CN106249548A - Substrate drying device - Google Patents
Substrate drying device Download PDFInfo
- Publication number
- CN106249548A CN106249548A CN201610628127.7A CN201610628127A CN106249548A CN 106249548 A CN106249548 A CN 106249548A CN 201610628127 A CN201610628127 A CN 201610628127A CN 106249548 A CN106249548 A CN 106249548A
- Authority
- CN
- China
- Prior art keywords
- glass substrate
- drying device
- substrate
- gripper shoe
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The invention discloses a kind of substrate drying device, including sealing cavity and being positioned at fixture and the gripper shoe of described sealing inside cavity, described gripper shoe includes plane supporting surface, described gripper shoe is fixed on the bottom of described sealing cavity, described fixture includes elevating lever and is fixed on the clamping part at described elevating lever top, described elevating lever is distributed in around described gripper shoe, described clamping part is fixed glass substrate and the decline of described glass substrate is positioned on described supporting surface by described elevating lever, contacts for face between described supporting surface with described glass substrate.Fixture is fixing and elevating glass substrate makes glass substrate be in different stations, facilitates the handling of glass substrate；Seal cavity evacuation front jig to be positioned over by glass substrate on the smooth supporting surface of gripper shoe, contact for face between supporting surface with glass substrate, uniform force is without local deformation in sealing cavity vacuum for glass substrate, and dried glass substrate uniform in color, yields is high.
Description
Technical field
The present invention relates to Display Technique field, especially relate to a kind of substrate drying device.
Background technology
Thin Film Transistor-LCD (Thin Film Transistor-LCD, TFT-LCD) is flown in recent years
The development of speed and being widely applied, it is widely used in the display device of Portable movable electronic product, such as mobile phone, digital phase
Machine, palm PC, the mobile product such as GPRS.Box-like is typically become with array base palte by panel of LCD by color membrane substrates, and two
Space between individual substrate is packaged with liquid crystal layer.Glass substrate is material the most basic and important in TFT-LCD, colored at present
The Making programme of optical filter includes: coat photoresist on the glass substrate, then by the glass substrate conveyance after coating photoresist
It is dried to vacuum drying indoor, the most again this glass substrate is transported to oven and is heating and curing.
In prior art, in glass baseplate surface coating after photoresistance, glass substrate lies against sealing inside cavity and supports
On the thimble of platform, it is in different stations by the general who has surrendered's glass substrate that rises of support platform, seals the cavity mistake at evacuation
Cheng Zhong, glass substrate and thimble are point cantact, and glass substrate is affected by thimble in the position of contact thimble and occurs slight
Deformation, due to glass baseplate surface coating photoresistance be liquid, its mobility can make photoresistance herein the most thinning, causes
The rate of drying of thimble contact area is accelerated, and colored filter occurs that aberration is bad, affects colored filter quality.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of substrate drying device, in order to solve glass base in prior art
The rate of drying of plate and thimble contact area is accelerated, and colored filter occurs that aberration is bad, affects asking of colored filter quality
Topic.
For solving above-mentioned technical problem, the present invention provides a kind of substrate drying device, and described substrate drying device includes close
Sealing cavity and be positioned at fixture and the gripper shoe of described sealing inside cavity, described gripper shoe includes plane supporting surface, described
Gripper shoe is fixed on the bottom of described sealing cavity, and described fixture includes elevating lever and is fixed on the clamping at described elevating lever top
Portion, described elevating lever is distributed in around described gripper shoe, and described clamping part is fixed glass substrate and incited somebody to action by described elevating lever
The decline of described glass substrate is positioned on described supporting surface, contacts for face between described supporting surface with described glass substrate.
Further, described substrate drying device also includes that centre post, described centre post are installed on described sealing
The bottom of cavity the center through described gripper shoe, for supporting the central part of the fixing described glass substrate of described clamping part
Position and with described fixture synchronization lifting.
Further, described substrate drying device also includes that the multiple auxiliary being installed on the bottom of described sealing cavity support
Bar, described auxiliary support bar support the fixing described glass substrate of described clamping part bottom surface and with described fixture synchronization lifting.
Further, the clamping part of described fixture fixes non-graphic region, the edge part of described glass substrate.
Further, described supporting surface is identical with the shape of described glass substrate.
Further, the area of described supporting surface is not less than the sectional area of described glass substrate.
Further, described clamping part material is rubber.
Further, described sealing cavity includes that upper cover and pedestal, described pedestal are positioned at the bottom of described sealing cavity, described
Upper cover forms, with described pedestal Guan Bi, the cavity closed.
Further, described sealing cavity also includes that sealing ring, described sealing ring are positioned at the knot of described upper cover and described pedestal
Close position, for strengthening the sealing of described sealing cavity.
Further, described pedestal is provided with at least one pore, described sealing cavity by described pore with chamber outside take out
Air pump or inflator pump connect.
Beneficial effects of the present invention is as follows: fixture is fixing and elevating glass substrate makes glass substrate be in different stations,
Facilitate the handling of glass substrate；Seal cavity evacuation front jig and glass substrate is positioned over the smooth supporting surface of gripper shoe
On, contacting for face between supporting surface with glass substrate, glass substrate is sealing in cavity vacuum uniform force without local
Deformation, dried glass substrate uniform in color, yields is high.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
In having technology to describe, the required accompanying drawing used is briefly described, it should be apparent that, the accompanying drawing in describing below is only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to
Other obvious mode of texturing is obtained according to these accompanying drawings.
The structural representation of the substrate drying device that Fig. 1 provides for the embodiment of the present invention one.
The structural representation of the substrate drying device that Fig. 2 provides for the embodiment of the present invention two.
Fig. 3 is drying method for substrate flow chart.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Describe, it is clear that described embodiment is only a part of embodiment of the present invention rather than whole embodiments wholely.Based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under not making creative work premise
Embodiment, broadly falls into the scope of protection of the invention.
The structural representation of the substrate drying device that Fig. 1 provides for the embodiment of the present invention one, as it can be seen, seal cavity bag
Include sealing cavity, fixture and gripper shoe 20.Sealing cavity and include upper cover 102 and pedestal 104, pedestal 104 is positioned at and seals cavity
Bottom, upper cover 102 is fixed on pedestal 104, and upper cover 102 forms, with pedestal 104 Guan Bi, the cavity closed, and at pedestal
104 are provided with rubber seal 106 with the junction of upper cover 102, and sealing ring 106 is for preventing between pedestal 104 and upper cover 102
Combine leakage gas and cause the sealing sealing cavity to be not added with.In a kind of embodiment, upper cover 102 passes through with pedestal 104
Both are fixed together by bolt.Pedestal 104 is provided with two each and every one pores 108, outside sealing cavity is by this pore 108 and chamber
Air pump or inflator pump connect, and complete evacuation or the operation of inflation reply intracavity air pressure.Outlet 101 it is additionally provided with on base,
Moisture in discharging annular seal space body
Gripper shoe 20 is positioned at and seals the inside of cavity and be fixed on pedestal 104, and gripper shoe 20 is for by glass substrate 90
Placed thereon and the photoresistance 902 on annular seal space soma dry glass substrate 90 surface at vacuum state.Glass substrate 90 can be smooth
The supporting surface 202 being positioned over gripper shoe 20 on, the area of supporting surface 202 is more than the area of glass substrate 90, i.e. glass substrate
90 glass substrate 90 entirety when being positioned in gripper shoe 20 are placed on supporting surface 202, without being not affected by the portion that gripper shoe 20 supports
Point, the support force so making the regional of glass substrate 90 be subject to is uniform.In a kind of embodiment, supporting surface 202 and glass
The shape of substrate 90, size are the most identical, i.e. use supporting surface 202 area even support glass substrate 90 overall region of minimum.
Contact for face between supporting surface 202 with glass substrate 90, glass substrate 90 seal in cavity vacuum uniform force without
Local deformation, dried glass substrate 90 uniform in color, yields is high.
Fixture includes elevating lever 304 and clamping part 302, and clamping part 302 is fixed on the top of elevating lever 304, elevating lever 304
On the direction of supporting surface 202 being perpendicular to gripper shoe 20 movable, i.e. can lift adjustment be highly up and down.Clamping part 302 clamps
The seamed edge marginal portion of fixing glass substrate 90, in a kind of embodiment, glass substrate 90 is rectangle, the quantity of clamping part 302
Being four, clamping part 302 clamps the marginal portion of four seamed edges of glass substrate 90, i.e. non-graphic region simultaneously.Clamping part 302
Material be soft rubber, prevent stiff materials damage or scratch glass substrate 90.Present invention additionally comprises central supported
Bar 40, centre post 40 is installed on the pedestal 104 sealing cavity and passes the center of gripper shoe 20, centre post 40
Support glass substrate 90 centre, centre post 40 auxiliary clamp fix glass substrate 90 and with fixture synchronization lifting, protect
Hold glass substrate 90 to lift smoothly.
The station of fixture mainly has two: place station and handling station.When fixture is in placement station, it is clamped with glass
The fixture of substrate 90 and centre post 40 are Tong Bu reduced to the height identical with the supporting surface 202 of gripper shoe 20, by glass base
Plate 90 is positioned in gripper shoe 20；When fixture is in handling station, fixture and centre post 40 Tong Bu rise to highest point, fill
Glass substrate 90 is positioned over clamping part 302 and centre post 40 by mechanical hand by load process, and process of taking out will by mechanical hand
Clamping part 302 takes out with the fixing glass substrate 90 of centre post 40.Fixture also elevating glass fixing with centre post 40
Substrate 90 makes glass substrate 90 be in different stations, facilitates the handling of glass substrate 90, meets process requirements.
The structural representation of the substrate drying device that Fig. 2 provides for the embodiment of the present invention two, as it can be seen, with embodiment one
Difference be, substrate drying device also includes the multiple auxiliary support bars 50 being installed on pedestal 104.Auxiliary support bar 50
The bottom surface of the glass substrate 90 that support clamping part 302 is fixing and with fixture synchronization lifting, it is bigger that auxiliary support bar 50 is applicable to area
Glass substrate 90, the quantity of auxiliary support bar 50 is the most, the best to the support effect of glass substrate 90, prevents glass substrate 90
Area is too big or quality causes the most greatly only fixing, by fixture, the fixing glass substrate 90 realization lifting behaviour that its edge cannot consolidate
Make.
Fig. 3 is drying method for substrate flow chart, as it can be seen, glass substrate 90 drying steps is as follows:
Step 1, fixture receive the glass substrate 90 sent here downstream；
Fixture rises to extreme higher position, receives the surface sent here by mechanical hand and has been coated with the glass base of liquid photoresistance 902
Plate 90, the clamping part 302 of fixture is fixed the non-graphic region of glass substrate pane edge and makes glass substrate 90 be coated with photoresistance 902
Side upward, glass substrate 90 by fixture control can realize lifting action.In a kind of embodiment, revenue centre support bar
40 or the mid portion of auxiliary support bar 50 support glass substrate 90, auxiliary clamp fixes glass substrate 90, and can and folder
Tool synchronization realizes lifting action.
Glass substrate 90 is positioned in gripper shoe 20 by step 2, fixture；
Fixture relies on elevating lever 304 to be declined by glass substrate 90 height of clamping, and during decline, glass substrate 90 keeps
Level and coat photoresistance 902 face all the time steadily the most upward, after glass substrate 90 is placed in gripper shoe 20, clamping part 302 unclamps glass
Glass substrate 90, glass substrate 90 is freely positioned in gripper shoe 20 smoothly.
Step 3, sealing cavity evacuation；
Sealing cavity and connect air pump by pore 108, sealing cavity is evacuated to vacuum, glass substrate 90 surface by air pump
Photoresistance 902 be dried under vacuum conditions, in a kind of embodiment, base is additionally provided with outlet 101, is used for discharging annular seal space
Internal moisture.
Dry glass substrate 90 is taken out by step 4, mechanical hand.
After glass substrate 90 is dried, fixture again clamps the edge of glass substrate 90 and rises arrival extreme higher position,
Mechanical hand take out from fixture glass substrate 90 and glass substrate 90 is delivered to next processing procedure equipment in.
Fixture is fixing and elevating glass substrate 90 makes glass substrate 90 be in different stations, facilitates the dress of glass substrate 90
Unload；Seal cavity evacuation front jig to be positioned over by glass substrate 90 on smooth supporting surface 202, supporting surface 202 and glass base
Contacting for face between plate 90, glass substrate 90 is sealing in cavity vacuum uniform force without local deformation, dried glass
Glass substrate 90 uniform in color, yields is high.
Above disclosed it is only several preferred embodiment of the present invention, certainly can not limit the power of the present invention with this
Profit scope, one of ordinary skill in the art will appreciate that all or part of flow process realizing above-described embodiment, and weighs according to the present invention
Profit requires the equivalent variations made, and still falls within the scope that invention is contained.
Claims (10)
1. a substrate drying device, it is characterised in that described substrate drying device includes sealing cavity and being positioned at described sealing
The fixture of inside cavity and gripper shoe, described gripper shoe includes that plane supporting surface, described gripper shoe are fixed on described sealing
The bottom of cavity, described fixture includes elevating lever and is fixed on the clamping part at described elevating lever top, and described elevating lever is distributed in
Around described gripper shoe, described clamping part is fixed glass substrate and by described elevating lever, described glass substrate is declined placement
On described supporting surface, contact for face between described supporting surface with described glass substrate.
Substrate drying device the most according to claim 1, it is characterised in that described substrate drying device also includes that center is propped up
Strut, described centre post is installed on the bottom of described sealing cavity and passes the center of described gripper shoe, being used for supporting institute
State the fixing described glass substrate of clamping part centre and with described fixture synchronization lifting.
Substrate drying device the most according to claim 2, it is characterised in that described substrate drying device also includes being installed on
Multiple auxiliary support bars of the bottom of described sealing cavity, described auxiliary support bar supports the described glass that described clamping part is fixing
The bottom surface of substrate and with described fixture synchronization lifting.
Substrate drying device the most according to claim 1, it is characterised in that the clamping part of described fixture fixes described glass
Non-graphic region, the edge part of substrate.
Substrate drying device the most according to claim 1, it is characterised in that described supporting surface and the shape of described glass substrate
Shape is identical.
Substrate drying device the most according to claim 1, it is characterised in that the area of described supporting surface is not less than described glass
The sectional area of glass substrate.
Substrate drying device the most according to claim 1, it is characterised in that described clamping part material is rubber.
Substrate drying device the most according to claim 1, it is characterised in that described sealing cavity includes upper cover and pedestal,
Described pedestal is positioned at the bottom of described sealing cavity, and described upper cover forms, with described pedestal Guan Bi, the cavity closed.
Substrate drying device the most according to claim 8, it is characterised in that described sealing cavity also includes sealing ring, institute
State sealing ring and be positioned at the binding site of described upper cover and described pedestal, for strengthening the sealing of described sealing cavity.
Substrate drying device the most according to claim 8, it is characterised in that described pedestal is provided with at least one pore,
Described sealing cavity by described pore with chamber outside air pump or inflator pump be connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610628127.7A CN106249548A (en) | 2016-08-03 | 2016-08-03 | Substrate drying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610628127.7A CN106249548A (en) | 2016-08-03 | 2016-08-03 | Substrate drying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106249548A true CN106249548A (en) | 2016-12-21 |
Family
ID=57605892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610628127.7A Pending CN106249548A (en) | 2016-08-03 | 2016-08-03 | Substrate drying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106249548A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107193142A (en) * | 2017-07-19 | 2017-09-22 | 武汉华星光电技术有限公司 | Alignment film cure system |
| CN108731396A (en) * | 2018-05-07 | 2018-11-02 | 芜湖良匠机械制造有限公司 | A kind of heated air circulation type is used for the drying unit of glass substrate |
| CN109581709A (en) * | 2019-01-04 | 2019-04-05 | 深圳市华星光电技术有限公司 | Apparatus for baking |
| KR20230000785A (en) * | 2021-06-25 | 2023-01-03 | 주식회사 선반도체 | Dissolution precipitation apparatus for ions or salt components present on the substrate surface and dissolution precipitation method using the same |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1022370A (en) * | 1996-06-28 | 1998-01-23 | Dainippon Screen Mfg Co Ltd | Wafer processor |
| CN102934201A (en) * | 2009-12-18 | 2013-02-13 | Jet股份有限公司 | Substrate treatment device |
| CN103274604A (en) * | 2013-04-23 | 2013-09-04 | 北京京东方光电科技有限公司 | Substrate heating equipment |
| CN203799174U (en) * | 2014-04-01 | 2014-08-27 | 北京京东方显示技术有限公司 | Reduced-pressure drying device and array photolithographic process equipment |
-
2016
- 2016-08-03 CN CN201610628127.7A patent/CN106249548A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1022370A (en) * | 1996-06-28 | 1998-01-23 | Dainippon Screen Mfg Co Ltd | Wafer processor |
| CN102934201A (en) * | 2009-12-18 | 2013-02-13 | Jet股份有限公司 | Substrate treatment device |
| CN103274604A (en) * | 2013-04-23 | 2013-09-04 | 北京京东方光电科技有限公司 | Substrate heating equipment |
| CN203799174U (en) * | 2014-04-01 | 2014-08-27 | 北京京东方显示技术有限公司 | Reduced-pressure drying device and array photolithographic process equipment |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107193142A (en) * | 2017-07-19 | 2017-09-22 | 武汉华星光电技术有限公司 | Alignment film cure system |
| CN108731396A (en) * | 2018-05-07 | 2018-11-02 | 芜湖良匠机械制造有限公司 | A kind of heated air circulation type is used for the drying unit of glass substrate |
| CN108731396B (en) * | 2018-05-07 | 2020-06-16 | 芜湖良匠机械制造有限公司 | Heated air circulation type drying device for glass substrate |
| CN109581709A (en) * | 2019-01-04 | 2019-04-05 | 深圳市华星光电技术有限公司 | Apparatus for baking |
| CN109581709B (en) * | 2019-01-04 | 2021-07-06 | Tcl华星光电技术有限公司 | Baking device |
| KR20230000785A (en) * | 2021-06-25 | 2023-01-03 | 주식회사 선반도체 | Dissolution precipitation apparatus for ions or salt components present on the substrate surface and dissolution precipitation method using the same |
| KR102645023B1 (en) | 2021-06-25 | 2024-03-08 | 주식회사 선반도체 | Dissolution precipitation apparatus for ions or salt components present on the substrate surface and dissolution precipitation method using the same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106249548A (en) | Substrate drying device | |
| US7704348B2 (en) | Apparatus and method for fabricating bonded substrate | |
| US7364633B2 (en) | Device and method for fabricating liquid crystal display device | |
| US7980287B2 (en) | Adhesive chuck and substrate bonding apparatus | |
| JPS60111221A (en) | Method and device for charging liquid crystal | |
| TW200914920A (en) | Apparatus for manufacturing bonded substrate | |
| JP2003233080A (en) | Lcd bonding machine and method for fabricating lcd by using the same | |
| JP2007065521A (en) | Substrate laminating apparatus | |
| CN106914705B (en) | Blue film cutting process | |
| JP4150041B2 (en) | Bonded board manufacturing equipment | |
| JPH11214292A (en) | Processing apparatus | |
| KR20200052781A (en) | How to attach a film to a curved cover | |
| KR100781536B1 (en) | Apparatus and method for dispensing | |
| CN211868630U (en) | Film pasting equipment | |
| TWI644334B (en) | Apparatus and method for packaging dye-sensitized solar cell | |
| JP2007133145A (en) | Substrate bonding apparatus and substrate bonding method | |
| CN108382858B (en) | Method and device for correcting glass substrate | |
| JPH06333808A (en) | Thin film compression device and compression method | |
| JP4118922B2 (en) | Bonded substrate manufacturing apparatus and bonded substrate manufacturing method | |
| US7230670B2 (en) | Method for fabricating LCD | |
| JPH07148660A (en) | Wafer sticking method and wafer sticking device | |
| CN220804145U (en) | Clamp for gluing mask plate with extremely small size | |
| JP2004151161A (en) | Device for bonding liquid crystal substrate and method for manufacturing liquid crystal display device using the same | |
| JPH10296624A (en) | Method and device for affixing wafer to porous surface plate | |
| JPH10133188A (en) | Inspection stage for liquid crystal substrate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20161221 |