WO2015101156A1 - 磁阵列以及磁浮平面电机 - Google Patents

磁阵列以及磁浮平面电机 Download PDF

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Publication number
WO2015101156A1
WO2015101156A1 PCT/CN2014/093666 CN2014093666W WO2015101156A1 WO 2015101156 A1 WO2015101156 A1 WO 2015101156A1 CN 2014093666 W CN2014093666 W CN 2014093666W WO 2015101156 A1 WO2015101156 A1 WO 2015101156A1
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Prior art keywords
magnet
magnetic
magnetic array
array
arrays
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PCT/CN2014/093666
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English (en)
French (fr)
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张霖
池峰
陈庆生
段素丙
刘小虎
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上海微电子装备有限公司
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Priority to SG11201605301TA priority Critical patent/SG11201605301TA/en
Priority to KR1020167020803A priority patent/KR101810202B1/ko
Priority to JP2016561061A priority patent/JP6204613B2/ja
Publication of WO2015101156A1 publication Critical patent/WO2015101156A1/zh

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

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  • the present invention relates to the field of integrated circuit manufacturing, and in particular to a magnetic array and a magnetic floating planar motor.
  • the motion of the motion stage requires multi-degree-of-freedom motion device driving, and the magnetic floating plane motion device can realize decoupling motion of six degrees of freedom, and the motion device can save intermediate transmission links, and has a compact structure, which is favorable for improvement.
  • the motion efficiency of the motion stage can achieve higher positioning accuracy and motion acceleration.
  • the six-degree-of-freedom magnetic floating plane motor, the split coil type and the moving magnet type are used to drive the magnetic floating plane motion device.
  • the dynamic magnet type magnetic floating plane motor has a better application prospect in the application of the motion table of the lithography apparatus because its mover reduces the cable constraint.
  • FIG. 1 there is a moving magnet type magnetic floating plane motor using a PCB circuit board as a stator, and its structural form is as shown in FIG. 1.
  • the magnetic floating plane motor 1 includes a stator coil 11 and a magnetic array 12.
  • the stator coil 11 is divided into four regions of the first, second, third, and fourth regions 11A, 11B, 11C, and 11D; as shown in FIG. 2, the magnetic array 12 includes first, second, and third portions.
  • Fourth magnetic arrays 12A, 12B, 12C, 12D When the magnetic floating plane motor 1 is in operation, energization of the coils of the first and second regions 11A, 11B can excite the first magnetic array 12A and the second magnetic array 12B to generate Z-direction and X-direction output; and the third and fourth regions 11C, 11D The energization of the coils can excite the third magnetic array 12C and the fourth magnetic array 12D to produce a Z-direction and a Y-direction output.
  • the four magnetic arrays are also referred to as four power generating bodies, and each of them can generate vertical and horizontal thrust, so that the mover portion of the entire magnetic floating plane motor can be driven to perform six-degree-of-freedom motion.
  • the magnetization direction of each magnetic array is as shown in Fig. 3.
  • the single force body is a one-dimensional Halbach magnetic array with different polarity magnets splicing length of 4 ⁇ .
  • the magnetic floating plane motor using the one-dimensional Haierbeck magnetic array has a problem that the motor thrust is small.
  • the invention provides a magnetic array and a magnetic floating plane motor to solve the problem of small thrust of the magnetic floating plane motor in the prior art.
  • the present invention provides a magnetic array, which is substantially square, and is constructed by arranging at least one pair of one-dimensional Halbach magnetic arrays and a pair of two-dimensional Halbach magnetic arrays in an XY plane.
  • a two-dimensional Halbach magnetic array is disposed at both ends of a diagonal line of the square.
  • the two-dimensional Halbach magnetic array includes an N magnet, an S magnet surrounding the N magnet, and an H magnet, and the magnetization direction of the H magnet is directed to the S magnet.
  • the N magnet and the S magnet of the two-dimensional Halbach magnetic array are square, and the outermost periphery of the two-dimensional Halbach magnetic array is provided with a triangular N magnet or S magnet.
  • the N magnet and the S magnet are octagonal, and the outermost periphery of the two-dimensional Halbach magnetic array is provided with a 1/2 octagon or a 1/4 octagon N magnet or S magnet.
  • the N magnet and the S magnet are closely arranged, and the H magnet of the two-dimensional Halbach magnetic array is located in a space formed by arranging the N magnet and the S magnet.
  • the H magnet is disposed between the N magnet and the S magnet while being filled in a space formed by arranging the N magnet and the S magnet.
  • the magnetization direction of the H magnet located in the gap formed after the arrangement of the N magnet and the S magnet is directed to the S magnet and is at an angle of 45 degrees with respect to both the X direction and the Y direction.
  • said at least one pair of one-dimensional Halbach magnetic arrays comprise a pair of first magnetic arrays and a pair of second magnetic arrays, wherein the magnets in the second magnetic array are longer than the length of the magnets in the first magnetic array.
  • the magnets located at the center of the two-dimensional Halbach magnetic array and the magnets located at the centers of the first and second magnetic arrays are magnets of the same polarity.
  • the first magnetic array and the second magnetic array are each composed of a rectangular N magnet, an S magnet, and an H magnet disposed between the N magnet and the S magnet.
  • the number of said one-dimensional Halbach magnetic arrays is the same as the number of said two-dimensional Halbach magnetic arrays, said one-dimensional Halbach magnetic array and two-dimensional Halbach magnetic arrays spliced to form a square.
  • the present invention also provides a magnetically floating planar motor comprising a magnetic array as described above, and an array of coils located below the magnetic array.
  • the magnetic floating plane motor shown further includes a back iron disposed on the magnetic array.
  • the coil array includes a first coil for X-direction output and a second coil for Y-direction output, the first and second coil wiring directions crossing each other and being stacked.
  • said coil array is a PCB coil array.
  • an insulator is disposed between the first and second coils.
  • the magnetic array acts as a mover
  • the coil array is a stator
  • the stator adopts a wiring mode with a span of 4 ⁇ /3, wherein the N magnet and the adjacent S in the one-dimensional Halbach magnetic array in the magnetic array
  • the polar moment between the magnets is equal to the polar moment between the N magnet and the adjacent S magnet in the two-dimensional Halbach magnetic array, and is represented by ⁇ .
  • the present invention has the following advantages: the magnetic array of the present invention adopts a two-dimensional Halbach magnetic array combined with a one-dimensional Halbach magnetic array, compared with a pure one-dimensional magnetic array of the same size. Increased motor thrust constant.
  • FIG. 1 is a top plan view of a prior art magnetic floating plane motor
  • FIG. 2 is a schematic view showing a layout of a magnetic array in a prior art magnetic floating plane motor
  • FIG. 3 is a schematic diagram of magnetization of a magnetic array in the prior art
  • Figure 4 is a side view of a maglev plane motor in Embodiment 1 of the present invention.
  • FIG. 5 is a schematic view showing a layout of a magnetic floating array in a magnetic floating plane motor according to Embodiment 1 of the present invention.
  • FIGS. 6 to 8 are schematic diagrams showing the layout of a two-dimensional Halbach magnetic array in a magnetic array according to Embodiment 1 of the present invention (the first magnetic array is square);
  • FIG. 9 is a schematic layout view (first magnetic array) of a one-dimensional Halbach magnetic array in a magnetic array according to Embodiment 1 of the present invention.
  • FIG. 10 is a schematic layout view of a one-dimensional Halbach magnetic array in a magnetic array according to Embodiment 1 of the present invention (second magnetic array);
  • FIG. 11 is a schematic view showing a wiring manner of a magnetic floating plane motor coil according to Embodiment 1 of the present invention.
  • FIG. 12 is a schematic view showing the working mechanism of a maglev plane motor in Embodiment 1 of the present invention.
  • FIG. 13 is a schematic diagram of a Y-direction magnetic array splicing manner according to Embodiment 1 of the present invention.
  • FIG. 14 is a schematic diagram of a splicing manner of an X-direction magnetic array in Embodiment 1 of the present invention.
  • FIG. 15 is a schematic diagram showing the layout of a two-dimensional Halbach magnetic array in a magnetic array according to Embodiment 1 of the present invention (the first magnetic array is rectangular);
  • FIG. 16 is a schematic diagram showing the layout of a magnetic array in Embodiment 2 of the present invention.
  • Figure 17 is a schematic view showing the operation of a maglev plane motor in Embodiment 2 of the present invention.
  • FIG. 18 is a schematic exploded view of a magnetic array according to Embodiment 2 of the present invention.
  • FIG. 19 is a schematic diagram showing the layout of a magnetic array in Embodiment 3 of the present invention.
  • FIG. 20 is a schematic diagram showing the layout of a one-dimensional Halbach magnetic array in a magnetic array according to Embodiment 3 of the present invention.
  • Figure 21 is a schematic view showing the wiring mode of the magnetic floating plane motor coil in the third embodiment of the present invention.
  • 1 to 3 1-magnet plane motor, 11-motor stator, 11A-first region, 11B-second region, 11C-third region, 11D-four region, 12-magnetic array, 12A-first Magnetic array, 12B - second magnetic array, 12C - third magnetic array, 12D - fourth magnetic array.
  • Figures 16-18 100'-magnetic array, 110'-two-dimensional Halbach magnetic array, 110A-first two-dimensional Halbach magnetic array, 110B-second two-dimensional Halbach magnetic array, 120'-one-dimensional Haier Baker magnetic array, 120A-first one-dimensional Haierbeck magnetic array, 120B-second one-dimensional Haierbeck magnetic array;
  • the magnetic floating plane motor includes: a motor mover and a motor stator 200.
  • the motor mover includes: a magnetic array 100 and a back iron 300 disposed on the magnetic array 100; the motor stator 200
  • the first coil 210 for generating an X-direction output and the second coil 220 for generating a Y-direction output are formed by using a PCB printed circuit board, and the first coil 210 and the second coil 220 are orthogonal to each other and stacked.
  • An insulator 230 is disposed between the coils.
  • the magnetic array 100 is composed of a one-dimensional Halbach magnetic array and a two-dimensional Halbach magnetic array 110.
  • the two-dimensional Halbach magnetic array 110 has two groups; the one-dimensional Halbach magnetic array includes: a first magnetic array 120 and a second magnetic array 130, wherein the second magnetic array 130 and the first magnetic Compared to the array 120, only the length of the magnet of the same polarity is extended.
  • the two-dimensional Halbach magnetic array 110 is formed by splicing magnets of three magnetization directions.
  • the three kinds of magnets are: an N magnet 111 that is perpendicularly magnetized to face the vertical paper, an S magnet 112 that is magnetized in the vertical paper surface, and a horizontally magnetized H magnet 113 whose magnetization direction always points to the S magnet 112.
  • the two-dimensional Halbach magnetic array 110 has a N-S pole pitch in the X and Y directions of ⁇ , and is a square array having a side length of 4 ⁇ .
  • the magnets of the three magnetization directions in the two-dimensional Halbach magnetic array 110 have multiple splicing methods:
  • the N magnet 111 and the S magnet 112 are square, located at the outermost periphery of the two-dimensional Halbach magnetic array 110, (or S magnet) is triangular, N magnets 111 and S. Between the magnets 112 is an H magnet 113.
  • the outermost periphery of the two-dimensional Halbach magnetic array may not be provided with a triangular magnet, and the square N magnet 111 and the S magnet 112 are formed in a row by the H magnet 113 in two directions.
  • the N magnet 111 and the S magnet 112 are octagonal, and the N magnet (also referred to as the S magnet) located at the outermost position of the two-dimensional Halbach magnetic array 110 is 1/2 eight.
  • An edge located at the edge of the two-dimensional Halbach magnetic array 110
  • a 1/4 octagon located at the top corner of the two-dimensional Halbach magnetic array 110
  • the H magnet 113 is located in a space formed by arranging the N magnet 111 and the S magnet 112, and its magnetization direction is directed to the S magnet 112 at an angle of 45 degrees with respect to the horizontal direction.
  • the outermost periphery of the two-dimensional Halbach magnetic array may not be provided with a 1/2 octagon or a 1/4 octagon magnet, both of which are octagonal N magnets 111 and S.
  • the magnet 112 is formed by arranging the H magnets 113 in two directions.
  • the N magnet 111 and the S magnet 112 are also octagonal, and the H magnet 113 is disposed between the N magnet 111 and the S magnet 112 while being filled with the N magnet 111 and the S magnet. 112 is formed in the gap formed after the arrangement.
  • the magnetization direction of the H magnet 113 located in the gap is directed to the S magnet 112 at an angle of 45 degrees with respect to the horizontal direction, and the direction of the H magnet 113 at other positions is directed to the S magnet 112.
  • the first and second magnetic arrays 120 and 130 are N magnets whose magnetization direction is outward from the paper, and the magnetization direction is from the paper surface.
  • the S magnet and the H magnet that is magnetized in the direction of the S magnet are spliced, and the sides of the first and second magnetic arrays 120 and 130 that are spliced to the two-dimensional Halbach magnetic array 110 have a side length of 4 ⁇ .
  • the pole distance between the N magnet 111 and the S magnet 112 in the magnetic array 100 is set to ⁇ , and the two-dimensional Haierbeek magnetic array 110 is spaced apart from each other in the X and Y directions.
  • the first magnetic array 120 In the X direction, the two second magnetic arrays 130 are spaced apart from each other by Df in the Y direction.
  • the coil wiring mode of the motor mover 200 is as shown in FIG. 11, which adopts a wiring method in which the inter-span span is 4 ⁇ /3.
  • the working relationship between the working mode of the magnetic floating plane motor and the coil is as follows:
  • the two-dimensional Halbach magnetic array 110 and the first magnetic array 120 are excited to generate X-direction and Z-direction output;
  • the two-dimensional Halbach magnetic array 110 and the second magnetic array 130 are excited to generate Y- and Z-direction outputs. Therefore, since the first coil 210 and the second coil 220 have two groups, respectively, the energization of each coil is controlled, and the six-degree-of-freedom movement of the motor mover can be realized.
  • the two-dimensional Halbach magnetic array 110 and the first magnetic array 120 satisfy the magnet and the first magnetic body of the two-dimensional Halbach magnetic array 110 at the geometric center of the XY plane.
  • the magnets of the array 120 at the geometric center of the XY plane are magnets of the same polarity, that is, the magnetization directions are the same, and the geometric centers of the XY planes of the two are on the same YZ plane. Since the NS pole pitch of the two-dimensional Halbach magnetic array 110 and the first magnetic array 120 are both ⁇ and the splicing edge length is 4 ⁇ , the first coil 210 in FIG. 12 can be energized, and the two-dimensional Halbach magnetic array 110 and The first magnetic array 120 produces an X-direction and/or a Z-direction output in the same direction.
  • the two-dimensional Halbach magnetic array 110 and the second magnetic array 130 are arranged in a spliced layout: the magnet of the two-dimensional Halbach magnetic array 110 at the geometric center of the XY plane and the second magnetic array 130
  • the magnets in the geometric center of the XY plane are magnets of the same polarity, and the geometric centers of the XY planes of the two are in the same XZ plane.
  • the NS pole distances of the two-dimensional Halbach magnetic array 110 and the second magnetic array 130 are both ⁇ and splicing. The sides are all 4 ⁇ , so that it can be satisfied in FIG. 12 that when the second coil 220 is energized, the two-dimensional Halbach magnetic array 110 and the second magnetic array 130 generate Y-direction and/or Z-direction output in the same direction.
  • first magnetic array 120 may be a square as shown in FIG. 5 or a rectangle as shown in FIG. 15.
  • the length of the first magnetic array 120 and the second magnetic array 130 in this embodiment is long.
  • the width is not limited.
  • Embodiment 1 The difference between this embodiment and Embodiment 1 is that the layout of the magnetic array is different.
  • the magnetic array 100' is formed by splicing two two-dimensional Halbach magnetic arrays 110' and two one-dimensional Halbach magnetic arrays 120'.
  • the two-dimensional Halbach magnetic array 110' includes first and second two-dimensional Halbach magnetic arrays 110A and 110B.
  • the one-dimensional Halbach magnetic array 120' includes first and second one-dimensional Halbach magnetic arrays 120A and 120B.
  • the first coil 210'B is energized to excite the first two-dimensional Halbach magnetic array 110A and the first one-dimensional Halbach magnetic array 120A to generate X- and Z-direction outputs, and the second coil 220'B to energize, thereby energizing the second two The Weierbeck magnetic array 110B produces Y- and Z-direction forces to maintain the Z, Rx, Ry, and Rz directions of the motor movers.
  • the second coil 220'A is energized to excite the first two-dimensional Halbach magnetic array 110A and the second one-dimensional Halbach magnetic array 120B to generate Y-direction and Z-direction output; the first coil 210'A is energized, thereby exciting the second two The Weierbeck magnetic array 110B generates an X-direction output and a Z-direction output to maintain the Z, Rx, Ry, and Rz directions of the motor.
  • the magnetic array 100' of this embodiment adopts a compact layout form, so that the entire motor mover has a magnet cover, which improves space utilization. Further, the magnetic array 100' can be conveniently spliced and expanded as a module to form a larger-sized magnetic array 100' as shown in FIG.
  • the magnetic array 100" is composed of four one-dimensional Halbach magnetic arrays 110".
  • a single magnetic array 110" is formed by splicing N magnets, S magnets, and H magnets as shown in FIG.
  • the N-S pole pitch is ⁇
  • the total length of magnets of different polarities is 5 ⁇ .
  • the wiring of the coil of the motor stator is as shown in FIG. 21, and the wiring mode with the span between the phases is 5 ⁇ /3, which improves the space utilization.

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Abstract

提供了一种磁阵列（100）和磁浮平面电机。该磁阵列包括：一维海尔贝克磁阵列（120、130）和二维海尔贝克磁阵列（110），一维海尔贝克磁阵列和二维海尔贝克磁阵列共同构成方形的磁阵列，二维海尔贝克磁阵列分设于该方形磁阵列一条对角线的两端位置处。该磁阵列采用了二维海尔贝克磁阵列与一维海尔贝克磁阵列相结合的方式，与同样尺寸的纯一维磁阵列相比，增大了磁浮平面电机的推力常数。

Description

磁阵列以及磁浮平面电机 技术领域
本发明涉及集成电路制造领域，特别涉及一种磁阵列以及磁浮平面电机。
背景技术
在光刻装置领域，运动台的运动需要多自由度运动装置驱动，磁浮平面运动装置可以实现六个自由度的解耦运动，且这种运动装置可以节省中间传动环节，结构紧凑，有利于提高运动台的运动效率，可以实现更高的定位精度与运动加速度。
驱动磁浮平面运动装置动作的是六自由度磁浮平面电机，分动线圈式和动磁铁式。其中，动磁铁式磁浮平面电机因其动子减少了线缆约束，因此在光刻装置运动台的应用上有着更好的应用前景。目前存在一种以PCB电路板作为定子的动磁铁式磁浮平面电机，其结构形式如图1所示，磁浮平面电机1包括定子线圈11和磁阵列12。其中，定子线圈11分为第一、第二、第三、第四区域11A、11B、11C、11D四个区域；如图2所示，所述磁阵列12包括第一、第二、第三、第四磁阵列12A、12B、12C、12D。磁浮平面电机1工作时，第一、第二区域11A、11B的线圈通电可以激励第一磁阵列12A和第二磁阵列12B产生Z向和X向出力；第三、第四区域11C、11D的线圈通电可以激励第三磁阵列12C和第四磁阵列12D产生Z向和Y向出力。所述四个磁阵列也称为四个发力体，因其各自可以产生垂向和水平向的推力，因此可以驱动整个磁浮平面电机的动子部分做六自由度运动。各磁阵列的充磁方向如图3所示，单个发力体是不同极性磁铁拼接长度为4τ的一维海尔贝克(Halbach)磁阵列。
采用一维海尔贝克磁阵列的磁浮平面电机存在电机推力较小的问题。
发明内容
本发明提供一种磁阵列以及磁浮平面电机，以解决现有技术中磁浮平面电机推力较小的问题。
为解决上述技术问题，本发明提供一种磁阵列，大致为正方形，由至少一对一维海尔贝克(Halbach)磁阵列和一对二维海尔贝克磁阵列排列在XY平面内而构成，所述二维海尔贝克磁阵列分设于所述正方形的一条对角线的两端位置处。
作为优选，所述二维海尔贝克磁阵列包括：N磁铁、围设在N磁铁周围的S磁铁以及H磁铁，所述H磁铁的充磁方向指向S磁铁。
作为优选，所述二维海尔贝克磁阵列的N磁铁和S磁铁为正方形，二维海尔贝克磁阵列的最外围设置有三角形的N磁铁或S磁铁。
作为优选，所述N磁铁和S磁铁为八边形，二维海尔贝克磁阵列的最外围设置有1/2八边形或1/4八边形的N磁铁或S磁铁。
作为优选，所述N磁铁和S磁铁紧密排列，所述二维海尔贝克磁阵列的H磁铁位于N磁铁和S磁铁排列后形成的空隙中。
作为优选，所述H磁铁设置于所述N磁铁和S磁铁之间，同时填充在N磁铁和S磁铁排列后形成的空隙中。
作为优选，位于N磁铁和S磁铁排列后形成的空隙中的H磁铁的充磁方向指向S磁铁，并与X方向和Y方向均呈45度角。
作为优选，所述至少一对一维海尔贝克磁阵列包括一对第一磁阵列和一对第二磁阵列，其中，第二磁阵列中的磁铁长于所述第一磁阵列中磁铁的长度。
作为优选，在XY平面上，位于所述二维海尔贝克磁阵列中心的磁铁与位于所述第一、第二磁阵列中心的磁铁为同极性磁铁。
作为优选，所述第一磁阵列和第二磁阵列均由平行设置的长方形的N磁铁、S磁铁以及设置于N磁铁和S磁铁之间的H磁铁组成。
作为优选，所述一维海尔贝克磁阵列的数目与所述二维海尔贝克磁阵列的数目相同，所述一维海尔贝克磁阵列和二维海尔贝克磁阵列拼接形成正方形。
本发明还提供了一种磁浮平面电机，包括如上所述的磁阵列，以及位于所述磁阵列下方的一线圈阵列。
作为优选，所示磁浮平面电机还包括设置在所述磁阵列上的背铁。
作为优选，所述线圈阵列包括用于X向出力的第一线圈、用于Y向出力的第二线圈，所述第一、第二线圈布线方向相互交叉并层叠布置。
作为优选，所述线圈阵列为PCB线圈阵列。
作为优选，所述第一、第二线圈之间设置有绝缘体。
作为优选，所述磁阵列作为动子，线圈阵列为定子，所述定子采用相间跨距为4τ/3的接线方式，其中，磁阵列中一维海尔贝克磁阵列中的N磁铁与临近的S磁铁之间的极矩与所述二维海尔贝克磁阵列中的N磁铁与临近的S磁铁间的极矩相等，用τ表示。
与现有技术相比，本发明具有以下优点：本发明的磁阵列采用了二维海尔贝克磁阵列与一维海尔贝克磁阵列相结合的方式，与同样尺寸的纯一维磁阵列相比，增大了电机推力常数。
附图说明
图1为现有技术磁浮平面电机俯视图；
图2为现有技术磁浮平面电机中磁阵列布局示意图；
图3为现有技术中磁阵列充磁示意图；
图4为本发明实施例1中磁浮平面电机侧视图；
图5为本发明实施例1中磁浮平面电机中磁浮阵列布局示意图；
图6～8分别为本发明实施例1中磁阵列中的二维海尔贝克磁阵列的布局示意图(第一磁阵列为方形)；
图9为本发明实施例1中磁阵列中的一维海尔贝克磁阵列的布局示意图(第一磁阵列)；
图10为本发明实施例1中磁阵列中的一维海尔贝克磁阵列的布局示意图(第二磁阵列)；
图11为本发明实施例1中磁浮平面电机线圈接线方式示意图；
图12为本发明实施例1中磁浮平面电机工作机理示意图；
图13为本发明实施例1中Y向磁阵列拼接方式示意图；
图14为本发明实施例1中X向磁阵列拼接方式示意图；
图15为本发明实施例1中磁阵列中的二维海尔贝克磁阵列的布局示意图(第一磁阵列为长方形)；
图16为本发明实施例2中磁阵列布局示意图；
图17为本发明实施例2中磁浮平面电机工作原理图；
图18为本发明实施例2中磁阵列的拓展示意图；
图19为本发明实施例3中磁阵列的布局示意图；
图20为本发明实施例3中磁阵列中一维海尔贝克磁阵列布局示意图；
图21为本发明实施例3中磁浮平面电机线圈接线方式示意图。
图1～3中：1-磁浮平面电机、11-电机定子、11A-第一区域、11B-第二区域、11C-第三区域、11D-第四区域，12-磁阵列、12A-第一磁阵列、12B-第二磁阵列、12C-第三磁阵列、12D-第四磁阵列。
图4～15中：100-磁阵列、110-二维海尔贝克磁阵列、111-N磁铁、112-S磁铁、113-H磁铁、120-第一磁阵列、130-第二磁阵列；200-电机定子、210-第一线圈、220-第二线圈、230-绝缘体；300-背铁。
图16～18中：100’-磁阵列、110’-二维海尔贝克磁阵列、110A-第一二维海尔贝克磁阵列、110B-第二二维海尔贝克磁阵列、120’-一维海尔贝克磁阵列、120A-第一一维海尔贝克磁阵列、120B-第二一维海尔贝克磁阵列；
210’A、210’B-第一线圈，220’A、220’B-第二线圈。
图19～图21中：100”-磁阵列、110”-一维海尔贝克磁阵列。
具体实施方式
为使本发明的上述目的、特征和优点能够更加明显易懂，下面结合附图对本发明的具体实施方式做详细的说明。需说明的是，本发明附图均采用简化的形式且均使用非精准的比例，仅用以方便、明晰地辅助说明本发明实施例的目的。
实施例1
请参照图4，本实施例中，磁浮平面电机包括：电机动子和电机定子200，所述电机动子包括：磁阵列100和设置在磁阵列100上的背铁300；所述电机定子200采用PCB印刷电路板制成，包括：用于产生X向出力的第一线圈210和用于产生Y向出力的第二线圈220，第一线圈210和第二线圈220互相正交并层叠布置，且线圈之间设置有绝缘体230。
请重点参照图5，所述磁阵列100由一维海尔贝克磁阵列与二维海尔贝克磁阵列110共同组成。其中，所述二维海尔贝克磁阵列110有两组；所述一维海尔贝克磁阵列包括：第一磁阵列120和第二磁阵列130，其中，第二磁阵列130与所述第一磁阵列120相比，只是延伸了同极性磁铁的长度。
请重点参照图6～8，本实施例中，所述二维海尔贝克磁阵列110，由三种充磁方向的磁铁拼接而成。所述三种磁铁分别为：垂直纸面向外充磁的N磁铁111，垂直纸面向里充磁的S磁铁112以及水平向充磁的H磁铁113，其充磁方向始终指向S磁铁112。所述二维海尔贝克磁阵列110在X和Y方向的N-S极距都为τ，是一个边长为4τ的正方形阵列。
具体地，所述二维海尔贝克磁阵列110中三种充磁方向的磁铁有多种拼接方式：
第一种如图6所示，所述N磁铁111和S磁铁112为正方形，位于二维海尔贝克磁阵列110最外围，(亦可为S磁铁)为三角形，N磁铁111和S 磁铁112之间为H磁铁113。在本发明的其他实施方式中，所述二维海尔贝克磁阵列的最外围亦可不设置三角形磁铁，均由正方形的N磁铁111和S磁铁112在两个方向间隔H磁铁113进行排部形成。
第二种如图7所示，所述N磁铁111和S磁铁112为八边形，位于二维海尔贝克磁阵列110最外围位置处的N磁铁(亦可为S磁铁)为1/2八边形(位于二维海尔贝克磁阵列110边缘位置)或者1/4八边形(位于二维海尔贝克磁阵列110的顶角位置处)；且N磁铁111和S磁铁112紧密排列，所述H磁铁113位于N磁铁111和S磁铁112排列后形成的空隙中，其充磁方向指向S磁铁112，并与水平方向呈45度角。在本发明的其他实施方式中，所述二维海尔贝克磁阵列的最外围亦可不设置1/2八边形或1/4八边形的磁铁，均由八边形的N磁铁111和S磁铁112在两个方向间隔H磁铁113进行排部形成。
第三种如图8所示，所述N磁铁111和S磁铁112同样为八边形，H磁铁113设置于所述N磁铁111和S磁铁112之间，同时填充在N磁铁111和S磁铁112排列后形成的空隙中。位于空隙中的H磁铁113的充磁方向指向S磁铁112且与水平方向呈45度角，而其他位置处的H磁铁113的方向指向S磁铁112。
请重点参照图9～10，所述一维海尔贝克磁阵列中，第一、第二磁阵列120、130均是由充磁方向由纸面向外的N磁铁、充磁方向由纸面向里的S磁铁和充磁方向指向S磁铁的H磁铁拼接而成，第一、第二磁阵列120、130与二维海尔贝克磁阵列110相拼接的一边的边长为4τ。
请重点参照图5，设定磁阵列100中N磁铁111和S磁铁112间极距为τ，两二维海尔贝克磁阵列110在X和Y方向上都相距Df，所述第一磁阵列120在X向相距Df，所述两第二磁阵列130在Y向相距Df，在本实施例中，相距指的是两磁阵列中心线之间的垂直距离，其中，Df满足关系式 Df＝(N+0.5)τ，其中N为大于等于4的整数。
所述磁浮平面电机中，电机动子200的线圈接线方式如图11所示，其采用相间跨距为4τ/3的接线方式。
请重点参照图12，所述磁浮平面电机工作方式与线圈通电关系如下：
第一线圈210通电时，激励二维海尔贝克磁阵列110和第一磁阵列120产生X向和Z向出力；
第二线圈220通电时，从而激励二维海尔贝克磁阵列110和第二磁阵列130产生Y向和Z向出力。因此，由于第一线圈210和第二线圈220分别有两组，因此分别控制各线圈的通电，可以实现电机动子的六自由度运动。
进一步的，如图13所示，在Y方向，所述二维海尔贝克磁阵列110与第一磁阵列120之间满足：二维海尔贝克磁阵列110在XY平面几何中心所在磁铁及第一磁阵列120在XY平面几何中心所在磁铁为同极性磁铁，即充磁方向相同，且两者XY平面的几何中心在同一YZ平面上。由于二维海尔贝克磁阵列110与第一磁阵列120的N-S极距都是τ、拼接边边长都是4τ，因此可以满足图12中第一线圈210通电，二维海尔贝克磁阵列110与第一磁阵列120产生相同方向的X向及/或Z向出力。
相应的，如图14所示，在X方向，二维海尔贝克磁阵列110与第二磁阵列130拼接布局满足：二维海尔贝克磁阵列110在XY平面几何中心所在磁铁及第二磁阵列130在XY平面几何中心所在磁铁为同极性磁铁，且两者XY平面的几何中心在同一XZ平面上，由于二维海尔贝克磁阵列110与第二磁阵列130的N-S极距都是τ、拼接边边长都是4τ，因此可以满足图12中，第二线圈220通电时，二维海尔贝克磁阵列110与第二磁阵列130产生相同方向的Y向和/或Z向出力。
需要说明的是，所述第一磁阵列120可以为图5所示的方形，也可以为图15所示的长方形，本实施例对所述第一磁阵列120和第二磁阵列130的长、 宽不予限定。
实施例2
本实施例与实施例1的区别点在于磁阵列的布局不同。
具体如图16所示，磁阵列100’由两块二维海尔贝克磁阵列110’以及两块一维海尔贝克磁阵列120’拼接而成。二维海尔贝克磁阵列110’包括第一、第二二维海尔贝克磁阵列110A和110B。一维海尔贝克磁阵列120’包括第一、第二一维海尔贝克磁阵列120A和120B。
磁阵列100’工作方式与线圈通电关系如图17所示。
第一线圈210’B通电，从而激励第一二维海尔贝克磁阵列110A和第一一维海尔贝克磁阵列120A产生X向和Z向出力，第二线圈220’B通电，从而激励第二二维海尔贝克磁阵列110B产生Y向和Z向出力，以保持电机动子的Z、Rx、Ry和Rz向运动。
第二线圈220’A通电，从而激励第一二维海尔贝克磁阵列110A和第二一维海尔贝克磁阵列120B产生Y向和Z向出力；第一线圈210’A通电，从而激励第二二维海尔贝克磁阵列110B产生X向出力和Z向出力，以保持电机的Z、Rx、Ry、Rz向运动。
本实施例的磁阵列100’采用了紧凑布局形式，使得整个电机动子均有磁铁覆盖，提高了空间利用率。进一步地，磁阵列100’可以作为模块方便地进行拼接扩展，从而形成如图18所示的尺寸更大的磁阵列100’。
实施例3
本实施例与实施例1和实施例2的区别点在于，电机定子中，线圈的接线方式不同。
如图19所示，本实施例中，磁阵列100”由四个一维海尔贝克磁阵列110”组成。单个磁阵列110”如图20所示，由N磁铁、S磁铁和H磁铁拼接而成， 磁钢中N-S极距为τ，不同极性磁铁拼接总长为5τ。所述平行设置的两一维海尔贝克磁阵列110”在X向/Y向相距Df，Df满足关系式Df＝(N+0.5)τ，其中N为大于等于5的整数。
相应的，与所述磁阵列100”对应，电机定子的线圈的接线方式如图21所示，其采用相间跨距为5τ/3的接线方式，提高了空间利用率。
显然，本领域的技术人员可以对发明进行各种改动和变型而不脱离本发明的精神和范围。这样，倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内，则本发明也意图包括这些改动和变型在内。

Claims (20)

  1. 一种磁阵列，大致为正方形，由至少一对一维海尔贝克(Halbach)磁阵列和一对二维海尔贝克磁阵列排列在XY平面内而构成，所述二维海尔贝克磁阵列分设于所述正方形的一条对角线的两端位置处。
  2. 如权利要求1所述的磁阵列，其特征在于，所述二维海尔贝克磁阵列包括：N磁铁、围设在N磁铁周围的S磁铁以及H磁铁。
  3. 如权利要求2所述的磁阵列，其特征在于，所述二维海尔贝克磁阵列的N磁铁和S磁铁为正方形，所述H磁铁的充磁方向指向S磁铁。
  4. 如权利要求3所述的磁阵列，其特征在于，所述二维海尔贝克磁阵列的最外围还设置有三角形的N磁铁或S磁铁。
  5. 如权利要求2所述的磁阵列，其特征在于，所述二维海尔贝克磁阵列的N磁铁和S磁铁为八边形。
  6. 如权利要求5所述的磁阵列，其特征在于，所述二维海尔贝克磁阵列的最外围还设置有1/2八边形或1/4八边形的N磁铁或S磁铁。
  7. 如权利要求5所述的磁阵列，其特征在于，所述N磁铁和S磁铁紧密排列，所述H磁铁位于N磁铁和S磁铁排列后形成的空隙中。
  8. 如权利要求5所述的磁阵列，其特征在于，所述H磁铁设置于所述N磁铁和S磁铁之间，同时填充在N磁铁和S磁铁排列后形成的空隙中。
  9. 如权利要求7或8所述的磁阵列，其特征在于，位于N磁铁和S磁铁之间的H磁铁的充磁方向指向S磁铁，位于N磁铁和S磁铁排列后形成的空隙中的H磁铁的充磁方向指向S磁铁，并与X方向和Y方向均呈45度角。
  10. 如权利要求1所述的磁阵列，其特征在于，所述至少一对一维海尔贝克磁阵列包括一对第一磁阵列和一对第二磁阵列，其中，第二磁阵列中的磁铁长于所述第一磁阵列中磁铁的长度。
  11. 如权利要求10所述的磁阵列，其特征在于，在XY平面上，位于所述二 维海尔贝克磁阵列中心的磁铁与位于所述第一、第二磁阵列中心的磁铁为同极性磁铁。
  12. 如权利要求10所述的磁阵列，其特征在于，所述第一磁阵列和第二磁阵列均由平行设置的长方形的N磁铁、S磁铁以及设置于N磁铁和S磁铁之间的H磁铁组成。
  13. 如权利要求1所述的磁阵列，其特征在于，所述一维海尔贝克磁阵列的数目与所述二维海尔贝克磁阵列的数目相同，所述一维海尔贝克磁阵列和二维海尔贝克磁阵列拼接形成正方形。
  14. 一种磁阵列，是采用多个权利要求1所述的磁阵列沿X方向及Y方向布局形成的正方形磁阵列。
  15. 一种磁浮平面电机，包括如权利要求1或14所述的磁阵列，以及位于所述磁阵列下方的一线圈阵列。
  16. 如权利要求15所述的磁浮平面电机，其特征在于，还包括设置在所述磁阵列上的背铁。
  17. 如权利要求15所述的磁浮平面电机，其特征在于，所述线圈阵列包括用于X向出力的第一线圈、用于Y向出力的第二线圈，所述第一、第二线圈布线方向相互交叉并层叠布置。
  18. 如权利要求15所述的磁浮平面电机，其特征在于，所述线圈阵列为PCB线圈阵列。
  19. 如权利要求17所述的磁浮平面电机，其特征在于，所述第一、第二线圈之间设置有绝缘体。
  20. 如权利要求15所述的磁浮平面电机，其特征在于，所述磁阵列作为动子，线圈阵列为定子，所述定子采用相间跨距为4τ/3的接线方式，其中，磁阵列中一维海尔贝克磁阵列中的N磁铁与临近的S磁铁之间的极矩与所述二维海尔贝克磁阵列中的N磁铁与临近的S磁铁间的极矩相等，用τ表示。
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CN107819391B (zh) * 2017-10-30 2023-07-07 中国石油大学(华东) 一种永磁阵列及平面电机
CN111490662B (zh) * 2019-01-29 2022-04-26 苏州隐冠半导体技术有限公司 一种平面电机位移装置
CN111835177A (zh) * 2019-04-17 2020-10-27 上海微电子装备（集团）股份有限公司 磁浮电机及其控制方法
KR20230095426A (ko) 2021-12-22 2023-06-29 한국철도기술연구원 3d 입체 형상으로 구현된 자기부상 로봇 기반 물류 이송 시스템
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