WO2015039360A1 - Alignment device and method for air-floating-type liquid crystal substrate - Google Patents

Alignment device and method for air-floating-type liquid crystal substrate Download PDF

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Publication number
WO2015039360A1
WO2015039360A1 PCT/CN2013/084174 CN2013084174W WO2015039360A1 WO 2015039360 A1 WO2015039360 A1 WO 2015039360A1 CN 2013084174 W CN2013084174 W CN 2013084174W WO 2015039360 A1 WO2015039360 A1 WO 2015039360A1
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Prior art keywords
liquid crystal
crystal substrate
air
heating platform
heating
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PCT/CN2013/084174
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French (fr)
Chinese (zh)
Inventor
宋涛
刘明
马涛
赵国栋
刘一俊
陈方甫
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深圳市华星光电技术有限公司
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Publication of WO2015039360A1 publication Critical patent/WO2015039360A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation

Definitions

  • the present invention relates to a manufacturing technology of a thin film transistor liquid crystal display (TFT-LCD), and more particularly to an alignment device and method for an air floating liquid crystal substrate.
  • TFT-LCD thin film transistor liquid crystal display
  • UV Curing is an important process, and after filling the liquid crystal mixture, the liquid crystal substrate needs to perform the alignment process of the liquid crystal under the action of the ultraviolet light and the electric field.
  • the principle of alignment by ultraviolet curing is to apply an electric field to the upper and lower sides of the liquid crystal substrate, and to irradiate the liquid crystal with ultraviolet rays, so that the reactive monomer in the liquid crystal moves up and down under the action of the electric field, and polymerization occurs under the action of ultraviolet rays.
  • an alignment layer is formed on the upper and lower substrates of the liquid crystal to achieve alignment of the liquid crystal.
  • ultraviolet light, electric field and reaction temperature are three very important factors.
  • a method of supporting the substrate by a thimble is often employed.
  • Figs. 1 and 2 a schematic diagram of a liquid crystal substrate alignment device in the prior art is shown.
  • the liquid crystal substrate alignment device supports the liquid crystal substrate 1 through a plurality of rows of ejector pins 90, wherein the plurality of rows of tops 90 are in contact with the display region 10 of the liquid crystal substrate 1; and the conductive probes 91 located at both ends of the liquid crystal substrate 1 are The liquid crystal substrate 1 is applied with an electric field.
  • the thimble cannot achieve a complete heat insulating effect, the alignment unevenness (Pin Mura) due to the contact of the thimble is liable to occur.
  • the display area 10 is avoided by reducing the number of ejector pins 90 or by bringing the thimble 90 into contact with the liquid crystal substrate 1.
  • FIG. 3 another schematic diagram of a liquid crystal substrate alignment device in the prior art is shown.
  • the number of thimbles 90 is greatly reduced.
  • the occurrence of bending of the liquid crystal substrate may occur, and the bending of the liquid crystal substrate may cause poor contact between the conductive probe and the liquid crystal substrate (as shown in the figure).
  • the application of an external voltage to the liquid crystal substrate causes a contact failure, resulting in an abnormal alignment.
  • the amount of ultraviolet light received by it is different from the amount of ultraviolet light received by other normal areas. Generally, in the case where deformation occurs, the amount of ultraviolet light received is lower. (See A in the figure) This will result in a difference in the alignment speed of each area, resulting in uneven alignment.
  • FIG. 4 another schematic diagram of a liquid crystal substrate alignment device in the prior art is shown.
  • the ejector pins 90 are alternately moved to support the liquid crystal substrate 1. This can reduce the contact time of the thimble 91 and the liquid crystal substrate 1 at the same position. Since the thimble 91 and the liquid crystal substrate 1 inevitably need to be in contact, the existing technology can only reduce the occurrence of the alignment unevenness, but cannot be completely avoided. The occurrence of uneven alignment.
  • the technical problem to be solved by the present invention is to provide an alignment device and method for an air floating liquid crystal substrate, which can uniformly heat and ultraviolet light in the alignment process of the liquid crystal substrate, and can improve the quality of the liquid crystal substrate and the product yield.
  • an alignment device for an air floating liquid crystal substrate including:
  • a heating platform on which a plurality of air holes are disposed, the air holes are used for conveying hot air with a temperature hook and a vertical direction;
  • a support frame disposed around the heating platform for supporting and holding the liquid crystal substrate to be aligned
  • the air jet volume of the air hole gradually increases from the center of the heating platform to the edge of the heating platform cut back.
  • the heating platform comprises:
  • the first heat transfer layer is further provided with a gas passage, and the gas passage is formed with the plurality of pores on the surface of the first heat transfer layer.
  • the upper surface of the first heat transfer layer is anodized to form a black or dark color to convert thermal energy of the heating layer into infrared rays.
  • the heating layer is an electric heating layer using mica as an insulating medium.
  • the support frame is further provided with a mechanism for positioning the liquid crystal substrate in an entire column, and a clamping mechanism for clamping and fixing the liquid crystal substrate.
  • a probe is disposed on the first heat transfer layer for positioning the liquid crystal substrate.
  • a driving mechanism for respectively driving the support frame and supporting the ejector movement.
  • an embodiment of the present invention further provides an alignment device for an air floating liquid crystal substrate, which includes:
  • a heating platform on which a plurality of air holes are disposed, the air holes are used for conveying hot air with a temperature hook and a vertical direction;
  • a support frame disposed around the heating platform for supporting and holding the liquid crystal substrate to be aligned
  • the heating platform comprises:
  • a gas passage is further disposed in the first heat transfer layer, the gas passage is formed with the plurality of air holes on a surface of the first heat transfer layer, and a jet amount of the air hole is from a center of the heating platform The edge of the heating platform is gradually reduced.
  • the support frame is further provided with a mechanism for positioning the liquid crystal substrate in an entire column, and a clamping mechanism for clamping and fixing the liquid crystal substrate.
  • a probe is disposed on the first heat transfer layer for positioning the liquid crystal substrate.
  • a driving mechanism for respectively driving the support frame and supporting the ejector movement.
  • the upper surface of the first heat transfer layer is anodized to form a black or dark color to convert thermal energy of the heating layer into infrared rays.
  • the heating layer is an electric heating layer using mica as an insulating medium.
  • an embodiment of the present invention further provides an alignment method of an air floating liquid crystal substrate, comprising the following steps:
  • the liquid crystal substrate is placed on the support frame and the support ejector pin, and the support frame positions and clamps the liquid crystal substrate;
  • the support frame and the support thimble move downward by a first distance
  • the liquid crystal substrate is suspended and separated from the supporting ejector by a predetermined height by heating a plurality of air holes of the surface of the platform upward, and the driving thimble is driven to move downward by a second distance, and the probe is raised. Reaching a lower portion of the liquid crystal substrate;
  • the probe is released, and the support thimble is moved upward by a second distance, and the plurality of air holes stop ejecting hot air;
  • the support frame and the support thimble are driven to move upward by a first distance and the liquid crystal substrate is removed.
  • the amount of the jet that controls the air vent is gradually reduced from the center of the heating platform toward the edge of the heating platform, and the liquid crystal substrate is suspended and the predetermined height from the supporting ejector is 0.1 to 1 mm.
  • the temperature of the hot air that is vertically ejected from the plurality of air holes is between 50 ⁇ 5 °C.
  • Embodiments of the present invention have the following beneficial effects:
  • the alignment device and method for a liquid crystal substrate provided by the embodiment of the present invention blows hot air to the bottom of the substrate through the air holes of the heating platform, so that the display area of the liquid crystal substrate is suspended in the air, without any The quality contact prevents the uneven alignment of the substrate due to contact with the support pins.
  • the liquid crystal substrate can be uniformly heated during the alignment process, and the bending of the liquid crystal substrate can be reduced, so that the ultraviolet light can be uniformly irradiated on the liquid crystal substrate, thereby improving the quality of the liquid crystal substrate and the product yield. ;
  • the air jet volume of the air hole is gradually reduced from the center of the heating platform to the edge of the heating platform, and the liquid crystal substrate can be stably suspended above the heating platform during the entire alignment process.
  • 1 is a longitudinal sectional view showing the structure of an alignment device of a conventional liquid crystal substrate
  • Figure 2 is a bottom view of Figure 1;
  • FIG. 3 is a schematic view showing the structure of an alignment device of another liquid crystal substrate
  • FIG. 4 is a schematic view showing the structure of a conventional alignment device of a liquid crystal substrate
  • FIG. 5 is an air floating type provided by the present invention.
  • FIG. 6 is a schematic view showing a second state structure of an alignment device of an air floating type liquid crystal substrate provided by the present invention.
  • FIG. 7 is a schematic view showing a third state structure of an alignment device of an air floating type liquid crystal substrate provided by the present invention.
  • Fig. 8 is a schematic view showing the structure of a heating platform in an alignment device of an air floating type liquid crystal substrate provided by the present invention.
  • the alignment device of the air floating liquid crystal substrate comprises at least: a heating platform 2 on which a plurality of air holes 230 are provided, and the air holes 230 are used for conveying temperature uniformity and Vertical upward hot air;
  • the support frame 3 is disposed around the heating platform 2 for supporting and holding the liquid crystal substrate 1 to be aligned, and further comprising a mechanism for positioning the liquid crystal substrate 1 on the support frame 3, and performing the liquid crystal substrate 1 on the liquid crystal substrate 1 Clamping a fixed clamping mechanism 6;
  • a plurality of supporting thimbles 4 are uniformly disposed in the heating platform 2, and are movable in the same direction as the supporting frame 3 for supporting the bottom of the liquid crystal substrate 1 at least part of time;
  • the air volume of the air hole 230 gradually decreases from the center of the heating platform 2 toward the edge of the heating platform 2; further, a driving mechanism for driving the support frame and supporting the movement of the thimble, respectively, is further included.
  • the heating platform 2 comprises:
  • the heating layer is an electric heating layer using mica as an insulating medium
  • a gas passage 23 is further disposed in the first heat transfer layer 21, and the gas passage 23 is formed with a plurality of air holes 230 on the surface of the first heat transfer layer 21, wherein the gas passage 23 and an external air pump (not shown)
  • the gas of the external air pump is subjected to, for example, filtration and preheating before the gas passage 23 is performed, wherein the number or/and the size ratio of the pores 23 provided at the intermediate position of the first heat transfer layer 21 is in the first heat transfer layer 21
  • the number and/or size of the air holes 23 provided at the edge positions are large.
  • the first heat transfer layer 21 and the second heat transfer layer 22 may be made of a material having excellent thermal conductivity (such as aluminum or aluminum alloy) to uniformly conduct heat energy; the upper surface of the first heat transfer layer 21 may also be anodized to form black. Or a darker color, the thermal energy of the heating layer 20 can be converted into infrared rays, which can be absorbed by the liquid crystal substrate 1 into heat energy to heat the liquid crystal substrate 1, the above-mentioned anode treatment, and can also protect the first heat transfer layer 21 Surface to prevent cracking from creating cracks;
  • the temperature of the heating layer 20 and the external air pump is controlled such that the temperature of the hot air that is vertically ejected from the air holes 230 is always between 50 ⁇ 5 °C.
  • the alignment method of the air floating liquid crystal substrate includes the following steps:
  • the liquid crystal substrate is placed on the support frame and the support ejector pin, and the support frame performs the liquid crystal substrate Positioning and clamping and fixing; usually, the liquid crystal substrate needs to be transported in an alignment chamber for alignment treatment, and the alignment chamber needs to maintain a relatively constant temperature (for example, about 50 ° C), and the liquid crystal substrate can be transported through a device such as a robot. carry out.
  • a relatively constant temperature for example, about 50 ° C
  • the support frame and the support thimble are moved downward by a first distance, so that heat of the heating platform is more efficiently transmitted to the liquid crystal substrate.
  • the first distance may be 0.1-50 mm.
  • the liquid crystal substrate is suspended and at a predetermined height from the supporting thimble, the driving support thimble is moved downward by a second distance, and the probe is raised to the top liquid crystal substrate.
  • the lower part wherein, by the number and size of the air holes, the air jet volume of the air hole can be controlled to gradually decrease from the center of the heating platform to the edge of the heating platform.
  • the temperature of the hot air that is vertically sprayed from the plurality of air holes is 50.
  • the predetermined height may be 0.1 ⁇ lmm;
  • the probe is loosened, and the support thimble is moved upward by a second distance, and the plurality of air holes stop to emit hot air;
  • the driving support frame and the supporting thimble are moved upward by a first distance, and the liquid crystal substrate is removed.
  • the alignment apparatus and method for a liquid crystal substrate provided by the embodiment of the present invention blows hot air to the bottom of the substrate through the air holes of the heating platform, so that the display area of the liquid crystal substrate is suspended in the air without contacting any substance, thereby avoiding the substrate and the supporting pin.
  • the liquid crystal substrate can be uniformly heated during the alignment process, and the bending of the liquid crystal substrate can be reduced, so that the ultraviolet light can be uniformly irradiated on the liquid crystal substrate, thereby improving the quality of the liquid crystal substrate and the product yield.
  • the air jet volume of the air hole is gradually reduced from the center of the heating platform to the edge of the heating platform, and the liquid crystal substrate can be stably suspended above the heating platform during the entire alignment process.

Abstract

An alignment device and method for an air-floating-type liquid crystal substrate (1). The alignment device for the air-floating-type liquid crystal substrate (1) comprises: a heating platform (2), a plurality of air holes (230) being provided on the heating platform, the air holes (230) being used for delivering hot air which has a uniform temperature and flows vertically upward; support frames (3) which are arranged around the heating platform (2) and used for supporting and clamping the liquid crystal substrate (1) to be aligned; and support ejector pins (4) which are uniformly arranged in the heating platform (2), can move vertically with the support frames (3) in the same direction, and are used for supporting the bottom of the liquid crystal substrate (1) for at least part of the time; wherein the air injection amount of the air holes (230) is gradually reduced from the centre of the heating platform (2) to the edge of the heating platform (2). The alignment device and the alignment method can make the liquid crystal substrate (1) be uniformly heated and illuminated by ultraviolet rays in the alignment process, and can improve the quality and the yield of the liquid crystal substrate (1).

Description

一种气浮式液晶基板的配向设备以及方法 本申请要求于 2013 年 9 月 22 日提交中国专利局、 申请号为 201310429812.3、 发明名称为 "一种气浮式液晶基板的配向设备以及方法" 的中国专利申请的优先权, 上述专利的全部内容通过引用结合在本申请中。 技术领域  Alignment device and method for air-floating liquid crystal substrate The present application claims to be filed on September 22, 2013 by the Chinese Patent Office, the application number is 201310429812.3, and the invention is entitled "An aligning device and method for an air floating liquid crystal substrate" Priority of the Chinese Patent Application, the entire contents of which are incorporated herein by reference. Technical field
本发明涉及薄膜晶体管液晶显示器(Thin Film Transistor liquid crystal display, TFT-LCD )的制造技术, 特别涉及一种气浮式液晶基板的配向设备 以及方法。  The present invention relates to a manufacturing technology of a thin film transistor liquid crystal display (TFT-LCD), and more particularly to an alignment device and method for an air floating liquid crystal substrate.
背景技术 Background technique
在现有的液晶显示器的制造技术中, 其中, 紫外线固化(UV Curing ) 是一个重要的制程, 液晶基板在注满液晶混和物之后, 需要在紫外线和电场 的共同作用下使液晶完成配向过程。  In the manufacturing technology of the existing liquid crystal display, among them, UV Curing is an important process, and after filling the liquid crystal mixture, the liquid crystal substrate needs to perform the alignment process of the liquid crystal under the action of the ultraviolet light and the electric field.
通过紫外线固化进行配向的原理是在液晶基板上下两侧施加电场, 并对 液晶采用紫外线照射,从而使液晶中的反应单体在电场的作用下进行上下运 动,并在紫外线的作用下发生聚合反应,从而在液晶上下基板上形成配向层, 以实现对液晶进行配向的作用。 在液晶配向过程中, 紫外线、 电场以及反应 温度是三个非常重要的因素。  The principle of alignment by ultraviolet curing is to apply an electric field to the upper and lower sides of the liquid crystal substrate, and to irradiate the liquid crystal with ultraviolet rays, so that the reactive monomer in the liquid crystal moves up and down under the action of the electric field, and polymerization occurs under the action of ultraviolet rays. Thereby, an alignment layer is formed on the upper and lower substrates of the liquid crystal to achieve alignment of the liquid crystal. In the liquid crystal alignment process, ultraviolet light, electric field and reaction temperature are three very important factors.
为了实现紫外线对液晶基板照射的均匀性, 目前多采用顶针支撑基板的 方式, 如图 1及图 2所示, 示出了现有技术中的一种液晶基板配向设备示意 图。 其中, 该液晶基板配向设备通过多排顶针 90支撑液晶基板 1 , 其中, 该 多排顶什 90与液晶基板 1的显示区域 10相接触; 另外通过位于液晶基板 1 两端的导电探针 91对该液晶基板 1施加电场。 但是, 在这种现有技术中, 由于顶针不能达到完全的绝热效果,故容易产生由于顶针的接触而产生的配 向不均匀 (Pin Mura ) 的情形。  In order to achieve uniformity of irradiation of the liquid crystal substrate by ultraviolet rays, a method of supporting the substrate by a thimble is often employed. As shown in Figs. 1 and 2, a schematic diagram of a liquid crystal substrate alignment device in the prior art is shown. The liquid crystal substrate alignment device supports the liquid crystal substrate 1 through a plurality of rows of ejector pins 90, wherein the plurality of rows of tops 90 are in contact with the display region 10 of the liquid crystal substrate 1; and the conductive probes 91 located at both ends of the liquid crystal substrate 1 are The liquid crystal substrate 1 is applied with an electric field. However, in this prior art, since the thimble cannot achieve a complete heat insulating effect, the alignment unevenness (Pin Mura) due to the contact of the thimble is liable to occur.
为了减少这种不均匀的情形, 在一些方案中, 通过减少顶针 90的数量, 或者使顶针 90与液晶基板 1相接触的位置避免显示区域 10。  In order to reduce such unevenness, in some aspects, the display area 10 is avoided by reducing the number of ejector pins 90 or by bringing the thimble 90 into contact with the liquid crystal substrate 1.
如图 3所示, 示出了现有技术中的另一种液晶基板配向设备示意图。 在 这种现有技术中, 大量减少了顶针 90的数量。 但是, 在这种现有技术中, 由于顶针数量的减少, 又会出现液晶基板产生弯折(bending )的情形, 由于 产生了弯折, 可能会导致导电探针与液晶基板接触不良(如图中的 B 处所 示), 从而使对液晶基板施加外部的电压是出现接触不良, 从而导致配向出 现异常。 另外, 在液晶基板出现变形的地方, 也会产生其接收的紫外线的数 量与其它正常区域所接收到的紫外线的数量不同, 通常在出现变形的地方, 其所接收的紫外线的数量会更低一些 (见图中的 A处所示), 这样会导致各 区域配向速度差异, 从而产生配向不均匀。 As shown in FIG. 3, another schematic diagram of a liquid crystal substrate alignment device in the prior art is shown. In In this prior art, the number of thimbles 90 is greatly reduced. However, in this prior art, due to the reduction in the number of thimbles, the occurrence of bending of the liquid crystal substrate may occur, and the bending of the liquid crystal substrate may cause poor contact between the conductive probe and the liquid crystal substrate (as shown in the figure). In the middle of B, the application of an external voltage to the liquid crystal substrate causes a contact failure, resulting in an abnormal alignment. In addition, where the liquid crystal substrate is deformed, the amount of ultraviolet light received by it is different from the amount of ultraviolet light received by other normal areas. Generally, in the case where deformation occurs, the amount of ultraviolet light received is lower. (See A in the figure) This will result in a difference in the alignment speed of each area, resulting in uneven alignment.
如图 4所示, 示出了现有技术中的另一种液晶基板配向设备示意图。 在 这种配向设备中, 其顶针 90可以交替运动, 以支撑液晶基板 1。 这样可以减 少顶针 91与液晶基板 1在同一位置的接触时间, 由于顶针 91与液晶基板 1 不可避免地需要接触, 故现有的这种技术只能减少配向不均匀情形的出现, 但不能完全避免配向不均匀情形的出现。  As shown in FIG. 4, another schematic diagram of a liquid crystal substrate alignment device in the prior art is shown. In this alignment device, the ejector pins 90 are alternately moved to support the liquid crystal substrate 1. This can reduce the contact time of the thimble 91 and the liquid crystal substrate 1 at the same position. Since the thimble 91 and the liquid crystal substrate 1 inevitably need to be in contact, the existing technology can only reduce the occurrence of the alignment unevenness, but cannot be completely avoided. The occurrence of uneven alignment.
综上, 现有的技术中, 在对液晶基板进行配向时, 由于无法避免配向不 均匀情形的出现,故如何提升液晶基板的品质以及产品良率是一个需要解决 的问题。  In summary, in the prior art, when the alignment of the liquid crystal substrate is performed, since the occurrence of the alignment unevenness cannot be avoided, how to improve the quality of the liquid crystal substrate and the yield of the product is a problem to be solved.
发明内容 Summary of the invention
本发明所要解决的技术问题在于,提供一种气浮式液晶基板的配向设备 以及方法, 可以使液晶基板配向过程中受热以及紫外光照射均匀, 并能提升 液晶基板的品质以及产品良率。  The technical problem to be solved by the present invention is to provide an alignment device and method for an air floating liquid crystal substrate, which can uniformly heat and ultraviolet light in the alignment process of the liquid crystal substrate, and can improve the quality of the liquid crystal substrate and the product yield.
为了解决上述技术问题,本发明的实施例的一方面提供了一种气浮式液 晶基板的配向设备, 包括:  In order to solve the above technical problem, an aspect of an embodiment of the present invention provides an alignment device for an air floating liquid crystal substrate, including:
加热平台, 其上设置有多个气孔, 所述气孔用于输送温度均勾且垂直向 上的热风;  a heating platform, on which a plurality of air holes are disposed, the air holes are used for conveying hot air with a temperature hook and a vertical direction;
支撑架, 设置于所述加热平台的四周, 用于支撑并夹持待配向的液晶基 板;  a support frame disposed around the heating platform for supporting and holding the liquid crystal substrate to be aligned;
支撑顶针, 均匀设置于所述加热平台中, 其可与所述支撑架上下同向运 动, 用于至少部份时间支撑所述液晶基板的底部;  Supporting a thimble, uniformly disposed in the heating platform, movable parallel to the support frame for supporting the bottom of the liquid crystal substrate at least part of time;
其中, 所述气孔的喷气量从所述加热平台中心向所述加热平台边缘逐渐 减少。 Wherein the air jet volume of the air hole gradually increases from the center of the heating platform to the edge of the heating platform cut back.
其中, 所述加热平台包括:  Wherein, the heating platform comprises:
加热层, 用于实现对所述加热平台进行加热;  a heating layer for heating the heating platform;
第一传热层, 位于所述加热层之上;  a first heat transfer layer above the heating layer;
第二传热层, 位于所述加热层之下;  a second heat transfer layer located below the heating layer;
其中, 所述第一传热层中进一步设置有气体通道, 所述气体通道在所述 第一传热层表面形成有所述多个气孔。  Wherein, the first heat transfer layer is further provided with a gas passage, and the gas passage is formed with the plurality of pores on the surface of the first heat transfer layer.
其中, 所述第一传热层上表面经阳极处理, 形成黑色或较深颜色, 以使 所述加热层的热能转化为红外线。  Wherein, the upper surface of the first heat transfer layer is anodized to form a black or dark color to convert thermal energy of the heating layer into infrared rays.
其中, 所述加热层为采用云母作为绝缘介质的电加热层。  Wherein, the heating layer is an electric heating layer using mica as an insulating medium.
其中, 所述支撑架上进一步设置有用于对所述液晶基板进行整列定位的 机构, 以及对液晶基板进行夹持固定的夹持机构。  Further, the support frame is further provided with a mechanism for positioning the liquid crystal substrate in an entire column, and a clamping mechanism for clamping and fixing the liquid crystal substrate.
其中,在所述第一传热层上设置有探针,用于对所述液晶基板进行定位。 其中, 进一步包括用于分别驱动所述支撑架和支撑顶针运动的驱动机 构。  Wherein, a probe is disposed on the first heat transfer layer for positioning the liquid crystal substrate. Therein, further comprising a driving mechanism for respectively driving the support frame and supporting the ejector movement.
相应地, 本发明实施例还提供一种气浮式液晶基板的配向设备, 其中, 包括:  Correspondingly, an embodiment of the present invention further provides an alignment device for an air floating liquid crystal substrate, which includes:
加热平台, 其上设置有多个气孔, 所述气孔用于输送温度均勾且垂直向 上的热风;  a heating platform, on which a plurality of air holes are disposed, the air holes are used for conveying hot air with a temperature hook and a vertical direction;
支撑架, 设置于所述加热平台的四周, 用于支撑并夹持待配向的液晶基 板;  a support frame disposed around the heating platform for supporting and holding the liquid crystal substrate to be aligned;
支撑顶针, 均匀设置于所述加热平台中, 其可与所述支撑架上下同向运 动, 用于至少部份时间支撑所述液晶基板的底部;  Supporting a thimble, uniformly disposed in the heating platform, movable parallel to the support frame for supporting the bottom of the liquid crystal substrate at least part of time;
其中, 所述加热平台包括:  Wherein, the heating platform comprises:
加热层, 用于实现对所述加热平台进行加热;  a heating layer for heating the heating platform;
第一传热层, 位于所述加热层之上;  a first heat transfer layer above the heating layer;
第二传热层, 位于所述加热层之下;  a second heat transfer layer located below the heating layer;
所述第一传热层中进一步设置有气体通道, 所述气体通道在所述第一传 热层表面形成有所述多个气孔, 所述气孔的喷气量从所述加热平台中心向所 述加热平台边缘逐渐减少。 Further, a gas passage is further disposed in the first heat transfer layer, the gas passage is formed with the plurality of air holes on a surface of the first heat transfer layer, and a jet amount of the air hole is from a center of the heating platform The edge of the heating platform is gradually reduced.
其中, 所述支撑架上进一步设置有用于对所述液晶基板进行整列定位的 机构, 以及对液晶基板进行夹持固定的夹持机构。  Further, the support frame is further provided with a mechanism for positioning the liquid crystal substrate in an entire column, and a clamping mechanism for clamping and fixing the liquid crystal substrate.
其中,在所述第一传热层上设置有探针,用于对所述液晶基板进行定位。 其中, 进一步包括用于分别驱动所述支撑架和支撑顶针运动的驱动机 构。  Wherein, a probe is disposed on the first heat transfer layer for positioning the liquid crystal substrate. Therein, further comprising a driving mechanism for respectively driving the support frame and supporting the ejector movement.
其中, 所述第一传热层上表面经阳极处理, 形成黑色或较深颜色, 以使 所述加热层的热能转化为红外线。  Wherein, the upper surface of the first heat transfer layer is anodized to form a black or dark color to convert thermal energy of the heating layer into infrared rays.
其中, 所述加热层为采用云母作为绝缘介质的电加热层。  Wherein, the heating layer is an electric heating layer using mica as an insulating medium.
相应地, 本发明实施例还提供了一种气浮式液晶基板的配向方法, 包括 如下步骤:  Correspondingly, an embodiment of the present invention further provides an alignment method of an air floating liquid crystal substrate, comprising the following steps:
将液晶基板放置于支撑架和支撑顶针上, 所述支撑架对所述液晶基板进 行定位并夹持固定;  The liquid crystal substrate is placed on the support frame and the support ejector pin, and the support frame positions and clamps the liquid crystal substrate;
所述支撑架以及所述支撑顶针向下移动第一距离;  The support frame and the support thimble move downward by a first distance;
通过加热平台表面的多个气孔向上垂直喷出温度均匀的热风,使所述液 晶基板悬浮并距离所述支撑顶针一预定高度,驱动所述支撑顶针向下移动第 二距离, 并使探针上升抵顶所述液晶基板的下部;  The liquid crystal substrate is suspended and separated from the supporting ejector by a predetermined height by heating a plurality of air holes of the surface of the platform upward, and the driving thimble is driven to move downward by a second distance, and the probe is raised. Reaching a lower portion of the liquid crystal substrate;
向所述液晶基板施加电压, 并施加紫外光线, 进行配向过程;  Applying a voltage to the liquid crystal substrate and applying ultraviolet light to perform an alignment process;
在配向完成后, 使所述探针松开, 并使支撑顶针向上移动第二距离, 所 述多个气孔停止喷出热风;  After the alignment is completed, the probe is released, and the support thimble is moved upward by a second distance, and the plurality of air holes stop ejecting hot air;
驱动所述支撑架以及所述支撑顶针向上移动第一距离, 并移出所述液晶 基板。  The support frame and the support thimble are driven to move upward by a first distance and the liquid crystal substrate is removed.
其中, 进一步包括:  Among them, further includes:
控制所述气孔的喷气量从所述加热平台中心向所述加热平台边缘逐渐 减少, 并使所述液晶基板悬浮并距离所述支撑顶针的预定高度为 0.1〜lmm。  The amount of the jet that controls the air vent is gradually reduced from the center of the heating platform toward the edge of the heating platform, and the liquid crystal substrate is suspended and the predetermined height from the supporting ejector is 0.1 to 1 mm.
其中, 所述多个气孔向上垂直喷出的热风的温度处于 50 ± 5°C之间。 实施本发明的实施例, 具有如下的有益效果:  Wherein, the temperature of the hot air that is vertically ejected from the plurality of air holes is between 50 ± 5 °C. Embodiments of the present invention have the following beneficial effects:
首先, 本发明实施例提供的液晶基板的配向设备以及方法, 通过加热平 台的气孔向基板底部吹热风, 使液晶基板的显示区悬浮在空中, 不与任何物 质接触, 从而避免基板因和支撑销接触导致产生的配向不均匀的现象。 另外, 本发明实施例中可以使液晶基板在配向过程中各部分受热均匀; 并能减少液晶基板的弯曲, 从而使紫外线光能够均匀照射在液晶基板上, 从 而提高液晶基板的品质以及产品良率; First, the alignment device and method for a liquid crystal substrate provided by the embodiment of the present invention blows hot air to the bottom of the substrate through the air holes of the heating platform, so that the display area of the liquid crystal substrate is suspended in the air, without any The quality contact prevents the uneven alignment of the substrate due to contact with the support pins. In addition, in the embodiment of the invention, the liquid crystal substrate can be uniformly heated during the alignment process, and the bending of the liquid crystal substrate can be reduced, so that the ultraviolet light can be uniformly irradiated on the liquid crystal substrate, thereby improving the quality of the liquid crystal substrate and the product yield. ;
而且, 本发明实施例中, 气孔的喷气量从所述加热平台中心向所述加热平台 边缘逐渐减少,可以保证液晶基板在整个配向过程中能稳定地悬浮在加热平 台上方。 Moreover, in the embodiment of the present invention, the air jet volume of the air hole is gradually reduced from the center of the heating platform to the edge of the heating platform, and the liquid crystal substrate can be stably suspended above the heating platform during the entire alignment process.
附图说明 DRAWINGS
为了更清楚地说明本发明实施例或现有技术中的技术方案, 下面将对实 施例或现有技术描述中所需要使用的附图作简单地介绍, 显而易见地, 下面 描述中的附图仅仅是本发明的一些实施例, 对于本领域普通技术人员来讲, 在不付出创造性劳动的前提下, 还可以根据这些附图获得其它的附图。  In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the description of the prior art will be briefly described below. Obviously, the drawings in the following description are only It is a certain embodiment of the present invention, and those skilled in the art can obtain other drawings according to these drawings without any creative work.
图 1是现有的一种液晶基板的配向设备的结构纵剖视图;  1 is a longitudinal sectional view showing the structure of an alignment device of a conventional liquid crystal substrate;
图 2是图 1中的仰视示意图;  Figure 2 is a bottom view of Figure 1;
图 3是现有的另一种液晶基板的配向设备的结构工作示意图; 图 4是现有的再一种液晶基板的配向设备的结构工作示意图; 图 5是本发明提供的一种气浮式液晶基板的配向设备第一状态结构示意 图;  3 is a schematic view showing the structure of an alignment device of another liquid crystal substrate; FIG. 4 is a schematic view showing the structure of a conventional alignment device of a liquid crystal substrate; FIG. 5 is an air floating type provided by the present invention. A schematic diagram of a first state structure of an alignment device of a liquid crystal substrate;
图 6是本发明提供的一种气浮式液晶基板的配向设备第二状态结构示意 图;  6 is a schematic view showing a second state structure of an alignment device of an air floating type liquid crystal substrate provided by the present invention;
图 7是本发明提供的一种气浮式液晶基板的配向设备第三状态结构示意 图;  7 is a schematic view showing a third state structure of an alignment device of an air floating type liquid crystal substrate provided by the present invention;
图 8是本发明提供的一种气浮式液晶基板的配向设备中加热平台的结构 示意图。  Fig. 8 is a schematic view showing the structure of a heating platform in an alignment device of an air floating type liquid crystal substrate provided by the present invention.
具体实施方式 detailed description
下面参考附图对本发明的优选实施例进行描述。  DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.
请结合图 5至图 9所示, 示出了本发明一种气浮式液晶基板配向设备的 结构示意图。 在该实施例中, 该气浮式液晶基板的配向设备至少包括: 加热平台 2, 其上设置有多个气孔 230, 气孔 230用于输送温度均匀且 垂直向上的热风; Referring to FIG. 5 to FIG. 9, a schematic structural view of an air floating type liquid crystal substrate alignment device of the present invention is shown. In this embodiment, the alignment device of the air floating liquid crystal substrate comprises at least: a heating platform 2 on which a plurality of air holes 230 are provided, and the air holes 230 are used for conveying temperature uniformity and Vertical upward hot air;
支撑架 3 , 设置于加热平台 2的四周, 用于支撑并夹持待配向的液晶基 板 1 , 在支撑架 3上进一步设置有用于对液晶基板 1进行整列定位的机构, 以及对液晶基板 1进行夹持固定的夹持机构 6;  The support frame 3 is disposed around the heating platform 2 for supporting and holding the liquid crystal substrate 1 to be aligned, and further comprising a mechanism for positioning the liquid crystal substrate 1 on the support frame 3, and performing the liquid crystal substrate 1 on the liquid crystal substrate 1 Clamping a fixed clamping mechanism 6;
多个支撑顶针 4, 均匀设置于加热平台 2中, 其可与支撑架 3上下同向 运动, 用于至少部份时间支撑液晶基板 1的底部;  a plurality of supporting thimbles 4 are uniformly disposed in the heating platform 2, and are movable in the same direction as the supporting frame 3 for supporting the bottom of the liquid crystal substrate 1 at least part of time;
其中,气孔 230的喷气量从加热平台 2中心向加热平台 2边缘逐渐减少; 进一步的, 还包括用于分别驱动支撑架和支撑顶针运动的驱动机构。 其中, 加热平台 2包括:  Wherein, the air volume of the air hole 230 gradually decreases from the center of the heating platform 2 toward the edge of the heating platform 2; further, a driving mechanism for driving the support frame and supporting the movement of the thimble, respectively, is further included. Wherein, the heating platform 2 comprises:
加热层 20, 用于实现对加热平台进行加热, 在一个实施例中, 加热层为 采用云母作为绝缘介质的电加热层;  a heating layer 20 for heating the heating platform. In one embodiment, the heating layer is an electric heating layer using mica as an insulating medium;
第一传热层 21 , 位于加热层 20之上;  a first heat transfer layer 21 located above the heating layer 20;
第二传热层 22, 位于加热层 20之下;  a second heat transfer layer 22, located below the heating layer 20;
其中,在第一传热层 21中进一步设置有气体通道 23 , 气体通道 23在第 一传热层 21表面形成有多个气孔 230, 其中, 该气体通道 23与外部的气泵 (未示出),在外部的气泵的气体进行气体通道 23之前会进行诸如过滤和预 加热,其中,在第一传热层 21中间位置所设置的气孔 23的数量或 /及尺寸比 在第一传热层 21边缘位置所设置的气孔 23的数量或 /及尺寸要大。  Wherein, a gas passage 23 is further disposed in the first heat transfer layer 21, and the gas passage 23 is formed with a plurality of air holes 230 on the surface of the first heat transfer layer 21, wherein the gas passage 23 and an external air pump (not shown) The gas of the external air pump is subjected to, for example, filtration and preheating before the gas passage 23 is performed, wherein the number or/and the size ratio of the pores 23 provided at the intermediate position of the first heat transfer layer 21 is in the first heat transfer layer 21 The number and/or size of the air holes 23 provided at the edge positions are large.
第一传热层 21和第二传热层 22可以采用导热性能优良的材料 (如铝或 铝合金), 能够均匀传导热能; 在第一传热层 21上表面还可以经阳极处理, 形成黑色或较深颜色, 可以使加热层 20的热能转化为红外线, 该红外线可 以被液晶基板 1吸收转化为热能以加热液晶基板 1 , 上述的阳极处理, 同时 还可以起到保护第一传热层 21的表面, 以防止裂化产生缝隙;  The first heat transfer layer 21 and the second heat transfer layer 22 may be made of a material having excellent thermal conductivity (such as aluminum or aluminum alloy) to uniformly conduct heat energy; the upper surface of the first heat transfer layer 21 may also be anodized to form black. Or a darker color, the thermal energy of the heating layer 20 can be converted into infrared rays, which can be absorbed by the liquid crystal substrate 1 into heat energy to heat the liquid crystal substrate 1, the above-mentioned anode treatment, and can also protect the first heat transfer layer 21 Surface to prevent cracking from creating cracks;
加热层 20与外部气泵的温度控制, 使从气孔 230向上垂直喷出的热风 的温度始终处于 50士 5°C之间。  The temperature of the heating layer 20 and the external air pump is controlled such that the temperature of the hot air that is vertically ejected from the air holes 230 is always between 50 ± 5 °C.
另外, 在第一传热层 21上设置有探 5针, 用于对液晶基板 1进行定位。 下面, 再次结合图 5至图 9, 进一步说明本发明提供的气浮式液晶基板 的配向方法的具体流程, 该气浮式液晶基板的配向方法包括如下步骤:  Further, a probe 5 is provided on the first heat transfer layer 21 for positioning the liquid crystal substrate 1. Hereinafter, the specific flow of the alignment method of the air floating liquid crystal substrate provided by the present invention is further described in conjunction with FIG. 5 to FIG. 9, the alignment method of the air floating liquid crystal substrate includes the following steps:
首先, 将液晶基板放置于支撑架和支撑顶针上, 支撑架对液晶基板进行 定位并夹持固定; 通常需要将液晶基板搬运在一个配向室中进行配向处理, 且该配向室需要保持一个比较固定的温度 (如 50°C左右), 搬运液晶基板可 以通过诸如机械手的设备来完成。 First, the liquid crystal substrate is placed on the support frame and the support ejector pin, and the support frame performs the liquid crystal substrate Positioning and clamping and fixing; usually, the liquid crystal substrate needs to be transported in an alignment chamber for alignment treatment, and the alignment chamber needs to maintain a relatively constant temperature (for example, about 50 ° C), and the liquid crystal substrate can be transported through a device such as a robot. carry out.
接着, 支撑架以及支撑顶针向下移动第一距离, 从而使加热平台的热量 更有效的传递给液晶基板, 在一个实施例中, 该第一距离可以为 0.1-50 mm。  Then, the support frame and the support thimble are moved downward by a first distance, so that heat of the heating platform is more efficiently transmitted to the liquid crystal substrate. In one embodiment, the first distance may be 0.1-50 mm.
然后, 通过加热平台表面的多个气孔向上垂直喷出温度均匀的热风, 使 液晶基板悬浮并距离支撑顶针一预定高度, 驱动支撑顶针向下移动第二距 离, 并使探针上升抵顶液晶基板的下部, 其中, 通过气孔的数量以及尺寸的 设置, 可以控制气孔的喷气量从加热平台中心向加热平台边缘逐渐减少, 在 一个实施例中, 多个气孔向上垂直喷出的热风的温度处于 50 ± 5°C之间, 且 第二距离可以为 0.1-5mm, 预定高度可以为 0.1〜lmm;  Then, by spraying a plurality of air holes on the surface of the platform to vertically discharge a hot air of uniform temperature, the liquid crystal substrate is suspended and at a predetermined height from the supporting thimble, the driving support thimble is moved downward by a second distance, and the probe is raised to the top liquid crystal substrate. The lower part, wherein, by the number and size of the air holes, the air jet volume of the air hole can be controlled to gradually decrease from the center of the heating platform to the edge of the heating platform. In one embodiment, the temperature of the hot air that is vertically sprayed from the plurality of air holes is 50. Between ± 5 ° C, and the second distance may be 0.1-5 mm, the predetermined height may be 0.1 ~ lmm;
向液晶基板施加电压, 并施加紫外光线, 进行配向过程;  Applying a voltage to the liquid crystal substrate and applying ultraviolet light to perform an alignment process;
在配向完成后, 使探针松开, 并使支撑顶针向上移动第二距离, 多个气 孔停止喷出热风;  After the alignment is completed, the probe is loosened, and the support thimble is moved upward by a second distance, and the plurality of air holes stop to emit hot air;
驱动支撑架以及支撑顶针向上移动第一距离, 并移出液晶基板。  The driving support frame and the supporting thimble are moved upward by a first distance, and the liquid crystal substrate is removed.
实施本发明的实施例, 具有如下的有益效果:  Embodiments of the present invention have the following beneficial effects:
首先, 本发明实施例提供的液晶基板的配向设备以及方法, 通过加热平 台的气孔向基板底部吹热风, 使液晶基板的显示区悬浮在空中, 不与任何物 质接触, 从而避免基板因和支撑销接触导致产生的配向不均匀的现象。  First, the alignment apparatus and method for a liquid crystal substrate provided by the embodiment of the present invention blows hot air to the bottom of the substrate through the air holes of the heating platform, so that the display area of the liquid crystal substrate is suspended in the air without contacting any substance, thereby avoiding the substrate and the supporting pin. The phenomenon of uneven alignment caused by contact.
另外, 本发明实施例中可以使液晶基板在配向过程中各部分受热均匀; 并能减少液晶基板的弯曲, 从而使紫外线光能够均匀照射在液晶基板上, 从 而提高液晶基板的品质以及产品良率;  In addition, in the embodiment of the invention, the liquid crystal substrate can be uniformly heated during the alignment process, and the bending of the liquid crystal substrate can be reduced, so that the ultraviolet light can be uniformly irradiated on the liquid crystal substrate, thereby improving the quality of the liquid crystal substrate and the product yield. ;
而且, 本发明实施例中, 气孔的喷气量从加热平台中心向加热平台边缘 逐渐减少, 可以保证液晶基板在整个配向过程中能稳定地悬浮在加热平台上 方。  Moreover, in the embodiment of the present invention, the air jet volume of the air hole is gradually reduced from the center of the heating platform to the edge of the heating platform, and the liquid crystal substrate can be stably suspended above the heating platform during the entire alignment process.
以上所揭露的仅为本发明较佳实施例而已, 当然不能以此来限定本发明 之权利范围, 因此等同变化, 仍属本发明所涵盖的范围。  The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, and thus equivalent variations are still within the scope of the present invention.

Claims

权 利 要 求 Rights request
1、 一种气浮式液晶基板的配向设备, 其中, 包括: 1. An alignment device for air-floating liquid crystal substrates, including:
加热平台, 其上设置有多个气孔, 所述气孔用于输送温度均勾且垂直向 上的热风; A heating platform is provided with a plurality of air holes, and the air holes are used to transport hot air with uniform temperature and vertical upward direction;
支撑架, 设置于所述加热平台的四周, 用于支撑并夹持待配向的液晶基 板; A support frame is provided around the heating platform for supporting and clamping the liquid crystal substrate to be aligned;
支撑顶针, 均匀设置于所述加热平台中, 其可与所述支撑架上下同向运 动, 用于至少部份时间支撑所述液晶基板的底部; Support ejector pins, evenly arranged in the heating platform, can move up and down in the same direction as the support frame, and are used to support the bottom of the liquid crystal substrate at least part of the time;
其中, 所述气孔的喷气量从所述加热平台中心向所述加热平台边缘逐渐 减少。 Wherein, the amount of air injection from the air holes gradually decreases from the center of the heating platform to the edge of the heating platform.
2、 如权利要求 1 所述的气浮式液晶基板的配向设备, 其中, 所述加热 平台包括: 2. The alignment device for air-floating liquid crystal substrates as claimed in claim 1, wherein the heating platform includes:
加热层, 用于实现对所述加热平台进行加热; Heating layer, used to heat the heating platform;
第一传热层, 位于所述加热层之上; The first heat transfer layer is located above the heating layer;
第二传热层, 位于所述加热层之下; The second heat transfer layer is located under the heating layer;
其中, 所述第一传热层中进一步设置有气体通道, 所述气体通道在所述 第一传热层表面形成有所述多个气孔。 Wherein, the first heat transfer layer is further provided with a gas channel, and the gas channel has the plurality of pores formed on the surface of the first heat transfer layer.
3、 如权利要求 2所述的气浮式液晶基板的配向设备, 其中, 所述第一 传热层上表面经阳极处理, 形成黑色或较深颜色, 以使所述加热层的热能转 化为红外线。 3. The alignment device for an air-floating liquid crystal substrate according to claim 2, wherein the upper surface of the first heat transfer layer is anodized to form black or darker color, so that the thermal energy of the heating layer is converted into infrared.
4、 如权利要求 3所述的气浮式液晶基板的配向设备, 其中, 所述加热 层为采用云母作为绝缘介质的电加热层。 4. The alignment device for an air-floating liquid crystal substrate according to claim 3, wherein the heating layer is an electric heating layer using mica as an insulating medium.
5、 如权利要求 4所述的气浮式液晶基板的配向设备, 其中, 所述支撑 架上进一步设置有用于对所述液晶基板进行整列定位的机构, 以及对液晶基 板进行夹持固定的夹持机构。 5. The air-floating liquid crystal substrate alignment device according to claim 4, wherein the support frame is further provided with a mechanism for aligning and positioning the liquid crystal substrate, and a clamp for clamping and fixing the liquid crystal substrate. supporting institutions.
6、 如权利要求 5所述的气浮式液晶基板的配向设备, 其中, 在所述第 一传热层上设置有探针, 用于对所述液晶基板进行定位。 6. The alignment device for an air-floating liquid crystal substrate as claimed in claim 5, wherein a probe is provided on the first heat transfer layer for positioning the liquid crystal substrate.
7、 如权利要求 6所述的气浮式液晶基板的配向设备, 其中, 进一步包 括用于分别驱动所述支撑架和支撑顶针运动的驱动机构。 7. The alignment device for an air-floating liquid crystal substrate according to claim 6, further comprising a driving mechanism for respectively driving the movement of the support frame and the support ejector pin.
8、 一种气浮式液晶基板的配向设备, 其中, 包括: 8. An alignment device for air-floating liquid crystal substrates, including:
加热平台, 其上设置有多个气孔, 所述气孔用于输送温度均勾且垂直向 上的热风; A heating platform is provided with a plurality of air holes, and the air holes are used to transport hot air with uniform temperature and vertical upward direction;
支撑架, 设置于所述加热平台的四周, 用于支撑并夹持待配向的液晶基 板; A support frame is provided around the heating platform for supporting and clamping the liquid crystal substrate to be aligned;
支撑顶针, 均匀设置于所述加热平台中, 其可与所述支撑架上下同向运 动, 用于至少部份时间支撑所述液晶基板的底部; Support ejector pins, evenly arranged in the heating platform, can move up and down in the same direction as the support frame, and are used to support the bottom of the liquid crystal substrate at least part of the time;
其中, 所述加热平台包括: Wherein, the heating platform includes:
加热层, 用于实现对所述加热平台进行加热; Heating layer, used to heat the heating platform;
第一传热层, 位于所述加热层之上; The first heat transfer layer is located above the heating layer;
第二传热层, 位于所述加热层之下; The second heat transfer layer is located under the heating layer;
所述第一传热层中进一步设置有气体通道, 所述气体通道在所述第一传 热层表面形成有所述多个气孔, 所述气孔的喷气量从所述加热平台中心向所 述加热平台边缘逐渐减少。 The first heat transfer layer is further provided with a gas channel, the gas channel is formed with the plurality of pores on the surface of the first heat transfer layer, and the amount of air injection from the pores is from the center of the heating platform to the The edges of the heated platform taper off.
9、 如权利要求 8所述的气浮式液晶基板的配向设备, 其中, 所述支撑 架上进一步设置有用于对所述液晶基板进行整列定位的机构, 以及对液晶基 板进行夹持固定的夹持机构。 9. The air-floating liquid crystal substrate alignment device according to claim 8, wherein the support frame is further provided with a mechanism for aligning and positioning the liquid crystal substrate, and a clamp for clamping and fixing the liquid crystal substrate. supporting institutions.
10如权利要求 9所述的气浮式液晶基板的配向设备,其中,在所述第一 传热层上设置有探针, 用于对所述液晶基板进行定位。 10. The air-floating liquid crystal substrate alignment device according to claim 9, wherein a probe is provided on the first heat transfer layer for positioning the liquid crystal substrate.
11、 如权利要求 10所述的气浮式液晶基板的配向设备, 其中, 进一步 包括用于分别驱动所述支撑架和支撑顶针运动的驱动机构。 11. The alignment device for an air-floating liquid crystal substrate according to claim 10, further comprising a driving mechanism for respectively driving the movement of the support frame and the support ejector pin.
12、 如权利要求 11 所述的气浮式液晶基板的配向设备, 其中, 所述第 一传热层上表面经阳极处理, 形成黑色或较深颜色, 以使所述加热层的热能 转化为红外线。 12. The alignment device for an air-floating liquid crystal substrate according to claim 11, wherein the upper surface of the first heat transfer layer is anodized to form black or darker color, so that the thermal energy of the heating layer is converted into infrared.
13、 如权利要求 12所述的气浮式液晶基板的配向设备, 其中, 所述加 热层为采用云母作为绝缘介质的电加热层。 13. The alignment device for an air-floating liquid crystal substrate as claimed in claim 12, wherein the heating layer is an electric heating layer using mica as an insulating medium.
14、 一种气浮式液晶基板的配向方法, 其在如权利要求 1至 7任一项所 述的气浮式液晶基板的配向设备中实现, 其中, 所述方法包括如下步骤: 将液晶基板放置于支撑架和支撑顶针上, 所述支撑架对所述液晶基板进 行定位并夹持固定; 14. An alignment method for an air-floating liquid crystal substrate, which is implemented in the alignment equipment for an air-floating liquid crystal substrate according to any one of claims 1 to 7, wherein the method includes the following steps: placing the liquid crystal substrate Placed on a support frame and a support ejector pin, the support frame performs a function on the liquid crystal substrate Positioning and clamping;
所述支撑架以及所述支撑顶针向下移动第一距离; The support frame and the support ejector pin move downward a first distance;
通过加热平台表面的多个气孔向上垂直喷出温度均匀的热风,使所述液 晶基板悬浮并距离所述支撑顶针一预定高度,驱动所述支撑顶针向下移动第 二距离, 并使探针上升抵顶所述液晶基板的下部; Hot air with uniform temperature is ejected vertically upward through multiple air holes on the surface of the heating platform, causing the liquid crystal substrate to float and be a predetermined height away from the support pin, driving the support pin to move downward a second distance, and causing the probe to rise. Press against the lower part of the liquid crystal substrate;
向所述液晶基板施加电压, 并施加紫外光线, 进行配向过程; Apply voltage to the liquid crystal substrate and apply ultraviolet light to perform the alignment process;
在配向完成后, 使所述探针松开, 并使支撑顶针向上移动第二距离, 所 述多个气孔停止喷出热风; After the alignment is completed, the probe is released and the support ejector pin is moved upward a second distance, and the plurality of air holes stop ejecting hot air;
驱动所述支撑架以及所述支撑顶针向上移动第一距离, 并移出所述液晶 基板。 The support frame and the support ejector pin are driven to move upward a first distance, and the liquid crystal substrate is removed.
15、 如权利要求 14所述的一种气浮式液晶基板的配向方法, 其中, 进 一步包括: 15. The alignment method of an air-floating liquid crystal substrate as claimed in claim 14, further comprising:
控制所述气孔的喷气量从所述加热平台中心向所述加热平台边缘逐渐 减少, 并使所述液晶基板悬浮并距离所述支撑顶针的预定高度为 0.1〜lmm。 The amount of air injection from the air holes is controlled to gradually decrease from the center of the heating platform to the edge of the heating platform, and the liquid crystal substrate is suspended at a predetermined height of 0.1 to 1 mm from the support ejector pin.
16、 如权利要求 15所述的一种气浮式液晶基板的配向方法, 其中, 所 述多个气孔向上垂直喷出的热风的温度处于 50 ± 5°C之间。 16. The alignment method of an air-floating liquid crystal substrate as claimed in claim 15, wherein the temperature of the hot air ejected vertically upward from the plurality of air holes is between 50 ± 5°C.
PCT/CN2013/084174 2013-09-22 2013-09-25 Alignment device and method for air-floating-type liquid crystal substrate WO2015039360A1 (en)

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