CN106970047A - Reflectivity distribution measuring system and method - Google Patents
Reflectivity distribution measuring system and method Download PDFInfo
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- CN106970047A CN106970047A CN201710333688.9A CN201710333688A CN106970047A CN 106970047 A CN106970047 A CN 106970047A CN 201710333688 A CN201710333688 A CN 201710333688A CN 106970047 A CN106970047 A CN 106970047A
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- 238000002310 reflectometry Methods 0.000 title claims abstract description 60
- 238000009826 distribution Methods 0.000 title claims abstract description 47
- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000012360 testing method Methods 0.000 claims abstract description 143
- 238000001514 detection method Methods 0.000 claims abstract description 124
- 238000003384 imaging method Methods 0.000 claims abstract description 73
- 238000005259 measurement Methods 0.000 claims abstract description 13
- 239000000523 sample Substances 0.000 claims description 178
- 238000013519 translation Methods 0.000 claims description 55
- 230000003287 optical effect Effects 0.000 claims description 14
- 239000011159 matrix material Substances 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 5
- 239000013068 control sample Substances 0.000 claims description 5
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- 230000005540 biological transmission Effects 0.000 description 7
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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Abstract
The invention provides a kind of reflectivity distribution measuring system and method, belong to photoelectron technical field.The system includes detection light generating device, sample stage, imaging device and control device.Sample stage is used to place testing sample, and imaging device is located in the reflected light travels path for the detection light beam that the testing sample placed on sample stage is sent for detection light generating device, and imaging device is coupled with control device.When testing sample is placed on sample stage, the detection light beam that detection light generating device is sent incides the region to be measured on testing sample surface, the detection light beam reflected by testing sample incides imaging device, and imaging is converted into electric signal and is sent to control device in imaging device.Control device handles the reflected image that the electric signal obtains region to be measured, and obtains according to the reflected image and benchmark image the reflectivity distribution data in the region to be measured.The sample rate of system can be so effectively improved, detection time is reduced, measurement efficiency is improved.
Description
Technical field
The present invention relates to photoelectron technical field, in particular to a kind of reflectivity distribution measuring system and method.
Background technology
For the coated element of high power laser light drive system, it is desirable to (the peaks of film layer reflectivity inhomogeneities ＜ 0.1%
Valley).Film layer reflectivity inhomogeneities can have a strong impact on laser emerging beam quality, and the service life of element in itself.
The method of existing detection film layer reflectivity inhomogeneities is point by point scanning method, this mode resolution ratio (efficiently sampling points)
It is low, expend the time long, it is impossible to meet the heavy caliber coated element of high power laser light drive system (clear aperture is more than 400mm)
Detection demand.
The content of the invention
It is an object of the invention to provide a kind of reflectivity distribution measuring system and method, it can effectively improve above-mentioned ask
Topic.
To achieve these goals, the technical solution adopted by the present invention is as follows：
In a first aspect, the embodiments of the invention provide a kind of reflectivity distribution measuring system, including detection light generating device,
Sample stage, imaging device and control device.The sample stage is used to place testing sample, and the imaging device is located at the sample
In the reflected light travels path for the detection light beam that the testing sample placed in sample platform is sent for the detection light generating device.Institute
Imaging device is stated to couple with the control device.When testing sample is placed on the sample stage, the detection light generating device
The detection light beam sent incides the region to be measured on the testing sample surface, and the detection light beam reflected by the testing sample enters
The imaging device is mapped to, imaging is converted into electric signal and is sent to the control device in the imaging device.Institute
The reflected image that control device is used to obtain the region to be measured according to the electric signal is stated, according to the reflected image and benchmark
Image obtains the reflectivity distribution data in the testing sample surface region to be measured.Wherein, the benchmark image is the imaging
The image for the detection light beam that the detection light generating device of device collection is sent.
Further, above-mentioned detection light generating device includes light source and light beam adjusting module, and it is initial that the light source is sent
Light beam incides the testing sample surface after being adjusted to meet the detection light beam of preparatory condition through the light beam adjusting module
Region to be measured.
Further, above-mentioned light beam adjusting module includes optical filter, and the incipient beam of light that the light source is sent passes through the filter
The detection light beam formed after mating plate incides the region to be measured on the testing sample surface.
Further, above-mentioned light beam adjusting module includes diaphragm, and the incipient beam of light that the light source is sent incides the light
Door screen, is used as the detection light beam by the incipient beam of light of the light hole of the diaphragm and incides the testing sample surface.
Further, above-mentioned light source is face matrix LED.
Further, above-mentioned sample stage be electronic rotation translation stage, the control end of the electronic rotation translation stage with it is described
Control device is coupled, the control device be additionally operable to send control signal to the electronic rotation translation stage with adjust be placed in it is described
The spatial attitude of testing sample on electronic rotation translation stage.
Further, above-mentioned reflectivity distribution measuring system also includes articles holding table.The imaging device is arranged at described put
It is connected on thing platform and with the articles holding table, the rotary shaft of the electronic rotation translation stage is connected by transmission mechanism and the articles holding table
Connect, to enable the position of the imaging device to become with the rotation for the testing sample being placed on the electronic rotation translation stage
Change, receive the detection light beam reflected by the testing sample.
Further, above-mentioned imaging device includes ccd image sensor array.
Second aspect, the embodiment of the present invention additionally provides a kind of reflectivity distribution measuring method, applied to above-mentioned reflection
Rate distribution measurement system, methods described includes：Control sample stage moves so that the detection that the detection light generating device is sent
Light beam is scanned with each region to be measured for presetting testing sample of the incidence angle to being positioned on the sample stage；According to reference map
As and imaging device receive this that sent after the detection light beam of each region reflection to be measured in the testing sample surface
The reflected image in region to be measured obtains the reflectivity distribution data on the testing sample surface, wherein, the benchmark image is institute
State the image for detecting light beam that the detection light generating device of imaging device collection is sent.
Further, the sample stage is electronic rotation translation stage.The control sample stage moves so that the detection
The detection light beam that light generating device is sent is with default incidence angle to each area to be measured for the testing sample being positioned on the sample stage
Domain is scanned, including：Obtain the shape and sized data of testing sample；The detection sent according to the detection light generating device
The light spot shape and sized data of light beam, the shape of the testing sample and sized data and the default incidence angle are swept
Retouch path；The electronic rotation translation stage is driven to control the testing sample to turn to predeterminated position, to cause the detection light
The detection light beam that generation device is sent is with the default incident angles to the testing sample surface；Drive the electronic rotation
Translation stage controls the testing sample move with the scanning pattern, described to detect the detection light that light generating device is sent
Beam incides each region to be measured on the testing sample surface with the default incidence angle successively.
Compared to prior art, reflectivity distribution measuring system and method provided in an embodiment of the present invention are filled by being imaged
Put and the detection light beam that testing sample surface region to be measured is reflected is imaged, and imaging is converted into electric signal and be sent to
Control device.Then the reflected image that the electric signal obtains region to be measured is handled by control device, and it is further anti-according to this
Penetrate image and benchmark image obtains the reflectivity distribution data in testing sample surface region to be measured.It can so effectively improve and be
The sample rate of system, reduces detection time, improves measurement efficiency.
To enable the above objects, features and advantages of the present invention to become apparent, preferred embodiment cited below particularly, and coordinate
Appended accompanying drawing, is described in detail below.
Brief description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be attached to what is used required in embodiment
Figure is briefly described, it will be appreciated that the following drawings illustrate only certain embodiments of the present invention, therefore is not construed as pair
The restriction of scope, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to this
A little accompanying drawings obtain other related accompanying drawings.
Fig. 1 shows a kind of structural representation of reflectivity distribution measuring system provided in an embodiment of the present invention；
Fig. 2 shows the structural representation under the original state of the reflectivity distribution measuring system shown in Fig. 1；
Fig. 3 shows a kind of flow chart of reflectivity distribution measuring method provided in an embodiment of the present invention；
Fig. 4 shows the flow chart of step S110 in Fig. 3.
In figure：10- reflectivity distribution measuring systems；110- detects light generating device；101- light sources；111- light beams adjust mould
Block；102- optical filters；103- diaphragms；1031- light holes；120- sample stages；130- imaging devices；140- control devices；200-
Testing sample.
Embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
A part of embodiment of the present invention, rather than whole embodiments.The present invention implementation being generally described and illustrated herein in the accompanying drawings
The component of example can be arranged and designed with a variety of configurations.
Therefore, the detailed description of embodiments of the invention below to providing in the accompanying drawings is not intended to limit claimed
The scope of the present invention, but be merely representative of the present invention selected embodiment.Based on the embodiment in the present invention, this area is common
The every other embodiment that technical staff is obtained under the premise of creative work is not made, belongs to the model that the present invention is protected
Enclose.
It should be noted that：Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined in individual accompanying drawing, then it further need not be defined and explained in subsequent accompanying drawing.
In the description of the invention, it is necessary to explanation, term " " center ", " on ", " under ", " interior ", the instruction such as " outer "
Orientation or position relationship are that, based on orientation shown in the drawings or position relationship, or the invention product is usually put when using
Orientation or position relationship, are for only for ease of the description present invention and simplify description, rather than indicate or imply signified device or
Element must have specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.This
Outside, term " first ", " second " etc. are only used for distinguishing description, and it is not intended that indicating or implying relative importance.
In the description of the invention, in addition it is also necessary to explanation, unless otherwise clearly defined and limited, term " setting ",
" installation ", " coupling ", " connection " should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or one
Connect body；Can be mechanical connection or electrical connection；Can be joined directly together, can also be indirect by intermediary
It is connected, can is the connection of two element internals.For the ordinary skill in the art, on being understood with concrete condition
State the concrete meaning of term in the present invention.
Fig. 1 shows the structural representation for the reflectivity distribution measuring system that the present embodiment is provided.As shown in figure 1, this hair
The reflectivity distribution measuring system 10 of bright embodiment, including detection light generating device 110, sample stage 120, imaging device 130 with
And control device 140.Wherein, imaging device 130 is coupled with control device 140.
Sample stage 120 is used to place testing sample 200.When testing sample 200 is placed on sample stage 120, imaging device
130 are located at the reflection for the detection light beam that the testing sample 200 placed on sample stage 120 is sent for detection light generating device 110
In propagation path of light.Now, the detection light beam that detection light generating device 110 is sent incides the to be measured of the surface of testing sample 200
Region, the detection light beam reflected by testing sample 200 incides imaging device 130, is imaged in imaging device 130.Imaging dress
Put 130 the reflected light imaging of above-mentioned testing sample 200 is converted into electric signal and be sent to control device 140.
In the present embodiment, above-mentioned testing sample 200 can be coated optical element, it is intended to measure the reflectivity point of film layer
Cloth, for example, it may be the coated optical element in high power laser light drive system.
For example, when testing sample 200 is the platy optical element of plated film, can be by the non-plated film of the platy optical element
Face is directly adhered in sample stage 120 in the inclined plane with predetermined inclination angle.Or, can be by the folder of particular design
Tool, by the clamping of testing sample 200 on sample stage 120, and enables to testing sample 200 to tilt predetermined inclination angle, so that
The detection light beam on the surface of testing sample 200, which must be incided, can be reflected to imaging device 130.In the present embodiment, sample stage 120
It can be three-dimensional manual translation platform or three-D electric translation stage, length side of the testing sample 200 along sample stage 120 can be driven
To, width and short transverse translation.In addition, except realize drive length direction of the testing sample 200 along sample stage 120,
Width and short transverse translation are outer, the angle of inclination of testing sample 200 are adjusted for convenience, sample stage 120 can also be
Electronic rotation translation stage.
It should be noted that the accuracy in order to improve measurement result, and reduce to the progress reflectivity survey of testing sample 200
The scanning times of amount, improve measurement efficiency.It is incident in the embodiment of the present invention different from the metering system of traditional point by point scanning
Detection light beam to the surface of testing sample 200 is preferably collimated light beam, and the Energy distribution of hot spot is uniform, and area is larger.For example,
100mm × 100mm can be reached by inciding the facula area of the detection light beam of testing sample 200, and concrete shape and size can be with
According to the shape and size adjusting on the surface of testing sample 200.It is preferred that, the hot spot of detection light beam is square focus spot, correspondingly, on
It is then square region to state region to be measured, and the surface of whole testing sample 200 is scanned in order to design scanning pattern, so that
Measure the reflectivity distribution on the whole surface of testing sample 200.
In an embodiment of the present embodiment, detection light generating device 110 can be area source, for example, can be
Face battle array Light-Emitting Diode (Light Emitting Diode, LED).When it is face matrix LED to detect light generating device 110, face battle array
It is detection light beam that what LED was sent, which is similar to parallel uniform beam,.Can be according to required light spot shape and size setting face
The number and arrangement mode of matrix LED.In the present embodiment, the luminescence band of face matrix LED can be ultraviolet any ripple to near-infrared
Section, can specifically be selected as needed.
In the another embodiment of the present embodiment, detection light generating device 110 can include light source 101 and light beam is adjusted
Mould preparation block 111, as shown in Figure 1.The incipient beam of light that light source 101 is sent is adjusted to meet preparatory condition through light beam adjusting module 111
Detection light beam after incide the region to be measured on the surface of testing sample 200.Wherein, preparatory condition can be according to specific light source 101
And required light spot shape and size are set.For example, preparatory condition can be wavelength condition or light spot shape and chi
Very little condition, or including wavelength condition and light spot shape and size condition.
Specifically, above-mentioned light source 101 can be area source, for example can be face matrix LED.When light source 101 is area source,
The incipient beam of light sent is to be similar to parallel uniform beam.Now, light beam adjusting module 111 can be arranged as required to.
When need measure testing sample 200 for specific band detection light beam reflectivity distribution situation when, light beam adjust
Mould preparation block 111 can include optical filter 102, the light for filtering out other wavelength beyond above-mentioned specific band.Light source 101 is sent
The detection light beam that is formed after optical filter 102 of incipient beam of light incide the region to be measured on the surface of testing sample 200.This implementation
In example, optical filter 102 can be bandpass filter, for example, can use narrow band pass filter as needed.For example, working as needs measurement
When reflectivity distribution and reflectivity inhomogeneities (peak-to-valley value) of the testing sample 200 under 1053nm, light source 101 can be used
1053nm face matrix LED, light beam adjusting module 111 can include the narrow band pass filter that centre wavelength is 1053nm.
In addition, removing veiling glare for convenience and obtaining given shape and the detection light beam of size, light beam adjusting module 111
Diaphragm 103 can be included, diaphragm 103 includes light hole 1031.The incipient beam of light that light source 101 is sent incides diaphragm 103, passes through
The incipient beam of light of the light hole 1031 of diaphragm 103 incides the surface of testing sample 200 as detection light beam, so that detection light
The light spot shape and size of beam are satisfied by user's request.For example, when above-mentioned light hole 1031 is rectangle, inciding testing sample
The hot spot of 200 detection light beam is rectangular light spot.
It is understood that in a preferred embodiment of the invention, light beam adjusting module 111 can both include optical filter
102, diaphragm 103 is included again, to obtain the detection light beam of specific band, specific light spot shape and size.
In addition, above-mentioned light source 101 can also be laser or laser diode.When light source 101 is laser or laser two
During pole pipe, in order to be stablized and the equally distributed detection light beam of energy, light beam adjusting module 111 can include even mating plate, lead to
Even mating plate is crossed the laser beam that laser or laser diode are sent is adjusted into stable and light beam is uniformly detected.Certainly, this
When in order to further such that inciding the detection light beam on testing sample 200 meets above-mentioned wavelength condition and/or light spot shape
And size condition, light beam adjusting module 111 can also accordingly include optical filter 102 and/or diaphragm 103.
In the present embodiment, imaging device 130 is used under the control of control device 140 reflect on the surface of testing sample 200
Detection light beam formed by optical imagery be converted to electric signal and be sent to control device 140.It should be noted that imaging device
130 operation wavelength should correspond to detect the wavelength of light beam.Specifically, imaging device 130 is preferred to use CCD (Charge-
Coupled Device) imaging sensor, it is specifically as follows the ccd image sensor array for being configured with object lens.In the present embodiment,
Above-mentioned object lens are preferably microspur object lens.To ensure accuracy of detection, the high-sensitive CCD that digit can be selected to be more than 16.Detection
Light beam is incided behind the surface of testing sample 200, and the detection light beam reflected by the surface of testing sample 200 after object lens by being imaged onto
Optical imagery is converted to electric signal and is sent to control device 140 by CCD pixel, the control of control device 140 CCD, in order to enter
One step is analyzed.The reflected image in each region to be measured in testing sample surface is gathered by CCD, further to obtain testing sample surface
Reflectivity distribution, can effectively increase sampling number, improve the resolution ratio of system.
Certainly, in addition to above-mentioned embodiment, in other embodiments of the invention, imaging device 130 can also be used
CMOS (Complementary Metal-Oxide Semiconductor) imaging sensor.
To be measured region of the control device 140 for obtaining testing sample 200 according to the electric signal of the transmission of imaging device 130
Reflected image, the reflectivity distribution data in the surface of testing sample 200 region to be measured are obtained according to reflected image and benchmark image.Its
In, reflected image is image formed by the detection light beam of the region reflection to be measured, and benchmark image is what imaging device 130 was gathered
The image for the detection light beam that detection light generating device 110 is sent.
In the present embodiment, benchmark image can be that the detection light generating device 110 gathered beforehand through imaging device 130 is sent out
The image of the detection light beam gone out, is stored in control device 140.Or, benchmark image can also be each time in measurement process,
The image for the detection light beam that the detection light generating device 110 gathered in real time by imaging device 130 is sent.Certainly, in order to improve
The accuracy of measurement result, benchmark image is preferably to gather in real time.
For example, it is assumed that CCD resolution ratio is N, the gray-value variation of each pixel of image is to have reacted the incidence into CCD
The light intensity change of N number of point of light beam.Therefore, by correspondence picture in the gray value divided by benchmark image of each pixel in reflected image
The gray value of vegetarian refreshments is that can obtain the reflectivity of N number of point on the corresponding testing sample 200 of the pixel.If reflected image is R,
Benchmark image is S, and R (u, v) represents the gray value of pixel (u, v) in reflected image, and S (u, v) represents pixel in benchmark image
The gray value of point (u, v).Reflectivity T (u, v)=R (u, v)/S of N number of point on the corresponding testing sample 200 of pixel (u, v)
(u, v).Assuming that testing sample 200 includes n regions to be measured, each region to be measured is scanned by the system and obtains each to be measured
After the reflected image in region, it can be calculated that the reflectivity of the N × n point on the surface of testing sample 200, so as to obtain treating test sample
The reflectivity distribution on the surface of product 200.Compare these reflectivity, obtain reflection maximum and reflectance minimum, you can obtain
The reflectivity inhomogeneities on the surface of testing sample 200.For example, reflectivity inhomogeneities can be peak-to-valley value, that is, pass through reflection
Rate maximum subtracts reflectance minimum and obtained.
In addition, when above-mentioned sample stage 120 is electronic rotation translation stage, control end and the control of electronic rotation translation stage are filled
140 couplings are put, as shown in Figure 1.Now, control device 140 is additionally operable to send control signal to electronic rotation translation stage to adjust
The spatial attitude for the testing sample 200 being placed on electronic rotation translation stage.Sat assuming that setting up three-dimensional right angle by origin O of arbitrfary point
Mark system, and the incident direction for detecting light beam is defined as X-direction, when the incidence angle for detecting light beam is 45 degree, reflected light
Exit direction is Y direction (Z axis not shown in figure).The spatial attitude of testing sample 200 is facilitated to adjust for convenience, this implementation
In example the electronic rotation translation stage that uses can with the electronic control translation stage of four-degree-of-freedom, i.e., with space X, Y, Z-direction movement from
Rotational freedom by degree and about the z axis.Electronic rotation translation stage can drive testing sample 200 along X-direction, Y direction
And Z-direction movement, when testing sample 200 be positioned on electronic rotation translation stage and testing sample 200 surface perpendicular to XOY
During plane, by control electronic rotation translation stage rotation can drive testing sample 200 along XOY plane clockwise or counterclockwise
Direction is rotated.Or, in order to be able to adjust the spatial attitude of testing sample 200 for greater flexibility, electronic rotation translation stage can also be adopted
With the electronic control translation stage of six degree of freedom, i.e., with space X, Y, the one-movement-freedom-degree of Z-direction and around X-axis, Y-axis, Z axis rotation
The free degree.
When the incident direction for detecting light beam is constant, if the inclination angle of testing sample 200 changes, the side of reflected light
To also therewith changing, and need correspondingly to adjust the position of imaging device 130, reflected with receiving by the surface of testing sample 200
Detection light beam.The position of imaging device 130 is adjusted for convenience, and the reflectivity distribution measuring system 10 that the present embodiment is provided is also
The articles holding table for being used to set imaging device 130 can be included, imaging device 130 is installed on articles holding table and is connected with articles holding table.
The rotary shaft of electronic rotation translation stage is connected by transmission mechanism with articles holding table, with enable imaging device 130 position with
The rotation for the testing sample 200 being placed on electronic rotation translation stage and change, receive the detection light that is reflected by testing sample 200
Beam.
As illustrated in fig. 2, it is assumed that under original state, when the anglec of rotation of electronic rotation translation stage is 0 degree, electronic rotation translation
Platform, articles holding table are set along the propagation path of the detection light beam of the detection outgoing of light generating device 110, when on electronic rotation translation stage
When not placing testing sample 200, the detection light beam of the detection outgoing of light generating device 110, which can be directly incident on, to be placed on articles holding table
Imaging device 130 in.When electronic rotation translation stage drives testing sample 200 to be revolved counterclockwise on XOY plane from original state
When turning 45 degree, the position of articles holding table also with the rotary shaft of electronic rotation translation stage rotation, around the rotation of electronic rotation translation stage
90 degree of axis of rotation so that imaging device 130 is located at position as shown in Figure 1.Now, the spy on testing sample 200 is incided
The incidence angle of light-metering beam is 45 degree, is reflexed to by testing sample 200 in imaging device 130.
In the present embodiment, transmission mechanism is that by articles holding table and the knot of the rotary shaft linkage of electronic rotation translation stage
Structure.Specifically, transmission mechanism can include gear train and connection component, for example, it can include first gear, driving gear set, the
Two gears and connecting rod.First gear is set in the rotating shaft of electronic rotation translation stage, and driving gear set is nibbled with first gear
Close, second gear is engaged with driving gear set, and the central rotating shaft of second gear and the rotating shaft of first gear are coaxially disposed, second
The rotating shaft of gear is connected by connecting rod with articles holding table.Now, during the axis of rotation of electronic rotation translation stage, it is possible to drive
Two pinion rotations, so as to drive articles holding table around the axis of rotation of electronic rotation translation stage by connecting rod.By setting the first tooth
The gearratio of wheel, driving gear set and second gear, can be real when electronic rotation translation stage drives testing sample 200 to rotate
During α angles, articles holding table is driven around the α angles of axis of rotation 2 of electronic rotation translation stage, so that detection light beam is with any incident angle β
When inciding 200 surface of testing sample, the reflected beams can be received by imaging device 130；Treated when electronic rotation translation stage drives
When test sample product 200 are turned back to original state, articles holding table also returns to original state therewith.Wherein, β is more than 0 degree and less than 90 degree.This
Sample is also beneficial to cause when the incidence angle for detecting light beam is different, and the detection light beam reflected by the surface of testing sample 200 can be into
As the same position in imaging device 130, the accuracy of measurement result is favorably improved.It should be noted that being one above
The specific example of transmission mechanism is planted, in addition to said structure, transmission mechanism can also can realize above-mentioned work(using existing other
The structure of energy.
In addition, in other embodiments, the apparatus for adjusting position of imaging device 130 can also be translated independently of electronic rotation
Platform is set, you can to drive the angle that testing sample 200 is rotated, that is, current incident detection according to electronic rotation translation stage
The angle of emergence of light beam, controls above-mentioned apparatus for adjusting position to adjust the position of imaging device 130 so that what testing sample 200 reflected
Detection light beam can be received by imaging device 130., for example can be with for example, apparatus for adjusting position can be achieved by the prior art
Including motor, arc track, connecting rod etc..
In the present embodiment, control device 140 can be preferably computer.Certainly, control device 140 can also be monolithic
Machine, DSP, ARM or FPGA etc. have the chip of data processing function.
It should be noted that in the system, in order to reduce on influence of the diffusing reflection to measurement result of light beam, diaphragm 103
Black coating can be coated.In addition, when the system is provided with encapsulating housing, the inwall of encapsulating housing can also coat black painting
Layer.
Compared to prior art, reflectivity distribution measuring system 10 provided in an embodiment of the present invention passes through imaging device 130
The detection light beam of region reflection to be measured to the surface of testing sample 200 is imaged, and imaging is converted into electric signal transmission
To control device 140.Then the reflected image that the electric signal obtains region to be measured is handled by control device 140, and further
The reflectivity distribution data in the surface of testing sample 200 region to be measured are obtained according to the reflected image and benchmark image.So can
The sample rate of system is effectively improved, detection time is reduced, measurement efficiency is improved.
In addition, the embodiment of the present invention additionally provides a kind of reflectivity distribution measuring method, applied to above-mentioned reflectivity point
Cloth measuring system 10.Fig. 3 shows the flow chart of reflectivity distribution measuring method provided in an embodiment of the present invention.As shown in figure 3,
This method includes：
Step S110, control sample stage moves so that the detection light beam that sends of detection light generating device to preset incidence angle
Each region to be measured of testing sample to being positioned on sample stage is scanned；
When the inclination angle for the testing sample 200 being positioned on sample stage 120 is fixed, that is to say, that incide testing sample
The timing of incidence angle one of the detection light beam on 200 surfaces, by the position of mobile testing sample 200, realizes detection light beam to be measured
The scanning in each region to be measured in the surface of sample 200.Specifically, can be according to the shape of light spot shape, size and testing sample 200
Shape, size design scanning pattern.
When the inclination angle for the testing sample 200 being positioned on sample stage 120 can arbitrarily be adjusted, for example, working as sample stage
120 be electronic rotation translation stage when, can first control electronic rotation translation stage adjust testing sample 200 spatial attitude so that
Detect light beam with default incident angles to the surface of testing sample 200, reflex to imaging device 130.
When sample stage 120 is electronic rotation translation stage, as shown in figure 4, step S110 can be specifically included：
Step S111, obtains the shape and sized data of testing sample；
In the present embodiment, the shape and size data of current testing sample 200 can be inputted by input unit.For example,
When control device 140 is computer, input unit can be keyboard or mouse or touch-screen.For example, working as testing sample
200 when being shaped as rectangle of surface to be measured, sized data can include length and width and area.
Step S112, the light spot shape of detection light beam and sized data sent according to detection light generating device, treats test sample
The shape and sized data and default incidence angle of product obtain scanning pattern；
The light spot shape and sized data for the detection light beam that detection light generating device 110 is sent can be stored in advance in control
In device 140 processed.Or, the benchmark image of light beam can also be detected by the collection in real time of imaging device 130, then passes through control
140 pairs of benchmark images of device processed carry out light spot shape and sized data that image procossing obtains detecting light beam.Or, may be used also
To input the light spot shape and sized data of detection light beam in real time by input unit.Wherein, scanning pattern can include scanning
Direction, and the i.e. mobile number of times of number of times that each side is scanned up can cover whole testing sample 200 as far as possible.
Step S113, driving electronic rotation translation stage control testing sample turns to predeterminated position, to cause detection light production
The detection light beam that generating apparatus is sent is with default incident angles to testing sample surface；
It is pre- that control device 140 controls electronic rotation translation stage to drive testing sample 200 to turn to according to default incidence angle
If position so that the detection light beam that detection light generating device 110 is sent is with default incident angles to the surface of testing sample 200.
Incidence angle can be specifically a fixed angle, or, it can also be arranged as required to.
Step S114, driving electronic rotation translation stage control testing sample is moved with above-mentioned scanning pattern, to cause detection
The detection light beam that light generating device is sent incides each region to be measured on testing sample surface with default incidence angle successively.
Step S120, receives what each region to be measured in testing sample surface was reflected according to benchmark image and imaging device
The reflected image in the region to be measured sent after detection light beam obtains the reflectivity distribution data on testing sample surface.
Wherein, the figure for the detection light beam that benchmark image sends for the detection light generating device 110 that imaging device 130 is gathered
Picture.Benchmark image can be stored in control device 140 or real-time collection after gathering in advance.Work as reference map
As for gather in real time when, the step of gathering benchmark image by imaging device 130 can occur in collection testing sample 200
Before the reflected image in each region to be measured, can also occur the reflection in each region to be measured for having gathered testing sample 200
After image.Due to gather testing sample 200 each region to be measured reflected image when, adjust testing sample 200 posture
Need to take some time, it is contemplated that the stability of light source 101 and imaging device 130, can preferably first pass through imaging device
130 collection benchmark images, then gather the reflectogram in each region to be measured of testing sample 200 by the imaging device 130 again
Picture, is so conducive to improving the accuracy of measurement result.
Control device 140 get the collection of imaging device 130 benchmark image and certain testing sample 200 each is to be measured
After the reflected image in region, the table of testing sample 200 is obtained according to the reflected image of benchmark image and each region to be measured respectively
The reflectivity distribution in each region to be measured in face, so as to obtain the reflectivity distribution data on the surface of testing sample 200.Enter one
Step, compares these reflectivity, obtains reflection maximum and reflectance minimum, you can obtain the surface of testing sample 200
Reflectivity inhomogeneities.
It is apparent to those skilled in the art that, for convenience and simplicity of description, the method for foregoing description
Specific work process, may be referred to the corresponding process in aforementioned system, device and unit embodiment, will not be repeated here.
The foregoing is only a specific embodiment of the invention, but protection scope of the present invention is not limited thereto, any
Those familiar with the art the invention discloses technical scope in, change or replacement can be readily occurred in, should all be contained
Cover within protection scope of the present invention.Therefore, protection scope of the present invention described should be defined by scope of the claims.
Claims (10)
1. a kind of reflectivity distribution measuring system, it is characterised in that including detection light generating device, sample stage, imaging device with
And control device, the sample stage is for placing testing sample, and it is to be measured that the imaging device is placed on the sample stage
Sample for it is described detection light generating device send detection light beam reflected light travels path in, the imaging device with it is described
Control device is coupled；
When testing sample is placed on the sample stage, the detection light beam that the detection light generating device is sent incides described treat
Survey the region to be measured of sample surfaces, the detection light beam reflected by the testing sample incides the imaging device, it is described into
As imaging is converted into electric signal and is sent to the control device in device；
The control device is used for the reflected image that the region to be measured is obtained according to the electric signal, according to the reflected image
And benchmark image obtains the reflectivity distribution data in the testing sample surface region to be measured, wherein, the benchmark image is institute
State the image for detecting light beam that the detection light generating device of imaging device collection is sent.
2. reflectivity distribution measuring system according to claim 1, it is characterised in that the detection light generating device includes
Light source and light beam adjusting module, the incipient beam of light that the light source is sent are adjusted to meet preparatory condition through the light beam adjusting module
Detection light beam after incide the region to be measured on the testing sample surface.
3. reflectivity distribution measuring system according to claim 2, it is characterised in that the light beam adjusting module includes filter
Mating plate, the detection light beam that the incipient beam of light that the light source is sent is formed after the optical filter, which is incided, described treats test sample
The region to be measured on product surface.
4. reflectivity distribution measuring system according to claim 2, it is characterised in that the light beam adjusting module includes light
Door screen, the incipient beam of light that the light source is sent incides the diaphragm, and institute is used as by the incipient beam of light of the light hole of the diaphragm
State detection light beam and incide the testing sample surface.
5. reflectivity distribution measuring system according to claim 2, it is characterised in that the light source is face matrix LED.
6. reflectivity distribution measuring system according to claim 1, it is characterised in that the sample stage is flat for electronic rotation
Moving stage, the control end of the electronic rotation translation stage is coupled with the control device, and the control device is additionally operable to send control
Signal is to the electronic rotation translation stage to adjust the spatial attitude for the testing sample being placed on the electronic rotation translation stage.
7. reflectivity distribution measuring system according to claim 6, it is characterised in that also including articles holding table, the imaging
Device is arranged on the articles holding table and is connected with the articles holding table, and the rotary shaft of the electronic rotation translation stage passes through driver
Structure is connected with the articles holding table, with enable the imaging device position with being placed in treating on the electronic rotation translation stage
The rotation of test sample product and change, receive the detection light beam that is reflected by the testing sample.
8. reflectivity distribution measuring system according to claim 1, it is characterised in that the imaging device is schemed including CCD
As sensor array.
9. a kind of reflectivity distribution measuring method, it is characterised in that applied to the reflectivity any one of claim 1-8
Distribution measurement system, methods described includes：
Control sample stage moves so that the detection light beam that sends of detection light generating device with default incidence angle to being positioned over
Each region to be measured of testing sample on the sample stage is scanned；
The detection that each region to be measured in the testing sample surface is reflected is received according to benchmark image and imaging device
The reflected image in the region to be measured sent after light beam obtains the reflectivity distribution data on the testing sample surface, wherein, institute
State the image for the detection light beam that benchmark image sends for the detection light generating device that the imaging device is gathered.
10. method according to claim 9, it is characterised in that the sample stage is electronic rotation translation stage, the control
Sample stage moves so that the detection light beam that sends of detection light generating device with default incidence angle to being positioned over the sample
Each region to be measured of testing sample on platform is scanned, including：
Obtain the shape and sized data of testing sample；
The light spot shape and sized data, the shape of the testing sample of the detection light beam sent according to the detection light generating device
Shape and sized data and the default incidence angle obtain scanning pattern；
The electronic rotation translation stage is driven to control the testing sample to turn to predeterminated position, to cause the detection light to produce
The detection light beam that device is sent is with the default incident angles to the testing sample surface；
The electronic rotation translation stage is driven to control the testing sample to be moved with the scanning pattern, to cause the detection light
The detection light beam that generation device is sent incides each region to be measured on the testing sample surface with the default incidence angle successively.
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| CN110763657A (en) * | 2019-11-20 | 2020-02-07 | 江苏赛诺格兰医疗科技有限公司 | Photoelectric digital conversion system for reflective material reflectivity test system |
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