WO2015177217A1 - Source d'évaporateur pour le traitement de surface de substrats - Google Patents

Source d'évaporateur pour le traitement de surface de substrats Download PDF

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Publication number
WO2015177217A1
WO2015177217A1 PCT/EP2015/061126 EP2015061126W WO2015177217A1 WO 2015177217 A1 WO2015177217 A1 WO 2015177217A1 EP 2015061126 W EP2015061126 W EP 2015061126W WO 2015177217 A1 WO2015177217 A1 WO 2015177217A1
Authority
WO
WIPO (PCT)
Prior art keywords
housing
evaporator source
evaporator
distributor
vapor
Prior art date
Application number
PCT/EP2015/061126
Other languages
German (de)
English (en)
Inventor
Georg Voorwinden
Erwin Gross
Ulrich Englert
Armin Sorg
Axel Straub
Philipp VON BISMARCK
Michael Pisch
Lioudmila KNOTH
Alexander Marienfeld
Original Assignee
Manz Ag
Zentrum Für Sonnenenergie- Und Wasserstoff-Forschung Baden-Württemberg (Zsw)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Manz Ag, Zentrum Für Sonnenenergie- Und Wasserstoff-Forschung Baden-Württemberg (Zsw) filed Critical Manz Ag
Priority to CN201580026869.6A priority Critical patent/CN106460155B/zh
Publication of WO2015177217A1 publication Critical patent/WO2015177217A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Definitions

  • the present invention relates to an evaporator source for the surface treatment of at least one substrate.
  • the evaporator source is designed in particular for evaporating metals, such as copper, and is designed for a surface coating process of one or more substrates.
  • the invention relates to an evaporator arrangement comprising an evaporator source and a hereby fluidically coupled steam distributor. background
  • Thermal vaporization sources for providing vaporous matter are known in the art in a variety of configurations.
  • US 2010/0285218 A1 shows an evaporator with a housing receiving a plurality of crucible, which is in flow connection with a steam distributor having a plurality of outflow nozzles.
  • a housing unit receiving the crucible must be connected to, for example, an elongated steam distributor.
  • thermal bridges in the interior of the evaporator source can be provided in particular for the spatial homogenization of a temperature distribution.
  • thermal bridges between the interior of the evaporator source and the environment should be prevented if possible.
  • an evaporator source for surface treatment of at least one substrate is provided in this respect.
  • the evaporator source has a monolithic housing made of graphite, which has at least one vapor space for receiving at least one Verdampfungsgut mattersers and a Has outlet.
  • the vapor space in which typically designed as a crucible Evampfungsgut employer is arranged, is in flow communication with the outlet.
  • the steam space is heated in such a way that the evaporating material in the evaporating material container begins to evaporate.
  • the evaporation material container far reaching or even completely enclosing the steam space is thus completely acted upon by steam.
  • the vapor generated in the vapor space can exit via the outlet into a process space containing the substrate to be treated with the vapor, such as vapor to be coated.
  • the housing has thermal stability sufficient for the vaporization of copper and thermal conductivity required for heating an outflow path.
  • thermal stresses in the housing caused by thermal expansion can be minimized to a great extent.
  • the housing is resistant to high temperatures and can also have a high thermal shock resistance.
  • the housing should also have a suitable for the particular application and use thermal conductivity.
  • the evaporator source may in particular be designed for evaporating metals, in particular copper, for producing copper-indium-gallium diselenide / disulfide layers on substrates.
  • the evaporator source is also suitable for the preparation of corresponding precursor layers, which include copper (Cu), indium (In), gallium (Ga), copper selenide (CuSe), indium selenide (InSe) gallium selenide (GaSe) and copper sulfides (CuSe) or more May contain chalcogenides.
  • the graphite housing of the evaporator source can be milled from a graphite block. All cavities and / or interiors of the housing can be formed so far by material recesses, so only wall structures of the housing remain and are accordingly milled out of a monolithic graphite block.
  • the monolithic housing is typically made of graphite or graphitized carbon.
  • the monolithic graphite body typically has a crystalline graphite structure in which the carbon atoms are sp 2 hybridized about.
  • the housing has a vapor-conducting channel which is in flow communication with the vapor space via the outlet.
  • an inner wall of the housing which extends inwardly from an outer wall of the housing, can separate the vapor-conducting channel from the vapor space.
  • Inner wall and outer wall of the housing are integrally connected to each other and are so far integrated into the monolithic housing.
  • the vapor space and the vapor-conducting channel can also be referred to as the vapor space section and the channel section of the monolithic housing.
  • the housing is formed seam-free and joint-free.
  • the seam and joint freedom in this case refers in particular to the housing sections of the evaporation source forming the vapor space and the vapor-conducting channel, or the vapor space and the channel, at least in regions.
  • the monolithic housing of the evaporator source is also formed free of openings.
  • the housing may have opening borders which, however, can be closed or connected to a vapor-diverting structure during operation of the evaporator source.
  • the housing has one or more production openings that are only borrowed for manufacturing and manufacturing reasons, such as access to a milling tool required, and which are closed after mechanical production or are firmly closed.
  • the housing has at least one feed opening for evaporating material. This is closed by means of a removable cap made of graphite.
  • the feed opening in particular its opening edge, is seamlessly and seamlessly integrated into the monolithic housing of the evaporator source.
  • the feed opening in particular their opening edge and also provided for the supply port closure cover are made of graphite, resulting in operation of the evaporator source hardly appreciable, due to thermal expansion, mechanical stresses between the closure cap and the Zukitöff- tion, or of the Feed opening adjacent housing portion.
  • the closure cap can be screwed with a ⁇ réellesberandung the feed opening according to a further embodiment.
  • the circular or radially symmetrically designed closure cap may have a thread, in particular on its radial outer side, which can interact with an internal thread of the opening boundary of the monolithic housing.
  • the closure cap can be releasably secured to the monolithic housing by, for example, a screwing movement.
  • For a refilling of vaporization in the vapor space of the cap can be unscrewed and separated from the housing so far, and thereby provide direct access to the adjoining the feed opening steam space.
  • the Verdampfungsgut matterer is removed with the cover open or removed from the vapor space, so evaporating material refilled, the Verdampfungsgut matterer then again arranged in the vapor space and the closure lid, the feed opening is again screwed back to the monolithic housing.
  • the housing has at least one further, second vapor space for accommodating at least one second evaporation material container.
  • First and second vapor space open in each case via an outlet in the vapor-conducting channel, which is arranged centrally between the first vapor space and the second vapor space.
  • the first and the at least second vapor space are provided for receiving evaporation product containers filled with the same vaporization material.
  • a third, fourth or even further steam chambers which are arranged, for example, in a star shape around the steam-discharging duct. Via the respective outlets, the vapor formed in the first and second vapor space can open into the channel.
  • a diametrically opposite arrangement of the two steam chambers is typically provided with respect to the channel.
  • the resulting in the first and the second vapor space steam can, based on the longitudinal direction of the channel, which coincides with an axial direction, flow radially inwardly into the channel and then be discharged via the channel in the axial direction, that is in the channel longitudinal direction.
  • the first and second vapor space are spaced approximately horizontally apart while the channel extends vertically downwards.
  • the outlet of the at least one vapor space may be located at an upper end of the channel as well as at an upper end of the at least one vapor space.
  • the vapor-conducting channel considered downstream, merges into a connecting piece of the housing. About those connecting piece, the housing is fluidically connected to a steam distributor.
  • connection piece of the housing is the only vapor-conducting connection structure of the housing with the steam distributor.
  • the steam distributor serves to generate as homogeneous and large-area distribution of the steam generated in the evaporator source into the process space.
  • the connector may protrude from an otherwise, for example, cylindrical or planar outer wall of the evaporator source to provide an easily accessible connection for the steam manifold.
  • the connection piece can have a cylindrical geometry and can be designed as a projection projecting from the outer wall of the housing of the steam-conducting channel projecting into the interior of the housing.
  • the monolithic housing can also have only one receptacle or opening in the outer wall arranged in alignment with the vapor-conducting channel into which a connecting piece of the vapor distributor correspondingly formed can be inserted.
  • At least one axial sealing surface is formed on the housing in the region of the connecting piece.
  • the connecting piece of the evaporator source is designed in one piece with the monolithic housing.
  • an axial sealing surface such as in the region of an end face of the connecting piece or axially and radially graduated thereto, a largely vapor-tight connection of the connecting piece of the evaporator source can be formed with the steam distributor.
  • the steam distributor can also have a connection piece which is provided with a corresponding axial sealing surface and which can be sealingly brought into abutment with its sealing surface on the sealing-surface-side sealing surface.
  • both the evaporator source and the steam distributor each have a connection piece, by means of which evaporator source and steam distributor can be fluidly coupled to one another.
  • evaporator source has a protruding from its outer wall connecting piece, which is insertable into a receiving opening of the steam distributor.
  • steam distributor has a connecting piece projecting from its outer wall, which can be inserted into a receiving opening of the graphite housing of the evaporator source corresponding thereto.
  • axial sealing surfaces which correspond to one another can be formed both at the evaporator source and at the steam distributor.
  • An axial sealing surface here means a sealing surface which extends in a plane perpendicular to the axial direction of the vapor-conducting channel.
  • the mutually corresponding axial sealing surfaces of the evaporator source and steam distributor preferably adjoin one another almost completely over the entire surface.
  • the seal may be designed, for example, in the form of a graphite foil. This may for example consist of so-called flexible graphite to compensate for any unevenness or geometric tolerances of the abutting each other to be fitted sealing surfaces of the evaporator source and steam distributor.
  • At least one of the connecting pieces of the housing and of the steam distributor has a thread for forming a screw connection of the steam distributor to the housing.
  • the connection piece of the steam distributor has an internal thread, which comes into contact with a connection piece of the housing that comes to rest or on the housing side.
  • Connecting piece supporting screw cooperates.
  • the connecting piece of the housing has an inwardly projecting fastening portion with two axially opposite sealing surfaces.
  • the connection piece of the steam distributor and, on the other hand, a connecting screw which can be brought into engagement with the connecting piece of the steam distributor can be brought into axial sealing engagement with the connecting piece.
  • the attachment portion may in particular be configured as a flange-like protrusion projecting radially inwards from the inner wall of the housing connecting piece, which may face the free end of the connecting piece and may have an upper sealing surface facing the free end of the connecting piece and facing the interior of the housing ,
  • An axial sealing surface of the connecting piece which may be formed, for example, on an end face of the connecting piece, for example, with the lower sealing surface of the mounting portion of the housing-side connecting piece for abutment, while a standing with the steam distributor side connecting piece engaging screw with its radially widened Head supported on the upper sealing surface of the mounting portion.
  • sealing surfaces such sealing surfaces of the housing and the steam distributor, which in the axial direction, that is in the steam-carrying longitudinal direction of the connecting piece can be brought to bear against each other.
  • the surfaces themselves extend in the radial and tangential direction, based on a basic cylindrical geometry of the connecting pieces.
  • cone surfaces as sealing surfaces whose surface normal extends at a predetermined angle of inclination with respect to the axial direction.
  • Separate seals or sealing elements for example in the form of flexible graphite foils, can be arranged between the sealing surfaces of the steam distributor and housing that can be brought into abutment against one another. In this way, the sealing effect can be increased or improved.
  • the connecting screw has a vapor-conducting axial through-hole, through which the steam generated on the housing side and flowing out via the housing-side connecting piece can flow into the steam distributor and into its connecting piece.
  • the connecting screw further comprises a shank which is threadably engageable with the thread of the connecting stub of the vapor distributor.
  • the connecting screw on a radially widened head, which is axially engageable with a sealing surface of the mounting portion of the connecting piece of the housing to the plant.
  • the head of the connecting screw can either frontally, typically directed upward, have a receptacle for a screwing.
  • the head may have a hexagon or inner torx profile.
  • the head has on its radially outer side a key surface for attaching a screwing tool corresponding thereto.
  • the radial width of the head should be dimensioned such that sufficient space for insertion of the screwing tool remains between the head and the inner wall of the housing-side connecting piece.
  • the connecting screw provided with a vapor-conducting axial through-hole allows a particularly simple and effective sealing connection of the housing of the evaporator source with the steam distributor.
  • To form the screw only a single screw is required.
  • the housing may be provided a closable access opening in the housing.
  • This may for example be designed as a screw cap, adjacent to the outlet and in an inward extension of the vapor-conducting channel in or on the housing of the evaporator source.
  • connection piece of the housing may have a thread, which is sealingly screwed with a corresponding thereto thread of a connecting piece of the steam distributor.
  • the mutually corresponding threads of the evaporator source and the steam distributor are designed as a fine thread.
  • the corresponding threads are typically milled from the original graphite block. They thus also pass seamlessly into the housing of the evaporator source or into a corresponding housing of the steam distributor.
  • corresponding threads can also be formed on the inside on a receiving opening for a connecting piece.
  • connection piece or the connecting piece and the corresponding receptacle of evaporator source and steam distributor still have an axial sealing surface in addition to the threads.
  • the provided on the connection piece of the housing or steam distributor thread is formed either on the outside or on the inside of the substantially cylindrically designed nozzle.
  • threaded bores can be embedded in the mutually engaging connection stubs of the steam distributor and the evaporator source or in a receiving opening provided for a connecting stub, which extend in the axial direction parallel to the vapor-conducting channel and thus perpendicular to the sealing surface.
  • the connecting pipe provided in the extension of the steam-conducting duct and the supply opening of the evaporator source which can be closed by means of the closing lid are not only provided for the supply and removal of unvaporised or vaporized material. Rather, the interior of the evaporator source can be milled out of a graphite block on those externally accessible openings.
  • the feed opening, the connecting piece or a corresponding housing opening also and in particular under production engineering aspects have a function.
  • the housing has at least one bore for receiving at least one heating element in a channel wall section delimiting the channel.
  • This channel wall section can, for example, se coincide with an inner wall of the housing of the evaporator source.
  • the channel wall portion is penetrated by at least one bore, which typically extends tangentially to the channel geometry, by inserting or inserting an approximately rod-shaped heating element, which is typically configured as a graphite heating element, the channel wall portion can be heated separately.
  • at least one electrically insulated heating element is used.
  • the heating element instead of or in addition to graphite other suitable materials, such as high-melting metals, graphite fiber materials or glassy carbon has.
  • the temperature profile in the housing can be controlled or regulated so that condensation of vaporized matter, for example, on the channel inner wall can be largely prevented.
  • the invention further relates to an evaporator arrangement with a previously described evaporator source.
  • the evaporator arrangement also has a steam distributor with a monolithic elongate distributor housing made of graphite. Similar to the evaporator source, the distributor housing is made of a graphite block. All vapor conducting structures inside the distributor housing are typically milled from a provided graphite block. Since the distributor housing also consists of a monolithic graphite body, the entire evaporator arrangement composed of the evaporator source and the steam distributor can only have a single joint, namely in the transition region between the evaporator source and the steam distributor. However, the steam distributor does not necessarily have to be made of the same material as the evaporator source. It is conceivable to provide different graphite locations for the evaporator source and for the steam distributor.
  • the joint can provide sufficient heat conduction. Since the evaporator source and the steam distributor are made of one and the same material, the influence of thermally induced stresses can also be minimized to a large extent.
  • the distributor housing has a distribution channel extending in the longitudinal direction of the vapor distributor and having a plurality of spaced-apart outlet openings.
  • the distributor housing has an upwardly oriented in the mounting position to the evaporator source connection, which acts as an extension or extension of the vapor-conducting channel of the evaporator source.
  • the connecting piece of the steam distributor opens into the distributor channel, which thus typically extends horizontally, thus radially outwards, relative to the vapor-conducting channel of the evaporator source.
  • the steam distributor may have an approximately upside-down T-shaped basic geometry with the connection piece protruding in the middle, from which the longitudinally extending distribution channel extends radially outward in diametrically opposite directions.
  • the outlet ports or exhaust nozzles in fluid communication with the distribution channel typically extend perpendicular to the longitudinal direction of the distribution channel.
  • the outlet openings may be aligned parallel to the vapor-conducting channel of the evaporator source.
  • the nozzles can be positioned equidistantly but also position-dependent at different distances from each other.
  • the nozzles can be arranged at a smaller distance in order to better counteract thermal edge effects can.
  • the distributor housing has a connecting piece for the fluidic connection with the evaporator source on.
  • the fluidic connection between the evaporator source and steam distributor has at least one connecting piece. That connection piece can either be arranged at the steam distributor or at the evaporator source and interact with a receiving opening of the steam distributor or the evaporator source.
  • a reverse arrangement in which a receiving opening at the evaporator source and a connecting piece is provided exclusively on the steam distributor is also conceivable. It is also possible for both components of the evaporator arrangement, namely the evaporator source and the steam distributor, to each have a connecting piece which can be fluidly coupled to one another as well as mechanically connected to one another.
  • the distributor housing has, in a channel wall section delimiting the distributor channel, at least one bore extending longitudinally and parallel to the distributor channel. That bore, which due to the length of the distribution channel can also be referred to as a deep hole bore, serves to receive at least one heating element.
  • the channel wall portion bounding the distribution channel can be heated sufficiently to avoid condensing the vapor generated in the evaporator source and flowing into the distribution channel.
  • the heating elements to be arranged inside and outside the evaporator arrangement can be controlled in such a way that a positive temperature gradient, that is to say an at least constant or even rising temperature, results along the outflow path extending from the evaporating material container to the discharge nozzles.
  • the distributor housing from the outside accessible, spaced along the bore and the bore obliquely or vertically passing through slots for receiving a respective holder.
  • the holder has a heating element in the circumferential direction supporting through opening.
  • the passage opening of the holder is dimensioned such that the heating element can be passed through the passage opening of the holder accurately.
  • the holder is in particular as a designed comparatively thin leaflet, which is inserted into the slot of the housing from the outside.
  • the slot is sized larger than the bore, so that the holder axially by inserting into the slot axially, that is fixed longitudinally to the bore on the housing.
  • the holder can be inserted into the respectively associated slot in such a way that its passage opening comes to lie approximately centrally or centered in the bore.
  • the typically elongated and rod-shaped heating element can be guided during insertion into the bore through the through hole of the holder, so that the heating element comes to lie exclusively over the holder and spaced from the inner surface of the bore within the bore.
  • the approximately designed in the manner of a thin leaflet and provided with a centric see through hole holder is typically made of an electrically insulating and thermally sufficiently resistant material, such as a ceramic material, for example made of pyrolytic boron nitride (pBN) or Al 2 0 3 to provide sufficient electrical insulation between the heating element and the graphite housing of the evaporator source and / or the steam distributor.
  • an electrically insulating and thermally sufficiently resistant material such as a ceramic material, for example made of pyrolytic boron nitride (pBN) or Al 2 0 3 to provide sufficient electrical insulation between the heating element and the graphite housing of the evaporator source and / or the steam distributor.
  • the length or depth of the slot perpendicular to the longitudinal extent of the bore formed slightly shorter than the corresponding Clearre- ckung the holder.
  • the holder can not be fully inserted into the slot, but it is at least slightly protruding from the outside of the housing upon reaching an end position. This not only allows a simple and intuitive extraction of the respective holder in case of need.
  • all holders preferably protrude at least slightly from the outside of the housing, they at the same time form spacers for a thermal shield enclosing or enclosing the housing of the evaporator source and / or steam distributor and which can typically have one or more layers of radiant panels.
  • the housing at least partially enclosing or enclosing radiation plates can be arranged at a predetermined distance from the respective housing, without the need for separate spacers would be provided.
  • the evaporator source can also have at least one bore for receiving at least one heating element.
  • the respective heating elements can be supported by means of a plurality of brackets at regular or irregular intervals along the bore also here.
  • the distributor housing is arranged below the evaporator source and can be attached to the evaporator source only by means of its connecting piece.
  • the evaporator source has a downwardly projecting connection piece which can be inserted into a receiving opening of the distributor housing corresponding thereto. In this case, a mechanical see and the steam distributor supporting connection of steam distributor and evaporator source via the single connection piece is feasible.
  • connection piece designed on the distributor housing and / or on the evaporator housing can fulfill a double or even a triple function.
  • a fluidic coupling of the evaporator source and distributor housing as well as a mechanical connection between the evaporator source and the distributor housing carrying the vapor distributor can be created via the connecting piece.
  • the compound thus formed has an extremely good thermal conductivity.
  • the distributor housing to be arranged below the evaporator source can be attached to the evaporator source exclusively suspended. For other connections and fasteners between evaporator source and steam distributor as well between steam distributor and process space can therefore be dispensed with in an advantageous manner.
  • the evaporator arrangement further comprises at least one self-supporting carrier arrangement with a bottom and with a side wall structure connected to the bottom.
  • the bottom and the side wall structure form a receptacle into which the evaporator source can be inserted.
  • the carrier arrangement can be designed to be wide open to the top, so that any necessary removal of the evaporation source from the receptacle formed by the bottom and side wall structure can be carried out particularly easily.
  • the carrier assembly By placing the evaporator source on the bottom of the carrier assembly, the entire weight of the evaporator source can be supported by the carrier assembly.
  • the carrier arrangement itself can in particular be arranged hanging in the process space.
  • the carrier assembly provides a footprint for the evaporator source, so that at the evaporator source itself no attachment or suspension means for positioning tion or arrangement of the evaporator source in the process space are required. Any attachment points of the evaporator source would lead to a possibly significant mechanical load of the attachment point, for example, in the case of a hanging arrangement of the evaporator source in the process space.
  • a protective corset for the evaporator source By inserting into the receptacle formed by the bottom and side wall structure of the carrier assembly, a protective corset for the evaporator source can be provided in addition to a mechanical load absorption at the same time become.
  • the graphite housing of the evaporator source is relatively shock-sensitive. By including the entire evaporator source in the recording of the carrier arrangement formed by the bottom and side wall structure, a shock-absorbing protection for the evaporator source can be provided to that extent.
  • the base of the carrier arrangement has a passage opening for the fluidic and mechanical coupling of the evaporator source arranged in the receptacle with the steam distributor which can be arranged below the floor.
  • the passage opening in the base of the carrier arrangement is dimensioned in such a way that the at least one connecting piece provided for connecting the steam distributor and the evaporator source projects through the passage opening.
  • the mechanical load of the steam distributor suspended from the evaporator source can also be transmitted to the bottom of the carrier arrangement.
  • a positive connection of soil, steam distributor and evaporator source can be created by the mutual connection of the evaporator source and steam distributor, through which the steam distributor to the support assembly without further or separate fastening means can be fastened.
  • the evaporator source is not separately connected to the ground or with the side wall structure within the carrier assembly.
  • a secure fixation of the evaporator source relative to the carrier assembly can be done solely by gravity, by turning off the evaporator source on the ground. If necessary, any gaps between the side Wall structure of the carrier assembly and the evaporator source with exact fit with filler, typically with a thermal insulation, filled.
  • the carrier arrangement has a graphite fiber material. It can even be formed entirely from a graphite fiber material.
  • a graphite fiber material such as carbon fiber reinforced composite or a CFC composite, i. a carbon fiber reinforced carbon material
  • the carrier assembly may have sufficient temperature resistance.
  • the carrier arrangement can, in particular at the upper end of its side wall structure, being remote from the floor, have one or more holding sections, for example in the form of holding eyes, by means of which the carrier arrangement with the evaporator source and the steam distributor connected thereto can be arranged in a process space is.
  • FIG. 1 shows an exploded view of the evaporator source which can be arranged in a carrier arrangement in perspective view, a perspective, partially cut, isolated representation of the evaporator source, an external view of the evaporator source arranged in the carrier arrangement with the closure lid removed,
  • FIG. 4 shows a further exploded view of the evaporator source and carrier arrangement, 4, seen from another perspective, a perspective view of the steam distributor viewed obliquely from below, a perspective view of a screw connection of evaporator source and steam distributor, a cross section through the composite evaporator assembly in the longitudinal direction of the steam distributor, a cross section through the steam distributor in the transverse direction, a perspective cross-sectional view through the steam distributor, an enlarged perspective view of the underside of the steam distributor, an enlarged cross section through a screw connection between the evaporator source and steam distributor and provided with a corresponding sealing surfaces connection of the evaporator source and steam distributor. an enlarged cross section through a further embodiment of a screw connection between the evaporator source and steam distributor.
  • FIGS. 1, 4 and 5 show an evaporator arrangement with an evaporator source 10.
  • the evaporator source 10 shown isolated in Fig. 2 comprises a monolithic housing 12 made of graphite.
  • the vapor space 14 shown in Fig. 2 serves to accommodate a, for example in the Fig. 1, 3, 4 and 5 shown Verdampfungsgut matterers 16, which is typically designed as an evaporator crucible.
  • the Verdampfungsgutmic matterer 1 6 can be monolithic made of graphite.
  • the evaporator source 10 and its monolithic graphite housing 12 has, in addition to the two steam chambers 14, 1 14 a roughly centrally between the steam spaces 14, 1 14 arranged vapor-conducting channel 20.
  • the roughly cylindrical channel 20 defining an axial direction extends approximately perpendicular to an imaginary connecting line between the vapor spaces 14, 14 arranged on either side of the channel 20.
  • the housing 12 of the evaporator source 10 has an outer wall extending continuously between the vapor spaces 14, 14 13, which merges seamlessly into an axially inwardly directed inner wall 15.
  • the inner wall 15 simultaneously forms a channel wall section 21, which delimits the vapor-conducting channel 20 in the circumferential direction.
  • the vapor space 14 is separated from the channel 20 in the radial direction by the inner wall 15. Only in an upstream upper, on the upper side of the housing 12 protruding region of the vapor space 14 passes into an outlet 18.
  • the first vapor space 14 via the outlet 18 in flow communication with the channel 20, while symmetrically thereto, the second vapor space 1 14 opens via a corresponding outlet 1 18 at the upper end of the channel 20 in the channel 20.
  • the steam chambers 14, 14 are radially outward, that is to say in the longitudinal direction of the housing 12 of a removable closure lid 26, 126 limited.
  • the housing 12 at opposite end faces 22 each have a closable by means of the closure cover 26 feed opening 24.
  • the vapor space 14 is accessible directly from outside.
  • the evaporation material container 1 6, 1 1 6 located in the vapor space can be removed from the vapor space 14, 1 14 with the closure lid 26, 126 open and removed and filled again with vaporization material.
  • the orientation of the evaporator source 10 shown in FIG. 2 corresponds approximately to its orientation in the position of use.
  • the two steam chambers 14, 14 are spaced approximately horizontally with each other while the channel 20 extends downwardly.
  • the channel 20 merges into a connecting piece 32 which projects axially from the outer wall 13 of the housing 12 of the evaporator source 10, ie in the channel longitudinal direction. Based on the cylinder geometry of the housing 12, the connecting piece 32 protrudes radially outward from the cylinder jacket surface.
  • connection piece 32 is used to connect the evaporator source 10 with the longitudinally extending steam distributor 50 shown in FIGS. 6 to 8 in different views and sections.
  • the channel wall section 21 of the evaporator source 10, which merges integrally into the connection piece 32, is further provided with at least one bore 38 which passes through at least one outer side of the housing 12.
  • at least one heating element 40 as shown for example in Figs. 10 and 1 1 on the steam manifold 50, insertable.
  • the heating elements 40 which are not shown separately in FIG. 2 and which typically comprise graphite or consist of graphite and can be acted upon by electrical current in order to generate electrical heat loss, can heat the duct wall section 21 of the housing 12 separately.
  • the closure lid 26 is typically screwed to the ⁇ réellesbundung 29 of the feed opening 24.
  • a thread 28 is formed on the inside of the opening boundary, in particular ground or cut, which can be screwed to a corresponding thereto thread 30 on the outside of the closure lid 26.
  • the entire closure cap 26 is sealingly and removably attached to the feed opening 24 via the threaded engagement of the threads 28, 30. If the thread 28 of the feed opening 24 and the thread 30 of the closure lid 26 are designed as fine threads, a further sealing effect of the threaded engagement can be realized.
  • the closure lid 26 may have a hole or handle pattern 27 approximately centrally on its outer side.
  • a suitable tool By inserting a suitable tool in that hole or handle pattern 27 of the otherwise flush with the outer wall 13 of the housing 12 final closure cover 26 can be rotated relative to the housing 12 and screwed to the housing 12.
  • a hole or handle pattern 27 but also other positive connection mechanisms with a tool are conceivable here.
  • an axial sealing surface 30, which can be brought into abutment axially with a corresponding sealing surface 56 of a connection piece 52 of a housing 60 of a steam distributor 50, can be configured on the connection piece 32.
  • the sealing surfaces 36, 56 of the two connecting sockets 32, 52, which surfaces can be brought into abutment substantially flush with one another and / or butt-end, can be held axially relative to one another by means of the screws 44 indicated in FIG. 13 and can be pressed against one another in an axially sealing manner.
  • a seal 42 typically in the form of a flexible graphite foil, is disposed between the adjoining sealing surfaces 36, 56.
  • the screwing of the axial sealing surfaces 36, 56 can be realized by means of graphite screws 44, wherein in the sealing surface 56th Threaded holes 46 are provided and corresponding thereto in the sealing surface 36 of the connecting piece 32 screw holes 45 for passing graphite screws 44 may be formed.
  • provision may also be made for the connecting stubs 32, 52 of the evaporator source 10 and the steam distributor 50 to have threads 34, 54 corresponding to one another. In this way, a connection between the steam distributor 50 and the evaporator source 10 can be realized by directly screwing the steam distributor 50 to the evaporator source 10.
  • the upwardly projecting connection piece 52 of the steam distributor 50 has an external thread 54, which can be screwed into an internal thread 34 formed on the connection piece 32 of the evaporation source 10.
  • the two threads 34, 54 may be configured in particular as a so-called fine thread, so that even with the preparation of the screw connection of the steam distributor 50 and evaporator source 10, a largely vapor-tight or gas-tight and vapor-conducting connection can be provided.
  • sealing surfaces 36, 56 corresponding to each other also come into contact with one another axially, as shown in FIG. 13, even when the connection of steam distributor 50 and evaporation source 10 is screwed.
  • the steam distributor 50 has a monolithic elongate distributor housing 60 made of graphite. Similar to the evaporator source 10 and the steam distributor is milled out of a graphite block. He is designed so far seamless and joint-free.
  • the steam distributor 50 has adjacent to its connection piece 52 a longitudinally extending distributor channel 58, via which the steam supplied via the connection piece 52 or via the channel 20 is distributed in the channel longitudinal direction.
  • the steam distributor 50 has a plurality of holes 64 along a channel wall portion 59 delimiting the distribution channel 58, which extend parallel to the distribution channel 58 and typically pass through the entire steam distributor 50.
  • Holes 40 are insertable into those bores 64, also referred to as deep bores, to maintain the duct wall portion 59 and the manifold 58 formed therefrom or adjacent thereto at a required temperature.
  • the steam distributor 50 has an outlet section 65 delimiting the outlet channels 62. Also in the outlet section 65 a plurality of bores 64 are provided on both sides of the outlet channels 62 in order to keep the outlet channels 62 at a required temperature.
  • the spacing of the bores 64 arranged in the outlet section 65 is smaller than in the overlying channel wall section 59.
  • the discharge nozzles 63 and the outlet channels 62 can be separately heated and heated, once condensed matter in an outlet 62 should or in a discharge nozzle 63.
  • Fig. 1 0 is also a side and accessible from the outside slot 1 66 shown on the distributor housing 60.
  • That slot 1 66 passes through the hole 64 provided for receiving a heating element 40, so that a holder 1 60 shown schematically in FIG. 10 enters the slot 1 66 from the outside is insertable.
  • the designed in the manner of a square or rectangular leaflet holder 1 60 has a through hole 1 64, which comes to lie in reaching a in Fig. 9 only schematically sketched insertion position approximately centrally within the bore 64.
  • the passage opening 164 of the holder 1 60 has a smaller inner diameter than the bore 64.
  • the inner diameter of the passage opening 1 64 is adapted to fit the geometry of the respective heating element 40.
  • the approximately rectangular or with square cross-section designed heating element 40, for example, in a circular configured passage opening 1 64 can be inserted.
  • the width of the slot 1 66 is dimensioned such that the holder 1 60 accurately and axially as possible without play in the slot 1 66 is inserted from the outside.
  • a plurality of slots 1 66 spaced apart from one another in the longitudinal direction of the bore 64 are provided on the distributor housing 60.
  • the heating element 40 can be inserted in the longitudinal direction in the bore 64 and thereby pass through the aligned openings to each other coming through holes 1 64 a plurality of successive brackets 1 60.
  • the brackets designed in the manner of a leaflet 162 approximately one or a few millimeters thick are typically made of an electrically insulating ceramic material, so that the heating elements 40, typically made of graphite and forming heating rods, are electrically insulated from the distributor housing 60 in the corresponding bores 64 can be arranged.
  • the brackets 160 are made of pyrolytic boron nitride or other temperature resistant ceramic.
  • the slot 1 66 and the associated holder 160 are dimensioned such that a fully inserted into the slot 1 66 holder 1 60 with an outer side 1 65 at least slightly protrudes from the outside of the distributor housing 60.
  • the distributor housing 60 at least partially enclosing or enclosing radiant panels 124 can be kept at a predetermined distance to the outside of the distributor housing 60.
  • Such protrusion of the outer side 1 65 of the holder 1 60 is insofar provided in particular for such holders, the insertion slots are covered or shielded in a final assembly configuration of radiation plates 124.
  • those with their outside 165 of the distributor housing 60 protruding brackets 1 60 are provided in particular in the region or adjacent to the downwardly projecting outlet channels 62 of the steam distributor 50.
  • a self-supporting support arrangement 80 for the evaporator source 10 shown in an exploded view in FIG. 4 is furthermore provided.
  • the carrier assembly 80 has a bottom 82 and a side wall structure 84 connected to the bottom 82. Sidewall structure 84 and bottom 82 form a receptacle 85 accessible from above, into which the evaporator source 10 can be inserted from above.
  • the bottom 82 and sidewall structure 84 are formed of a graphite fiber material.
  • Floor 82 and sidewall structure 84 may be fabricated in particular from carbon fiber reinforced composite material.
  • the bottom 82 and the sidewall structure 84 may be made of a CFC composite, that is, a carbon fiber reinforced carbon.
  • Carbon or graphite fibers are embedded in a matrix of pure carbon.
  • CFC composites have extremely high temperature resistance and are extremely temperature shock resistant. While the evaporator source made of graphite which can be used in the carrier arrangement 80 is comparatively shock-sensitive, the composite material of the carrier arrangement 80 can damp any mechanical loads acting on the carrier arrangement 80 and, to that extent, provide mechanical protection and provide collision protection for the evaporator source 10.
  • the carrier arrangement 80 which is designed to carry the weight of the evaporator source 10 and of the steam distributor 50 which can be connected thereto, has, as shown in FIG. 4, a substantially flat rectangular bottom plate with side edges 82a, 82b, 82c, 82d , Adjacent to the side edges of the bottom plate 82 are side wall plates 84a, 84b, 84c, 84d.
  • the side wall panels 84a, 84b, 84c, 84d also have a substantially planar and rectangular basic geometry.
  • the sidewall structure 84 is formed by the four sidewall plates 84a, 84b, 84c, 84d.
  • the side wall structure 84 and the bottom 82 so far form a substantially cubic and rectangular box in which the evaporator source 10 is positionable.
  • the bottom 82 of the carrier assembly 80 has a passage opening 86, through which a fluidic connection 68 between the evaporator source 10 and a steam distributor can be passed.
  • the fluidic connection 68 is shown for example in FIGS. 12 and 13. It also follows from the cross-sectional view of FIG. 8.
  • the connection piece 52 of the steam distributor 50 projects from below through the bottom-side through-opening 86, while the downwardly extending from the housing 12 of the evaporator source 10 connecting piece 32 passes through the through hole 86 from above.
  • the steam distributor 50 can also be attached to the evaporator source 10 already in the carrier arrangement 80 by attaching the steam distributor 50 50 transfer its weight via the evaporator source 10 to the bottom 82 of the self-supporting carrier arrangement 80.
  • the mutual connection and assembly of the sidewall structure 84 with the bottom 82 of the support assembly 80 can be done in many ways and Done way.
  • projections 83 extending from the side edges 82a and 82c protrude outwards in the ground plane in each case.
  • Those extensions 83 are passable through corresponding passages 87 of adjacent side wall plates 84a, 84c.
  • the mutually corresponding projections 83 and passages 87 allow a plug connection of the bottom 82 with the side wall structure 84.
  • the front side provided side wall panels 84b, 84d connected to the elongated side wall panels 84a, 84c are thus plugged together.
  • the mated connection of floor 82 or bottom plate and side wall panels 84a, 84c is advantageous in that it can be done without the aid of connection tools or separate connection means.
  • a purely plugged graphite-based connection can be realized in this respect, which proves to be advantageous in terms of the thermal load capacity of the self-supporting support arrangement 80.
  • the two longitudinally extending side wall plates 84a, 84c of the side wall structure 84 each have outwardly and upwardly projecting holding sections 88 each having a through opening 89.
  • the eyelet-shaped passage opening 89 allows a suspended and thus largely thermally decoupled arrangement of the entire evaporator arrangement in the process space, for example in the process space of a coating installation.
  • pivotable holders 94 can be arranged at those passage openings 89, by means of which the carrier arrangement 80 together with the evaporator source 10 and the vapor distributor 50 connected thereto can be arranged freely suspended in the process space.
  • the end-side side wall panels 84b, 84d of the side wall structure 84 each have a passage opening 90 which is in each case adapted to the size of the closure cover 26, 1 26 of the evaporator source 1 0.
  • the passage openings 90 in the side wall structure 84 allow the opening of the supply port 24 of the evaporator source 10 without having to remove or lift the entire evaporator source 10 from the receptacle 85 of the support assembly 80.
  • the intermediate spaces between the carrier arrangement 80 and the evaporator source 10 accommodated therein are provided in particular with a thermal insulation 100.
  • a thermal insulating material in particular mats are based on graphite, such as a graphite felt 102 in question.
  • Corresponding graphite felt mats 102 have recesses corresponding to the passage openings 86, 90.
  • a plurality of radiation plates 124 may also be arranged between the carrier arrangement 80 and the evaporator source 10.
  • radiation sheets of suitable heat radiation reflecting materials which may be formed in particular also in sandwich construction with thermal insulating materials therebetween, the heat radiation of the evaporator source 10 can be reduced to the outside.
  • a continuous heater 48 extends above the entire evaporator source 10, which typically has a plurality of graphite-based heating elements.
  • FIG. 8 also shows the current bolts 49 provided with current for the heating 48.
  • the entire support assembly 80 may also be provided with an external thermal insulation 130.
  • insulating mats made of graphite felt 132 are provided in particular. These can typically cover almost the entire outer side 92 of at least the side wall structure 84 and have only approximately in the region of the front side side wall panels 84b, 84d a recess corresponding to the through opening 90 of the side wall structure 80 or a corresponding cutout 134.
  • cutouts 134 of the outer thermal insulation 130 may for example be tightly closed with removable insulating pieces 136 shown in FIGS. 3 and 4.
  • the thermal insulation 100 may further comprise a frame-like cut-out graphite felt 102 which can be placed on the upper side or on the upper edge of the side wall structure 84.
  • the cutout 104 of the frame-like graphite felt 102 allows good accessibility to the heater 48.
  • the cutout 104 can be closed with an exact fit during operation of the evaporator source 10 with a lid blank 106 shown in FIG. 4.
  • graphite felts such as, for example, graphite soft felt and graphite hard felt
  • quartz felts or the like thermal insulating materials instead of or in addition to graphite felts.
  • thermal insulation is also a foamed graphite, or a graphite foam in question.
  • Molybdenum, tantalum or tungsten sheets are in particular provided for the radiation sheets.
  • the enclosure 140 for the steam distributor 50 shown in cross-section in FIG. 9 has a slotted bottom 142 and side walls 144 connected thereto.
  • the bottom 142 facing away from the upper ends of the side walls 144 are also at least partially connected to a ceiling 146 with each other.
  • the bottom 142, sidewalls 144 and top 146 are also made of carbon fiber reinforced composite material, particularly CFC composite material.
  • the intermediate space between the housing 150 enclosing the steam distributor 50 at least in regions and the steam distributor 50 is provided with a thermal insulation 150, in particular with a thermal insulation 120 filled far.
  • a thermal insulation 150 in particular with a thermal insulation 120 filled far.
  • graphite felts 122 as shown in FIG. 9, are used.
  • the bottom 142 of the housing 140 has a central, longitudinally Direction of the bottom 142 extending slot 143. In that slot is a downwardly projecting outlet portion 65 of the steam distributor 50 to lie.
  • the operating region of the outlet section 65 which is particularly hot in operation, is furthermore provided with radiant plates 124 which are bent in an approximately U-shape around the outlet section 65 and which are typically in sandwich structure with thermal insulation material therebetween, either separately at the adjacent thermal insulation 11 or also directly. can be fastened to the distributor housing 60 by means of clips or screws.
  • the radiation plates 1 24 have in the area of the discharge nozzles 63 downwardly widening passage openings 38, which can influence the steam discharge behavior from the steam distributor 50.
  • a plurality of spaced-apart layers of radiation plates 1 24 are provided, whose interstices are free of filling materials.
  • the sheet metal layers are selectively or interconnected by means of linear spacers.
  • connection of the sheet metal layers is advantageous in such a way that the individual sheet metal layers can move differently in the respective plane of the radiation sheet 124, or can expand thermally. Any spacers then provide only for a fixation in a direction perpendicular to the sheet plane.
  • the distributor housing 60 is almost completely surrounded by a thermal insulation 1 20 and is arranged together with the thermal insulation 20 within the housing 140, a separate assembly and mounting of the housing 140 on the steam manifold 50 is unnecessary. Since the steam manifold 50 with its connection piece 52 is attached directly to the evaporator source 1 0, the weight of the housing 140 and located between the housing 140 and steam manifold 50 thermal insulation 1 20 on the floor 142, the side walls 144 and ultimately the ceiling 146 of the housing 140 worn and so far on the the evaporator 1 0 facing upper side of the steam distributor 50 are supported. Finally, it should be noted that the arrangement of thermal insulation 1 30, 1 00, 1 20 in combination with radiation plates 1 24 can be configured in a variety of ways.
  • FIG. 14 shows an alternative connection between the housing 1 2 of the evaporator source 10 and the steam distributor housing 60.
  • the downwardly projecting connecting piece 32 of the housing 1 2 of the steam distributor 50 has an inwardly projecting mounting portion 33 with two axially opposite sealing surfaces 33 a, 33 b.
  • the attachment section 33 can be configured as a flange or annular extension projecting radially inwards into the channel 20, which has an upper sealing surface 33a and, opposite the vapor distributor 50, a lower sealing surface 33b.
  • the upwardly projecting connection piece 52 of the steam distributor 50, respectively of the distributor housing 60 has, as already described with reference to the embodiment according to FIG. 1 3, a sealing surface 56, by means of which the connecting piece 52 sealingly on the attachment portion 33 can be brought into abutment.
  • the connecting piece 52 of the distributor housing 60 is in this case in the connecting piece 32 of the housing 12 of the evaporator source 10 axially inserted upwards.
  • a thread 53 is further formed, which is engageable with a connecting screw 1 50 in engagement.
  • the connecting screw can be inserted from above into the channel 20, for example, through an inspection opening, not explicitly shown here, of the housing 12 of the evaporator source 10.
  • the connecting screw 1 50 has a radial Broadened head 1 52, on the underside of a sealing surface 1 53 is formed, which comes to rest in the mounting position shown in Fig. 14 axially sealingly against the upper sealing surface 33 a of the mounting portion 33.
  • An adjacent to the head 1 52 and axially downwardly projecting shaft 1 54 of the connecting screw 150 is provided with an external thread 1 56, which is engageable with the internal thread 53 of the connecting piece 52 in engagement.
  • the radially inwardly ra- ing fastening portion 33 can be axially clamped between the front side sealing surface 56 of the connecting piece 52 and the sealing surface 1 53 of the head 1 52 of the screw 1 50.
  • separate sealing elements for example in the form of a graphite foil, can be arranged between the adjacent sealing surfaces 1 53, 33 a, 33 b, 56.
  • the connecting screw 1 50 also has an axially extending through hole 1 58 on.
  • the connecting screw 1 50 is thus flowed through in the axial direction of steam.
  • it can provide a vapor-conducting structure and a flow connection between the connecting pieces 32, 52 of the evaporator source 10 and the steam distributor 50.
  • the head 152 may have either a radially outer key surface 51 or else in the region of an upper end face other key or screw surfaces, such as a hexagon socket or an inner torx for receiving a screwing.
  • the evaporator source 10 and the steam distributor 50 are rotatable relative to one another and can be aligned and thus adjusted to one another, wherein an axis of rotation extends parallel to the steam-carrying channel 20 of the evaporator source 10.
  • Reference numeral li ste

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

L'invention concerne une source d'évaporateur pour le traitement de surface d'au moins un substrat, comportant un boîtier monolithique (12) en graphite présentant au moins une chambre de vapeur (14, 114) destinée à contenir au moins un contenant de substance à évaporer (16, 116), le boîtier présentant également au moins un orifice de sortie (18) se trouvant en connexion fluidique avec la chambre de vapeur (14, 114) L'invention concerne également un dispositif évaporateur (1) comportant un distributeur de vapeur (50) en couplage fluidique avec la source d'évaporateur (10).
PCT/EP2015/061126 2014-05-23 2015-05-20 Source d'évaporateur pour le traitement de surface de substrats WO2015177217A1 (fr)

Priority Applications (1)

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CN201580026869.6A CN106460155B (zh) 2014-05-23 2015-05-20 用于基底的表面处理的蒸发器源

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DE102014007521.4 2014-05-23
DE102014007521.4A DE102014007521A1 (de) 2014-05-23 2014-05-23 Verdampferquelle für die Oberflächenbehandlung von Substraten

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WO2017114364A1 (fr) * 2015-12-31 2017-07-06 中国建材国际工程集团有限公司 Creuset pour recevoir et chauffer un matériau, et système comprenant un agencement de creuset et de chauffage

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JP2005154903A (ja) * 2003-11-26 2005-06-16 Samsung Sdi Co Ltd 蒸着膜形成方法及び蒸着膜形成装置
US20090095213A1 (en) * 2007-10-12 2009-04-16 University Of Delaware Thermal evaporation sources for wide-area deposition
US20100285218A1 (en) 2008-12-18 2010-11-11 Veeco Instruments Inc. Linear Deposition Source
US20110275196A1 (en) * 2010-05-03 2011-11-10 University Of Delaware Thermal Evaporation Sources with Separate Crucible for Holding the Evaporant Material

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US5167984A (en) * 1990-12-06 1992-12-01 Xerox Corporation Vacuum deposition process
JP3237399B2 (ja) * 1994-06-03 2001-12-10 東洋インキ製造株式会社 真空蒸着装置
DE4442733C2 (de) * 1994-12-01 2001-04-26 Ardenne Anlagentech Gmbh Einrichtung zur Bedampfung bandförmiger Substrate im Vakuum
DE19820859A1 (de) * 1998-05-09 1999-11-11 Leybold Systems Gmbh Vorrichtung zum Beschichten flacher Substrate
US8082878B2 (en) * 2006-04-20 2011-12-27 Saint-Gobain Glass France Thermal evaporation apparatus, use and method of depositing a material
US20100159132A1 (en) * 2008-12-18 2010-06-24 Veeco Instruments, Inc. Linear Deposition Source
DE102010016635B4 (de) * 2010-04-26 2013-09-05 Calyxo Gmbh Verdampfervorrichtung

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JP2005154903A (ja) * 2003-11-26 2005-06-16 Samsung Sdi Co Ltd 蒸着膜形成方法及び蒸着膜形成装置
US20090095213A1 (en) * 2007-10-12 2009-04-16 University Of Delaware Thermal evaporation sources for wide-area deposition
US20100285218A1 (en) 2008-12-18 2010-11-11 Veeco Instruments Inc. Linear Deposition Source
US20110275196A1 (en) * 2010-05-03 2011-11-10 University Of Delaware Thermal Evaporation Sources with Separate Crucible for Holding the Evaporant Material

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Publication number Priority date Publication date Assignee Title
WO2017114364A1 (fr) * 2015-12-31 2017-07-06 中国建材国际工程集团有限公司 Creuset pour recevoir et chauffer un matériau, et système comprenant un agencement de creuset et de chauffage

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CN106460155A (zh) 2017-02-22
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