CN107193142A - Alignment film cure system - Google Patents
Alignment film cure system Download PDFInfo
- Publication number
- CN107193142A CN107193142A CN201710592043.7A CN201710592043A CN107193142A CN 107193142 A CN107193142 A CN 107193142A CN 201710592043 A CN201710592043 A CN 201710592043A CN 107193142 A CN107193142 A CN 107193142A
- Authority
- CN
- China
- Prior art keywords
- supporting table
- alignment film
- substrate
- cure system
- film cure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
Abstract
A kind of alignment film cure system of present invention offer, the solidification of alignment film on substrate, including provided with plummer, clamping part, dark zone and the pre-baked area for setting several thimbles;The plummer and the first supporting table are provided with the dark zone, one pre- oven is set in the pre-baked area, the second supporting table is provided with the pre- oven, first supporting table is air-flotation type support with the second supporting table, the clamping part is used to support the substrate clamping supported by several thimbles and being moved to above first supporting table by air supporting, and for being supported in the second supporting table that the substrate in first supporting table is moved in pre- oven by air supporting.
Description
Technical field
The present invention relates to alignment film manufacture technology field, more particularly to a kind of alignment film cure system.
Background technology
Whether active matrix liquid crystal display device either passive matrix type liquid crystal display, two panels clamping liquid crystal layer
Must all have alignment film (alignment layer) on substrate.The major function of alignment film is to match somebody with somebody liquid crystal molecule
To so that the phenomenon of torsion is presented in liquid crystal molecule between two plate bases.In general, alignment film can use mode of printing or other
Mode is formed, around here, during the solid precuring of alignment film, and equipment can be using whole thimble supporting way, because of thimble material
The thermal conductivity factor of matter is different from air, therefore in the curing process, the position of alignment film and thimble contact area can be caused pre- solid
Change effect to have differences with non-contact area, cause to match somebody with somebody the phenomenon for forming liquid crystal display display brightness inequality as uneven, shadow
Ring product quality.
The content of the invention
It is an object of the invention to provide a kind of good alignment film cure system of barrier propterty.
Alignment film cure system provided in an embodiment of the present invention, the solidification of alignment film on substrate, including provided with setting number
Plummer, clamping part, dark zone and the pre-baked area of individual thimble;The dark zone is provided with interior plummer, the first supporting table, described pre-
Set in roasting area and the second supporting table is provided with a pre- oven, the pre- oven, first supporting table is with the second supporting table
Air-flotation type is supported, and the clamping part is used for the substrate clamping supported by several thimbles and is moved to above first supporting table
Supported by air supporting, and for passing through in the second supporting table that the substrate in first supporting table is moved in pre- oven
Air supporting is supported.
Wherein, the gas of supporting substrate is hot gas in second supporting table and uniformly the substrate is heated.
Wherein, the surface of first supporting table and the second supporting table is equipped with several evenly distributed stomatas.
Wherein, the retaining part is in the surface, including mobile support, be fixed on mobile support adjutage and
Located at the claw of adjutage, the mobile support drives claw movement to realize clamping and movement to substrate.
Wherein, the adjutage is provided with cylinder, for stationary jaw and claw can be driven to lift.
Wherein, the alignment film cure system also includes manipulator, and substrate is positioned over into the plummer by manipulator
On.
Wherein, the plummer is realized with first supporting table by travel mechanism changes position.
Wherein, the telescopic surface relative to plummer of several thimbles is moved.
Wherein, also set up on support frame of the alignment film cure system provided with the support clamping part, support frame as described above
There is the positioner of positioning claw.
Alignment film cure system described in the embodiment of the present invention is entering the second supporting table in pre- oven by air-flotation type
Support carries out precuring, makes basal plate heated uniform, the uniformity of enhancing solidification film surface, in the absence of asking that thimble temperature inequality is supported
Topic, the uneven incidence of reduction solidification.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is the schematic diagram of the alignment film cure system of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
In addition, the explanation of following embodiment is with reference to additional diagram, the spy implemented to illustrate the present invention can be used to
Determine embodiment.The direction term being previously mentioned in the present invention, for example, " on ", " under ", "front", "rear", "left", "right", " interior ",
" outer ", " side " etc., are only the directions with reference to annexed drawings, therefore, and the direction term used is to more preferably, more clearly say
It is bright and understand the present invention, rather than indicate or infer the device or element of meaning and must have specific orientation, with specific side
Position construction and operation, therefore be not considered as limiting the invention.
In the description of the invention, it is necessary to illustrate, unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or detachably connected, or integratedly be connected
Connect;Can mechanically connect;Can be joined directly together, can also be indirectly connected to by intermediary, can be in two elements
The connection in portion.For the ordinary skill in the art, the tool of above-mentioned term in the present invention can be understood with concrete condition
Body implication.
Referring to Fig. 1, embodiment of the present invention provides a kind of alignment film cure system, alignment film consolidates on substrate
Change, the substrate 50 is the substrate of the display with alignment film.The alignment film cure system includes setting several thimbles
11 plummer 10, clamping part 13, dark zone 15 and pre-baked area 17;The dark zone 15 is provided with the plummer 10 and first
Support platform 16.Set in the pre-baked area 17 and the second supporting table 21, described first are provided with a pre- oven 20, the pre- oven 20
The support supporting table 21 of platform 16 and second is air-flotation type support.The clamping part 13 is used for the substrate 50 that will be supported by several thimbles 11
Clamp and be moved to the top of first supporting table 16 and supported by air supporting, and for by the base in first supporting table 16
Supported in the second supporting table 21 that plate 50 is moved in pre- oven by air supporting.
Specifically, the alignment film on the substrate 50 has been set, it is necessary to which the alignment film cure system is solidified.
The alignment film cure system also includes manipulator, and substrate 50 is positioned on the plummer 10 by manipulator.Plummer
10 are provided with surface, and the telescopic surface relative to plummer 10 of several thimbles 11 is moved, such as several by cylinder scale
Thimble stretching or the surface of retraction plummer 10.Several thimbles 11 stretch out the surface and constitute a supporting plane with branch support group
Plate 50.The plummer 10 is realized with first supporting table 16 by travel mechanism changes position.Plummer 10 in figure with
The position of first supporting table 16 is schematic diagram, when substrate is changed to the first supporting table 16 from plummer 10, plummer 10 with
First supporting table 16 is changed position and can moved up and down or transverse shifting replacing.The plummer 10 with it is described
First supporting table 16 is respectively positioned in dark zone 15, and is linked with travel mechanism, such as slide rail or cylinder etc..
In the present embodiment, the surface of the supporting table 21 of the first supporting table 16 and second is equipped with several evenly distributed gas
Hole (not shown), for discharging gas with supporting substrate.Generally provided with the device for providing gas inside supporting table, if
Gas is vacuum gas, then provided for vacuum plant.Further, in second supporting table 21 supporting substrate 50 gas
Gas after namely being heated for hot gas, after substrate 50 enters in pre- oven 20, realizes back of the pneumatically supported gas to substrate
Heating, being conducted using heat can realize that the gas in the preheating to alignment film, and the second supporting table 21 out is uniform right
The substrate 50 is heated, and just can guarantee that the precuring stability of alignment film.
Further, the clamping part 13 is located at the top of substrate 50, including mobile support 131, is fixed on mobile branch
The adjutage 132 of frame 131 and the claw 133 located at adjutage 132.The mobile support 131 drives the movement of the claw of adjutage 132
Realize that claw 133 is moved to substrate.The mobile support 131 and claw 133 are symmetrical structure.The adjutage 133 can be with
It is that cylinder or the adjutage 132 are provided with cylinder, for stationary jaw and claw can be driven to lift.Will be described by manipulator
Substrate is positioned on claw, is carried by claw and is positioned substrate.Certain adjutage 132 and claw 133 can also be manipulator
Arm and hand.The mobile support 131 includes slide rail and pole, and the pole moves to drive adjutage to move on slide rail
It is dynamic, and then realize the movement of substrate.
It is fixed to be additionally provided with support frame of the alignment film cure system provided with the support clamping part 13, support frame as described above
The substrate accurately can be positioned over claw by the positioner of position claw, such as image measurer for auxiliary manipulator.
Referring to Fig. 1, in fact, on feed direction, the manipulator, dark zone 15 and pre-baked area 17 are set successively
Put, clamping part 13 is by the way that support frame is located at the top of dark zone 15 and can slide to pre-baked area 17.During work, two arrows in such as figure
Direction, manipulator is delivered to substrate 50 on the plummer 10 from feed direction, forms supporting surface to prop up while thimble 11 rises
Support group plate 50, makes base plate bottom be adapted to the support force of bottom by support, starts clamping part 13 and travel mechanism, travel mechanism afterwards
To change the supporting table 16 of plummer 10 and first, remove plummer 10, while the clamping substrate of claw 133 of clamping part 13 is relative
Side, mobile support 131 drives claw movement substrate is left plummer 10 and shifts to the first supporting table 16, the first supporting table 16
Immediately below substrate and substrate is floated by gas, after substrate is steady, substrate 50 is driven to pre- oven 20 by travel mechanism
Interior movement, substrate is floated by the gas after the heating of the second supporting table 21, realizes the precuring operation to the alignment film of substrate.
During this, now substrate is supported by thimble 11, then the pressure that can be downwards placed with buffer mechanism hand pass through top again
Clamping part 13 substrate clamping is had been converted to adapt to air-flotation type support in the first supporting table of air-flotation type 16, it is outer without top
Forcing can ensure that what substrate can be stablized supports, after substrate is stable, just can ensure that substrate Metacentre Height will
Substrate is moved to air-flotation type in the second supporting table 21 and supports and heat, this ensure that the stability of strutting system of substrate, and avoid
Because the thermal conductivity factor of thimble material is different from air, therefore in the curing process, alignment film and thimble contact area can be caused
Precuring effect in position has differences with non-contact area, causes uneven with liquid crystal display display brightness is formed as uneven
Phenomenon.The position relationship of the first supporting table 16 and the second supporting table 21 is schematic diagram in figure, the first supporting table 16 and second
Support platform 21 can be it is highly identical, can also be different, certain height same substrate is more firm.
Alignment film cure system described in the embodiment of the present invention first uses thimble-type plummer supporting substrate, is then replaced by
First supporting table of air-flotation type is supported in advance to substrate, is then entering the second supporting table branch in pre- oven by air-flotation type
Support carries out precuring, during this, uniform in basal plate heated, the uniformity of enhancing solidification film surface, uneven in the absence of thimble temperature
The problem of supporting, reduces uneven incidence.
Above disclosure is only preferred embodiment of present invention, can not limit the right model of the present invention with this certainly
Enclose, one of ordinary skill in the art will appreciate that all or part of flow of above-described embodiment is realized, and will according to right of the present invention
Made equivalent variations are sought, still falls within and invents covered scope.
Claims (9)
1. a kind of alignment film cure system, the solidification of alignment film on substrate, it is characterised in that including provided with setting several thimbles
Plummer, clamping part, dark zone and pre-baked area;The plummer and the first supporting table are provided with the dark zone, it is described pre-
Set in roasting area and the second supporting table is provided with a pre- oven, the pre- oven, first supporting table is with the second supporting table
Air-flotation type is supported, and the clamping part is used for the substrate clamping supported by several thimbles and is moved to above first supporting table
Supported by air supporting, and for passing through in the second supporting table that the substrate in first supporting table is moved in pre- oven
Air supporting is supported.
2. alignment film cure system as claimed in claim 1, it is characterised in that the gas of supporting substrate in second supporting table
Body is hot gas and uniform to substrate heating.
3. alignment film cure system as claimed in claim 2, it is characterised in that first supporting table and the second supporting table
Surface is equipped with several evenly distributed stomatas.
4. alignment film cure system as claimed in claim 3, it is characterised in that the retaining part in the surface,
Including mobile support, the adjutage and the claw located at adjutage of mobile support are fixed on, the mobile support drives adjutage
Movement of the claw to substrate is realized in movement.
5. alignment film cure system as claimed in claim 4, it is characterised in that the adjutage is provided with cylinder, for fixing
Claw can simultaneously drive claw to lift.
6. alignment film cure system as claimed in claim 3, it is characterised in that the alignment film cure system also includes machinery
Substrate, is positioned on the plummer by hand by manipulator.
7. alignment film cure system as claimed in claim 4, it is characterised in that the plummer leads to first supporting table
Cross travel mechanism and realize replacing position.
8. alignment film cure system as claimed in claim 1, it is characterised in that the telescopic relative carrying of several thimbles
The surface movement of platform.
9. alignment film cure system as claimed in claim 4, it is characterised in that the alignment film cure system is provided with support institute
State the positioner that positioning claw is additionally provided with the support frame of clamping part, support frame as described above.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710592043.7A CN107193142A (en) | 2017-07-19 | 2017-07-19 | Alignment film cure system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710592043.7A CN107193142A (en) | 2017-07-19 | 2017-07-19 | Alignment film cure system |
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CN107193142A true CN107193142A (en) | 2017-09-22 |
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CN201710592043.7A Pending CN107193142A (en) | 2017-07-19 | 2017-07-19 | Alignment film cure system |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109445142A (en) * | 2018-12-28 | 2019-03-08 | 深圳市华星光电半导体显示技术有限公司 | A kind of orientation ultraviolet optics irradiating machine |
CN110787974A (en) * | 2019-10-15 | 2020-02-14 | 深圳市华星光电半导体显示技术有限公司 | Substrate baking treatment device |
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Application publication date: 20170922 |