JP6908373B2 - A method for inspecting the surface irregularities of an object to be inspected and its surface inspection device - Google Patents

Description

The present invention relates to a method for inspecting unevenness on the surface of an object to be inspected and a surface inspection device thereof.

As a method of inspecting the unevenness of the surface of the inspection object, there is a method of irradiating the surface of the inspection object with illumination consisting of parallel rays and inspecting the unevenness of the surface of the inspection object from the reflected light. However, in order to create parallel light in a wide range using a lens or the like, there is a problem that the device to be used is large and heavy, and the entire device becomes large-scale.

Further, as shown in FIG. 9, the irradiation light 130 of the striped pattern 131 is projected from the irradiation device 120 onto a wide range of the surface 151 of the inspection object 150, and the reflected light 140 is photographed to obtain a striped pattern. There is one that inspects the unevenness of the surface 151 of the inspection object 150 from the disorder of the pattern 131 (see, for example, Patent Documents 1 and 2). However, in this case, it is not possible to recognize from which position of the irradiation device 120 the reflected light 140 is the light emitted, and therefore, the captured image may be subjected to advanced image processing. Therefore, image processing takes time and the device becomes large.

Further, as shown in FIG. 10, there is an apparatus for inspecting the unevenness of the surface 251 of the inspection object 250 by using an irradiation device 220 having a red light source 221 and a blue light source 223 and a green light source 222 (for example,). See Patent Document 3). In this case, the reflected light reflected from the surface 251 of the inspection object 250 is diffracted by the prism 234 and imaged by the red CCD 231 and the blue CCD 232 and the green CCD 233 of the imaging unit 230 to perform image processing. It is said.
In this case, a red light source 221, a blue light source 223, and a green light source 224 are required, respectively, and the apparatus becomes large.

Japanese Unexamined Patent Publication No. 2014-2041 Japanese Unexamined Patent Publication No. 2016-130695 Japanese Unexamined Patent Publication No. 2010-112941

Therefore, the present invention is intended to provide an inspection method and the apparatus capable of quickly and surely inspecting even minute irregularities due to the small size of the apparatus.

In order to solve the above problem, the present invention of claim 1 is a method of inspecting the unevenness of the surface of an object to be inspected, in which a plurality of colors are emitted from an irradiation device having the same color at a predetermined angle, and each color is emitted. The irradiation light emitted by the parallel light is the diffracted light in which the light from one white light source is transmitted through the holographic diffractive optical element and the red, green, and blue colors continuously change, and the irradiation light is used as the inspection object. The surface of the inspection target is irradiated to detect the reflected light from the surface of the inspection target, and the color of the reflected light changes between the uneven portion of the surface of the inspection target and the surface of the other inspection target. It is a method of inspecting the unevenness of the surface of the light.

In the present invention of claim 1, in the method of inspecting the unevenness of the surface of the inspection object, a plurality of colors are emitted from the same irradiation device at a predetermined angle, and each color is irradiated with parallel light. As the irradiation light, the diffracted light in which the light from one white light source is transmitted through the holographic diffractive optical element and the red, green, and blue colors are continuously changed is used, and the irradiation light is applied to the surface of the inspection object. Therefore, it is possible to irradiate light from the same illumination position at different angles for each color, the irradiation device can be miniaturized, and the space for placing the inspection device can be reduced.
Multiple colors are emitted at a predetermined angle, and each color is irradiated with parallel light. The irradiation light uses diffracted light transmitted or reflected from one white light source to a holographic diffractive optical element. do. Therefore, the holographic diffraction optical element can easily create an irradiation light in which a plurality of colors are radiated at a predetermined angle and each color is irradiated with parallel light. Further, the holographic diffraction optical element has flexibility and can be bent according to the inspection object, and can surely irradiate the inspection object having a surface with irradiation light.
In order to increase the intensity of the diffracted light, it is preferable to use a phase modulation type volumetric hologram as the holographic diffraction optical element.

Detects the unevenness of the surface of the object to be inspected by detecting the reflected light from the surface of the object to be inspected, and inspects the unevenness of the surface of the object to be inspected by changing the color of the reflected light between the uneven part of the surface of the object to be inspected and the surface of another object to be inspected. .. Therefore, since the unevenness of the surface of the inspection object can be inspected by changing the color of the reflected light, no special image processing is required, the inspection is easy, and the inspection speed can be increased.

According to the second aspect of the present invention, the holographic diffraction optical element is a method for inspecting the unevenness of the surface of an inspection object in which a plurality of diffraction regions having different diffraction angles are arranged.

In the present invention of claim 2 , since the holographic diffraction optical element arranges a plurality of diffraction regions having different diffraction angles, the reflected light can be observed as a color stripe pattern, and the surface of the inspection object is fine. Even with respect to the change, it can be reliably observed as a color change of the striped pattern, and the unevenness of the surface can be easily found.

According to the third aspect of the present invention, the surface of the inspection object is inspected over a wide area of the surface of the inspection object by moving the inspection object with respect to the irradiation light or moving the irradiation light with respect to the inspection object. It is a method of inspecting the unevenness of.

In the present invention of claim 3 , the surface of the inspection object is inspected over a wide area of the surface of the inspection object by moving the inspection object with respect to the irradiation light or moving the irradiation light with respect to the inspection object. Inspect the unevenness of. Therefore, the surface of a large inspection object can be reliably and quickly inspected with one device.

According to the fourth aspect of the present invention, the reflected light is photographed with a camera, the photographed reflected light data is recorded, and the surface of the inspection object is inspected based on the recorded data. The method.

In the present invention of claim 4 , the reflected light is photographed by a camera, the data of the photographed reflected light is recorded, and the surface of the inspection object is inspected based on the recorded data. Therefore, it is possible to inspect the object away from the inspection object, and it is possible to automatically inspect using the automatic determination device based on the recorded data.

According to the fifth aspect of the present invention, the reflected light is photographed by a camera, the photographed reflected light data is recorded, the color change is automatically determined based on the recorded data, and the surface of the inspection object is inspected. It is a method of inspecting the unevenness of the surface of the described inspection object.

In the present invention of claim 5 , the reflected light is photographed by a camera, the photographed reflected light data is recorded, the color change is automatically determined based on the recorded data, and the surface of the inspection object is inspected. .. Since the unevenness of the surface of the inspection object is judged based on the change in color, the inspection can be reliably and quickly performed without the need for special image processing.

According to the sixth aspect of the present invention, the inspection object is a method for inspecting the unevenness of the surface of the inspection object, which is the painted surface of the vehicle body of an automobile.

In the present invention of claim 6 , since the inspection object is a painted surface of an automobile body, it has a large area and a curved surface, but it is wide because parallel light can be irradiated from various directions. The area can be inspected quickly.

The present invention of claim 7 is a surface inspection apparatus for inspecting the unevenness of the surface of an object to be inspected.
A light source, an irradiation device in which a plurality of colors emit light emitted from the light source, each color is emitted at a predetermined angle, and each color is converted into irradiation light emitted in parallel light and irradiated.
The light source is a white light source, and the irradiation device uses diffracted light in which the light from the white light source is transmitted through the holographic diffractive optical element and continuously changes in red, green, and blue. Is the irradiation light emitted at a predetermined angle and emitted with parallel light for each color.
The irradiation light emitted from the irradiation device detects the reflected light reflected from the inspection object, and the inspection is performed by the color change of the reflected light between the uneven portion of the surface of the inspection object and the surface of another inspection object. It is a surface inspection device that inspects the unevenness of the surface of an object.

According to the seventh aspect of the present invention, in the surface inspection apparatus for inspecting the unevenness of the surface of the object to be inspected.
It has a light source and an irradiation device that converts a plurality of colors of light emitted from the light source into irradiation light in which each color is emitted at a predetermined angle and is emitted in parallel light for each color. Therefore, it is possible to irradiate light in different directions for each color from the same illumination position, the irradiation device can be miniaturized, and the space for placing the inspection device can be reduced.
The light source is a white light source, and the irradiation device uses diffracted light in which the light from the white light source is transmitted through the holographic diffractive optical element and continuously changes in red, green, and blue. Is the irradiation light emitted at a predetermined angle and emitted with parallel light for each color.
The light source is a white light source, and the irradiation device uses diffracted light transmitted from the white light source through the holographic diffractive optical element. The irradiation light is emitted with parallel light. Since the light source is a white light source, a multi-type light source can be used.
Since the holographic diffractive optical element is used, it is possible to easily create an irradiation light in which a plurality of colors are emitted in parallel for each color and irradiated with parallel light for each color. Due to the transmitted diffracted light, the unevenness of the surface of the inspection object can be reliably inspected. Further, the holographic diffraction optical element has flexibility and can be bent according to the inspection object, and can surely irradiate the inspection object having a surface with irradiation light.

The irradiation light emitted from the irradiation device detects the reflected light reflected from the inspection object, and the inspection is performed by the color change of the reflected light between the uneven portion of the surface of the inspection object and the surface of another inspection object. Inspect the surface irregularities of the object. Therefore, since the unevenness of the surface of the inspection object can be inspected by changing the color of the reflected light, no special image processing is required, the inspection is easy, and the inspection speed can be increased.

According to the eighth aspect of the present invention, the holographic diffraction optical element is a surface inspection device in which a plurality of diffraction regions having different diffraction angles are arranged.

In the present invention of claim 8 , since the holographic diffraction optical element arranges a plurality of diffraction regions having different diffraction angles, the reflected light can be observed as a color stripe pattern, and the surface of the inspection object is fine. Even with respect to the change, it can be reliably observed as a color change of the striped pattern, and can be easily detected.

The present invention of claim 9 is a surface inspection device having a driving device that moves the irradiation light with respect to the irradiation light, or a driving device that moves the irradiation light with respect to the inspection object.

In the present invention of claim 9 , since the inspection object has a driving device that moves with respect to the irradiation light, or has a driving device that moves the irradiation light with respect to the inspection object, the surface of the large inspection object. Can be inspected reliably and quickly.

The present invention of claim 10 is a surface inspection device having a camera for photographing reflected light, having a recording device for recording the photographed reflected light data, and inspecting the surface of an inspection object based on the recorded data. be.

According to the tenth aspect of the present invention, the present invention has a camera for photographing the reflected light, a recording device for recording the photographed reflected light data, and inspects the surface of the inspection object based on the recorded data. Therefore, it is possible to inspect the object away from the inspection object, and it is possible to automatically inspect using the automatic determination device based on the recorded data.

The eleventh aspect of the present invention includes a camera that captures reflected light, a recording device that records the captured reflected light data, and a surface having a determination device that automatically determines a color change based on the recorded data. It is an inspection device.

The eleventh aspect of the present invention includes a camera that captures reflected light and a recording device that records the captured reflected light data, and automatically determines a color change based on the recorded data. Therefore, the unevenness of the surface of the inspection object can be determined based on the change in color, and the inspection can be reliably and quickly performed without the need for special image processing.

According to the twelfth aspect of the present invention, the object to be inspected is a surface inspection device which is a painted surface of an automobile body.

In the present invention of claim 12 , since the inspection object is a painted surface of an automobile body, it has a large area and a curved surface, but it is wide because parallel light can be irradiated from various directions. The area can be inspected quickly.

Since multiple colors are emitted from the same irradiation device in parallel for each color and the surface of the inspection object is irradiated with the irradiation light emitted by the parallel light for each color, different directions for each color from the same illumination position. It is possible to irradiate the light, the irradiation device can be miniaturized, and the space for placing the inspection device can be reduced.

Detects the unevenness of the surface of the object to be inspected by detecting the reflected light from the surface of the object to be inspected, and inspects the unevenness of the surface of the object to be inspected by changing the color of the reflected light between the uneven part of the surface of the object to be inspected and the surface of another object to be inspected. Therefore, since the unevenness of the surface of the inspection object can be inspected by changing the color of the reflected light, no special image processing is required, the inspection is easy, and the inspection speed can be increased.

It shows the embodiment of this invention, and is the schematic diagram which shows the whole structure of the surface inspection apparatus. It shows another embodiment of this invention, and is the schematic diagram which shows the whole structure of the surface inspection apparatus. It shows the embodiment of this invention and is a graph which shows the diffraction angle for each wavelength of a holographic diffraction optical element. It shows the embodiment of this invention, and is the schematic diagram which shows the irradiation light and the reflected light at the time of irradiating the plane inspection object with the irradiation light from a holographic diffraction optical element. The embodiment of the present invention is shown, and it is a schematic diagram which shows the irradiation light and the reflected light when the irradiation light is irradiated to the slope-shaped inspection object from the holographic diffraction optical element. It shows the embodiment of this invention, and is the schematic diagram which shows the color change of the convex part at the time of irradiating the horizontal inspection object with the irradiation light from the holographic diffraction optical element. It shows the embodiment of this invention, and is the schematic diagram which shows the color change of the convex part at the time of irradiating the inspection object which inclined the irradiation light from the holographic diffraction optical element. The embodiment of the present invention is shown, and it is a schematic diagram which shows the irradiation light and the reflected light at the time of irradiating the inspection object with irradiation light from a plurality of diffraction regions of a holographic diffraction optical element. It is a schematic diagram which shows the whole structure of the conventional surface inspection apparatus. It is a schematic diagram which shows the whole structure of the other conventional surface inspection apparatus.

Embodiments of the present invention will be described with reference to FIGS. 1 to 8.
As shown in FIG. 1, the surface inspection apparatus of the present invention irradiates the holographic diffraction optical element 20 that irradiates the surface 51 of the inspection object 50 with the irradiation light 30 and the holographic diffraction optical element 20 with light. It has a white light source 10 which is a light source, and inspects the reflected light 40 from the surface 51 of the inspection object 50.

Further, as shown in FIG. 2, a camera 60 for capturing the reflected light 40 from the surface 51 of the inspection object 50 can be provided, and an image data recording device 61 for recording the image data from the camera 60 can be provided. Based on the data from the image data recording device 61, the unevenness inspection, which is the defect information of the surface 51, can be automatically performed by the color information of the reflected light 40 from the surface 51 of the inspection object 50.
As shown in FIG. 1, when the data of the camera 60 is not automatically determined, the reflected light 40 can be visually inspected.

An LED light source can be used as the white light source. When an LED light source is used, a blue light emitting LED can be applied to a yellow phosphor to make it white. Further, an LED element that emits red, green, and blue can also be used. When an LED light source is used, strong light can be obtained at a stable wavelength.
As the white light source, xenon light, halogen light, laser light or the like can also be used.

Hereinafter, as the holographic diffraction optical element 20, a transmission type holographic diffraction optical element in which the diffracted light becomes transmitted light will be described.
Further, the holographic diffraction optical element 20 can be formed in the form of a flexible sheet made of a translucent soft plastic, and can be curved according to the shape of the inspection object 50. Further, since the holographic diffraction optical element 20 is translucent, a camera 60 or the like can be placed behind the holographic diffraction optical element 20 for observation.

The diffraction efficiency of the holographic diffraction optical element 20 is shown in FIG. The line connecting the triangles in FIG. 3 shows blue with a wavelength of 450 nm, the line connecting circles shows green with a wavelength of 532 nm, and the line connecting squares shows red with a wavelength of 635 nm. The diffraction angle of the holographic diffraction optical element 20 is larger than the diffraction angle of the prism, and each color can be sharply separated.
In this way, when the holographic diffraction optical element 20 is used and diffracted, it is possible to obtain light having a distinctly different diffraction angle for each color.

Therefore, as shown in FIG. 4, the light emitted from the holographic diffraction optical element 20 is irradiated at different angles for each of the red component 30a, the green component 30b, and the blue component 30c of the irradiation light 30, and the red component 30a. , The green component 30b and the blue component 30c are irradiated in parallel at the same angle in the same color.

As shown in FIG. 4, when the surface 51 of the inspection object 50 placed horizontally is irradiated with the irradiation light 30 emitted from the holographic diffraction optical element 20, the red component 30a, the green component 30b, and the blue component 30c of the irradiation light 30 are irradiated. Each has a different angle from the holographic diffraction optical element 20. The red component 30a has the largest diffraction angle, the blue component 30c originally has a small diffraction angle, and the green component 30b has an intermediate diffraction angle. The red component 30a, the green component 30b, and the blue component 30c are irradiated in parallel from the holographic diffraction optical element 20 between the red components 30a, the green components 30b, and the blue components 30c, respectively.
In the present embodiment, the irradiation light 30 used is one that changes in parallel vertically or horizontally, but one that changes in an arch shape or a ring-shaped striped pattern can be used.

Further, the holographic diffraction optical element 20 can be moved to widely inspect the surface 51 of the inspection object 50, or the wide surface 51 of the large inspection object 50 to move the inspection object 50 can be inspected. .. A conveyor, a single-axis or multi-axis robot cylinder, an articulated robot, or the like can be used to move the surface 51 of the inspection target 50 and the inspection target 50. In this case, it can be programmed to move automatically according to the shape of the inspection object 50.

The reflected light 40 reflected from the surface 51 of the inspection object 50 placed horizontally has a different reflection angle for each color. Therefore, when the camera 60 is placed in a predetermined place, only the reflected light 40 of a specific color can be seen from the reflected light 40 from the flat surface 51. In FIG. 4, the reflected light 40 can see only the green component 40b. It can be visually confirmed without using the camera 60. When the eye is placed on the camera 60, the surface 51 of the inspection object 50 appears green.

Further, as shown in FIG. 5, the reflected light 40 reflected from the surface 51 of the inspection object 50 placed at an angle has a different reflection angle for each color. Therefore, when the camera 60 is placed in a predetermined place, only the reflected light 40 of a specific color, that is, the red component 30a can be seen among the reflected light 40 from the flat surface 51. The blue component 30c of the reflected light 40 is out of the field of view of the camera 60. Visually, when the eyes are placed on the camera 60, the surface 51 of the inspection object 50 appears red.

Therefore, as shown in FIG. 6, when the surface 51 of the inspection object 50 has the convex portion 52, the holographic diffraction optical light is applied to the surface 51 of the inspection object 50 placed horizontally as in the case of FIG. When the irradiation light 30 emitted from the element 20 is irradiated, the surface 51 other than the convex portion 52 reflects only the green component 40b to the camera 60, and the surface 51 other than the convex portion 52 turns green. appear.

On the other hand, in the portion of the convex portion 52 of the inspection object 50, since the surface of the convex portion 52 is formed in an arc shape, the reflection angle of the reflected light 40 is different from that of the flat surface.
Therefore, the blue component 40c is reflected on the left side of the surface of the convex portion 52 in FIG. 6 and looks blue, and the red component 40a is reflected on the right side and looks red. Depending on the angle of the reflected light 40 of the convex portion 52, the reflected light 40 may be out of the field of view, and the convex portion 52 may appear dark.
Therefore, the unevenness of the surface 51 of the inspection object 50 can be identified by a color different from that of the portion other than the unevenness, and it is easy to find the uneven portion which is a defective part of the surface 51 of the inspection object 50. be.

Further, as shown in FIG. 7, when the surface 51 of the inspection object 50 placed diagonally has the convex portion 52, the surface 51 of the inspection object 50 placed diagonally has the same as the case shown in FIG. When the irradiation light 30 emitted from the holographic diffraction optical element 20 is irradiated, the surface 51 other than the convex portion 52 reflects only the red component 40a to the camera 60, and the surface other than the convex portion 52. 51 looks red.

On the other hand, in the portion of the convex portion 52 of the inspection object 50, since the surface of the convex portion 52 is formed in an arc shape, the reflection angle of the reflected light 40 is different from that of the flat surface.
Therefore, the green component 40b is reflected on the left side of the surface of the convex portion 52 in FIG. 7 and looks green, and the blue component 40c is reflected on the right side and looks blue.
Therefore, even a slight difference in the angle of the unevenness of the surface 51 of the surface 51 of the inspection object 50 can be distinguished from the portion other than the unevenness by a different color, and it is easy to find the uneven portion which is a defective portion.

In this way, regardless of whether the surface 51 of the inspection object 50 is horizontal or tilted, if there is unevenness, light of a color different from the surrounding color can be reflected, and the holographic diffraction optical element 20 can be placed at the same position. Also, both sides can be inspected. Therefore, even if the surface 51 of the inspection object 50 is curved, it can be easily inspected.

When the incident light on the camera 60 is not parallel light, the captured image has a striped gradation in which red, green, and blue continuously change. The change is different in the unevenness. For example, the unevenness can be clearly determined by calculating the chromaticity of the HSV display.

Next, a case where a plurality of diffraction regions of the holographic diffraction optical element 20 are arranged will be described with reference to FIG. In the present embodiment, for example, the holographic diffraction optical element 20 in which eight elements having a bar region having a length of 1.6 mm in the vertical direction and a length of 50 mm in the width direction are arranged is used.
For each analysis region, it is possible to create a holographic diffraction optical element 20 in which the angle of each analysis region is arbitrarily changed.

Then, in this embodiment, each bar region is produced so that the green wavelength (532 nm) has a different diffraction angle by 3 degrees from -10.5 degrees to +10.5 degrees. Similarly, the red wavelength and the blue wavelength are produced so that the diffraction angles differ according to the change in the green wavelength. As a result, striped patterns of red, green, and blue patterns are repeatedly generated at a distance of about 30 mm, a steep color change can be given, and the color change of the uneven portion can be made clearer. ..

As shown in FIG. 8, when the irradiation light 31 emitted from the first diffraction region 21 of the holographic diffraction optical element 20 is irradiated, the angles of the blue component 31a, the green component 31b, and the red component 31c of the irradiation light 31 are different from each other. ..
Further, when the irradiation light 32 emitted from the second diffraction region 22 of the holographic diffraction optical element 20 is irradiated, the angles of the blue component 32a, the green component 32b, and the red component 32c of the irradiation light 32 are different from each other.

When the surface 51 of the inspection object 50 placed horizontally is irradiated with the irradiation light 31 and the irradiation light 32 emitted from the holographic diffraction optical element 20, the flat surface 51 other than the convex portion 52 has the reflected light 41 and the reflected light 42. Reflects the blue components 41a and 42a, the green components 41b and 42b, and the red components 41c and 42c as a striped pattern in response to the change in color emitted from the holographic diffraction optical element 20.

On the other hand, in the portion of the convex portion 52 of the inspection object 50, since the surface of the convex portion 52 is formed in an arc shape, the reflection angle of the reflected light 40 is different from that of the flat surface.
Therefore, the reflected light reflected from the surface of the convex portion 52 in FIG. 8 is observed as the light of the red component 41c from a predetermined angle, and the light of the red component 41c reflected from the convex portion 52 of the inspection object 50 is green. It is possible to observe the color change by entering between the components 42b and disturbing the striped pattern of the blue component 41a and the green component 42b. Therefore, even if the surface 51 of the inspection object 50 is minutely changed, the reflection angle changes and the inspection can be performed reliably as a color change, and the unevenness of the surface 51 can be easily found.

10 White light source 20 Holographic diffraction optical element 21 Diffraction first region 22 Diffraction second region 30 Irradiation light 40 Reflected light 50 Inspection object 51 Surface 52 Convex part

Claims (12)

In the method of inspecting the unevenness of the surface of the object to be inspected,
Each color is emitted from the same irradiation device with multiple colors at a predetermined angle, and the irradiation light emitted by parallel light for each color is red that transmits the light from one white light source to the holographic diffractive optical element. , Green and blue are continuously changed , and the surface of the inspection object is irradiated with the irradiation light to detect the reflected light from the surface of the inspection object, and the inspection object is detected. A method for inspecting the unevenness of the surface of the inspection object by changing the color of the reflected light between the uneven portion of the surface and another surface of the inspection object. The method for inspecting the surface irregularities of an inspection object according to claim 1 , wherein the holographic diffraction optical element has a plurality of diffraction regions having different diffraction angles arranged. According to claim 1 or 2 , the inspection object is moved with respect to the irradiation light, or the irradiation light is moved with respect to the inspection object to inspect a wide area of the surface of the inspection object. A method for inspecting the surface irregularities of the described object to be inspected. The present invention according to any one of claims 1 to 3 , wherein the reflected light is photographed with a camera, the photographed data of the reflected light is recorded, and the surface of the inspection object is inspected based on the recorded data. A method of inspecting the surface irregularities of an object to be inspected. The fourth aspect of claim 4, wherein the reflected light is photographed by a camera, the photographed data of the reflected light is recorded, a color change is automatically determined based on the recorded data, and the surface of the inspection object is inspected. A method of inspecting the surface irregularities of an object to be inspected. The method for inspecting the surface irregularities of the inspection object according to any one of claims 1 to 5 , wherein the inspection object is a painted surface of an automobile body. In a surface inspection device that inspects the surface irregularities of an object to be inspected,
A light source, an irradiation device in which a plurality of colors emit light emitted from the light source, each color is emitted at a predetermined angle, and each color is converted into irradiation light emitted in parallel light and irradiated.
The light source is one white light source, and the irradiation device is a diffracted light in which the light from the white light source is transmitted through the holographic diffractive optical element and the red, green, and blue colors are continuously changed. , Multiple colors are irradiation lights in which each color is emitted at a predetermined angle and each color is irradiated with parallel light.
The irradiation light emitted from the irradiation device detects the reflected light reflected from the inspection object, and the color of the reflected light between the uneven portion of the surface of the inspection object and the other surface of the inspection object. A surface inspection device that inspects the surface irregularities of the inspection object due to changes in the above. The surface inspection apparatus according to claim 7 , wherein the holographic diffraction optical element is a plurality of diffraction regions having different diffraction angles. The surface inspection according to claim 7 or 8 , wherein the inspection object has a driving device that moves with respect to the irradiation light, or has a driving device that moves the irradiation light with respect to the inspection object. Device. 7. The surface inspection apparatus according to one item. The surface according to claim 10 , further comprising a camera that captures the reflected light, a recording device that records the captured data of the reflected light, and a determination device that automatically determines a color change based on the recorded data. Inspection equipment. The surface inspection device according to any one of claims 7 to 11 , wherein the inspection object is a painted surface of an automobile body.

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