WO2015124144A1 - Vorrichtung zur nasschemischen behandlung von objekten, insbesondere von flachen, insbesondere scheibenförmigen gegenständen wie halbleiterscheiben, substraten oder dergleichen - Google Patents
Vorrichtung zur nasschemischen behandlung von objekten, insbesondere von flachen, insbesondere scheibenförmigen gegenständen wie halbleiterscheiben, substraten oder dergleichen Download PDFInfo
- Publication number
- WO2015124144A1 WO2015124144A1 PCT/DE2015/100063 DE2015100063W WO2015124144A1 WO 2015124144 A1 WO2015124144 A1 WO 2015124144A1 DE 2015100063 W DE2015100063 W DE 2015100063W WO 2015124144 A1 WO2015124144 A1 WO 2015124144A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- drum
- objects
- drive shaft
- wet
- motor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP15715138.2A EP3111470A1 (de) | 2014-02-24 | 2015-02-16 | Vorrichtung zur nasschemischen behandlung von objekten, insbesondere von flachen, insbesondere scheibenförmigen gegenständen wie halbleiterscheiben, substraten oder dergleichen |
DE112015000944.2T DE112015000944A5 (de) | 2014-02-24 | 2015-02-16 | Vorrichtung zur nasschemischen Behandlung von Objekten, insbesondere von flachen, insbesondere scheibenförmigen Gegenständen wie Halbleiterscheiben, Substraten oder dergleichen |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE202014100814.4 | 2014-02-24 | ||
DE202014100814.4U DE202014100814U1 (de) | 2014-02-24 | 2014-02-24 | Vorrichtung zur nasschemischen Behandlung von Objekten, insbesondere von flachen, insbesondere scheibenförmigen Gegenständen wie Halbleiterscheiben, Substraten oder dergleichen |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2015124144A1 true WO2015124144A1 (de) | 2015-08-27 |
Family
ID=50556444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2015/100063 WO2015124144A1 (de) | 2014-02-24 | 2015-02-16 | Vorrichtung zur nasschemischen behandlung von objekten, insbesondere von flachen, insbesondere scheibenförmigen gegenständen wie halbleiterscheiben, substraten oder dergleichen |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP3111470A1 (de) |
DE (2) | DE202014100814U1 (de) |
WO (1) | WO2015124144A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114937632A (zh) * | 2022-07-25 | 2022-08-23 | 华海清科股份有限公司 | 一种应用于晶圆处理的双向气封结构和晶圆处理装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2709377A1 (fr) * | 1993-07-20 | 1995-03-03 | Fujitsu Ltd | Dispositif semiconducteur ayant une pellicule mince de stabilisation de l'état de surface du substrat et son procédé de fabrication. |
US20050150861A1 (en) * | 2004-01-13 | 2005-07-14 | Kwang-Myung Lee | Etching apparatus and etching method |
US20100024847A1 (en) * | 2008-08-01 | 2010-02-04 | Breese Ronald G | Semiconductor wafer cleaning with dilute acids |
-
2014
- 2014-02-24 DE DE202014100814.4U patent/DE202014100814U1/de not_active Expired - Lifetime
-
2015
- 2015-02-16 WO PCT/DE2015/100063 patent/WO2015124144A1/de active Application Filing
- 2015-02-16 EP EP15715138.2A patent/EP3111470A1/de not_active Withdrawn
- 2015-02-16 DE DE112015000944.2T patent/DE112015000944A5/de not_active Withdrawn
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2709377A1 (fr) * | 1993-07-20 | 1995-03-03 | Fujitsu Ltd | Dispositif semiconducteur ayant une pellicule mince de stabilisation de l'état de surface du substrat et son procédé de fabrication. |
US20050150861A1 (en) * | 2004-01-13 | 2005-07-14 | Kwang-Myung Lee | Etching apparatus and etching method |
US20100024847A1 (en) * | 2008-08-01 | 2010-02-04 | Breese Ronald G | Semiconductor wafer cleaning with dilute acids |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114937632A (zh) * | 2022-07-25 | 2022-08-23 | 华海清科股份有限公司 | 一种应用于晶圆处理的双向气封结构和晶圆处理装置 |
Also Published As
Publication number | Publication date |
---|---|
EP3111470A1 (de) | 2017-01-04 |
DE112015000944A5 (de) | 2016-11-17 |
DE202014100814U1 (de) | 2014-03-14 |
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