WO2015133283A1 - Soufflante - Google Patents

Soufflante Download PDF

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Publication number
WO2015133283A1
WO2015133283A1 PCT/JP2015/054534 JP2015054534W WO2015133283A1 WO 2015133283 A1 WO2015133283 A1 WO 2015133283A1 JP 2015054534 W JP2015054534 W JP 2015054534W WO 2015133283 A1 WO2015133283 A1 WO 2015133283A1
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WO
WIPO (PCT)
Prior art keywords
diaphragm
blower
blower chamber
piezoelectric
chamber
Prior art date
Application number
PCT/JP2015/054534
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English (en)
Japanese (ja)
Inventor
田中伸拓
横井宏之
佐々木雅啓
栗原潔
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to JP2016506418A priority Critical patent/JP6061054B2/ja
Priority to GB1611722.8A priority patent/GB2538413B/en
Publication of WO2015133283A1 publication Critical patent/WO2015133283A1/fr
Priority to US15/258,306 priority patent/US10221845B2/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/003—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves

Definitions

  • the present invention relates to a blower that transports gas.
  • Patent Document 1 discloses a piezoelectric drive pump.
  • This pump includes a piezoelectric disk, a disk to which the piezoelectric disk is bonded, and a main body that forms a cavity together with the disk.
  • the main body is formed with an inflow port through which gas flows in and an outflow port through which gas flows out.
  • the inflow port is provided between the central axis of the cavity and the outer periphery of the cavity.
  • the outlet is provided on the central axis of the cavity. The outlet is provided with a valve that prevents gas from flowing from the outside to the inside of the cavity.
  • this pump causes the disk to bend and vibrate with a piezoelectric disk. Thereby, gas flows in into a cavity from an inflow port, and the gas in a cavity is discharged from an outflow port.
  • a vortex is generated near the outlet of the cavity.
  • the vortex disturbs the pressure vibration of the cavity and reduces the pressure amplitude of the cavity.
  • the pump of Patent Document 1 has a problem that the discharge pressure is lowered by the vortex generated near the outlet of the cavity (blower chamber), and a high discharge pressure cannot be realized.
  • An object of the present invention is to provide a blower that can weaken a vortex generated near the outlet of a blower chamber and suppress a decrease in discharge pressure.
  • the blower of the present invention has the following configuration in order to solve the above problems.
  • the blower of the present invention includes an actuator and a housing.
  • the actuator includes a diaphragm and a driving body.
  • the diaphragm has a first main surface and a second main surface.
  • the driving body is provided on at least one main surface of the first main surface and the second main surface of the diaphragm. Further, the driving body causes the diaphragm to bend and vibrate concentrically.
  • the housing is joined to the diaphragm to form a blower chamber together with the actuator.
  • at least one of the diaphragm and the housing includes a vent hole that communicates the center of the blower chamber with the outside of the blower chamber, and a recess that is a part of the blower chamber and forms a communication space that communicates with the vent hole. .
  • the communication space is a part of the blower chamber.
  • the blower chamber When the space between the diaphragm and the housing is in contact with an opening having an aperture ratio of 50% or more, the blower chamber has a space inside the opening when the first main surface of the diaphragm is viewed from the front. When the space between the diaphragm and the housing is not in contact with the opening having an aperture ratio of 50% or more, the space between the diaphragm and the casing is indicated.
  • the aperture ratio is defined as the ratio at which the space between the diaphragm and the casing communicates with the outside of the joined body of the diaphragm and the casing.
  • An opening that allows communication between the space sandwiched between the diaphragm and the casing and the outside is provided in the diaphragm and / or the casing.
  • the diaphragm and the casing are formed to have the shortest distance a.
  • the driver vibrates the diaphragm at the resonance frequency f.
  • the resonance frequency f of the diaphragm is determined by the thickness of the diaphragm, the material of the diaphragm, and the like.
  • J 0 ′ (k 0 ) 0 obtained by differentiating the first type Bessel function.
  • A is an opening in the diaphragm when the first main surface is viewed from the center axis of the diaphragm when the space between the diaphragm and the housing is in contact with the opening having an aperture ratio of 50% or more. If the space between the diaphragm and the housing is not in contact with the opening with an aperture ratio of 50% or more, the housing in the diaphragm is separated from the central axis of the diaphragm. The shortest distance to the edge of the area inside the joint with the body.
  • the blower having this configuration has a high discharge pressure and a high discharge flow rate. Can be realized.
  • the blower with this configuration has a communication space near the vent hole in the blower chamber, vortices generated near the vent hole in the blower chamber are weakened in the communication space. Thereby, it can suppress that the pressure vibration of a blower chamber is disturbed by a vortex.
  • the shortest distance a and the resonance frequency f satisfy the relationship of 0.9 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.1 ⁇ (k 0 c) / (2 ⁇ ).
  • a valve for preventing gas from flowing from the outside to the inside of the blower chamber is provided in the ventilation hole of the housing.
  • the number of zero crossings of the vibration displacement of the diaphragm preferably matches the number of zero crossings of the pressure change in the blower chamber.
  • each point of the diaphragm corresponding to the center axis of the blower chamber to the outer periphery of the blower chamber is displaced by vibration.
  • the pressure at each point of the blower chamber changes due to the vibration of the diaphragm from the central axis of the diaphragm to the outer periphery of the blower chamber.
  • the blower having this configuration can transmit the vibration energy of the diaphragm to the gas in the blower chamber with almost no loss. Therefore, the blower having this configuration can realize a high discharge pressure and a high discharge flow rate.
  • the driving body is preferably a piezoelectric body.
  • FIG. 1 is an external perspective view of a piezoelectric blower 100 according to a first embodiment of the present invention. It is an external appearance perspective view of the piezoelectric blower 100 shown in FIG.
  • FIG. 2 is a sectional view taken along line SS of the piezoelectric blower 100 shown in FIG.
  • FIG. 2 is a cross-sectional view of the piezoelectric blower 100 taken along the line SS when the piezoelectric blower 100 shown in FIG. 1 is operated at the resonance frequency (fundamental wave) of the primary mode.
  • FIG. 2 is a diagram showing the relationship between the pressure change at each point in the blower chamber 31 and the displacement at each point of the diaphragm 41 in the piezoelectric blower 100 shown in FIG. 1.
  • FIG. 1 is an external perspective view of a piezoelectric blower 100 according to a first embodiment of the present invention.
  • FIG. 2 is a sectional view taken along line SS of the piezoelectric blower 100 shown in FIG.
  • FIG. 2 is a diagram showing a relationship between radius a ⁇ resonance frequency f and pressure amplitude in the piezoelectric blower 100 shown in FIG. 1. It is sectional drawing of the piezoelectric blower 150 which concerns on the comparative example of 1st Embodiment of this invention. It is sectional drawing of the piezoelectric blower 160 which concerns on the modification of 1st Embodiment of this invention. It is sectional drawing of the piezoelectric blower 200 which concerns on 2nd Embodiment of this invention. 10 is a diagram showing the relationship between the pressure change at each point in the blower chamber 231 and the displacement at each point in the diaphragm 241 in the piezoelectric blower 200 shown in FIG.
  • FIG. 14 is a diagram showing the relationship between the pressure change at each point in the blower chamber 331 and the displacement at each point in the diaphragm 341 in the piezoelectric blower 300 shown in FIG. 13. It is sectional drawing of the piezoelectric blower 350 which concerns on the comparative example of 3rd Embodiment of this invention.
  • FIG. 18 is a diagram showing the relationship between the pressure change at each point in the blower chamber 431 and the displacement at each point of the diaphragm 441 in the piezoelectric blower 400 shown in FIG. 17.
  • top-plate part 618 It is sectional drawing of the top-plate part 618 which concerns on the 2nd modification of the top-plate part 18 shown in FIG. It is sectional drawing of the top-plate part 718 which concerns on the 3rd modification of the top-plate part 18 shown in FIG. It is sectional drawing of the top-plate part 818 which concerns on the 4th modification of the top-plate part 18 shown in FIG. It is sectional drawing of the top-plate part 918 which concerns on the 5th modification of the top-plate part 18 shown in FIG.
  • FIG. 1 is an external perspective view of the piezoelectric blower 100 according to the first embodiment of the present invention.
  • FIG. 2 is an external perspective view of the piezoelectric blower 100 shown in FIG.
  • FIG. 3 is a cross-sectional view taken along line SS of the piezoelectric blower 100 shown in FIG.
  • the piezoelectric blower 100 includes a housing 17, a diaphragm 41, and a piezoelectric element 42 in order from the top, and has a structure in which these are stacked in order.
  • the piezoelectric element 42 corresponds to the “driving body” of the present invention.
  • the diaphragm 41 has a disc shape and is made of, for example, stainless steel (SUS). In the present embodiment, the thickness of the diaphragm 41 is, for example, 0.6 mm. The diameter of the vent hole 24 is, for example, 0.6 mm.
  • the diaphragm 41 has a first main surface 40A and a second main surface 40B.
  • the second main surface 40B of the diaphragm 41 is joined to the tip of the housing 17. Accordingly, the diaphragm 41 is sandwiched from the thickness direction of the diaphragm 41 together with the housing 17 to form a cylindrical blower chamber 31.
  • the diaphragm 41 and the housing 17 are formed so that the blower chamber 31 has a radius a.
  • the radius a of the blower chamber 31 is 6.1 mm.
  • the diaphragm 41 has an opening 62 that allows the outer periphery of the blower chamber 31 to communicate with the outside of the blower chamber 31.
  • the shape of the opening 62 is a sector having an arc 62A, as shown in FIG.
  • the opening 62 is formed over substantially the entire circumference of the diaphragm 41 so as to surround the blower chamber 31. Therefore, the aperture ratio of the opening 62 in this embodiment is about 90%.
  • the diaphragm 41 includes an outer peripheral portion 34, a plurality of beam portions 35, and a vibrating portion 36.
  • the outer peripheral portion 34 has an annular shape.
  • the vibration part 36 has a disk shape.
  • the vibrating portion 36 is disposed in the opening of the outer peripheral portion 34 with a gap between the vibrating portion 36 and the outer peripheral portion 34.
  • the plurality of beam portions 35 are provided in a gap between the outer peripheral portion 34 and the vibrating portion 36, and connect the vibrating portion 36 and the outer peripheral portion 34.
  • the vibration part 36 is supported hollowly via the beam part 35 and is movable up and down in the thickness direction.
  • the aperture ratio is defined as the ratio at which the space between the diaphragm and the casing communicates with the outside of the joined body of the diaphragm and the casing.
  • the aperture ratio refers to the entire circumference of the area of the diaphragm 41 located inside the ring formed by connecting all the openings 62 when the second main surface 40B of the diaphragm 41 is viewed from the front. Is the ratio of the total arc length on the diaphragm 41 side of all the openings 62 to the length of.
  • the blower chamber 31 is viewed from the front side of the first main surface 40A of the diaphragm 41. , Refers to the space inside the opening 62 (more precisely, the space inside the ring formed by connecting all the openings 62).
  • the vibration plate 41 is formed by punching a metal plate, for example.
  • the piezoelectric element 42 has a disc shape and is made of, for example, lead zirconate titanate ceramic. Electrodes are formed on both main surfaces of the piezoelectric element 42.
  • the piezoelectric element 42 is bonded to the first main surface 40A on the opposite side to the blower chamber 31 of the diaphragm 41, and expands and contracts according to the applied AC voltage.
  • the joined body of the piezoelectric element 42 and the diaphragm 41 constitutes a piezoelectric actuator 90.
  • the housing 17 is formed in a U-shaped cross section with an opening at the bottom.
  • the tip of the housing 17 is joined to the diaphragm 41.
  • the casing 17 is made of, for example, metal.
  • the housing 17 includes a disc-shaped top plate portion 18 facing the second main surface 40B of the vibration plate 41, and an annular side wall portion 19 connected to the top plate portion 18. A part of the top plate portion 18 constitutes the top surface of the blower chamber 31.
  • the top plate 18 has a columnar vent 24 that allows the center of the blower chamber 31 to communicate with the outside of the blower chamber 31.
  • the central portion of the blower chamber 31 is a portion overlapping the piezoelectric element 42 when the first main surface 40A of the diaphragm 41 is viewed from the front.
  • the top plate portion 18 has a thick top portion 29 and a thin top portion 28 located on the inner peripheral side of the thick top portion 29.
  • the top plate portion 18 has a vent hole 24 in the thin top portion 28 that allows the central portion of the blower chamber 31 to communicate with the outside of the blower chamber 31.
  • the thickness of the thick top portion 29 is, for example, 0.55 mm
  • the thickness of the thin top portion 28 is, for example, 0.05 mm.
  • the diameter of the vent hole 24 is, for example, 0.6 mm.
  • the central portion of the blower chamber 31 is a portion overlapping the piezoelectric element 42 when the first main surface 40A of the diaphragm 41 is viewed from the front.
  • a concave portion 26 that is a part of the blower chamber 31 and that constitutes a cavity 25 that communicates with the vent hole 24 is formed on the vibration plate 41 side of the top plate portion 18.
  • the cavity 25 is a cylindrical communication space.
  • the diameter of the cavity 25 is, for example, 3.0 mm, and the thickness of the cavity 25 is, for example, 0.5 mm.
  • FIGS. 4A and 4B are cross-sectional views of the SS line of the piezoelectric blower 100 when the piezoelectric blower 100 shown in FIG. 1 is operated at the resonance frequency (fundamental wave) of the primary mode.
  • 4A is a view when the volume of the blower chamber 31 is increased most
  • FIG. 4B is a view when the volume of the blower chamber 31 is decreased most.
  • the arrows in the figure indicate the flow of air.
  • FIG. 5 shows the pressure at each point of the blower chamber 31 applied from the central axis C of the diaphragm 41 to the outer periphery of the blower chamber 31 at the moment when the piezoelectric blower 100 shown in FIG. 1 is in the state shown in FIG.
  • FIG. 4 is a diagram illustrating a relationship between a change and displacement of each point of the diaphragm 41 that configures from the central axis C of the diaphragm 41 to the outer periphery of the blower chamber 31.
  • FIG. 5 is a diagram obtained by simulation.
  • FIG. 6 is a diagram showing the relationship between radius a ⁇ resonance frequency f and pressure amplitude in the piezoelectric blower 100 shown in FIG.
  • FIG. 6 is a diagram in which the pressure amplitude is obtained by changing radius a ⁇ resonance frequency f by simulation.
  • the dotted lines in FIG. 6 indicate the lower limit, upper limit, and maximum value of a range that satisfies the relationship of 0.8 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.2 ⁇ (k 0 c) / (2 ⁇ ). ing.
  • the lower limit is 104 m / s
  • the upper limit is 156 m / s
  • the maximum is 130 m / s.
  • an alternate long and short dash line in FIG. 6 indicates a lower limit and an upper limit of a range satisfying the relationship of 0.9 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.1 ⁇ (k 0 c) / (2 ⁇ ). ing.
  • the lower limit is 117 m / s, and the upper limit is 143 m / s.
  • the pressure amplitude shown in FIG. 6 is normalized by the vibration speed at the center of the piezoelectric element 42. Since the failure limit of the piezoelectric element 42 is the upper limit, the pressure amplitude when the vibration speed is 1 m / s is graphed in the measurement shown in FIG.
  • the radius a of the blower chamber 31 is determined from the central axis C of the diaphragm 41 because the space S sandwiched between the diaphragm 41 and the casing 17 is in contact with the opening 62 having an aperture ratio of 50% or more.
  • the region of the diaphragm 41 inside the opening 62 (more precisely, the diaphragm 41 inside the ring formed by connecting all the openings 62) Is the shortest distance to the end F of the region.
  • the resonance frequency f of the diaphragm 41 is 21.7 kHz.
  • the resonance frequency f of the diaphragm 41 is determined by the thickness of the diaphragm 41, the material of the diaphragm 41, and the like.
  • the sound velocity c of air is 340 m / s. k 0 is 2.40.
  • the first type Bessel function J 0 (x) is expressed by the following mathematical formula.
  • each point of the diaphragm 41 constituting from the central axis C of the diaphragm 41 to the outer periphery of the blower chamber 31 is displaced by vibration. Then, as indicated by the solid line in FIG. 5, the pressure at each point in the blower chamber 31 changes due to the vibration of the diaphragm 41 from the central axis C of the diaphragm 41 to the outer periphery of the blower chamber 31.
  • the number of zero crossings of the vibration displacement of the diaphragm 41 is zero in the range from the central axis C of the diaphragm 41 to the outer periphery of the blower chamber 31.
  • the number of zero crossings of the pressure change is also zero. Therefore, the number of zero crossings of the vibration displacement of the diaphragm 41 matches the number of zero crossings of the pressure change in the blower chamber 31.
  • the vibration node F of the diaphragm 41 coincides with the pressure vibration node of the blower chamber 31, and pressure resonance occurs. Further, even when the relationship of 0.8 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.2 ⁇ (k 0 c) / (2 ⁇ ) is satisfied, the vibration node F of the vibration plate 41 has a blower chamber. It almost coincides with 31 pressure vibration nodes.
  • the piezoelectric blower 100 is used for sucking a liquid having a high viscosity such as a runny nose or sputum.
  • the vibration speed of the piezoelectric element needs to be 2 m / s or less. Since suction of a runny nose and sputum requires a pressure of 20 kPa or more, the piezoelectric blower 100 needs a pressure amplitude of 10 kPa / (m / s) or more. As shown in FIG. 6, the pressure amplitude becomes maximum when af is 130 m / s.
  • a pressure amplitude of 20 kPa / (m / s) or more is obtained. Even at 104 m / s and 156 m / s, which are shifted by ⁇ 20% from 130 m / s, a pressure amplitude of 10 kPa / (m / s) or more can be obtained.
  • the piezoelectric blower 100 has high viscosity such as runny nose and sputum It is possible to realize a high discharge pressure and a high discharge flow rate that can be used for an application for sucking a liquid.
  • the piezoelectric blower 100 has an extremely high discharge pressure and an extremely high discharge. Flow rate can be realized.
  • the piezoelectric blower 100 has a cavity 25 near the vent hole 24 of the blower chamber 31. Therefore, in the piezoelectric blower 100, vortices generated near the vent hole 24 in the blower chamber 31 are weakened in the cavity 25. Thereby, it can suppress that the pressure vibration of the blower chamber 31 is disturbed by the vortex.
  • the piezoelectric blower 100 can weaken the vortex generated near the vent hole 24 of the blower chamber 31 and suppress the discharge pressure from being lowered.
  • each point of the vibration plate 41 is displaced according to the pressure change at each point of the blower chamber 31.
  • the piezoelectric blower 100 can transmit the vibration energy of the diaphragm 41 to the air in the blower chamber 31 with almost no loss. Therefore, the piezoelectric blower 100 can realize a high discharge pressure and a high discharge flow rate.
  • the piezoelectric blower 100 since the outer periphery of the blower chamber 31 becomes a node of pressure vibration of the blower chamber 31, the outer peripheral pressure of the blower chamber 31 is always atmospheric pressure. Therefore, even if the outer periphery of the blower chamber 31 communicates with the outside of the blower chamber 31 through the large opening 62, the piezoelectric blower 100 can prevent the discharge pressure and the discharge flow rate from decreasing.
  • the piezoelectric blower 100 can prevent the opening 62 from being clogged with dust or the like by the large opening 62. That is, the piezoelectric blower 100 can prevent the discharge pressure and the discharge flow rate from being reduced by dust or the like.
  • the piezoelectric blower 100 according to the first embodiment of the present invention and the piezoelectric blower 150 according to the comparative example of the first embodiment of the present invention will be compared.
  • FIG. 7 is a cross-sectional view of a piezoelectric blower 150 according to a comparative example of the first embodiment of the present invention.
  • the piezoelectric blower 150 is different from the piezoelectric blower 100 in that a cavity 25 communicating with the vent hole 24 is formed on the side of the top plate portion 168 of the housing 167 opposite to the vibration plate 41. This cavity 25 is not part of the blower chamber 181. Since the other points are the same, the description is omitted.
  • the piezoelectric blower 100 of the present embodiment it is possible to weaken the vortex generated near the vent hole 24 of the blower chamber 31 and suppress the discharge pressure from being lowered.
  • the top plate 18 may be provided with a valve 80 for preventing gas from flowing from the outside of the blower chamber 31 to the inside through the vent hole 24 (see FIG. 8). ).
  • the valve 80 when the valve 80 is provided in the vent hole 24 of the housing 17, nonlinear pressure fluctuations are generated in the blower chamber 31 by opening and closing the valve 80. Therefore, vortices are likely to occur near the vent hole 24 in the blower chamber 31. Therefore, the cavity 25 is particularly effective in the piezoelectric blower 160 provided with the valve 80.
  • FIG. 9 is a sectional view of the piezoelectric blower 200 according to the second embodiment of the present invention.
  • the piezoelectric blower 200 is different from the piezoelectric blower 100 in that the dimensions of the vibration plate 241 and the housing 217 and the reinforcing plate 70 are provided.
  • the piezoelectric blower 200 includes a housing 217, a vibration plate 241, a reinforcing plate 70, and a piezoelectric element 42 in order from the top, and has a structure in which these are stacked in order.
  • the diaphragm 241 has a disk shape and is made of, for example, stainless steel (SUS). In the present embodiment, the thickness of the diaphragm 241 is, for example, 0.1 mm.
  • the diaphragm 241 has a first main surface 240A and a second main surface 240B.
  • the second main surface 240B of the diaphragm 241 is joined to the tip of the housing 217. Thereby, the diaphragm 241 is sandwiched from the thickness direction of the diaphragm 241 together with the casing 217 to form a cylindrical blower chamber 231.
  • the diaphragm 241 and the housing 217 are formed so that the blower chamber 231 has a radius a.
  • the radius a of the blower chamber 231 is 6.1 mm.
  • the diaphragm 241 has an opening 262 that allows the outer periphery of the blower chamber 231 to communicate with the outside of the blower chamber 231.
  • the opening 262 is formed over substantially the entire circumference of the diaphragm 241 so as to surround the blower chamber 231. Therefore, the region inside the opening 262 in the second main surface 240B of the diaphragm 241 constitutes the bottom surface of the blower chamber 231.
  • the diaphragm 241 is formed, for example, by punching a metal plate.
  • the reinforcing plate 70 has a disc shape and is made of, for example, stainless steel.
  • the reinforcing plate 70 is joined to the first main surface 240 ⁇ / b> A of the diaphragm 241.
  • the diameter of the reinforcing plate 70 is, for example, 11 mm, and the thickness of the reinforcing plate 70 is, for example, 0.5 mm.
  • the piezoelectric element 42 is joined to the main surface 240C of the reinforcing plate 70 on the opposite side to the blower chamber 231.
  • a joined body of the piezoelectric element 42, the reinforcing plate 70, and the vibration plate 241 constitutes a piezoelectric actuator 290.
  • the diaphragm 241 and the reinforcing plate 70 constitute the “diaphragm” of the present invention.
  • the first main surface 240A corresponds to the “first main surface” of the present invention, and the main surface 240C corresponds to the “second main surface” of the present invention.
  • the housing 217 is formed in a U-shaped cross section with an opening at the bottom.
  • the tip of the housing 217 is joined to the diaphragm 241.
  • the housing 217 is made of, for example, metal.
  • the housing 217 includes a disk-shaped top plate portion 218 that faces the second main surface 240 ⁇ / b> B of the diaphragm 241, and an annular side wall portion 19 that is connected to the top plate portion 218. A part of the top plate portion 218 constitutes the top surface of the blower chamber 231.
  • the top plate part 218 has a cylindrical air hole 24 that communicates the center of the blower chamber 231 with the outside of the blower chamber 231.
  • the central portion of the blower chamber 231 is a portion that overlaps the piezoelectric element 42 when the first main surface 240A of the diaphragm 241 is viewed from the front.
  • the top plate part 218 includes a thick top part 229 and a thin top part 28 located on the inner peripheral side of the thick top part 229.
  • the top plate portion 218 has a vent hole 24 in the thin top portion 28 that allows the central portion of the blower chamber 231 to communicate with the outside of the blower chamber 231.
  • the thickness of the thick part 229 is 0.2 mm, for example.
  • the thickness of the thin top portion 28 is, for example, 0.05 mm.
  • the central portion of the blower chamber 231 is a portion overlapping the piezoelectric element 42 when the first main surface 240A of the diaphragm 241 is viewed from the front.
  • a concave portion 226 that forms a cavity 225 that is a part of the blower chamber 231 and communicates with the vent hole 24 is formed on the vibration plate 241 side of the top plate portion 218.
  • the cavity 225 has a cylindrical shape.
  • the diameter of the cavity 225 is, for example, 2.0 mm, and the thickness of the cavity 225 is, for example, 0.15 mm.
  • FIG. 10 shows the pressure change at each point of the blower chamber 231 from the central axis C of the diaphragm 241 to the outer periphery of the blower chamber 231 at a predetermined moment during the driving of the piezoelectric blower 200 shown in FIG. It is a figure which shows the relationship with the displacement of each point of the diaphragm 241 which comprises from the central axis C to the outer periphery of the blower chamber 231.
  • FIG. FIG. 10 is a diagram obtained by simulation.
  • the pressure change at each point of the blower chamber 231 and the displacement of each point of the diaphragm 241 are normalized by the displacement of the center of the diaphragm 241 on the central axis C of the diaphragm 241. Indicated by value.
  • the vibration plate 241 is bent and deformed, and the volume of the blower chamber 231 is periodically changed.
  • the radius a of the blower chamber 231 is determined from the central axis C of the diaphragm 241 because the space S sandwiched between the diaphragm 241 and the housing 217 is in contact with the opening 262 having an aperture ratio of 50% or more.
  • the region of the diaphragm 241 inside the opening 262 (more precisely, the diaphragm 241 inside the ring formed by connecting all the openings 262) Is the shortest distance to the end F of the region.
  • the resonance frequency f is 47.0 kHz.
  • the sound velocity c of air is 340 m / s. k 0 is 5.52.
  • each point of the diaphragm 241 constituting the center axis C of the diaphragm 241 to the outer periphery of the blower chamber 231 is displaced by vibration. 10 the pressure at each point in the blower chamber 231 changes due to the vibration of the diaphragm 241 from the central axis C of the diaphragm 241 to the outer periphery of the blower chamber 231.
  • the number of zero crossing points of the vibration displacement of the diaphragm 241 is one.
  • the number of zero crossings of the pressure change is also one. Therefore, the number of zero crossings of the vibration displacement of the diaphragm 241 matches the number of zero crossings of the pressure change in the blower chamber 231.
  • the vibration node F of the diaphragm 241 coincides with the pressure vibration node of the blower chamber 231, and pressure resonance occurs. Furthermore, even when the relationship of 0.8 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.2 ⁇ (k 0 c) / (2 ⁇ ) is satisfied, the vibration node F of the diaphragm 241 is reduced in the blower chamber. It almost coincides with the pressure vibration node of H.231.
  • the piezoelectric blower 200 is used for sucking a liquid having a high viscosity such as a runny nose or sputum.
  • the vibration speed of the piezoelectric element needs to be 2 m / s or less. Since suction of a runny nose and sputum requires a pressure of 20 kPa or more, the piezoelectric blower 200 needs a pressure amplitude of 10 kPa / (m / s) or more.
  • the pressure is 10 kPa / (m / s) or more. Amplitude can be obtained.
  • the piezoelectric blower 200 satisfies the relationship of 0.8 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.2 ⁇ (k 0 c) / (2 ⁇ ), the viscosity of the runny nose and sputum is high. It is possible to realize a high discharge pressure and a high discharge flow rate that can be used for an application for sucking a liquid.
  • the piezoelectric blower 200 satisfies the relationship of 0.9 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.1 ⁇ (k 0 c) / (2 ⁇ ), the extremely high discharge pressure and the extremely high discharge Flow rate can be realized.
  • the piezoelectric blower 200 has a cavity 225 near the vent hole 24 of the blower chamber 231. Therefore, in the piezoelectric blower 200, vortices generated near the vent hole 24 in the blower chamber 231 are weakened in the cavity 225. Thereby, it can suppress that the pressure vibration of the blower chamber 231 is disturbed by the vortex.
  • the piezoelectric blower 200 can weaken the vortex generated near the vent hole 24 of the blower chamber 231 and suppress the discharge pressure from being lowered.
  • the piezoelectric blower 200 can transmit the vibration energy of the diaphragm 241 to the air in the blower chamber 231 with almost no loss. Therefore, the piezoelectric blower 200 can realize a high discharge pressure and a high discharge flow rate.
  • the piezoelectric blower 200 the outer periphery of the blower chamber 231 becomes a node of pressure vibration of the blower chamber 231, and therefore the outer peripheral pressure of the blower chamber 231 is always atmospheric pressure. Therefore, even if the outer periphery of the blower chamber 231 communicates with the outside of the blower chamber 231 through the large opening 262, the piezoelectric blower 200 can prevent the discharge pressure and the discharge flow rate from decreasing.
  • the piezoelectric blower 200 can prevent dust and the like from being clogged in the opening 262 by the large opening 262. That is, the piezoelectric blower 200 can prevent the discharge pressure and the discharge flow rate from being reduced by dust or the like.
  • the piezoelectric blower 200 according to the second embodiment of the present invention and the piezoelectric blower 250 according to the comparative example of the second embodiment of the present invention will be compared.
  • FIG. 11 is a cross-sectional view of a piezoelectric blower 250 according to a comparative example of the second embodiment of the present invention.
  • the piezoelectric blower 250 is different from the piezoelectric blower 200 in that a cavity 225 communicating with the vent hole 24 is formed on the opposite side of the top plate portion 268 of the housing 267 from the vibration plate 41.
  • This cavity 225 is not part of the blower chamber 281. Since the other points are the same, the description is omitted.
  • the piezoelectric blower 200 of the present embodiment it is possible to weaken the vortex generated near the vent hole 24 of the blower chamber 231 and suppress the discharge pressure from being lowered.
  • the top plate 218 may be provided with a valve 80 that prevents gas from flowing from the outside of the blower chamber 231 to the inside through the vent hole 24 (see FIG. 12). ).
  • the valve 80 when the valve 80 is provided in the vent hole 24 of the housing 217, non-linear pressure fluctuation is generated in the blower chamber 231 by opening and closing the valve 80. Therefore, vortices are likely to occur near the vent hole 24 of the blower chamber 231. Therefore, the cavity 225 is particularly effective in the piezoelectric blower 260 provided with the valve 80.
  • FIG. 13 is a cross-sectional view of a piezoelectric blower 300 according to a third embodiment of the present invention.
  • the piezoelectric blower 300 is different from the piezoelectric blower 200 in the dimensions of the diaphragm 341 and the housing 317 and in that the opening is not provided in the diaphragm 341.
  • the opening ratio of the outer periphery of the blower chamber 331 is 0%. Therefore, the space S sandwiched between the diaphragm 341 and the housing 317 is not in contact with the opening having an opening ratio of 50% or more (in other words, the shielded ratio exceeds 50% in any ring). ), The blower chamber 331 indicates a space S sandwiched between the diaphragm 341 and the housing 317.
  • the piezoelectric blower 300 includes a housing 317, a vibration plate 341, a reinforcing plate 70, and a piezoelectric element 42 in order from the top, and has a structure in which these are stacked in order.
  • the diaphragm 341 has a disc shape and is made of, for example, stainless steel (SUS). In the present embodiment, the thickness of the diaphragm 341 is, for example, 0.1 mm.
  • the diaphragm 341 has a first main surface 340A and a second main surface 340B.
  • the second main surface 340B of the diaphragm 341 is joined to the tip of the housing 317. Thereby, the diaphragm 341 is sandwiched from the thickness direction of the diaphragm 341 together with the housing 317 to form a cylindrical blower chamber 331.
  • the diaphragm 341 and the housing 317 are formed so that the blower chamber 331 has a radius a.
  • the radius a of the blower chamber 331 is, for example, 9.4 mm.
  • a region on the inner side of the second main surface 340B of the diaphragm 341 from the joint portion with the housing 317 constitutes the bottom surface of the blower chamber 331.
  • the reinforcing plate 70 is joined to the first main surface 340 ⁇ / b> A on the side opposite to the blower chamber 331 of the vibration plate 341.
  • the diameter of the reinforcing plate 70 is, for example, 11 mm, and the thickness of the reinforcing plate 70 is, for example, 0.5 mm.
  • the piezoelectric element 42 is joined to the main surface 340C on the opposite side of the blower chamber 331 of the reinforcing plate 70.
  • a joined body of the piezoelectric element 42, the reinforcing plate 70 and the vibration plate 341 constitutes a piezoelectric actuator 390.
  • the diaphragm 341 and the reinforcing plate 70 constitute the “diaphragm” of the present invention.
  • the main surface 340C corresponds to the “second main surface” of the present invention.
  • the housing 317 is formed in a U-shaped cross section with an opening at the bottom.
  • the tip of the housing 317 is joined to the diaphragm 341.
  • the housing 317 is made of metal, for example.
  • the housing 317 includes a disk-shaped top plate portion 318 facing the second main surface 340 ⁇ / b> B of the diaphragm 341, and an annular side wall portion 19 connected to the top plate portion 318. A part of the top plate portion 318 constitutes the top surface of the blower chamber 331.
  • the top plate portion 318 has a columnar vent 24 that allows the blower chamber 331 to communicate with the outside of the blower chamber 331.
  • the top plate portion 318 has a thick top portion 329 and a thin top portion 28 located on the inner peripheral side of the thick top portion 329.
  • the top plate portion 318 has a vent hole 24 in the thin top portion 28 that allows the central portion of the blower chamber 331 to communicate with the outside of the blower chamber 331.
  • the thickness of the thick part 329 is, for example, 0.3 mm.
  • the thickness of the thin top portion 28 is, for example, 0.05 mm.
  • the central portion of the blower chamber 331 is a portion that overlaps the piezoelectric element 42 when the first main surface 340A of the diaphragm 341 is viewed from the front.
  • a concave portion 326 that forms a cavity 325 that is part of the blower chamber 331 and communicates with the vent hole 24 is formed on the top plate portion 318 on the vibration plate 341 side.
  • the cavity 325 has a cylindrical shape.
  • the diameter of the cavity 325 is, for example, 3.0 mm, and the thickness of the cavity 325 is, for example, 0.25 mm.
  • FIG. 14 shows the pressure change at each point of the blower chamber 331 from the central axis C of the diaphragm 341 to the outer periphery of the blower chamber 331 at a predetermined moment during the driving of the piezoelectric blower 300 shown in FIG. It is a figure which shows the relationship between the displacement of each point of the diaphragm 341 which comprises from the central axis C to the outer periphery of the blower chamber 331.
  • FIG. FIG. 14 is a diagram obtained by simulation.
  • the pressure change at each point in the blower chamber 331 and the displacement at each point of the diaphragm 341 are normalized by the displacement of the center of the diaphragm 341 on the center axis C of the diaphragm 341. Indicated by value.
  • the vibration plate 341 is bent and deformed, and the volume of the blower chamber 331 is periodically changed.
  • the relationship of 0.8 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.2 ⁇ (k 0 c) / (2 ⁇ ) is satisfied.
  • the radius a of the blower chamber 331 is such that the space S sandwiched between the vibration plate 341 and the housing 317 is not in contact with the opening having an opening ratio of 50% or more. This is the shortest distance to the end J of the region on the inner side of the joint portion of the diaphragm 341 with the housing 317.
  • the resonance frequency f is 24.0 kHz.
  • the sound velocity c of air is 340 m / s. k 0 is 3.83.
  • each point of the diaphragm 341 constituting the center axis C of the diaphragm 341 to the outer periphery of the blower chamber 331 is displaced by vibration.
  • the pressure at each point in the blower chamber 331 changes due to the vibration of the diaphragm 341 from the central axis C of the blower chamber 331 to the outer periphery of the blower chamber 331.
  • the number of zero crossing points of the vibration displacement of the diaphragm 341 is one.
  • the number of zero crossings of the pressure change is also one. Therefore, the number of zero crossings of the vibration displacement of the diaphragm 341 matches the number of zero crossings of the pressure change in the blower chamber 331.
  • the vibration node of the diaphragm 341 coincides with the pressure vibration node of the blower chamber 331, and pressure resonance occurs. Furthermore, even when the relationship of 0.8 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.2 ⁇ (k 0 c) / (2 ⁇ ) is satisfied, the vibration node of the vibration plate 341 causes the blower chamber 331 to It almost coincides with the pressure oscillation node.
  • the piezoelectric blower 300 is used for sucking a highly viscous liquid such as a runny nose or sputum.
  • the vibration speed of the piezoelectric element needs to be 2 m / s or less. Since suction of a runny nose and sputum requires a pressure of 20 kPa or more, the piezoelectric blower 300 needs a pressure amplitude of 10 kPa / (m / s) or more.
  • the piezoelectric blower 300 has a pressure of 10 kPa / (m / s) or more when the relationship of 0.8 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.2 ⁇ (k 0 c) / (2 ⁇ ) is satisfied. Amplitude can be obtained. Therefore, when the piezoelectric blower 300 satisfies the relationship of 0.8 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.2 ⁇ (k 0 c) / (2 ⁇ ), the viscosity of the runny nose and sputum is high. It is possible to realize a high discharge pressure and a high discharge flow rate that can be used for an application for sucking a liquid.
  • the piezoelectric blower 300 satisfies the relationship of 0.9 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.1 ⁇ (k 0 c) / (2 ⁇ ), the extremely high discharge pressure and the extremely high discharge Flow rate can be realized.
  • the piezoelectric blower 300 has a cavity 325 near the vent hole 24 of the blower chamber 331. Therefore, in the piezoelectric blower 300, vortices generated near the vent hole 24 in the blower chamber 331 are weakened in the cavity 325. Thereby, it can suppress that the pressure vibration of the blower chamber 331 is disturbed by the vortex.
  • the piezoelectric blower 300 can weaken the vortex generated near the vent hole 24 of the blower chamber 331 and suppress the discharge pressure from being lowered.
  • the displacement distribution of each point of the diaphragm 341 is close to the pressure change distribution of each point of the blower chamber 331. That is, when the diaphragm 341 vibrates, each point of the diaphragm 341 is displaced in accordance with the pressure change of each point of the blower chamber 331.
  • the piezoelectric blower 300 can transmit the vibration energy of the diaphragm 341 to the air in the blower chamber 331 with almost no loss. Therefore, the piezoelectric blower 300 can realize a high discharge pressure and a high discharge flow rate.
  • the piezoelectric blower 300 according to the third embodiment of the present invention and the piezoelectric blower 350 according to the comparative example of the third embodiment of the present invention will be compared.
  • FIG. 15 is a cross-sectional view of a piezoelectric blower 350 according to a comparative example of the third embodiment of the present invention.
  • the piezoelectric blower 350 is different from the piezoelectric blower 300 in that a cavity 325 communicating with the vent hole 24 is formed on the opposite side of the top plate portion 368 of the housing 367 from the vibration plate 41. This cavity 325 is not part of the blower chamber 381. Since the other points are the same, the description is omitted.
  • wind force (mN) of the air flowing out from the vent hole 24 of the piezoelectric blower 300 are shown below.
  • the piezoelectric blower 300 of this embodiment it is possible to weaken the vortex generated near the vent hole 24 of the blower chamber 331 and suppress the discharge pressure from being lowered.
  • the top plate portion 318 is provided with a valve 80 that prevents gas from flowing from the outside of the blower chamber 331 to the inside through the vent hole 24, so that the diaphragm 341 and the housing 317
  • An opening 324 having an opening ratio of 50% or less may be provided in the part (see FIG. 16).
  • the shape of the opening 324 is cylindrical. And when the front view is seen from the one main surface of the top-plate part 318, the shape of the opening part 324 is a circle.
  • FIG. 17 is a cross-sectional view of a piezoelectric blower 400 according to a fourth embodiment of the present invention.
  • the piezoelectric blower 400 is different from the piezoelectric blower 300 in the dimensions of the diaphragm 441 and the housing 417. Since other configurations are the same, description thereof is omitted.
  • the blower chamber 431 is also cylindrical, and the radius a of the blower chamber 431 is, for example, 10.3 mm.
  • the diaphragm 441 and the housing 417 are formed so that the blower chamber 431 has a radius a.
  • the diaphragm 441 has a first main surface 440A and a second main surface 440B.
  • a joined body of the piezoelectric element 42, the reinforcing plate 70, and the vibration plate 441 constitutes a piezoelectric actuator 490.
  • a concave portion 326 is formed that constitutes a cavity 325 that is part of the blower chamber 331 and communicates with the vent hole 24.
  • FIG. 18 shows the pressure change at each point in the blower chamber 431 from the central axis C of the vibration plate 441 to the outer periphery of the blower chamber 431 at a predetermined moment during the driving of the piezoelectric blower 400 shown in FIG. It is a figure which shows the relationship with the displacement of each point of the diaphragm 441 which comprises from the central axis C to the outer periphery of the blower chamber 431.
  • FIG. FIG. 18 is a diagram obtained by simulation.
  • the pressure change at each point in the blower chamber 431 and the displacement at each point of the diaphragm 441 are normalized by the displacement of the center of the diaphragm 441 on the central axis C of the diaphragm 441. Indicated by value.
  • the vibration plate 441 is bent and deformed, and the volume of the blower chamber 431 changes periodically.
  • the resonance frequency f is 36.3 kHz.
  • the sound velocity c of air is 340 m / s. k 0 is 7.02.
  • each point of the diaphragm 441 constituting the center axis C of the diaphragm 441 to the outer periphery of the blower chamber 431 is displaced by vibration.
  • the pressure at each point in the blower chamber 431 changes due to the vibration of the diaphragm 441 from the central axis C of the diaphragm 441 to the outer periphery of the blower chamber 431.
  • the number of zero crossing points of the vibration displacement of the diaphragm 441 is two.
  • the number of zero crossings of the pressure change is also two. Therefore, the number of zero crossings of the vibration displacement of the diaphragm 441 matches the number of zero crossings of the pressure change in the blower chamber 431.
  • the vibration node of the diaphragm 441 coincides with the pressure vibration node of the blower chamber 431, and pressure resonance occurs. Further, even when the relationship of 0.8 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.2 ⁇ (k 0 c) / (2 ⁇ ) is satisfied, the vibration node of the vibration plate 441 becomes the blower chamber 431. It almost coincides with the pressure oscillation node.
  • the piezoelectric blower 400 is used for sucking a highly viscous liquid such as a runny nose or sputum.
  • the vibration speed of the piezoelectric element needs to be 2 m / s or less. Since suction of a runny nose and sputum requires a pressure of 20 kPa or more, the piezoelectric blower 400 needs a pressure amplitude of 10 kPa / (m / s) or more.
  • the piezoelectric blower 400 has a pressure of 10 kPa / (m / s) or more when the relationship 0.8 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.2 ⁇ (k 0 c) / (2 ⁇ ) is satisfied. Amplitude can be obtained. Therefore, when the piezoelectric blower 400 satisfies the relationship of 0.8 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.2 ⁇ (k 0 c) / (2 ⁇ ), the viscosity of the runny nose and sputum is high. It is possible to realize a high discharge pressure and a high discharge flow rate that can be used for an application for sucking a liquid.
  • the piezoelectric blower 400 satisfies the relationship of 0.9 ⁇ (k 0 c) / (2 ⁇ ) ⁇ af ⁇ 1.1 ⁇ (k 0 c) / (2 ⁇ ), the extremely high discharge pressure and the extremely high discharge Flow rate can be realized.
  • the piezoelectric blower 400 has a cavity 325 near the vent hole 24 of the blower chamber 431. Therefore, in the piezoelectric blower 400, the vortex generated near the vent hole 24 in the blower chamber 431 is weakened in the cavity 325. Thereby, it can suppress that the pressure vibration of the blower chamber 431 is disturbed by the vortex.
  • the piezoelectric blower 400 can weaken the vortex generated near the vent hole 24 of the blower chamber 431 and suppress the discharge pressure from being lowered.
  • the displacement distribution of each point of the diaphragm 441 is close to the pressure change distribution of each point of the blower chamber 431. That is, when the diaphragm 441 vibrates, each point of the diaphragm 441 is displaced in accordance with a pressure change at each point of the blower chamber 431.
  • the piezoelectric blower 400 can transmit the vibration energy of the diaphragm 441 to the air in the blower chamber 431 with almost no loss. Therefore, the piezoelectric blower 400 can realize a high discharge pressure and a high discharge flow rate.
  • the piezoelectric blower 400 of the fourth embodiment the same effect as that of the piezoelectric blower 300 of the third embodiment can be obtained.
  • the piezoelectric blower 400 according to the fourth embodiment of the present invention and the piezoelectric blower 450 according to the comparative example of the fourth embodiment of the present invention will be compared.
  • FIG. 19 is a cross-sectional view of a piezoelectric blower 450 according to a comparative example of the fourth embodiment of the present invention.
  • the piezoelectric blower 450 is different from the piezoelectric blower 400 in that a cavity 325 communicating with the vent hole 24 is formed on the opposite side of the top plate portion 468 of the housing 467 from the vibration plate 41. This cavity 325 is not part of the blower chamber 481. Since the other points are the same, the description is omitted.
  • wind force (mN) of the air flowing out from the vent hole 24 of the piezoelectric blower 400 are shown below.
  • the piezoelectric blower 400 of the present embodiment it is possible to weaken the vortex generated near the vent hole 24 of the blower chamber 431 and suppress the discharge pressure from being lowered.
  • the top plate portion 418 is provided with a valve 80 for preventing gas from flowing from the outside of the blower chamber 431 to the inside through the vent hole 24, so that the diaphragm 441 and the housing 417
  • An opening 424 having an opening ratio of 50% or less may be provided in the part (see FIG. 20).
  • the shape of the opening 424 is cylindrical. And when the front view is seen from the one main surface of the diaphragm 441, the shape of the opening part 424 is a circle.
  • the shape of the opening 62 is a sector shape having an arc 62A as shown in FIG. The openings 62 form an annular shape when all the openings 62 are connected.
  • the cavity 325 is particularly effective in the piezoelectric blower 460 provided with the valve 80.
  • air is used as the fluid, but the present invention is not limited to this. It can be applied even if the fluid is a gas other than air.
  • the diaphragms 41, 241, 341, 441 and the reinforcing plate 70 are made of SUS, but are not limited thereto.
  • the piezoelectric element 42 is provided as a drive source for the blower, but the present invention is not limited to this.
  • it may be configured as a blower that performs a pumping operation by electromagnetic drive.
  • the piezoelectric element 42 is made of lead zirconate titanate ceramic, but is not limited thereto.
  • it may be composed of a lead-free piezoelectric ceramic material such as potassium sodium niobate and alkali niobate ceramics.
  • the piezoelectric element 42 is joined to the first main surface 40A on the opposite side of the blower chamber 31 of the diaphragm 41, but the present invention is not limited to this.
  • the piezoelectric element 42 may be bonded to the second main surface 40B of the diaphragm 41 on the blower chamber 31 side, or the two piezoelectric elements 42 may be the first main surface 40A of the diaphragm 41. And it may be joined to the second main surface 40B.
  • the casing 17 constitutes a blower chamber sandwiched from the thickness direction of the vibration plate 41 together with the piezoelectric actuator composed of at least one piezoelectric element 42 and the vibration plate 41.
  • the piezoelectric element 42 is joined to the main surface 240C on the opposite side of the blower chamber 231 of the reinforcing plate 70, but is not limited thereto.
  • the piezoelectric element 42 may be bonded to the second main surface 240B of the diaphragm 241 on the blower chamber 231 side, or the two piezoelectric elements 42 may be connected to the main surface 240C of the reinforcing plate 70 and the second main surface 240C.
  • the diaphragm 241 may be joined to the second main surface 240B.
  • the housing 217 constitutes a blower chamber sandwiched from the thickness direction of the diaphragm 241 together with a piezoelectric actuator composed of at least one piezoelectric element 42 and the diaphragm 241.
  • the piezoelectric element 42 is joined to the main surface 340C on the opposite side of the blower chamber 331 of the reinforcing plate 70, but is not limited thereto.
  • the piezoelectric element 42 may be bonded to the second main surface 340B of the vibration plate 341, or the two piezoelectric elements 42 may include the main surface 340C of the reinforcing plate 70 and the first surface of the vibration plate 341. 2 may be joined to the main surface 340B.
  • the housing 317 constitutes a blower chamber sandwiched from the thickness direction of the vibration plate 341 together with the piezoelectric actuator composed of at least one piezoelectric element 42, the reinforcing plate 70, and the vibration plate 341.
  • the piezoelectric element 42 is joined to the main surface 440C on the opposite side of the blower chamber 431 of the reinforcing plate 70, but is not limited thereto.
  • the piezoelectric element 42 may be bonded to the second main surface 440B of the vibration plate 441, or the two piezoelectric elements 42 may be connected to the main surface 440C of the reinforcing plate 70 and the first main surface of the vibration plate 441. It may be joined to the two main surfaces 440B.
  • the housing 417 forms a blower chamber sandwiched from the thickness direction of the vibration plate 441 together with a piezoelectric actuator including at least one piezoelectric element 42, the reinforcing plate 70, and the vibration plate 341.
  • the disk-shaped piezoelectric element 42, the disk-shaped diaphragm 41, the disk-shaped reinforcing plate 70, the disk-shaped top plate portion 18 and the like are used.
  • the present invention is not limited to this. Absent.
  • these shapes may be rectangular or polygonal.
  • the vibration plate of the piezoelectric blower is bent and vibrated at a frequency such as the primary mode and the tertiary mode.
  • the present invention is not limited to this.
  • the diaphragm may be bent and vibrated in an odd-order vibration mode that is a third-order mode or more that forms a plurality of vibration antinodes.
  • the shape of the blower chambers 31, 231, 331, 431 is a cylindrical shape, it is not restricted to this.
  • the shape of the blower chamber may be a regular prism shape. In this case, the shortest distance a from the central axis of the diaphragm to the outer periphery of the blower chamber is used instead of the radius a of the blower chamber.
  • one circular ventilation hole 24 is provided in the top plate portions 18, 218, 318, and 418, but this is not restrictive.
  • a plurality of vent holes 524 to 724 may be provided as shown in FIGS. 21 to 23.
  • the vent holes 624 to 824 shown in FIGS. May be.
  • the columnar cavities 25, 225, and 325 are provided in the top plate portions 18, 218, 318, and 418 by the recesses 26, 226, and 326.
  • the present invention is not limited to this.
  • the cavity may be provided, for example, by a concave portion 526 with an R as shown in FIG. 25, or by a concave portion 626, 726 with a taper as shown in FIGS.
  • a two-stage structure may be provided by polygonal recesses 826 and 926.
  • the opening 62 is provided in the vibration plate 41 or the opening 262 is provided in the vibration plate 241, but the present invention is not limited to this.
  • the opening part may be provided in the top plate part or side wall part of the housing.
  • the air holes 24 are provided in the housings 17, 217, 317, and 417, but the present invention is not limited to this.
  • a vent hole may be provided in the diaphragm.
  • the recesses 26, 226, and 326 are provided in the housings 17, 217, 317, and 417, but the present invention is not limited to this.
  • the recess may be provided in the diaphragm.
  • blower chamber 240A ... first main surface 240B 2nd main surface 240C ... Main surface 241 ... Diaphragm 250, 260 ... Piezoelectric blower 262 ... Opening 267 ... Housing 268 ... Top plate 281 ... Blower chamber 290 ... Piezoelectric actuator 300 ... Piezoelectric blower 317 ... Housing 3 8 ... Top plate 324 ... Opening 325 ... Cavity 326 ... Recess 329 ... Thick top 331 ... Blower chamber 340A ... First main surface 340B ... Second main surface 340C ... Main surface 341 ... Diaphragm 350, 360 ...

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Abstract

L'invention porte sur une soufflante piézoélectrique (100), qui comporte un boîtier (17), une plaque de vibration (41) et un élément piézoélectrique (42). La plaque de vibration (41) constitue, avec le boîtier (17), une chambre de soufflante cylindrique circulaire (31). La plaque de vibration (41) et le boîtier (17) sont formés de telle sorte que la chambre de soufflante (31) a un rayon (a). L'élément piézoélectrique (42) s'incurve de façon concentrique et fait vibrer la plaque de vibration (41) à une fréquence de résonance (f). Un creux (26), qui fait partie de la chambre de soufflante (31), et qui constitue une cavité (25) communiquant avec un trou de ventilation (24), est formé sur le côté du boîtier (17) qui fait face à la plaque de vibration (41). Si la vitesse acoustique de l'air traversant la chambre de soufflante (31) est c et si une valeur satisfaisant à la relation de la fonction de Bessel du premier type, J0(k0) = 0 ou J0'(k0) = 0, est k0, alors, le rayon (a) de la chambre de soufflante (31) et la fréquence de résonance (f) de la plaque de vibration (41) satisfont à la relation 0,8 × (k0c)/(2π) ≤ af ≤ 1,2 × (k0c)/(2π).
PCT/JP2015/054534 2014-03-07 2015-02-19 Soufflante WO2015133283A1 (fr)

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JP2016506418A JP6061054B2 (ja) 2014-03-07 2015-02-19 ブロア
GB1611722.8A GB2538413B (en) 2014-03-07 2015-02-19 Blower
US15/258,306 US10221845B2 (en) 2014-03-07 2016-09-07 Blower

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JP2014-044941 2014-03-07

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WO2019111982A1 (fr) * 2017-12-08 2019-06-13 株式会社村田製作所 Pompe

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US11464140B2 (en) 2019-12-06 2022-10-04 Frore Systems Inc. Centrally anchored MEMS-based active cooling systems
US11043444B2 (en) * 2018-08-10 2021-06-22 Frore Systems Inc. Two-dimensional addessable array of piezoelectric MEMS-based active cooling devices
JP7120196B2 (ja) * 2019-09-30 2022-08-17 株式会社村田製作所 流体制御装置
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