It has a growing rod shape.
  • One end portion of the second torsion bar 24 is connected to the other end side of the frame-like portion 22 in the X direction, and the other end portion is connected to the other end portion of the weight portion 21 in the X direction. Accordingly, the second torsion bar 24 supports the other end portion side of the weight portion 21 in the X direction so as to be swingable with respect to the frame-shaped portion 22, and torsionally deforms as the weight portion 21 swings. To do.
  • the frame-like portion 22 of the movable portion 20 swings with respect to the support portion 10 with the first torsion bar 23 as an axis, and the frame on the + X direction side.
  • the end of the shape portion 22 is displaced in the ⁇ Z direction.
  • the first torsion bar 23 is twisted and deformed as the frame-shaped portion 22 swings. Therefore, the degree of swing (inclination) of the frame-like portion 22 relative to the support portion 10 is affected by the spring constant of the first torsion bar 23 that is torsionally deformed.
  • the connecting portion 22A in the frame-shaped portion 22 can be bent and deformed as the weight portion 21 is displaced in the ⁇ Z direction.
  • a second torsion bar 24 is disposed at the end of the frame-like portion 22 displaced in the ⁇ Z direction, and supports the end of the weight portion 21 so as to be swingable. ing. Accordingly, in this case, the weight portion 21 swings with respect to the frame-shaped portion 22 around the second torsion bar 24, and the end portion of the weight portion 21 in the ⁇ X direction is displaced in the ⁇ Z direction. At this time, the second torsion bar 24 is twisted and deformed as the weight portion 21 swings. Therefore, the degree of swing (inclination) of the weight portion 21 with respect to the frame-like portion 22 is affected by the spring constant of the second torsion bar 24 that is torsionally deformed.
  • the posture of the weight portion 21 when displaced in the Z direction is affected by the spring constants in the connecting portion 22A, the first torsion bar 23, and the second torsion bar 24.
  • the first torsion bar 23 and the second torsion bar 24 are strongly influenced. Therefore, according to the MEMS structure 1, by adjusting the spring constant of the first torsion bar 23 and the like, the weight portion 21 can be displaced in the Z direction while maintaining a horizontal posture with respect to the fixed electrode. It becomes possible.
  • the end portion of the frame-like portion 22 on the ⁇ X direction side is connected to the support portion 10 by the first torsion bar 23, and the end portion of the frame-like portion 22 on the + X direction side is a free end. It is configured.
  • the weight portion 21 of the movable portion 20 is displaced in the + Y direction
  • the end portion of the frame-like portion 22 on the + X direction side is moved so as to be displaced in the + Y direction.
  • the connecting portion 22A constituting the frame-like portion 22 is formed to be elastically deformable in the Y direction.
  • the weight portion 21 can be moved in the Y direction while maintaining the horizontal state with respect to the fixed electrode by the bending deformation of each connecting portion 22 ⁇ / b> A.
  • the deformation of the first torsion bar 23 and the second torsion bar 24 in the X direction can also be affected.
  • the connecting portion 22A, the first torsion bar 23, the second torsion bar 24, and the like are bent and deformed, so that they are affected by the spring constant of the connecting portion 22A and the like.
  • the weight portion 21 is displaced in the Y direction while maintaining a horizontal posture with respect to the fixed electrode. It becomes possible.
  • the MEMS structure 1 includes the support portion 10 and the movable portion 20, and the movable portion 20 includes the weight portion 21, the frame-like portion 22, and the first torsion.
  • a bar 23 and a second torsion bar 24 are provided.
  • the frame-like portion 22 is supported at the end on the ⁇ X direction side so as to be swingable with respect to the support portion 10 by the first torsion bar 23, and the weight portion 21 is formed on the + X-direction side of the frame-like portion 22.
  • the second torsion bar 24 is supported so as to be swingable. Therefore, as shown in FIGS. 3 and 4, according to the MEMS structure 1, the spring structure of the first torsion bar 23 and the second torsion bar 24 is adjusted to be horizontal with respect to the fixed electrode.
  • the weight portion 21 can be displaced in the Z direction while maintaining the above.
  • the connecting portion 22A of the frame-like portion 22 is configured to be able to bend and deform in the Y direction. Therefore, as shown in FIGS. 5 to 7, according to the MEMS structure 1, the weight portion 21 is maintained while maintaining a horizontal state with respect to the fixed electrode by adjusting the spring constant of the connecting portion 22A. Can be displaced in the Y direction. As described above, according to the MEMS structure 1, the weight portion 21 is supported so as to be movable in the two directions of the Z direction and the Y direction. Therefore, the one weight portion 21 is given a degree of freedom in two directions. be able to.
  • the weight portion 21 when the weight portion 21 is displaced in the Z direction, the weight portion 21 can be displaced while maintaining a horizontal state. Compared to the case where the one end side is swingably supported, the average displacement amount of the weight portion 21 can be increased by about 25%, and the sensitivity of the sensor can be increased.
  • the weight portion 21 moves in the Z direction while maintaining a substantially horizontal state, so that the displacement amount of the weight portion 21 supports one end side of the weight portion. It becomes smaller than the amount of displacement of the free end in the configuration. Therefore, according to the MEMS structure 1, the electrostatic attraction acting on the weight portion 21 can be reduced as compared with the configuration supporting the one end portion side of the weight portion, and the occurrence of the pull-in phenomenon can be suppressed. it can.
  • the support portion 10 and the movable portion 20 are configured to vibrate in the X direction, and the weight portion 21 is displaced in either the Y direction or the Z direction. Is displaced in a horizontal state with respect to the fixed electrode. Therefore, according to the MEMS structure 1, the weight portion 21 can be moved in a horizontal state with respect to the fixed electrode in any process that vibrates in the X direction. Since the gap between the weight portion 21 and the fixed electrode is less likely to change due to vibration in the X direction, the MEMS structure 1 can reduce the generation of interference signals (Quadrature Error).
  • the MEMS structure 1 according to the second embodiment has substantially the same basic configuration as the MEMS structure 1 according to the first embodiment, and the arrangement position of the first torsion bar 23 is different.
  • the description of the same configuration as in the first embodiment will be omitted, and the configuration related to the difference will be described in detail.
  • the MEMS structure 1 includes a support portion 10 and a movable portion 20, and the movable portion 20 includes a weight portion 21, a frame-shaped portion 22, and the like.
  • the first torsion bar 23 and the second torsion bar 24 are provided.
  • the support portion 10 supports the frame-like portion 22 at the end on the ⁇ X direction side, as in the first embodiment.
  • the support portion 10 according to the second embodiment is formed to protrude toward the frame-shaped portion 22 at the short side center portion of the rectangular frame-shaped portion 22.
  • the first torsion bar 23 according to the second embodiment is formed in a bar shape extending along the Y direction from the support portion 10 located in the center portion of the short side of the frame-shaped portion 22.
  • the connection part 22A is connected. That is, the first torsion bar 23 according to the second embodiment supports the frame portion 22 on the ⁇ X direction side so as to be swingable with respect to the support portion 10, and the frame portion 22 on the ⁇ X direction side. Part of it.
  • the weight portion 21 can be displaced in the Z direction while maintaining a horizontal state with respect to the fixed electrode.
  • the connecting portion 22A of the frame-like portion 22 is configured to be able to bend and deform in the Y direction. Therefore, according to the MEMS structure 1, the spring constant of the connecting portion 22A is adjusted.
  • the weight portion 21 can be displaced in the Y direction while maintaining a horizontal state with respect to the fixed electrode.
  • the weight portion 21 is supported so as to be movable in the two directions of the Z direction and the Y direction even in the second embodiment. Two degrees of freedom can be given.
  • the weight portion 21 when the weight portion 21 is displaced in the Z direction, the weight portion 21 can be displaced while maintaining the horizontal state, so one end side of the plate-like weight portion. As compared with the case where the shaft is pivotably supported, the average displacement amount of the weight portion 21 can be increased by about 25%, and the sensitivity of the sensor can be increased.
  • the weight portion 21 moves in the Z direction while maintaining a substantially horizontal state. Therefore, the amount of displacement of the weight portion 21 is the free end in the configuration that supports the one end side of the weight portion. It becomes smaller than the displacement. Therefore, according to the MEMS structure 1, the electrostatic attraction acting on the weight portion 21 can be reduced as compared with the configuration supporting the one end portion side of the weight portion, and the occurrence of the pull-in phenomenon can be suppressed. it can.
  • the support portion 10 and the movable portion 20 are configured to vibrate in the X direction, and the weight portion 21 is displaced in either the Y direction or the Z direction. Is displaced in a horizontal state with respect to the fixed electrode. Therefore, according to the MEMS structure 1, the weight portion 21 can be moved in a horizontal state with respect to the fixed electrode in any process that vibrates in the X direction. Since the gap between the weight portion 21 and the fixed electrode is less likely to change due to vibration in the X direction, the MEMS structure 1 can reduce the generation of interference signals (Quadrature Error).
  • the present invention has been described above based on the embodiments.
  • the present invention is not limited to the above-described embodiments, and various improvements and modifications can be made without departing from the spirit of the present invention.
  • the physical quantity detected by the sensor using the MEMS structure is not limited to the angular velocity described above, and the direction in which the physical quantity can be detected (such as the Z direction) can be changed as appropriate.
  • the shape and configuration of each part constituting the MEMS structure 1 is an example, and may be changed as appropriate.
  • the MEMS structure 1 is an example of the MEMS structure of the present invention.
  • the support part 10 is an example of a support part.
  • the movable part 20 is an example of a movable part.
  • the weight part 21 is an example of a weight part.
  • the frame-shaped part 22 is an example of a frame-shaped part.
  • the connecting portion 22A is an example of a connecting portion.
  • the first torsion bar 23 is an example of a first torsion bar.
  • the second torsion bar 24 is an example of a second torsion bar.
  • the X direction and the Y direction are examples of plane directions parallel to the plane of the substrate.
  • the Z direction is an example of a direction perpendicular to the plane of the substrate.
  • 1 MEMS structure 10 support section, 20 movable section, 21 weight section, 22 frame section, 22A connection section, 23 first torsion bar, 24 second torsion bar.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne une structure MEMS (1) qui possède une partie support (10) et une partie mobile (20), et la partie mobile (20) possède une partie poids (21), une pièce en forme de cadre (22), une première barre de torsion (23), et une seconde barre de torsion (24). La pièce en forme de cadre (22) est soutenue, sur l'extrémité de direction -X, par la première barre de torsion (23) de manière à se balancer par rapport à la partie support (10). La partie poids (21) est supportée de manière à se balancer par la seconde barre de torsion (24) sur la partie extrémité de la pièce en forme de cadre (22) sur le côté de la direction +X. Une partie raccordement (22A) de la partie cadre (22) est conçue de façon à pouvoir être courbée dans la direction Y. La partie poids (21) est supportée par la structure MEMS (1) de manière à être mobile dans deux directions, à savoir, la direction Z et la direction Y, et une partie poids (21) unique peut se déplacer librement dans les deux directions.
PCT/JP2015/066041 2014-06-04 2015-06-03 Structure mems WO2015186740A1 (fr)

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JP2014115651 2014-06-04
JP2014-115651 2014-06-04

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WO2015186740A1 true WO2015186740A1 (fr) 2015-12-10

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07306223A (ja) * 1994-05-13 1995-11-21 Omron Corp 加速度センサ
JPH07306225A (ja) * 1994-05-13 1995-11-21 Omron Corp 加速度センサ
JP2009529666A (ja) * 2006-03-10 2009-08-20 コンティネンタル・テーベス・アクチエンゲゼルシヤフト・ウント・コンパニー・オッフェネ・ハンデルスゲゼルシヤフト 連結棒を有する回転速度センサ
JP2010096538A (ja) * 2008-10-14 2010-04-30 Murata Mfg Co Ltd 角速度センサ
JP2013210283A (ja) * 2012-03-30 2013-10-10 Denso Corp ロールオーバージャイロセンサ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07306223A (ja) * 1994-05-13 1995-11-21 Omron Corp 加速度センサ
JPH07306225A (ja) * 1994-05-13 1995-11-21 Omron Corp 加速度センサ
JP2009529666A (ja) * 2006-03-10 2009-08-20 コンティネンタル・テーベス・アクチエンゲゼルシヤフト・ウント・コンパニー・オッフェネ・ハンデルスゲゼルシヤフト 連結棒を有する回転速度センサ
JP2010096538A (ja) * 2008-10-14 2010-04-30 Murata Mfg Co Ltd 角速度センサ
JP2013210283A (ja) * 2012-03-30 2013-10-10 Denso Corp ロールオーバージャイロセンサ

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