WO2015044035A8 - Light microscope and method for examining a sample using a light microscope - Google Patents

Light microscope and method for examining a sample using a light microscope Download PDF

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Publication number
WO2015044035A8
WO2015044035A8 PCT/EP2014/069953 EP2014069953W WO2015044035A8 WO 2015044035 A8 WO2015044035 A8 WO 2015044035A8 EP 2014069953 W EP2014069953 W EP 2014069953W WO 2015044035 A8 WO2015044035 A8 WO 2015044035A8
Authority
WO
WIPO (PCT)
Prior art keywords
sample
light
detector device
optical imaging
imaging means
Prior art date
Application number
PCT/EP2014/069953
Other languages
German (de)
French (fr)
Other versions
WO2015044035A1 (en
Inventor
Peter Westphal
Alexander Gaiduk
Helmut Lippert
Original Assignee
Carl Zeiss Microscopy Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Microscopy Gmbh filed Critical Carl Zeiss Microscopy Gmbh
Publication of WO2015044035A1 publication Critical patent/WO2015044035A1/en
Publication of WO2015044035A8 publication Critical patent/WO2015044035A8/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G02B21/004—Scanning details, e.g. scanning stages fixed arrays, e.g. switchable aperture arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/006—Optical details of the image generation focusing arrangements; selection of the plane to be imaged
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0068—Optical details of the image generation arrangements using polarisation

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Engineering & Computer Science (AREA)
  • Microscoopes, Condenser (AREA)
  • Automatic Focus Adjustment (AREA)

Abstract

The invention relates to a light microscope comprising a light source device for emitting illumination light in the direction of a sample, a detector device for recording sample images of the sample and optical imaging means for focusing illumination light as light spot pattern onto a height plane at the sample and for guiding sample light from the sample to the detector device. The light source device and the optical imaging means are designed to illuminate a plurality of mutually spaced apart lateral regions of the sample with the light spot pattern during a camera integration time of the detector device. According to the invention, the light microscope is characterized in that the light source device, the optical imaging means and the detector device are designed to enable recordings of at least two sample images in which the light spot patterns are focused onto different height planes and/or in which different height planes are imaged onto the detector device, wherein the light source device, the optical imaging means and the detector device are arranged spatially identically for each of the recordings of the different sample images. In this case, identical lateral regions of the sample are illuminated in each of the at least two sample images. In addition, electronic evaluation means are present and designed to calculate height information of the sample with the aid of the at least two sample images. In addition, the invention relates to a corresponding method for examining a sample using a light microscope.
PCT/EP2014/069953 2013-09-30 2014-09-19 Confocal light microscope and method for examining a sample using a confocal light microscope WO2015044035A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE201310016367 DE102013016367A1 (en) 2013-09-30 2013-09-30 Light microscope and method for examining a sample with a light microscope
DE102013016367.6 2013-09-30

Publications (2)

Publication Number Publication Date
WO2015044035A1 WO2015044035A1 (en) 2015-04-02
WO2015044035A8 true WO2015044035A8 (en) 2015-04-30

Family

ID=51846612

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2014/069953 WO2015044035A1 (en) 2013-09-30 2014-09-19 Confocal light microscope and method for examining a sample using a confocal light microscope

Country Status (2)

Country Link
DE (1) DE102013016367A1 (en)
WO (1) WO2015044035A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LU93022B1 (en) * 2016-04-08 2017-11-08 Leica Microsystems Method and microscope for examining a sample
CN106443995B (en) * 2016-11-25 2019-01-01 中国科学院上海技术物理研究所 Optical fiber confocal microscopic image instrument for space biological sample Fluirescence observation
CN106970047A (en) * 2017-05-12 2017-07-21 中国工程物理研究院激光聚变研究中心 Reflectivity distribution measuring system and method
LU101084B1 (en) * 2018-12-21 2020-06-22 Abberior Instruments Gmbh Method and device for spot-illuminating a sample in a microscope
CN111638596A (en) * 2020-07-10 2020-09-08 宁波蔡康光电科技有限责任公司 Confocal microscope
CN114460020B (en) * 2022-01-30 2023-11-17 清华大学深圳国际研究生院 Hyperspectral scanning system and method based on digital micro-reflector
DE102023101782B3 (en) 2023-01-25 2024-06-13 Leica Microsystems Cms Gmbh Apparatus and method for producing a composite image of a sample
CN117232792B (en) * 2023-11-14 2024-01-30 南京木木西里科技有限公司 Microscope defect detection system based on image information

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19713362A1 (en) * 1997-03-29 1998-10-01 Zeiss Carl Jena Gmbh Confocal microscopic arrangement
JP3610569B2 (en) * 1999-03-23 2005-01-12 株式会社高岳製作所 Active confocal imaging device and three-dimensional measurement method using the same
US6867406B1 (en) 1999-03-23 2005-03-15 Kla-Tencor Corporation Confocal wafer inspection method and apparatus using fly lens arrangement
TW498152B (en) * 2000-09-11 2002-08-11 Olympus Optical Co Confocal microscope
US6657216B1 (en) * 2002-06-17 2003-12-02 Nanometrics Incorporated Dual spot confocal displacement sensor
DE10242373B4 (en) * 2002-09-12 2009-07-16 Siemens Ag Confocal distance sensor
DE102004014048B4 (en) * 2004-03-19 2008-10-30 Sirona Dental Systems Gmbh Measuring device and method according to the basic principle of confocal microscopy
DE102005052743B4 (en) * 2005-11-04 2021-08-19 Precitec Optronik Gmbh Measuring system for measuring boundary or surfaces of workpieces
DE102006027836B4 (en) 2006-06-16 2020-02-20 Carl Zeiss Microscopy Gmbh Microscope with auto focus device
US7570795B2 (en) 2006-07-18 2009-08-04 Mitutoyo Corporation Multi-region autofocus tool and mode
JP2008268387A (en) * 2007-04-18 2008-11-06 Nidec Tosok Corp Confocal microscope
US8304704B2 (en) 2009-07-27 2012-11-06 Sensovation Ag Method and apparatus for autofocus using a light source pattern and means for masking the light source pattern

Also Published As

Publication number Publication date
WO2015044035A1 (en) 2015-04-02
DE102013016367A1 (en) 2015-04-02

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