WO2015097728A1 - Coil part - Google Patents

Coil part Download PDF

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Publication number
WO2015097728A1
WO2015097728A1 PCT/JP2013/007676 JP2013007676W WO2015097728A1 WO 2015097728 A1 WO2015097728 A1 WO 2015097728A1 JP 2013007676 W JP2013007676 W JP 2013007676W WO 2015097728 A1 WO2015097728 A1 WO 2015097728A1
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coil element
resin substrate
coil
layer
electrode
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PCT/JP2013/007676
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French (fr)
Japanese (ja)
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佐野 孝史
常徳 寺田
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株式会社Leap
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Priority to PCT/JP2013/007676 priority Critical patent/WO2015097728A1/en
Priority to JP2014512967A priority patent/JP5584844B1/en
Priority to TW103144251A priority patent/TW201546842A/en
Publication of WO2015097728A1 publication Critical patent/WO2015097728A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/29Terminals; Tapping arrangements for signal inductances
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/0006Printed inductances
    • H01F17/0013Printed inductances with stacked layers

Abstract

First resin substrates and second resin substrates are adhered while being layered alternating in such a way that a front surface and a back surface are facing each other to form a layered form in which a first coil element and a second coil element are overlapped while alternating. A second end of a first coil element present in a lower layer and a first end of a second coil element present in an upper layer are electrically connected via a through-hole provided at a first end of the second resin substrate present in the upper layer. The first end of a first coil element present in an upper layer and the second end of a second coil element present in a lower layer are electrically connected via a through-hole provided at a first end of the first resin substrate present in the upper layer. In this way, a power inductor is constituted, wherein alternating first coil elements and second coil elements are connected in series within the layered form. From the first end of the first coil element formed in the first resin substrate present in the lowest layer, and from the second end of the second coil element formed in the second resin substrate present in the topmost layer, electrodes are drawn outside of the layered form to serve as electrodes for the power inductor.

Description

コイル部品Coil parts
 本発明は、樹脂基板内に作製されたコイル部品に係り、特に、複数の樹脂基板を積層して構成されたコイル部品に関する。 The present invention relates to a coil component produced in a resin substrate, and more particularly to a coil component configured by laminating a plurality of resin substrates.
 近年のスマートフォンやタブレット端末などのモバイル機器の多機能化に伴い、小型でインダクタンスが高く、かつ定格電流の大きなコイル部品(パワーインダクタ)の必要性が高まっている。 With the recent increase in functionality of mobile devices such as smartphones and tablet terminals, the need for small, high-inductance, high-current coil components (power inductors) is increasing.
 パワーインダクタの作製方法としては、それぞれにパターン化されたコイル素子が形成された樹脂基板を複数枚用意し、これらを積層してそれぞれの樹脂基板に形成された、各コイル素子同士を直列接続して作製するのが一般的である。 As a method for producing a power inductor, a plurality of resin substrates each having a patterned coil element are prepared, and these coil elements formed on each resin substrate are stacked and connected in series. It is common to make them.
 特許文献1には、コイル素子の導体パターンに対応した凹凸を有する樹脂凹版に導電性ペーストを充填し、充填された導電ペーストのパターンをセラミック基板に転写し、絶縁層を介してN(Nは2の倍数)層積層してコイル部品を作製することが記載されている。
 また、特許文献2には、両面にコイル導電体が形成されたシート状の積層体を複数枚積層して積層されたチップコイルを作製することが記載されている。
In Patent Document 1, a resin intaglio having irregularities corresponding to a conductor pattern of a coil element is filled with a conductive paste, the pattern of the filled conductive paste is transferred to a ceramic substrate, and N (N is It is described that a coil component is produced by laminating two layers.
Further, Patent Document 2 describes that a chip coil is manufactured by laminating a plurality of sheet-like laminates having coil conductors formed on both surfaces.
特開2003-68555号公報JP 2003-68555 A 特開2006-332147号公報JP 2006-332147 A
 上述した特許文献1,2に記載されたコイル部品は、積層に際して、各層に形成されているコイル素子同士のビア接続構造が複雑で、かつ、各層のコイル素子同士の接合面積が大きいためコイル部品の占有面積が大きくなってしまうという課題を有している。
 また、一層当りの厚さが厚いため、積層されたコイル部品を作製した場合、全体の厚さが一層厚くなるという課題も有している。
The coil parts described in Patent Documents 1 and 2 described above have a complicated via connection structure between the coil elements formed in each layer and have a large bonding area between the coil elements in each layer. There is a problem that the occupied area of becomes large.
Moreover, since the thickness per layer is large, when the laminated coil components are produced, there is also a problem that the entire thickness is further increased.
 本発明は、上記課題を解決するためになされたもので、刻印されて形成されたコイル素子を有する樹脂基板を積層するだけで各コイル素子が交互に直列接続されてパワーインダクタを構成することの出来るチップ面積が小さく、かつ、積層厚さの薄い小型のコイル部品を提供することを目的とする。 The present invention has been made to solve the above-described problem, and by simply laminating a resin substrate having a coil element formed by stamping, each coil element is alternately connected in series to constitute a power inductor. An object is to provide a small coil component having a small chip area and a thin laminated thickness.
 上記課題は、以下の本発明によって達成することができる。 The above-described problems can be achieved by the following present invention.
 本発明のコイル部品は、一端から他端にかけて時計廻り(又は反時計廻り)方向に内側に向って渦巻状に巻回された第1コイル素子パターンが、所定の深さで表面に刻印され、刻印された第1コイル素子パターンが電気めっきにより導電層で埋められて第1コイル素子が形成された第1樹脂基板と、一端から他端にかけて時計廻り(又は反時計廻り)方向に外側に向って渦巻状に巻回された第2コイル素子パターンが、所定の深さで表面に刻印され、刻印された第2コイル素子パターンが電気めっきにより導電層で埋められて第2コイル素子が形成された第2樹脂基板と、を備え、第1樹脂基板と第2樹脂基板とを表面と裏面とが対向するよう交互に積層して接着させて第1コイル素子と第2コイル素子とが交互に重畳された積層成型体を形成し、下層にある第1コイル素子の他端と上層にある第2コイル素子の一端とを上層にある第2樹脂基板の一端に設けた貫通孔を介して電気的に接続し、上層にある第1コイル素子の一端と下層にある第2コイル素子の他端とを上層にある第1樹脂基板の一端に設けた貫通孔を介して電気的に接続して、積層成型体内に第1コイル素子と第2コイル素子とが交互に直列接続されたパワーインダクタを構成し、最下層にある第1樹脂基板に形成された第1コイル素子の一端と最上層にある第2樹脂基板に形成された第2コイル素子の他端とから積層成型体外に電極を引出して、パワーインダクタの電極としたことを特徴とする。 In the coil component of the present invention, a first coil element pattern wound in a spiral shape in the clockwise (or counterclockwise) direction from one end to the other end is imprinted on the surface at a predetermined depth, A first resin substrate on which the first coil element pattern engraved is filled with a conductive layer by electroplating to form the first coil element, and outward in the clockwise (or counterclockwise) direction from one end to the other end. The second coil element pattern wound in a spiral shape is engraved on the surface at a predetermined depth, and the engraved second coil element pattern is filled with a conductive layer by electroplating to form a second coil element. The first resin element and the second resin element are alternately laminated and bonded so that the front surface and the rear surface face each other. Superimposed laminated molded body And electrically connecting the other end of the first coil element in the lower layer and one end of the second coil element in the upper layer through a through hole provided in one end of the second resin substrate in the upper layer. One end of a certain first coil element and the other end of the second coil element in the lower layer are electrically connected through a through hole provided in one end of the first resin substrate in the upper layer, and the first coil element is formed in the laminated molded body. A power inductor in which coil elements and second coil elements are alternately connected in series is formed, and is formed on one end of the first coil element formed on the first resin substrate in the lowermost layer and on the second resin substrate in the uppermost layer. An electrode is drawn out of the laminated molded body from the other end of the second coil element thus formed, and used as a power inductor electrode.
 また、本発明のコイル部品は、最下層にある第1樹脂基板の第1の位置と第2の位置とには、基板を貫通して刻印され、電気めっきにより導電層で埋められた第1の電極と第2の電極とを配置し、上層にある第1樹脂基板及び第2樹脂基板の第2の位置には基板を貫通して刻印され、電気めっきにより導電層で埋められた貫通電極を配置し、積層時に各層の貫通電極同士を連結して最下層にある第2の電極に電気的に接続し、最下層にある第1樹脂基板に形成された第1コイル素子の一端を第1の電極に接続し、最上層にある第2樹脂基板に形成された第2コイル素子の他端を貫通電極に接続し、第1の電極と第2の電極とをパワーインダクタの電極とすることを特徴とする。 Further, in the coil component of the present invention, the first position and the second position of the first resin substrate in the lowermost layer are imprinted through the substrate and filled with the conductive layer by electroplating. And a second electrode, and a second electrode of the first resin substrate and the second resin substrate in the upper layer is imprinted through the substrate and filled with a conductive layer by electroplating Are arranged, and the through electrodes of each layer are connected to each other and electrically connected to the second electrode in the lowermost layer, and one end of the first coil element formed on the first resin substrate in the lowermost layer is connected to the first electrode The other end of the second coil element formed on the second resin substrate on the uppermost layer is connected to the through electrode, and the first electrode and the second electrode are used as power inductor electrodes. It is characterized by that.
 また、本発明のコイル部品は、第1及び第2樹脂基板が熱硬化性樹脂によって作製されることを特徴とする。 The coil component according to the present invention is characterized in that the first and second resin substrates are made of a thermosetting resin.
 本発明によれば、作製されるコイル部品の厚さを十分薄く、かつ、チップ面積の小さなパワーインダクタを得ることができる。 According to the present invention, a power inductor having a sufficiently small thickness and a small chip area can be obtained.
本発明による最下層の樹脂基板の構造図。FIG. 3 is a structural diagram of a lowermost resin substrate according to the present invention. 本発明による偶数層の樹脂基板の構造図。FIG. 3 is a structural diagram of an even-numbered resin substrate according to the present invention. 本発明による奇数層の樹脂基板の構造図。FIG. 3 is a structural diagram of an odd-numbered resin substrate according to the present invention. 本発明による最上層の樹脂基板の構造図。FIG. 3 is a structural diagram of the uppermost resin substrate according to the present invention. 本発明による積層されたコイル素子の分解斜視図。FIG. 3 is an exploded perspective view of laminated coil elements according to the present invention. 第1の金型の作製手順を示すプロセスフロー図。The process flow figure which shows the preparation procedure of a 1st metal mold | die. 第2の金型の構成を示す図。The figure which shows the structure of a 2nd metal mold | die. 樹脂基板の作製プロセスフロー図。The manufacturing process flow figure of a resin substrate.
 以下、添付図面に従って、本発明のコイル部品の実施例について詳細に説明する。 Hereinafter, embodiments of the coil component of the present invention will be described in detail with reference to the accompanying drawings.
 本発明によるコイル部品は、コイル素子が形成された樹脂基板を複数枚積層して接着した積層成型体の構造となっている。各樹脂基板内に形成されたコイル素子同士は層間で貫通孔を介して直列接続されてパワーインダクタとなり、最下層にある樹脂基板に形成されたコイル素子の一端と最上層にある樹脂基板に形成されたコイル素子の他端とを積層成型体外に引出して、パワーインダクタの電極としている。なお樹脂基板の積層枚数2N(Nは整数)に制限はないが、以下の実施例においてはN=4の場合、即ち8層の場合について説明する。 The coil component according to the present invention has a structure of a laminated molded body in which a plurality of resin substrates on which coil elements are formed are laminated and bonded. Coil elements formed in each resin substrate are connected in series between the layers via a through hole to form a power inductor, formed on one end of the coil element formed on the resin substrate in the lowermost layer and the resin substrate in the uppermost layer The other end of the coil element thus formed is drawn out of the laminated molded body and used as an electrode of a power inductor. The number of resin substrates stacked 2N (N is an integer) is not limited, but in the following embodiments, the case of N = 4, that is, the case of eight layers will be described.
 図1~図4はコイル素子が形成された樹脂基板の構造を示す平面図(a)及び断面図(b),(c)で、図1は1層目(最下層)、図2は2,4,6層目、図3は3,5,7層目、図4は8層目(最上層)の樹脂基板をそれぞれ示している。 1 to 4 are a plan view (a) and sectional views (b) and (c) showing the structure of a resin substrate on which a coil element is formed. FIG. 1 shows the first layer (lowermost layer), and FIG. , 4 and 6, FIG. 3 shows the third, fifth and seventh layers, and FIG. 4 shows the eighth (uppermost) resin substrate.
 図1は、1層(最下層)目の樹脂基板100の構造を示している。(a)は平面図を、(b)は(a)のA-A線で切断したときの断面図を、(c)は(a)のB-B線での断面図である。
 樹脂基板100には、一端102から他端104にかけて時計廻り方向に内側に向って渦巻状に巻回された第1コイル素子パターンが所定の深さ(d1)で表面に刻印され、この刻印された第1コイル素子パターンは電気めっきにより導電層で埋められて第1コイル素子106が形成されている。また、樹脂基板100の第1の位置Iと第2の位置IIとには基板を貫通して(d2)刻印され、電気めっきにより導電層で埋められた第1の電極108と第2の電極110とが配置されている。なお、第1コイル素子106の一端102は、この第1の電極108に接続されている。
FIG. 1 shows the structure of the first (lowermost) resin substrate 100. (A) is a plan view, (b) is a sectional view taken along line AA in (a), and (c) is a sectional view taken along line BB in (a).
A first coil element pattern wound spirally inward in the clockwise direction from one end 102 to the other end 104 is engraved on the surface of the resin substrate 100 at a predetermined depth (d1). The first coil element pattern is filled with a conductive layer by electroplating to form the first coil element 106. In addition, the first position I and the second position II of the resin substrate 100 are stamped (d2) through the substrate and filled with a conductive layer by electroplating, and the second electrode 110 are arranged. Note that one end 102 of the first coil element 106 is connected to the first electrode 108.
 樹脂基板100の中央部には基板を貫通する矩形状の開口部120が形成されている。
 この開口部120には積層成型体が形成され、プリント配線基板に取付けられた際に、他の電子部品を配置することができる。
 なお、第1コイル素子106の巻回方向は反時計廻りであっても良い。第1コイル素子106の線幅及び膜厚をそれぞれ40μm、樹脂基板の厚さを50μm、大きさを3.0mm×4.0mm程度にすることができる。第1コイル素子106の他端104の線幅は上層の樹脂基板に形成される第2コイル素子の一端と接続するために線幅を80~100μm程度に広げておくのが良い。
A rectangular opening 120 penetrating the substrate is formed at the center of the resin substrate 100.
A laminated molded body is formed in the opening 120, and when it is attached to the printed wiring board, other electronic components can be arranged.
Note that the winding direction of the first coil element 106 may be counterclockwise. The line width and film thickness of the first coil element 106 can be 40 μm, the thickness of the resin substrate can be 50 μm, and the size can be about 3.0 mm × 4.0 mm. The line width of the other end 104 of the first coil element 106 is preferably increased to about 80 to 100 μm so as to be connected to one end of the second coil element formed on the upper resin substrate.
 図2は、8層(最上層)目を除く偶数層(2,4,6層)目の樹脂基板200の構造を示している。(a)は平面図を、(b)は(a)のC-C線で切断したときの断面図、(c)は(a)のD-D線での断面図である。
 樹脂基板200には、一端202から他端204にかけて時計廻り方向に外側に向って渦巻状に巻回された第2コイル素子パターンが所定の深さ(d1)で表面に刻印され、この刻印された第2コイル素子パターンは電気めっきにより導電層で埋められて第2コイル素子206が形成されている。また、樹脂基板200の第2の位置IIには基板を貫通して(d2)刻印され、電気めっきにより導電層で埋められた貫通電極208が配置されている。一端202には基板を貫通する貫通孔210が設けられ、この貫通孔210は電気めっきにより導電層で埋められている。
 なお、第2コイル素子206の巻回方向は、第1コイル106の巻回方向と同一である。
FIG. 2 shows the structure of an even-numbered (2, 4, 6) -thick resin substrate 200 excluding the eighth (uppermost) layer. (A) is a plan view, (b) is a sectional view taken along line CC of (a), and (c) is a sectional view taken along line DD of (a).
A second coil element pattern wound spirally from the one end 202 to the other end 204 in the clockwise direction is engraved on the surface of the resin substrate 200 at a predetermined depth (d1). The second coil element pattern is filled with a conductive layer by electroplating to form a second coil element 206. In addition, a penetrating electrode 208 that is imprinted (d2) through the substrate and filled with a conductive layer by electroplating is disposed at the second position II of the resin substrate 200. One end 202 is provided with a through hole 210 penetrating the substrate, and the through hole 210 is filled with a conductive layer by electroplating.
Note that the winding direction of the second coil element 206 is the same as the winding direction of the first coil 106.
 以後の説明においては、奇数層目の樹脂基板及びコイル素子をそれぞれ第1樹脂基板及び第1コイル素子と呼び、偶数層目の樹脂基板及びコイル素子をそれぞれ第2樹脂基板及び第2コイル素子と呼ぶことにする。
 ここで、図1に示す第1樹脂基板100と図2に示す第2樹脂基板とを第1樹脂基板100の表面100Fと第2樹脂基板200の裏面200Rとが対向するように積層して接着させる。すると下層にある第1コイル素子106の他端104と上層にある第2コイル素子の一端202とは第2樹脂基板200の一端202に設けた貫通孔210を介して電気的に接続され、第1樹脂基板100の第2の位置IIにある第2の電極110と第1の樹脂基板200の第2の位置IIにある貫通電極208とも電気的に接続される。なお、電気的接続をより確実にするために、それぞれの接続部にはんだバンプを形成した後、溶着するようにしても良い。
In the following description, odd-numbered resin substrates and coil elements are referred to as first resin substrates and first coil elements, respectively, and even-numbered resin substrates and coil elements are referred to as second resin substrates and second coil elements, respectively. I will call it.
Here, the first resin substrate 100 shown in FIG. 1 and the second resin substrate shown in FIG. 2 are laminated and bonded so that the front surface 100F of the first resin substrate 100 and the back surface 200R of the second resin substrate 200 face each other. Let Then, the other end 104 of the first coil element 106 in the lower layer and one end 202 of the second coil element in the upper layer are electrically connected via the through hole 210 provided in the one end 202 of the second resin substrate 200, The second electrode 110 at the second position II of the first resin substrate 100 and the through electrode 208 at the second position II of the first resin substrate 200 are also electrically connected. In order to make the electrical connection more reliable, solder bumps may be formed on the respective connection portions and then welded.
 図3は、1層目を除く奇数層(3,5,7層)目の第1樹脂基板100aの構造を示している。(a)は平面図を、(b)は(a)のE-E線での断面図を、(c)は(a)のF-F線での断面図である。図1に示す1層目の第1樹脂基板100とほぼ同様の素子配置となっているが、第1コイル素子106aの一端102aの位置が異なることと、この一端102aに接続されて貫通孔112aが設けられていること、及び第1の位置Iには何等の電極も設けられていない点で構成をやや異にしている。
 ここで、図2に示す第2樹脂基板200の表面200Fと図3に示す第1樹脂基板100aの裏面100aRとが対向するように積層して接着させる。すると、下層にある第2コイル素子206の他端204と上層にある第1コイル素子106aの一端102aとは貫通孔112aを介して電気的に接続され、上層にある第1樹脂基板100aの第2の位置IIにある貫通電極110aと下層にある第2の樹脂基板200の第2の位置IIにある貫通電極208とも電気的に接続される。
FIG. 3 shows the structure of the first resin substrate 100a of odd-numbered layers (3, 5, and 7 layers) excluding the first layer. (A) is a plan view, (b) is a sectional view taken along line EE of (a), and (c) is a sectional view taken along line FF of (a). Although the element arrangement is almost the same as that of the first resin substrate 100 of the first layer shown in FIG. 1, the position of one end 102a of the first coil element 106a is different, and the through hole 112a is connected to the one end 102a. And the configuration is slightly different in that no electrode is provided at the first position I.
Here, the front surface 200F of the second resin substrate 200 shown in FIG. 2 and the back surface 100aR of the first resin substrate 100a shown in FIG. Then, the other end 204 of the second coil element 206 in the lower layer and the one end 102a of the first coil element 106a in the upper layer are electrically connected via the through hole 112a, and the first resin substrate 100a in the upper layer is first connected. The through electrode 110a at the second position II and the through electrode 208 at the second position II of the lower second resin substrate 200 are also electrically connected.
 図4は、8層(最上層)目の第2樹脂基板200aの構造を示している。(a)は平面図を、(b)は(a)のG-G線での断面図、(c)は(a)のH-H線での断面図である。
 図2に示す2,4,6層目の第2樹脂基板200とほぼ同様の素子配置となっているが、第2コイル素子206aの他端204aの位置が異なることと、この他端204aに接続されて貫通孔208aが設けられている点で構成をやや異にしている。
 ここで、図3に示す第1樹脂基板100aの表面100aFと図4に示す第2樹脂基板200aの裏面200aRとが対向するように積層して接着させる。すると、下層にある第1コイル素子106aの他端104aと最上層にある第2コイル素子206aの一端202aとは貫通孔210aを介して電気的に接続され、最上層の第2樹脂基板200aの第2の位置IIにある貫通孔208aと下層にある第1の樹脂基板100aの第2位置IIにある貫通電極110aとも電気的に接続される。
FIG. 4 shows the structure of the second resin substrate 200a in the eighth layer (uppermost layer). (A) is a plan view, (b) is a sectional view taken along line GG in (a), and (c) is a sectional view taken along line HH in (a).
Although the element arrangement is almost the same as that of the second resin substrate 200 in the second, fourth, and sixth layers shown in FIG. 2, the position of the other end 204a of the second coil element 206a is different from the other end 204a. The configuration is slightly different in that it is connected and a through hole 208a is provided.
Here, the front surface 100aF of the first resin substrate 100a shown in FIG. 3 and the back surface 200aR of the second resin substrate 200a shown in FIG. 4 are laminated and bonded together. Then, the other end 104a of the first coil element 106a in the lower layer and one end 202a of the second coil element 206a in the uppermost layer are electrically connected via the through hole 210a, and the second resin substrate 200a in the uppermost layer is connected. The through hole 208a at the second position II is also electrically connected to the through electrode 110a at the second position II of the first resin substrate 100a in the lower layer.
 このようにして8層からなる積層成型体が構成され、最下層にある第1樹脂基板100の第1の位置Iにある第1の電極108と第2の位置IIにある第2の電極110とが、4個の第1コイル素子と4個の第2コイル素子とが交互に直列接続されて構成されたパワーインダクタの両電極として積層成型体外に引出される。 In this way, a laminated molded body composed of eight layers is configured, and the first electrode 108 at the first position I and the second electrode 110 at the second position II of the first resin substrate 100 in the lowermost layer. Are drawn out of the laminated molded body as both electrodes of a power inductor configured by alternately connecting four first coil elements and four second coil elements in series.
 図5は、上述のようにして作製されたコイル部品のコイル素子と電極とを取出して配置を示す分解斜視図である。
 パワーインダクタの両電極108と110は最下層の第1樹脂基板100の裏面100Rから取出され、プリント配線基板300に設けられた図示しない電極に接続される。
 なお、上述した説明では単体のコイル部品が作製されるものとして説明したが、実際には、第1及び第2樹脂基板には複数のコイル素子がマトリックス状に配列された状態で形成されており、積層後にダイシングにより切り離されて単体のコイル部品となる。
 また、本発明によるコイル部品では、樹脂基板はコイル素子及びパワーインダクタの形成後にもそのまま残されて使用される。樹脂材料としてはエポキシ、フェノール、ポリイミド、ポリウレタンなどの熱硬化性樹脂を用いることができる。また導電層を形成するための電気めっきは銅めっきとするのが好ましい。
FIG. 5 is an exploded perspective view showing the arrangement by taking out the coil elements and the electrodes of the coil component produced as described above.
Both electrodes 108 and 110 of the power inductor are taken out from the back surface 100R of the lowermost first resin substrate 100 and connected to electrodes (not shown) provided on the printed wiring board 300.
In the above description, it has been described that a single coil component is manufactured. However, actually, the first and second resin substrates are formed with a plurality of coil elements arranged in a matrix. After lamination, they are separated by dicing to form a single coil component.
Moreover, in the coil component according to the present invention, the resin substrate is used as it is after the coil element and the power inductor are formed. As the resin material, a thermosetting resin such as epoxy, phenol, polyimide, or polyurethane can be used. The electroplating for forming the conductive layer is preferably copper plating.
 次に、熱硬化性材料で作製された樹脂金型を用いてコイル部品を作製する場合の作製方法の一例を説明する。
 この作製方法では、コイル素子パターン30及び貫通孔パターン40がそれぞれ反転してパターン化された反転コイル素子パターン35及び反転貫通孔パターン45が表面に刻印された第1の金型と、側壁部を画成する金型と底面部を画成する金型とからなる第2の金型とを組合せて用いることにより所望の樹脂金型及び樹脂基板を作製する。
Next, an example of a production method in the case of producing a coil component using a resin mold made of a thermosetting material will be described.
In this manufacturing method, the first mold having the reverse coil element pattern 35 and the reverse through hole pattern 45 formed by reversing the coil element pattern 30 and the through hole pattern 40 on the surface, and the side wall portion are formed. A desired resin mold and a resin substrate are produced by using a combination of a mold that defines and a second mold that includes a mold that defines a bottom surface portion.
 図6は第1の金型の作製手順を示すプロセスフロー図である。
 まず、図6aに示すように、深さd1のコイル素子パターン30、深さd2の貫通孔パターン40が表面に刻印されたNi,SUS又はNi合金等からなる金属金型1を準備する。次に、図6bに示すように金型1の表面にNiOなどの離形層を形成した後、Niを電気めっきにより積層して転写し、Ni金型2を作製する。その後、このNi金型2を金属金型1から剥離して図6cに示すような第1の金型2とする。
 この結果、第1の金型2の表面には高さd1の反転コイル素子パターン35及び高さd2の反転貫通孔パターン45が形成される。
FIG. 6 is a process flow diagram showing the procedure for producing the first mold.
First, as shown in FIG. 6a, a metal mold 1 made of Ni, SUS, Ni alloy or the like having a coil element pattern 30 having a depth d1 and a through-hole pattern 40 having a depth d2 imprinted on the surface thereof is prepared. Next, as shown in FIG. 6 b, a release layer such as NiO is formed on the surface of the mold 1, and then Ni is laminated and transferred by electroplating to produce the Ni mold 2. Thereafter, the Ni mold 2 is peeled off from the metal mold 1 to form a first mold 2 as shown in FIG.
As a result, a reverse coil element pattern 35 having a height d1 and a reverse through-hole pattern 45 having a height d2 are formed on the surface of the first mold 2.
 図7は、第2の金型の構成を示す図である。第2の金型は注型金型と呼ばれ、側壁部を画成する金型4と底面部を画成する金型3とを貼り合わせて構成する。金型4の材料としては特に限定されず、樹脂であっても金属であっても良い。金型3の材料としては、低コストであること、後の工程のめっき処理のためのシード層が表面に形成できること、及び剥離又は溶解するために薄いこと等の要件を備える必要があることから、アクリルなどの樹脂を用いるのが好ましい。 FIG. 7 is a diagram showing the configuration of the second mold. The second mold is called a casting mold, and is formed by bonding a mold 4 that defines a side wall portion and a mold 3 that defines a bottom surface portion. The material of the mold 4 is not particularly limited, and may be a resin or a metal. As a material of the mold 3, it is necessary to have low cost, a seed layer for a plating process in a later step can be formed on the surface, and a thin layer for peeling or dissolving. It is preferable to use a resin such as acrylic.
 図8は、図6に示す第1の金型2と図7に示す第2の金型とを用いて樹脂基板5を作製するプロセスフローを示す図である。
 まず、図8aに示すように、注型樹脂フィルムFが流し込まれた第2の金型内に第1の金型2を反転貫通孔パターン45が注型金型3の底面部に密着するように載置し、加圧する。
 その際、反転貫通孔パターン45は注型金型3の底面部に十分に密着させ、密着部に樹脂フィルムFが入り込まないようにする。第1の金型2の凹部に樹脂フィルムFをむらなく充填させた後、硬化させる。
 その後、第1の金型2を除去すると、図8bに示すようにコイル素子パターン30及び貫通孔パターン40を備えた樹脂金型5が注型金型3の上に作製される。その後、図8cに示すように第2の金型の側壁部を画成する注型金型4を除去する。
 次いで、シード層をコイル素子パターン30の領域と貫通孔パターン40の領域に形成して、電気めっきによりパターン部を導電層で埋めると、図8dに示すようにコイル素子30a及び貫通孔40aが樹脂金型5内に形成される。
 最後に、注型金型3を樹脂金型5から剥離すると、図8eに示すように樹脂基板が完成する。
FIG. 8 is a diagram showing a process flow for producing the resin substrate 5 using the first mold 2 shown in FIG. 6 and the second mold shown in FIG.
First, as shown in FIG. 8 a, the first mold 2 is placed in the second mold into which the casting resin film F has been poured so that the reverse through-hole pattern 45 is in close contact with the bottom surface of the casting mold 3. And pressurize.
At this time, the reverse through-hole pattern 45 is sufficiently adhered to the bottom surface portion of the casting mold 3 so that the resin film F does not enter the adhesion portion. The resin film F is uniformly filled in the recesses of the first mold 2 and then cured.
Thereafter, when the first mold 2 is removed, the resin mold 5 having the coil element pattern 30 and the through-hole pattern 40 is produced on the casting mold 3 as shown in FIG. Thereafter, as shown in FIG. 8c, the casting mold 4 defining the side wall portion of the second mold is removed.
Next, when the seed layer is formed in the region of the coil element pattern 30 and the region of the through-hole pattern 40 and the pattern portion is filled with a conductive layer by electroplating, the coil element 30a and the through-hole 40a are made of resin as shown in FIG. It is formed in the mold 5.
Finally, when the casting mold 3 is peeled from the resin mold 5, a resin substrate is completed as shown in FIG. 8e.
 なお、以上説明した樹脂基板では、第1の金型と第2の金型とによって樹脂金型が作製されているが、樹脂基板に直接インプリント又は熱プレスによってコイル素子パターン及び貫通孔パターンを刻印して樹脂金型とすることも可能である。 In the resin substrate described above, the resin mold is produced by the first mold and the second mold. However, the coil element pattern and the through hole pattern are formed directly on the resin substrate by imprinting or hot pressing. It is also possible to engrave a resin mold.
  102a 第1コイル素子106aの一端
  104  第1コイル素子106の他端
  104a 第1コイル素子106aの他端
  106,106a 第1コイル素子
  108  第1の電極
  110  第2の電極
  110a 貫通電極
  202  第2コイル素子の一端
  202a 最上層にある第2コイル素子206aの一端
  204  下層にある第2コイル素子206の他端
  206  下層にある第2コイル素子
  206a 最上層にある第2コイル素子
  208  貫通電極
  208a 貫通孔
  300  プリント配線基板
102a One end of the first coil element 106a 104 Other end of the first coil element 106a 104a Other end of the first coil element 106a 106, 106a First coil element 108 First electrode 110 Second electrode 110a Through electrode 202 Second coil One end of element 202a One end of second coil element 206a in the uppermost layer 204 Other end of second coil element 206 in the lower layer 206 Second coil element in the lower layer 206a Second coil element in the uppermost layer 208 Through electrode 208a Through hole 300 Printed circuit board

Claims (3)

  1.  一端から他端にかけて時計廻り(又は反時計廻り)方向に内側に向って渦巻状に巻回された第1コイル素子パターンが、所定の深さで表面に刻印され、前記刻印された前記第1コイル素子パターンが電気めっきにより導電層で埋められて第1コイル素子が形成された第1樹脂基板と、
     一端から他端にかけて時計廻り(又は反時計廻り)方向に外側に向って渦巻状に巻回された第2コイル素子パターンが、所定の深さで表面に刻印され、前記刻印された前記第2コイル素子パターンが電気めっきにより導電層で埋められて第2コイル素子が形成された第2樹脂基板と、を備え、
     前記第1樹脂基板と前記第2樹脂基板とを表面と裏面とが対向するよう交互に積層して接着させて前記第1コイル素子と前記第2コイル素子とが交互に重畳された積層成型体を形成し、下層にある前記第1コイル素子の前記他端と上層にある前記第2コイル素子の前記一端とを上層にある前記第2樹脂基板の前記一端に設けた貫通孔を介して電気的に接続し、上層にある前記第1コイル素子の前記一端と下層にある前記第2コイル素子の前記他端とを上層にある前記第1樹脂基板の前記一端に設けた貫通孔を介して電気的に接続して、前記積層成型体内に前記第1コイル素子と前記第2コイル素子とが交互に直列接続されたパワーインダクタを構成し、最下層にある前記第1樹脂基板に形成された前記第1コイル素子の前記一端と最上層にある前記第2樹脂基板に形成された前記第2コイル素子の前記他端とから前記積層成型体外に電極を引出して、前記パワーインダクタの電極としたことを特徴とするコイル部品。
    A first coil element pattern wound spirally inward in the clockwise (or counterclockwise) direction from one end to the other is stamped on the surface at a predetermined depth, and the first stamped A first resin substrate in which a coil element pattern is filled with a conductive layer by electroplating to form a first coil element;
    A second coil element pattern wound in a spiral shape from one end to the other end in a clockwise (or counterclockwise) direction is engraved on the surface at a predetermined depth, and the engraved second pattern A second resin substrate in which a coil element pattern is filled with a conductive layer by electroplating to form a second coil element, and
    A laminated molded body in which the first coil element and the second coil element are alternately stacked and bonded so that the front surface and the back surface are opposed to each other, and the first coil element and the second coil element are alternately superimposed. The other end of the first coil element in the lower layer and the one end of the second coil element in the upper layer are electrically connected through a through hole provided in the one end of the second resin substrate in the upper layer. The one end of the first coil element in the upper layer and the other end of the second coil element in the lower layer through a through hole provided in the one end of the first resin substrate in the upper layer. Electrically connected to form a power inductor in which the first coil elements and the second coil elements are alternately connected in series in the laminated molded body, and formed on the first resin substrate in the lowermost layer On the one end and the uppermost layer of the first coil element The other end of the pull out the electrode in the stacking molding external coil component, characterized in that the electrodes of the power inductor of said formed in the second resin substrate and the second coil element.
  2.  最下層にある前記第1樹脂基板の第1の位置と第2の位置とには、基板を貫通して刻印され、電気めっきにより導電層で埋められた第1の電極と第2の電極とを配置し、上層にある前記第1樹脂基板及び前記第2樹脂基板の前記第2の位置には基板を貫通して刻印され、電気めっきにより導電層で埋められた貫通電極を配置し、積層時に各層の貫通電極同士を連結して最下層にある前記第2の電極に電気的に接続し、最下層にある前記第1樹脂基板に形成された前記第1コイル素子の前記一端を前記第1の電極に接続し、最上層にある前記第2樹脂基板に形成された前記第2コイル素子の前記他端を前記貫通電極に接続し、前記第1の電極と前記第2の電極とを前記パワーインダクタの電極とすることを特徴とする請求項1に記載のコイル部品。 The first position and the second position of the first resin substrate in the lowermost layer are engraved through the substrate and filled with a conductive layer by electroplating, and the second electrode And a through electrode embedded in the conductive layer by electroplating is disposed at the second position of the first resin substrate and the second resin substrate in the upper layer, and is laminated. Sometimes the through electrodes of each layer are connected to each other and electrically connected to the second electrode in the lowermost layer, and the one end of the first coil element formed on the first resin substrate in the lowermost layer is connected to the first electrode. The other end of the second coil element formed on the second resin substrate in the uppermost layer is connected to the through electrode, and the first electrode and the second electrode are connected to the first electrode. The coil according to claim 1, wherein the coil is an electrode of the power inductor. Goods.
  3.  前記第1及び第2樹脂基板が熱硬化性樹脂によって作製されることを特徴とする請求項1に記載のコイル部品。 The coil component according to claim 1, wherein the first and second resin substrates are made of a thermosetting resin.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220111423A1 (en) * 2020-10-13 2022-04-14 Regenesis Bioremediation Products Methods for Cleaning-in-Place

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114551063B (en) * 2022-04-02 2023-09-15 电子科技大学 Resin type inductance structure

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008108882A (en) * 2006-10-25 2008-05-08 Matsushita Electric Ind Co Ltd Electronic component and its manufacturing method
JP2008166391A (en) * 2006-12-27 2008-07-17 Tdk Corp Method of forming conductor pattern and electronic component
JP5294286B1 (en) * 2012-10-30 2013-09-18 株式会社Leap Coil element manufacturing method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0745477A (en) * 1993-07-26 1995-02-14 Murata Mfg Co Ltd Electronic component and fabrication thereof
JP3472329B2 (en) * 1993-12-24 2003-12-02 株式会社村田製作所 Chip type transformer
JP2005191408A (en) * 2003-12-26 2005-07-14 Matsushita Electric Ind Co Ltd Coil conductor, method for manufacturing the same, and electronic component using the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008108882A (en) * 2006-10-25 2008-05-08 Matsushita Electric Ind Co Ltd Electronic component and its manufacturing method
JP2008166391A (en) * 2006-12-27 2008-07-17 Tdk Corp Method of forming conductor pattern and electronic component
JP5294286B1 (en) * 2012-10-30 2013-09-18 株式会社Leap Coil element manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220111423A1 (en) * 2020-10-13 2022-04-14 Regenesis Bioremediation Products Methods for Cleaning-in-Place

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