WO2015162177A1 - Dispositif de support, de positionnement et/ou de déplacement d'un objet - Google Patents

Dispositif de support, de positionnement et/ou de déplacement d'un objet Download PDF

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Publication number
WO2015162177A1
WO2015162177A1 PCT/EP2015/058716 EP2015058716W WO2015162177A1 WO 2015162177 A1 WO2015162177 A1 WO 2015162177A1 EP 2015058716 W EP2015058716 W EP 2015058716W WO 2015162177 A1 WO2015162177 A1 WO 2015162177A1
Authority
WO
WIPO (PCT)
Prior art keywords
carrier
base
magnetic bearings
permanent magnet
electromagnetic actuator
Prior art date
Application number
PCT/EP2015/058716
Other languages
German (de)
English (en)
Inventor
Ulrich Oldendorf
Christof Klesen
Martin Aenis
Original Assignee
Mecatronix Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mecatronix Ag filed Critical Mecatronix Ag
Priority to JP2016564136A priority Critical patent/JP6440740B2/ja
Priority to KR1020167029285A priority patent/KR102035210B1/ko
Publication of WO2015162177A1 publication Critical patent/WO2015162177A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70816—Bearings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Definitions

  • the present invention relates to a device for holding, positioning and / or moving an object, in particular substrates.
  • a generic wafer stage is known, for example, from US Pat. No. 7,868,488 B2.
  • the implementation of actively controlled and accordingly electrically controllable magnetic bearings, especially in a vacuum environment proves to be extremely complex.
  • a device for holding, positioning and / or moving an object, typically one or more substrates.
  • the device has a base and a support movable relative to the base.
  • the base is typically fixed to install and the carrier is mounted by means of at least three magnetic bearing contactlessly at the base.
  • the carrier is contactless at the base in a floating state preserved.
  • the magnetic bearings are spatially spaced from each other to keep the carrier storage stable at the base.
  • At least two of the three magnetic bearings are designed as active controllable magnetic bearings. They each have an electrically activatable and magnetically interacting with a magnetic counterpart electromagnetic actuator.
  • the actuator is actively controlled to maintain a predetermined distance between the base and the carrier by means of an electronic unit.
  • the third mag- netlager also be designed as a passive magnetic bearing.
  • This can have, for example, one or more permanent magnets, by means of which or which a constant supporting force between the base and the carrier can be generated in the region of the relevant bearing. But it can also be configured as active, ie electrically adjustable magnetic bearings all magnetic bearings.
  • the electromagnetic actuator is acted upon at a changing distance between the actuator and counterpart with a correspondingly greater or lesser, changed control current, so that at least temporarily a higher or lower, thus changed force to comply with a required distance between the carrier and base of the actuator concerned Counterpart exercises. It is further provided that the at least two electromagnetic actuators of the magnetic bearing and the electronic unit are arranged on the carrier. As a result, comparatively short signal paths can be realized, so that the vacuum capability of the carrier can be increased in comparison to other embodiments with widely distributed on the carrier and the base arranged electrical components.
  • the arrangement of the electronic unit and the electrically coupled thereto electromagnetic actuators on the carrier also reduces the cabling effort.
  • the number of cable connections as well as the total length of the necessarily provided cable connections can thus be reduced to a minimum.
  • the electromagnetic actuators of the at least two controllable magnetic bearings are arranged on the carrier, the counterparts which can be magnetically brought into operative connection with them are located on the base.
  • the counterparts are typically designed permanent magnetic or ferromagnetic.
  • the number of magnetic bearings to be provided is by no means limited to only three magnetic bearings.
  • the number of magnetic bearings can vary in particular with the number of degrees of freedom of movement to be realized.
  • the floating and non-contact mounting of the carrier to the base may be provided in particular for transport purposes, such as for a linear movement of the carrier relative to the base.
  • at least one further, preferably a plurality of further magnetic bearings for lateral stabilization of the carrier may be provided on the base.
  • a non-contact magnetic bearing in the plane perpendicular to the weight or perpendicular to the weight and perpendicular to the transport direction can be implemented.
  • one or more actively controllable magnetic bearings may be provided, the electromagnetic actuators of which are likewise arranged on the carrier.
  • the device for holding, positioning and / or moving an object has, in particular, a substrate holder arranged on the carrier.
  • a substrate arranged on the carrier side can be brought in a predetermined manner into the working or process region of a treatment device, typically a surface treatment device.
  • the positioning accuracy of the carrier relative to the base may in this case be in the range of a few micrometers or even in the submicron range, i. lie in the nanometer range.
  • a process station for example an evaporator or a surface treatment device comparable thereto, is arranged on the carrier.
  • the actively controllable magnetic bearings on the carrier each have a distance sensor for measuring a distance between the base and the carrier.
  • each magnetic bearing is associated with at least one distance sensor, by means of which the distance between the respective magnetic bearing can be determined to a hereby directly opposite portion of the base.
  • the distance sensor is here preferably arranged in the immediate vicinity of the electromagnetic actuator of the respective magnetic bearing on the carrier. The associated minimization of a distance between distance sensor and electromagnetic actuator is particularly advantageous for reducing a degree of collocation.
  • the distance sensor can also be arranged at a distance from the electromagnetic actuator and, to that extent, outside the magnetic bearing on the carrier.
  • the distance sensor measures the distance as possible at the location of the carrier, which is provided with an electromagnetic actuator.
  • a change in the control current of the electromagnetic actuator and a force or change in the action of the actuator associated therewith has a direct effect on the distance between the actuator and the counterpart arranged on the base side. Such a change in distance is directly measurable by the immediately adjacent arrangement of the distance sensor to the electromagnetic actuator.
  • each actively controllable magnetic bearing is provided with its own distance sensor, local distance changes between the base and the carrier in the region of the respective magnetic bearings can be precisely detected and selectively used for the corresponding control of the respective magnetic bearing concerned.
  • the actively controllable magnetic bearings on the carrier each have an electronic unit.
  • This serves to control the electromagnetic actuator of the respective magnetic bearing as a function of the distance sensor each detectable distance.
  • the distance signals measured by the distance sensor can be processed locally by the respective magnetic bearing-inherent electronic unit.
  • Corresponding control currents or control signals for the electromagnetic actuator of each magnetic bearing can be generated locally in the region of the magnetic bearing or of the electronic unit assigned to it. In this way, the cabling effort between Stand sensor and electronic unit as well as between electronic unit and electromagnetic actuator can be further reduced.
  • the vacuum capability of the entire device, in particular its carrier can thereby be further improved and increased.
  • the electronics unit is coupled to at least two magnetic bearings.
  • the electronic unit can also be designed as a central controller.
  • the electronics unit can be electrically coupled to all active magnetic bearings of the carrier.
  • a central signal processing can take place, wherein, for example, the signals of several or all distance sensors of the individual magnetic bearings of the central electronic unit or control can be evaluated simultaneously.
  • each of the magnetic bearing has its own local, directly in the vicinity of the electromagnetic actuator arranged electronic unit, and that the carrier is equipped in addition to the local electronic units with a further central control, for example, with all or at least with some of the locally implemented on the magnetic bearings electronic units is signal transmitting coupled.
  • the simultaneous and central evaluation of, for example, signals from a plurality of distance sensors may be advantageous for a precise detection of movement states of the wearer at or along the base. In particular, this can counteract any resonance or oscillation phenomena.
  • An electronic unit arranged on or in the magnetic bearing can, in particular, be designed as a control loop or form a control loop together with the electromagnetic actuator of the magnetic bearing.
  • the control circuit has at least the distance sensor already described for qualitatively and quantitatively determining a distance between the carrier and the base.
  • the signal of the distance sensor can be fed to a setpoint generator, which is feasible wherein a comparison between the measured actual value and a preset setpoint. From the comparison of actual value and setpoint, the controller coupled to the setpoint generator can generate a control signal which can be supplied to the electromagnetic actuator via an amplifier.
  • the controller is designed to generate such a control signal, so that the distance which can be determined by the distance sensor is within a predetermined distance interval or below a predetermined maximum distance, but above a required minimum distance.
  • the electromagnetic actuator can be configured, for example, in the form of an electromagnet which always interacts with the counterpart in an attractive manner.
  • the electromagnetic actuator is designed, for example, in the form of a Lorenz actuator or a plunger coil actuator, which can be designed to produce attractive as well as repulsive forces on the counterpart.
  • At least one guide rail extending along a transport direction with at least one counterpart is arranged on the base, which magnetically interacts with the electromagnetic actuator of the carrier.
  • the counterpart may comprise, for example, a ferromagnetic or permanent-magnetic rail which is arranged on the longitudinally extended guide rail of the base or inserted into it.
  • the guide rail of the base itself is made of a ferromagnetic or permanent magnetic material or consists of such a material.
  • the guide rail can be profiled Have cross section corresponding to a corresponding profile geometry of the carrier or can interact with it. For example, in the case of a support suspended from the base, by means of interlocking profile sections of the base and support, a fall protection for the support on the base is provided. With switched off or deactivated electromagnetic actuators thus falling of the carrier can be prevented.
  • the base on two mutually parallel guide rails, on each of which a magnetically interacting with the electromagnetic actuators of the carrier counterparts are arranged.
  • This allows the wearer to receive multiple support at the base.
  • a plurality of electromagnetic actuators spaced apart from one another in the longitudinal direction of the guide rail and thus also a plurality of magnetic bearings are arranged on the support.
  • the magnetic bearings can both have a direction of action oriented counter to the weight force and can also be designed for lateral and lateral stabilization.
  • Individual magnetic bearings can be arranged with their electromagnetic actuators above or below the guide rails of the base. For example, some of the magnetic bearings may compensate for the weight of the carrier. Further magnetic bearings may be arranged laterally of the at least one guide rail on the carrier. By means of such magnetic bearings is in particular a lateral or lateral stabilization of the carrier perpendicular to the longitudinal direction of the guide rail, that is perpendicular to the transport direction possible.
  • the device for holding, positioning and / or moving further comprises a drive for moving the carrier relative to the base along at least one transport direction.
  • the drive has at least one permanent magnet arrangement arranged on the base and a coil arrangement arranged on the carrier and interacting with the permanent magnet arrangement.
  • the drive can be used in particular as a linear drive be formed, which typically extends parallel to the at least one guide rail of the base.
  • a spatial coding extending along at least one transport direction is arranged on the base. This can be read by a position sensor arranged on the carrier.
  • the position sensor can in this case be integrated in the drive or arranged separately from the drive on the carrier.
  • the spatial coding can be optical or magnetic.
  • the associated position sensor is then configured accordingly as an optical or magnetic sensor.
  • the spatial encoding reading position sensor is coupled to the electronic unit, in particular to a central controller, so that the carrier or its central control is enabled to automatically determine a position of the carrier in the transport direction along the base.
  • At least one of the magnetic bearings on a permanent magnet unit and interacting with the permanent magnet unit electrically controllable electromagnetic actuator By means of the permanent magnet unit, a supporting force S acting on the carrier can be generated, which counteracts the weight force G of the carrier and which, in terms of amount, can even be greater than the weight force of the carrier.
  • the permanent magnet unit For example, the carrier can be pushed away from the base against the force of gravity, as it were. The permanent magnet unit can overcompensate for this extent the weight of the carrier, ie the outgoing from the permanent magnet unit supporting force may be greater in magnitude than the weight of the carrier.
  • the permanent magnet unit is formed at least one magnetic bearing for generating a supporting force acting on the carrier, which is greater than the weight of the carrier and wherein the electromagnetic actuator of the magnetic bearing is designed to generate a control force counteracting the supporting force.
  • the electromagnetic actuator can counteract the permanent magnet unit and provide a position-stable floating and non-contact arrangement of the carrier at the base.
  • the permanent magnet unit and the electromagnetic actuator can also interact and proportionately apply a holding or supporting force counteracting the weight of the carrier.
  • the permanent magnet unit compensates only part of the weight force of the carrier, so that the electromagnetic actuator can also interact with the permanent magnet unit.
  • an active magnetic bearing can be formed, the actuator of which has only a regulating force on the basis side counterpart must apply, which is at least smaller in magnitude than the outgoing from the permanent magnet unit supporting force.
  • the maximum force to be applied by the electromagnetic actuators can be reduced.
  • the size and weight of the electromagnetic actuators can therefore be further reduced, which further favors the compact design and the reduction of the weight of the wearer. By minimizing this, the requirements for cooling the electromagnetic actuators can also be reduced.
  • the permanent magnet device With the permanent magnet device, it is also possible to produce a repulsive or attractive acting on the carrier supporting force, which is greater than the weight of the wearer.
  • a floating arrangement of the carrier can be realized above the base, wherein electromagnets acting as electromagnetic actuators are arranged exclusively on the carrier, which then generate a downward and always attractive acting on the base regulating force, by means of which the carrier is stable in position at the base can be held.
  • electromagnets acting as electromagnetic actuators are arranged exclusively on the carrier, which then generate a downward and always attractive acting on the base regulating force, by means of which the carrier is stable in position at the base can be held.
  • At least one motion sensor coupled to the electronic unit is arranged on the carrier.
  • the motion sensor By means of the motion sensor, a wide variety of motion states, some vibration or resonance phenomena of the wearer, but also other mechanical disturbances acting on the device can be detected. These can also be used to control at least one or more magnetic bearings.
  • the at least one motion sensor is typically also arranged in the immediate vicinity of the electromagnetic actuator. In particular, it can be configured independently and separately from the already existing distance sensor. be.
  • the motion sensor may be implemented as an acceleration and / or as a speed sensor. By evaluating the signals of the motion sensor can be counteracted specifically vibration or resonance phenomena. As a result, the positioning and movement accuracy as well as the stability and the damping of the magnetic bearing can be improved.
  • all electrically controllable, electrically signal processing or electrical signal generating components of the active magnetic bearing and / or the drive for the carrier are arranged on the carrier itself.
  • the base can be configured freely of electrically controllable components.
  • the base which thus comparatively inexpensive and spacious, can be designed, for example, with comparatively long guide rails.
  • a carrier can also be used with different, each identically designed bases. Acquisition and maintenance costs for the device according to the invention can be reduced in this respect advantageously.
  • the electronics-free design of the base is also relatively robust and maintenance-free, but at least low maintenance.
  • the carrier is coupled to a position-variable power supply device.
  • the carrier is in particular provided with a central power supply device, so that all the electrical energy required for operating the device can be fed to the carrier via a single interface.
  • the position variable power supply device is particularly suitable for being moved with the carrier. It may, but does not have to, be mechanically coupled to the carrier.
  • the power supply device may be formed as cable tow or flexible, variable-length coiled cable.
  • Other embodiments of a power supply device provide an inductive energy supply.
  • the specific implementation of the power supply device may vary. For applications in a vacuum environment cable connections are preferred.
  • a cable tow may have one end connected to the carrier and other ends connected to the base.
  • the energy supply device may further and additionally comprise a data transmission device and / or a coolant supply.
  • the cable tow or even the flexible variable-length coiled cable or a corresponding cable harness can not only serve for the power supply, but equally provide data transmission between carrier and base or between carrier and other control or signal processing devices.
  • the carrier can simultaneously also receive active or passive cooling by coupling the energy supply device to the carrier.
  • a cooling or a cooling circuit is particularly important in applications in a vacuum environment, since the heat generated by the electromagnetic actuators or other electronic components waste heat by means of a corresponding cooling circuit is particularly good drainable.
  • the carrier is largely vacuum-tight.
  • the carrier may in particular have a largely closed housing, wherein only the power supply device, the data transmission device and / or the coolant supply via at least one or more vacuum-tight cable entries or cable bushings can be installed from the outside into the housing of the wearer.
  • the housing of the carrier can be designed in particular as a metallic housing.
  • the housing may also be made as a substantially monolithic housing. This can for example be milled from an aluminum block.
  • the housing of the carrier can also be provided with other metallic materials which have a lower electrical conductivity than aluminum.
  • the housing of the carrier in the effective range of the electromagnetic actuators gas-tight be provided with stainless steel or similar metallic materials.
  • the sensors in particular the distance sensor of each magnetic bearing as well as the optionally provided motion sensors can be arranged within the carrier housing.
  • the carrier housing is advantageous for the carrier housing to be largely permeable, in particular in the region of the distance sensors provided for the magnetic bearings, for the effect of the relevant sensors.
  • the distance sensors as well as the at least one position sensor for determining the spatial coding can be designed, for example, as magnetic or inductive sensors.
  • FIG. 1 shows a schematic perspective illustration of the device for holding, positioning and / or moving an object, a schematic representation of a magnetic bearing with a control circuit comprising an electronic unit, a schematic cross-sectional view through the device with a total of four magnetic bearings arranged in a plane perpendicular to the transport direction, FIG. an alternative to Fig. 3 embodiment of the device further with a permanent magnet device and another schematic representation of a carrier.
  • FIG. 1 shows a perspective view of the device for holding, positioning and / or moving an object 1.
  • the device 1 has a typically fixed base 30, on which two guide rails 32, 34 are arranged parallel to each other.
  • the guide rails define a transport direction 2 for the device 1.
  • a carrier 50 is mounted without contact by means of a plurality of actively activatable magnetic bearing 1 0. 2, a basic structure of such a magnetic bearing 1 0 is shown.
  • the magnetic bearing 10 has a control loop 11 which couples a distance sensor 20, a setpoint generator 25, a controller 22, an amplifier 24 and an electromagnetic actuator 12 to each other.
  • the electromagnetic actuator 12 embodied here in the form of an electromagnet has a coil 1 6, which can be acted upon by electrical signals, and a ferrite or iron core 14.
  • the electromagnetic actuator 12 may also be designed as a bidirectionally acting Lorentz or Tauchspulenaktor.
  • the control signals generated by the controller 22 are amplified by means of the amplifier 24 and are accordingly supplied to the coil 1 6 for generating a force acting on a counterpart 18 force.
  • the counterpart 18 may be arranged along or on the guide rails 32, 34 on the base 30.
  • the counterpart 18 may be ferromagnetic or permanent or permanent magnetic. It typically extends parallel to the guide rails 32, 34 on the base 30.
  • the distance sensor 20 which is typically arranged in the immediate vicinity of the electromagnetic actuator 12, permanently measures a distance 26 from the counterpiece 18 or the carrier 50.
  • the distance 26 measured by the distance sensor 20 is supplied to the setpoint generator 25 in the form of a distance signal.
  • This can be coupled, for example, to a central controller 29 indicated in FIG. 1, which, for example, specifies a desired value for the distance 26 to be maintained between base 30 and carrier 50.
  • Setpoint and actual values are compared with one another in setpoint generator 25 and a corresponding comparison signal is supplied to controller 22, which generates therefrom a control signal provided for triggering electromagnetic actuator 12 and supplies it to amplifier 24.
  • the ultimately fed to the coil 1 6 amplified control signal is calculated and determined so that a predetermined distance 26 between the carrier 50 and base 30 is maintained, and that in deviations from the required distance 26, the outgoing from the electromagnetic actuator 12 force to maintain the distance 26 dynamically is adjusted.
  • the electronic components of the magnetic bearing 10 are presently summarized in an electronic unit 15 at least logically. It may be all electronics components, such as the amplifier 24, the controller 22, the setpoint generator 25, but also the distance sensor 20 may be housed on a common board, for example in the form of a single integrated circuit. The space requirement for the electronic unit 15 and a cabling effort associated therewith can be minimized in this respect. In the embodiment shown in FIG.
  • a motion sensor 28 is furthermore provided on the carrier 50, typically in the immediate vicinity of the electromagnetic actuator 12.
  • the motion sensor 28 can also be integrated in the electronic unit 15 and in the control loop 11.
  • the motion sensor 28 is designed in particular as an acceleration and / or speed sensor. By means of the acceleration sensor 28 is a movement state, in particular a vibration or resonance behavior of the carrier 50 can be measured or determined.
  • the carrier 50 arranged on the acceleration sensor 28 is also a possible vibration or resonance behavior of the base 30 can be determined, in particular by combining the detectable by the acceleration sensor 28 and the distance sensors 20 signals. If the distance sensor 20 detects a time-varying distance between the base 30 and the carrier 50 and no or only negligibly small movement is detected by the motion sensor 28, this is an indication that the base 30 has been excited to vibrate or otherwise mechanically disturbed, for example shaken .
  • the combination of motion sensor 28 and distance sensor 20 thus enables detection of disturbances and oscillations of the system, so that the magnetic bearings 10 can be selectively controlled to dampen such disturbances or vibrations.
  • the movement signal which can be generated by the motion sensor 28 can likewise be fed to the regulator 22 of the control loop 11. It can be one Damping or vibration damping of the storage of the carrier 50 serve to the base 30.
  • the controller 22 may be provided so far with a vibration damping 23, which processes the signals of the motion sensor 28 vibration damping.
  • a plurality of magnetic bearings 10 are distributed over the carrier 50.
  • Each of these magnetic bearings 10 may have its own control loop 1 1 and thus also its own electronic unit 15.
  • each of the magnetic bearings 10 quasi autonomous maintain a predetermined distance 26 between the base 30 and carrier 50.
  • the device 1 can be provided with a drive 38, which can provide at least one non-contact linear movement of the carrier 50 relative to the base 30.
  • the drive 38 is designed in particular as a linear motor. He has e.g. a in the embodiment of FIG. 1 between lateral guide rails 32, 34 extending drive rail 36.
  • the drive rail 36 can be provided with a permanent magnet arrangement 42 or with a ferromagnetic material, with which a coil arrangement 40 arranged on the carrier 50 can interact magnetically. It is also provided here that the components of the drive 38 that can be acted upon electrically are arranged on the carrier 50.
  • the drive can also be designed in the form of an asynchronous motor or in the form of a reluctance drive.
  • the drive rail 36 can be made of permanently magnetic or ferromagnetic material or have such materials.
  • the drive rail may also comprise or be made of aluminum or another metal.
  • a central power supply means 52 for the carrier 50 is further indicated.
  • the power supply device 52 is implemented as a cable tow, the other ends being arranged, for example, on the base 30.
  • the flexibly designed cable tow allows a non-contact movement or a non-contact Sliding along the carrier 50 along the guide rails 32, 34 of the base 30.
  • each of the magnetic bearings 10 can have its own electronic unit 15, it is also conceivable for the carrier 50 to have a central control 29 which is, for example, coupled with all magnetic bearings 10, in particular with their electronic units 15, in terms of data technology.
  • an overhead base 30 is provided, on which the carrier 50 is suspended.
  • the carrier 50 is suspended on the base 30 and the carrier 50 correspondingly configured profiled sections, for example L- or T-shaped profile sections are provided, by means of which the carrier 50 can be stored crash-proof on the base 30.
  • two magnetic bearings 10 arranged horizontally, transversely or perpendicular to the transport direction 2 are provided at the top, facing the base 30.
  • Their electromagnetic actuators 12 are in particular designed to form an attractive interaction with the base, in particular with counterparts 18 arranged thereon.
  • the two further magnetic bearings 10 shown somewhat below in FIG. 3 serve for transverse stabilization or lateral stabilization 50 on the base 30.
  • a central guide rail 35 is shown, which is a component of the base 30 and which optionally forms integrally or integrally with the base 30 is. By means of the guide rail 35, two magnet bearings 100 arranged opposite each other on the carrier 50 can interact in an attractive manner in each case.
  • Each of the magnetic bearings 100 acting in the horizontal direction (x) serves to maintain a predetermined distance 26 in the transverse direction (x), consequently perpendicular to the transport direction 2 (z) and perpendicular to the vertical (y), ie perpendicular to the weight.
  • the arranged on the carrier 50 coil assembly 40 of the drive 38 is further shown.
  • the coil arrangement is designed to move the carrier 50 along the permanent magnet arrangement 42 or along the drive rail 36.
  • a spatial coding 44 is arranged on the base 30 in the transport direction 2, which can be read out by a position sensor 46 arranged on the carrier side.
  • the position sensor 46 may in particular be coupled to the central controller 29 outlined in FIG. 1 and generate corresponding position signals to the position of the carrier 50. In this way, the carrier 50 can automatically determine a position in the transport direction 2 (z).
  • each only an attractive force generating magnetic bearing 100 may also be provided only a single magnetic bearing with a bidirectional acting electromagnetic actuator, such as with a Lorentz or Tauchspulenaktor.
  • each of the magnetic bearings 10 is provided with a permanent magnet unit 54.
  • permanent magnets 56 are provided on the carrier side in the region of the individual magnetic bearings 10, which interact with the guide rails 32, 34, which are only partially shown in FIG. 4, for example.
  • the implementation of a permanent magnet device 54 is not limited to the configuration of carrier 50 and base 30 shown in FIG. It may also be equally provided for a hanging arrangement as shown in FIG.
  • the guide rails 32, 34 in this case have a T-profile, wherein the permanent magnet 56 of the respective magnetic bearing 10 between the T-profile section of the guide rails 32, 34 and an upper surface of the plate-like designed base 30 are arranged.
  • the permanent magnet units 54 By means of the permanent magnet units 54, at least a part of the weight of the carrier 50 can be compensated. It is even conceivable that the outgoing from the permanent magnet units 54 and acting on the base 30 supporting force is greater than the weight of the carrier 50.
  • the electromagnetic actuators 12 of the respective magnetic bearings 10 can generate a permanent magnet units 54 counteracting regulatory force to the carrier 50th stable and non-contact to the base 30 to store.
  • the energetic supply of the carrier 50 is further outlined by means of a power supply device 52 designed, for example, as a cable tow.
  • the energy supply device 52 is guided into the interior of the housing 60 of the carrier 50 by means of a vacuum-suitable line bushing 58.
  • the line leadthrough 58 is, in particular, largely gas-tight, so that cavities inevitably provided in the interior of the carrier 50 can be made substantially vacuum-tight. In this way, contamination of a vacuum environment, such as substances contained in cavities of the carrier 50, can be largely excluded.
  • FIG. 5 a largely closed housing 60 of the carrier 50 is shown.
  • the present perpendicular to Transport direction 2 cut carrier 50 has four magnetic bearings 10, 100 in the sectional plane.
  • the two magnetic bearings 10 shown above counteract the weight, while the two magnetic bearings shown below are each designed for a lateral and lateral stabilization.
  • a plurality of such magnetic bearing arrangements may be provided, as indicated for example in FIG.
  • Each of the magnetic bearings 10 equipped with an electromagnetic actuator 12 in FIG. 5 has its own electronic unit 15, which is arranged in each case in the immediate vicinity of the electromagnetic actuator 12 of the relevant magnetic bearing 10, 100.
  • the coil arrangement 40 as well as the position sensor 46 are arranged within the largely closed housing 60 of the carrier 50.
  • the wiring complexity can be reduced and thus the vacuum capability of the device can be improved.
  • this embodiment allows an electronics-free and therefore cost-effective and robust design of the base 30.

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Linear Motors (AREA)

Abstract

La présente invention concerne un dispositif de retenue, de positionnement et/ou de déplacement d'un objet (52), comprenant : - une base (30) et un support (50) mobile par rapport à la base (30), - au moins trois paliers magnétiques (10, 100) au moyen desquels le support (50) est monté sans contact sur la base (30), - au moins deux des paliers magnétiques (10, 100) étant configurés en palier magnétique actif réglable (10, 100) et comportant chacun un actionneur électromagnétique (12) à commande électrique qui coopère magnétiquement avec une pièce homologue (18), et qui peut être activement réglé par une unité électronique (15) pour maintenir une distance prédéterminée entre la base (30) et le support (50), et - les au moins deux actionneurs électromagnétiques (12) des paliers magnétiques (10, 100) et l'unité électronique (15) étant disposés sur le support (50).
PCT/EP2015/058716 2014-04-25 2015-04-22 Dispositif de support, de positionnement et/ou de déplacement d'un objet WO2015162177A1 (fr)

Priority Applications (2)

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JP2016564136A JP6440740B2 (ja) 2014-04-25 2015-04-22 物体を保持、位置決めおよび／または移動させるための装置
KR1020167029285A KR102035210B1 (ko) 2014-04-25 2015-04-22 객체의 파지, 위치 결정 및/또는 이동 장치

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DE102014005897.2 2014-04-25
DE102014005897.2A DE102014005897B3 (de) 2014-04-25 2014-04-25 Vorrichtung zum Halten, Positionieren und/oder Bewegen eines Objekts

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KR20180116222A (ko) * 2017-03-16 2018-10-24 어플라이드 머티어리얼스, 인코포레이티드 대상물을 유지하고, 포지셔닝하고, 그리고 이동시키는 것 중 적어도 하나를 위한 장치 및 대상물을 유지하고, 포지셔닝하고, 그리고 이동시키는 것 중 적어도 하나를 위한 장치를 동작시키는 방법
CN111059148A (zh) * 2019-12-27 2020-04-24 珠海格力电器股份有限公司 轴向磁悬浮轴承、电机、压缩机和空调器

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KR101939383B1 (ko) 2016-10-18 2019-04-10 현대오트론 주식회사 초음파 센서 장치 및 초음파 센서 장치의 센싱 방법
KR20190058443A (ko) * 2017-10-27 2019-05-29 어플라이드 머티어리얼스, 인코포레이티드 증착 시스템에서의 캐리어의 비접촉식 이송을 위한 장치, 캐리어의 비접촉식 이송을 위한 시스템, 증착 시스템에서의 비접촉식 이송을 위한 캐리어, 및 증착 시스템에서의 캐리어의 비접촉식 이송을 위한 방법
KR20200087549A (ko) * 2019-01-11 2020-07-21 캐논 톡키 가부시키가이샤 성막장치, 전자 디바이스 제조장치, 성막방법, 및 전자 디바이스 제조방법
KR20240014379A (ko) 2022-07-25 2024-02-01 공주대학교 산학협력단 객체 추종 카트

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CN108886008B (zh) * 2017-03-16 2022-02-22 应用材料公司 用以物体的支承、定位及/或移动的设备及其操作方法
CN111059148A (zh) * 2019-12-27 2020-04-24 珠海格力电器股份有限公司 轴向磁悬浮轴承、电机、压缩机和空调器

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DE102014005897B3 (de) 2015-09-17
KR20160135338A (ko) 2016-11-25
JP6440740B2 (ja) 2018-12-19
KR102035210B1 (ko) 2019-10-22

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